TWI551966B - Flexible deformation compensation method of feed system - Google Patents
Flexible deformation compensation method of feed system Download PDFInfo
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- TWI551966B TWI551966B TW104142832A TW104142832A TWI551966B TW I551966 B TWI551966 B TW I551966B TW 104142832 A TW104142832 A TW 104142832A TW 104142832 A TW104142832 A TW 104142832A TW I551966 B TWI551966 B TW I551966B
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Description
本發明係與進給系統有關，特別是指一種進給系統的撓性變形補償方法。 The invention relates to a feed system, and in particular to a flexible deformation compensation method for a feed system.
隨著自動化及工具機產業技術的進步，機構的定位精度需求也越來越高，近來由於速度與精度的需求日益提高。進給系統的傳動裝置使用滾珠螺桿作為主要傳動方式之自動化設備或工具機，在高速運動的狀況下，傳動裝置的各構件之間的相互作用力也隨之提高。作用力提高將導致各機構分別產生不同程度的撓性現象。撓性現象會導致傳動裝置產生振動及定位誤差等問題，進而影響進給系統的精度。 With the advancement of the automation and machine tool industry technology, the positioning accuracy requirements of the organization are also getting higher and higher, and the demand for speed and precision has recently increased. The transmission of the feed system uses a ball screw as the main transmission type of automation equipment or machine tool, and the interaction force between the components of the transmission device is also increased under the condition of high speed movement. Increased force will result in varying degrees of flexibility in each agency. The flexibility phenomenon causes problems such as vibration and positioning errors of the transmission, which in turn affects the accuracy of the feed system.
目前，精度等級較高的進給系統通常會搭配光學尺，藉由光學尺提供位置資訊給進給系統的控制器，控制器進而控制馬達運作，而進行工作台的位置控制，以降低運動過程中撓性現象所造成的位置及定位誤差，並透過振動抑制的方式降低振動。實務中，光學尺隨著長度與等級差異，單價從台幣數萬至十幾萬不等，因此，在成本考量上，中低階的進給系統就無法採用光學尺改善精度。 At present, the feed system with higher accuracy grade usually matches the optical ruler, and the optical ruler provides position information to the controller of the feed system, and the controller controls the operation of the motor, and the position control of the workbench is performed to reduce the motion process. The position and positioning error caused by the medium flexibility phenomenon, and the vibration is reduced by vibration suppression. In practice, the optical rule varies with length and grade, and the unit price ranges from tens of thousands to hundreds of thousands of Taiwan dollars. Therefore, in terms of cost considerations, the medium and low-order feed systems cannot use optical scales to improve accuracy.
有鑑於上述缺失，本發明的目的在於提供一種進給系統的撓性變形補償方法，其對進給系統的行程命令進行補償，以使進給系統可達到與使用光學尺的進給系統相同的定位精度。但本發明的撓性變形補償方法係無需使用光學尺，因此，進給系統係可有效降低成本。 In view of the above-mentioned deficiencies, it is an object of the present invention to provide a flexible deformation compensation method for a feed system that compensates for a stroke command of a feed system so that the feed system can achieve the same feed system as the optical scale. positioning accuracy. However, the flexible deformation compensation method of the present invention does not require the use of an optical scale, and therefore, the feed system can effectively reduce the cost.
為達成上述目的，本發明的撓性變形補償方法用於一進給系統。進給系統包括一工作台及一線性傳動裝置。線性傳動裝置係帶動工作台移動。撓性變形補償方法包括下列步驟：首先，取得該工作台的一質量 值M t 及一移動阻尼值C t ，線性傳動裝置的一等效剛性值K；接著，提供一行程命令，包括一速度V(t)及一加速度A(t)；然後，將上述的數值代入公式(一)，以得撓性誤差e(t)；最後，處理行程命令及撓性誤差，以得一補償行程命令。 To achieve the above object, the flexible deformation compensation method of the present invention is applied to a feed system. The feed system includes a table and a linear actuator. The linear actuator drives the table to move. The flexible deformation compensation method comprises the following steps: first, obtaining a mass value M t and a moving damping value C t of the table, an equivalent rigidity value K of the linear transmission device; and then providing a stroke command, including a speed V ( t ) and an acceleration A ( t ); then, the above values are substituted into the formula (1) to obtain the flexibility error e ( t ); finally, the stroke command and the flexibility error are processed to obtain a compensation stroke command. .
