TWI455870B - 臭氧氣體供給系統 - Google Patents

臭氧氣體供給系統 Download PDF

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Publication number
TWI455870B
TWI455870B TW100120508A TW100120508A TWI455870B TW I455870 B TWI455870 B TW I455870B TW 100120508 A TW100120508 A TW 100120508A TW 100120508 A TW100120508 A TW 100120508A TW I455870 B TWI455870 B TW I455870B
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TW
Taiwan
Prior art keywords
ozone
gas
nitrogen
free
supply system
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TW100120508A
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English (en)
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TW201238888A (en
Inventor
Shinichi Nishimura
Yoichiro Tabata
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Toshiba Mitsubishi Elec Inc
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Publication of TW201238888A publication Critical patent/TW201238888A/zh
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Publication of TWI455870B publication Critical patent/TWI455870B/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J12/00—Chemical processes in general for reacting gaseous media with gaseous media; Apparatus specially adapted therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/24—Stationary reactors without moving elements inside
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/10—Preparation of ozone
    • C01B13/11—Preparation of ozone by electric discharge
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2201/00—Preparation of ozone by electrical discharge
    • C01B2201/60—Feed streams for electrical dischargers
    • C01B2201/64—Oxygen
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2201/00—Preparation of ozone by electrical discharge
    • C01B2201/90—Control of the process

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)

Claims (6)

  1. 一種臭氧氣體供給系統，係控制氣體流量、濃度且將臭氧氣體分別供給至複數個臭氧處理裝置之臭氧氣體供給系統，具備：使用氮添加量在1000ppm以下之高純度氧原料氣體之複數個無添加氮之臭氧產生單元、前述複數之無添加氮之臭氧產生單元具備：無添加氮之臭氧產生器，係在放電面塗佈用以產生臭氧之光觸媒物質而產生臭氧者；及臭氧電源，係控制供給至前述無添加氮之臭氧產生器的電力者；及質量流動控制器(MFC)，係控制輸入前述無添加氮之臭氧產生器的原料氣體之流量者；及自動壓力控制器(APC)，係自動控制前述無添加氮之臭氧產生器內的壓力之內部壓力者；及臭氧濃度計，係檢測由前述無添加氮之臭氧產生器所輸出臭氧氣體的臭氧濃度值者；及臭氧控制部，係用預定之設定電量驅動前述臭氧電源作為初期動作，且在預定時間後用前述臭氧濃度計檢測臭氧濃度，並依據此臭氧濃度與預定之臭氧濃度之比較結果，對前述臭氧電源所供給之電力進行PID控制者；前述臭氧氣體供給系統復具有： 臭氧氣體輸出流量管理單元，係根據由前述複數無添加氮之臭氧產生單元內的複數個前述無添加氮之臭氧產生器輸出之複數之臭氧氣體，藉由設置在內部之複數個臭氧氣體控制閥之開閉動作，以單一或複數組合之前述複數之臭氧輸出，而選擇性的輸出至前述複數臭氧處理裝置中之任意臭氧處理裝置之可實行臭氧氣體輸出流量控制者；臭氧輸出流量管理單元控制部，係根據來自前述複數臭氧處理裝置之臭氧氣體處理事件訊號，控制前述複數個無添加氮之臭氧產生單元個別之前述臭氧氣體的輸出內容，對前述臭氧氣體輸出流量管理單元進行前述臭氧氣體輸出流量的控制者；及至少一個水分濾除器以去除由預定之原料氣體供給口供給之原料氣體所含之微量水分，且將氣體分別供給至前述無添加氮之臭氧產生單元者。
  2. 如申請專利範圍第1項所述之臭氧氣體供給系統，其中，在原料氣體通過前述至少一個水分濾除器前係含有3000ppb以上的水分時，前述至少一個水分濾除器具有將前述原料氣體內之水分降低到300ppb以下的水分去除能力者。
  3. 如申請專利範圍第1項所述之臭氧氣體供給系統，其中，復具有至少一個原料氣體用氣體過濾器，將由預定之原料氣體供給口供給之原料氣體所含之不純物氣體去除，而將氣體分別供給至前述無添加氮之臭氧產生單 元者。
  4. 如申請專利範圍第1項所述之臭氧氣體供給系統，其中，前述複數個臭氧氣體控制閥包含可藉電或空氣壓力使之開閉之電動閥或空壓閥；前述臭氧氣體輸出流量管理單元控制部係輸出前述控制訊號，使分別供給至前述複數臭氧處理裝置之臭氧流量、臭氧濃度成為預定值者。
  5. 如申請專利範圍第1項所述之臭氧氣體供給系統，其中，前述複數無添加氮之臭氧產生單元，係分別呈現將前述無添加氮之臭氧產生器、前述臭氧電源、前述MFC、前述APC、前述臭氧濃度計整合為一單位之整套化構造者。
  6. 如申請專利範圍第1項所述之臭氧氣體供給系統，其中，前述臭氧氣體輸出流量管理單元控制部係具備以下之安全停止功能者：當前述複數無添加氮之臭氧產生單元之任一者被檢測出異常停止或漏水時，即停止對應之前述無添加氮之臭氧產生單元，以及系統整體檢測出排氣異常、臭氧洩漏異常時，即停止全部之複數個無添加氮之臭氧產生單元者。
TW100120508A 2011-03-24 2011-06-13 臭氧氣體供給系統 TWI455870B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2011/057076 WO2012127670A1 (ja) 2011-03-24 2011-03-24 オゾンガス供給システム

Publications (2)

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TW201238888A TW201238888A (en) 2012-10-01
TWI455870B true TWI455870B (zh) 2014-10-11

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Country Status (7)

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US (1) US8980189B2 (zh)
EP (2) EP3173377B1 (zh)
JP (1) JP5588974B2 (zh)
KR (1) KR101522482B1 (zh)
CN (1) CN103459307B (zh)
TW (1) TWI455870B (zh)
WO (1) WO2012127670A1 (zh)

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EP3173377B1 (en) * 2011-03-24 2020-08-19 Toshiba Mitsubishi-Electric Industrial Systems Corporation Ozone gas supply system
WO2012140747A1 (ja) 2011-04-13 2012-10-18 東芝三菱電機産業システム株式会社 窒素添加レス・オゾン発生ユニット及びオゾンガス供給システム
JP6286232B2 (ja) * 2014-02-28 2018-02-28 日野自動車株式会社 オゾン発生装置
US11466366B2 (en) * 2014-10-29 2022-10-11 Toshiba Mitsubishi—Electric Industrial Systems Corporation Electric discharge generator and power supply device of electric discharge generator
CN104990885A (zh) * 2015-07-08 2015-10-21 安徽蓝盾光电子股份有限公司 一种便携式高浓度臭氧校准源
KR102266253B1 (ko) * 2016-12-19 2021-06-18 도시바 미쓰비시덴키 산교시스템 가부시키가이샤 가스 발생 장치
EP3422124A1 (en) 2017-06-30 2019-01-02 SUEZ Groupe Method for controlling an ozone generating machine
US11505463B2 (en) * 2017-08-09 2022-11-22 Toshiba Mitsubishi-Electric Industrial Systems Corporation Ozone gas usage system
CN108890529B (zh) * 2018-07-25 2023-06-23 浙江工业大学 光催化钴基合金加工控制***及控制方法
FI13058Y1 (fi) * 2019-02-18 2021-11-22 Outotec Finland Oy Reaktorijärjestelmä
KR102206352B1 (ko) * 2019-03-29 2021-01-22 이승철 오존 발생 장치
CN112245642B (zh) * 2020-09-28 2021-11-30 商丘市龙兴制药有限公司 一种医疗制药车间的智能臭氧空气消毒机
CN112749483B (zh) * 2020-12-28 2023-06-06 北方工业大学 建立放电室模型的方法、装置、电子设备及存储介质
CN112390345B (zh) * 2021-01-19 2021-04-20 山东龙安泰环保科技有限公司 一种污水臭氧催化氧化处理装置
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KR102529051B1 (ko) * 2022-09-01 2023-05-04 주식회사 엔비인사이트 오존 생성기의 구동 제어시스템 및 그 제어방법

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Also Published As

Publication number Publication date
US20140017133A1 (en) 2014-01-16
EP2690062B1 (en) 2017-08-09
KR20130118984A (ko) 2013-10-30
JP5588974B2 (ja) 2014-09-10
KR101522482B1 (ko) 2015-05-21
WO2012127670A1 (ja) 2012-09-27
EP2690062A4 (en) 2014-10-15
CN103459307A (zh) 2013-12-18
EP3173377B1 (en) 2020-08-19
JPWO2012127670A1 (ja) 2014-07-24
EP2690062A1 (en) 2014-01-29
TW201238888A (en) 2012-10-01
CN103459307B (zh) 2016-03-30
US8980189B2 (en) 2015-03-17
EP3173377A1 (en) 2017-05-31

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