TWI399359B - - Google Patents
Info
- Publication number
- TWI399359B TWI399359B TW98114596A TW98114596A TWI399359B TW I399359 B TWI399359 B TW I399359B TW 98114596 A TW98114596 A TW 98114596A TW 98114596 A TW98114596 A TW 98114596A TW I399359 B TWI399359 B TW I399359B
- Authority
- TW
- Taiwan
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW98114596A TW201040133A (en) | 2009-05-01 | 2009-05-01 | Equipment for recycling tetramethyl ammonium hydroxide and method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW98114596A TW201040133A (en) | 2009-05-01 | 2009-05-01 | Equipment for recycling tetramethyl ammonium hydroxide and method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201040133A TW201040133A (en) | 2010-11-16 |
| TWI399359B true TWI399359B (en) | 2013-06-21 |
Family
ID=44995831
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW98114596A TW201040133A (en) | 2009-05-01 | 2009-05-01 | Equipment for recycling tetramethyl ammonium hydroxide and method thereof |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW201040133A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102690206A (en) * | 2011-03-25 | 2012-09-26 | 敏森工程有限公司 | Recovery system and method of tetramethylammonium hydroxide |
| TWI423836B (en) * | 2011-05-27 | 2014-01-21 | Chang Chun Petrochemical Co | Process for recovering and purifying tetraalkyl ammonium hydroxide from waste solution containing the same |
| CN108440306B (en) * | 2018-05-24 | 2023-11-03 | 柏川新材料科技(宁波)有限公司 | Green production equipment and method of tetramethyl ammonium carbonate |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5874204A (en) * | 1996-11-21 | 1999-02-23 | Organo Corporation | Process for rejuvenation treatment of photoresist development waste |
| US6207039B1 (en) * | 1998-04-07 | 2001-03-27 | Sachem, Inc. | Process for recovering onium hydroxides or onium salts from solutions containing onium compounds using electrochemical ion exchange |
| US6426007B1 (en) * | 1999-04-29 | 2002-07-30 | International Business Machines Corporation | Removal of soluble metals in waste water from aqueous cleaning and etching processes |
| TWI231292B (en) * | 1998-10-30 | 2005-04-21 | Organo Corp | Process and equipment for recovering developer from photoresist development waste and reusing it |
| TWI304795B (en) * | 2000-10-20 | 2009-01-01 | Sachem Inc | Process for recovering onium hydroxides from solutions containing onium compounds |
-
2009
- 2009-05-01 TW TW98114596A patent/TW201040133A/en unknown
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5874204A (en) * | 1996-11-21 | 1999-02-23 | Organo Corporation | Process for rejuvenation treatment of photoresist development waste |
| US6207039B1 (en) * | 1998-04-07 | 2001-03-27 | Sachem, Inc. | Process for recovering onium hydroxides or onium salts from solutions containing onium compounds using electrochemical ion exchange |
| TWI231292B (en) * | 1998-10-30 | 2005-04-21 | Organo Corp | Process and equipment for recovering developer from photoresist development waste and reusing it |
| US6426007B1 (en) * | 1999-04-29 | 2002-07-30 | International Business Machines Corporation | Removal of soluble metals in waste water from aqueous cleaning and etching processes |
| TWI304795B (en) * | 2000-10-20 | 2009-01-01 | Sachem Inc | Process for recovering onium hydroxides from solutions containing onium compounds |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201040133A (en) | 2010-11-16 |