如此，本發明的撓性變形補償方法係可應用於進給系統，並可提高進給系統的定位精度，而無需搭配昂貴的光學尺。 As such, the flexible deformation compensation method of the present invention can be applied to a feed system and can improve the positioning accuracy of the feed system without the need for an expensive optical scale.
有關本發明所提供之進給系統的撓性變形補償方法的組成、特點、應用或運作方式，將於後續的實施方式詳細說明中予以描述。 然而，在本發明領域中具有通常知識者應能瞭解，該等詳細說明以及實施本發明所列舉的特定實施例，僅係用於說明本發明，並非用以限制本發明之專利申請範圍。 The composition, features, applications, or modes of operation of the flexible deformation compensation method of the feed system provided by the present invention will be described in the detailed description of the subsequent embodiments. However, it should be understood by those of ordinary skill in the art that the present invention is not limited by the scope of the invention.
10‧‧‧進給系統 10‧‧‧Feed system
11‧‧‧基座 11‧‧‧Base
12‧‧‧線性傳動裝置 12‧‧‧Linear transmission
121‧‧‧前軸承座 121‧‧‧Front bearing housing
122‧‧‧後軸承座 122‧‧‧ rear bearing housing
123‧‧‧螺桿 123‧‧‧ screw
124‧‧‧螺帽 124‧‧‧ Nuts
125‧‧‧聯軸器 125‧‧‧Coupling
13‧‧‧工作台 13‧‧‧Workbench
14‧‧‧馬達 14‧‧‧Motor
15‧‧‧馬達控制器 15‧‧‧Motor controller
51、61‧‧‧誤差補償器 51, 61‧‧‧ error compensator
53、63‧‧‧馬達編碼器 53, 63‧‧ ‧ motor encoder
531‧‧‧比例控制器 531‧‧‧Proportional controller
532‧‧‧速度回路控制器 532‧‧‧Speed loop controller
533‧‧‧馬達剛體模型 533‧‧‧Motor rigid body model
534‧‧‧積分器 534‧‧‧ integrator
55、65‧‧‧線性傳動裝置 55, 65‧‧‧ linear actuator
62‧‧‧插補器 62‧‧‧Interpolator
SO、SL‧‧‧行程命令 S O , S L ‧ ‧ travel order
S31-S37‧‧‧步驟 S31-S37‧‧‧Steps
第1圖是進給系統的示意圖。 Figure 1 is a schematic diagram of the feed system.
第2圖是本發明的撓性變形補償方法的流程圖。 Fig. 2 is a flow chart of the flexible deformation compensation method of the present invention.
第3圖是本發明的進給系統的馬達控制器執行撓性誤差補償的第一種模擬方塊圖。 Figure 3 is a first simulated block diagram of the motor controller of the feed system of the present invention performing flexibility error compensation.
第4圖是本發明的進給系統的馬達控制器執行撓性誤差補償的第二種模擬方塊圖。 Figure 4 is a second simulated block diagram of the motor controller of the feed system of the present invention performing flexibility error compensation.
以下，茲配合各圖式列舉對應之較佳實施例來對本發明的進給系統的撓性變形補償方法的技術及達成功效來說明。然各圖式中撓性變形補償方法的步驟及進給系統的構件、及外觀僅用來說明本發明的技術特徵，而非對本發明構成限制。 Hereinafter, the technique and the effect of the flexible deformation compensation method of the feed system of the present invention will be described with reference to the preferred embodiments of the drawings. However, the steps of the flexible deformation compensation method and the components and appearance of the feed system in each of the drawings are only for explaining the technical features of the present invention, and are not intended to limit the present invention.
如第1圖所示，進給系統10包括一基座11、一線性傳動裝置12、一工作台13、一馬達14及一馬達控制器15。線性傳動裝置12係設於基座11上。工作台13設於線性傳動裝置12上。馬達14連接線性傳動裝 置12。馬達控制器15連接馬達14，且用以控制馬達14運轉，來帶動線性傳動裝置12驅使工作台13做線性運動。 As shown in FIG. 1, the feed system 10 includes a base 11, a linear actuator 12, a table 13, a motor 14, and a motor controller 15. The linear actuator 12 is attached to the base 11. The table 13 is provided on the linear actuator 12. Motor 14 is connected to linear drive Set 12. The motor controller 15 is coupled to the motor 14 and is used to control the operation of the motor 14 to drive the linear actuator 12 to drive the table 13 to perform linear motion.
線性傳動裝置12包括一前軸承座121、一後軸承座122、一螺桿123、一螺帽124及一聯軸器125。前軸承座121及後軸承座122固定地設於基座11上。螺桿123的前後兩端分別固定地設於前軸承座121及後軸承座122上。螺帽124係螺接螺桿123，且隨螺桿123轉動而沿螺桿123做線性運動，於此實施例中螺桿123及螺帽124係以滾珠螺桿為例。聯軸器125連接螺桿123及馬達14的轉軸，其中，馬達14藉由聯軸器125帶動螺桿123運轉已為業界所週知，於此不再贅述。 The linear actuator 12 includes a front bearing housing 121, a rear bearing housing 122, a screw 123, a nut 124, and a coupling 125. The front bearing housing 121 and the rear bearing housing 122 are fixedly disposed on the base 11. The front and rear ends of the screw 123 are fixedly disposed on the front bearing housing 121 and the rear bearing housing 122, respectively. The nut 124 is screwed to the screw 123, and linearly moves along the screw 123 as the screw 123 rotates. In this embodiment, the screw 123 and the nut 124 are exemplified by a ball screw. The coupling 125 connects the screw 123 and the rotating shaft of the motor 14. The motor 14 is driven by the coupling 125 to drive the screw 123, which is well known in the art and will not be described herein.
其中，線性傳動系統12在高速或往復運行中，線性傳動系統10的前軸承座121、後軸承座122、螺桿123、螺帽124及聯軸器125在相互作用時會產生撓性現象，進而影響工作台13的定位精度，因此，本發明的撓性變形補償方法係考量工作台13及線性傳動裝置12的各個參數，並將其應用於馬達控制器15中，以提高進給系統10的定位精度。隨後詳述，本發明的撓性變形補償方法。 Where the linear transmission system 12 is in high speed or reciprocating operation, the front bearing housing 121, the rear bearing housing 122, the screw 123, the nut 124 and the coupling 125 of the linear transmission system 10 are flexible when interacting, and further The positioning accuracy of the table 13 is affected. Therefore, the flexible deformation compensation method of the present invention considers various parameters of the table 13 and the linear actuator 12 and applies them to the motor controller 15 to improve the feed system 10. positioning accuracy. Subsequently, the flexible deformation compensation method of the present invention will be described in detail.
本發明的撓性變形補償方法包括下列步驟：首先，步驟S31，取得工作台的一質量質M t 及一移動阻尼值C t ，線性傳動裝置的一等效剛性值K。接著，步驟S33，提供一行程命令，包括一速度V(t)及一加速度A(t)。然後，步驟S35，將上述的數值代入公式(一)，以得撓性誤差e(t)。最後，步驟S37，處理該行程命令及該撓性誤差e(t)，以得一補償行程命令。 The flexible deformation compensation method of the present invention comprises the following steps: First, in step S31, a mass M t and a moving damping value C t of the table and an equivalent rigidity value K of the linear actuator are obtained. Next, in step S33, a stroke command is provided, including a speed V ( t ) and an acceleration A ( t ). Then, in step S35, the above numerical value is substituted into the formula (1) to obtain the flexibility error e ( t ). Finally, in step S37, the stroke command and the flexibility error e ( t ) are processed to obtain a compensation stroke command.
公式一可從進給系統的動能、位能及虛功項帶入拉格朗日方程式(Lagrange equation)，並作轉移函數運算及整理後可獲得公式(二)。 Formula 1 can be brought into the Lagrange equation from the kinetic energy, potential energy and virtual work of the feed system, and the transfer function can be calculated and sorted to obtain the formula (2).
