TWI557758B - Fe-Co Based Soft Magnetic Sputtering Target And Material - Google Patents
Fe-Co Based Soft Magnetic Sputtering Target And Material Download PDFInfo
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- TWI557758B TWI557758B TW104124609A TW104124609A TWI557758B TW I557758 B TWI557758 B TW I557758B TW 104124609 A TW104124609 A TW 104124609A TW 104124609 A TW104124609 A TW 104124609A TW I557758 B TWI557758 B TW I557758B
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Description
本創作關於一種鐵鈷基軟磁材料，尤指一種適用於磁記錄媒體之鐵鈷基軟磁材料；此外，本創作另關於一種用於形成前述鐵鈷基軟磁材料的鐵鈷基軟磁靶材。The present invention relates to an iron-cobalt-based soft magnetic material, in particular to an iron-cobalt-based soft magnetic material suitable for a magnetic recording medium; in addition, the present invention relates to an iron-cobalt-based soft magnetic target for forming the aforementioned iron-cobalt-based soft magnetic material.
近年來，隨著人們對於磁記錄媒體之資訊儲存容量的需求越來越高，如何提升磁記錄媒體的記錄品質一直是業者積極開發的研究課題。In recent years, as people's demand for information storage capacity of magnetic recording media has become higher and higher, how to improve the recording quality of magnetic recording media has been a research topic actively developed by the industry.
根據磁頭磁化的方向，現有技術之磁記錄媒體可區分為水平式磁記錄媒體及垂直式磁記錄媒體。以垂直式磁記錄媒體為例，其層狀結構由下至上包含有基板、附著層、軟磁層、晶種層、中間層、磁記錄層、覆蓋層以及潤滑層。The magnetic recording medium of the prior art can be classified into a horizontal magnetic recording medium and a vertical magnetic recording medium according to the direction of magnetization of the magnetic head. Taking a vertical magnetic recording medium as an example, the layered structure includes a substrate, an adhesion layer, a soft magnetic layer, a seed layer, an intermediate layer, a magnetic recording layer, a cover layer, and a lubricating layer from bottom to top.
所述之軟磁層可採用如直流濺鍍法、射頻濺鍍法或磁控濺鍍法等濺鍍一軟磁性合金靶材所形成；於現有技術之磁記錄媒體中，軟磁層的作用主要在於提升磁記錄層的熱穩定性、降低去磁場以及提升磁記錄媒體的寫入效率等。The soft magnetic layer can be formed by sputtering a soft magnetic alloy target such as DC sputtering, RF sputtering or magnetron sputtering; in the prior art magnetic recording medium, the soft magnetic layer mainly functions The thermal stability of the magnetic recording layer is improved, the demagnetization field is lowered, and the writing efficiency of the magnetic recording medium is improved.
現有技術之軟磁層多半以鐵鈷基為主要成分，另額外添加其他改質成分，以獲得預期之軟磁性。然而，現有技術之軟磁層的居禮溫度(Curie temperature)低於150°C，致使含有此種軟磁層的磁記錄媒體之操作溫度因而受到限制；又，由於現有技術之軟磁層的飽和磁化量(saturation magnetization，Bs)受熱後易發生顯著的弱化情形，甚而影響含有此種軟磁層的磁記錄媒體之記錄品質。Most of the prior art soft magnetic layers are mainly composed of iron and cobalt groups, and other modified components are additionally added to obtain the desired soft magnetic properties. However, the Curie temperature of the prior art soft magnetic layer is lower than 150 ° C, so that the operating temperature of the magnetic recording medium containing such a soft magnetic layer is thus limited; and, due to the saturation magnetization of the soft magnetic layer of the prior art (saturation magnetization, Bs) is susceptible to significant weakening after heating, and even affects the recording quality of magnetic recording media containing such a soft magnetic layer.
有鑒於現有技術所面臨之缺陷，本創作之目的在於提高鐵鈷基軟磁材料的居禮溫度，同時降低鐵鈷基軟磁材料之飽和磁化量因受熱而被弱化之程度，並確保鐵鈷基軟磁材料能具備應用至磁記錄媒體所需之飽和磁化量的特性規格。In view of the defects faced by the prior art, the purpose of the present invention is to increase the temperature of the iron-cobalt-based soft magnetic material, and at the same time reduce the degree of saturation magnetization of the iron-cobalt-based soft magnetic material due to heat, and ensure the iron-cobalt soft magnetic The material can have a characteristic specification of the amount of saturation magnetization required for application to a magnetic recording medium.
為達成前述目的，本創作提供一種鐵鈷基軟磁靶材，其包含鐵(Fe)、鈷(Co)、硼(B)、第一金屬及第二金屬，第一金屬有別於第二金屬，第一金屬係選自於由鉭(Ta)、鈮(Nb)、鉬(Mo)及鎢(W)所組成之群組，第二金屬為鉬或鎢；其中硼佔整體鐵鈷基軟磁靶材之含量係大於或等於10原子百分比 (atomic percentage, at%)且小於或等於15 at%，第一金屬與第二金屬佔整體鐵鈷基軟磁靶材之含量和係大於或等於10 at%且小於或等於14 at%。In order to achieve the above object, the present invention provides an iron-cobalt-based soft magnetic target comprising iron (Fe), cobalt (Co), boron (B), a first metal and a second metal, the first metal being different from the second metal The first metal is selected from the group consisting of tantalum (Ta), niobium (Nb), molybdenum (Mo), and tungsten (W), and the second metal is molybdenum or tungsten; wherein boron accounts for the entire iron-cobalt-based soft magnetic The content of the target is greater than or equal to 10 atomic percent (at%) and less than or equal to 15 at%, and the content of the first metal and the second metal to the integral iron-cobalt-based soft magnetic target is greater than or equal to 10 at % and less than or equal to 14 at%.
依據本創作，藉由在鐵鈷基軟磁靶材之成分種類及其含量，能有助於調控整體鐵鈷基軟磁靶材的相組成之分佈均勻性，進而提升此種鐵鈷基軟磁靶材所濺鍍而成之鐵鈷基軟磁材料的居禮溫度、熱穩定性及分佈均勻性，並確保所濺鍍而成之鐵鈷基軟磁材料能具備應用至磁記錄媒體所需之飽和磁化量的特性規格。According to the present creation, the composition and content of the iron-cobalt-based soft magnetic target can help to regulate the uniformity of the phase composition of the whole iron-cobalt-based soft magnetic target, thereby improving the iron-cobalt-based soft magnetic target. The sputtered iron-cobalt-based soft magnetic material has a temperature, thermal stability and uniformity of distribution, and ensures that the sputtered iron-cobalt-based soft magnetic material can have the saturation magnetization required for application to a magnetic recording medium. Characteristic specifications.
較佳的，該第一金屬佔整體鐵鈷基軟磁靶材之含量係小於該第二金屬佔整體鐵鈷基軟磁靶材之含量。據此，該鐵鈷基軟磁靶材能具有較均勻分佈之相組成，故能有利於避免濺鍍製程中發生濺鍍不均勻之問題，進而確保所濺鍍而成之鐵鈷基軟磁材料的相組成之分佈均勻性。Preferably, the content of the first metal to the integral iron-cobalt-based soft magnetic target is less than the content of the second metal to the integral iron-cobalt-based soft magnetic target. Accordingly, the iron-cobalt-based soft magnetic target can have a relatively uniform phase composition, so that it can be avoided to avoid the problem of uneven sputtering in the sputtering process, thereby ensuring the sputtering of the iron-cobalt-based soft magnetic material. The uniformity of the distribution of the phase composition.
較佳的，該第一金屬佔整體鐵鈷基軟磁靶材之含量係小於該第二金屬佔整體鐵鈷基軟磁靶材之含量。Preferably, the content of the first metal to the integral iron-cobalt-based soft magnetic target is less than the content of the second metal to the integral iron-cobalt-based soft magnetic target.
較佳的，硼佔整體鐵鈷基軟磁靶材之含量係大於12原子百分比且小於或等於15 at%，且該第二金屬佔整體鐵鈷基軟磁靶材之含量以及該第一金屬佔整體鐵鈷基軟磁靶材之含量的差值大於3 at%以上。更佳的，該第二金屬佔整體鐵鈷基軟磁靶材之含量以及該第一金屬佔整體鐵鈷基軟磁靶材之含量的差值大於7.5 at%以上。Preferably, the boron content of the whole iron-cobalt-based soft magnetic target is greater than 12 atomic percent and less than or equal to 15 at%, and the second metal accounts for the content of the integral iron-cobalt-based soft magnetic target and the first metal accounts for the whole The difference between the content of the iron-cobalt-based soft magnetic target is more than 3 at%. More preferably, the difference between the content of the second metal in the overall iron-cobalt-based soft magnetic target and the content of the first metal in the overall iron-cobalt-based soft magnetic target is more than 7.5 at%.
較佳的，鐵佔整體鐵鈷基軟磁靶材之含量係高於鈷佔整體鐵鈷基軟磁靶材之含量；更佳的，鐵佔整體鐵鈷基軟磁靶材之含量相對於鈷佔整體鐵鈷基軟磁靶材之含量的比值介於1.2至3.0之間；再更佳的，鐵佔整體鐵鈷基軟磁靶材之含量相對於鈷佔整體鐵鈷基軟磁靶材之含量的比值介於1.5至2.5之間。Preferably, the content of iron as a whole iron-cobalt-based soft magnetic target is higher than the content of cobalt as a whole of the iron-cobalt-based soft magnetic target; more preferably, the iron accounts for the total content of the iron-cobalt-based soft magnetic target relative to the cobalt as a whole. The ratio of the content of the iron-cobalt-based soft magnetic target is between 1.2 and 3.0; more preferably, the ratio of the iron to the content of the whole iron-cobalt-based soft magnetic target relative to the content of the cobalt-based total iron-cobalt-based soft magnetic target Between 1.5 and 2.5.
較佳的，鐵佔整體鐵鈷基軟磁靶材之含量係大於或等於45 at%且小於或等於55 at%，鈷佔整體鐵鈷基軟磁靶材之含量係大於或等於20 at%且小於或等於35 at%。更佳的，鈷佔整體鐵鈷基軟磁靶材之含量係大於或等於25 at%且小於或等於30 at%。Preferably, the content of iron as a whole iron-cobalt-based soft magnetic target is greater than or equal to 45 at% and less than or equal to 55 at%, and the content of cobalt as a whole iron-cobalt-based soft magnetic target is greater than or equal to 20 at% and less than Or equal to 35 at%. More preferably, the cobalt accounts for greater than or equal to 25 at% and less than or equal to 30 at% of the total iron-cobalt-based soft magnetic target.
