TWI454681B - Vibration testing machine - Google Patents

Vibration testing machine Download PDF

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TWI454681B
TWI454681B TW098115077A TW98115077A TWI454681B TW I454681 B TWI454681 B TW I454681B TW 098115077 A TW098115077 A TW 098115077A TW 98115077 A TW98115077 A TW 98115077A TW I454681 B TWI454681 B TW I454681B
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Taiwan
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roller
roller unit
linear motion
groove
motion converter
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TW098115077A
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Chinese (zh)
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TW200946891A (en
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Sigeru Matsumoto
Hiroshi Miyashita
Kazuhiro Murauchi
Masanobu Hasegawa
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Kokusai Keisokuki Kk
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M7/00Vibration-testing of structures; Shock-testing of structures
    • G01M7/02Vibration-testing by means of a shake table
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M7/00Vibration-testing of structures; Shock-testing of structures
    • G01M7/02Vibration-testing by means of a shake table
    • G01M7/027Specimen mounting arrangements, e.g. table head adapters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/32Investigating strength properties of solid materials by application of mechanical stress by applying repeated or pulsating forces
    • G01N3/34Investigating strength properties of solid materials by application of mechanical stress by applying repeated or pulsating forces generated by mechanical means, e.g. hammer blows
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0001Type of application of the stress
    • G01N2203/0005Repeated or cyclic

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Transmission Devices (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)

Description

振動試驗裝置Vibration test device

本發明是關於一種振動試驗裝置,其利用直動變換器將馬達所產生的往復旋轉運動變換成直線往復運動,且以此直線往復運動使得被檢物振動。The present invention relates to a vibration test apparatus which converts a reciprocating rotational motion generated by a motor into a linear reciprocating motion by a linear motion converter, and linearly reciprocates the object to vibrate.

作為在被檢物(工件)上施加拉伸、壓縮、彎曲荷重等的試驗裝置,已知的是如日本特開平6-129969號所記載般,利用伺服馬達以驅動本身是一種直動變換器的滾珠螺桿機構。這個試驗裝置,是將滾珠螺桿連結於伺服馬達的旋轉軸,並將十字頭(cross head)(可動工作台)裝設於與滾珠螺桿相卡合的滾珠螺帽,藉由伺服馬達的驅動使得滾珠螺桿旋轉,並將荷重施加於被裝設在十字頭與固定端的工件上。As a test apparatus for applying a tensile force, a compression, a bending load, and the like to a test object (workpiece), it is known that a servo motor is used to drive itself as a linear motion converter as described in Japanese Patent Laid-Open No. Hei 6-129969. Ball screw mechanism. This test device is a rotating shaft that connects a ball screw to a servo motor, and a cross head (movable table) is mounted on a ball nut that engages with a ball screw, and is driven by a servo motor. The ball screw rotates and applies a load to the workpiece mounted on the crosshead and the fixed end.

在這種試驗裝置中,當在周期性地切換伺服馬達的旋轉方向的同時對其進行驅動時,能夠使得十字頭在沿著滾珠螺桿的方向上振動。是故,藉由將工件固定於十字頭上,並如上述般地使得十字頭振動,便能夠進行使得工件振動的振動試驗。In such a test apparatus, when the servo motor is periodically driven while being rotated, the crosshead can be made to vibrate in the direction along the ball screw. Therefore, by fixing the workpiece to the crosshead and vibrating the crosshead as described above, it is possible to perform a vibration test for vibrating the workpiece.

然而,在如上述般地使用滾珠螺桿機構作為直動變換器的場合下,特別是當利用約數Hz的較長周期且大的加速度振幅使得工件振動時,由於滾珠螺桿機構的滾珠與滾珠之間的衝撞等,釘狀的衝擊荷重會施加於工件上。當這種衝擊荷重施加於工件時,工件會呈現非預期的舉動(例如:利用衝擊荷重而在工件內部發生缺陷)的可能性。是故,使用滾珠螺桿機構作為直動變換器的振動試驗裝置,不能夠使用在進行以長周期且大加速度振幅使得工件振動般的振動試驗之情況。However, in the case where the ball screw mechanism is used as the linear motion converter as described above, particularly when the workpiece is vibrated by using a long period of about several Hz and a large acceleration amplitude, due to the ball and the ball between the ball screw mechanism The impact load of the nail is applied to the workpiece. When such an impact load is applied to the workpiece, the workpiece may exhibit an unintended behavior (eg, the use of an impact load to create a defect inside the workpiece). Therefore, the ball screw mechanism is used as the vibration test device of the linear motion converter, and it is not possible to use a vibration test in which the workpiece is vibrated by a long period and a large acceleration amplitude.

本發明是為了解決上述目的而設計的。亦即,本發明的目的在於提供一種振動試驗裝置,能以在長周期且大加速度振幅下進行使得工件振動的振動試驗。The present invention has been devised to solve the above object. That is, an object of the present invention is to provide a vibration test apparatus capable of performing a vibration test for vibrating a workpiece under a long period and a large acceleration amplitude.

為了達成上述的目的,本發明的實施形態的振動試驗裝置中,直動變換器具備:直動變換器骨架,固定於振動試驗裝置的骨架;輸入軸,其可自由旋轉地支撐於直動變換器骨架,並與伺服馬達的旋轉軸相連結;方螺紋,形成於輸入軸的外周面的至少一部分;滾子(roller),具有抵接於方螺紋的螺紋側面(flank)的圓筒面;滾子單元,植設了旋轉軸,旋轉軸藉由大致整體被收容於方螺紋的谷間的圓筒滾子軸承來對滾子支撐成滾子可自由旋轉;軌條,固定於直動變換器骨架,可使得滾子單元沿著方螺紋的軸方向自由滑動地直進滑動;及輸出軸,直接或間接地連結於滾子單元,以輸出軸之上端支撐可動工作台;其中,伴隨著輸入軸的旋轉,與方螺紋相螺合的滾子沿著方螺紋的螺紋溝而移動,滾子單元沿著前述軌條直進運動,輸出軸隨著這些動作亦直進運動而使得可動工作台上下動。In order to achieve the above object, in the vibration test apparatus according to the embodiment of the present invention, the linear motion converter includes: a linear motion converter frame fixed to a skeleton of the vibration testing device; and an input shaft rotatably supported by the linear motion conversion a skeleton that is coupled to a rotating shaft of the servo motor; a square thread formed on at least a portion of an outer peripheral surface of the input shaft; and a roller having a cylindrical surface abutting a threaded side of the square thread; The roller unit is provided with a rotating shaft, and the rotating shaft is supported by the cylindrical roller bearing which is substantially integrally received between the valleys of the square threads to support the roller to be freely rotatable; the rail is fixed to the linear motion converter a skeleton that allows the roller unit to slide straightly in sliding along the axial direction of the square thread; and an output shaft that is directly or indirectly coupled to the roller unit to support the movable table at the upper end of the output shaft; wherein, along with the input shaft Rotating, the roller screwed with the square thread moves along the thread groove of the square thread, the roller unit moves straight along the aforementioned rail, and the output shaft moves straight along with these actions. Movable vertically movable table.

在本發明的實施形態的振動試驗裝置中,如上述般具有作為方螺紋的進給螺紋、以及與此方螺紋的山的螺紋側面相抵接的滾子,當使得方螺紋旋轉時,滾子沿著方螺紋的谷而轉動,活動塊則上下動。如此,由於是藉由被可旋轉地支撐的滾子以驅動輸出軸,因此即使是在切換方螺紋的旋轉方向以進行振動試驗的場合下,也不會有釘狀的干擾被輸入至活動塊及輸出軸的情形。因此,可以在長周期且大加速度振幅下進行使得工件振動的振動試驗。此外,由於以可相對於滾子的軸而旋轉的方式支撐滾子的圓筒面的軸承的大致整體是被收容於方螺紋的谷中,因此在軸承上主要施加的是徑向方向的荷重,而幾乎不施加彎曲荷重。因此,根據本發明的實施形態的結構,利用可充分地承受徑向方向的大荷重的圓筒滾子軸承,便能夠使得滾子平順地旋轉。如此,根據本發明的實施形態,便能夠實現可以在長周期且大加速度振幅下進行使得工件振動的振動試驗的振動試驗裝置。In the vibration test apparatus according to the embodiment of the present invention, as described above, the feed screw as a square thread and the roller abutting against the thread side surface of the mountain of the square thread, when the square thread is rotated, the roller edge Rotate the valley of the square thread, and move the block up and down. In this way, since the output shaft is driven by the rotatably supported roller, even in the case where the vibration direction of the square thread is switched to perform the vibration test, no nail-like interference is input to the movable block. And the case of the output shaft. Therefore, the vibration test for vibrating the workpiece can be performed under a long period and a large acceleration amplitude. Further, since substantially the entire bearing that supports the cylindrical surface of the roller so as to be rotatable relative to the axis of the roller is housed in the valley of the square thread, the bearing in the radial direction is mainly applied to the bearing. And almost no bending load is applied. Therefore, according to the structure of the embodiment of the present invention, the roller can be smoothly rotated by the cylindrical roller bearing which can sufficiently withstand the large load in the radial direction. As described above, according to the embodiment of the present invention, it is possible to realize a vibration test apparatus which can perform a vibration test for vibrating a workpiece under a long period and a large acceleration amplitude.

此外,較佳為,結構的配置為具有複數個滾子,被包含於複數個滾子中的二個滾子被配置成夾持方螺紋的山。Further, preferably, the structure is configured to have a plurality of rollers, and the two rollers included in the plurality of rollers are configured to hold the square-threaded mountain.

較佳為,方螺紋是多條螺桿。為了在高速下使得工件振動,所期望者為加大導程(lead)以增大相對於伺服馬達的旋轉角度的衝程量。同時,為了更為強固地支撐工作台,所期望的是使用大致等角地(例如每180°)被配置在方螺紋的圓周方向上的複數條軌條以及與各軌條相對應的複數個滾子,在此場合下,當減小方螺紋的間距(pitch)時,便能夠減小一條軌條與其以外的軌條的滾子的方螺紋的軸方向上的位置的差。由於此位置的差越小便越能夠縮短方螺紋的長度,因此能夠將振動試驗裝置小型化。在本發明的實施形態中,如上述般,使方螺紋成為多條螺紋,並縮小相對於導程的間距。因此,可以在高速下使得工件振動,並強固地支撐工作台,且實現小型的振動試驗裝置。Preferably, the square thread is a plurality of screws. In order to vibrate the workpiece at high speed, it is desirable to increase the lead amount to increase the stroke amount with respect to the rotation angle of the servo motor. Meanwhile, in order to support the table more strongly, it is desirable to use a plurality of rails arranged substantially equiangularly (for example, every 180°) in the circumferential direction of the square threads and a plurality of rollers corresponding to the respective rails. In this case, when the pitch of the square threads is reduced, the difference in the position in the axial direction of the square threads of the rollers of one of the rails and the rails other than the rails can be reduced. Since the length of the square thread can be shortened as the difference between the positions is smaller, the vibration test apparatus can be downsized. In the embodiment of the present invention, as described above, the square threads are formed into a plurality of threads, and the pitch with respect to the lead is reduced. Therefore, the workpiece can be vibrated at a high speed, and the table can be strongly supported, and a small vibration test device can be realized.

此外,結構中更具有將一對滾子向此山增強以夾持方螺紋的山的增強手段,此時方螺紋的山是從上下兩方被增強,因此可防止山的彈性變形。是故,因為山的彈性變形所引起非預期的荷重施加於滾子及輸出軸的情形則不會發生。In addition, the structure further has a reinforcing means for reinforcing a pair of rollers to the mountain to clamp the square thread. At this time, the mountain of the square thread is reinforced from the upper and lower sides, thereby preventing elastic deformation of the mountain. Therefore, it does not occur because the unintended load caused by the elastic deformation of the mountain is applied to the roller and the output shaft.

此外,較佳為,滾子單元具有被形成於一對滾子之間的開槽溝,增強手段是藉由調整開槽溝的間隔,而可調整一對滾子的間隔以及將該對滾子向前述方螺紋的山增強的荷重。舉例來說,增強手段具有:第一貫通孔,從滾子單元的一端向開槽溝而穿孔;第二貫通孔,從滾子單元的一端向開槽溝而穿孔,在內周形成有母螺紋;母螺紋孔,隔著開槽溝而與第一貫通孔相向,朝向滾子單元的另一端而延伸;第一螺栓,通過第一貫通孔而被螺入母螺紋孔;及第二螺栓,被螺入第二貫通孔;其中,第一螺栓的頭部壓迫滾子單元的一端以將縮減開槽溝的寬度的方向上的荷重施加於該滾子單元,並且第二螺栓的前端部壓迫開槽溝以將增加開槽溝的寬度的方向上的荷重施加於滾子單元。Further, preferably, the roller unit has a groove formed between the pair of rollers, and the reinforcing means adjusts the interval of the pair of rollers by adjusting the interval of the groove and presses the pair The load of the mountain to the aforementioned square thread is enhanced. For example, the reinforcing means has: a first through hole pierced from one end of the roller unit to the groove; and a second through hole pierced from one end of the roller unit to the groove, and a mother is formed on the inner circumference a female threaded hole that faces the first through hole and extends toward the other end of the roller unit via the grooved groove; the first bolt is screwed into the female threaded hole through the first through hole; and the second bolt a second through hole is screwed into the second through hole; wherein a head of the first bolt presses one end of the roller unit to apply a load in a direction in which the width of the groove is reduced to the roller unit, and a front end portion of the second bolt The groove is pressed to apply a load in a direction that increases the width of the groove to the roller unit.

此外,較佳為,架構成方螺紋、滾子單元及軌條收容於充滿了潤滑油的外殼(casing)本體之中。當製成這種結構時,由於能夠減低滾子與方螺紋之間的摩擦力,因此能夠使得滾子更為平順地旋轉。舉例來說,外殼本體具有:底板,形成有開口,該開口供裝設用來以可旋轉的方式支撐輸入軸的軸承;及頂板,形成有開口,該開口供裝設用來以可滑動的方式支撐輸出軸的軸承;其中,在底板的開口與輸入軸之間、以及頂板的開口與輸出軸之間,設有用以防止潤滑油漏出的油封。Further, it is preferable that the frame-constituting square thread, the roller unit, and the rail are housed in a casing body filled with lubricating oil. When such a structure is manufactured, since the friction between the roller and the square thread can be reduced, the roller can be rotated more smoothly. For example, the housing body has a bottom plate formed with an opening for mounting a bearing for rotatably supporting the input shaft, and a top plate formed with an opening for slidable A bearing for supporting the output shaft; wherein an oil seal for preventing leakage of lubricating oil is provided between the opening of the bottom plate and the input shaft, and between the opening of the top plate and the output shaft.

此外,較佳為,滾子單元具有:活動塊,與軌條相卡合而可沿著軌條移動;活動塊具有:凹部,圍繞軌條;溝,沿著活動塊的移動方向形成在凹部;避開路,形成於活動塊的內部,連繫溝的移動方向兩端以與溝形成閉回路;及複數個滾珠,循環於閉回路並且在位於溝之時與軌條抵接。當製成這種結構時,便可以使得活動塊不搖晃且平順地沿著軌條而移動。In addition, preferably, the roller unit has: a movable block that is engaged with the rail to move along the rail; the movable block has: a recess surrounding the rail; and a groove formed in the recess along the moving direction of the movable block The road is formed inside the movable block, and both ends of the moving groove form a closed loop with the groove; and a plurality of balls circulate in the closed loop and abut against the rail when the groove is located. When such a structure is made, the movable block can be moved without moving and smoothly along the rail.

特別是,較佳為,活動塊形成有四個前述閉回路;分別被配置於四個閉回路之中的二個閉回路的溝的滾珠是相對於活動塊的徑向方向而具有約±45°的接觸角,分別被配置於其他的二個閉回路的溝的滾珠是相對於活動塊的逆徑向方向而具有約±45°的接觸角。當製成這種結構時,活動塊能夠承受徑向方向、逆徑向方向及橫方向各方向的大荷重,即使從方螺紋經由滾子施加了上述方向的大荷重於活動塊,活動塊也不至於破損,此外,還可沿著軌條而平順地移動。In particular, it is preferable that the movable block is formed with four closed loops; the balls of the two closed loops respectively disposed in the four closed loops have about ±45 with respect to the radial direction of the movable block. The contact angle of °, the balls respectively disposed in the other two closed loop grooves have a contact angle of about ±45° with respect to the reverse radial direction of the movable block. When such a structure is formed, the movable block can withstand a large load in the radial direction, the reverse radial direction, and the lateral direction, even if a large load in the above direction is applied from the square thread via the roller to the movable block, the movable block is also It is not damaged, and it can also move smoothly along the rails.

以下使用圖式以詳細說明本發明的實際形態。第一圖是本實施形態的振動試驗裝置的前視圖。本實施形態的振動試驗裝置能夠在被檢物(工件)上反復地施加拉伸、壓縮、或彎曲荷重,或是使得工件振動。另外,在以下的說明中,若未於圖式特別指定,所謂「上」、「下」、「左」、「右」、「前方」、「裡面」的方向是將第一圖的前視圖定為基準。The actual form of the present invention will be described in detail below using the drawings. The first figure is a front view of the vibration test apparatus of the present embodiment. In the vibration test apparatus of the present embodiment, the tensile, compressive, or bending load can be repeatedly applied to the test object (workpiece), or the workpiece can be vibrated. In addition, in the following description, if it is not specified in the drawings, the directions of "upper", "lower", "left", "right", "front", and "inside" are the front view of the first figure. Set as the benchmark.

如第一圖所示,本實施形態的試驗裝置1具有:在工件W上施加荷重或使得工件W振動的裝置本體100、用以驅動裝置本體100的伺服馬達120的伺服放大器200、以及控制伺服放大器200的控制部300。裝置本體100具有:骨架110、伺服馬達120、直動變換器400、測力器(load cell)140、位移感測器150、轉接器(adapter)181及182。As shown in the first figure, the test apparatus 1 of the present embodiment has a device body 100 that applies a load on the workpiece W or vibrates the workpiece W, a servo amplifier 200 for driving the servo motor 120 of the apparatus body 100, and a control servo. The control unit 300 of the amplifier 200. The apparatus body 100 has a skeleton 110, a servo motor 120, a linear motion converter 400, a load cell 140, a displacement sensor 150, adapters 181 and 182.

直動變換器400是用來將伺服馬達120的旋轉軸的旋轉運動變換成直進方向的運動。直動變換器400被固定於骨架110的工作台部111的上面,並與伺服馬達120的旋轉軸相連結。當驅動伺服馬達120時,設於直動變換器400的上部的可動工作台130會相對於工作台部111而上下動。這個可動工作台130之上裝設了用以從下方保持工件W的下部轉接器181。The linear motion converter 400 is a motion for converting the rotational motion of the rotational shaft of the servo motor 120 into the straight forward direction. The linear motion converter 400 is fixed to the upper surface of the table portion 111 of the bobbin 110 and coupled to the rotation shaft of the servo motor 120. When the servo motor 120 is driven, the movable table 130 provided at the upper portion of the linear motion converter 400 moves up and down with respect to the table portion 111. A lower adapter 181 for holding the workpiece W from below is mounted on the movable table 130.

從骨架110的頂部112的下面,垂吊著上部載台160。此外,工作台部111的上面,設有延伸於圖中上方向的一對引導棒171。上部載台160(載台:stage)在左右方向端部形成有穿孔於上下方向的貫通孔161,各個引導棒171貫通於這個貫通孔161。因此,上部載台160可沿著引導棒171在上下方向上移動。此外,藉由鎖緊設於上部載台160而未顯示的螺栓,便可縮小貫通孔161的內徑,藉此,便能夠在引導棒171固定上部載台160。From the lower surface of the top portion 112 of the skeleton 110, the upper stage 160 is suspended. Further, a pair of guide bars 171 extending in the upper direction in the drawing are provided on the upper surface of the table portion 111. The upper stage 160 (stage: stage) has a through hole 161 that is perforated in the vertical direction at the end portion in the left-right direction, and each of the guide bars 171 penetrates through the through hole 161. Therefore, the upper stage 160 can move in the up and down direction along the guide bar 171. Further, by locking the bolts not provided on the upper stage 160, the inner diameter of the through hole 161 can be reduced, whereby the upper stage 160 can be fixed to the guide bar 171.

上部載台160的下面,裝設了用以從上方保持工件W的上部轉接器182。在本實施形態中,藉由在於上部轉接器182與下部轉接器181之間保持工件W的狀態下使得可動工作台130上下動,便能夠在工件W上施加荷重。另外,上部及下部轉接器182、181是可分別相對於上部載台160、可動工作台130而拆裝,並可因應施加於工件W的荷重的種類而選擇適切的轉接器。第一圖由於是在工件W上施加拉伸荷重的結構,因此上部轉接器182及下部轉接器181是用以握持工件W的夾盤(chuck)。在將壓縮荷重施加於工件W之際,為了要能夠從上下方向壓迫以壓縮工件W,需使用上部轉接器182的下面及下部轉接器181的上面皆為平面狀的轉接器。在進行三點彎曲試驗之際,需將壓縮試驗用的轉接器與三點彎曲用的治具組合使用。On the lower surface of the upper stage 160, an upper adapter 182 for holding the workpiece W from above is provided. In the present embodiment, the movable table 130 is moved up and down while the workpiece W is held between the upper adapter 182 and the lower adapter 181, so that a load can be applied to the workpiece W. Further, the upper and lower adapters 182 and 181 are detachably attachable to the upper stage 160 and the movable table 130, respectively, and an appropriate adapter can be selected in accordance with the type of load applied to the workpiece W. Since the first figure is a structure in which a tensile load is applied to the workpiece W, the upper adapter 182 and the lower adapter 181 are chucks for holding the workpiece W. When the compression load is applied to the workpiece W, in order to be able to compress the workpiece W from the up and down direction, it is necessary to use an adapter having a planar shape on both the lower surface of the upper adapter 182 and the upper surface of the lower adapter 181. When performing the three-point bending test, it is necessary to use the adapter for the compression test in combination with the jig for three-point bending.

在進行使得工件W振動的振動試驗的場合下,使用具有將工件W固定於可動工作台130之上的功能的下部轉接器181,而不使用上部轉接器182。這些轉接器的使用分別僅是一例,也可以使用其他種類的轉接器,此外,也可以利用其他的組合方式使用。In the case where a vibration test for vibrating the workpiece W is performed, the lower adapter 181 having a function of fixing the workpiece W to the movable table 130 is used without using the upper adapter 182. The use of these adapters is only an example, and other types of adapters may be used, or other combinations may be used.

此外,上部載台160從骨架110的頂部112藉由進給螺桿175而吊掛著。頂部112埋入了與進給螺桿175相卡合且可旋轉的螺帽173。螺帽173利用無端皮帶而與配置在頂部112的馬達172相連結,被馬達172驅動繞著進給螺桿175的軸而旋轉。此外,進給螺桿175的下端連結於固定在上部載台160的鏈節(link)174,進給螺桿175可相對於上部載台160繞著其軸而旋轉。因此,在鬆開上部載台160的螺栓而可以移動上部載台160的狀態下,利用馬達172使得螺帽173轉動,便能夠在上下方向上驅動進給螺桿175以及與此進給螺桿175相連結的上部載台160。這個功能是使用在配合工件W的尺寸以調整轉接器181與轉接器182之間的間隔之際。在調整了轉接器181與轉接器182之間的間隔之後,在進行試驗之前鎖緊螺栓以將上部載台160固定於引導棒171。Further, the upper stage 160 is hung from the top 112 of the bobbin 110 by the feed screw 175. The top portion 112 is embedded with a nut 173 that engages with the feed screw 175 and is rotatable. The nut 173 is coupled to the motor 172 disposed at the top portion 112 by an endless belt, and is driven to rotate about the axis of the feed screw 175 by the motor 172. Further, the lower end of the feed screw 175 is coupled to a link 174 fixed to the upper stage 160, and the feed screw 175 is rotatable relative to the upper stage 160 about its axis. Therefore, in a state where the upper stage 160 can be moved by loosening the bolt of the upper stage 160, the nut 173 is rotated by the motor 172, so that the feed screw 175 can be driven in the up and down direction and the feed screw 175 can be driven. The upper stage 160 is connected. This function is used when the size of the workpiece W is fitted to adjust the interval between the adapter 181 and the adapter 182. After the interval between the adapter 181 and the adapter 182 is adjusted, the bolt is locked to fix the upper stage 160 to the guide bar 171 before the test is performed.

在以上所說明的結構中,當利用轉接器181、182保持著工件W驅動伺服馬達120時,在工件W上施加拉伸、壓縮或彎曲荷重,其大小是利用測力器140來量測。此外,位移感測器150是檢測下部轉接器181的位移即工件W的變形量的感測器(例如:裝有旋轉編碼器的測微儀(dial gage))。In the above-described configuration, when the workpiece W is driven by the adapters 181, 182 to drive the servo motor 120, a tensile, compressive or bending load is applied to the workpiece W, the magnitude of which is measured by the force measuring device 140. . Further, the displacement sensor 150 is a sensor that detects the displacement of the lower adapter 181, that is, the amount of deformation of the workpiece W (for example, a dial gage equipped with a rotary encoder).

控制部300隨時將目標角度與目標角速度等輸入伺服放大器200。伺服放大器200基於控制部300所輸入的目標角度與目標角速度等而控制伺服馬達120的驅動電流。測力器140及位移感測器150的輸出被輸入至控制部300,控制部300可以基於測力器140所量測的荷重與位移感測器150所量測的可動工作台130的位移量,而設定輸入伺服放大器200的目標角度與目標角速度等。舉例來說,在固定的荷重振幅下使得工件W振動的場合下,測力器140所檢測的荷重越接近最大荷重,越減小給與伺服放大器200的目標角速度,以使最大荷重時可動工作台132的速度為0(亦即,給與伺服放大器200的目標角速度會變成0)。同樣地,基於位移感測器150的檢測結果,控制部300便能夠將可動工作台132的位移振幅、速度振幅、或加速度振幅略呈一定的目標值給與伺服放大器200。The control unit 300 inputs the target angle, the target angular velocity, and the like to the servo amplifier 200 at any time. The servo amplifier 200 controls the drive current of the servo motor 120 based on the target angle input by the control unit 300, the target angular velocity, and the like. The outputs of the load cell 140 and the displacement sensor 150 are input to the control unit 300, and the control unit 300 can measure the displacement of the movable table 130 based on the load measured by the load cell 140 and the displacement sensor 150. The target angle of the input servo amplifier 200, the target angular velocity, and the like are set. For example, in the case where the workpiece W is vibrated under a fixed load amplitude, the closer the load detected by the load cell 140 is to the maximum load, the smaller the target angular velocity given to the servo amplifier 200 is, so that the maximum load can be moved. The speed of the stage 132 is 0 (i.e., the target angular velocity given to the servo amplifier 200 becomes 0). Similarly, based on the detection result of the displacement sensor 150, the control unit 300 can give the servo amplifier 200 a target value in which the displacement amplitude, the velocity amplitude, or the acceleration amplitude of the movable table 132 is slightly constant.

以下詳細說明本實施形態的振動試驗裝置1的直動變換器400的構造。直動變換器400具備:整體略呈長方體形狀的外殼410、以及貫通此外殼410的上面並突出於上方的線性連接棒461。可動工作台130被固定於此線性連接棒(linear connecting rod)461的上端。此外,伺服馬達120的旋轉軸是經由耦接器(coupler)123而連結於直動變換器400的輸入軸420。此輸入軸420的大部分被收納於外殼410內,輸入軸420是與將旋轉運動變換成上下方向的直進運動的直動機構相連結。作為此直動機構的輸出的上下方向的運動被傳遞至線性連接棒461。因此,當驅動伺服馬達120時,線性連接棒461便會上下動。The structure of the linear motion converter 400 of the vibration testing device 1 of the present embodiment will be described in detail below. The linear motion converter 400 includes a housing 410 having a substantially rectangular parallelepiped shape as well as a linear connecting rod 461 that penetrates the upper surface of the housing 410 and protrudes upward. The movable table 130 is fixed to the upper end of the linear connecting rod 461. Further, the rotation shaft of the servo motor 120 is coupled to the input shaft 420 of the linear motion converter 400 via a coupler 123. Most of the input shaft 420 is housed in the casing 410, and the input shaft 420 is coupled to a linear motion mechanism that converts the rotational motion into a linear motion in the vertical direction. The up and down motion as the output of this linear motion mechanism is transmitted to the linear connecting rod 461. Therefore, when the servo motor 120 is driven, the linear connecting rod 461 moves up and down.

其次,使用圖式詳細說明被收納於外殼410內的直動機構的構造。第二圖是直動變換器400的前視圖,其是切斷外殼410的前方側板414F(後述)而使得外殼410的內部露出。第三圖是從右所看見的直動變換器400的側視圖,其是切斷外殼410的右側板413R(後述)而使得外殼410的內部露出。第四圖是直動變換器400的俯視圖,其是切斷外殼410的頂板412(後述)而使得外殼410的內部露出。Next, the structure of the linear motion mechanism housed in the outer casing 410 will be described in detail using the drawings. The second drawing is a front view of the linear motion converter 400 which cuts the front side plate 414F (described later) of the outer casing 410 to expose the inside of the outer casing 410. The third diagram is a side view of the linear motion converter 400 seen from the right, which cuts the right side plate 413R (described later) of the outer casing 410 to expose the inside of the outer casing 410. The fourth diagram is a plan view of the linear motion converter 400 that cuts the top plate 412 (described later) of the outer casing 410 to expose the inside of the outer casing 410.

另外,在第二圖中,是將可以旋轉方式支撐輸入軸420的上部及下部軸承451、452的周圍以剖面圖來顯示。此外,在第三圖中,是將上部及下部軸承451、452的周圍、以及線性連接棒461的油封部分以剖面圖來顯示。在第四圖中,是以虛線來顯示輸入軸420。Further, in the second drawing, the periphery of the upper and lower bearings 451 and 452 which rotatably support the input shaft 420 is shown in a cross-sectional view. Further, in the third figure, the oil seal portions of the upper and lower bearings 451, 452 and the linear connecting rod 461 are shown in cross section. In the fourth figure, the input shaft 420 is shown in dashed lines.

首先,說明外殼410的構造。外殼410是將底板411、頂板412、左側板413L(第二圖、第四圖)、右側板413R(第二圖、第四圖)、前方側板414F(第三圖、第四圖)及裡面側板414B(第三圖、第四圖)以螺栓、焊接等方式連結而做成長方體形狀。First, the configuration of the outer casing 410 will be described. The outer casing 410 is a bottom plate 411, a top plate 412, a left side plate 413L (second diagram, fourth diagram), a right side plate 413R (second diagram, fourth diagram), a front side panel 414F (third diagram, fourth diagram), and the inside. The side plates 414B (the third drawing and the fourth drawing) are connected by bolts, welding, or the like to have a rectangular parallelepiped shape.

底板411是由螺栓固定於骨架110的工作台部111。此外,底板411設有用以使得輸入軸420通過的開口411a。此外,頂板412設有:用以裝設上部軸承451的開口部412a、以及用以使得線性連接棒461通過的開口部412b(第三圖)。The bottom plate 411 is a table portion 111 that is fixed to the frame 110 by bolts. Further, the bottom plate 411 is provided with an opening 411a for passing the input shaft 420. Further, the top plate 412 is provided with an opening portion 412a for mounting the upper bearing 451, and an opening portion 412b (third diagram) for passing the linear connecting rod 461.

如第二圖所示,底板411的左右方向尺寸比右側板413R與左側板413L之間的間隔還長,底板411的左右方向兩端變成了從右側板413R及左側板413L向左右突出成凸緣狀的凸緣部411b。利用這個凸緣部411b,可經由未顯示的螺栓而將底板411固定於骨架110的工作台部111。As shown in the second figure, the horizontal direction of the bottom plate 411 is longer than the interval between the right side plate 413R and the left side plate 413L, and both ends of the bottom plate 411 in the left-right direction become convex from the right side plate 413R and the left side plate 413L to the left and right. A flange portion 411b having a flange shape. With this flange portion 411b, the bottom plate 411 can be fixed to the table portion 111 of the bobbin 110 via bolts not shown.

右側板413R及左側板413L的外表面,裝設了分別從縱深方向略中央垂直地突出的肋材415。肋材415是利用填角焊接(fillet weld)而被強固地固定於右側板413R、左側板413L及底板411。The outer surfaces of the right side plate 413R and the left side plate 413L are provided with ribs 415 that protrude perpendicularly from the center in the depth direction. The rib 415 is strongly fixed to the right side plate 413R, the left side plate 413L, and the bottom plate 411 by fillet welding.

右側板413R及左側板413L的略中央部分別形成了開口413a。這個開口部413a是在進行直動變換器400的組裝與點檢之際,被使用在進出外殼410之中。在使用振動試驗裝置1的場合下,將蓋板416以螺栓固定於右側板413R及左側板413L,藉此可閉塞此開口413a。Openings 413a are formed in the center portions of the right side plate 413R and the left side plate 413L, respectively. This opening portion 413a is used in the inlet and outlet casing 410 when assembling and checking the linear motion converter 400. When the vibration test apparatus 1 is used, the cover 416 is bolted to the right side plate 413R and the left side plate 413L, whereby the opening 413a can be closed.

其次,參照第二圖~第五圖以說明用以將輸入軸420的旋轉運動變換成線性連接棒461的上下運動的機構。另外,第五圖是第四圖的I-I剖面圖。如第二圖所示,輸入軸420的略中央部形成了公螺紋部421。這個公螺紋部421的左右方向兩側設有與公螺紋部421相卡合的一對滾子單元430L、430R。滾子單元430L、430R分別具有上部滾子431、下部滾子432、連結板433及活動塊434。上部滾子431及下部滾子432被螺栓固定於連結板433。再者,連結板433被螺栓固定於活動塊434。是故,活動塊434、連結板433、上部滾子431及下部滾子432成為一體。Next, referring to the second to fifth figures, a mechanism for converting the rotational motion of the input shaft 420 into the vertical movement of the linear connecting rod 461 will be described. In addition, the fifth drawing is an I-I cross-sectional view of the fourth figure. As shown in the second figure, a male thread portion 421 is formed at a slightly central portion of the input shaft 420. A pair of roller units 430L and 430R that are engaged with the male screw portion 421 are provided on both sides of the male screw portion 421 in the left-right direction. The roller units 430L and 430R have an upper roller 431, a lower roller 432, a coupling plate 433, and a movable block 434, respectively. The upper roller 431 and the lower roller 432 are bolted to the coupling plate 433. Furthermore, the connecting plate 433 is bolted to the movable block 434. Therefore, the movable block 434, the connecting plate 433, the upper roller 431, and the lower roller 432 are integrated.

一對活動塊434卡合於以螺栓分別固定於右側板413R及左側板413L的內壁的軌條435(第四圖)。軌條435延伸於上下方向(第二圖、第三圖),包含活動塊434的滾子單元430L、430R的移動方向僅被限定於上下方向。The pair of movable blocks 434 are engaged with the rails 435 (fourth drawings) which are respectively fixed to the inner walls of the right side plate 413R and the left side plate 413L by bolts. The rail 435 extends in the up and down direction (second diagram, third diagram), and the moving direction of the roller units 430L, 430R including the movable block 434 is limited only to the up and down direction.

其次,說明上部滾子431及下部滾子432的支撐構造。如第五圖所示,上部滾子431及下部滾子432分別具有:軸部431a、432a、以及可繞此軸部而旋轉的滾子部431b、432b。另外,如第三~五圖所示,藉由定位螺絲(set screw)436,軸部431a、432a被固定於連結板433。滾子部431b、432b與軸部431a、432a之間設有圓筒滾子軸承431c、432c,藉此,滾子部431b、432b便能夠繞著軸部431a、432a而旋轉。Next, the supporting structure of the upper roller 431 and the lower roller 432 will be described. As shown in the fifth figure, the upper roller 431 and the lower roller 432 have shaft portions 431a and 432a and roller portions 431b and 432b rotatable around the shaft portion, respectively. Further, as shown in the third to fifth figures, the shaft portions 431a and 432a are fixed to the coupling plate 433 by a set screw 436. Cylindrical roller bearings 431c and 432c are provided between the roller portions 431b and 432b and the shaft portions 431a and 432a, whereby the roller portions 431b and 432b are rotatable around the shaft portions 431a and 432a.

其次,說明公螺紋部421與滾子單元430L、430R的卡合狀態。如第二圖及第五圖所示,關於公螺紋部421,谷421b的剖面形狀略呈長方形,是所謂的方螺紋。此外,滾子部431b、432b是圓筒形,上部滾子431的滾子部431a是增強而緊貼於公螺紋部421的上側(亦即,山421a的上面側)的螺紋側面421c,下部滾子432的滾子部432a是被增強成緊貼於公螺紋部421的下側(亦即,山421a的下面側)的螺紋側面421d(後述)。亦即,各個滾子單元430L、430R的滾子部431b、432b將公螺紋部421的山421a夾住。Next, the engagement state of the male screw portion 421 and the roller units 430L and 430R will be described. As shown in the second and fifth figures, regarding the male screw portion 421, the valley 421b has a substantially rectangular cross-sectional shape and is a so-called square thread. Further, the roller portions 431b and 432b are cylindrical, and the roller portion 431a of the upper roller 431 is reinforced and closely attached to the upper side of the male screw portion 421 (that is, the upper side of the mountain 421a). The roller portion 432a of the roller 432 is a threaded side surface 421d (described later) that is reinforced to be in close contact with the lower side of the male screw portion 421 (that is, the lower surface side of the mountain 421a). That is, the roller portions 431b and 432b of the respective roller units 430L and 430R sandwich the mountain 421a of the male screw portion 421.

如前述般,滾子單元430L、430R的移動方向僅被限定於上下方向,且上部滾子431及下部滾子432的滾子部431b、432b分別緊貼於輸入軸420的公螺紋部421的螺紋側面421c、421d。因此,當驅動伺服馬達120(第一圖)使得輸入軸420旋轉時,滾子部431b、432b分別沿著公螺紋部421的螺紋側面421c、421d轉動,滾子單元430L、430R因應輸入軸420的旋轉方向而向上或下移動。As described above, the moving direction of the roller units 430L, 430R is limited only to the up-and-down direction, and the roller portions 431b, 432b of the upper roller 431 and the lower roller 432 are in close contact with the male thread portion 421 of the input shaft 420, respectively. Threaded sides 421c, 421d. Therefore, when the servo motor 120 (first drawing) is driven to rotate the input shaft 420, the roller portions 431b, 432b are respectively rotated along the thread side faces 421c, 421d of the male screw portion 421, and the roller units 430L, 430R are adapted to the input shaft 420. The direction of rotation moves up or down.

以下說明用以將滾子單元430L、430R的滾子部431b、432b按壓在公螺紋部421的螺紋側面421c、421d的增強機構。如第三圖所示,滾子單元430R的連結板433的略中央部形成有開口433a,從此開口433a向連結板433的前方側(朝向前方側板414F的方向)形成有開槽溝433b。上部滾子431的軸部431a在開槽溝433b的上側固定於連結板433,此外,下部滾子432的軸部432a在開槽溝433b的下側固定於連結板433。The reinforcing mechanism for pressing the roller portions 431b and 432b of the roller units 430L and 430R against the screw side faces 421c and 421d of the male screw portion 421 will be described below. As shown in the third figure, an opening 433a is formed in a substantially central portion of the coupling plate 433 of the roller unit 430R, and a groove 433b is formed from the opening 433a toward the front side of the coupling plate 433 (in the direction toward the front side plate 414F). The shaft portion 431a of the upper roller 431 is fixed to the coupling plate 433 on the upper side of the grooved groove 433b, and the shaft portion 432a of the lower roller 432 is fixed to the coupling plate 433 on the lower side of the grooved groove 433b.

從連結板433的上面向開槽溝433b的上面433b1設有貫通孔433c及433d。貫通孔433c及433d一起被配置於上部滾子431的軸部431a的前方側,且貫通孔433c被配置於貫通孔433d的前方側。開槽溝433b的下面433b2中與貫通孔433c相對的位置上,形成有朝向下方的孔433e。Through holes 433c and 433d are provided from the upper surface 433b1 of the connecting plate 433 facing the groove 433b. The through holes 433c and 433d are disposed on the front side of the shaft portion 431a of the upper roller 431, and the through hole 433c is disposed on the front side of the through hole 433d. A hole 433e facing downward is formed at a position facing the through hole 433c in the lower surface 433b2 of the groove 433b.

孔433e形成有母螺紋,第一螺栓437a通過貫通孔433c而被螺入孔433e。因此,當鎖緊第一螺栓437a時,連結板433增強於開槽溝433b的寬度變窄的方向。此外,貫通孔433d亦形成有母螺紋,第二螺栓437b被螺入貫通孔433d。第二螺栓437b的前端通過開槽溝433b的上面433b1而抵接於下面433b2。因此,當鎖緊第二螺栓437b時,連結板433增強於開槽溝433b的寬度變寬的方向。The hole 433e is formed with a female thread, and the first bolt 437a is screwed into the hole 433e through the through hole 433c. Therefore, when the first bolt 437a is locked, the coupling plate 433 is reinforced in a direction in which the width of the grooved groove 433b is narrowed. Further, the through hole 433d is also formed with a female screw, and the second bolt 437b is screwed into the through hole 433d. The front end of the second bolt 437b abuts against the lower surface 433b2 through the upper surface 433b1 of the grooved groove 433b. Therefore, when the second bolt 437b is locked, the coupling plate 433 is reinforced in a direction in which the width of the grooved groove 433b is widened.

在這種狀態下,如第三圖所示,藉由連結板433的上面與第一螺栓437a的頭部相抵接,而限制開槽溝433b的寬度不變寬,並且藉由開槽溝433b的下面433b2與第二螺栓437b相抵接,而限制開槽溝433b的寬度不變窄。如此,藉由調整第一及第二螺栓437a、437b的鎖緊程度來調整開槽溝433b的寬度,而能夠調整上部滾子431與下部滾子432之間的間隔。此處,當將上部滾子431的滾子部431b與下部滾子432的滾子部432b之間的間隔減小成小於輸入軸420的公螺紋部421的山421a的寬度時,便能夠利用大的增強力使得滾子部431b、432b緊貼於螺紋側面421c、421d。如此由於使得滾子部431b、432b緊貼於公螺紋部421的螺紋側面421c、421d,因此使得輸入軸420旋轉時滾子部431b、432b便不搖晃而可平順地旋轉。In this state, as shown in the third figure, by the upper surface of the connecting plate 433 abutting against the head of the first bolt 437a, the width of the grooved groove 433b is restricted to be wide, and by the groove 433b The lower surface 433b2 abuts against the second bolt 437b, and the width of the restriction groove 433b is not narrowed. In this manner, by adjusting the locking degree of the first and second bolts 437a and 437b to adjust the width of the grooved groove 433b, the interval between the upper roller 431 and the lower roller 432 can be adjusted. Here, when the interval between the roller portion 431b of the upper roller 431 and the roller portion 432b of the lower roller 432 is reduced to be smaller than the width of the mountain 421a of the male screw portion 421 of the input shaft 420, it is possible to utilize The large reinforcing force causes the roller portions 431b, 432b to abut against the thread side faces 421c, 421d. Since the roller portions 431b and 432b are brought into close contact with the screw side surfaces 421c and 421d of the male screw portion 421, the roller portions 431b and 432b can be smoothly rotated without being shaken when the input shaft 420 is rotated.

滾子單元430L的滾子部431b、432b也是利用與滾子單元430R相同的結構而增強以緊貼於輸入軸420的公螺紋部421的螺紋側面421c、421d。The roller portions 431b and 432b of the roller unit 430L are also reinforced with the same configuration as the roller unit 430R to be in close contact with the screw side faces 421c and 421d of the male screw portion 421 of the input shaft 420.

在本實施形態中,由於公螺紋部421的山421a被一對滾子431、432所夾,因此即使從其中一滾子施加荷重,公螺紋部421的山421a的變形也會被另一滾子所妨礙,其結果是山421a不易彎曲。因此,即使在大的角加速度下使得輸入軸420旋轉,也不會因為山421a的彎曲而發生滾子單元430R的位置偏移。In the present embodiment, since the mountain 421a of the male screw portion 421 is sandwiched by the pair of rollers 431 and 432, even if a load is applied from one of the rollers, the deformation of the mountain 421a of the male screw portion 421 is caused by another roll. The child is obstructed, and as a result, the mountain 421a is not easily bent. Therefore, even if the input shaft 420 is rotated at a large angular acceleration, the positional displacement of the roller unit 430R does not occur due to the bending of the mountain 421a.

如前述般,滾子部431b、432b是以相對於軸部431a、432a可旋轉的方式被圓筒滾子軸承431c、432c所支撐。圓筒滾子軸承的滾子能夠充分地承受施加於徑向方向的大的壓縮荷重,另一方面,相對於施加於徑向方向的剪切荷重,具有會因為比較小的荷重而變形或破損的特性。因此,在本實施形態中,不會有剪切方向的荷重施加於滾子。As described above, the roller portions 431b and 432b are supported by the cylindrical roller bearings 431c and 432c so as to be rotatable with respect to the shaft portions 431a and 432a. The roller of the cylindrical roller bearing can sufficiently withstand a large compressive load applied in the radial direction, and on the other hand, it is deformed or damaged due to a relatively small load with respect to the shear load applied in the radial direction. Characteristics. Therefore, in the present embodiment, the load in the shear direction is not applied to the roller.

具體上,如第五圖所示,圓筒滾子軸承431c、432c的大部分是伸入公螺紋部421的谷421b中,而大致不會有剪切荷重施加於圓筒滾子軸承431c、432c。由於僅有圓筒滾子軸承431c、432c的前端部伸入公螺紋部421的谷421b中,所以在與山421a的前端部相抵接的部分中,會有剪切荷重施加於圓筒滾子軸承431c、432c,剪切方向的大荷重會施加於滾子。另一方面,在本實施形態中,由於圓筒滾子軸承431c、432c在遍及其軸方向的略全域是與公螺紋部421的山421a相卡合,所以圓筒滾子軸承431c、432c從公螺紋部421的山421a所接受的荷重全部是徑向方向的壓縮荷重,而幾乎不會有剪切方向的荷重施加於滾子。因此,即使在滾子部431b、432b與公螺紋部421的山421a之間作用了大荷重的狀態下,由於圓筒滾子軸承431c、432c可充分地承受此大荷重,滾子部431b、432b便能夠平順地旋轉。Specifically, as shown in the fifth figure, most of the cylindrical roller bearings 431c and 432c are projected into the valley 421b of the male screw portion 421, and substantially no shear load is applied to the cylindrical roller bearing 431c. 432c. Since only the front end portion of the cylindrical roller bearings 431c and 432c protrudes into the valley 421b of the male screw portion 421, a shear load is applied to the cylindrical roller in a portion abutting the front end portion of the mountain 421a. The bearings 431c and 432c have a large load in the shear direction applied to the rollers. On the other hand, in the present embodiment, since the cylindrical roller bearings 431c and 432c are engaged with the mountain 421a of the male screw portion 421 in a substantially entire region in the axial direction thereof, the cylindrical roller bearings 431c and 432c are The load received by the mountain 421a of the male screw portion 421 is all the compression load in the radial direction, and almost no load in the shear direction is applied to the roller. Therefore, even in a state where a large load acts between the roller portions 431b and 432b and the mountain 421a of the male screw portion 421, since the cylindrical roller bearings 431c and 432c can sufficiently withstand the large load, the roller portion 431b, The 432b will rotate smoothly.

連結板433固定著棒連結塊438(第三圖、第四圖),這個棒連結塊438被線性連接棒461的下端461a所握持。以下說明線性連接棒461的握持構造。The link plate 433 is fixed with a bar joint block 438 (third, fourth) which is held by the lower end 461a of the linear link rod 461. The holding structure of the linear connecting rod 461 will be described below.

如第三圖及第四圖所示,棒連結塊438設有貫通於上下方向的圓形剖面的貫通孔438a。這個貫通孔438a的直徑是比線性連接棒461的下端461a的直徑稍大。此外,從這個貫通孔438a的內周面,設有朝向棒連結塊438的前端(在滾子單元430L中是右端,在滾子單元430R中是左端)的開槽溝438b。再者,在棒連結塊438中,形成有與開槽溝438b直交的貫通孔438c及438d。貫通孔438c與438d是形成於隔著開槽溝438b而相對的位置,且相對於輸入軸420是近位的貫通孔438d形成有母螺紋。因此,當將線性連接棒461通過貫通孔438a,接著將螺栓通過貫通孔438c並螺入貫通孔438d時,棒連結塊438會變形使得貫通孔438a的直徑變小,線性連接棒461的下端461a被繫緊於棒連結塊438。藉此,線性連接棒461便可被固定於棒連結塊438。因此,藉由利用伺服馬達120(第一圖)使得輸入軸420旋轉,便能夠使得線性連接棒461上下動。此外,藉由周期性地切換輸入軸420的旋轉方向,便能夠使得線性連接棒461以及固定於線性連接棒461的上端的可動工作台130在上下方向上振動。As shown in the third and fourth figures, the rod connecting block 438 is provided with a through hole 438a that penetrates a circular cross section in the vertical direction. The diameter of this through hole 438a is slightly larger than the diameter of the lower end 461a of the linear connecting rod 461. Further, from the inner circumferential surface of the through hole 438a, a groove 438b facing the front end of the rod coupling block 438 (the right end in the roller unit 430L and the left end in the roller unit 430R) is provided. Further, in the rod connecting block 438, through holes 438c and 438d which are orthogonal to the groove 438b are formed. The through holes 438c and 438d are formed at positions facing each other with the groove 438b interposed therebetween, and a through hole 438d that is close to the input shaft 420 is formed with a female screw. Therefore, when the linear connecting rod 461 is passed through the through hole 438a, and then the bolt is passed through the through hole 438c and screwed into the through hole 438d, the rod connecting block 438 is deformed so that the diameter of the through hole 438a becomes small, and the lower end 461a of the linear connecting rod 461 Fastened to the rod joint block 438. Thereby, the linear connecting rod 461 can be fixed to the rod connecting block 438. Therefore, by rotating the input shaft 420 by the servo motor 120 (first drawing), the linear connecting rod 461 can be moved up and down. Further, by periodically switching the rotation direction of the input shaft 420, the linear connecting rod 461 and the movable table 130 fixed to the upper end of the linear connecting rod 461 can be vibrated in the vertical direction.

如第二圖所示,外殼410的頂板412的下面設有上限檢測感測器441,底板411的上面設有下限檢測感測器442。上限檢測感測器441及下限檢測感測器442都是接近感測器。上限檢測感測器441可檢知右側的滾子單元430R的上端的接近,而下限檢測感測器442可檢知左側的滾子單元430L的下端的接近。在本實施形態中,當上限檢測感測器441或下限檢測感測器442檢知到滾子單元430R、430L的接近時,可使得伺服馬達緊急停止。As shown in the second figure, an upper limit detecting sensor 441 is disposed under the top plate 412 of the outer casing 410, and a lower limit detecting sensor 442 is disposed on the upper surface of the bottom plate 411. The upper limit detection sensor 441 and the lower limit detection sensor 442 are both proximity sensors. The upper limit detecting sensor 441 can detect the approach of the upper end of the roller unit 430R on the right side, and the lower limit detecting sensor 442 can detect the approach of the lower end of the roller unit 430L on the left side. In the present embodiment, when the upper limit detecting sensor 441 or the lower limit detecting sensor 442 detects the approach of the roller units 430R, 430L, the servo motor can be stopped in an emergency.

在本實施形態中,外殼410的內部充滿了潤滑油。因此,可減輕上部及下部滾子431、432與輸入軸420的公螺紋部421之間的摩擦、以及活動塊434與軌條435之間的摩擦。In the present embodiment, the inside of the casing 410 is filled with lubricating oil. Therefore, the friction between the upper and lower rollers 431, 432 and the male screw portion 421 of the input shaft 420 and the friction between the movable block 434 and the rail 435 can be alleviated.

以下說明輸入軸420的支撐機構。如第二圖所示,輸入軸420在其上端藉由被身為滾珠軸承的上部軸承451以可旋轉的方式被支撐,並且在底板411的開口411a的位置上還藉由被身為組合式斜角滾珠軸承的下部軸承452以可旋轉的方式被支撐。The support mechanism of the input shaft 420 will be described below. As shown in the second figure, the input shaft 420 is rotatably supported at its upper end by an upper bearing 451 which is a ball bearing, and is also combined by the position of the opening 411a of the bottom plate 411. The lower bearing 452 of the bevel ball bearing is rotatably supported.

如第二圖所示,輸入軸420的上端形成有直徑變小的段差部422,上部軸承451的內環被裝設成登上段差部422。此外,輸入軸420的上端被嵌入了扣環423,滾珠軸承451的內環藉由被段差部422與扣環423所夾持固定而無法在上下方向上移動。另一方面,頂板412的開口412a相對於上部軸承451的外環是緊配合,上部軸承451的外環被嵌入於頂板412的開口412a。As shown in the second figure, the upper end of the input shaft 420 is formed with a step portion 422 having a small diameter, and the inner ring of the upper bearing 451 is mounted to the step portion 422. Further, the upper end of the input shaft 420 is fitted with a buckle 423, and the inner ring of the ball bearing 451 is not fixed in the vertical direction by being clamped and fixed by the step portion 422 and the buckle 423. On the other hand, the opening 412a of the top plate 412 is tightly fitted with respect to the outer ring of the upper bearing 451, and the outer ring of the upper bearing 451 is embedded in the opening 412a of the top plate 412.

在本實施形態中,如前述般,外殼410的內部充滿了潤滑油,為了防止潤滑油洩露,頂板412的開口412a由蓋板453所覆蓋。蓋板453被螺栓固定於頂板412。此外,在蓋板453中,於與開口412a的內周面相抵接的面上設有圓周溝453a,藉由裝設於此但未顯示的O環,可防止潤滑油從蓋板453與開口412a的間隙中漏出。In the present embodiment, as described above, the inside of the outer casing 410 is filled with lubricating oil, and the opening 412a of the top plate 412 is covered by the cover 453 in order to prevent leakage of lubricating oil. The cover plate 453 is bolted to the top plate 412. Further, in the cover plate 453, a circumferential groove 453a is provided on a surface abutting against the inner circumferential surface of the opening 412a, and the lubricating oil is prevented from the cover plate 453 and the opening by the O-ring provided here but not shown. The gap in 412a leaks out.

其次,說明下部軸承452的裝設構造。在輸入軸420中,於比底板411的上面稍高的位置上,形成有直徑向下變小的段差部424。下部軸承452的內環的上面被配置成抵接於此段差部。此外,輸入軸420的段差部424下方的外周面形成有公螺紋部425。藉由將軸環(collar)456螺入此公螺紋部425,便可從下方支撐下部軸承452的內環。如此,下部軸承452的內環藉由被段差部424與軸環456所夾持固定而無法在上下方向上移動。Next, the mounting structure of the lower bearing 452 will be described. In the input shaft 420, a step portion 424 whose diameter decreases downward is formed at a position slightly higher than the upper surface of the bottom plate 411. The upper surface of the inner ring of the lower bearing 452 is configured to abut against the step. Further, a male screw portion 425 is formed on the outer peripheral surface of the input shaft 420 below the step portion 424. By screwing a collar 456 into the male threaded portion 425, the inner ring of the lower bearing 452 can be supported from below. As described above, the inner ring of the lower bearing 452 is not fixed in the vertical direction by being sandwiched and fixed by the step portion 424 and the collar 456.

如前述般,下部軸承452是組合式斜角軸承,在止推(thrust)方向上亦承受荷重。因此,與上部軸承451相異,內環、外環的雙方有必要被固定成無法在上下方向上移動。如第二圖所示,底板411的開口411a裝設有用以從下方支撐下部軸承452的外環的軸承支撐部件455。軸承支撐部件455是由用以在中央貫通輸入軸420的貫通孔455c所形成的筒狀部件,其下端設有凸緣部455a。藉由利用螺栓將此凸緣部455a固定於底板411的下面,軸承支撐部件455便可被固定於底板411。此外,在軸承支撐部件455的外周面,於與開口411a的內周相對的位置上,設有圓周溝455b,藉由裝設於此但未顯示的O環,可防止潤滑油從軸承支撐部件455與開口411a的間隙中漏出。As described above, the lower bearing 452 is a combined bevel bearing that also bears a load in the thrust direction. Therefore, unlike the upper bearing 451, both the inner ring and the outer ring need to be fixed so as not to be movable in the vertical direction. As shown in the second figure, the opening 411a of the bottom plate 411 is provided with a bearing support member 455 for supporting the outer ring of the lower bearing 452 from below. The bearing support member 455 is a tubular member formed by a through hole 455c for penetrating the input shaft 420 at the center, and a flange portion 455a is provided at the lower end thereof. The bearing support member 455 can be fixed to the bottom plate 411 by fixing the flange portion 455a to the lower surface of the bottom plate 411 by bolts. Further, on the outer peripheral surface of the bearing support member 455, a circumferential groove 455b is provided at a position opposed to the inner circumference of the opening 411a, and the lubricating oil is prevented from the bearing supporting member by the O-ring provided here but not shown. 455 leaks out of the gap with the opening 411a.

此外,軸承支撐部件455的貫通孔455c形成有其內徑向上變大的段差部455d。在貫通孔455c的段差部455d上方的部分相對於下部軸承452的外環是緊配合,下部軸承452的外環被嵌入於此。此外,在貫通孔455c的段差部455d下方的部分的直徑與下部軸承452的外環的內徑大致相等,下部軸承452的外環是由段差部455d從下方所支撐。Further, the through hole 455c of the bearing support member 455 is formed with a step portion 455d whose inner diameter is increased upward. The portion above the step portion 455d of the through hole 455c is tightly fitted with respect to the outer ring of the lower bearing 452, and the outer ring of the lower bearing 452 is fitted therein. Further, the diameter of the portion below the step portion 455d of the through hole 455c is substantially equal to the inner diameter of the outer ring of the lower bearing 452, and the outer ring of the lower bearing 452 is supported by the step portion 455d from below.

在軸承支撐部件455的上端以螺絲固定著軸承止動件454。軸承止動件454是有孔圓盤狀的部件,孔的內徑略等於下部軸承452的外環的內徑。此外,從段差部455d到軸承支撐部件455的上端為止的高度,與下部軸承452的高度相等、或是稍微減小而將軸承止動件454以螺絲固定於軸承支撐部件455,藉此使得下部軸承452的外環被軸承止動件454與軸承支撐部件455的段差部455d所夾持固定而無法在上下方向上移動。A bearing stopper 454 is screwed to the upper end of the bearing support member 455. The bearing stop 454 is a perforated disk-shaped member having an inner diameter slightly equal to the inner diameter of the outer ring of the lower bearing 452. Further, the height from the step portion 455d to the upper end of the bearing support member 455 is equal to or slightly smaller than the height of the lower bearing 452, and the bearing stopper 454 is screwed to the bearing support member 455, thereby making the lower portion The outer ring of the bearing 452 is sandwiched and fixed by the bearing stopper 454 and the step portion 455d of the bearing support member 455, and is not movable in the vertical direction.

如前述般,外殼410的內部充滿了潤滑油,為了防止潤滑油從輸入軸420與軸承支撐部件455的貫通孔455c之間的間隙中洩露,設有油封458。油封458被嵌入於身為有孔圓盤狀的部件的油封裝設部件457的孔的部分。同時,油封裝設部件457被螺栓固定於軸承支撐部件455的下面。另外,與軸承支撐部件455的下面相對的油封裝設部件457部件的上面形成有圓環狀的溝457a,裝設未於此處顯示的O環,便可防止潤滑油從軸承支撐部件455的下面與油封裝設部件457的上面之間的間隙中洩露。油封458是以其內周能與輸入軸420的外周相滑動的方式而構成,故以低摩擦使得輸入軸420旋轉,並且防止潤滑油從油封458的內周與輸入軸420的外周之間漏出。As described above, the inside of the outer casing 410 is filled with lubricating oil, and an oil seal 458 is provided in order to prevent the lubricating oil from leaking from the gap between the input shaft 420 and the through hole 455c of the bearing support member 455. The oil seal 458 is embedded in a portion of the hole of the oil encapsulating member 457 which is a member having a perforated disk shape. At the same time, the oil encapsulating member 457 is bolted to the underside of the bearing support member 455. Further, an annular groove 457a is formed on the upper surface of the oil encapsulating member 457 opposite to the lower surface of the bearing support member 455, and an O-ring not shown here is installed to prevent lubricating oil from the bearing supporting member 455. The following leaks into the gap between the upper surface of the oil encapsulating member 457. The oil seal 458 is configured such that its inner circumference can slide with the outer circumference of the input shaft 420, so that the input shaft 420 is rotated with low friction, and the lubricating oil is prevented from leaking from the inner circumference of the oil seal 458 and the outer circumference of the input shaft 420. .

如前述般,線性連接棒461從外殼410的頂板412突出於上方(第三圖)。因此,在本實施形態中,為了防止潤滑油從線性連接棒461與頂板412的間隙中漏出,設有附油封的蓋板464。以下說明蓋板464的結構。As described above, the linear connecting rod 461 protrudes from the top plate 412 of the outer casing 410 (third drawing). Therefore, in the present embodiment, in order to prevent the lubricating oil from leaking from the gap between the linear connecting rod 461 and the top plate 412, a cover 464 with an oil seal is provided. The structure of the cover 464 will be described below.

如第三圖所示,線性連接棒461在稍低於頂板412的位置上是由軸襯(bush)462所支撐。軸襯462的內周是以可與線性連接棒461的外周相滑動的方式所構成。軸襯462是被軸襯裝設部件463及蓋板464固定於頂板412。軸襯裝設部件463與蓋板464一起被未顯示的螺栓固定於頂板412。軸襯裝設部件463是其中被軸襯462嵌入的圓筒形狀的部件,其下端設有朝向徑向方向內側擴展的段差部463a。這個段差部463a的上面與軸襯462的下面相抵接,而從下方支撐軸襯462。此外,蓋板464是其中通過線性連接棒461的圓筒形狀的部件,其內徑比軸襯462的外形還小。因此,當利用螺栓將蓋板464與軸襯裝設部件463一體化時,軸襯462被夾持而固定於蓋板464的下面與軸襯裝設部件463的段差部463a的上面之間。As shown in the third figure, the linear connecting rod 461 is supported by a bush 462 at a position slightly lower than the top plate 412. The inner circumference of the bushing 462 is configured to be slidable with the outer circumference of the linear connecting rod 461. The bushing 462 is fixed to the top plate 412 by the bushing mounting member 463 and the cover 464. The bushing mounting member 463 is fixed to the top plate 412 together with the cover plate 464 by bolts not shown. The bushing mounting member 463 is a cylindrical member in which the bushing 462 is fitted, and a lower end thereof is provided with a step portion 463a that expands inward in the radial direction. The upper surface of this step portion 463a abuts against the lower surface of the bushing 462, and supports the bushing 462 from below. Further, the cover plate 464 is a cylindrical member in which the rod 461 is linearly connected, and its inner diameter is smaller than the outer shape of the bushing 462. Therefore, when the cover plate 464 is integrated with the bushing mounting member 463 by bolts, the bushing 462 is clamped and fixed between the lower surface of the cover plate 464 and the upper surface of the step portion 463a of the bushing mounting member 463.

軸襯462的外周設有圓環狀的溝462a,藉由裝設此處未顯示的O環,可防止潤滑油從軸襯462的外周與軸襯裝設部件463的內周之間的間隙中漏出。同樣地,與軸襯裝設部件463的內周相對的蓋板464的外周形成有圓環狀的溝464b,藉由裝設此處未顯示的O環,可防止潤滑油從軸襯裝設部件463的內周與蓋板464的外周之間的間隙中漏出。The outer circumference of the bushing 462 is provided with an annular groove 462a, and by installing an O-ring not shown here, the gap between the outer circumference of the bushing 462 and the inner circumference of the bushing mounting member 463 can be prevented. Missing out. Similarly, an annular groove 464b is formed on the outer circumference of the cover plate 464 opposed to the inner circumference of the bushing mounting member 463, and the lubricating oil is prevented from being installed from the bushing by installing an O-ring not shown here. The gap between the inner circumference of the member 463 and the outer circumference of the cover 464 leaks.

此外,蓋板464的內周亦形成有圓環狀的溝464a,此溝464a內亦裝設有油封。線性連接棒461的外周在與此油封相滑動的同時還可上下動,藉由油封便能夠防止潤滑油從滑動面漏出。Further, an annular groove 464a is formed in the inner periphery of the cover plate 464, and an oil seal is also disposed in the groove 464a. The outer circumference of the linear connecting rod 461 can also move up and down while sliding with the oil seal, and the oil seal can prevent the lubricating oil from leaking out from the sliding surface.

其次,使用圖式詳細說明本實施形態的活動塊434及軌條435的結構。第六圖是在垂直於軌條435的長軸方向的一面上切斷活動塊434及軌條435畫出的剖面圖,第七圖是第六圖的II-II剖面圖。如第六圖及第七圖所示,活動塊434形成有圍繞軌條435的凹部,此凹部形成有在軌條435的軸方向上延伸的四條溝434a、434a’。此溝434a、434a’內收容有許多不銹鋼製的滾珠434b。軌條435內在與活動塊434的溝434a、434a’相對的位置上分別設有溝435a、435a’,使得滾珠434b被夾持於溝434a與溝435a、或是溝434a’與溝435a’之間。溝434a、434a’、435a、435a’的剖面形狀是圓弧狀,其曲率半徑略等於滾珠434b的半徑。因此,滾珠434b在幾乎沒有空隙的狀態下緊貼於溝434a、434a’、435a、435a’。Next, the configuration of the movable block 434 and the rail 435 of the present embodiment will be described in detail using the drawings. The sixth drawing is a cross-sectional view showing the movable block 434 and the rail 435 cut on one side perpendicular to the long axis direction of the rail 435, and the seventh drawing is a II-II cross-sectional view of the sixth drawing. As shown in the sixth and seventh figures, the movable block 434 is formed with a recess surrounding the rail 435, and the recess is formed with four grooves 434a, 434a' extending in the axial direction of the rail 435. A plurality of stainless steel balls 434b are housed in the grooves 434a and 434a'. The rail 435 is provided with grooves 435a, 435a' respectively at positions opposite to the grooves 434a, 434a' of the movable block 434, so that the balls 434b are clamped to the grooves 434a and 435a, or the grooves 434a' and 435a'. between. The cross-sectional shape of the grooves 434a, 434a', 435a, 435a' is an arc shape, and the radius of curvature is slightly equal to the radius of the balls 434b. Therefore, the balls 434b are in close contact with the grooves 434a, 434a', 435a, 435a' in a state where there is almost no gap.

活動塊434的內部設有四條與各個溝434a大致平行的滾珠避開路434c。如第七圖所示,溝434a與避開路434c在各自兩端經由U字路434d而彼此連接,溝434a、溝435a、避開路434c、U字路434d形成用以使得滾珠434b循環的循環路。關於避開路434c以及溝434a’及435a’也形成有同樣的循環路。Inside the movable block 434, there are four ball avoiding paths 434c substantially parallel to the respective grooves 434a. As shown in the seventh figure, the groove 434a and the avoiding path 434c are connected to each other via the U-shaped path 434d at both ends, and the groove 434a, the groove 435a, the avoiding path 434c, and the U-shaped path 434d are formed to circulate the ball 434b. Loop road. The same circulation path is also formed in the avoidance path 434c and the grooves 434a' and 435a'.

因此,當活動塊434相對於軌條435移動時,許多滾珠434b在於溝434a、434a’、435a、435a’內滾動的同時還循環於循環路。因此,即使在軌條以外的方向上施加大荷重,仍可利用多個滾珠來支撐活動塊同時使得滾珠434b滾動而將軌條軸方向的阻力保持得較小,因此能夠使得活動塊434相對於軌條435平順地移動。另外,避開路434c及U字路434d的內徑變得比滾珠434b的直徑稍大,避開路434c及U字路434d與滾珠434b之間所產生的摩擦力極小,是故不會妨礙滾珠434b的循環。Thus, as the movable block 434 moves relative to the rail 435, a number of balls 434b circulate in the grooves 434a, 434a', 435a, 435a' while still circulating in the circulation path. Therefore, even if a large load is applied in a direction other than the rail, a plurality of balls can be used to support the movable block while rolling the balls 434b to keep the resistance in the direction of the rail axis small, so that the movable block 434 can be made relative to The rail 435 moves smoothly. Further, the inner diameters of the avoidance path 434c and the U-shaped path 434d are slightly larger than the diameter of the balls 434b, and the frictional force generated between the avoidance path 434c and the U-shaped path 434d and the balls 434b is extremely small, so that it does not hinder The cycle of balls 434b.

如圖所示,被夾持於溝434a與435a的二列滾珠434b的列形成接觸角約為45°的正面組合型的斜角接觸滾珠軸承(angular contact ball bearing)。這種場合下的接觸角是溝434a及435a與滾珠434b相接觸的各接觸點的連線、以及線性導軌的徑向方向(從活動塊朝向軌條的方向)所成的角度。如此所形成的斜角接觸滾珠軸承能夠支撐逆徑向方向(從軌條朝向活動塊的方向)及橫方向(與徑向方向及活動塊的進退方向的雙方相直交的方向。圖中的左右方向)的荷重。As shown, the rows of the two rows of balls 434b held by the grooves 434a and 435a form a front-side type of angular contact ball bearing having a contact angle of about 45°. The contact angle in this case is the angle between the contact points of the grooves 434a and 435a in contact with the balls 434b, and the radial direction of the linear guide (the direction from the movable block toward the rail). The bevel contact ball bearing thus formed can support the reverse radial direction (direction from the rail toward the movable block) and the lateral direction (the direction orthogonal to both the radial direction and the advancing and retracting direction of the movable block. The load of the direction).

同樣地,被夾持於溝434a’與435a’的二列滾珠434b的列形成接觸角(溝434a’及435a’與滾珠434b相接觸的各接觸點的連線、以及線性導軌的逆徑向方向所成的角度)為45°的正面組合型的斜角接觸滾珠軸承。這種斜角接觸滾珠軸承能夠支撐徑向方向及橫方向的荷重。Similarly, the rows of the two rows of balls 434b held by the grooves 434a' and 435a' form a contact angle (the lines connecting the contact points of the grooves 434a' and 435a' with the balls 434b, and the reverse radial direction of the linear guides. The angle formed by the direction is a 45° front combined type of bevel contact ball bearing. This bevel contact ball bearing can support the load in the radial direction and the lateral direction.

此外,分別被夾持於溝434a與435a的一方(圖中左側)以及溝434a’與435a’的一方(圖中左側)的二列滾珠434b的列亦形成正面組合型的斜角接觸滾珠軸承。同樣地,分別被夾持於溝434a與435a的另一方(圖中左側)以及溝434a’與435a’的另一方(圖中左側)的二列滾珠434b的列亦形成正面組合型的斜角接觸滾珠軸承。Further, the rows of the two rows of balls 434b which are respectively clamped to one of the grooves 434a and 435a (the left side in the drawing) and one of the grooves 434a' and 435a' (the left side in the drawing) also form a front combined type oblique contact ball bearing. . Similarly, the rows of the two rows of balls 434b that are respectively clamped to the other of the grooves 434a and 435a (the left side in the drawing) and the other of the grooves 434a' and 435a' (the left side in the drawing) also form a bevel of the front combined type. Contact ball bearings.

如此,在本實施形態中,相對於分別作用在徑向方向、逆徑向方向、橫方向的荷重,是以正面組合型的斜角接觸滾珠軸承進行支撐,而能夠充分地支撐施加於軌條軸方向以外的方向的大荷重。As described above, in the present embodiment, the load acting on the radial direction, the reverse radial direction, and the lateral direction is supported by the front combined type oblique contact ball bearing, and the support can be sufficiently supported by the rail. Large load in directions other than the axial direction.

以下,顯示本實施形態的振動試驗裝置的試驗結果。第八圖是在以加速度振幅0.7G、頻率5Hz驅動本實施形態的振動試驗裝置1時,由裝設於可動工作台130之上的振動拾波器(vibration pickup)所量測出的振動波形。如圖所示,可獲悉在本實施形態的振動試驗裝置中能夠以雜訊少(接近正弦波)的加速度波形來使可動工作台130振動。The test results of the vibration test apparatus of the present embodiment are shown below. The eighth diagram is a vibration waveform measured by a vibration pickup mounted on the movable table 130 when the vibration test apparatus 1 of the present embodiment is driven at an acceleration amplitude of 0.7 G and a frequency of 5 Hz. . As shown in the figure, it can be seen that in the vibration test apparatus of the present embodiment, the movable table 130 can be vibrated by an acceleration waveform having a small amount of noise (near sinusoidal wave).

作為比較例,顯示的是取代本實施形態的直動變換器400而使用進給螺桿機構作為直動變換機構的振動試驗裝置的試驗結果。第九圖是在以加速度振幅0.7G、頻率5Hz驅動比較例的振動試驗裝置時,由裝設於可動工作台之上的振動拾波器所量測出的振動波形。如圖所示,可獲悉在比較例的振動試驗裝置中產生了因滾珠螺桿機構的各個滾珠之間的衝撞所引起的尖峰雜訊(spike noise),而無法以接近正弦波的加速度波形使可動工作台振動。As a comparative example, a test result of a vibration test apparatus using a feed screw mechanism as a linear motion converter instead of the linear motion converter 400 of the present embodiment is shown. The ninth diagram is a vibration waveform measured by a vibration pickup mounted on a movable table when the vibration test apparatus of the comparative example is driven at an acceleration amplitude of 0.7 G and a frequency of 5 Hz. As shown in the figure, it can be seen that in the vibration test apparatus of the comparative example, spike noise caused by the collision between the balls of the ball screw mechanism is generated, and the acceleration waveform close to the sine wave cannot be made movable. The table is vibrating.

1...試驗裝置1. . . Test device

100...裝置本體100. . . Device body

110...骨架110. . . skeleton

111...工作台部111. . . Workbench department

112...頂部112. . . top

120...伺服馬達120. . . Servo motor

123...耦接器123. . . Coupler

130...可動工作台130. . . Movable workbench

132...可動工作台132. . . Movable workbench

140...測力器140. . . Force measurer

150...位移感測器150. . . Displacement sensor

160...上部載台160. . . Upper stage

161...貫通孔161. . . Through hole

171...引導棒171. . . Guide rod

172...伺服馬達172. . . Servo motor

173...螺帽173. . . Nut

174...鏈節174. . . Chain link

175...進給螺桿175. . . Feed screw

181...下部轉接器181. . . Lower adapter

182...上部轉接器182. . . Upper adapter

200...伺服放大器200. . . Servo amplifier

300...控制部300. . . Control department

400...直動變換器400. . . Linear converter

410...外殼410. . . shell

411...底板411. . . Bottom plate

411a...開口411a. . . Opening

411b...凸緣部411b. . . Flange

412...頂板412. . . roof

412a...開口部412a. . . Opening

412b...開口部412b. . . Opening

413a...開口413a. . . Opening

413L...左側板413L. . . Left side board

413R...右側板413R. . . Right side panel

414B...裡面側板414B. . . Inside side panel

414F...前方側板414F. . . Front side panel

415...肋材415. . . Rib

416...蓋板416. . . Cover

420...輸入軸420. . . Input shaft

421...公螺紋部421. . . Male thread

421a...山421a. . . mountain

421b...谷421b. . . Valley

421c...螺紋側面421c. . . Thread side

421d...螺紋側面421d. . . Thread side

422...段差部422. . . Step difference

423...扣環423. . . Buckle

424...段差部424. . . Step difference

425...公螺紋部425. . . Male thread

430L...滾子單元430L. . . Roller unit

430R...滾子單元430R. . . Roller unit

431...上部滾子431. . . Upper roller

431a...軸部431a. . . Shaft

431b...滾子部431b. . . Roller

431c...圓筒滾子軸承431c. . . Cylindrical roller bearing

432...下部滾子432. . . Lower roller

432a...軸部432a. . . Shaft

432b...滾子部432b. . . Roller

432c...圓筒滾子軸承432c. . . Cylindrical roller bearing

433...連結板433. . . Link board

433a...開口433a. . . Opening

433b...開槽溝433b. . . Groove

433b1...上面433b1. . . Above

433b2...下面433b2. . . below

433c...貫通孔433c. . . Through hole

433d...貫通孔433d. . . Through hole

433e...孔433e. . . hole

434...活動塊434. . . Activity block

434a...溝434a. . . ditch

434a’...溝434a’. . . ditch

434b...滾珠434b. . . Ball

434c...避開路434c. . . Avoid the road

434d...U字路434d. . . U-shaped road

435...軌條435. . . Rail

435a,435a’...溝435a, 435a’. . . ditch

436...定位螺絲436. . . Positioning screw

437a...第一螺栓437a. . . First bolt

437b...第二螺栓437b. . . Second bolt

438...棒連結塊438. . . Bar link block

438a...貫通孔438a. . . Through hole

438b...開槽溝438b. . . Groove

438c...貫通孔438c. . . Through hole

438d...貫通孔438d. . . Through hole

441...上限檢測感測器441. . . Upper limit detection sensor

442...下限檢測感測器442. . . Lower limit detection sensor

451...上部軸承451. . . Upper bearing

452...下部軸承452. . . Lower bearing

453...蓋板453. . . Cover

453a...圓周溝453a. . . Circumferential groove

454...軸承止動件454. . . Bearing stop

455...軸承支撐部件455. . . Bearing support member

455a...凸緣部455a. . . Flange

455b...圓周溝455b. . . Circumferential groove

455c...貫通孔455c. . . Through hole

455d...段差部455d. . . Step difference

456...凸緣456. . . Flange

457...油封裝設部件457. . . Oil packaging components

457a...溝457a. . . ditch

458...油封458. . . Oil seal

461...線性連接棒461. . . Linear connecting rod

461a...下端461a. . . Lower end

462...軸襯462. . . Bushing

462a...溝462a. . . ditch

463...軸襯裝設部件463. . . Bushing assembly parts

463a...段差部463a. . . Step difference

464...蓋板464. . . Cover

464a,464b...溝464a, 464b. . . ditch

W...工件W. . . Workpiece

第一圖係本發明的實施形態的振動試驗裝置的前視圖。The first drawing is a front view of a vibration testing device according to an embodiment of the present invention.

第二圖係本發明的實施形態的振動試驗裝置的直動變換器的前視圖。The second drawing is a front view of a linear motion converter of the vibration testing device according to the embodiment of the present invention.

第三圖係本發明的實施形態的振動試驗裝置的直動變換器的右側視圖。The third drawing is a right side view of the linear motion converter of the vibration testing device according to the embodiment of the present invention.

第四圖係本發明的實施形態的振動試驗裝置的直動變換器的俯視圖。Fig. 4 is a plan view showing a linear motion converter of a vibration testing device according to an embodiment of the present invention.

第五圖係第四圖的I-I剖面圖。The fifth figure is a cross-sectional view of the I-I of the fourth figure.

第六圖係本發明的實施形態中在垂直於軌條的長軸方向的一面上切斷活動塊及軌條畫出的剖面圖。Fig. 6 is a cross-sectional view showing the movable block and the rails cut in a direction perpendicular to the longitudinal direction of the rail in the embodiment of the present invention.

第七圖係第六圖的II-II剖面圖。The seventh drawing is a sectional view of II-II of the sixth drawing.

第八圖係顯示本發明的實施形態的振動試驗裝置的試驗結果的曲線圖。Fig. 8 is a graph showing the test results of the vibration test apparatus according to the embodiment of the present invention.

第九圖係顯示比較例的振動試驗裝置的試驗結果的曲線圖。The ninth graph is a graph showing the test results of the vibration test apparatus of the comparative example.

111...工作台部111. . . Workbench department

130...可動工作台130. . . Movable workbench

400...直動變換器400. . . Linear converter

410...外殼410. . . shell

411...底板411. . . Bottom plate

411a...開口411a. . . Opening

411b...凸緣部411b. . . Flange

412...頂板412. . . roof

412a...開口部412a. . . Opening

413a...開口413a. . . Opening

413L...左側板413L. . . Left side board

413R...右側板413R. . . Right side panel

415...肋材415. . . Rib

416...蓋板416. . . Cover

420...輸入軸420. . . Input shaft

421...公螺紋部421. . . Male thread

421a...山421a. . . mountain

421b...谷421b. . . Valley

421c...螺紋側面421c. . . Thread side

421d...螺紋側面421d. . . Thread side

422...段差部422. . . Step difference

423...扣環423. . . Buckle

424...段差部424. . . Step difference

425...公螺紋部425. . . Male thread

430L...滾子單元430L. . . Roller unit

430R...滾子單元430R. . . Roller unit

431...上部滾子431. . . Upper roller

432...下部滾子432. . . Lower roller

433...連結板433. . . Link board

434...活動塊434. . . Activity block

435...軌條435. . . Rail

441...上限檢測感測器441. . . Upper limit detection sensor

442...下限檢測感測器442. . . Lower limit detection sensor

451...上部軸承451. . . Upper bearing

452...下部軸承452. . . Lower bearing

453...蓋板453. . . Cover

453a...圓周溝453a. . . Circumferential groove

454...軸承止動件454. . . Bearing stop

455...軸承支撐部件455. . . Bearing support member

455a...凸緣部455a. . . Flange

455b...圓周溝455b. . . Circumferential groove

455c...貫通孔455c. . . Through hole

455d...段差部455d. . . Step difference

456...凸緣456. . . Flange

457...油封裝設部件457. . . Oil packaging components

457a...溝457a. . . ditch

458...油封458. . . Oil seal

Claims (18)

一種振動試驗裝置,具備直動變換器,該直動變換器將伺服馬達的旋轉軸的旋轉運動變換為直進運動而使得保持被檢物的可動工作台振動,其特徵在於:前述直動變換器具備:直動變換器骨架,固定於前述振動試驗裝置的骨架;輸入軸,其可自由旋轉地支撐於前述直動變換器骨架,並與前述伺服馬達的旋轉軸相連結,且在外周面的至少一部分形成有方螺紋;及滾子,具有抵接於前述方螺紋的螺紋側面的圓筒面;前述直動變換器還具備:滾子單元,植設了旋轉軸,該旋轉軸藉由大致整體被收容於前述方螺紋的谷間的圓筒滾子軸承來對前述滾子支撐成該滾子可自由旋轉;軌條,固定於前述直動變換器骨架,可使得前述滾子單元沿著前述方螺紋的軸方向自由滑動地直進滑動;及輸出軸,直接或間接地連結於前述滾子單元,以輸出軸之上端支撐前述可動工作台;其中,伴隨著前述輸入軸的旋轉,與前述方螺紋相螺合的前述滾子沿著該方螺紋的螺紋溝而移動,前述滾子單元沿著前述軌條直進運動,前述輸出軸隨著這些動作也直進運動而使得前述可動工作台振動。 A vibration testing device comprising a linear motion converter that converts a rotational motion of a rotating shaft of a servo motor into a linear motion to vibrate a movable table that holds a test object, wherein the linear motion converter a linear motion converter frame fixed to a skeleton of the vibration testing device, and an input shaft rotatably supported by the linear motion converter frame and coupled to the rotation shaft of the servo motor and on the outer circumferential surface At least a part of the square thread is formed; and the roller has a cylindrical surface abutting against the thread side surface of the square thread; the linear motion converter further includes: a roller unit, and a rotating shaft is disposed, the rotating shaft is substantially a cylindrical roller bearing integrally accommodated between the valleys of the square threads to support the roller so that the roller can rotate freely; the rail is fixed to the linear converter frame, so that the roller unit can be along the foregoing The axial direction of the square thread slides in a straight sliding direction; and the output shaft is directly or indirectly coupled to the roller unit, and the upper end of the output shaft supports the aforementioned movable work The roller is moved along the thread groove of the square thread along with the rotation of the input shaft, and the roller unit moves straight along the rail, and the output shaft follows These actions also move straight into motion to cause the aforementioned movable table to vibrate. 如申請專利範圍第1項的振動試驗裝置,其中:具有複數個前述滾子;前述複數個滾子中的一對滾子被配置成夾持前述方螺紋的山。 A vibration test apparatus according to claim 1, wherein the plurality of rollers are provided; and one of the plurality of rollers is disposed to sandwich a mountain of the square thread. 如申請專利範圍第1項的振動試驗裝置,其中前述方螺紋是多條螺紋。 The vibration test apparatus of claim 1, wherein the square thread is a plurality of threads. 如申請專利範圍第2項的振動試驗裝置,其中具有將前述的一對滾子向前述方螺紋的山增強的增強手段。 A vibration test apparatus according to claim 2, wherein the vibration test apparatus of the second aspect of the invention has a reinforcing means for reinforcing the mountain of the pair of rollers toward the square thread. 如申請專利範圍第4項的振動試驗裝置,其中:前述滾子單元具有被形成於前述的一對滾子之間的開槽溝;前述增強手段是藉由調整前述開槽溝的間隔,而調整前述的一對滾子的間隔以及將該對滾子向前述方螺紋的山增強的荷重。 The vibration testing device according to claim 4, wherein the roller unit has a groove formed between the pair of rollers; and the reinforcing means adjusts the interval of the groove. The interval between the aforementioned pair of rollers is adjusted and the load of the pair of rollers to the mountain of the aforementioned square thread is increased. 如申請專利範圍第5項的振動試驗裝置,其中:前述增強手段具有:第一貫通孔,從前述滾子單元的一端向前述開槽溝而穿孔;第二貫通孔,從前述滾子單元的一端向前述開槽溝而穿孔,在內周形成有母螺紋;母螺紋孔,隔著前述開槽溝而與前述第一貫通孔相向,朝向前述滾子單元的另一端而延伸;第一螺栓,通過前述第一貫通孔而被螺入前述母螺紋孔;及第二螺栓,螺入前述第二貫通孔; 其中,前述第一螺栓的頭部壓迫前述滾子單元的一端以將縮減前述開槽溝的寬度的方向上的荷重施加於該滾子單元,並且前述第二螺栓的前端部壓迫隔著前述開槽溝而與前述第二貫通孔相向的前述滾子單元的部分以將增加前述開槽溝的寬度的方向上的荷重施加於該滾子單元。 The vibration testing device according to claim 5, wherein the reinforcing means has: a first through hole that is perforated from one end of the roller unit toward the groove; and a second through hole from the roller unit One end is perforated into the groove, and a female thread is formed on the inner circumference; the female screw hole extends toward the other end of the roller unit via the groove, and extends toward the other end of the roller unit; The first through hole is screwed into the female screw hole; and the second bolt is screwed into the second through hole; Wherein the head of the first bolt presses one end of the roller unit to apply a load in a direction in which the width of the groove is reduced to the roller unit, and the front end portion of the second bolt is pressed against the opening The portion of the groove unit facing the second through hole is applied to the roller unit in a direction in which the width of the groove is increased. 如申請專利範圍第1項的振動試驗裝置,其中:前述直動變換器骨架具有收容前述方螺紋、前述滾子單元及前述軌條的外殼本體;前述外殼本體內充滿了潤滑油。 The vibration test apparatus according to claim 1, wherein the linear motion converter frame has a casing body that houses the square thread, the roller unit, and the rail; and the casing body is filled with lubricating oil. 如申請專利範圍第7項的振動試驗裝置,其中:前述外殼本體具有:底板,形成有開口,該開口供裝設用來以可旋轉的方式支撐前述輸入軸的軸承;及頂板,形成有開口,該開口供裝設用來以可滑動的方式支撐前述輸出軸的軸承;在前述底板的開口與前述輸入軸之間、以及前述頂板的開口,設有用以防止潤滑油漏出的油封。 The vibration testing device of claim 7, wherein: the housing body has: a bottom plate formed with an opening for mounting a bearing for rotatably supporting the input shaft; and a top plate having an opening The opening is provided with a bearing for slidably supporting the output shaft; and an oil seal for preventing leakage of lubricating oil is provided between the opening of the bottom plate and the input shaft and the opening of the top plate. 一種直動變換器,將旋轉運動變換為直進運動,其特徵在於:具備直動變換器骨架;輸入軸,其可自由旋轉地支撐於前述直動變換器骨架,在外周面的至少一部分形成有方螺紋;滾子單元,具備滾子,該滾子具有抵接於前述方螺紋的螺紋側面的圓筒面,該滾子單元將該滾子支撐 成該滾子可自由旋轉;軌條,固定於前述直動變換器骨架,與前述滾子單元卡合,以將該滾子單元之移動方向限定於前述方螺紋之軸方向;及輸出軸,連結於前述滾子單元;其中,伴隨著前述輸入軸的旋轉,與前述方螺紋相卡合的前述滾子沿著該方螺紋的螺紋溝而移動,前述滾子單元沿著前述軌條直進運動,前述輸出軸隨著這些動作也直進運動。 A linear motion converter for converting a rotary motion into a linear motion, comprising: a linear motion converter skeleton; an input shaft rotatably supported by the linear motion converter skeleton, and at least a part of the outer peripheral surface is formed a square thread; a roller unit having a roller having a cylindrical surface abutting a thread side of the square thread, the roller unit supporting the roller The roller is freely rotatable; the rail is fixed to the linear converter frame, and is engaged with the roller unit to limit the moving direction of the roller unit to the axial direction of the square thread; and the output shaft, The roller unit is coupled to the roller unit, wherein the roller engaged with the square thread moves along a thread groove of the square thread along with rotation of the input shaft, and the roller unit moves straight along the rail The aforementioned output shaft also moves straight in with these actions. 如申請專利範圍第9項的直動變換器,其中:具備複數個前述滾子;該複數個滾子中的一對滾子被配置成夾持前述方螺紋的山。 The linear motion converter of claim 9, wherein: the plurality of rollers are provided; and the pair of rollers of the plurality of rollers are configured to sandwich the mountain of the square thread. 如申請專利範圍第10項的直動變換器,其中具有將前述的一對滾子向前述方螺紋的山增強的增強手段。 A linear motion converter according to claim 10, which has a reinforcing means for reinforcing the aforementioned pair of rollers toward the mountain of the square thread. 如申請專利範圍第11項的直動變換器,其中:前述滾子單元具有被形成於前述的一對滾子之間的開槽溝;前述增強手段是藉由調整前述開槽溝的間隔,而調整前述的一對滾子的間隔以及將該對滾子向前述方螺紋的山增強的荷重。 The linear motion converter of claim 11, wherein: the roller unit has a groove formed between the pair of rollers; and the reinforcing means adjusts the interval of the groove. The interval between the pair of rollers described above and the load of the pair of rollers to the mountain of the square thread are increased. 如申請專利範圍第12項的直動變換器,其中:前述增強手段具有:第一貫通孔,從前述滾子單元的一端向前述開槽溝而穿孔; 第二貫通孔,從前述滾子單元的一端向前述開槽溝而穿孔,在內周形成有母螺紋;母螺紋孔,隔著前述開槽溝而與前述第一貫通孔相向,朝向前述滾子單元的另一端而延伸;第一螺栓,通過前述第一貫通孔而被螺入前述母螺紋孔;及第二螺栓,螺入前述第二貫通孔;其中,前述第一螺栓的頭部壓迫前述滾子單元的一端以將縮減前述開槽溝的寬度的方向上的荷重施加於該滾子單元,並且前述第二螺栓的前端部壓迫前述滾子單元的另一端以將增加前述開槽溝的寬度的方向上的荷重施加於該滾子單元。 The linear motion converter of claim 12, wherein: the reinforcing means has: a first through hole, and is perforated from one end of the roller unit to the groove; a second through hole is bored from one end of the roller unit toward the groove, and a female screw is formed on the inner circumference; the female screw hole faces the first through hole via the groove, and faces the roller The other end of the subunit extends; the first bolt is screwed into the female threaded hole through the first through hole; and the second bolt is screwed into the second through hole; wherein the head of the first bolt is pressed One end of the roller unit is applied to the roller unit in a direction to reduce the width of the groove, and the front end portion of the second bolt presses the other end of the roller unit to increase the groove A load in the direction of the width is applied to the roller unit. 如申請專利範圍第9項的直動變換器,其中:前述直動變換器骨架具有收容前述方螺紋、前述滾子單元及前述軌條的外殼本體;前述外殼本體內充滿了潤滑油。 The linear motion converter according to claim 9, wherein the linear motion converter frame has a casing body for accommodating the square thread, the roller unit and the rail; and the casing body is filled with lubricating oil. 如申請專利範圍第9項的直動變換器,其中:前述滾子單元更具備軸承、以及藉由該軸承將前述滾子支撐成可自由旋轉的支撐軸;前述滾子及前述軸承之大致整體被收容於前述方螺紋的谷間。 The linear motion converter of claim 9, wherein the roller unit further comprises a bearing, and a support shaft for supporting the roller to be freely rotatable by the bearing; the roller and the bearing are substantially It is accommodated between the valleys of the aforementioned square threads. 一種直動致動器,具備申請專利範圍第9至15項中任一項的直動變換器、以及能將前述直動變換器之輸入軸反轉驅動的旋轉馬達。 A linear motion converter comprising the linear motion converter according to any one of claims 9 to 15 and a rotary motor capable of driving the input shaft of the linear motion converter in reverse. 如申請專利範圍第16項的直動致動器,其中: 前述旋轉馬達係電動伺服馬達。 For example, a direct acting actuator of claim 16 wherein: The aforementioned rotary motor is an electric servo motor. 一種加振裝置,具備申請專利範圍第16或17項的直動致動器、以及連結於前述直動致動器之輸出軸的可動工作台;藉由前述直動致動器來驅動前述可動工作台,以使保持於該可動工作台的工件振動。 A vibration absorbing device comprising: a linear motion actuator of claim 16 or 17; and a movable table coupled to an output shaft of the linear motion actuator; wherein the movable body is driven by the linear motion actuator a table to vibrate the workpiece held on the movable table.
TW098115077A 2008-05-14 2009-05-07 Vibration testing machine TWI454681B (en)

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CN101796383A (en) 2010-08-04

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