TWI501305B - Groove processing tool for substrate - Google Patents
Groove processing tool for substrate Download PDFInfo
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- TWI501305B TWI501305B TW101132134A TW101132134A TWI501305B TW I501305 B TWI501305 B TW I501305B TW 101132134 A TW101132134 A TW 101132134A TW 101132134 A TW101132134 A TW 101132134A TW I501305 B TWI501305 B TW I501305B
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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Description
本發明係關於溝槽加工工具，特別是關於由夾持具所保持，並與夾持具一起往前往後移動於屬於加工對象的基板上而用以在基板形成溝槽的基板之溝槽加工工具。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a groove processing tool, and more particularly to a groove processing of a substrate held by a holder and moved toward a substrate to be processed with a holder to form a groove on the substrate. tool.
薄膜太陽能電池係例如以專利文獻1所示之方法製造。在該專利文獻1所記載之製造方法中，係在玻璃等基板上形成由MO膜所構成之下部電極膜，之後，藉由在下部電極膜形成溝槽而分割為長條狀。接著，在下部電極膜上形成包含CIGS膜等黃銅礦(chalcopyrite)構造化合物半導體膜的化合物半導體膜。然後，藉由溝槽加工來條(stripe)狀地去除該等半導體膜的一部分而分割為長條狀，並以覆蓋該等半導體膜的方式形成上部電極膜。最後，上部電極膜的一部分藉由溝加工而條狀地剝離來分割為長條狀。The thin film solar cell is produced, for example, by the method described in Patent Document 1. In the manufacturing method described in Patent Document 1, a lower electrode film made of an MO film is formed on a substrate such as glass, and then formed into a strip shape by forming a groove in the lower electrode film. Next, a compound semiconductor film containing a chalcopyrite structure compound semiconductor film such as a CIGS film is formed on the lower electrode film. Then, a part of the semiconductor films is stripped and removed into a strip shape by trench processing, and the upper electrode film is formed so as to cover the semiconductor films. Finally, a part of the upper electrode film is stripped in a strip shape by groove processing to be divided into strips.
以如同上述步驟的溝槽加工技術之一而言，係使用機械切割(mechanical scribe)法而藉由鑽石(diamond)等機械工具(mechanical tool)來去除薄膜的一部分。在該機械切割法中，專利文獻2提案有一種方法，俾能進行穩定寬度的溝槽加工。在該專利文獻2所示之方法中，係使用具備調整加工負載之加工負載調整機構的溝槽加工工具及剝離工具。In one of the groove processing techniques as described above, a mechanical scribe method is used to remove a portion of the film by a mechanical tool such as diamond. In the mechanical cutting method, Patent Document 2 proposes a method of performing groove processing of a stable width. In the method disclosed in Patent Document 2, a groove processing tool and a peeling tool including a machining load adjusting mechanism for adjusting a machining load are used.
專利文獻1：日本實開昭63-16439號公報Patent Document 1: Japanese Unexamined Gazette No. 63-16439
專利文獻2：日本特開2002-033498號公報Patent Document 2: Japanese Laid-Open Patent Publication No. 2002-033498
在習知的溝槽加工裝置或溝槽加工方法中，在連續加工複數條溝槽時，係重複進行在加工1條溝槽後使加工頭上升並移動至加工開始位置而接著加工下一個溝槽等動作。在此種習知之裝置及方法中，在加工上耗費時間，而且，還會有必須將先前已調整過之工具的推壓力再次調整的情況。In the conventional groove processing device or groove processing method, when a plurality of grooves are continuously processed, the processing head is raised and moved to the processing start position after processing one groove, and then the next groove is processed. Actions such as slots. In such conventional devices and methods, it takes time to process, and there is also a case where the pressing force of the previously adjusted tool must be adjusted again.
因此，本發明人等已開發一種能有效率並迅速地進行溝槽加工的加工裝置，並已提出申請(日本特願2010-082953)。該加工裝置係將工具夾持具以可上下移動的方式安裝在加工頭，而且，搖動構件係以可在預定的角度範圍內搖動的方式安裝在該工具夾持具。溝槽加工工具係保持在搖動構件，搖動構件係在往前移動時之前進切削姿勢與往後移動時之向後切削姿勢下進行反轉。溝槽加工工具在往前移動側及往後移動側設置有對稱的前部刀尖及後部刀尖。而且，在搖動構件處於往前移動(前進)切削姿勢時，前部刀尖會與太陽能電池基板接觸，而在搖動構件處於往後移動(向後)切削姿勢時，後部刀尖會與太陽能電池基板接觸。Therefore, the inventors of the present invention have developed a processing apparatus which can efficiently and quickly perform the groove processing, and has filed an application (Japanese Patent Application No. 2010-082953). The machining device mounts the tool holder to the machining head in a vertically movable manner, and the rocking member is mounted to the tool holder in a manner that can be rocked within a predetermined angular range. The groove machining tool is held in the rocking member, and the rocking member is reversed in the backward cutting posture before the forward movement and the backward cutting posture when moving forward. The groove processing tool is provided with a symmetrical front cutting edge and a rear cutting edge on the forward moving side and the backward moving side. Moreover, when the rocking member is moved forward (forward) in the cutting posture, the front cutting edge is in contact with the solar cell substrate, and when the rocking member is in the backward moving (backward) cutting posture, the rear cutting edge is associated with the solar cell substrate. contact.
當使用上述之溝槽加工工具進行溝槽加工時，能有效率地進行溝槽加工。但是，當工具兩端的刀尖逐漸磨耗時，刃之移動方向的寬度會隨著磨耗而變寬，會有無法長期間良好地維持加工品 質的情形。When the groove processing is performed using the above-described groove processing tool, the groove processing can be efficiently performed. However, when the tip of the tool is gradually worn, the width of the blade in the moving direction is widened with wear, and the processed product can be maintained well for a long period of time. Quality situation.
本發明之課題，係在往前往後移動而可進行溝槽加工之溝槽加工工具中，減少因磨耗造成刀刃之寬度的變化，並謀求長壽化。An object of the present invention is to reduce the change in the width of the blade due to abrasion in a groove processing tool that can be moved after traveling, and to achieve longevity.
第1發明的基板之溝槽加工工具，係由夾持具所保持，並用以與夾持具一起相對地往前往後移動於屬於加工對象之基板上而在基板形成溝槽的工具，係具備：工具本體，係由夾持具所保持；及刀尖部。刀尖部係形成於工具本體的前端部，具有形成於移動方向之往前移動側的前端之第1刃、及形成於往後移動側的前端之第2刃，且第1刃與第2刃係連續而鄰接。The groove processing tool for a substrate according to the first aspect of the present invention is provided by a holder, and is provided with a tool for moving the substrate to the substrate to be processed and forming a groove on the substrate. : The tool body is held by the clamp; and the tip end. The tip end portion is formed at a distal end portion of the tool body, and has a first blade formed at a distal end on the forward moving side in the moving direction and a second blade formed at a distal end on the backward moving side, and the first blade and the second blade The blade system is continuous and adjacent.
在此，形成在刀尖部的第1刃與第2刃係鄰接。亦即，在第1刃與第2刃之間，並未存在有未形成刃的部分。因此，當第1刃磨耗時會切削第2刃，或反之當第2刃磨耗時會切削第1刃。因此，即使第1刃及第2刃磨耗，仍能抑制各刃的寬度產生變化，並能謀求工具的長壽化。Here, the first blade formed at the cutting edge portion is adjacent to the second blade. That is, there is no portion where the blade is not formed between the first blade and the second blade. Therefore, the second blade is cut when the first blade is worn, or the first blade is cut when the second blade is worn. Therefore, even if the first blade and the second blade are worn, it is possible to suppress variations in the width of each blade, and it is possible to increase the life of the tool.
第2發明的基板之溝槽加工工具，係在第1發明的溝槽加工工具中，第1刃及第2刃之各者，係從刀尖部之移動方向的中心位置朝向移動方向的兩側而形成，並相對於移動方向在工具本體側傾斜達相同角度。In the groove processing tool according to the first aspect of the invention, in the groove processing tool according to the first aspect of the invention, each of the first blade and the second blade is two from a center position in a moving direction of the blade edge portion toward a moving direction. It is formed laterally and is inclined at the same angle on the tool body side with respect to the moving direction.
在此亦與第1發明同樣，即使第1刃及第2刃磨耗，仍能抑制當初設定之刃的寬度產生變化。Also in the same manner as the first invention, even if the first blade and the second blade are worn, it is possible to suppress a change in the width of the blade which is originally set.
第3發明的基板之溝槽加工工具，係於第2發明的溝槽加工工具中，工具本體係由搖動構件所支撐者；該搖動構件係以搖動自如的方式由夾持具所支撐。而且，第1刃及第2刃的傾斜角度 係與搖動構件的搖動角度相等。A groove processing tool for a substrate according to a third aspect of the invention is the groove processing tool according to the second aspect of the invention, wherein the tool body system is supported by a rocking member; and the rocking member is supported by the clamp in a rocking manner. Moreover, the inclination angle of the first blade and the second blade It is equal to the shaking angle of the rocking member.
在此，在往前移動時及往後移動時之各者中，各刃之寬度整體係與基板接觸，能效率良好地進行加工。Here, in each of the forward movement and the backward movement, the width of each blade is entirely in contact with the substrate, and the processing can be performed efficiently.
第4發明的基板之溝槽加工工具，係於第1發明至第3發明的溝槽加工工具中，刀尖部係以移動方向的寬度隨著越朝向前端而越變窄的方式，傾斜且對稱地形成有相對向之往前移動側的側面與往後移動側的側面。In the groove processing tool according to the fourth aspect of the invention, in the groove processing tool according to the first to third aspects of the present invention, the width of the blade edge portion is inclined so as to become narrower toward the tip end. The side surface opposite to the moving side and the side moving backward are formed symmetrically.
在此，刀尖部之移動方向的寬度較佳為全部相同。此時，即使第1刃及第2刃磨耗，移動方向之寬度仍會因為切削彼此的刃而不會改變。Here, the widths of the blade tips in the moving direction are preferably all the same. At this time, even if the first blade and the second blade are worn, the width of the moving direction is not changed by cutting the blades of each other.
但是，通常，若刀尖部的寬度非常小而將小寬度的刀尖部做成為較長時，強度就會降低，且在加工中破損的可能性會變高。However, in general, when the width of the tip portion is extremely small and the tip portion having a small width is made long, the strength is lowered, and the possibility of breakage during processing becomes high.
因此，在該第4發明中，刀尖部係以前端較細且隨著離開前端而變越粗的方式形成。因此，不但能抑制強度的降低，還能抑制因磨耗造成寬度變化而謀求長壽化。Therefore, in the fourth aspect of the invention, the tip end portion is formed to be thinner at the tip end and thicker as it goes away from the tip end. Therefore, not only the reduction in strength can be suppressed, but also the change in width due to abrasion can be suppressed, and longevity can be achieved.
第5發明的基板之溝槽加工工具，係在第1發明至第4發明的溝槽加工工具中，刀尖部之在與移動方向正交之方向的寬度比工具本體之相同方向的寬度窄。In the groove processing tool according to the first to fourth aspects of the invention, in the groove processing tool according to the first aspect of the invention, the width of the cutting edge portion in the direction orthogonal to the moving direction is narrower than the width of the tool body in the same direction. .
刀尖部之與移動方向正交之方向的寬度，必須因應加工之溝槽的寬度尺寸來設定。而且，一般而言，溝槽寬度尺寸非常窄。另一方面，工具本體必須有預定的寬度，以便裝設於夾持具或確保強度。The width of the tip end in the direction orthogonal to the direction of movement must be set according to the width dimension of the groove to be machined. Moreover, in general, the groove width is very narrow. On the other hand, the tool body must have a predetermined width for mounting on the holder or to ensure strength.
因此，在該溝槽加工工具中，使刀尖部之與移動方向正交之方向的寬度較窄，在另一方面，使工具本體之相同方向的寬度較 粗。Therefore, in the groove processing tool, the width of the blade tip portion in the direction orthogonal to the moving direction is made narrower, and on the other hand, the width of the tool body in the same direction is made wider. Crude.
第6發明的基板之溝槽加工工具，係在第5發明的溝槽加工工具中，工具本體之刀尖部側的部分在與移動方向正交之方向的寬度係隨著越靠近刀尖部而越變窄。In the groove processing tool according to the fifth aspect of the present invention, in the groove processing tool according to the fifth aspect of the invention, the width of the portion on the cutting edge side of the tool body in the direction orthogonal to the moving direction is closer to the cutting edge portion. And the narrower.
在上述之本發明中，係在往前往後移動而可進行溝槽加工之溝槽加工工具中，能減少因磨耗造成刃之寬度的變化，並謀求長壽化。In the above-described present invention, it is possible to reduce the change in the width of the blade due to abrasion in the groove processing tool which can be moved to the rear and can perform the groove processing, and to achieve longevity.
1‧‧‧平台1‧‧‧ platform
2‧‧‧工具2‧‧‧ Tools
3‧‧‧加工頭3‧‧‧Processing head
4‧‧‧攝影機4‧‧‧ camera
5‧‧‧監視器5‧‧‧Monitor
6‧‧‧移動支撐機構6‧‧‧Mobile support mechanism
7a、7b‧‧‧支撐柱7a, 7b‧‧‧ support column
8‧‧‧導引桿8‧‧‧ Guide rod
9、14‧‧‧導件9, 14 ‧ ‧ guides
10‧‧‧馬達10‧‧‧ motor
12‧‧‧台座12‧‧‧ pedestal
13‧‧‧支撐台13‧‧‧Support table
16‧‧‧基座16‧‧‧Base
17‧‧‧夾持具17‧‧‧Clamps
18‧‧‧搖動構件18‧‧‧Shake components
19‧‧‧汽缸19‧‧‧ cylinder
22‧‧‧夾持具本體22‧‧‧Clamp body
22a‧‧‧開口22a‧‧‧ Opening
23‧‧‧支撐構件23‧‧‧Support members
23a‧‧‧貫通孔23a‧‧‧through holes
24‧‧‧工具裝設部24‧‧‧Tools Installation Department
24a‧‧‧固定板24a‧‧‧fixed board
25‧‧‧延長部25‧‧‧Extension
25a‧‧‧孔25a‧‧ hole
25b‧‧‧上端部25b‧‧‧Upper
26‧‧‧插銷26‧‧‧Tram
27a、27b‧‧‧限制構件27a, 27b‧‧‧Restricted components
28a、28b‧‧‧筒狀構件28a, 28b‧‧‧ tubular members
29a、29b、32‧‧‧彈簧29a, 29b, 32‧ ‧ spring
30‧‧‧缸體支撐構件30‧‧‧Cylinder support members
31‧‧‧彈簧支撐構件31‧‧‧Spring support members
34a、34b‧‧‧氣體供給部34a, 34b‧‧‧ Gas Supply Department
35‧‧‧接頭35‧‧‧Connectors
46‧‧‧氣體噴嘴46‧‧‧ gas nozzle
36‧‧‧工具本體36‧‧‧Tool body
37‧‧‧刀尖部37‧‧‧The tip of the knife
37a、37b‧‧‧側面37a, 37b‧‧‧ side
38a‧‧‧第1刃38a‧‧‧1nd blade
38b‧‧‧第2刃38b‧‧‧2nd blade
C‧‧‧中心線C‧‧‧ center line
D1、D2、D3‧‧‧角度D1, D2, D3‧‧‧ angle
H‧‧‧直線H‧‧‧ Straight line
+M‧‧‧往前移動側+M‧‧‧ moving forward
-M‧‧‧往後移動側-M‧‧‧ moving side later
W‧‧‧太陽能電池基板W‧‧‧Solar battery substrate
W1、W2‧‧‧寬度W1, W2‧‧‧ width
第1圖係為本發明的一實施形態之裝設有溝槽加工工具的溝槽加工裝置的外觀立體圖。Fig. 1 is a perspective view showing the appearance of a groove processing apparatus equipped with a groove processing tool according to an embodiment of the present invention.
第2圖係為溝槽加工工具之加工頭的前視圖。Figure 2 is a front view of the processing head of the groove machining tool.
第3圖(a)至(c)係為顯示溝槽加工工具之側面、正面、及一部分擴大的圖。Fig. 3 (a) to (c) are views showing the side surface, the front surface, and a part of the groove processing tool enlarged.
第4圖(a)至(c)係為用以說明溝槽加工時之動作的示意圖。Fig. 4 (a) to (c) are schematic views for explaining the operation at the time of groove processing.
第5圖(a)至(c)係為顯示溝槽加工時之動作及刀尖部的磨耗之示意圖。Fig. 5 (a) to (c) are schematic views showing the operation during the processing of the groove and the wear of the tip portion.
將本發明的一實施形態之裝設有溝槽加工工具的積體型薄膜太陽能電池用溝槽加工裝置的外觀立體圖顯示於第1圖。An external perspective view of a groove processing apparatus for an integrated thin film solar cell equipped with a groove processing tool according to an embodiment of the present invention is shown in Fig. 1.
該裝置係具備載置太陽能電池基板W的平台1、裝設有溝槽加工工具(以下，簡單記載為工具)2的加工頭3、及各有2個的攝影機(camera)4及監視器(monitor)5。This apparatus includes a stage 1 on which a solar cell substrate W is placed, a processing head 3 equipped with a groove processing tool (hereinafter simply referred to as a tool) 2, and two cameras 4 and monitors (each). Monitor)5.
平台1係於水平面內可在第1圖的Y方向移動。此外，平台1係在水平面內可轉動至任意的角度。再者，在第1圖中，係顯示加工頭3之概略外觀，而於後敘述加工頭3之詳細內容。The platform 1 is movable in the horizontal direction of Fig. 1 in the horizontal plane. In addition, the platform 1 can be rotated to any angle in the horizontal plane. In addition, in the first figure, the outline appearance of the processing head 3 is shown, and the details of the processing head 3 will be described later.
加工頭3係藉由移動支撐機構6而於平台1之上方可朝X,Y方向移動。再者，如第1圖所示，X方向係為在水平面內與Y方向正交之方向。移動支撐機構6係具有：1對支撐柱7a,7b；跨及1對支撐柱7a,7b間而設置之導引桿8；及驅動形成於導引桿8之導件9的馬達10。如同前述，加工頭3係沿著導件9而可在X方向移動。The processing head 3 is movable in the X, Y direction above the platform 1 by moving the support mechanism 6. Further, as shown in Fig. 1, the X direction is a direction orthogonal to the Y direction in the horizontal plane. The moving support mechanism 6 has a pair of support columns 7a, 7b, a guide rod 8 disposed across a pair of support columns 7a, 7b, and a motor 10 that drives the guide 9 formed on the guide rod 8. As described above, the processing head 3 is movable in the X direction along the guide 9.
2個攝影機4係分別固定於台座12。各台座12係可沿著設置於支撐台13之朝X方向延伸的導件14移動。2個攝影機4可進行上下移動，且以各攝影機4所拍攝之影像係顯示於對應的監視器5。Two cameras 4 are fixed to the pedestal 12, respectively. Each of the pedestals 12 is movable along a guide 14 that is provided in the support table 13 and extends in the X direction. The two cameras 4 are movable up and down, and the images captured by the cameras 4 are displayed on the corresponding monitor 5.
將加工頭3取出顯示於第2圖。加工頭3係具有板狀的基座16、夾持具17、搖動構件18、及汽缸(air cylinder)19。The processing head 3 is taken out and shown in Fig. 2. The processing head 3 has a plate-shaped susceptor 16, a holder 17, a rocking member 18, and an air cylinder 19.
夾持具17係透過未圖示之軌道而以朝上下方向滑動自如的方式支撐在基座16。夾持具17係具有夾持具本體22、及固定於夾持具本體22之表面的支撐構件23。夾持具本體22係形成為板狀，並在上部具有開口22a。支撐構件23係為橫方向較長的矩形之構件，且內部形成有供搖動構件18插通之貫通孔23a。The holder 17 is supported by the susceptor 16 so as to be slidable in the vertical direction through a rail (not shown). The holder 17 has a holder body 22 and a support member 23 fixed to the surface of the holder body 22. The holder body 22 is formed in a plate shape and has an opening 22a at the upper portion. The support member 23 is a rectangular member that is long in the lateral direction, and a through hole 23a through which the rocking member 18 is inserted is formed inside.
搖動構件18係以搖動自如的方式支撐在夾持具本體22及支撐構件23。搖動構件18係具有下部的工具裝設部24、及從工具裝設部24朝上方延伸而形成之延長部25。The rocking member 18 is supported by the holder body 22 and the support member 23 in a rocking manner. The rocking member 18 has a lower tool mounting portion 24 and an extension portion 25 that is formed to extend upward from the tool mounting portion 24.
工具裝設部24形成有溝，工具2係***於該溝，且工具2係藉由固定板24a而固定於溝內。The tool mounting portion 24 is formed with a groove, the tool 2 is inserted into the groove, and the tool 2 is fixed in the groove by the fixing plate 24a.
於延長部25的下部，在水平方向且與溝形成方向正交之方向形成有貫通的孔25a。而且，搖動構件18係以貫通該孔25a的插銷26為中心而成為搖動自如。插銷26係藉由夾持具本體22與支撐構件23來支撐。A through hole 25a is formed in a lower portion of the extension portion 25 in a direction orthogonal to the groove formation direction in the horizontal direction. Further, the rocking member 18 is rockable around the pin 26 that penetrates the hole 25a. The latch 26 is supported by the holder body 22 and the support member 23.
在延長部25之上端部25b的左右兩側，係設置有1對限制構件27a,27b。如第4圖所示，各限制構件27a,27b係具有固定於夾持具本體22之筒狀構件28a,28b、及***於筒狀構件28a,28b之內部的彈簧29a,29b。而且，藉由各彈簧29a,29b的前端與延長部25之上端部25b抵接，搖動構件18會維持在如第2圖及第4圖(b)所示之中立位置。此外，搖動構件18搖動而推動任一個彈簧29a,29b，並藉由延長部25的上端部25b與筒狀構件28a,28b抵接來限制搖動角度。在本實施形態中，係以搖動構件18的搖動角度限制在±3°的角度範圍之方式來設定，惟較佳為限制在±5°以內。A pair of restriction members 27a and 27b are provided on the left and right sides of the upper end portion 25b of the extension portion 25. As shown in Fig. 4, each of the restricting members 27a, 27b has cylindrical members 28a, 28b fixed to the holder body 22, and springs 29a, 29b inserted into the inside of the cylindrical members 28a, 28b. Further, the distal end of each of the springs 29a, 29b abuts against the upper end portion 25b of the extension portion 25, and the rocking member 18 is maintained at the neutral position as shown in Figs. 2 and 4(b). Further, the rocking member 18 is rocked to push any of the springs 29a, 29b, and the rocking angle is restricted by the upper end portion 25b of the extension portion 25 abutting against the cylindrical members 28a, 28b. In the present embodiment, the rocking angle of the rocking member 18 is limited to an angular range of ±3°, but it is preferably limited to within ±5°.
汽缸19係固定於缸體支撐構件30的上面。缸體支撐構件30係配置於夾持具17的上部，並固定於基座16。缸體支撐構件30形成有朝上下方向貫通的孔，汽缸19的活塞桿(piston rod)(未圖示)係貫通該貫通孔，桿前端係連接至夾持具17。The cylinder 19 is fixed to the upper surface of the cylinder support member 30. The cylinder support member 30 is disposed on the upper portion of the clamp 17 and is fixed to the base 16 . The cylinder support member 30 is formed with a hole penetrating in the vertical direction, and a piston rod (not shown) of the cylinder 19 penetrates the through hole, and the rod front end is connected to the clamp 17.
此外，基座16的上部設置有彈簧支撐構件31。彈簧支撐構件31與夾持具17之間設置有彈簧32，夾持具17藉由彈簧32而朝上方彈推。藉由該彈簧32而能將夾持具17的自體重量大致抵銷。Further, an upper portion of the base 16 is provided with a spring support member 31. A spring 32 is disposed between the spring support member 31 and the clamp 17, and the clamp 17 is pushed upward by the spring 32. The spring weight of the clamp 17 can be substantially offset by the spring 32.
在夾持具17的左右兩側，設置有1對氣體供給部34a,34b。1 對氣體供給部34a,34b均為相同構成，而分別具有接頭(joint)35與氣體噴嘴(air nozzle)46。On the left and right sides of the holder 17, a pair of gas supply portions 34a, 34b are provided. 1 The gas supply portions 34a and 34b have the same configuration, and each has a joint 35 and an air nozzle 46.
第3圖係顯示工具2的詳細內容。第3圖(a)係為工具2的側視圖，第3圖(b)係為其前視圖，第3圖(c)係為刀尖部的一部分擴大圖。在第3圖(c)顯示工具2的移動方向M。Figure 3 shows the details of the tool 2. Fig. 3(a) is a side view of the tool 2, Fig. 3(b) is a front view thereof, and Fig. 3(c) is a partially enlarged view of the tip end portion. The moving direction M of the tool 2 is shown in Fig. 3(c).
工具2係具有保持於夾持具17的工具本體36、及形成於工具本體36的前端部之刀尖部37。刀尖部37係在工具本體36的前端部中形成在高度h(參照第3圖(b))的範圍。The tool 2 has a tool body 36 held by the holder 17 and a blade edge portion 37 formed at a front end portion of the tool body 36. The tip end portion 37 is formed in the front end portion of the tool body 36 at a height h (see FIG. 3(b)).
在刀尖部37的前端中，在移動方向的兩側形成有第1刃38a及第2刃38b。在此，第1刃38a係為用以在往前移動時進行溝槽加工的刃，第2刃38b係為用以在往復移動時進行溝槽加工的刃。In the front end of the cutting edge portion 37, a first blade 38a and a second blade 38b are formed on both sides in the moving direction. Here, the first blade 38a is a blade for performing groove processing when moving forward, and the second blade 38b is a blade for performing groove processing during reciprocating movement.
工具本體36的刀尖部37側之部分與刀尖部37係可由第3圖(b)得知，在前視中形成為連續。而且，該等之移動方向的寬度係隨著越朝前端越變窄(刃的前端寬度為W1)。亦即，刀尖部37之相對向的往前移動側的側面37a與往後移動側的側面37b係形成為傾斜且對稱，且兩側面37a,37b係以角度D1朝向上方分開。The portion of the tool body 36 on the blade edge portion 37 side and the blade edge portion 37 can be known from Fig. 3(b), and are formed to be continuous in the front view. Moreover, the width of the moving direction is narrower as it goes toward the front end (the front end width of the blade is W1). That is, the side surface 37a on the forward moving side of the blade edge portion 37 and the side surface 37b on the rearward moving side are formed to be inclined and symmetrical, and the both side faces 37a, 37b are separated upward by the angle D1.
此外，如第3圖(a)所示，在刀尖部37之中，與移動方向正交之方向的寬度W2係形成為比工具本體36之同方向的寬度窄。該方向之刀尖部37的寬度係遍及全長皆為W2。Further, as shown in FIG. 3(a), the width W2 of the blade edge portion 37 in the direction orthogonal to the moving direction is formed to be narrower than the width of the tool body 36 in the same direction. The width of the tip end portion 37 in this direction is W2 throughout the entire length.
而且，由第3圖(a)即可明瞭，工具本體36的刀尖部37側的部分之與移動方向正交之方向的寬度，係以隨著越靠近刀尖部37越變窄的方式，以角度D2傾斜。Further, as is clear from Fig. 3(a), the width of the portion of the tool body 36 on the side of the cutting edge portion 37 in the direction orthogonal to the moving direction is narrowed as it approaches the cutting edge portion 37. , tilted at an angle D2.
如第3圖(c)圖所示，第1刃38a係從工具2之移動方向的中 心C朝向移動方向一方側(往前移動側+M)而形成。此外，第2刃38b係從工具2之移動方向的中心C朝向移動方向另一方側(往後移動側-M)而形成。亦即，第1刃38a與第2刃38b係連續而鄰接，且在該等刃38a,38b之間並不存在非為刃的部分。而且，第1刃38a及第2刃38b皆相對於沿著移動方向之直線(與中心線C正交之直線)H而同樣傾斜達角度D3。As shown in Fig. 3(c), the first blade 38a is in the middle of the moving direction of the tool 2. The core C is formed toward one side in the moving direction (moving forward side +M). Further, the second blade 38b is formed from the center C in the moving direction of the tool 2 toward the other side in the moving direction (moving side -M toward the rear). That is, the first blade 38a and the second blade 38b are continuous and adjacent, and there is no portion which is not a blade between the blades 38a and 38b. Further, both the first blade 38a and the second blade 38b are inclined at an angle D3 with respect to a straight line (a line orthogonal to the center line C) H along the moving direction.
另外，在以下顯示作為一實施例之刀尖部37的各要素。In addition, each element of the blade edge portion 37 as an embodiment is shown below.
W1：0.05mm至0.20mmW1: 0.05mm to 0.20mm
W2：0.02mm至0.10mm(依據溝槽寬度設定)W2: 0.02mm to 0.10mm (set according to the groove width)
D1：30°至50°D1: 30° to 50°
D2：20°至60°D2: 20° to 60°
D3：2°至15°D3: 2° to 15°
在使用上述之裝置對薄膜太陽能電池基板進行溝槽加工時，係藉由移動支撐機構6使加工頭3移動並且使平台1移動，且使用攝影機4及監視器5而使工具2位於要形成溝槽之預定線上。When the thin film solar cell substrate is grooved using the above-described apparatus, the processing head 3 is moved by the moving support mechanism 6 and the stage 1 is moved, and the tool 2 is placed on the thin film solar cell to be formed by using the camera 4 and the monitor 5. The predetermined line of the tank.
在進行上述之定位後，驅動汽缸19而使夾持具17及搖動構件18下降，使工具2的前端與薄膜接觸。此時之工具2相對於薄膜的加壓力，係藉由汽缸19所供給之氣壓來調整。After the above positioning, the cylinder 19 is driven to lower the clamp 17 and the rocking member 18, and the tip end of the tool 2 is brought into contact with the film. The pressing force of the tool 2 with respect to the film at this time is adjusted by the air pressure supplied from the cylinder 19.
接著，驅動馬達10，使加工頭3沿著溝槽加工預定線掃描。將此時之搖動構件18及工具2的姿勢示意性顯示於第4圖及第5圖。Next, the motor 10 is driven to scan the processing head 3 along the groove processing planned line. The postures of the rocking member 18 and the tool 2 at this time are schematically shown in FIGS. 4 and 5.
如第4圖(a)及第5圖(a)所示，往前移動時(第4圖中往右側之移動時)，由於第1刃38a與基板上之薄膜的接觸阻力，搖動構件 18會以插銷26為中心而順時針搖動。該搖動係由於搖動構件18的上端部25b與右側之筒狀構件28a抵接而受到限制。因此，工具2係在維持如第4圖(a)所示的傾斜姿勢，在第1刃38a與基板上的薄膜抵接且第2刃38b未與基板的表面抵接之狀態下，朝+M方向移動而形成溝槽。As shown in FIGS. 4(a) and 5(a), when moving forward (when moving to the right in FIG. 4), the rocking member is due to the contact resistance of the first blade 38a with the film on the substrate. 18 will swing clockwise around the pin 26. This rocking is restricted by the upper end portion 25b of the rocking member 18 abutting against the right cylindrical member 28a. Therefore, the tool 2 is maintained in the inclined posture as shown in Fig. 4(a), and the first blade 38a is in contact with the film on the substrate, and the second blade 38b is not in contact with the surface of the substrate. The M direction moves to form a groove.
之後，使加工頭3相對於基板相對地移動，接著為了將工具2降下而使移動至溝槽加工預定線上。然後，與前述同樣地，將工具2推抵至基板上的薄膜而使加工頭3朝與前述反方向移動。Thereafter, the processing head 3 is relatively moved with respect to the substrate, and then moved to the groove processing predetermined line in order to lower the tool 2. Then, in the same manner as described above, the tool 2 is pushed against the film on the substrate, and the processing head 3 is moved in the opposite direction.
如第4圖(c)及第5圖(b)所示，在該往後移動(第4圖中往左側之移動時)中，由於第2刃38b與基板上之薄膜的接觸阻力，搖動構件18會以插銷26為中心而逆時針搖動。該搖動係由於搖動構件18的上端部25b與左側之筒狀構件28b抵接而受到限制。因此，工具2係在維持如第4圖(c)所示的傾斜姿勢，在第2刃38b與基板上的薄膜抵接且第1刃38a未與基板的表面抵接之狀態下，朝-M方向移動而形成溝槽。As shown in FIGS. 4(c) and 5(b), in the backward movement (when moving to the left in FIG. 4), the second blade 38b is shaken by the contact resistance of the film on the substrate. The member 18 will rock counterclockwise centering on the pin 26. This rocking is restricted by the upper end portion 25b of the rocking member 18 abutting against the left cylindrical member 28b. Therefore, the tool 2 is maintained in the inclined posture as shown in FIG. 4(c), and the second blade 38b is in contact with the film on the substrate, and the first blade 38a is not in contact with the surface of the substrate. The M direction moves to form a groove.
再者，在溝槽加工中或溝槽加工結束時，會從各氣體供給部34a,34b之氣體噴嘴46噴出氣體，去除從基板剝離的膜。Further, during the groove processing or at the end of the groove processing, gas is ejected from the gas nozzles 46 of the respective gas supply portions 34a and 34b to remove the film peeled off from the substrate.
(1)在如同上述之溝槽加工中，第1刃38a及第2刃38b係持續大致均等地磨耗。而且，因為第1刃38a及第2刃38b係以寬度方向的中心C為交界而鄰接形成在兩側，故當一方磨耗時另一方也磨耗，各刃38a,38b之移動方向的寬度不會大幅變化。此狀態係顯示於第5圖(c)。在第5圖(c)中，左側的工具2係顯示初期狀態。此外，中間的工具2係顯示磨耗進展到某種程度的狀態，右 側的工具2係顯示磨耗進一步進展之狀態。在中間及右側的圖式中，以斜線表示之部分係為已磨耗之部分。從該等圖式即可明瞭，即使磨耗進展，各刃38a,38b之移動方向的寬度不太有變化。因此，比習知的工具更能謀求長壽化。(1) In the groove processing as described above, the first blade 38a and the second blade 38b continue to wear substantially uniformly. Further, since the first blade 38a and the second blade 38b are formed adjacent to each other at the center C in the width direction, the other side is worn when one wears, and the width of each of the blades 38a and 38b does not move. Great changes. This state is shown in Figure 5(c). In Fig. 5(c), the tool 2 on the left side shows the initial state. In addition, the middle tool 2 shows that the wear progresses to a certain degree, right The tool 2 on the side shows a state in which the wear progresses further. In the middle and right drawings, the portion indicated by the slanted line is the worn portion. It can be understood from the drawings that the width of the respective blades 38a, 38b in the moving direction does not change much even if the wear progresses. Therefore, it is possible to achieve longer life than conventional tools.
(2)因為將搖動構件的搖動角度與各刃38a,38b之傾斜角度D3設為相同，故在工具2的往前移動及往後移動的各者中，各刃38a,38b的寬度整體會與基板接觸。因此，能效率良好地進行加工。(2) Since the rocking angle of the rocking member is set to be the same as the tilting angle D3 of each of the blades 38a and 38b, the width of each of the blades 38a and 38b is generally increased in each of the tool 2 moving forward and backward. Contact with the substrate. Therefore, the processing can be performed efficiently.
(3)因為將刀尖部37之移動方向的寬度以隨著越朝前端越變窄的方式形成，故能抑制刀尖部37之強度降低而謀求長壽化。(3) Since the width of the blade edge portion 37 in the moving direction is formed to be narrower toward the tip end, it is possible to suppress the decrease in the strength of the blade edge portion 37 and to achieve a longer life.
本發明並非限定於上述之實施形態者，可在不脫離本發明之範圍進行種種變形或修正。The present invention is not limited to the embodiments described above, and various modifications and changes can be made without departing from the scope of the invention.
雖舉例刀尖部之各要素的一例，但此係為一例而可進行種種變更。例如，為了形成寬度數mm左右的溝槽，亦可將刀尖的寬度W2設為與工具本體的寬度相同，或設為比工具本體長。Although an example of each element of the cutting edge part is exemplified, this is an example and can be variously changed. For example, in order to form a groove having a width of about several mm, the width W2 of the blade edge may be set to be the same as the width of the tool body or longer than the tool body.
2‧‧‧工具2‧‧‧ Tools
46‧‧‧氣體噴嘴46‧‧‧ gas nozzle
36‧‧‧工具本體36‧‧‧Tool body
37‧‧‧刀尖部37‧‧‧The tip of the knife
37a、37b‧‧‧側面37a, 37b‧‧‧ side
38a‧‧‧第1刃38a‧‧‧1nd blade
38b‧‧‧第2刃38b‧‧‧2nd blade
C‧‧‧中心線C‧‧‧ center line
D1、D2、D3‧‧‧角度D1, D2, D3‧‧‧ angle
H‧‧‧直線H‧‧‧ Straight line
+M‧‧‧往前移動側+M‧‧‧ moving forward
-M‧‧‧往後移動側-M‧‧‧ moving side later
W1、W2‧‧‧寬度W1, W2‧‧‧ width
Claims (4)
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011212148A JP5361967B2 (en) | 2011-09-28 | 2011-09-28 | Substrate grooving tool |
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| Publication Number | Publication Date |
|---|---|
| TW201330079A TW201330079A (en) | 2013-07-16 |
| TWI501305B true TWI501305B (en) | 2015-09-21 |
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| TW101132134A TWI501305B (en) | 2011-09-28 | 2012-09-04 | Groove processing tool for substrate |
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| JP (1) | JP5361967B2 (en) |
| KR (1) | KR101402755B1 (en) |
| CN (1) | CN103029155B (en) |
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| TWI513671B (en) * | 2013-12-06 | 2015-12-21 | Ind Tech Res Inst | Cutting tool and glass cutting device using the same |
| JP6267566B2 (en) * | 2014-03-28 | 2018-01-24 | 三星ダイヤモンド工業株式会社 | Grooving tool and scribing device equipped with the groove machining tool |
| IT201600105300A1 (en) * | 2016-10-19 | 2018-04-19 | Manz Italy Srl | METHOD AND PROCESSING APPARATUS |
| KR102124707B1 (en) | 2018-12-03 | 2020-06-18 | 김상근 | A Processing Too1 for a Difficult-to-Cut Material Used in Processing a Helix of Ceramics |
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| TW201131800A (en) * | 2010-01-08 | 2011-09-16 | Mitsuboshi Diamond Ind Co Ltd | Groove machining tool for use with a thin-film solar cell |
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| JPH11310426A (en) * | 1998-04-24 | 1999-11-09 | Sony Corp | Glass scrubber |
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| SE527775C2 (en) * | 2004-04-27 | 2006-06-07 | Seco Tools Ab | Tools and inserts for chip separating machining with co-operating bell-shaped locking means |
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| JP2011142236A (en) * | 2010-01-08 | 2011-07-21 | Mitsuboshi Diamond Industrial Co Ltd | Groove machining tool for thin-film solar cells and angle control structure of the same |
| JP2011162395A (en) * | 2010-02-09 | 2011-08-25 | Mitsuboshi Diamond Industrial Co Ltd | Substrate working apparatus |
| JP2011216646A (en) * | 2010-03-31 | 2011-10-27 | Mitsuboshi Diamond Industrial Co Ltd | Scribing device |
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- 2011-09-28 JP JP2011212148A patent/JP5361967B2/en not_active Expired - Fee Related
-
2012
- 2012-09-04 TW TW101132134A patent/TWI501305B/en not_active IP Right Cessation
- 2012-09-10 KR KR1020120099692A patent/KR101402755B1/en active IP Right Grant
- 2012-09-24 CN CN201210358601.0A patent/CN103029155B/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201131800A (en) * | 2010-01-08 | 2011-09-16 | Mitsuboshi Diamond Ind Co Ltd | Groove machining tool for use with a thin-film solar cell |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103029155B (en) | 2015-05-20 |
| JP2013071316A (en) | 2013-04-22 |
| TW201330079A (en) | 2013-07-16 |
| KR101402755B1 (en) | 2014-06-02 |
| JP5361967B2 (en) | 2013-12-04 |
| KR20130034589A (en) | 2013-04-05 |
| CN103029155A (en) | 2013-04-10 |
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