TWI553315B - Detection assembly for electro static discharge test - Google Patents

Detection assembly for electro static discharge test Download PDF

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TWI553315B
TWI553315B TW104139598A TW104139598A TWI553315B TW I553315 B TWI553315 B TW I553315B TW 104139598 A TW104139598 A TW 104139598A TW 104139598 A TW104139598 A TW 104139598A TW I553315 B TWI553315 B TW I553315B
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segment
electrostatic discharge
insulating
component
test
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TW104139598A
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TW201719175A (en
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翁思淵
張晉源
黃國瑋
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致茂電子股份有限公司
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Description

用於靜電放電測試之檢測組件 Detection component for electrostatic discharge testing

本發明係有關於一種用於靜電放電測試之檢測組件,尤指一種包含有由至少一絕緣材料所組成之絕緣段之檢測組件。 The present invention relates to a test assembly for electrostatic discharge testing, and more particularly to a test assembly comprising an insulating segment comprised of at least one insulating material.

一般而言,人體或機械都可能累積大量靜電荷,並在瞬間形成大量電荷放電,進而破壞電路元件,而為了確保電路元件的電氣性能符合預期,而不受靜電破壞,均需要先模擬上述電荷放電之靜電放電(Electrostatic Discharge;ESD)測試,以如4000伏特、8000伏特之靜電放電電壓,在極短時間(例如10ns)內將靜電荷迅速釋放,進而在受測元件上造成急速的單一脈衝,並隨後量測此受測元件是否受損,藉以淘汰無法耐受靜電放電的元件。 In general, the human body or machinery may accumulate a large amount of static charge and form a large amount of charge discharge in an instant, thereby destroying the circuit components, and in order to ensure that the electrical performance of the circuit components is expected to be unaffected by static electricity, it is necessary to first simulate the above electric charges. The Electrostatic Discharge (ESD) test of discharge discharges static charge rapidly in a very short time (for example, 10 ns) with an electrostatic discharge voltage of, for example, 4000 volts and 8000 volts, thereby causing a rapid single pulse on the device under test. And then measure whether the tested component is damaged, thereby eliminating components that cannot withstand electrostatic discharge.

其中,請參閱第一圖,第一圖係顯示本發明先前技術之用於靜電放電測試之檢測組件之側視圖,如第一圖所示,在進行上述靜電放電測試的過程中,會利用兩個用於靜電放電測試之檢測組件PA1(以下簡稱檢測組件PA1,圖中僅標示一個)對受測元件進行測試,而檢測組件PA1包含一探針連接元件PA11、一探針PA12與一組件本體PA13,探針連接元件PA11之表面為 導體,並具有導接部PA111與連接部PA112,而導接部PA111係連接探針PA12。組件本體PA13係連接於連接部PA112,並具有一本體端部PA131、一軸承PA132、一開短路開關PA133以及一本體底部PA134。而本體底部PA134係連結於探針連接元件PA11,且探針PA12之末端係彼此相距一第一距離d1,而本體端部PA131與連接部PA112之間相距一第二距離d2,軸承PA132與本體底部PA134之上端部相距一第三距離d3,開短路開關PA133之間相距一第四距離d4。 Referring to the first figure, the first figure shows a side view of the detecting component for the electrostatic discharge test of the prior art of the present invention. As shown in the first figure, in the process of performing the above electrostatic discharge test, two The detecting component PA1 (hereinafter referred to as the detecting component PA1, only one of which is shown) for the electrostatic discharge test tests the device under test, and the detecting component PA1 includes a probe connecting component PA11, a probe PA12 and a component body. PA13, the surface of the probe connecting element PA11 is The conductor has a guiding portion PA111 and a connecting portion PA112, and the guiding portion PA111 is connected to the probe PA12. The component body PA13 is connected to the connecting portion PA112 and has a body end portion PA131, a bearing PA132, an open shorting switch PA133, and a body bottom portion PA134. The bottom portion PA134 of the body is connected to the probe connecting element PA11, and the ends of the probes PA12 are separated from each other by a first distance d1, and the body end portion PA131 and the connecting portion PA112 are separated by a second distance d2, and the bearing PA132 and the body are The upper ends of the bottom PA134 are separated by a third distance d3, and the short-circuiting switches PA133 are separated by a fourth distance d4.

