TWI460808B - Guide roller apparatus - Google Patents
Guide roller apparatus Download PDFInfo
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- TWI460808B TWI460808B TW102129517A TW102129517A TWI460808B TW I460808 B TWI460808 B TW I460808B TW 102129517 A TW102129517 A TW 102129517A TW 102129517 A TW102129517 A TW 102129517A TW I460808 B TWI460808 B TW I460808B
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- roller
- transfer
- transfer object
- belt
- torque
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G13/00—Roller-ways
- B65G13/02—Roller-ways having driven rollers
- B65G13/06—Roller driving means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mechanical Engineering (AREA)
- Optics & Photonics (AREA)
- Rollers For Roller Conveyors For Transfer (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Framework For Endless Conveyors (AREA)
- Attitude Control For Articles On Conveyors (AREA)
- Control Of Conveyors (AREA)
Description
本發明係關於導引滾輪裝置，本發明尤其關於導引對面轉移物件，使該轉移物件能沿轉移方向正常轉移之導引滾輪裝置。BACKGROUND OF THE INVENTION 1. Field of the Invention This invention relates to a guide roller device, and more particularly to a guide roller device that guides an opposite transfer article to enable the transfer article to be normally transferred in the transfer direction.
當製作如平面顯示面板之顯示基板，時，各種如沉積、清洗、烘乾、蝕刻、曝光等製程經實施以形成圖案在基板上。再者，該等製程大多在加工室內進行相應之製程，因此該基板需被轉移進入各個加工室，或在該相應加工室中之製程完成時，轉移該基板以將該基板從該加工室取出。When a display substrate such as a flat display panel is fabricated, various processes such as deposition, cleaning, drying, etching, and exposure are performed to form a pattern on the substrate. Moreover, most of the processes are performed in the processing chamber, so the substrate needs to be transferred into each processing chamber, or when the process in the corresponding processing chamber is completed, the substrate is transferred to take the substrate out of the processing chamber. .
現行使用於基板轉移裝置之基板轉移方法有：橫向轉移方法以轉移橫向支撐之基板、縱向轉移方法以轉移縱向支撐之基板、斜向轉移方法以轉移斜向支撐之基板等等。The substrate transfer methods currently used in the substrate transfer apparatus include a lateral transfer method for transferring a substrate supported laterally, a longitudinal transfer method for transferring a substrate supported longitudinally, a method of oblique transfer to transfer a substrate supported obliquely, and the like.
該基板轉移過程中，若該基板正常轉移，則該基板沿著該轉移方向直線移動。然而，該基板可能不沿著該轉移方向直線移動，原因如：該基板轉移裝置之不平衡旋轉力或該基板轉移裝置之平整度缺陷等等。因此，為了該基板不沿著該轉移方向直線移動之情況做準備，將導引滾輪裝置安裝 於該基板之相對兩側以導引直線轉移該基板，以便該基板正常轉移。During the substrate transfer process, if the substrate is normally transferred, the substrate moves linearly along the transfer direction. However, the substrate may not move linearly along the transfer direction due to, for example, unbalanced rotational force of the substrate transfer device or flatness defects of the substrate transfer device, and the like. Therefore, in order to prepare the substrate to move linearly along the transfer direction, the guide roller device is mounted. The substrate is transferred in a straight line on opposite sides of the substrate so that the substrate is normally transferred.
第1圖圖示習知導引滾輪裝置之範例。Figure 1 illustrates an example of a conventional guide roller device.
參照第1圖，習知導引滾輪裝置包括複數個導引滾輪20，該複數個導引滾輪20沿轉移方向A1做預定間隔，且各導引滾輪20可不費力地自由轉動。若轉移物件10在沿轉移方向A1移動中稍微偏離而碰撞導引滾輪20，導引滾輪20將轉動以使轉移物件10能往反方向移動，從而再次使轉移物件10沿轉移方向A1正常轉移。Referring to Fig. 1, the conventional guide roller device includes a plurality of guide rollers 20, the plurality of guide rollers 20 are spaced apart in the transfer direction A1, and each of the guide rollers 20 is freely rotatable without difficulty. If the transfer object 10 slightly deviates in the movement in the transfer direction A1 and collides with the guide roller 20, the guide roller 20 will rotate to move the transfer object 10 in the reverse direction, thereby again causing the transfer object 10 to be normally transferred in the transfer direction A1.
然而，如第1圖(b)所示，若轉移物件10從轉移方向A1過度偏離且與導引滾輪20碰撞，則將產生問題。該問題為導引滾輪20不再轉動，且轉移物件10於導引滾輪20卡住且停止。為解決此問題，工作人員需手動控制導引滾輪20，以便轉移物件10能正常轉移。However, as shown in FIG. 1(b), if the transfer object 10 excessively deviates from the transfer direction A1 and collides with the guide roller 20, a problem arises. The problem is that the guide roller 20 is no longer rotated, and the transfer object 10 is caught and stopped by the guide roller 20. In order to solve this problem, the worker needs to manually control the guide roller 20 so that the transfer object 10 can be normally transferred.
因此，若該轉移物件卡在該導引滾輪上且不再沿該轉移方向轉移，產品製造效率將下降，因為製程裝置必需停止，且可能因過度施加外力於被轉移之該轉移物件而使該轉移物件受損壞。Therefore, if the transfer object is caught on the guide roller and is no longer transferred in the transfer direction, the manufacturing efficiency of the product will be lowered because the process device must be stopped, and the transfer object may be excessively applied due to excessive application of the force. The transferred object is damaged.
因此，本發明設想解決前述問題，且本發明態樣係為提供導引滾輪裝置，該導引滾輪裝置包括滾輪，該滾輪能往接近轉移物件方向移動；以及另一滾輪，該另一滾輪導引轉移物件正常轉移，即使該轉移物件從該轉移方向過度偏離，也能從而防止該轉移物件卡在該滾輪中且不沿該轉移方 向轉移。Accordingly, the present invention contemplates solving the aforementioned problems, and the present invention provides a guide roller device including a roller that can move toward a direction of the transfer object; and another roller that guides the other roller The transfer object is normally transferred, even if the transfer object is excessively deviated from the transfer direction, thereby preventing the transfer object from being caught in the roller and not along the transfer side Transfer to.
依據本發明之態樣，茲提供一導引滾輪裝置，包括括轉移部件，該轉移部件將該轉移物件沿該轉移方向轉移；複數個第一滾輪，該複數個第一滾輪設置於該轉移物件之側邊，沿該轉移方向做間隔，且該複數個第一滾輪將該轉移物件沿該轉移方向做導引；第二滾輪，該等第二滾輪設置於鄰近該等第一滾輪間，且該等第二滾輪設置於該轉移物件之側邊；皮帶，該皮帶纏繞於該第一滾輪及該第二滾輪兩者上，且該第一滾輪相對於該轉移方向排列於第二滾輪之後；第二滾輪移動部件，該第二滾輪移動部件使該第二滾輪於接近該轉移物件方向及遠離該轉移物件方向間做往復運動；第一滾輪旋轉驅動器，該第一滾輪旋轉驅動器轉動該第一滾輪，使纏繞於該第一滾輪及該第二滾輪之該皮帶轉動，其中在該轉移物件卡住且停在該皮帶上時，該第一滾輪旋轉驅動器之轉矩定義為基準轉矩，且導引滾輪裝置更包括：轉矩感測器，該轉矩感測器感測第一滾輪旋轉驅動器之轉矩；及控制器，該控制器控制該第二滾輪移動部件，在該轉矩感測器感測之轉矩等於或大於基準轉矩時，該第二滾輪移動部件移動該第二滾輪，使該第二滾輪往遠離該轉移物件方向移動，再使該第二滾輪往接近該轉移物件方向移動。According to an aspect of the present invention, a guide roller device is provided, including a transfer member that transfers the transfer object in the transfer direction; a plurality of first rollers, the plurality of first rollers being disposed on the transfer object a side edge of the transfer direction, and the plurality of first rollers guide the transfer object along the transfer direction; the second roller is disposed adjacent to the first roller, and The second roller is disposed on a side of the transfer object; the belt is wound on both the first roller and the second roller, and the first roller is arranged behind the second roller with respect to the transfer direction; a second roller moving component, the second roller moving component reciprocates the second roller in a direction approaching the transfer object and away from the transfer object; the first roller rotates the driver, and the first roller rotation driver rotates the first a roller that rotates the belt wound around the first roller and the second roller, wherein the first roller rotates the driver when the transfer object is caught and stopped on the belt The moment is defined as a reference torque, and the guide roller device further includes: a torque sensor that senses a torque of the first roller rotary drive; and a controller that controls the second roller a moving part, when the torque sensed by the torque sensor is equal to or greater than a reference torque, the second roller moving part moves the second roller to move the second roller away from the transfer object, and then The second roller moves toward the transfer object.
導引滾輪裝置更能包括輸入感測器，該輸入感測器感測該轉移物件之輸入，其中在該輸入感測器感測到該轉移物件輸入時，該第二滾輪移動部件移動該第二滾輪使該第二滾輪往接近該轉移物件方向移動。The guide roller device can further include an input sensor, the input sensor sensing an input of the transfer object, wherein the second roller moving component moves the first when the input sensor senses the transfer object input The two rollers move the second roller toward the direction of the transfer object.
導引滾輪裝置更能包括彈簧構件，該彈簧構件安裝於該第二滾輪中且彈性地促使該第二滾輪朝該轉移物件移動，該移動之方向橫向於該轉移方向，藉以當該轉移物件碰撞該第二滾輪或該皮帶時吸收一衝擊。The guide roller device can further include a spring member mounted in the second roller and elastically urging the second roller to move toward the transfer object, the direction of the movement being transverse to the transfer direction, whereby the transfer object collides The second roller or the belt absorbs an impact.
10‧‧‧轉移物件10‧‧‧Transfer objects
20‧‧‧導引滾輪20‧‧‧Guide Roller
100‧‧‧導引滾輪裝置100‧‧‧guide roller device
110‧‧‧轉移部件110‧‧‧Transfer parts
120‧‧‧第一滾輪120‧‧‧First wheel
130‧‧‧第二滾輪130‧‧‧Second wheel
140‧‧‧皮帶140‧‧‧Land
160‧‧‧輸入感測器160‧‧‧Input sensor
170‧‧‧彈簧構件170‧‧‧Spring components
A1‧‧‧轉移方向A1‧‧‧Transfer direction
B1‧‧‧接近轉移物件方向B1‧‧‧Close to the direction of the transfer object
B2‧‧‧遠離轉移物件方向B2‧‧‧ away from the direction of the transfer object
本發明之上述與/或其他態樣將由下列模範實施例之描述結合附圖，而更容易理解且清楚。其中附圖為：第1圖圖示習知導引滾輪裝置範例；第2圖圖示根據本發明實施例之導引滾輪裝置；第3圖圖示第一滾輪，第二滾輪及皮帶，該第一滾輪、第二滾輪及皮帶由第一滾輪旋轉驅動器轉動，而該第一滾輪旋轉驅動器係屬於第2圖之導引滾輪裝置；第4圖圖示說明轉移物件不沿轉移方向轉移時，第二滾輪之運轉。該第二滾輪係屬第2圖導引滾輪裝置。The above and/or other aspects of the present invention will be more readily understood and understood from the following description of the exemplary embodiments. The drawings are: FIG. 1 illustrates an example of a conventional guide roller device; FIG. 2 illustrates a guide roller device according to an embodiment of the present invention; and FIG. 3 illustrates a first roller, a second roller and a belt, The first roller, the second roller and the belt are rotated by the first roller rotation driver, and the first roller rotation driver belongs to the guide roller device of FIG. 2; and FIG. 4 illustrates that when the transfer object is not transferred in the transfer direction, The operation of the second roller. The second roller is a guide roller device of FIG.
第5圖圖示彈簧構件。該彈簧構件係屬第2圖導引滾輪裝置。Figure 5 illustrates the spring member. The spring member is the guide roller device of Fig. 2.
以下，根據本發明之導引滾輪裝置實施例將參考附圖做說明。Hereinafter, an embodiment of a guide roller device according to the present invention will be described with reference to the accompanying drawings.
第2圖圖示根據本發明實施例之導引滾輪裝置；第3圖圖示第一滾輪、第二滾輪及皮帶，該等第一滾輪、第二滾輪及皮帶由第一滾輪旋轉驅動器轉動。該第一滾輪旋轉驅動器係屬第2圖之導引滾輪裝置；第4圖圖示說明轉移物件不沿轉移方向轉移時，該第二滾輪之運轉。該第二滾輪係屬第2 圖導引滾輪裝置。第5圖圖示彈簧構件。該彈簧構件係屬第2圖導引滾輪裝置。2 is a view showing a guide roller device according to an embodiment of the present invention; FIG. 3 is a view showing a first roller, a second roller, and a belt, and the first roller, the second roller, and the belt are rotated by the first roller rotation driver. The first roller rotation drive is the guide roller device of FIG. 2; and FIG. 4 illustrates the operation of the second roller when the transfer object is not transferred in the transfer direction. The second roller is the second Figure guide roller device. Figure 5 illustrates the spring member. The spring member is the guide roller device of Fig. 2.
參照第2圖至第5圖，此實施例中導引滾輪裝置100導引對側之轉移物件，以便該轉移物件能往轉移方向正常轉移。導引滾輪裝置100包括轉移部件110、複數個第一滾輪120、第二滾輪130、皮帶140、第二滾輪移動部件(不顯示)、第一滾輪旋轉驅動器(不顯示)、控制器(不顯示)、輸入感測器160，及彈簧構件170。Referring to Figures 2 through 5, in this embodiment, the guide roller device 100 guides the transfer object on the opposite side so that the transferred article can be normally transferred in the transfer direction. The guide roller device 100 includes a transfer member 110, a plurality of first rollers 120, a second roller 130, a belt 140, a second roller moving member (not shown), a first roller rotation driver (not shown), a controller (not displayed) ), the input sensor 160, and the spring member 170.
轉移部件110支撐轉移物件10底部，且轉移部件110將轉移物件10往轉移方向A1轉移。轉移部件110可包括滾珠螺絲、直線移動導引部件，及馬達等等。該直線移動導引部件沿轉移方向A1設置，且該馬達提供旋轉動力使滾珠螺絲轉動。轉移部件110可配合馬達之旋轉方向，將轉移物件10沿轉移方向A1轉移，或必要時將轉移物件10沿轉移方向A1之反方向轉移。The transfer member 110 supports the bottom of the transfer article 10, and the transfer member 110 transfers the transfer article 10 to the transfer direction A1. The transfer member 110 may include a ball screw, a linear movement guide member, a motor, and the like. The linear movement guide member is disposed in the transfer direction A1, and the motor provides rotational power to rotate the ball screw. The transfer member 110 can transfer the transfer object 10 in the transfer direction A1 in accordance with the rotation direction of the motor, or if necessary, transfer the transfer object 10 in the reverse direction of the transfer direction A1.
本說明書中，轉移物件10可指基板，該基板傳送無基板托盤；轉移物件10也可指置於基板托盤內之基板。In the present specification, the transfer object 10 may refer to a substrate that conveys a substrateless tray; the transfer object 10 may also refer to a substrate placed in the substrate tray.
複數個第一滾輪120導引轉移物件10，使導引物件10沿轉移方向A1轉移。複數個第一滾輪120設置於轉移物件10之側邊，且沿轉移方向A1做間隔。第一滾輪120可由不傷害轉移物件10且不對轉移物件10造成靜電之材料製成。舉例而言，第一滾輪120可由聚醚醚酮(PEEK)或類者製成。A plurality of first rollers 120 guide the transfer object 10 to transfer the guide member 10 in the transfer direction A1. A plurality of first rollers 120 are disposed on the side of the transfer object 10 and are spaced apart in the transfer direction A1. The first roller 120 may be made of a material that does not damage the transfer object 10 and does not cause static electricity to the transfer object 10. For example, the first roller 120 can be made of polyetheretherketone (PEEK) or the like.
第一滾輪120可旋轉，且安裝於旋轉軸縱向穿透第 一滾輪120之中心部位。The first roller 120 is rotatable and is longitudinally penetrated by the rotating shaft The center of a roller 120.
第二滾輪130設置於鄰近第一滾輪120之間，且位於轉移物件10之側邊。同樣，第二滾輪130可由不傷害轉移物件10且不對轉移物件10造成靜電之材料製成。舉例而言，第二滾輪130可由聚醚醚酮(PEEK)或類者製成。第二滾輪130可旋轉，且安裝於旋轉軸縱向穿透第二滾輪130之中心部位。The second roller 130 is disposed adjacent to the first roller 120 and located at a side of the transfer object 10. Likewise, the second roller 130 can be made of a material that does not damage the transfer object 10 and does not cause static electricity to the transfer object 10. For example, the second roller 130 can be made of polyetheretherketone (PEEK) or the like. The second roller 130 is rotatable and mounted on a central portion of the rotating shaft longitudinally penetrating the second roller 130.
第二滾輪130可沿轉移方向A1設置於所有鄰近第一滾輪120之間。或者，第二滾輪130可間歇性地安裝，使第二滾輪130於某些區域安裝於鄰近第一滾輪120之間，但於其他區域則不安裝於鄰近第一滾輪120之間。The second roller 130 may be disposed between all adjacent first rollers 120 in the transfer direction A1. Alternatively, the second roller 130 may be installed intermittently such that the second roller 130 is mounted between adjacent first rollers 120 in some areas, but not adjacent to the first rollers 120 in other regions.
皮帶140纏繞於第一滾輪120及第二滾輪130兩者上，且皮帶140與第一滾輪120及第二滾輪130一起轉動。如第2圖示，皮帶140纏繞於第一滾輪120上，第一滾輪120相對於轉移方向A1位於第二滾輪130後，且第二滾輪130位於鄰近第一滾輪120之間。The belt 140 is wound around both the first roller 120 and the second roller 130, and the belt 140 rotates together with the first roller 120 and the second roller 130. As shown in FIG. 2, the belt 140 is wound around the first roller 120. The first roller 120 is located behind the second roller 130 with respect to the transfer direction A1, and the second roller 130 is located adjacent to the first roller 120.
同樣，皮帶140可由不傷害轉移物件10且不對轉移物件10造成靜電之材料製成。Likewise, the belt 140 can be made of a material that does not damage the transfer article 10 and does not cause static to the transfer article 10.
第二滾輪移動部件(不顯示)往復運動，使第二滾輪130往與轉移物件之轉移方向A1水平方向轉動。該往復運動往接近轉移物件方向B1或往遠離轉移物件方向B2。The second roller moving member (not shown) reciprocates to rotate the second roller 130 in the horizontal direction of the transfer direction A1 of the transfer object. The reciprocating motion is toward the transfer object direction B1 or away from the transfer object direction B2.
在第二滾輪130往接近轉移物件方向B1移動狀態時，連接第一滾輪120旋轉軸與第二滾輪130旋轉軸之虛線傾斜於轉移方向A1。另一方面，在第二滾輪130往遠離轉移物件方向B2移動狀態時，連接第一滾輪120旋轉軸與第二滾 輪130旋轉軸之虛線基本上與轉移方向A1平行。When the second roller 130 moves toward the transfer object direction B1, the broken line connecting the rotation axis of the first roller 120 and the rotation axis of the second roller 130 is inclined to the transfer direction A1. On the other hand, when the second roller 130 moves away from the transfer object direction B2, the first roller 120 is connected to the rotation axis and the second roller. The broken line of the rotation axis of the wheel 130 is substantially parallel to the transfer direction A1.
第二滾輪移動部件可由氣動汽缸、滾珠螺絲與旋轉馬達結合之結構、線性馬達，或類直線驅動部件所實現。此類直線驅動部件可由該領域熟悉技藝者容易地配置，因此此類直線驅動部件之詳細說明將省略。The second roller moving member may be realized by a pneumatic cylinder, a structure in which a ball screw and a rotary motor are combined, a linear motor, or a linear-like driving member. Such linear drive components can be readily configured by those skilled in the art, and thus a detailed description of such linear drive components will be omitted.
第二滾輪移動部件可經配置獨立地移動各自第二滾輪130，或一起移動複數個第二滾輪130。The second roller moving member can be configured to independently move the respective second roller 130 or to move the plurality of second rollers 130 together.
第一滾輪旋轉驅動器(不顯示)轉動第一滾輪120，因此第一滾輪旋轉驅動器轉動皮帶140。皮帶140纏繞於第一滾輪120及第二滾輪130上。第一滾輪旋轉驅動器可包括：馬達，提供旋轉動力以轉動第一滾輪120；及動力轉移部件，以將旋轉動力由馬達轉移至第一滾輪120。此類配置可由該領域熟悉技藝者容易地配置，因此此類配置之詳細說明將省略。The first roller rotation drive (not shown) rotates the first roller 120, so the first roller rotation drive rotates the belt 140. The belt 140 is wound around the first roller 120 and the second roller 130. The first roller rotary drive may include a motor that provides rotational power to rotate the first roller 120, and a power transfer member to transfer rotational power from the motor to the first roller 120. Such a configuration can be easily configured by those skilled in the art, and thus a detailed description of such a configuration will be omitted.
第一滾輪旋轉驅動器可經配置獨立地轉動各自第一滾輪120，或同時轉動複數個第一滾輪120。The first roller rotation drive can be configured to independently rotate the respective first roller 120 or simultaneously rotate the plurality of first rollers 120.
控制器(不顯示)控制第二滾輪移動部件，使轉移物件10在不往轉移方向A1轉移而停止時正常轉移，即使第一滾輪120之轉動狀態係轉移物件10卡在皮帶140。The controller (not shown) controls the second roller moving member to normally shift the transfer object 10 when it is not moved to the transfer direction A1, even if the rotation state of the first roller 120 is that the transfer object 10 is caught on the belt 140.
轉矩感測器提供給第一滾輪旋轉驅動器以感測第一滾輪旋轉驅動器之轉矩。在轉移物件10不碰撞皮帶140的狀態下，無阻礙皮帶140轉動之因素，因此皮帶140可被該第一滾輪旋轉驅動器之額定轉矩轉動。然而，如第4圖(a)所示，在轉移物件10碰撞皮帶140並於皮帶140卡住且停止之狀態下，皮帶140之轉動受阻礙，因此該第一滾輪旋轉驅動器轉 動皮帶140所需之轉矩增加。A torque sensor is provided to the first roller rotation drive to sense the torque of the first roller rotation drive. In the state where the transfer article 10 does not collide with the belt 140, there is no factor that hinders the rotation of the belt 140, and thus the belt 140 can be rotated by the rated torque of the first roller rotary drive. However, as shown in Fig. 4(a), in a state where the transfer object 10 collides with the belt 140 and the belt 140 is caught and stopped, the rotation of the belt 140 is hindered, so the first roller rotary drive rotates. The torque required to move the belt 140 is increased.
此時轉移物件10於皮帶140卡住且停止的狀態下，比該第一滾輪旋轉驅動器額定轉矩更大之轉矩將稱為基準轉矩。At this time, in a state where the transfer object 10 is stuck and stopped by the belt 140, a torque larger than the rated torque of the first roller rotary drive will be referred to as a reference torque.
在轉移物件10於皮帶140卡住且停止時，若轉矩感測器感測之轉矩等於或大於上述定義之基準轉矩，該控制器控制第二滾輪移動部件，使第二滾輪130往遠離轉移物件方向B2移動，如第4圖(b)所示，再使第二滾輪130往接近轉移物件方向B1移動，如第4圖(c)所示。When the transfer object 10 is stuck and stopped on the belt 140, if the torque sensed by the torque sensor is equal to or greater than the reference torque defined above, the controller controls the second roller moving component to cause the second roller 130 to Moving away from the transfer object direction B2, as shown in Fig. 4(b), the second roller 130 is moved toward the transfer object direction B1 as shown in Fig. 4(c).
關於第4圖(c)，第二滾輪130往接近轉移物件方向B1移動時，推擠轉移物件10之邊緣部分，因此轉移物件10之偏離角度受某種程度上之補償，使轉移物件10能返回轉移物件10之正常軌道，沿轉移方向A1轉移。With respect to Fig. 4(c), when the second roller 130 moves toward the transfer object direction B1, the edge portion of the transfer object 10 is pushed, so that the deviation angle of the transfer object 10 is compensated to some extent, so that the transfer object 10 can Returning to the normal track of the transfer object 10, it is transferred in the transfer direction A1.
輸入感測器160感測到轉移物件10之輸入。Input sensor 160 senses the input of transfer object 10.
透過輸入感測器160感測到轉移物件10之輸入後，控制器控制第二滾輪移動部件使第二滾輪130往接近轉移物件方向B1移動。After sensing the input of the transfer object 10 through the input sensor 160, the controller controls the second roller moving member to move the second roller 130 toward the transfer object direction B1.
可在輸入感測器160端之相對端設置輸出感測器(不顯示)提供給轉移部件110。輸出感測器感測到轉移物件10被取出後，控制器可控制第二滾輪移動部件，使第二滾輪130往遠離轉移物件方向B2移動。An output sensor (not shown) may be provided to the transfer member 110 at the opposite end of the input sensor 160 end. After the output sensor senses that the transfer object 10 is taken out, the controller can control the second roller moving member to move the second roller 130 away from the transfer object direction B2.
彈簧構件170設置於第二滾輪130藉以當該衝擊為轉移物件10碰撞第二滾輪130或皮帶140時產生，吸收衝擊。The spring member 170 is disposed on the second roller 130 to generate an impact when the impact is caused by the transfer object 10 colliding with the second roller 130 or the belt 140.
彈簧構件170彈性地促使第二滾輪130朝著轉移物 件10之方向A1被推擠，且方向橫向於轉移方向A1。轉移物件10碰撞第二滾輪130或皮帶140時，彈簧構件170之彈性往B1方向作用，朝著轉移物件10推擠第二滾輪130，因此彈簧構件170之彈性補償轉移物件10之偏離角度，從而使轉移物件10返回轉移方向A1。The spring member 170 elastically urges the second roller 130 toward the transfer object The direction A1 of the piece 10 is pushed and the direction is transverse to the transfer direction A1. When the transfer object 10 collides with the second roller 130 or the belt 140, the elasticity of the spring member 170 acts in the B1 direction, pushing the second roller 130 toward the transfer object 10, so that the elasticity of the spring member 170 compensates for the deviation angle of the transfer object 10, thereby The transfer object 10 is returned to the transfer direction A1.
根據實施例之前述配置之導引滾輪裝置包括該第二滾輪及該第一滾輪。該第二滾輪可往接近該轉移物件方向移動，而該第一滾輪用以導引該轉移物件，使該轉移物件正常轉移，從而達到防止該轉移物件於滾輪卡住且停止，即使轉移物件過度偏離於該轉移方向。The guide roller device according to the foregoing configuration of the embodiment includes the second roller and the first roller. The second roller can be moved toward the transfer object, and the first roller is used to guide the transfer object to normally transfer the transfer object, thereby preventing the transfer object from being caught and stopped on the roller, even if the transfer object is excessive Deviate from the direction of the transfer.
另外，根據實施例之該前述配置之導引滾輪裝置轉動該皮帶，以便偏離且碰撞該皮帶之該轉移物件能返回該轉移方向。該皮帶纏繞於該第一滾輪及該第二滾輪上。Further, the guide roller device of the foregoing configuration according to the embodiment rotates the belt so that the transfer object that deviates from and collides with the belt can return to the transfer direction. The belt is wound around the first roller and the second roller.
另外，根據實施例之該前述配置之導引滾輪裝置拉回該第二滾輪，在該轉移物件於該皮帶卡住且停止時，使該第二滾輪前進，以便卡住且停止在該皮帶之該轉移物件能容易地返回該轉移方向。In addition, the guide roller device of the foregoing configuration according to the embodiment pulls back the second roller, and when the transfer object is jammed and stopped, the second roller is advanced to be stuck and stopped at the belt. The transfer article can easily return to the transfer direction.
另外，根據實施例之該前述配置之導引滾輪裝置包括該彈簧構件，該彈簧構件彈性地促使該第二滾輪朝該轉移物件移動，以便碰撞該皮帶之該轉移物件能容易地返回該轉移方向。Further, the guide roller device of the foregoing configuration according to the embodiment includes the spring member that elastically urges the second roller to move toward the transfer object so that the transfer object colliding with the belt can easily return to the transfer direction .
根據本發明，該導引滾輪裝置防止該轉移物件卡住且停止在滾輪上，即使轉移物件過度偏離於該轉移方向。According to the present invention, the guide roller device prevents the transfer object from being caught and stopped on the roller even if the transfer object is excessively deviated from the transfer direction.
另外，根據本發明之導引滾輪裝置，能正常且容易 地返回該轉移方向的不止有偏離且碰撞該皮帶之該轉移物件，也包含卡住且停在該皮帶上之轉移物件。In addition, the guide roller device according to the present invention can be normal and easy Returning the transfer object in the direction of the transfer that does not only deviate and collide with the belt, but also includes the transfer object that is stuck and parked on the belt.
雖然茲顯示及描述本發明之少數模範實施例，該領域熟悉技藝將理解，該等實施例可在不背離本發明之原則及精神下做變更。本發明之範圍在附加之請求項及請求項之等效物中做定義。While a few exemplary embodiments of the present invention are shown and described, it is understood that the embodiments may be modified without departing from the spirit and scope of the invention. The scope of the invention is defined by the appended claims and claims.
10‧‧‧轉移物件10‧‧‧Transfer objects
100‧‧‧導引滾輪裝置100‧‧‧guide roller device
110‧‧‧轉移部件110‧‧‧Transfer parts
120‧‧‧第一滾輪120‧‧‧First wheel
130‧‧‧第二滾輪130‧‧‧Second wheel
140‧‧‧皮帶140‧‧‧Land
160‧‧‧輸入感測器160‧‧‧Input sensor
A1‧‧‧轉移方向A1‧‧‧Transfer direction
B1‧‧‧接近轉移物件方向B1‧‧‧Close to the direction of the transfer object
B2‧‧‧遠離轉移物件方向B2‧‧‧ away from the direction of the transfer object
Claims (3)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020120091910A KR101201702B1 (en) | 2012-08-22 | 2012-08-22 | Guide Roller Apparatus |
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| Publication Number | Publication Date |
|---|---|
| TW201409597A TW201409597A (en) | 2014-03-01 |
| TWI460808B true TWI460808B (en) | 2014-11-11 |
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| Application Number | Title | Priority Date | Filing Date |
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| TW102129517A TWI460808B (en) | 2012-08-22 | 2013-08-16 | Guide roller apparatus |
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| Country | Link |
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| JP (1) | JP5459748B2 (en) |
| KR (1) | KR101201702B1 (en) |
| CN (1) | CN103625876B (en) |
| TW (1) | TWI460808B (en) |
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| CN103787027B (en) * | 2014-02-12 | 2016-12-21 | 北京京东方显示技术有限公司 | Guide wheel assemblies, transporter and the method preventing the broken angle of glass substrate generation |
| CN104477634A (en) * | 2014-11-28 | 2015-04-01 | 苏州晟成光伏设备有限公司 | Guide structure of final inspection blanking device |
| CN104528312B (en) * | 2015-01-04 | 2016-12-14 | 东晶锐康晶体（成都）有限公司 | A kind of lift-launch machine finished product material tray fixing device |
| KR101833883B1 (en) * | 2016-06-21 | 2018-03-05 | (주)소닉스 | Pressure roller for curved display panel manufacturing device |
| KR102036066B1 (en) * | 2019-06-06 | 2019-11-26 | 이순선 | Multifunctional workbench |
| CN111591684B (en) * | 2020-05-20 | 2023-09-19 | 徐州鑫路达配送服务有限公司 | Conveyer belt baffle |
| JP7350029B2 (en) * | 2021-06-15 | 2023-09-25 | キヤノントッキ株式会社 | Transport equipment and film forming equipment |
| JP7480768B2 (en) * | 2021-11-11 | 2024-05-10 | 株式会社ダイフク | Transported object position adjustment device |
| CN114935842A (en) * | 2022-06-17 | 2022-08-23 | 广东江粉高科技产业园有限公司 | Novel Mylar pressing roller jig process |
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| TW200848345A (en) * | 2007-03-26 | 2008-12-16 | Fujifilm Corp | Web guide roller, web guide device, and method for guiding web |
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| JPH06166422A (en) * | 1992-12-01 | 1994-06-14 | Sony Corp | Automatic centering device |
| NO305359B1 (en) | 1996-05-31 | 1999-05-18 | Techno Track As | Belt control unit for centering conveyor belts, and method of controlling a conveyor belt when loading |
| JP2001261135A (en) * | 2000-03-24 | 2001-09-26 | Kohan Kogyo Kk | Carrier for tube-like body, carrying method for tube-like body, and repair device and repair method for seam welded part of welded can |
| BRPI0403179A (en) * | 2003-08-01 | 2005-05-24 | Will E C H Gmbh & Co | Apparatus for driving objects transversely to their original transport direction |
| JP5507089B2 (en) * | 2009-02-02 | 2014-05-28 | キヤノンマシナリー株式会社 | Wafer ring transfer device |
| JP2011219246A (en) * | 2010-04-13 | 2011-11-04 | Sharp Corp | Cassette carrying device and carrying method for cassette |
| CN202238202U (en) * | 2011-07-30 | 2012-05-30 | 三木控股集团有限公司 | Energy saving system of paper shredder |
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2012
- 2012-08-22 KR KR1020120091910A patent/KR101201702B1/en not_active IP Right Cessation
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2013
- 2013-08-14 JP JP2013168723A patent/JP5459748B2/en not_active Expired - Fee Related
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPS4835819B1 (en) * | 1968-08-02 | 1973-10-31 | ||
| EP0842760A2 (en) * | 1996-07-12 | 1998-05-20 | Bridgestone Corporation | Conveyor assembly for strip material |
| TW200848345A (en) * | 2007-03-26 | 2008-12-16 | Fujifilm Corp | Web guide roller, web guide device, and method for guiding web |
Also Published As
| Publication number | Publication date |
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| CN103625876B (en) | 2015-06-03 |
| JP5459748B2 (en) | 2014-04-02 |
| CN103625876A (en) | 2014-03-12 |
| KR101201702B1 (en) | 2012-11-15 |
| JP2014040328A (en) | 2014-03-06 |
| TW201409597A (en) | 2014-03-01 |
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