TWI443277B - A pipe having a heating device - Google Patents
A pipe having a heating device Download PDFInfo
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- TWI443277B TWI443277B TW98120379A TW98120379A TWI443277B TW I443277 B TWI443277 B TW I443277B TW 98120379 A TW98120379 A TW 98120379A TW 98120379 A TW98120379 A TW 98120379A TW I443277 B TWI443277 B TW I443277B
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Description
本發明是關於具有加熱裝置的配管。詳細而言，是關於使半導體製造等之中所使用的氣體或使用完成的排放氣體流通之具有加熱裝置的配管。The present invention relates to a pipe having a heating device. Specifically, it is a pipe having a heating device for circulating a gas used in semiconductor manufacturing or the like or using a completed exhaust gas.
在半導體製造之中，是被課以以除害裝置處理蝕刻、形成薄膜等使用過後的氣體，將其無害化再廢棄的義務。在此情況，是使排放氣體從蝕刻裝置等流通至配管而送到除害裝置。In the manufacture of semiconductors, it is an obligation to treat the etching, the formation of a film, and the like by using a detoxification device, and to detoxify them. In this case, the exhaust gas is caused to flow from the etching device or the like to the pipe and sent to the detoxification device.
此時，排放氣體的反應生成物會附著於配管內壁，妨礙排放氣體的流動。為了防止此一情況，會將配管內部升溫至既定溫度以上，而使排放氣體的反應生成物不會附著於配管內壁。At this time, the reaction product of the exhaust gas adheres to the inner wall of the pipe, and the flow of the exhaust gas is hindered. In order to prevent this, the inside of the piping is heated up to a predetermined temperature or higher, and the reaction product of the exhaust gas does not adhere to the inner wall of the piping.
關於此方法的一種，如第1圖所示，其方法是將帶狀加熱器(ribbon heater)2纏繞在配管1的外側表面，再從配管1的外部加熱配管1內部。One of the methods is as shown in Fig. 1, in which a ribbon heater 2 is wound around the outer surface of the pipe 1, and the inside of the pipe 1 is heated from the outside of the pipe 1.
關於其他方法，如第2圖所示，其方法是使用L字型的構造的配管3，利用配管3的彎曲部3a，將加熱器4***配管3內，而加熱配管3內部。In the other method, as shown in FIG. 2, the pipe 3 of the L-shaped structure is used, and the heater 4 is inserted into the pipe 3 by the curved portion 3a of the pipe 3, and the inside of the pipe 3 is heated.
然而，若藉由使用帶狀加熱器2的方法，就等於是從外部加熱，由於加熱部是樹脂製品而無法達成高溫，因此有無法充分地加熱至配管內部的問題。However, the method of using the strip heater 2 is equivalent to heating from the outside, and since the heating portion is a resin product and cannot reach a high temperature, there is a problem that the inside of the piping cannot be sufficiently heated.
還有，而為了解決此問題，即使一點也好，而在遍佈配管的所有區域以緊密的間距纏繞帶狀加熱器，但是在嚴格禁止重疊卷繞帶狀加熱器2的情況下，為了使帶狀加熱器2不會相互重疊，而有必要沿著配管1表面小心地卷繞，而使在現場施工的作業效率惡化。Further, in order to solve this problem, even if the point is good, the strip heater is wound at a close pitch in all areas of the pipe, but in the case where the overlap of the strip heater 2 is strictly prohibited, in order to make the belt The heaters 2 do not overlap each other, and it is necessary to carefully wind them along the surface of the pipe 1 to deteriorate the work efficiency in the field construction.
還有，將加熱器4***配管3內的方法中，由於具有以L字型構造為代表的彎曲部3a的配管3是必須的，而使配管3的構造變得複雜，或是因此其設置場所受到限制，結果造成無法充分加熱排氣配管內的全部區域的問題。Further, in the method of inserting the heater 4 into the pipe 3, the pipe 3 having the curved portion 3a typified by the L-shaped structure is necessary, and the structure of the pipe 3 is complicated or set. The location is limited, resulting in a problem that the entire area in the exhaust pipe cannot be sufficiently heated.
本發明是有鑑於上述的習知例的問題點而衍生的發明，而提供一種具有加熱裝置的配管，其加熱器設置部的構造簡單、且可以有效率地加熱配管內部、或是可提昇將加熱器部設置的作業效率。The present invention has been made in view of the problems of the above-described conventional examples, and provides a pipe having a heating device, wherein the heater installation portion has a simple structure and can efficiently heat the inside of the pipe or can be lifted The working efficiency of the heater unit setting.
若從本發明的一觀點，是提供一種具有加熱裝置的配管，其特徵在於包含：一管狀部件；以及一加熱裝置，設置於上述管狀部件的內側；其中上述加熱裝置具有：一加熱器部；以及一熱能的擴散部，其具有設置在上述加熱器部周圍的複數個鰭片。According to one aspect of the present invention, a pipe having a heating device is provided, comprising: a tubular member; and a heating device disposed on an inner side of the tubular member; wherein the heating device has: a heater portion; And a heat diffusing portion having a plurality of fins disposed around the heater portion.
若根據本發明，由於加熱裝置是設置在配管的內側，而可以以良好的效率加熱配管內部。還有，由於不需要像帶狀加熱器的情況一般纏繞於整個配管、也不需要具有L字型構造配管的加熱器設置部，而可以使加熱器設置部成為簡單的機構。According to the present invention, since the heating device is disposed inside the pipe, the inside of the pipe can be heated with good efficiency. Further, since it is not necessary to wrap around the entire pipe as in the case of the strip heater, and the heater installation portion having the L-shaped structural pipe is not required, the heater installation portion can be made a simple mechanism.
另外，加熱裝置具有加熱器部與熱能的擴散部，在上述擴散部的周圍配置著複數個鰭片，由於上述鰭片是靠近配管(管狀部件)的內壁或與其接觸，在組裝時可以容易地將加熱器部設置在配管的內部中央。此外，由於鰭片是安裝在加熱器部的周圍，可使熱能有效且廣泛地在加熱器的周圍釋出，而可以盡量地減少配管內部的溫差。Further, the heating device includes a heater portion and a heat diffusing portion, and a plurality of fins are disposed around the diffusing portion, and since the fin is close to or in contact with the inner wall of the pipe (tubular member), it can be easily assembled. The heater portion is placed in the center of the interior of the pipe. Further, since the fins are mounted around the heater portion, heat energy can be efficiently and widely released around the heater, and the temperature difference inside the pipe can be minimized.
還有，較佳的情況是，上述加熱器部的至少發熱部是棒狀；上述複數個鰭片是配置成：在該加熱器部的周圍排成一圈，並在相互之間具有間隔。Further, it is preferable that at least the heat generating portion of the heater portion has a rod shape, and the plurality of fins are disposed so as to be arranged around the heater portion with a space therebetween.
另外，較佳的情況是，上述複數個鰭片是由沿著上述加熱器部的長邊方向間隔設置的複數個鰭片群所構成，上述鰭片群的一個是由配置成在上述加熱器部的周圍排成一圈、並在相互之間具有間隔的複數個鰭片所構成。Further, preferably, the plurality of fins are constituted by a plurality of fin groups which are spaced apart along a longitudinal direction of the heater portion, and one of the fin groups is disposed at the heater The circumference of the portion is formed in a circle and is formed by a plurality of fins spaced apart from each other.
另外，較佳的情況是，上述鰭片的面是朝向上述加熱器部的長邊方向、或是朝向相對於上述加熱器部的長邊方向的斜向。藉由這些鰭片而使氣流的一部分受到阻擋而使氣流紊亂。藉此，由來自鰭片的熱而升溫的氣體受到擾亂，因此可以使從配管內的中央部到週邊部的溫度分佈進一步地均一化。Moreover, it is preferable that the surface of the fin faces the longitudinal direction of the heater portion or the oblique direction with respect to the longitudinal direction of the heater portion. By these fins, a part of the airflow is blocked and the airflow is disturbed. As a result, the gas heated by the heat from the fins is disturbed, so that the temperature distribution from the central portion to the peripheral portion in the pipe can be further uniformized.
另外，較佳的情況是，上述鰭片的面是與上述加熱器部的長邊方向平行、或是相對於上述長邊方向為傾斜。Further, preferably, the surface of the fin is parallel to the longitudinal direction of the heater portion or inclined with respect to the longitudinal direction.
另外，較佳的情況是，上述擴散部是由覆蓋上述加熱器部的周圍的筒狀部件、與安裝於上述筒狀部件的上述複數個鰭片所構成。藉此，可使加熱器部的熱能以良好的效率傳導至複數個鰭片的全面。Moreover, it is preferable that the diffusing portion is constituted by a tubular member that covers the periphery of the heater portion and the plurality of fins that are attached to the tubular member. Thereby, the thermal energy of the heater portion can be conducted to the entirety of the plurality of fins with good efficiency.
另外，較佳的情況是，加熱器部是由中心部的發熱體、覆蓋發熱體的周圍的絕緣物、與作為外皮的護套(sheath)部件所構成的棒狀物，其一端是受到護套部件的封裝、另一端則是至少作為導線引入部的筒狀物，藉此將其安裝至配管的作業可以容易進行。Further, it is preferable that the heater portion is a rod composed of a heat generating body at the center portion, an insulator covering the periphery of the heat generating body, and a sheath member as a sheath, and one end of which is protected. The package of the sleeve member and the other end are at least a tubular body as a wire lead-in portion, whereby the work of attaching it to the pipe can be easily performed.
還有，較佳的情況是，具有加熱裝置的配管是經由該法蘭(flange)而得以將各配管安裝於其他配管，由於可以簡單地將具有加熱裝置的配管設置在必要的處所，而可以提昇加熱器的設置作業的效率。Further, it is preferable that the piping having the heating device can be attached to the other piping via the flange, and the piping having the heating device can be easily installed in a necessary space. Improve the efficiency of the heater setting work.
如上所述，若根據本發明，其加熱器設置部的構造簡單、且可以以良好的效率加熱配管內部，或是可以提昇加熱器設置作業的效率。As described above, according to the present invention, the heater installation portion has a simple structure and can heat the inside of the piping with good efficiency, or can improve the efficiency of the heater installation work.
以下，針對本發明的實施形態，一面參照圖式一面進行說明。Hereinafter, embodiments of the present invention will be described with reference to the drawings.
第3圖是顯示本發明第一實施形態之具有加熱裝置的配管之構成。第3圖的左側的圖是從側面透視具有加熱器的配管的視圖；右側的圖則是從左側的圖之具有加熱器的配管的右側看過去的視圖。第4(a)~4(c)圖是構成上述具有加熱裝置的配管所具有的擴散部的複數個支持部單元，而從其中抽出一個單元來顯示的圖，其中第4(b)圖為一個單元的側面圖，第4(a)圖是從第4(b)圖的一個單元的左側看過去的視圖，第4(c)圖是從第4(b)圖的一個單元的右側看過去的視圖。Fig. 3 is a view showing the configuration of a pipe having a heating device according to the first embodiment of the present invention. The figure on the left side of Fig. 3 is a view in which the pipe having the heater is seen from the side; the figure on the right side is a view from the right side of the pipe having the heater on the left side. 4(a) to 4(c) are diagrams showing a plurality of support unit units constituting the diffusing portion of the pipe having the heating device, and one unit is drawn therefrom, wherein FIG. 4(b) is a view. A side view of a unit, Fig. 4(a) is a view seen from the left side of a unit of Fig. 4(b), and Fig. 4(c) is a view from the right side of a unit of Fig. 4(b) Past view.
如第3圖所示，具有加熱器的配管101是由長度約450mm、直徑約48mm的配管(管狀部件)12、設置在配管12的兩端的法蘭(配管相互連接部)11、與設置於配管12內部的加熱裝置13所構成。As shown in Fig. 3, the pipe 101 having a heater is a pipe (tubular member) 12 having a length of about 450 mm and a diameter of about 48 mm, a flange (a pipe connecting portion) provided at both ends of the pipe 12, and The heating device 13 inside the pipe 12 is constituted.
與加熱裝置13的設置處對應的部分之配管12的直徑，若可以確保氣流通路的截面積，則如第3圖而使其與配管12兩端的直徑相同；若有必要確保氣流通路的截面積較大的情況，則如第10(a)圖所示，使與加熱裝置13的設置處對應的此部分之配管12的直徑大於兩端的配管12的直徑。The diameter of the pipe 12 corresponding to the portion where the heating device 13 is provided can ensure the same cross-sectional area of the air flow path as in Fig. 3, and the diameter of both ends of the pipe 12 is the same; if necessary, the cross-sectional area of the air flow path is ensured. In the larger case, as shown in Fig. 10(a), the diameter of the pipe 12 of this portion corresponding to the installation portion of the heating device 13 is made larger than the diameter of the pipe 12 at both ends.
加熱裝置13是在導線引入部的那一側有90度的彎曲，而成為貫通配管12的管壁的形狀。其為可裝設至配管布局的直線部分的形狀，此直線部分是佔了配管布局的多數，而為可加熱配管101的全區的形狀。另外，導線部是在延長加熱器本體部分的護套(sheath)部件而完全受其保護而避開流通氣體的狀態下，導出至配管之外。The heating device 13 has a shape that penetrates the pipe wall of the pipe 12 by bending 90 degrees on the side of the wire lead-in portion. This is a shape of a straight portion that can be attached to the piping layout, and this straight portion is a majority of the piping layout, and is a shape of the entire area of the heatable piping 101. Further, the lead portion is led out to the outside of the pipe while extending the sheath member of the heater main body portion and completely protecting it from the flow of the gas.
如後文的(具有加熱器的配管的安裝方法的說明)的項目中的詳細敘述，具有加熱器的配管101，是可經由法蘭11而將各配管安裝於另一個配管。配管12的兩端的法蘭(flange)11，是與另一個配管的法蘭對向，而在接觸面具有密封面11a，用以中間隔著中心環(center ring)而進行密封。As described in detail in the item of the following description of the method of attaching the piping of the heater, the pipe 101 having the heater can be attached to the other pipe via the flange 11. The flange 11 at both ends of the pipe 12 faces the flange of the other pipe, and has a sealing surface 11a on the contact surface for sealing with a center ring therebetween.
加熱裝置13是如第3圖所示，由加熱器部51a與擴散部51c所構成，而擴散部51c是具有與配管12內壁接觸或靠近而將加熱器部51a保持在配管中央、且不會妨礙氣體流通的構造。擴散部51c是由對半導體製造所使用的種種氣體的耐腐蝕性優異、且亦為散熱材料及熱傳材料的不鏽鋼等所構成。As shown in Fig. 3, the heating device 13 is composed of a heater portion 51a and a diffusing portion 51c, and the diffusing portion 51c has a heater portion 51a that is in contact with or close to the inner wall of the pipe 12, and does not hold the heater portion 51a in the center of the pipe. A structure that hinders the circulation of gas. The diffusion portion 51c is made of stainless steel or the like which is excellent in corrosion resistance to various gases used in semiconductor manufacturing, and is also a heat dissipation material and a heat transfer material.
加熱器部51a是如第3圖所示，具有圓柱狀。加熱器部51a是由鐵鉻鋁電阻線(kanthal wire)、鎳鉻合金線(nichrome wire)、其他的發熱線所構成的中心部的發熱體(由於位於加熱器部51a的內部，故在圖式中未顯示)、覆蓋發熱體的周圍的氧化鎂等的絕緣物21、覆蓋上述發熱體與絕緣物21的周圍的圓筒狀的不鏽鋼護套部件22所構成。而絕緣物21是覆蓋包含發熱體的側面的全部的周圍，但在第3圖中僅揭露暴露在側面的絕緣物。在第3圖中，護套部件22並未設置在側面，但可將其設置為覆蓋至少側面。The heater portion 51a has a columnar shape as shown in Fig. 3 . The heater portion 51a is a heat generating body at the center portion composed of a kanthal wire, a nichrome wire, and other heating wires (it is located inside the heater portion 51a). The insulating material 21 such as magnesium oxide covering the periphery of the heating element, and the cylindrical stainless steel sheathing member 22 covering the periphery of the heating element and the insulator 21 are formed. On the other hand, the insulator 21 covers all the sides of the side surface including the heat generating body, but in FIG. 3, only the insulator exposed on the side surface is exposed. In Fig. 3, the sheath member 22 is not provided on the side, but it may be provided to cover at least the side.
還有，加熱器部51a具有將電力供應至發熱體的一對的導線14、與用以進行溫度測定的熱電偶15。Further, the heater portion 51a has a pair of lead wires 14 for supplying electric power to the heat generating body, and a thermocouple 15 for measuring the temperature.
此種加熱器可發熱到500℃以上，而具有容易將排放氣體的溫度加熱至100℃~400℃的特徵。Such a heater can heat up to 500 ° C or more, and has a feature of easily heating the temperature of the exhaust gas to 100 ° C to 400 ° C.
而相對於上述加熱器，帶狀加熱器本身由於是樹脂製外皮(絕緣體)，而發熱上限為120℃，在配管的外側設置帶狀加熱器的情況，僅能將配管的內部升溫至60~70℃左右。在此水準的溫度之下，並未充分地防止氣體生成物附著至配管內壁。In the case of the heater, the strip heater itself is made of a resin sheath (insulator), and the upper limit of heat generation is 120 ° C. When a strip heater is provided outside the pipe, only the inside of the pipe can be heated to 60 °. Around 70 °C. Below this level of temperature, the gas product is not sufficiently prevented from adhering to the inner wall of the pipe.
熱擴散部51c是如第3圖所示，由相同構造的複數個單元51b所構成。一個的單元51b是如第4(a)~4(c)圖所示，由圓筒狀的筒狀部件23、與設於筒狀部件23的單側端部的八片的鰭片24所構成。八片的鰭片24是構成一個鰭片群52。構成鰭片群52的八片的鰭片24是以其一端在筒狀部件23的端部周圍排成一圈、且以等間隔的方式安裝在此一端部，八片的鰭片24的另一端則從此一端部斜向展開。彼此鄰接的鰭片24的設置方式，是以不妨礙氣體的流通的樣式來打開彼此的間隙。鰭片的開展面是朝向筒狀部件23的中心軸方向、或是相對於筒狀部件23的中心軸方向上下略為斜向的方式而傾斜。在此實施形態中，單元51b的鰭片前端是靠近配管12的內壁、較好為與其接觸。The thermal diffusion portion 51c is composed of a plurality of cells 51b having the same structure as shown in Fig. 3. One unit 51b is a cylindrical tubular member 23 and eight fins 24 provided at one end of the tubular member 23 as shown in Figs. 4(a) to 4(c). Composition. The eight fins 24 form a fin group 52. The eight fins 24 constituting the fin group 52 are arranged such that one end thereof is arranged around the end of the tubular member 23 and is attached to the one end portion at equal intervals, and the eight fins 24 are additionally provided. One end is spread obliquely from one end. The fins 24 adjacent to each other are disposed in such a manner that the gaps between the fins 24 are opened without interfering with the flow of the gas. The development surface of the fin is inclined so as to be inclined toward the central axis of the tubular member 23 or slightly obliquely upward and downward with respect to the central axis direction of the tubular member 23. In this embodiment, the front end of the fin of the unit 51b is close to the inner wall of the pipe 12, and is preferably in contact therewith.
在此實施形態中，筒狀部件23與八片的鰭片24是一體成形。筒狀部件23與八片的鰭片24的一體構造，是以以下的流程來製作。也就是，準備適當長度的筒狀部件，再沿著筒狀部件的端面的圓周設定等間隔地刻入八處刻痕之處。從上述各處沿著筒狀部件的長邊方向以既定的長度刻入刻痕之後，沿著此刻痕從內側向外側展開筒狀部件。In this embodiment, the tubular member 23 and the eight fins 24 are integrally formed. The integrated structure of the tubular member 23 and the eight fins 24 is produced by the following flow. That is, a cylindrical member of an appropriate length is prepared, and eight points are scored at equal intervals along the circumference of the end surface of the tubular member. After the score is scored at a predetermined length in the longitudinal direction of the tubular member from above, the tubular member is developed from the inside to the outside along the score.
此一擴散部51c的單元51b的製作，是使用對半導體製造所使用的種種氣體的耐腐蝕性優異、且為散熱部件及熱傳部件的不鏽鋼等。單元51b的用途，是將筒狀部件23***加熱器部51a。藉此，可使加熱器部51a的熱能以良好的效率傳導至複數個鰭片24，還可以良好的效率從鰭片24向周圍散播熱能。The unit 51b of the diffusion unit 51c is made of stainless steel or the like which is excellent in corrosion resistance to various gases used in semiconductor manufacturing and which is a heat dissipating member and a heat transfer member. The purpose of the unit 51b is to insert the tubular member 23 into the heater portion 51a. Thereby, the heat energy of the heater portion 51a can be conducted to the plurality of fins 24 with good efficiency, and the heat energy can be spread from the fins 24 to the surroundings with good efficiency.
加熱器部51a的擴散部51c的全體，是由構成擴散部51c的複數個單元51b經由筒狀部件23依序***加熱器部51a所構成。也就是複數個鰭片群52的配置，是沿著加熱器部51a的長邊方向具有既定的間隔。另外，各鰭片的開展面是朝向加熱器部51a的長邊方向、或是相對於加熱器部51a的長邊方向上下略為斜向的方式而傾斜。在第3圖中，相對於從左側向右側流動的氣流，是使鰭片的上部向氣流的下游方向傾斜。換言之，複數個鰭片24的設置，是使其開展面向著加熱器部51a的表面而對立、且設置為在加熱器部51a的周圍而在相互之間具有間隔並排成一圈。The entire diffusing portion 51c of the heater portion 51a is constituted by a plurality of units 51b constituting the diffusing portion 51c sequentially inserted into the heater portion 51a via the tubular member 23. That is, the arrangement of the plurality of fin groups 52 has a predetermined interval along the longitudinal direction of the heater portion 51a. Further, the development surface of each of the fins is inclined so as to face the longitudinal direction of the heater portion 51a or slightly obliquely upward and downward with respect to the longitudinal direction of the heater portion 51a. In Fig. 3, the upper portion of the fin is inclined in the downstream direction of the airflow with respect to the airflow flowing from the left side to the right side. In other words, the plurality of fins 24 are disposed so as to face each other facing the surface of the heater portion 51a, and are disposed around the heater portion 51a with a space therebetween and arranged in a circle.
關於複數個鰭片群52的相互的配置如第3圖所示，是以各鰭片群52的鰭片24之間的間隙，此間隙可沿著加熱器部51a的長邊方向而在相鄰的鰭片群52之間的相同位置依序配置、亦可以相互偏離而配置。As shown in FIG. 3, the mutual arrangement of the plurality of fin groups 52 is a gap between the fins 24 of each fin group 52, and the gap can be along the longitudinal direction of the heater portion 51a. The same positions between the adjacent fin groups 52 are arranged in order, or may be arranged to be offset from each other.
而構成擴散部51c的一個單元的筒狀部件23與八片的鰭片24也可以使用不同的方法來製造。而關於擴散部51c的鰭片24的配置，可使鰭片的開展面相對於加熱器部51a的長邊方向左右傾斜而製作、或是混有各種傾斜的方式來製作亦可。The tubular member 23 constituting one unit of the diffusing portion 51c and the eight fins 24 can also be manufactured by different methods. On the other hand, the arrangement of the fins 24 of the diffusing portion 51c may be performed by inclining the developing surface of the fin with respect to the longitudinal direction of the heater portion 51a, or by mixing various inclinations.
上述將加熱裝置13設置於配管12內之時，加熱器部51a是沿著配管12的中心軸方向且配置於配管12的大致中心部，同時加熱器部51a的長邊方向是與在配管12內已設置加熱裝置13之時的氣流方向一致。因此，導入此具有加熱器的配管101的氣體，是沿著加熱器部51a的長邊方向流動，並在擴散部51c的鰭片24之間流通。此時，流通的氣體，會因為開展面朝向氣流方向的鰭片24而使氣流的一部分受到阻擋而被打亂。也就是由於來自鰭片24的熱能而升溫的氣氛會因為流通氣體而受到擾動、或是升溫的流通氣體本身受到擾動，而可以使從配管101內的中央部到週邊部左右的溫度分佈進一步地均一化。還有此現象會在各單元依序進行，而增進擴散部全體的溫度均一性。When the heating device 13 is installed in the pipe 12, the heater portion 51a is disposed substantially at the center of the pipe 12 along the central axis direction of the pipe 12, and the longitudinal direction of the heater portion 51a is in the pipe 12 The direction of the airflow when the heating device 13 has been set is the same. Therefore, the gas introduced into the pipe 101 having the heater flows in the longitudinal direction of the heater portion 51a and flows between the fins 24 of the diffusion portion 51c. At this time, the gas that flows in is disturbed by the fin 24 that faces the airflow direction, and a part of the airflow is blocked. In other words, the atmosphere heated by the heat energy of the fins 24 is disturbed by the flow of the gas, or the circulating gas itself which is heated is disturbed, and the temperature distribution from the central portion in the pipe 101 to the peripheral portion can be further increased. Uniformity. In addition, this phenomenon is performed sequentially in each unit, and the temperature uniformity of the entire diffusion portion is improved.
如上所述，若使用本發明第一實施形態之具有加熱器的配管101，由於加熱裝置13是設置於配管12的內部，而可以以良好的效率對配管12內部進行加熱。另外，由於不需要像帶狀加熱器的情況一般纏繞於整個配管、也不需要具有L字型構造配管的加熱器設置部，而可以使加熱器設置部成為簡單的機構。As described above, when the pipe 101 having the heater according to the first embodiment of the present invention is used, since the heating device 13 is provided inside the pipe 12, the inside of the pipe 12 can be heated with good efficiency. Further, since it is not necessary to wrap around the entire pipe as in the case of the strip heater, and the heater installation portion having the L-shaped structural pipe is not required, the heater installation portion can be made a simple mechanism.
另外，由於加熱器部51a是可以使其來到配管12的中央部的方式來作設置，而可以減少從配管12的中央部到週邊部的加熱不均。還有，由於擴散部51c的筒狀部件23是由熱傳部件所構成、鰭片24是由散熱部件所構成而且是安裝在加熱器部51a的周圍，而以良好的效率將熱能傳播至加熱器部51a的周圍並同時廣泛地將熱能散播出去，而可以極力地減少配管12內部的溫差。In addition, since the heater portion 51a can be placed in the center portion of the pipe 12, heating unevenness from the central portion to the peripheral portion of the pipe 12 can be reduced. Further, since the tubular member 23 of the diffusing portion 51c is constituted by the heat transmitting member, and the fin 24 is constituted by the heat radiating member and is attached around the heater portion 51a, the heat energy is propagated to the heating with good efficiency. The heat energy is widely distributed around the portion 51a and at the same time, and the temperature difference inside the pipe 12 can be minimized.
第9(a)圖及第10(a)、10(b)圖是顯示第一實施形態的變形例之具有加熱器的配管的構成的剖面圖。在圖中，以與第3圖的相同元件符號所代表的元件，是與第3圖所示相同的元件。Fig. 9(a) and Figs. 10(a) and 10(b) are cross-sectional views showing the configuration of a pipe having a heater according to a modification of the first embodiment. In the drawings, elements denoted by the same reference numerals as those in Fig. 3 are the same elements as those shown in Fig. 3.
在第9(a)圖的具有加熱器的配管101a中，在擴散部51d的鰭片24a是設置於筒狀部件23a、鰭片24a的開展面是面向氣流的方向這一點是與第3圖所示者相同，但是在擴散部51d的鰭片24a的上部是向氣流的上游那一側傾斜的這一點則與第3圖所示者不同。In the pipe 101a having a heater according to the ninth (a), the fin 24a of the diffusing portion 51d is provided on the tubular member 23a, and the developing surface of the fin 24a faces the direction of the airflow. The same is shown, but the upper portion of the fin 24a of the diffusing portion 51d is inclined to the upstream side of the airflow, which is different from that shown in Fig. 3.
在第10(a)圖的具有加熱器的配管101b中，加熱裝置13是與第3圖所示者相同，但是在對應於加熱裝置13的設置處所的部分的配管12a的直徑是大於兩端的配管12a的直徑這一點則與第3圖所示者不同。此一構成，是適用於有必要確保更大的氣流通路的截面積的情況。In the pipe 101b having the heater in Fig. 10(a), the heating device 13 is the same as that shown in Fig. 3, but the diameter of the pipe 12a corresponding to the portion where the heating device 13 is disposed is larger than the both ends. The diameter of the pipe 12a is different from that shown in Fig. 3. This configuration is suitable for the case where it is necessary to ensure a larger cross-sectional area of the air flow path.
在第10(b)圖的具有加熱器的配管101c中，在擴散部51d的鰭片24a是設置於筒狀部件23a、鰭片24a的開展面是面向氣流的方向這一點是與第3圖所示者相同，但是在擴散部51d的鰭片24a的上部是向氣流的上游那一側傾斜的這一點則與第3圖所示者不同。另外，在對應於加熱裝置13a的設置處所的部分的配管12a的直徑是大於兩端的配管12a的直徑這一點也與第3圖所示者不同。In the pipe 101c having a heater according to the tenth (b)th aspect, the fin 24a of the diffusing portion 51d is provided on the tubular member 23a, and the development surface of the fin 24a faces the direction of the airflow. The same is shown, but the upper portion of the fin 24a of the diffusing portion 51d is inclined to the upstream side of the airflow, which is different from that shown in Fig. 3. Further, the diameter of the pipe 12a corresponding to the portion where the heating device 13a is installed is larger than the diameter of the pipe 12a at both ends, which is also different from that shown in Fig. 3.
而擴散部51d中的上述筒狀部件23a及鰭片24a的材料，與第一實施形態之筒狀部件23及鰭片24相同，可適用不鏽鋼。The material of the tubular member 23a and the fin 24a in the diffusing portion 51d is the same as that of the tubular member 23 and the fin 24 of the first embodiment, and stainless steel can be applied.
藉由這些構成，由於來自鰭片24、24a的熱能而升溫的氣氛會因為流通氣體而受到擾動、或是升溫的流通氣體本身受到擾動，而可以使從配管101a~101c內的中央部到週邊部左右的溫度分佈進一步地均一化。還有此現象會在各單元依序進行，而增進從配管12、12a內中央部到週邊部左右的溫度均一性。With these configurations, the atmosphere heated by the heat energy of the fins 24 and 24a is disturbed by the flow of the gas, or the circulating gas itself which is heated is disturbed, and the central portion from the inside of the pipes 101a to 101c can be moved to the periphery. The temperature distribution around the part is further uniformized. Further, this phenomenon is sequentially performed in each unit, and the temperature uniformity from the central portion to the peripheral portion of the piping 12, 12a is enhanced.
接下來一面參照第3、5、6(a)、6(b)、7(a)、7(b)圖，一面針對將上述的具有加熱器的配管101安裝至排氣配管的方法進行說明。Next, a method of attaching the above-described pipe 101 having a heater to an exhaust pipe will be described with reference to FIGS. 3, 5, 6(a), 6(b), 7(a), and 7(b). .
第5圖為一斜視圖(之一)，顯示將本發明第一實施形態之具有加熱器的配管安裝至排氣配管的方法。第6(a)、6(b)圖是顯示將本發明第一實施形態之具有加熱器的配管安裝至另一個配管的方法的圖(之二)，其中第6(a)圖為斜視圖，第6(b)圖是沿著第6(a)圖的I-I線的剖面圖。第7(a)圖為一模式圖，顯示將本發明第一實施形態之具有加熱器的配管設置於從蝕刻裝置的真空幫浦106連接至除害裝置107的氣體配管的一部分之例子；第7(b)圖是已設置之具有加熱器的配管的剖面圖。在第5及6(a)、6(b)圖中，是使用第3圖所示的配管101來作為具有加熱器的配管；在第7(a)、7(b)圖中，是以第10(a)圖所示的配管101b來作為具有加熱器的配管。關於配管101b的詳細構成則在後文中敘述。Fig. 5 is a perspective view (1) showing a method of attaching a pipe having a heater according to the first embodiment of the present invention to an exhaust pipe. 6(a) and 6(b) are views (2) showing a method of attaching a pipe having a heater according to the first embodiment of the present invention to another pipe, wherein FIG. 6(a) is a perspective view Fig. 6(b) is a cross-sectional view taken along line II of Fig. 6(a). Fig. 7(a) is a schematic view showing an example in which a pipe having a heater according to the first embodiment of the present invention is provided in a part of a gas pipe connected from the vacuum pump 106 of the etching apparatus to the detoxification device 107; Fig. 7(b) is a cross-sectional view of a pipe having a heater provided. In the fifth and sixth (a) and (b) diagrams, the pipe 101 shown in Fig. 3 is used as the pipe having the heater; in the seventh (a) and 7 (b), The pipe 101b shown in Fig. 10(a) is used as a pipe having a heater. The detailed configuration of the pipe 101b will be described later.
首先，如第5圖所示，準備具有加熱器的配管101與排氣配管102、103。而在具有加熱器的配管101中，省略了將導線部引出具有加熱器的配管101之外的構成。First, as shown in Fig. 5, a pipe 101 having a heater and exhaust pipes 102 and 103 are prepared. In the pipe 101 having the heater, the configuration in which the lead portion is taken out of the pipe 101 having the heater is omitted.
排氣配管102是連接於排出有害氣體之蝕刻等裝置的真空幫浦106；排氣配管103則連接於用以將有害氣體無害化的處理裝置107。The exhaust pipe 102 is a vacuum pump 106 connected to an apparatus for etching a harmful gas, and the exhaust pipe 103 is connected to a processing device 107 for detoxifying harmful gases.
排氣配管102、103，是以相當於具有加熱裝置13的配管101的長度相當的間隔隔開並對向。排氣配管102具有配管31與設置於配管31的端部的法蘭32。另一方面，排氣配管103具有配管33與設置於配管33的端部的法蘭34。另外，在法蘭32、34，分別在與具有加熱器的配管101的中心環密封面11a的對應位置同樣具有中心環密封面32a、34a。而排氣配管102也形成有與中心環密封面34a相同的中心環密封面32a，但是在圖面上被法蘭32遮住而看不到。The exhaust pipes 102 and 103 are spaced apart from each other at intervals corresponding to the length of the pipe 101 having the heating device 13. The exhaust pipe 102 has a pipe 31 and a flange 32 provided at an end of the pipe 31. On the other hand, the exhaust pipe 103 has a pipe 33 and a flange 34 provided at an end of the pipe 33. Further, the flanges 32 and 34 respectively have center ring seal faces 32a and 34a at positions corresponding to the center ring seal faces 11a of the pipes 101 having the heaters. The exhaust pipe 102 is also formed with the same center ring seal surface 32a as the center ring seal surface 34a, but is not covered by the flange 32 on the drawing.
接下來，準備中心環35、36，將其分別設置於排氣配管102、103的各中心環密封面32a、34a。而在各中心環密封面11a、32a、34a中，是形成有容納中心環35、36的溝槽，但在第5圖中將其省略。Next, the center rings 35 and 36 are prepared and installed in the center ring seal faces 32a and 34a of the exhaust pipes 102 and 103, respectively. On the central ring seal faces 11a, 32a, 34a, grooves for accommodating the center rings 35, 36 are formed, but they are omitted in Fig. 5.
接下來，將具有加熱器的配管101的兩端的法蘭11與排氣配管102、103的各法蘭32、34以對向的方式擺置，使已是設置於中心環密封面32a、34a的狀態的中心環35、36分別以設置於各法蘭11的中心環密封面11a的方式與其接觸。第6(a)圖是顯示此時的狀態。Next, the flanges 11 at both ends of the pipe 101 having the heater and the flanges 32 and 34 of the exhaust pipes 102 and 103 are placed in an opposing manner so as to be disposed on the center ring sealing faces 32a, 34a. The center rings 35, 36 of the state are in contact with each other so as to be disposed on the center ring seal surface 11a of each flange 11. Figure 6(a) shows the state at this time.
接下來，以顯示排氣配管103與具有加熱器的配管101的法蘭34、11彼此的接觸部之第6(b)圖為代表，如其所示，藉由夾持器(clamper)37與未圖示的螺釘，將排氣配管102與具有加熱器的配管101的法蘭32、11鎖緊而更強力地固定二者的接觸的同時，同樣將排氣配管103與具有加熱器的配管101的法蘭34、11鎖緊而更強力地固定二者的接觸。藉此，藉由中心環35、36，可對外部保持配管101及排氣配管102、103內部的氣密性。Next, a 6th (b) diagram showing the contact portions of the exhaust pipe 103 and the flanges 34 and 11 of the pipe 101 having the heater is representative, as shown therein, by a clamper 37 and The screw (not shown) locks the exhaust pipe 102 and the flanges 32 and 11 of the pipe 101 having the heater to more strongly fix the contact therebetween, and similarly, the exhaust pipe 103 and the pipe having the heater. The flanges 34, 11 of the 101 are locked and more strongly secure the contact therebetween. Thereby, the airtightness of the inside of the piping 101 and the exhaust pipings 102 and 103 can be held by the center rings 35 and 36.
而上述的說明中，是在排氣配管102、103之間連接一個的具有加熱器的配管101，但是排氣配管、也就是從蝕刻裝置等的真空幫浦106排氣口到除害裝置107入口為止的配管若較長，為了將配管內溫度維持在適當溫度以上，較好為設置複數個具有加熱器的配管101。此一情況如第7(a)圖所示，首先將具有第一個加熱器的配管101b設置於最上游、也就是真空幫浦106的排氣口，接下來在第一個配管101b的加熱器效果所未及的部分設置具有第二個加熱器的配管101b。如果這樣作，不是所有的配管都需要加熱器，若為4m左右的配管則配置一個加熱器，即使是更長的配管則配置二至三個加熱器，藉此具有極力防止排氣配管內的氣體反應生成物的附著的效果。第7(b)圖是第7(a)圖之具有加熱器的配管的剖面圖。在第7(a)及7(b)圖中，元件符號「105」是代表與排氣配管102、103相同樣式的排氣配管，而關於其他元件符號，以與第3、5、6(a)、6(b)圖相同的符號所代表的元件，即為代表與第3、5、6(a)、6(b)圖所示相同的元件。In the above description, one heater 101 is connected between the exhaust pipes 102 and 103, but the exhaust pipe, that is, the vacuum pump 106 exhaust port from the etching device or the like, to the detoxification device 107. In order to maintain the temperature in the piping at a suitable temperature or higher, it is preferable to provide a plurality of pipes 101 having heaters. In this case, as shown in Fig. 7(a), first, the pipe 101b having the first heater is disposed at the most upstream, that is, the exhaust port of the vacuum pump 106, and then heated at the first pipe 101b. A pipe 101b having a second heater is provided in a portion that is not in effect. If this is done, not all the pipes require a heater. If it is a pipe of about 4 m, a heater is installed. Even if it is a longer pipe, two to three heaters are arranged, thereby preventing the inside of the exhaust pipe as much as possible. The effect of adhesion of a gas reaction product. Fig. 7(b) is a cross-sectional view of the pipe having the heater in Fig. 7(a). In the figures 7(a) and 7(b), the component symbol "105" is an exhaust pipe representing the same pattern as the exhaust pipes 102 and 103, and the other component symbols are associated with the third, fifth, and sixth ( The elements represented by the same symbols in a) and 6(b) represent the same elements as those shown in Figures 3, 5, 6(a), and 6(b).
如上所述，若使用本發明第一實施形態之具有加熱器的配管101，由於具有加熱器的配管101可以經由法蘭11而將各配管101安裝於排氣配管102、103，而可以簡單地將具有加熱器的配管101設置於必要的處所，藉此，可以提昇加熱器設置作業的效率。第10(a)圖所示之具有加熱器的配管101b也是具有同樣效果。As described above, when the pipe 101 having the heater according to the first embodiment of the present invention is used, since the pipe 101 having the heater can be attached to the exhaust pipes 102 and 103 via the flange 11, the pipe 101 can be simply attached. The piping 101 having the heater is placed in a necessary space, whereby the efficiency of the heater setting work can be improved. The pipe 101b having a heater shown in Fig. 10(a) has the same effect.
第8(a)~8(c)圖是顯示本發明第二實施形態相關之具有加熱器的配管104的構成。第8(a)圖為配管104的剖面圖；第8(b)圖是從第8(a)圖所示的右側看過來的側面圖，相當於沿著第8(a)圖的II-II線的剖面圖；第8(c)圖為加熱裝置40的斜視圖。8(a) to 8(c) are views showing a configuration of a pipe 104 having a heater according to a second embodiment of the present invention. Fig. 8(a) is a cross-sectional view of the pipe 104, and Fig. 8(b) is a side view seen from the right side shown in Fig. 8(a), which corresponds to II- along the 8th (a) figure. A cross-sectional view of line II; and an eighth perspective view of heating device 40.
在第二實施形態中，與第一實施形態不同之處是第8(c)圖所示的加熱裝置40，特別是擴散部53b的構成。而在第8(a)~8(c)圖中，以與第3圖相同的符號所代表的元件，即為代表與第3圖所示相同的元件。In the second embodiment, the difference from the first embodiment is the configuration of the heating device 40 shown in Fig. 8(c), particularly the diffusing portion 53b. In the eighth (a) to eighth (c) drawings, the elements denoted by the same reference numerals as in the third embodiment represent the same elements as those shown in Fig. 3.
以下，針對加熱裝置40、特別是擴散部53b的構成進行詳細說明。Hereinafter, the configuration of the heating device 40, particularly the diffusing portion 53b, will be described in detail.
加熱裝置40是如第8(a)圖所示，由加熱器部53a與擴散部53b所構成。The heating device 40 is composed of a heater portion 53a and a diffusing portion 53b as shown in Fig. 8(a).
加熱器部53a為一筒狀物，是由內部中心的發熱體41、覆蓋上述發熱體41的周圍的絕緣物42a、與覆蓋發熱體41與絕緣物42a的護套部件42b所構成的略成棒狀的物體，其前端受到護套部件42b的覆蓋，另一端則彎曲90度而作為導線及熱電偶的導入部。The heater portion 53a is a tubular body, and is composed of a heat generating body 41 at the inner center, an insulator 42a covering the periphery of the heat generating body 41, and a sheath member 42b covering the heat generating body 41 and the insulator 42a. In the rod-shaped object, the tip end is covered by the sheath member 42b, and the other end is bent at 90 degrees to serve as an introduction portion for the lead wire and the thermocouple.
擴散部53b是由覆蓋加熱器部53a的周圍的圓筒狀的筒狀部件43、與安裝於筒狀部件43的表面之八片細長板狀的鰭片44所構成。鰭片44是如第8(a)~8(c)圖所示，從加熱器部53a的中心以放射狀延伸至靠近或接觸配管(管狀部件)12內壁的位置為止、且為等間隔設置、而且是沿著筒狀部件43的長邊方向而配置於筒狀部件43的表面。換言之，鰭片44是配置在筒狀部件43的表面周圍並設置相等的間隔，而使其開展面與加熱器部53a的長邊方向平行。在圖式中，鰭片44是與發熱體41平行，但是亦可為了稍稍提昇散熱效果而為附帶傾斜並捲曲的形態。另外，此擴散部53b是在長邊方向一體製作，但亦可以如圖所示分割成複數個。若考慮到製作的方便，較好為分割的形式。The diffusing portion 53b is composed of a cylindrical tubular member 43 that covers the periphery of the heater portion 53a and eight elongated plate-shaped fins 44 attached to the surface of the tubular member 43. The fins 44 are radially extended from the center of the heater portion 53a to a position close to or in contact with the inner wall of the pipe (tubular member) 12, as shown in Figs. 8(a) to 8(c), and are equally spaced. The arrangement is provided on the surface of the tubular member 43 along the longitudinal direction of the tubular member 43. In other words, the fins 44 are disposed around the surface of the tubular member 43 at equal intervals so that the development surface thereof is parallel to the longitudinal direction of the heater portion 53a. In the drawing, the fins 44 are parallel to the heating element 41, but may be in a form of being inclined and curled in order to slightly enhance the heat dissipation effect. Further, the diffusing portion 53b is integrally formed in the longitudinal direction, but may be divided into a plurality of pieces as shown in the drawing. If the convenience of production is taken into consideration, it is preferably in the form of division.
擴散部53b的筒狀部件43及鰭片44是與第一實施形態相同，是使用對半導體製造所使用的種種氣體的耐腐蝕性優異、且亦為散熱材料及熱傳材料的材料，例如為不鏽鋼。The tubular member 43 and the fins 44 of the diffusing portion 53b are the same as the first embodiment, and are excellent in corrosion resistance for various gases used in semiconductor manufacturing, and are also materials for heat dissipating materials and heat transfer materials, for example, stainless steel.
如第8(a)、8(b)圖所示，將此加熱裝置40設置於配管12內時，加熱器部53a是沿著配管12的中心軸方向設置、且設置在配管12的大致中心部的同時，加熱器部53a的長邊方向是與氣流的方向一致。導入具有加熱器的配管104的氣體，是沿著加熱器部53a的長邊方向流動，而在擴散部53b的鰭片44之間流通。此一擴散部53b的鰭片間是形成熱能的擴散室。As shown in Figs. 8(a) and 8(b), when the heating device 40 is installed in the pipe 12, the heater portion 53a is provided along the central axis direction of the pipe 12 and is provided at substantially the center of the pipe 12. At the same time as the portion, the longitudinal direction of the heater portion 53a coincides with the direction of the airflow. The gas introduced into the pipe 104 having the heater flows in the longitudinal direction of the heater portion 53a and flows between the fins 44 of the diffusing portion 53b. A diffusion chamber for forming thermal energy between the fins of the diffusion portion 53b is formed.
若根據第二實施形態相關之具有加熱器的配管104，八片鰭片44是間隔式地配置於加熱器部53a的表面周圍，而使其開展面與加熱器部53a的長邊方向平行。According to the pipe 104 having the heater according to the second embodiment, the eight fins 44 are spaced apart around the surface of the heater portion 53a so that the development surface thereof is parallel to the longitudinal direction of the heater portion 53a.
因此，氣流不會受到妨礙，並可以容易地將加熱裝置40配置於配管12內部。另外，因此，可以以良好的效率加熱配管12內部。還有，由於不需要像帶狀加熱器的情況一般纏繞於整個配管、也不需要具有L字型構造配管的加熱器設置部，而可以使加熱器設置部成為簡單的機構。Therefore, the air flow is not hindered, and the heating device 40 can be easily disposed inside the pipe 12. Further, therefore, the inside of the pipe 12 can be heated with good efficiency. Further, since it is not necessary to wrap around the entire pipe as in the case of the strip heater, and the heater installation portion having the L-shaped structural pipe is not required, the heater installation portion can be made a simple mechanism.
由於其他構成，是具有與第一實施形態相關之具有加熱器的配管同樣的構成，而具有與第一實施形態相關之具有加熱器的配管同樣的效果。The other configuration is the same as that of the pipe having the heater according to the first embodiment, and has the same effect as the pipe having the heater according to the first embodiment.
第9(b)圖及第10(c)、10(d)圖是顯示第二實施形態的變形例之具有加熱器的配管的構成的剖面圖。在圖中，以與第8(a)~8(c)圖的相同元件符號所代表的元件，是與第8(a)~8(c)圖所示相同的元件。Fig. 9(b) and Figs. 10(c) and 10(d) are cross-sectional views showing the configuration of a pipe having a heater according to a modification of the second embodiment. In the figure, elements denoted by the same reference numerals as in the eighth (a) to eighth (c) drawings are the same elements as those shown in Figs. 8(a) to 8(c).
在第9(b)圖的具有加熱器的配管104a中，在擴散部的鰭片44a是設置於筒狀部件43a、鰭片44a的開展面是與氣流的方向平行設置這一點是與第8(a)~8(c)圖所示者相同，但是在擴散部53c的鰭片44a是沿著氣流分離成複數個、並彼此間隔配置的這一點則與第8(a)~8(c)圖所示者不同。In the pipe 104a having a heater according to the ninth (b)th aspect, the fin 44a of the diffusing portion is provided on the tubular member 43a, and the developing surface of the fin 44a is provided in parallel with the direction of the airflow. (a) to 8(c) are the same as those shown in the figure, but the fins 44a of the diffusing portion 53c are separated into a plurality of airflows along the airflow, and are arranged at intervals, and then 8(a) to 8(c) ) The figures are different.
在第10(c)圖的具有加熱器的配管104b中，加熱裝置40是與第8(a)~8(c)圖所示者相同，但是在對應於加熱裝置40的設置處所的部分的配管12a的直徑是大於兩端的配管12a的直徑這一點則為不同。In the pipe 104b having a heater in Fig. 10(c), the heating device 40 is the same as that shown in Figs. 8(a) to 8(c), but corresponds to the portion of the installation place of the heating device 40. The diameter of the pipe 12a is larger than the diameter of the pipe 12a at both ends.
在第10(d)圖的具有加熱器的配管104c中，在擴散部53c的鰭片44a是設置於筒狀部件43a、鰭片44a的開展面是與氣流的方向平行配置這一點是與第8(a)~8(c)圖所示者相同，但是在擴散部53c的鰭片44a是沿著氣流分離成複數個、並彼此間隔配置的這一點則與第8(a)~8(c)圖所示者不同。另外，在對應於加熱裝置40a的設置處所的部分的配管12a的直徑是大於兩端的配管12a的直徑這一點也與第8(a)~8(c)圖所示者不同。In the pipe 104c having the heater of the tenth (d) diagram, the fins 44a of the diffusing portion 53c are disposed on the developing surface of the tubular member 43a and the fins 44a in parallel with the direction of the airflow. 8(a) to 8(c) are the same as those shown in the figure, but the fins 44a of the diffusing portion 53c are separated into a plurality of airflows along the airflow, and are arranged at intervals, and then 8(a) to 8( c) The figures are different. Further, the diameter of the pipe 12a corresponding to the portion where the heating device 40a is installed is larger than the diameter of the pipe 12a at both ends, and is different from those shown in Figs. 8(a) to 8(c).
而擴散部53c中的上述筒狀部件43a及鰭片44a的材料，與第二實施形態之筒狀部件43及鰭片44相同，可適用不鏽鋼。另外，既可以在長度與加熱器部的長度大致相同的一個筒狀部件43a設置所有的鰭片44a；也可以以長度短於加熱器部的長度的筒狀部件43a、與設置為在筒狀部件43a排成一圈之複數個鰭片44a所構成的鰭片群為一組而形成單元，而將複數個單元依序***加熱器部來作設置。The material of the tubular member 43a and the fin 44a in the diffusing portion 53c is the same as that of the tubular member 43 and the fin 44 of the second embodiment, and stainless steel can be applied. Further, all of the fins 44a may be provided in one cylindrical member 43a having a length substantially equal to the length of the heater portion, or may be provided in a cylindrical shape with a tubular member 43a having a length shorter than the length of the heater portion. The fin group formed by the plurality of fins 44a in which the member 43a is arranged in one turn forms a unit, and a plurality of units are sequentially inserted into the heater portion to be disposed.
藉由這些構成，由於來自鰭片44、44a的熱能而升溫的氣氛會因為流通氣體而受到擾動、或是升溫的流通氣體本身受到擾動，而可以使從配管104a~104c內的中央部到週邊部左右的溫度分佈進一步地均一化。還有此現象會在各單元依序進行，而增進從配管12、12a內中央部到週邊部左右的溫度均一性。According to these configurations, the atmosphere heated by the heat energy of the fins 44 and 44a is disturbed by the flow of the gas, or the circulating gas itself which is heated is disturbed, and the central portion from the inside of the pipes 104a to 104c can be moved to the periphery. The temperature distribution around the part is further uniformized. Further, this phenomenon is sequentially performed in each unit, and the temperature uniformity from the central portion to the peripheral portion of the piping 12, 12a is enhanced.
以上，已藉由實施形態來詳細地說明本發明，但是本發明的範圍並非受限於上述形態中具體顯示的範例，在不脫離本發明之精神和範圍的上述實施形態的變更均包含於本發明的範圍內。The present invention has been described in detail by the embodiments of the present invention, and the scope of the present invention is not limited by the specific examples shown in the above-described embodiments, and modifications of the above-described embodiments without departing from the spirit and scope of the invention are included in the present invention. Within the scope of the invention.
例如，上述實施形態中，是以不鏽鋼來作為擴散部51c、51d、53b、53c的筒狀部件23、23a、43、43a及鰭片24、24a、44、44a的材料，但不限於此，只要是對於半導體製造所使用的氣體具有耐蝕性的金屬材料即可。金屬材料若是具有耐蝕性、還特別是散熱、熱傳等性質優異的材料更佳。For example, in the above embodiment, stainless steel is used as the material of the tubular members 23, 23a, 43 and 43a and the fins 24, 24a, 44 and 44a of the diffusing portions 51c, 51d, 53b and 53c, but is not limited thereto. As long as it is a metal material having corrosion resistance to a gas used in semiconductor manufacturing. The metal material is preferably a material having excellent corrosion resistance, particularly heat dissipation and heat transfer.
另外，上述擴散部51c、51d、53b、53c的鰭片24、24a、44、44a的表面為平滑，但亦可以形成凹凸而增加表面積，而提昇其散熱性能。Further, the surfaces of the fins 24, 24a, 44, and 44a of the diffusing portions 51c, 51d, 53b, and 53c are smooth, but irregularities may be formed to increase the surface area, thereby improving the heat dissipation performance.
另外，複數個鰭片群52是沿著加熱器部51a的長邊方向並具有既定的間隔而規則性地設置，且鰭片群52的鰭片24是在加熱器部51a的周圍排成一圈、且以等間隔的方式設置，但是亦可以在加熱器部51a的周圍隨機地配置鰭片24。此變形例也可適用於第9(a)、10(b)圖的加熱裝置13a。Further, the plurality of fin groups 52 are regularly arranged along the longitudinal direction of the heater portion 51a with a predetermined interval, and the fins 24 of the fin group 52 are arranged around the heater portion 51a. The circles are provided at equal intervals, but the fins 24 may be randomly arranged around the heater portion 51a. This modification is also applicable to the heating device 13a of Figs. 9(a) and 10(b).
另外，本發明之具有加熱器的配管，是適用於排氣配管的一部分，但亦可單獨取代爐具來使用。Further, the pipe having the heater of the present invention is applied to a part of the exhaust pipe, but may be used alone instead of the oven.
1．．．配管1. . . Piping
2．．．帶狀加熱器2. . . Strip heater
3．．．配管3. . . Piping
3a．．．彎曲部3a. . . Bending
4．．．加熱器4. . . Heater
11．．．法蘭11. . . Flange
11a．．．中心環密封面11a. . . Center ring sealing surface
12．．．配管(管狀部件)12. . . Piping (tubular parts)
12a．．．配管12a. . . Piping
13．．．加熱裝置13. . . heating equipment
13a．．．加熱裝置13a. . . heating equipment
14．．．導線14. . . wire
15．．．熱電偶(溫度測量裝置)15. . . Thermocouple (temperature measuring device)
21．．．絕緣物twenty one. . . Insulator
22．．．護套部件twenty two. . . Sheath component
23．．．筒狀部件twenty three. . . Cylindrical component
23a．．．筒狀部件23a. . . Cylindrical component
24．．．鰭片twenty four. . . Fin
24a．．．鰭片24a. . . Fin
31．．．配管31. . . Piping
32．．．法蘭32. . . Flange
32a．．．中心環密封面32a. . . Center ring sealing surface
33．．．配管33. . . Piping
34．．．法蘭34. . . Flange
34a．．．中心環密封面34a. . . Center ring sealing surface
35．．．中心環35. . . Central ring
36．．．中心環36. . . Central ring
37．．．夾持器37. . . Holder
40．．．加熱裝置40. . . heating equipment
40a．．．加熱裝置40a. . . heating equipment
41．．．發熱體41. . . heating stuff
42a．．．絕緣物42a. . . Insulator
42b．．．護套部件42b. . . Sheath component
43．．．筒狀部件43. . . Cylindrical component
43a．．．筒狀部件43a. . . Cylindrical component
44．．．鰭片44. . . Fin
44a．．．鰭片44a. . . Fin
51a．．．加熱器部51a. . . Heater unit
51b．．．擴散部單元51b. . . Diffusion unit
51c．．．擴散部51c. . . Diffusion department
51d．．．擴散部51d. . . Diffusion department
52．．．鰭片群52. . . Fin group
53a．．．加熱器部53a. . . Heater unit
53b．．．擴散部53b. . . Diffusion department
53c．．．擴散部53c. . . Diffusion department
101．．．具有加熱器的配管101. . . Piping with heater
101a．．．具有加熱器的配管101a. . . Piping with heater
101b．．．具有加熱器的配管101b. . . Piping with heater
101c．．．具有加熱器的配管101c. . . Piping with heater
102．．．排氣配管102. . . Exhaust piping
103．．．排氣配管103. . . Exhaust piping
104．．．具有加熱器的配管104. . . Piping with heater
104a．．．具有加熱器的配管104a. . . Piping with heater
104b．．．具有加熱器的配管104b. . . Piping with heater
104c．．．具有加熱器的配管104c. . . Piping with heater
105．．．排氣配管105. . . Exhaust piping
106．．．蝕刻裝置的真空幫浦106. . . Vacuum pump for etching device
107．．．除害裝置107. . . Detoxification device
第1圖為一側面圖，顯示習知例之具有加熱裝置的配管。Fig. 1 is a side view showing a piping having a heating device according to a conventional example.
第2圖為一側面圖，顯示其他習知例之具有加熱裝置的配管。Fig. 2 is a side view showing a piping having a heating device of another conventional example.
第3圖為一模式圖，顯示本發明第一實施形態之具有加熱裝置的配管之構成。Fig. 3 is a schematic view showing the configuration of a pipe having a heating device according to the first embodiment of the present invention.
第4(a)~4(c)圖是顯示本發明第一實施形態之具有加熱裝置的配管的支持部單元之構成，其中第4(b)圖為側面圖，第4(a)圖是從第4(b)圖的支持部單元的左側看過去的視圖，第4(c)圖是從第4(b)圖的支持部單元的右側看過去的視圖。4(a) to 4(c) are views showing a configuration of a support unit unit of a pipe having a heating device according to the first embodiment of the present invention, wherein FIG. 4(b) is a side view, and FIG. 4(a) is a view. The view seen from the left side of the support unit of Fig. 4(b), and Fig. 4(c) is a view seen from the right side of the support unit of Fig. 4(b).
第5圖為一斜視圖(之一)，顯示將本發明第一實施形態之具有加熱裝置的配管安裝至排氣配管的方法。Fig. 5 is a perspective view (1) showing a method of attaching a pipe having a heating device according to the first embodiment of the present invention to an exhaust pipe.
第6(a)、6(b)圖是顯示將本發明第一實施形態之具有加熱裝置的配管安裝至另一個配管的方法的圖(之二)，其中第6(a)圖為斜視圖，第6(b)圖是沿著第6(a)圖的I-I線的剖面圖。6(a) and 6(b) are diagrams (Part 2) showing a method of attaching a pipe having a heating device according to the first embodiment of the present invention to another pipe, wherein FIG. 6(a) is a perspective view Fig. 6(b) is a cross-sectional view taken along line II of Fig. 6(a).
第7(a)圖為一模式圖，顯示將本發明第一實施形態之具有加熱裝置的配管設置於從蝕刻裝置連接至除害裝置的氣體配管的一部分之構成；第7(b)圖是具有加熱器的配管的剖面圖。Fig. 7(a) is a schematic view showing a configuration in which a pipe having a heating device according to the first embodiment of the present invention is provided in a part of a gas pipe connected to the detoxification device from the etching device; and Fig. 7(b) is a view A cross-sectional view of a pipe having a heater.
第8(a)圖為一側面圖，顯示本發明第二實施形態之具有加熱裝置的配管之構成；第8(b)圖是沿著第8(a)圖的II-II線的剖面圖；第8(c)圖為加熱裝置的斜視圖。Fig. 8(a) is a side view showing the configuration of a pipe having a heating device according to a second embodiment of the present invention; and Fig. 8(b) is a sectional view taken along line II-II of Fig. 8(a); Figure 8(c) is a perspective view of the heating device.
第9(a)、9(b)圖為一系列之剖面圖，顯示本發明實施形態的變形例之相關的具有加熱裝置的配管的構成。Figs. 9(a) and 9(b) are a series of cross-sectional views showing the configuration of a pipe having a heating device according to a modification of the embodiment of the present invention.
第10(a)~10(d)圖為一系列之剖面圖，顯示本發明實施形態的變形例之相關的具有加熱裝置的配管的構成。10(a) to 10(d) are a series of cross-sectional views showing the configuration of a pipe having a heating device according to a modification of the embodiment of the present invention.
11．．．法蘭11. . . Flange
11a．．．中心環密封面11a. . . Center ring sealing surface
12．．．配管(管狀部件)12. . . Piping (tubular parts)
13．．．加熱裝置13. . . heating equipment
14．．．導線14. . . wire
15．．．熱電偶15. . . Thermocouple
21．．．絕緣物twenty one. . . Insulator
22．．．護套部件twenty two. . . Sheath component
23．．．筒狀部件twenty three. . . Cylindrical component
24．．．鰭片twenty four. . . Fin
51a．．．加熱器部51a. . . Heater unit
51b．．．單元51b. . . unit
51c．．．擴散部51c. . . Diffusion department
101．．．具有加熱器的配管101. . . Piping with heater
Claims (6)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW98120379A TWI443277B (en) | 2009-06-18 | 2009-06-18 | A pipe having a heating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW98120379A TWI443277B (en) | 2009-06-18 | 2009-06-18 | A pipe having a heating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201100685A TW201100685A (en) | 2011-01-01 |
| TWI443277B true TWI443277B (en) | 2014-07-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW98120379A TWI443277B (en) | 2009-06-18 | 2009-06-18 | A pipe having a heating device |
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| Country | Link |
|---|---|
| TW (1) | TWI443277B (en) |
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2009
- 2009-06-18 TW TW98120379A patent/TWI443277B/en active
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| Publication number | Publication date |
|---|---|
| TW201100685A (en) | 2011-01-01 |
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