TWI488783B

TWI488783B - A liquid supply system and a vessel for liquid used for the same

Info

Publication number: TWI488783B
Application number: TW099117178A
Authority: TW
Inventors: Hirokazu Tanaka
Original assignee: Merck Patent Gmbh
Priority date: 2009-05-29
Filing date: 2010-05-28
Publication date: 2015-06-21
Also published as: WO2010137424A1; CN102448851A; JPWO2010137424A1; KR101635727B1; JP5450617B2; TW201100305A; KR20120024530A

Description

藥液供給系統及用於該系統的藥液用容器Chemical liquid supply system and medical liquid container for the same

本發明係關於一種液體藥品用送液裝置。特別是本發明係關於一種儲存、搬運且分配電子工業用藥品等的流體的單向(one way)方式的容器與利用該容器的液體藥品用送液裝置。The present invention relates to a liquid supply device for liquid medicines. In particular, the present invention relates to a one-way type container for storing, transporting, and dispensing a fluid such as an electronic industrial drug, and a liquid medicine supply device using the container.

一般用於製造半導體材料的藥品類，例如光阻組成物等儲藏於藥品容器中搬運，在製造工廠開封而使用。此種藥品容器的使用方式大致區分為重複使用稱為連鎖(link)方式的相同容器的方式，及稱為單向(one way)方式的每次都使用新的容器的方式。此處，特別是在藥品的純度重要的情況下，單向方式最理想。然而，由經濟的觀點來看，有改良的餘地，亦利用組合前述兩方式，以藥液直接接觸的內側容器為單向方式的複式儲存型容器。A pharmaceutical product generally used for producing a semiconductor material, for example, a photoresist composition, is stored in a pharmaceutical container, and is opened at a manufacturing facility. The manner in which such a medicine container is used is roughly classified into a method of reusing a same container called a link method, and a method of using a new container every time called a one way method. Here, especially in the case where the purity of the drug is important, the one-way method is most desirable. However, from the economic point of view, there is room for improvement, and the above-described two methods are combined, and the inner container in which the chemical liquid is directly contacted is a one-way type multi-store type container.

此種複式儲存型容器，一般使用由惰性材料構成的撓性薄膜的袋子作為內側容器。此內側容器配置於外側容器中，藥液填充於此內側容器內。容器使用後，即從內側容器使藥液排出後，將此內側容器從外側容器卸下、廢棄，將新的內側容器安裝於外側容器上。如此一來，再生作為藥液用容器，重新在內側容器內填充藥液。In such a multi-type storage type container, a bag of a flexible film made of an inert material is generally used as an inner container. The inner container is disposed in the outer container, and the chemical liquid is filled in the inner container. After the container is used, the drug solution is discharged from the inner container, the inner container is removed from the outer container, discarded, and the new inner container is attached to the outer container. In this way, the container for the chemical liquid is regenerated, and the liquid medicine is refilled in the inner container.

此種複式儲存型容器一直在研究各種的容器(例如參閱專利文獻1)。然而，外側容器的回收或者清洗接頭或外側容器，重新安裝袋子的再生等的作業需要相當的時間與費用，所以整體而言，成本的減低效果小，反而使用複式儲存型容器的情況，成本有比較高的傾向。Such a multi-type storage type container has been researching various containers (for example, refer to Patent Document 1). However, the recovery of the outer container or the cleaning of the joint or the outer container, and the re-installation of the bag require a considerable amount of time and expense, so that the cost reduction effect is small as a whole, and instead of using the double-type storage type container, the cost is A higher tendency.

另一方面，於單向方式的容器中，一般有以成形的耐藥合成樹脂製所成型的樹脂容器，及具有以金屬製的外側容器包圍成形的耐藥合成樹脂製的內側容器的雙重構造的複合容器。樹脂容器可廉價製造，使用後可容易廢棄，所以比較廣泛地被利用。另一方面，就複合容器而言，例如己開發出可廉價製造、使用後金屬與合成樹脂容易分離及解體、被廢棄的液體藥品用桶(pail)罐(例如參閱專利文獻2)。On the other hand, in the container of the one-way type, there is generally a resin container formed of a molded resistant synthetic resin, and a double structure having an inner container made of a synthetic synthetic resin surrounded by a metal outer container. Composite container. The resin container can be produced at low cost and can be easily discarded after use, so it is widely used. On the other hand, in the case of a composite container, for example, a pail canister for liquid medicine which can be easily produced at a low cost and which is easily separated, disassembled, and discarded after use is used (see, for example, Patent Document 2).

然而，以往習知的樹脂容器及複合容器，一般是藥液供給之際，在其容器和液體藥品容器安裝附帶送液管的連接器，將送液管***容器內，排出液體藥品的方式的容器。於此方法中，在連接有送液管的容器用完的情況，需要將送液管重新連接於含有藥液的容器。此時，在將送液管從使用後的空容器移設於裝有藥液的新容器之間，送液管會被空氣中浮游的塵埃等的雜質污染，或者送液管因操作錯誤而接觸到地面或容器表面等時，異物會附著於送液管上。結果，此等雜質或異物就和送液管一起被帶入容器內。However, in the conventional resin container and composite container, when a chemical liquid is supplied, a connector with a liquid supply tube is attached to the container and the liquid medicine container, and the liquid supply tube is inserted into the container to discharge the liquid medicine. container. In this method, when the container to which the liquid supply tube is connected is used up, it is necessary to reconnect the liquid supply tube to the container containing the chemical liquid. At this time, the liquid supply pipe is transferred from the empty container after use to the new container containing the chemical liquid, and the liquid supply pipe is contaminated by impurities such as dust floating in the air, or the liquid supply pipe is contacted due to an operation error. When it comes to the floor or the surface of the container, foreign matter will adhere to the liquid supply pipe. As a result, such impurities or foreign matter are carried into the container together with the liquid supply tube.

此外，在使用預先在內部裝有送液管的容器的情況下，由於藥液附著於整個送液管內面，所以打開蓋之際，有附著於送液管的藥液被空氣中雜質污染，將異物帶入裝置內的可能性高的缺點。Further, in the case of using a container in which a liquid supply tube is previously installed, since the chemical solution adheres to the entire inner surface of the liquid supply tube, when the cover is opened, the chemical liquid adhering to the liquid supply tube is contaminated by impurities in the air. A disadvantage of the possibility of bringing foreign matter into the device.

此外，先前的藥液容器在***送液管之際，由於取下容器的蓋子而打開，所以容器內的藥液接觸到空氣的時間比較長，而在***送液管之際，由於藥液被攪拌，所以藥液與空氣的接觸比較多。因此，有起因於氧化等的空氣接觸的藥液劣化大的傾向。In addition, the previous liquid medicine container is opened when the liquid supply tube is inserted, and the liquid in the container is exposed to the air for a long time, and the liquid medicine is inserted into the liquid supply tube due to the liquid medicine. It is stirred, so the contact between the liquid and the air is more. Therefore, there is a tendency that the chemical liquid which is caused by contact with air such as oxidation tends to be deteriorated.

再者，先前的藥液用容器全都是即使容器的蓋子在運送中途被不慎或故意開封，藥液的使用者也無法在使用其之前進行確認。例如於蓋子鬆開的情況下，將氧氣供給至容器內，內部的藥液有因氧化等而劣化的可能性，不易在使用時確認是否已經劣化。Furthermore, all of the previous liquid chemical containers are inadvertently or intentionally opened during the transportation of the lid of the container, and the user of the liquid medicine cannot confirm it before using it. For example, when the lid is loosened, oxygen is supplied into the container, and the internal chemical solution may be deteriorated by oxidation or the like, and it is difficult to confirm whether or not it has deteriorated at the time of use.

先前技術文獻Prior technical literature 專利文獻Patent literature

專利文獻1：特開平6-100087號公報Patent Document 1: Japanese Unexamined Patent Publication No. Hei 6-100087

專利文獻2：特開2008-100715號公報Patent Document 2: JP-A-2008-100715

本發明之目的在於提供一種可廉價製造，容器使用時亦可確認為未開封，容器更換時，可減輕藥液與空氣接觸的機會的液體藥品用送液管及其供給容器。An object of the present invention is to provide a liquid medicine supply pipe and a supply container thereof which can be manufactured at low cost and which can be confirmed to be unopened when the container is used, and which can reduce the chance of contact between the chemical solution and the air when the container is replaced.

依據本發明之藥液供給系統，其特徵在於：其係用以從填充有藥液的藥液用容器供給前述藥液的藥液供給系統，並且前述藥液用容器具備：具有開口部的容器本體；及內側蓋構件，其係具有嵌合於前述開口部內側的中空圓筒狀的內側蓋本體、具有從前述內側蓋本體的內側中空部延伸到前述容器本體的內側底部附近的液體通路的送液管、及既為密封前述內側蓋本體的外側開口端的密封構件且為藉由將其斷裂或去除而可將前述外側開口端不可逆地開口的密封構件，具備送液用配管與氣體導入用配管而成的連接插塞連接於前述內側蓋構件，此時將前述密封構件斷裂或去除而被***的前述送液用配管的前端部連接於位在前述內側蓋本體的內側中空部的設於前述送液管終端的頭部，(a)從前述氣體導入用配管通過設於前述內側蓋構件的從前述內側蓋本體的內側中空部貫通於容器本體內部的導孔，將氣體導入前述容器本體內，利用前述氣體的壓力，將前述藥液經由前述送液管與前述送液用配管，從前述容器本體內擠壓供給至外部，或者(b)經由前述送液用配管及前述送液管，從前述容器本體內吸引供給前述藥液。According to the chemical liquid supply system of the present invention, the chemical liquid supply system for supplying the chemical liquid from the chemical liquid container filled with the chemical liquid, and the medical liquid container includes the container having the opening a main body; and an inner cover member having a hollow cylindrical inner cover body fitted inside the opening, and having a liquid passage extending from an inner hollow portion of the inner cover main body to an inner bottom portion of the container body The liquid supply pipe and the sealing member which is a sealing member which seals the outer opening end of the inner cover main body, and which can open or detach the said outer opening end irreversibly, and the liquid-feeding piping and gas introduction. The connection plug formed by the pipe is connected to the inner cover member, and the distal end portion of the liquid supply pipe into which the sealing member is broken or removed is connected to the inner hollow portion of the inner cover main body. The head of the liquid supply pipe terminal (a) passes through the gas introduction pipe from the inner side of the inner cover body provided on the inner cover member The empty portion penetrates the guide hole in the inside of the container body, and introduces a gas into the container body, and the chemical solution is squeezed and supplied from the container body through the liquid supply tube and the liquid supply pipe by the pressure of the gas. To the outside, or (b) the supply of the chemical liquid from the inside of the container body via the liquid supply pipe and the liquid supply pipe.

依據本發明之藥液用容器，其特徵在於具備：具有開口部的容器本體；及內側蓋構件，其係具有嵌合於前述開口部內側的中空圓筒狀的內側蓋本體、具有從前述內側蓋本體的內側中空部延伸到前述容器本體的內側底部附近的液體通路的送液管、及既為密封前述內側蓋本體的外側開口端的密封構件且為藉由將其斷裂或去除而可將前述外側開口端不可逆地開口的密封構件，並且為了使填充於前述容器本體的藥液排出，設有頭部，該頭部係將具有送液用配管與氣體導入用配管的插塞連接於前述內側蓋構件之際，可於位在前述內側蓋本體的內側中空部的前述送液管的終端與將前述密封構件斷裂或去除而被***的前述送液用配管的前端部連接，並且前述內側蓋構件具有使從前述氣體導入用配管流入的氣體通過前述容器內的導孔。A container for a chemical solution according to the present invention includes: a container body having an opening; and an inner lid member having a hollow cylindrical inner lid body fitted inside the opening and having the inner side The inner hollow portion of the cover body extends to the liquid supply pipe of the liquid passage near the inner bottom portion of the container body, and the sealing member that seals the outer open end of the inner cover body and can be broken or removed by the above a sealing member that opens irreversibly on the outer open end, and a head portion that connects the plug having the liquid supply pipe and the gas introduction pipe to the inner side in order to discharge the chemical solution filled in the container body In the lid member, the distal end of the liquid supply tube located at the inner hollow portion of the inner lid main body and the distal end portion of the liquid supply pipe inserted to break or remove the sealing member, and the inner cover The member has a guide hole through which the gas flowing in from the gas introduction pipe passes through the inside of the container.

依據本發明之藥液用容器與送液管一體化，所以在藥液供給系統中利用，將使用內部的藥液後的容器換成下一個新的容器的情況，無送液管被異物或雜質污染、再將該等帶入容器內的情形。此外，轉換之際，無需處理被藥液沾濕的送液管，所以相較於先前的藥液容器或藥液供給系統，處理性佳。Since the container for a chemical solution according to the present invention is integrated with the liquid supply tube, it is used in the chemical solution supply system, and the container after the internal chemical solution is replaced with the next new container, and the liquid supply tube is not foreign matter or Contamination of impurities, and then bringing them into the container. Further, at the time of the conversion, it is not necessary to treat the liquid supply tube which is wetted by the chemical liquid, so that the handling property is better than the previous chemical liquid container or the chemical liquid supply system.

再者，依據本發明之藥液用容器可用作單向方式的容器，包含設於內部的送液管在利用後廢棄，所以無需清洗容器本體或送液管。此外，也無需在先前的具有雙重構造的複合容器所需的袋子重裝於外側容器。再者，若考慮如前述的藥液污染的減低產生的最終製品的良率提高等，則可綜合性地達成經濟上的藥液供給系統。Further, the container for a chemical solution according to the present invention can be used as a container of a one-way type, and the liquid supply tube provided inside is discarded after use, so that it is not necessary to clean the container body or the liquid supply tube. In addition, there is no need to reload the bag required in the prior composite container having a dual configuration to the outer container. Further, in consideration of an improvement in the yield of the final product due to the reduction in the chemical liquid contamination as described above, an economical chemical liquid supply system can be comprehensively realized.

