TWI465386B - Device and method for fabricating micro article - Google Patents

Device and method for fabricating micro article Download PDF

Info

Publication number
TWI465386B
TWI465386B TW099107237A TW99107237A TWI465386B TW I465386 B TWI465386 B TW I465386B TW 099107237 A TW099107237 A TW 099107237A TW 99107237 A TW99107237 A TW 99107237A TW I465386 B TWI465386 B TW I465386B
Authority
TW
Taiwan
Prior art keywords
electrode
electrode plate
driving fluid
micro
fluid
Prior art date
Application number
TW099107237A
Other languages
Chinese (zh)
Other versions
TW201130730A (en
Inventor
Shih Kang Fan
Ting Hsu Lin
Jing Wei Lin
Chih Ming Wu
Original Assignee
Univ Nat Chiao Tung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Nat Chiao Tung filed Critical Univ Nat Chiao Tung
Priority to TW099107237A priority Critical patent/TWI465386B/en
Priority to US12/897,128 priority patent/US20110220510A1/en
Publication of TW201130730A publication Critical patent/TW201130730A/en
Application granted granted Critical
Publication of TWI465386B publication Critical patent/TWI465386B/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00—Electroforming
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00—Electroforming
    • C25D1/10—Moulds; Masks; Masterforms
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/48—After-treatment of electroplated surfaces
    • C25D5/50—After-treatment of electroplated surfaces by heat-treatment

Description

微物品的製造裝置及製造方法Micro article manufacturing device and manufacturing method

本發明為一種製造裝置及製造方法，尤指一種微物品的製造裝置及製造方法。The present invention relates to a manufacturing apparatus and a manufacturing method, and more particularly to a manufacturing apparatus and a manufacturing method of a micro-article.

習知高分子製品的製程可有：鑄造(casting)、射出成型(injection molding)及熱壓印(hot embossing)等方式，而上述的方式都需具有一個實體的模具，該模具內有跟製品外型對應的凹凸結構。高分子材料依據模具的凹凸結構變形，然後待高分子材料固化後即可形成所需的製品。其中如果要製造尺度為微米或奈米的微物品(micro article)時，熱壓印製程為較佳的選擇。Conventional polymer products may be processed by casting, injection molding, and hot embossing, and all of the above methods require a solid mold having a counter product. The concave and convex structure corresponding to the appearance. The polymer material is deformed according to the concave and convex structure of the mold, and then the desired product is formed after the polymer material is cured. Among them, if a micro article having a size of micrometers or nanometers is to be manufactured, a hot stamping process is a preferred choice.

熱壓印在製造微物品時具有些優點，但相對地，也具有些缺失，例如：熱壓印時，模具需被施加壓力來擠壓高分子材料，模具內的空氣可能會被擠壓至高分子材料中。高分子材料固化後，內部可能會有空洞等缺陷。此外，模具的尺寸公差要求高，需要高精密的製造技術，因此模具的製造成本高，製造時間也長。Hot stamping has some advantages in the manufacture of micro-articles, but relatively, there are also some defects. For example, in hot stamping, the mold needs to be pressed to squeeze the polymer material, and the air in the mold may be squeezed to high. In molecular materials. After the polymer material is cured, there may be defects such as voids inside. In addition, the dimensional tolerance of the mold is high, and high-precision manufacturing technology is required, so that the manufacturing cost of the mold is high and the manufacturing time is long.

而在壓印過程中，模具會接觸或碰撞材料，此舉常造成模具受損。如果模具本身的耐磨性較弱，則需要製造大量的模具來替換損壞的模具，壓印的成本將大幅地提升。在壓印後，模具的表面可能會殘留有過多的高分子材料，此舉將造成接下來的製品的尺寸不穩定，而清理殘存的高分子材料也會花費額外時間及成本。In the embossing process, the mold will contact or collide with the material, which often causes the mold to be damaged. If the wear resistance of the mold itself is weak, it is necessary to manufacture a large number of molds to replace the damaged mold, and the cost of the stamping will be greatly increased. After imprinting, there may be excessive polymer material remaining on the surface of the mold, which will cause the size of the next product to be unstable, and it will take extra time and cost to clean the remaining polymer material.

緣是，本發明人有感上述缺失可以改善，因此提出一種設計合理且有效改善上述缺失之本發明。On the contrary, the present inventors felt that the above-mentioned deletion could be improved, and therefore proposed a present invention which is rational in design and effective in improving the above-mentioned deficiency.

本發明之主要目的在於提供一種微物品的製造裝置及製造方法，其可降低微物品的製造成本。SUMMARY OF THE INVENTION A primary object of the present invention is to provide a manufacturing apparatus and a manufacturing method for a micro-article which can reduce the manufacturing cost of the micro-article.

為達上述目的，本發明提供一種微物品的製造裝置，包括：一第一電極板，其包含一第一基板及一第一電極層，該第一電極層設置於該第一基板的一側面，該第一電極層包含一成型電極，該成型電極的形狀對應於一微物品的一截面；一第二電極板，其包含一第二基板及一第二電極層，該第二電極層設置於該第二基板的一側面並且與該第一電極層相對；以及一分隔件，其設置於該第一電極板與該第二電極板之間，該分隔件的高度對應於該微物品的一厚度。In order to achieve the above object, the present invention provides a micro-object manufacturing apparatus, comprising: a first electrode plate comprising a first substrate and a first electrode layer, wherein the first electrode layer is disposed on a side of the first substrate The first electrode layer comprises a shaped electrode, the shape of the shaped electrode corresponds to a section of a micro-object, and a second electrode plate comprises a second substrate and a second electrode layer, the second electrode layer is disposed a side of the second substrate opposite to the first electrode layer; and a spacer disposed between the first electrode plate and the second electrode plate, the height of the spacer corresponding to the micro-object a thickness.

為達上述目的，本發明另提出一種微物品的製造方法，包括步驟如下：設置一驅動流體及一周圍流體於一第一電極板及一第二電極板之間，該周圍流體環繞該驅動流體並且與該驅動流體不互溶；施加電壓至該第一電極板及該第二電極板，使得該驅動流體流動至該第一電極板的一成型電極上，並且該驅動流體依據該成型電極的形狀而變形，其中該成型電極的形狀對應於一微物品的一截面；固化變形後的該驅動流體；以及取出固化後的該驅動流體。In order to achieve the above object, the present invention further provides a method for manufacturing a micro-object, comprising the steps of: disposing a driving fluid and a surrounding fluid between a first electrode plate and a second electrode plate, the surrounding fluid surrounding the driving fluid And being immiscible with the driving fluid; applying a voltage to the first electrode plate and the second electrode plate, so that the driving fluid flows onto a forming electrode of the first electrode plate, and the driving fluid is shaped according to the forming electrode And deformation, wherein the shape of the shaped electrode corresponds to a section of a micro-object; the driving fluid after curing deformation; and the driving fluid after curing is taken out.

為達上述目的，本發明又提出一種微物品的製造方法，包括步驟如下：設置一驅動流體及一周圍流體於一第一電極板及一第二電極板之間，該周圍流體環繞該驅動流體並且與該驅動流體不互溶；施加電壓至該第一電極板及該第二電極板，使得該驅動流體流動至該第一電極板的一成型電極上，並且該驅動流體依據該成型電極的形狀而變形，其中該成型電極的形狀對應於一微物品的一截面；固化該周圍流體；以及取出固化後的該周圍流體。In order to achieve the above object, the present invention further provides a method for manufacturing a micro-object, comprising the steps of: disposing a driving fluid and a surrounding fluid between a first electrode plate and a second electrode plate, the surrounding fluid surrounding the driving fluid And being immiscible with the driving fluid; applying a voltage to the first electrode plate and the second electrode plate, so that the driving fluid flows onto a forming electrode of the first electrode plate, and the driving fluid is shaped according to the forming electrode And deformation, wherein the shape of the shaped electrode corresponds to a section of a micro- article; curing the surrounding fluid; and removing the surrounding fluid after curing.

本發明具有以下有益效果：本發明可不需使用結構複雜且難以製造的模具，也可不需使用會撞擊成型材料的移動件，且可較快速及較低耗能的方式來製造微物品。The present invention has the following advantageous effects: the present invention eliminates the need for a mold having a complicated structure and is difficult to manufacture, and does not require the use of a moving member that strikes the molding material, and can manufacture the micro-article in a faster and less energy-intensive manner.

為使能更進一步了解本發明之特徵及技術內容，請參閱以下有關本發明之詳細說明及圖式，然而所附圖式僅供參考與說明用，並非用來對本發明加以限制者。The detailed description and drawings of the present invention are to be understood as the

請參閱第一圖至第三圖所示，為本發明的微物品的製造裝置1的一較佳實施例。該微物品的製造裝置1可用來製造原料為高分子等材料的微物品，而微物品的尺度最小可達到微米或奈米。Referring to the first to third figures, a preferred embodiment of the apparatus 1 for manufacturing a micro-article of the present invention. The micro-article manufacturing apparatus 1 can be used to manufacture micro-materials in which the raw material is a polymer or the like, and the micro-objects have a size of at least micrometers or nanometers.

該微物品的製造裝置1基本上可視為一微流體系統(或稱微流體晶片)，其內可容置一驅動流體(Pumped fluid) 2及環繞該驅動流體2的周圍流體3。驅動流體2可為一可固化的液體，例如丙烯酸羟丁酯(4-HYDROXYBUTYL ACRYLATE,4-HBA)或聚乙二醇二丙烯酸酯(Polyethylene glycol diacrylate,PEGDA)等壓克力型高分子液體，周圍流體3可為空氣、矽油(Silicone oil)或十六烷(Hexadecane)等與驅動流體2不互溶(Immiscible)且介電常數小於驅動流體2的流體。The micro-article manufacturing apparatus 1 can be basically regarded as a microfluidic system (or microfluidic wafer) in which a pumped fluid 2 and a surrounding fluid 3 surrounding the driving fluid 2 can be accommodated. The driving fluid 2 can be a curable liquid, such as acrylic acid hydroxybutyl ester (4-HYDROXYBUTYL ACRYLATE, 4-HBA) or polyethylene glycol diacrylate (PEGDA) and other acrylic polymer liquids. The surrounding fluid 3 may be a fluid such as air, silicone oil or Hexadecane that is immiscible with the driving fluid 2 and has a dielectric constant smaller than that of the driving fluid 2 .

該微物品的製造裝置1可被施加電場，然後驅動流體2會因為介電泳(Dielectrophoresis,DEP)或是介電濕潤(Electrowetting-on-dielectric,EWOD)等物理現象而移動、變形或是停止不動。微物品的製造裝置1的詳細使用方法將於之後段落說明之，以下先說明微物品的製造裝置1的結構特點。The manufacturing apparatus 1 of the micro-object can be applied with an electric field, and then the driving fluid 2 can be moved, deformed, or stopped due to physical phenomena such as Dielectrophoresis (DEP) or Electrowetting-on-dielectric (EWOD). . The detailed use method of the micro-article manufacturing apparatus 1 will be described later, and the structural features of the micro-article manufacturing apparatus 1 will be described below.

微物品的製造裝置1可包括元件如下：一第一電極板11、一第二電極板12及一分隔件13。The manufacturing apparatus 1 for micro-objects may include the following components: a first electrode plate 11, a second electrode plate 12, and a separator 13.

該第一電極板11包含一第一基板111、一第一電極層112、一介電層113及一第一疏水層114。其中，第一基板111可為一矩形板體，其材料可為玻璃、矽基板、聚二甲基矽氧烷(Poly-dimethylsiloxane,PDMS)、聚對苯二甲酸乙二酯(Polyethylene terephthalate,PET)、聚乙烯萘酚樹脂(Polyethylene naphthalate,PEN)、可撓式高分子材料或絕緣性好的材料等。其中一種較佳的材料選擇為玻璃，因為其可透光，可方便紫外線光產生設備15(如第六圖所示)的紫外線光穿透。另外，當第一基板111為可撓式材料時，其可捲曲成弧狀或圓柱狀(圖未示)。The first electrode plate 11 includes a first substrate 111 , a first electrode layer 112 , a dielectric layer 113 , and a first hydrophobic layer 114 . The first substrate 111 can be a rectangular plate body, and the material thereof can be glass, germanium substrate, poly-dimethylsiloxane (PDMS), polyethylene terephthalate (PET). ), Polyethylene naphthalate (PEN), flexible polymer materials or materials with good insulation properties. One of the preferred materials is glass because it is light transmissive and facilitates the penetration of ultraviolet light from the ultraviolet light generating device 15 (shown in Figure 6). In addition, when the first substrate 111 is a flexible material, it may be curled into an arc shape or a cylindrical shape (not shown).

第一電極層112設置於第一基板111的一側面(例如頂面)，其材料可為導電金屬材料、導電高分子材料或導電氧化物材料等，例如銅、鉻等金屬(Cr,Cu metal)或氧化銦錫(Indium tin oxide,ITO)等。第一電極層112可包含多個間隔排列的電極1121至1123，該些電極1121至1123依其功能可分成：一儲液電極1121、一成型電極1122及一流道電極1123，其中流道電極1123的兩端分別鄰接儲液電極1121及成型電極1122。The first electrode layer 112 is disposed on a side surface (for example, a top surface) of the first substrate 111, and the material thereof may be a conductive metal material, a conductive polymer material or a conductive oxide material, such as a metal such as copper or chromium (Cr, Cu metal). Or indium tin oxide (ITO) or the like. The first electrode layer 112 may include a plurality of spaced-apart electrodes 1121 to 1123. The electrodes 1121 to 1123 may be divided into a liquid storage electrode 1121, a shaped electrode 1122, and a first-class track electrode 1123. The flow channel electrode 1123 The two ends are adjacent to the reservoir electrode 1121 and the shaped electrode 1122, respectively.

儲液電極1121用以容置一驅動流體2，成型電極1122用以讓驅動流體2變形成特定形狀，而流道電極1123用以聯絡儲液電極1121及成型電極1122，讓儲液電極1121上的驅動流體2可以沿著流道電極1123流到成型電極1122上。成型電極1122的形狀對應於一微物品的一截面，例如本實施例的微物品為齒輪，因此成型電極1122的圖案可為齒輪的截面。值得一提的是，流道電極1123除了可為一長條狀電極，也可為多個小矩形電極所組成。The liquid storage electrode 1121 is for accommodating a driving fluid 2, the shaping electrode 1122 is used for changing the driving fluid 2 to form a specific shape, and the flow channel electrode 1123 is used for contacting the liquid storage electrode 1121 and the shaping electrode 1122 to allow the liquid storage electrode 1121 The driving fluid 2 can flow along the flow path electrode 1123 onto the shaped electrode 1122. The shape of the shaped electrode 1122 corresponds to a section of a micro article, for example, the micro article of the present embodiment is a gear, and thus the pattern of the shaped electrode 1122 can be a cross section of the gear. It is worth mentioning that the flow channel electrode 1123 can be a long strip electrode or a plurality of small rectangular electrodes.

該些電極1121至1123的製造方式為：先使用電子束蒸發、物理氣相沉積或者真空濺鍍等方法沉積一層材料至第一基板111上，然後利用光微影、蝕刻等方式將多餘材料去除後，即可形成該些電極1121至1123。該些電極1121至1123亦可使用其他製程來製作之，例如掀舉(Lift-off)等。The electrodes 1121 to 1123 are manufactured by first depositing a layer of material onto the first substrate 111 by means of electron beam evaporation, physical vapor deposition or vacuum sputtering, and then removing excess material by means of photolithography, etching, or the like. Thereafter, the electrodes 1121 to 1123 can be formed. The electrodes 1121 to 1123 can also be fabricated using other processes, such as Lift-off and the like.

介電層113設置於第一電極層112上，其材料可為：聚對二甲苯(Parylene)、正光阻材料、負光阻材料等介電材料，其可藉由沈積製程來沈積在第一電極層112上。The dielectric layer 113 is disposed on the first electrode layer 112, and the material thereof may be: a dielectric material such as parylene, a positive photoresist material, or a negative photoresist material, which may be deposited in the first by a deposition process. On the electrode layer 112.

而第一疏水層114設置於介電層113的頂面上，其材料可為鐵氟龍(Teflon)等具有疏水性的材料，其也可藉由沈積製程來沈積至介電層113上。第一疏水層114的目的為：讓驅動流體2易於驅動，其又可稱為低摩擦層(Low friction layer)，因為其與流體(液體)之間的摩擦係數較低。The first hydrophobic layer 114 is disposed on the top surface of the dielectric layer 113, and the material thereof may be a hydrophobic material such as Teflon, which may also be deposited on the dielectric layer 113 by a deposition process. The purpose of the first hydrophobic layer 114 is to make the drive fluid 2 easy to drive, which in turn may be referred to as a low friction layer because of its low coefficient of friction with the fluid (liquid).

值得一提的是，介電層113及第一疏水層114對於第一電極板11而言，是可選擇的存在。也就是指，只要驅動流體2的介電特性已符合需求，或是驅動流體2本身已具有疏水特性，介電層113及第一疏水層114可不需設置在第一電極層112中。It is worth mentioning that the dielectric layer 113 and the first hydrophobic layer 114 are optional for the first electrode plate 11. That is, as long as the dielectric properties of the driving fluid 2 have been met, or the driving fluid 2 itself has a hydrophobic property, the dielectric layer 113 and the first hydrophobic layer 114 may not need to be disposed in the first electrode layer 112.

以上為第一電極板11的說明，接著說明第二電極板12。第二電極板12位於第一電極板11的上方，其與第一電極板11平行間隔地排列，其包含一第二基板(Second substrate) 121、一第二電極層(Second electrode layer) 122及一第二疏水層(Second hydrophobic layer) 123。The above is the description of the first electrode plate 11, and the second electrode plate 12 will be described next. The second electrode plate 12 is disposed above the first electrode plate 11 and is spaced apart from the first electrode plate 11 and includes a second substrate (Second substrate) 121 and a second electrode layer 122. A second hydrophobic layer 123.

第二基板121類似第一基板111，也可為矩型板體，其材料可為玻璃、矽基板、聚二甲基矽氧烷、聚對苯二甲酸乙二酯、聚乙烯萘酚樹脂、可撓式高分子材料或絕緣性好的材料等，其中一種較佳的選擇為玻璃，因為其可透光。The second substrate 121 is similar to the first substrate 111, and may also be a rectangular plate body, and the material thereof may be glass, germanium substrate, polydimethylsiloxane, polyethylene terephthalate, polyethylene naphthol resin, A flexible polymer material or a material having good insulating properties, etc., one of the preferred choices is glass because it can transmit light.

第二電極層122設置於第二基板121的一側面(例如底面)，並涵蓋整個第二基板121，且與第一電極層112相對。第二電極層122的材料可為導電金屬材料、導電高分子材料或導電氧化物材料等，例如銅鉻金屬或氧化銦錫等。第二電極層122可藉由電子束蒸發、物理氣相沉積、或者真空濺鍍等方法沉積到第二基板121而形成之。值得一提的是，於其他實施例中(圖未示)，第二電極層122可類似第一電極層112般，具有多個間隔排列的電極。The second electrode layer 122 is disposed on one side (eg, the bottom surface) of the second substrate 121 and covers the entire second substrate 121 and is opposite to the first electrode layer 112. The material of the second electrode layer 122 may be a conductive metal material, a conductive polymer material or a conductive oxide material, such as copper chromium metal or indium tin oxide. The second electrode layer 122 may be formed by depositing onto the second substrate 121 by electron beam evaporation, physical vapor deposition, or vacuum sputtering. It is worth mentioning that in other embodiments (not shown), the second electrode layer 122 can be similar to the first electrode layer 112 and has a plurality of electrodes arranged at intervals.

第二疏水層123設置於第二電極層122的底面，其材料可為鐵氟龍等疏水性的材料，其可藉由沈積製程來沈積至第二電極層122上。第二疏水層123的目的為：讓驅動流體2易於驅動，其也可稱為低摩擦層。第二疏水層123也可選擇不設置在第二電極層122上，只要驅動流體2的疏水性已足夠。The second hydrophobic layer 123 is disposed on the bottom surface of the second electrode layer 122, and the material thereof may be a hydrophobic material such as Teflon, which may be deposited on the second electrode layer 122 by a deposition process. The purpose of the second hydrophobic layer 123 is to make the drive fluid 2 easy to drive, which may also be referred to as a low friction layer. The second hydrophobic layer 123 may also optionally be disposed not on the second electrode layer 122 as long as the hydrophobicity of the driving fluid 2 is sufficient.

若有需要，第二電極層122與第二疏水層123間可設置介電層。另外，第二電極層122可包含多個間隔排列的電極，與第一電極層112形狀相同與位置相對，或與第一電極層112存在差異，以提供更複雜物品形狀之製作。A dielectric layer may be disposed between the second electrode layer 122 and the second hydrophobic layer 123 if necessary. In addition, the second electrode layer 122 may include a plurality of spaced-apart electrodes that are identical in shape and positional to the first electrode layer 112 or different from the first electrode layer 112 to provide a more complex article shape.

以上為第二電極板12的說明，接著說明分隔件13的技術內容。分隔件13可由絕緣材料所製成，其結構及形狀並不限定，可為一連續的框型結構(如本實施例般)，或是多個分離的柱狀結構。分隔件13設置於第一電極板11及第二電極板12之間，其用以將兩者隔離，使得驅動流體2及周圍流體3可位於第一電極板11及第二電極板12之間。分隔件13的高度與微物品的厚度對應，因此微物品越厚，分隔件13就會越高。The above is the description of the second electrode plate 12, and the technical contents of the separator 13 will be described next. The partition member 13 may be made of an insulating material, and its structure and shape are not limited, and may be a continuous frame type structure (as in the present embodiment) or a plurality of separate columnar structures. The partitioning member 13 is disposed between the first electrode plate 11 and the second electrode plate 12 for isolating the two, so that the driving fluid 2 and the surrounding fluid 3 can be located between the first electrode plate 11 and the second electrode plate 12. . The height of the partition 13 corresponds to the thickness of the micro-object, so the thicker the micro-items, the higher the partition 13 will be.

請參閱第四圖所示，接著開始說明微物品的製造裝置1的其中一種較佳使用方法，也就是本發明的微物品的製造方法的一較佳實施例。Referring to the fourth figure, a preferred embodiment of the manufacturing apparatus 1 for micro-articles, that is, a preferred embodiment of the method of manufacturing the micro-article of the present invention, will be described.

首先(步驟S101)，將驅動流體2及周圍流體3設置於第一電極板11及第二電極板12之間。儲液電極1121與第二電極層122被施以電壓，因此驅動流體2可停留在儲液電極1121上，而周圍流體3環繞驅動流體2。First (step S101), the driving fluid 2 and the surrounding fluid 3 are disposed between the first electrode plate 11 and the second electrode plate 12. The reservoir electrode 1121 and the second electrode layer 122 are applied with a voltage, so the driving fluid 2 can stay on the reservoir electrode 1121 while the surrounding fluid 3 surrounds the driving fluid 2.

接著(步驟S103)，施加電壓至第一電極板11的流道電極1123、成型電極1122與第二電極板12上，使得驅動流體2可通過流道電極1123而流動至成型電極1122上。位於成型電極1122的驅動流體2依據成型電極1122的形狀而變形，使得其輪廓跟微物品的截面一致。Next (step S103), a voltage is applied to the flow path electrode 1123 of the first electrode plate 11, the shaped electrode 1122, and the second electrode plate 12, so that the driving fluid 2 can flow onto the shaped electrode 1122 through the flow path electrode 1123. The driving fluid 2 located at the shaped electrode 1122 is deformed in accordance with the shape of the shaped electrode 1122 such that its contour coincides with the cross section of the micro article.

再來(步驟S105)，將變形後的驅動流體2固化。造成驅動流體2固化的方式有多種，可依據驅動流體2的材料特性而選擇之，其中最簡單的固化方式為：在驅動流體2中加入交聯劑(固化劑)，然後讓驅動流體2隨著時間自己漸漸凝固。Then (step S105), the deformed driving fluid 2 is solidified. There are various ways to cure the driving fluid 2, which can be selected according to the material properties of the driving fluid 2. The simplest curing method is: adding a crosslinking agent (curing agent) to the driving fluid 2, and then letting the driving fluid 2 follow Time is getting solidified.

請參閱第五圖所示，另外一種較快的固化方式為：加熱變形後的驅動流體2。也就是說，微物品的製造裝置1將包括一加熱設備14，加熱設備14可為任何能產生熱能的裝置，其可對第一電極板11及/或第二電極板12加熱(吹熱風等方式)，然後熱能傳遞到驅動流體2上，驅動流體2會因此漸漸固化。Referring to Figure 5, another faster curing method is to heat the deformed drive fluid 2 . That is, the manufacturing apparatus 1 for micro-objects will include a heating device 14, which can be any device capable of generating thermal energy, which can heat the first electrode plate 11 and/or the second electrode plate 12 (hot air, etc.) Mode), then thermal energy is transferred to the driving fluid 2, and the driving fluid 2 will thus gradually solidify.

請參閱第六圖所示，還有一種較快的固化方式為：照射紫外線於變形後的驅動流體2。也就是說，微物品的製造裝置1將包括一紫外線光產生設備15，紫外線光產生設備15可對第一電極板11及/或第二電極板12發射紫外線光，紫外線光會穿過透明的第一電極板11及/或第二電極板12而照射到驅動流體2，驅動流體2會因此漸漸固化。在照射紫外線光時，其照射範圍可被控制，使得紫外線光只會照射到位於成型電極1122的驅動流體2，其餘部分的驅動流體2不會固化。Referring to the sixth figure, there is also a faster curing method: the ultraviolet ray is applied to the deformed driving fluid 2 . That is, the manufacturing apparatus 1 for micro-objects will include an ultraviolet light generating device 15 that can emit ultraviolet light to the first electrode plate 11 and/or the second electrode plate 12, and the ultraviolet light will pass through the transparent The first electrode plate 11 and/or the second electrode plate 12 are irradiated to the driving fluid 2, and the driving fluid 2 is thus gradually solidified. When the ultraviolet light is irradiated, the irradiation range thereof can be controlled so that the ultraviolet light is irradiated only to the driving fluid 2 located at the shaped electrode 1122, and the remaining portion of the driving fluid 2 does not solidify.

此外更有一種較快的固化方式：冷卻變形後的驅動流體2，使得驅動流體2的溫度降低到其固化溫度以下，驅動流體2將自然地凝固成固體。上述的方式可以藉由一冷卻設備來達成之，該冷卻設備可對該第一電極板11及/或第二電極板12降溫冷卻，進而將驅動流體2的溫度也降低。In addition, there is a faster curing mode: cooling the deformed driving fluid 2 such that the temperature of the driving fluid 2 falls below its curing temperature, and the driving fluid 2 will naturally solidify into a solid. The above method can be achieved by a cooling device that cools and cools the first electrode plate 11 and/or the second electrode plate 12, thereby lowering the temperature of the driving fluid 2.

爾後(步驟S107)，將固化後的驅動流體2取出。取出的方式也有多種，而其中一種為：請參閱第七圖所示，固化後的驅動流體2吸附在第二電極板12上，然後將第二電極板12往上掀開，固化後的驅動流體2將隨著第二電極板12移動而遠離第一電極板11；最後，將固化後的驅動流體2與第二電極板12分離，即可得到一個微物品的成品。Thereafter (step S107), the solidified driving fluid 2 is taken out. There are also a plurality of ways of taking out, and one of them is as follows: Referring to the seventh figure, the solidified driving fluid 2 is adsorbed on the second electrode plate 12, and then the second electrode plate 12 is opened upward, and the solidified driving is performed. The fluid 2 will move away from the first electrode plate 11 as the second electrode plate 12 moves; finally, the solidified driving fluid 2 is separated from the second electrode plate 12 to obtain a finished product of the micro-article.

上述的步驟可以製造出單一截面的微物品，如果微物品有多個的截面時，本實施例的微物品製造裝置1及製造方法也可以將其製作出。請參閱第八圖及第九圖所示，多截面的微物品的製造流程說明如下，該製造流程接續於步驟S107後。The above-described steps can produce a micro-article having a single cross-section. If the micro-article has a plurality of cross-sections, the micro-article manufacturing apparatus 1 and the manufacturing method of the present embodiment can also be produced. Referring to FIG. 8 and FIG. 9 , the manufacturing process of the multi-section micro-article is described as follows, and the manufacturing flow is continued after step S107.

首先(步驟S201)，將具有微物品其中一個截面形狀及厚度的半成品(也就是固化後的驅動流體2)與第二電極板12一起移動到高度較高的另一分隔件13A上，使得第二電極板12與另一第一電極板11A相對，而固化後的驅動流體2位於另一第一電極板11A與第二電極板12之間。另一第一電極板11A與第一電極板11的結構大致相同，但另一第一電極板11A的另一成型電極1122A的形狀對應於微物品的另一截面。另一分隔件13A的高度對應於另一截面的厚度。First (step S201), the semi-finished product (i.e., the solidified driving fluid 2) having one of the cross-sectional shapes and thicknesses of the micro-object is moved together with the second electrode plate 12 to the other partition member 13A having a higher height, so that The two electrode plates 12 are opposed to the other first electrode plates 11A, and the solidified driving fluid 2 is located between the other first electrode plates 11A and the second electrode plates 12. The other first electrode plate 11A has substantially the same structure as the first electrode plate 11, but the shape of the other shaped electrode 1122A of the other first electrode plate 11A corresponds to another cross section of the micro-object. The height of the other partition 13A corresponds to the thickness of the other section.

接著(步驟S203)，類似步驟S101般將另一驅動流體2A及另一周圍流體3A設置於另一第一電極板11A及第二電極板12之間。另一驅動流體2A與驅動流體2的種類可為相同，另一周圍流體3A與周圍流體3的種類也可為相同。Next (step S203), another driving fluid 2A and another surrounding fluid 3A are disposed between the other first electrode plate 11A and the second electrode plate 12 similarly to step S101. The other driving fluid 2A and the driving fluid 2 may be of the same type, and the other surrounding fluid 3A and the surrounding fluid 3 may be of the same type.

然後(步驟S205)，類似步驟S103般施加電壓至另一第一電極板11A的另一成型電極1122A與第二電極板12上，使得另一驅動流體2A流動至另一成型電極1122A上。另一驅動流體2A依據另一成型電極1122的形狀而變形，使得其輪廓跟微物品的另一截面一致。Then (step S205), a voltage is applied to the other shaped electrode 1122A and the second electrode plate 12 of the other first electrode plate 11A like the step S103, so that the other driving fluid 2A flows onto the other shaped electrode 1122A. The other driving fluid 2A is deformed in accordance with the shape of the other shaped electrode 1122 such that its contour coincides with another cross section of the micro article.

之後(步驟S207)，將變形後的另一驅動流體2A固化，並且固化後的另一驅動流體2A會跟固化後的驅動流體2結合在一起。讓另一驅動流體2A固化的方式有多種，依據另一驅動流體2A的材料特性而選擇之，可為自然固化、加熱固化、冷卻固化或是照射紫外線光固化等。Thereafter (step S207), the deformed another driving fluid 2A is solidified, and the other driving fluid 2A after curing is combined with the solidified driving fluid 2. There are various ways of curing the other driving fluid 2A, and depending on the material properties of the other driving fluid 2A, it may be natural curing, heat curing, cooling curing or ultraviolet curing.

最後(步驟S209)，將固化及相互結合後的驅動流體2及另一驅動流體2A取出，藉此得到有兩個截面的微物品的成品。取出的方式可參考前述步驟S107所採用的方法。Finally (step S209), the solidified and mutually coupled driving fluid 2 and the other driving fluid 2A are taken out, thereby obtaining a finished product of the micro-article having two cross sections. For the manner of taking out, refer to the method adopted in the foregoing step S107.

如果微物品還有更多的截面，上述該些步驟可重複執行數次而將該種微物品製作出。If the micro article has more cross sections, the above steps can be repeated several times to make the micro article.

值得一提的是，上述都是藉由固化驅動流體2來形成所需的微物品，然而也可以藉由固化周圍流體3來形成微物品，此時所使用的驅動流體2將是『非固化』的材料，而周圍流體3將是『可固化』的材料，例如可固化的高分子材料。成型電極1122的形狀仍是對應微物品的截面，但不是跟微物品的截面一樣，而是跟微物品的截面反向形狀一樣。例如說微物品的截面為『凹』型，則成型電極1122的形狀可為『口』型或是『凸』型。It is worth mentioning that the above is to form the desired micro-object by curing the driving fluid 2, but it is also possible to form the micro-object by curing the surrounding fluid 3, and the driving fluid 2 used at this time will be "non-curing". The material around, and the surrounding fluid 3 will be a "curable" material, such as a curable polymer material. The shape of the shaped electrode 1122 is still the cross section of the corresponding micro article, but is not the same as the cross section of the micro article, but is the same as the cross sectional shape of the micro article. For example, if the cross section of the micro article is a "concave" type, the shape of the shaped electrode 1122 may be a "mouth" type or a "convex" type.

另外值得一提的是，驅動流體2(或另一驅動流體2A)可藉由噴沫、滴注等方式直接地設置在成型電極1122上，不用再透過儲液電極1121及流道電極1123。此舉可讓第一電極層112不需儲液電極1121及流道電極1123，藉此節省第一電極層112的製造成本。It is also worth mentioning that the driving fluid 2 (or another driving fluid 2A) can be directly disposed on the forming electrode 1122 by means of spraying, dripping, etc., without passing through the liquid storage electrode 1121 and the flow path electrode 1123. This allows the first electrode layer 112 to eliminate the need for the reservoir electrode 1121 and the runner electrode 1123, thereby saving the manufacturing cost of the first electrode layer 112.

更值得一提的是，上述各實施例的成型電極1122並不限定為一個，可同時設置多個成型電極1122於第一基板111上，該些成型電極1122之間可以相連或是彼此具有間距，該些成型電極1122的形狀可為相同或是各為不同，藉此同時成型出多個相同或不同的微物品。It is to be noted that the shaped electrodes 1122 of the above embodiments are not limited to one, and a plurality of shaped electrodes 1122 may be simultaneously disposed on the first substrate 111. The formed electrodes 1122 may be connected or spaced apart from each other. The shapes of the shaped electrodes 1122 may be the same or different, thereby simultaneously forming a plurality of identical or different micro-objects.

綜合上述，本發明的微物品的製造裝置及製造方法具有諸多的的特點，列舉如下：In summary, the apparatus and method for manufacturing a micro-article of the present invention have many features, which are listed below:

1、比起傳統的熱壓印製程的模具而言，第一電極板11(或另一第一電極板11A)及第二電極板12的製造較容易，尤其是當微物品的尺寸越小時，差異越明顯。1. The first electrode plate 11 (or the other first electrode plate 11A) and the second electrode plate 12 are easier to manufacture than the conventional hot stamping die, especially when the size of the micro article is smaller. The difference is more obvious.

2、由於第一電極板11及第二電極板12沒有明顯地凹凸結構，因此微物品(固化後的驅動流體2或周圍流體3)與第一電極板11及第二電極板12的接觸面積較少。如此，微物品從第一電極板11或第二電極板12上分離時，較為容易，也較不會有材料殘留在第一電極板11或第二電極板12上。2. Since the first electrode plate 11 and the second electrode plate 12 have no obvious uneven structure, the contact area between the micro-object (the driving fluid 2 after curing or the surrounding fluid 3) and the first electrode plate 11 and the second electrode plate 12 less. Thus, when the micro-articles are separated from the first electrode plate 11 or the second electrode plate 12, it is easier, and no material remains on the first electrode plate 11 or the second electrode plate 12.

3、微物品的製造裝置1沒有任何移動件，因此其不會有噪音、震動或元件磨損等問題，其使用壽命可較長。3. The manufacturing device 1 for micro-objects does not have any moving parts, so it does not have problems such as noise, vibration or component wear, and its service life can be long.

4、微物品的製造快速，通常在數分鐘內可完成，且只會消耗少許的電能。4, micro-articles are manufactured quickly, usually within a few minutes, and consume only a small amount of electricity.

5、驅動流體2及周圍流體3的容積容易控制，且只需少量的驅動流體2或周圍流體3就可以製作出微物品。5. The volume of the driving fluid 2 and the surrounding fluid 3 is easily controlled, and a small amount of the driving fluid 2 or the surrounding fluid 3 is required to produce the micro-object.

6、可製造多個截面及厚度的微物品，並不侷限單一厚度的微物品。6. It is possible to manufacture micro-articles with multiple sections and thicknesses, and is not limited to micro-objects of a single thickness.

7、如果驅動流體2及周圍流體3選用具有可撓特性的材料(例如高分子材料)，且第一基板111及第二基板121也具有可撓式或是曲率，則可製造出具有可撓性的微物品。並且驅動流體2或周圍材料3受電場驅動或固化時，也不會被第一基板111及第二基板121的曲率影響。7. If the driving fluid 2 and the surrounding fluid 3 are made of a material having flexible properties (for example, a polymer material), and the first substrate 111 and the second substrate 121 are also flexible or curved, they can be made flexible. Sexual micro-items. When the driving fluid 2 or the surrounding material 3 is driven or solidified by the electric field, it is not affected by the curvature of the first substrate 111 and the second substrate 121.

8、如果將微物品作為蝕刻製程的蝕刻液阻擋層的話，則可以免除微影製程中的旋塗及顯影的步驟，因此可以縮短整體製程時間與使用較少與較便宜之材料，進而提高材料使用率與降低材料成本。此外還可以降低製造設備的成本，因為不需要使用到昂貴的曝光機。8. If the micro-item is used as an etchant barrier layer for the etching process, the steps of spin coating and development in the lithography process can be eliminated, thereby shortening the overall process time and using less and cheaper materials, thereby improving the material. Utilization and lower material costs. In addition, the cost of the manufacturing equipment can be reduced because it is not necessary to use an expensive exposure machine.

惟以上所述僅為本發明之較佳實施例，非意欲侷限本發明之專利保護範圍，故舉凡運用本發明說明書及圖式內容所為之等效變化，均同理皆包含於本發明之權利保護範圍內，合予陳明。The above is only the preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Therefore, the equivalents of the present invention and the equivalents of the drawings are all included in the present invention. Within the scope of protection, it is given to Chen Ming.

1．．．微物品的製造裝置1. . . Micro article manufacturing device

11．．．第一電極板11. . . First electrode plate

111．．．第一基板111. . . First substrate

112．．．第一電極層112. . . First electrode layer

1121．．．儲液電極1121. . . Liquid storage electrode

1122．．．成型電極1122. . . Shaped electrode

1123．．．流道電極1123. . . Flow path electrode

113．．．介電層113. . . Dielectric layer

114．．．第一疏水層114. . . First hydrophobic layer

11A．．．另一第一電極板11A. . . Another first electrode plate

1122A．．．另一成型電極1122A. . . Another shaped electrode

12．．．第二電極板12. . . Second electrode plate

121．．．第二基板121. . . Second substrate

122．．．第二電極層122. . . Second electrode layer

123．．．第二疏水層123. . . Second hydrophobic layer

13．．．分隔件13. . . Separator

13A．．．另一分隔件13A. . . Another separator

14．．．加熱設備14. . . Heating equipment

15．．．紫外線光產生設備15. . . Ultraviolet light generating device

2．．．驅動流體2. . . Driving fluid

3．．．周圍流體3. . . Ambient fluid

2A．．．另一驅動流體2A. . . Another driving fluid

3A．．．另一周圍流體3A. . . Another surrounding fluid

第一圖為本發明的微物品的製造裝置的較佳實施例的平面示意圖。The first figure is a plan view of a preferred embodiment of the apparatus for manufacturing a micro-article of the present invention.

第二圖為本發明的微物品的製造裝置的較佳實施例的立體分解圖。The second figure is an exploded perspective view of a preferred embodiment of the apparatus for manufacturing a micro-article of the present invention.

第三圖為本發明的微物品的製造裝置的較佳實施例的立體組合圖。The third figure is a perspective assembled view of a preferred embodiment of the apparatus for manufacturing a micro-article of the present invention.

第四圖為本發明的微物品的製造裝置的較佳實施例的使用方法的步驟流程圖。The fourth figure is a flow chart showing the steps of the method of using the preferred embodiment of the apparatus for manufacturing a micro-article of the present invention.

第五圖為本發明的微物品的製造裝置的較佳實施例被加熱的平面示意圖。Fig. 5 is a plan view schematically showing a preferred embodiment of the apparatus for manufacturing a micro-article of the present invention.

第六圖為本發明的微物品的製造裝置的較佳實施例被紫外線光照射的平面示意圖。Fig. 6 is a plan view schematically showing a preferred embodiment of the apparatus for manufacturing a micro-article of the present invention which is irradiated with ultraviolet light.

第七圖為本發明的微物品的製造裝置的較佳實施例的第二電極板被掀開的平面示意圖。Figure 7 is a plan view showing the second electrode plate of the preferred embodiment of the apparatus for manufacturing a micro-article of the present invention being cleaved.

第八圖為本發明的微物品的製造裝置的較佳實施例的另一種使用方法的步驟流程圖。Figure 8 is a flow chart showing the steps of another method of using the preferred embodiment of the apparatus for manufacturing a micro-article of the present invention.

第九圖為本發明的微物品的製造裝置的較佳實施例製作不同截面的微物品的平面示意圖。Figure 9 is a plan view showing a micro-article of different cross-sections in a preferred embodiment of the apparatus for manufacturing a micro-article of the present invention.

1．．．微物品的製造裝置1. . . Micro article manufacturing device

11．．．第一電極板11. . . First electrode plate

12．．．第二電極板12. . . Second electrode plate

13．．．分隔件13. . . Separator

2．．．驅動流體2. . . Driving fluid

3．．．周圍流體3. . . Ambient fluid

Claims (12)

一種微物品的製造裝置，包括：一第一電極板，其包含一第一基板及一第一電極層，該第一電極層設置於該第一基板的一側面，該第一電極層包含一儲液電極、一成型電極及一流道電極，該成型電極的形狀對應於一微物品的一截面，該流道電極的兩端分別鄰接該儲液電極及該成型電極；一第二電極板，其包含一第二基板及一第二電極層，該第二電極層設置於該第二基板的一側面並且與該第一電極層相對；一分隔件，其設置於該第一電極板與該第二電極板之間，該分隔件的高度對應於該微物品的一厚度；以及一驅動流體，其位於該第一電極板及該第二電極板之間且容置在該儲液電極上，該流道電極用以供該儲液電極上的驅動流體能沿著該流道電極流到該成型電極上。 A micro-object manufacturing apparatus includes: a first electrode plate comprising a first substrate and a first electrode layer, wherein the first electrode layer is disposed on a side of the first substrate, and the first electrode layer comprises a first electrode layer a liquid storage electrode, a shaped electrode and a first-class electrode, wherein the shape of the shaped electrode corresponds to a cross section of a micro-object, the two ends of the flow path electrode respectively adjoin the liquid storage electrode and the shaped electrode; a second electrode plate, The second electrode layer is disposed on a side of the second substrate and opposite to the first electrode layer; a partition member is disposed on the first electrode plate and the second electrode layer Between the second electrode plates, the height of the partition corresponds to a thickness of the micro-object; and a driving fluid between the first electrode plate and the second electrode plate and received on the liquid storage electrode The flow path electrode is configured to allow a driving fluid on the liquid storage electrode to flow along the flow path electrode to the shaped electrode. 如申請專利範圍第1項所述的微物品的製造裝置，其中該成型電極的圖案為一齒輪的截面。 The apparatus for manufacturing a micro-article according to claim 1, wherein the pattern of the shaped electrode is a cross section of a gear. 如申請專利範圍第1或2項所述的微物品的製造裝置，更包括一加熱設備，該加熱設備用以對該第一電極板及/或該第二電極板加熱。 The apparatus for manufacturing a micro-article according to claim 1 or 2, further comprising a heating device for heating the first electrode plate and/or the second electrode plate. 如申請專利範圍第1或2項所述的微物品的製造裝置，更包括一紫外線光產生設備，該紫外線光產生設備用以對該第一電極板及/或該第二電極板發射紫外線光。 The apparatus for manufacturing a micro-article according to claim 1 or 2, further comprising an ultraviolet light generating device for emitting ultraviolet light to the first electrode plate and/or the second electrode plate . 如申請專利範圍第1或2項所述的微物品的製造裝置，更包括一周圍流體，該周圍流體位於該第一電極板及該第二電極板之間，該周圍流體環繞該驅動流體並且與該驅動流體不互溶。 The apparatus for manufacturing a micro-article according to claim 1 or 2, further comprising a surrounding fluid, the surrounding fluid being located between the first electrode plate and the second electrode plate, the surrounding fluid surrounding the driving fluid and Not compatible with the driving fluid. 一種微物品的製造方法，包括步驟如下：設置一驅動流體及一周圍流體於一第一電極板及一第二電極板之間，施加電壓於該第一電極板的一儲液電極與該第二電極層、及該第二電極層，以使該驅動流體停留在該儲液電極上，且該周圍流體環繞該驅動流體並且與該驅動流體不互溶；施加電壓至該第一電極板及該第二電極板，使得該驅動流體通過該第一電極板的該流道電極而流動至該第一電極板的該成型電極上，並且該驅動流體依據該成型電極的形狀而變形，其中該成型電極的形狀對應於一微物品的一截面；固化變形後的該驅動流體；以及取出固化後的該驅動流體。 A method for manufacturing a micro-object, comprising the steps of: disposing a driving fluid and a surrounding fluid between a first electrode plate and a second electrode plate, applying a voltage to a liquid storage electrode of the first electrode plate, and the first a second electrode layer, and the second electrode layer, such that the driving fluid stays on the liquid storage electrode, and the surrounding fluid surrounds the driving fluid and is immiscible with the driving fluid; applying a voltage to the first electrode plate and the a second electrode plate, such that the driving fluid flows to the forming electrode of the first electrode plate through the flow path electrode of the first electrode plate, and the driving fluid is deformed according to the shape of the forming electrode, wherein the driving fluid is deformed according to the shape of the forming electrode The shape of the electrode corresponds to a section of a micro-object; the driving fluid after curing deformation; and the driving fluid after curing is taken out. 如申請專利範圍第6項所述的微物品的製造方法，其中在『固化變形後的驅動流體』的步驟中，加熱變形後的該驅動流體。 The method for producing a micro-article according to claim 6, wherein in the step of "curing fluid after curing deformation", the deformed driving fluid is heated. 如申請專利範圍第6項所述的微物品的製造方法，其中在『固化變形後的驅動流體』的步驟中，冷卻變形後的該驅動流體。 The method for producing a micro-article according to claim 6, wherein in the step of "curing the fluid after the deformation", the deformed driving fluid is cooled. 如申請專利範圍第6項所述的微物品的製造方法，其中在『固化變形後的驅動流體』的步驟中，照射紫外線光於變形後的該驅動流體。 The method for producing a micro-article according to claim 6, wherein in the step of "curing the fluid after the deformation is deformed", the ultraviolet ray is irradiated to the deformed driving fluid. 如申請專利範圍第6、7、8、或9項所述的微物品的製造方法，其中在『取出固化後的該驅動流體』的步驟中，固化後的該驅動流體吸附在該第二電極板上，然後掀開該第二電極板，固化後的該驅動流體隨著該第二電極板移動。 The method for producing a micro-article according to the sixth aspect of the invention, wherein in the step of "removing the solidified driving fluid", the solidified driving fluid is adsorbed to the second electrode The second electrode plate is then opened on the board, and the solidified driving fluid moves along with the second electrode plate. 如申請專利範圍第10項所述的微物品的製造方法，更包括步驟如下：將該第二電極板移動至與另一第一電極板相對，固化後的該驅動流體位於該另一第一電極板與該第二電極板之間；設置另一驅動流體及另一周圍流體於該另一第一電極板及該第二電極板之間；施加電壓至該另一第一電極板及該第二電極板，使得該另一驅動流體流動至該另一第一電極板的另一成型電極上，該另一驅動流體依據該另一成型電極的形狀而變形，其中該另一成型電極的形狀對應於該微物品的另一截面；固化變形後的該另一驅動流體，固化後的該另一驅動流體與固化後的該驅動流體相結合；以及取出固化後的該驅動流體及該另一驅動流體。 The method for manufacturing a micro-article according to claim 10, further comprising the steps of: moving the second electrode plate to be opposite to the other first electrode plate, wherein the solidified driving fluid is located at the other first Between the electrode plate and the second electrode plate; another driving fluid and another surrounding fluid are disposed between the other first electrode plate and the second electrode plate; applying a voltage to the other first electrode plate and the a second electrode plate such that the other driving fluid flows onto another shaped electrode of the other first electrode plate, the other driving fluid being deformed according to the shape of the other shaped electrode, wherein the other shaped electrode The shape corresponds to another cross section of the micro-object; the other driving fluid after curing deformation, the further driving fluid after curing is combined with the curing driving fluid; and the curing driving fluid and the other are taken out A drive fluid. 一種微物品的製造方法，包括步驟如下：設置一驅動流體及一周圍流體於一第一電極板及一第二電極板之間，施加電壓於該第一電極板的一儲液電極與該第二電 極層、及該第二電極層，以使該驅動流體停留在該儲液電極上，且該周圍流體環繞該驅動流體並且與該驅動流體不互溶；施加電壓至該第一電極板及該第二電極板，使得該驅動流體通過該第一電極板的該流道電極而流動至該第一電極板的該成型電極上，並且該驅動流體依據該成型電極的形狀而變形，其中該成型電極的形狀對應於一微物品的一截面；固化該周圍流體；以及取出固化後的該周圍流體。 A method for manufacturing a micro-object, comprising the steps of: disposing a driving fluid and a surrounding fluid between a first electrode plate and a second electrode plate, applying a voltage to a liquid storage electrode of the first electrode plate, and the first Second electric a pole layer, and the second electrode layer, such that the driving fluid stays on the liquid storage electrode, and the surrounding fluid surrounds the driving fluid and is immiscible with the driving fluid; applying a voltage to the first electrode plate and the first a second electrode plate, such that the driving fluid flows to the forming electrode of the first electrode plate through the flow channel electrode of the first electrode plate, and the driving fluid is deformed according to a shape of the forming electrode, wherein the forming electrode The shape corresponds to a section of a micro-object; curing the surrounding fluid; and removing the surrounding fluid after curing.
TW099107237A 2010-03-12 2010-03-12 Device and method for fabricating micro article TWI465386B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW099107237A TWI465386B (en) 2010-03-12 2010-03-12 Device and method for fabricating micro article
US12/897,128 US20110220510A1 (en) 2010-03-12 2010-10-04 Device and method for fabricating micro articles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW099107237A TWI465386B (en) 2010-03-12 2010-03-12 Device and method for fabricating micro article

Publications (2)

Publication Number Publication Date
TW201130730A TW201130730A (en) 2011-09-16
TWI465386B true TWI465386B (en) 2014-12-21

Family

ID=44558921

Family Applications (1)

Application Number Title Priority Date Filing Date
TW099107237A TWI465386B (en) 2010-03-12 2010-03-12 Device and method for fabricating micro article

Country Status (2)

Country Link
US (1) US20110220510A1 (en)
TW (1) TWI465386B (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009130274A1 (en) * 2008-04-24 2009-10-29 Commissariat A L'energie Atomique Process for manufacturing reconfigurable microchannels

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7439014B2 (en) * 2006-04-18 2008-10-21 Advanced Liquid Logic, Inc. Droplet-based surface modification and washing
TWI365849B (en) * 2009-01-14 2012-06-11 Univ Nat Chiao Tung A virtual channel platform

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009130274A1 (en) * 2008-04-24 2009-10-29 Commissariat A L'energie Atomique Process for manufacturing reconfigurable microchannels

Also Published As

Publication number Publication date
TW201130730A (en) 2011-09-16
US20110220510A1 (en) 2011-09-15

Similar Documents

Publication Publication Date Title
US9268215B2 (en) Injection molding tools with micro/nano-meter pattern
Nam et al. Close-packed hemispherical microlens array from two-dimensional ordered polymeric microspheres
Armon et al. Continuous nanoparticle assembly by a modulated photo-induced microbubble for fabrication of micrometric conductive patterns
Jochem et al. High-resolution, high-aspect-ratio printed and plated metal conductors utilizing roll-to-roll microscale UV imprinting with prototype imprinting stamps
Sun et al. Simple and affordable way to achieve polymeric superhydrophobic surfaces with biomimetic hierarchical roughness
CN103149607B (en) A kind of fabricating method of microlens array be shaped based on template electric induction
KR101226086B1 (en) Pattern fabricating method and pattern transferring apparatus
CN102303841A (en) Method for forming micro-nano composite structure by micro-spraying-printing and dielectrophoretic force
TWI465386B (en) Device and method for fabricating micro article
Yang et al. Inorganic Surface Coating with Fast Wetting–Dewetting Transitions for Liquid Manipulations
JP2017047626A (en) Molding
CN103586093B (en) Microfluidic chip and manufacturing method thereof
CN104122747A (en) Electroosmosis driving nanoimprint device and working method thereof
CN102442033A (en) Molding die of linear Fresnel lens
JP5948616B1 (en) Compact
US20140311662A1 (en) Method for fabricating an embedded pattern using a transfer-based imprinting
JP2012045841A (en) Structure having fine uneven pattern on surface, and method for manufacturing the same
JP2017001383A (en) Molded body
KR101682556B1 (en) Method for Manufacturing Micro-scale Surface Wrinkles On Metal Structures
US20140264983A1 (en) Systems And Methods For Light Lens Hot Stamping
Guo et al. Oxygen plasma assisted room temperature bonding for manufacturing SU-8 polymer micro/nanoscale nozzle
CN102390103B (en) Electric field enhanced capillary micro injection moulding method
CN111580341B (en) Imprinting apparatus and imprinting method
KR20170092341A (en) Stamp for Making Micro-scale Surface Wrinkles, Method for Manufacturing the Same, And Method for Fabricating Micro-scale Surface Wrinkles On Structures Using the Stamp
CN106319594A (en) Method for forming orderly concave holes in surface of aluminum product

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees