TWI439572B - Electrolytic deposition device for opening foil - Google Patents
Electrolytic deposition device for opening foil Download PDFInfo
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- TWI439572B TWI439572B TW100131705A TW100131705A TWI439572B TW I439572 B TWI439572 B TW I439572B TW 100131705 A TW100131705 A TW 100131705A TW 100131705 A TW100131705 A TW 100131705A TW I439572 B TWI439572 B TW I439572B
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Description
本發明係關於中介著電解液通電陰極滾筒與陽極板，在陰極滾筒的周面析出金屬箔的金屬箔電解析出裝置，特別是關於析出開孔的金屬箔之開孔箔電解析出裝置。The present invention relates to a metal foil electrical analysis device in which a metal foil is deposited on a peripheral surface of a cathode roller by an electrolyte-carrying cathode roller and an anode plate, and in particular, an apertured foil electrical analysis device for depositing a metal foil of an opening.
已知有具備可貯留電解液的電解槽、於電解槽內被旋轉驅動的陰極滾筒、於電解槽內被對向配置於陰極滾筒的周面的陽極板、滑接於陰極滾筒而研磨其周面的研磨輥；藉由中介著電解液通電陰極滾筒與陽極板間，在陰極滾筒的周面使金屬箔析出，藉由從陰極滾筒的周面剝離同時捲取析出的金屬箔，而連續製造金屬箔的金屬箔電解析出裝置。An electrolytic cell in which an electrolyte solution can be stored, a cathode roller that is rotationally driven in the electrolytic cell, an anode plate that is disposed opposite to the circumferential surface of the cathode drum in the electrolytic cell, and a cathode roller are slidably attached to the cathode roller to polish the periphery thereof. A polishing roll on the surface; a metal foil is deposited between the cathode roller and the anode plate by interposing an electrolyte, and a metal foil is deposited on the circumferential surface of the cathode roll, and the metal foil is separated from the peripheral surface of the cathode roll while being continuously taken up. The metal foil of the metal foil is electrically resolved.
近年來，於鋰電池等二次電池，由電池的輕量化與提高能量密度的目的，追求著作為電極使用的金屬箔的多孔化。In recent years, in the secondary battery such as a lithium battery, the purpose of reducing the weight of the battery and increasing the energy density has been to make the metal foil used for the electrode porous.
由這樣的要求，特別是在專利文獻1，提出了在陰極滾筒的周面，把埋設了絕緣性高的合成樹脂之非導體部以特定的圖案配置之開孔箔電解析出裝置。In particular, Patent Document 1 proposes an apertured foil electrical analysis device in which a non-conductor portion in which a highly insulating synthetic resin is embedded in a specific pattern is provided on a peripheral surface of a cathode roller.
在此開孔箔電解析出裝置，在非導體部不析出金屬箔，所以可製造具有所要的排列圖案與開口率的開孔箔。In the apertured foil electrical analysis device, since the metal foil is not deposited in the non-conductor portion, the apertured foil having the desired alignment pattern and aperture ratio can be produced.
此外，於專利文獻2，提出了藉由在陰極滾筒的周面形成具有特定厚度的氧化膜，而使析出的金屬箔多孔質化的開孔金屬箔之製造方法。Further, Patent Document 2 proposes a method for producing an open-cell metal foil in which a deposited metal foil is made porous by forming an oxide film having a specific thickness on a peripheral surface of a cathode roll.
在此製造方法，藉由管理氧化膜的厚度，可以製造具有所要的開口率的開孔箔。In this manufacturing method, by managing the thickness of the oxide film, an apertured foil having a desired aperture ratio can be produced.
[專利文獻1]日本特開平11-323593號公報[Patent Document 1] Japanese Patent Laid-Open No. Hei 11-323593
[專利文獻2]日本特開平8-236120號公報[Patent Document 2] Japanese Patent Laid-Open No. Hei 8-236120
[專利文獻3]日本特開2001-342589號公報[Patent Document 3] Japanese Patent Laid-Open Publication No. 2001-342589
[專利文獻4]日本特開2003-213477號公報[Patent Document 4] Japanese Patent Laid-Open Publication No. 2003-213477
然而，在前述之專利文獻記載的技術，無法解決以下的問題。However, the techniques described in the above-mentioned patent documents cannot solve the following problems.
例如，在專利文獻1所記載的開孔箔電解析出裝置，雖然可以製造依照非導體部的排列圖案之開孔箔，但是合成樹脂不會堅固地接合於鈦等金屬所構成的陰極滾筒，所以埋設的合成樹脂會由陰極滾筒的周面脫落。For example, in the apertured foil electrical analysis device described in Patent Document 1, it is possible to manufacture an apertured foil in accordance with an arrangement pattern of non-conductor portions, but the synthetic resin is not strongly bonded to a cathode roller composed of a metal such as titanium. Therefore, the embedded synthetic resin is peeled off from the peripheral surface of the cathode drum.
此外，在專利文獻2所記載的開孔金屬箔之製造方法，雖可製造具有特定開口率地開孔箔，但是為了要安定地製造具有所要的開口率地開孔箔，必須要跨陰極滾筒全周嚴格管理氧化膜的厚度，所以要確保安定的開口率是困難的。Further, in the method for producing an apertured metal foil described in Patent Document 2, an apertured foil having a specific aperture ratio can be manufactured, but in order to stably manufacture an apertured foil having a desired aperture ratio, it is necessary to cross the cathode roller. The thickness of the oxide film is strictly controlled throughout the week, so it is difficult to ensure a stable opening ratio.
特別是已知道氧化膜是因暴露於陽極板所產生的氧氣或電解液飛散的氛圍而自然形成於陰極滾筒的周面，且係由具有導電性同時伴隨著其厚度的增加電阻跟著增大的物質所構成，而具有阻礙兩極間的通電，因妨礙金屬箔的析出而在金屬箔發生針孔的性質(例如，參照專利文獻3)。In particular, it is known that an oxide film is naturally formed on the peripheral surface of the cathode drum due to the atmosphere of oxygen or electrolyte scattering generated by exposure to the anode plate, and is increased in resistance by an increase in electrical resistance accompanied by an increase in thickness thereof. The substance is formed to have a property of preventing pinning between the electrodes and causing pinholes in the metal foil due to the precipitation of the metal foil (see, for example, Patent Document 3).
由這樣的情形，於金屬箔電解析出裝置，設有研磨陰極滾筒的周面的研磨輥，氧化膜被當成是要藉由此研磨輥而由陰極滾筒的周面定期地除去的物質。In such a case, in the metal foil electrolysis apparatus, a polishing roll for polishing the circumferential surface of the cathode roll is provided, and the oxide film is a substance to be periodically removed by the peripheral surface of the cathode roll by the polishing roll.
另一方面，氧化膜雖然具有與陰極滾筒的周面堅固地接合之接合性，但具有阻礙金屬箔與陰極滾筒的周面之接合性之性質，所以已知其是提高金屬箔的剝離性的物質(例如，參照專利文獻4)。On the other hand, the oxide film has a property of strongly bonding to the peripheral surface of the cathode roll, but has a property of inhibiting the bonding property between the metal foil and the peripheral surface of the cathode roll. Therefore, it is known that the peeling property of the metal foil is improved. Substance (for example, refer to Patent Document 4).
如此，氧化膜是具有阻礙金屬箔的析出的性質，以及提高金屬箔的剝離性的性質之雙面性的物質，所以必須要藉由研磨輥定期除去，以成為適度的厚度的方式進行管理。In this way, the oxide film is a double-sided material having a property of inhibiting precipitation of the metal foil and a property of improving the peeling property of the metal foil. Therefore, it is necessary to periodically remove the polishing roll and manage it so as to have an appropriate thickness.
