TWI383424B - High pressure discharge lamp and high pressure discharge lamp device - Google Patents
High pressure discharge lamp and high pressure discharge lamp device Download PDFInfo
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- TWI383424B TWI383424B TW097131001A TW97131001A TWI383424B TW I383424 B TWI383424 B TW I383424B TW 097131001 A TW097131001 A TW 097131001A TW 97131001 A TW97131001 A TW 97131001A TW I383424 B TWI383424 B TW I383424B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B21/00—Projectors or projection-type viewers; Accessories therefor
- G03B21/14—Details
- G03B21/20—Lamp housings
- G03B21/2006—Lamp housings characterised by the light source
- G03B21/2026—Gas discharge type light sources, e.g. arcs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
- H01J61/0732—Main electrodes for high-pressure discharge lamps characterised by the construction of the electrode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
- H01J61/33—Special shape of cross-section, e.g. for producing cool spot
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/36—Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
- H01J61/366—Seals for leading-in conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/36—Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
- H01J61/366—Seals for leading-in conductors
- H01J61/368—Pinched seals or analogous seals
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
- H01J61/523—Heating or cooling particular parts of the lamp
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/54—Igniting arrangements, e.g. promoting ionisation for starting
- H01J61/541—Igniting arrangements, e.g. promoting ionisation for starting using a bimetal switch
- H01J61/544—Igniting arrangements, e.g. promoting ionisation for starting using a bimetal switch and an auxiliary electrode outside the vessel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/84—Lamps with discharge constricted by high pressure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/84—Lamps with discharge constricted by high pressure
- H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Description
本發明，是關於使用於半導體、液晶等之曝光裝置用光源之高壓放電燈及高壓放電燈裝置，特別是，關於在發光管外側配置有外管之高壓放電燈，以及將該高壓放電燈配置在冷卻套管內之高壓放電燈裝置。The present invention relates to a high-pressure discharge lamp and a high-pressure discharge lamp device used for a light source for an exposure device such as a semiconductor or a liquid crystal, and more particularly to a high-pressure discharge lamp in which an outer tube is disposed outside an arc tube, and the high-pressure discharge lamp is disposed A high pressure discharge lamp unit in a cooling jacket.
現在，例如在接著劑等之樹脂的硬化處理或是印刷電路基板等之曝光處理中，是利用紫外線照射裝置，作為紫外線光源，例如是使用高壓放電燈。For example, in the curing treatment of a resin such as an adhesive or the exposure processing of a printed circuit board or the like, an ultraviolet irradiation device is used, and as the ultraviolet light source, for example, a high pressure discharge lamp is used.
第6圖，是顯示於以往之高壓放電燈裝置之構成概略的說明圖。Fig. 6 is an explanatory view showing a schematic configuration of a conventional high-pressure discharge lamp device.
如專利文獻1所記載之發明，該高壓放電燈裝置，是在高壓放電燈1之發光管2的外側，配置由內管25與外管26所構成的冷卻套管21，來進行發光管2的冷卻。高壓放電燈1之發光管2與冷卻套管21之內管的間隙，平均大約為1mm。高壓放電燈1，於直管狀之石英玻璃製的發光管2兩端封止一對的電極，並於內部封入水銀。冷卻套管21是由圓筒狀的石英玻璃等透明材料所形成，藉由內管25與外管26而成為雙重管構造。而且，經由設在兩端外周的連接管27a、27b使冷卻水從外部循環於套管內，將夾介空氣層而近接之發光管2予以冷卻並且吸收從高壓放電燈1所放射的熱。According to the invention described in Patent Document 1, the high pressure discharge lamp device is provided with a cooling jacket 21 composed of an inner tube 25 and an outer tube 26 outside the arc tube 2 of the high pressure discharge lamp 1, and the light emitting tube 2 is disposed. Cooling. The gap between the arc tube 2 of the high pressure discharge lamp 1 and the inner tube of the cooling jacket 21 is about 1 mm on average. The high pressure discharge lamp 1 seals a pair of electrodes at both ends of the arc tube made of a straight tubular quartz glass, and seals the inside of the mercury. The cooling jacket 21 is formed of a transparent material such as a cylindrical quartz glass, and has a double pipe structure by the inner tube 25 and the outer tube 26. Further, the cooling water is circulated outside the casing through the connecting pipes 27a and 27b provided at the outer periphery of both ends, and the arc tube 2 which is adjacent to the air layer is cooled and absorbs the heat radiated from the high pressure discharge lamp 1.
於第6圖所記載之高壓放電燈裝置，由於僅藉由存在於高壓放電燈1的發光管2與冷卻套管21的內管25之間隙中之空氣的單純熱傳導是無法將在發光管2所產生的熱傳達至冷卻套管21，故使冷卻風流動於高壓放電燈1的發光管2與冷卻套管21的內管25之間隙中來提高冷卻效率。但是，進入放電燈的發光管2與冷卻套管21的內管25之間隙的冷卻風，其溫度在入射側與出射側並不均一，隨此原因，造成發光管2的溫度也變得不均一。In the high-pressure discharge lamp device described in Fig. 6, since only the heat conduction of the air existing in the gap between the arc tube 2 of the high-pressure discharge lamp 1 and the inner tube 25 of the cooling jacket 21 is impossible, the light-emitting tube 2 cannot be used. The generated heat is transmitted to the cooling jacket 21, so that the cooling air flows in the gap between the arc tube 2 of the high pressure discharge lamp 1 and the inner tube 25 of the cooling jacket 21 to improve the cooling efficiency. However, the cooling air entering the gap between the arc tube 2 of the discharge lamp and the inner tube 25 of the cooling jacket 21 is not uniform in temperature on the incident side and the exit side, and accordingly, the temperature of the arc tube 2 does not become uniform. Uniform.
〔專利文獻1〕[Patent Document 1]
日本特開平6-267512號公報Japanese Patent Publication No. 6-267512
因之，為了不使冷卻風流動於發光管2與冷卻套管21之間隙來進行發光管2之冷卻，乃提案出縮小發光管2與冷卻套管21之間隔之對策。對於藉由將發光管2與冷卻套管21之間隙設為平均約50μm，發光管2的內徑為3.4mm(發光管2的外徑為7.4mm)之高壓放電燈1，即使輸入為250W/cm也能夠將發光管2的內表面溫度冷卻至800℃左右。Therefore, in order to prevent the cooling air from flowing between the arc tube 2 and the cooling jacket 21 to cool the arc tube 2, measures for reducing the distance between the arc tube 2 and the cooling jacket 21 have been proposed. The high pressure discharge lamp 1 having an inner diameter of the light-emitting tube 2 of 3.4 mm (the outer diameter of the arc tube 2 is 7.4 mm) by setting the gap between the arc tube 2 and the cooling sleeve 21 to an average of about 50 μm, even if the input is 250 W /cm can also cool the inner surface temperature of the arc tube 2 to about 800 °C.
高壓放電燈裝置，在被使用來作為半導體等之曝光裝置用光源時，在處理中以外之更換工件等之待機中，為了省電，如第7圖所示地，降低載入於燈之輸入電力來亮燈。因為待機電力越低則省電效果越大，所以業界期望待機 電力的低電力化。When the high-pressure discharge lamp device is used as a light source for an exposure device such as a semiconductor, in order to save power during standby other than during processing, in order to save power, as shown in Fig. 7, the input to the lamp is lowered. Electricity to light up. Because the lower the standby power, the more power saving effect, so the industry expects standby Low power of electricity.
然而，當待機模式時的待機電力過於下降時，則會造成發光管2的內表面溫度降低，產生被封入在發光管2內的水銀未蒸發。當產生水銀未蒸發時，要從待機模式移轉到處理模式時的啟動時間會有變慢、或者是無法維持放電而造成中斷的問題。However, when the standby power in the standby mode is excessively lowered, the temperature of the inner surface of the arc tube 2 is lowered, and the mercury enclosed in the arc tube 2 is not evaporated. When the mercury is not evaporated, the startup time when moving from the standby mode to the processing mode may become slower, or the discharge may not be maintained and the interruption may occur.
本發明之目的，係在於提供一種能夠一面降低待機模式的待機電力，同時於處理模式時，可以在短時間起動，且不會中斷地進行高輸出亮燈之高壓放電燈及高壓放電燈裝置。An object of the present invention is to provide a high-pressure discharge lamp and a high-pressure discharge lamp device which are capable of reducing standby power in a standby mode and which can be started in a short time while in a processing mode, and which perform high-output lighting without interruption.
本案的第1發明，是對於具備：相向配置有一對的電極，並封入有水銀的發光管，以及形成在上述發光管外側之直管狀的外管，以上述發光管的兩端來固定上述外管的高壓放電燈，其特徵為：於上述發光管的外表面，或是於上述外管的內表面，在軸方向一體形成有凸部，該發光管的外表面與該外管的內表面在該凸部接觸。According to a first aspect of the invention, there is provided an arc tube in which a pair of electrodes are disposed opposite to each other, and mercury is sealed, and a straight tubular outer tube formed outside the arc tube is fixed to the outer side of the arc tube. a high-pressure discharge lamp for a tube, characterized in that: an outer surface of the light-emitting tube or an inner surface of the outer tube is integrally formed with a convex portion in an axial direction, and an outer surface of the light-emitting tube and an inner surface of the outer tube Contact at the convex portion.
又，本案的第2發明，是對於本案的第1發明，其中上述凸部，是藉由在該外管的內表面設置螺旋狀的突起線條所形成，來作為其特徵。According to a second aspect of the invention, in the first aspect of the invention, the convex portion is formed by providing a spiral projection line on an inner surface of the outer tube.
又，本案的第3發明，是對於本案的第1發明，其中上述凸部，是藉由將該發光管的外表面設為於管軸方向垂直地切斷之斷面為斷面多角形狀所形成，來作為其特徵。According to a third aspect of the invention, in the first aspect of the invention, the convex portion is formed by cutting a cross section of the outer surface of the arc tube perpendicularly in the tube axis direction into a polygonal cross section. Formed as a feature.
又，本案的第4發明，是對於本案之第1~3發明， 其中上述外管之內徑與上述發光管之外徑的差為200μm以下，上述凸部的高度為200μm以下，來作為其特徵。Moreover, the fourth invention of the present invention is the first to third inventions of the present invention. The difference between the inner diameter of the outer tube and the outer diameter of the arc tube is 200 μm or less, and the height of the convex portion is 200 μm or less.
又，本案的第5發明，是將本案之第1~4發明之任一項所記載之高壓放電燈，配置於冷卻套管的內部，並使冷卻媒體沿著上述外管的壁面流過，來作為其特徵。In the fifth aspect of the invention, the high pressure discharge lamp according to any one of the first to fourth aspects of the present invention is disposed inside the cooling jacket, and the cooling medium flows along the wall surface of the outer tube. Come as its characteristics.
依據本發明之高壓放電燈及高壓放電燈裝置，由於藉由在外管的內表面、或是在發光管的外表面形成凸部，可以提高對在放電空間內之最冷點的溫度，所以即使降低待機電力也可以維持較高之發光管的內表面溫度，並可以抑制發光管內之封入水銀之未蒸發狀態的產生。因此，可以實現能夠一面降低待機模式的待機電力，同時於處理模式時，可以在短時間起動，且不會中斷地進行高輸出亮燈之高壓放電燈。According to the high pressure discharge lamp and the high pressure discharge lamp device of the present invention, since the convex portion is formed on the inner surface of the outer tube or on the outer surface of the arc tube, the temperature at the coldest point in the discharge space can be increased, so even Lowering the standby power can also maintain a higher inner surface temperature of the arc tube, and can suppress the occurrence of the unvaporized state of the enclosed mercury in the arc tube. Therefore, it is possible to realize a high-pressure discharge lamp capable of lowering the standby mode while performing the standby mode in a short time and performing high-output lighting without interruption.
說明本發明之第1實施形態。第1圖，是顯示本發明之高壓放電燈裝置之構成的說明用斷面圖。A first embodiment of the present invention will be described. Fig. 1 is a cross-sectional view for explaining the configuration of a high pressure discharge lamp device of the present invention.
高壓放電燈裝置，是於冷卻套管21的內部，插通著：於發光管2的外側配置有外管3之高壓放電燈1所構成。冷卻套管21，是藉由可穿透過從高壓放電燈1所放射(輻射)之紫外線的材料所構成者，例如由石英玻璃所構成 。於冷卻套管21的兩端，形成有：供給冷卻媒體之供給流路22，以及排出冷卻媒體之排出流路23。供給流路22與排出流路23其整體為大致L字型的管狀，用以保持固定冷卻套管21及高壓放電燈1。藉由軸向內方側的鎖口部24a，夾介O型環來保持固定冷卻套管21的外周面。藉由軸向外方側的鎖口部24b，夾介O型環來保持固定高壓放電燈1的外周面。The high pressure discharge lamp device is constructed by inserting a high pressure discharge lamp 1 having an outer tube 3 disposed outside the arc tube 2 inside the cooling jacket 21. The cooling jacket 21 is made of a material that can penetrate the ultraviolet rays radiated (radiated) from the high pressure discharge lamp 1, such as quartz glass. . At both ends of the cooling jacket 21, a supply flow path 22 for supplying a cooling medium and a discharge flow path 23 for discharging a cooling medium are formed. The supply flow path 22 and the discharge flow path 23 have a substantially L-shaped tubular shape for holding the cooling jacket 21 and the high pressure discharge lamp 1 in a fixed manner. The outer peripheral surface of the cooling jacket 21 is held by the O-ring interposed by the lock portion 24a on the inner side in the axial direction. The outer peripheral surface of the high pressure discharge lamp 1 is held by the O-ring interposed by the lock portion 24b on the outer side in the axial direction.
高壓放電燈1在亮燈時，冷卻媒體由沒有圖示出的泵浦所供給。高壓放電燈1的冷卻，是讓冷卻媒體例如以5L(公升)/min之流量進行循環而達成。又，對於冷卻媒體，以水、純水、或是透過逆滲透膜的水等為適宜。When the high pressure discharge lamp 1 is lit, the cooling medium is supplied by a pump which is not shown. The cooling of the high pressure discharge lamp 1 is achieved by circulating the cooling medium at a flow rate of, for example, 5 L (liter) / min. Further, as the cooling medium, water, pure water, or water that has passed through the reverse osmosis membrane is suitable.
第2圖，是顯示本發明之高壓放電燈之構成的說明用斷面圖。Fig. 2 is a cross-sectional view showing the structure of the high pressure discharge lamp of the present invention.
高壓放電燈1，其兩端為被封止，於例如由石英玻璃所構成之直管狀之發光管2的內部，分別相向配置著例如由鎢所構成之一對的棒狀電極4。各電極4連接於金屬箔5的一端，於金屬箔5的另一端連接有外部導線6。金屬箔5是由鉬所構成，並氣密地被埋設在：於發光管2之兩端所形成之桿狀的封止部7。外部導線6，是在封止部7的外側藉由支撐件9所披覆，而成為大徑。封止部7，例如，是使位於作為發光管2構成材料之管體的兩端部處於熔融狀態，藉由將內部減壓之收縮密封法所形成者，製成比發光管2的中央部(相當於發光區域的部分)還要小徑。The high pressure discharge lamp 1 is sealed at its both ends, and a rod electrode 4 of, for example, a pair of tungsten is disposed facing each other inside a straight tubular light-emitting tube 2 made of, for example, quartz glass. Each of the electrodes 4 is connected to one end of the metal foil 5, and an external lead 6 is connected to the other end of the metal foil 5. The metal foil 5 is made of molybdenum and is hermetically embedded in a rod-shaped sealing portion 7 formed at both ends of the arc tube 2. The outer lead wire 6 is covered by the support member 9 on the outer side of the sealing portion 7, and has a large diameter. The sealing portion 7 is formed, for example, in a molten state in which both end portions of the tubular body which is a material constituting the arc tube 2 are in a molten state, and is formed by a shrinkage sealing method in which the internal pressure is reduced. (corresponding to the part of the light-emitting area) also has a small diameter.
高壓放電燈1，例如是由被稱之為「毛細燈(capillary lamp)」的高壓水銀燈所構成，於發光管2的內部，例如封入1mg/cc以上的水銀、或是與水銀同時添加鐵、鈷、鎳、鉛、鎵、鎂、錫、鉈、錳等之金屬鹵化物之中至少一種類以上，並且適當地封入氬氣等之稀有氣體。然後，放射出例如含有波長為200~450nm之紫外線的光。The high-pressure discharge lamp 1 is composed of, for example, a high-pressure mercury lamp called a "capillary lamp". In the interior of the arc tube 2, for example, mercury of 1 mg/cc or more is sealed, or iron is added together with mercury. At least one of metal halides such as cobalt, nickel, lead, gallium, magnesium, tin, antimony, manganese, and the like, and a rare gas such as argon gas is appropriately sealed. Then, for example, light containing ultraviolet rays having a wavelength of 200 to 450 nm is emitted.
於高壓放電燈1之發光管2的外側，形成：由圓筒狀之石英玻璃等的透明材料所構成，內徑尺寸相對於管軸方向為均一之直管狀的外管3。沿著外管3的外表面讓冷卻媒體流過，來冷卻高壓放電燈1。從發光管2之兩端附近並及於披覆外部導線6之支撐件9的一部分，且於與外管3之間***有基端部8，夾介基端部8並藉由接著劑使發光管2及外管3氣密地被固定。於發光管2與外管3之間的間隙，形成有由空氣層或是適當的氣體所構成的氣體層。On the outer side of the arc tube 2 of the high pressure discharge lamp 1, an outer tube 3 made of a transparent material such as cylindrical quartz glass and having a uniform inner diameter dimension and a straight tubular shape with respect to the tube axis direction is formed. The high pressure discharge lamp 1 is cooled by flowing a cooling medium along the outer surface of the outer tube 3. A base end portion 8 is inserted from the vicinity of both ends of the arc tube 2 and a portion of the support member 9 covering the outer lead wire 6 and between the outer tube 3, and the interposer end portion 8 is made by an adhesive. The arc tube 2 and the outer tube 3 are hermetically fixed. A gas layer composed of an air layer or a suitable gas is formed in a gap between the arc tube 2 and the outer tube 3.
高壓放電燈1的發光管2，由於封止部7是比相當於發光區域之中央部還更小徑地構成，所以在中央部是近接於外管3，而在封止部7是與外管3間隔開。因此，在高壓放電燈1之發光管2的中央部，藉由冷卻媒體充分地冷卻而能夠防止過熱所造成之發光管2的破損。再者，於高壓放電燈1之發光管2的封止部7，因冷卻作用較弱，故可以確實地防止過冷卻，並防止起因於水銀未蒸發之照度降低。In the arc tube 2 of the high pressure discharge lamp 1, since the sealing portion 7 is configured to have a smaller diameter than the central portion corresponding to the light-emitting region, the central portion is closely adjacent to the outer tube 3, and the sealing portion 7 is external. The tubes 3 are spaced apart. Therefore, in the central portion of the arc tube 2 of the high pressure discharge lamp 1, the cooling medium can be sufficiently cooled to prevent breakage of the arc tube 2 due to overheating. Further, since the sealing portion 7 of the arc tube 2 of the high pressure discharge lamp 1 is weak in cooling, it is possible to surely prevent supercooling and prevent a decrease in illuminance due to mercury not evaporating.
以下顯示作為上述高壓放電燈1之一構成例，位於發光管2之中央部的內徑為3.4mm，發光管2之中央部的外徑為7.4mm，封止部7的外徑為6mm，發光管2的全長為150mm，電極4之間距為100mm，位於放電空間10內之電極4部分的長度為3mm，水銀的封入量為44mg/mm3 。外管3的外徑為95mm，外管3的內徑為7.4mm。Hereinafter, as an example of the configuration of the above-described high pressure discharge lamp 1, the inner diameter of the central portion of the arc tube 2 is shown as follows. 3.4mm, the outer diameter of the central portion of the arc tube 2 is 7.4mm, the outer diameter of the sealing portion 7 is 6 mm, the entire length of the arc tube 2 is 150 mm, the distance between the electrodes 4 is 100 mm, the length of the electrode 4 portion located in the discharge space 10 is 3 mm, and the amount of mercury enclosed is 44 mg/mm 3 . The outer diameter of the outer tube 3 is 95mm, the inner diameter of the outer tube 3 is 7.4mm.
在放電燈亮燈時之高壓放電燈1的額定電壓為2000V，額定電流為1.25A，輸入電力為2500W。When the discharge lamp is turned on, the high-voltage discharge lamp 1 has a rated voltage of 2000V, a rated current of 1.25A, and an input power of 2500W.
第3圖，是顯示本發明之高壓放電燈之中央部的放大斷面圖。第3圖(a)是將高壓放電燈1在垂直於管軸地切斷時的放大斷面圖；第3圖(b)是高壓放電燈1在平行於管軸地切斷時之接觸部分17的放大斷面圖。Fig. 3 is an enlarged cross-sectional view showing the central portion of the high pressure discharge lamp of the present invention. Fig. 3(a) is an enlarged cross-sectional view showing the high pressure discharge lamp 1 when it is cut perpendicular to the tube axis; Fig. 3(b) is a contact portion of the high pressure discharge lamp 1 when it is cut parallel to the tube axis. An enlarged sectional view of 17.
高壓放電燈1，因為發光管2與外管3之間的間隙14非常窄小，平均為50μm左右，即使使發光管2與外管3之軸中心對齊一致，但由於石英玻璃所具有之尺寸誤差等，也會產生發光管2與外管3接觸之區域。如第3圖(a)所示，發光管2偏離地被配置在比外管3之中心更為下側，下側的發光管2與外管3之間隙d，由於比上側的發光管2與外管3之間隙D還要小。由於下側之發光管2的外表面12，離受到冷卻媒體所冷卻之外管3的距離較短，故冷卻效果要比上側之發光管2的外表面12還要高。因此，位於發光管2之外表面12與外管3之內表面13相接觸之接觸部分17處之發光管2的內表面11，其冷卻效果 最高，成為放電空間10內的最冷點。相反地，位於發光管2之外表面12與外管3之內表面13之間的間隙D成為最大部分處之發光管2的內表面11，其冷卻效果最低，成為放電空間10內之最溫熱點。The high pressure discharge lamp 1 is because the gap 14 between the arc tube 2 and the outer tube 3 is very narrow, and the average is about 50 μm. Even if the axis of the arc tube 2 and the outer tube 3 are aligned, the size of the quartz glass is An error or the like also causes an area where the arc tube 2 is in contact with the outer tube 3. As shown in Fig. 3(a), the arc tube 2 is disposed at a lower side than the center of the outer tube 3, and the gap d between the lower side of the arc tube 2 and the outer tube 3 is higher than that of the upper side of the arc tube 2. The gap D with the outer tube 3 is smaller. Since the outer surface 12 of the lower side of the arc tube 2 is shorter than the tube 3 which is cooled by the cooling medium, the cooling effect is higher than the outer surface 12 of the upper side of the arc tube 2. Therefore, the inner surface 11 of the arc tube 2 at the contact portion 17 where the outer surface 12 of the arc tube 2 is in contact with the inner surface 13 of the outer tube 3 has a cooling effect. The highest is the coldest point in the discharge space 10. Conversely, the gap D between the outer surface 12 of the arc tube 2 and the inner surface 13 of the outer tube 3 becomes the inner surface 11 of the arc tube 2 at the largest portion, which has the lowest cooling effect and becomes the warmest in the discharge space 10. hot spot.
如第3圖(b)所示，在沿著高壓放電燈1之管軸方向切斷的斷面，於外管3的內表面13，以於軸向周期性地產生之方式來形成凸部15。具體而言，是在圓筒狀之外管3的內表面13，凸部15為螺旋狀之突起線條所形成。凸部15的高度h為10~200μm，與鄰接之凸部15之間隔P為0.1~2mm。由於在外管3的內表面13形成有凸部15，所以若把接觸部分17放大來看時，於凸部15，雖然發光管2的外表面12與外管3的內表面13為接觸，不過在凸部15以外的部分中，於發光管2的外表面12與外管3的內表面13之間產生間隙，而存在有空氣層16。即使在發光管2的外表面12與外管3的內表面13之間的間隙d成為最小的接觸部分17中，發光管2的外表面12與外管3的內表面13也並非緊密貼接地成為面接觸，發光管2的外表面12與外管3的內表面13在凸部15是成為相接觸的線接觸或是點接觸，而存在有接觸處與空氣層16部分。As shown in Fig. 3(b), the cross section cut along the tube axis direction of the high pressure discharge lamp 1 is formed on the inner surface 13 of the outer tube 3 so as to be periodically generated in the axial direction. 15. Specifically, it is formed on the inner surface 13 of the tube 3 other than the cylindrical shape, and the convex portion 15 is formed by a spiral protrusion line. The height h of the convex portion 15 is 10 to 200 μm, and the distance P from the adjacent convex portion 15 is 0.1 to 2 mm. Since the convex portion 15 is formed on the inner surface 13 of the outer tube 3, when the contact portion 17 is enlarged, the outer surface 12 of the arc tube 2 is in contact with the inner surface 13 of the outer tube 3 at the convex portion 15, but In a portion other than the convex portion 15, a gap is formed between the outer surface 12 of the arc tube 2 and the inner surface 13 of the outer tube 3, and the air layer 16 is present. Even in the contact portion 17 where the gap d between the outer surface 12 of the arc tube 2 and the inner surface 13 of the outer tube 3 becomes the smallest, the outer surface 12 of the arc tube 2 and the inner surface 13 of the outer tube 3 are not closely attached to each other. In the surface contact, the outer surface 12 of the arc tube 2 and the inner surface 13 of the outer tube 3 are in line contact or point contact in contact with the convex portion 15, and there is a portion of the contact portion and the air layer 16.
如第3圖(a)所示，上側之發光管2之外表面12與外管3之內表面13之間的間隙D，由於是對向於發光管2之外表面12與外管3之內表面13的接觸部分17，故為最大。不過，接觸部分17之發光管2的外表面12與外管3 的內表面13之間的間隔具有凸部15之高度h左右，所以間隙14為最大部分之發光管2的外表面12與外管3的內表面13之間的間隙D，也要從外管3的內徑R與發光管2的外徑r之差，減去凸部15之高度h後之值而成為((R－r)－h)。As shown in Fig. 3(a), the gap D between the outer surface 12 of the upper side of the arc tube 2 and the inner surface 13 of the outer tube 3 is opposite to the outer surface 12 of the arc tube 2 and the outer tube 3. The contact portion 17 of the inner surface 13 is therefore the largest. However, the outer surface 12 of the arc tube 2 of the contact portion 17 and the outer tube 3 The spacing between the inner surfaces 13 has a height h of the convex portion 15, so that the gap 14 is the largest portion of the gap D between the outer surface 12 of the arc tube 2 and the inner surface 13 of the outer tube 3, also from the outer tube The difference between the inner diameter R of the third electrode and the outer diameter r of the arc tube 2 is obtained by subtracting the height h of the convex portion 15 to become ((R - r) - h).
如此地，在發光管2之外表面12與外管3之內表面13之間的間隙d成為最小的接觸部分17，由於間隙d具有凸部15之高度h左右，故在發光管2之外表面12與外管2之內表面13之間的間隙D為最大的部分，相較於在外管3之內表面13沒有形成凸部15之情形，間隙D可以減小一凸部15之高度h的量。Thus, the gap d between the outer surface 12 of the arc tube 2 and the inner surface 13 of the outer tube 3 becomes the smallest contact portion 17, and since the gap d has the height h of the convex portion 15, it is outside the arc tube 2 The gap D between the surface 12 and the inner surface 13 of the outer tube 2 is the largest portion, and the gap D can reduce the height h of the convex portion 15 as compared with the case where the convex portion 15 is not formed on the inner surface 13 of the outer tube 3. The amount.
於成為位在放電空間10內之最冷點之間隙14為最小的接觸部分17，由於發光管2的外表面12與外管3的內表面13在凸部15之接觸成為線接觸或是點接觸，故與外管3之間存在空氣層16，增大由冷卻媒體所冷卻之與外管3的距離，所以使得最冷點的溫度提升。又，由於凸部15在圓筒狀之外管3的內表面13以成為螺旋狀之突起線條之方式形成，因此即使在外管3之內表面13的任一處形成接觸部分17，也必然存在空氣層16，使發光管2的外表面12與外管3的內表面13不會緊密接觸。另一方面，成為位在放電空間10內之最溫熱點之間隙14為最大的部分D，與外管3的間距雖稍微有縮小，但由於與外管3之間存在有由間隙14所形成的空氣的層，故最溫熱點的溫度無關於凸部15之有無，幾乎沒有變動。因此，藉由在 外管3的內表面13形成凸部15，可以縮小最冷點與最溫熱點的溫度差。The contact portion 17 which is the smallest gap 14 which is the coldest point in the discharge space 10 is the line contact or the point due to the contact of the outer surface 12 of the arc tube 2 with the inner surface 13 of the outer tube 3 at the convex portion 15 Contact, so there is an air layer 16 between the outer tube 3 and the distance from the outer tube 3 cooled by the cooling medium, so that the temperature of the coldest point is raised. Further, since the convex portion 15 is formed in a cylindrical shape, the inner surface 13 of the tube 3 is formed as a spiral projection line, so even if the contact portion 17 is formed at any one of the inner surfaces 13 of the outer tube 3, it is inevitably present. The air layer 16 is such that the outer surface 12 of the arc tube 2 does not come into intimate contact with the inner surface 13 of the outer tube 3. On the other hand, the portion 14 which is the maximum temperature of the hot spot in the discharge space 10 is the largest portion D, and the distance from the outer tube 3 is slightly reduced, but there is a gap 14 formed between the outer tube 3 and the outer tube 3. The layer of air, so the temperature of the hottest hot spot has nothing to do with the presence or absence of the convex portion 15, and there is almost no change. Therefore, by The inner surface 13 of the outer tube 3 forms a convex portion 15, which can reduce the temperature difference between the coldest spot and the hottest hot spot.
由於藉由於外管3的內表面13形成凸部15，可以提升位於放電空間10內之最冷點的溫度，因此即使降低待機電力也能夠維持較高之發光管2之內表面11的溫度，所以可以抑制發光管2內所封入之水銀之未蒸發狀態的產生。因此，可以實現能夠一面降低待機模式的待機電力，同時於處理模式時，可以在短時間起動，且不會中斷地進行高輸出亮燈之高壓放電燈1。Since the convex portion 15 is formed by the inner surface 13 of the outer tube 3, the temperature at the coldest point in the discharge space 10 can be raised, so that the temperature of the inner surface 11 of the light-emitting tube 2 can be maintained high even if the standby power is lowered. Therefore, it is possible to suppress the occurrence of the unvaporized state of the mercury enclosed in the arc tube 2. Therefore, it is possible to realize the high-pressure discharge lamp 1 capable of lowering the standby mode while maintaining the standby power in the standby mode and starting the operation in a short time without interrupting the high-output lighting.
第4圖，是用以說明製作本發明之高壓放電燈之方法的說明圖。Fig. 4 is an explanatory view for explaining a method of producing the high pressure discharge lamp of the present invention.
該高壓放電燈1，可以以如次之方式來作製。The high pressure discharge lamp 1 can be manufactured in the following manner.
首先，於金屬箔5的兩端，將桿狀的電極4與外部導線6做電氣性連接，作成2個電極4構造體。於圓筒狀之石英玻璃管的內部，封入適當量的水銀等，並且將電極構造體從石英玻璃管的兩側***，利用收縮密封法將石英玻璃管的兩端部予以封止。如此地實施，作成於內部具備有封入物及電極4的發光管2。First, the rod-shaped electrode 4 and the external lead 6 are electrically connected to both ends of the metal foil 5 to form two electrode 4 structures. Inside the cylindrical quartz glass tube, an appropriate amount of mercury or the like is sealed, and the electrode structure is inserted from both sides of the quartz glass tube, and both ends of the quartz glass tube are sealed by a shrink seal method. In this way, the light-emitting tube 2 having the enclosed object and the electrode 4 therein is formed.
如第4圖(a)所示地，於發光管2的外表面12將直徑80μm的碳線30以2mm間隔捲繞成螺旋狀。考量圖示方便，在圖面上是將於碳線30放大來繪圖。另一方面，準備具有比發光管2的外徑尺寸還要大之內徑尺寸的圓筒狀石英玻璃管31，僅將單方封止。將捲繞有碳線30之發光管2置入於石英玻璃管31之中，將石英玻璃管31的內 部予以減壓並旋轉。以氫氧噴燈掃掠於軸方向，從石英玻璃管31的外側進行加熱，將石英玻璃管31燒縮而形成外管3。此時，外管3，燒縮到使其與發光管2之間隙14比碳線30還窄小為止。As shown in Fig. 4(a), carbon wires 30 having a diameter of 80 μm were wound into a spiral shape at intervals of 2 mm on the outer surface 12 of the arc tube 2. It is convenient to consider the illustration. On the drawing, the carbon line 30 will be enlarged to draw. On the other hand, a cylindrical quartz glass tube 31 having an inner diameter larger than the outer diameter of the arc tube 2 is prepared, and only one of them is sealed. The arc tube 2 around which the carbon wire 30 is wound is placed in the quartz glass tube 31, and the inside of the quartz glass tube 31 is placed The part is decompressed and rotated. The oxyhydrogen torch is swept in the axial direction, heated from the outside of the quartz glass tube 31, and the quartz glass tube 31 is collapsed to form the outer tube 3. At this time, the outer tube 3 is shrunk until the gap 14 between the outer tube 3 and the arc tube 2 is narrower than the carbon line 30.
如第4圖(b)所示地，將外管3充分地燒縮之後，切斷外管3的兩端，製成兩端開口的圓筒管形狀。然後，將高壓放電燈1置於大氣壓環境下之1000℃的電氣爐中加熱3小時。藉由此加熱來燒掉碳線30。存在於外管3與發光管2之間隙14的碳線30消失，形成由設在外管3之內表面13的螺旋狀之突起線條所構成的凸部15。如圖示般地在沿著高壓放電燈1之管軸所切斷的斷面上，在外管3的內表面13於管軸方向周期性地形成有複數個凸部15。由螺旋狀之突起線條所形成的凸部15，是可以藉由如此地捲繞上碳線30後進行加工而容易地形成。又，如上述般地將石英玻璃管31燒縮形成外管3時，由於碳線30亦充當間隔物之作用，所以可以將外管3與發光管2之間隔以大致一定之形態來進行控制。因此，不會產生發光管2與外管3緊密接著的區域，可以消除冷卻的偏頗不均，也可以抑制高壓放電燈1的變異不均一。As shown in Fig. 4(b), after the outer tube 3 is sufficiently shrunk, both ends of the outer tube 3 are cut to form a cylindrical tube shape having both ends open. Then, the high pressure discharge lamp 1 was placed in an electric furnace at 1000 ° C under an atmospheric pressure atmosphere for 3 hours. The carbon wire 30 is burned by this heating. The carbon wire 30 existing in the gap 14 between the outer tube 3 and the arc tube 2 disappears, and a convex portion 15 composed of a spiral projection line provided on the inner surface 13 of the outer tube 3 is formed. As shown in the figure, a plurality of convex portions 15 are periodically formed on the inner surface 13 of the outer tube 3 in the tube axis direction on the section cut along the tube axis of the high pressure discharge lamp 1. The convex portion 15 formed by the spiral projection line can be easily formed by winding the carbon wire 30 in this manner and then processing it. Further, when the quartz glass tube 31 is collapsed to form the outer tube 3 as described above, since the carbon wire 30 also functions as a spacer, the interval between the outer tube 3 and the arc tube 2 can be controlled in a substantially constant manner. . Therefore, the region where the arc tube 2 and the outer tube 3 are closely adjacent is not generated, the unevenness of the cooling can be eliminated, and the variation of the variation of the high pressure discharge lamp 1 can be suppressed.
接著，說明本發明之第2實施形態。第5圖，是顯示在本發明之高壓放電燈1的中央部，將高壓放電燈1垂直於管軸地予以切斷時之發光管2的外表面12與外管3的外表面12之接觸部分17的部分放大斷面圖。Next, a second embodiment of the present invention will be described. Fig. 5 is a view showing the contact between the outer surface 12 of the arc tube 2 and the outer surface 12 of the outer tube 3 when the high pressure discharge lamp 1 is cut perpendicularly to the tube axis in the central portion of the high pressure discharge lamp 1 of the present invention. A partially enlarged cross-sectional view of portion 17.
第2實施形態之高壓放電燈1，除了外管3的內表面 13為平滑的面，發光管2的外表面12為斷面多角形狀之外，是具有與第1實施形態之高壓放電燈1同樣之構成者。以下對於第2實施形態，省略與第1實施形態之高壓放電燈1相同之構成構件之說明。The high pressure discharge lamp 1 of the second embodiment except the inner surface of the outer tube 3 13 is a smooth surface, and the outer surface 12 of the arc tube 2 has a polygonal cross section, and has the same configuration as that of the high pressure discharge lamp 1 of the first embodiment. In the second embodiment, the description of the constituent members similar to those of the high pressure discharge lamp 1 of the first embodiment will be omitted.
如第5圖所示，發光管2的外表面12，在垂直於高壓放電燈1之管軸方向所切斷的斷面中，發光管2的外周是形成為斷面多角形狀，以使其頂部形成為凸部18。具體而言，是使圓筒狀之發光管2的外表面12，以成為於軸向較長之斷面多角形狀之方式而形成。具有10~60個角之多角形，凸部18之高度h為10~200μm，相鄰接之凸部18的間隔P為0.5~2mm。成為凸部18的部分，其發光管2的厚度為最大，發光管2的外表面12與外管3的內表面13是接觸著。在凸部16以外的部分，發光管2的厚度為較薄，並於發光管2的外表面12與外管3的內表面13之間形成有空氣層16。As shown in Fig. 5, in the cross section of the outer surface 12 of the arc tube 2 which is cut perpendicular to the tube axis direction of the high pressure discharge lamp 1, the outer circumference of the arc tube 2 is formed into a polygonal cross section so that The top portion is formed as a convex portion 18. Specifically, the outer surface 12 of the cylindrical arc tube 2 is formed so as to have a polygonal cross section having a long axial length. The polygon has a polygonal shape of 10 to 60 corners, and the height h of the convex portion 18 is 10 to 200 μm, and the interval P between the adjacent convex portions 18 is 0.5 to 2 mm. As a portion of the convex portion 18, the thickness of the arc tube 2 is the largest, and the outer surface 12 of the arc tube 2 is in contact with the inner surface 13 of the outer tube 3. In a portion other than the convex portion 16, the thickness of the arc tube 2 is thin, and an air layer 16 is formed between the outer surface 12 of the arc tube 2 and the inner surface 13 of the outer tube 3.
發光管2的外表面12與外管3的內表面13相接觸的凸部18，離由冷卻媒體所冷卻之外管3的距離較短，發光管2是由外管3所直接冷卻。位於凸部18之發光管2的內表面11，冷卻效果最高。另一方面，凸部18的鄰接部分20，於發光管2的外表面12與外管3的內表面13之間形成有空氣層16，離由冷卻媒體所冷卻之外管3之距離較遠。由於發光管2是由空氣層16所間接冷卻，發光管2之內表面11的冷卻效果較弱。因此，位於鄰接部分20之發光管2的內表面11的溫度，是不會下降到如凸部18的 內表面13一般。The convex portion 18 of the outer surface 12 of the arc tube 2 in contact with the inner surface 13 of the outer tube 3 is shortly spaced from the tube 3 cooled by the cooling medium, and the arc tube 2 is directly cooled by the outer tube 3. The inner surface 11 of the arc tube 2 located on the convex portion 18 has the highest cooling effect. On the other hand, the abutting portion 20 of the convex portion 18 forms an air layer 16 between the outer surface 12 of the arc tube 2 and the inner surface 13 of the outer tube 3, which is far away from the tube 3 cooled by the cooling medium. . Since the arc tube 2 is indirectly cooled by the air layer 16, the cooling effect of the inner surface 11 of the arc tube 2 is weak. Therefore, the temperature of the inner surface 11 of the arc tube 2 located in the abutting portion 20 does not fall to the convex portion 18 as it is. The inner surface 13 is generally.
又，由於凸部18是藉由將發光管2的外周作成斷面多角形狀所形成，故即使外管3之內表面13的任一處存在有接觸部分17，也必然存在空氣層16，使發光管2的外表面12與外管3的內表面13不會緊密接觸。Further, since the convex portion 18 is formed by forming the outer circumference of the arc tube 2 into a polygonal cross section, even if the contact portion 17 exists at any one of the inner surfaces 13 of the outer tube 3, the air layer 16 is inevitably present. The outer surface 12 of the arc tube 2 does not come into intimate contact with the inner surface 13 of the outer tube 3.
即使於接觸部分17，發光管2的外表面12與外管3的內表面13為緊密接觸但並非是面接觸，發光管2的外表面12與外管3的內表面13在凸部18是成為相接觸的線接觸或是點接觸，而存在有接觸處與空氣層16部分。位於具有空氣層16之鄰接部分20的發光管2之內表面11的溫度，由於比位於凸部18之發光管2之內表面11的溫度還要高，因此可以溫熱位於凸部18之發光管2的內表面11，提高接觸部分17之為整體之發光管2的內表面11的溫度。因此，相較於在發光管2的外表面12沒有形成凸部18之情形，可以提升位於放電空間10內之成為最冷點之位於接觸部分17之發光管2的內表面11的溫度。Even in the contact portion 17, the outer surface 12 of the arc tube 2 is in close contact with the inner surface 13 of the outer tube 3 but is not in surface contact, and the outer surface 12 of the arc tube 2 and the inner surface 13 of the outer tube 3 are at the convex portion 18 There is a line contact or a point contact that is in contact with the contact and the air layer 16 portion. The temperature of the inner surface 11 of the arc tube 2 located at the abutting portion 20 of the air layer 16 is higher than the temperature of the inner surface 11 of the arc tube 2 located at the convex portion 18, so that the light at the convex portion 18 can be warmed. The inner surface 11 of the tube 2 increases the temperature of the inner surface 11 of the arc tube 2 which is integral with the contact portion 17. Therefore, the temperature of the inner surface 11 of the arc tube 2 located at the contact portion 17 which is the coldest point in the discharge space 10 can be raised as compared with the case where the convex portion 18 is not formed on the outer surface 12 of the arc tube 2.
由於藉由在發光管2的外表面12形成凸部18，可以提升位於放電空間10內之最冷點的溫度，因此即使降低待機電力也能夠維持較高之發光管2之內表面11的溫度，所以可以抑制發光管2內所封入之水銀之未蒸發狀態的產生。因此，可以實現能夠一面降低待機模式的待機電力，同時於處理模式時，可以在短時間起動，且不會中斷地進行高輸出亮燈之高壓放電燈1。Since the convex portion 18 is formed on the outer surface 12 of the arc tube 2, the temperature at the coldest point in the discharge space 10 can be raised, so that the temperature of the inner surface 11 of the arc tube 2 can be maintained high even if the standby power is lowered. Therefore, it is possible to suppress the occurrence of the unvaporized state of the mercury enclosed in the arc tube 2. Therefore, it is possible to realize the high-pressure discharge lamp 1 capable of lowering the standby mode while maintaining the standby power in the standby mode and starting the operation in a short time without interrupting the high-output lighting.
接著，說明關於實施例。Next, the embodiment will be described.
製作使用於第1實施形態所示之高壓放電燈的高壓放電燈裝置，來作為實驗對象。作為實驗對象所使用的高壓放電燈之規格如以下所示。A high pressure discharge lamp device used in the high pressure discharge lamp shown in the first embodiment was produced and used as an experimental object. The specifications of the high pressure discharge lamp used as an experimental object are as follows.
發光管：石英玻璃製，中央部的內徑為8mm，中央部的外徑為12mm，封止部的外徑：6mm，發光長度是100mm。Light-emitting tube: made of quartz glass, the inner diameter of the central part is 8mm, the outer diameter of the central part is 12mm, outer diameter of the sealing part: 6mm, the length of the illumination is 100mm.
外管：石英玻璃製，內徑為12.1mm，外徑為14.1mm。Outer tube: made of quartz glass, inner diameter is 12.1mm, outer diameter is 14.1mm.
凸部：高度為50μm，管軸方向之間隔為2mm。Convex: The height is 50 μm, and the interval between the tube axes is 2 mm.
電極：鎢製，電極間距離為100mm，位於放電空間10內之電極部分的長度為3mm。Electrode: made of tungsten, the distance between the electrodes was 100 mm, and the length of the electrode portion located in the discharge space 10 was 3 mm.
封入物：水銀7.5mg/cc，氬氣100Torr。Enclosure: mercury 7.5 mg / cc, argon gas 100 Torr.
又，凸部是於發光管的外表面，將直徑80μm之碳線以2mm間隔捲繞成線圈狀，並藉由上述的方法所形成。Further, the convex portion was formed on the outer surface of the arc tube, and a carbon wire having a diameter of 80 μm was wound into a coil shape at intervals of 2 mm, and was formed by the above method.
在處理模式下亮燈30秒鐘，接著在待機模式下亮燈30秒鐘，以使處理模式與待機模式為交互之方式進行了亮燈。於處理模式時，高壓放電燈之輸入電力為3000W(300W/cm)之方式進行亮燈。於待機模式時，高壓放電燈之輸入電力為2000W(200W/cm〉之方式進行亮燈。It lights up in the processing mode for 30 seconds, then lights up in the standby mode for 30 seconds to illuminate the processing mode in interaction with the standby mode. In the processing mode, the input power of the high pressure discharge lamp is 3000W (300W/cm) to illuminate. In the standby mode, the input power of the high-pressure discharge lamp is illuminated in the manner of 2000 W (200 W/cm>.
於冷卻套管，作為冷卻媒體，是使水以5L/min之流量進行循環。In the cooling jacket, as a cooling medium, water is circulated at a flow rate of 5 L/min.
又，作為比較對象，除了於外管的內表面形成有凸部 之外，製作了與實驗對象相同樣之規格的高壓放電燈1。Further, as a comparison object, a convex portion is formed on the inner surface of the outer tube In addition, a high pressure discharge lamp 1 having the same specifications as the experimental object was produced.
於外管的內表面形成有凸部之實驗對象的高壓放電燈，位於發光管之內表面的溫度，在處理模式時，在接觸部分為700℃，在間隙最大部分為1000℃。又，在待機模式時，在接觸部分為540℃，在間隙最大部分為800℃。The high-pressure discharge lamp of the experimental object in which the convex portion is formed on the inner surface of the outer tube, the temperature at the inner surface of the arc tube is 700 ° C in the contact portion and 1000 ° C in the maximum portion in the processing mode. Further, in the standby mode, the contact portion is 540 ° C, and the maximum portion of the gap is 800 ° C.
於外管的內表面沒有形成凸部之比較對象的高壓放電燈，位於發光管之內表面的溫度，在處理模式時，在接觸部分為550℃，在間隙最大部分為1000℃。又，在待機模式時，在接觸部分為430℃，在間隙最大部分為800℃。The high pressure discharge lamp of the comparison object in which the convex portion is not formed on the inner surface of the outer tube, the temperature at the inner surface of the arc tube is 550 ° C in the contact portion and 1000 ° C in the maximum portion in the processing mode. Further, in the standby mode, the contact portion is 430 ° C, and the maximum portion of the gap is 800 ° C.
於外管的內表面形成有凸部之實驗對象的高壓放電燈，成為最冷點之接觸部分的溫度，相較於比較對象的高壓放電燈，在處理模式時要高出150℃，於待機模式時要高出110℃。The high-pressure discharge lamp of the experimental object in which the convex portion is formed on the inner surface of the outer tube has a temperature at which the contact portion of the coldest point is higher than the high-pressure discharge lamp of the comparison object, which is 150 ° C higher in the processing mode. The mode is 110 °C higher.
當放電空間內的溫度為400℃以下時，會發生所封入的水銀未蒸發，並產生從待機模式移轉至處理模式時之啟動時間的遲延、或是無法維持放電而放電中斷。依本實驗結果，得知於外管的內表面形成有凸部之實驗對象的高壓放電燈，高壓放電燈於亮燈中，在放電容器內之溫度為最低的待機模式時之接觸部分的溫度為540℃，比最冷點溫度400℃還要高140℃。由此，可以預測到於外管的內表面形成有凸部之實驗對象的高壓放電燈，即使將待機模式的輸入電力減少到小於200W/cm，在更降低待機模式時之接觸部分的溫度的條件下進行亮燈，也不會產生水銀的未蒸發部分。When the temperature in the discharge space is 400 ° C or less, the sealed mercury does not evaporate, and a delay in the startup time when shifting from the standby mode to the processing mode occurs, or the discharge cannot be maintained and the discharge is interrupted. According to the results of the experiment, it is known that the high pressure discharge lamp of the experimental object having the convex portion formed on the inner surface of the outer tube, the temperature of the contact portion when the high pressure discharge lamp is in the lighting state, and the temperature in the discharge vessel is the lowest standby mode. It is 540 ° C, 140 ° C higher than the coldest point temperature of 400 ° C. Thereby, it is possible to predict that the high pressure discharge lamp of the subject to which the convex portion is formed on the inner surface of the outer tube can reduce the temperature of the contact portion at the time of lowering the standby mode even if the input power in the standby mode is reduced to less than 200 W/cm. Lighting under conditions does not produce unvaporized portions of mercury.
由實驗例1之實驗結果所預測，將於外管的內表面形成有凸部之實驗對象的高壓放電燈，減少待機模式的輸入電力來進行亮燈。作為實驗對象所使用的高壓放電燈之規格，係與實驗例1相同。又，高壓放電燈裝置的冷卻條件亦與實驗例1相同。還有，高壓放電燈的亮燈條件，設定如下。As predicted from the experimental results of Experimental Example 1, a high-pressure discharge lamp of an experimental object in which a convex portion was formed on the inner surface of the outer tube was used, and the input power in the standby mode was reduced to perform lighting. The specifications of the high pressure discharge lamp used as the experimental object were the same as in Experimental Example 1. Further, the cooling conditions of the high pressure discharge lamp device were also the same as in Experimental Example 1. Also, the lighting conditions of the high pressure discharge lamp are set as follows.
在處理模式下亮燈30秒鐘，接著在待機模式下亮燈30秒鐘，以使處理模式與待機模式為交互之方式進行了亮燈。於處理模式時，高壓放電燈之輸入電力為3000W(300W/cm)之方式進行亮燈。於待機模式時，高壓放電燈之輸入電力為1500W(150W/cm)之方式進行亮燈。It lights up in the processing mode for 30 seconds, then lights up in the standby mode for 30 seconds to illuminate the processing mode in interaction with the standby mode. In the processing mode, the input power of the high pressure discharge lamp is 3000W (300W/cm) to illuminate. In the standby mode, the input power of the high-pressure discharge lamp is 1500W (150W/cm) to illuminate.
亦即，除了降低待機模式的輸入電力之外，高壓放電燈的亮燈條件，是設成與實驗例1相同。That is, the lighting conditions of the high pressure discharge lamp were set to be the same as in Experimental Example 1 except that the input power of the standby mode was lowered.
於外管的內表面形成有凸部之實驗對象的高壓放電燈，即使將待機模式的輸入電力設為150W/cm，也沒有產生水銀的未蒸發部分。由於沒有產生水銀的未蒸發部分，所以從待機模式移轉到處理模式，也依然能夠維持較短的起動時間。又，於處理模式時，無關於待機模式的輸入電力值，可以以高輸入電力進行高輸出亮燈。A high-pressure discharge lamp of an experimental object in which a convex portion was formed on the inner surface of the outer tube did not generate an unvaporized portion of mercury even when the input power in the standby mode was 150 W/cm. Since no unvaporized portion of mercury is generated, moving from the standby mode to the processing mode can still maintain a short starting time. Further, in the processing mode, regardless of the input power value of the standby mode, high output lighting can be performed with high input power.
因此，由於即使降低待機模式的待機電力，也沒有產生水銀的未蒸發部分，所以確定了可以實現在短時間從待機模式到處理模式之起動，於處理模式時可以進行不中斷的高輸出亮燈的高壓放電燈。Therefore, since the unvaporized portion of the mercury is not generated even if the standby power of the standby mode is lowered, it is determined that the startup from the standby mode to the processing mode can be realized in a short time, and the high output lighting can be performed without interruption in the processing mode. High pressure discharge lamp.
依據實驗例1的結果，對於在外管的內表面沒有形成凸部的高壓放電燈，當將輸入電力設為200W/cm時，成為放電空間內之最冷點的接觸部分之發光管的內表面溫度為430℃。若輸入電力值更小於此值時，就會降低放電空間內的最冷點溫度而產生水銀的未蒸發。亦即，對於在外管的內表面沒有形成凸部的高壓放電燈，於待機模式時之輸入電力的最低值為200W/cm。According to the results of Experimental Example 1, for the high pressure discharge lamp in which the convex portion was not formed on the inner surface of the outer tube, when the input electric power was set to 200 W/cm, the inner surface of the arc tube which became the contact portion of the coldest point in the discharge space was obtained. The temperature is 430 °C. If the input power value is smaller than this value, the coldest spot temperature in the discharge space is lowered to cause mercury to not evaporate. That is, for a high pressure discharge lamp in which no convex portion is formed on the inner surface of the outer tube, the minimum value of the input power in the standby mode is 200 W/cm.
另一方面，由實驗例2之結果，於外管的內表面形成有凸部之實驗對象的高壓放電燈，係確定了可將待機模式的輸入電力設為150W/cm。由此可得知，相較於沒有形成凸部之先行技術下的高壓放電燈，可以將待機模式的輸入電力減低至75%。On the other hand, as a result of Experimental Example 2, the high-pressure discharge lamp of the subject to which the convex portion was formed on the inner surface of the outer tube was determined to be 150 W/cm in the standby mode. From this, it can be seen that the input power of the standby mode can be reduced to 75% compared to the high-pressure discharge lamp of the prior art in which the convex portion is not formed.
1‧‧‧高壓放電燈1‧‧‧High pressure discharge lamp
2‧‧‧發光管2‧‧‧Light tube
3‧‧‧外管3‧‧‧External management
4‧‧‧電極4‧‧‧Electrode
11‧‧‧發光管的內表面11‧‧‧ inner surface of the tube
12‧‧‧發光管的外表面12‧‧‧ Exterior surface of the tube
13‧‧‧外管的內表面13‧‧‧The inner surface of the outer tube
14‧‧‧間隙14‧‧‧ gap
15‧‧‧凸部15‧‧‧ convex
16‧‧‧空氣層16‧‧‧ air layer
17‧‧‧接觸部分17‧‧‧Contact section
21‧‧‧冷卻套管21‧‧‧ Cooling casing
D‧‧‧最大間隙D‧‧‧Maximum clearance
d‧‧‧最小間隙d‧‧‧Minimum clearance
h‧‧‧凸部的高度H‧‧‧ Height of the convex part
P‧‧‧凸部的間隔P‧‧‧The spacing of the convex parts
第1圖是顯示本發明之高壓放電燈裝置之構成的說明用斷面圖。Fig. 1 is a cross-sectional view for explaining the configuration of a high pressure discharge lamp device of the present invention.
第2圖是顯示本發明之高壓放電燈之構成的說明用斷面圖。Fig. 2 is a cross-sectional view showing the structure of the high pressure discharge lamp of the present invention.
第3圖是顯示本發明之高壓放電燈之中央部的放大斷面圖。Fig. 3 is an enlarged cross-sectional view showing the central portion of the high pressure discharge lamp of the present invention.
第4圖是用以說明本發明之高壓放電燈製作之方法的說明圖。Fig. 4 is an explanatory view for explaining a method of producing a high pressure discharge lamp of the present invention.
第5圖是顯示本發明之高壓放電燈之中央部的放大斷面圖。Fig. 5 is an enlarged sectional view showing the central portion of the high pressure discharge lamp of the present invention.
第6圖是顯示於以往之高壓放電燈裝置之構成概略的說明圖。Fig. 6 is an explanatory view showing a schematic configuration of a conventional high-pressure discharge lamp device.
第7圖是顯示使用高壓放電燈時之輸入電力的說明圖。Fig. 7 is an explanatory view showing input power when a high pressure discharge lamp is used.
1‧‧‧高壓放電燈1‧‧‧High pressure discharge lamp
2‧‧‧發光管2‧‧‧Light tube
3‧‧‧外管3‧‧‧External management
11‧‧‧發光管的內表面11‧‧‧ inner surface of the tube
12‧‧‧發光管的外表面12‧‧‧ Exterior surface of the tube
13‧‧‧外管的內表面13‧‧‧The inner surface of the outer tube
14‧‧‧間隙14‧‧‧ gap
15‧‧‧凸部15‧‧‧ convex
16‧‧‧空氣層16‧‧‧ air layer
17‧‧‧接觸部分17‧‧‧Contact section
D‧‧‧最大間隙D‧‧‧Maximum clearance
d‧‧‧最小間隙d‧‧‧Minimum clearance
h‧‧‧凸部的高度H‧‧‧ Height of the convex part
P‧‧‧凸部的間隔P‧‧‧The spacing of the convex parts
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| TW097131001A TWI383424B (en) | 2007-10-22 | 2008-08-14 | High pressure discharge lamp and high pressure discharge lamp device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5023959B2 (en) |
| KR (1) | KR101172934B1 (en) |
| CN (1) | CN101419895B (en) |
| TW (1) | TWI383424B (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009283226A (en) * | 2008-05-21 | 2009-12-03 | Harison Toshiba Lighting Corp | Metal halide lamp |
| JP2011065761A (en) * | 2009-09-15 | 2011-03-31 | Harison Toshiba Lighting Corp | Metal halide lamp |
| JP5056903B2 (en) * | 2010-06-03 | 2012-10-24 | ウシオ電機株式会社 | Ultra high pressure mercury lamp and method of manufacturing the ultra high pressure mercury lamp |
| TWI500068B (en) * | 2010-10-26 | 2015-09-11 | Ushio Electric Inc | Long arc discharge lamp, and light irradiation device |
| JP5691417B2 (en) * | 2010-11-11 | 2015-04-01 | ウシオ電機株式会社 | Lamp device |
| US20140015396A1 (en) * | 2011-03-24 | 2014-01-16 | Koninklijke Philips N.V. | Gas-discharge lamp |
| JP5736989B2 (en) * | 2011-06-15 | 2015-06-17 | ウシオ電機株式会社 | Light source device and lamp lighting method |
| JP6226178B2 (en) * | 2013-09-26 | 2017-11-08 | 岩崎電気株式会社 | Direct water-cooled UV lamp |
| CN112117181A (en) * | 2020-10-10 | 2020-12-22 | 罗璐 | Excimer lamp and beauty instrument |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000011953A (en) * | 1998-06-25 | 2000-01-14 | Nec Corp | Fluorescent lamp formed from multi-tube |
| JP2000340177A (en) * | 1999-05-28 | 2000-12-08 | Sanken Electric Co Ltd | Double tube type discharge tube |
| TWI239549B (en) * | 2002-03-29 | 2005-09-11 | Orc Mfg Co Ltd | Short are electric discharge lamp and light source equipment |
| TW200620381A (en) * | 2004-09-02 | 2006-06-16 | Koninkl Philips Electronics Nv | Lamp assembly comprising a high-pressure gas discharge lamp |
| TWI261858B (en) * | 2005-05-13 | 2006-09-11 | Glory Praise Photronics Corp | Cooling device of high intensity gas discharge lamp |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60182654A (en) * | 1984-02-29 | 1985-09-18 | Toshiba Electric Equip Corp | Light illumination device |
| JPS63162445U (en) * | 1987-04-13 | 1988-10-24 | ||
| DE4132530A1 (en) * | 1991-09-30 | 1993-04-01 | Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh | HIGH PRESSURE DISCHARGE LAMP WITH LOW POWER |
| DE69511987T2 (en) * | 1994-05-19 | 2000-03-16 | Koninkl Philips Electronics Nv | BASED HIGH PRESSURE DISCHARGE LAMP |
| JPH10275593A (en) * | 1996-11-05 | 1998-10-13 | Toshiba Lighting & Technol Corp | Multi-tube fluorescent lamp and lighting system |
| US7196473B2 (en) * | 2004-05-12 | 2007-03-27 | General Electric Company | Dielectric barrier discharge lamp |
-
2007
- 2007-10-22 JP JP2007273951A patent/JP5023959B2/en not_active Expired - Fee Related
-
2008
- 2008-08-14 TW TW097131001A patent/TWI383424B/en not_active IP Right Cessation
- 2008-08-28 KR KR1020080084546A patent/KR101172934B1/en active IP Right Grant
- 2008-10-22 CN CN2008101700640A patent/CN101419895B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000011953A (en) * | 1998-06-25 | 2000-01-14 | Nec Corp | Fluorescent lamp formed from multi-tube |
| JP2000340177A (en) * | 1999-05-28 | 2000-12-08 | Sanken Electric Co Ltd | Double tube type discharge tube |
| TWI239549B (en) * | 2002-03-29 | 2005-09-11 | Orc Mfg Co Ltd | Short are electric discharge lamp and light source equipment |
| TW200620381A (en) * | 2004-09-02 | 2006-06-16 | Koninkl Philips Electronics Nv | Lamp assembly comprising a high-pressure gas discharge lamp |
| TWI261858B (en) * | 2005-05-13 | 2006-09-11 | Glory Praise Photronics Corp | Cooling device of high intensity gas discharge lamp |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101419895B (en) | 2013-03-27 |
| JP5023959B2 (en) | 2012-09-12 |
| JP2009104839A (en) | 2009-05-14 |
| CN101419895A (en) | 2009-04-29 |
| TW200919528A (en) | 2009-05-01 |
| KR101172934B1 (en) | 2012-08-10 |
| KR20090040835A (en) | 2009-04-27 |
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| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |