TWI481737B - Bearing fixture - Google Patents
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- TWI481737B TWI481737B TW103128632A TW103128632A TWI481737B TW I481737 B TWI481737 B TW I481737B TW 103128632 A TW103128632 A TW 103128632A TW 103128632 A TW103128632 A TW 103128632A TW I481737 B TWI481737 B TW I481737B
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Description
本發明是有關於一種承載治具，且特別是有關於一種適於供物件插置且使物件以特定角度立起的承載治具。The present invention relates to a load-bearing jig, and more particularly to a load-bearing jig suitable for inserting an article and erecting the article at a specific angle.
化學氣相沉積製程及高溫熱擴散製程已被廣泛地使用在半導體工業中，上述製程的操作溫度約在攝氏400度至1200度的範圍之間，在製程過程中，部分的化合物會在設備的零件(例如是均熱片)上沉積成膜，當零件上的膜層達到一定厚度時必須將這些零件拆下進行保養。保養的方式是將這些零件直接擺入清洗槽，以酸洗的方式去除附著於這些零件上的膜層。Chemical vapor deposition processes and high temperature thermal diffusion processes have been widely used in the semiconductor industry. The operating temperatures of the above processes range from about 400 degrees Celsius to 1200 degrees Celsius. During the process, some of the compounds will be in the process. The parts (such as the soaked sheet) are deposited on the film. When the film on the part reaches a certain thickness, the parts must be removed for maintenance. The maintenance method is to place these parts directly into the cleaning tank and remove the film layer attached to these parts by pickling.
然而，由於目前的清洗槽無法通用適應各種形狀的零件，而發生零件的局部區域無法洗淨乾淨。目前的處理方式是以二次清洗來克服，但此方式相當浪費清洗槽的產能並且增加了洗液的損耗量。However, since the current cleaning tank cannot be universally adapted to various shapes of parts, local parts of the parts cannot be cleaned. The current treatment method is overcome by secondary cleaning, but this method wastes the capacity of the cleaning tank and increases the amount of washing liquid loss.
本發明提供一種承載治具，其可使物件(例如是均熱片) 以特定角度放置於清洗槽中，以提升物件在清洗槽中能被清洗乾淨的機率，並可提高清洗槽內的空間利用率。The invention provides a bearing fixture which can make an object (for example, a heat spread sheet) It is placed in the cleaning tank at a specific angle to improve the probability that the object can be cleaned in the cleaning tank, and the space utilization in the cleaning tank can be improved.
本發明的一種承載治具，適於供多個物件插置，這些物件包括多個板體。承載治具包括兩端板及多個連接件。兩端板彼此間隔一距離。各連接件的兩端分別連接於兩端板。當這些物件插置於承載治具時，連接件支撐這些板體的側緣，以使該些板體能夠以特定角度立起於該承載治具。A load-bearing jig of the present invention is suitable for inserting a plurality of articles, and the articles comprise a plurality of plates. The bearing fixture includes two end plates and a plurality of connecting members. The two end plates are spaced apart from each other by a distance. Both ends of each connecting member are respectively connected to the two end plates. When the articles are inserted into the carrying fixture, the connectors support the side edges of the panels such that the panels can stand up at a particular angle to the carrier fixture.
在本發明的一實施例中，上述的這些連接件分別為多個可伸縮的連接件，以調整兩端板之間的距離。In an embodiment of the invention, the connecting members are respectively a plurality of telescopic connecting members for adjusting the distance between the two end plates.
在本發明的一實施例中，上述的承載治具更包括一移動件，可移動地配置於其中一個端板的內側，其中一個物件包括一個板體及凸出於板體的多個中空管體，當此物件插置於承載治具時，這些管體的至少一者適於固定至移動件，以透過移動件相對於對應的端板移動而調整這些中空管體的傾斜角度。In an embodiment of the invention, the carrying fixture further includes a moving member movably disposed on an inner side of one of the end plates, wherein one of the objects includes a plate body and a plurality of hollows protruding from the plate body The tubular body, when the object is inserted into the carrying fixture, at least one of the tubular bodies is adapted to be fixed to the moving member to adjust the inclination angle of the hollow tubular body by moving the movable member relative to the corresponding end plate.
在本發明的一實施例中，上述的各端板包括一握持部。In an embodiment of the invention, each of the end plates includes a grip.
在本發明的一實施例中，上述的承載治具更包括多個定位部，可調整地設置於這些連接件上，以固定這些板體之間的相對位置。In an embodiment of the invention, the carrying fixture further includes a plurality of positioning portions that are adjustably disposed on the connecting members to fix the relative positions between the boards.
在本發明的一實施例中，上述的這些板體呈圓形，這些板體的直徑約在12吋至15吋之間，且這些連接件的長度約在60公分至80公分之間。需說明的是，板體直徑與連接件兩者的尺寸，亦可依使用者的需要而作適度變動，以符合不同的需求，並不限 於上述尺寸數值。In an embodiment of the invention, the plates are circular in shape, the plates having a diameter of between about 12 吋 and 15 。, and the length of the connectors being between about 60 cm and about 80 cm. It should be noted that the diameter of the plate body and the size of the connecting member can also be appropriately changed according to the needs of the user to meet different needs, and are not limited. The above size values.
在本發明的一實施例中，上述的承載治具更包括一固定件，位於兩端板之間且這些連接件穿設於固定件，以固定這些連接件之間的相對位置。In an embodiment of the invention, the carrying fixture further includes a fixing member located between the two end plates and the connecting members are disposed through the fixing member to fix the relative positions between the connecting members.
在本發明的一實施例中，當這些板體插置於該承載治具時，這些板體實質上平行於兩端板。In an embodiment of the invention, when the plates are inserted into the carrier fixture, the plates are substantially parallel to the end plates.
在本發明的一實施例中，上述的這些物件分別為使用於化學氣相沉積製程或是高溫熱擴散製程的多個均熱片，且這些物件的材料包括石英或是碳化矽。In an embodiment of the invention, the objects are respectively a plurality of heat spreaders used in a chemical vapor deposition process or a high temperature heat diffusion process, and the materials of the articles include quartz or tantalum carbide.
在本發明的一實施例中，上述的承載治具與這些物件適於一起被放置於一清洗槽內，且清洗槽的洗液適於沿著垂直於這些板體的法線的方向流入這些物件之間的間隙。In an embodiment of the invention, the carrying fixture and the articles are adapted to be placed together in a cleaning tank, and the washing liquid of the washing tank is adapted to flow into the direction perpendicular to the normal of the plates. The gap between objects.
基於上述，本發明的承載治具透過連接於兩端板的這些連接件來支撐物件，以使物件能夠以特定角度(例如是直立)插置在承載治具上，當要清洗物件時，只要把物件連同承載治具一起放入清洗槽，便可使物件在清洗槽內維持特定角度，清洗槽的洗液便能夠沿著垂直於板體的法線的方向流入這些物件之間的間隙，而提高物件被清洗的乾淨程度。並且，由於物件是以直立的方式插置於本發明的承載治具上，而降低在清洗槽內的所佔空間，進而提升清洗槽內的空間利用率。Based on the above, the carrying fixture of the present invention supports the object through the connecting members connected to the two end plates, so that the object can be inserted on the carrying fixture at a specific angle (for example, upright), when the object is to be cleaned, as long as Putting the object together with the carrying fixture into the cleaning tank can maintain the object in a certain angle in the cleaning tank, and the washing liquid of the cleaning tank can flow into the gap between the objects in a direction perpendicular to the normal line of the plate body. Improve the cleanliness of the object being cleaned. Moreover, since the object is inserted into the bearing fixture of the present invention in an upright manner, the space occupied in the cleaning tank is reduced, thereby improving the space utilization rate in the cleaning tank.
為讓本發明的上述特徵和優點能更明顯易懂，下文特舉實施例，並配合所附圖式作詳細說明如下。The above described features and advantages of the invention will be apparent from the following description.
10‧‧‧物件10‧‧‧ objects
12‧‧‧板體12‧‧‧ board
14‧‧‧中空管體14‧‧‧ hollow body
20‧‧‧清洗槽20‧‧‧cleaning tank
100‧‧‧承載治具100‧‧‧bearing fixture
110‧‧‧端板110‧‧‧End board
112‧‧‧握持部112‧‧‧ grips
120‧‧‧連接件120‧‧‧Connecting parts
130‧‧‧定位部130‧‧‧ Positioning Department
140‧‧‧固定件140‧‧‧Fixed parts
150‧‧‧移動件150‧‧‧Mobile parts
圖1是依照本發明的一實施例的一種承載治具的示意圖。1 is a schematic view of a carrying fixture in accordance with an embodiment of the present invention.
圖2是圖1的另一視角的示意圖。2 is a schematic view of another perspective of FIG. 1.
圖3是物件***圖1的承載治具的示意圖。Figure 3 is a schematic illustration of the insertion of the article into the carrier fixture of Figure 1.
圖4是圖3的另一視角的示意圖。4 is a schematic view of another perspective of FIG. 3.
圖5是物件***圖1的承載治具後一起被放入清洗槽的示意圖。Fig. 5 is a schematic view showing the article being inserted into the cleaning tank together with the bearing fixture of Fig. 1.
圖1是依照本發明的一實施例的一種承載治具的示意圖。圖2是圖1的另一視角的示意圖。圖3是物件***圖1的承載治具的示意圖。圖4是圖3的另一視角的示意圖。圖5是物件***圖1的承載治具後一起被放入清洗槽的示意圖。1 is a schematic view of a carrying fixture in accordance with an embodiment of the present invention. 2 is a schematic view of another perspective of FIG. 1. Figure 3 is a schematic illustration of the insertion of the article into the carrier fixture of Figure 1. 4 is a schematic view of another perspective of FIG. 3. Fig. 5 is a schematic view showing the article being inserted into the cleaning tank together with the bearing fixture of Fig. 1.
請參閱圖1至圖5，本實施例的承載治具100適於供多個物件10插置，以使這些物件10能夠以特定角度立起於承載治具100，之後，當這些物件10隨著承載治具100一起被放置於一清洗槽20內時，物件10可以在清洗槽20內維持一定的角度，以使清洗槽20內的洗液能夠更全面地清洗到物件10。Referring to FIG. 1 to FIG. 5, the bearing jig 100 of the present embodiment is adapted to be inserted into a plurality of articles 10 so that the articles 10 can stand up at a specific angle on the carrying jig 100, and then, when the articles 10 follow When the carrying jig 100 is placed together in a washing tank 20, the article 10 can be maintained at an angle within the washing tank 20 so that the washing liquid in the washing tank 20 can be more thoroughly cleaned to the article 10.
在本實施例中，這些物件10例如是使用於化學氣相沉積製程或是高溫熱擴散製程的多個均熱片。物件10的材料包括石英 或是碳化矽。如圖3至圖5所示，這些物件10包括多個板體12，板體12呈圓形，板體12的直徑約在12吋至15吋之間，其中一個物件10包括一個板體12及凸出於板體12的多個中空管體14。當然，物件10的種類、材料、尺寸、形狀與板體直徑，亦可依使用者的需要而作適度變動，以符合不同的需求，並不以上述為限制。In the present embodiment, the articles 10 are, for example, a plurality of heat spreaders for use in a chemical vapor deposition process or a high temperature thermal diffusion process. The material of the object 10 includes quartz Or carbonized bismuth. As shown in FIGS. 3 to 5, the articles 10 include a plurality of plates 12 having a circular shape. The plate body 12 has a diameter of between about 12 吋 and 15 。, and one of the articles 10 includes a plate body 12. And a plurality of hollow tubes 14 protruding from the plate body 12. Of course, the type, material, size, shape and plate diameter of the object 10 can also be appropriately changed according to the needs of the user to meet different needs, and is not limited to the above.
此外，在本實施例中，清洗槽20為一酸洗槽，洗液包括硝酸、硫酸或氫氟酸等，透過酸洗的方式清除經化學氣相沉積製程或是高溫熱擴散製程之後沉積於物件10上的膜層。需說明的是，為了清楚看到承載治具100與物件10在清洗槽20內的配置，圖5特意隱藏清洗槽20的上半部，僅示意性地繪示清洗槽20的局部區域。In addition, in the embodiment, the cleaning tank 20 is a pickling tank, and the washing liquid includes nitric acid, sulfuric acid or hydrofluoric acid, etc., and is removed by acid washing to remove the chemical vapor deposition process or the high temperature thermal diffusion process. The film layer on the object 10. It should be noted that, in order to clearly see the arrangement of the bearing fixture 100 and the object 10 in the cleaning tank 20, FIG. 5 specifically hides the upper half of the cleaning tank 20, and only schematically shows a partial area of the cleaning tank 20.
為了使承載治具100也能夠承受酸洗的過程，在本實施例中，承載治具100的材料包括鐵氟龍，其具有耐酸鹼環境的特質。當然，承載治具100的材料種類並不以此為限制，只要能夠承受清洗槽20內的環境的材料均可。In order to enable the carrying jig 100 to withstand the pickling process, in the present embodiment, the material of the jig 100 includes Teflon, which has the characteristics of an acid and alkali resistant environment. Of course, the type of material that carries the jig 100 is not limited thereto, as long as it can withstand the environment in the cleaning tank 20.
請回到圖1，承載治具100包括兩端板110及多個連接件120。兩端板110彼此間隔一距離。各連接件120的兩端分別連接於兩端板110。在本實施例中，端板110的形狀接近一倒置的梯形，連接件120的數量為四個，四個連接件120分別連接至端板110的邊緣靠近頂點的位置。當然，在其他的實施例中，端板110的形狀也可以是半圓形或其他形狀，連接件120的數量以及連接位 置也不以此為限制。Referring back to FIG. 1 , the bearing fixture 100 includes two end plates 110 and a plurality of connecting members 120 . The end plates 110 are spaced apart from each other by a distance. Both ends of each connecting member 120 are respectively connected to the two end plates 110. In the present embodiment, the shape of the end plate 110 is close to an inverted trapezoid, and the number of the connecting members 120 is four, and the four connecting members 120 are respectively connected to the positions of the edges of the end plates 110 near the apex. Of course, in other embodiments, the shape of the end plate 110 may also be a semicircular or other shape, the number of the connectors 120 and the connection position. This is not a limitation.
此外，承載治具100更包括多個定位部130，設置於這些連接件120上。製作承載治具100時，設計者可先預量所需承載的物件10的尺寸與所需間距，而使定位部130可與連接件120以一體成型的方式製作。或者，定位部130也可以是可活動地設置在連接件120上，根據實際上物件10之間的距離來調整定位部130之間的位置。In addition, the carrying fixture 100 further includes a plurality of positioning portions 130 disposed on the connecting members 120. When the bearing fixture 100 is manufactured, the designer can pre-measure the size of the article 10 to be carried and the required spacing, so that the positioning portion 130 can be integrally formed with the connector 120. Alternatively, the positioning portion 130 may be movably disposed on the connecting member 120 to adjust the position between the positioning portions 130 according to the distance between the objects 10.
如圖3至圖5所示，在本實施例中，物件10分為三組，在其中兩組的這些物件10為四個相疊的板體12，板體12之間分別間隔有一距離，各組的這四個物件10一起***置在兩相鄰的定位部130之間。另一組的物件10為有三個板體12以及四支凸出於其中一板體12的中空管體14，此組的這些物件10同樣地也是透過板體12***置在兩相鄰的定位部130之間，以固定彼此之間的位置。As shown in FIG. 3 to FIG. 5, in the embodiment, the objects 10 are divided into three groups, and the objects 10 of the two groups are four stacked boards 12, and the boards 12 are separated by a distance. The four objects 10 of each group are interposed between two adjacent positioning portions 130. The other set of articles 10 has three plates 12 and four hollow tubes 14 projecting from one of the plates 12, and the objects 10 of the group are also inserted through the plate 12 in two adjacent Between the positioning portions 130 to fix the position between each other.
當這些物件10插置於承載治具100時，連接件120支撐這些板體12的側緣，以使板體12能夠以特定角度(例如是90度)立起於承載治具100，而使得當這些板體12插置於承載治具100時，這些板體12能夠以實質上平行於兩端板110的角度立起。When the articles 10 are inserted into the bearing jig 100, the connecting members 120 support the side edges of the plates 12 so that the plate 12 can stand up at a specific angle (for example, 90 degrees) on the carrying jig 100, so that When the plates 12 are inserted into the carrier jig 100, the plates 12 can stand at an angle substantially parallel to the end plates 110.
在習知的清洗方式中，物件10是直接擺放在清洗槽20內。更詳細地說，最下方的數個物件10是以整個板體12接觸清洗槽20的下表面上，此空間配置使得一個清洗槽20中僅能放置幾片物件10，其他物件10則是再疊在與清洗槽20的下表面接觸 的板體12上，這些彼此交疊的板體12與清洗槽20的下表面平行，洗液從清洗槽20的下表面向上噴出時，部分洗液可能會被位在最下方的板體12遮住，未必能夠噴洗到位於上方的板體12。In the conventional cleaning method, the article 10 is placed directly in the cleaning tank 20. In more detail, the lowermost plurality of objects 10 are on the lower surface of the entire plate body 12 contacting the cleaning tank 20. This space configuration allows only a few pieces of the object 10 to be placed in one cleaning tank 20, and the other objects 10 are Stacked in contact with the lower surface of the cleaning tank 20 On the plate body 12, the mutually overlapping plate bodies 12 are parallel to the lower surface of the washing tank 20, and when the washing liquid is ejected upward from the lower surface of the washing tank 20, part of the washing liquid may be positioned at the lowermost plate body 12. Covered, it may not be possible to spray to the upper plate body 12.
相反地，在本實施例中，如圖5所示，由於物件10是以直立的方式(也就是接近於垂直於清洗槽20的下表面的角度)插置於承載治具100上，當物件10連同承載治具100一起放置在清洗槽20時，此配置不但能夠在清洗槽20的有限空間中，放置更多組物件10，而提升清洗槽20內的空間利用率。當物件10連同承載治具100一起放置在清洗槽20內以進行酸洗過程時，由於清洗槽20的洗液會從圖5的下表面向上流出，物件10的板體12以幾乎是90度的角度立起於清洗槽20的下方表面，而使得清洗槽20的洗液可以沿著垂直於這些板體12的法線的方向流入這些物件10之間的間隙，而能夠使洗液接觸到整個物件10，以增加物件10清洗的潔淨程度，進而提供較佳的噴洗效果。On the contrary, in the present embodiment, as shown in FIG. 5, since the object 10 is inserted into the bearing jig 100 in an upright manner (that is, close to an angle perpendicular to the lower surface of the washing tub 20), when the object is When placed in the washing tank 20 together with the carrying jig 100, this configuration can not only place more sets of objects 10 in the limited space of the washing tank 20, but also improve the space utilization rate in the washing tank 20. When the article 10 is placed in the washing tank 20 together with the carrying jig 100 for the pickling process, since the washing liquid of the washing tank 20 flows upward from the lower surface of FIG. 5, the plate body 12 of the article 10 is almost 90 degrees. The angle rises from the lower surface of the cleaning tank 20, so that the washing liquid of the washing tank 20 can flow into the gap between the articles 10 in a direction perpendicular to the normal line of the plate bodies 12, and the washing liquid can be contacted. The entire object 10 is used to increase the cleanliness of the cleaning of the article 10, thereby providing a better spray effect.
值得一提的是，在本實施例中，為了使承載治具100能夠應用於承載更多種類的物件10，這些連接件120分別為多個可伸縮的連接件，也就是說，兩端板110之間的距離可被調整。當物件10的數量較多，或是中空管體14的長度較長時，仍能夠被放置在承載治具100中。在本實施例中，這些連接件120的長度約在60公分至80公分之間，但連接件120的長度範圍並不以此為限制。It is worth mentioning that, in this embodiment, in order to enable the bearing fixture 100 to be applied to carry more types of articles 10, the connectors 120 are respectively a plurality of telescopic connectors, that is, two end plates The distance between 110 can be adjusted. When the number of the articles 10 is large or the length of the hollow tubular body 14 is long, it can still be placed in the bearing jig 100. In the present embodiment, the length of the connecting members 120 is between about 60 cm and 80 cm, but the length of the connecting member 120 is not limited thereto.
此外，請回到圖1，在本實施例中，各端板110包括一握 持部112，兩端板110上的兩握持部112用以供操作者的雙手握持，以舉起承載治具100及位於其上的這些物件10。相較於以往未有承載治具100時，操作者需要將這些物件10以徒手搬移至清洗槽20，現在只需要將這些物件10先排列在承載治具100上，再一起搬入清洗槽20即可，操作上較為方便。In addition, please return to FIG. 1. In this embodiment, each end plate 110 includes a grip. The holding portion 112, the two grip portions 112 on the two end plates 110 are used for the hands of the operator to lift the carrying jig 100 and the articles 10 located thereon. Compared with the conventional method of carrying the jig 100, the operator needs to move the articles 10 to the washing tank 20 by hand. Now, it is only necessary to arrange the articles 10 on the carrying jig 100 first, and then carry them into the washing tank 20 together. Yes, it is more convenient to operate.
另外，為了提供這些連接件120能夠具有更佳的支撐強度，在本實施例中，承載治具100更包括一固定件140，位於兩端板110之間且這些連接件120穿設於固定件140，以固定這些連接件120之間的相對位置。In addition, in order to provide the support member 120, the support member 100 further includes a fixing member 140 between the two end plates 110 and the connecting members 120 are disposed on the fixing member. 140 to fix the relative position between the connectors 120.
此外，由於其中一個物件10具有四支中空管體14，為了避免清洗之後洗液殘留在中空管體14內，在本實施例中，承載治具100更包括一移動件150，可上下移動地配置於其中一個端板110的內側。當具有中空管體14的物件10的板體12插置於承載治具100時，這些中空管體14的至少一者適於固定至移動件150(在本實施例中，較靠近下方的兩個中空管體14固定至移動件150)，以透過移動件150相對於對應的端板110上下移動而調整這些中空管體14的傾斜角度。如此一來，這些中空管體14便能夠具有些許的傾角，而使清洗過後的洗液能夠流出，以避免中空管體14發生殘酸的問題。In addition, since one of the articles 10 has four hollow tubular bodies 14, in order to prevent the washing liquid from remaining in the hollow tubular body 14 after the cleaning, in the present embodiment, the supporting jig 100 further includes a moving member 150, which can be used up and down. It is movably disposed on the inner side of one of the end plates 110. When the plate 12 of the article 10 having the hollow tubular body 14 is inserted into the carrier jig 100, at least one of the hollow tubular bodies 14 is adapted to be fixed to the moving member 150 (in the present embodiment, closer to the lower side) The two hollow tubes 14 are fixed to the moving member 150) to adjust the inclination angle of the hollow tubes 14 by moving the moving members 150 up and down relative to the corresponding end plates 110. In this way, the hollow tubular bodies 14 can have a slight inclination, so that the washed washing liquid can flow out to avoid the problem of residual acid in the hollow tubular body 14.
綜上所述，本發明的承載治具透過連接於兩端板的這些連接件來支撐物件，以使物件能夠以特定角度(例如是直立)插置在承載治具上，當要清洗物件時，只要把物件連同承載治具一 起放入清洗槽，便可使物件在清洗槽內維持特定角度，清洗槽的洗液便能夠沿著垂直於板體的法線的方向流入這些物件之間的間隙，而提高物件被清洗的乾淨程度。並且，由於物件是以直立的方式插置於本發明的承載治具上，而降低在清洗槽內的所佔空間，進而提升清洗槽內的空間利用率。此外，本發明的承載治具的連接件可調整長度，以因應不同種類物件的尺寸。另外，為了使具有中空管體的物件能夠被清洗乾淨且避免殘酸，可透過將至少一個管體固定於移動件，透過移動件相對於對應的端板上下移動而調整這些中空管體的傾斜角度。In summary, the carrying fixture of the present invention supports the object through the connecting members connected to the two end plates, so that the object can be inserted on the carrying fixture at a specific angle (for example, upright) when the object is to be cleaned. As long as the object is together with the bearing fixture Putting it into the cleaning tank, the object can be maintained at a certain angle in the cleaning tank, and the washing liquid of the cleaning tank can flow into the gap between the objects in a direction perpendicular to the normal of the plate body, thereby improving the cleaning of the object. Cleanliness. Moreover, since the object is inserted into the bearing fixture of the present invention in an upright manner, the space occupied in the cleaning tank is reduced, thereby improving the space utilization rate in the cleaning tank. In addition, the connector of the present invention can be adjusted in length to accommodate the size of different types of articles. In addition, in order to enable the object having the hollow tubular body to be cleaned and to avoid residual acid, the hollow tubular body can be adjusted by fixing at least one tubular body to the moving member and moving the movable member relative to the corresponding end plate. The angle of inclination.
雖然本發明已以實施例揭露如上，然其並非用以限定本發明，任何所屬技術領域中具有通常知識者，在不脫離本發明之精神和範圍內，當可作些許之更動與潤飾，故本發明之保護範圍當視後附之申請專利範圍所界定者為準。Although the present invention has been disclosed in the above embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims.
100‧‧‧承載治具100‧‧‧bearing fixture
110‧‧‧端板110‧‧‧End board
112‧‧‧握持部112‧‧‧ grips
120‧‧‧連接件120‧‧‧Connecting parts
130‧‧‧定位部130‧‧‧ Positioning Department
140‧‧‧固定件140‧‧‧Fixed parts
150‧‧‧移動件150‧‧‧Mobile parts
Claims (10)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW103128632A TWI481737B (en) | 2014-08-20 | 2014-08-20 | Bearing fixture |
| CN201410447156.4A CN105463491B (en) | 2014-08-20 | 2014-09-04 | Bearing jig |
| JP2014230930A JP5986170B2 (en) | 2014-08-20 | 2014-11-13 | Storage jig and cleaning tank including the storage jig |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW103128632A TWI481737B (en) | 2014-08-20 | 2014-08-20 | Bearing fixture |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TWI481737B true TWI481737B (en) | 2015-04-21 |
| TW201608046A TW201608046A (en) | 2016-03-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW103128632A TWI481737B (en) | 2014-08-20 | 2014-08-20 | Bearing fixture |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP5986170B2 (en) |
| CN (1) | CN105463491B (en) |
| TW (1) | TWI481737B (en) |
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| CN109737142B (en) * | 2018-12-20 | 2020-06-23 | 兰州空间技术物理研究所 | Solid lubrication bearing inner ring protection device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0143479A1 (en) * | 1983-10-19 | 1985-06-05 | Johannes Hendrikus Leonardus Hanssen | Plasma-stimulated chemical vapour deposition device and, in particular, a substrate supporting and electrode disposition and associated components |
| US5895549A (en) * | 1994-07-11 | 1999-04-20 | Applied Komatsu Technology, Inc. | Method and apparatus for etching film layers on large substrates |
| US8251012B2 (en) * | 2005-03-01 | 2012-08-28 | Hitachi Kokusai Electric Inc. | Substrate processing apparatus and semiconductor device producing method |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2740594B2 (en) * | 1992-06-26 | 1998-04-15 | 新日本製鐵株式会社 | Wafer holder for cleaning and etching |
| JP2004158726A (en) * | 2002-11-07 | 2004-06-03 | Kobe Steel Ltd | Semiconductor element with heat spreader and semiconductor package |
| JP2006261347A (en) * | 2005-03-16 | 2006-09-28 | Shimada Phys & Chem Ind Co Ltd | Substrate holding structure, substrate treatment method, and substrate conveying method |
| JP2011258733A (en) * | 2010-06-09 | 2011-12-22 | Casio Comput Co Ltd | Semiconductor device and manufacturing method of semiconductor device |
| CN202398591U (en) * | 2011-12-30 | 2012-08-29 | 中芯国际集成电路制造(上海)有限公司 | Wafer cleaning device |
-
2014
- 2014-08-20 TW TW103128632A patent/TWI481737B/en active
- 2014-09-04 CN CN201410447156.4A patent/CN105463491B/en active Active
- 2014-11-13 JP JP2014230930A patent/JP5986170B2/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0143479A1 (en) * | 1983-10-19 | 1985-06-05 | Johannes Hendrikus Leonardus Hanssen | Plasma-stimulated chemical vapour deposition device and, in particular, a substrate supporting and electrode disposition and associated components |
| US5895549A (en) * | 1994-07-11 | 1999-04-20 | Applied Komatsu Technology, Inc. | Method and apparatus for etching film layers on large substrates |
| US8251012B2 (en) * | 2005-03-01 | 2012-08-28 | Hitachi Kokusai Electric Inc. | Substrate processing apparatus and semiconductor device producing method |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2016046504A (en) | 2016-04-04 |
| CN105463491B (en) | 2017-12-22 |
| TW201608046A (en) | 2016-03-01 |
| CN105463491A (en) | 2016-04-06 |
| JP5986170B2 (en) | 2016-09-06 |
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