較佳的，該第一金屬佔整體鐵鈷基軟磁靶材之含量係大於或等於1 at%且小於或等於6 at%，第二金屬佔整體鐵鈷基軟磁靶材之含量係大於或等於7 at%且小於或等於13 at%；更佳的，該第一金屬佔整體鐵鈷基軟磁靶材之含量係大於或等於1.5 at%且小於或等於5 at%，第二金屬佔整體鐵鈷基軟磁靶材之含量係大於或等於8 at%且小於或等於12 at%；再更佳的，該第一金屬佔整體鐵鈷基軟磁靶材之含量係大於或等於1.5 at%且小於或等於4 at%，第二金屬佔整體鐵鈷基軟磁靶材之含量係大於或等於9 at%且小於或等於10 at%。Preferably, the content of the first metal to the integral iron-cobalt-based soft magnetic target is greater than or equal to 1 at% and less than or equal to 6 at%, and the content of the second metal to the integral iron-cobalt-based soft magnetic target is greater than or equal to 7 at% and less than or equal to 13 at%; more preferably, the first metal accounts for greater than or equal to 1.5 at% and less than or equal to 5 at% of the total iron-cobalt-based soft magnetic target, and the second metal accounts for the total iron The content of the cobalt-based soft magnetic target is greater than or equal to 8 at% and less than or equal to 12 at%; and more preferably, the content of the first metal to the integral iron-cobalt-based soft magnetic target is greater than or equal to 1.5 at% and less than Or equal to 4 at%, the content of the second metal to the integral iron-cobalt-based soft magnetic target is greater than or equal to 9 at% and less than or equal to 10 at%.
較佳的，該第一金屬可為鉭，鉭佔整體鐵鈷基軟磁靶材之含量係大於或等於1 at%且小於或等於5 at%；或者，該第一金屬可為鈮，鈮佔整體鐵鈷基軟磁靶材之含量係大於或等於1 at%且小於或等於5 at%；或者，該第一金屬可為鉬，鉬佔整體鐵鈷基軟磁靶材之含量係大於或等於1 at%且小於或等於5 at%；該第一金屬可為鎢，鎢佔整體鐵鈷基軟磁靶材之含量係大於或等於1 at%且小於或等於5 at%。更佳的，該第一金屬可為鉭，鉭佔整體鐵鈷基軟磁靶材之含量係大於或等於1.5 at%且小於或等於4 at%；或者，該第一金屬可為鈮，鈮佔整體鐵鈷基軟磁靶材之含量係大於或等於1.5 at%且小於或等於4 at%；或者，該第一金屬可為鉬，鉬佔整體鐵鈷基軟磁靶材之含量係大於或等於1.5 at%且小於或等於4 at%；該第一金屬可為鎢，鎢佔整體鐵鈷基軟磁靶材之含量係大於或等於1.5 at%且小於或等於4 at%。Preferably, the first metal may be ruthenium, and the content of the ruthenium as a whole iron-cobalt-based soft magnetic target is greater than or equal to 1 at% and less than or equal to 5 at%; or the first metal may be 铌, 铌The content of the whole iron-cobalt-based soft magnetic target is greater than or equal to 1 at% and less than or equal to 5 at%; or, the first metal may be molybdenum, and the content of molybdenum as a whole iron-cobalt-based soft magnetic target is greater than or equal to 1 At% and less than or equal to 5 at%; the first metal may be tungsten, and the content of tungsten as a whole iron-cobalt-based soft magnetic target is greater than or equal to 1 at% and less than or equal to 5 at%. More preferably, the first metal may be ruthenium, and the content of the whole iron-cobalt-based soft magnetic target is greater than or equal to 1.5 at% and less than or equal to 4 at%; or the first metal may be 铌, 铌The content of the integral iron-cobalt-based soft magnetic target is greater than or equal to 1.5 at% and less than or equal to 4 at%; or, the first metal may be molybdenum, and the content of molybdenum as a whole iron-cobalt-based soft magnetic target is greater than or equal to 1.5. At% and less than or equal to 4 at%; the first metal may be tungsten, and the content of tungsten as a whole iron-cobalt-based soft magnetic target is greater than or equal to 1.5 at% and less than or equal to 4 at%.
較佳的，該第二金屬為鉬，鉬佔整體鐵鈷基軟磁靶材之含量係大於或等於8 at%且小於或等於12 at%；或者，該第二金屬為鎢，鎢佔整體鐵鈷基軟磁靶材之含量係大於或等於8 at%且小於或等於12 at%。更佳的，該第二金屬為鉬，鉬佔整體鐵鈷基軟磁靶材之含量係大於或等於9 at%且小於或等於10 at%；或者，該第二金屬為鎢，鎢佔整體鐵鈷基軟磁靶材之含量係大於或等於9 at%且小於或等於10 at%。Preferably, the second metal is molybdenum, and the content of the molybdenum as a whole iron-cobalt-based soft magnetic target is greater than or equal to 8 at% and less than or equal to 12 at%; or the second metal is tungsten, and the tungsten accounts for the whole iron. The content of the cobalt-based soft magnetic target is greater than or equal to 8 at% and less than or equal to 12 at%. More preferably, the second metal is molybdenum, and the content of the molybdenum accounts for the entire iron-cobalt-based soft magnetic target is greater than or equal to 9 at% and less than or equal to 10 at%; or the second metal is tungsten, and the tungsten accounts for the whole iron. The content of the cobalt-based soft magnetic target is greater than or equal to 9 at% and less than or equal to 10 at%.
較佳的，該第一金屬為鈮，第二金屬為鎢，且鈮佔整體鐵鈷基軟磁靶材之含量係大於或等於1.5 at%且小於或等於4 at%，鎢佔整體鐵鈷基軟磁靶材之含量係大於或等於9 at%且小於或等於11 at%；更佳的，鎢佔整體鐵鈷基軟磁靶材之含量係大於或等於9 at%且小於或等於9.5 at%。Preferably, the first metal is ruthenium, the second metal is tungsten, and the content of ruthenium as a whole iron-cobalt-based soft magnetic target is greater than or equal to 1.5 at% and less than or equal to 4 at%, and tungsten accounts for the entire iron-cobalt group. The content of the soft magnetic target is greater than or equal to 9 at% and less than or equal to 11 at%; more preferably, the content of tungsten as a whole of the iron-cobalt-based soft magnetic target is greater than or equal to 9 at% and less than or equal to 9.5 at%.
為達成前述目的，本創作另提供一種鐵鈷基軟磁材料，其包含鐵、鈷、硼、第一金屬及第二金屬，第一金屬有別於第二金屬，第一金屬係選自於由鉭、鈮、鉬及鎢所組成之群組，第二金屬為鉬或鎢；其中硼佔整體鐵鈷基軟磁材料之含量係大於或等於10 at%且小於或等於15 at%，第一金屬與第二金屬佔整體鐵鈷基軟磁材料之含量和係大於或等於10 at%且小於或等於14 at%。In order to achieve the foregoing object, the present invention further provides an iron-cobalt-based soft magnetic material comprising iron, cobalt, boron, a first metal and a second metal, the first metal being different from the second metal, the first metal being selected from a group consisting of ruthenium, osmium, molybdenum and tungsten, the second metal being molybdenum or tungsten; wherein the boron is in the total iron-cobalt-based soft magnetic material content of greater than or equal to 10 at% and less than or equal to 15 at%, the first metal The content of the iron-cobalt-based soft magnetic material with the second metal is greater than or equal to 10 at% and less than or equal to 14 at%.
依據本創作，藉由在鐵鈷基軟磁材料之成分種類及其含量，能具體令鐵鈷基軟磁材料同時符合居禮溫度大於或等於200°C、飽和磁化量降低率小於或等於20%以及飽和磁化量大於或等於500 emu/cc且小於或等於750 emu/cc等特性規格。According to the present invention, by the composition and content of the iron-cobalt-based soft magnetic material, it is possible to specifically make the iron-cobalt-based soft magnetic material simultaneously satisfy the salient temperature of 200 ° C or higher, the saturation magnetization reduction rate is less than or equal to 20%, and The saturation magnetization is greater than or equal to 500 emu/cc and less than or equal to 750 emu/cc.
較佳的，該鐵鈷基軟磁材料之居禮溫度係大於或等於200°C且小於或等於400°C；更佳的，該鐵鈷基軟磁材料之居禮溫度係大於或等於200°C且小於或等於350°C；再更佳的，該鐵鈷基軟磁材料之居禮溫度係大於或等於200°C且小於或等於310°C；故，當此種鐵鈷基軟磁材料應用於磁記錄媒體時，可令該磁記錄媒體可適用於較高的操作溫度範圍，進而提升含有此種鐵鈷基軟磁材料之磁記錄媒體的應用性。Preferably, the temperature of the iron-cobalt-based soft magnetic material is greater than or equal to 200 ° C and less than or equal to 400 ° C; more preferably, the iron-cobalt soft magnetic material has a salient temperature greater than or equal to 200 ° C And less than or equal to 350 ° C; more preferably, the iron-cobalt-based soft magnetic material has a salient temperature greater than or equal to 200 ° C and less than or equal to 310 ° C; therefore, when such iron-cobalt-based soft magnetic material is applied In the case of a magnetic recording medium, the magnetic recording medium can be applied to a higher operating temperature range, thereby improving the applicability of a magnetic recording medium containing such an iron-cobalt-based soft magnetic material.
較佳的，該鐵鈷基軟磁材料之飽和磁化量係大於或等於540 emu/cc且小於或等於750 emu/cc；故，含有此種鐵鈷基軟磁材料的磁記錄媒體可具備較佳的硬碟寫入能力(writability)。Preferably, the iron-cobalt-based soft magnetic material has a saturation magnetization amount of 540 emu/cc or more and 750 emu/cc or less; therefore, a magnetic recording medium containing such an iron-cobalt-based soft magnetic material may have a better Hard disk writeability (writability).
較佳的，該鐵鈷基軟磁材料之飽和磁化量降低率係大於或等於5%且小於或等於20%；更具體的，該鐵鈷基軟磁材料之飽和磁化量降低率係大於或等於8%且小於或等於20%；故，相較於現有技術之軟磁層材料，此種鐵鈷基軟磁材料之飽和磁化量較不會因受熱而被顯著弱化，亦即，本創作之鐵鈷基軟磁材料能具備較佳的熱穩定性。Preferably, the reduction ratio of the saturation magnetization of the iron-cobalt-based soft magnetic material is 5% or more and 20% or less; more specifically, the reduction ratio of the saturation magnetization of the iron-cobalt-based soft magnetic material is greater than or equal to 8 % and less than or equal to 20%; therefore, compared with the soft magnetic layer material of the prior art, the saturation magnetization of the iron-cobalt-based soft magnetic material is not significantly weakened by heat, that is, the iron-cobalt base of the present invention Soft magnetic materials can have better thermal stability.
較佳的，該第一金屬佔整體鐵鈷基軟磁材料之含量係小於該第二金屬佔整體鐵鈷基軟磁材料之含量。Preferably, the content of the first metal to the integral iron-cobalt-based soft magnetic material is less than the content of the second metal to the integral iron-cobalt-based soft magnetic material.
較佳的，硼佔整體鐵鈷基軟磁材料之含量係大於12原子百分比且小於或等於15 at%，且該第二金屬佔整體鐵鈷基軟磁材料之含量以及該第一金屬佔整體鐵鈷基軟磁材料之含量的差值大於3 at%以上。更佳的，該第二金屬佔整體鐵鈷基軟磁材料之含量以及該第一金屬佔整體鐵鈷基軟磁材料之含量的差值大於7.5 at%以上。據此，該鐵鈷基軟磁材料之飽和磁化量降低率可進一步降低至15%以下。Preferably, boron accounts for more than 12 atomic percent and less than or equal to 15 at% of the total iron-cobalt-based soft magnetic material, and the second metal accounts for the content of the integral iron-cobalt-based soft magnetic material and the first metal accounts for the entire iron-cobalt The difference in the content of the soft magnetic material is greater than 3 at%. More preferably, the difference between the content of the second metal in the overall iron-cobalt-based soft magnetic material and the content of the first metal in the overall iron-cobalt-based soft magnetic material is more than 7.5 at%. Accordingly, the rate of decrease in the saturation magnetization of the iron-cobalt-based soft magnetic material can be further reduced to 15% or less.
較佳的，鐵佔整體鐵鈷基軟磁材料之含量係高於鈷佔整體鐵鈷基軟磁材料之含量；更佳的，鐵佔整體鐵鈷基軟磁材料之含量相對於鈷佔整體鐵鈷基軟磁材料之含量的比值介於1.2至3.0之間；再更佳的，鐵佔整體鐵鈷基軟磁材料之含量相對於鈷佔整體鐵鈷基軟磁材料之含量的比值介於1.5至2.5之間。Preferably, the content of iron as a whole of the iron-cobalt-based soft magnetic material is higher than the content of cobalt as a whole of the iron-cobalt-based soft magnetic material; more preferably, the iron accounts for the total content of the iron-cobalt-based soft magnetic material relative to the cobalt as a whole. The ratio of the content of the soft magnetic material is between 1.2 and 3.0; more preferably, the ratio of the iron to the total content of the iron-cobalt-based soft magnetic material relative to the content of the cobalt-based total iron-cobalt-based soft magnetic material is between 1.5 and 2.5. .
較佳的，鐵佔整體鐵鈷基軟磁材料之含量係大於或等於45 at%且小於或等於55 at%，鈷佔整體鐵鈷基軟磁材料之含量係大於或等於20 at%且小於或等於35 at%。更佳的，鈷佔整體鐵鈷基軟磁材料之含量係大於或等於25 at%且小於或等於30 at%。Preferably, the content of iron as a whole iron-cobalt-based soft magnetic material is greater than or equal to 45 at% and less than or equal to 55 at%, and the content of cobalt as a whole of the iron-cobalt-based soft magnetic material is greater than or equal to 20 at% and less than or equal to 35 at%. More preferably, the cobalt is present in an amount of greater than or equal to 25 at% and less than or equal to 30 at% of the total iron-cobalt-based soft magnetic material.
較佳的，該第一金屬佔整體鐵鈷基軟磁材料之含量係大於或等於1 at%且小於或等於6 at%，第二金屬佔整體鐵鈷基軟磁材料之含量係大於或等於7 at%且小於或等於13 at%；更佳的，該第一金屬佔整體鐵鈷基軟磁材料之含量係大於或等於1 at%且小於或等於5 at%，第二金屬佔整體鐵鈷基軟磁材料之含量係大於或等於8 at%且小於或等於12 at%；再更佳的，該第一金屬佔整體鐵鈷基軟磁材料之含量係大於或等於1.5 at%且小於或等於4 at%，第二金屬佔整體鐵鈷基軟磁材料之含量係大於或等於9 at%且小於或等於10 at%。Preferably, the content of the first metal to the integral iron-cobalt-based soft magnetic material is greater than or equal to 1 at% and less than or equal to 6 at%, and the content of the second metal to the integral iron-cobalt-based soft magnetic material is greater than or equal to 7 at % and less than or equal to 13 at%; more preferably, the first metal accounts for greater than or equal to 1 at% and less than or equal to 5 at% of the total iron-cobalt-based soft magnetic material, and the second metal accounts for the entire iron-cobalt-based soft magnetic The content of the material is greater than or equal to 8 at% and less than or equal to 12 at%; and more preferably, the first metal accounts for greater than or equal to 1.5 at% and less than or equal to 4 at% of the total iron-cobalt-based soft magnetic material. The second metal accounts for greater than or equal to 9 at% and less than or equal to 10 at% of the total iron-cobalt-based soft magnetic material.
較佳的，該第一金屬可為鉭，鉭佔整體鐵鈷基軟磁材料之含量係大於或等於1 at%且小於或等於5 at%；或者，該第一金屬可為鈮，鈮佔整體鐵鈷基軟磁材料之含量係大於或等於1 at%且小於或等於5 at%；或者，該第一金屬可為鉬，鉬佔整體鐵鈷基軟磁材料之含量係大於或等於1 at%且小於或等於5 at%；該第一金屬可為鎢，鎢佔整體鐵鈷基軟磁材料之含量係大於或等於1 at%且小於或等於5 at%。更佳的，該第一金屬可為鉭，鉭佔整體鐵鈷基軟磁材料之含量係大於或等於1.5 at%且小於或等於4 at%；或者，該第一金屬可為鈮，鈮佔整體鐵鈷基軟磁材料之含量係大於或等於1.5 at%且小於或等於4 at%；或者，該第一金屬可為鉬，鉬佔整體鐵鈷基軟磁材料之含量係大於或等於1.5 at%且小於或等於4 at%；該第一金屬可為鎢，鎢佔整體鐵鈷基軟磁材料之含量係大於或等於1.5 at%且小於或等於4 at%。Preferably, the first metal may be tantalum, and the content of the whole iron-cobalt-based soft magnetic material is greater than or equal to 1 at% and less than or equal to 5 at%; or the first metal may be tantalum, and the niobium is integral. The content of the iron-cobalt-based soft magnetic material is greater than or equal to 1 at% and less than or equal to 5 at%; or the first metal may be molybdenum, and the content of molybdenum as a whole of the iron-cobalt-based soft magnetic material is greater than or equal to 1 at% and Less than or equal to 5 at%; the first metal may be tungsten, and the content of tungsten as a whole iron-cobalt-based soft magnetic material is greater than or equal to 1 at% and less than or equal to 5 at%. More preferably, the first metal may be ruthenium, and the content of the whole iron-cobalt-based soft magnetic material is greater than or equal to 1.5 at% and less than or equal to 4 at%; or the first metal may be 铌, 铌 constitutes the whole The content of the iron-cobalt-based soft magnetic material is greater than or equal to 1.5 at% and less than or equal to 4 at%; or, the first metal may be molybdenum, and the content of molybdenum as a whole of the iron-cobalt-based soft magnetic material is greater than or equal to 1.5 at% and Less than or equal to 4 at%; the first metal may be tungsten, and the content of tungsten as a whole iron-cobalt-based soft magnetic material is greater than or equal to 1.5 at% and less than or equal to 4 at%.
較佳的，該第二金屬為鉬，鉬佔整體鐵鈷基軟磁材料之含量係大於或等於8 at%且小於或等於12 at%；或者，該第二金屬為鎢，鎢佔整體鐵鈷基軟磁材料之含量係大於或等於8 at%且小於或等於12 at%。更佳的，該第二金屬為鉬，鉬佔整體鐵鈷基軟磁材料之含量係大於或等於9 at%且小於或等於10 at%；或者，該第二金屬為鎢，鎢佔整體鐵鈷基軟磁材料之含量係大於或等於9 at%且小於或等於10 at%。Preferably, the second metal is molybdenum, and the content of molybdenum as a whole of the iron-cobalt-based soft magnetic material is greater than or equal to 8 at% and less than or equal to 12 at%; or the second metal is tungsten, and the tungsten accounts for the whole iron and cobalt. The content of the base soft magnetic material is greater than or equal to 8 at% and less than or equal to 12 at%. More preferably, the second metal is molybdenum, and the content of the molybdenum accounts for the whole iron-cobalt-based soft magnetic material is greater than or equal to 9 at% and less than or equal to 10 at%; or the second metal is tungsten, and the tungsten accounts for the whole iron and cobalt. The content of the base soft magnetic material is greater than or equal to 9 at% and less than or equal to 10 at%.
較佳的，該第一金屬為鈮，第二金屬為鎢，且鈮佔整體鐵鈷基軟磁材料之含量係大於或等於1.5 at%且小於或等於4 at%，鎢佔整體鐵鈷基軟磁材料之含量係大於或等於9 at%且小於或等於11 at%；更佳的，鎢佔整體鐵鈷基軟磁材料之含量係大於或等於9 at%且小於或等於9.5 at%。據此，該鐵鈷基軟磁材料之居禮溫度可提高至大於或等於250°C，更具體而言，該鐵鈷基軟磁材料之居禮溫度可提高至大於或等於250°C且小於或等於310°C。Preferably, the first metal is tantalum, the second metal is tungsten, and the content of niobium in the whole iron-cobalt-based soft magnetic material is greater than or equal to 1.5 at% and less than or equal to 4 at%, and the tungsten accounts for the whole iron-cobalt-based soft magnetic The content of the material is greater than or equal to 9 at% and less than or equal to 11 at%; more preferably, the content of tungsten as a whole of the iron-cobalt-based soft magnetic material is greater than or equal to 9 at% and less than or equal to 9.5 at%. Accordingly, the temperature of the iron-cobalt-based soft magnetic material can be increased to 250 ° C or more, and more specifically, the iron-cobalt-based soft magnetic material can be raised to a temperature greater than or equal to 250 ° C and less than or Is equal to 310 ° C.
較佳的，所述之鐵鈷基軟磁材料能兼具所需之非晶質性及磁特性，使該鐵鈷基軟磁材料可應用於磁記錄媒體中，並且作為一軟磁層。Preferably, the iron-cobalt-based soft magnetic material can have both desired amorphous properties and magnetic properties, so that the iron-cobalt-based soft magnetic material can be applied to a magnetic recording medium and serve as a soft magnetic layer.
較佳的，所述之鐵鈷基軟磁材料可經由濺鍍前述鐵鈷基軟磁靶材所製得，可選用之濺鍍方法例如：直流濺鍍法、射頻濺鍍法或磁控濺鍍法等，但並非僅限於此。Preferably, the iron-cobalt-based soft magnetic material can be obtained by sputtering the aforementioned iron-cobalt-based soft magnetic target, and the sputtering method can be selected, for example, direct current sputtering, radio frequency sputtering or magnetron sputtering. Etc., but not limited to this.
