TWI403721B - Rotating test module and test system thereof - Google Patents
Rotating test module and test system thereof Download PDFInfo
- Publication number
- TWI403721B TWI403721B TW098105502A TW98105502A TWI403721B TW I403721 B TWI403721 B TW I403721B TW 098105502 A TW098105502 A TW 098105502A TW 98105502 A TW98105502 A TW 98105502A TW I403721 B TWI403721 B TW I403721B
- Authority
- TW
- Taiwan
- Prior art keywords
- test
- rotating
- rotary
- device under
- test module
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M99/00—Subject matter not provided for in other groups of this subclass
- G01M99/008—Subject matter not provided for in other groups of this subclass by doing functionality tests
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M13/00—Testing of machine parts
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P13/00—Indicating or recording presence, absence, or direction, of movement
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
Description
本發明係有關測試系統,特別是有關一種適用於運動感測器(motion sensor)的旋轉測試模組及旋轉測試系統。The present invention relates to test systems, and more particularly to a rotary test module and a rotary test system suitable for use in a motion sensor.
運動感測器(motion sensor,或稱動態感測器)係一種可將運動狀態(例如傾斜角度)轉換為相對應電子訊號的元件,其逐漸普遍應用於現代的電子或機電裝置中,例如遊戲控制器、行動電話、數位音樂播放器(MP3)、照相機、個人數位助理(PDA),可實施各種運動(例如翻轉、加速、旋轉等)相關的應用,以促進使用上的真實性、便利性或功能多樣性。A motion sensor (or dynamic sensor) is an element that converts a motion state (such as a tilt angle) into a corresponding electronic signal, which is gradually used in modern electronic or electromechanical devices, such as games. Controllers, mobile phones, digital music players (MP3s), cameras, personal digital assistants (PDAs), can implement a variety of sports (such as flip, acceleration, rotation, etc.) related applications to promote the authenticity and convenience of use Or functional diversity.
現今的運動感測器一般係以半導體製程技術再配合機電技術(例如微機電系統(micro-electro-mechanical system,MEMS)技術)製作為積體電路。如同一般的積體電路,對已封裝完成之運動感測器需進行最終測試(final test),以確保其功能的正確性。於測試時,除了進行功能及電氣參數的測試外,還要測試其運動狀態(例如傾斜角度)的正確性。Today's motion sensors are generally fabricated as semiconductor circuits using semiconductor process technology coupled with electromechanical technologies such as micro-electro-mechanical systems (MEMS). As with the general integrated circuit, a final test is required for the packaged motion sensor to ensure its correct function. In addition to testing the function and electrical parameters, the correctness of the motion state (such as the tilt angle) is also tested.
然而,傳統運動感測器的測試系統對於運動狀態的測試,不但測試項目稀少,且對於每一種運動狀態測試項目,即需分別使用不同的運動測試機台。如此,不但造成測試系統設計的複雜化及成本的提高,且使得測試產能(throughput)無法提高。鑑於此,因此亟需提出運動感測器的各種運動狀態測試裝置,使其能整合於其他測試裝置,不但可降低成本、簡化設計,且可增加測試彈性,以利測試產能的提高。However, the test system of the traditional motion sensor has not only a few test items for the test of the motion state, but also a different motion test machine for each motion state test item. In this way, not only the complexity of the test system design and the cost increase, but also the test throughput cannot be improved. In view of this, it is urgent to propose various motion state testing devices of the motion sensor, so that it can be integrated into other testing devices, which not only reduces the cost, simplifies the design, but also increases the test flexibility to improve the test throughput.
本發明的目的之一在於提出一種適用於運動感測器的旋轉測試模組及旋轉測試系統。藉由模組化的設計,可將旋轉測試模組整合於傳統的測試系統中,且可與其他運動測試模組彈性置換使用。藉此,不但可降低成本、簡化設計,且可增加測試彈性及多樣性,以利測試產能的提高。One of the objects of the present invention is to provide a rotation test module and a rotation test system suitable for a motion sensor. The modular design allows the rotary test module to be integrated into a traditional test system and can be flexibly replaced with other motion test modules. This not only reduces costs, simplifies design, but also increases test flexibility and diversity for improved test throughput.
