TWI483910B - Scribe wheel - Google Patents
Scribe wheel Download PDFInfo
- Publication number
- TWI483910B TWI483910B TW101127503A TW101127503A TWI483910B TW I483910 B TWI483910 B TW I483910B TW 101127503 A TW101127503 A TW 101127503A TW 101127503 A TW101127503 A TW 101127503A TW I483910 B TWI483910 B TW I483910B
- Authority
- TW
- Taiwan
- Prior art keywords
- scribing wheel
- blade
- inclined surface
- scribing
- wheel
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/10—Glass-cutting tools, e.g. scoring tools
- C03B33/105—Details of cutting or scoring means, e.g. tips
- C03B33/107—Wheel design, e.g. materials, construction, shape
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/033—Apparatus for opening score lines in glass sheets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
- B26D3/00—Cutting work characterised by the nature of the cut made; Apparatus therefor
- B26D3/08—Making a superficial cut in the surface of the work without removal of material, e.g. scoring, incising
- B26D3/085—On sheet material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Liquid Crystal (AREA)
Description
本發明係關於一種劃線輪，尤其係關於一種刀尖與脆性基板之間之抓持性良好、可使所劃線之脆性基板之端面強度提昇之劃線輪。The present invention relates to a scribing wheel, and more particularly to a scribing wheel having a good grip between a blade tip and a brittle substrate and capable of improving the strength of the end face of the slab brittle substrate.
先前，於液晶顯示面板或有機電致發光(EL，electro luminescence)面板等平板顯示面板、太陽電池等之製造步驟中，設置有母玻璃(mother glass)基板等脆性材料基板之切斷步驟。於該些之切斷步驟中，一面對劃線輪施加與脆性基板之材質或厚度等諸條件相符之負荷，一面使劃線輪於脆性基板之表面上轉動而形成劃線，藉由對脆性基板施加特定之力而沿劃線切斷脆性基板，從而製造單個之面板或玻璃基板。Conventionally, in a manufacturing step of a flat panel display panel such as a liquid crystal display panel or an organic electroluminescence (EL) plate or a solar cell, a cutting step of a brittle material substrate such as a mother glass substrate is provided. In the cutting step, a scribing wheel is rotated on the surface of the brittle substrate to form a scribe line by applying a load corresponding to conditions such as the material or thickness of the brittle substrate to the scribing wheel. The brittle substrate applies a specific force to cut the brittle substrate along the scribe line, thereby fabricating a single panel or glass substrate.
作為這些劃線輪，一般使用沿圓盤狀輪之圓周部形成有V字形刀之劃線輪(參照下述專利文獻1)。於使用該先前例之劃線輪於玻璃基板上形成劃線時，藉由負荷作用於劃線輪之刀尖而使刀尖抵接之玻璃基板之表面產生彈性變形，其次，隨著刀尖負荷之增大，於劃線輪之抵接部位產生塑性變形，若刀尖負荷進一步增大，則會超出塑性變形之極限點而產生脆性破壞，從而於玻璃基板之厚度方向上生長垂直裂痕。As the scribing wheel, a scribing wheel in which a V-shaped blade is formed along the circumferential portion of the disc-shaped wheel is generally used (see Patent Document 1 below). When the scribe line is formed on the glass substrate by using the scribing wheel of the prior art, the surface of the glass substrate against which the blade edge abuts is elastically deformed by the load acting on the blade edge of the scribing wheel, and secondly, along the cutting edge When the load is increased, plastic deformation occurs at the contact portion of the scribing wheel. If the tool tip load is further increased, brittle fracture is generated beyond the limit of plastic deformation, and vertical cracks are grown in the thickness direction of the glass substrate.
此時，藉由增大刀尖負荷而使刀尖深入至玻璃基板表面之深度變大，用以產生垂直裂痕之能量變大，因此，垂直 裂痕之長度亦變長。然而，若刀尖負荷超過一定大小，則可形成較長之垂直裂痕，但沿玻璃基板之表面之劃線之塑性變形區域之內部應變成為飽和狀態，從而產生水平裂痕而導致產生所不希望之切屑(玻璃屑)。At this time, by increasing the tip load, the depth of the blade tip deepens into the surface of the glass substrate becomes large, and the energy for generating the vertical crack becomes large, and therefore, the vertical The length of the crack also becomes longer. However, if the tip load exceeds a certain size, a long vertical crack can be formed, but the internal strain of the plastically deformed region along the surface of the glass substrate becomes saturated, thereby causing horizontal cracks and causing undesirable Chips (glass swarf).
因此，作為於形成較長之垂直裂痕之同時水平裂痕之產生較少之劃線輪，已知如下劃線輪，即沿著圓盤狀輪之圓周部形成V字形刀，並且於V字形刀之刀尖以固定間距形成固定高度之突起或固定深度之溝槽(參照下述專利文獻2)。根據該劃線輪，當突起部分抵接於玻璃基板時可施加單點衝擊，因此，利用突起之點接觸成為中心，劃線時於玻璃基板之表面方向產生之應力較先前之情況少，因此，可一面於玻璃基板產生貫穿板厚之程度之極長之垂直裂痕而不產生無用之水平裂痕，一面連續地對玻璃基板進行劃線。Therefore, as a scribing wheel which generates a horizontal crack in a long vertical crack, a scribing wheel is known, that is, a V-shaped knife is formed along the circumference of the disc-shaped wheel, and the V-shaped knife is formed. The blade tips form a projection of a fixed height or a groove of a fixed depth at a fixed pitch (see Patent Document 2 below). According to the scribing wheel, when the protruding portion abuts against the glass substrate, a single point impact can be applied. Therefore, the point contact by the protrusion is centered, and the stress generated in the surface direction of the glass substrate during scribing is less than that in the previous case. The glass substrate can be continuously scribed on the glass substrate while producing an extremely long vertical crack that penetrates the thickness of the sheet without causing useless horizontal cracks.
如下結構之劃線輪亦為人所周知，即相同地以沿著圓盤狀輪之圓周部V字形刀之脊線部成為連續之刀尖之方式形成，且於對玻璃基板形成劃線時，於刀尖之正下方之刀之傾斜面形成面向劃線之深度方向之切口凹部，由此於V字形刀之前端部分交替地形成薄壁部及厚壁部(參照下述專利文獻3)。It is also known that the scribing wheel has the following structure, that is, the ridge line portion of the V-shaped blade along the circumference of the disc-shaped wheel is formed as a continuous cutting edge, and when the glass substrate is scribed The inclined surface of the knives directly under the cutting edge forms a notch recessed portion facing the depth direction of the scribe line, whereby the thin portion and the thick portion are alternately formed at the front end portion of the V-shaped blade (see Patent Document 3 below). .
此處，利用圖5及圖6對下述專利文獻3所揭示之劃線輪進行說明。再者，圖5A係下述專利文獻3所揭示之劃線輪之側視圖，圖5B係剖視圖，圖5C係前視圖，圖5D係對玻璃基板形成劃線時之放大剖視圖。又，圖6A係說明圖5所 示之劃線輪之薄壁部之作用之圖，圖6B係說明厚壁部之作用之圖。Here, the scribing wheel disclosed in the following Patent Document 3 will be described with reference to FIGS. 5 and 6 . 5A is a side view of the scribing wheel disclosed in Patent Document 3, FIG. 5B is a cross-sectional view, FIG. 5C is a front view, and FIG. 5D is an enlarged cross-sectional view showing a scribe line of the glass substrate. 6A is a view of FIG. 5 Fig. 6B is a view showing the action of the thick portion of the scribing wheel.
該劃線輪50沿著圓盤狀之劃線輪50之外周緣部藉由V字形狀之刀之傾斜面51無間斷地連續地形成有成為脊線部之刀尖51a。又，於劃線輪50之中央部形成有貫穿孔52，成為旋轉軸之輪銷(wheel pin)(省略圖示)***於該貫穿孔52中，劃線輪50由該輪銷軸支撐著轉動。The scribing wheel 50 is continuously formed with a blade edge 51a which is a ridge portion by a V-shaped blade inclined surface 51 along the outer peripheral edge portion of the disk-shaped scribing wheel 50. Further, a through hole 52 is formed in a central portion of the scribing wheel 50, and a wheel pin (not shown) serving as a rotating shaft is inserted into the through hole 52, and the scribing wheel 50 is supported by the wheel pin shaft. Turn.
於刀尖51a之正下方之刀之傾斜面51，藉由放電加工等適當方法形成有於劃線輪50對玻璃基板54(參照圖5D)形成劃線時面向該劃線S之深度方向之多個切口凹部53。再者，該劃線輪50中，形成切口凹部53之面之刀尖側部分53a以成為與形成脊線部之刀尖51a平行之狀態之方式形成。The inclined surface 51 of the blade directly under the blade edge 51a is formed by a suitable method such as electric discharge machining in the depth direction of the scribing wheel 50 when the scribing wheel 50 forms a scribe line for the glass substrate 54 (see FIG. 5D). A plurality of slit recesses 53. Further, in the scribing wheel 50, the blade edge side portion 53a on the surface on which the notch concave portion 53 is formed is formed in a state parallel to the blade edge 51a forming the ridge portion.
如圖5D所示，於形成於玻璃基板54之劃線S之通常之深度、即自玻璃基板54之表面至刀尖51a為止之深度為d1(約10 μm以下，通常為5 μm以下)之情形時，該切口凹部53係於刀之傾斜面51，將自退離刀尖51a之位置d2至退離玻璃基板54之表面之位置d3規定為凹陷之範圍而形成。又，形成切口凹部53之面之刀尖側部分53a與玻璃基板54之表面實質上成為垂直之配置關係。如上所述，藉由於刀之傾斜面51之刀尖51a側形成切口凹部53，從而形成有切口凹部53之部分成為薄壁部51b，未形成有切口凹部53之部分成為厚壁部51c，成為交替地形成有薄壁部51b與厚壁部51c並且連續地形成有刀尖51a之狀態。As shown in FIG. 5D, the depth of the scribe line S formed on the glass substrate 54, that is, the depth from the surface of the glass substrate 54 to the blade edge 51a is d1 (about 10 μm or less, usually 5 μm or less). In this case, the notch recessed portion 53 is formed on the inclined surface 51 of the blade, and is formed by defining the position d2 from the position d2 of the retracting blade edge 51a to the position d3 of the surface of the glass substrate 54 to be recessed. Further, the blade edge side portion 53a on the surface on which the slit recess 53 is formed is substantially perpendicular to the surface of the glass substrate 54. As described above, since the slit recess 53 is formed on the blade edge 51a side of the inclined surface 51 of the blade, the portion in which the slit recess 53 is formed becomes the thin portion 51b, and the portion in which the slit recess 53 is not formed becomes the thick portion 51c. The thin portion 51b and the thick portion 51c are alternately formed and the blade edge 51a is continuously formed.
於利用該劃線輪50對玻璃基板54形成劃線時，藉由形成於刀之前端側之薄壁部51b與厚壁部51c而交替地重複進行劃線，一面使刀尖51a之深入深度逐漸變大一面進行劃線處理直至劃線輪50之刀尖51a到達玻璃基板54之厚度方向之最低點為止。When the scribe line is formed on the glass substrate 54 by the scribe wheel 50, the thin portion 51b and the thick portion 51c formed on the front end side of the knives are alternately repeatedly scribed, and the depth of the blade edge 51a is deepened. The scribing process is performed while gradually increasing until the blade edge 51a of the scribing wheel 50 reaches the lowest point in the thickness direction of the glass substrate 54.
於形成於刀之前端側之薄壁部51b進行劃線處理之狀態下，如圖6A所示，由於切口凹部53成為避讓凹部而不與劃線S之溝槽之傾斜面Sa接觸，因此成為所有負荷只集中於刀尖51a之前端部之狀態，從而有效地藉由薄壁部51b進行劃線。於藉由該薄壁部51b進行之劃線處理中，由於刀尖51a未接觸於沿劃線S之塑性變形區域，因此可將內部應變之產生抑制得較低，可防止水平裂痕之產生，於劃線S之底部形成較淺之垂直裂痕Sb。此時，厚壁部51c成為即將進入至劃線S中之狀態。In the state in which the thin portion 51b formed on the end side of the blade is subjected to the scribing process, as shown in FIG. 6A, the notch recess 53 is a recessed recess and is not in contact with the inclined surface Sa of the groove of the scribing S. All the loads are concentrated only on the state of the front end of the cutting edge 51a, thereby effectively scribing by the thin portion 51b. In the scribing process by the thin portion 51b, since the blade edge 51a is not in contact with the plastic deformation region along the scribe line S, the occurrence of internal strain can be suppressed low, and the occurrence of horizontal cracks can be prevented. A shallow vertical crack Sb is formed at the bottom of the scribe line S. At this time, the thick portion 51c is in a state of being immediately entered into the scribe line S.
若使形成於刀之前端側之薄壁部51b通過後，使厚壁部51c進入至該劃線S中，則該厚壁部51c之前端之兩側部接觸於劃線S之溝槽之傾斜面Sa，刀尖負荷全部施加至該溝槽之傾斜面Sa。隨著厚壁部51c進一步進入，如圖6B所示，溝槽之傾斜面Sa受到擠壓而塑性變形並平坦化。此時，由於劃線S成為向左右擴展之狀態，因此垂直裂痕Sb形成得更大。再者，於厚壁部51c進入至藉由形成於刀之前端側之薄壁部51b而形成之劃線S中時，由於成為該厚壁部51c抵接於劃線S之溝槽之傾斜面Sa之形態，因此成為施加單點衝擊之狀態，從而促進垂直裂痕Sb之形成。When the thin portion 51b formed on the front end side of the blade passes, the thick portion 51c is caused to enter the scribe line S, and both sides of the front end of the thick portion 51c are in contact with the groove of the scribe line S. The inclined surface Sa is applied to the inclined surface Sa of the groove. As the thick portion 51c further enters, as shown in FIG. 6B, the inclined surface Sa of the groove is pressed and plastically deformed and planarized. At this time, since the scribe line S is in a state of expanding to the left and right, the vertical crack Sb is formed to be larger. In addition, when the thick portion 51c enters the scribe line S formed by the thin portion 51b formed on the front end side of the blade, the inclined portion 51c abuts the groove of the scribe line S. The form of the surface Sa is thus in a state of applying a single point impact, thereby promoting the formation of the vertical crack Sb.
如此一來，因藉由形成於刀之前端側之薄壁部51b與厚壁部51c交替地重複進行劃線，由此向玻璃基板54之深入逐漸加深，因此能夠以與先前同等或者小於先前之刀尖負荷形成較先前深之垂直裂痕Sb。其結果，由於在劃線時能夠使對玻璃基板54施加之負荷減小，因此幾乎不會於玻璃基板54產生殘留應力，從而發揮可抑制水平裂痕之產生之效果。In this manner, since the thin portion 51b formed on the front end side of the blade and the thick portion 51c are alternately repeatedly scribed, the depth of the glass substrate 54 is gradually deepened, so that it can be equal to or smaller than the previous one. The tip load forms a deeper vertical crack Sb than the previous one. As a result, since the load applied to the glass substrate 54 can be reduced at the time of scribing, the residual stress is hardly generated in the glass substrate 54, and the effect of suppressing the occurrence of horizontal cracks is exhibited.
[專利文獻1]日本專利特開平06-056451號公報[Patent Document 1] Japanese Patent Laid-Open No. Hei 06-056451
[專利文獻2]日本專利第3074143號說明書[Patent Document 2] Japanese Patent No. 3074143
[專利文獻3]日本專利特開2010-126382號公報[Patent Document 3] Japanese Patent Laid-Open Publication No. 2010-126382
根據上述專利文獻3所揭示之劃線輪50，由於刀尖51a與玻璃基板54之間之抓持性良好，可一面於劃線之塑性變形區域抑制水平裂痕之產生一面高效地形成垂直裂痕，因此發揮可獲得於進行切斷處理時不會於端面產生凹凸之高成形品質之玻璃基板之優異效果。然而，根據本發明者之研究結果發現以下問題，即若利用上述專利文獻3所揭示之劃線輪50對玻璃基板54進行劃線，則所獲得之玻璃基板之端面強度降低。According to the scribing wheel 50 disclosed in the above Patent Document 3, since the grip between the blade edge 51a and the glass substrate 54 is good, it is possible to efficiently form a vertical crack while suppressing the occurrence of horizontal cracks in the plastic deformation region of the scribing line. Therefore, the excellent effect of the glass substrate which can obtain the high molding quality which does not generate the unevenness in the end surface at the time of the cutting process is exhibited. However, according to the findings of the inventors of the present invention, when the glass substrate 54 is scribed by the scribing wheel 50 disclosed in Patent Document 3, the end surface strength of the obtained glass substrate is lowered.
本發明者為了探索上述專利文獻3所揭示之劃線輪50之問題之產生原因而重複進行了各種實驗，結果得出以下知 識見解，即因形成切口凹部53之面之刀尖側部分53a與玻璃基板54之表面實質上成為垂直之配置關係，因此藉由厚壁部51c進行之單點衝擊過大，從而導致出現所述問題。因此，本發明者等進一步進行反覆研究，為了使該單點衝擊並非完全不存在而係較上述專利文獻3所揭示之情況小，而重新研究形成於沿著圓盤狀之劃線輪之外周緣部形成之V字形狀之刀之傾斜面上之切口凹部之形狀，由此，發現可一面使刀尖與脆性基板之間之抓持性良好，一面使所劃線之玻璃基板等脆性基板之端面強度提昇，從而完成本發明。The inventors of the present invention repeated various experiments in order to explore the cause of the problem of the scribing wheel 50 disclosed in the above Patent Document 3, and as a result, the following findings were obtained. It is understood that the blade edge side portion 53a which forms the surface of the cutout recess 53 is substantially perpendicular to the surface of the glass substrate 54, so that the single point impact by the thick portion 51c is excessively large, resulting in the occurrence of the above-mentioned problem. Therefore, the present inventors further conducted a repetitive study, and in order to make the single-point impact not completely absent, it is smaller than the case disclosed in the above Patent Document 3, and was re-study formed in the outer circumference along the disc-shaped scribing wheel. In the shape of the notch recessed portion on the inclined surface of the V-shaped blade formed by the edge portion, it was found that the brittle substrate such as the glass substrate to be scribed can be obtained while the grip between the blade edge and the brittle substrate is good. The strength of the end face is increased to complete the present invention.
即，本發明之目的在於提供一種刀尖與脆性基板之間之抓持性良好、使所劃線之脆性基板之端面強度提昇之劃線輪。That is, an object of the present invention is to provide a scribing wheel which is excellent in gripping property between a blade edge and a brittle substrate and which improves the strength of the end surface of the stenciled brittle substrate.
為了達到上述目的，本發明之劃線輪係沿著圓盤狀輪之圓周部以V字形刀之脊線部成為連續之刀尖之方式形成，且於上述V字形刀之傾斜面上自與上述刀尖相隔特定距離之位置形成有切口凹部，於上述V字形刀之前端部分交替地形成有薄壁部與厚壁部者，其特徵在於：上述切口凹部於將上述刀尖之角度設為θ1(其中θ1>90°)，且將形成上述切口凹部之面之上述刀尖側部分與上述刀之傾斜面之間之角度設為θ2時，以成為180°>θ2>180°-(θ1)/2之方式形成。In order to achieve the above object, the scribing wheel of the present invention is formed along the circumferential portion of the disc-shaped wheel so that the ridge line portion of the V-shaped blade becomes a continuous cutting edge, and is inclined on the inclined surface of the V-shaped knife. The cutting edge is formed with a notch recess at a position separated by a predetermined distance, and a thin portion and a thick portion are alternately formed at a front end portion of the V-shaped blade, wherein the notch concave portion is formed at an angle of the cutting edge Θ1 (where θ1>90°), and an angle between the tip side portion of the surface forming the cutout recess and the inclined surface of the blade is θ2, so that 180°>θ2>180°-(θ1) ) The form of /2 is formed.
再者，本發明中之「θ2」係指亦包括「形成切口凹部之面」為曲面之情況在內，「形成切口凹部之面」於刀尖側部分與刀之傾斜面交叉之位置上之、形成於「形成切口凹部之面」之切面與「刀之傾斜面」之切面之間之角度。又，θ1為鈍角(θ>90°)，較佳為165°≧θ1>90°之範圍。In addition, "θ2" in the present invention means that "the surface on which the notch is formed" is a curved surface, and the surface on which the notch is formed is formed at a position where the blade side portion intersects the inclined surface of the blade. The angle formed between the cut surface of the "face forming the notch recess" and the cut surface of the "inclined surface of the knife". Further, θ1 is an obtuse angle (θ>90°), and preferably 165°≧θ1>90°.
而且，於θ2=180°之情形時為未形成有切口凹部之狀態，對應於如上述專利文獻1所揭示般沿著圓盤狀輪之圓周部形成V字形刀之劃線輪。又，於θ2=180°-(θ1)/2之情形時為形成有切口凹部之面之刀尖側部分與形成脊線部之刀尖平行之狀態，實質上對應於上述專利文獻3。即，本發明之劃線輪係於V字形刀之傾斜面自與刀尖相隔特定距離之位置形成有切口凹部，形成該切口凹部之面之刀尖側部分與刀之傾斜面之間之角度大於上述專利文獻3所揭示之劃線輪。Further, in the case where θ2 = 180°, a notch recessed portion is formed, and a scribing wheel in which a V-shaped blade is formed along the circumferential portion of the disc-shaped wheel is disclosed as disclosed in Patent Document 1 above. In the case of θ2=180°-(θ1)/2, the state in which the blade edge side portion of the surface on which the notch concave portion is formed is parallel to the blade edge forming the ridge line portion substantially corresponds to Patent Document 3 described above. That is, the scribing wheel of the present invention is formed with a notch recessed portion at a position spaced apart from the cutting edge by a certain distance from the inclined surface of the V-shaped blade, and an angle between the blade tip side portion of the face forming the notch recess and the inclined surface of the blade It is larger than the scribing wheel disclosed in the above Patent Document 3.
由此，與上述專利文獻1所揭示之劃線輪相比不易產生水平裂痕，與上述專利文獻3所揭示之劃線輪相比垂直裂痕較淺。因此，根據本發明之劃線輪，刀尖與脆性基板之間之抓持性良好，可使所劃線之脆性基板之端面強度提昇。又，即便有與其他劃線交叉之情況，於交叉部亦不易產生缺口。As a result, horizontal cracks are less likely to occur than the scribing wheel disclosed in Patent Document 1, and the vertical crack is shallower than the scribing wheel disclosed in Patent Document 3. Therefore, according to the scribing wheel of the present invention, the grip between the blade edge and the brittle substrate is good, and the strength of the end face of the slab-lined brittle substrate can be improved. Moreover, even if there is a case where it intersects with another scribe line, it is hard to generate a notch in the intersection part.
再者，本發明之劃線輪可適當選擇使用於超硬合金製、燒結鑽石製、或者鋼或超硬合金之表面藉由物理氣相沈積法或化學氣相沈積法塗覆有單晶鑽石、多晶鑽石、CBN(Cubic Boron Nitride，立方氮化硼)等之構件。又，切 口凹部由於尺寸較小，因此為了高精度地進行加工，較佳為藉由雷射加工來形成。又，於本發明之劃線輪中，較佳為切口凹部形成於兩側之V字形刀之傾斜面，但亦可視用途而採用只於單側之刀之傾斜面形成切口凹部之劃線輪。Furthermore, the scribing wheel of the present invention can be suitably selected for use on a surface of a superhard alloy, a sintered diamond, or a steel or a superhard alloy by a physical vapor deposition method or a chemical vapor deposition method. , polycrystalline diamond, CBN (Cubic Boron Nitride, cubic boron nitride) and other components. Cut Since the orifice portion has a small size, it is preferably formed by laser processing in order to perform processing with high precision. Further, in the scribing wheel of the present invention, it is preferable that the notch concave portion is formed on the inclined surface of the V-shaped blade on both sides, but the scribing wheel which forms the notch concave portion only by the inclined surface of the one-side knife may be used for the purpose. .
於本發明之劃線輪中，上述θ2較佳為175°≧θ2≧180°-(θ1)/2+5°，更佳為175°≧θ2≧180°-(θ1)/2+45°。In the scribing wheel of the present invention, the above θ2 is preferably 175°≧θ2≧180°-(θ1)/2+5°, more preferably 175°≧θ2≧180°-(θ1)/2+45°. .
於θ2為180°>θ2>175°之條件之情形時，形成切口凹部之效果較小，且於本發明之劃線輪與上述專利文獻1所揭示之劃線輪之間產生之效果差異亦較小。又，於θ2為180°-(θ1)/2+5°>θ2≧180°-(θ1)/2之條件之情形時，於本發明之劃線輪與上述專利文獻3所揭示之劃線輪之間產生之效果差異較小。於θ2為175°≧θ2≧180°-(θ1)/2+45°之條件之情形時，可進一步提昇所劃線之脆性基板之端面強度。When θ2 is a condition of 180°>θ2>175°, the effect of forming the notch recess is small, and the difference between the effect of the scribing wheel of the present invention and the scribing wheel disclosed in Patent Document 1 is also Smaller. Further, in the case where θ2 is a condition of 180°-(θ1)/2+5°>θ2≧180°-(θ1)/2, the scribing wheel of the present invention and the scribing disclosed in the above Patent Document 3 The difference between the effects produced by the wheels is small. In the case where θ2 is a condition of 175°≧θ2≧180°-(θ1)/2+45°, the end face strength of the lined brittle substrate can be further improved.
於本發明之劃線輪中，較佳為同一形狀者於同一圓周上等間隔地形成有多個。In the scribing wheel of the present invention, it is preferable that a plurality of the same shape are formed at equal intervals on the same circumference.
於本發明之劃線輪中，即便形狀各不相同者於同一圓周上不等間隔或錯開地形成有單個或多個，亦可發揮相應之效果。然而，若同一形狀者於同一圓周上等間隔地形成有多個，則可遍及全長而形成均質之劃線，並且於端部，與脆性基板抵接之劃線輪之接觸狀態實質上均一，因此，可進一步提昇所劃線之脆性基板之端面強度。又，即便有與其他劃線交叉之情況，亦更難以於交叉部產生缺口。In the scribing wheel of the present invention, even if the shapes are different, a single or a plurality of unequal intervals or staggered formations on the same circumference can exert a corresponding effect. However, if a plurality of the same shape are formed at equal intervals on the same circumference, a uniform scribe line can be formed over the entire length, and the contact state of the scribe wheel abutting the brittle substrate at the end portion is substantially uniform. Therefore, the end face strength of the lined brittle substrate can be further improved. Moreover, even if there is a case where it intersects with other scribe lines, it is more difficult to form a gap at the intersection.
於本發明之劃線輪中，上述切口凹部較佳為以沿上述刀之傾斜面之延伸方向之長度a與沿與上述刀之傾斜面正交 之方向之長度b之比b/a成為b/a<1之方式形成。In the scribing wheel of the present invention, the cutout recess is preferably orthogonal to the length a along the extending direction of the inclined surface of the blade and along the inclined surface of the blade The ratio b/a of the length b of the direction is formed such that b/a<1.
若切口凹部滿足b/a<1之條件，則切口凹部成為橢圓狀，且成為沿刀之傾斜面之延伸方向整齊排列之狀態。因此，根據本發明之劃線輪，由於可於刀之傾斜面形成多個切口凹部，因此所劃線之脆性基板之端面形狀更均質，且可使端面強度進一步提昇。When the notch concave portion satisfies the condition of b/a<1, the notch concave portion has an elliptical shape and is in a state of being aligned in the extending direction of the inclined surface of the blade. Therefore, according to the scribing wheel of the present invention, since a plurality of slit recesses can be formed on the inclined surface of the blade, the end surface shape of the lined brittle substrate is more uniform, and the end face strength can be further improved.
以下，利用圖式對本發明之實施形態進行說明。但以下所示之實施形態表示用以使本發明之技術思想具體化之劃線輪之一例，並非意圖將本發明特定為該劃線輪，亦可同樣地適用於專利請求項之範圍中所包含之其他實施形態之劃線輪。又，於以下所示之圖式中，為了可容易理解地識別各構成，針對各構成部分適當地使比例尺不同，未必按照實際之尺寸或角度進行圖示。Hereinafter, embodiments of the present invention will be described using the drawings. However, the embodiment shown below shows an example of a scribing wheel for embodying the technical idea of the present invention, and is not intended to specify the present invention as the scribing wheel, and is equally applicable to the scope of the patent claims. A scribing wheel of another embodiment is included. Further, in the drawings shown below, in order to easily recognize each configuration, the scales are appropriately made different for each component, and are not necessarily illustrated in actual size or angle.
首先，參照圖1~圖3對實施形態之劃線輪進行說明。再者，圖1係實施形態之劃線輪之側視圖。圖2係圖1之劃線輪之前視圖。圖3係沿圖1之III-III線之放大剖視圖。First, the scribing wheel of the embodiment will be described with reference to Figs. 1 to 3 . Further, Fig. 1 is a side view of the scribing wheel of the embodiment. Figure 2 is a front elevational view of the scribing wheel of Figure 1. Figure 3 is an enlarged cross-sectional view taken along line III-III of Figure 1.
如圖1~圖3所示，實施形態之劃線輪10具有遍及沿圓盤狀輪之圓周部之全周而形成有V字形刀之形狀。更詳細地說，具有以下底面之面積較上底面大之2個圓錐台之下底面彼此相互對向之方式配置之形狀，具有算盤珠形狀，且具有主體部11、刀之傾斜面12、及由刀之傾斜面形成之作 為脊線部之刀尖12a。As shown in FIGS. 1 to 3, the scribing wheel 10 of the embodiment has a shape in which a V-shaped blade is formed over the entire circumference of the circumferential portion of the disc-shaped wheel. More specifically, the shape in which the bottom surface of the lower surface is larger than the upper surface and the lower surface of the lower surface of the truncated cone is opposed to each other, and has an abacus bead shape, and has a main body portion 11 and an inclined surface 12 of the blade. Made by the inclined surface of the knife It is the tip 12a of the ridge line.
再者，該劃線輪10可適當選擇使用於超硬合金製、燒結鑽石製、或者於鋼或超硬合金之表面藉由物理氣相沈積法或化學氣相沈積法塗覆有單晶鑽石、多晶鑽石、CBN等之構件。Furthermore, the scribing wheel 10 can be suitably selected for use in superhard alloy, sintered diamond, or coated with single crystal diamond by physical vapor deposition or chemical vapor deposition on the surface of steel or superalloy. , polycrystalline diamonds, CBN and other components.
如圖1及圖2所示，主體部11形成為圓盤狀，於主體部11之中心附近，沿旋轉軸10b設置有貫穿主體部11之貫穿孔10a。又，於主體部11之外周圓以環狀設置有刀之傾斜面12。As shown in FIGS. 1 and 2, the main body portion 11 is formed in a disk shape, and a through hole 10a penetrating the main body portion 11 is provided along the rotating shaft 10b in the vicinity of the center of the main body portion 11. Further, an inclined surface 12 of the blade is provided in a ring shape on the outer circumference of the main body portion 11.
如圖1所示，刀之傾斜面12係由以旋轉軸10b為中心之同心圓狀之內周及外周形成之圓環狀體。又，如圖2所示，刀之傾斜面12於前視下呈V字狀。沿旋轉軸10b之刀之傾斜面12之厚度隨著自旋轉軸10b側朝向刀尖12a而逐漸減小。 刀尖12a沿著刀之傾斜面12之最外周部設置。再者，與先前例同樣地，刀之傾斜面12可藉由斜角研磨法(使用磨石之面進行研磨而形成傾斜面之方法)形成。As shown in Fig. 1, the inclined surface 12 of the blade is an annular body formed by a concentric inner circumference and an outer circumference centering on the rotation shaft 10b. Further, as shown in Fig. 2, the inclined surface 12 of the blade has a V shape in a front view. The thickness of the inclined surface 12 of the blade along the rotating shaft 10b gradually decreases toward the blade tip 12a from the side of the rotating shaft 10b. The tip 12a is provided along the outermost peripheral portion of the inclined surface 12 of the blade. Further, similarly to the previous example, the inclined surface 12 of the blade can be formed by a bevel polishing method (a method of forming an inclined surface by polishing using a surface of a grindstone).
而且，本實施形態之劃線輪10係將複數個同一形狀之切口凹部13以同心圓狀等間隔地形成於刀之傾斜面12。再者，於圖1及圖2中，為便於製圖，只分別圖示幾個切口凹部13。該切口凹部13由於尺寸較小，因此為了高精度地進行加工，可藉由雷射加工法形成。再者，切口凹部13亦可不全為同一形狀，亦可不為等間隔，又，亦可於刀之傾斜面之兩面分別位於不同之位置。Further, in the scribing wheel 10 of the present embodiment, a plurality of slit recesses 13 having the same shape are formed at equal intervals in a concentric shape on the inclined surface 12 of the blade. Further, in FIGS. 1 and 2, in order to facilitate drawing, only a plurality of slit recesses 13 are illustrated. Since the slit recess 13 has a small size, it can be formed by a laser processing method in order to perform processing with high precision. Furthermore, the notch recesses 13 may not all be of the same shape, may not be equally spaced, or may be located at different positions on both sides of the inclined surface of the knife.
又，由於切口凹部13亦包括形成切口凹部13之面13a(參 照圖3)為曲面之情況，因此，形成切口凹部之面13a之刀尖側部分與刀之傾斜面12之間之角度θ2被定義為形成切口凹部之面13a於刀尖側部分上與刀之傾斜面12交叉之位置處之、形成於形成切口凹部之面之切面L與刀之傾斜面12之切面之間之角度。Moreover, since the cutout recess 13 also includes the face 13a forming the cutout recess 13 (see 3), in the case of a curved surface, the angle θ2 between the blade edge side portion of the face 13a forming the notch recess and the inclined surface 12 of the blade is defined as the face 13a forming the notch recess on the blade side portion and the blade The angle between the cut surface L of the surface on which the notch recess is formed and the cut surface of the inclined surface 12 of the blade at the position where the inclined surface 12 intersects.
各切口凹部13以沿刀之傾斜面12之延伸方向之長度a與沿與刀之傾斜面12正交之方向之長度b之比b/a成為b/a<1之方式形成為橢圓形狀，於圖1及圖2中，表示了設為b/a<0.5以下之長橢圓形狀之例子。與上述專利文獻3所示之內容同樣地，該多個切口凹部13於形成於玻璃基板14(參照圖4)之劃線S之通常之深度、即自玻璃基板14之表面至刀尖12a為止之深度為d1(約5 μm以下)之情形時，於刀之傾斜面12上將自退離刀尖12a之位置d2至退離玻璃基板14之表面之位置d3規定為凹陷之範圍而形成。Each of the slit recesses 13 is formed in an elliptical shape such that the ratio b/a of the length a along the extending direction of the inclined surface 12 of the blade and the length b in the direction orthogonal to the inclined surface 12 of the blade becomes b/a<1. In FIGS. 1 and 2, an example of a long elliptical shape having b/a < 0.5 or less is shown. Similarly to the content described in Patent Document 3, the plurality of slit recesses 13 are formed at a normal depth of the scribe line S formed on the glass substrate 14 (see FIG. 4), that is, from the surface of the glass substrate 14 to the blade tip 12a. When the depth is d1 (about 5 μm or less), the inclined surface 12 of the blade is formed to define a range d2 from the position d2 of the retracting blade tip 12a to the surface of the glass substrate 14 to be recessed.
又，切口凹部13於V字形刀之傾斜面12自與刀尖12a相隔特定距離之位置形成，藉由於刀之傾斜面12之刀尖12a側形成切口凹部13，而使形成有切口凹部13之部分成為薄壁部12b，未形成有切口凹部13之部分成為厚壁部12c，從而成為於V字形刀之前端部分交替地形成有薄壁部12b及厚壁部12c、並且連續地形成有刀尖12a之狀態。Further, the notch recessed portion 13 is formed at a position spaced apart from the blade edge 12a by a predetermined distance from the inclined surface 12 of the V-shaped blade, and the notch recessed portion 13 is formed on the blade edge 12a side of the inclined surface 12 of the blade, so that the notch recess 13 is formed. Part of the thin portion 12b is formed, and the portion where the slit recess 13 is not formed becomes the thick portion 12c, and the thin portion 12b and the thick portion 12c are alternately formed at the front end portion of the V-shaped blade, and the blade is continuously formed. The state of the tip 12a.
而且，本實施形態之劃線輪與上述專利文獻3所示之劃線輪不同，如圖3所示，切口凹部13於將刀尖12a之角度設為θ1，且將形成切口凹部13之面之刀尖側部分與刀之傾斜面12之間之角度設為θ2時，以180°>θ2>180°-(θ1)/2之方 式形成。Further, the scribing wheel according to the present embodiment is different from the scribing wheel shown in Patent Document 3, and as shown in FIG. 3, the notch recessed portion 13 is formed by the angle of the cutting edge 12a as θ1 and the surface of the notch recess 13 is formed. When the angle between the blade tip side portion and the knife inclined surface 12 is θ2, the square is 180°>θ2>180°-(θ1)/2 Formed.
該θ2係以如下方式規定者。即，於θ2=180°之情形時為未形成有切口凹部之狀態，且與如上述專利文獻1所揭示之沿著圓盤狀輪之圓周部形成有V字形刀之劃線輪為同一形狀。於這種情形時，藉由增大刀尖負荷，而使刀尖12a深入至玻璃基板14之表面之深度變大，且用以產生垂直裂痕之能量變大，因此，垂直裂痕之深度亦變大，但若刀尖負荷超過一定大小，則會產生水平裂痕從而產生較多之所不希望之玻璃屑。This θ2 is defined as follows. In other words, in the case where θ2 = 180°, the slit recess is not formed, and the scribing wheel in which the V-shaped knife is formed along the circumferential portion of the disc-shaped wheel as disclosed in Patent Document 1 has the same shape. . In this case, by increasing the tip load, the depth of the blade tip 12a deepens into the surface of the glass substrate 14 becomes large, and the energy for generating the vertical crack becomes large, and therefore, the depth of the vertical crack becomes large. However, if the tip load exceeds a certain size, horizontal cracks will be generated to produce more undesired swarf.
另一方面，於θ2=180°-(θ1)/2之情形時，與如上述專利文獻3所揭示之形成切口凹部13之面之刀尖側部分與形成脊線部之刀尖12a平行之狀態為同一形狀。即，形成切口凹部13之面之刀尖側部分與玻璃基板14之表面實質上成為垂直之配置關係。於這種情形時，由於成為於厚壁部12c進入至藉由形成於刀之前端側之薄壁部12b形成之劃線中時施加單點衝擊之狀態，因此促進垂直裂痕之形成。On the other hand, in the case of θ2 = 180° - (θ1)/2, the blade edge side portion of the face forming the cutout recess 13 as disclosed in the above Patent Document 3 is parallel to the blade edge 12a forming the ridge portion. The status is the same shape. That is, the blade edge side portion of the surface on which the slit recess 13 is formed is substantially perpendicular to the surface of the glass substrate 14. In this case, a single point impact is applied when the thick portion 12c enters the scribe line formed by the thin portion 12b formed on the front end side of the blade, thereby promoting the formation of the vertical crack.
其結果，由於可使劃線時對玻璃基板14施加之負荷減小，因此於玻璃基板14幾乎不產生殘留應力，且可抑制水平裂痕之產生，因此，可獲得於進行切斷處理時不會於端面產生凹凸之高成形品質之玻璃基板。反之，由於厚壁部12c進入至藉由形成於刀之前端側之薄壁部12b形成之劃線中時之單點衝擊較大，因此端面強度會降低。As a result, since the load applied to the glass substrate 14 at the time of scribing can be reduced, residual stress is hardly generated in the glass substrate 14, and generation of horizontal cracks can be suppressed, so that it can be obtained when the cutting process is performed. A glass substrate having a high-profile quality of irregularities on the end faces. On the other hand, when the thick portion 12c enters the scribe line formed by the thin portion 12b formed on the front end side of the knives, the single point impact is large, and the end surface strength is lowered.
因此，於本實施形態中，為了成為形成有切口凹部13之狀態而採用180°>θ2之條件，又，為了不使厚壁部12c進 入至藉由形成於刀之前端側之薄壁部12b形成之劃線中時之單點衝擊過大而採用θ2>180°-(θ1)/2之條件。Therefore, in the present embodiment, in order to form the slit recessed portion 13, the condition of 180° > θ2 is employed, and in order to prevent the thick portion 12c from entering When the single point impact is formed by the scribe line formed by the thin portion 12b formed on the front end side of the knives, the condition of θ2 > 180° - (θ1)/2 is employed.
利用圖4對使用本實施形態之劃線輪10對玻璃基板14形成劃線S時之作用進行說明。再者，圖4A係說明實施形態之劃線輪之薄壁部之作用之圖，圖4B係說明厚壁部之作用之圖。The action when the scribe line S is formed on the glass substrate 14 by using the scribing wheel 10 of the present embodiment will be described with reference to Fig. 4 . 4A is a view for explaining the action of the thin portion of the scribing wheel of the embodiment, and FIG. 4B is a view for explaining the action of the thick portion.
與圖6所示之上述專利文獻3所揭示之劃線輪之情況同樣地，藉由形成於刀之前端側之薄壁部12b與厚壁部12c交替重複地進行劃線，直至實施形態之劃線輪10之刀尖12a到達設定於玻璃基板14之厚度方向之深入深度為止。In the same manner as in the case of the scribing wheel disclosed in Patent Document 3 shown in FIG. 6, the thin portion 12b and the thick portion 12c formed on the front end side of the blade are alternately repeatedly scribed until the embodiment The blade edge 12a of the scribing wheel 10 reaches a depth deepened in the thickness direction of the glass substrate 14.
而且，於形成於刀之前端側之薄壁部12b進行劃線處理之狀態下，如圖4A所示，雖然切口凹部13與劃線S之溝槽之傾斜面Sa接觸，但成為所有負荷只集中於刀尖12a之前端部之狀態，從而有效地藉由薄壁部12b進行劃線。於藉由該薄壁部12b進行之劃線處理中，即便刀尖12a接觸到沿劃線S之塑性變形區域，亦可將內部應變之產生抑制得較低，且可防止水平裂痕之產生，於劃線S之底部形成較淺之垂直裂痕Sc。此時，厚壁部12c成為即將進入劃線S中之狀態。Further, in a state in which the thin portion 12b formed on the end side of the blade is subjected to the scribing process, as shown in FIG. 4A, the notch recess 13 is in contact with the inclined surface Sa of the groove of the scribing S, but all loads are only The state is concentrated on the front end portion of the blade tip 12a, thereby effectively scribing by the thin portion 12b. In the scribing process by the thin portion 12b, even if the blade edge 12a contacts the plastic deformation region along the scribe line S, the occurrence of internal strain can be suppressed low, and horizontal cracks can be prevented from occurring. A shallow vertical crack Sc is formed at the bottom of the scribe line S. At this time, the thick portion 12c is in a state of coming into the scribe line S.
若形成於刀之前端側之薄壁部12b藉由後，厚壁部12c進入至該劃線S中，則該厚壁部12c之前端之兩側部與劃線S之溝槽之傾斜面Sa接觸，刀尖負荷全部施加至該溝槽之傾斜面Sa。隨著厚壁部12c進一步進入，如圖4B所示，溝槽之傾斜面Sa受到擠壓而塑性變形並平坦化。此時，由於劃 線S成為向左右擴展之狀態，因此垂直裂痕Sc形成得更大，而且，由於成為該厚壁部12c與劃線S之溝槽之傾斜面Sa抵接之形態，因此促進垂直裂痕Sc之形成。When the thin portion 12b formed on the front end side of the blade enters the scribe line S by the rear, the inclined portion of the groove at the front end portion of the thick portion 12c and the groove S is formed. Sa contact, the tip load is all applied to the inclined surface Sa of the groove. As the thick portion 12c further enters, as shown in FIG. 4B, the inclined surface Sa of the groove is pressed to be plastically deformed and planarized. At this time, due to Since the line S is expanded to the left and right, the vertical crack Sc is formed to be larger, and the thick portion 12c is in contact with the inclined surface Sa of the groove of the scribe line S, thereby promoting the formation of the vertical crack Sc. .
如此一來，藉由形成於刀之前端側之薄壁部12b與厚壁部12c交替重複地進行劃線，能夠以與先前同等或者小於先前之刀尖負荷形成垂直裂痕Sc。其結果，由於在劃線時能夠使施加至玻璃基板14之負荷減小，因此幾乎不會於玻璃基板14產生殘留應力，從而可抑制水平裂痕之產生。In this manner, by thinning the thin portion 12b formed on the front end side of the blade and the thick portion 12c alternately and repeatedly, the vertical crack Sc can be formed with the same or less than the previous blade load. As a result, since the load applied to the glass substrate 14 can be reduced at the time of scribing, residual stress is hardly generated in the glass substrate 14, and generation of horizontal cracks can be suppressed.
又，於本實施形態之劃線輪10中，由於在刀尖角度θ1、與形成切口凹部13之面之刀尖側部分和刀之傾斜面12之間之角度θ2之間，滿足θ2>180°-(θ1)/2之條件，因此藉由形成於刀之前端側之厚壁部12c所致之單點衝擊，與設為θ2=180°-(θ1)/2之上述專利文獻3所揭示之劃線輪之情況相比較小。Further, in the scribing wheel 10 of the present embodiment, θ2>180 is satisfied between the cutting edge angle θ1 and the angle θ2 between the blade edge side portion of the surface on which the notch concave portion 13 is formed and the inclined surface 12 of the blade. The condition of °-(θ1)/2 is a single point impact caused by the thick portion 12c formed on the front end side of the blade, and the above-mentioned Patent Document 3 which is θ2 = 180° - (θ1)/2 The situation of the scribing wheel revealed is relatively small.
因此，根據本實施形態之劃線輪10，與上述專利文獻1所揭示之劃線輪相比不易產生水平裂痕，與上述專利文獻3所揭示之劃線輪相比垂直裂痕較淺，並且與上述專利文獻3所揭示之劃線輪同樣地，刀尖與玻璃基板等脆性基板之間之抓持性良好。而且，由於垂直裂痕較淺，因此可使經劃線之脆性基板之端面強度提昇，並且即便有與其他劃線交叉之情況，亦不易於交叉部產生缺口。Therefore, according to the scribing wheel 10 of the present embodiment, horizontal cracks are less likely to occur than the scribing wheel disclosed in Patent Document 1, and the vertical crack is shallower than the scribing wheel disclosed in Patent Document 3, and Similarly to the scribing wheel disclosed in Patent Document 3, the grip between the blade edge and a brittle substrate such as a glass substrate is good. Further, since the vertical crack is shallow, the strength of the end face of the scribed blank substrate can be improved, and even if there is a crossover with other scribe lines, it is not easy to cause a gap at the intersection.
再者，於本實施形態之劃線輪10中，於刀尖角度θ1、與形成切口凹部13之面之刀尖側部分和刀之傾斜面12之間之角度θ2之間，較佳為175°≧θ2≧180°-(θ1)/2+5°，更佳為 175°≧θ2≧180°-(θ1)/2+45°。Further, in the scribing wheel 10 of the present embodiment, between the blade edge angle θ1 and the angle θ2 between the blade edge side portion of the surface on which the notch concave portion 13 is formed and the blade inclined surface 12, it is preferably 175. °≧θ2≧180°-(θ1)/2+5°, more preferably 175 ° ≧ θ2 ≧ 180 ° - (θ1) / 2 + 45 °.
於θ2為180°>θ2>175°之條件之情形時，形成切口凹部13之效果較小，且實質上本實施形態之劃線輪與上述專利文獻1所揭示之劃線輪之間未產生效果之差異。又，於θ2為180°-(θ1)/2+5°>θ2≧180°-(θ1)/2之條件之情形時，實質上本實施形態之劃線輪與上述專利文獻3所揭示之劃線輪之間未產生效果之差異。於θ2為175°≧θ2≧180°-(θ1)/2+45°之條件之情形時，由於垂直裂痕不會變得過深，因此可進一步提昇所劃線之脆性基板之端面強度。When θ2 is a condition of 180°>θ2>175°, the effect of forming the notch recess 13 is small, and substantially no difference is made between the scribing wheel of the present embodiment and the scribing wheel disclosed in Patent Document 1 described above. The difference in effect. In the case where θ2 is a condition of 180°-(θ1)/2+5°>θ2≧180°-(θ1)/2, substantially the scribing wheel of the present embodiment and the above-mentioned Patent Document 3 disclose There is no difference in effect between the scribing wheels. In the case where θ2 is a condition of 175°≧θ2≧180°-(θ1)/2+45°, since the vertical crack does not become too deep, the end face strength of the lined brittle substrate can be further improved.
再者，劃線輪10之外徑D(參照圖2)較佳為1~5 mm之範圍。於劃線輪10之外徑D小於1 mm之情形時，劃線輪10之操作性及耐久性降低，並且工業上之生產亦變得困難。另一方面，於劃線輪10之外徑D大於5 mm之情形時，劃線時之適當負荷範圍偏向高負荷側，存在不易以較低之負荷形成劃線之傾向。Further, the outer diameter D (see FIG. 2) of the scribing wheel 10 is preferably in the range of 1 to 5 mm. When the outer diameter D of the scribing wheel 10 is less than 1 mm, the operability and durability of the scribing wheel 10 are lowered, and industrial production becomes difficult. On the other hand, when the outer diameter D of the scribing wheel 10 is larger than 5 mm, the appropriate load range at the time of scribing is biased toward the high load side, and there is a tendency that it is difficult to form a scribing line with a low load.
又，劃線輪10之厚度T較佳為0.5~1.2 mm之範圍。於劃線輪10之厚度T小於0.5 mm之情形時，存在加工性及操作性降低之情況。另一方面，於劃線輪10之厚度T大於1.2 mm之情形時，劃線輪10之製造所需之成本變高。Further, the thickness T of the scribing wheel 10 is preferably in the range of 0.5 to 1.2 mm. When the thickness T of the scribing wheel 10 is less than 0.5 mm, there is a case where workability and workability are lowered. On the other hand, when the thickness T of the scribing wheel 10 is larger than 1.2 mm, the cost required for the manufacture of the scribing wheel 10 becomes high.
又，刀尖12a之刀尖角度θ1通常為鈍角，較佳為165°≧θ>90°之範圍。再者，刀尖角度θ1之具體角度係根據所要切斷之脆性材料基板之材質或厚度等而適當設定。又，該切口凹部13之最佳形成位置只要係考慮到脆性材料基板之材質及厚度、劃線輪之刀尖角度θ1及厚度，並且於小於自 劃線時之脆性基板之表面至刀尖12a為止之深度之範圍、即1~5 μm左右之範圍內實驗性地適當設定即可。又，鄰接之切口凹部13間之間距不存在臨界極限，於20~200 μm之範圍內適當選擇即可。再者，若總結上述實施形態之劃線輪、上述專利文獻1所揭示之劃線輪(先前例1)、上述專利文獻3所揭示之劃線輪(先前例2)之特性之差異，則如下述表1所記載。Further, the cutting edge angle θ1 of the cutting edge 12a is usually an obtuse angle, and preferably 165° ≧ θ > 90°. Further, the specific angle of the blade edge angle θ1 is appropriately set depending on the material or thickness of the brittle material substrate to be cut. Moreover, the optimum formation position of the cutout recess 13 is based on the material and thickness of the brittle material substrate, the blade tip angle θ1 and the thickness of the scribing wheel, and less than The range of the depth from the surface of the brittle substrate to the blade edge 12a at the time of scribing, that is, the range of about 1 to 5 μm may be experimentally appropriately set. Further, there is no critical limit between the adjacent slit recesses 13 and may be appropriately selected within the range of 20 to 200 μm. In addition, when the difference between the characteristics of the scribing wheel of the above-described embodiment, the scribing wheel disclosed in Patent Document 1 (Previous Example 1), and the scribing wheel disclosed in Patent Document 3 (Previous Example 2) is summarized, As described in Table 1 below.
再者，於上述實施形態之劃線輪10中，表示了同一形狀之切口凹部13於同一圓周上等間隔地形成有多個之例子，但於本發明中，即便形狀各不相同之切口凹部13於同一圓周上不等間隔或錯開形成有單個或多個，亦可發揮相應之效果。然而，若同一形狀之切口凹部13於同一圓周上等間隔地形成有多個，則可遍及全長形成均質之劃線，並且由於在端部上與玻璃基板等脆性基板抵接之劃線輪之接觸狀態實質上均一，因此可進一步提昇所劃線之脆性基板之端面強度，並且即便有如與其他劃線交叉般之情況，亦更不易於交叉部產生缺口。Further, in the scribing wheel 10 of the above-described embodiment, a plurality of slit recesses 13 having the same shape are formed at equal intervals on the same circumference. However, in the present invention, even recessed recesses having different shapes are provided. 13 may be formed in a single or a plurality of unequal intervals or staggered on the same circumference, and may also exert a corresponding effect. However, if a plurality of slit recesses 13 having the same shape are formed at equal intervals on the same circumference, a uniform scribing line can be formed over the entire length, and a scribing wheel that abuts on a brittle substrate such as a glass substrate at the end portion can be formed. Since the contact state is substantially uniform, the end face strength of the lined brittle substrate can be further improved, and even if it is crossed with other scribe lines, it is less likely that the intersection portion is notched.
於上述實施形態之劃線輪10中，作為切口凹部13而表示了沿刀之傾斜面12之延伸方向之長度a與沿與刀之傾斜面12正交之方向之長度b之比b/a為b/a<0.5之長橢圓狀之例 子。然而，於本發明中，作為切口凹部13，即便為b/a≧1之條件，亦可發揮相應之效果，不過若至少滿足b/a<1之條件，則切口凹部13之形狀成為橢圓狀，且成為沿與刀之傾斜面12正交之方向整齊排列之狀態，因此，可於刀之傾斜面12形成多個切口凹部13，所劃線之脆性基板之端面形狀變得更均質，且可使端面強度進一步提昇。In the scribing wheel 10 of the above-described embodiment, the ratio of the length a along the extending direction of the inclined surface 12 of the blade to the length b in the direction orthogonal to the inclined surface 12 of the blade is shown as the notch recess 13 b/a An example of a long oval with b/a < 0.5 child. However, in the present invention, the slit recess 13 can exhibit a corresponding effect even under the condition of b/a ≧ 1, but the shape of the slit recess 13 becomes elliptical if at least the condition of b/a < 1 is satisfied. And in a state of being aligned in a direction orthogonal to the inclined surface 12 of the blade, a plurality of slit recesses 13 can be formed on the inclined surface 12 of the blade, and the end surface shape of the lined brittle substrate becomes more uniform, and The end face strength can be further improved.
10‧‧‧劃線輪10‧‧‧marking wheel
10a‧‧‧貫穿孔10a‧‧‧through holes
10b‧‧‧旋轉軸10b‧‧‧Rotary axis
11‧‧‧主體部11‧‧‧ Main body
12‧‧‧刀之傾斜面12‧‧‧The slope of the knife
12a‧‧‧刀尖12a‧‧‧Tool tip
12b‧‧‧薄壁部12b‧‧‧thin wall
12c‧‧‧厚壁部12c‧‧‧ thick wall
13‧‧‧切口凹部13‧‧‧cut recess
13a‧‧‧切口凹部之面13a‧‧‧ Face of the recess
14‧‧‧玻璃基板14‧‧‧ glass substrate
50‧‧‧劃線輪50‧‧‧marking wheel
51‧‧‧傾斜面51‧‧‧Sloping surface
51a‧‧‧刀尖51a‧‧‧Tool tip
51b‧‧‧薄壁部51b‧‧‧thin wall
51c‧‧‧厚壁部51c‧‧‧ Thick Wall
52‧‧‧貫穿孔52‧‧‧through holes
53‧‧‧切口凹部53‧‧‧cut recess
53a‧‧‧刀尖側部分53a‧‧‧Side side part
54‧‧‧玻璃基板54‧‧‧ glass substrate
a‧‧‧沿刀之傾斜面之延伸方向之長度A‧‧‧ Length of the direction along which the inclined surface of the knife is extended
b‧‧‧沿與刀之傾斜面正交之方向之長度B‧‧‧ Length along the direction orthogonal to the inclined plane of the knife
D‧‧‧劃線輪之外徑D‧‧‧ outside diameter of the scribing wheel
d1‧‧‧自玻璃基板之表面至刀尖為止之深度D1‧‧‧Density from the surface of the glass substrate to the tip of the blade
d2‧‧‧刀尖之位置d2‧‧‧The position of the tip
d3‧‧‧玻璃基板之表面之位置D3‧‧‧Location of the surface of the glass substrate
L‧‧‧形成切口凹部之面之切面L‧‧‧cutting the face of the notch
S‧‧‧劃線S‧‧‧
Sa‧‧‧溝槽之傾斜面Inclined surface of Sa‧‧‧ trench
Sc‧‧‧垂直裂痕Sc‧‧‧ vertical crack
T‧‧‧劃線輪之厚度T‧‧‧ thickness of the scribing wheel
θ1‧‧‧刀尖角度11‧‧‧Tool angle
θ2‧‧‧刀尖側部分與刀之傾斜面之間之角度θ2‧‧‧An angle between the side of the knife tip and the inclined surface of the knife
圖1係實施形態之劃線輪之側視圖。Figure 1 is a side view of a scribing wheel of an embodiment.
圖2係圖1之劃線輪之前視圖。Figure 2 is a front elevational view of the scribing wheel of Figure 1.
圖3係沿圖1之III-III線之放大剖視圖。Figure 3 is an enlarged cross-sectional view taken along line III-III of Figure 1.
圖4A係說明實施形態之劃線輪之薄壁部之作用之圖，圖4B係說明厚壁部之作用之圖。Fig. 4A is a view for explaining the action of the thin portion of the scribing wheel of the embodiment, and Fig. 4B is a view for explaining the action of the thick portion.
圖5A係先前例之劃線輪之側視圖，圖5B係剖視圖，圖5C係前視圖，圖5D係對玻璃基板形成劃線時之放大剖視圖。Fig. 5A is a side view of a scribing wheel of the prior art, Fig. 5B is a cross-sectional view, Fig. 5C is a front view, and Fig. 5D is an enlarged cross-sectional view showing a scribe line of the glass substrate.
圖6A係說明圖5所示之劃線輪之薄壁部之作用之圖，圖6B係說明厚壁部之作用之圖。Fig. 6A is a view for explaining the action of the thin portion of the scribing wheel shown in Fig. 5, and Fig. 6B is a view for explaining the action of the thick portion.
10‧‧‧劃線輪10‧‧‧marking wheel
12‧‧‧刀之傾斜面12‧‧‧The slope of the knife
12a‧‧‧刀尖12a‧‧‧Tool tip
12b‧‧‧薄壁部12b‧‧‧thin wall
12c‧‧‧厚壁部12c‧‧‧ thick wall
13‧‧‧切口凹部13‧‧‧cut recess
13a‧‧‧切口凹部之面13a‧‧‧ Face of the recess
L‧‧‧形成切口凹部之面之切面L‧‧‧cutting the face of the notch
θ1‧‧‧刀尖角度11‧‧‧Tool angle
θ2‧‧‧刀尖側部分與刀之傾斜面之間之角度θ2‧‧‧An angle between the side of the knife tip and the inclined surface of the knife
Claims (7)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011187990A JP5409726B2 (en) | 2011-08-30 | 2011-08-30 | Scribing wheel |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201313637A TW201313637A (en) | 2013-04-01 |
| TWI483910B true TWI483910B (en) | 2015-05-11 |
Family
ID=47794531
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101127503A TWI483910B (en) | 2011-08-30 | 2012-07-30 | Scribe wheel |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5409726B2 (en) |
| KR (1) | KR101348062B1 (en) |
| CN (1) | CN102964060B (en) |
| TW (1) | TWI483910B (en) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6077799B2 (en) * | 2012-08-31 | 2017-02-08 | 三星ダイヤモンド工業株式会社 | Cutter wheel and manufacturing method thereof |
| CN104175406B (en) * | 2013-05-24 | 2017-09-15 | 三星钻石工业股份有限公司 | Break bar and its manufacture method |
| JP2015003513A (en) * | 2013-05-24 | 2015-01-08 | 三星ダイヤモンド工業株式会社 | Cutter wheel and manufacturing method thereof |
| JP6332618B2 (en) * | 2014-04-24 | 2018-05-30 | 三星ダイヤモンド工業株式会社 | Scribing cutter wheel and scribing device |
| JP6572660B2 (en) * | 2015-07-31 | 2019-09-11 | 三星ダイヤモンド工業株式会社 | Scribing wheel |
| JP6648448B2 (en) * | 2015-08-17 | 2020-02-14 | 三星ダイヤモンド工業株式会社 | Method for forming vertical crack in brittle material substrate and method for cutting brittle material substrate |
| JP6547556B2 (en) * | 2015-09-29 | 2019-07-24 | 三星ダイヤモンド工業株式会社 | Method of dividing brittle substrate |
| CN107140820B (en) * | 2017-06-20 | 2023-10-27 | 嘉兴沃尔德金刚石工具有限公司 | Cutter wheel with chip removal hole array |
| JP7032787B2 (en) * | 2017-11-30 | 2022-03-09 | 三星ダイヤモンド工業株式会社 | Scribing wheel |
| DE102018131179A1 (en) | 2018-12-06 | 2020-06-10 | Schott Ag | Glass element with cut edge and process for its production |
| CN109574488B (en) * | 2019-01-28 | 2024-03-01 | 嘉兴沃尔德金刚石工具有限公司 | Knife flywheel |
| JP2021006374A (en) * | 2019-06-28 | 2021-01-21 | 三星ダイヤモンド工業株式会社 | Scribing wheel |
| JP2022038435A (en) * | 2020-08-26 | 2022-03-10 | ファインテック株式会社 | Scribing wheel for brittle material substrate and method for producing the same |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW529988B (en) * | 2001-03-30 | 2003-05-01 | Uht Corp | Cutting edge |
| TWI249460B (en) * | 2004-05-28 | 2006-02-21 | Tzujan Technology Inst | A cutting wheel structure |
| JP2006104029A (en) * | 2004-10-07 | 2006-04-20 | Joyo Kogaku Kk | Cutter wheel for cutting glass |
| JP2010126382A (en) * | 2008-11-26 | 2010-06-10 | Joyo Kogaku Kk | Cutter wheel for cutting glass |
| CN101734850A (en) * | 2008-11-26 | 2010-06-16 | 株式会社日本制钢所 | Knife wheel |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3304828B2 (en) * | 1997-06-10 | 2002-07-22 | 株式会社村田製作所 | Electronic component manufacturing method |
| TWI409231B (en) * | 2005-07-06 | 2013-09-21 | Mitsuboshi Diamond Ind Co Ltd | Method for manufacturing scratches for brittle materials |
| JP4219945B2 (en) * | 2006-08-10 | 2009-02-04 | トーヨー産業株式会社 | Cutter foil for glass cutting |
| DE202007013307U1 (en) | 2007-09-22 | 2008-04-24 | Bohle Ag | cutting wheel |
| KR20090058806A (en) * | 2007-12-05 | 2009-06-10 | 주식회사 탑 엔지니어링 | Scribe apparatus |
-
2011
- 2011-08-30 JP JP2011187990A patent/JP5409726B2/en not_active Expired - Fee Related
-
2012
- 2012-07-26 KR KR1020120081618A patent/KR101348062B1/en active IP Right Grant
- 2012-07-27 CN CN201210263027.0A patent/CN102964060B/en not_active Expired - Fee Related
- 2012-07-30 TW TW101127503A patent/TWI483910B/en not_active IP Right Cessation
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW529988B (en) * | 2001-03-30 | 2003-05-01 | Uht Corp | Cutting edge |
| TWI249460B (en) * | 2004-05-28 | 2006-02-21 | Tzujan Technology Inst | A cutting wheel structure |
| JP2006104029A (en) * | 2004-10-07 | 2006-04-20 | Joyo Kogaku Kk | Cutter wheel for cutting glass |
| JP2010126382A (en) * | 2008-11-26 | 2010-06-10 | Joyo Kogaku Kk | Cutter wheel for cutting glass |
| CN101734850A (en) * | 2008-11-26 | 2010-06-16 | 株式会社日本制钢所 | Knife wheel |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102964060B (en) | 2015-09-16 |
| CN102964060A (en) | 2013-03-13 |
| KR101348062B1 (en) | 2014-01-03 |
| JP5409726B2 (en) | 2014-02-05 |
| KR20130024749A (en) | 2013-03-08 |
| JP2013049597A (en) | 2013-03-14 |
| TW201313637A (en) | 2013-04-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI483910B (en) | Scribe wheel | |
| KR101201263B1 (en) | Cutter wheel and method for scribing brittle material substrate | |
| TWI447005B (en) | Cutter and cutting method using its brittle material substrate | |
| TWI486316B (en) | Brittle materials with scribing wheel, the use of its brittle material substrate scribing device and scribing tools | |
| US20080034595A1 (en) | Cutter wheel for cutting glass | |
| JP2007031200A (en) | Cutter wheel | |
| TWI423867B (en) | Scribe wheel | |
| TWI603930B (en) | Scoring wheel | |
| TW201339112A (en) | Scribing wheel, scribing device, scribing method , manufacturing method for display panel and display panel | |
| JP2010126387A (en) | Cutter wheel | |
| TWI663134B (en) | Breaking method of brittle substrate | |
| TWI678343B (en) | Breaking method of brittle substrate | |
| JP6182334B2 (en) | Manufacturing method of scribing wheel | |
| CN109849197B (en) | Scribing wheel | |
| TWI571340B (en) | Cutter wheel and its manufacturing method | |
| TWI637923B (en) | Scoring wheel | |
| CN103934484A (en) | Edge tool | |
| KR101824529B1 (en) | Scribing wheel | |
| JP2016210169A (en) | Scribing wheel | |
| JP2012115991A (en) | Scribing wheel | |
| JP2011104852A (en) | Scribing wheel | |
| JP2021006374A (en) | Scribing wheel | |
| JP6344582B2 (en) | Scribing wheel, scribing device and dividing method | |
| KR20220027036A (en) | Scribing wheel for brittle material substrate and method of manufacturing the same | |
| JP2013176959A (en) | Scribing wheel, scribing device, and scribing method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |