TWI380866B - Driving system for driving piezoelectric actuator and control method thereof - Google Patents
Driving system for driving piezoelectric actuator and control method thereof Download PDFInfo
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本發明是有關於一種壓電致動器驅動系統與其控制方法，特別是有關於一種可自動追隨負載諧振頻率之變化的壓電致動器驅動系統與其控制方法。The present invention relates to a piezoelectric actuator driving system and a control method thereof, and more particularly to a piezoelectric actuator driving system capable of automatically following a change in a resonant frequency of a load and a control method thereof.
隨著科技的進步與經濟的發展，人們對於熔接技術的要求越來越高，因此許多新穎的熔接技術陸續被開發出來，以滿足人類的需求。其中超音波熔接技術具有快速、穩定、低污染之特點，因此特別受到矚目。With the advancement of technology and the development of the economy, people are increasingly demanding welding technology, so many new welding technologies have been developed to meet the needs of human beings. Among them, ultrasonic welding technology has the characteristics of fast, stable and low pollution, so it is particularly eye-catching.
超音波熔接技術係利用壓電致動器發出高速震動之音波來高速振動工作物，使工作物因摩擦而產生超過熔點之高溫，而進行熔接之技術。超音波熔接機台通常包含有壓電致動器驅動系統和壓電致動器。壓電致動器包含有壓電材料，此壓電材料係用以接收壓電致動器驅動系統所提供之電能並將其轉換成機械能來發送超音波振動工作物。然而，在熔接的過程中，壓電材料的諧振頻率值可能隨電能、力學及熱效應而產生非線性的瞬間變化。當壓電材料之諧振頻率點漂移時，若不及時修正壓電材料之工作頻率值點，則可能會有大電流流過壓電致動器並發生高熱現象，導致壓電材料迅速燒毀，並造成系統嚴重破壞。Ultrasonic welding technology is a technique in which a piezoelectric actuator is used to emit a high-speed vibration sound wave to vibrate a workpiece at a high speed, and the workpiece is subjected to a high temperature exceeding a melting point due to friction. Ultrasonic fusion splicing machines typically include a piezoelectric actuator drive system and a piezoelectric actuator. The piezoelectric actuator includes a piezoelectric material for receiving electrical energy supplied by the piezoelectric actuator drive system and converting it into mechanical energy to transmit the ultrasonic vibrational work. However, during the fusion process, the resonant frequency value of the piezoelectric material may produce a nonlinear transient change with electrical, mechanical, and thermal effects. When the resonance frequency of the piezoelectric material drifts, if the operating frequency value of the piezoelectric material is not corrected in time, a large current may flow through the piezoelectric actuator and a high thermal phenomenon may occur, causing the piezoelectric material to burn rapidly, and Caused serious damage to the system.
因此，需要一種新的壓電致動器驅動系統與其控制方法來使壓電材料的工作頻率值追隨諧振頻率的變化來變化。Therefore, there is a need for a new piezoelectric actuator drive system and its control method to vary the operating frequency value of the piezoelectric material following changes in the resonant frequency.
因此，本發明之一態樣是在提供一種壓電致動器驅動系統與其控制方法。Accordingly, an aspect of the present invention is to provide a piezoelectric actuator drive system and a control method therefor.
根據本發明之一實施例，此壓電致動器驅動系統包含：換流器、電流偵測裝置和控制器。換流器係用以提供工作電壓至壓電致動器，以使工作電流流過壓電致動器，其中工作電壓具有工作頻率值，而工作電流值係隨著壓電致動器之溫度變化而變化。電流偵測裝置係用以偵測壓電致動器之工作電流值。控制器係用以判斷工作電流之值是否位於電流值容許範圍內，其中當工作電流之值位於電流值容許範圍外時，將錯誤次數紀錄值增加，並根據工作頻率值和錯誤次數紀錄值來計算出更新頻率值，再根據更新頻率值來控制換流器，以將工作電壓之工作頻率值變更為更新頻率值，以改變工作電流之電流值。According to an embodiment of the invention, the piezoelectric actuator drive system includes: an inverter, a current detecting device, and a controller. The inverter is configured to provide an operating voltage to the piezoelectric actuator to cause an operating current to flow through the piezoelectric actuator, wherein the operating voltage has an operating frequency value and the operating current value is related to the temperature of the piezoelectric actuator Change and change. The current detecting device is configured to detect the operating current value of the piezoelectric actuator. The controller is configured to determine whether the value of the operating current is within the allowable range of the current value, wherein when the value of the operating current is outside the allowable range of the current value, the recorded value of the number of errors is increased, and the value is recorded according to the operating frequency value and the number of errors. The update frequency value is calculated, and the inverter is controlled according to the update frequency value to change the operating frequency value of the working voltage to the update frequency value to change the current value of the working current.
根據本發明之一實施例，在此壓電致動器驅動系統之控制方法中，首先利用換流器來輸出工作電壓至壓電致動器，以使工作電流流過壓電致動器，其中工作電壓具有工作頻率值，而工作電流之值係隨著壓電致動器之溫度變化而變化。然後，偵測壓電致動器之工作電流值。接著，判斷工作電流值是否位於電流值容許範圍內。當工作電流值位於電流值容許範圍外時，將錯誤次數紀錄值增加。然後，根據工作頻率值和錯誤次數紀錄值來計算出更新頻率值。接著，根據更新頻率值來控制換流器，以將工作電壓之工作頻率值變更為更新頻率值，來改變工作電流之電流值。According to an embodiment of the present invention, in the control method of the piezoelectric actuator driving system, first, an inverter is used to output an operating voltage to the piezoelectric actuator to flow an operating current through the piezoelectric actuator. The operating voltage has an operating frequency value, and the value of the operating current varies with the temperature of the piezoelectric actuator. Then, the operating current value of the piezoelectric actuator is detected. Next, it is judged whether or not the operating current value is within the allowable range of the current value. When the operating current value is outside the allowable range of the current value, the error count value is increased. Then, the update frequency value is calculated based on the operating frequency value and the error count value. Next, the inverter is controlled according to the update frequency value to change the operating frequency value of the operating voltage to the updated frequency value to change the current value of the operating current.
請參照第1圖，其係繪示根據本發明之一實施例之壓電致動器驅動系統100的功能方塊示意圖。壓電致動器驅動系統100包含直流電源供應器110、換流器120、電流偵測裝置130、負載140以及控制器150，其中負載140為包含有壓電材料之壓電致動器。直流電源供應器110係用以提供電能至換流器120，而換流器120則利用此電能來輸出具有工作頻率值之工作電壓至負載140，以提供工作電流給負載140。電流偵測裝置130係電性連接於換流器120和負載140之間，以偵測負載140的工作電流值，並將此工作電流值傳送至控制器150。控制器150係電性連接至電流偵測裝置130和換流器120，以根據負載140的工作電流值來調整換流器120所提供的工作電壓的頻率。Please refer to FIG. 1 , which is a functional block diagram of a piezoelectric actuator driving system 100 according to an embodiment of the present invention. The piezoelectric actuator drive system 100 includes a DC power supply 110, an inverter 120, a current detecting device 130, a load 140, and a controller 150, wherein the load 140 is a piezoelectric actuator including a piezoelectric material. The DC power supply 110 is used to provide electrical energy to the inverter 120, and the inverter 120 utilizes this electrical energy to output an operating voltage having an operating frequency value to the load 140 to provide an operating current to the load 140. The current detecting device 130 is electrically connected between the inverter 120 and the load 140 to detect the operating current value of the load 140 and transmit the working current value to the controller 150. The controller 150 is electrically connected to the current detecting device 130 and the inverter 120 to adjust the frequency of the operating voltage provided by the inverter 120 according to the operating current value of the load 140.
請參照第2圖，其係繪示根據本發明之一實施例之壓電致動器驅動系統100之控制方法200的流程示意圖。在控制方法200中，首先進行步驟210，以根據負載之最大機械振幅來決定負載140的工作電流值容許範圍。接著，進行步驟220，以利用換流器120來輸出工作電壓和工作電流至負載140。然後，進行步驟230，以利用電流偵測裝置130來偵測負載140的工作電流值。接著，進行步驟240，以判斷工作電流之值是否位於電流值容許範圍內。當工作電流之值位於電流值容許範圍外時，進行步驟250，以增加錯誤次數紀錄值。此錯誤次數紀錄值係用以紀錄工作電流之值位於電流值容許範圍外的次數。然後，進行步驟260，以利用控制器150來根據工作頻率值和錯誤次數紀錄值計算出更新頻率值。接著，進行步驟270，以利用換流器120來將工作電壓之頻率從工作頻率值更改為更新頻率值。另外，當工作電流之值位於電流值容許範圍內時，則進行步驟280來將錯誤次數紀錄值歸零。值得注意的是，雖然本實例之步驟280係位於步驟240和230之間，但當工作電流之值位於電流值容許範圍內時，步驟230和280也可同時進行。Please refer to FIG. 2, which is a flow chart showing a control method 200 of the piezoelectric actuator driving system 100 according to an embodiment of the present invention. In the control method 200, step 210 is first performed to determine the allowable range of the operating current value of the load 140 based on the maximum mechanical amplitude of the load. Next, step 220 is performed to utilize the inverter 120 to output the operating voltage and the operating current to the load 140. Then, step 230 is performed to detect the operating current value of the load 140 by using the current detecting device 130. Next, step 240 is performed to determine whether the value of the operating current is within the allowable range of the current value. When the value of the operating current is outside the allowable range of the current value, step 250 is performed to increase the error count value. This error count value is used to record the number of times the operating current is outside the allowable range of the current value. Then, step 260 is performed to calculate the update frequency value based on the operating frequency value and the error count value by the controller 150. Next, step 270 is performed to utilize the inverter 120 to change the frequency of the operating voltage from the operating frequency value to the updated frequency value. In addition, when the value of the operating current is within the allowable range of the current value, step 280 is performed to zero the number of errors. It should be noted that although step 280 of the present example is between steps 240 and 230, steps 230 and 280 may be performed simultaneously when the value of the operating current is within the allowable range of current values.
由於更新頻率值不一定能使工作電流值位於電流值容許範圍內，因此再進行步驟230來確認控制器150所計算出的更新頻率值可使工作電流值位於電流值容許範圍內。藉由不斷地重複進行步驟230-270，可將工作電流值控制於工作電流值容許範圍內，來使負載140具有較大的機械振幅。Since the update frequency value does not necessarily make the operating current value within the allowable range of the current value, step 230 is performed to confirm that the updated frequency value calculated by the controller 150 can cause the operating current value to be within the allowable range of the current value. By continuously repeating steps 230-270, the operating current value can be controlled within the allowable range of operating current values to provide a greater mechanical amplitude to the load 140.
為了詳細解釋壓電致動器驅動系統之控制方法200，以下將以一範例來具體說明。In order to explain in detail the control method 200 of the piezoelectric actuator drive system, an example will be specifically described below.
請參照第3圖，其係繪示根據本發明之一實施例之壓電致動器驅動系統300的電路示意圖。壓電致動器驅動系統300包含直流電源供應器310、電容C1 和C2 、電晶體開關S1 和S2 與其背接二極體D1 和D2 、變壓器320、壓電陶瓷330、比流器340、現場可編程輯閘陣列(Field-Programmable Gate Arrays；FPGA)350以及抑流線圈370。電容C1 和C2 、背接二極體D1 和D2 以及電晶體開關S1 和S2 係構成換流器360，以將直流電源供應器310所提供之直流電壓轉換為交流電壓。換流器360所輸出之交流電壓的頻率係由電晶體開關S1 和S2 的切換頻率所決定，而此切換頻率則由現場可編程輯閘陣列350所控制。由於壓電陶瓷需要相當高的電壓來驅動，因此本範例利用變壓器320來將換流器360所輸出之交流電壓升壓，再將其提供至壓電陶瓷330。另外，本範例亦利用抑流線圈370抑制壓電陶瓷330的電流變化量來防止壓電陶瓷330燒毀。Please refer to FIG. 3, which is a circuit diagram of a piezoelectric actuator driving system 300 according to an embodiment of the present invention. The piezoelectric actuator drive system 300 includes a DC power supply 310, capacitors C 1 and C 2 , transistor switches S 1 and S 2 and its backing diodes D 1 and D 2 , transformer 320 , piezoelectric ceramic 330 , The current transformer 340, the Field-Programmable Gate Arrays (FPGA) 350, and the suppression coil 370. Capacitors C 1 and C 2, a back contact diode D 1 and D 2 and transistor switch S 1 is and S 2 are lines constituting the inverter 360 to the DC voltage of the DC power supply 310 provides the converted AC voltage. Frequency coefficient output from the inverter 360 of the AC voltage by transistor switches S 1 and S 2 of the switching frequency is determined, and this switching frequency by a field programmable gate array control 350 Series. Since the piezoelectric ceramic requires a relatively high voltage to be driven, the present example utilizes a transformer 320 to boost the AC voltage output from the inverter 360 and supply it to the piezoelectric ceramic 330. In addition, the present example also uses the suppression coil 370 to suppress the amount of current change of the piezoelectric ceramic 330 to prevent the piezoelectric ceramic 330 from being burnt.
請參照第4圖，其係繪示壓電致動器驅動系統300於壓電陶瓷溫度T0 和T1 時的工作電流對工作電壓頻率的關係曲線圖，其中溫度T1 係大於溫度T0 。由第4圖可看出，當壓電陶瓷的溫度升高時，壓電致動器驅動系統300之電流對頻率的曲線係向高頻的方向(向右)移動。例如，在溫度T0 時，系統300之諧振頻率點之值為fr ，反諧振頻率點之值為far 。當溫度從T0 升高至T1 時，系統300之諧振頻率點之值變為fr ’，反諧振頻率點之值變為far ’。因此，當壓電陶瓷的溫度升高時，若工作電壓頻率的頻率一直固定不變，則此工作頻率最後可能會落在壓電致動器驅動系統300的諧振頻率點上，使得流過壓電陶瓷的工作電流值變的過大而燒毀壓電陶瓷。Please refer to FIG. 4 , which is a graph showing the relationship between the operating current and the operating voltage frequency of the piezoelectric actuator driving system 300 at the piezoelectric ceramic temperatures T 0 and T 1 , wherein the temperature T 1 is greater than the temperature T 0 . . As can be seen from Fig. 4, when the temperature of the piezoelectric ceramic rises, the current-to-frequency curve of the piezoelectric actuator drive system 300 moves toward the high frequency direction (to the right). For example, at temperature T 0 , the value of the resonant frequency point of system 300 is f r and the value of the anti-resonant frequency point is f ar . When the temperature rises from T 0 to T 1 , the value of the resonant frequency point of system 300 becomes f r ', and the value of the anti-resonant frequency point becomes f ar '. Therefore, when the temperature of the piezoelectric ceramic rises, if the frequency of the operating voltage frequency is always fixed, the operating frequency may eventually fall on the resonance frequency point of the piezoelectric actuator driving system 300, so that the flow pressure The operating current value of the electric ceramic is too large to burn the piezoelectric ceramic.
因此，在啟動壓電致動器驅動系統300之前，首先決定壓電陶瓷330的工作電流值容許範圍RP (如步驟210)。在本範例中，電流值容許範圍RP 係根據壓電陶瓷具有最大機械振幅之電流值IS 和預設誤差範圍來決定。例如，當壓電陶瓷在工作電流10安培時具有最大的振幅，則取預設誤差範圍為10%來將電流值容許範圍RP 設定為11至9安培。值得注意的是，工作電流值容許範圍RP 之上限值Imax 和下限值Imin 與有大振幅之電流值的關係並非固定為10%，此關係可由使用者自行依需求來決定，以不燒毀壓電陶瓷為原則。Therefore, before the piezoelectric actuator drive system 300 is activated, the operating current value tolerance range R P of the piezoelectric ceramic 330 is first determined (as in step 210). In this example, the current value tolerance range R P is determined based on the current value I S of the piezoelectric ceramic having the largest mechanical amplitude and the preset error range. For example, when the piezoelectric ceramic has the largest amplitude at an operating current of 10 amps, the preset error range is 10% to set the current value allowable range R P to 11 to 9 amps. It is worth noting that the relationship between the upper limit I max and the lower limit I min of the operating current value allowable range R P and the current value having a large amplitude is not fixed at 10%, and the relationship can be determined by the user according to the requirement. The principle of not burning piezoelectric ceramics.
由第4圖可知在區域Ⅰ、Ⅱ、Ⅲ中，電流值IS 係分別對應一或多個頻率點，然而在實際操作的狀況下，壓電陶瓷330不會運作於低頻區域Ⅰ或高頻區域Ⅲ，因此只需考慮壓電陶瓷330在區域Ⅱ中工作情況即可。It can be seen from Fig. 4 that in the regions I, II, and III, the current value I S corresponds to one or more frequency points, respectively, but in actual operation, the piezoelectric ceramic 330 does not operate in the low frequency region I or the high frequency. Region III, so it is only necessary to consider the operation of the piezoelectric ceramic 330 in the region II.
當工作電流值容許範圍RP 決定後，便啟動壓電致動器驅動系統300來進行工作(如步驟220)。接著，利用比流器340來偵測壓電陶瓷330的工作電流(如步驟230)，並將測得之工作電流值傳送至現場可編程輯閘陣列350。然後，現場可編程輯閘陣列350便會判斷壓電陶瓷330的工作電流值是否位於電流值容許範圍內(如步驟240)。當工作電流值大於電流上限值Imax 時，現場可編程邏輯閘陣列350會將儲存於其內部暫存器之錯誤次數紀錄值加1(如步驟250)，並計算更新後錯誤次數紀錄值與預設之間隔頻率值(例如：現場可編程邏輯閘陣列350之內部時脈)之乘積，再將目前的工作頻率值減去此乘積來獲得更新頻率值(如步驟260)。當計算出更新頻率值後，現場可編程邏輯閘陣列350會根據更新頻率值來控制換流器360的電晶體開關S1 和S2 的切換頻率(如步驟270)，以將壓電陶瓷330的工作電壓的頻率從目前的工作頻率值提高為更新頻率值，如此可降低壓電陶瓷330的工作電流值。藉由不斷地重複進行步驟230至270，即可使工作電流值小於電流上限值Imax ，並保持壓電陶瓷具有較大的機械振幅。When the operating current value tolerance range R P is determined, the piezoelectric actuator drive system 300 is activated to operate (step 220). Next, the current comparator 340 is used to detect the operating current of the piezoelectric ceramic 330 (step 230), and the measured operating current value is transmitted to the field programmable gate array 350. Then, the field programmable gate array 350 determines whether the operating current value of the piezoceramic 330 is within the allowable range of current values (step 240). When the operating current value is greater than the current upper limit value I max , the field programmable logic gate array 350 increments the recorded value of the number of errors stored in its internal register by one (step 250), and calculates the updated error count value. The product of the preset interval frequency value (e.g., the internal clock of the field programmable logic gate array 350) is then subtracted from the current operating frequency value to obtain an updated frequency value (step 260). Upon calculating the update frequency value, a field programmable logic gate array 350 may be controlled according to the update frequency value of the inverter 360, transistor switches S 1 and S 2 of the switching frequency (step 270), to the piezoelectric ceramics 330 The frequency of the operating voltage is increased from the current operating frequency value to the updated frequency value, which reduces the operating current value of the piezoelectric ceramic 330. By continuously repeating steps 230 to 270, the operating current value is made smaller than the current upper limit value I max and the piezoelectric ceramic is maintained to have a large mechanical amplitude.
類似地，當工作電流值小於電流下限值Imin 時，現場可編程邏輯閘陣列350會將儲存於其內部暫存器之錯誤次數紀錄值加1(如步驟250)，並計算更新後錯誤次數紀錄值與預設之間隔頻率值(例如：現場可編程邏輯閘陣列350之內部時脈)之乘積，再將目前的工作頻率值加上此乘積來獲得更新頻率值(如步驟260)。當計算出更新頻率值後，現場可編程邏輯閘陣列350會根據更新頻率值來控制換流器360的電晶體開關S1 和S2 的切換頻率(如步驟270)，以將壓電陶瓷330的工作電壓的頻率從目前的工作頻率值降低為更新頻率值，如此可增加壓電陶瓷330的工作電流值。Similarly, when the operating current value is less than the current lower limit value Imin , the field programmable logic gate array 350 increments the value of the number of errors stored in its internal register by one (as in step 250), and calculates an updated error. The product of the number of times recorded and the preset interval frequency value (for example, the internal clock of the field programmable logic gate array 350) is added to the current operating frequency value to obtain the updated frequency value (step 260). Upon calculating the update frequency value, a field programmable logic gate array 350 may be controlled according to the update frequency value of the inverter transistors 360 and switch S 1 is S 2 of the switching frequency (step 270), to the piezoelectric ceramics 330 The frequency of the operating voltage is reduced from the current operating frequency value to the updated frequency value, which increases the operating current value of the piezoceramic 330.
由上述之說明可知，本發明之實施例係提出壓電致動器驅動系統之工作電流與工作電壓頻率的關係曲線圖，並利用工作電壓頻率與工作電流一對一的關係，來使壓電陶瓷保持較大的機械振幅，而不會因為諧振頻率漂移而導致壓電陶瓷的振幅大幅地下降或是壓電陶瓷燒毀。It can be seen from the above description that the embodiment of the present invention proposes a graph of the operating current of the piezoelectric actuator driving system and the operating voltage frequency, and uses the one-to-one relationship between the operating voltage frequency and the operating current to make the piezoelectric The ceramic maintains a large mechanical amplitude without causing a significant drop in the amplitude of the piezoelectric ceramic or burning of the piezoelectric ceramic due to the drift of the resonant frequency.
請參照第5圖，其係繪示根據本發明之一實施例之電致動器驅動系統之控制方法600。控制方法600係類似於控制方法200，但不同之處在於控制方法600更包含判斷步驟610和關閉步驟620。判斷步驟610係於步驟260後進行，以判斷步驟260所計算獲得之更新頻率值是否位於預設之工作頻率值範圍內。在本實施例中，預設工作頻率值範圍係設定於壓電致動器驅動系統100之諧振頻率點和反諧振頻率點之間(如第4圖和第5圖所示)。當更新頻率值位於預設之工作頻率值範圍外時，進行關閉步驟620來關閉換流器120，以停止提供電能至負載140。Please refer to FIG. 5, which illustrates a method 600 of controlling an electric actuator drive system in accordance with an embodiment of the present invention. The control method 600 is similar to the control method 200, but differs in that the control method 600 further includes a decision step 610 and a close step 620. The determining step 610 is performed after the step 260 to determine whether the updated frequency value calculated in step 260 is within a preset operating frequency value range. In the present embodiment, the preset operating frequency value range is set between the resonant frequency point and the anti-resonant frequency point of the piezoelectric actuator driving system 100 (as shown in FIGS. 4 and 5). When the update frequency value is outside the preset range of operating frequency values, a close step 620 is performed to turn off the inverter 120 to stop providing power to the load 140.
當更新頻率值位於預設工作頻率值範圍外時，表示工作頻率值與工作電流值的變化關係可能超出可預期的範圍，為了避免負載140燒毀，控制器150將換流器120關閉，以停止提供電能給負載140。When the update frequency value is outside the preset operating frequency value range, indicating that the change relationship between the operating frequency value and the operating current value may exceed a predictable range, in order to prevent the load 140 from being burned, the controller 150 turns off the inverter 120 to stop. Power is supplied to the load 140.
值得注意的是，雖然本實施例係關閉換流器120來停止提供電能給負載140，但在其他的實施例中，可關閉直流電源供應器110來停止電能的供應。It should be noted that although the present embodiment turns off the inverter 120 to stop providing power to the load 140, in other embodiments, the DC power supply 110 can be turned off to stop the supply of electrical energy.
雖然本發明已以實施例揭露如上，然其並非用以限定本發明，任何熟習此技藝者，在不脫離本發明之精神和範圍內，當可作各種之更動與潤飾，因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and the present invention can be modified and retouched without departing from the spirit and scope of the present invention. The scope is subject to the definition of the scope of the patent application attached.
100．．．壓電致動器驅動系統100. . . Piezoelectric actuator drive system
110．．．直流電源供應器110. . . DC power supply
120．．．換流器120. . . Inverter
130．．．電流偵測裝置130. . . Current detecting device
140．．．負載140. . . load
150．．．控制器150. . . Controller
200．．．控制方法200. . . Control Method
210．．．步驟210. . . step
220．．．步驟220. . . step
230．．．步驟230. . . step
240．．．步驟240. . . step
250．．．步驟250. . . step
260．．．步驟260. . . step
270．．．步驟270. . . step
280．．．步驟280. . . step
300．．．電致動器驅動系統300. . . Electric actuator drive system
310．．．直流電源供應器310. . . DC power supply
320．．．變壓器320. . . transformer
330．．．壓電陶瓷330. . . Piezoelectric Ceramics
340．．．比流器340. . . Current comparator
350．．．現場可編程輯閘陣列350. . . Field programmable gate array
600．．．控制方法600. . . Control Method
610．．．步驟610. . . step
620．．．步驟620. . . step
C1 、C2 ．．．電容C 1 , C 2 . . . capacitance
S1 、S2 ．．．開關S 1 , S 2 . . . switch
D1 、D2 ．．．背接二極體D 1 , D 2 . . . Back-connected diode
RP ．．．電流值容許範圍R P . . . Current value tolerance range
IS ．．．電流值I S . . . Current value
Imax ．．．電流上限值I max . . . Current upper limit
Imin ．．．電流上限值I min . . . Current upper limit
Ⅰ、Ⅱ、Ⅲ．．．區域I, II, III. . . region
T0 、T1 ．．．溫度T 0 , T 1 . . . temperature
far ．．．頻率值f ar . . . Frequency value
fr ．．．頻率值f r . . . Frequency value
far’ ．．．頻率值f ar' . . . Frequency value
fr’ ．．．頻率值f r' . . . Frequency value
為讓本發明之上述和其他目的、特徵、和優點能更明顯易懂，上文特舉一較佳實施例，並配合所附圖式，作詳細說明如下：The above and other objects, features, and advantages of the present invention will become more apparent and understood.
第1圖係繪示根據本發明之一實施例之壓電致動器驅動系統的功能方塊示意圖。1 is a functional block diagram showing a piezoelectric actuator driving system according to an embodiment of the present invention.
第2圖係繪示根據本發明一實施例之壓電致動器驅動系統之控制方法的流程示意圖。2 is a flow chart showing a control method of a piezoelectric actuator driving system according to an embodiment of the present invention.
第3圖係繪示根據本發明之一實施例之壓電致動器驅動系統的電路示意圖。3 is a circuit diagram showing a piezoelectric actuator driving system according to an embodiment of the present invention.
第4圖係繪示壓電致動器驅動系統於兩不同溫度下的工作電流對工作電壓頻率的關係曲線圖。Figure 4 is a graph showing the operating current versus operating frequency frequency of a piezoelectric actuator drive system at two different temperatures.
第5圖係繪示根據本發明一實施例之電致動器驅動系統之控制方法。Figure 5 is a diagram showing a control method of an electric actuator drive system according to an embodiment of the present invention.
200．．．控制方法200. . . Control Method
210．．．步驟210. . . step
220．．．步驟220. . . step
230．．．步驟230. . . step
240．．．步驟240. . . step
250．．．步驟250. . . step
260．．．步驟260. . . step
270．．．步驟270. . . step
280．．．步驟280. . . step
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