TWI416229B - Polarized light irradiation device - Google Patents
Polarized light irradiation device Download PDFInfo
- Publication number
- TWI416229B TWI416229B TW099138838A TW99138838A TWI416229B TW I416229 B TWI416229 B TW I416229B TW 099138838 A TW099138838 A TW 099138838A TW 99138838 A TW99138838 A TW 99138838A TW I416229 B TWI416229 B TW I416229B
- Authority
- TW
- Taiwan
- Prior art keywords
- light
- mirror
- lamp
- focus
- polarizing element
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Liquid Crystal (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Mathematical Physics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Polarising Elements (AREA)
Abstract
Description
本發明，是關於對液晶元件的定向膜、或是對視野角補償薄膜的定向層等，照射預定波長的偏光光線來進行定向的偏光光線照射裝置。The present invention relates to a polarized light irradiation device that irradiates a polarizing ray of a predetermined wavelength to an alignment film of a liquid crystal element or an alignment layer of a viewing angle compensation film.
近年，關於以液晶面板為首之液晶顯示元件的定向膜、或是視野角補償薄膜的定向層等之定向處理，逐漸採用：照射紫外線區域之波長的偏光光線來進行定向，被稱作為光定向的技術。以下，將藉由光進行定向的定向膜、或是設有定向層的薄膜等，藉由光可產生定向特性的膜或層，總稱為光定向膜。In recent years, the orientation treatment of an alignment film of a liquid crystal display element such as a liquid crystal panel or an alignment layer of a viewing angle compensation film has been gradually adopted: a polarized light that irradiates a wavelength of an ultraviolet region is used for orientation, and is referred to as light orientation. technology. Hereinafter, a film or layer in which directional characteristics are generated by light, such as an oriented film oriented by light or a film provided with an alignment layer, is collectively referred to as a light directing film.
光定向膜，伴隨著液晶面板的大型化，而大面積化成為例如一邊2000mm以上的四角形。The light-oriented film has a large area, for example, a square shape having a side of 2000 mm or more.
為了對如上述般之大面積的光定向膜進行光定向，提案出組合棒狀的燈、以及具有金屬絲柵格狀之光柵的偏光元件(以下稱為：光柵偏光元件)而成的偏光光線照射裝置(例如請參照專利文獻1或專利文獻2)。In order to perform light orientation on a large-area light-aligning film as described above, a polarized ray in which a rod-shaped lamp and a polarizing element having a grating of a wire grid (hereinafter referred to as a grating polarizing element) are proposed is proposed. Irradiation device (for example, refer to Patent Document 1 or Patent Document 2).
光定向膜用的偏光光線照射裝置中的棒狀燈，係可以製成發光長度較長者。因此，使用具備有：與定向膜寬度相對應之發光長度的棒狀燈，只要一面照射來自該燈的光線，一面使定向膜朝向與燈的長邊方向垂直相交之方向移動，就能夠以較短時間對寬廣面積的定向膜進行光定向處理。The rod-shaped lamp in the polarized light irradiation device for a light directing film can be made longer in the light-emitting length. Therefore, by using a rod-shaped lamp having a light-emitting length corresponding to the width of the orientation film, it is possible to move the alignment film in a direction perpendicular to the longitudinal direction of the lamp while irradiating the light from the lamp. A light-oriented treatment of a wide area of the oriented film is performed for a short time.
於第7圖，是顯示組合有：作為線狀光源的棒狀燈以及光柵偏光元件之偏光光線照射裝置的構成例。In the seventh drawing, a configuration example of a polarized light irradiation device in which a rod-shaped lamp as a linear light source and a grating polarizing element are combined is shown.
於同圖中，為光定向膜的工件30，例如是視野角補償薄膜般之帶狀的長條工件，從導出輥筒R1所導出，並被朝向圖中箭頭方向搬運，如後述方式藉由偏光光線照射而被光定向處理，然後藉由捲取輥筒R2而被捲取。In the same figure, the workpiece 30 which is a light-oriented film, for example, a strip-shaped long workpiece such as a viewing angle compensation film, is taken out from the take-up roll R1 and conveyed in the direction of the arrow in the drawing, as will be described later. The polarized light is irradiated and directed by the light, and then taken up by winding up the roll R2.
偏光光線照射裝置的光線照射部20，係具備：可放射光定向處理所必須之波長之光線(紫外線)的棒狀燈21，例如為高壓水銀燈、或是於水銀中加入其他金屬的金屬鹵素燈、及將來自棒狀燈21的紫外線朝向工件30予以反射之斷面為橢圓形之溝槽型的反射鏡22。如上述般地，棒狀燈21的長度上，其發光部，是使用具備有：與工件30之搬運方向垂直相交之方向的寬度相對應之長度者，且上述棒狀燈21是以位於上述橢圓形狀之反射鏡22之第1焦點的位置之方式而配置。The light-irradiating portion 20 of the polarized light irradiation device includes a rod-shaped lamp 21 that emits light (ultraviolet rays) of a wavelength necessary for the light-directing treatment, and is, for example, a high-pressure mercury lamp or a metal halide lamp in which other metals are added to the mercury. And a mirror-shaped mirror 22 having an elliptical cross section in which the ultraviolet ray from the rod lamp 21 is reflected toward the workpiece 30. As described above, in the length of the rod-shaped lamp 21, the light-emitting portion is formed to have a length corresponding to a width perpendicular to the direction in which the workpiece 30 is conveyed, and the rod-shaped lamp 21 is located above The position of the first focus of the elliptical mirror 22 is arranged.
光線照射部20，是以使其燈21的長邊方向成為工件30之寬度方向(相對於搬運方向為垂直相交方向)之方式而配置。The light irradiation unit 20 is disposed such that the longitudinal direction of the lamp 21 is in the width direction of the workpiece 30 (the direction perpendicular to the conveyance direction).
於光線照射部20的光線射出側，設置有作為偏光元件的光柵偏光元件10，並於上述橢圓形狀之反射鏡22的第2焦點，配置有工件30。A grating polarizing element 10 as a polarizing element is provided on the light emitting side of the light irradiation unit 20, and a workpiece 30 is disposed on the second focus of the elliptical mirror 22.