公式(二)中的X Enc 代表馬達編碼器讀值及X LS 光學尺讀值，公式(二)已顯示傳統馬達編碼器讀值減掉光學尺讀值就等於撓性誤差e(t)，換言之，本發明求得的撓性誤差e(t)是與傳統進給系統搭配光學尺相同的誤差 值，使應用本發明撓性變形補償方法的進給系統能達到與搭配光學尺相同的精度。 Formula X Enc represents a motor encoder readings and X LS optical scale reading (II), the formula (II) has been shown a conventional motor encoder reading subtracted optical scale reading error equal to flexure e (t), In other words, the flexibility error e ( t ) obtained by the present invention is the same error value as that of the conventional feed system, so that the feed system applying the flexible deformation compensation method of the present invention can achieve the same precision as the matching optical scale. .
其中，前述動能、位能、虛功項及拉格朗日方程式各別已為本領域所週知，故於此不作贅述。 Among them, the foregoing kinetic energy, potential energy, virtual work term and Lagrange equation are well known in the art, and thus will not be described herein.
於此實施例中，步驟S31中取得質量值M t 及移動阻尼值C t 係藉由一敲擊試驗。一般來說，工作台質量M t 可從量測值量或是計算體積、材料密度的方式得知線性傳動裝置的移動阻尼值會隨組裝品質而受到影響，因此，對組裝完成的線性傳動裝置進行實驗、如進行來回運動並分析其扭矩大小或是經由敲擊試驗才能獲得較準確地移動阻尼值。 In this embodiment, the mass value M t and the moving damping value C t obtained in step S31 are tested by a tap. In general, the table mass M t can be obtained from the measured value or the calculation volume and material density. It is known that the linear damping device's moving damping value is affected by the assembly quality. Therefore, the assembled linear actuator Experiments, such as moving back and forth and analyzing the torque magnitude or through a tapping test, can obtain a more accurate movement damping value.
又，線性傳動裝置的聯軸器、前軸承座、後軸承座、螺桿及螺帽分別有對應的剛性，一般各元件剛性都能從產品說明中獲得。等效剛性值K係與聯軸器的剛性K 1、前軸承座的剛性K 2、後軸承座的剛性K 3、螺桿的剛性K 4及螺帽的剛性K 5有關，上述各元件的剛性係可藉由理論計算或使用敲擊試驗得到，但理論計算係本領域所週知，於此不作贅述。將上述各剛性數值代入公式(三)，以得等效剛性值K。等效剛性值也可透過敲擊試驗得到。 Moreover, the coupling of the linear transmission, the front bearing housing, the rear bearing housing, the screw and the nut respectively have corresponding rigidity, and generally the rigidity of each component can be obtained from the product description. Rigid stiffness K 2 K, the equivalent rigidity of the bearing housing and the coupling system K stiffness K 1, the front bearing block 3, K 4 and the rigidity of the nut about the screw rigidity K 5, each rigid element The system can be obtained by theoretical calculations or using a tapping test, but theoretical calculations are well known in the art and will not be described herein. Substituting each of the above rigid values into the formula (3) to obtain an equivalent rigidity value K. The equivalent stiffness value can also be obtained by a tap test.
步驟S33中行程命令是用以控制工作台的運作，包括向前、向後、加速、減速及停止等動作，而使工作台能停在螺桿上的任一預定位置。行程命令就是規劃工作台地運行路徑。行程命令包括一速度V(t)及一加速度A(t)，速度V(t)及加速度A(t)係隨行程命令改變。 The stroke command in step S33 is used to control the operation of the workbench, including forward, backward, acceleration, deceleration, and stop, so that the table can be stopped at any predetermined position on the screw. The itinerary command is the planning work path of the workbench. The stroke command includes a speed V ( t ) and an acceleration A ( t ), and the speed V ( t ) and the acceleration A ( t ) are changed with the stroke command.
然後藉由步驟S35運算後取得撓性誤差e(t)，並藉由步驟S37獲得補償行程命令，馬達控制器則可輸出補償行程命令給馬達，以使工作台能準確地停於螺桿的預定位置，且無需在進給系統中安裝光學尺，以達減少成本及提升定位精度的優點。 Then, the flexible error e ( t ) is obtained by the operation of step S35, and the compensation stroke command is obtained by step S37, and the motor controller can output a compensation stroke command to the motor so that the table can accurately stop at the screw reservation. The position and the need to install an optical scale in the feed system to reduce the cost and improve the positioning accuracy.
藉由上述本發明的撓性變形補償方法的步驟S35獲得的撓性誤差e(t)係可應用於進給系統，如第3圖，該圖是進給系統的馬達控制器 執行撓性誤差補償的第一種模擬方塊圖。當馬達控制器提供行程(位置)命令SO後，行程(位置)命令SO係與誤差補償器51提供的撓性誤差相減，以獲得補償行程(位置)命令給馬達編碼器53。其中，馬達編碼器53包括比例控制器531、速度回路控制器532、馬達剛體模型533及積分器534，但馬達編碼器53已為業界所週知，於此不再贅述其運作及組成。如此，馬達編碼器控制馬達依據補償行程命令驅使線性傳動裝置55的螺桿運行，而讓工作台有效率的移動，並達到等同於光學尺的高精度定位。 The flexibility error e ( t ) obtained by the above step S35 of the flexible deformation compensation method of the present invention can be applied to a feed system, as shown in Fig. 3, which is a motor controller of the feed system performs a flexibility error. The first simulated block diagram of compensation. When the motor controller provides the stroke (position) command S O , the stroke (position) command S O is subtracted from the flexibility error provided by the error compensator 51 to obtain a compensation stroke (position) command to the motor encoder 53. The motor encoder 53 includes a proportional controller 531, a speed loop controller 532, a motor rigid body model 533, and an integrator 534. However, the motor encoder 53 is well known in the art, and its operation and composition will not be described herein. Thus, the motor encoder control motor drives the screw of the linear actuator 55 in accordance with the compensation stroke command, allowing the table to move efficiently and achieve high precision positioning equivalent to the optical scale.
此外，如第4圖，該圖是進給系統的馬達控制器執行撓性誤差補償的第二種模擬方塊圖，該圖與第3圖的差異在於馬達編碼器之前還有一插補器62。在馬達控制器提供行程(加工路徑)命令SL，接著行程(加工路徑)命令SL係與誤差補償器61提供的撓性誤差相減，以獲得補償行程命令，然後，補償行程命令係提供給插補器62，插補器62輸出位置命令給馬達編碼器63，以使馬達編碼器63係依據插補器62輸出的位置命令驅使線性傳動裝置65的螺桿運行，而讓工作台在加速及減速時較為平順，並達到等同於光學尺的高精度定位。 Further, as Fig. 4, the figure is a second analog block diagram of the motor controller of the feed system performing the flexibility error compensation, which differs from the third figure in that there is an interpolator 62 before the motor encoder. A stroke (machining path) command S L is provided at the motor controller, and then the stroke (machining path) command S L is subtracted from the flexibility error provided by the error compensator 61 to obtain a compensation stroke command, and then the compensation stroke command is provided To the interpolator 62, the interpolator 62 outputs a position command to the motor encoder 63 to cause the motor encoder 63 to drive the screw of the linear actuator 65 in accordance with the position command output from the interpolator 62, thereby causing the table to accelerate. And it is smoother when decelerating, and achieves high-precision positioning equivalent to the optical scale.
最後，再次強調，本發明於前揭實施例中所揭露的構成元件，僅為舉例說明，並非用來限制本案之範圍，其他等效元件的替代或變化，亦應為本案之申請專利範圍所涵蓋。 Finally, it is emphasized that the constituent elements disclosed in the foregoing embodiments are merely illustrative and are not intended to limit the scope of the present invention, and alternatives or variations of other equivalent elements should also be the scope of the patent application of the present application. Covered.
S31-S37‧‧‧步驟 S31-S37‧‧‧Steps
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| JP7149143B2 (en) * | 2018-09-20 | 2022-10-06 | ファスフォードテクノロジ株式会社 | Mounting equipment and semiconductor device manufacturing method |
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| TW201723702A (en) | 2017-07-01 |
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