TWI397735B - Optical manufacturing device capable of cleaning an air and aqua knife maintenance tool - Google Patents
Optical manufacturing device capable of cleaning an air and aqua knife maintenance tool Download PDFInfo
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- TWI397735B TWI397735B TW98126208A TW98126208A TWI397735B TW I397735 B TWI397735 B TW I397735B TW 98126208 A TW98126208 A TW 98126208A TW 98126208 A TW98126208 A TW 98126208A TW I397735 B TWI397735 B TW I397735B
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Description
本發明係關於一種用於液晶顯示面板製造的光學製程設備,尤指一種利用清潔風(水)刀裝置之出風(水)口的光學製程設備,以提升液晶顯示面板生產效能。The present invention relates to an optical processing apparatus for manufacturing a liquid crystal display panel, and more particularly to an optical processing apparatus using an air outlet (water) port of a cleaning wind (water) knife device to improve the production performance of the liquid crystal display panel.
功能先進的顯示器已漸成為現今消費電子產品的重要特色,其中液晶顯示面板(Liquid crystal display panel,LCD panel)已經逐漸為各種電子設備如電視、行動電話、個人數位助理(PDA)、數位相機、電腦螢幕或筆記型電腦螢幕所廣泛應用。Advanced display has become an important feature of today's consumer electronics products, including liquid crystal display panels (LCD panels), which have gradually become available for various electronic devices such as televisions, mobile phones, personal digital assistants (PDAs), digital cameras, Widely used on computer screens or notebook screens.
LCD面板生產設備因製程繁複故有多種不同的設計,其中LCD顯影設備的用途是把前置裝置水平搬送來的基板做顯像處理、純水洗淨、中壓洗淨、毛刷水洗、溫純水洗淨及液切處理。由於在顯像處理時,基板會塗佈顯影劑,因此顯影設備最後會需要清除基板上多餘的顯影劑。傳統的清潔治具使用風刀裝置或者是水刀裝置來洗去大部分的顯影液。一般的風刀或水刀裝置會連接複數條管線,將純化的空氣或是大量的循環水由管線輸送至出風口或是出水口高壓射出,利用風力或是水壓以清除基板上的顯影劑。但是,當出風口或出水口堵塞造成分岔時,就會造成顯像劑洗淨不均的橫向痕跡(mura)。所以操作人員必須隨時地清潔出風口或出水口。由於風(水)刀裝置係位於顯影設備之機體二側內部,故操作人員欲進行清潔風(水)刀裝置工作時,必須將手伸入顯影設備之機體內部,手持0.05mm~0.07公厘(mm)的薄片刮除出風(水)口的堵塞物。而且顯影設備內部的設計十分複雜,操作人員在清潔時必須小心翼翼,使得清潔工作十分的不便,而且在清潔過程中,倘若此時誤觸電源開關而讓顯影設備開始啟動,會十分的危險。但隨著產能增加,出風(水)口阻塞的頻率也隨之增加,以人工清潔出風(水)口的方式顯得既費時(一次約15~20分鐘)又浪費人力,而且稍有疏忽或是不正確的刮除方式更可能造成設備的損害。也因此如何改善以人力清潔風(水)刀裝置之出風(水)口的光學製程設備是業界努力的目標。LCD panel production equipment has many different designs due to complicated process. The purpose of LCD development equipment is to make the substrate conveyed horizontally by the front device to be developed, pure water, medium pressure, brush, and pure water. Wash and liquid cut. Since the substrate is coated with the developer at the time of development processing, the developing device may eventually need to remove excess developer on the substrate. Conventional cleaning jigs use air knife devices or waterjet devices to wash away most of the developer. A general air knife or waterjet device will connect a plurality of pipelines, and the purified air or a large amount of circulating water is sent from the pipeline to the air outlet or the high pressure of the water outlet, and the wind or water pressure is used to remove the developer on the substrate. . However, when the air outlet or the water outlet is clogged, the lateral traces (mura) of the developer washing unevenness are caused. Therefore, the operator must clean the air outlet or the water outlet at any time. Since the wind (water) knife device is located inside the two sides of the developing device, when the operator wants to perform the cleaning wind (water) knife device, the hand must be inserted into the body of the developing device, and the hand is 0.05 mm to 0.07 mm. The sheet of (mm) scrapes off the blockage of the wind (water) port. Moreover, the design inside the developing device is very complicated, and the operator must be careful when cleaning, which makes the cleaning work very inconvenient, and it is very dangerous if the developing device starts to start when the power switch is accidentally touched during the cleaning process. However, as the production capacity increases, the frequency of clogging of the outlet (water) port also increases. The method of manually cleaning the outlet (water) is time consuming (about 15 to 20 minutes at a time) and wastes manpower, and is slightly negligent. Or incorrect scraping methods are more likely to cause damage to the equipment. Therefore, how to improve the optical process equipment for cleaning the air (water) port of the wind (water) knife device by human power is the goal of the industry.
有鑒於此,本發明之主要目的為提供一種可自動清潔風(水)刀裝置之出風(水)口的光學製程設備,不僅可節省清潔出風(水)口的時效,也不會因為人為不正確的刮除方式造成光學設備的損害,進而提升了以及生產效率以及工作的安全性。In view of the above, the main object of the present invention is to provide an optical processing apparatus capable of automatically cleaning the air outlet (water) port of a wind (water) knife device, which not only saves the timeliness of cleaning the air outlet (water) port, but also does not The artificially incorrect scraping method causes damage to the optical device, thereby improving the productivity as well as the safety of the work.
為了達到上述之目的,本發明係提供一種光學製程設備,其包含一清除裝置、一刮除件以及一傳動裝置。該清除裝置包含一出口,用來自該出***出一液體或一氣體。該刮除件係伸入該出口且厚度小於該出口之寬度。傳動裝置裝設於該清除裝置上並連接於該刮除件,用來帶動該刮除件沿該出口來回移動,以清除該出口間的堵塞。該刮除件係一金屬或塑膠薄片。In order to achieve the above object, the present invention provides an optical process apparatus including a cleaning device, a scraping member, and a transmission device. The cleaning device includes an outlet for ejecting a liquid or a gas from the outlet. The scraping member extends into the outlet and has a thickness less than the width of the outlet. The transmission device is mounted on the cleaning device and coupled to the scraping member for driving the scraping member to move back and forth along the outlet to clear the blockage between the outlets. The scraping member is a metal or plastic sheet.
根據本發明,該清除裝置包含一加壓裝置,用來施壓予該液體或該氣體,使得該液體或該氣體自該出口高速射出以清除一基板表面塗佈之化學試劑。該清除裝置係一風刀裝置或是一水刀裝置。According to the present invention, the cleaning device includes a pressurizing device for applying pressure to the liquid or the gas such that the liquid or the gas is ejected from the outlet at a high speed to remove a chemical agent coated on a surface of the substrate. The cleaning device is a air knife device or a water knife device.
根據本發明,該傳動裝置包含一滑動部、一固持部以及一卡合件。該滑動部設置於該本體上,其延伸方向同該出口延伸方向。固持部用來於固定該刮除件之一端。該卡合件連接於該固持部且卡合於該滑動部上,用來帶動該固持部朝該滑動部延伸方向來回移動。該滑動部係一滑軌或一輪軸。According to the invention, the transmission comprises a sliding portion, a retaining portion and a snap member. The sliding portion is disposed on the body and extends in a direction extending from the outlet. The retaining portion is for fixing one end of the scraping member. The engaging member is coupled to the retaining portion and is engaged with the sliding portion for driving the retaining portion to move back and forth toward the extending direction of the sliding portion. The sliding portion is a slide rail or an axle.
根據本發明,該傳動裝置另包含一馬達,用來提供一動力,使得該傳動裝置自動帶動該刮除件朝該出口延伸方向來回移動。According to the invention, the transmission further includes a motor for providing a power such that the transmission automatically causes the scraping member to move back and forth toward the outlet extension.
根據本發明,該刮除件係可自該固持部拆卸。According to the invention, the scraping member is detachable from the retaining portion.
為讓本發明之上述內容能更明顯易懂,下文特舉較佳實施例,並配合所附圖式,作詳細說明如下:In order to make the above-mentioned contents of the present invention more comprehensible, the preferred embodiments are described below, and the detailed description is as follows:
以下各實施例的說明是參考附加的圖式,用以例示本發明可用以實施之特定實施例。本發明所提到的方向用語,例如「上」、「下」、「前」、「後」、「左」、「右」、「頂」、「底」等,僅是參考附加圖式的方向。因此,使用的方向用語僅是用以說明及理解本發明,而非用以限制本發明。The following description of the various embodiments is provided to illustrate the specific embodiments of the invention. The directional terms mentioned in the present invention, such as "upper", "lower", "front", "back", "left", "right", "top", "bottom", etc., are only referred to as additional graphics. direction. Therefore, the directional terminology used is for the purpose of illustration and understanding of the invention.
請參閱第1圖,第1圖係本發明之光學製程設備10之示意圖。光學製程設備10包含複數個傳動滾輪組12、一清除裝置20、一刮除件40以及一傳動裝置50。傳動滾輪組12之二端分別樞接於光學製程設備10之二側。清除裝置20可為風刀或是水刀裝置。當基板60由光學製程設備10之入口處進入後,光學製程設備10內部的複數個傳動滾輪組12會依序將基板60水平地傳送。當基板60經過清除裝置20時,清除裝置20則由出口26射出液體或氣體,以水壓或風力清除基板表面附著的多餘化學試劑。設計上,清除裝置20之長度大於或等於通過光學製程設備10之基板寬度。出口26係一寬度為0.05-0.07厘米的細縫。刮除件40設置於清除裝置20上,可由傳動裝置50帶動沿著出口26的延伸方向,來回地移動以清除出口26的堵塞物。Please refer to FIG. 1. FIG. 1 is a schematic diagram of an optical processing apparatus 10 of the present invention. The optical processing apparatus 10 includes a plurality of drive roller sets 12, a cleaning device 20, a scraping member 40, and a transmission device 50. The two ends of the drive roller set 12 are respectively pivotally connected to two sides of the optical processing device 10. The cleaning device 20 can be an air knife or a water knife device. After the substrate 60 is accessed from the entrance of the optical processing apparatus 10, the plurality of drive roller sets 12 inside the optical processing apparatus 10 sequentially transport the substrate 60 horizontally. When the substrate 60 passes through the cleaning device 20, the cleaning device 20 ejects liquid or gas from the outlet 26 to remove excess chemical agents attached to the surface of the substrate by water pressure or wind. The length of the cleaning device 20 is designed to be greater than or equal to the substrate width through the optical processing apparatus 10. The outlet 26 is a slit having a width of 0.05 to 0.07 cm. The scraping member 40 is disposed on the cleaning device 20 and can be moved by the transmission device 50 along the extending direction of the outlet 26 to move back and forth to clear the blockage of the outlet 26.
清除裝置20包括軸承22、本體24、出口26、管線28、以及加壓裝置(圖未示)。軸承22穿設於本體24,管線28連接本體24,而管線28則連接到加壓裝置。管線28將純化過的空氣或是純水經過加壓裝置施壓後導入本體24,並朝箭頭A所示之方向排出。由於清除裝置20具有二相對的斜面30,該對斜面30分別固定於兩個本體24以形成出口26。施壓後的空氣或是純水會由出口26高速射出以清除基板60表面塗佈之化學試劑。The cleaning device 20 includes a bearing 22, a body 24, an outlet 26, a line 28, and a pressurizing device (not shown). The bearing 22 is threaded through the body 24, the line 28 is connected to the body 24, and the line 28 is connected to the pressurizing device. The line 28 pressurizes the purified air or pure water through a pressurizing device, and then introduces it into the body 24 and discharges it in the direction indicated by the arrow A. Since the cleaning device 20 has two opposing ramps 30, the pair of ramps 30 are secured to the two bodies 24, respectively, to form an outlet 26. The pressurized air or pure water is ejected from the outlet 26 at a high speed to remove the chemical agent coated on the surface of the substrate 60.
請一併參閱第1圖、第2A圖以及第2B圖,第2A圖係第一實施例之刮除件40以及傳動裝置50之滑動部之示意圖,第2B圖係第二實施例之刮除件40以及傳動裝置50之滑動部之示意圖。為了清除出口26的堵塞,刮除件40可為一伸入出口26間的金屬或塑膠薄片,該金屬或塑膠薄片之厚度係小於出口26之寬度。傳動裝置50裝設於本體24上並連接於該刮除件40,用來帶動該刮除件40沿出口26移動,以清除出口26間的堵塞。傳動裝置50包含一滑動部52、一固持部54以及一卡合件56。滑動部52設置於本體24上,其延伸方向同出口26延伸方向。固持部54則用來於固定刮除件40之一端,當刮除件40磨損時,可以自固持部54拆卸以更換新的刮 除件40。卡合件56則連接於固持部54且卡扣於滑動部52上,卡合件56可帶動固持部54朝箭頭B所示之方向來回移動,由於刮除件40係連接於固持部54上,所以刮除件40也因此朝箭頭B所示之方向來回移動,藉以清除出口26間的堵塞。在第2A圖中,滑動部52可以是一輪軸,而在第2B圖中,滑動部52可以是一滑軌。在一實施例中,卡合件56可以利用人力沿著滑動部52延伸方向來回移動;在另一實施例中,傳動裝置50另包含一馬達(圖未示),該馬達用來提供一動力予卡合件56,使得傳動裝置50自動帶動刮除件40朝出口26延伸方向(也就是滑動部52延伸方向)來回移動,而不再需要靠人力移動。或者,馬達也可以設定定時地帶動刮除件40朝出口26延伸方向來回移動。Please refer to FIG. 1 , FIG. 2A and FIG. 2B together. FIG. 2A is a schematic view of the scraping member 40 of the first embodiment and the sliding portion of the transmission device 50, and FIG. 2B is a scraping process of the second embodiment. A schematic view of the member 40 and the sliding portion of the transmission 50. In order to clear the clogging of the outlet 26, the scraping member 40 can be a metal or plastic sheet extending between the outlets 26, the thickness of the metal or plastic sheet being less than the width of the outlet 26. The transmission device 50 is mounted on the body 24 and coupled to the scraping member 40 for driving the scraping member 40 to move along the outlet 26 to clear the blockage between the outlets 26. The transmission device 50 includes a sliding portion 52, a holding portion 54, and a latching member 56. The sliding portion 52 is disposed on the body 24 in a direction in which the extension 26 extends. The retaining portion 54 is used to fix one end of the scraping member 40. When the scraping member 40 is worn, it can be detached from the retaining portion 54 to replace the new scraping portion. In addition to the piece 40. The engaging member 56 is coupled to the retaining portion 54 and is fastened to the sliding portion 52. The engaging member 56 can move the retaining portion 54 to move back and forth in the direction indicated by the arrow B. The scraping member 40 is coupled to the retaining portion 54. Therefore, the scraping member 40 is thus moved back and forth in the direction indicated by the arrow B, thereby clearing the blockage between the outlets 26. In Fig. 2A, the sliding portion 52 may be an axle, and in Fig. 2B, the sliding portion 52 may be a sliding rail. In an embodiment, the engaging member 56 can be moved back and forth along the extending direction of the sliding portion 52 by manpower; in another embodiment, the transmission device 50 further includes a motor (not shown) for providing a power. The engaging member 56 is such that the transmission 50 automatically drives the scraping member 40 to move back and forth toward the direction in which the outlet 26 extends (that is, the direction in which the sliding portion 52 extends) without being manually moved. Alternatively, the motor can also be set to periodically move the scraping member 40 back and forth toward the direction in which the outlet 26 extends.
請參閱第3圖,第3圖係本發明之第二實施例之光學製程設備70之示意圖。在第3圖中,與第1圖之光學製程設備10具有相同標號的元件者,其功能與作動方式相同,在此不另贅述。而光學製程設備70包含兩組清除裝置20,分別設置於傳動滾輪組12的上下兩側,而每一清除裝置20皆設置有刮除件40以及傳動裝置50。傳動裝置50自動帶動刮除件40朝出口26延伸方向(也就是滑動部52延伸方向)來回移動,來清除出口26的堵塞。Please refer to FIG. 3, which is a schematic diagram of an optical processing apparatus 70 according to a second embodiment of the present invention. In the third embodiment, the components having the same reference numerals as those of the optical processing apparatus 10 of FIG. 1 have the same functions and operations, and will not be further described herein. The optical processing device 70 includes two sets of cleaning devices 20 respectively disposed on the upper and lower sides of the driving roller set 12, and each cleaning device 20 is provided with a scraping member 40 and a transmission device 50. The transmission 50 automatically drives the scraping member 40 to move back and forth toward the direction in which the outlet 26 extends (i.e., the direction in which the sliding portion 52 extends) to clear the clogging of the outlet 26.
綜上所述,本發明之光學製程設備在清除裝置上設置一個可自動清潔出風(水)口堵塞的刮除件。該刮除件可以有效率地清除出風(水)口的堵塞,而不用擔心人為不正確的刮除方式造成光學設備的損害。而且清潔過程並不需將光學製程設備停機,自然不會影響影響產能又可兼顧產品品質。In summary, the optical processing apparatus of the present invention is provided with a scraping member for automatically cleaning the clogging of the air outlet (water) port on the cleaning device. The scraping member can efficiently remove the clogging of the wind (water) port without fear of causing damage to the optical device caused by an artificially incorrect scraping method. Moreover, the cleaning process does not require the shutdown of the optical process equipment, which naturally does not affect the impact of the production capacity and the quality of the product.
雖然本發明已用較佳實施例揭露如上,然其並非用以限定本發明,任何熟習此技藝者,在不脫離本發明之精神和範圍內,當可作各種之更動與修改,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準While the present invention has been described in its preferred embodiments, the present invention is not intended to limit the invention, and the invention may be variously modified and modified without departing from the spirit and scope of the invention. The scope of protection shall be subject to the definition of the scope of the patent application attached.
10、70...光學製程設備10, 70. . . Optical process equipment
12...傳動滾輪組12. . . Drive roller set
20...清除裝置20. . . Clearing device
40...刮除件40. . . Scraper
50...傳動裝置50. . . transmission
22...軸承twenty two. . . Bearing
24...本體twenty four. . . Ontology
26...出口26. . . Export
28...管線28. . . Pipeline
52...滑動部52. . . Sliding portion
54...固持部54. . . Holding unit
56...卡合件56. . . Clip
60...基板60. . . Substrate
第1圖係本發明之光學製程設備之構造示意圖。BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a schematic view showing the construction of an optical process apparatus of the present invention.
第2A圖係第一實施例之刮除件以及傳動裝置之滑動部之示意圖。Fig. 2A is a schematic view showing the scraping member of the first embodiment and the sliding portion of the transmission.
第2B圖係第二實施例之刮除件以及傳動裝置之滑動部之示意圖。Fig. 2B is a schematic view showing the scraping member of the second embodiment and the sliding portion of the transmission.
第3圖係本發明之第二實施例之光學製程設備之示意圖。Figure 3 is a schematic view showing an optical process apparatus of a second embodiment of the present invention.
10‧‧‧光學製程設備10‧‧‧Optical process equipment
12‧‧‧傳動滾輪組12‧‧‧Drive roller set
20‧‧‧清除裝置20‧‧‧Clearing device
40‧‧‧刮除件40‧‧‧Scrapping pieces
50‧‧‧傳動裝置50‧‧‧Transmission
22‧‧‧軸承22‧‧‧ Bearing
24‧‧‧本體24‧‧‧Ontology
26‧‧‧出口26‧‧‧Export
28‧‧‧管線28‧‧‧ pipeline
60‧‧‧基板60‧‧‧Substrate
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TW242578B (en) * | 1993-12-01 | 1995-03-11 | Incro Ltd | Self-cleaning/unblocking spray nozzle |
TW501949B (en) * | 2001-05-23 | 2002-09-11 | Taiwan Semiconductor Mfg | Automatic cleaning device for nozzles |
US20070068560A1 (en) * | 2005-09-29 | 2007-03-29 | Quanyuan Shang | Methods and apparatus for inkjet print head cleaning |
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