TWI416750B

TWI416750B - Processing apparatus

Info

Publication number: TWI416750B
Application number: TW097136154A
Authority: TW
Inventors: Teng Wei You; Hsiao Wen Lai; Er Lang Huang
Original assignee: Neo Solar Power Corp
Priority date: 2008-09-19
Filing date: 2008-09-19
Publication date: 2013-11-21
Also published as: TW201013956A

Abstract

A processing apparatus includes a transferring module, a manufacturing module and a cleaning module. The transferring module has a supporting platform and a transferring unit. The supporting platform is connected with the transferring unit. The transferring unit has a first station and a second station. At least part of the manufacturing module is disposed opposite to the first station. At least part of the cleaning module is disposed opposite to the second station.

Description

製程設備Process equipment

本發明係關於一種製程設備。The present invention relates to a process apparatus.

隨著地球暖化以及環保意識抬頭，能有效利用各種再生能源的重要性也不斷地提高。其中，例如利用太陽能產生電力的光伏打電池(photovoltaic cell)，由於太陽能的易取得，使其更成為產業的發展重點之一。因此，用以製作光伏打電池的各種不同製程設備也不斷地被發展出來。As global warming and awareness of environmental protection rise, the importance of effective use of various renewable energy sources continues to increase. Among them, for example, a photovoltaic cell using solar energy to generate electricity is one of the development priorities of the industry due to the easy availability of solar energy. Therefore, various process equipment for making photovoltaic cells have been continuously developed.

請參照圖1所示，一種習知之光伏打電池的製程設備1包含一轉送模組2及一加工模組3，而轉送模組2具有複數承載台21及一傳送單元22。Referring to FIG. 1 , a conventional photovoltaic cell manufacturing process 1 includes a transfer module 2 and a processing module 3 , and the transfer module 2 has a plurality of carriers 21 and a transfer unit 22 .

因此，承載台21可於一承載站點SL裝載一待加工之光伏打電池V並由傳送單元22傳送至加工模組3以進行加工。當加工模組3加工完畢後，承載台21會承載並轉送光伏打電池V至一卸載站點SU，再輸送光伏打電池V至下一加工製程。Therefore, the carrier 21 can load a photovoltaic cell V to be processed at a carrier site SL and transfer it to the processing module 3 for processing by the transfer unit 22. After the processing module 3 is processed, the loading platform 21 will carry and transfer the photovoltaic cell V to an unloading station SU, and then transport the photovoltaic cell V to the next processing process.

然而，於承載台21轉送光伏打電池V的過程中，若光伏打電池V有破損，其破片可能會殘留於承載台21上，因此也會造成下一片置放至承載台21上待加工之光伏打電池的損害。另外，若承載台21上沾染灰塵等，習知之製程設備1亦無法有效的清除，因此也可能使得光伏打電池V形成瑕疵，造成信賴度下降。However, in the process of transferring the photovoltaic cell V to the carrying platform 21, if the photovoltaic cell V is damaged, the fragment may remain on the carrying platform 21, and thus the next piece is placed on the carrying table 21 to be processed. Photovoltaic battery damage. In addition, if the load-carrying table 21 is contaminated with dust or the like, the conventional process equipment 1 cannot be effectively removed, and thus the photovoltaic cell V may be formed into a defect, resulting in a decrease in reliability.

因此，如何設計一種能清除承載台之灰塵或破片的製程設備，已成為重要課題之一。Therefore, how to design a process equipment that can remove dust or fragments of the carrier has become one of the important topics.

有鑑於上述課題，本發明之目的為提供一種能清除承載台之灰塵或破片的製程設備。In view of the above problems, it is an object of the present invention to provide a process apparatus capable of removing dust or fragments of a stage.

為達上述目的，依據本發明之一種製程設備包含一轉送模組、一加工模組及一清潔模組。轉送模組具有一承載台及一傳送單元，承載台連結於傳送單元，傳送單元具有一第一站點及一第二站點。加工模組至少部分與第一站點對向設置，清潔模組至少部分與第二站點對向設置。To achieve the above object, a process apparatus according to the present invention comprises a transfer module, a processing module and a cleaning module. The transfer module has a carrier and a transfer unit. The carrier is coupled to the transfer unit. The transfer unit has a first station and a second station. The processing module is disposed at least partially opposite the first station, and the cleaning module is at least partially disposed opposite the second station.

承上所述，依據本發明之製程設備係具有一清潔模組，其至少部分與轉送模組之傳送單元的第二站點對向設置。藉此，當轉送模組之承載台上有灰塵或破片時，清潔模組可於第二站點對承載台進行清潔，以避免灰塵或破片造成製程設備欲加工之物件的損傷。As described above, the process apparatus according to the present invention has a cleaning module that is at least partially disposed opposite the second station of the transfer unit of the transfer module. Thereby, when there is dust or fragment on the carrying platform of the transfer module, the cleaning module can clean the loading platform at the second station to prevent damage caused by dust or fragments to the workpiece to be processed by the processing device.

以下將參照相關圖式，說明依據本發明較佳實施例之一種製程設備，其中相同元件以相同符號表示。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a process apparatus according to a preferred embodiment of the present invention will be described with reference to the accompanying drawings, wherein the same elements are denoted by the same reference numerals.

請參照圖2A所示，本發明較佳實施例之製程設備4包含一轉送模組5、一加工模組3及一清潔模組6。Referring to FIG. 2A , the process device 4 of the preferred embodiment of the present invention includes a transfer module 5 , a processing module 3 , and a cleaning module 6 .

轉送模組5具有一承載台51及一傳送單元52，承載台51連結於傳送單元52，傳送單元52具有一第一站點 S1及一第二站點S2。其中，轉送模組5亦可具有複數承載台51，藉此可提升製程設備4的製程效率，然其非限制性。另外，傳送單元52更可具有一承載站點SL及一卸載站點SU，承載台51於承載站點SL裝載(load)一物件，而於卸載站點SU卸載(unload)物件。於本實施例中，物件係以光伏打電池V為例作說明，然其非用以限制本發明。The transfer module 5 has a carrier 51 and a transfer unit 52. The carrier 51 is coupled to the transfer unit 52. The transfer unit 52 has a first station. S1 and a second station S2. The transfer module 5 can also have a plurality of carriers 51, thereby improving the process efficiency of the process device 4, which is not limited. In addition, the transmitting unit 52 may further have a carrying station SL and an unloading station SU. The carrying station 51 loads an object at the carrying station SL and unloads the object at the unloading station SU. In the present embodiment, the object is described by taking the photovoltaic cell V as an example, but it is not intended to limit the present invention.

加工模組3至少部分與第一站點S1對向設置。藉此，當傳送單元52將承載台51轉送至第一站點S1時，加工模組3係位於承載台51之上。加工模組3例如可為一印刷模組或一曝光模組。The processing module 3 is at least partially disposed opposite the first station S1. Thereby, when the transport unit 52 transfers the carrier 51 to the first station S1, the processing module 3 is located above the carrier 51. The processing module 3 can be, for example, a printing module or an exposure module.

清潔模組6至少部分與第二站點S2對向設置。藉此，當傳送單元52將承載台51轉送至第二站點S2的過程中，承載台51係會通過清潔模組6。於本實施例中，清潔模組6更具有一非接觸式單元61，當承載台51位於第二站點S2時，非接觸式單元61位於承載台51之上。The cleaning module 6 is at least partially disposed opposite the second station S2. Thereby, when the transport unit 52 transfers the carrying platform 51 to the second station S2, the carrying platform 51 passes through the cleaning module 6. In the present embodiment, the cleaning module 6 further has a non-contact unit 61. The non-contact unit 61 is located above the carrier 51 when the carrier 51 is located at the second station S2.

另外，於本實施例中，製程設備4更包含一輸入模組7及一輸出模組8。輸入模組7及輸出模組8例如為輸送帶，兩者皆與轉送模組5連接，而輸入模組7位於載入站點S3，輸出模組8則位於卸載站點SU。In addition, in the embodiment, the process device 4 further includes an input module 7 and an output module 8. The input module 7 and the output module 8 are, for example, conveyor belts, both of which are connected to the transfer module 5, while the input module 7 is located at the loading station S3, and the output module 8 is located at the unloading station SU.

接著，請參照圖2A至圖2D所示，以說明本實施例之製程設備4的工作流程。Next, please refer to FIG. 2A to FIG. 2D to illustrate the workflow of the process device 4 of the present embodiment.

請參照圖2A所示，首先，輸入模組7會於承載站點SL裝載一待加工之光伏打電池V至承載台51上。接著，傳送單元52則會轉送承載有光伏打電池V的承載台51至第一站點S1。Referring to FIG. 2A, first, the input module 7 loads a photovoltaic cell V to be processed on the carrier station SL onto the carrier 51. then, The transfer unit 52 then transfers the carrier 51 carrying the photovoltaic cell V to the first site S1.

請參照圖2B所示，當承載台51到達第一站點S1時，加工模組3會對承載台51上的光伏打電池V進行印刷或曝光等加工製程。當加工製程結束後，傳送單元52會轉送承載有加工完成之光伏打電池V的承載台51至卸載站點SU。Referring to FIG. 2B, when the loading platform 51 reaches the first station S1, the processing module 3 performs a printing process such as printing or exposure on the photovoltaic cell V on the carrying platform 51. When the processing process is completed, the transfer unit 52 transfers the carrier 51 carrying the processed photovoltaic cell V to the unloading station SU.

請參照圖2C所示，當承載台51到達卸載站點SU時，輸出模組8會由承載台51卸載加工完成之光伏打電池V，並輸送光伏打電池V至下一加工製程。而傳送單元52則會繼續將未承載光伏打電池的承載台51轉送至第二站點S2。Referring to FIG. 2C, when the loading platform 51 reaches the unloading station SU, the output module 8 unloads the processed photovoltaic cell V from the loading platform 51 and transports the photovoltaic cell V to the next processing process. The transfer unit 52 will continue to transfer the carrier 51 that does not carry the photovoltaic cells to the second station S2.

請參照圖2D所示，當承載台51到達第二站點S2時，清潔模組6之非接觸式單元61即會藉由例如氣體對承載台51進行清潔動作。而後，傳送單元52會再轉送承載台51至承載站點SL，以再進行如圖3A至圖3D的工作流程。Referring to FIG. 2D, when the carrier 51 reaches the second station S2, the non-contact unit 61 of the cleaning module 6 performs a cleaning operation on the carrier 51 by, for example, gas. Then, the transmitting unit 52 will transfer the loading station 51 to the carrying station SL again to perform the workflow as shown in FIGS. 3A to 3D.

藉此，由於製程設備4藉由清潔模組6對承載台51進行清潔動作，即可避免因承載台51上之灰塵或破片，而造成裝載至承載台51之待加工光伏打電池的損傷，進而提高製程設備4的製程可靠度及其產品的信賴度。Therefore, since the process device 4 performs the cleaning operation on the loading platform 51 by the cleaning module 6, the damage of the photovoltaic battery to be processed loaded to the loading platform 51 can be avoided due to the dust or fragments on the loading platform 51. Further, the process reliability of the process equipment 4 and the reliability of the product are improved.

請參照圖3A所示，其為本實施例之製程設備4a的另一變化態樣示意圖。製程設備4a之清潔模組6a更具有一接觸式單元62，其係鄰設於非接觸式單元。其中，承載台51係依序通過接觸式單元62及非接觸式單元。另外，於本態樣中，非接觸式單元例如為一風刀單元61a。Referring to FIG. 3A, it is a schematic diagram of another variation of the process device 4a of the present embodiment. The cleaning module 6a of the process device 4a further has a contact unit 62 which is adjacent to the contactless unit. The carrier 51 is sequentially passed through the contact unit 62 and the non-contact unit. In addition, In this aspect, the non-contact unit is, for example, a wind knife unit 61a.

請參照圖3B所示，風刀單元61a具有一風刀口611、一導風組件612及一保持組件613。風刀口611設置於導風組件612上，導風組件612與保持組件613連結。其中，風刀口611之一延伸平面A1與承載台51的一延伸平面A2具有一夾角θ，夾角θ介於7度至30度之間。於實際應用時，夾角θ以14度較佳。Referring to FIG. 3B, the air knife unit 61a has a wind knife edge 611, a wind guide assembly 612, and a holding assembly 613. The air knife edge 611 is disposed on the air guiding assembly 612, and the air guiding assembly 612 is coupled to the holding assembly 613. The extension plane A1 of the air knife edge 611 has an angle θ with an extension plane A2 of the carrier 51, and the angle θ is between 7 degrees and 30 degrees. In practical applications, the angle θ is preferably 14 degrees.

請再參照圖3A所示，接觸式單元62係具有一清掃組件621及一制動組件622，兩者彼此連結。其中，清掃組件621具有一帚體B，而制動組件622則具有一例如為彈簧之彈性件E及一制動件C，兩者彼此連結。需注意者，接觸式單元62的設計方式非以本態樣為限，以不同的要求可有不同的設計方式，例如接觸式單元62亦可為全自動的清掃單元。Referring to FIG. 3A again, the contact unit 62 has a cleaning assembly 621 and a brake assembly 622, which are coupled to each other. The cleaning assembly 621 has a body B, and the brake assembly 622 has an elastic member E such as a spring and a brake member C, which are coupled to each other. It should be noted that the design of the contact unit 62 is not limited to the present embodiment, and different design methods may be used for different requirements. For example, the contact unit 62 may also be a fully automatic cleaning unit.

藉此，當承載台51由卸載站點SU運動至第二站點S2時，於承載台51通過清潔模組6a之接觸式單元62前，操作人員可藉由下壓制動組件622的制動件C，以使清掃組件621的帚體B垂直於承載台51承載表面。藉此，當承載台51通過帚體B時，即可藉由帚體B對承載台51承載表面進行清掃，以清除較大的破片或灰塵。當承載台51完全通過清掃組件621後，操作人員即可放開制動件C，而制動組件622的彈性件E會釋放其受壓縮的彈性位能，以使接觸式單元62回復至原始狀態。Thereby, when the carrying platform 51 is moved from the unloading station SU to the second station S2, the operator can press the braking component of the brake assembly 622 before the loading platform 51 passes the contact unit 62 of the cleaning module 6a. C, so that the body B of the cleaning assembly 621 is perpendicular to the bearing surface of the carrier 51. Thereby, when the carrying platform 51 passes through the body B, the bearing surface of the carrying platform 51 can be cleaned by the body B to remove large fragments or dust. When the carrier 51 has completely passed the cleaning assembly 621, the operator can release the brake member C, and the elastic member E of the brake assembly 622 releases its compressed elastic potential energy to return the contact unit 62 to its original state.

接著，當承載台51運動至第二站點S2，則可再藉由風刀單元61a之風刀口611噴射出之風刀刃體對承載台51承載表面再更進一歩地進行清潔動作。Then, when the carrier 51 moves to the second station S2, it can be further The air knife blade jetted by the air knife edge 611 of the air knife unit 61a performs a cleaning operation on the bearing surface of the carrier 51 further.

因此，藉由風刀單元61a與接觸式單元62的相互配合，可更大幅提高清潔模組6a的清潔效果，進而更提高製程設備4a的製程可靠度及其產品的信賴度。Therefore, by the cooperation of the air knife unit 61a and the contact unit 62, the cleaning effect of the cleaning module 6a can be greatly improved, and the process reliability of the process equipment 4a and the reliability of the product can be further improved.

綜上所述，依據本發明之製程設備係具有一清潔模組，其至少部分與轉送模組之傳送單元的第二站點對向設置，藉此當轉送模組之承載台上有灰塵或破片時，清潔模組可於第二站點對承載台進行清潔，以避免灰塵或破片造成裝載至承載台之待加工光伏打電池的損傷，進而提高製程設備的製程可靠度及其產品的信賴度。另外，本發明之製程設備的清潔模組可具有非接觸式單元及接觸式單元，藉由非接觸式單元(例如為風刀單元)與接觸式單元的相互配合，可更大幅提高清潔模組的清潔效果，進而更提高製程設備的製程可靠度及其產品的信賴度。In summary, the process equipment according to the present invention has a cleaning module disposed at least partially opposite the second station of the transfer unit of the transfer module, whereby dust is disposed on the transfer platform of the transfer module When the fragment is broken, the cleaning module can clean the loading platform at the second site to prevent damage caused by dust or fragments to the photovoltaic cell to be processed loaded to the loading platform, thereby improving the process reliability of the process equipment and the reliability of the product. degree. In addition, the cleaning module of the process device of the present invention can have a non-contact unit and a contact unit, and the cleaning module can be greatly improved by the cooperation of the non-contact unit (for example, a wind knife unit) and the contact unit. The cleaning effect further improves the process reliability of the process equipment and the reliability of its products.

以上所述僅為舉例性，而非為限制性者。任何未脫離本發明之精神與範疇，而對其進行之等效修改或變更，均應包含於後附之申請專利範圍中。The above is intended to be illustrative only and not limiting. Any equivalent modifications or alterations to the spirit and scope of the invention are intended to be included in the scope of the appended claims.

1、4、4a‧‧‧製程設備1, 4, 4a‧‧‧ Process equipment

2、5‧‧‧轉送模組2, 5‧‧‧ transfer module

21、51‧‧‧承載台21, 51‧‧‧ Carrying platform

22、52‧‧‧傳送單元22, 52‧‧‧Transfer unit

3‧‧‧加工模組3‧‧‧Processing module

6、6a‧‧‧清潔模組6, 6a‧‧‧ cleaning module

61‧‧‧非接觸式單元61‧‧‧Contactless unit

61a‧‧‧風刀單元61a‧‧‧Air knife unit

611‧‧‧風刀口611‧‧‧ wind knife mouth

612‧‧‧導風組件612‧‧‧Guide components

613‧‧‧保持組件613‧‧‧ Keep components

62‧‧‧接觸式單元62‧‧‧Contact unit

621‧‧‧清掃組件621‧‧‧ cleaning components

622‧‧‧制動組件622‧‧‧ brake components

7‧‧‧輸入模組7‧‧‧Input module

8‧‧‧輸出模組8‧‧‧Output module

A1、A2‧‧‧延伸平面A1, A2‧‧‧ extended plane

B‧‧‧帚體B‧‧‧帚体

C‧‧‧制動件C‧‧‧Brakes

E‧‧‧彈性件E‧‧‧elastic parts

S1‧‧‧第一站點S1‧‧‧ first site

S2‧‧‧第二站點S2‧‧‧ second site

SL‧‧‧承載站點SL‧‧‧ hosting site

SU‧‧‧卸載站點SU‧‧‧Uninstall site

V‧‧‧光伏打電池V‧‧‧Photovoltaic battery

θ‧‧‧夾角Θ‧‧‧ angle

圖1為一種習知之製程設備的示意圖；圖2A為本發明較佳實施例之一種製程設備的示意圖；圖2B至圖2D為本發明之製程設備的工作流程示意圖；圖3A為本發明之製程設備的另一變化態樣示意圖；以及圖3B為本發明之製程設備的風刀單元示意圖。1 is a schematic diagram of a conventional process device; FIG. 2A is a schematic diagram of a process device according to a preferred embodiment of the present invention; and FIG. 2B to FIG. 2D are schematic diagrams showing the workflow of the process device of the present invention; 3A is a schematic view showing another variation of the process equipment of the present invention; and FIG. 3B is a schematic diagram of the air knife unit of the process equipment of the present invention.

3‧‧‧加工模組3‧‧‧Processing module

4‧‧‧製程設備4‧‧‧Processing equipment

5‧‧‧轉送模組5‧‧‧Transfer module

51‧‧‧承載台51‧‧‧Loading station

52‧‧‧傳送單元52‧‧‧Transfer unit

6‧‧‧清潔模組6‧‧‧ cleaning module

61‧‧‧非接觸式單元61‧‧‧Contactless unit

7‧‧‧輸入模組7‧‧‧Input module

8‧‧‧輸出模組8‧‧‧Output module

S1‧‧‧第一站點S1‧‧‧ first site

S2‧‧‧第二站點S2‧‧‧ second site

SL‧‧‧承載站點SL‧‧‧ hosting site

SU‧‧‧卸載站點SU‧‧‧Uninstall site

V‧‧‧光伏打電池V‧‧‧Photovoltaic battery

Claims

一種製程設備，包含：一轉送模組，其係具有一承載台及一傳送單元，該承載台連結於該傳送單元，該傳送單元具有一第一站點及一第二站點；一加工模組，其係至少部分與該第一站點對向設置；以及一清潔模組，其係至少部分與該第二站點對向設置，其中該加工模組於該第一站點加工該物件，該清潔模組於該第二站點清潔該承載台。 A processing device comprising: a transfer module having a carrier and a transfer unit, the carrier coupled to the transfer unit, the transfer unit having a first station and a second station; a set that is at least partially disposed opposite the first site; and a cleaning module disposed at least partially opposite the second site, wherein the processing module processes the object at the first site The cleaning module cleans the carrier at the second station.

如申請專利範圍第1項所述之製程設備，其中該傳送單元更具有一承載站點及一卸載站點，該承載台於該承載站點裝載一物件，於該卸載站點卸載該物件。 The process device of claim 1, wherein the transfer unit further has a load bearing site and an unloading site, the load bearing station loading an object at the load bearing site, and unloading the object at the unloading site.

如申請專利範圍第2項所述之製程設備，更包含：一輸入模組，其係與該轉送模組連接，並位於該載入站點。 The process device of claim 2, further comprising: an input module connected to the transfer module and located at the loading station.

如申請專利範圍第2項所述之製程設備，更包含：一輸出模組，其係與該轉送模組連接，並位於該卸載站點。 The process device of claim 2, further comprising: an output module connected to the transfer module and located at the unloading station.

如申請專利範圍第2項所述之製程設備，其中該物件為一光伏打電池。 The process equipment of claim 2, wherein the object is a photovoltaic cell.

如申請專利範圍第1項所述之製程設備，其中該清潔模組係具有一非接觸式單元，當該承載台位於該第二站點，該非接觸式單元位於該承載台之上。 The process apparatus of claim 1, wherein the cleaning module has a non-contact unit, and the non-contact unit is located above the stage when the stage is located at the second station.

如申請專利範圍第6項所述之製程設備，其中該非接觸式單元係為一風刀單元。 The process apparatus of claim 6, wherein the non-contact unit is a wind knife unit.

如申請專利範圍第7項所述之製程設備，其中該風刀單元具有一風刀口、一導風組件及一保持組件，該風刀口設置於該導風組件上，該導風組件與該保持組件連結。 The process apparatus of claim 7, wherein the air knife unit has a wind knife edge, a wind guide component and a holding component, the wind blade edge is disposed on the air guiding component, and the air guiding component is maintained Component link.

如申請專利範圍第8項所述之製程設備，其中該風刀口之一延伸平面與該承載台的一延伸平面具有一夾角，該夾角介於7度至30度之間。 The process apparatus of claim 8, wherein an extension plane of the air knife edge has an angle with an extension plane of the carrier, the angle being between 7 and 30 degrees.

如申請專利範圍第6項所述之製程設備，其中該清潔模組更具有一接觸式單元，其係鄰設於該非接觸式單元。 The process apparatus of claim 6, wherein the cleaning module further has a contact unit disposed adjacent to the non-contact unit.

如申請專利範圍第10項所述之製程設備，其中該承載台依序通過該接觸式單元及該非接觸示單元。 The process apparatus of claim 10, wherein the carrying platform sequentially passes the contact unit and the non-contact display unit.

如申請專利範圍第10項所述之製程設備，其中該接觸式單元具有一清掃組件及一制動組件，兩者彼此連結。 The process apparatus of claim 10, wherein the contact unit has a cleaning component and a brake component, and the two are coupled to each other.

如申請專利範圍第12項所述之製程設備，其中該制動組件具有一彈性件及一制動件，兩者彼此連結。 The process apparatus of claim 12, wherein the brake assembly has an elastic member and a brake member, and the two are coupled to each other.

如申請專利範圍第1項所述之製程設備，其中該加工模組係為一印刷模組或一曝光模組。 The processing device of claim 1, wherein the processing module is a printing module or an exposure module.