TWI418656B - Surface treatment method - Google Patents

Surface treatment method Download PDF

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TWI418656B
TWI418656B TW095117916A TW95117916A TWI418656B TW I418656 B TWI418656 B TW I418656B TW 095117916 A TW095117916 A TW 095117916A TW 95117916 A TW95117916 A TW 95117916A TW I418656 B TWI418656 B TW I418656B
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treated
weight
solution
treatment method
surface treatment
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TW095117916A
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TW200704827A (en
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Sakae Inayoshi
Takeru Nomura
Katsunobu Ishizawa
Shinichi Saito
Manami Yamaguchi
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Ulvac Inc
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
    • C23G1/14—Cleaning or pickling metallic material with solutions or molten salts with alkaline solutions
    • C23G1/19—Iron or steel
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F3/00—Brightening metals by chemical means
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
    • C23G1/14—Cleaning or pickling metallic material with solutions or molten salts with alkaline solutions
    • C23G1/16—Cleaning or pickling metallic material with solutions or molten salts with alkaline solutions using inhibitors
    • C23G1/18—Organic inhibitors
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F1/00—Electrolytic cleaning, degreasing, pickling or descaling

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Electrochemistry (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)

Description

表面處理方法Surface treatment method

本發明係關於構成真空處理裝置之金屬製零件之表面淨化用的表面處理方法。The present invention relates to a surface treatment method for surface cleaning of a metal component constituting a vacuum processing apparatus.

構成真空容器等真空處理裝置的不鏽鋼零件，經溶接、機械加工等形成真空容器等形狀後，為去除加工過程中所附著之潤滑劑與手的油脂等表面處理方法。A stainless steel component constituting a vacuum processing apparatus such as a vacuum container is subjected to a shape such as a vacuum container by fusion bonding, machining, or the like, and is a surface treatment method for removing a lubricant adhering to the processing process and a grease of the hand.

由於近年真空裝置大型化，將大型化後之構成真空處理裝置的零件全部一起處理是困難的，本申請者在特願2004-219001中提出部份電解處理法。In recent years, it has been difficult to process all of the components constituting the vacuum processing apparatus after the enlargement of the vacuum apparatus in recent years, and the applicant has proposed a partial electrolytic treatment method in Japanese Patent Application No. 2004-219001.

此部份電解處理法，為去除處理所使用之藥液必須以純水等洗淨。部份電解處理過程之表面具有稱為污斑(smut)之金屬性附著物(不鏽鋼時Cr、Ni、Fe等氧化物與鹽不均勻附著)，既使使用高壓噴射器以純水洗淨也很難去除，有時於真空環境下前述金屬性附著物於空氣中被放出，有時之後於成膜時打擊帶電粒子於空間中放出，可能會汙染真空裝置。為了去除該等金屬性附著物，部分電解處理後，有不得不使用高危險性之硝酸洗淨的問題。In this partial electrolytic treatment, the chemical solution used for the removal treatment must be washed with pure water or the like. The surface of part of the electrolytic treatment process has a metallic deposit called smut (the oxides of Cr, Ni, Fe, etc. are not uniformly attached to the stainless steel), even if it is washed with pure water using a high-pressure ejector. It is difficult to remove, and in some cases, the above-mentioned metallic deposits are released in the air in a vacuum environment, and sometimes the charged particles are released in the space during film formation, which may contaminate the vacuum device. In order to remove these metallic deposits, after partial electrolysis treatment, there is a problem that it is necessary to wash with high-risk nitric acid.

作為裝置之表面處理方法，除上述部份電解處理之外，雖然先前有電解研磨、化學研磨等，任一種方法處理後金屬表面均會附著上述污斑。如果就這樣使污斑附著，與部分電解處理時相同於空間中放出時可能會汙染真空裝置 。此外，為去除該等金屬性附著物，部份電解處理後，有不得不使用高危險性之硝酸洗淨的問題。As a surface treatment method of the apparatus, in addition to the above partial electrolytic treatment, although the electrolytic polishing, the chemical polishing, and the like have been previously performed, the stain may adhere to the metal surface after any one of the methods. If the stain is attached in this way, it may contaminate the vacuum device when it is released in the same space as in the partial electrolytic treatment. . Further, in order to remove the metallic deposits, after partial electrolysis treatment, there is a problem that it is necessary to wash with high-risk nitric acid.

因此，本發明為解決先前上述之問題，提供一種構成真空容器等真空處理裝置之零件表面所附著之藥液與金屬等附著物，不使用高危險性的硝酸，而且不須浸漬處理亦可去除之方法。Therefore, in order to solve the above-mentioned problems, the present invention provides an attachment of a chemical liquid and a metal attached to the surface of a part constituting a vacuum processing apparatus such as a vacuum container, without using high-risk nitric acid, and can be removed without immersion treatment. The method.

為解決上述課題，本發明們者專心致力研究的結果，得知藉由以鹼性類螯合液取代硝酸可解決上述課題，依此見解發明下述解決方法。In order to solve the above problems, the present inventors have focused on the results of the research and found that the above problems can be solved by substituting a basic chelating solution for nitric acid.

亦即，本發明之表面處理方法，如申請專利範圍第1項所記載，構成真空處理裝置之金屬製零件作為被處理物之表面處理方法，其特徵為將前述被處理物之表面經電解研磨、部分電解處理、化學研磨、酸洗或電解酸洗後，使用在0.5重量%以上未達3重量%之稀鹼性溶液中，以製得濃度為0.5重量%以上未達10重量%添加羧酸或羧酸鹽之鹼性類螯合液，洗淨前述被處理物之表面。In other words, the surface treatment method of the present invention, as described in the first paragraph of the patent application, comprises a metal part constituting a vacuum processing apparatus as a surface treatment method of the object to be treated, characterized in that the surface of the object to be treated is subjected to electrolytic polishing. After partial electrolysis treatment, chemical grinding, pickling or electrolytic pickling, the use of 0.5% by weight or more and less than 3% by weight of a dilute alkaline solution to obtain a concentration of 0.5% by weight or more and less than 10% by weight of the added carboxy group A basic chelating solution of an acid or a carboxylate is washed to clean the surface of the object to be treated.

此外，申請專利範圍第2項所記載之表面處理方法，係於申請專利範圍第1項所記載之表面處理方法中，前述鹼性類螯合液之溫度為10~80℃。In the surface treatment method according to the first aspect of the invention, the temperature of the alkaline chelating solution is 10 to 80 ° C.

本發明之表面處理方法，可以比較簡單之構成物洗淨被處理物的表面。此外，被處理物表面之金屬性附著物，即使不使用硝酸亦可清除因此危險性小。再者，經本發明之表面處理後的零件如構成真空處理裝置，於真空環境下，可減少排出之氣體量。According to the surface treatment method of the present invention, the surface of the object to be treated can be washed with a relatively simple structure. Further, the metallic deposit on the surface of the object to be treated can be removed without using nitric acid, so that the risk is small. Further, the surface-treated part of the present invention, if constituted as a vacuum processing apparatus, can reduce the amount of gas discharged in a vacuum environment.

〔實施本發明之最佳狀態〕[Best state for carrying out the invention]

本發明為以構成真空處理裝置之金屬製零件作為被處理物之表面處理方法，其為將前述被處理物之表面經電解研磨、部分電解處理、化學研磨、酸洗或電解酸洗後，使用在0.5重量%以上未達3重量%之稀鹼性溶液中，以製得濃度為0.5重量%以上未達10重量%添加羧酸或羧酸鹽之鹼性類螯合液，洗淨前述被處理物之表面。The present invention is a surface treatment method for a metal component constituting a vacuum processing apparatus, which is used after electrolyzing, partially electrolytically oxidizing, chemically grinding, pickling or electrolytic pickling of the surface of the object to be treated. In a dilute alkaline solution of 0.5% by weight or more and less than 3% by weight, a basic chelating solution containing a carboxylic acid or a carboxylate is added at a concentration of 0.5% by weight or more and less than 10% by weight to wash the aforementioned quilt. The surface of the treatment.

構成前述真空處理裝置之金屬製零件，只要可放置於真空處理環境下之零件均無特別限制。例如金屬製容器等。另外，前述金屬列舉如不鏽鋼、鋁合金、鈦合金等。The metal parts constituting the vacuum processing apparatus are not particularly limited as long as they can be placed in a vacuum processing environment. For example, a metal container or the like. Further, the aforementioned metals are exemplified by stainless steel, aluminum alloy, titanium alloy, and the like.

前述處理媒體只要可以在前述電極間讓電流流動者，不限定材料或性狀，例如可使用不織布。The processing medium is not limited to materials or properties as long as it can flow current between the electrodes, and for example, a non-woven fabric can be used.

前述電解研磨、化學研磨、酸洗或電解酸性係公眾得知之物，此外，部分電解處理為將被處理物與電源陽極側連接的同時，於陰極側為使被處理物表面與電解液接觸而使其連接處理媒體，電極間經由電解液使直流電流流動， 將被處理物表面電解研磨，藉由此處理，被處理物的表面粗糙度(Rmax )最好為0.1μm。此外，具體例記載於特願2004-219001中。The above-mentioned electrolytic polishing, chemical polishing, pickling or electrolytic acid is known to the public, and part of the electrolytic treatment is to connect the workpiece to the anode side of the power source, and to contact the surface of the workpiece with the electrolyte on the cathode side. This is connected to the processing medium, and a direct current is caused to flow between the electrodes via the electrolytic solution, and the surface of the object to be processed is electrolytically polished. By this treatment, the surface roughness (R max ) of the object to be treated is preferably 0.1 μm. Further, a specific example is described in Japanese Patent Application No. 2004-219001.

前述電解研磨或部分電解處理中所使用之電解液包含無機酸、有機酸、無機酸鹽與有機酸鹽中至少一種，具體如磷酸、硫酸、枸櫞酸銨、氯化銨、磷酸二氫銨、硫酸銨、硝酸鈉、枸櫞酸等。The electrolyte used in the foregoing electrolytic grinding or partial electrolytic treatment comprises at least one of a mineral acid, an organic acid, a mineral acid salt and an organic acid salt, such as phosphoric acid, sulfuric acid, ammonium citrate, ammonium chloride, ammonium dihydrogen phosphate. , ammonium sulfate, sodium nitrate, citric acid, and the like.

此外，部分電解處理中可使用之處理媒體，並不限定其材料與形狀，可在前述電極間流動之直流電流均可，例如可使用不織布。Further, the processing medium which can be used in the partial electrolytic treatment is not limited to the material and shape, and a direct current which can flow between the electrodes can be used. For example, a non-woven fabric can be used.

電解研磨或部分電解處理中的電解電流密度為依被處理物而異，例如，不鏽鋼時為0.1~0.5A/cm2 。The electrolytic current density in electrolytic polishing or partial electrolytic treatment varies depending on the object to be treated, and is, for example, 0.1 to 0.5 A/cm 2 in the case of stainless steel.

作為鹼性類螯合液，如氫氧化鈉等稀鹼性水溶液中，添加枸櫞酸、枸櫞酸鈉、草酸銨、鄰苯二甲酸鈉、酒石酸鉀、葡萄糖酸鈉、蘋果酸等水溶液。As the basic chelating solution, an aqueous solution of citric acid, sodium citrate, ammonium oxalate, sodium phthalate, potassium tartrate, sodium gluconate or malic acid is added to a dilute alkaline aqueous solution such as sodium hydroxide.

前述鹼性類螯合液最好為10℃~80℃，如未達10℃反應速度會顯著降低，如超過80℃作業性變差，此外，也有被鹼腐蝕的危險。The basic chelating solution is preferably from 10 ° C to 80 ° C. If the reaction rate is less than 10 ° C, the reaction rate is remarkably lowered. If the temperature exceeds 80 ° C, workability is deteriorated, and there is also a risk of corrosion by alkali.

此外，使用前述鹼性類螯合液之處理，最好於布等處理媒體中進行。因為既使被處理物大型化亦可局部表面處理。Further, the treatment using the above-mentioned basic chelating solution is preferably carried out in a treatment medium such as cloth. This is because the treated material can be enlarged or partially surface treated.

實施例1Example 1

將SUS304(300mm×150mm×1mm)之被處理物以磷酸二氫鈉、硝酸鈉的中和鹽類進行部份電解處理，有關表面產生的紅色與藍色之污斑，以下述2種類之螯合液進行以下處理。The treated material of SUS304 (300mm × 150mm × 1mm) was partially electrolyzed with a neutralized salt of sodium dihydrogen phosphate or sodium nitrate, and the red and blue stains on the surface were treated with the following two types of chelate. The liquid mixture was subjected to the following treatment.

a)1重量%之氫氧化鈉溶液中，以製得濃度為3重量%添加枸櫞酸鈉之溶液a) 1% by weight of sodium hydroxide solution, to obtain a concentration of 3% by weight of sodium citrate solution

b)1重量%之氫氧化鈉溶液中，以製得濃度為3重量%添加蘋果酸之溶液b) 1% by weight of sodium hydroxide solution to prepare a solution of adding malic acid at a concentration of 3% by weight

將各螯合液於40~50℃中加溫，使洗淨布中含有之並進行被處理物的全部擦拭。擦拭後，以加溫至50℃之純水進行高壓噴流洗淨，去除電解研磨中使用之藥液與鹼性類螯合液溶液。接著，汽化後以液體氮氣乾燥。Each of the chelating solutions was warmed at 40 to 50 ° C to be contained in the cleaning cloth, and all the objects to be treated were wiped. After wiping, the high-pressure jet is washed with pure water heated to 50 ° C to remove the chemical solution and the alkaline chelating solution used in the electrolytic polishing. Next, it was vaporized and dried with liquid nitrogen.

為確認污斑之去除效果，以離子層析儀進行分析。詳細為以洗淨前後之被處理物為對象，用浸漬在純水中之洗淨布全部擦拭後，取出前述洗淨布所浸漬之純水100ml，計算單位面積平均之各離子量。In order to confirm the removal effect of the stain, the analysis was performed by an ion chromatograph. Specifically, the object to be treated before and after washing was wiped with all the cloth immersed in pure water, and 100 ml of pure water impregnated with the cloth was taken out, and the average amount of ions per unit area was calculated.

結果a如表1所示，b如表2所示。The results a are shown in Table 1, and b is shown in Table 2.

由上述表1與表2，除去污斑後，與除去前相較，與形成合金成份之附著鹽之陰離子一起，陽離子Na+ 亦同時減少。From the above Tables 1 and 2, after removing the stain, the cation Na + was also reduced simultaneously with the anion which forms the adhesion salt of the alloy component as compared with the case before the removal.

實施例2Example 2

將SUS304(300mm×150mm×1mm)之被處理物以磷酸二氫鈉、硝酸鈉的中和鹽類進行部份電解處理，有關表面產生的紅色與藍色之污斑，以下述2種類之螯合液進行以下處理。The treated material of SUS304 (300mm × 150mm × 1mm) was partially electrolyzed with a neutralized salt of sodium dihydrogen phosphate or sodium nitrate, and the red and blue stains on the surface were treated with the following two types of chelate. The liquid mixture was subjected to the following treatment.

a)加溫至40℃之1重量%之氫氧化鈉溶液中，以製得濃度為3重量%添加枸櫞酸鈉之溶液a) heating to a temperature of 40 ° C of 1% by weight of sodium hydroxide solution to obtain a concentration of 3% by weight of sodium citrate solution

b)加溫至40℃之1重量%之氫氧化鈉溶液中，以製得濃度為3重量%添加蘋果酸之溶液b) heating to a 1% by weight sodium hydroxide solution at 40 ° C to prepare a solution of adding malic acid at a concentration of 3% by weight

有關a、b之螯合液，使洗淨布中含有之並進行被處理物的全部擦拭。擦拭後，為了確認污斑之去除效果，將使用的各洗淨布浸漬在100ml純水中，以純水萃取各螯合液中金屬成份的溶出量。接著，以原子吸光分析測定不鏽鋼合金成份的對象金屬Fe、Cr、Ni。The chelating liquids of a and b are contained in the cleaning cloth and all the objects to be treated are wiped. After the wiping, in order to confirm the effect of removing the stain, each of the used cleaning cloths was immersed in 100 ml of pure water, and the amount of elution of the metal components in each of the chelating liquids was extracted with pure water. Next, the target metals Fe, Cr, and Ni of the stainless steel alloy composition were measured by atomic absorption spectrometry.

再者，為了顯示偵測出之不鏽鋼成分係來自污斑部分，而並非來自不鏽鋼本身，以30重量%之硝酸溶液去除污斑，水洗後以a處理，製作a處理中萃取自使用之洗淨布的樣品，此為c。Furthermore, in order to show that the detected stainless steel component is from the stained portion, not from the stainless steel itself, the stain is removed by a 30% by weight nitric acid solution, washed with water and treated with a, and the a process is extracted and washed. A sample of cloth, this is c.

結果如表3所示。The results are shown in Table 3.

由上述結果，使用a、b之洗淨布並未偵測出Fe、Cr。另一方面，c中並未偵測出構成Fe、Cr、Ni的不繡鋼構成元素。From the above results, Fe and Cr were not detected using the washed cloth of a and b. On the other hand, the non-steel-forming constituent elements constituting Fe, Cr, and Ni were not detected in c.

由此結果可知，a、b並非造成被處理物本身上的損傷，而是除去污斑。From this result, it is understood that a and b do not cause damage on the object to be treated, but remove stains.

實施例3Example 3

將SUS304(300mm×150mm×1mm)之被處理物以磷酸二氫銨、硝酸鈉的中和鹽類進行部份電解處理，在1重量%之氫氧化鈉溶液中，為使濃度為3重量%添加枸櫞酸鈉所得溶液將洗淨布浸漬其中，評量擦拭與未擦拭之氣體排放特性。The treated material of SUS304 (300 mm × 150 mm × 1 mm) was partially electrolytically treated with a neutralized salt of ammonium dihydrogen phosphate or sodium nitrate, and the concentration was 3% by weight in a 1% by weight sodium hydroxide solution. The solution obtained by adding sodium citrate was impregnated into the cleaning cloth, and the gas discharge characteristics of the wiped and unwiped were evaluated.

氣体排放特性使用昇溫脫離法，評量室溫至500℃的昇溫其間所排放之單位面積平均氣體排放速度的變化。The gas emission characteristics were measured by the temperature rise-off method, and the change in the average gas discharge rate per unit area discharged during the temperature rise from room temperature to 500 ° C was evaluated.

圖1為單位面積平均氣體排放速度的變化圖。圖中1為以螯合液處理之樣品之排氣速率，圖中2為未處理樣品之排氣速率。Figure 1 is a graph showing the change in average gas discharge rate per unit area. In the figure, 1 is the exhaust rate of the sample treated with the chelating solution, and 2 is the exhaust rate of the untreated sample.

圖1中以螯合液所處理之樣品，與未處理之樣品相較，特別為250℃以上之溫度氣體排放速度變慢。此溫度領 域所排放之氣體來源經由螯合液處理除去。The sample treated with the chelating solution in Figure 1 has a slower gas discharge rate than the untreated sample, especially at temperatures above 250 °C. This temperature collar The source of gas emitted by the domain is removed via treatment with a chelating solution.

實施例4Example 4

將SUS304(300mm×150mm×1mm)之被處理物以70%磷酸，30%硫酸溶液進行電解研磨處理，有關表面產生之污斑，以下述一種類之螯合液進行以下處理。The object to be treated of SUS304 (300 mm × 150 mm × 1 mm) was subjected to electrolytic polishing treatment with 70% phosphoric acid and a 30% sulfuric acid solution, and the stain generated on the surface was subjected to the following treatment with a chelating solution of the following type.

a)1重量%之氫氧化鈉溶液中，以製得濃度為3重量%添加枸櫞酸鈉之溶液a) 1% by weight of sodium hydroxide solution, to obtain a concentration of 3% by weight of sodium citrate solution

將上述螯合液於40~50℃中加溫，使洗淨布中含有之並進行被處理物的全部擦拭。擦拭後，使用加溫至50℃之純水的高壓噴流洗淨，進行去除電解研磨中使用之藥液與鹼性類螯合溶液。完成後汽化以液體氮氣乾燥。The chelating solution is heated at 40 to 50 ° C to be contained in the cleaning cloth, and all the objects to be treated are wiped. After wiping, the mixture was washed with a high-pressure jet heated to a temperature of 50 ° C to remove the chemical solution and the alkaline chelating solution used in the electrolytic polishing. After completion, the vaporization was dried with liquid nitrogen.

為確認污斑之去除效果，以離子層析儀進行分析。詳細為以洗淨前後之被處理物為對象，用浸漬在純水中之洗淨布全部擦拭後，取出前述洗淨布所浸漬之純水100ml，計算單位面積平均之各離子量。結果如表所示。In order to confirm the removal effect of the stain, the analysis was performed by an ion chromatograph. Specifically, the object to be treated before and after washing was wiped with all the cloth immersed in pure water, and 100 ml of pure water impregnated with the cloth was taken out, and the average amount of ions per unit area was calculated. The results are shown in the table.

由上表得知，除去污斑後，與除去前相較，與形成合金成份之附著鹽之陰離子一起，陽離子Na+ 亦同時減少。From the above table, it is known that, after the stain is removed, the cation Na + is simultaneously reduced as compared with the anion which forms the adhesion salt of the alloy component as compared with the pre-removal.

1‧‧‧以螯合液處理之樣品單位面積平均排氣速率1‧‧‧Average exhaust rate per unit area of samples treated with chelating solution

2‧‧‧未以螯合液處理之樣品單位面積平均排氣速率2‧‧‧Average discharge rate per unit area of samples not treated with chelating solution

〔圖1〕實施例3之單位面積平均排氣速率變化圖[Fig. 1] The average exhaust rate change per unit area of Example 3

Claims (2)

一種表面處理方法，其為一種以構成真空處理裝置之由不鏽鋼所構成之金屬製零件作為被處理物之表面處理方法，其特徵為將被處理物與電源陽極側連接的同時，於陰極側為使被處理物表面與電解液接觸而使其連接處理媒體，經由電解液使直流電流流動於電極間而透過處理媒體將被處理物之表面電解研磨後，使用在0.5重量%以上未達3重量%之稀鹼性溶液中，以製得濃度為0.5重量%以上未達10重量%之方式添加羧酸或羧酸鹽之鹼性類螯合液，以使該液含於洗淨布中擦拭之方式，洗淨前述被處理物之表面。 A surface treatment method comprising a metal part made of stainless steel constituting a vacuum processing apparatus as a surface treatment method of a workpiece, characterized in that the object to be processed is connected to the anode side of the power source, and the cathode side is The surface of the object to be treated is brought into contact with the electrolyte to be connected to the processing medium, and a direct current is caused to flow between the electrodes via the electrolytic solution, and the surface of the object to be treated is electrolytically polished through the processing medium, and then used in an amount of 0.5% by weight or less and less than 3 parts by weight. In a dilute alkaline solution of %, a basic chelating solution of a carboxylic acid or a carboxylate is added in such a manner that the concentration is 0.5% by weight or more and less than 10% by weight, so that the liquid is contained in the cleaning cloth. In this manner, the surface of the object to be treated is washed. 如申請專利範圍第1項所記載之表面處理方法，其中前述鹼性類螯合液的溫度為10~80℃。 The surface treatment method according to claim 1, wherein the alkaline chelating solution has a temperature of 10 to 80 °C.
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