根據本發明實施例,旋轉測試模組包含至少一容置裝置(例如插槽),用以暫時容置受測元件(例如運動感測器)。旋轉測試模組還包含旋轉機構,用以對受測元件進行一或多轉軸的旋轉。在本實施例中,旋轉機構包含第一旋轉台,其受驅動而得以繞第一轉軸作旋轉;且包含至少一個第二旋轉台,設於第一旋轉台上,其中第二旋轉台受驅動而得以繞第二轉軸作旋轉。旋轉測試模組結合檢選分類機台(handler)及測試機台(tester)以組合成旋轉測試系統。其中,檢選分類機台拾取及置放受測元件至旋轉測試模組,而測試機台則藉由傳輸線分別控制旋轉測試模組及檢選分類機台。According to an embodiment of the invention, the rotation test module includes at least one receiving device (for example, a slot) for temporarily accommodating a device under test (for example, a motion sensor). The rotation test module further includes a rotation mechanism for rotating one or more shafts of the device under test. In this embodiment, the rotating mechanism includes a first rotating table that is driven to rotate about the first rotating shaft; and includes at least one second rotating table disposed on the first rotating table, wherein the second rotating table is driven It is possible to rotate around the second axis. The rotation test module combines the selection of a sorter and a tester to form a rotary test system. Among them, the sorting machine picks up and places the tested components to the rotating test module, and the testing machine controls the rotating test module and the sorting machine by the transmission line.
第一圖之系統方塊圖顯示本發明實施例之旋轉測試系統1,用以測試封裝後的運動感測器(motion sensor,或稱動態感測器)之旋轉運動。運動感測器係一種可將運動狀態(例如傾斜角度)轉換為相對應電子訊號的元件。根據不同的應用,運動感測器可以為加速度計(accelerometer)、陀螺儀(Gyroscope)、壓力感測器等。運動感測器有多種構造原理,在本實施例中,係以微機電系統(MEMS)技術所製造之運動感測器作為例示。The system block diagram of the first figure shows a rotation test system 1 of an embodiment of the present invention for testing the rotational motion of a packaged motion sensor (or dynamic sensor). A motion sensor is an element that converts a motion state (eg, a tilt angle) into a corresponding electronic signal. Depending on the application, the motion sensor can be an accelerometer, a gyroscope, a pressure sensor, or the like. Motion sensors have a variety of construction principles. In this embodiment, motion sensors manufactured by microelectromechanical systems (MEMS) technology are exemplified.
在本實施例中,旋轉測試系統1主要包含旋轉測試模組10、檢選分類機台(handler)12及測試機台(tester)14。旋轉測試模組10具一或多個容置裝置100(例如插槽),用以暫時容置一或多個受測元件(device under test,DUT),並藉由旋轉機構101對受測元件進行旋轉旋轉。此外,旋轉測試模組10還可包含加熱裝置102,用以控制受測元件的溫度。檢選分類機台12包含拾取/置放(pick/place)裝置120,用以拾取及置放受測元件至旋轉測試模組10以進行測試,並於測試完成後取回受測元件;接著,分類裝置121根據測試結果將受測元件加以分類(bin)。測試機台14主要包含測試頭(test head)140,其內含有測試相關的電路,經由傳輸線16、18用以分別控制上述之旋轉測試模組10及檢選分類機台12。詳言之,測試機台14首先透過傳輸線18通知檢選分類機台12拾取受測元件並置放於旋轉測試模組10中;接著,測試機台14透過傳輸線16通知旋轉測試模組10進行旋轉運動;受測元件的輸出訊號則經由傳輸線16傳回給測試機台14;最後,測試機台14通知檢選分類機台12取回受測元件並進行分類。藉由旋轉測試系統1,可以量測得到受測元件的向心加速度(一般又稱為g力(g-force)或g值加速度,其代表一物體相對於重力加速度之加速度大小,一單位g力大約等於9.8米/秒平方)。關於加速度的量測,可以參閱本案申請人同時申請的另一專利申請案,題為「動態測試裝置及方法」,其細節不在此贅述。In the present embodiment, the rotation test system 1 mainly includes a rotation test module 10, a sorting sorter 12, and a tester 14. The rotation test module 10 has one or more accommodating devices 100 (for example, slots) for temporarily accommodating one or more device under test (DUT), and the device under test by the rotating mechanism 101 Rotate and rotate. In addition, the rotation test module 10 can also include a heating device 102 for controlling the temperature of the device under test. The sorting sorting machine 12 includes a pick/place device 120 for picking up and placing the device under test to the rotating test module 10 for testing, and retrieving the device under test after the test is completed; The sorting means 121 classifies the elements to be tested according to the test results. The test machine 14 mainly includes a test head 140 containing test related circuits for controlling the above-described rotary test module 10 and the sorting machine 12 via the transmission lines 16, 18. In detail, the test machine 14 first informs the selection sorting machine 12 through the transmission line 18 to pick up the device under test and place it in the rotation test module 10; then, the test machine 14 notifies the rotation test module 10 to rotate through the transmission line 16. The output signal of the device under test is transmitted back to the test machine 14 via the transmission line 16; finally, the test machine 14 notifies the sorting machine 12 to retrieve the component under test and classify it. By rotating the test system 1, the centripetal acceleration of the device under test (generally referred to as g-force or g-value acceleration, which represents the acceleration of an object relative to gravitational acceleration, one unit g) can be measured. The force is approximately equal to 9.8 m/s square). For the measurement of acceleration, please refer to another patent application filed by the applicant at the same time, entitled "Dynamic Test Equipment and Method", the details of which are not described here.
與傳統運動測試系統作比較,本發明實施例所揭露之旋轉測試系統1至少具有下列優點。本實施例將旋轉測試模組10予以模組化後,當要進行其他種類的運動測試時,僅需以其他運動測試模組來置換旋轉測試模組10即可,幾乎或完全不需要變更檢選分類機台12的設計。換句話說,可以利用單一且為傳統(非運動測試)的檢選分類機台來搭配個別的運動測試模組,此不但具使用彈性及測試多樣性,且可降低成本(其他的運動測試模組可參閱本案申請人同時申請的其他專利申請案,題為「翻轉測試模組及其測試系統」、「直線往復測試模組及其測試系統」,其詳細內容不在此贅述)。反觀傳統運動測試系統,其檢選分類、運動測試及測試頭係為整體設計的,因此針對不同的運動測試即需使用不同的整個運動測試系統。Compared with the conventional motion testing system, the rotation testing system 1 disclosed in the embodiments of the present invention has at least the following advantages. In this embodiment, after the rotary test module 10 is modularized, when other types of motion tests are to be performed, only the other test modules are required to replace the rotary test module 10, and almost no change is required. The design of the sorting machine 12 is selected. In other words, you can use a single and traditional (non-sports test) sorting machine to match individual motion test modules, which not only has flexibility and test diversity, but also reduces costs (other motion test modules) For the group, please refer to other patent applications filed by the applicant at the same time, entitled "Flip test module and its test system", "Linear reciprocating test module and its test system", the details of which are not described here. In contrast to the traditional sports test system, the inspection classification, motion test and test head system are designed as a whole, so different motion test systems are required for different motion tests.
第二圖之透視圖顯示本發明實施例之旋轉測試系統1,而第三圖之透視圖顯示其中的旋轉測試模組10之細部結構,第四圖之俯視圖則顯示旋轉機構101的細部示意圖。這些圖式中與第一圖相同的組成要件係以相同符號來表示。The perspective view of the second diagram shows the rotation test system 1 of the embodiment of the present invention, while the perspective view of the third diagram shows the detailed structure of the rotation test module 10 therein, and the top view of the fourth diagram shows a detailed view of the rotation mechanism 101. The same constituent elements of the drawings as those of the first figure are denoted by the same symbols.
如第二圖所示,旋轉測試系統1主要包含旋轉測試模組10、檢選分類機台(handler)12及測試機台(tester)14。其中,旋轉測試模組10具元件插槽100,用以暫時容置受測元件(DUT)。位於插槽100與旋轉測試模組10其餘部分之間的是元件介面板(device interface board,DIB)103,一般又稱為受測元件板(DUT board)、功能板(performance board)或載板(load board)。此元件介面板(DIB)103主要係提供一電氣介面,用以將受測元件的訊號透過此電氣介面而得以傳送至旋轉測試模組10的其餘部分。As shown in the second figure, the rotation test system 1 mainly includes a rotation test module 10, a sorting sorter 12, and a tester 14. The rotation test module 10 has a component slot 100 for temporarily accommodating a device under test (DUT). Located between the slot 100 and the rest of the rotating test module 10 is a device interface board (DIB) 103, which is also commonly referred to as a DUT board, a performance board, or a carrier board. (load board). The component interface panel (DIB) 103 primarily provides an electrical interface for transmitting signals of the device under test through the electrical interface to the remainder of the rotary test module 10.
如第三圖、第四圖所示,除了插槽100、元件介面板103之外,本發明實施例之旋轉測試模組10還包含基座104,及設於其上的第一旋轉台106A。第一旋轉台106A受驅動裝置(例如馬達,未圖式)之控制而得以繞(第一)轉軸107A作旋轉。第一旋轉台106A之上又設有一或多個第二旋轉台106B,其分別受驅動裝置(例如馬達,未圖式)之控制而得以分別繞各自的(第二)轉軸107B作旋轉。第一旋轉台106A和第二旋轉台106B的旋轉方向可以相同也可以不同,且彼此間的轉速也可以不同。此外,基座104內設有升降機構105,其藉由轉軸107而得以升降第一旋轉台106A及其上的要件。在本實施例中,於進行旋轉測試之前,升降機構105先升起第一旋轉台106A(及設於其上的各要件),以利檢選分類機台12將受測元件置放於插槽100內。當受測元件放置妥當後,升降機構105即將第一旋轉台106A降下。於旋轉測試完成後,升降機構105需再次升起第一旋轉台106A,以利檢選分類機台12將受測元件取回。雖然本實施例以升、降旋轉測試模組10的方式來達成受測元件的取放,然而在其他實施例中,也可以採用升、降檢選分類機台12的方式,或者同時移動旋轉測試模組10、檢選分類機台12的方式來達成受測元件的取放。As shown in the third and fourth figures, in addition to the slot 100 and the component interface panel 103, the rotation test module 10 of the embodiment of the present invention further includes a base 104, and a first rotary table 106A disposed thereon. . The first rotary table 106A is rotated about the (first) rotary shaft 107A under the control of a driving device (for example, a motor, not shown). Further, on the first rotating table 106A, one or more second rotating stages 106B are provided, which are respectively rotated around the respective (second) rotating shafts 107B under the control of a driving device (for example, a motor, not shown). The rotation directions of the first rotating table 106A and the second rotating table 106B may be the same or different, and the rotational speeds may be different from each other. In addition, a lifting mechanism 105 is provided in the base 104, and the first rotating table 106A and the components thereon are lifted and lowered by the rotating shaft 107. In this embodiment, before the rotation test is performed, the lifting mechanism 105 first raises the first rotating table 106A (and the components disposed thereon) to facilitate the sorting machine 12 to place the device under test. Inside the slot 100. When the device under test is placed properly, the elevating mechanism 105 lowers the first rotary table 106A. After the rotation test is completed, the lifting mechanism 105 needs to raise the first rotating table 106A again to facilitate the sorting machine 12 to retrieve the device under test. Although the present embodiment achieves the pick-and-place of the device under test by the method of raising and lowering the test module 10, in other embodiments, the method of ascending and descending the sorting machine 12 may be adopted, or the rotation may be simultaneously performed. The test module 10 and the sorting machine 12 are selected to achieve the pick-and-place of the device under test.
在本發明實施例中,於旋轉運動測試當中,更包含對受測元件予以加溫並維持於一預定溫度或溫度範圍。如前所述,由於本實施例將旋轉測試模組10予以模組化,使得受測元件不再如傳統測試系統般位於檢選分類機台12內,而是位於旋轉測試模組10內。為了提供高溫給受測元件,可以採用傳統的加熱平台來保持受測元件的溫度狀態。然而在本發明一較佳實施例中,則是在插槽100內裝設加熱裝置102,如第五A圖所示的透視圖,第五B圖則顯示第五A圖中沿剖面線5B-5B’的剖面視圖。在本實施例中,加熱裝置102設於受測元件19的下方,包含有加熱器102A(例如一或多條高阻材質之加熱線)。另外,於加熱器102A之間(或附近)設有溫度感測器102B(例如熱電偶(thermal couple)),用以感測溫度。In the embodiment of the present invention, in the rotational motion test, the component to be tested is further heated and maintained at a predetermined temperature or temperature range. As described above, since the rotation test module 10 is modularized in this embodiment, the device under test is no longer located in the sorting sorting machine 12 as in the conventional test system, but is located in the rotating test module 10. In order to provide high temperature to the component under test, a conventional heating platform can be used to maintain the temperature state of the device under test. However, in a preferred embodiment of the present invention, the heating device 102 is installed in the slot 100, as shown in the perspective view of FIG. 5A, and the fifth B diagram shows the cross-sectional line 5B in the fifth A. -5B' section view. In the present embodiment, the heating device 102 is disposed below the device under test 19 and includes a heater 102A (eg, one or more heater wires of high resistance material). Additionally, a temperature sensor 102B (eg, a thermal couple) is provided between (or near) the heater 102A for sensing temperature.
以上所述僅為本發明之較佳實施例而已,並非用以限定本發明之申請專利範圍;凡其它未脫離發明所揭示之精神下所完成之等效改變或修飾,均應包含在下述之申請專利範圍內。The above description is only the preferred embodiment of the present invention, and is not intended to limit the scope of the present invention; all other equivalent changes or modifications which are not departing from the spirit of the invention should be included in the following Within the scope of the patent application.
1...旋轉測試系統1. . . Rotary test system
10...旋轉測試模組10. . . Rotating test module
100...容置裝置(插槽)100. . . Storing device (slot)
101...旋轉機構101. . . Rotating mechanism
102...加熱裝置102. . . heating equipment
102A...加熱器102A. . . Heater
102B...溫度感測器(熱電偶)102B. . . Temperature sensor (thermocouple)
103...元件介面板(DIB)103. . . Component Interface Panel (DIB)
104...基座104. . . Pedestal
105...升降機構105. . . Lifting mechanism
106A...第一旋轉台106A. . . First rotary table
106B...第二旋轉台106B. . . Second rotary table
107A...第一轉軸107A. . . First shaft
107B...第二轉軸107B. . . Second shaft
12...檢選分類機台(handler)12. . . Check sorting machine (handler)
120...拾取/置放(pick/place)裝置120. . . Pick/place device
121...分類裝置121. . . Sorting device
14...測試機台(tester)14. . . Test machine
140...測試頭(test head)140. . . Test head
16...(第一)傳輸線16. . . (first) transmission line
18...(第二)傳輸線18. . . (second) transmission line
19...受測元件19. . . Measured component
第一圖之系統方塊圖顯示本發明實施例之旋轉測試系統。The system block diagram of the first diagram shows a rotation test system in accordance with an embodiment of the present invention.
第二圖之透視圖顯示本發明實施例之旋轉測試系統。The perspective view of the second diagram shows a rotary test system in accordance with an embodiment of the present invention.
第三圖之透視圖顯示第二圖的旋轉測試模組之細部結構。The perspective view of the third figure shows the detailed structure of the rotation test module of the second figure.
第四圖之俯視圖顯示旋轉機構的細部示意圖。The top view of the fourth figure shows a detailed view of the rotating mechanism.
第五A圖之透視圖顯示內裝設有加熱裝置的插槽。The perspective view of Figure 5A shows the slot in which the heating device is built.
第五B圖顯示第五A圖中沿剖面線5B-5B’的剖面視圖。Figure 5B shows a cross-sectional view along section line 5B-5B' in the fifth A diagram.
1...旋轉測試系統1. . . Rotary test system
10...旋轉測試模組10. . . Rotating test module
100...容置裝置(插槽)100. . . Storing device (slot)
101...旋轉機構101. . . Rotating mechanism
102...加熱裝置102. . . heating equipment
12...檢選分類機台(handler)12. . . Check sorting machine (handler)
120...拾取/置放(pick/place)裝置120. . . Pick/place device
121...分類裝置121. . . Sorting device
14...測試機台(tester)14. . . Test machine
140...測試頭(test head)140. . . Test head
16...傳輸線16. . . Transmission line
18...傳輸線18. . . Transmission line
Claims (17)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW098105502A TWI403721B (en) | 2009-02-20 | 2009-02-20 | Rotating test module and test system thereof |
KR1020090058101A KR101130749B1 (en) | 2009-02-20 | 2009-06-29 | Rotating test module and test system thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW098105502A TWI403721B (en) | 2009-02-20 | 2009-02-20 | Rotating test module and test system thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201031923A TW201031923A (en) | 2010-09-01 |
TWI403721B true TWI403721B (en) | 2013-08-01 |
Family
ID=42759109
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW098105502A TWI403721B (en) | 2009-02-20 | 2009-02-20 | Rotating test module and test system thereof |
Country Status (2)
Country | Link |
---|---|
KR (1) | KR101130749B1 (en) |
TW (1) | TWI403721B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI715509B (en) * | 2020-06-16 | 2021-01-01 | 京元電子股份有限公司 | Dynamic test module with limited over-rotation mechanism |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103033347B (en) * | 2012-05-23 | 2015-03-18 | 上海英伦帝华汽车部件有限公司 | Handrail testing apparatus and test method of handrail strength |
TWI421498B (en) * | 2012-10-09 | 2014-01-01 | King Yuan Electronics Co Ltd | Improved press bar of a testing socket and a dynamic testing equipment using the same |
CN113804229A (en) * | 2020-06-17 | 2021-12-17 | 京元电子股份有限公司 | Dynamic test module with over-rotation limiting mechanism |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1997018046A1 (en) * | 1995-11-16 | 1997-05-22 | Electro Scientific Industries, Inc. | Electrical circuit component handler |
US20020139169A1 (en) * | 2001-03-30 | 2002-10-03 | Lueth Richard A. | Automatic integrated mechanical and electrical angular motion detector test system |
US20070080700A1 (en) * | 2005-10-07 | 2007-04-12 | Kolman Robert S | Carousel device, system and method for electronic circuit tester |
TWM349152U (en) * | 2008-09-05 | 2009-01-11 | Jarllytec Co Ltd | Elevation device with quick positioning function |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2929948B2 (en) * | 1994-09-20 | 1999-08-03 | 三菱電機株式会社 | Probe type test handler and IC testing method using the same |
JP3777395B2 (en) * | 2001-09-17 | 2006-05-24 | アキム株式会社 | Method and apparatus for testing temperature characteristics of electronic components |
KR20050066313A (en) * | 2003-12-26 | 2005-06-30 | 미래산업 주식회사 | Handler for testing semiconductor |
-
2009
- 2009-02-20 TW TW098105502A patent/TWI403721B/en active
- 2009-06-29 KR KR1020090058101A patent/KR101130749B1/en active IP Right Grant
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1997018046A1 (en) * | 1995-11-16 | 1997-05-22 | Electro Scientific Industries, Inc. | Electrical circuit component handler |
US20020139169A1 (en) * | 2001-03-30 | 2002-10-03 | Lueth Richard A. | Automatic integrated mechanical and electrical angular motion detector test system |
US20070080700A1 (en) * | 2005-10-07 | 2007-04-12 | Kolman Robert S | Carousel device, system and method for electronic circuit tester |
TWM349152U (en) * | 2008-09-05 | 2009-01-11 | Jarllytec Co Ltd | Elevation device with quick positioning function |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI715509B (en) * | 2020-06-16 | 2021-01-01 | 京元電子股份有限公司 | Dynamic test module with limited over-rotation mechanism |
Also Published As
Publication number | Publication date |
---|---|
KR101130749B1 (en) | 2012-03-28 |
TW201031923A (en) | 2010-09-01 |
KR20100095350A (en) | 2010-08-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI403721B (en) | Rotating test module and test system thereof | |
JP6334866B2 (en) | Transducer built-in device, calibration method thereof, and calibration apparatus | |
TWI395950B (en) | Reciprocating test module and test system thereof | |
CN104459508B (en) | A kind of wafer test system and crystal round test approach | |
CN207799017U (en) | Chip testing jig and system | |
EP2789982B1 (en) | Methods and apparatus for calibrating transducer-including devices | |
US20070277586A1 (en) | Three-axial acceleration sensor inspection device and method of inspecting three-axial acceleration sensor | |
CN105070320B (en) | A kind of memory crystal round test approach and memory test machine | |
KR100747078B1 (en) | Transportation device and electronic component-handling device | |
CN106338627A (en) | Probe card, thermal insulation cover assembly, and semiconductor device test apparatus | |
CN103293458A (en) | Apparatus for testing elements | |
TWI451100B (en) | Rolling test module and test system thereof | |
CN101852687A (en) | Rotary test module and test system thereof | |
EP2842131B1 (en) | Calibration system for simultaneous calibration of multiple motion capture elements | |
CN101846589B (en) | Turnover testing module and testing system thereof | |
US20180346328A1 (en) | Apparatus and methods for integrated mems devices | |
TWI394949B (en) | Dynamic test apparatus and method | |
US9751757B2 (en) | Single motor dynamic calibration unit | |
KR102490592B1 (en) | Apparatus for transferring semiconductor devices | |
CN104069955B (en) | The detection of centrifuge MEMS static friction and screening system and method | |
Solanki et al. | Inertial MEMS test challenges | |
KR101041460B1 (en) | Inspection apparatus for led and testing devcie of led using the same | |
KR20200122266A (en) | Apparatus for inspecting semiconductor devices | |
CN112309492A (en) | Memory chip over-frequency test module and method thereof | |
CN210253175U (en) | Over-frequency testing device for memory chip |