TWI503428B - Vacuum depositing article and method for making the same - Google Patents

Description

鍍膜件及其製作方法 Coating member and manufacturing method thereof

本發明涉及一種鍍膜件及其製作方法，尤其涉及一種具有抗指紋功能的鍍膜件及該鍍膜件的製作方法。 The invention relates to a coating material and a manufacturing method thereof, in particular to a coating material with anti-fingerprint function and a manufacturing method of the coating material.

傳統技術中，早期抗指紋化處理一般係採用在鍍鋅層上形成鉻酸鹽層及特殊的樹脂層。該方法需要使用鉻酸鹽處理，環境污染嚴重且工序複雜，對基材的要求也高。 In the conventional technology, the early anti-fingerprinting treatment generally uses a chromate layer and a special resin layer on the galvanized layer. The method requires chromate treatment, which is serious in environmental pollution and complicated in process, and has high requirements on the substrate.

隨著技術的發展，目前通常將具有抗指紋性能的塗料或溶液塗覆於基材的表面來實現抗指紋功能。該具有抗指紋性能的塗料或溶液通常含有毒的有機物，對環境及人體健康不利，且所述的有機物一般來說結構複雜，難以製備。 With the development of technology, a coating or solution having anti-fingerprint properties is usually applied to the surface of a substrate to achieve an anti-fingerprint function. The paint or solution having anti-fingerprint properties usually contains toxic organic substances, which is disadvantageous to the environment and human health, and the organic substances are generally complicated in structure and difficult to prepare.

中國專利申請CN101603190A提出了一種於鈦基材表面先蒸鍍或濺鍍一鋁金屬層，再對該鋁金屬層作陽極氧化處理形成一氧化鋁層，經封孔後該氧化鋁層緻密，表面不易留存雜質，具有較好的抗指紋性。同樣的，陽極氧化處理也存在環境污染大的問題，且需要較多的前處理及後續的封孔處理工序，效率低，成本高。 Chinese patent application CN101603190A proposes a method of first vapor-depositing or sputtering an aluminum metal layer on the surface of a titanium substrate, and then anodizing the aluminum metal layer to form an aluminum oxide layer. After sealing, the aluminum oxide layer is dense and the surface is sealed. It is not easy to retain impurities and has good anti-fingerprint properties. Similarly, the anodizing treatment also has a problem of large environmental pollution, and requires a large amount of pre-treatment and subsequent sealing treatment steps, and has low efficiency and high cost.

鑒於此，有必要提供一種環保、且易於製備的具有抗指紋功能的鍍膜件。 In view of this, it is necessary to provide an environmentally-friendly and easily prepared coated member having an anti-fingerprint function.

另外，還有必要提供一種上述鍍膜件的製作方法。 In addition, it is also necessary to provide a method of manufacturing the above-mentioned coated member.

一種鍍膜件，其包括一基體及一形成於基體表面的抗指紋層，該抗指紋層為一奈米級鋁氧碳氮層。 A coated member comprises a substrate and an anti-fingerprint layer formed on the surface of the substrate, the anti-fingerprint layer being a nano-scale aluminum oxycarbon nitrogen layer.

一種鍍膜件的製作方法，其包括如下步驟：提供一基體；採用真空濺鍍法在該基體的表面濺鍍一抗指紋層，該抗指紋層為一奈米級鋁氧碳氮層。 A method for fabricating a coated member, comprising the steps of: providing a substrate; and sputtering an anti-fingerprint layer on the surface of the substrate by vacuum sputtering, the anti-fingerprint layer being a nano-scale aluminum oxycarbon nitrogen layer.

相較於習知技術，所述的鍍膜件採用真空濺鍍的方法在基體表面形成一奈米級鋁氧碳氮層得以實現抗指紋的功能，方法簡單易行，不需要使用有毒的有機物，對環境及人體健康無害，且避免了習知技術中繁雜的前處理及後處理工序，效率也得以大大提高。 Compared with the prior art, the coating member adopts a vacuum sputtering method to form a nanometer-scale aluminum oxycarbon nitrogen layer on the surface of the substrate to realize the anti-fingerprint function, and the method is simple and easy, and does not require the use of toxic organic substances. It is harmless to the environment and human health, and avoids the complicated pre-treatment and post-treatment processes in the prior art, and the efficiency is greatly improved.

10‧‧‧鍍膜件 10‧‧‧coated parts

11‧‧‧基體 11‧‧‧ base

13‧‧‧過渡層 13‧‧‧Transition layer

15‧‧‧抗指紋層 15‧‧‧Anti-fingerprint layer

圖1係本發明一較佳實施方式的殼體的剖視示意圖。 1 is a schematic cross-sectional view of a housing in accordance with a preferred embodiment of the present invention.

請參閱圖1，本發明一較佳實施方式的鍍膜件10包括基體11、形成於基體11表面的過渡層13及形成於過渡層13表面的抗指紋層15。 Referring to FIG. 1, a coated member 10 according to a preferred embodiment of the present invention includes a substrate 11, a transition layer 13 formed on the surface of the substrate 11, and an anti-fingerprint layer 15 formed on the surface of the transition layer 13.

基體11可由金屬材料或非金屬材料製成。該金屬材料可包括不銹鋼、鋁、鋁合金、銅、銅合金、鋅等。該非金屬材料可包括塑膠、陶瓷、玻璃、聚合物等。 The base 11 may be made of a metal material or a non-metal material. The metal material may include stainless steel, aluminum, aluminum alloy, copper, copper alloy, zinc, or the like. The non-metallic material may include plastic, ceramic, glass, polymer, and the like.

過渡層13為一鋁層，其可以真空濺鍍的方式形成。過渡層13的厚度可為300~400nm。該過渡層13的形成可有效增強抗指紋層15於 基體11上的附著力。 The transition layer 13 is an aluminum layer which can be formed by vacuum sputtering. The thickness of the transition layer 13 may be 300 to 400 nm. The formation of the transition layer 13 can effectively enhance the anti-fingerprint layer 15 Adhesion on the substrate 11.

抗指紋層15為一奈米級鋁氧碳氮(AlOCN)層，其可以真空濺鍍的方法製成。抗指紋層15的厚度可為100~200nm，其為透明狀。 The anti-fingerprint layer 15 is a nano-scale aluminum oxycarbon nitrogen (AlOCN) layer which can be formed by vacuum sputtering. The anti-fingerprint layer 15 may have a thickness of 100 to 200 nm, which is transparent.

所述的抗指紋層15除具有抗指紋功能之外，該抗指紋層15中的N元素的存在還可增強抗指紋層15的緻密性，從而還可使該抗指紋層15具有較好的耐腐蝕性能。 The anti-fingerprint layer 15 has the anti-fingerprint function, and the presence of the N element in the anti-fingerprint layer 15 can also enhance the density of the anti-fingerprint layer 15, thereby further making the anti-fingerprint layer 15 better. Corrosion resistance.

本發明一較佳實施方式的製作上述鍍膜件10的方法包括如下步驟：提供一基體11，並對該基體11進行前處理。該前處理可包括以下步驟：將基體11放入盛裝有乙醇及/或丙酮溶液的超聲波清洗器中進行超聲波清洗，以除去基體11表面的雜質和油污等。 A method of fabricating the above coated member 10 according to a preferred embodiment of the present invention includes the steps of providing a substrate 11 and pretreating the substrate 11. The pretreatment may include the steps of: subjecting the substrate 11 to an ultrasonic cleaner containing an ethanol and/or acetone solution for ultrasonic cleaning to remove impurities, oil stains, and the like on the surface of the substrate 11.

對經超聲波清洗後的基體11的表面進行等離子體清洗，以進一步去除基體11表面的髒汙，以及改善基體11表面與後續塗層的結合力。將基體11放入一真空濺鍍機(圖未示)的鍍膜室中，抽真空該鍍膜室至真空度為4.0×10-3Pa，然後通入流量為300~500sccm(標準毫升每分)的工作氣體氬氣(純度為99.999%)，開啟工作電源使鍍膜室中產生高頻電壓，使所述氬氣發生離子化而產生氬氣等離子體對基體11的表面進行物理轟擊，而達到對基體11表面清洗的目的。所述氬氣等離子體清洗的時間可為3~10min。 The surface of the ultrasonically cleaned substrate 11 is plasma-cleaned to further remove the surface of the substrate 11 and to improve the adhesion of the surface of the substrate 11 to the subsequent coating. The substrate 11 is placed in a coating chamber of a vacuum sputtering machine (not shown), and the coating chamber is evacuated to a vacuum of 4.0×10 −3 Pa, and then a flow rate of 300 to 500 sccm (standard milliliter per minute) is introduced. The working gas argon gas (purity is 99.999%), the working power is turned on to generate a high-frequency voltage in the coating chamber, and the argon gas is ionized to generate an argon plasma to physically bombard the surface of the substrate 11 to reach the base body. 11 the purpose of surface cleaning. The argon plasma cleaning time may be 3 to 10 minutes.

所述等離子體清洗完成後，繼續在所述鍍膜室中以濺鍍法在基體11的表面濺鍍一過渡層13，該過渡層13為一鋁層。 After the plasma cleaning is completed, a transition layer 13 is sputtered on the surface of the substrate 11 by sputtering in the coating chamber, and the transition layer 13 is an aluminum layer.

濺鍍該過渡層13時，加熱所述鍍膜室的溫度至20~300℃(即使鍍膜溫度為20~300℃)，並對基體11施加-100~-300V的偏壓，以鋁(Al)為靶材，保持氬氣的流量不變，開啟靶材的電源，於基體11的表面沉積所述過渡層13。沉積該過渡層13的時間可為20~60分鐘。 When the transition layer 13 is sputtered, the temperature of the coating chamber is heated to 20 to 300 ° C (even if the coating temperature is 20 to 300 ° C), and a bias of -100 to -300 V is applied to the substrate 11 to aluminum (Al). As the target, the flow rate of the argon gas is kept constant, the power of the target is turned on, and the transition layer 13 is deposited on the surface of the substrate 11. The time for depositing the transition layer 13 can be 20 to 60 minutes.

沉積所述過渡層13後，向所述鍍膜室再通入流量為5~70sccm的反應氣體氮氣、流量為5~60sccm的反應氣體乙炔、以及流量為5~60sccm的反應氣體氧氣，以繼續於所述過渡層13的表面濺鍍一抗指紋層15，該抗指紋層15為一奈米級鋁氧碳氮層。濺鍍該抗指紋層15的時間可為20~60分鐘。 After depositing the transition layer 13, a reaction gas nitrogen gas having a flow rate of 5 to 70 sccm, a reaction gas acetylene having a flow rate of 5 to 60 sccm, and a reaction gas oxygen having a flow rate of 5 to 60 sccm are further introduced into the coating chamber to continue. The surface of the transition layer 13 is sputtered with an anti-fingerprint layer 15, which is a nano-scale aluminum oxycarbonitride layer. The anti-fingerprint layer 15 can be sputtered for 20 to 60 minutes.

對所述鍍膜件10進行了輝光放電發射光譜(GD-OES)測試，由所述抗指紋層15的表面向過渡層13的方向讀譜，發現抗指紋層15中的Al、O、C、N各元素的分佈較均勻。 The coated member 10 was subjected to glow discharge emission spectroscopy (GD-OES) test, and the surface of the anti-fingerprint layer 15 was read in the direction of the transition layer 13, and Al, O, C in the anti-fingerprint layer 15 was found. The distribution of each element of N is relatively uniform.

使用ACCU牌(產地：美國)的達因筆對所述抗指紋層15的抗指紋性能進行了測試。結果表明該抗指紋層15的表面張力小於30達因，具有較好的抗指紋功能。 The anti-fingerprint performance of the anti-fingerprint layer 15 was tested using a Dyne pen of ACCU brand (origin: USA). The results show that the anti-fingerprint layer 15 has a surface tension of less than 30 dyne and has a good anti-fingerprint function.

相較於習知技術，所述的鍍膜件10採用真空濺鍍的方法在基體表面形成一奈米級鋁氧碳氮層得以實現抗指紋的功能，方法簡單易行，不需要使用有毒的有機物，對環境及人體健康無害，且避免了習知技術中繁雜的前處理及後處理工序，效率也得以大大提高。同時由於形成有過渡層13，使得抗指紋層15與基體11的結合力得以增強，提高了該抗指紋層15的使用壽命。 Compared with the prior art, the coating member 10 adopts a vacuum sputtering method to form a nanometer-scale aluminum oxycarbon nitrogen layer on the surface of the substrate to realize the anti-fingerprint function, and the method is simple and easy, and does not require the use of toxic organic substances. It is harmless to the environment and human health, and avoids the complicated pre-treatment and post-treatment processes in the prior art, and the efficiency is greatly improved. At the same time, since the transition layer 13 is formed, the bonding force between the anti-fingerprint layer 15 and the substrate 11 is enhanced, and the service life of the anti-fingerprint layer 15 is improved.

10‧‧‧鍍膜件 10‧‧‧coated parts

11‧‧‧基體 11‧‧‧ base

13‧‧‧過渡層 13‧‧‧Transition layer

15‧‧‧抗指紋層 15‧‧‧Anti-fingerprint layer

Claims (9)

一種鍍膜件，其包括一基體及一形成於基體表面的抗指紋層，其改良在於：該抗指紋層為一奈米級鋁氧碳氮層，其中所述鍍膜件還包括一形成於基體與抗指紋層之間的過渡層，該過渡層為一鋁層。 A coating member comprising a substrate and an anti-fingerprint layer formed on the surface of the substrate, wherein the anti-fingerprint layer is a nano-scale aluminum oxycarbon nitrogen layer, wherein the coating member further comprises a substrate and a substrate A transition layer between the anti-fingerprint layers, the transition layer being an aluminum layer. 如申請專利範圍第1項所述的鍍膜件，其中所述抗指紋層的厚度為100-200nm。 The coated member according to claim 1, wherein the anti-fingerprint layer has a thickness of 100 to 200 nm. 如申請專利範圍第1項所述的鍍膜件，其中所述過渡層的厚度為300-400nm。 The coated article of claim 1, wherein the transition layer has a thickness of 300-400 nm. 如申請專利範圍第1項所述的鍍膜件，其中所述基體由金屬材料或非金屬材料製成。 The coated article of claim 1, wherein the substrate is made of a metallic material or a non-metallic material. 一種鍍膜件的製作方法，其包括如下步驟：提供一基體；於基體的表面濺鍍一過渡層，該過渡層為一鋁層；採用真空濺鍍法在該過渡層遠離基體的表面濺鍍一抗指紋層，該抗指紋層為一奈米級鋁氧碳氮層。 A method for fabricating a coating member, comprising the steps of: providing a substrate; sputtering a transition layer on a surface of the substrate, the transition layer being an aluminum layer; and sputtering a surface of the transition layer away from the substrate by vacuum sputtering The anti-fingerprint layer is a nanometer-scale aluminum oxycarbon nitrogen layer. 如申請專利範圍第5項所述的鍍膜件的製作方法，其中濺鍍所述抗指紋層以鋁為靶材，對基體設置-100~-300V的偏壓，鍍膜溫度為20~300℃，以氮氣、乙炔及氧氣為反應氣體，氮氣的流量為5~70sccm，乙炔的流量為5~60sccm，氧氣的流量為5~60sccm；以氬氣為工作氣體，氬氣的流量為300~500sccm。 The method for fabricating a coated member according to claim 5, wherein the anti-fingerprint layer is sputtered with aluminum as a target, and a bias of -100 to -300 V is applied to the substrate, and the coating temperature is 20 to 300 ° C. Nitrogen, acetylene and oxygen are used as reaction gases. The flow rate of nitrogen is 5~70sccm, the flow rate of acetylene is 5~60sccm, the flow rate of oxygen is 5~60sccm, and the flow rate of argon gas is 300~500sccm. 如申請專利範圍第5項所述的鍍膜件的製作方法，其中濺鍍所述過渡層以鋁為靶材，對基體設置-100~-300V的偏壓，鍍膜溫度為20~300℃，以氬氣為工作氣體，其流量為300~500sccm，鍍膜時間為20~60分鐘。 The method for fabricating a coated member according to claim 5, wherein the transition layer is sputtered with aluminum as a target, and a bias of -100 to -300 V is applied to the substrate, and the coating temperature is 20 to 300 ° C. Argon is a working gas, the flow rate is 300~500sccm, and the coating time is 20~60 minutes. 如申請專利範圍第5項所述的鍍膜件的製作方法，其中所述製作方法還包括在濺鍍過渡層前對基體進行前處理的步驟。 The method of fabricating a coated member according to claim 5, wherein the manufacturing method further comprises the step of pretreating the substrate before the sputtering transition layer. 如申請專利範圍第8項所述的鍍膜件的製作方法，其中所述前處理包括對基體進行超聲波清洗及等離子體清洗的步驟。 The method of fabricating a coated member according to claim 8, wherein the pretreatment comprises the steps of ultrasonic cleaning and plasma cleaning of the substrate.