其中,進行靜電放電測試時會給予靜電放電電壓,若第一距離d1大於第二距離d2、第三距離d3與第四距離d4時,會造成第一距離d1處的阻抗較第二距離d2處的阻抗為大,使得靜電放電電壓之電荷會朝阻抗較小之第二距離d2處移動而破壞組件本體PA13,進而造成測試成本的提高,因此現有技術仍具有改善之空間。 Wherein, the electrostatic discharge voltage is given when the electrostatic discharge test is performed. If the first distance d1 is greater than the second distance d2, the third distance d3 and the fourth distance d4, the impedance at the first distance d1 is lower than the second distance d2. The impedance is large, so that the charge of the electrostatic discharge voltage moves toward the second distance d2 where the impedance is small to destroy the component body PA13, thereby causing an increase in the test cost, and thus the prior art still has room for improvement.

有鑒於現有靜電放電測試之檢測組件普遍具有靜電放電電壓會回衝至組件本體而造成測試成本增加之問題。緣此,本發明主要目的係提供一種檢測組件,其主要係於探針連接元件中增設絕緣段,藉以透過絕緣段防止放電電壓回衝至組件本體。 In view of the fact that the detection components of the existing electrostatic discharge test generally have an electrostatic discharge voltage that will be backflushed to the component body, the test cost is increased. Accordingly, it is a primary object of the present invention to provide a sensing assembly that is primarily provided with an insulating segment in the probe connecting member for preventing back-off of the discharge voltage to the component body through the insulating segment.

基於上述目的,本發明所採用之主要技術手段係提供一種用於靜電放電測試之檢測組件,係連接一金屬探針對一待測物進行一靜電放電電壓之測試,並包含一探針連接元件與一組件本體。探針連接元件包含一導接段以及一絕緣段,導接段用以接收靜電放電電壓,並連接該金屬探針。絕緣段連結於導接段, 絕緣段由至少一絕緣材料所組成,其中絕緣段之長度與絕緣材料之介電強度的乘積係大於靜電放電電壓。組件本體連結於探針連接元件。 Based on the above object, the main technical means adopted by the present invention provides a detecting component for electrostatic discharge testing, which is connected to a metal probe for performing an electrostatic discharge voltage test on a test object, and includes a probe connecting component and A component body. The probe connecting component comprises a guiding section and an insulating section, and the guiding section is configured to receive an electrostatic discharge voltage and connect the metal probe. The insulating segment is connected to the guiding section, The insulating segment is composed of at least one insulating material, wherein the product of the length of the insulating segment and the dielectric strength of the insulating material is greater than the electrostatic discharge voltage. The component body is coupled to the probe connecting component.

其中,上述用於靜電放電測試之檢測組件之附屬技術手段之較佳實施例中,絕緣段之長度與靜電放電電壓成正比,探針連接元件更包含一緩衝段,緩衝段連結於絕緣段與組件本體之間,緩衝段之長度與靜電放電電壓成反比,且緩衝段係以一鎖合方式與一黏著方式中之一者連結於絕緣段。此外,導接段與絕緣段之厚度係相同,而絕緣段係以一鎖合方式與一黏著方式中之一者連結於導接段,探針連接元件係為一連接臂。另外,絕緣材料之介電強度係大於20kv/mm,而待測物為一發光二極體(Light-Emitting Diode;LED)晶粒。 In a preferred embodiment of the above-mentioned auxiliary technical means for detecting the electrostatic discharge test, the length of the insulating segment is proportional to the electrostatic discharge voltage, and the probe connecting component further comprises a buffering section, and the buffering section is coupled to the insulating section and Between the component bodies, the length of the buffer segment is inversely proportional to the electrostatic discharge voltage, and the buffer segment is coupled to the insulating segment in one of a locking manner and an adhesive manner. In addition, the thickness of the guiding section and the insulating section are the same, and the insulating section is connected to the guiding section in one of a locking manner and an adhesive manner, and the probe connecting component is a connecting arm. In addition, the dielectric strength of the insulating material is greater than 20 kV/mm, and the object to be tested is a light-emitting diode (LED) die.

藉由本發明所採用之用於靜電放電測試之檢測組件之主要技術手段後,由於絕緣段之長度與絕緣材料之介電強度的乘積係大於靜電放電電壓,因而在兩探針的距離較大時,可有效地防止靜電放電電壓回衝至組件本體,因而可有效降低測試之成本。 After the main technical means of the detecting component for electrostatic discharge test used in the present invention, since the product of the length of the insulating segment and the dielectric strength of the insulating material is greater than the electrostatic discharge voltage, when the distance between the two probes is large, The utility model can effectively prevent the electrostatic discharge voltage from being backflushed to the component body, thereby effectively reducing the cost of the test.

本發明所採用的具體實施例,將藉由以下之實施例及圖式作進一步之說明。 The specific embodiments of the present invention will be further described by the following examples and drawings.

PA1‧‧‧用於靜電放電測試之檢測組件 PA1‧‧‧Testing components for electrostatic discharge testing

PA11‧‧‧探針連接元件 PA11‧‧‧ probe connection element

PA111‧‧‧導接部 PA111‧‧‧Guide

PA112‧‧‧連接部 PA112‧‧‧Connecting Department

PA12‧‧‧探針 PA12‧‧‧ probe

PA13‧‧‧組件本體 PA13‧‧‧ component ontology

PA131‧‧‧本體端部 PA131‧‧‧ body end

PA132‧‧‧軸承 PA132‧‧‧ bearing

PA133‧‧‧開短路開關 PA133‧‧‧Open short circuit switch

PA134‧‧‧本體底部 PA134‧‧‧ body bottom

1‧‧‧用於靜電放電測試之檢測組件 1‧‧‧Detection components for electrostatic discharge testing

11、11a‧‧‧探針連接元件 11, 11a‧‧‧ probe connection components

111、111a‧‧‧導接段 111, 111a‧‧ ‧ lead segment

112、112a‧‧‧絕緣段 112, 112a‧‧‧Insulation section

113‧‧‧緩衝段 113‧‧‧Buffer segment

12‧‧‧組件本體 12‧‧‧Component body

121‧‧‧本體底板 121‧‧‧ body bottom plate

2‧‧‧金屬探針 2‧‧‧Metal probe

3‧‧‧待測物 3‧‧‧Test object

d1‧‧‧第一距離 D1‧‧‧first distance

d2‧‧‧第二距離 D2‧‧‧Second distance

d3‧‧‧第三距離 D3‧‧‧ third distance

d4‧‧‧第四距離 D4‧‧‧fourth distance

L1、L2、L1a‧‧‧長度 L1, L2, L1a‧‧‧ length

W1、W2‧‧‧厚度 W1, W2‧‧‧ thickness

第一圖係顯示本發明先前技術之用於靜電放電測試之檢測組件之側視圖;第二圖係顯示本發明第一較佳實施例之用於靜電放電測試之檢測 組件之立體示意圖;第三圖係顯示本發明第一較佳實施例之用於靜電放電測試之檢測組件之側視圖;以及第四圖係顯示本發明第二較佳實施例之用於靜電放電測試之檢測組件之側視圖。 The first figure shows a side view of a test assembly for electrostatic discharge testing of the prior art of the present invention; the second figure shows the test for electrostatic discharge test of the first preferred embodiment of the present invention. 3 is a perspective view showing a detection assembly for an electrostatic discharge test according to a first preferred embodiment of the present invention; and a fourth view showing an electrostatic discharge for use in a second preferred embodiment of the present invention. Side view of the test assembly tested.

由於本發明所提供之用於靜電放電測試之檢測組件中,其組合實施方式不勝枚舉,故在此不再一一贅述,僅列舉兩較佳實施例加以具體說明。 Since the combination of the detection components for the electrostatic discharge test provided by the present invention is numerous, it will not be repeated here, and only two preferred embodiments will be specifically described.

請一併參閱第二圖以及第三圖,第二圖係顯示本發明第一較佳實施例之用於靜電放電測試之檢測組件之立體示意圖,第三圖係顯示本發明第一較佳實施例之用於靜電放電測試之檢測組件之側視圖,如圖所示,本發明較佳實施例之用於靜電放電測試之檢測組件1(以下簡稱檢測組件1)係連接一金屬探針2對一待測物3進行一靜電放電電壓之測試,其中,金屬探針2為現有技術,不再贅述,而待測物3為一發光二極體(Light-Emitting Diode;LED)晶粒,但其他實施例中不限於此。 Please refer to FIG. 2 and FIG. 3 together. FIG. 2 is a perspective view showing a detecting assembly for electrostatic discharge testing according to a first preferred embodiment of the present invention, and FIG. 3 is a first preferred embodiment of the present invention. A side view of a detection assembly for an electrostatic discharge test, as shown in the drawings, a detection assembly 1 (hereinafter referred to as a detection assembly 1) for electrostatic discharge testing according to a preferred embodiment of the present invention is connected to a pair of metal probes 2 A test object 3 is subjected to an electrostatic discharge voltage test, wherein the metal probe 2 is a prior art and will not be described again, and the test object 3 is a light-emitting diode (LED) die, but Other embodiments are not limited thereto.

檢測組件1包含一探針連接元件11與一組件本體12。探針連接元件11係為一連接臂而呈長條型之結構,並包含一導接段111、一絕緣段112以及一緩衝段113,導接段111連接金屬探針2,並連接傳輸線以接收一靜電放電裝置(圖未示,為現有技術,不再贅述)所傳送出之靜電放電電壓。其中導接段111連接金屬探針2之方法例如可為夾持或嵌設於導接段111中,但不限於此。 The detecting assembly 1 includes a probe connecting member 11 and an assembly body 12. The probe connecting component 11 is a long-length structure of a connecting arm, and includes a guiding section 111, an insulating section 112 and a buffer section 113. The guiding section 111 is connected to the metal probe 2 and connected to the transmission line. The electrostatic discharge voltage transmitted by an electrostatic discharge device (not shown, which is not described in the prior art) is received. The method in which the guiding section 111 is connected to the metal probe 2 can be, for example, clamped or embedded in the guiding section 111, but is not limited thereto.

絕緣段112係以一鎖合方式與一黏著方式中之一者連結於導接段111,鎖合方式例如可透過螺絲進行鎖合,而黏著方式則可利用現有之黏著劑來實現。此外,絕緣段112由至少一絕緣材料所組成,且絕緣材料為現有之塑膠等非金屬之材料,其中絕緣段112之長度L1與絕緣材料之介電強度的乘積係大於靜電放電電壓,而一般來說,絕緣材料之介電強度係大於20kv/mm,且絕緣段112之長度L1與靜電放電電壓成正比,意即靜電放電電壓愈大,則所需之長度L1即愈長,絕緣段112與導接段111之厚度係相同而皆為厚度W1,也就是說,在厚度為某一定值的情況下,可依據靜電放電電壓調整絕緣段112之長度L1。 The insulating section 112 is coupled to the guiding section 111 in a locking manner and an adhesive manner, and the locking manner can be locked by, for example, a screw, and the adhesive manner can be realized by using an existing adhesive. In addition, the insulating segment 112 is composed of at least one insulating material, and the insulating material is a non-metal material such as an existing plastic, wherein the product of the length L1 of the insulating segment 112 and the dielectric strength of the insulating material is greater than the electrostatic discharge voltage, and generally In other words, the dielectric strength of the insulating material is greater than 20 kV/mm, and the length L1 of the insulating segment 112 is proportional to the electrostatic discharge voltage, that is, the larger the electrostatic discharge voltage is, the longer the length L1 is required, and the insulating segment 112 The thickness of the guiding section 111 is the same as the thickness W1. That is, in the case where the thickness is a certain value, the length L1 of the insulating section 112 can be adjusted according to the electrostatic discharge voltage.

一般來說,若在靜電放電電壓未很大時,可保留出緩衝段113,緩衝段113連結於絕緣段112與組件本體12之間,其中緩衝段113之長度L2與靜電放電電壓成反比,而緩衝段113可呈階梯狀而同時包含有厚度W1與厚度W2之部分,也可僅指與絕緣段112相同厚度W1之部分,或是同時包含厚度W2減去厚度W1之部分。另外,緩衝段113也可以一鎖合方式與一黏著方式中之一者連結於絕緣段112,此兩種方式均與上述絕緣段112連結於導接段111之連結方式相同,不再贅述。 Generally, if the electrostatic discharge voltage is not large, the buffer section 113 may be retained. The buffer section 113 is coupled between the insulating section 112 and the component body 12, wherein the length L2 of the buffer section 113 is inversely proportional to the electrostatic discharge voltage. The buffer section 113 may be stepped and include a portion having a thickness W1 and a thickness W2, or may be a portion having the same thickness W1 as the insulating segment 112 or a portion having a thickness W2 minus the thickness W1. In addition, the buffering section 113 may be connected to the insulating section 112 in a manner of a locking manner and an adhesive manner. The two methods are the same as the manner in which the insulating section 112 is coupled to the guiding section 111, and details are not described herein.

組件本體12連結於探針連接元件11,本發明較佳實施例中,係透過組件本體12所包含之本體底板121連結於探針連接元件11之緩衝段113,而本體底板121之厚度也可為厚度W1,但並不限於此。 The component body 12 is coupled to the probe connecting component 11. In the preferred embodiment of the present invention, the body bottom plate 121 included in the component body 12 is coupled to the buffer section 113 of the probe connecting component 11, and the thickness of the body bottom plate 121 is also It is the thickness W1, but is not limited thereto.

具體來說,一般探針連接元件11會有固定的長度,而上述絕緣段112與緩衝段113之製成方式中,例如是依據靜電放電電壓運算出適合之長度L1後,保留導接段11並將第一圖之 探針連接元件PA11的中間段部份裁切掉長度L1,而剩餘未裁切的部份即為緩衝段113,接著將為長度L1之絕緣段112透過鎖合方式或黏著方式連結於導接段111與緩衝段113之間,藉以防止靜電放電電壓回衝至組件本體12(例如回衝至第一圖中所示之開短路開關PA133)。 Specifically, in general, the probe connecting member 11 has a fixed length, and in the manner in which the insulating segment 112 and the buffer segment 113 are formed, for example, after calculating a suitable length L1 according to the electrostatic discharge voltage, the guiding segment 11 is retained. And the first picture The middle portion of the probe connecting member PA11 cuts the length L1, and the remaining uncut portion is the buffer portion 113, and then the insulating portion 112 of the length L1 is connected to the guiding through the locking or adhesive manner. The segment 111 and the buffer segment 113 are arranged to prevent the electrostatic discharge voltage from being backflushed to the component body 12 (for example, backflushing to the open-circuit switch PA133 shown in the first figure).

請參閱第四圖,第四圖係顯示本發明第二較佳實施例之用於靜電放電測試之檢測組件之側視圖。如第四圖所示,與第一較佳實施例不同的地方在於探針連接元件11a之部分,當靜電放電電壓很大時,所需之絕緣段112a之長度L1a即需要較大,因此在第二較佳實施例中,僅只有絕緣段112a而不具有緩衝段,且導接段111a仍保留而與絕緣段112a相連結,其餘均與第一較佳實施例相同,不再贅述。 Please refer to the fourth drawing, which is a side view showing the detecting assembly for the electrostatic discharge test of the second preferred embodiment of the present invention. As shown in the fourth figure, the difference from the first preferred embodiment lies in the portion of the probe connecting member 11a. When the electrostatic discharge voltage is large, the length L1a of the required insulating segment 112a needs to be large, so In the second preferred embodiment, only the insulating segment 112a has no buffering segment, and the guiding segment 111a remains and is connected to the insulating segment 112a. The rest are the same as the first preferred embodiment and will not be described again.

綜合以上所述,本發明之主要精神在於將探針連接元件中設有絕緣段,以透過絕緣段而防止靜電放電電壓經探針連接元件回衝至組件本體,因此在採用了本發明所提供之用於靜電放電測試之檢測組件後,可有效地大幅降低測試成本。 In summary, the main spirit of the present invention is to provide an insulating segment in the probe connecting member to prevent the electrostatic discharge voltage from being back-fluxed to the component body through the insulating segment, thereby providing the present invention. After being used for the detection component of the electrostatic discharge test, the test cost can be effectively reduced.

藉由以上較佳具體實施例之詳述,係希望能更加清楚描述本發明之特徵與精神,而並非以上述所揭露的較佳具體實施例來對本發明之範疇加以限制。相反地,其目的是希望能涵蓋各種改變及具相等性的安排於本發明所欲申請之專利範圍的範疇內。 The features and spirit of the present invention will be more apparent from the detailed description of the preferred embodiments. On the contrary, the intention is to cover various modifications and equivalents within the scope of the invention as claimed.

11‧‧‧探針連接元件 11‧‧‧ probe connection components

111‧‧‧導接段 111‧‧‧Guiding section

112‧‧‧絕緣段 112‧‧‧Insulation section

113‧‧‧緩衝段 113‧‧‧Buffer segment

12‧‧‧組件本體 12‧‧‧Component body

121‧‧‧本體底板 121‧‧‧ body bottom plate

2‧‧‧金屬探針 2‧‧‧Metal probe

L1、L2‧‧‧長度 L1, L2‧‧‧ length

W1、W2‧‧‧厚度 W1, W2‧‧‧ thickness

Claims (9)

一種用於靜電放電測試之檢測組件,該檢測組件係連接一金屬探針對一待測物進行一靜電放電電壓之測試,該檢測組件包含:一探針連接元件,包含:一導接段,用以接收該靜電放電電壓,該導接段連接該金屬探針;以及一絕緣段,連結於該導接段,該絕緣段由至少一絕緣材料所組成,其中該絕緣段之長度與該絕緣材料之介電強度的乘積係大於該靜電放電電壓;以及一組件本體,連結於該探針連接元件。 A detecting component for an electrostatic discharge test, the detecting component is connected to a metal probe for performing an electrostatic discharge voltage test on a test object, the detecting component comprising: a probe connecting component, comprising: a guiding segment, Receiving the electrostatic discharge voltage, the guiding segment is connected to the metal probe; and an insulating segment is coupled to the guiding segment, the insulating segment is composed of at least one insulating material, wherein the length of the insulating segment is different from the insulating material The product of the dielectric strength is greater than the electrostatic discharge voltage; and a component body is coupled to the probe connection component. 如申請專利範圍第1項所述之檢測組件,其中,該絕緣段之長度與該靜電放電電壓成正比。 The detecting assembly of claim 1, wherein the length of the insulating segment is proportional to the electrostatic discharge voltage. 如申請專利範圍第2項所述之檢測組件,其中,該探針連接元件更包含一緩衝段,該緩衝段連結於該絕緣段與該組件本體之間,該緩衝段之長度與該靜電放電電壓成反比。 The detecting component of claim 2, wherein the probe connecting component further comprises a buffer segment coupled between the insulating segment and the component body, the length of the buffer segment and the electrostatic discharge The voltage is inversely proportional. 如申請專利範圍第3項所述之檢測組件,其中,該緩衝段係以一鎖合方式與一黏著方式中之一者連結於該絕緣段。 The detecting assembly of claim 3, wherein the buffer segment is coupled to the insulating segment in one of a locking manner and an adhesive manner. 如申請專利範圍第1項所述之檢測組件,其中,該導接段與該絕緣段之厚度係相同。 The detecting assembly of claim 1, wherein the guiding section has the same thickness as the insulating section. 如申請專利範圍第1項所述之檢測組件,其中,該絕緣段係以一鎖合方式與一黏著方式中之一者連結於該導接段。 The detecting assembly of claim 1, wherein the insulating segment is coupled to the guiding segment in one of a locking manner and an adhesive manner. 如申請專利範圍第1項所述之檢測組件,其中,該探針連接元件係為一連接臂。 The detecting assembly of claim 1, wherein the probe connecting member is a connecting arm. 如申請專利範圍第1項所述之檢測組件,其中,該絕緣材料之介電強度係大於20kv/mm。 The test assembly of claim 1, wherein the insulating material has a dielectric strength greater than 20 kV/mm. 如申請專利範圍第1項所述之檢測組件,其中,該待測物為一發光二極體(Light-Emitting Diode;LED)晶粒。 The detecting component of claim 1, wherein the object to be tested is a light-emitting diode (LED) die.
TW104139598A 2015-11-27 2015-11-27 Detection assembly for electro static discharge test TWI553315B (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI724721B (en) * 2019-12-31 2021-04-11 致茂電子股份有限公司 Electronic component testing device and probe
CN113125815A (en) * 2019-12-31 2021-07-16 致茂电子(苏州)有限公司 Electronic component testing device and probe

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* Cited by examiner, † Cited by third party
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TW200813451A (en) * 2006-09-15 2008-03-16 Inventec Appliances Corp Electrostatic discharge tester
TWI301305B (en) * 2001-02-16 2008-09-21 Ibm Conductive coupling of electrical structures to a semiconductor device located under a buried oxide layer
TW201035575A (en) * 2009-03-17 2010-10-01 Chroma Ate Inc Probe test apparatus with an electrostatic discharge device

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI301305B (en) * 2001-02-16 2008-09-21 Ibm Conductive coupling of electrical structures to a semiconductor device located under a buried oxide layer
TW200813451A (en) * 2006-09-15 2008-03-16 Inventec Appliances Corp Electrostatic discharge tester
TW201035575A (en) * 2009-03-17 2010-10-01 Chroma Ate Inc Probe test apparatus with an electrostatic discharge device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI724721B (en) * 2019-12-31 2021-04-11 致茂電子股份有限公司 Electronic component testing device and probe
CN113125815A (en) * 2019-12-31 2021-07-16 致茂电子(苏州)有限公司 Electronic component testing device and probe

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