由這樣的氧化膜的性質，進而，如專利文獻2記載的開孔金屬箔的製造方法，為了得到所要的開口率之開孔金屬箔而跨陰極滾筒的全周嚴格管理氧化膜的厚度是極為困難的。Further, as a method for producing an open-cell metal foil according to Patent Document 2, in order to obtain an apertured metal foil having a desired aperture ratio, the thickness of the oxide film is strictly controlled throughout the entire circumference of the cathode roller. difficult.
為了解決以上所述的問題，本案發明人經過銳意研究的結果，發現使自然形成於陰極滾筒的周面的氧化物以過去的方式藉由研磨輥來除去，同時形成無法藉由研磨輥而研磨的無法研磨區域，將此無法研磨區域，以與陰極滾筒之間具有堅固的接合性同時阻礙金屬箔的析出的導電性物質來局部覆蓋，使得對應於無法研磨區域的部分成為開孔的金屬箔之製造成為可能，從而想到本發明。In order to solve the above problems, the inventors of the present invention have found through careful research that the oxide naturally formed on the circumferential surface of the cathode drum is removed by the grinding roller in the past, and is formed by grinding without being rubbed by the grinding roller. The inability to grind the area, and the non-abrasive area is partially covered with a conductive substance having strong bonding property with the cathode roller while blocking the precipitation of the metal foil, so that the portion corresponding to the ungrindable region becomes an open-hole metal foil The manufacture is made possible, and the invention is conceivable.
亦即，本發明之目的在於提供解決前述之現在技術所具有的問題而提出之方案，把無法藉由研磨輥研磨的無法研磨區域形成於陰極滾筒的周面，藉由以阻礙金屬箔的析出之導電性物質局部地覆蓋此無法研磨區域，而析出對應於無法研磨區域的部分成為開孔的金屬箔之開孔箔電解析出裝置。That is, it is an object of the present invention to provide a solution to the problems of the prior art described above, in which an unpolished region which cannot be polished by a polishing roll is formed on the peripheral surface of the cathode roll, thereby hindering the precipitation of the metal foil. The electrically conductive material partially covers the unprocessable region, and an open-cell foil electrical analysis device that deposits a metal foil corresponding to the portion that cannot be polished is opened.
為了達成前述目的，本發明之開孔箔電解析出裝置，構成為具備：可貯留特定的電解液之電解槽、於前述電解槽內被旋轉驅動的陰極滾筒、於前述電解槽內被對向配置於前述陰極滾筒的周面之陽極板、滑接於前述陰極滾筒而除去被形成於其周面的特定氧化物之研磨輥；藉由中介著前述電解液而通電前述陰極滾筒與前述陽極板之間，於前述陰極滾筒的周面析出開孔金屬箔之開孔箔電解析出裝置，於前述陰極滾筒的周面，被形成複數具有特定深度的孔且成為無法藉由前述研磨輥而研磨的區域之無法研磨區域，於前述無法研磨區域，設有具導電性同時隨著其厚度變厚而電阻增加之特定的導電性物質，前述導電性物質，不會由前述陰極滾筒的周面突出而以特定的厚度覆蓋前述孔之內面，析出對應於前述無法研磨區域的部分成為開孔的金屬箔。In order to achieve the above object, an apertured foil electrical analysis device according to the present invention includes: an electrolytic cell capable of storing a specific electrolytic solution; and a cathode roller that is rotationally driven in the electrolytic cell, and is opposed to each other in the electrolytic cell An anode plate disposed on a peripheral surface of the cathode drum, a polishing roller that is slidably attached to the cathode drum to remove a specific oxide formed on a circumferential surface thereof; and the anode roller and the anode plate are energized by interposing the electrolyte solution An apertured foil electrical analysis device for depositing an open-cell metal foil on a peripheral surface of the cathode drum, wherein a plurality of holes having a specific depth are formed on a peripheral surface of the cathode drum, and the polishing roller cannot be ground by the polishing roller. The non-polishing region of the region is provided with a specific conductive material having conductivity and increasing in electrical resistance as the thickness thereof becomes thicker, and the conductive material does not protrude from the peripheral surface of the cathode roller. On the other hand, the inner surface of the hole is covered with a specific thickness, and a metal foil which is an opening corresponding to the portion which cannot be polished is deposited.
根據本發明之開孔箔電解析出裝置的話，可以製造不須管理覆蓋住無法研磨區域的導電性物質的厚度，此外，導電性物質不會由陰極滾筒的周面脫落，被形成具有所要的排列圖案與開口率的複數孔的金屬箔之開孔箔電解析出裝置。According to the apertured foil electrical analysis device of the present invention, it is possible to manufacture a thickness of a conductive material that does not need to be managed to cover the unground region, and the conductive material does not fall off from the peripheral surface of the cathode roller, and is formed to have a desired thickness. An apertured foil electrical resolution device for metal foils having a plurality of apertures arranged in a pattern and an aperture ratio.
以下，參照圖1、圖2說明相關於本發明之開孔箔電解析出裝置之較佳的實施型態。Hereinafter, a preferred embodiment of the apertured foil electrical analysis device according to the present invention will be described with reference to Figs.
相關於本實施型態之開孔箔電解析出裝置1，如個圖所示，被構成為具備：可貯留電解液L之電解槽10、於電解槽10內被旋轉驅動的陰極滾筒20、於電解槽10內被對向配置於陰極滾筒20的周面20a之二枚陽極板30、滑接於陰極滾筒20而除去被形成於其周面20a的特定氧化物之研磨輥80；使由設置在電解槽10的下部的供給管60流入的電解液L通過陰極滾筒20與陽極板30之間同時通電這些，於陰極滾筒20的周面20a析出開孔金屬箔S，使析出的金屬箔S藉由玻璃輥70由陰極滾筒20的周面20a剝離同時捲取，而可以連續製造金屬箔S。The apertured foil electrical analysis device 1 according to the present embodiment is configured to include an electrolytic cell 10 capable of storing the electrolytic solution L, and a cathode roller 20 that is rotationally driven in the electrolytic cell 10, as shown in the figure. The two anode plates 30 disposed on the circumferential surface 20a of the cathode drum 20 in the electrolytic cell 10 are slidably attached to the cathode drum 20 to remove the specific oxide polishing roller 80 formed on the circumferential surface 20a thereof; The electrolyte solution L which is provided in the supply pipe 60 provided in the lower portion of the electrolytic cell 10 is simultaneously supplied with electricity between the cathode drum 20 and the anode plate 30, and the open-cell metal foil S is deposited on the circumferential surface 20a of the cathode drum 20 to form a precipitated metal foil. S is peeled off by the peripheral surface 20a of the cathode drum 20 by the glass roll 70 while being wound up, and the metal foil S can be continuously manufactured.
進而，被構成為可以製造在陰極滾筒20的周面20a，被形成複數具有特定深度的孔231且成為無法藉由研磨輥80而研磨的區域之無法研磨區域23，於此無法研磨區域23，設有具導電性同時隨著其厚度變厚而電阻增加之特定的導電性物質232，導電性物質232，不會由陰極滾筒20的周面20a突出而藉由以特定的厚度覆蓋孔231之內面，析出對應於無法研磨區域23的部分成為開孔的金屬箔S。Further, it is configured such that the peripheral surface 20a of the cathode drum 20 can be formed with a plurality of holes 231 having a specific depth and being incapable of being polished by the polishing roll 80, and the region 23 cannot be polished. A specific conductive material 232 having conductivity and increasing in electrical resistance as the thickness thereof is increased is provided, and the conductive material 232 does not protrude from the peripheral surface 20a of the cathode drum 20 but covers the hole 231 with a specific thickness. On the inner surface, a metal foil S which is an opening corresponding to a portion where the region 23 cannot be polished is deposited.
以下，詳述本實施型態之開孔箔電解析出裝置1。Hereinafter, the apertured foil electrical analysis device 1 of the present embodiment will be described in detail.
電解槽10，被構成為具備：具有特定的曲率之圓弧狀同時對向於陰極滾筒20的周面20a而配置的底板部11、以及正交於陰極滾筒20的旋轉軸方向而配置的側板部12；可以於藉此包圍住的槽內貯留電解液L(例如，硫酸銅)。The electrolytic cell 10 is configured to include a bottom plate portion 11 that is disposed in an arc shape having a specific curvature and that faces the circumferential surface 20a of the cathode drum 20, and a side plate that is disposed orthogonal to the rotation axis direction of the cathode drum 20. The portion 12; the electrolyte L (for example, copper sulfate) may be stored in the tank surrounded thereby.
底板部11，為成為電解槽10的底面之部位，成具有與陰極滾筒20成為同心圓的曲率之約略半圓筒形狀，以在與陰極滾筒20的周面20a之間確保等間隔的間隙的方式被配置。The bottom plate portion 11 is a portion having a bottom surface of the electrolytic cell 10, and has a substantially semi-cylindrical shape having a curvature concentric with the cathode drum 20, and a gap is formed between the peripheral surface 20a of the cathode drum 20 at equal intervals. Is configured.
於此底板部11，具有除了陽極板30的周緣部以外的開口面積(例如800mm×800mm)同時於兩處所被形成通往槽外的約略矩形狀的窗部111，透過此窗部111使陽極板30之一面露出於槽外。The bottom plate portion 11 has an opening area (for example, 800 mm × 800 mm) other than the peripheral edge portion of the anode plate 30, and is formed at approximately two openings into a substantially rectangular window portion 111 that passes outside the groove, and the anode portion is passed through the window portion 111. One side of the plate 30 is exposed outside the slot.
側板部12，為成為電解槽10的側壁面的部位，支撐藉由熔接等而接合的底板部11，同時藉由其下端部抵接於設置面而支撐電解槽10全體。The side plate portion 12 is a portion that serves as a side wall surface of the electrolytic cell 10, and supports the bottom plate portion 11 joined by welding or the like, and supports the entire electrolytic cell 10 by the lower end portion thereof abutting on the installation surface.
如此構成的電解槽10，係以藉由以陽極板30塞住窗部111，而在以底板部11與側板部12包圍的空間貯留電解液L，同時槽外不被浸漬於電解液L而暴露於大氣氛圍的方式設置的。In the electrolytic cell 10 configured as described above, the window portion 111 is closed by the anode plate 30, and the electrolytic solution L is stored in the space surrounded by the bottom plate portion 11 and the side plate portion 12, and the outside of the groove is not immersed in the electrolytic solution L. Set in a way that is exposed to the atmosphere.
陰極滾筒20，是金屬箔S(例如，銅箔)析出的部位，於其外周，具有鈦製的金屬板21被捲繞之圓筒形狀，以可使其下半部埋沒於電解槽10內同時旋轉的方式被軸撐於側板部12。此陰極滾筒20，藉由以特定的馬達驅動，而旋轉於一方向上。The cathode drum 20 is a portion where the metal foil S (for example, copper foil) is deposited, and has a cylindrical shape in which the titanium metal plate 21 is wound around the outer circumference thereof so that the lower half thereof can be buried in the electrolytic cell 10 At the same time, the manner of rotation is supported by the side plate portion 12. The cathode drum 20 is rotated in one direction by being driven by a specific motor.
此外，於陰極滾筒20的周面20a，被形成複數具有特定深度(例如，1mm)的孔231(例如，圓孔φ0.1mm)且成為無法藉由研磨輥80研磨的區域之無法研磨區域23(例如縱×橫0.2mm間距之斜向排列等)，於此無法研磨區域23，設有具導電性同時隨著其厚度變厚而電阻增加的特定的導電性物質232。Further, on the circumferential surface 20a of the cathode drum 20, a plurality of holes 231 having a specific depth (for example, 1 mm) (for example, a circular hole φ 0.1 mm) are formed, and the ungrindable region 23 which is a region which cannot be polished by the polishing roller 80 is formed. (for example, the vertical direction x the horizontal arrangement of the pitch of 0.2 mm, etc.), the region 23 is not polished, and a specific conductive material 232 having conductivity and increasing in electric resistance as the thickness thereof is increased is provided.
此導電性物質232，如圖2所示，係以不由陰極滾筒20的周面20a突出而以特定厚度(例如，100nm以上)覆蓋全部之孔231的內面的方式被形成。As shown in FIG. 2, the conductive material 232 is formed so as not to be protruded from the circumferential surface 20a of the cathode drum 20, and covers the inner surface of all the holes 231 with a specific thickness (for example, 100 nm or more).
導電性物質232，以與構成陰極滾筒20的周面20a的金屬板21具有堅固的接合性之導電性物質為佳，特別是構成周面20a的金屬板21的氮化物、氧化物之例如氮化鈦、氧化鈦為較佳。The conductive material 232 is preferably a conductive material having strong adhesion to the metal plate 21 constituting the circumferential surface 20a of the cathode drum 20, and particularly, a nitride or an oxide such as nitrogen of the metal plate 21 constituting the circumferential surface 20a. Titanium and titanium oxide are preferred.
這樣的導電性物質232，可以藉由習知的薄膜形成法，例如濺鍍法、離子佈植法、化學氣相成長法(CVD)等來成膜。Such a conductive material 232 can be formed by a conventional thin film formation method such as sputtering, ion implantation, chemical vapor deposition (CVD) or the like.
此外，導電性物質232，為構成陰極滾筒20的周面20a的金屬板21的氧化物(例如，氧化鈦)的場合，可以採用使陰極滾筒20的周面20a在酸性溶液中陽極氧化的方法。作為此處使用的溶液，可以舉出硫酸溶液、硼酸溶液、磷酸溶液、鉻酸溶液等，進行陽極氧化時的電壓為0.01～未滿10V，電解時間通常以5～30秒左右為佳。Further, when the conductive material 232 is an oxide (for example, titanium oxide) of the metal plate 21 constituting the circumferential surface 20a of the cathode drum 20, a method of anodizing the circumferential surface 20a of the cathode drum 20 in an acidic solution may be employed. . Examples of the solution used herein include a sulfuric acid solution, a boric acid solution, a phosphoric acid solution, and a chromic acid solution. The voltage at the time of anodization is 0.01 to less than 10 V, and the electrolysis time is usually about 5 to 30 seconds.
進而，以導電性物質232覆蓋孔231時，可以在跨陰極滾筒20的周面20a形成所要的厚度的導電性膜之後，藉由研磨輥80研磨陰極滾筒20的周面20a，而以導電性物質232來覆蓋住僅僅孔231。Further, when the hole 231 is covered with the conductive material 232, the conductive film of a desired thickness can be formed across the circumferential surface 20a of the cathode roll 20, and then the peripheral surface 20a of the cathode roll 20 can be polished by the polishing roll 80 to be electrically conductive. Substance 232 covers only aperture 231.
這是因為除了無法研磨區域23之區域(以下，稱為可研磨區域22)接觸於研磨輥80，所以覆蓋此可研磨區域22的導電性物質232藉由研磨輥80除去，而孔231中是無法研磨的，所以孔231中的導電性物質232不會接觸於研磨輥80而原狀地殘留下來。This is because the region in which the region 23 cannot be polished (hereinafter referred to as the polishable region 22) is in contact with the polishing roller 80, the conductive material 232 covering the polishable region 22 is removed by the polishing roller 80, and the hole 231 is Since the polishing material 232 cannot be polished, the conductive material 232 in the hole 231 does not come into contact with the polishing roll 80 and remains as it is.
此外，構成陰極滾筒20的周面20a的金屬板21之氮化物、氧化物，與陰極滾筒20之周面20a具有堅固的接合性，同時隨著其厚度變厚而電阻增大。這樣的電阻增大妨礙到金屬箔S的析出，所以藉由使孔231以超過一定厚度的導電性物質232覆蓋，可以使無法研磨區域23化為金屬箔S不析出之非析出區域。Further, the nitrides and oxides of the metal plate 21 constituting the circumferential surface 20a of the cathode drum 20 have strong adhesion to the circumferential surface 20a of the cathode drum 20, and the electric resistance increases as the thickness thereof becomes thicker. Since such an increase in resistance hinders the deposition of the metal foil S, the hole 231 can be covered with the conductive material 232 having a certain thickness, so that the unpolished region 23 can be formed into a non-precipitated region where the metal foil S does not precipitate.
總之，導電性物質232，藉由成為一定以上的厚度，以厚度變得越厚越妨礙金屬箔S的析出的方向發生作用，所以只要使孔231成為一定的厚度之導電性物質232可堆積的大小(孔徑及深度)或者更大的大小即為足夠，不需要嚴格管理覆蓋該孔231的導電性物質232的厚度，而可以析出對應於孔231亦即無法研磨區域23的部分成為孔，而對應於可研磨區域22的部分成為箔之金屬箔S。In other words, the conductive material 232 is formed to have a thickness of a certain thickness or more, and the thickness of the conductive material 232 is prevented from affecting the deposition of the metal foil S. Therefore, the conductive material 232 having a constant thickness of the hole 231 can be deposited. The size (aperture and depth) or larger is sufficient, and it is not necessary to strictly manage the thickness of the conductive material 232 covering the hole 231, and the portion corresponding to the hole 231, that is, the region 23 which cannot be polished, can be deposited as a hole. The portion corresponding to the grindable region 22 becomes a foil metal foil S.
此外，藉由適當調整孔231的大小(孔徑)、數量、排列，可以製造具有所要的排列圖案與開口率的被形成複數孔的金屬箔S。Further, by appropriately adjusting the size (aperture), the number, and the arrangement of the holes 231, it is possible to manufacture the metal foil S in which a plurality of holes are formed having a desired arrangement pattern and an aperture ratio.
進而，導電性物質232，即使陰極滾筒20的周面20a藉由研磨輥80來研磨也不會被除去，存在於孔231中，所以減輕了補充導電性物質232等維修處理的負擔。Further, the conductive material 232 is not removed even if the peripheral surface 20a of the cathode drum 20 is polished by the polishing roll 80, and is present in the hole 231. Therefore, the burden of repairing the conductive material 232 and the like is reduced.
此外，特別是，導電性物質232，為構成陰極滾筒20的周面20a的金屬板21的氧化物(氧化鈦)的場合，伴隨著金屬箔S的析出而被形成於陰極滾筒20的周面20a的氧化物也堆積於孔231，所以在孔231適當地補充氧化物。藉此，對孔231補充導電性物質232的維修處理不再是必要的。In addition, when the conductive material 232 is an oxide (titanium oxide) of the metal plate 21 constituting the circumferential surface 20a of the cathode drum 20, it is formed on the circumferential surface of the cathode drum 20 with precipitation of the metal foil S. The oxide of 20a is also deposited in the pores 231, so the oxide is appropriately supplemented in the pores 231. Thereby, maintenance processing for replenishing the hole 231 with the conductive substance 232 is no longer necessary.
另一方面，伴隨著這樣的金屬箔S的析出對孔231補充的氧化物，均堆積到與被形成於可研磨區域22的氧化膜相同的高度，但是超過陰極滾筒20的周面20a的部份的氧化物，會藉由研磨輥80除去。On the other hand, the oxide which is added to the hole 231 by the precipitation of the metal foil S is deposited at the same height as the oxide film formed in the polishable region 22, but exceeds the peripheral surface 20a of the cathode drum 20. The portion of the oxide is removed by the grinding roller 80.
如前所述，形成於陰極滾筒20的周面20a的氧化膜，伴隨著金屬箔S的剝離一部分被剝離而一部分殘留，因此具有阻礙金屬箔S的析出而產生針孔，另一方面又發揮提高金屬箔S的剝離性的效果，因此以具有適度均勻性的厚度的方式進行藉由研磨輥80研磨之維修處理。As described above, the oxide film formed on the circumferential surface 20a of the cathode roll 20 is partially peeled off and peeled off in part, so that the metal foil S is prevented from being deposited and pinholes are formed. Since the effect of the peeling property of the metal foil S is improved, the maintenance process by the grinding|polishing roller 80 is performed by the thickness with moderate uniformity.
然而，孔231無法藉由研磨輥80研磨，進而在金屬膜S之剝離時不會與金屬箔S一起被剝離，氧化物被構成為可以殘留，所以對於金屬箔S的析出區域之可研磨區域22進行如同往常一樣的管理，同時可維持非析出區域之無法研磨區域23的機能。However, the hole 231 cannot be polished by the polishing roll 80, and is not peeled off together with the metal foil S at the time of peeling of the metal film S, and the oxide is configured to remain, so that the polishing region of the deposition region of the metal foil S can be left. 22 performs management as usual while maintaining the function of the non-grinding area 23 of the non-precipitation area.
如此，陰極滾筒20，係以藉由於其周面20a形成複數個無法藉由研磨輥80研磨的，而可堆積氧化物、氮化物之孔231，而於無法研磨區域23故意誘發局部的針孔的發生的方式構成的。In this manner, the cathode drum 20 is formed by depositing a plurality of holes 231 which can not be polished by the polishing roll 80 due to the circumferential surface 20a, and can deposit the oxide and nitride holes 231, and intentionally induce local pinholes in the unground region 23. The way that happens is made up.
其次，陽極板30，為與特定的電源連接而被供電的構件，被形成為具有與陰極滾筒20成同心圓的區域之圓弧狀，以被配置於底板部11與陰極滾筒20之間同時塞住窗部111的方式被安裝於底板部11。Next, the anode plate 30, which is connected to a specific power source and supplied with power, is formed in an arc shape having a region concentric with the cathode drum 20 so as to be disposed between the bottom plate portion 11 and the cathode drum 20 at the same time. A method of plugging the window portion 111 is attached to the bottom plate portion 11.
在本實施型態，兩枚陽極板30被安裝於底板部11，分別之陽極板30具有比窗部111更大的外型(例如，1000mm×1000mm)，分別覆蓋各窗部111。In the present embodiment, the two anode plates 30 are attached to the bottom plate portion 11, and the anode plates 30 respectively have a larger outer shape (for example, 1000 mm × 1000 mm) than the window portion 111, and cover the respective window portions 111.
對陽極板30的底板部11之安裝，在本實施型態係如圖2所示，是藉由以陽極板30與剖面成約略L字形的墊片35，挾持底板部11的周緣而實現的。The mounting of the bottom plate portion 11 of the anode plate 30 is realized in the present embodiment as shown in Fig. 2 by holding the peripheral edge of the bottom plate portion 11 by the anode plate 30 and the spacer 35 having a substantially L-shaped cross section. .
具體而言，於陽極板30藉由熔接等接合的公螺絲33沿著窗部111被植設複數個，於這些***墊片35同時使墊片35抵接於底板部11的周緣而把母螺絲34帽鎖在公螺絲33，藉以在陽極板30與剖面約略為L字形的墊片35之間使底板部11的周緣被挾持，而使陽極板30被固定於底板部11。Specifically, a plurality of male screws 33 joined by welding or the like on the anode plate 30 are implanted along the window portion 111, and the spacers 35 are simultaneously brought into contact with the peripheral edge of the bottom plate portion 11 at the same time. The screw 34 is locked to the male screw 33, whereby the peripheral edge of the bottom plate portion 11 is held between the anode plate 30 and the spacer 35 having a substantially L-shaped cross section, and the anode plate 30 is fixed to the bottom plate portion 11.
藉由如此安裝，窗部111以陽極板30塞住，陽極板30，成為具有暴露於電解液L而與陰極滾筒20對向的電解面30a，與不暴露於電解液L露出於槽外的露出面30b。By thus mounting, the window portion 111 is plugged by the anode plate 30, and the anode plate 30 is provided with the electrolytic surface 30a which is exposed to the electrolytic solution L and faces the cathode drum 20, and is exposed to the outside of the tank without being exposed to the electrolytic solution L. The face 30b is exposed.
此外，於陽極板30的周緣部與窗部111之周緣之間，設有環狀的密封手段。Further, an annular sealing means is provided between the peripheral edge portion of the anode plate 30 and the peripheral edge of the window portion 111.
此密封手段，例如係由把剖面為圓形狀的橡膠或矽膠等彈性構件連接為環狀(矩形狀)的環37所構成，於陽極板30的周緣部，跨全周被凹設形成此環37嵌入的溝部36。The sealing means is formed, for example, by connecting an elastic member such as rubber or silicone rubber having a circular cross section to an annular (rectangular) ring 37, and is formed in the peripheral portion of the anode plate 30 so as to be recessed across the entire circumference. 37 embedded groove portion 36.
藉此，陽極板30被固定於底板部11，此環37被挾入陽極板30的周緣部與窗部111的周緣之間，使陽極板30與窗部111之間沒有間隙，所以防止電解液L由窗部111往槽外漏出。Thereby, the anode plate 30 is fixed to the bottom plate portion 11, and the ring 37 is inserted between the peripheral edge portion of the anode plate 30 and the peripheral edge of the window portion 111, so that there is no gap between the anode plate 30 and the window portion 111, so that electrolysis is prevented. The liquid L leaks out of the groove by the window portion 111.
亦即，修復時可使陽極板30對電解槽10裝拆，同時可以防止電解液L由電解槽10露出，所以可謀求電解槽10之單槽化。That is, at the time of repair, the anode plate 30 can be detached from the electrolytic cell 10, and the electrolytic solution L can be prevented from being exposed from the electrolytic cell 10, so that the single groove of the electrolytic cell 10 can be obtained.
此外，往槽外露出的陽極板30的露出面30b上，設有複數個(例如於一個陽極板30設有9～20個)成為與特定電源連接的電纜線40相連之接點的給電端子31。Further, a plurality of (for example, 9 to 20 of the anode plates 30) are provided on the exposed surface 30b of the anode plate 30 exposed outside the groove, and the power supply terminals which are connected to the cable 40 connected to the specific power source are provided. 31.
各給電端子31，由藉由熔接等接合於陽極板30的露出面30b之公螺絲所構成，以在給電端子31與母螺帽32之間挾入電纜線40的端子部41(例如O型端子，Y型端子)的狀態鎖住母螺帽32，可以把電纜線40連接於給電端子31。Each of the power supply terminals 31 is formed of a male screw that is joined to the exposed surface 30b of the anode plate 30 by welding or the like, so as to break the terminal portion 41 of the cable 40 between the power supply terminal 31 and the female nut 32 (for example, an O type) The state of the terminal, the Y-type terminal) locks the female nut 32, and the cable 40 can be connected to the power supply terminal 31.
藉此，僅藉由鬆開/鎖緊母螺帽32，可以自由裝拆電纜線40，或是拆除被連接於特定處所的給電端子31的電纜線40，可以由槽外簡單地進行把被連接於一給電端子31的電纜線40，替換為被連接於其他給電端子31的電纜線40的調整作業。Thereby, the cable 40 can be detachably attached or detached only by loosening/locking the female nut 32, or the cable 40 connected to the power supply terminal 31 of the specific location can be removed, and can be simply carried out from the outside of the slot. The cable 40 connected to a power supply terminal 31 is replaced with an adjustment operation of the cable 40 connected to the other power supply terminal 31.
進而，各給電端子31，形成為可挾入複數(例如最大為3)電纜線40的端子部41的長度(複數纜線連接手段)。Further, each of the power supply terminals 31 is formed to have a length (a plurality of cable connection means) that can be inserted into a plurality (for example, up to 3) of the cable portions 40 of the cable wires 40.
如此藉由各給電端子31具有可挾入複數電纜線40的長度，例如，可以把對應於析出的金屬箔S的厚度較厚的部分之給電端子31所取下的一條電纜線40，連接於其他電纜線40所連接的金屬箔S的厚度較薄的部分所對應的給電端子31，可以進行謀求析出的金屬箔S的厚度均勻化之調整。Thus, each of the power supply terminals 31 has a length that can be inserted into the plurality of cable wires 40. For example, a cable wire 40 that is removed from the power supply terminal 31 corresponding to the thicker portion of the deposited metal foil S can be connected to The feeding terminal 31 corresponding to the thin portion of the metal foil S to which the other cable wires 40 are connected can be adjusted to make the thickness of the metal foil S to be precipitated uniform.
此外，各給電端子31係以跨露出面30b之全面成為幾乎等間隔的配置圖案來配置的。藉此，可以使形成於電解面30a的電場的電流密度成為相同。Further, each of the power feeding terminals 31 is disposed in an arrangement pattern that is almost equally spaced across the entire exposed surface 30b. Thereby, the current density of the electric field formed on the electrolytic surface 30a can be made the same.
係以通過陰極滾筒20與陽極板30之間的電解液L，由電解槽10的下部流入的方式構成。The electrolyte solution L passing between the cathode drum 20 and the anode plate 30 is configured to flow in from the lower portion of the electrolytic cell 10.
具體而言，於電解槽10的下部，被配置連接於特定泵的兩條供給管60，電解液L由這些供給管60透過電解液供給部13流入電解槽10。Specifically, in the lower portion of the electrolytic cell 10, two supply pipes 60 connected to a specific pump are disposed, and the electrolytic solution L flows from the supply pipe 60 through the electrolytic solution supply portion 13 into the electrolytic cell 10.
電解液供給部13，設於電解槽10的下部，是對陰極滾筒20與陽極板30之間由陰極滾筒20的下方側供給電解液L的部位，具有使通過陰極滾筒20與陽極板30之間的電解液L的流速跨陰極滾筒20的軸方向保持均勻的功能。The electrolyte supply unit 13 is provided at a lower portion of the electrolytic cell 10, and is a portion for supplying the electrolytic solution L between the cathode drum 20 and the anode plate 30 from the lower side of the cathode drum 20, and has a passage through the cathode drum 20 and the anode plate 30. The flow rate of the electrolyte L therebetween maintains a uniform function across the axial direction of the cathode drum 20.
具體而言，電解液供給部13，具備：跨陰極滾筒20的軸方向被延伸設置，具有可以貯留由流入口131流入的電解液L之特定的貯留容量的液貯留室132、與均等配置於液貯留室132的上部，使被貯留於液貯留室132的電解液L朝向陰極滾筒20的下部噴出的複數噴出口133。Specifically, the electrolyte supply unit 13 includes a liquid storage chamber 132 that is extended in the axial direction of the cathode drum 20 and has a specific storage capacity for storing the electrolyte solution L flowing from the inlet 131, and is disposed uniformly. In the upper portion of the liquid storage chamber 132, the electrolytic solution L stored in the liquid storage chamber 132 is discharged toward the lower portion of the cathode drum 20 at a plurality of discharge ports 133.
噴出口133，由從液貯留室132往上方延伸的特定長度的管路所構成，液貯留室132，做為使電解液L由電解槽10外往該液貯留室132流入之用的流入口，具備與供給管60連通的流入口131。The discharge port 133 is constituted by a pipe of a specific length extending upward from the liquid storage chamber 132, and the liquid storage chamber 132 serves as an inlet for allowing the electrolyte L to flow from the outside of the electrolytic cell 10 to the liquid storage chamber 132. There is provided an inflow port 131 that communicates with the supply pipe 60.
此流入口131，被配置於不與噴出口133直接對向的位置，例如，在本實施型態，把流入口131，配置於與側板部12平行且與噴出口133正交的位置。The inflow port 131 is disposed at a position that does not directly face the discharge port 133. For example, in the present embodiment, the inflow port 131 is disposed at a position parallel to the side plate portion 12 and orthogonal to the discharge port 133.
藉由這樣的構成，由供給管60供給的電解液L，藉由透過流入口131流入液貯留室132而暫時被貯留使得被施加至電解液L的壓力沿著陰極滾筒20的軸方向分散，同時由被均等配置於液貯留室132的上部的噴出口133朝向陰極滾筒20的下部噴出，所以流過陰極滾筒20與陽極板30之間的電解液L的流速跨陰極滾筒20之軸方向為均勻的。With such a configuration, the electrolytic solution L supplied from the supply pipe 60 is temporarily stored in the liquid storage chamber 132 by the permeate inlet 131, so that the pressure applied to the electrolytic solution L is dispersed along the axial direction of the cathode drum 20. At the same time, the discharge port 133 which is evenly disposed in the upper portion of the liquid storage chamber 132 is ejected toward the lower portion of the cathode drum 20, so that the flow rate of the electrolyte L flowing between the cathode drum 20 and the anode plate 30 is in the axial direction of the cathode drum 20 average.
進而，藉由把流入口131配置於不與噴出口133直接對向的位置，於液貯留室132內，可以形成沿著陰極滾筒20的軸方向之電解液L的液流。藉此，施加於電解液L的壓力沿著陰極滾筒20的軸方向被分散，所以由噴出口133噴出的電解液L的流速會跨陰極滾筒20的軸方向而變得更為均勻。Further, by arranging the inflow port 131 at a position that does not directly face the discharge port 133, a liquid flow of the electrolytic solution L along the axial direction of the cathode drum 20 can be formed in the liquid storage chamber 132. Thereby, the pressure applied to the electrolytic solution L is dispersed along the axial direction of the cathode drum 20, so that the flow velocity of the electrolytic solution L discharged from the discharge port 133 becomes more uniform across the axial direction of the cathode drum 20.
此外，流入電解槽10的電解液L，沿著陰極滾筒20的周面20a上升，由底板部11的上緣部溢出，而在此底板部11的上緣部，具備不接觸於露出面30b而回收電解液L的回收手段50。Further, the electrolytic solution L flowing into the electrolytic cell 10 rises along the circumferential surface 20a of the cathode roller 20, and overflows from the upper edge portion of the bottom plate portion 11, and the upper edge portion of the bottom plate portion 11 does not contact the exposed surface 30b. The recovery means 50 for recovering the electrolytic solution L.
相關於本實施型態的回收手段50，係由從電解槽10的上緣部承接溢出的電解液L之回收溝51，以及回收回收溝51所承接的電解液L之回收管52所構成。The recovery means 50 according to the present embodiment is constituted by a recovery groove 51 for receiving the electrolytic solution L overflowing from the upper edge portion of the electrolytic cell 10, and a recovery pipe 52 for recovering the electrolytic solution L received by the recovery groove 51.
回收溝51，可以由電解槽10的上緣部承接溢流的電解液L，具有沿著陰極滾筒20的軸方向於上方開口，同時使承接的電解液L朝向回收管52流下的傾斜面。The recovery tank 51 can receive the overflowed electrolytic solution L from the upper edge portion of the electrolytic cell 10, and has an inclined surface that is opened upward in the axial direction of the cathode drum 20 and that allows the received electrolytic solution L to flow downward toward the recovery pipe 52.
藉此，由電解槽10的上緣部溢流之電解液L不會繞至電解槽10的外側，露出面30b不會接觸到電解液L。Thereby, the electrolytic solution L overflowing from the upper edge portion of the electrolytic cell 10 is not wound around the outer side of the electrolytic cell 10, and the exposed surface 30b does not come into contact with the electrolytic solution L.
回收管52，回收由回收溝51流入的電解液L，同時把回收的電解液L誘導至電解液循環用槽等。In the recovery pipe 52, the electrolytic solution L that has flowed in from the recovery tank 51 is recovered, and the recovered electrolytic solution L is induced into the electrolytic solution circulation tank or the like.
如此，可以使由電解槽10溢出的電解液L不會接觸於露出面30b而回收，可以把電解槽10以不使其槽外浸漬於電解液L而暴露於大氣氛圍的方式來設置。In this manner, the electrolytic solution L overflowing from the electrolytic cell 10 can be recovered without being in contact with the exposed surface 30b, and the electrolytic cell 10 can be provided so as not to be immersed in the electrolytic solution L outside the tank and exposed to the atmospheric atmosphere.
此外，於回收溝51，具有容許溢出的電解液L的收容同時覆蓋上方開口的蓋，與排除蓋內空氣的管道(均未圖示)，防止氣化的硫酸銅的抽吸，可以保證作業環境的安全。Further, in the recovery tank 51, a cover for allowing the overflow of the electrolytic solution L to be covered while covering the upper opening, and a duct for removing the air inside the cover (none of which are shown) prevent the vaporization of the vaporized copper sulfate, thereby ensuring the operation. Environmental security.
如此，本實施型態之開孔箔電解析出裝置1，係構成為在陰極滾筒20的周面20a，被形成複數具有特定深度的孔231且成為無法藉由研磨輥80而研磨的區域之無法研磨區域23，於此無法研磨區域23，設有具導電性同時隨著其厚度變厚而電阻增加之特定的導電性物質232而於無法研磨區域23使誘發局部的針孔的發生，可以析出對應於無法研磨區域23的部分成為孔，而對應於可研磨區域22的部分成為箔之的金屬箔S。As described above, the apertured foil electrical analysis device 1 of the present embodiment is configured such that a plurality of holes 231 having a specific depth are formed on the circumferential surface 20a of the cathode drum 20, and the region is not polished by the polishing roller 80. The region 23 cannot be polished, and the region 23 cannot be polished, and a specific conductive material 232 having electrical conductivity and increasing in electrical resistance as the thickness thereof is increased is provided, and the pinhole can be induced in the ungrindable region 23. A portion corresponding to the ungrindable region 23 is formed as a hole, and a portion corresponding to the polishable region 22 is a metal foil S of a foil.
如此構成的開孔薄電解析出裝置1，藉由以下的方式進行動作，而析出金屬箔S。The aperture thin electric analysis device 1 configured as described above is operated in the following manner to precipitate the metal foil S.
首先，由供給管60流入的電解液L，由陰極滾筒20的下部被供給至電解槽10，通過陰極滾筒20的周面20a與陽極板30的電解面30a之間。此時，電解液L，解由設於電解液供給部13的液貯留室132與噴出口133成為均勻之液流，通過陰極滾筒20的周面20a與陽極板30的電解面30a之間。First, the electrolytic solution L that has flowed in from the supply pipe 60 is supplied to the electrolytic cell 10 from the lower portion of the cathode drum 20, and passes between the circumferential surface 20a of the cathode drum 20 and the electrolytic surface 30a of the anode plate 30. At this time, the electrolytic solution L is discharged from the liquid storage chamber 132 and the discharge port 133 provided in the electrolytic solution supply unit 13 into a uniform liquid flow, and passes between the circumferential surface 20a of the cathode drum 20 and the electrolytic surface 30a of the anode plate 30.
陽極板30，被形成為具有與陰極滾筒20成同心圓的曲率之圓弧狀，所以在陰極滾筒20的周面20a與陽極板30的電解面30a之間，被形成等間隔的間隙，同時被設於露出面30b的複數給電端子31被幾乎均等地配置，所以藉由通電陰極滾筒20與陽極板30於兩極間形成一樣的電流密度的電場。The anode plate 30 is formed in an arc shape having a curvature concentric with the cathode drum 20, so that a gap is formed between the circumferential surface 20a of the cathode drum 20 and the electrolytic surface 30a of the anode plate 30, and at the same time Since the plurality of power supply terminals 31 provided on the exposed surface 30b are arranged almost uniformly, an electric field having the same current density is formed between the electrodes by the energization cathode drum 20 and the anode plate 30.
藉此，於陰極滾筒20的周面20a析出均勻厚度的金屬箔S。Thereby, a metal foil S having a uniform thickness is deposited on the circumferential surface 20a of the cathode drum 20.
此外，於陰極滾筒20的周面20a，被形成複數個以具有導電性同時隨著其厚度變厚而電阻增加的導電性物質232來覆蓋的無法研磨區域23，所以析出對應於此無法研磨區域23的部分成為孔，對應於可研磨區域22的部分成為箔之金屬箔S。Further, in the peripheral surface 20a of the cathode drum 20, a plurality of incompletely polished regions 23 which are covered with the conductive material 232 having electrical conductivity and increased in electrical resistance as the thickness thereof is increased are formed, so that the precipitation does not correspond to the unground region. A portion of 23 becomes a hole, and a portion corresponding to the grindable region 22 becomes a foil metal foil S.
進而，藉由適當調整孔231的大小(孔徑)、數量、排列，可以析出具有所要的排列圖案與開口率的被形成複數孔的金屬箔S。Further, by appropriately adjusting the size (aperture), the number, and the arrangement of the holes 231, the metal foil S having the plurality of holes to be formed having the desired arrangement pattern and the aperture ratio can be deposited.
接著，析出的金屬箔S由陰極滾筒20的周面20a藉由剝離輥70剝離，而被捲繞於特定的捲取輥。Then, the deposited metal foil S is peeled off by the peeling roll 70 from the circumferential surface 20a of the cathode drum 20, and is wound around a specific take-up roll.
此外，通過了陰極滾筒20的周面20a與陽極板30的電解面30a之間的電解液L，藉由配置在陽極板30的周緣部與窗部111的周緣之間的環狀密封手段(環37)與回收手段50，不接觸於露出面30b而由電解槽10回收。Further, the electrolytic solution L passing between the circumferential surface 20a of the cathode drum 20 and the electrolytic surface 30a of the anode plate 30 is disposed by an annular sealing means disposed between the peripheral edge portion of the anode plate 30 and the peripheral edge of the window portion 111 ( The ring 37) and the recovery means 50 are recovered from the electrolytic cell 10 without coming into contact with the exposed surface 30b.
藉此，電解槽10能夠以槽外不浸漬於電解液L而暴露於大氣氛圍的方式設置，所以在析出的金屬箔S的厚度產生不均勻時，解由把連接於給電端子31的電纜線40由槽外直接裝拆，可以進行使金屬箔S的厚度成為均勻之微調整。Thereby, the electrolytic cell 10 can be provided so that the outside of the tank is not immersed in the electrolytic solution L and is exposed to the atmospheric atmosphere. Therefore, when the thickness of the deposited metal foil S is uneven, the cable connected to the power supply terminal 31 is removed. 40 is directly attached and detached from the outside of the groove, and fine adjustment of the thickness of the metal foil S can be performed.
藉此，由槽外僅藉由鬆開/鎖緊母螺帽32，可以自由裝拆被連接於特定處所的給電端子31之電纜線40，可以把被連接於一給電端子31的電纜線40，替換為被連接於其他給電端子31的電纜線40。Thereby, the cable 40 connected to the power supply terminal 31 of the specific location can be freely attached and detached from the outside of the slot only by loosening/locking the female nut 32, and the cable 40 connected to the power supply terminal 31 can be connected. Replaced by the cable 40 that is connected to the other power supply terminal 31.
此外，因各給電端子31具有可挾入複數電纜線40的長度，所以可把對應於析出的金屬箔S的厚度較厚的部分之給電端子31所取下的一條電纜線40，連接於其他電纜線40所連接的金屬箔S的厚度較薄的部分所對應的給電端子31，可以進行析出的金屬箔S的厚度之微調整。Further, since each of the power supply terminals 31 has a length that can be inserted into the plurality of cable wires 40, one cable wire 40 that is removed from the power supply terminal 31 corresponding to the thicker portion of the deposited metal foil S can be connected to the other cable The thickness of the metal foil S to be deposited can be finely adjusted by the power supply terminal 31 corresponding to the thin portion of the metal foil S to which the cable wire 40 is connected.
此外，伴隨著金屬箔S的析出對孔231補充的氧化物，均堆積到與被形成於可研磨區域22的氧化膜相同的高度，但是超過陰極滾筒20的周面20a的部份的氧化物，可以藉由研磨輥80除去。Further, the oxide supplemented to the hole 231 by the precipitation of the metal foil S is deposited at the same height as the oxide film formed in the polishable region 22, but the oxide exceeding the portion of the peripheral surface 20a of the cathode drum 20 It can be removed by the grinding roller 80.
藉此，對於金屬箔S的析出區域之可研磨區域22如同過去那樣進行研磨管理，同時無法藉由研磨輥80研磨的孔231可繼續維持作為非析出區域之功能。Thereby, the polishing region 22 of the deposition region of the metal foil S is subjected to polishing management as in the past, and the hole 231 which cannot be polished by the polishing roller 80 can continue to function as a non-precipitation region.
如以上所說明的，本實施型態之開孔箔電解析出裝置1，藉由以在陰極滾筒20的周面20a形成複數個無法藉由研磨輥80研磨的無法研磨區域23，且為可堆積導電性物質232的孔231，於無法研磨區域23誘發局部的針孔的發生的方式構成，而可以製造出不用管理覆蓋無法研磨區域23的導電性物質232的厚度，此外，導電性物質232也不會由陰極滾筒20的周面20a脫落，具有所要的排列圖案與開口率的複數孔之金屬箔S。As described above, the apertured foil electrical analysis device 1 of the present embodiment forms a plurality of unground regions 23 which cannot be polished by the polishing roller 80 on the circumferential surface 20a of the cathode roller 20, and is The hole 231 in which the conductive material 232 is deposited is configured to induce local pinholes in the incomplete polishing region 23, and the thickness of the conductive material 232 which is not covered by the unmaskable region 23 can be manufactured, and the conductive material 232 can be produced. Also, the metal foil S having a plurality of holes having a desired arrangement pattern and an aperture ratio is not peeled off from the peripheral surface 20a of the cathode drum 20.
此外，藉由使設置陽極板30的給電端子31之面側臨向槽外，實現電解槽10的單槽化，可以由槽外簡單地裝拆被連接於給電端子31的電纜線40。Further, by providing the surface side of the power supply terminal 31 on which the anode plate 30 is provided to the outside of the groove, the single groove of the electrolytic cell 10 can be realized, and the cable wire 40 connected to the power supply terminal 31 can be easily attached and detached from the outside of the groove.
藉此，可以進行裝拆電纜線40的調整，同時由槽外進行析出的銅箔厚度的微調整。Thereby, the adjustment of the detachable cable wire 40 can be performed, and the thickness of the copper foil deposited by the outside of the groove can be finely adjusted.
此外，陽極板30其一面露出槽外，進而電解槽10具有單槽構造，所以由槽外對陽極板30之維修作業，或是陽極板30的裝拆作業變得容易。Further, since the anode plate 30 is exposed to the outside of the groove, and the electrolytic cell 10 has a single-slot structure, the maintenance work for the anode plate 30 outside the groove or the attachment and detachment of the anode plate 30 can be facilitated.
以上，針對本發明之開孔箔電解析出裝置1之較佳之實施型態進行了說明，但相關於本發明之開孔箔電解析出裝置並不以前述之實施型態為限，在本發明之範圍內當然可以實施種種變更。The preferred embodiment of the apertured foil electrical analysis device 1 of the present invention has been described above, but the apertured foil electrical analysis device of the present invention is not limited to the above-described embodiments. Of course, various modifications can be made within the scope of the invention.
例如，析出的金屬箔不限於同箔，可以因應於電解液，而製造例如鎳等其他金屬箔。For example, the deposited metal foil is not limited to the same foil, and other metal foil such as nickel can be produced in accordance with the electrolytic solution.
此外，孔231，可以由鍋狀、擦缽狀等種種形狀任意選擇，但以被形成孔231的內面(無法研磨區域23)與可研磨區域22之邊界上被形成明確的邊緣(較佳者為銳角)為較佳。此外，也可以把孔231設為被層積孔徑不同的孔之多段孔。Further, the hole 231 may be arbitrarily selected from various shapes such as a pot shape and a rubbing shape, but a clear edge is formed at the boundary between the inner surface (the ungrindable region 23) where the hole 231 is formed and the grindable region 22 (preferably It is preferably an acute angle. Further, the holes 231 may be formed as a plurality of holes of holes having different laminated apertures.
此外，本實施型態之密封手段，使用剖面為圓形狀的彈性構件，但可以使用剖面為矩形狀的彈性構件。Further, in the sealing means of the present embodiment, an elastic member having a circular cross section is used, but an elastic member having a rectangular cross section may be used.
此外，在本實施型態陽極板30為單側一枚合計為兩枚，但也可以是單側兩枚合計為四枚。Further, in the present embodiment, the anode plate 30 has a total of two on one side, but the total number of the two sides on one side may be four.
在此場合，於底部形成對應於分別的陽極板30的合計四個窗部111，有必要在各窗部111的周緣與各陽極板30的周緣部之間分別設置密封手段(環37)。In this case, a total of four window portions 111 corresponding to the respective anode plates 30 are formed at the bottom, and it is necessary to provide a sealing means (ring 37) between the peripheral edge of each window portion 111 and the peripheral edge portion of each anode plate 30.
此外，在本實施型態，藉由把給電端子31形成為可以挾入複數電纜線40的端子部41的長度，成為複數纜線連接手段，但是複數纜線連接手段不以此為限，例如，可把電纜線40的端子部41形成為夾子狀(例如鱷魚夾)同時把給電端子31形成為可挾入複數夾子的形狀。Further, in the present embodiment, the length of the terminal portion 41 into which the plurality of cable wires 40 can be inserted is formed as the plurality of cable connecting means, but the plurality of cable connecting means is not limited thereto, for example. The terminal portion 41 of the cable wire 40 can be formed into a clip shape (for example, an alligator clip) while the power feeding terminal 31 is formed into a shape that can be inserted into a plurality of clips.
此外，於電解液供給部13，作為把流入口131配置於不與噴出口133直接對向的位置之例，在本實施型態，是把流入口131配置於與側板部12平行而與噴出口133正交的位置，但把流入口131配置於與噴出口133不直接對向的位置之構成，不限於此例，只要是流入口131與噴出口133直接對向而電解液L的流動路徑不成為一直線，於液貯留室132內，形成沿著陰極滾筒20的軸方向之電解液L的流動的話，無論哪種型態皆可。Further, in the electrolytic solution supply unit 13, as an example in which the inflow port 131 is disposed at a position that does not directly face the discharge port 133, in the present embodiment, the inflow port 131 is disposed in parallel with the side plate portion 12 and is sprayed. The outlet 133 is disposed at a position orthogonal to the discharge port 133, and is not limited to this example, and the flow of the electrolyte L is directly opposed to the outlet 131 and the discharge port 133. The path does not become a straight line, and any form of the electrolyte L may be formed in the liquid storage chamber 132 in the axial direction of the cathode drum 20.
例如，使流入口131與噴出口133對向，而於這些之間平行地設置隔板，使流入口131與噴出口133挪移位置使其對向，因不會成為使流入口131直接對向(對面)於噴出口133之位置關係，所以也包含於本發明的技術範圍。For example, the inflow port 131 is opposed to the discharge port 133, and a partition plate is provided in parallel between these, and the inflow port 131 and the discharge port 133 are moved to face each other, so that the inflow port 131 is not directly opposed. The (opposing) positional relationship with the discharge port 133 is also included in the technical scope of the present invention.
本發明可以利用於藉由中介著電解液通電陰極滾筒與陽極板，在陰極滾筒的周面析出開孔的金屬箔之金屬箔電解析出裝置。The present invention can be applied to a metal foil electrical analysis device in which a metal foil of a metal foil is deposited on a peripheral surface of a cathode roller by a cathode roller and an anode plate, and an electrolyte is interposed.
1．．．開孔箔電解析出裝置1. . . Open-hole foil electric analysis device
10．．．電解槽10. . . Electrolytic cell
11．．．底板部11. . . Bottom plate
111．．．窗部111. . . Window
12．．．側板部12. . . Side plate
13．．．電解液供給部13. . . Electrolyte supply unit
131．．．流入口131. . . Inflow
132．．．液貯留室132. . . Liquid storage room
133．．．噴出口133. . . Spray outlet
20．．．陰極滾筒20. . . Cathode roller
20a．．．周面20a. . . Weekly
21．．．金屬板twenty one. . . Metal plate
22．．．可研磨區域(析出區域)twenty two. . . Grindable area (precipitation area)
23．．．無法研磨區域(非析出區域)twenty three. . . Unable to grind area (non-precipitated area)
231．．．孔231. . . hole
232．．．導電性物質232. . . Conductive substance
30．．．陽極板30. . . Anode plate
30a．．．電解面30a. . . Electrolytic surface
30b．．．露出面30b. . . Exposed face
31．．．給電端子31. . . Feed terminal
37．．．環(密封手段)37. . . Ring (sealing means)
40．．．電纜線40. . . Cable
50．．．回收手段50. . . Recycling method
51．．．回收溝51. . . Recycling ditch
52．．．回收管52. . . Recovery tube
60．．．供給管60. . . Supply tube
70．．．剝離輥70. . . Stripping roller
80．．．研磨輥80. . . Grinding roller
圖1係顯示相關於本發明之一實施型態之開孔箔電解析出裝置之概略立體圖。BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic perspective view showing an apertured foil electrical analysis apparatus according to an embodiment of the present invention.
圖2係模式顯示相關於本發明之一實施型態之開孔箔電解析出裝置的內部構成之概略剖面圖。Fig. 2 is a schematic cross-sectional view showing the internal structure of an apertured foil electrical analysis apparatus according to an embodiment of the present invention.
13．．．電解液供給部13. . . Electrolyte supply unit
20．．．陰極滾筒20. . . Cathode roller
21．．．金屬板twenty one. . . Metal plate
22．．．可研磨區域(析出區域)twenty two. . . Grindable area (precipitation area)
23．．．無法研磨區域(非析出區域)twenty three. . . Unable to grind area (non-precipitated area)
30．．．陽極板30. . . Anode plate
30a．．．電解面30a. . . Electrolytic surface
30b．．．露出面30b. . . Exposed face
31．．．給電端子31. . . Feed terminal
32．．．母螺帽32. . . Mother nut
33．．．公螺絲33. . . Male screw
35．．．墊片35. . . Gasket
36．．．溝部36. . . Ditch
37．．．環(密封手段)37. . . Ring (sealing means)
41．．．端子部41. . . Terminal part
51．．．回收溝51. . . Recycling ditch
70．．．剝離輥70. . . Stripping roller
80．．．研磨輥80. . . Grinding roller
132．．．液貯留室132. . . Liquid storage room
133．．．噴出口133. . . Spray outlet
231．．．孔231. . . hole
232．．．導電性物質232. . . Conductive substance
S．．．金屬箔S. . . Metal foil
L．．．電解液L. . . Electrolyte
34．．．母螺絲34. . . Female screw
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| Application Number | Priority Date | Filing Date | Title |
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| TW100131705A TWI439572B (en) | 2011-09-02 | 2011-09-02 | Electrolytic deposition device for opening foil |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW100131705A TWI439572B (en) | 2011-09-02 | 2011-09-02 | Electrolytic deposition device for opening foil |
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| TW201311939A TW201311939A (en) | 2013-03-16 |
| TWI439572B true TWI439572B (en) | 2014-06-01 |
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| TW201311939A (en) | 2013-03-16 |
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