來自光線照射部20的光線，是由光柵偏光元件10所偏光後，照射於被搬運至光線照射部20下方的工件30，而進行光定向處理。The light from the light-irradiating portion 20 is polarized by the grating polarizing element 10, and then irradiated onto the workpiece 30 conveyed under the light-irradiating portion 20 to perform light directing processing.
關於光柵偏光元件(金屬絲光柵型的偏光元件)，例如於專利文獻3或是專利文獻4中有詳細揭示。The grating polarizing element (the wire grating type polarizing element) is disclosed in detail in, for example, Patent Document 3 or Patent Document 4.
當於光路徑中***該偏光元件時，與光柵的長邊方向平行的偏光成分大部分都被反射，而只有垂直相交的偏光成分會通過。因此，通過光柵偏光元件的光線，是成為具有與偏光元件之光柵的長邊方向正交之方向之偏光軸的偏光光線。When the polarizing element is inserted in the light path, most of the polarizing components parallel to the longitudinal direction of the grating are reflected, and only the vertically intersecting polarizing components pass. Therefore, the light passing through the grating polarizing element is a polarized ray which has a polarization axis in a direction orthogonal to the longitudinal direction of the grating of the polarizing element.
以往，作為光定向膜用的偏光光線照射裝置，於線狀光源的棒狀燈組合光柵偏光元件來進行是基於以下的理由。Conventionally, the polarized light irradiation device for a light directing film has been used for the following reasons for combining a grating polarizing element of a linear light source with a rod-shaped light.
從棒狀燈發出的光線為發散光，所以即使將偏光元件配置於燈的射出側來取得偏光光線時，仍會有各種角度的光線入射於偏光元件。Since the light emitted from the rod-shaped lamp is divergent light, even when the polarizing element is disposed on the emission side of the lamp to obtain the polarized light, light of various angles is incident on the polarizing element.
作為偏光元件者，周知有利用蒸著膜或是布魯斯特角者。但是，此等的偏光元件，只能夠將在偏光元件所取決的角度下所入射的光予以偏光，而以其他以外之角度所入射的光，就幾乎不予以偏光地使之通過。因此，光源為發散光時，若是使用利用蒸著膜或布魯斯特角的偏光元件時，相較於使入射於偏光元件之光線成為平行光地使入射角度齊一之情形，所取得之偏光光線的消光比較差。As a polarizing element, it is known to use a vaporized film or a Brewster angle. However, in such a polarizing element, only light incident at an angle determined by the polarizing element can be polarized, and light incident at other angles can be transmitted without being polarized. Therefore, when the light source is divergent light, if a polarizing element using a vapor deposition film or a Brewster angle is used, the incident light is obtained by making the incident angle uniform when the light incident on the polarizing element is parallel light. The extinction is poor.
又，雖然也有利用有機膜的偏光元件，不過由於此種元件，若長時間照射用以進行光定向所使用之紫外線區域的光線時其特性會劣化，所以難以使用在工業上。Further, although a polarizing element using an organic film is also used, such a device is difficult to use industrially when the light of the ultraviolet region used for light direction is irradiated for a long period of time.
此相對於，光柵偏光元件，其出射之偏光光線的消光比，相對於入射至偏光元件之光線角度的依存性較小。因此，即使如從棒狀燈所射出之光線般的發散光，只要入射角度在±45°的範圍，便可及於光線所照射的區域整體，取得比較良好之消光比的偏光光線。In contrast to the grating polarizing element, the extinction ratio of the emitted polarized light is less dependent on the angle of the light incident on the polarizing element. Therefore, even if the divergent light is emitted from the light emitted from the rod-shaped lamp, as long as the incident angle is within the range of ±45°, the polarized light having a relatively good extinction ratio can be obtained as a whole in the region irradiated with the light.
因此，只要使棒狀燈的長度，對應光定向膜的寬度而設置，並使光定向膜對偏光光線照射裝置相對性地朝向一個方向移動的話，在原理上，以1支燈，便可以進行寬廣面積之光定向膜的定向處理。Therefore, if the length of the rod-shaped lamp is set to correspond to the width of the light-aligning film, and the light-directing film is relatively moved in one direction with respect to the polarized light irradiation device, in principle, one lamp can be used. Orientation treatment of a wide area of light oriented film.
因此，只要將光柵偏光元件組合於棒狀燈，以1支燈，便可以進行寬廣面積之光定向膜的定向處理，所以可以較低價地製造裝置整體。Therefore, as long as the grating polarizing element is combined with the rod-shaped lamp, the directional treatment of the light-oriented film of a wide area can be performed with one lamp, so that the entire device can be manufactured at a lower price.
[專利文獻1] 日本特開2006-126464號公報[Patent Document 1] Japanese Patent Laid-Open Publication No. 2006-126464
[專利文獻2] 日本特開2009-265290號公報[Patent Document 2] Japanese Patent Laid-Open Publication No. 2009-265290
[專利文獻3] 日本特開2002-328234號公報[Patent Document 3] Japanese Patent Laid-Open Publication No. 2002-328234
[專利文獻4] 日本特表2003-508813號公報[Patent Document 4] Japanese Patent Publication No. 2003-508813
[專利文獻5] 日本特開2006-184747號公報[Patent Document 5] Japanese Patent Laid-Open Publication No. 2006-184747
如上所述，光柵偏光元件，其入射角度依存性較小，對於斜向入射的光線也能夠予以偏光。但是，吾人在實驗之後，得知由斜向入射於偏光元件之光線所形成的偏光光線，相較於以垂直或是接近於該角度所入射之光線所形成的偏光光線，其有偏光軸旋轉，而產生偏光軸偏離(以下稱為：軸偏離)的現象。當偏光光線產生軸偏離時，在光線照射區域中就會產生偏光軸的變異(variation)。As described above, the grating polarizing element has a small incident angle dependency and can be polarized for obliquely incident light. However, after the experiment, we know that the polarized light formed by the light incident obliquely on the polarizing element has a polarization axis rotation compared to the polarized light formed by the light incident perpendicular or close to the angle. And a phenomenon in which the polarization axis deviation (hereinafter referred to as axis deviation) occurs. When the polarized light produces an axis deviation, a variation of the polarization axis occurs in the light irradiation region.
若藉由偏光軸有變異的偏光光線來進行光定向處理時，使用經處理後之定向膜所製作的液晶顯示元件的對比會依處所而有不同，因而產生看見不規則斑影的問題。因此，被要求須儘可能地縮小在光照射區域之偏光軸的變異。When the light directing treatment is performed by the polarized light having a variable polarization axis, the contrast of the liquid crystal display elements produced by using the treated alignment film may vary depending on the location, thereby causing a problem of seeing irregular spots. Therefore, it is required to reduce the variation of the polarization axis in the light irradiation region as much as possible.
於專利文獻5，在光線照射區域之偏光軸的變異，是入射於光柵偏光子之光線的角度愈大，則從偏光子所射出之偏光光線之偏光軸的旋轉量就愈大，表示在光線照射區域之偏光軸的變異就會變愈大。In Patent Document 5, the variation of the polarization axis in the light-irradiating region is such that the larger the angle of the light incident on the grating polarizer, the larger the amount of rotation of the polarization axis of the polarized light emitted from the polarizer is expressed in the light. The variation of the polarization axis of the illumination area becomes larger.
於上述第7圖所示的偏光光線照射裝置，是使用斷面為橢圓形狀的反射鏡22，使棒狀燈21以位於上述橢圓形狀之反射鏡22之第1焦點的位置之方式來配置，而於橢圓形狀之反射鏡22的第2焦點，配置工件30。因此，斜向入射於偏光元件的光線會變得較多，使偏光軸的變異增大。In the polarized light irradiation device shown in FIG. 7, the mirror 22 having an elliptical cross section is used, and the rod lamp 21 is disposed at a position of the first focus of the elliptical mirror 22, On the second focus of the elliptical mirror 22, the workpiece 30 is placed. Therefore, the amount of light obliquely incident on the polarizing element becomes large, and the variation of the polarization axis is increased.
如上所述地，在以往的偏光光線照射裝置中，並無法充分因應要儘可能縮小偏光軸之變異如此的期望。As described above, in the conventional polarized light irradiation device, it is not possible to sufficiently reduce the variation of the polarization axis as much as possible.
本發明是有鑑於上述情事而硏創的，本發明的目的，是針對於具有：線狀的光源、及反射來自該光源之光線的溝槽型反射鏡、以及將上述光源與由上述反射鏡所反射的光線予以偏光的光柵偏光元件之偏光光線照射裝置，將光照射區域中之偏光軸的變異儘可能地予以縮小。The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a light source having a line shape, a groove type mirror that reflects light from the light source, and the light source and the mirror. The polarized light irradiation device of the grating polarizing element in which the reflected light is polarized is used to reduce the variation of the polarization axis in the light irradiation region as much as possible.
為了使在光照射區域中之偏光軸的變異變小，因而思及縮小入射於光柵偏光元件之光線的角度(使朝向偏光元件之入射角接近於0°)為理想。In order to make the variation of the polarization axis in the light irradiation region small, it is preferable to reduce the angle of the light incident on the grating polarizing element (the incident angle toward the polarizing element is close to 0°).
在此，思及對於作為使來自棒狀燈之紫外線朝向工件進行反射之溝槽型的反射鏡，取代以往所使用之斷面為橢圓形狀者，而使用其斷面為拋物線狀者。Here, as for the groove type mirror which reflects the ultraviolet rays from the rod-shaped lamp toward the workpiece, the cross section which is conventionally used has an elliptical shape, and the cross section is parabolic.
第1表是表示反射鏡之斷面為橢圓形狀時與拋物線狀時之偏光軸不均的情形。又，該表係顯示藉由計算所求得之結果。第1表(a)是顯示當棒狀燈之弧光直徑為φ10mm之情形時，使用斷面為拋物線狀(parabola)且第1焦點F1的位置為20mm(反射鏡之拋物線的頂點與焦點的距離，以下相同)的反射鏡、及斷面為橢圓形狀(橢圓)且第1焦點F1的位置為20mm而第2焦點F2的位置為100mm的反射鏡、以及斷面為橢圓形狀(橢圓)且第1焦點F1的位置為20mm而第2焦點F2的位置為200mm的反射鏡，將燈之弧光中心配置於第1焦點F1之位置時的軸不均(±[deg])。又，斷面為拋物線狀的反射鏡雖然沒有第2焦點F2，不過在此是以F2等於無限大來顯示。The first table indicates a case where the polarization axis of the mirror is not uniform when the cross section of the mirror is elliptical. Also, the watch shows the results obtained by calculation. The first table (a) shows that when the arc diameter of the rod lamp is φ10 mm, the parabola is used and the position of the first focus F1 is 20 mm (the distance between the vertex of the parabola of the mirror and the focus) a mirror having the same shape as the ellipse (ellipse) and having a position of the first focus F1 of 20 mm and a position of the second focus F2 of 100 mm, and an elliptical shape (ellipse) and a section 1 A mirror having a position of the focus F1 of 20 mm and a position of the second focus F2 of 200 mm, and an axial unevenness (±[deg]) when the arc center of the light is placed at the position of the first focus F1. Further, although the parabolic mirror has no second focus F2, it is displayed here as F2 is equal to infinity.
又，第1表(b)是顯示當棒狀燈之弧光直徑為32.5mm之情形時，使用斷面為拋物線狀(parabola)且第1焦點F1的位置為25mm的反射鏡、及斷面為橢圓形狀(橢圓)且第1焦點F1的位置為25mm而第2焦點F2的位置為100mm的反射鏡、以及斷面為橢圓形狀(橢圓)且第1焦點F1的位置為25mm而第2焦點F2的位置為200mm的反射鏡，將燈之弧光中心配置於第1焦點F1之位置時的軸不均(±[deg])。Further, in the first table (b), when the arc diameter of the rod lamp is 32.5 mm, a mirror having a parabola in cross section and a position of 25 mm in the first focus F1 is used, and the cross section is a mirror having an elliptical shape (ellipse) and having a position of the first focus F1 of 25 mm and a position of the second focus F2 of 100 mm, and an elliptical shape (ellipse) and a position of the first focus F1 of 25 mm and a second focus F2 The position is a 200 mm mirror, and the axis unevenness (±[deg]) when the arc center of the lamp is placed at the position of the first focus F1.
從同表可明瞭地，使用斷面為橢圓形狀之反射鏡時的軸不均是相對於使用斷面為拋物線(parabola)之反射鏡時的軸不均的2～3倍，因此藉由使用斷面為拋物線(parabola)的反射鏡，可以大幅地減少偏光軸的軸不均。It can be clearly seen from the same table that the axial unevenness when using a mirror having an elliptical cross section is 2 to 3 times that of the parallax when a mirror having a parabola is used, and therefore, by using A parabola with a cross section can greatly reduce the axial unevenness of the polarizing axis.
如以上所說明，使用斷面為拋物線狀之反射鏡，藉由將燈的中心配置在該反射鏡之拋物線的第1焦點，使反射鏡的反射光成為平行光，以較小的入射角度(以垂直或接近垂直之角度)入射於光柵偏光元件，因此在光照射區域中之偏光軸的變異較小。As described above, a parabolic mirror is used, and by arranging the center of the lamp at the first focus of the parabola of the mirror, the reflected light of the mirror becomes parallel light with a small incident angle ( The grating polarizing element is incident at a vertical or nearly vertical angle, and thus the variation of the polarization axis in the light irradiation region is small.
但是，來自燈的直射光也會入射於光柵偏光元件。而從燈所放射的光為發散光，其中亦有相對於光柵偏光元件以較大的入射角度入射的成分。However, direct light from the lamp is also incident on the grating polarizing element. The light emitted from the lamp is divergent light, and there is also a component incident at a large incident angle with respect to the grating polarizing element.
因此，了解到即是是使用斷面為拋物線狀之呈溝槽型的反射鏡，來作為將來自線狀光源的光線予以反射的反射鏡，也無法完全消弭在光照射區域中之偏光軸的變異。Therefore, it is understood that a mirror having a parabolic truncated shape is used as a mirror for reflecting light from a linear light source, and the polarization axis in the light irradiation region cannot be completely eliminated. variation.
為了解決上述問題，進行了各種檢討的結果，得知除了作為反射鏡要使用斷面為拋物線狀的反射鏡，並且使燈的中心(發光部)朝向比該反射鏡的第1焦點更稍微靠近偏光元件側移動，如此之在光照射區域中之偏光軸的變異，可以變得較小。In order to solve the above problem, as a result of various reviews, it has been found that a mirror having a parabolic cross section is used as a mirror, and the center (light emitting portion) of the lamp is directed closer to the first focus than the mirror. The side of the polarizing element moves, so that the variation of the polarization axis in the light irradiation region can be made small.
更詳言，是將燈的中心，配置在：其斷面為拋物線之反射鏡的第1焦點與頂點所連結的直線上，且是在第1焦點與光柵偏光元件之間。藉由將燈配置於如此的位置，相較於將燈配置於第1焦點之情形時，可以縮小在光照射區域中之偏光軸的變異。More specifically, the center of the lamp is placed on a line connecting the first focus and the apex of the parabolic mirror, and is between the first focus and the grating polarizing element. By arranging the lamp at such a position, the variation of the polarization axis in the light irradiation region can be reduced as compared with the case where the lamp is placed on the first focus.
不過，當燈的中心過於離開第1焦點時，則偏光軸的變異會再次變大。因此，使燈的中心從第1焦點朝向偏光元件之方向移動的距離，以反射鏡之焦點距離的1/2左右為止之距離較為理想。However, when the center of the lamp is too far away from the first focus, the variation of the polarization axis becomes larger again. Therefore, the distance by which the center of the lamp moves from the first focus toward the polarizing element is preferably a distance of about 1/2 of the focal length of the mirror.
在本發明中，由於是使用斷面為拋物線狀者，來作為將來自棒狀燈之紫外線朝向工件反射之呈溝槽型的反射鏡，且將上述燈的中心，配置在上述反射鏡的第1焦點與光柵偏光元件之間，所以相較於如以往般之斷面為橢圓形狀之呈溝槽型的反射鏡之情形，可以減少在光照射區域中之偏光軸的變異。In the present invention, since a parabolic dish is used, the grooved mirror is used to reflect the ultraviolet rays from the rod lamp toward the workpiece, and the center of the lamp is placed on the mirror. Since the focus is between the grating and the grating polarizing element, the variation of the polarization axis in the light irradiation region can be reduced as compared with the case of the groove-shaped mirror having an elliptical cross section as in the related art.
於第1圖(a)是顯示組合有本發明之實施例之溝槽型反射鏡、及作為線狀光源之棒狀燈、以及光柵偏光元件之偏光光線照射裝置的構成例，於同圖(b)(c)是顯示反射鏡與棒狀燈的放大圖。又，於同圖(d)是顯示燈的斷面形狀。Fig. 1(a) is a view showing a configuration example of a polarized light irradiation device in which a grooved mirror of an embodiment of the present invention, a rod-shaped lamp as a linear light source, and a grating polarizing element are combined. b) (c) is an enlarged view showing the mirror and the rod lamp. Moreover, in the same figure (d), the cross-sectional shape of the display lamp is shown.
於同圖(a)，為光定向膜的工件30，係如前述例如為視野角補償薄膜般之帶狀的長條工件，並從導出輥筒R1所導出，而被朝向圖中箭頭方向搬運，藉由如後述之偏光光線照射進行光定向處理後，藉由捲取輥筒R2所捲取。In the same figure (a), the workpiece 30 which is a light-oriented film is a strip-shaped long workpiece such as a viewing angle compensation film as described above, and is taken out from the take-up roll R1 and conveyed in the direction of the arrow in the figure. After the light directing treatment is performed by the polarized light irradiation described later, it is taken up by the take-up roll R2.
偏光光線照射裝置的光線照射部20，係具備有：放射出光定向處理所必須之波長之光線(紫外線)的棒狀燈1，例如是高壓水銀燈或是於水銀再加上其他金屬的金屬鹵素燈、及將來自棒狀燈1之紫外線朝向工件30反射之溝槽型的反射鏡2。The light-irradiating portion 20 of the polarized light irradiation device includes a rod-shaped lamp 1 that emits light (ultraviolet rays) of a wavelength necessary for the light-directing treatment, and is, for example, a high-pressure mercury lamp or a metal halide lamp in which mercury is added to other metals. And a groove type mirror 2 that reflects the ultraviolet rays from the rod lamp 1 toward the workpiece 30.
棒狀燈1的長度，是使用其發光部具備有：與工件30搬運方向正交之方向上的寬度相對應之長度者。光線照射部20，是使燈1的長邊方向以成為工件30的寬度方向(相對於搬運方向為正交方向)之方式而配置。於光線照射部20的光線射出側，設置作為偏光元件的光柵偏光元件10。The length of the rod-shaped lamp 1 is such that the light-emitting portion has a length corresponding to the width in the direction orthogonal to the conveyance direction of the workpiece 30. The light irradiation unit 20 is disposed such that the longitudinal direction of the lamp 1 is in the width direction of the workpiece 30 (orthogonal direction with respect to the conveyance direction). A grating polarizing element 10 as a polarizing element is provided on the light emitting side of the light irradiation unit 20.
來自棒狀燈1的光線，係直接入射於光柵偏光元件10，並且由反射鏡2反射而入射於光柵偏光元件10，藉由光柵偏光元件10而被偏光，照射於被搬運至光線照射部20下方的工件30，來進行光定向處理。The light from the rod lamp 1 is directly incident on the grating polarizing element 10, is reflected by the mirror 2, is incident on the grating polarizing element 10, is polarized by the grating polarizing element 10, and is irradiated to the light irradiating portion 20 The workpiece 30 below is used for light directing processing.
第1圖(b)為上述反射鏡2的立體圖，第1圖(c)為棒狀燈1的立體圖，第1圖(d)是將棒狀燈以垂直於管軸的平面予以剖切的斷面圖。Fig. 1(b) is a perspective view of the mirror 2, Fig. 1(c) is a perspective view of the rod lamp 1, and Fig. 1(d) is a view of the rod lamp taken along a plane perpendicular to the tube axis. Sectional view.
反射鏡2的內側，是將從燈所放射的光線予以反射的反射面，於該反射鏡2的內側，配合長度方向地配置有棒狀燈。The inside of the mirror 2 is a reflecting surface that reflects light emitted from the lamp, and a rod-shaped lamp is disposed inside the reflecting mirror 2 in the longitudinal direction.
反射鏡2，是如上所述，其斷面為拋物線狀之溝槽型的鏡，並使棒狀燈1的長邊方向為平行於上述溝槽型之反射鏡2的長邊方向地配置。而且，棒狀燈的中心(位於將棒狀燈以垂直於管軸的平面予以剖切之斷面的中心位置，亦即光源的中心)，是位在連結上述斷面為拋物線之反射鏡之第1焦點與拋物線頂點的直線上，且是被配置在比上述第1焦點更靠近上述光柵偏光元件10側。The mirror 2 is a parabolic trough-shaped mirror as described above, and the longitudinal direction of the rod-shaped lamp 1 is arranged parallel to the longitudinal direction of the groove-type mirror 2. Moreover, the center of the rod-shaped lamp (located at the center of the section in which the rod-shaped lamp is cut in a plane perpendicular to the tube axis, that is, the center of the light source) is located at a mirror that connects the above-mentioned section to a parabola. The first focus is on the straight line of the parabola vertices, and is disposed closer to the grating polarizing element 10 than the first focus.
在此，反射鏡2之所謂「斷面為拋物線狀」，是指相對於該溝槽型之反射鏡2的長邊方向呈正交之方向之斷面的反射面形狀，為拋物線狀。反射鏡2，於實際上具有如同圖所示地，於頂部形成有通風孔等之開口之情形，不過於此情形時也是「其斷面為拋物線狀」。Here, the "parabolic shape of the cross section" of the mirror 2 refers to a shape of a reflecting surface having a cross section perpendicular to the longitudinal direction of the mirror 2 of the groove type, and is parabolic. The mirror 2 actually has an opening in which a vent hole or the like is formed at the top as shown in the figure, but in this case, "the cross section is parabolic".
又，由於反射鏡2為溝槽型，所以反射鏡2的第1焦點，是沿著反射鏡2的長邊方向連續性地存在。因而在此，將作為第1焦點之集合體的直線，稱之為「溝槽型之鏡的第1焦點」。Further, since the mirror 2 is of a groove type, the first focus of the mirror 2 continuously exists along the longitudinal direction of the mirror 2. Therefore, the straight line which is the aggregate of the first focus is referred to as the "first focus of the mirror of the groove type".
再者，所謂使反射鏡2的第1焦點與燈1的中心一致，是指：使作為反射鏡2之第1焦點之集合體的直線，與燈的中心線一致的意思。In addition, the fact that the first focus of the mirror 2 coincides with the center of the lamp 1 means that the straight line which is the aggregate of the first focus of the mirror 2 coincides with the center line of the lamp.
所謂燈的中心線，是於第1圖(d)所示之斷面圖中，棒狀燈1之圓環狀封體(玻璃管)1a之內徑之中心(弧光中心)點之燈長邊方向的集合體。亦即，位於將棒狀燈以垂直於管軸的平面予以剖切後之斷面之作為內徑之中心點的集合體且沿著燈之長邊方向的直線，是相當於光源的中心。The center line of the lamp is the lamp length at the center of the inner diameter (the arc center) of the annular seal (glass tube) 1a of the rod lamp 1 in the sectional view shown in Fig. 1(d). A collection of side directions. That is, a straight line which is an assembly of the center point of the inner diameter of the cross section of the rod lamp which is cut in a plane perpendicular to the tube axis and which is along the longitudinal direction of the lamp corresponds to the center of the light source.
又，燈雖分為於內部具備有電極的有電極燈與於內部沒有電極的無電極燈，但無論是哪一種，都將封體之圓環的軸本身稱之為燈的中心。Further, although the lamp is divided into an electrode lamp having an electrode therein and an electrodeless lamp having no electrode therein, the shaft of the ring of the package is referred to as the center of the lamp.
以下調查了在由：上述本發明之實施例之溝槽型而斷面為拋物線狀的反射鏡及棒狀燈、以及光柵偏光元件所組合的偏光光線照射裝置中之燈的位置與偏光軸之變異(variation)的關係。The position and the polarization axis of the lamp in the polarized light irradiation device in which the groove type, the parabolic mirror, the rod-shaped lamp, and the grating polarizing element are combined in the above-described embodiment of the present invention are examined. The relationship of variation.
如第2圖所示，使燈1平行移動在由斷面為拋物線狀之反射鏡2的第1焦點(F1)與鏡2的拋物線頂點P所連結的直線上。亦即，改變燈1的中心與焦點F1的距離d(位置偏離量)來調查偏光軸的變異。又，如上述般地，亦有於反射鏡2的頂部形成有開口者，若是如此之情形者，頂點P係將形成拋物線之一部分之反射鏡2的斷面予以外插後求得。As shown in Fig. 2, the lamp 1 is moved in parallel on a straight line connecting the first focus (F1) of the parabolic mirror 2 and the parabola P of the mirror 2. That is, the variation of the polarization axis is investigated by changing the distance d (the amount of positional deviation) between the center of the lamp 1 and the focus F1. Further, as described above, an opening is formed on the top of the mirror 2. If this is the case, the vertex P is obtained by extrapolating the cross section of the mirror 2 which forms part of the parabola.
拋物線狀的反射鏡2，係對於焦點距離不同者準備3種(f=18mm、20mm、25mm)，以及準備棒狀燈1其封體之管徑(內徑)為不同者複數支，分別予以組合並調查。The parabolic mirror 2 is prepared for three types (f=18 mm, 20 mm, 25 mm) for different focal lengths, and the tube diameter (inner diameter) of the sealed lamp 1 is different. Combine and investigate.
燈1的管徑，為現在一般所使用之代表性的棒狀燈的管徑。燈的管徑，雖然較細者輝度較高，因而可取得較高的峰值照度。但是，燈的長度一增長時，為了保持強度而有變粗的傾向。The diameter of the lamp 1 is the diameter of a representative rod lamp which is generally used nowadays. The diameter of the lamp, although finer, has a higher peak illuminance. However, as the length of the lamp increases, there is a tendency to become thicker in order to maintain strength.
第3圖，是顯示以溝槽型其斷面為拋物線狀之反射鏡其焦點距離為18mm之情形下，使管的內徑為9mm、18mm、23.4mm的棒狀燈，分別移動在連結第1焦點(F1)與拋物線頂點的直線上之情形時，光線照射區域之偏光軸之變異的變化。於同圖中，橫軸是從第1焦點至燈的中心為止的距離，縱軸是偏光軸之變異(軸不均)的大小。Fig. 3 is a view showing a rod-shaped lamp having an inner diameter of a tube of 9 mm, 18 mm, and 23.4 mm in a case where a mirror having a groove shape and a parabolic shape has a focal length of 18 mm, respectively. 1 When the focus (F1) is on a straight line with the apex of the parabola, the variation of the variation of the polarization axis of the light-irradiated area. In the same figure, the horizontal axis represents the distance from the first focus to the center of the lamp, and the vertical axis represents the variation of the polarization axis (axis unevenness).
又，所謂偏光軸，是以方位角來顯示位於光線照射區域之某點的偏光方向者。又，偏光軸之變異(軸不均)的大小係如第6圖所示，是以偏光光線所照射之區域的中心位置之偏光軸的方向作為基準，測量光線照射區域四角落之偏光軸的方向，並以±θ/2作為開啟角θ來表示旋轉了幾度。Further, the polarization axis is a person who displays the polarization direction at a certain point of the light irradiation region by the azimuth angle. Further, the variation of the polarization axis (axis unevenness) is as shown in Fig. 6, and the polarization axis of the four corners of the light irradiation region is measured with the direction of the polarization axis at the center position of the region irradiated by the polarized light as a reference. The direction, with ±θ/2 as the opening angle θ, indicates a few degrees of rotation.
回到第3圖，橫軸之0的位置是位於第1焦點(F1)的位置，偏離量為正側(比0更右側)，是表示使燈從第1焦點(F1)朝向光柵偏光元件側移動之情形；偏離量為負值側(比0更左側)，是表示使燈從第1焦點(F1)朝向與光柵偏光元件為相反側移動之情形。Returning to Fig. 3, the position of 0 on the horizontal axis is at the position of the first focus (F1), and the amount of deviation is the positive side (more to the right than 0), indicating that the lamp is directed from the first focus (F1) toward the grating polarizing element. The case where the side moves; the amount of deviation is the negative side (more left than 0), which means that the lamp is moved from the first focus (F1) toward the opposite side of the grating polarizing element.
第4圖，是在具溝槽形狀且斷面為拋物線狀之反射鏡的焦點距離為20mm之情形下，使用管之內徑為10mm、20mm、26mm之棒狀燈的情形。Fig. 4 is a view showing a case where a rod-shaped lamp having an inner diameter of a tube of 10 mm, 20 mm, or 26 mm is used in the case where the focal length of the mirror having a groove shape and a parabolic cross section is 20 mm.
第5圖，是在具溝槽形狀且斷面為拋物線狀之反射鏡的焦點距離為25mm之情形下，使用管之內徑為12.5mm、25mm、32.5mm之棒狀燈的情形。Fig. 5 is a view showing a case where a rod-shaped lamp having an inner diameter of a tube of 12.5 mm, 25 mm, and 32.5 mm is used in the case where the focal length of the mirror having a groove shape and a parabolic cross section is 25 mm.
由第3、4、5圖，可以得知以下的硏創心得。From the 3rd, 4th, and 5th pictures, the following ingenuity can be known.
當使燈，相對於第1焦點(F1)朝向與光柵偏光元件為相反側移動時，偏光軸的變異(軸不均)會變大。When the lamp is moved to the side opposite to the grating polarizing element with respect to the first focus (F1), the variation (axial unevenness) of the polarization axis becomes large.
不過，即使是反射鏡之第1焦點(F1)的位置有所不同，相較於將燈的中心配置在第1焦點(F1)時之偏光軸的變異(軸不均)，使燈的中心從第1焦點(F1)朝向偏光子側移動才更可以使偏光軸的變異(軸不均)變小，且無關於燈管(內徑)的大小。However, even if the position of the first focus (F1) of the mirror is different, the center of the lamp is made smaller than the variation of the polarization axis (axis unevenness) when the center of the lamp is placed at the first focus (F1). When the first focus (F1) is moved toward the polarizer side, the variation (axial unevenness) of the polarization axis can be made smaller, and the size of the bulb (inner diameter) is not involved.
因此，針對於具備有：線狀的光源、及具有反射來自該光源之光的溝槽型且斷面為拋物線狀的反射鏡、以及用以將此光源與由反射鏡所反射的光予以偏光的光柵偏光元件等之偏光光線照射裝置，為了縮小偏光軸的變異(軸不均)，是將燈(的中心)，以配置在反射鏡之第1焦點與頂點所連結的直線上，且是在第1焦點與偏光元件之間為佳。Therefore, the present invention is directed to a light source having a linear shape, a mirror having a groove shape reflecting light from the light source, and a parabolic cross section, and polarizing the light source and the light reflected by the mirror. In order to reduce the variation of the polarization axis (axis unevenness), the polarized light irradiation device such as the grating polarizing element is disposed on the straight line connecting the first focus and the apex of the mirror, and is It is preferable between the first focus and the polarizing element.
不過，從第1焦點(F1)到燈為止的距離，若是超過某程度以上時，則偏光軸的變異(軸不均)就會轉成為增加。因此，偏光軸之變異(軸不均)為最小時之燈的位置，就必須因應反射鏡的焦點距離與燈的內徑，事先以實驗等來求得。However, if the distance from the first focus (F1) to the lamp exceeds a certain level, the variation of the polarization axis (axis unevenness) increases. Therefore, the position of the lamp when the variation of the polarization axis (axis unevenness) is the smallest must be determined in advance by experiments or the like in accordance with the focal length of the mirror and the inner diameter of the lamp.
如上所述，若燈的中心離第1焦點太遠的話，則偏光軸的變異會再次變大。因此，使燈的中心從第1焦點朝向偏光元件的方向移動的距離，是以到反射鏡之焦點距離的1/2左右的距離為止為佳，例如，焦點距離為18mm之反射鏡的情形時為至9mm；20mm之反射鏡的情形時為至10mm；25mm之反射鏡的情形時為至12.5mm為止。As described above, if the center of the lamp is too far from the first focus, the variation of the polarization axis becomes larger again. Therefore, it is preferable to move the center of the lamp from the first focus toward the direction of the polarizing element by a distance of about 1/2 of the focal length of the mirror. For example, in the case of a mirror having a focal length of 18 mm. It is up to 10 mm for the case of a mirror of 20 mm; it is up to 12.5 mm for the case of a mirror of 25 mm.
當使燈的中心從第1焦點(F1)朝向偏光元件側移動時，燈管之內徑較小者，可更加改善偏光軸的變異(軸不均)。When the center of the lamp is moved from the first focus (F1) toward the polarizing element side, the variation of the polarization axis (axis unevenness) can be further improved by the smaller inner diameter of the lamp.
1‧‧‧棒狀燈1‧‧‧ rod lights
2‧‧‧反射鏡2‧‧‧Mirror
10‧‧‧光柵偏光元件10‧‧‧Grating polarizer
20‧‧‧光線照射部20‧‧‧Lighting Department
30‧‧‧工件30‧‧‧Workpiece
R1‧‧‧導出輥筒R1‧‧‧Extraction roller
R2‧‧‧捲取輥筒R2‧‧‧Winding roller
第1圖是顯示本發明之實施例之偏光光線照射裝置的構成。Fig. 1 is a view showing the configuration of a polarized light irradiation device according to an embodiment of the present invention.
第2圖是說明在本發明中，反射鏡及燈及金屬絲光柵偏光元件之配置的圖面。Fig. 2 is a view for explaining the arrangement of a mirror, a lamp, and a wire grating polarizing element in the present invention.
第3圖是顯示移動在連結第1焦點(F1)與拋物線頂點之直線上時，光線照射區域之偏光軸之變異變化的圖(1)。Fig. 3 is a view (1) showing a change in the variation of the polarization axis of the light irradiation region when the movement is on a straight line connecting the first focus (F1) and the apex of the parabola.
第4圖是顯示移動在連結第1焦點(F1)與拋物線頂點之直線上時，光線照射區域之偏光軸之變異變化的圖(2)。Fig. 4 is a view (2) showing a change in variation of the polarization axis of the light-irradiated region when the movement is on a straight line connecting the first focus (F1) and the parabola vertex.
第5圖是顯示移動在連結第1焦點(F1)與拋物線頂點之直線上時，光線照射區域之偏光軸之變異變化的圖(3)。Fig. 5 is a view (3) showing a change in the variation of the polarization axis of the light-irradiated area when the line connecting the first focus (F1) and the parabola vertex is moved.
第6圖是說明偏光軸之變異的圖面。Fig. 6 is a view showing the variation of the polarization axis.
第7圖是顯示使用棒狀燈、反射鏡、以及光柵偏光元件之偏光光線照射裝置之構成例的圖面。Fig. 7 is a view showing a configuration example of a polarized light irradiation device using a rod-shaped lamp, a mirror, and a grating polarizing element.
1．．．棒狀燈1. . . Stick light
2．．．反射鏡2. . . Reflector
10．．．光柵偏光元件10. . . Grating polarizing element
20．．．光線照射部20. . . Light illuminating department
30．．．工件30. . . Workpiece
R1．．．導出輥筒R1. . . Export roller
R2．．．捲取輥筒R2. . . Take-up roller
Claims (1)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010004805A JP5287737B2 (en) | 2010-01-13 | 2010-01-13 | Polarized light irradiation device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201207515A TW201207515A (en) | 2012-02-16 |
| TWI416229B true TWI416229B (en) | 2013-11-21 |
Family
ID=44267283
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW099138838A TWI416229B (en) | 2010-01-13 | 2010-11-11 | Polarized light irradiation device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5287737B2 (en) |
| KR (1) | KR101288661B1 (en) |
| CN (1) | CN102129139B (en) |
| TW (1) | TWI416229B (en) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5200271B1 (en) | 2012-01-25 | 2013-06-05 | ウシオ電機株式会社 | Polarized light irradiation device |
| JP5056991B1 (en) | 2012-02-02 | 2012-10-24 | ウシオ電機株式会社 | Polarized light irradiation device |
| KR101393460B1 (en) * | 2013-01-15 | 2014-05-12 | 위아코퍼레이션 주식회사 | Rubbing and photo-aligning device |
| JP5821860B2 (en) | 2013-01-21 | 2015-11-24 | ウシオ電機株式会社 | Polarized light irradiation device |
| KR102064210B1 (en) | 2013-07-04 | 2020-01-10 | 삼성디스플레이 주식회사 | Polarizer, polarized light illuminating apparatus having the same and method of manufacturing the same |
| JP6326746B2 (en) * | 2013-09-10 | 2018-05-23 | 東芝ライテック株式会社 | Polarized light irradiation device |
| CN103676238B (en) * | 2013-12-20 | 2016-09-14 | 深圳市华星光电技术有限公司 | Orientation ultraviolet apparatus for baking |
| KR102166261B1 (en) | 2014-03-25 | 2020-10-15 | 도시바 라이텍쿠 가부시키가이샤 | Polarized light irradiation apparatus |
| KR102297802B1 (en) | 2014-09-22 | 2021-09-03 | 도시바 라이텍쿠 가부시키가이샤 | Light source device |
| JP2019101226A (en) * | 2017-12-01 | 2019-06-24 | シャープ株式会社 | Polarized light irradiation device, and, method of manufacturing substrate with photosensitive film |
| WO2019204978A1 (en) * | 2018-04-24 | 2019-10-31 | Boe Technology Group Co., Ltd. | Apparatus for photo-alignment process, method of fabricating a liquid crystal display substrate, and method of fabricating an apparatus for photo-alignment process |
| JP2019211725A (en) * | 2018-06-08 | 2019-12-12 | 株式会社ブイ・テクノロジー | Light irradiation device |
| CN111856745B (en) * | 2019-04-30 | 2023-03-17 | 上海微电子装备（集团）股份有限公司 | Light irradiation device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004144884A (en) * | 2002-10-23 | 2004-05-20 | Ushio Inc | Polarizing light irradiation device for optical orientation |
| JP2006269190A (en) * | 2005-03-23 | 2006-10-05 | Yowa:Kk | Direct backlight |
| CN1973243A (en) * | 2004-06-02 | 2007-05-30 | 3M创新有限公司 | Polarized UV exposure system |
| TW200944902A (en) * | 2008-04-24 | 2009-11-01 | Ushio Electric Inc | Polarization light irradiation device for photo alignment |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3140164B2 (en) * | 1992-05-01 | 2001-03-05 | パイオニア株式会社 | Focusing reflector |
| US6307609B1 (en) * | 1997-08-05 | 2001-10-23 | Wayne M. Gibbons | Polarized light exposure systems for aligning liquid crystals |
| JP2000028963A (en) * | 1999-05-19 | 2000-01-28 | Seiko Epson Corp | Illumination device and projection type display device using it |
| US6874899B2 (en) * | 2002-07-12 | 2005-04-05 | Eastman Kodak Company | Apparatus and method for irradiating a substrate |
| JP4506412B2 (en) * | 2004-10-28 | 2010-07-21 | ウシオ電機株式会社 | Polarizing element unit and polarized light irradiation device |
| JP4436752B2 (en) * | 2004-12-22 | 2010-03-24 | シャープ株式会社 | Light source device and liquid crystal display device |
| JP4706255B2 (en) | 2004-12-28 | 2011-06-22 | ウシオ電機株式会社 | Polarized light irradiation device |
| JP4892859B2 (en) * | 2005-04-20 | 2012-03-07 | ウシオ電機株式会社 | Polarized light irradiation device |
| JP2006323060A (en) | 2005-05-18 | 2006-11-30 | Ushio Inc | Polarized-light irradiating device |
| WO2008155933A1 (en) * | 2007-06-18 | 2008-12-24 | Sharp Kabushiki Kaisha | Lighting device for display equipment, display equipment, and television receiver |
-
2010
- 2010-01-13 JP JP2010004805A patent/JP5287737B2/en not_active Expired - Fee Related
- 2010-11-11 TW TW099138838A patent/TWI416229B/en not_active IP Right Cessation
- 2010-12-29 KR KR1020100137696A patent/KR101288661B1/en active IP Right Grant
-
2011
- 2011-01-13 CN CN201110007079.7A patent/CN102129139B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004144884A (en) * | 2002-10-23 | 2004-05-20 | Ushio Inc | Polarizing light irradiation device for optical orientation |
| CN1973243A (en) * | 2004-06-02 | 2007-05-30 | 3M创新有限公司 | Polarized UV exposure system |
| JP2006269190A (en) * | 2005-03-23 | 2006-10-05 | Yowa:Kk | Direct backlight |
| TW200944902A (en) * | 2008-04-24 | 2009-11-01 | Ushio Electric Inc | Polarization light irradiation device for photo alignment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102129139A (en) | 2011-07-20 |
| JP5287737B2 (en) | 2013-09-11 |
| KR101288661B1 (en) | 2013-07-22 |
| KR20110083496A (en) | 2011-07-20 |
| JP2011145381A (en) | 2011-07-28 |
| CN102129139B (en) | 2014-08-20 |
| TW201207515A (en) | 2012-02-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI416229B (en) | Polarized light irradiation device | |
| TW201520661A (en) | Polarization light irradiation device for photo alignment | |
| JP6119035B2 (en) | Exposure equipment | |
| JP5177266B2 (en) | Polarizing element unit, light irradiation device using the polarizing element unit, and transmittance setting method of polarizing element unit | |
| JP6326746B2 (en) | Polarized light irradiation device | |
| TW201216011A (en) | Light irradiation apparatus | |
| JP4706255B2 (en) | Polarized light irradiation device | |
| TW201300960A (en) | Light irradiation device and light irradiation method | |
| JP6201707B2 (en) | UV irradiation equipment | |
| JP2014191072A (en) | Polarized light irradiation device | |
| KR20170135737A (en) | Polarized light illuminating apparatus and light aligning apparatus | |
| JP2010122532A (en) | Lamp apparatus | |
| TWI343588B (en) | Increasing the discharge arc diffuseness in mercury-free gas discharge lamps | |
| JP5772374B2 (en) | Light source device | |
| TW201626076A (en) | Polarizing light irradiation apparatus and photo alignment apparatus | |
| JP2009092481A (en) | Lighting device for visual inspection and visual inspection device | |
| TW201445225A (en) | Polarized light irradiation equipment for light orientation | |
| JP2012221726A (en) | Lamp unit, and light irradiation device having the same | |
| JP2006260931A (en) | Backlight for liquid crystal display, and liquid crystal display using the same | |
| JP2009081044A (en) | Light source device | |
| JP5609158B2 (en) | Light source device and projection display device | |
| JP2012252201A (en) | Light irradiation device | |
| JP5891773B2 (en) | Irradiation device | |
| JP2013191398A (en) | Excimer light irradiation device | |
| JP2015195141A (en) | Irradiation device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |