TWI407805B - Method for making thermoacoustic device - Google Patents
Method for making thermoacoustic device Download PDFInfo
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- TWI407805B TWI407805B TW98101572A TW98101572A TWI407805B TW I407805 B TWI407805 B TW I407805B TW 98101572 A TW98101572 A TW 98101572A TW 98101572 A TW98101572 A TW 98101572A TW I407805 B TWI407805 B TW I407805B
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本發明涉及一種發聲裝置之製備方法，尤其涉及一種基於奈米碳管之熱致發聲裝置之製備方法。The invention relates to a method for preparing a sound generating device, in particular to a method for preparing a thermal sound generating device based on a carbon nanotube.
發聲裝置一般由訊號輸入裝置和發聲元件組成。通過訊號輸入裝置輸入訊號給發聲元件，進而發出聲音。先前之發聲元件種類很多，如電動式、電磁式、靜電式及壓電式，它們大都採用振膜振動發出聲音，結構較為複雜。The sounding device generally consists of a signal input device and a sounding element. The signal is input to the sounding component through the signal input device, and then the sound is emitted. Previously, there were many types of sounding components, such as electric, electromagnetic, electrostatic, and piezoelectric. Most of them used diaphragm vibration to emit sound, and the structure was complicated.
范守善等人於2008年10月29日公開了一種應用熱聲效應原理發聲之奈米碳管膜熱致發聲裝置，請參見文獻“Flexible,Stretchable,Transparent Carbon Nanotube Thin Film Loudspeakers”，Fan et al.,Nano Letters,Vol.8(12),4539-4545(2008)。該文獻揭露的熱致發聲裝置採用奈米碳管膜作為發聲元件，利用輸入電訊號造成該奈米碳管膜溫度變化，從而使其周圍氣體介質迅速膨脹和收縮，進而發出聲波，故該奈米碳管膜組成之發聲裝置可於無磁之條件下工作，結構較為簡單，有利於降低該熱致發聲裝置之成本。且由於該奈米碳管膜具有較大之比表面積及較小之單位面積熱容，故該熱致發聲裝置可發出人耳能夠聽到之強度之聲音，且具有較寬之發聲頻率範圍(100Hz~100kHz)。該熱致發聲裝置之具體結構包括至少兩個電極及設置於該至少兩個電極之上之奈米碳管膜，該至少兩個電極間隔設置且均與該奈米碳管膜電連接，同時與訊號輸入裝置之兩端電連接。該電極一般採用棒狀金屬電極，然，當奈米碳管膜之面積較大時，為降低奈米碳管膜之驅動電壓，一般需設置複數電極，設置該複數電極時，該複數電極的相對位置及電極之間之距離難以準確確定，不利於該熱致發聲裝置之標準化及工業化生產。而該熱致發聲裝置之具體製備方法也未在上述文獻中揭示。On October 29, 2008, Fan Shoushan et al. disclosed a nano-carbon tube film thermal sounding device using the principle of thermoacoustic effect. Please refer to the literature “Flexible, Stretchable, Transparent Carbon Nanotube Thin Film Loudspeakers”, Fan et al. , Nano Letters, Vol. 8 (12), 4539-4545 (2008). The thermo-acoustic device disclosed in the document uses a carbon nanotube film as a sound-emitting element, and uses the input electric signal to cause a temperature change of the carbon nanotube film, thereby rapidly expanding and contracting the surrounding gas medium, thereby generating sound waves, so the nai The sound generating device composed of the carbon tube film can work under the condition of no magnetism, and the structure is relatively simple, which is beneficial to reducing the cost of the thermo-acoustic device. And because the carbon nanotube film has a large specific surface area and a small heat capacity per unit area, the thermo-acoustic device can emit a sound that can be heard by the human ear, and has a wide range of vocal frequencies (100 Hz). ~100kHz). The specific structure of the thermoacoustic device includes at least two electrodes and a carbon nanotube film disposed on the at least two electrodes, the at least two electrodes being spaced apart and electrically connected to the carbon nanotube film, and simultaneously It is electrically connected to both ends of the signal input device. The electrode generally adopts a rod-shaped metal electrode. However, when the area of the carbon nanotube film is large, in order to reduce the driving voltage of the carbon nanotube film, a plurality of electrodes are generally required, and when the plurality of electrodes are provided, the plurality of electrodes are provided. The relative position and the distance between the electrodes are difficult to determine accurately, which is not conducive to the standardization and industrial production of the thermo-acoustic device. The specific preparation method of the thermoacoustic device is also not disclosed in the above documents.
有鑒於此，提供一種有利於實現標準化及工業化之熱致發聲裝置之製備方法實為必要。In view of this, it is necessary to provide a method for preparing a thermoacoustic device that is advantageous for standardization and industrialization.
一種熱致發聲裝置之製備方法，其包括以下步驟：提供一基底；絲網印刷一導電漿料於該基底之表面，形成一圖形化導電漿料層；將一用于熱致發聲的奈米碳管結構鋪設於該圖形化導電漿料層上。A method for preparing a thermo-acoustic device, comprising the steps of: providing a substrate; screen printing a conductive paste on a surface of the substrate to form a patterned conductive paste layer; and using a nano-heat-induced sounding layer A carbon tube structure is laid on the patterned conductive paste layer.
一種熱致發聲裝置之製備方法，其包括以下步驟：絲網印刷一導電漿料於一基底之表面，形成一液態圖形化導電漿料層；將一用于熱致發聲的奈米碳管結構鋪設於該液態圖形化導電漿料層上，使液態圖形化導電漿料層中之導電漿料之一部分滲入奈米碳管結構內，另一部分間隔設置於奈米碳管結構與基底之表面之間，該導電漿料之另一部分共同使奈米碳管結構相對於基底基本懸空。A method for preparing a thermoacoustic device, comprising the steps of: screen printing a conductive paste on a surface of a substrate to form a liquid patterned conductive paste layer; and using a carbon nanotube structure for thermally generating sound Laying on the liquid patterned conductive paste layer, one part of the conductive paste in the liquid patterned conductive paste layer is partially infiltrated into the carbon nanotube structure, and the other part is disposed on the surface of the carbon nanotube structure and the substrate. In addition, another portion of the conductive paste together causes the carbon nanotube structure to be substantially suspended relative to the substrate.
一種熱致發聲裝置之製備方法，其包括以下步驟：絲網印刷一導電漿料於一基底之表面，形成一第一圖形化導電漿料層；固化該第一圖形化導電漿料層形成複數電極；將一用于熱致發聲的奈米碳管結構鋪設於該複數電極上，該複數電極使奈米碳管結構相對於該基底基本懸空，該奈米碳管結構包括一第一表面和與該第一表面相背之一第二表面；於該奈米碳管結構相背於該基底之第二表面絲網印刷一導電漿料以形成一第二圖形化導電漿料層，該第二圖形化導電漿料層與該第一圖形化導電漿料層之位置相對應；固化該第二圖形化導電漿料層以形成複數固定電極。A method for preparing a thermo-acoustic device, comprising: screen printing a conductive paste on a surface of a substrate to form a first patterned conductive paste layer; curing the first patterned conductive paste layer to form a plurality An electrode; a carbon nanotube structure for thermally igniting is disposed on the plurality of electrodes, the plurality of electrodes substantially suspending the carbon nanotube structure relative to the substrate, the carbon nanotube structure including a first surface and a second surface opposite to the first surface; a conductive paste is screen printed on the second surface of the carbon nanotube structure opposite to the second surface to form a second patterned conductive paste layer The patterned conductive paste layer corresponds to the position of the first patterned conductive paste layer; the second patterned conductive paste layer is cured to form a plurality of fixed electrodes.
相較於先前技術，由於本發明提供之製備方法採用絲網印刷之方法製備熱致發聲裝置中之複數電極，從而可使複數電極一次成型，且電極間距易於準確控制，從而使該熱致發聲裝置易於實現工業化生產。Compared with the prior art, since the preparation method provided by the invention adopts the method of screen printing to prepare the plurality of electrodes in the thermo-acoustic device, the plurality of electrodes can be formed at one time, and the electrode spacing is easy to be accurately controlled, thereby making the thermo-acoustic sound The device is easy to achieve industrial production.
以下將結合附圖詳細說明本發明實施例提供之熱致發聲裝置之製備方法。Hereinafter, a method for preparing a thermo-acoustic device according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.
請參閱圖1及圖2，本發明第一實施例提供一種熱致發聲裝置10之製備方法，其包括以下步驟：步驟一：提供一基底12。Referring to FIG. 1 and FIG. 2, a first embodiment of the present invention provides a method for fabricating a thermo-acoustic device 10, which includes the following steps: Step 1: Provide a substrate 12.
該基底12之形狀不限，且該基底12具有一平整之表面。該基底12為絕緣材料或導電性較差之材料，可為玻璃、塑膠或陶瓷等，本實施例為一正方形之玻璃板，其邊長為17釐米，厚度為2毫米。The shape of the substrate 12 is not limited, and the substrate 12 has a flat surface. The substrate 12 is an insulating material or a material having poor conductivity, and may be glass, plastic or ceramic. The embodiment is a square glass plate having a side length of 17 cm and a thickness of 2 mm.
步驟二：絲網印刷一導電漿料於該基底12之表面，形成一圖形化導電漿料層14。Step 2: Screen printing a conductive paste on the surface of the substrate 12 to form a patterned conductive paste layer 14.
首先，提供一圖形化網版，並將該圖形化網版覆蓋該基底12。該圖形化網版包括複數鏤空部分，該複數鏤空部分之位置與於基底12表面需要形成電極18之位置對應。具體地，該複數鏤空部分相互平行且等間距間隔設置，該複數鏤空部分之數量至少為兩個，該複數鏤空部分之形狀根據所要形成電極18之形狀而設計。本實施例中，該圖形化網版包括8個矩形之鏤空部分，每個鏤空部分之長度為16釐米，寬度為150微米，且相鄰兩個鏤空部分之間之距離為2釐米。First, a graphical screen is provided and the patterned screen is overlaid on the substrate 12. The patterned screen includes a plurality of hollowed out portions corresponding to locations at which the surface of the substrate 12 needs to form the electrodes 18. Specifically, the plurality of hollow portions are disposed parallel to each other and equally spaced, and the number of the plurality of hollow portions is at least two, and the shape of the plurality of hollow portions is designed according to the shape of the electrode 18 to be formed. In this embodiment, the patterned screen comprises eight rectangular hollow portions, each hollow portion having a length of 16 cm, a width of 150 microns, and a distance between adjacent two hollow portions of 2 cm.
其次，利用一定之壓力將一導電漿料通過該圖形化網版之鏤空部分印刷到該基底12之表面。具體之印刷過程為，提供一刮板，該刮板包括一刮壓面；向該圖形化網版上供給一導電漿料；通過該刮板之刮壓面給該網版上之導電漿料部分施加一定之壓力，並同時使刮板移動，從而使該導電漿料於該刮板移動過程中由於刮板之壓力而通過該網版之鏤空部分滲透到該基底12之表面。Next, a conductive paste is printed onto the surface of the substrate 12 through a hollow portion of the patterned screen using a certain pressure. The specific printing process is: providing a squeegee comprising a squeezing surface; supplying a conductive paste to the patterned screen; and feeding the conductive paste on the screen through the squeezing surface of the squeegee Part of the pressure is applied and the squeegee is moved at the same time, so that the conductive paste penetrates the surface of the substrate 12 through the hollow portion of the screen due to the pressure of the squeegee during the movement of the squeegee.
上述導電漿料可為金屬導電漿料，該金屬導電漿料之主要成份包括金屬顆粒、黏結劑和溶劑等，該金屬顆粒可為金顆粒、銀顆粒或鋁顆粒等。本實施例優選為銀導電漿料，即該導電漿料中之金屬顆粒為銀顆粒。The conductive paste may be a metal conductive paste, and the main components of the metal conductive paste include metal particles, a binder, a solvent, and the like, and the metal particles may be gold particles, silver particles or aluminum particles. This embodiment is preferably a silver conductive paste, that is, the metal particles in the conductive paste are silver particles.
最後，使該圖形化網版脫離該基底12，從而於該基底12之表面之指定位置形成複數與該圖形化網版之鏤空部分形狀一致之圖形化導電漿料層14。通過本方法製備之圖形化導電漿料層14為8個大致平行之細長形部分，其高度可達5微米~100微米，本實施例優選為5微米~20微米。Finally, the patterned screen is separated from the substrate 12 to form a plurality of patterned conductive paste layers 14 conforming to the shape of the hollow portion of the patterned screen at a specified position on the surface of the substrate 12. The patterned conductive paste layer 14 prepared by the method has eight substantially parallel elongated portions, and the height thereof can be from 5 micrometers to 100 micrometers, and in this embodiment, preferably from 5 micrometers to 20 micrometers.
步驟三：提供一奈米碳管結構16，於該圖形化導電漿料層14未發生固化時鋪設該奈米碳管結構16。Step 3: A carbon nanotube structure 16 is provided to lay the carbon nanotube structure 16 when the patterned conductive paste layer 14 is not cured.
該奈米碳管結構16包括一第一表面(圖未標)和與該第一表面相背之一第二表面(圖未標)，且該奈米碳管結構16包括複數奈米碳管，該複數奈米碳管可為單壁奈米碳管、雙壁奈米碳管及多壁奈米碳管中之一種或其任意組合，單壁奈米碳管之直徑為0.5奈米~50奈米，雙壁奈米碳管之直徑為1.0奈米~50奈米，多壁奈米碳管之直徑為1.5奈米~50奈米。該奈米碳管結構16具有較大之比表面積，故該奈米碳管結構16具有較小之單位面積熱容和較大之散熱表面，該奈米碳管結構16之單位面積熱容小於2×10-4 焦耳每平方釐米克爾文，優選地，該奈米碳管結構16之單位面積熱容小於1.7×10-6 焦耳每平方釐米克爾文。該奈米碳管結構16具有一自支撐結構，該自支撐結構係指該奈米碳管結構16無需通過一支撐體支撐，也能保持自身特定之形狀。該奈米碳管結構16之厚度不限，若該奈米碳管結構16之厚度較小，則其透光度較好，若該奈米碳管結構16之厚度較大，則其機械強度較高，本實施例優選為0.5奈米~100微米。The carbon nanotube structure 16 includes a first surface (not labeled) and a second surface opposite the first surface (not labeled), and the carbon nanotube structure 16 includes a plurality of carbon nanotubes The plurality of carbon nanotubes may be one of a single-walled carbon nanotube, a double-walled carbon nanotube, and a multi-walled carbon nanotube, or any combination thereof, and the diameter of the single-walled carbon nanotube is 0.5 nm~ 50 nm, the diameter of the double-walled carbon nanotubes is 1.0 nm to 50 nm, and the diameter of the multi-walled carbon nanotubes is 1.5 nm to 50 nm. The carbon nanotube structure 16 has a large specific surface area, so the carbon nanotube structure 16 has a small heat capacity per unit area and a large heat dissipation surface, and the heat capacity per unit area of the carbon nanotube structure 16 is smaller than 2 x 10 -4 joules per square centimeter of Kelvin, preferably, the carbon nanotube structure 16 has a heat capacity per unit area of less than 1.7 x 10 -6 joules per square centimeter of Kelvin. The carbon nanotube structure 16 has a self-supporting structure which means that the carbon nanotube structure 16 can maintain its own specific shape without being supported by a support. The thickness of the carbon nanotube structure 16 is not limited. If the thickness of the carbon nanotube structure 16 is small, the transmittance is good. If the thickness of the carbon nanotube structure 16 is large, the mechanical strength is Higher, this embodiment is preferably from 0.5 nm to 100 μm.
本實施例中，該奈米碳管結構16包括至少一奈米碳管膜，該奈米碳管膜通過採用一拉伸工具自一奈米碳管陣列直接拉取而獲得。每一奈米碳管膜包括複數擇優取向排列之奈米碳管，該複數奈米碳管通過凡德瓦爾力首尾相連且沿同一方向擇優取向排列。該奈米碳管膜之厚度為0.5奈米~100微米。可理解，若該奈米碳管膜寬度較小時，可將複數奈米碳管膜共面且無間隙鋪設，若該奈米碳管膜寬度較大時，可將複數奈米碳管膜層疊鋪設，從而可製備不同厚度之奈米碳管結構16。於由複數奈米碳管膜層疊鋪設組成之奈米碳管結構16中，相鄰兩個奈米碳管膜中之奈米碳管之排列方向有一夾角α，且0°α90°。本實施例中，α為90°。另，若該奈米碳管結構16為單層奈米碳管膜，該奈米碳管結構16之透明度較高，其光透過率為67%~95%，若該奈米碳管結構16為多層奈米碳管膜，該奈米碳管結構16之機械強度較高。本實施例之奈米碳管結構16採用兩層奈米碳管膜，該兩層奈米碳管拉膜結構中之奈米碳管之間之夾角為90°，該奈米碳管結構16於保證發聲強度之同時也具備一定之機械性能，可延長該熱致發聲裝置10之使用壽命。In this embodiment, the carbon nanotube structure 16 includes at least one carbon nanotube film obtained by directly drawing from a carbon nanotube array using a stretching tool. Each of the carbon nanotube membranes comprises a plurality of preferred orientation aligned carbon nanotubes, the plurality of carbon nanotubes being connected end to end by van der Waals force and arranged in a preferred orientation in the same direction. The carbon nanotube film has a thickness of from 0.5 nm to 100 μm. It can be understood that if the width of the carbon nanotube film is small, the plurality of carbon nanotube films can be coplanar and without gaps. If the width of the carbon nanotube film is large, the plurality of carbon nanotube films can be Laminated and laid so that carbon nanotube structures 16 of different thicknesses can be prepared. In the carbon nanotube structure 16 composed of a plurality of carbon nanotube films laminated, the arrangement direction of the carbon nanotubes in the adjacent two carbon nanotube films has an angle α and 0°. α 90°. In this embodiment, α is 90°. In addition, if the carbon nanotube structure 16 is a single-layer carbon nanotube film, the carbon nanotube structure 16 has a high transparency, and the light transmittance is 67% to 95%, if the carbon nanotube structure 16 The multilayer carbon nanotube membrane 16 has a high mechanical strength. The carbon nanotube structure 16 of the present embodiment adopts two layers of carbon nanotube membranes, and the angle between the carbon nanotubes in the two-layer carbon nanotube membrane structure is 90°, and the carbon nanotube structure 16 In order to ensure the sound intensity, it also has certain mechanical properties, which can prolong the service life of the heat-induced sounding device 10.
該步驟於上述步驟二形成之圖形化導電漿料層14未發生固化時鋪設該奈米碳管結構16，使該奈米碳管結構16之第一表面面向該基底12。若於該圖形化導電漿料層14未發生固化時鋪設該奈米碳管結構16，由於該圖形化導電漿料層14之導電漿料為一具有一定黏度之液態漿料，且該奈米碳管結構16包括之複數奈米碳管之間存於一定之間隙，故該圖形化導電漿料層14中之導電漿料會部分滲入該奈米碳管結構16中。另，由於導電漿料具有一定之黏度，且密度也較大，故圖形化導電漿料層14中之另一部分導電漿料會間隔設置於奈米碳管結構16和基底12之間，使奈米碳管結構16會懸於該圖形化導電漿料層14中，使該奈米碳管結構16相對於基底12基本懸空。其中基本懸空指奈米碳管結構16相對於基底12完全懸空或者絕大部分(例如：90%以上)懸空。該基本懸空係由於奈米碳管結構16為一柔性材料，其中未與圖形化導電漿料層14接觸之部分會由於沒有支撐物支撐而於重力之作用下部分可能與基底接觸。該完全懸空的情形下，優選使奈米碳管結構16與基底12表面大致平行或完全平行，從而使得奈米碳管結構16中之奈米碳管與基底12表面保持大致平行或完全平行。In this step, the carbon nanotube structure 16 is laid when the patterned conductive paste layer 14 formed in the above step 2 is not cured, so that the first surface of the carbon nanotube structure 16 faces the substrate 12. If the carbon nanotube structure 16 is laid when the patterned conductive paste layer 14 is not cured, the conductive paste of the patterned conductive paste layer 14 is a liquid slurry having a certain viscosity, and the nanometer The carbon tube structure 16 includes a certain gap between the plurality of carbon nanotubes, so that the conductive paste in the patterned conductive paste layer 14 partially penetrates into the carbon nanotube structure 16. In addition, since the conductive paste has a certain viscosity and a large density, another portion of the conductive paste in the patterned conductive paste layer 14 is disposed between the carbon nanotube structure 16 and the substrate 12 at intervals. The carbon nanotube structure 16 will hang in the patterned conductive paste layer 14 such that the carbon nanotube structure 16 is substantially suspended relative to the substrate 12. The substantially suspended space refers to the carbon nanotube structure 16 being completely suspended or substantially (eg, more than 90%) suspended from the substrate 12. The substantially suspended space is due to the carbon nanotube structure 16 being a flexible material in which portions that are not in contact with the patterned conductive paste layer 14 may be partially in contact with the substrate due to gravity without the support of the support. In the case of the complete suspension, the carbon nanotube structure 16 is preferably substantially parallel or completely parallel to the surface of the substrate 12 such that the carbon nanotubes in the carbon nanotube structure 16 remain substantially parallel or completely parallel to the surface of the substrate 12.
此外，為保證該圖形化導電漿料層14中之導電漿料可由奈米碳管結構16之第一表面滲透並暴露於第二表面，可進一步包括給該已鋪設好之奈米碳管結構16施加一壓力之過程。本實施例具體為，提供一吹風裝置，利用該吹風裝置產生之風壓于奈米碳管結構16之第二表面，使圖形化導電漿料層14中之導電漿料可滲透並暴露于奈米碳管結構16之第二表面，該施加壓力之過程也可防止奈米碳管結構16發生破壞。In addition, in order to ensure that the conductive paste in the patterned conductive paste layer 14 can be infiltrated by the first surface of the carbon nanotube structure 16 and exposed to the second surface, the laminated carbon nanotube structure can be further included. 16 The process of applying a pressure. In this embodiment, a blowing device is provided, and the wind generated by the blowing device is pressed against the second surface of the carbon nanotube structure 16, so that the conductive paste in the patterned conductive paste layer 14 is permeable and exposed to the bottom. The second surface of the carbon nanotube structure 16 also prevents the carbon nanotube structure 16 from being damaged by the process of applying pressure.
步驟四：固化該圖形化導電漿料層14並形成複數電極18。本實施例具體為，提供一加熱裝置並通過該加熱裝置加熱該圖形化導電漿料層14，使該圖形化導電漿料層14固化並形成複數電極18，從而進一步使該奈米碳管結構16固定於該複數電極18中。該方法可保證該奈米碳管結構16與該複數電極18具有良好之電連接性，同時所形成之複數電極18也可對該奈米碳管結構16進一步起支撐作用。Step 4: The patterned conductive paste layer 14 is cured and a plurality of electrodes 18 are formed. In this embodiment, a heating device is provided and the patterned conductive paste layer 14 is heated by the heating device to cure the patterned conductive paste layer 14 and form a plurality of electrodes 18, thereby further forming the carbon nanotube structure. 16 is fixed in the plurality of electrodes 18. The method can ensure that the carbon nanotube structure 16 has good electrical connectivity with the plurality of electrodes 18, and the formed plurality of electrodes 18 can further support the carbon nanotube structure 16.
由於奈米碳管結構16係通過複數電極18固定於該基底12之表面上，使得奈米碳管結構16與基底12間隔一定之距離，故於奈米碳管結構16發聲之過程中可保證該奈米碳管結構16與周圍空氣具有更大之接觸面積，同時也可保證該奈米碳管結構16與周圍空氣進行充分之熱交換，從而進一步改善該熱致發聲裝置10之發聲效果。Since the carbon nanotube structure 16 is fixed on the surface of the substrate 12 by the plurality of electrodes 18, the carbon nanotube structure 16 is spaced apart from the substrate 12 by a certain distance, so that it can be ensured during the sounding of the carbon nanotube structure 16 The carbon nanotube structure 16 has a larger contact area with the surrounding air, and also ensures sufficient heat exchange between the carbon nanotube structure 16 and the surrounding air, thereby further improving the sounding effect of the thermo-acoustic device 10.
請參閱圖3及圖4，本發明第二實施例提供一種熱致發聲裝置20之製備方法，其包括以下步驟：步驟一：提供一基底22。Referring to FIG. 3 and FIG. 4, a second embodiment of the present invention provides a method for fabricating a thermo-acoustic device 20, which includes the following steps: Step 1: Provide a substrate 22.
該步驟與第一實施例之步驟一相同。This step is the same as step one of the first embodiment.
步驟二：絲網印刷一導電漿料於該基底22之表面，形成一第一圖形化導電漿料層(圖未示)，固化該第一圖形化導電漿料層並形成複數電極24。Step 2: Screen printing a conductive paste on the surface of the substrate 22 to form a first patterned conductive paste layer (not shown), curing the first patterned conductive paste layer and forming a plurality of electrodes 24.
該步驟與第一實施例之步驟二基本相同，其區別在於，本實施例於基底22表面絲網印刷形成第一圖形化導電漿料層後直接固化該第一圖形化導電漿料層並形成複數電極24。This step is substantially the same as the second step of the first embodiment, except that the first embodiment of the substrate 22 is screen-printed to form a first patterned conductive paste layer, and the first patterned conductive paste layer is directly cured and formed. A plurality of electrodes 24.
步驟三：提供一奈米碳管結構26，該奈米碳管結構26包括一第一表面(圖未標)和與該第一表面相背之第二表面(圖未標)，於該複數電極24上鋪設該奈米碳管結構26，使該奈米碳管結構26之第一表面面向該基底22，並於該奈米碳管結構26之第二表面絲網印刷與上述複數電極24相對應之第二圖形化導電漿料層(圖未示)。Step 3: providing a carbon nanotube structure 26, the carbon nanotube structure 26 including a first surface (not labeled) and a second surface opposite the first surface (not labeled), The carbon nanotube structure 26 is laid on the electrode 24 such that the first surface of the carbon nanotube structure 26 faces the substrate 22 and is screen printed on the second surface of the carbon nanotube structure 26 with the plurality of electrodes 24 Corresponding second patterned conductive paste layer (not shown).
該步驟之絲網印刷過程為於上述鋪設之奈米碳管結構26之第二表面絲網印刷一導電漿料以形成第二圖形化導電漿料層。該絲網印刷過程所採用之導電漿料為金屬導電漿料，如金漿、銀漿或鋁漿等，該導電漿料與上述形成複數電極24之導電漿料可相同，也可不同，本實施例為銀導電漿料。本實施例之絲網印刷過程直接於奈米碳管結構26上進行，故印刷於奈米碳管結構26上之液態導電漿料於重力和網版壓力之作用下可滲入奈米碳管結構26中奈米碳管之間存在之間隙中，從而使該第二圖形化導電漿料層中之導電漿料可由奈米碳管結構之第二表面滲透並暴露於第一表面。且該複數電極24可確保該奈米碳管結構26相對於基底22基本懸空。The screen printing process of this step is to screen print a conductive paste on the second surface of the laid carbon nanotube structure 26 to form a second patterned conductive paste layer. The conductive paste used in the screen printing process is a metal conductive paste, such as gold paste, silver paste or aluminum paste, and the conductive paste may be the same as or different from the conductive paste forming the plurality of electrodes 24 described above. An example is a silver conductive paste. The screen printing process of this embodiment is directly performed on the carbon nanotube structure 26, so that the liquid conductive paste printed on the carbon nanotube structure 26 can penetrate into the carbon nanotube structure under the action of gravity and screen pressure. The gap between the 26 carbon nanotubes is such that the conductive paste in the second patterned conductive paste layer is infiltrated by the second surface of the carbon nanotube structure and exposed to the first surface. And the plurality of electrodes 24 ensure that the carbon nanotube structure 26 is substantially suspended relative to the substrate 22.
步驟四：固化該第二圖形化導電漿料層並形成複數固定電極28，使該奈米碳管結構26固定於該複數固定電極28中。Step 4: curing the second patterned conductive paste layer and forming a plurality of fixed electrodes 28, and fixing the carbon nanotube structure 26 to the plurality of fixed electrodes 28.
該固化過程與實施例一形成複數電極之固化過程相同，即提供一加熱裝置，並用該加熱裝置烘乾該第二圖形化導電漿料層，使該第二圖形化導電漿料層發生固化並形成複數固定電極28，從而使得奈米碳管結構26固定於該複數固定電極28中，該複數固定電極28與該複數電極24一一相對。The curing process is the same as the curing process of forming the plurality of electrodes in the first embodiment, that is, providing a heating device, and drying the second patterned conductive paste layer with the heating device to cure the second patterned conductive paste layer and A plurality of fixed electrodes 28 are formed such that the carbon nanotube structure 26 is fixed in the plurality of fixed electrodes 28, and the plurality of fixed electrodes 28 are opposed to the plurality of electrodes 24 one by one.
本發明提供之熱致發聲裝置之製備方法具有以下優點：由於本發明提供之製備方法採用絲網印刷之方法，從而可使複數電極一次成型，且易於實現工業化生產；由於本發明之製備方法可使奈米碳管結構固定於該複數電極或者該複數固定電極中，從而可使奈米碳管結構與該複數電極或者複數固定電極保持良好之電連接；由於奈米碳管結構係通過複數電極固定於該基底之表面上，使得奈米碳管結構與基底間隔一定之距離，故於該熱致發聲裝置發聲之過程中可保證該奈米碳管結構與周圍空氣具有更大之接觸面積，同時也可保證該奈米碳管結構與周圍空氣進行充分之熱交換，從而進一步改善該熱致發聲裝置之發聲效果。The preparation method of the thermoacoustic device provided by the invention has the following advantages: since the preparation method provided by the invention adopts the method of screen printing, the plurality of electrodes can be formed in one time, and industrial production can be easily realized; Fixing the carbon nanotube structure to the plurality of electrodes or the plurality of fixed electrodes, so that the carbon nanotube structure can maintain a good electrical connection with the plurality of electrodes or the plurality of fixed electrodes; since the carbon nanotube structure passes through the plurality of electrodes Fixed on the surface of the substrate, so that the carbon nanotube structure is spaced apart from the substrate by a certain distance, so that the carbon nanotube structure can ensure a larger contact area with the surrounding air during the sounding of the thermo-acoustic device. At the same time, the carbon nanotube structure can be ensured to have sufficient heat exchange with the surrounding air, thereby further improving the sounding effect of the thermo-acoustic device.
綜上所述，本發明確已符合發明專利之要件，遂依法提出專利申請。惟，以上所述者僅為本發明之較佳實施方式，自不能以此限制本案之申請專利範圍。舉凡熟悉本案技藝之人士援依本發明之精神所作之等效修飾或變化，皆應涵蓋於以下申請專利範圍內。In summary, the present invention has indeed met the requirements of the invention patent, and has filed a patent application according to law. However, the above description is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the patent application of the present invention. Equivalent modifications or variations made by persons skilled in the art in light of the spirit of the invention are intended to be included within the scope of the following claims.
10、20．．．熱致發聲裝置10, 20. . . Thermal sounding device
12、22．．．基底12, 22. . . Base
14．．．導電漿料層14. . . Conductive paste layer
18、24．．．電極18, 24. . . electrode
16、26．．．奈米碳管結構16, 26. . . Carbon nanotube structure
28．．．固定電極28. . . Fixed electrode
圖1為本發明第一實施例之熱致發聲裝置之製備過程流程圖。1 is a flow chart showing the preparation process of the thermo-acoustic device according to the first embodiment of the present invention.
圖2為本發明第一實施例之熱致發聲裝置之製備工藝流程圖。2 is a flow chart showing the preparation process of the thermo-acoustic device according to the first embodiment of the present invention.
圖3為本發明第二實施例之熱致發聲裝置之製備過程流程圖。3 is a flow chart showing a process of preparing a thermo-acoustic device according to a second embodiment of the present invention.
圖4為本發明第二實施例之熱致發聲裝置之製備工藝流程圖。4 is a flow chart showing the preparation process of the thermo-acoustic device according to the second embodiment of the present invention.
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| US20070200467A1 (en) * | 1999-07-20 | 2007-08-30 | Sri International | Compliant electroactive polymer transducers for sonic applications |
| US6827823B2 (en) * | 2001-03-12 | 2004-12-07 | Futaba Corporation | Nano-carbon and composite material or mixed material containing nano-carbon and metal fine particle and methods for producing and patterning the same |
| US20080160090A1 (en) * | 2005-01-22 | 2008-07-03 | Alexander Oraevsky | Laser-Activated Nanothermolysis of Cells |
| TW200824494A (en) * | 2006-11-27 | 2008-06-01 | Hon Hai Prec Ind Co Ltd | Anode device and method for making the same |
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| TW201029485A (en) | 2010-08-01 |
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