以下，就本發明的實施形態詳細地進行說明。Hereinafter, embodiments of the present invention will be described in detail.

茲參閱附圖說明用以實施本發明的一實施態樣。An embodiment of the present invention will be described with reference to the accompanying drawings.

第1圖為依據本發明的藥液用容器3的側面圖。容器本體5具備開口部6，藥液12填充入內部，開口部為外側容器蓋10所密封。即，外觀上與先前一般的藥液用容器相同。容器本體或外側容器蓋的材質可從樹脂或金屬等中任意地選擇，或者也可以為改良處理性而設置手把等。Fig. 1 is a side view showing a container 3 for a drug solution according to the present invention. The container body 5 is provided with an opening 6 into which the chemical liquid 12 is filled, and the opening is sealed by the outer container lid 10. That is, the appearance is the same as that of the conventional general chemical liquid container. The material of the container body or the outer container lid may be arbitrarily selected from a resin, a metal, or the like, or a handle or the like may be provided for improved handleability.

本發明的藥液用容器在其內部構造有特徵。其內部構造的概略剖面圖如第2圖所示。在容器本體5的開口部外側切割有用以組裝外側容器蓋10的外螺紋6a。外側蓋的組裝可以未必是螺紋構造，例如也可以利用嵌入構造等，但在本發明中，外螺紋6a也可以用以固定後述的連接插塞，所以具有螺紋構造較好。The container for a drug solution of the present invention is characterized in its interior. A schematic cross-sectional view of the internal structure is shown in Fig. 2. An external thread 6a for assembling the outer container cover 10 is cut outside the opening of the container body 5. The assembly of the outer cover may not necessarily be a screw structure. For example, an insertion structure or the like may be used. However, in the present invention, the external thread 6a may be used to fix a connection plug to be described later, and therefore has a threaded structure.

另一方面，在開口部的內側組裝有內側蓋構件20。內側蓋構件20的構造如第3圖所示。中空圓筒狀的內側蓋本體7為嵌合於容器本體的開口部6內側的圓筒狀構件。On the other hand, the inner cover member 20 is assembled inside the opening. The structure of the inner cover member 20 is as shown in Fig. 3. The hollow cylindrical inner cover main body 7 is a cylindrical member that is fitted inside the opening 6 of the container body.

在其一方的端部設有從內部蓋本體的內側中空部到容器本體的底部的送液管8。在位於前述內側蓋本體的內側中空部的前述送液管的末端設有接合後述的送液配管的頭部8a。此頭部8a為了使送液配管的接合容易且使接合部的密合性良好，以防止漏液或漏氣，可設置如第3圖所示的錐形構造。此外，亦可設置用以改善密合性的連結器或O形環等。送液管的材料由於浸入容器本體內的藥液中，所以按照藥液的種類選擇對其藥液的耐受性高者。例如可用(a)聚烯烴樹脂，例如聚乙烯、聚丙烯、聚丁烯及此等的共聚物，(b)聚酯樹脂，例如聚對苯二甲酸乙二醇酯及聚對苯二甲酸丁二醇酯，(c)含氟樹脂，例如四氟乙烯、四氟乙烯-全氟烷基乙烯基醚共聚物、氟塑料40、三氟氯乙烯、聚偏二氟乙烯、聚氟乙烯及三氟氯乙烯-乙烯共聚物等。此等材料也可以組合兩種以上使用。此外，送液管可以是剛性高者，也可以是軟質者。在使用剛性高者的情況下，送液管的長度一般為到容器本體的底部附近的長度。因為若其短，則殘留在本體內的藥液會變多。另一方面，若送液管的末端長到接觸到底部的程度，則有時會難以從送液管的末端排出藥液。於此種情況下，也可以在送液管的末端部的側面設置孔，以使藥液的排出容易。此外，亦可使用軟質的送液管，但在此種情況下，使送液管長到接觸到容器本體的底部的程度，可減少排出時的藥液殘留量。A liquid supply pipe 8 is provided at one of the ends from the inner hollow portion of the inner lid body to the bottom of the container body. A head portion 8a that joins a liquid supply pipe to be described later is provided at an end of the liquid supply pipe located at the inner hollow portion of the inner lid body. The head portion 8a is provided with a tapered structure as shown in Fig. 3 in order to facilitate the joining of the liquid supply pipe and to improve the adhesion of the joint portion to prevent liquid leakage or air leakage. Further, a connector or an O-ring or the like for improving the adhesion may be provided. Since the material of the liquid supply tube is immersed in the chemical liquid in the container body, the resistance to the chemical solution is selected according to the type of the chemical liquid. For example, (a) a polyolefin resin such as polyethylene, polypropylene, polybutylene and copolymers thereof, (b) a polyester resin such as polyethylene terephthalate and polybutylene terephthalate may be used. a glycol ester, (c) a fluorine-containing resin such as tetrafluoroethylene, tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer, fluoroplastic 40, chlorotrifluoroethylene, polyvinylidene fluoride, polyvinyl fluoride and three Fluorovinyl chloride-ethylene copolymer and the like. These materials may also be used in combination of two or more. In addition, the liquid supply tube may be of high rigidity or soft. In the case where the rigidity is high, the length of the liquid supply pipe is generally the length to the vicinity of the bottom of the container body. Because if it is short, the amount of liquid remaining in the body will increase. On the other hand, if the end of the liquid supply tube is so long as it contacts the bottom, it may be difficult to discharge the chemical from the end of the liquid supply tube. In this case, a hole may be provided in the side surface of the distal end portion of the liquid supply tube to facilitate the discharge of the chemical liquid. Further, a soft liquid supply tube may be used, but in this case, the liquid supply tube can be made to reach the bottom of the container body to the extent that the amount of the chemical liquid remaining at the time of discharge can be reduced.

利用密封構件7a密封內側蓋本體的未設有送液管之側的端部，即內側蓋本體的外側開口端。此密封構件藉由將其斷裂或去除，可將前述外側開口端不可逆地開口。此處，所謂「可將開口端不可逆地開口」，意味著在使開口端開口的情況下，密封材料被破壞或變形，實質上無法回到使其開口前的狀態。作為此種密封材料較佳者，可舉由樹脂等的薄膜構成的膜狀密封材料。藉由使樹脂等的薄膜黏接或熔敷於開口部，要使開口部開口，需要切斷或去除薄膜，使其回到原來的狀態，實質上不可能。此膜狀密封構件在藥液的保存或搬運時，實質上起作用作為藥液用容器的蓋子。一般在搬運時或保存時，會將前述外側容器蓋10安裝於開口部上，此外側容器蓋也兼具保護膜狀密封構件的功能。另一方面，膜狀密封構件在藥液的供給時連接有後述的連接用插塞的情況下被斷裂或去除，可在內側蓋構件的內側中空部導入送液配管的端部。即，膜狀密封構件例如可使加工成銳利形狀的連接用插塞的前端等貫通而斷裂，或利用刀具等斷裂而挖通，或剝離而去除。藉由如此將膜狀密封構件斷裂或去除，在被開口的開口部導入前述的送液配管的端部，與送液管結合。最好此種膜狀密封構件的材料由比較柔軟的樹脂中選擇。具體而言，此材料可由舉作前述送液管的材料者中選擇。更具體而言，聚乙烯或聚丙烯價格便宜，在連接連接插塞之際，斷裂或去除也容易，所以是理想的材料。此膜狀密封構件例如利用黏接劑或熱熔敷，固定於內側蓋本體上。The end portion of the inner lid body on the side where the liquid supply tube is not provided, that is, the outer open end of the inner lid body, is sealed by the sealing member 7a. The sealing member can be opened irreversibly by breaking or removing the sealing member. Here, "the opening end can be opened irreversibly" means that the sealing material is broken or deformed when the opening end is opened, and it is substantially impossible to return to the state before the opening. As such a sealing material, a film-like sealing material made of a film such as a resin is preferable. When a film such as a resin is adhered or welded to the opening, it is necessary to cut the opening or remove the film to return it to the original state, which is substantially impossible. This film-like sealing member substantially functions as a lid for the drug solution container when the drug solution is stored or transported. Generally, the outer container cover 10 is attached to the opening during transportation or storage, and the outer container cover also functions as a protective film-like sealing member. On the other hand, when the film-like sealing member is connected to a connection plug to be described later when the chemical liquid is supplied, the film-like sealing member is broken or removed, and the end portion of the liquid-feeding pipe can be introduced into the inner hollow portion of the inner lid member. In other words, the film-like sealing member can be broken, for example, by cutting the tip end of the connection plug which is processed into a sharp shape, or can be cut by a cutter or the like, or peeled off. By breaking or removing the film-like sealing member in this manner, the end portion of the liquid-feeding pipe is introduced into the opening portion of the opening, and is joined to the liquid-feeding pipe. Preferably, the material of such a film-like sealing member is selected from relatively soft resins. Specifically, this material can be selected from those who are the materials of the aforementioned liquid supply tube. More specifically, polyethylene or polypropylene is inexpensive, and is easy to break or remove when connecting the plug, so it is an ideal material. The film-like sealing member is fixed to the inner lid body by, for example, an adhesive or heat welding.

膜狀密封構件的形狀不特別限定，按照需要，可為任意的形狀。此種膜狀密封構件的形狀之例如第4圖所示。膜狀密封構件7a可以具有均勻的厚度，但可在膜上設置線狀薄的部分，所謂的凹槽11，以便在連接連接用插塞時容易斷裂。凹槽11的形狀不特別限定，可以在膜表面設置成放射狀(第4圖(a))，也可以是圓弧狀(第4圖(b))。此外，凹槽的剖面形狀V字型較好，但也可以是半圓狀或矩形。此外，在使用時剝離膜狀密封構件的情況下，為了使剝離容易，也可以設置突片(tab)7c，作業者容易抓取(第4圖(c))。此外，作為膜狀密封構件大於開口部的外徑者，也可以以整個外周部為突片(tab)7c(第4圖(d))。The shape of the film-like sealing member is not particularly limited, and may be any shape as needed. The shape of such a film-like sealing member is as shown in Fig. 4, for example. The film-like sealing member 7a may have a uniform thickness, but a linear thin portion, a so-called groove 11, may be provided on the film to be easily broken when the connection plug is connected. The shape of the groove 11 is not particularly limited, and may be radially formed on the surface of the film (Fig. 4(a)) or arcuate (Fig. 4(b)). Further, the cross-sectional shape of the groove is preferably V-shaped, but may be semi-circular or rectangular. Further, when the film-like sealing member is peeled off during use, a tab 7c may be provided in order to facilitate peeling, and the operator can easily grasp it (Fig. 4(c)). Further, as the film-shaped sealing member larger than the outer diameter of the opening portion, the entire outer peripheral portion may be a tab 7c (Fig. 4(d)).

此外，密封構件不限於膜狀者，可為任意的形狀。第5圖顯示此種密封構件一實施態樣的概念剖面圖。此例顯示嵌合於內側蓋本體的內側的蓋狀密封構件10a。此蓋狀密封構件10a如第5圖(a)所示，具有剖面為梯形的截錐狀。即，蓋狀密封構件10a的外周直徑越接近底面越大。藉由具有此種形狀，防止蓋狀密封構件脫落，並且也防止容器內的藥液漏出。此時，最好預先使內側蓋本體7的內壁形成與蓋狀密封構件10a的外側形狀一致的槽構造，以相互嵌合。此外，也可以使蓋狀密封構件以有彈性的材料形成，藉由嵌入而固定於內側蓋本體上。蓋狀密封構件10a的底面可接觸到頭部8a。此外，最好為了使用時可容易去除或破壞蓋構件，預先如第5圖(b)所示，在蓋狀密封構件上設置突片(tab)10b及凹槽10c，以藉由拉起突片10b，沿著凹槽10c破壞蓋構件的方式形成。再者，也可以在突片10b或凹槽10c的任一者或此等兩方上貼上剝離後無法再貼住的封印，以便可容易確認容器的開封。再者，在第5圖(b)所示例子中，凹槽在蓋狀密封構件的底面形成為直線狀，突片10b形成於底面的凹槽端部，但此突片及凹槽的形狀不特別限定，例如突片可不僅膜狀密封構件的底面，而且設在內側側面或上部，而凹槽亦可不是直線狀，而是圓形狀等。此外，藉由將蓋構件10a嵌合於內側蓋本體的內側，在搬運時使用外側容器蓋10時亦無妨。Further, the sealing member is not limited to a film shape, and may have any shape. Fig. 5 is a conceptual cross-sectional view showing an embodiment of such a sealing member. This example shows a lid-shaped sealing member 10a fitted to the inner side of the inner lid body. As shown in Fig. 5(a), the cap-shaped sealing member 10a has a truncated cone shape having a trapezoidal cross section. That is, the outer peripheral diameter of the lid-shaped sealing member 10a is larger as it is closer to the bottom surface. By having such a shape, the lid-shaped sealing member is prevented from falling off, and the chemical liquid in the container is also prevented from leaking out. At this time, it is preferable that the inner wall of the inner lid main body 7 is formed with a groove structure that matches the outer shape of the lid-shaped sealing member 10a in advance so as to be fitted to each other. Further, the lid-shaped sealing member may be formed of an elastic material and fixed to the inner lid body by fitting. The bottom surface of the cap-shaped sealing member 10a is accessible to the head portion 8a. Further, it is preferable that the cover member can be easily removed or broken in use, and as shown in Fig. 5(b), a tab 10b and a groove 10c are provided on the cap-shaped sealing member to pull up the protrusion. The sheet 10b is formed in such a manner that the cover member is broken along the groove 10c. Further, a seal which can not be attached after peeling can be attached to either or both of the projection 10b or the recess 10c, so that the opening of the container can be easily confirmed. Further, in the example shown in Fig. 5(b), the groove is formed linearly on the bottom surface of the lid-shaped sealing member, and the tab 10b is formed at the groove end portion of the bottom surface, but the shape of the tab and the groove It is not particularly limited. For example, the tab may be provided not only on the bottom surface of the film-like sealing member but also on the inner side surface or the upper portion, and the groove may not be linear but a circular shape or the like. Further, by fitting the cover member 10a to the inner side of the inner cover body, it is also possible to use the outer container cover 10 during transportation.

第5圖所示的蓋狀密封構件是較佳態樣之一，但也可以使用另外的蓋狀構件。例如，可使蓋狀密封構件的外周形成凸緣10d(第5圖(c))，藉由嵌合於設於內側蓋本體內周的槽而被固定，或者黏接或熱熔敷於內側蓋構件上而被固定。此外，也可以使蓋狀密封構件的上面外周形成擋塊10e(第5圖(d))。此擋塊10e接觸到內側蓋本體的上面凸緣部的表面，有助於蓋狀密封構件的固定。按照需要，也可以使此擋塊部黏接或熱熔敷於內側蓋本體上。再者，也可以使用嵌合於內側蓋本體的上面凸緣部或開口部的外側，既覆蓋開口部且密閉容器的蓋狀密封材料。而且，此等蓋狀構件若是物理上嵌合於內側蓋本體或容器開口部的形狀，則也可以不藉由黏接或熱熔敷等而固定，開口時蓋狀密封構件不可逆地變形或破損，所以是適合的。此外，進行黏接的情況，也可以使用一旦剝離則黏接力降低而無法再貼住的封印等。The cap-shaped sealing member shown in Fig. 5 is one of the preferred aspects, but another cap-shaped member may be used. For example, the outer periphery of the lid-shaped sealing member can be formed with the flange 10d (Fig. 5(c)), and can be fixed by fitting in a groove provided in the inner circumference of the inner lid body, or bonded or thermally welded to the inner side. The cover member is fixed on the cover member. Further, the stopper 10e may be formed on the outer periphery of the upper surface of the lid-shaped sealing member (Fig. 5(d)). This stopper 10e contacts the surface of the upper flange portion of the inner cover body to facilitate the fixing of the lid-shaped sealing member. The stopper portion may be adhered or thermally welded to the inner cover body as needed. Further, it is also possible to use a lid-shaped sealing material that is fitted to the upper flange portion or the opening portion of the inner lid main body to cover the opening and to seal the container. Further, if the cap members are physically fitted to the inner lid body or the container opening, they may not be fixed by adhesion or heat welding, and the lid-shaped sealing member may be irreversibly deformed or broken during opening. So it is suitable. Further, in the case of bonding, it is also possible to use a seal or the like which, once peeled off, has a reduced adhesive force and can no longer be attached.

此外，將內側蓋構件嵌合於容器本體的情況，在內側蓋構件上設有從蓋本體內側中空部貫通於容器本體內部的導孔9。此導孔9係(a)用以使從後述的氣體導入配管導入的氣體通過容器本體而使容器本體內的壓力上升，藉此使容器本體內的藥液排出，或者(b)用以經由後述的送液用配管及送液管，在利用設於外部的泵等吸引容器本體內的藥液的情況下，通過哪個導孔都使外部的空氣流入容器內，利用吸引調整產生於容器內部的負壓。Further, when the inner lid member is fitted to the container body, the inner lid member is provided with a guide hole 9 penetrating from the inner side of the lid body to the inside of the container body. The guide hole 9 is a (a) for allowing the gas introduced from a gas introduction pipe to be described later to pass through the container body to increase the pressure inside the container body, thereby discharging the chemical solution in the container body or (b) for passing the liquid in the container body. When the liquid supply pipe and the liquid supply pipe to be described later suck the chemical liquid in the container body by a pump or the like provided outside, the external air flows into the container through which the guide hole is passed, and is generated in the container by suction adjustment. Negative pressure.

具有此種構造的內側蓋構件20嵌合於容器本體5的開口部6。此時，可在內側蓋構件20上設置用以防止內側蓋構件20從開口部6脫落的擋塊7b。藉由形成此種構造，內側蓋構件不用特別的夾具，就難以拆卸。此外，也可以使內側蓋構件20利用黏接劑等固定在開口部6上。藉由如此使內側蓋構件20的脫落困難，可防止因故意或事故而將容器不必要地開封。The inner cover member 20 having such a configuration is fitted to the opening portion 6 of the container body 5. At this time, a stopper 7b for preventing the inner cover member 20 from coming off the opening portion 6 may be provided on the inner cover member 20. By forming such a configuration, the inner cover member is difficult to remove without using a special jig. Further, the inner cover member 20 may be fixed to the opening portion 6 by an adhesive or the like. By making it difficult to fall off the inner cover member 20 in this manner, it is possible to prevent the container from being unnecessarily unsealed by intention or accident.

如此，內側蓋構件20一旦與容器本體結合，就難以使其脫離，所以一般是在容器本體5填充藥液後，安裝於開口部6上。As described above, since the inner lid member 20 is difficult to be detached when it is coupled to the container body, it is generally attached to the opening portion 6 after the container body 5 is filled with the chemical solution.

然而，也可以將具備送液管8的內側蓋本體7組裝於開口部6後，填充藥液，其後使膜狀密封構件熱熔敷於內側蓋本體7上。However, the inner lid main body 7 including the liquid supply tube 8 may be assembled to the opening portion 6, and then filled with the chemical liquid, and then the film-shaped sealing member may be thermally welded to the inner lid main body 7.

其次，就使用如此依據本發明的藥液用容器的藥液供給系統說明如下。此種藥液供給系統的全體概念圖如第6圖所示。此處所示的系統，係從氣體導入用配管通過設於內側蓋構件的從內側蓋本體的內側中空部貫通於容器本體內部的導孔，將氣體導入容器本體內，利用氣體的壓力，將藥液經由送液管與送液用配管，從容器本體內擠壓供給至外部。取代外側容器蓋10，連接插塞31結合於藥液用容器3。氣體導入用配管32與送液用配管33結合於此此連接插塞31。氣體導入用配管例如連結於儲氣罐4，藉由打開閥41，將氣體導入容器本體內，利用該氣體的壓力擠出容器本體內的藥液，經過送液管8及送液用配管33供給至藥液容器外。Next, the liquid chemical supply system using the container for a chemical solution according to the present invention will be described below. The overall concept diagram of such a chemical supply system is shown in Fig. 6. The system shown in the present invention introduces gas into the container body through a guide hole provided in the inner lid member from the inner hollow portion of the inner lid body through the gas introduction pipe, and the gas is introduced into the container body by the pressure of the gas. The chemical solution is supplied from the container body to the outside through a liquid supply tube and a liquid supply pipe. In place of the outer container cover 10, the connection plug 31 is coupled to the chemical liquid container 3. The gas introduction pipe 32 and the liquid supply pipe 33 are coupled to the connection plug 31. For example, the gas introduction pipe is connected to the gas storage tank 4, and the gas is introduced into the container body by opening the valve 41, and the chemical liquid in the container body is squeezed by the pressure of the gas, and the liquid supply pipe 8 and the liquid supply pipe 33 are passed through. Supply to the outside of the liquid medicine container.

此處，連接插塞31的概念剖面圖如第7圖所示。連接插塞上設有送液用配管33與氣體導入用配管32。送液用配管33的前端部33a為可連接於內側蓋構件的頭部8a的形狀。此處，若前端部33a配合頭部8a的形狀而為錐狀，則有利於斷裂膜狀密封構件。此外，氣體導入用配管32亦可如第7圖所示，形成銳利的形狀，以貫通膜狀密封構件。然而，氣體導入用配管32未必需要貫通到內側蓋本體7的內側，也可以只是在連接插塞31具有單一的開口。這是因為從氣體導入用配管導入的氣體可從送液用配管貫通之際所形成的裂縫流入容器內部。此外，在去除了膜狀密封構件的情況下，從氣體導入用配管導入氣體之際，不會成為妨礙。Here, a conceptual sectional view of the connection plug 31 is shown in Fig. 7. The liquid supply pipe 33 and the gas introduction pipe 32 are provided in the connection plug. The front end portion 33a of the liquid supply pipe 33 has a shape connectable to the head portion 8a of the inner cover member. Here, if the tip end portion 33a is tapered in accordance with the shape of the head portion 8a, it is advantageous to break the film-like sealing member. Further, as shown in Fig. 7, the gas introduction pipe 32 may have a sharp shape to penetrate the film-like sealing member. However, the gas introduction pipe 32 does not necessarily need to penetrate to the inner side of the inner cover body 7, or the connection plug 31 may have a single opening. This is because the gas introduced from the gas introduction pipe can flow into the inside of the container from the crack formed when the liquid supply pipe is passed through. Further, when the film-like sealing member is removed, the gas is introduced from the gas introduction pipe without hindering it.

第8圖顯示有顯示連接插塞31連接於內側蓋構件20的狀態的概念剖面圖。送液用配管33的前端部33a連接於送液管8的頭部8a，為了在該狀態下固定，利用連接插塞固定螺紋30組裝於開口部6的外螺紋6a。此時，內側蓋本體7的膜狀密封構件被送液用配管33的貫通所斷裂。此時，也可以預先剝離去除膜狀密封構件。Fig. 8 is a conceptual cross-sectional view showing a state in which the connection plug 31 is connected to the inner cover member 20. The tip end portion 33a of the liquid supply pipe 33 is connected to the head portion 8a of the liquid supply pipe 8, and is fixed to the external thread 6a of the opening portion 6 by the connection plug fixing screw 30 in order to be fixed in this state. At this time, the film-like sealing member of the inner lid main body 7 is broken by the penetration of the liquid supply pipe 33. At this time, the film-like sealing member may be peeled off in advance.

然後，將從氣體導入用配管32導入的氣體經由導孔9導入容器本體的內部，利用其壓力，經由送液管8及送液用配管33，將藥液從容器本體供給至外部。Then, the gas introduced from the gas introduction pipe 32 is introduced into the inside of the container body through the pilot hole 9, and the chemical liquid is supplied from the container body to the outside through the liquid supply tube 8 and the liquid supply pipe 33 by the pressure.

所供給的藥液例如暫時儲存於接收容器1，藉由適當的計量用具等計量、利用。此處，一般收容惰性氣體的儲氣罐連接於氣體導入用配管。氣體的種類不特別限定，但為了維持容器內的藥液品質，一般使用惰性氣體，例如氮氣等。然而，依據藥液的種類，也可以使用空氣，於此種情況下，也可以使用泵等將空氣導入容器內。The supplied chemical liquid is temporarily stored, for example, in the receiving container 1, and is measured and used by an appropriate measuring instrument or the like. Here, the gas tank that normally accommodates the inert gas is connected to the gas introduction pipe. The type of the gas is not particularly limited, but in order to maintain the quality of the chemical in the container, an inert gas such as nitrogen or the like is generally used. However, depending on the type of the chemical liquid, air may be used. In this case, air may be introduced into the container using a pump or the like.

此外，第6圖中顯示將所供給的藥液儲存於接收容器之例，但也可以是其以外的供給方法。例如，也可以將送液用配管直接連接於利用藥液的裝置，定量地供給至裝置。然而，有時藥液用容器用完時無法供給藥液至裝置，或因經由氣體施加壓力而供給量不穩定，所以最好設置接收容器。Further, Fig. 6 shows an example in which the supplied chemical liquid is stored in the receiving container, but other supply methods may be employed. For example, the liquid supply pipe may be directly connected to the apparatus using the chemical liquid, and may be quantitatively supplied to the apparatus. However, it is preferable to provide a receiving container when the chemical liquid container is used up, the chemical liquid cannot be supplied to the device, or the supply amount is unstable due to the pressure applied via the gas.

此外，第6圖中係將氣體導入容器內，利用其壓力排出容器內的藥液，但也可以經由送液用配管及送液管，從容器本體內吸引供給藥液。於此情況填充，可在送液用配管的中途設置泵而吸引容器內的藥液，或者密閉接收所排出的藥液的接收容器與連接於其的送液用配管，藉由將接收容器內減壓，而吸引容器內的藥液。此時，導孔具有經由氣體導入用配管，使外氣流入容器內，調整容器本體內的壓力的功能。Further, in Fig. 6, the gas is introduced into the container, and the chemical liquid in the container is discharged by the pressure. However, the liquid medicine may be sucked and supplied from the container body through the liquid supply pipe and the liquid supply tube. In this case, the pump may be provided in the middle of the liquid supply pipe to suck the chemical liquid in the container, or the receiving container that receives the discharged chemical liquid and the liquid supply pipe connected thereto may be placed in the receiving container. Decompress and draw the liquid in the container. At this time, the pilot hole has a function of adjusting the pressure inside the container body by introducing the outside air into the container through the gas introduction pipe.

實施例1Example 1

準備將以潔淨空氣吹塑成型的高密度聚乙烯作為內袋而具備的內容積20公升的桶罐(日本桶罐股份有限公司製)。此桶罐在買進的狀態下不進行清洗而使用。A 20-liter canister (manufactured by Nippon Co., Ltd.) equipped with high-density polyethylene blow molded by clean air as an inner bag. This can is used without being cleaned in the state of being bought.

將光阻組成物過濾填充於此桶罐，設置具有如第2圖所示的附帶膜狀密封構件的送液管的內側蓋構件及外側容器蓋而密閉。此膜狀密封構件上如第4圖(a)，在膜表面設有放射線狀的凹槽11。如此準備了10個封入有光阻組成物的容器。The photoresist composition was filtered and filled in the can, and the inner lid member and the outer container lid of the liquid supply tube with the film-like sealing member shown in Fig. 2 were placed and sealed. As shown in Fig. 4(a), the film-like sealing member is provided with a radial groove 11 on the surface of the film. Ten containers sealed with a photoresist composition were prepared in this manner.

將所準備的10個容器在室溫(約25℃)下靜置1小時。其後，去掉最初的容器的外側容器蓋後，以連接插塞斷裂設於送液管的膜狀密封構件，將送液用配管裝在容器上，將容器內加壓而採取光阻組成物。接著，不清洗相同的送液用配管而連續地使用，從全部的容器依次採取光阻組成物。The prepared 10 containers were allowed to stand at room temperature (about 25 ° C) for 1 hour. Thereafter, after the outer container lid of the first container is removed, the film-like sealing member provided in the liquid supply tube is broken by the connection plug, the liquid supply pipe is placed on the container, and the inside of the container is pressurized to take a photoresist composition. . Then, the same liquid supply piping was used without being cleaned, and the photoresist composition was sequentially taken from all the containers.

比較例1Comparative example 1

與實施例1同樣地對桶罐將光阻組成物過濾填充於此桶罐，設置預先設於上述桶罐的內栓及外側容器蓋而密閉。如此準備了10個封入有光阻組成物的容器。In the same manner as in the first embodiment, the photoresist composition was filtered and filled in the can to the can, and the inner plug and the outer container cover which were previously provided in the above-described cans were sealed and sealed. Ten containers sealed with a photoresist composition were prepared in this manner.

將所準備的10個容器與實施例1同樣地在室溫(約25℃)下靜置1小時。其後，去掉最初的容器的外側容器蓋及內栓後，將附帶送液管的連接器裝在容器上，將容器內加壓而採取光阻組成物。接著，不清洗相同的附帶送液管的連接器而連續地使用，從全部的容器依次採取光阻組成物。The prepared 10 containers were allowed to stand at room temperature (about 25 ° C) for 1 hour in the same manner as in Example 1. Thereafter, after removing the outer container lid and the inner plug of the first container, the connector with the liquid supply tube was placed on the container, and the inside of the container was pressurized to take a photoresist composition. Next, the connector with the same liquid supply tube was not cleaned and used continuously, and the photoresist composition was sequentially taken from all the containers.

評估Evaluation

使用粒子計數器(particle counter)進行在實施例1及比較例1所採取的光阻組成物中的微粒子數的測量。就各個的組成物，測量超過0.23μm的微粒子數、超過0.3μm的平均微粒子數。所得到的結果如表1及第9圖所示。再者，表中的與「容器號碼0」對應的平均微粒子數，意味著就容器填充後、密閉之前的光阻組成物進行測量的平均微粒子數。The measurement of the number of fine particles in the photoresist compositions taken in Example 1 and Comparative Example 1 was carried out using a particle counter. For each of the compositions, the number of fine particles exceeding 0.23 μm and the average number of fine particles exceeding 0.3 μm were measured. The results obtained are shown in Tables 1 and 9. In addition, the average number of fine particles corresponding to "container number 0" in the table means the average number of fine particles measured by the photoresist composition after the container is filled and sealed.

由所得到的結果，在比較例方面，連續地使用相同的附帶送液管的連接器而光阻組成物中的微粒子數增大，相對於此，在本案發明方面，即使連續地使用相同的送液用配管，微粒子數也不增大。如以上，得知藉由使用本發明的藥液供給系統，可穩定地供給藥液。From the results obtained, in the comparative example, the same connector with the liquid supply tube was continuously used, and the number of fine particles in the photoresist composition was increased. On the other hand, in the aspect of the invention, even the same use was continuously used. The liquid feeding pipe does not increase the number of fine particles. As described above, it is known that the chemical solution can be stably supplied by using the chemical solution supply system of the present invention.

1‧‧‧接收容器1‧‧‧ Receiving container

3‧‧‧藥液用容器3‧‧‧Drug container

4‧‧‧儲氣罐4‧‧‧ gas storage tank

5‧‧‧容器本體5‧‧‧ container body

6‧‧‧開口部6‧‧‧ openings

6a‧‧‧開口部外螺紋6a‧‧‧Outer external thread

7‧‧‧內側蓋本體7‧‧‧ inside cover body

7a‧‧‧膜狀密封構件7a‧‧‧membrane sealing member

7b‧‧‧擋塊7b‧‧‧Block

7c‧‧‧突片7c‧‧‧1

8‧‧‧送液管8‧‧‧ Liquid supply tube

8a‧‧‧頭部8a‧‧‧ head

9‧‧‧導孔9‧‧‧ Guide hole

10‧‧‧外側容器蓋10‧‧‧Outer container lid

10a‧‧‧蓋狀密封構件10a‧‧‧Cover seal member

10b‧‧‧突片10b‧‧‧1

10c‧‧‧凹槽10c‧‧‧ Groove

10d‧‧‧凸緣10d‧‧‧Flange

10e‧‧‧擋塊10e‧‧‧block

12‧‧‧藥液12‧‧‧ liquid

20‧‧‧內側蓋構件20‧‧‧ inside cover member

30‧‧‧連接插塞固定螺紋30‧‧‧Connecting plug fixing thread

31‧‧‧連接插塞31‧‧‧Connecting plug

32‧‧‧氣體導入用配管32‧‧‧Gas introduction piping

33‧‧‧送液用配管33‧‧‧Water supply piping

33a‧‧‧送液用配管前端部33a‧‧‧Training pipe front end

41‧‧‧閥41‧‧‧ valve

第1圖為依據本發明一實施態樣的藥液用容器的概略圖。Fig. 1 is a schematic view showing a container for a chemical solution according to an embodiment of the present invention.

第2圖為依據本發明一實施態樣的藥液用容器的開口部的概略剖面圖。Fig. 2 is a schematic cross-sectional view showing an opening of a container for a chemical solution according to an embodiment of the present invention.

第3圖為用於本發明一實施態樣的藥液用容器的內側蓋構件的概略剖面圖。Fig. 3 is a schematic cross-sectional view showing an inner lid member of a container for a chemical solution according to an embodiment of the present invention.

第4圖為用於本發明一實施態樣的藥液容器的膜狀密封構件的概略平面圖。Fig. 4 is a schematic plan view showing a film-like sealing member used in a chemical liquid container according to an embodiment of the present invention.

第5圖為包含用於本發明一實施態樣的藥液容器的蓋狀密封構件的內側蓋構件的概略剖面圖(a)及概略立體圖(b)與依據其他實施態樣的蓋狀密封構件的概略剖面圖(c)及(d)。Fig. 5 is a schematic cross-sectional view (a) and a schematic perspective view (b) of an inner lid member including a lid-shaped sealing member for a chemical solution container according to an embodiment of the present invention, and a lid-shaped sealing member according to another embodiment. Schematic cross-sectional views (c) and (d).

第6圖為依據本發明一實施態樣的藥液供給系統的概略圖。Fig. 6 is a schematic view showing a chemical supply system according to an embodiment of the present invention.

第7圖為用於本發明一實施態樣的藥液供給系統的連接插塞的概略剖面圖。Fig. 7 is a schematic cross-sectional view showing a connection plug used in a chemical supply system according to an embodiment of the present invention.

第8圖為依據本發明一實施態樣的藥液供給系統的容器連接部分的概略剖面圖。Fig. 8 is a schematic cross-sectional view showing a container connecting portion of a chemical solution supply system according to an embodiment of the present invention.

第9圖為顯示實施例1及比較例1的光阻組成物中的平均微粒子數的圖表。Fig. 9 is a graph showing the average number of fine particles in the photoresist compositions of Example 1 and Comparative Example 1.

5．．．容器本體5. . . Container body

7a．．．膜狀密封構件7a. . . Membrane sealing member

7b．．．擋塊7b. . . Stoppers

8．．．送液管8. . . Liquid supply tube

8a．．．頭部8a. . . head

30．．．連接插塞固定螺紋30. . . Connecting plug fixing thread

31．．．連接插塞31. . . Connecting plug

32．．．氣體導入用配管32. . . Gas introduction piping

33．．．送液用配管33. . . Liquid supply piping

33a．．．送液用配管前端部33a. . . Liquid supply pipe front end

Claims

一種藥液供給系統，其特徵在於：其係用以從填充有藥液的藥液用容器供給該藥液的藥液供給系統，並且該藥液用容器具備：具有開口部的容器本體；及內側蓋構件，其係具有嵌合於該開口部內側的中空圓筒狀的具有擋塊的內側蓋本體、具有從該內側蓋本體的內側中空部延伸到該容器本體的內側底部附近的液體通路的送液管、及既為密封該內側蓋本體的外側開口端的密封構件且為藉由將其斷裂而可將該外側開口端不可逆地開口的密封構件，具備送液用配管與氣體導入用配管而成的連接插塞連接於該內側蓋構件，此時將該密封構件斷裂而被***的該送液用配管的前端部連接於位在該內側蓋本體的內側中空部的設於該送液管終端的頭部，(a)從該氣體導入用配管通過設於該內側蓋構件的從該內側蓋本體的內側中空部貫通於容器本體內部的導孔，將氣體導入該容器本體內，利用該氣體的壓力，將該藥液經由該送液管與該送液用配管，從該容器本體內擠壓供給至外部，或者(b)經由該送液用配管及該送液管，從該容器本體內吸引供給該藥液。 A chemical liquid supply system for supplying a chemical liquid supply system from a chemical liquid container filled with a chemical liquid, and the medical liquid container comprising: a container body having an opening; The inner cover member has a hollow cylindrical inner cover body having a stopper fitted to the inner side of the opening, and has a liquid passage extending from an inner hollow portion of the inner cover main body to an inner bottom portion of the container body The liquid supply pipe and the sealing member which seals the outer open end of the inner cover main body, and which is a sealing member which can open the outer open end irreversibly by breaking the liquid supply pipe, and the liquid supply pipe and the gas introduction pipe The connection plug is connected to the inner cover member, and the distal end portion of the liquid supply pipe that is inserted into the sealing member is connected to the inner hollow portion of the inner cover main body. The head of the tube terminal (a) passes through the gas introduction tube through the guide hole provided in the inner lid member from the inner hollow portion of the inner lid body and penetrates the inside of the container body to guide the gas. In the container body, the chemical liquid is squeezed and supplied from the container body to the outside through the liquid supply tube and the liquid supply pipe by the pressure of the gas, or (b) the liquid supply pipe and the liquid supply pipe are used. The liquid supply tube sucks and supplies the chemical liquid from the container body.

如申請專利範圍第1項之藥液供給系統，其中該氣體為惰性氣體。 The pharmaceutical liquid supply system of claim 1, wherein the gas is an inert gas.

如申請專利範圍第1或2項之藥液供給系統，其中從該容器本體內被擠出至外部的藥液暫時儲存於接收容器內。 A pharmaceutical supply system according to claim 1 or 2, wherein the chemical liquid extruded from the inside of the container body to the outside is temporarily stored in the receiving container.

一種藥液用容器，其特徵在於具備：具有開口部的容器本體；及內側蓋構件，其係具有嵌合於該開口部內側的中空圓筒狀的具有擋塊的內側蓋本體、具有從該內側蓋本體的內側中空部延伸到該容器本體的內側底部附近的液體通路的送液管、及既為密封該內側蓋本體的外側開口端的密封構件且為藉由將其斷裂而可將該外側開口端不可逆地開口的密封構件，並且為了使填充於該容器本體的藥液排出，設有頭部，該頭部係將具有送液用配管與氣體導入用配管的插塞連接於該內側蓋構件之際，可在位在該內側蓋本體的內側中空部的該送液管的終端與將該密封構件斷裂而被***的該送液用配管的前端部連接，並且該內側蓋構件具有使從該氣體導入用配管流入的氣體通過該容器內的導孔。 A container for a chemical liquid, comprising: a container body having an opening; and an inner cover member having a hollow cylindrical inner cover body having a stopper fitted inside the opening, and having a liquid supply pipe extending from an inner side hollow portion of the inner cover body to a liquid passage near the inner bottom portion of the container body, and a sealing member sealing the outer open end of the inner cover body and being ruptured by the outer side a sealing member that opens irreversibly at the open end, and a head portion that connects a plug having a liquid supply pipe and a gas introduction pipe to the inner cover, in order to discharge the chemical solution filled in the container body In the member, the distal end of the liquid supply tube located at the inner hollow portion of the inner lid main body is connected to the distal end portion of the liquid supply pipe into which the sealing member is broken, and the inner cover member has The gas flowing in from the gas introduction pipe passes through the pilot hole in the container.

如申請專利範圍第4項之藥液用容器，其中該密封構件為可斷裂或去除加工的膜狀密封構件。 The container for a liquid medicine according to claim 4, wherein the sealing member is a film-like sealing member that can be broken or removed.

如申請專利範圍第5項之藥液用容器，其中更具備嵌合於該開口部的外周，保護該膜狀密封構件的外側容器蓋。 The container for a chemical solution according to claim 5, further comprising an outer periphery of the opening, and an outer container cover for protecting the film-like sealing member.

如申請專利範圍第4至6項中任一項之藥液用容器，其中該膜狀密封構件係由聚乙烯或聚丙烯構成。The container for a liquid medicine according to any one of claims 4 to 6, wherein the film-like sealing member is made of polyethylene or polypropylene.