為驗證鐵鈷基軟磁材料之組成對其分佈均勻性、居禮溫度、磁特性及熱穩定性之影響，以下列舉數種具有不同組成之鐵鈷基軟磁靶材及利用此種鐵鈷基軟磁靶材所濺鍍而成之具有不同組成之鐵鈷基軟磁材料作為例示，說明本創作之實施方式；熟習此技藝者可經由本說明書之內容輕易地了解本創作所能達成之優點與功效，並且於不悖離本創作之精神下進行各種修飾與變更，以施行或應用本創作之內容。In order to verify the influence of the composition of the iron-cobalt-based soft magnetic material on its distribution uniformity, salient temperature, magnetic properties and thermal stability, several iron-cobalt-based soft magnetic targets with different compositions are listed below and the iron-cobalt-based soft magnetic is utilized. The iron-cobalt-based soft magnetic material having different compositions sputtered by the target is exemplified to illustrate the implementation manner of the present invention; those skilled in the art can easily understand the advantages and effects of the present invention through the contents of the present specification. And in the spirit of this creation, various modifications and changes are made to implement or apply the content of this creation.
實施例Example 11 至to 55 及and 77 至to 99 ：鐵鈷基軟磁靶材: iron cobalt based soft magnetic target
依據如下表1所示之鐵鈷基軟磁靶材的組成，秤取並混合適量的鐵、鈷、硼、第一金屬及第二金屬等原料，利用真空感應熔煉法，於4×10 -2托耳之真空環境、1600°C之澆溫以及持溫高於澆溫100°C之反應條件下，形成合金錠，並進行後續的線切割與電腦數值控制(computer numerical control, CNC)車床加工，完成實施例1至5及7至9之鐵鈷基軟磁靶材的製備。 According to the composition of the iron-cobalt-based soft magnetic target shown in Table 1 below, the appropriate amount of iron, cobalt, boron, the first metal and the second metal are taken and mixed, and the vacuum induction melting method is used at 4×10 -2 . Under the vacuum environment of Torr, the pouring temperature of 1600 °C and the reaction temperature of 100 °C above the temperature, the alloy ingot is formed, and the subsequent wire cutting and computer numerical control (CNC) lathe processing The preparation of the iron-cobalt-based soft magnetic targets of Examples 1 to 5 and 7 to 9 was completed.
如下表1所示，實施例1至5及7至9之鐵鈷基軟磁靶材的組成係由如aFe-bCo-cB-dM1-eM2之通式所示；a、b、c、d、e依序代表鐵、鈷、硼、第一金屬(M1)及第二金屬(M2)各成分相對於鐵鈷基軟磁靶材之原子總數的含量比例，其單位為原子百分比。於實施例1至3之鐵鈷基軟磁靶材中，第一金屬為鈮，第二金屬為鎢；於實施例4及5之鐵鈷基軟磁靶材中，第一金屬為鈮，第二金屬為鉬；於實施例7之鐵鈷基軟磁靶材中，第一金屬為鉭，第二金屬為鉬；於實施例8及9之鐵鈷基軟磁靶材中，第一金屬為鎢，第二金屬為鉬。As shown in Table 1 below, the compositions of the iron-cobalt-based soft magnetic targets of Examples 1 to 5 and 7 to 9 are represented by the general formula of aFe-bCo-cB-dM1-eM2; a, b, c, d, e sequentially represents the content ratio of each component of iron, cobalt, boron, first metal (M1) and second metal (M2) to the total number of atoms of the iron-cobalt-based soft magnetic target, and the unit is atomic percentage. In the iron-cobalt-based soft magnetic targets of Examples 1 to 3, the first metal is ruthenium and the second metal is tungsten; in the iron-cobalt-based soft magnetic targets of Examples 4 and 5, the first metal is ruthenium, the second The metal is molybdenum; in the iron-cobalt-based soft magnetic target of embodiment 7, the first metal is ruthenium and the second metal is molybdenum; in the iron-cobalt-based soft magnetic targets of Examples 8 and 9, the first metal is tungsten. The second metal is molybdenum.
實施例Example 66 ：鐵鈷基軟磁靶材: iron cobalt based soft magnetic target
依據如下表1所示之鐵鈷基軟磁靶材的組成，秤取並混合適量的鐵、鈷、硼、鈮及鉬等原料，利用粉末冶金法，於1600°C之霧化溫度下進行霧化噴粉程序，再採用滾動混粉機進行混粉，並以篩網進行過篩，得到平均粒徑約125微米的原料合金粉末。According to the composition of the iron-cobalt-based soft magnetic target shown in Table 1 below, the appropriate amount of iron, cobalt, boron, bismuth and molybdenum are weighed and mixed, and the powder is atomized at a atomization temperature of 1600 ° C by powder metallurgy. The powder spraying procedure is carried out, and then the powder is mixed by a rolling mixer, and sieved by a sieve to obtain a raw material alloy powder having an average particle diameter of about 125 μm.
接著，將前述原料合金粉末均勻充填於石墨模具中，於4×10 -4托耳之真空環境中，以1100°C之溫度以及323巴之壓力下，持續燒結而獲得初胚，並進行後續的線切割與電腦數值控制車床加工，製得實施例6之鐵鈷基軟磁靶材的製備。 Then, the raw material alloy powder is uniformly filled in a graphite mold, and the initial embryo is obtained by continuous sintering in a vacuum environment of 4×10 −4 Torr at a temperature of 1100° C. and a pressure of 323 bar, and is followed by The wire cutting and computer numerical control lathe processing produced the preparation of the iron-cobalt-based soft magnetic target of Example 6.
如下表1所示，實施例6之鐵鈷基軟磁靶材的組成係由如aFe-bCo-cB-dM1-eM2之通式所示；a、b、c、d、e依序代表鐵、鈷、硼、M1及M2各成分相對於鐵鈷基軟磁靶材之原子總數的含量比例，其單位為原子百分比；其中，M1為鈮，M2為鉬。 表1：實施例1至9與比較例1至9之鐵鈷基軟磁靶材之組成及其針狀微結構之最大長徑，單位為微米(μm)。 <TABLE border="1" borderColor="#000000" width="_0002"><TBODY><tr><td> 靶材 樣品編號 </td><td> 鐵鈷基軟磁靶材之組成 </td><td> 針狀微結構之最大長徑 </td></tr><tr><td> 實施例1 </td><td> 50.05Fe-26.95Co-10B-4Nb-9W </td><td> 60 μm </td></tr><tr><td> 實施例2 </td><td> 49.4Fe-26.6Co-12B-3Nb-9W </td><td> 65 μm </td></tr><tr><td> 實施例3 </td><td> 48.43Fe-26.07Co-15B-1.5Nb-9W </td><td> 75 μm </td></tr><tr><td> 實施例4 </td><td> 48.75Fe-26.25Co-12B-3Nb-10Mo </td><td> 100 μm </td></tr><tr><td> 實施例5 </td><td> 47.78Fe-25.72Co-15B-1.5Nb-10Mo </td><td> 75 μm </td></tr><tr><td> 實施例6 </td><td> 49.4Fe-26.6Co-10B-4Nb-10Mo </td><td> -- </td></tr><tr><td> 實施例7 </td><td> 47.78Fe-25.72Co-15B-1.5Ta-10Mo </td><td> 290 μm </td></tr><tr><td> 實施例8 </td><td> 47.78Fe-25.72Co-15B-1.5W-10Mo </td><td> 55 μm </td></tr><tr><td> 實施例9 </td><td> 49.4Fe-26.6Co-10B-4W-10Mo </td><td> 58 μm </td></tr><tr><td> 比較例1 </td><td> 53.3Fe-28.7Co-6Ta-12W </td><td> 無針狀微結構 </td></tr><tr><td> 比較例2 </td><td> 53.3Fe-28.7Co-5B-13Ta </td><td> ＞1000 μm </td></tr><tr><td> 比較例3 </td><td> 53.3Fe-28.7Co-5B-13Nb </td><td> 970 μm </td></tr><tr><td> 比較例4 </td><td> 44.2Fe-23.8Co-18B-5Nb-9W </td><td> -- </td></tr><tr><td> 比較例5 </td><td> 44.9Fe-23.1Co-20B-5Nb-9W </td><td> -- </td></tr><tr><td> 比較例6 </td><td> 52.65Fe-28.35Co-10B-4Nb-5W </td><td> 55 μm </td></tr><tr><td> 比較例7 </td><td> 52Fe-28Co-12B-3Nb-5W </td><td> 60 μm </td></tr><tr><td> 比較例8 </td><td> 52Fe-28Co-12B-3Ta-5Mo </td><td> 200 μm </td></tr><tr><td> 比較例9 </td><td> 42Fe-40Co-13B-3Nb-2Ta </td><td> 224 μm </td></tr></TBODY></TABLE>As shown in Table 1 below, the composition of the iron-cobalt-based soft magnetic target of Example 6 is represented by the general formula of aFe-bCo-cB-dM1-eM2; a, b, c, d, and e represent iron, The ratio of the content of each component of cobalt, boron, M1 and M2 to the total number of atoms of the iron-cobalt-based soft magnetic target is in atomic percentage; wherein M1 is 铌 and M2 is molybdenum. Table 1: The composition of the iron-cobalt-based soft magnetic targets of Examples 1 to 9 and Comparative Examples 1 to 9 and the maximum long diameter of the needle-like microstructures, in micrometers (μm). <TABLE border="1" borderColor="#000000" width="_0002"><TBODY><tr><td> Target sample number</td><td> Composition of iron-cobalt soft magnetic target</td ><td> Maximum long diameter of needle-like microstructure </td></tr><tr><td> Example 1 </td><td> 50.05Fe-26.95Co-10B-4Nb-9W </td ><td> 60 μm </td></tr><tr><td> Example 2 </td><td> 49.4Fe-26.6Co-12B-3Nb-9W </td><td> 65 μm </td></tr><tr><td> Example 3 </td><td> 48.43Fe-26.07Co-15B-1.5Nb-9W </td><td> 75 μm </td>< /tr><tr><td> Example 4 </td><td> 48.75Fe-26.25Co-12B-3Nb-10Mo </td><td> 100 μm </td></tr><tr> <td> Example 5 </td><td> 47.78Fe-25.72Co-15B-1.5Nb-10Mo </td><td> 75 μm </td></tr><tr><td> Example 6 </td><td> 49.4Fe-26.6Co-10B-4Nb-10Mo </td><td> -- </td></tr><tr><td> Example 7 </td>< Td> 47.78Fe-25.72Co-15B-1.5Ta-10Mo </td><td> 290 μm </td></tr><tr><td> Example 8 </td><td> 47.78Fe- 25.72Co-15B-1.5W-10Mo </td><td> 55 μm </td></tr><tr><td> Example 9 </td><td> 49.4Fe-26.6Co-10B- 4W-10Mo </td><td> 58 μm </td></tr><tr><td> Comparative Example 1 </td><td> 53.3Fe-28.7Co-6Ta-12W </td><td> needleless microstructure</td></tr><tr><td> Comparative Example 2 </td><td> 53.3Fe-28.7Co-5B-13Ta </td>< Td> >1000 μm </td></tr><tr><td> Comparative Example 3 </td><td> 53.3Fe-28.7Co-5B-13Nb </td><td> 970 μm </td ></tr><tr><td> Comparative Example 4 </td><td> 44.2Fe-23.8Co-18B-5Nb-9W </td><td> -- </td></tr>< Tr><td> Comparative Example 5 </td><td> 44.9Fe-23.1Co-20B-5Nb-9W </td><td> -- </td></tr><tr><td> Comparison Example 6 </td><td> 52.65Fe-28.35Co-10B-4Nb-5W </td><td> 55 μm </td></tr><tr><td> Comparative Example 7 </td> <td> 52Fe-28Co-12B-3Nb-5W </td><td> 60 μm </td></tr><tr><td> Comparative Example 8 </td><td> 52Fe-28Co-12B -3Ta-5Mo </td><td> 200 μm </td></tr><tr><td> Comparative Example 9 </td><td> 42Fe-40Co-13B-3Nb-2Ta </td> <td> 224 μm </td></tr></TBODY></TABLE>
比較例Comparative example 11 至to 99 ：鐵鈷基軟磁靶材: iron cobalt based soft magnetic target
於比較例1至9之鐵鈷基軟磁靶材之製程中，係根據如上表1所示之組成，秤取並混合適量的鐵、鈷、硼、鈮、鉭、鎢及/或鉬等原料，利用如同前述實施例1至5及7至9所採用之真空感應熔煉法及參數條件，製作比較例1至9之鐵鈷基軟磁靶材。In the process of the iron-cobalt-based soft magnetic target of Comparative Examples 1 to 9, according to the composition shown in Table 1 above, the appropriate amount of iron, cobalt, boron, ruthenium, osmium, tungsten, and/or molybdenum was weighed and mixed. The iron-cobalt-based soft magnetic targets of Comparative Examples 1 to 9 were produced by the vacuum induction melting method and the parameter conditions as employed in the foregoing Examples 1 to 5 and 7 to 9.
如上表1所示，比較例1之鐵鈷基軟磁靶材的組成係由如aFe-bCo-dTa-eW之通式所示，a、b、d、e依序代表鐵、鈷、鉭及鎢各成分相對於鐵鈷基軟磁靶材之原子總數的含量比例；比較例2之鐵鈷基軟磁靶材的組成係由如aFe-bCo-cB-dTa之通式所示，a、b、c、d依序代表鐵、鈷、硼及鉭各成分相對於鐵鈷基軟磁靶材之原子總數的含量比例；比較例3之鐵鈷基軟磁靶材的組成係由如aFe-bCo-cB-dNb之通式所示，a、b、c、d依序代表鐵、鈷、硼及鈮各成分相對於鐵鈷基軟磁靶材之原子總數的含量比例；比較例4至7之鐵鈷基軟磁靶材的組成係由如aFe-bCo-cB-dNb-eW之通式所示，a、b、c、d、e依序代表鐵、鈷、硼、鈮及鎢各成分相對於鐵鈷基軟磁靶材之原子總數的含量比例；比較例8之鐵鈷基軟磁靶材的組成係由如aFe-bCo-cB-dTa-eMo之通式所示，a、b、c、d、e依序代表鐵、鈷、硼、鉭及鉬各成分相對於鐵鈷基軟磁靶材之原子總數的含量比例；而比較例9之鐵鈷基軟磁靶材的組成係由如aFe-bCo-cB-d1Nb-d2Ta之通式所示，a、b、c、d1、d2依序代表鐵、鈷、硼、鈮及鉭各成分相對於鐵鈷基軟磁靶材之原子總數的含量比例，上述各成分之含量比例的單位皆以原子百分比示之。As shown in Table 1 above, the composition of the iron-cobalt-based soft magnetic target of Comparative Example 1 is represented by a general formula such as aFe-bCo-dTa-eW, and a, b, d, and e represent iron, cobalt, rhodium, and The content ratio of each component of tungsten to the total number of atoms of the iron-cobalt-based soft magnetic target; the composition of the iron-cobalt-based soft magnetic target of Comparative Example 2 is represented by a general formula such as aFe-bCo-cB-dTa, a, b, c, d sequentially represents the content ratio of each component of iron, cobalt, boron and antimony relative to the total number of atoms of the iron-cobalt-based soft magnetic target; the composition of the iron-cobalt-based soft magnetic target of Comparative Example 3 is composed of, for example, aFe-bCo-cB As shown in the general formula of -dNb, a, b, c, and d represent the ratio of the contents of the iron, cobalt, boron, and lanthanum components to the total number of atoms of the iron-cobalt-based soft magnetic target; the iron cobalt of Comparative Examples 4 to 7. The composition of the soft magnetic target is represented by the general formula of aFe-bCo-cB-dNb-eW, and a, b, c, d, and e represent the composition of iron, cobalt, boron, lanthanum and tungsten relative to iron. The content ratio of the total number of atoms of the cobalt-based soft magnetic target; the composition of the iron-cobalt-based soft magnetic target of Comparative Example 8 is represented by a general formula such as aFe-bCo-cB-dTa-eMo, a, b, c, d, e sequentially represents the composition of iron, cobalt, boron, antimony and molybdenum The content ratio of the total number of atoms of the iron-cobalt-based soft magnetic target; and the composition of the iron-cobalt-based soft magnetic target of Comparative Example 9 is represented by the general formula of aFe-bCo-cB-d1Nb-d2Ta, a, b, c And d1 and d2 sequentially represent the proportion ratio of each component of iron, cobalt, boron, lanthanum and cerium relative to the total number of atoms of the iron-cobalt-based soft magnetic target, and the units of the content ratio of the above components are all expressed by atomic percentage.
實施例Example 1010 至to 1818 及比較例And comparative examples 1010 至to 1818 ：鐵鈷基軟磁材料: iron cobalt based soft magnetic material
取用上述實施例1至9及比較例1至9之鐵鈷基軟磁靶材，使用磁控濺鍍法，並設定相同的濺鍍條件下，190瓦(W)之功率、30毫托(mtorr)之壓力及通有50標準狀態毫升/分鐘(sccm)之氬氣的濺鍍環境中，以1.67奈米/秒之濺鍍速率持續濺鍍50秒，以分別於各基板上濺鍍形成等厚度之實施例10至18及比較例10至18的鐵鈷基軟磁材料。The iron-cobalt-based soft magnetic targets of the above Examples 1 to 9 and Comparative Examples 1 to 9 were used, and the magnetron sputtering method was used, and the power of 190 W (W) and 30 mTorr were set under the same sputtering conditions. The pressure of mtorr) and the argon gas sputtering environment of 50 standard state cc/min (sccm) were continuously sputtered at a sputtering rate of 1.67 nm/sec for 50 seconds to be sputtered on each substrate. The iron-cobalt-based soft magnetic materials of Examples 10 to 18 and Comparative Examples 10 to 18 of equal thickness.
由實施例1至9與比較例1至9的鐵鈷基軟磁靶材所分別濺鍍而成之實施例10至18與比較例10至18的鐵鈷基軟磁材料的樣品對應說明整理如下表2所示。 表2：實施例10至18及比較例10至18的鐵鈷基軟磁材料的樣品對應說明及其組成 <TABLE border="1" borderColor="#000000" width="_0003"><TBODY><tr><td> 靶材樣品編號 </td><td> 材料樣品編號 </td><td> 鐵鈷基軟磁材料之組成 </td></tr><tr><td> 實施例1 </td><td> 實施例10 </td><td> 50.05Fe-26.95Co-10B-4Nb-9W </td></tr><tr><td> 實施例2 </td><td> 實施例11 </td><td> 49.4Fe-26.6Co-12B-3Nb-9W </td></tr><tr><td> 實施例3 </td><td> 實施例12 </td><td> 48.43Fe-26.07Co-15B-1.5Nb-9W </td></tr><tr><td> 實施例4 </td><td> 實施例13 </td><td> 48.75Fe-26.25Co-12B-3Nb-10Mo </td></tr><tr><td> 實施例5 </td><td> 實施例14 </td><td> 47.78Fe-25.72Co-15B-1.5Nb-10Mo </td></tr><tr><td> 實施例6 </td><td> 實施例15 </td><td> 49.4Fe-26.6Co-10B-4Nb-10Mo </td></tr><tr><td> 實施例7 </td><td> 實施例16 </td><td> 47.78Fe-25.72Co-15B-1.5Ta-10Mo </td></tr><tr><td> 實施例8 </td><td> 實施例17 </td><td> 47.78Fe-25.72Co-15B-1.5W-10Mo </td></tr><tr><td> 實施例9 </td><td> 實施例18 </td><td> 49.4Fe-26.6Co-10B-4W-10Mo </td></tr><tr><td> 比較例1 </td><td> 比較例10 </td><td> 53.3Fe-28.7Co-6Ta-12W </td></tr><tr><td> 比較例2 </td><td> 比較例11 </td><td> 53.3Fe-28.7Co-5B-13Ta </td></tr><tr><td> 比較例3 </td><td> 比較例12 </td><td> 53.3Fe-28.7Co-5B-13Nb </td></tr><tr><td> 比較例4 </td><td> 比較例13 </td><td> 44.2Fe-23.8Co-18B-5Nb-9W </td></tr><tr><td> 比較例5 </td><td> 比較例14 </td><td> 44.9Fe-23.1Co-20B-5Nb-9W </td></tr><tr><td> 比較例6 </td><td> 比較例15 </td><td> 52.65Fe-28.35Co-10B-4Nb-5W </td></tr><tr><td> 比較例7 </td><td> 比較例16 </td><td> 52Fe-28Co-12B-3Nb-5W </td></tr><tr><td> 比較例8 </td><td> 比較例17 </td><td> 52Fe-28Co-12B-3Ta-5Mo </td></tr><tr><td> 比較例9 </td><td> 比較例18 </td><td> 42Fe-40Co-13B-3Nb-2Ta </td></tr></TBODY></TABLE>The samples corresponding to the iron-cobalt-based soft magnetic materials of Examples 10 to 18 and Comparative Examples 10 to 18 which were respectively sputtered from the iron-cobalt-based soft magnetic targets of Examples 1 to 9 and Comparative Examples 1 to 9 were arranged as follows. 2 is shown. Table 2: Corresponding descriptions and compositions of the samples of the iron-cobalt-based soft magnetic materials of Examples 10 to 18 and Comparative Examples 10 to 18. <TABLE border="1" borderColor="#000000" width="_0003"><TBODY><tr><td> Target Sample Number</td><td> Material Sample Number</td><td> Iron Composition of cobalt-based soft magnetic material</td></tr><tr><td> Example 1 </td><td> Example 10 </td><td> 50.05Fe-26.95Co-10B-4Nb- 9W </td></tr><tr><td> Example 2 </td><td> Example 11 </td><td> 49.4Fe-26.6Co-12B-3Nb-9W </td> </tr><tr><td> Example 3 </td><td> Example 12 </td><td> 48.43Fe-26.07Co-15B-1.5Nb-9W </td></tr> <tr><td> Example 4 </td><td> Example 13 </td><td> 48.75Fe-26.25Co-12B-3Nb-10Mo </td></tr><tr><td > Example 5 </td><td> Example 14 </td><td> 47.78Fe-25.72Co-15B-1.5Nb-10Mo </td></tr><tr><td> Example 6 </td><td> Example 15 </td><td> 49.4Fe-26.6Co-10B-4Nb-10Mo </td></tr><tr><td> Example 7 </td>< Td> Example 16 </td><td> 47.78Fe-25.72Co-15B-1.5Ta-10Mo </td></tr><tr><td> Example 8 </td><td> Example 17 </td><td> 47.78Fe-25.72Co-15B-1.5W-10Mo </td></tr><tr><td> Example 9 </td><td> Example 18 </td ><td> 49.4Fe-26.6Co-10B-4W-10Mo </td></tr><tr><td> Comparative Example 1 </td><td> Comparative Example 10 </td><td> 53.3Fe-28.7Co-6Ta-12W </td></tr><tr><td> Comparative Example 2 </td><td > Comparative Example 11 </td><td> 53.3Fe-28.7Co-5B-13Ta </td></tr><tr><td> Comparative Example 3 </td><td> Comparative Example 12 </td ><td> 53.3Fe-28.7Co-5B-13Nb </td></tr><tr><td> Comparative Example 4 </td><td> Comparative Example 13 </td><td> 44.2Fe- 23.8Co-18B-5Nb-9W </td></tr><tr><td> Comparative Example 5 </td><td> Comparative Example 14 </td><td> 44.9Fe-23.1Co-20B- 5Nb-9W </td></tr><tr><td> Comparative Example 6 </td><td> Comparative Example 15 </td><td> 52.65Fe-28.35Co-10B-4Nb-5W </ Td></tr><tr><td> Comparative Example 7 </td><td> Comparative Example 16 </td><td> 52Fe-28Co-12B-3Nb-5W </td></tr>< Tr><td> Comparative Example 8 </td><td> Comparative Example 17 </td><td> 52Fe-28Co-12B-3Ta-5Mo </td></tr><tr><td> Comparative Example 9 </td><td> Comparative Example 18 </td><td> 42Fe-40Co-13B-3Nb-2Ta </td></tr></TBODY></TABLE>
試驗例Test case 11 ：鐵鈷基軟磁靶材之金相微結構: Metallographic microstructure of iron-cobalt-based soft magnetic targets
本試驗例採用掃描式電子顯微鏡觀察實施例1至9及比較例1至9之鐵鈷基軟磁靶材的金相微結構，發現實施例1至5及7至9及比較例2至9之鐵鈷基軟磁靶材皆具有呈針狀之微結構，其結果例示如圖1、圖2、圖4、圖5及圖7至圖10中白色相所示。如圖3所示，由於實施例6係經由粉末冶金法所製得之鐵鈷基軟磁靶材，故於其金相微結構中係觀察到呈似球狀之微結構，而未觀察到有呈針狀之微結構。In this test example, the metallographic microstructures of the iron-cobalt-based soft magnetic targets of Examples 1 to 9 and Comparative Examples 1 to 9 were observed by a scanning electron microscope, and the iron-cobalt of Examples 1 to 5 and 7 to 9 and Comparative Examples 2 to 9 were found. The base soft magnetic targets have a needle-like microstructure, and the results are shown in the white phase in FIGS. 1, 2, 4, 5, and 7 to 10. As shown in FIG. 3, since Example 6 is an iron-cobalt-based soft magnetic target prepared by a powder metallurgy method, a spherical-like microstructure was observed in the metallographic microstructure, and no needle was observed. Microstructure.
如圖6所示，雖然比較例1係採用真空感應熔煉法所製得之鐵鈷基軟磁靶材，但由於比較例1之鐵鈷基軟磁靶材中未含有硼成分，且其鐵鈷基軟磁靶材中鈮及鎢之總含量相對於整體鐵鈷基軟磁靶材亦已明顯超出14 at%，故比較例1之鐵鈷基軟磁靶材的金相微結構主要呈球狀，而未形成有針狀之微結構。As shown in FIG. 6, although Comparative Example 1 is an iron-cobalt-based soft magnetic target obtained by a vacuum induction melting method, the iron-cobalt-based soft magnetic target of Comparative Example 1 does not contain a boron component, and its iron-cobalt group The total content of niobium and tungsten in the soft magnetic target has obviously exceeded 14 at% with respect to the whole iron-cobalt-based soft magnetic target. Therefore, the metallographic microstructure of the iron-cobalt-based soft magnetic target of Comparative Example 1 is mainly spherical, but not formed. Needle-like microstructure.
本實驗另分別採用實施例1至5及7至9與比較例2、3及6至9之鐵鈷基軟磁靶材的徑向中心為待測樣品，將各待測樣品依厚度分佈各自切分為上、中、下區域後，並分別以掃描式電子顯微鏡觀察各區域之金相微結構，取三區域中所觀察得到之最大針狀微結構為量測對象，以該最大針狀微結構所量測得到之最大長徑代表各鐵鈷基軟磁靶材中針狀微結構的最大長徑。實施例1至5及7至9與比較例2、3及6至9之量測結果亦如上表1所示。此外，針對實施例6之鐵鈷基軟磁靶材，本實驗亦採用如上所述之方法，取三區域中所觀察得到之最大似球狀微結構為量測對象，以該最大似球狀微結構所量測得到之最大長徑代表各鐵鈷基軟磁靶材中似球狀微結構的最大長徑，其最大長徑之量測結果為90微米。In the present experiment, the radial centers of the iron-cobalt-based soft magnetic targets of Examples 1 to 5 and 7 to 9 and Comparative Examples 2, 3 and 6 to 9 were respectively used as samples to be tested, and the samples to be tested were each cut according to thickness distribution. After being divided into upper, middle and lower regions, the metallographic microstructures of each region were observed by scanning electron microscopy, and the largest needle-like microstructure observed in the three regions was taken as the measurement object, and the largest needle-like microstructure was used. The maximum long diameter measured indicates the maximum long diameter of the needle-like microstructure in each iron-cobalt-based soft magnetic target. The measurement results of Examples 1 to 5 and 7 to 9 and Comparative Examples 2, 3 and 6 to 9 are also shown in Table 1 above. In addition, with respect to the iron-cobalt-based soft magnetic target of Example 6, the experiment also adopts the method described above, and the largest spherical spheroid microstructure observed in the three regions is measured, and the maximum spherical micro-shape is used. The maximum long diameter measured by the structure represents the maximum long diameter of the spherical-like microstructure in each iron-cobalt-based soft magnetic target, and the maximum long-path measurement is 90 μm.
如上表1所示，當鐵鈷基軟磁靶材中呈針狀之微結構的最大長徑越小時，顯示此針狀相越不容易在濺鍍時發生破裂，其能有利於避免鐵鈷基軟磁靶材於濺鍍製程中發生破碎之針狀相沾附在薄膜上之狀況，進而提升利用該鐵鈷基軟磁靶材所濺鍍而成之鐵鈷基軟磁靶材的製程良率。As shown in Table 1 above, when the maximum long diameter of the needle-like microstructure in the iron-cobalt-based soft magnetic target is small, it is shown that the needle phase is less likely to be broken at the time of sputtering, which is advantageous for avoiding iron-cobalt-based. The soft magnetic target is adhered to the film during the sputtering process, and the process yield of the iron-cobalt-based soft magnetic target which is sputtered by the iron-cobalt-based soft magnetic target is improved.
綜觀上表1所示之鐵鈷基軟磁靶材的針狀微結構之尺寸分析結果，比較例2及3之鐵鈷基軟磁靶材的最大長徑已長達接近1毫米，甚至是大於1毫米以上；即，當鐵鈷基軟磁靶材中硼含量過低且鐵鈷基軟磁靶材中除了鐵、鈷與硼成分外僅再額外摻混選自於由鉭、鈮、鉬及鎢所構成之群組中的單獨一種金屬成分時，該等鐵鈷基軟磁靶材存有相組成分佈不均勻之問題，更會進一步影響利用該等鐵鈷基軟磁靶材所濺鍍而成之鐵鈷基軟磁材料之特性。Looking at the results of the sizing analysis of the needle-like microstructure of the iron-cobalt-based soft magnetic target shown in Table 1, the maximum long diameter of the iron-cobalt-based soft magnetic target of Comparative Examples 2 and 3 has been as long as 1 mm or even greater than 1 Above the millimeter; that is, when the boron content in the iron-cobalt-based soft magnetic target is too low and the iron-cobalt-based soft magnetic target is additionally blended except for the iron, cobalt and boron components, it is selected from the group consisting of ruthenium, osmium, molybdenum and tungsten. When a single metal component is formed in the group, the iron-cobalt-based soft magnetic target has a problem of uneven distribution of phase composition, and further affects the iron which is sputtered by using the iron-cobalt-based soft magnetic target. The properties of cobalt-based soft magnetic materials.
據此，以下試驗例2至4便不再針對由比較例2及3之鐵鈷基軟磁靶材所濺鍍而成之比較例11及12之鐵鈷基軟磁材料進行分析測試。Accordingly, the following Test Examples 2 to 4 were no longer analyzed for the iron-cobalt-based soft magnetic materials of Comparative Examples 11 and 12 which were sputtered from the iron-cobalt-based soft magnetic targets of Comparative Examples 2 and 3.
試驗例Test case 22 ：鐵鈷基軟磁材料之: Iron-cobalt-based soft magnetic material 居禮溫度Curie temperature
本試驗例採用磁熱重分析儀(thermal magnetometry analyzer，TMA)，於110 Oe之外加磁場下，以每三秒上升1°C之升溫速率，自室溫分別加熱實施例10至18之鐵鈷基軟磁材料與比較例10及13至18之鐵鈷基軟磁材料達900°C，並且量測實施例10至18與比較例10及13至18之鐵鈷基軟磁材料隨溫度上升的重量變化，以測得不同組成之實施例10至18比較例10及13至18之鐵鈷基軟磁材料的居禮溫度。This test example uses a thermal magnetometry analyzer (TMA) to heat the iron-cobalt groups of Examples 10 to 18 from room temperature at a temperature increase rate of 1 ° C every three seconds under a magnetic field of 110 Oe. The soft magnetic material and the iron-cobalt-based soft magnetic material of Comparative Examples 10 and 13 to 18 reached 900 ° C, and the weight change of the iron-cobalt-based soft magnetic materials of Examples 10 to 18 and Comparative Examples 10 and 13 to 18 with temperature was measured. The habit temperature of the iron-cobalt-based soft magnetic materials of Comparative Examples 10 and 13 to 18 of Examples 10 to 18 of different compositions was measured.
各樣品之測試結果係如下表3所示，各樣品之鐵鈷基軟磁材料所測得之居禮溫度代表此種鐵鈷軟磁材料應用至磁記錄媒體領域時可容許作業之極限溫度，居禮溫度越高代表此種鐵鈷軟磁材料的應用性越佳。 表3：實施例10至18及比較例10、13至18的鐵鈷基軟磁材料的組成及其居禮溫度、室溫下之飽和磁化量、飽和磁化量降低率等測試結果。 <TABLE border="1" borderColor="#000000" width="_0004"><TBODY><tr><td> 材料 樣品編號 </td><td> 鐵鈷基軟磁材料之組成 </td><td> 居禮 溫度 </td><td> 飽和 磁化量 </td><td> 飽和磁化量降低率 </td></tr><tr><td> 實施例10 </td><td> 50.05Fe-26.95Co-10B-4Nb-9W </td><td> 280°C </td><td> 695 emu/cc </td><td> 17.00% </td></tr><tr><td> 實施例11 </td><td> 49.4Fe-26.6Co-12B-3Nb-9W </td><td> 270°C </td><td> 634 emu/cc </td><td> 13.00% </td></tr><tr><td> 實施例12 </td><td> 48.43Fe-26.07Co-15B-1.5Nb-9W </td><td> 307°C </td><td> 704 emu/cc </td><td> 9.66% </td></tr><tr><td> 實施例13 </td><td> 48.75Fe-26.25Co-12B-3Nb-10Mo </td><td> 220°C </td><td> 567 emu/cc </td><td> 18.69% </td></tr><tr><td> 實施例14 </td><td> 47.78Fe-25.72Co-15B-1.5Nb-10Mo </td><td> 244°C </td><td> 710 emu/cc </td><td> 12.68% </td></tr><tr><td> 實施例15 </td><td> 49.4Fe-26.6Co-10B-4Nb-10Mo </td><td> 201°C </td><td> 544 emu/cc </td><td> 17% </td></tr><tr><td> 實施例16 </td><td> 47.78Fe-25.72Co-15B-1.5Ta-10Mo </td><td> 246°C </td><td> 620 emu/cc </td><td> 14.84% </td></tr><tr><td> 實施例17 </td><td> 47.78Fe-25.72Co-15B-1.5W-10Mo </td><td> 230°C </td><td> 750 emu/cc </td><td> 13% </td></tr><tr><td> 實施例18 </td><td> 49.4Fe-26.6Co-10B-4W-10Mo </td><td> 210°C </td><td> 590 emu/cc </td><td> 19% </td></tr><tr><td> 比較例10 </td><td> 53.3Fe-28.7Co-6Ta-12W </td><td> 150°C </td><td> 720 emu/cc </td><td> 30.00% </td></tr><tr><td> 比較例13 </td><td> 44.2Fe-23.8Co-18B-5Nb-9W </td><td> 120°C </td><td> 340 emu/cc </td><td> 32% </td></tr><tr><td> 比較例14 </td><td> 44.9Fe-23.1Co-20B-5Nb-9W </td><td> 70°C </td><td> 220 emu/cc </td><td> 38% </td></tr><tr><td> 比較例15 </td><td> 52.65Fe-28.35Co-10B-4Nb-5W </td><td> 473°C </td><td> 897 emu/cc </td><td> 6.00% </td></tr><tr><td> 比較例16 </td><td> 52Fe-28Co-12B-3Nb-5W </td><td> 405°C </td><td> 821 emu/cc </td><td> 5.85% </td></tr><tr><td> 比較例17 </td><td> 52Fe-28Co-12B-3Ta-5Mo </td><td> 417°C </td><td> 959 emu/cc </td><td> 5.21% </td></tr><tr><td> 比較例18 </td><td> 42Fe-40Co-13B-3Nb-2Ta </td><td> 450°C </td><td> 1187 emu/cc </td><td> 3.37% </td></tr></TBODY></TABLE>The test results of each sample are shown in Table 3 below. The measured temperature of the iron-cobalt-based soft magnetic material of each sample represents the limit temperature that can be tolerated when the iron-cobalt soft magnetic material is applied to the field of magnetic recording media. The higher the temperature, the better the applicability of such iron-cobalt soft magnetic materials. Table 3: The compositions of the iron-cobalt-based soft magnetic materials of Examples 10 to 18 and Comparative Examples 10 and 13 to 18, and the test results of the salient temperature, the saturation magnetization at room temperature, and the reduction rate of the saturation magnetization. <TABLE border="1" borderColor="#000000" width="_0004"><TBODY><tr><td> Material sample number</td><td> Composition of iron-cobalt-based soft magnetic material</td>< Td> Curie temperature </td><td> saturation magnetization </td><td> saturation magnetization reduction rate</td></tr><tr><td> Example 10 </td><td > 50.05Fe-26.95Co-10B-4Nb-9W </td><td> 280°C </td><td> 695 emu/cc </td><td> 17.00% </td></tr> <tr><td> Example 11 </td><td> 49.4Fe-26.6Co-12B-3Nb-9W </td><td> 270°C </td><td> 634 emu/cc </ Td><td> 13.00% </td></tr><tr><td> Example 12 </td><td> 48.43Fe-26.07Co-15B-1.5Nb-9W </td><td> 307 ° C </td><td> 704 emu/cc </td><td> 9.66% </td></tr><tr><td> Example 13 </td><td> 48.75Fe- 26.25Co-12B-3Nb-10Mo </td><td> 220°C </td><td> 567 emu/cc </td><td> 18.69% </td></tr><tr>< Td> Example 14 </td><td> 47.78Fe-25.72Co-15B-1.5Nb-10Mo </td><td> 244°C </td><td> 710 emu/cc </td>< Td> 12.68% </td></tr><tr><td> Example 15 </td><td> 49.4Fe-26.6Co-10B-4Nb-10Mo </td><td> 201°C < /td><td> 544 emu/cc </td><td> 17% </td></tr><tr><td> Example 16 </td><td> 47 .78Fe-25.72Co-15B-1.5Ta-10Mo </td><td> 246°C </td><td> 620 emu/cc </td><td> 14.84% </td></tr> <tr><td> Example 17 </td><td> 47.78Fe-25.72Co-15B-1.5W-10Mo </td><td> 230°C </td><td> 750 emu/cc < /td><td> 13% </td></tr><tr><td> Example 18 </td><td> 49.4Fe-26.6Co-10B-4W-10Mo </td><td> 210°C </td><td> 590 emu/cc </td><td> 19% </td></tr><tr><td> Comparative Example 10 </td><td> 53.3Fe- 28.7Co-6Ta-12W </td><td> 150°C </td><td> 720 emu/cc </td><td> 30.00% </td></tr><tr><td> Comparative Example 13 </td><td> 44.2Fe-23.8Co-18B-5Nb-9W </td><td> 120°C </td><td> 340 emu/cc </td><td> 32 % </td></tr><tr><td> Comparative Example 14 </td><td> 44.9Fe-23.1Co-20B-5Nb-9W </td><td> 70°C </td> <td> 220 emu/cc </td><td> 38% </td></tr><tr><td> Comparative Example 15 </td><td> 52.65Fe-28.35Co-10B-4Nb- 5W </td><td> 473°C </td><td> 897 emu/cc </td><td> 6.00% </td></tr><tr><td> Comparative Example 16 </ Td><td> 52Fe-28Co-12B-3Nb-5W </td><td> 405°C </td><td> 821 emu/cc </td><td> 5.85% </td></ Tr><tr><td> Comparative Example 17 </td><td> 52Fe-28Co-12B-3Ta-5Mo </td><td> 417°C </t d><td> 959 emu/cc </td><td> 5.21% </td></tr><tr><td> Comparative Example 18 </td><td> 42Fe-40Co-13B-3Nb- 2Ta </td><td> 450°C </td><td> 1187 emu/cc </td><td> 3.37% </td></tr></TBODY></TABLE>
如上表3所示，實施例10至18之鐵鈷基軟磁材料的居禮溫度皆已提升至200°C以上。由此可見，藉由適當控制鐵鈷基軟磁靶材之組成，能對應調控由鐵鈷基軟磁靶材所濺鍍而成之鐵鈷基軟磁材料的組成，進而提高該鐵鈷基軟磁材料的居禮溫度，確保鐵鈷基軟磁材料用於磁記錄媒體之應用性。As shown in Table 3 above, the temperature of the iron-cobalt-based soft magnetic materials of Examples 10 to 18 has been raised to 200 ° C or higher. It can be seen that by appropriately controlling the composition of the iron-cobalt-based soft magnetic target, the composition of the iron-cobalt-based soft magnetic material sputtered by the iron-cobalt-based soft magnetic target can be adjusted correspondingly, thereby improving the iron-cobalt-based soft magnetic material. Curie temperature ensures the applicability of iron-cobalt-based soft magnetic materials for magnetic recording media.
試驗例Test case 33 ：鐵鈷基軟磁材料之飽和磁化量: saturation magnetization of iron-cobalt-based soft magnetic materials
本試驗例使用振動樣品磁力計(vibrating sample magnetometer，VSM)，於室溫、-12000至+12000 Oe之外加磁場下，量測實施例10至18及比較例10及13至18之鐵鈷基軟磁材料於室溫下之飽和磁化量，單位為emu/cc。This test example uses a vibrating sample magnetometer (VSM) to measure the iron-cobalt groups of Examples 10 to 18 and Comparative Examples 10 and 13 to 18 at room temperature, from -12000 to +12000 Oe plus a magnetic field. The amount of saturation magnetization of a soft magnetic material at room temperature in emu/cc.
各樣品之測試結果係如上表3所示，各樣品之鐵鈷基軟磁材料所測得之飽和磁化量與含有此種鐵鈷基軟磁材料之磁記錄媒體的記錄性質相關聯；若鐵鈷基軟磁材料之飽和磁化量低於500 emu/cc，會劣化含有此種鐵鈷基軟磁材料之磁記錄媒體的硬碟寫入能力，若鐵鈷基軟磁材料之飽和磁化量高於750 emu/cc，則會降低鐵鈷基軟磁材料應用於軟磁層的導磁率(permeability)，致使該鐵鈷基軟磁材料無法應用至磁記錄媒體中。The test results of the respective samples are shown in Table 3 above, and the amount of saturation magnetization measured by the iron-cobalt-based soft magnetic material of each sample is related to the recording property of the magnetic recording medium containing the iron-cobalt-based soft magnetic material; The saturation magnetization of the soft magnetic material is less than 500 emu/cc, which deteriorates the hard disk writing ability of the magnetic recording medium containing the iron-cobalt-based soft magnetic material, and the saturation magnetization of the iron-cobalt-based soft magnetic material is higher than 750 emu/cc. , the permeability of the iron-cobalt-based soft magnetic material applied to the soft magnetic layer is lowered, so that the iron-cobalt-based soft magnetic material cannot be applied to the magnetic recording medium.
如上表3所示，藉由適當控制鐵鈷基軟磁靶材之組成，能對應調控由鐵鈷基軟磁靶材所濺鍍而成之鐵鈷基軟磁材料的組成，使實施例10至18之鐵鈷基軟磁材料的飽和磁化量皆符合大於或等於500 emu/cc且小於或等於750 emu/cc的規格，進而確保該等鐵鈷基軟磁材料皆能適用於磁記錄媒體之領域。As shown in Table 3 above, by appropriately controlling the composition of the iron-cobalt-based soft magnetic target, the composition of the iron-cobalt-based soft magnetic material sputtered by the iron-cobalt-based soft magnetic target can be adjusted correspondingly, and the examples 10 to 18 can be made. The saturation magnetization of the iron-cobalt-based soft magnetic material conforms to a specification of 500 emu/cc or more and 750 emu/cc or less, thereby ensuring that the iron-cobalt-based soft magnetic materials can be applied to the field of magnetic recording media.
試驗例Test case 44 ：鐵鈷基軟磁材料之飽和磁化量受熱後被弱化之程度: The degree to which the saturation magnetization of the iron-cobalt-based soft magnetic material is weakened by heat
本試驗例亦使用振動樣品磁力計，於室溫及80°C下、-12000至+12000 Oe之外加磁場下，分別量測實施例10至18及比較例10及13至18之鐵鈷基軟磁材料的飽和磁化量。This test example also uses a vibrating sample magnetometer to measure the iron-cobalt groups of Examples 10 to 18 and Comparative Examples 10 and 13 to 18 at room temperature and 80 ° C under a magnetic field of -12,000 to +12000 Oe. The amount of saturation magnetization of a soft magnetic material.
接著，以下列式1計算各樣品之鐵鈷基軟磁材料的飽和磁化量降低率，以評量各樣品之鐵鈷基軟磁材料之飽和磁化量受熱而被弱化之程度。各樣品之測試結果如上表3所示，飽和磁化量降低率越大，表示鐵鈷基軟磁材料之飽和磁化量受熱而被弱化之程度越嚴重，該鐵鈷基軟磁材料的熱穩定性越差。 飽和磁化量降低率=(常溫下之飽和磁化量－於80°C下之飽和磁化量)/常溫下飽和磁化量×100% [式1]Next, the rate of decrease in the saturation magnetization of the iron-cobalt-based soft magnetic material of each sample was calculated by the following formula 1 to evaluate the extent to which the saturation magnetization of the iron-cobalt-based soft magnetic material of each sample was weakened by heat. The test results of the respective samples are as shown in Table 3 above, and the greater the decrease rate of the saturation magnetization amount, the more severe the saturation magnetization of the iron-cobalt-based soft magnetic material is weakened by heat, and the thermal stability of the iron-cobalt-based soft magnetic material is worse. . Rate of decrease in saturation magnetization = (saturation magnetization at normal temperature - saturation magnetization at 80 ° C) / saturation magnetization at normal temperature × 100% [Equation 1]
如上表3所示，實施例10至18之鐵鈷基軟磁材料的飽和磁化量降低率可大幅降低至20%，更具體而言，該等鐵鈷基軟磁材料的飽和磁化量降低率可大於或等於9%且小於或等於20%。由此可見，藉由適當控制鐵鈷基軟磁靶材之組成，能對應調控由鐵鈷基軟磁靶材所濺鍍而成之鐵鈷基軟磁材料的組成，藉此減緩鐵鈷基軟磁材料之飽和磁化量受熱而被弱化之程度，提升鐵鈷基軟磁材料的熱穩定性。As shown in Table 3 above, the reduction rate of the saturation magnetization of the iron-cobalt-based soft magnetic materials of Examples 10 to 18 can be greatly reduced to 20%, and more specifically, the reduction rate of the saturation magnetization of the iron-cobalt-based soft magnetic materials can be larger than Or equal to 9% and less than or equal to 20%. It can be seen that by appropriately controlling the composition of the iron-cobalt-based soft magnetic target, the composition of the iron-cobalt-based soft magnetic material sputtered by the iron-cobalt-based soft magnetic target can be adjusted correspondingly, thereby slowing down the iron-cobalt-based soft magnetic material. The degree to which the saturation magnetization is weakened by heat increases the thermal stability of the iron-cobalt-based soft magnetic material.
實驗結果討論Discussion of experimental results
由上述試驗例1中比較例1與實施例1至9之分析結果顯示，藉由在鐵鈷基軟磁靶材中添加硼成分，能有助於令鐵鈷基軟磁靶材具有呈針狀之微結構；再合併試驗例2至4中比較例10與實施例10至18之分析結果可知，在鐵鈷基軟磁材料中添加硼成分，更能同時提升鐵鈷基軟磁材料的居禮溫度並且減緩鐵鈷基軟磁材料的飽和磁化量降低率。The analysis results of Comparative Example 1 and Examples 1 to 9 in the above Test Example 1 show that the addition of the boron component to the iron-cobalt-based soft magnetic target can contribute to the needle-like shape of the iron-cobalt-based soft magnetic target. Microstructure; recombining the analysis results of Comparative Example 10 and Examples 10 to 18 in Test Examples 2 to 4, it can be seen that the addition of a boron component to the iron-cobalt-based soft magnetic material can simultaneously raise the temperature of the iron-cobalt-based soft magnetic material and Slowing down the rate of decrease in the saturation magnetization of the iron-cobalt-based soft magnetic material.
由上述試驗例1中比較例1至5與實施例1至9之分析結果顯示，藉由適當調控硼佔整體鐵鈷基軟磁靶材的含量範圍，能有助於提升鐵鈷基軟磁靶材中相組成之分佈均勻性；再合併試驗例2至4中比較例10、13、14與實施例10至18之分析結果可知，在鐵鈷基軟磁材料中適當調控硼佔整體鐵鈷基軟磁材料的含量範圍，不僅能確保鐵鈷基軟磁材料之飽和磁化量符合應用至磁記錄媒體之規格，更能將鐵鈷基軟磁材料的居禮溫度由低於150°C提升至200°C以上，並將鐵鈷基軟磁材料的飽和磁化量降低率由大於30%以上具體降低至20%以下。The analysis results of Comparative Examples 1 to 5 and Examples 1 to 9 in the above Test Example 1 show that the iron-cobalt-based soft magnetic target can be improved by appropriately adjusting the content of boron in the entire iron-cobalt-based soft magnetic target. The uniformity of the distribution of the middle phase composition; the results of the comparison of Comparative Examples 10, 13, and 14 and Examples 10 to 18 in Test Examples 2 to 4 show that the appropriate regulation of boron in the iron-cobalt-based soft magnetic material accounts for the overall iron-cobalt-based soft magnetic The content range of the material not only ensures that the saturation magnetization of the iron-cobalt-based soft magnetic material conforms to the specifications applied to the magnetic recording medium, but also increases the salient temperature of the iron-cobalt-based soft magnetic material from less than 150 ° C to more than 200 ° C. And the reduction rate of the saturation magnetization of the iron-cobalt-based soft magnetic material is specifically reduced from more than 30% to less than 20%.
再者，由試驗例2至4中比較例15至18與實施例10至18之分析結果可知，即便在鐵鈷基軟磁材料中添加適量的硼成分控制鐵鈷基軟磁材料的居禮溫度及飽和磁化量降低率，但若未適當控制第一金屬和第二金屬之含量和，將使鐵鈷基軟磁材料之飽和磁化量超出可應用於磁記錄媒體之上限值(即750 emu/cc)，而無法適用於磁記錄媒體中。Further, from the analysis results of Comparative Examples 15 to 18 and Examples 10 to 18 of Test Examples 2 to 4, it is understood that even if an appropriate amount of boron component is added to the iron-cobalt-based soft magnetic material, the temperature of the iron-cobalt-based soft magnetic material is controlled. The saturation magnetization reduction rate, but if the content of the first metal and the second metal is not properly controlled, the saturation magnetization of the iron-cobalt-based soft magnetic material is exceeded and can be applied to the upper limit of the magnetic recording medium (ie, 750 emu/cc). ), but not applicable to magnetic recording media.
綜合上述說明，本創作藉由適當控制鐵鈷基軟磁靶材之組成，不僅能避免鐵鈷基軟磁靶材於濺鍍製程中發生破碎之針狀相沾附在薄膜上之狀況，進而提升利用該鐵鈷基軟磁靶材所濺鍍而成之鐵鈷基軟磁材料的製程良率；更能同時對應調控由此種鐵鈷基軟磁靶材所濺鍍而成之鐵鈷基軟磁材料的組成，使本創作之鐵鈷基軟磁材料能同時符合居禮溫度大於或等於200°C以上、飽和磁化量介於500至750 emu/cc以及飽和磁化量降低率小於或等於20%以下之特性，使本創作之鐵鈷基軟磁材料能應用於磁記錄媒體領域中，進而提高含有此種鐵鈷基軟磁材料之磁記錄媒體可適用之操作溫度範圍及其於較高溫度下之記錄品質。Based on the above description, by properly controlling the composition of the iron-cobalt-based soft magnetic target, the present invention can not only avoid the condition that the iron-and-cobalt-based soft magnetic target is adhered to the film during the sputtering process, thereby improving the utilization. The process yield of the iron-cobalt-based soft magnetic material sputtered by the iron-cobalt-based soft magnetic target; and the composition of the iron-cobalt-based soft magnetic material sputtered by the iron-cobalt-based soft magnetic target can be simultaneously controlled The iron-cobalt-based soft magnetic material of the present invention can simultaneously satisfy the characteristics that the salient temperature is greater than or equal to 200 ° C, the saturation magnetization is between 500 and 750 emu/cc, and the saturation magnetization reduction rate is less than or equal to 20%. The iron-cobalt-based soft magnetic material of the present invention can be applied to the field of magnetic recording media, thereby improving the operating temperature range applicable to a magnetic recording medium containing such an iron-cobalt-based soft magnetic material and the recording quality at a higher temperature.
上述實施例僅係為說明本創作之例示，並非於任何方面限制本創作所主張之權利範圍。本創作所主張之權利範圍自應以申請專利範圍所述為準，而非僅限於上述具體實施例。The above-described embodiments are merely illustrative of the present invention and are not intended to limit the scope of the claims claimed herein. The scope of the claims claimed herein is based on the scope of the patent application, and is not limited to the specific embodiments described above.
無。no.
圖1至5依序為實施例2、4及6至8之鐵鈷基軟磁靶材的背向散射電子影像圖(back-scattered electron image，BSE image)。 圖6至10依序為比較例1至3、8及9之鐵鈷基軟磁靶材的背向散射電子影像圖。1 to 5 are a back-scattered electron image (BSE image) of the iron-cobalt-based soft magnetic targets of Examples 2, 4 and 6 to 8, respectively. 6 to 10 are the backscattered electron image views of the iron-cobalt-based soft magnetic targets of Comparative Examples 1 to 3, 8 and 9.
無。no.
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