1377594 (1) 九、發明說明 【發明所屬之技術領域】 本發明是關於一種具備受激準分子燈的紫外線照射裝 置。尤其是，關於一種測定來自受激準分子燈的放射光強 度，依據其測定結果進行受激準分子燈的點燈狀態的確認 的紫外線照射裝置。 【先前技術】 液晶基板等的製程中，對於被搬運的基板，作用著藉 由照射波長200nm以下的紫外線照射在氧氣所生成的臭 氧離解所產生的活性氣。俾進行被處理物的處理。例如除 去附著於基板表面的有機物的洗淨技術被實用化。 作爲爲了進行此種處理的燈，傳統上使用著放射波長 1 8 5 nm的真空紫外線的低壓水銀燈。 近年來，代替低壓水銀燈，有作成在圓筒狀內側管外 側同軸地配置相同圓筒狀外側管的雙重圓筒型的構造，而 在外側管外面配置有外側電極，內側管內部配置有內側電 極，並將形成在外側管與內側管之間的空間作爲放電空間 的受激準分子燈被使用在上述處理（參照專利文獻1)。眾 知在該受激準分子燈中，作爲爲了生成受激準分子燈的放 電用氣體，例如藉由使用氣氣體，則放出在波長172nm 具有峰値的真空紫外線。 另一方面，揭示若不是雙重圓筒型而是放電容器由一 圓筒體所構成，在該圓筒體外面配設有外側電極，而內側 -4- (2) 1377594 電極具有露出於放電空間內並延伸的構造（也稱爲單圓筒 型）的受激準分子燈（參照專利文獻2)。該構造是未存在相 當於雙重圓筒型的受激準分子燈的內側管者，因此容易製 造而在成本上具有有利的優點。 此種受激準分子燈是在空氣中被點燈，則藉由從受激 準分子燈所放射的真空紫外線，而反應受激準分子燈周邊 的空氣中的氧氣會生成臭氧，因此使用長時間時，藉由所 | 生成的臭氧有腐蝕電極的問題。又，來自受激準分子燈的 真空紫外線’是藉由空氣中的氧氣被吸收，因此有無法以 高效率照射真空紫外線在被處理體的基板的問題。由此些 理由，在使用受激準分子燈之際，則將受激準分子燈配置 於具有用以取出真空紫外線的窗部的框體內而構成紫外線 照射裝置’藉由導入氮氣等惰性氣體在框體內，而在惰性 環境中進行點亮真空紫外線。 又’在此種紫外線照射裝置中，無法以目視確認配置 φ在框體內受激準分子燈是否點亮，因此，—般設置爲了確 認受激準分子澄的點燈的點燈確認手段。 在此，如第8圖所示地，揭示使用爲了確認受激準分 子燈的點燈，藉由螢光體將從燈所放射的紫外線變換成可 視光，並藉由光二極體等的檢測手段來檢測該可視光。來 確認受激準分子燈的點燈狀態的手段（參照專利文獻3) ^ 第8圖是表示用以說明習知的紫外線照射裝置的斷面 圖。 紫外線照射裝置7 〇 〇是在箱型框體71內收納有複數 (3) (3)1377594 受激準分子燈80»在框體71的開口 72，配置有用以將來 自受激準分子燈80的真空紫外線取出至外部的光取出用 窗構件73。在框體71上面，形成有貫通孔74於受激準 分子燈80的上方位置，而在該貫通孔74，配置有透射可 視光線的光檢測用的窗構件75。 在框體71的內部上方，設有用以冷卻受激準分子燈 80的冷卻段90。在冷卻段90的下面，互相隔離地形成有 用以配置受激準分子燈的複數溝槽部91，而對於各該溝 部91配置有受激準分子燈80。又，在冷卻段90，形成有 朝上下方向貫通冷卻段90而連通於溝槽部91的光導入孔 92於光檢測用窗構件75的正下方位置。 在窗構件75上面，設有具備矽光二極等所構成的受 光.·的光檢測器77。 在受激準分子燈80的外表面，設有螢光體層78於窗 構件75的正下方位置。 在此種紫外線照射裝置7〇〇中，從受激準分子燈80 的放射的真空紫外線藉由螢光體層78變換成可視光，而 在光檢測器7 7透射窗構件7 5的可視光，由此可確認受激 準分子燈80的點燈。 專利文獻1 :日本專利第2854255號 專利文獻2:日本專利第2001-84966號 專利文獻3:日本專利第2000-193799號 【發明內容】 -6- (4) 1377594 但是，藉由如第8圖所示的紫外線照射裝置，也判明 了無法檢測受激準分子燈成爲未點燈的情形。針對於該理 由，在以下使用第9圖及第10圖加以說明。 第9圖是表示具有單重圓筒型構造的受激準分子燈的 長度方向的斷面圖。 受激準分子燈80是具有一個圓筒體所構成的放電容 器 81。放電容器81是在兩端形成有鉬所成的金屬箔 | 82(82a，82b)所埋設的密封部83(83a，83b)。內側電極84 是具有沿著放電容器81的長度方向延伸的線圈部85，及 聯繫於該線圈部85的兩端的直線部86(86a，86b)，而在 金屬箔82的一端連接有該直線部86。在金屬箔82的另 —端，連接有從密封部 83朝外方突出的外部引入線 8 7(8 7 a，87b)。在外部引入線87a，連接有聯繫於給電裝 置的給電線8 9，由此，給電到內側電極8 4與外側電極8 8 ，在兩電極間施以絕緣擊穿而形成受激準分子放電，俾照 φ射真空紫外線。 然而，表示於第9圖的受激準分子燈，是在點燈長時 間時，藉由離子或電子相撞，構成內側電極的物質被濺鍍 而藉由飛散至放電空間內使得內側電極的一部分變細，有 變細部起因於隨著電流密度的上昇使得溫度上昇而斷線的 情形。這時候，在與給電線電性地斷開的部位，因切斷給 電而成爲未點燈。尤其是給電側的內側電極是比非給側， 因電流密度較高而容易上昇溫度，因此容易濺鍍，又，變 細時，因容易上昇溫度，給電側的內側電極是變細較大而 (5) 1377594 斷線的機率較高。 然而，如第10圖所示地，受激準分子燈80是內側電 極84在以A所示的部分斷線時，在內側電極84電性地 連接給電裝置的領域（在第10圖中以Y所表示的領域）仍 然繼續點燈，惟在內側電極84從給電裝置電性地被切斷 的領域（在第1〇圖中之X領域）成爲不點燈。這時候，光 檢測器配置在對應於Y領域的部位，則在X領域不但成 |爲不點燈，而且在光檢測器7 7檢測從Y領域被放射而藉 由螢光體層78所變換的可視光，因此操作紫外線照射裝 置的作業人員會誤認到受激準分子燈如一般地點燈，而產 生無法確實地檢測X領域的不點燈的問題。 由以上，本發明的目的是在於提供一種具備受激準分 子燈的紫外線照射裝置，可確實地檢測受激準分子燈的點 燈或未點燈的紫外線照射裝置。 本發明的紫外線照射裝置，屬於具備··具有由透射紫 |外線於至少一部分的介電材料所構成，而在其內部的放電 空間塡充有放電用氣體的放電容器，及介於構成該放電容 器的介電材料而面對面的一對電極的受激準分子燈，及分 別電性地連接於該一對電極且給電至上述受激準分子燈的 給電裝置的紫外線照射裝置，其特徵爲：上述給電裝置是 對於至少任一方的電極，電性地連接於其一端側，具備： 將對應於比有效發光領域中連接有上述給電裝置的電極一 端更接近於其電極另一端的領域所配置的由一端所射入的 上述受激準分子燈所放射的光從另一端射出的導光部，及 -8- (6) (6)1377594 受光從該導光部所射出的光的受光部，及依據該受光部的 測定結果進行檢測上述受激準分子燈的點燈狀態的點燈檢 測手段。 又’本發明的紫外線照射裝置，屬於具備：具有由透 射紫外線於至少一部分的介電材料所構成，而在其內部的 放電空間塡充有放電用氣體的放電容器，及介於構成該放 電容器的介電材料而面對面的一對電極的受激準分子燈， 及分別電性地連接於該一對電極且給電至上述受激準分子 燈的給電裝置的紫外線照射裝置，其特徵爲：上述給電裝 置是對於至少任一方的電極，電性地連接於其兩端側，具 備：將對應於比有效發光領域的中心部近旁的領域所配置 的由一端所射入的上述受激準分子燈所放射的光從另一端 射出的導光部，及受光從該導光部所射出的光的受光部， 及依據該受光部的測定結果進行檢測上述受激準分子燈的 點燈狀態的點燈檢測手段》 又，本發明的紫外線照射裝置，上述電極的任一方是 配置於上述放電容器內的放電空間，而在與該一方的電極 的至少另一方的電極之間進行放電的部位外表面，藉由至 少一端在放電空間內被開放的介電材料所構成的內側管所 覆蓋爲其特徵者。 依照本發明的紫外線照射裝置，藉由具備：將從對應 設置於比連接於受激準分子燈的有效發光領域中被連接於 給電裝置的一方的電極一端更接近於該電極的另一端的領 域的一端所射入的受激準分子燈所放射的光從另一端射出 -9 - (7) 1377594 的導光部，及受光從導光部的另一端所射出的光的受 ，及連接於受光部的點燈檢測手段，藉此，有效發光 中，在從給電裝置側的始點一直到對應於導光部正下 部位爲止的領域的任何部分，即使內側電極有斷線， 確實地檢測受激準分子燈的未點燈。 而且，具備控制對於受激準分子燈的點燈電力的 控制機構，及控制搬運機構的動作的搬運控制機構， ，內側電極斷線之燈，可快速地停止對於受激準分子 點燈電力的給電，同時可停止基板搬運。由此，不會 對於受激準分子燈的浪費的點燈電力的給電，不會有 的洗淨處理成爲不完全的顧慮。 【實施方式】 第一實施形態 第1圖是表示本發明的第一紫外線照射裝置的斷 φ °第1(a)圖是表示以正交於受激準分子燈的管軸的平 剖紫外線照射裝置的斷面圖。第1 (b)圖是表示以包名 M’線的平面朝受激準分子燈的管軸方向切剖圖示於第 圖的紫外線照射裝置的斷面圖。 紫外線照射裝置100是在箱型框體11內，收納 單重圓_型構造的4支的受激準分子燈1，而與配置 運機構35上的被處理體的基板36面對面地配置。 在框體11的開口 12，配置有爲了將來自受激準 燈的真空紫外光朝外部取出的如石英玻璃所成的光取 光部 領域 方的 也可 給電 藉此 燈的 繼續 基铒 面圖 面切 • M-1(a) 有具 在搬 分子 出用 -10- (8) (8)1377594 窗構件13。在框體11上面，形成有貫通孔14於受激準 分子燈1的上方位置。框體11是在一方的側面設有用以 將惰性氣體導入至框體內的流入孔15，而在另一方的側 面設有用以排出惰性氣體的排出孔16。在框體11內部， 塡充有如氮氣等的惰性氣體。 在框體11的內部上方，設有將用以冷卻受激準分子 燈1的冷卻用流體使之流通的流路（未圖示）所形成的冷卻 段20 »在冷卻段20的下面，互相隔離地與紙面垂直方向 形成有分別具有比受激準分子燈1的外徑還大徑的斷面呈 半圓形的四個溝槽部201，而沿著此些溝槽部201分別配 置有受激準分子燈1。 受激準分子燈1是整體由管狀放電容器2所構成，形 成有塡充放電用氣體的直管部21，及在其兩端進行氣密 直管部21的密封部22(22a，2 2b)。放電容器2是作爲良 好地透射真空紫外光的材料，例如由合成石英玻璃所構成 〇 在放電容器20的內部，內側電極3配置成延伸放電 容器2的大約中心，而在放電容器2的外面，外側電極4 配置成密接的狀態。內側電極3是由例如鎢的線材所構成 ’具有線圈狀地形成的線圈部3 1，及聯繫於該線圈部3 1 的兩端的直線部32(32a，32b)。內側電極3是在密封部 22a，22b，分別被接合於金屬箔5(5a，5b)，又在金屬箔5 接合有外部引入線6(6a，6b)。 在內側電極3周圍，覆蓋該周圍地設有介電材料所構 -11 - (9) 1377594 成的內側管7，而內側電極3被***在該內側管7中。內 側管7是由如合成石英玻璃所構成，覆蓋於內側電極3的 至少與外側電極4之間進行放電的部位外側，其端部是超 過延伸外側電極4的端部。內側管7是在放電空間內開放 兩端，而未存在於線圈部31的兩端部。因此，內側電極 3是在線圈部31的兩端部與直線部32的一部分未被內側 管7所覆蓋而成爲直接地露出於放電用氣體。又，內側管 | 7是藉由被嵌合於內側管7且藉由焊著或黏接於其內側管 7所固定的環狀支持構件8(8a，8b)，被固定在放電容器2 的內部。 外側電極4，是將金屬線網狀地構成的網目狀構造體 形成筒狀者，配置成覆蓋放電容器2的外表面。所以，來 自放電容器2的真空紫外光，是成爲透射外側電極4的網 目而放射的狀態。又，有關於外側電極4，將一條金屬線 作成無縫地編織的構造，則增加與放電容器的密接性而有 •利。 在形成於直管部21內部的放電空間，封入有藉由介 設介電材料的放電形成受激準分子分子，同時作爲從該受 激準分子分子放射真空紫外光的放電用氣體，例如氙氣體 或混合氬與氯的氣體等。 藉由外部引入線6 a與外側電極4，藉由給電線1 8連 接有給電裝置17。由此，對於內側電極3，僅在一端31a 經由金屬箔5 a及外部引入線6 a電性地連接於給電裝置 1 7。點燈電力從給電裝置1 7供給到內側電極3及外側電 -12- (10) (10)1377594 極4’介設介電材料的放電容器2及內側管而在兩電極間 生成放電，並在放電用氣體發生受激準分子發光。 依照表示於第1圖的形態的紫外線照射裝置1 00，在 •對應於框體11的貫通孔14的正下方位置，而且對受激準 分子燈1，有效發光領域（爲藉由面對面內側電極3與外 側電極4形成有受激準分子放電的領域，在第1(b)圖中， 以連結始點41與終點42的Z線所表示的領域）中，對應 於比內側電極3的一端321a更接近於內側電極3的另一 端32 1b —側的領域（在第1(b)圖中，以連結終點42與中 間點43的X線所表示的領域）形成有朝上下方向貫通冷卻 段20而從貫通溝槽部201的一端所射入的受激準分子燈 所放射的光從另一端射出的導光部202。在框體11上方 ，爲了接受從導光部2 02的另一端所射出的光，與受激準 分子燈1同數的受光部25，是將各該光射入面25 1面對 面載置在導光部202的另一端。 由此，在從始點41 —直到對於導光部202的正下方 部分的領域部分，即使內側電極3有斷線，也可確實地檢 測受激準分子燈的未點燈的情形。尤其是，在以X線所 表示的領域中將導光部202設在終點42附近時，即使內 側電極3在以Z線所表不的領域的任一部位施以斷線，也 可確實地檢測受激準分子燈未點燈而較理想。 受光部25是在來自受激準分子燈的放射光具有光感 度，而具有依據接受之光，藉由光電轉換輸出電壓訊號的 功能。具體上’具有螢光體與將螢光體的光變更成電壓訊 -13- (11) 1377594 號的光電元件。作爲光電元件’有例如矽光二極體，鎵， 磷二極體等所構成。 在受光部25，連接有：依據受光部25的測定結果進 行演算處理的演算部26，及被連接於該演算部26，而顯 示燈的點燈或熄燈的顯示部2 7所構成的點燈檢測手段3 0 〇 具體上，演算部26是比較演算處理所設定的基準電 _壓與來自上述受光部25的電壓訊號，俾將表示燈的點燈 或未點燈的訊號輸出至顯示部27。亦即，演算部26是在 電壓訊號比基準電壓更低時，則輸出表示受激準分子燈1 未點燈的訊號（以下，也稱爲「未點燈訊號」。）而在電壓 訊號比基準電壓更高時，則輸出表示受激準分子燈1點燈 的訊號（以下，也稱爲「點燈訊號」。 由演算部26所輸出的點燈訊號或未點燈訊號，是被 輸入在顯示部2 7。顯示部2 7是例如由液晶等的顯示元件 φ所構成，因應於從演算部26所輸出的點燈訊號或未點燈 訊號，俾將受激準分子燈1的點燈狀態通知到使用者。 在演算部2 6，依據從演算部26所輸出的未點燈訊號 ’連接有控制供給到受激準分子燈1的電力的給電控制機 構28控制搬運機構25的動作的搬運控制機構29。 給電控制機構28是因應於來自演算部26的未點燈訊 號’俾將停止供應至受激準分子燈1的點燈電力的訊號輸 出至給電裝置17。因應於此，給電裝置17停止至受激準 分子燈1的點燈電力。搬運控制機構29是因應於從演算 -14- (12) 1377594 部26所輸入的未點燈訊號，俾將停止基板36的搬運的訊 號輸出至搬運機構35。因應於此，搬運機構35是停止搬 運基板36的搬運。 以下’例舉本發明的紫外線照射裝置的規格的一例如 下所述。 基板的寬度爲2000mm時，框體11是縱600mm，橫 3 0 0 m m ’ 商 3 0 0 m m。 B 在導光部2〇2是在有效發光領域z中，其一端配置在 對應於來自終點42的距離大約150mm的位置。 放電容器2是由合成石英玻璃所構成，全長（包含密 封部）爲2 1 00mm，而外徑爲26mm。真空紫外線3是捲繞 線徑0.5mm的鎢所成的線材所構成，線圈部31的長度爲 2050mm。線圈部31是外徑爲13.5mm，而節距爲5 mm。 內側管7是由合成石英玻璃所構成，而全長爲2030mm， 外徑爲16mm’內徑爲14mm。在放電容器2的內部，氙 |氣體是以20kPa的壓力被封入，而額定電力是800» 依照如上的本發明的紫外線照射裝置100，藉由具備 :受激準分子燈1的有效發光領域Z中，將從對應於比被 連接於給電裝置17的內側電極3的一端321a更接近於內 側電極3的另一端321b的領域X所設置的一端所射入的 受激準分子燈所放射的光由另一端射出的導光部202，及 受光從導光部2 02的另一端所射出的光的受光部25,及 連接於受光部25的點燈檢測手段30，即使有效發光領域 中，在對應於從始點至導光部202的正下方的部位領 -15- (13) (13)1377594 域的任一部分，有內側電極3斷線時，也可確實地檢測受 激準分子燈的未點燈。 詳細爲，從受激準分子燈所放射的光是從導光部202 的另一端射出至受光部25，藉由受光部25，因應於光強 度的電壓訊號被輸出至演算部26，而藉由演算部26進行 比較演算基準電壓値與電壓信號而對於顯示部27輸出點 燈訊號或未點燈訊號，作業人員是藉由觀看顯示部27就 可確認受激準分子燈的點燈狀態。 而且，依照本發明的第一紫外線照射裝置〗00，藉由 具備：控制對於受墩準分子燈1的點燈電力的的給電控制 機構28，及控制搬運機構35的動作的搬運控制機構29， 當內側電極3斷線之際，則快速地可停止對於受激準分子 燈1的點燈電力的給電，同時可停止基板36的搬運。由 此，不會對於受激準分子燈繼續進行浪費的點燈電力的給 電，也不會有基板的洗淨處理成爲不完全的顧慮。 又，表示於第1圖的形態的受激準分子燈1，是具有 以下的優點。 (1) 在放電空間內的內側電極3也覆蓋著介電材料所 成的內側管因此與外側電極4之間的放電成爲穩定者，可 持續均勻的狀態，又，防止發生不期望的電弧放電，可提 高受激準分子光的生成效率，也不會發生內側電極3燒斷 的問題。 (2) 內側管7是其端部在放電空間內被開放的構造， 因此’對於長度方向的熱脹不會被拘束而自由的伸縮，而 -16- (14) 1377594 與在放電容器與兩端部所接合的構造相比較，可減輕放電 容器的損傷或破損的問題。 (3) 內側管7內的放電用氣體經由其開放端而流通於 放電空間內來抑制內側電極3的溫度上昇，可防止其損耗 ，同時放電用氣體的溫度被平均化而被抑制其溫度上昇， 可防止降低光輸出。 (4) 內側電極3是具有彈性，因此即使該內側電極3 | 進行熱脹，也藉由吸收其熱脹份量，不會影響到熱脹係數 不相同的石英玻璃所成的放電容器2的密封部22a，22b ，而可防止放電容器2的破損。 本發明的第一紫外線照射裝置，是並不被限定於表示 於第1圖的實施形態，可加以各種變更。以下，有關於本 發明的第一紫外線照射裝置的其他形態，使用第2圖至第 4圖進行說明。第2圖或第4圖是表示以包含受激準分子 燈的管軸的平面來切剖紫外線照射裝置的斷面圖，與第1 φ圖相同符號是表示相同部分或相當的部分。 表示於第2圖的紫外線照射裝置200，是除了設有朝 斜方向貫通冷卻塊20的導光部2〇2，而受光部25於導光 部2 02的另一端以面對面其光入射面251的狀態下被載置 在框體11上之外，其他構成是與表示於第1圖的紫外線 照射裝置相同。 導光部2G2是將受激準分子燈1的有效發光領域z中 ’從比對應於內側電極3的—端3 2 1 a更接近於內側電極 3的另一端3 2 1 b的領域X所設置的一方開口端射入的受 -17- ⑧ (15) 1377594 激準分子燈所放射的光，從受激準分子燈的有效發光領域 中對應於接近於內側電極3的一端321a —側的領域Y所 設置的另一方開口端射出。 依照此種紫外線照射裝置200，依據藉由受光部25 接受從導光部2 02的另一端所射出的光所得到的測定結果 ，進行與表示於第1圖的紫外線照射裝置同樣的演算處理 ，可檢測受激準分子燈1的點燈狀態，同時可控制對於受 |激準分子燈的給電及基板的搬運。 表示於第3圖的紫外線照射裝置3 00是除了未具有冷 卻段，.設有筒狀光導所成的導光部2 02，而受光部25於 導光部202的另·一端以面對面其光射入面251之狀態下被 載置於框體11之外，其他構成是與表示於第1圖的紫外 線照射裝置相同。 導光部202是將受激準分子燈1的有效發光領域Z中 ，從比對應於內側電極3的另一端321a更接近於內側電 φ極3的另一端321b的領域X所配置的一端射入的受激準 分子燈所放射的光，從配置於受激準分子燈1的有效發光 領域外的另一端射出。 依照此種紫外線照射裝置3 00，依據藉由受光部25 接受從導光部2 02的另一端所射出的光所得到的測定結果 ，進行與表示於第1圖的紫外線照射裝置同樣的演算處理 ，可檢測受激準分子燈1的點燈狀態，同時可控制對於受 激準分子燈的給電及基板的搬運。又，將受光部25配置 在有效發光領域Z外，即可抑制受光部的溫度上昇，精度 -18- (16) 1377594 優異地可檢測，或是延展受光部的壽命。 表示於第4圖的紫外線照射裝置400是除了如石英纖 維所構成，具備一端嵌入於上下方向貫通冷卻段20所設 置的貫通孔45’而且另一端連接於受光部25的光射入面 251所成的導光部2 02，及被載匱於框體Π上方的受光部 25之外，其他構成是與表示於第1圖的紫外線照射裝置 相同。 | 導光部202是將受激準分子燈1的有效發光領域z中 ’從比對應於內側電極3的一端321a更接近於內側電極 3.的另一端321b的領域X所配置的一端射入的受激準分 子燈所放射的光，從另一端射出。 依照此種紫外線照射裝置400，依據藉由受光部25 接受從導光部202號的一端所射出的光所得到的測定結果 ’進行與表示於第1圖的紫外線照射裝置同樣的演算處理 ，可檢測受激準分子燈1的點燈狀態，同時可控制對於受 春激準分子燈的給電及基板的搬運。又，將受光部25配置 在有效發光領域Z外’即可抑制受光部的溫度上昇，精度 優異地可檢測’或是延展受光部的壽命。 第2實施形態 第5圖是表示以包含受激準分子燈的管軸的平面切剖 本發明的第二紫外線照射裝置的斷面圖。與第丨圖相同符 號是表示相同部分或是相當部分。紫外線照射裝置5〇〇是 除了使用具有雙重管構造的受激準分子燈5〇之外，其他 ⑧ (17) 1377594 的構成，是與表示於第I圖的紫外線照射裝置同樣。 受激準分子燈50是具有如石英玻璃等的介質所成 圓筒狀外側管5 1，及具有比該外側管51的內徑更小的 徑的如石英玻璃等的介質所成的圓筒狀內側管52，及 密地封閉由該外側管5 1及內側管5 2所形的圓筒狀空間 兩端部的側壁部53，54所成的雙重管構造的放電容器 ，而在該放電容器55所形成的圓筒狀放電空間S塡充 | 如氙氣體作爲放電用氣體。 在形成放電容器55的外側管51，於其外周面具有 目狀開口地’密接有藉由如蒸鍍或絲網印刷等所形成的 膜所構成的外側電極5 6，在內側管5 2，以密接於其內 面的狀態下，設有如鋁所構成的板內側電極57，而在 側電極56及內側電極57，連接有給電裝置17» 依照本發明的紫外線照射裝置，藉由具備：受激準 子燈50的有效發光領域Z中，將從對應於比被連接於 φ電裝置17的外側電極56的一端561a更接近於外側電 56的另一端561b的領域X所設置的一端所射入的受激 分子燈所放射的光由另一端射出的導光部202，及受光 導光部202的另一端所射出的光的受光部25，及連接 受光部25的點燈檢測手段30，例如藉由外側電極56 外側管51之間的熱脹係數的不相同，受激準分子燈1 有效發光領域Z中，即使在對應於從始點41至導光 202的正下方的部位領域的任一部分有外側電極5 6的 部分剝離，也可確實地檢測受激準分子燈50的未點燈 的 外 氣 的 55 有 網 鋁 周 外 分 給 極 準 從 於 與 的 部 -20- (18) (18)1377594 尤其是’給電部側是藉由電流密度變高，溫度容易變高之 故，因而使得熔斷或剝離的機率變高，而採用本發明的構 成而可確實地檢測受激準分子燈的未點燈。 而且’藉由具備：控制對於受激準分子燈50的點燈 電力的給電的給電控制機構28，及控制搬運機構35的動 作的搬運控制機構29，當外側電極56的一部分剝離之際 ’則快速地可停止對於受激準分子燈1的點燈電力的給電 ，同時可停止基板36的搬運。由此，不會對於受激準分 子燈繼續進行浪費的點燈電力的給電。也不會有基板的洗 淨處理成爲不完全的顧慮。 第3實施形態 第6圖是表示以包含受激準分子燈的管軸的平面切斷 本發明的第三紫外線照射裝置的斷面圖。與第1圖相同符 號是表示相同部分或相當部分。 紫外線照射裝置600是外部引入線6a，6b的雙方與 外側電極4藉由給電線丨8被連接於給電裝置1 7。對應於 有效發光領域Z的中央部近旁的領域（以下述的第7圖中 的V線所表示的領域）形有朝上下方向貫通冷卻段20的導 光部202，而在導光部202的另一端受光部25以面對面光 射入面251的狀態下載置於框體11上。「中央部近旁的 領域」是指受光部25可觀察受激準分子燈中央的位置。 除了此些點之外，其他構成是與表示於第1圖的紫外線照 射裝置同樣。 -21 - ⑧ (19) (19)1377594 針對於具有本發明的第三紫外線照射裝置的作用效果 說明如下。 內側電極3僅在一部位切斷時，藉由內側電極的兩端 電性地連接於給電裝置’仍然在斷線部位的兩側繼續點燈 而不會特別地產生問題，然而，如第7圖所示地，內側電 極3在兩部位（第7圖中的斷線點44，45)切斷時，則以連 結始點41與斷線點44的υ線所表示的領域及以連結斷 線點45與終點45的W線所表示的領域仍然繼續點燈， 惟以連結斷線點44與斷線點45的V線所表示的領域， 藉由與給電裝置電性地被切離而成爲未點燈。首先，當斷 線點44斷線，則內側電極的長度成爲u<V + W，b側的給 電部比a側給電部所流動的電流値變大，其次，斷線者是 在由中央部接近b側的斷線點45進行斷線。依照第三紫 外線照射裝置，如此地即使內側電極3有兩部位斷線時， 對於以有效發光領域Z的中央部近旁的V線所表示的領 域設有導光部2 02，因此經由導光部202藉由依據被受光 於受光部25的光的電壓信號可確實地檢測受激準分子燈 的未點燈。 而且，藉由具備控制對於受激準分子燈]的點燈電力 的給電的給電控制機構，及控制搬運機構的動作的搬運控 制機構，當內側電極3斷線之際，則快速地可停止對受激 準分子燈的點燈電力的給電，同時可停止基板搬運。由此 ，不會繼續進行對於受激準分子燈的點燈電力的浪費給電 ，也不會有基板洗淨處理成爲不完全的顧慮。 -22- ⑧ (20) 1377594 如以上的第一至第三紫外線照射裝置是成爲在框體的 開口嵌入窗構件的構造，惟並不被限定於此，也可採用未 使用窗構件的構造。 第一至第三紫外線照射裝置是成爲在框體內具備冷卻 段的構造，惟並不被限定於此，也可採用未具有冷卻段的 構造，這時候設在框體的貫通孔功能作爲導光部。 又，在上述實施形態中，針對於以介電材料所成的內 | 側管覆蓋內側電極外周的構造的受激準分子燈加以說明， 惟並不一定限定於此者，使用未具有內側管的單重圓筒型 構造的受激準分子燈.也可構成紫外線照射裝置。 又，如習知構造的紫外線照射裝置地，藉由設置於受 激準分子燈外表面的螢光體層，俾將從受激準分子燈所放 射的真空紫外光變換成可視光，而依據因應於該可視光的 強度的電壓信號也可檢測受激準分子燈的點燈狀態。或是 ，檢測燈光的受光部，是不使用螢光體而使用而直接檢測 φ真空紫外光的受光元件也可以。又，在氙受激準分子燈， 也可檢測從燈所放射的紫外光，可視光，紅外光。 當然，在將混合被使用於紫外線硬化的放射真空紫外 光以外的光的氪與氯的222nm的光進行放射的受激準分 子燈，或是將混合氣與氯的308nm的光進行放射的受激 準分子燈等，也可確實地檢測。 【圖式簡單說明】 第1(a)圖及第1(b)圖是表示本發明的第一紫外線照射 -23- (21) 1377594 裝置的斷面圖。 第2圖是表示本發明的 態的斷面圖。 第3圖是表示本發明的 態的斷面圖。 第4圖是表示本發明的 態的斷面圖。 第5圖是表示本發明的 第6圖是表示本發明的 〇 第7圖是表示用以說明 的作用效果的斷面圖。 第8圖是表示習知的紫 第9圖是表示包含習知 φ子燈的管軸的斷面圖。 第10圖是表示用以說 的斷面圖。 【主要元件符號說明】 1 受激準分子燈 2 放電容器 3 內側電極 4 外側電極 第一紫外線照射裝置的其他形 第一紫外線照射裝置的其他形 第一紫外線照射裝置的其他形 第二紫外線照射裝置的斷面圖 第三紫外線照射裝置的斷面圖 本發明的第三紫外線照射裝置 外線照射裝置的斷面圖。 的單重圓筒型構造的受激準分 明習知的紫外線照射裝置的問 -24 ⑧‘ (22) 1377594 5 金屬箔 6 外部引入線 7 內側管 8 支持構件 11 框體 12 開口 13 窗構件1377594 (1) Description of the Invention [Technical Field of the Invention] The present invention relates to an ultraviolet irradiation apparatus including an excimer lamp. In particular, an ultraviolet irradiation device that measures the intensity of the emitted light from the excimer lamp and confirms the lighting state of the excimer lamp based on the measurement result. [Prior Art] In the process of a liquid crystal substrate or the like, an active gas generated by dissociation of ozone generated by oxygen gas by irradiation with ultraviolet rays having a wavelength of 200 nm or less is applied to the substrate to be transported.俾 Process the processed object. For example, a cleaning technique for removing organic substances attached to the surface of a substrate is put to practical use. As a lamp for performing such a treatment, a low-pressure mercury lamp that emits a vacuum ultraviolet ray having a wavelength of 185 nm is conventionally used. In recent years, in place of the low-pressure mercury lamp, there is a double cylindrical structure in which the same cylindrical outer tube is coaxially arranged outside the cylindrical inner tube, and the outer electrode is disposed on the outer surface of the outer tube, and the inner electrode is disposed inside the inner tube. An excimer lamp that forms a space between the outer tube and the inner tube as a discharge space is used in the above-described processing (see Patent Document 1). In the excimer lamp, as a discharge gas for generating an excimer lamp, for example, by using a gas gas, a vacuum ultraviolet ray having a peak 波长 at a wavelength of 172 nm is emitted. On the other hand, it is disclosed that if it is not a double cylinder type, the discharge vessel is composed of a cylindrical body, and the outer electrode is disposed outside the cylindrical body, and the inner -4- (2) 1377594 electrode is exposed in the discharge space. An excimer lamp having a structure (also referred to as a single cylinder type) extending (see Patent Document 2). This configuration is such that there is no inner tube of the excimer lamp equivalent to the double cylinder type, and thus it is easy to manufacture and has an advantageous advantage in cost. When such an excimer lamp is lit in the air, the oxygen in the air surrounding the excimer lamp generates ozone by vacuum ultraviolet rays emitted from the excimer lamp, so the use is long. At the time, the ozone generated by | has a problem of corroding the electrodes. Further, since the vacuum ultraviolet ray "from the excimer lamp is absorbed by the oxygen in the air, there is a problem that the vacuum ultraviolet ray cannot be irradiated onto the substrate of the object to be processed with high efficiency. For this reason, when an excimer lamp is used, an excimer lamp is placed in a casing having a window for taking out vacuum ultraviolet rays to constitute an ultraviolet irradiation device' by introducing an inert gas such as nitrogen gas. The inside of the frame is illuminated while the vacuum ultraviolet light is applied in an inert environment. Further, in such an ultraviolet irradiation apparatus, it is not possible to visually confirm whether or not the excimer lamp is turned on in the housing in the arrangement φ. Therefore, a lighting confirmation means for confirming the excitation of the excimer is generally provided. Here, as shown in FIG. 8, it is disclosed that, in order to confirm the lighting of the excimer lamp, the ultraviolet light emitted from the lamp is converted into visible light by the phosphor, and is detected by a photodiode or the like. Means to detect the visible light. A means for confirming the lighting state of the excimer lamp (see Patent Document 3). Fig. 8 is a cross-sectional view showing a conventional ultraviolet irradiation device. The ultraviolet irradiation device 7 is configured to house a plurality of (3) (3) 1377594 excimer lamps 80» in the opening 72 of the casing 71 in the box-shaped casing 71, and is configured to be used to receive the light from the excimer lamp 80. The vacuum ultraviolet rays are taken out to the external light extraction window member 73. On the upper surface of the casing 71, a through hole 74 is formed above the excimer lamp 80, and a window member 75 for detecting light that transmits visible light is disposed in the through hole 74. Above the inside of the frame 71, a cooling section 90 for cooling the excimer lamp 80 is provided. On the lower surface of the cooling section 90, a plurality of groove portions 91 for arranging the excimer lamps are formed, and an excimer lamp 80 is disposed for each of the grooves 91. Further, in the cooling section 90, a light introduction hole 92 that penetrates the cooling section 90 in the vertical direction and communicates with the groove portion 91 is formed at a position directly below the light detecting window member 75. On the upper surface of the window member 75, a photodetector 77 having a light-receiving light or the like is provided. On the outer surface of the excimer lamp 80, a phosphor layer 78 is provided directly below the window member 75. In the ultraviolet irradiation device 7A, the vacuum ultraviolet rays emitted from the excimer lamp 80 are converted into visible light by the phosphor layer 78, and the visible light of the window member 75 is transmitted through the photodetector 77. Thereby, the lighting of the excimer lamp 80 can be confirmed. Patent Document 1: Japanese Patent No. 2854255 Patent Document 2: Japanese Patent No. 2001-84966 Patent Document 3: Japanese Patent No. 2000-193799 [Summary of the Invention] -6- (4) 1377594 However, by the eighth figure The ultraviolet irradiation device shown also found that it was impossible to detect that the excimer lamp was not lit. The reason for this will be described below using Figs. 9 and 10. Fig. 9 is a cross-sectional view showing the longitudinal direction of an excimer lamp having a single-cylinder structure. The excimer lamp 80 is a discharge capacitor 81 having a cylindrical body. The discharge vessel 81 is a sealing portion 83 (83a, 83b) embedded in a metal foil | 82 (82a, 82b) formed of molybdenum at both ends. The inner electrode 84 has a coil portion 85 extending in the longitudinal direction of the discharge vessel 81, and a linear portion 86 (86a, 86b) connected to both ends of the coil portion 85, and the straight portion is connected to one end of the metal foil 82. 86. At the other end of the metal foil 82, an external lead-in line 8 7 (8 7 a, 87b) projecting outward from the sealing portion 83 is connected. The external lead-in wire 87a is connected to the electric wire 8 9 connected to the power feeding device, thereby supplying electricity to the inner electrode 8 4 and the outer electrode 8 8 , and dielectric breakdown is formed between the electrodes to form an excimer discharge.俾 φ 真空 vacuum ultraviolet light. However, the excimer lamp shown in FIG. 9 is a material which constitutes an inner electrode by ion or electron collision when the lamp is turned on for a long time, and is scattered by sputtering into the discharge space so that the inner electrode is A part is thinned, and the tapered portion is caused by a situation in which the temperature rises and the line breaks as the current density increases. At this time, the portion that is electrically disconnected from the power supply wire is turned off due to the cutoff of the power supply. In particular, the inner electrode on the power supply side is larger than the non-feed side, and the current density is high, so that it is easy to raise the temperature, so that it is easy to be sputtered, and when it is thinned, the inner electrode on the power supply side is made thinner due to the easy rise in temperature. (5) 1377594 The probability of disconnection is high. However, as shown in FIG. 10, the excimer lamp 80 is a field in which the inner electrode 84 is electrically connected to the power supply device when the inner electrode 84 is disconnected at a portion indicated by A (in FIG. 10 The field indicated by Y continues to be lit, but the field in which the inner electrode 84 is electrically cut from the power feeding device (in the X field in Fig. 1) is not lit. At this time, the photodetector is disposed at a portion corresponding to the Y region, and is not lit in the X field, and is detected by the photodetector 7 7 from being irradiated from the Y region and being converted by the phosphor layer 78. Since the light is visible, the operator who operates the ultraviolet irradiation device can recognize that the excimer lamp is a general spot lamp, and the problem that the X field is not lighted cannot be reliably detected. As described above, an object of the present invention is to provide an ultraviolet irradiation device including an excimer lamp, which can reliably detect an illumination of an excimer lamp or an ultraviolet irradiation device that is not lit. The ultraviolet irradiation device of the present invention is a discharge vessel including a dielectric material having at least a part of a transmission violet|outer line, and a discharge space inside the discharge space is filled with a discharge gas, and the discharge is configured. An excimer lamp of a pair of electrodes facing the surface of the dielectric material of the container, and an ultraviolet irradiation device electrically connected to the pair of electrodes and electrically connected to the power supply device of the excimer lamp, wherein: The power feeding device is electrically connected to one end side of at least one of the electrodes, and includes: a region corresponding to a region closer to the other end of the electrode than the one end of the electrode to which the power feeding device is connected in the effective light-emitting region a light guiding portion that emits light emitted from the excimer lamp that is incident at one end from the other end, and a light receiving portion that receives light emitted from the light guiding portion by -8-(6) (6) 1377594, And a lighting detecting means for detecting the lighting state of the excimer lamp based on the measurement result of the light receiving unit. Further, the ultraviolet irradiation device of the present invention includes a discharge vessel having a dielectric material that transmits at least a part of the ultraviolet ray, and a discharge vessel in which a discharge space is filled with a discharge gas, and a discharge vessel An excimer lamp of a pair of electrodes facing the surface of the dielectric material, and an ultraviolet irradiation device electrically connected to the pair of electrodes and electrically supplied to the power supply device of the excimer lamp, characterized in that: The power feeding device is electrically connected to at least one of the electrodes on both ends thereof, and includes: the excimer lamp that is incident on one end and is disposed in an area corresponding to a region near the center of the effective light-emitting region a light guiding portion that emits light emitted from the other end, and a light receiving portion that receives light emitted from the light guiding portion, and a point at which the lighting state of the excimer lamp is detected based on a measurement result of the light receiving portion Further, in the ultraviolet irradiation device of the present invention, one of the electrodes is a discharge space disposed in the discharge vessel, and the one is The outer surface of the portion where the at least one of the electrodes of the square electrode is discharged is covered by an inner tube composed of a dielectric material in which at least one end is opened in the discharge space. The ultraviolet irradiation device according to the present invention includes a field that is closer to the other end of the electrode from the one end of the electrode that is connected to the power supply device than the effective light-emitting region connected to the excimer lamp. The light emitted by the excimer lamp incident at one end is emitted from the other end by the light guide of the -9 - (7) 1377594, and the light received by the other end of the light guide, and connected to In the effective light emission, even if the inner electrode is disconnected, it is surely detected in any part of the field from the start point of the power supply device side to the portion immediately below the light guide portion in the effective light emission. The excimer lamp is not lit. Further, the control mechanism for controlling the lighting power of the excimer lamp and the conveyance control mechanism for controlling the operation of the transport mechanism, and the lamp for disconnecting the inner electrode can quickly stop the electric power for the excimer lighting. Power is supplied and the substrate can be stopped. Therefore, there is no need for the power supply of the wasted power of the excimer lamp, and the cleaning process is not incomplete. [Embodiment] FIG. 1 is a view showing a first ray of the first ultraviolet ray irradiation apparatus of the present invention. FIG. 1(a) is a plan view of ultraviolet ray irradiation orthogonal to a tube axis of an excimer lamp. A sectional view of the device. Fig. 1(b) is a cross-sectional view showing the ultraviolet irradiation device of the first drawing taken along the direction of the tube axis of the excimer lamp in the plane of the package name M'. The ultraviolet irradiation device 100 accommodates four excimer lamps 1 of a single-circle-type structure in the box-shaped casing 11, and is disposed to face the substrate 36 of the object to be processed on the transport mechanism 35. In the opening 12 of the casing 11, a continuation surface of the light-receiving portion in which the vacuum ultraviolet light from the excitation lamp is taken out to the outside, such as quartz glass, can be supplied. Face cutting • M-1(a) There are -10- (8) (8) 1377594 window members 13 for use in moving. On the upper surface of the casing 11, a through hole 14 is formed above the excimer lamp 1. The casing 11 is provided with an inflow hole 15 for introducing an inert gas into the casing on one side surface, and a discharge hole 16 for discharging the inert gas on the other side. Inside the casing 11, an inert gas such as nitrogen gas is charged. Above the inside of the casing 11, a cooling section 20 formed by a flow path (not shown) for cooling the cooling fluid for cooling the excimer lamp 1 is provided under the cooling section 20, and mutual Four groove portions 201 each having a semicircular cross section having a larger diameter than the outer diameter of the excimer lamp 1 are formed in the vertical direction of the paper surface, and are disposed along the groove portions 201, respectively. Excimer lamp 1. The excimer lamp 1 is composed of a tubular discharge vessel 2, a straight tube portion 21 in which a gas for charging and discharging is formed, and a sealing portion 22 (22a, 2 2b) for airtight straight tube portions 21 at both ends thereof. ). The discharge vessel 2 is a material that transmits vacuum ultraviolet light well, for example, composed of synthetic quartz glass inside the discharge vessel 20, and the inner electrode 3 is disposed to extend about the center of the discharge vessel 2, and outside the discharge vessel 2, The outer electrode 4 is placed in a close contact state. The inner electrode 3 is composed of a wire material of tungsten, for example, a coil portion 31 having a coil shape, and a linear portion 32 (32a, 32b) connected to both ends of the coil portion 31. The inner electrode 3 is bonded to the metal foil 5 (5a, 5b) at the sealing portions 22a, 22b, respectively, and the outer lead wire 6 (6a, 6b) is joined to the metal foil 5. Around the inner electrode 3, an inner tube 7 made of a dielectric material -11 - (9) 1377594 is placed around the inner electrode 3, and the inner electrode 3 is inserted into the inner tube 7. The inner tube 7 is made of, for example, synthetic quartz glass, and covers the outer side of the portion of the inner electrode 3 where the discharge is performed between at least the outer electrode 4, and the end portion thereof is beyond the end portion of the outer electrode 4. The inner tube 7 is open at both ends in the discharge space, and is not present at both end portions of the coil portion 31. Therefore, the inner electrode 3 is partially exposed to the discharge gas at the both end portions of the coil portion 31 and a part of the linear portion 32 without being covered by the inner tube 7. Further, the inner tube|7 is fixed to the discharge vessel 2 by the annular support member 8 (8a, 8b) which is fitted to the inner tube 7 and fixed by welding or bonding to the inner tube 7 thereof. internal. The outer electrode 4 is a tubular structure in which a metal wire is formed in a mesh shape, and is disposed so as to cover the outer surface of the discharge vessel 2. Therefore, the vacuum ultraviolet light from the discharge vessel 2 is in a state of being transmitted through the mesh transmitted through the outer electrode 4. Further, in the case where the outer electrode 4 is formed by seamlessly knitting one metal wire, it is advantageous to increase the adhesion to the discharge vessel. In the discharge space formed inside the straight tube portion 21, an excimer molecule is formed by discharging a dielectric material, and a discharge gas such as helium gas is emitted as a vacuum ultraviolet light from the excimer molecule. Or a mixture of argon and chlorine gas. The power supply unit 17 is connected to the electric wire 18 by the external lead-in wire 6a and the outer electrode 4. Thereby, the inner electrode 3 is electrically connected to the power feeding device 17 only via the metal foil 5a and the external lead-in wire 6a at the one end 31a. The lighting power is supplied from the power feeding device 17 to the inner electrode 3 and the outer electric 12- (10) (10) 1377594 pole 4' through which the discharge vessel 2 and the inner tube of the dielectric material are interposed to generate a discharge between the electrodes, and Excimer light emission occurs in the discharge gas. According to the ultraviolet irradiation device 100 shown in Fig. 1, the position corresponding to the through hole 14 of the casing 11 and the effective light-emitting region of the excimer lamp 1 (by the face-to-face inner electrode) 3, the field in which the excimer discharge is formed with the outer electrode 4, and in the first (b) diagram, the field indicated by the Z line connecting the start point 41 and the end point 42) corresponds to the end of the inner electrode 3 321a is closer to the other end 32 1b of the inner electrode 3 - the field on the side (in the first (b) diagram, the area indicated by the X line connecting the end point 42 and the intermediate point 43) is formed to penetrate the cooling section in the up and down direction The light guide unit 202 that emits light from the excimer lamp that is incident from one end of the through groove portion 201 from the other end. Above the casing 11, in order to receive the light emitted from the other end of the light guiding portion 208, the light receiving portions 25 of the same number as the excimer lamp 1 are placed face to face on the respective light incident surfaces 25 1 The other end of the light guiding portion 202. Thereby, even in the field portion from the starting point 41 to the portion directly below the light guiding portion 202, even if the inner electrode 3 is broken, the unlit light of the excimer lamp can be surely detected. In particular, when the light guiding portion 202 is provided near the end point 42 in the field indicated by the X-ray, even if the inner electrode 3 is broken at any portion of the field indicated by the Z line, it is possible to surely It is desirable to detect that the excimer lamp is not lit. The light receiving unit 25 has a function of emitting light signals by photoelectric conversion in accordance with the received light in accordance with the light sensitivity of the emitted light from the excimer lamp. Specifically, the photovoltaic element having the phosphor and the light of the phosphor is changed to a voltage signal -13-(11) 1377594. The photovoltaic element 'is composed of, for example, a neon diode, gallium, a phosphorus diode or the like. The light receiving unit 25 is connected to an arithmetic unit 26 that performs calculation processing based on the measurement result of the light receiving unit 25, and a lighting unit that is connected to the arithmetic unit 26 and that displays or turns off the display unit 27 of the lamp. Specifically, the calculation unit 26 compares the reference electric pressure set by the calculation processing with the voltage signal from the light receiving unit 25, and outputs a signal indicating that the lamp is lit or not lit to the display unit 27. . In other words, when the voltage signal is lower than the reference voltage, the calculation unit 26 outputs a signal indicating that the excimer lamp 1 is not lit (hereinafter, also referred to as "unlighted signal"), and the voltage signal ratio is When the reference voltage is higher, a signal indicating that the excimer lamp 1 is lit (hereinafter also referred to as "lighting signal") is output. The lighting signal or the unlit signal output by the calculation unit 26 is input. In the display unit 27, the display unit 27 is constituted by, for example, a display element φ such as a liquid crystal, and the point of the excimer lamp 1 is determined in response to a lighting signal or an unlit signal output from the calculation unit 26. The state of the lamp is notified to the user. The calculation unit 26 controls the operation of the transport mechanism 25 by the power supply control unit 28 that controls the power supplied to the excimer lamp 1 based on the unlit signal 'output from the calculation unit 26. The conveyance control unit 29. The power supply control unit 28 outputs a signal for stopping the supply of the lighting power to the excimer lamp 1 to the power feeding device 17 in response to the unlit signal '俾 from the calculation unit 26. Accordingly, The power feeding device 17 is stopped to be excited The lighting control of the molecular lamp 1. The conveyance control unit 29 outputs a signal for stopping the conveyance of the substrate 36 to the conveyance mechanism 35 in response to the unlit signal input from the calculation-14-(12) 1377594 portion 26. Here, the transport mechanism 35 stops the transport of the transport substrate 36. An example of the specifications of the ultraviolet irradiation device of the present invention is as follows. When the width of the substrate is 2000 mm, the frame 11 is 600 mm in length and 3 0 0 in width. Mm ' quotient 3 0 0 mm. B In the light-guiding portion 2〇2 is in the effective light-emitting field z, one end of which is disposed at a position corresponding to a distance of about 150 mm from the end point 42. The discharge vessel 2 is composed of synthetic quartz glass. The full length (including the sealing portion) is 2,100 mm, and the outer diameter is 26 mm. The vacuum ultraviolet light 3 is composed of a wire made of tungsten having a wire diameter of 0.5 mm, and the length of the coil portion 31 is 2050 mm. The coil portion 31 is external The diameter is 13.5 mm and the pitch is 5 mm. The inner tube 7 is composed of synthetic quartz glass, and has a total length of 2030 mm and an outer diameter of 16 mm and an inner diameter of 14 mm. Inside the discharge vessel 2, the gas is gas 20 kPa pressure is enclosed, and rated electricity In the ultraviolet irradiation device 100 according to the present invention as described above, by providing the effective light-emitting region Z of the excimer lamp 1, the one end 321a corresponding to the inner electrode 3 connected to the power feeding device 17 is more The light emitted from the excimer lamp that is incident at one end of the other end 321b of the inner electrode 3 is emitted from the other end of the light guiding portion 202, and the other end of the light receiving portion from the light guiding portion 202 The light-receiving portion 25 of the emitted light and the lighting detecting means 30 connected to the light-receiving portion 25 are led to the position directly below the light guiding portion 202 even in the effective light-emitting region -15- (13 (13) In any part of the 1377594 field, when the inner electrode 3 is broken, the unexcited lamp can be surely detected. Specifically, the light emitted from the excimer lamp is emitted from the other end of the light guiding unit 202 to the light receiving unit 25, and the light receiving unit 25 outputs the voltage signal according to the light intensity to the calculating unit 26. When the calculation unit 26 compares the calculated reference voltage 値 and the voltage signal and outputs a lighting signal or a non-lighting signal to the display unit 27, the operator can confirm the lighting state of the excimer lamp by viewing the display unit 27. Further, the first ultraviolet irradiation device 00 according to the present invention includes the power supply control unit 28 that controls the lighting power of the quasi-molecular lamp 1 and the conveyance control unit 29 that controls the operation of the transport mechanism 35. When the inner electrode 3 is broken, the power supply to the lighting power of the excimer lamp 1 can be stopped quickly, and the conveyance of the substrate 36 can be stopped. Therefore, the power supply of the wasted lighting power is not continued for the excimer lamp, and the cleaning process of the substrate is not incomplete. Further, the excimer lamp 1 shown in the form of Fig. 1 has the following advantages. (1) The inner electrode 3 in the discharge space is also covered with the inner tube formed of the dielectric material, so that the discharge between the inner electrode 3 and the outer electrode 4 becomes stable, and the state is stable and uniform, and the occurrence of undesired arc discharge is prevented. The efficiency of generating excimer light can be improved, and the problem that the inner electrode 3 is blown does not occur. (2) The inner tube 7 is a structure in which the end portion is opened in the discharge space, so that the thermal expansion in the longitudinal direction is not restrained and freely stretched, and -16-(14) 1377594 with the discharge vessel and two The problem of damage or breakage of the discharge vessel can be reduced as compared to the configuration in which the ends are joined. (3) The discharge gas in the inner tube 7 flows through the discharge space through the open end to suppress the temperature rise of the inner electrode 3, thereby preventing the loss thereof, and the temperature of the discharge gas is averaged to suppress the temperature rise. , to prevent reducing the light output. (4) The inner electrode 3 is elastic, so even if the inner electrode 3 is thermally expanded, the amount of thermal expansion is absorbed, and the sealing of the discharge vessel 2 made of quartz glass having a different thermal expansion coefficient is not affected. The portions 22a, 22b prevent damage to the discharge vessel 2. The first ultraviolet irradiation device of the present invention is not limited to the embodiment shown in Fig. 1, and various modifications can be made. Hereinafter, other aspects of the first ultraviolet irradiation device of the present invention will be described with reference to Figs. 2 to 4 . Fig. 2 or Fig. 4 is a cross-sectional view showing the ultraviolet irradiation device cut along a plane including a tube axis of an excimer lamp, and the same reference numerals as in the first φ diagram denote the same portions or corresponding portions. The ultraviolet irradiation device 200 shown in Fig. 2 is provided with a light guiding portion 2A2 that penetrates the cooling block 20 in an oblique direction, and the light receiving portion 25 faces the light incident surface 251 at the other end of the light guiding portion 202. The other configuration is the same as that of the ultraviolet irradiation device shown in Fig. 1 except that it is placed on the casing 11. The light guiding portion 2G2 is a field X in which the effective light-emitting area z of the excimer lamp 1 is closer to the other end 3 2 1 b of the inner electrode 3 than the end 3 2 1 a corresponding to the inner electrode 3 The light emitted by the -17-8 (15) 1377594 excimer lamp that is incident on one of the open ends of the excimer lamp corresponds to the side 321a close to the inner electrode 3 from the effective illuminating field of the excimer lamp. The other open end of the field Y is emitted. According to the ultraviolet irradiation device 200, the measurement result obtained by receiving the light emitted from the other end of the light guiding unit 208 by the light receiving unit 25 performs the same calculation processing as that of the ultraviolet irradiation device shown in Fig. 1 . The lighting state of the excimer lamp 1 can be detected, and the power feeding and substrate handling of the excimer lamp can be controlled. The ultraviolet irradiation device 300 shown in Fig. 3 has a light guiding portion 222 formed by a cylindrical light guide except that the cooling portion is not provided, and the light receiving portion 25 faces the surface at the other end of the light guiding portion 202. The injection surface 251 is placed outside the casing 11, and the other configuration is the same as that of the ultraviolet irradiation device shown in Fig. 1. The light guiding portion 202 is an end portion of the effective light-emitting region Z of the excimer lamp 1 that is disposed from the field X that is closer to the other end 321b of the inner electric φ pole 3 than the other end 321a of the inner electrode 3 The light emitted by the inserted excimer lamp is emitted from the other end disposed outside the effective light-emitting area of the excimer lamp 1. According to the ultraviolet irradiation device 300, the measurement result obtained by receiving the light emitted from the other end of the light guiding unit 208 by the light receiving unit 25 performs the same arithmetic processing as that of the ultraviolet irradiation device shown in Fig. 1 . The light-emitting state of the excimer lamp 1 can be detected, and the power supply to the excimer lamp and the substrate can be controlled. Further, by arranging the light receiving unit 25 outside the effective light-emitting area Z, the temperature rise of the light-receiving unit can be suppressed, and the accuracy of -18-(16) 1377594 can be excellently detected or the life of the light-receiving unit can be extended. The ultraviolet irradiation device 400 shown in Fig. 4 is composed of a quartz fiber, and has a light incident surface 251 in which one end is inserted into the through hole 45' provided in the vertical direction through the cooling section 20 and the other end is connected to the light receiving unit 25. The light guide unit 209 and the light receiving unit 25 mounted on the upper side of the frame , are the same as the ultraviolet ray irradiation unit shown in Fig. 1 . The light guiding portion 202 is configured to inject one end of the effective light-emitting area z of the excimer lamp 1 from the field X closer to the other end 321b of the inner electrode 3. The one end 321a corresponding to the inner electrode 3 is closer. The light emitted by the excimer lamp is emitted from the other end. According to the ultraviolet irradiation device 400, the measurement result obtained by receiving the light emitted from one end of the light guiding unit 202 by the light receiving unit 25 performs the same arithmetic processing as that of the ultraviolet irradiation device shown in Fig. 1 . The lighting state of the excimer lamp 1 is detected, and the power supply to the spring-excited lamp and the substrate are controlled. Further, by arranging the light-receiving portion 25 outside the effective light-emitting region Z, it is possible to suppress the temperature rise of the light-receiving portion, and it is possible to detect or extend the life of the light-receiving portion with excellent precision. (Second Embodiment) Fig. 5 is a cross-sectional view showing a second ultraviolet irradiation apparatus of the present invention, which is cut away from a plane including a tube axis of an excimer lamp. The same symbol as the first figure means the same part or the equivalent part. The ultraviolet irradiation device 5 is the same as the ultraviolet irradiation device shown in Fig. 1 except that an excimer lamp 5 having a double tube structure is used, and the configuration of the other 8 (17) 1377594 is used. The excimer lamp 50 is a cylindrical outer tube 51 having a medium such as quartz glass, and a cylinder made of a medium such as quartz glass having a smaller diameter than the inner diameter of the outer tube 51. The inner tube 52 and the discharge tube of the double tube structure formed by the side wall portions 53 and 54 at both end portions of the cylindrical space formed by the outer tube 5 1 and the inner tube 52 are densely closed, and the discharge is performed. The cylindrical discharge space S formed by the container 55 is filled with gas such as helium gas. In the outer tube 51 forming the discharge vessel 55, the outer peripheral surface of the outer peripheral surface of the discharge vessel 55 is in close contact with the outer electrode 5, which is formed by a film formed by vapor deposition or screen printing, etc. The plate inner electrode 57 made of aluminum is provided in close contact with the inner surface thereof, and the power supply device 17» is connected to the side electrode 56 and the inner electrode 57. The ultraviolet irradiation device according to the present invention is provided with The effective light-emitting area Z of the exciton lamp 50 is incident from one end of the field X corresponding to the other end 561b of the outer electrode 56 connected to the one end 561a of the outer electrode 56 connected to the φ electric device 17 For example, the light-receiving portion 202 emitted from the other end of the light guided by the stimulated molecular lamp, and the light-receiving portion 25 of the light emitted from the other end of the light-receiving portion 202, and the lighting detecting means 30 connected to the light-receiving portion 25, for example By the difference in thermal expansion coefficient between the outer tubes 51 of the outer electrodes 56, the excimer lamp 1 is effective in the field of illumination Z, even in the field corresponding to the portion directly from the start point 41 to the light guide 202. a portion of the outer electrode 56 It is also possible to reliably detect the unlit outdoor air of the excimer lamp 50. The outer portion of the aluminum mesh is given to the terminal portion from the -20-(18) (18) 1377594, especially Since the current density is increased and the temperature is likely to be high, the probability of melting or peeling is increased, and the configuration of the present invention can reliably detect the unlit light of the excimer lamp. Further, by providing the power supply control unit 28 that controls the power supply to the lighting power of the excimer lamp 50, and the conveyance control unit 29 that controls the operation of the transport mechanism 35, when a part of the outer electrode 56 is peeled off, The power supply to the lighting power of the excimer lamp 1 can be stopped quickly, and the conveyance of the substrate 36 can be stopped. Thereby, the power supply of the wasted lighting power is not continued for the excited minute light. There is also no concern that the cleaning of the substrate is incomplete. (THIRD EMBODIMENT) Fig. 6 is a cross-sectional view showing a third ultraviolet irradiation apparatus of the present invention cut along a plane including a tube axis of an excimer lamp. The same symbols as in Fig. 1 denote the same or equivalent parts. The ultraviolet ray irradiation device 600 is such that both the external lead-in wires 6a, 6b and the outer electrode 4 are connected to the power feeding device 17 by the electric wire 丨 8. The light guide portion 202 that penetrates the cooling portion 20 in the vertical direction is formed in the region near the center portion of the effective light-emitting region Z (the region indicated by the V line in the seventh drawing below), and the light guide portion 202 in the light guide portion 202 is formed in the light guide portion 202. The other end light receiving unit 25 is downloaded and placed on the casing 11 in a state of facing the surface light incident surface 251. The "field near the center" means that the light receiving unit 25 can observe the center of the excimer lamp. Other than these points, the other configuration is the same as that of the ultraviolet irradiation device shown in Fig. 1. -21 - 8 (19) (19) 1377594 The effects of the third ultraviolet irradiation device having the present invention will be described below. When the inner electrode 3 is cut at only one portion, the two ends of the inner electrode are electrically connected to the power feeding device 'still continuing to be lit on both sides of the disconnected portion without particularly causing a problem, however, as in the seventh As shown in the figure, when the inner electrode 3 is cut at two locations (the break points 44, 45 in Fig. 7), the area indicated by the squall line connecting the start point 41 and the break point 44 is broken. The field indicated by the W line of the line 45 and the end point 45 continues to be lit, but the field indicated by the V line connecting the breaking point 44 and the breaking point 45 is electrically disconnected from the power feeding device. Become unlit. First, when the break point 44 is broken, the length of the inner electrode becomes u. <V + W, the power supply unit on the b side is larger than the current flowing through the power supply unit on the a side, and the disconnector is disconnected at the disconnection point 45 on the side closer to the b side from the center portion. According to the third ultraviolet ray irradiation device, even if the inner electrode 3 has two portions broken, the light guide portion 022 is provided in the region indicated by the V line near the center portion of the effective light-emitting region Z, and thus the light guide portion is provided. The 202 can reliably detect the unlit lamp of the excimer lamp by the voltage signal of the light received by the light receiving unit 25. Further, by providing a power supply control mechanism for controlling power supply to the lighting power of the excimer lamp and a conveyance control mechanism for controlling the operation of the transport mechanism, when the inner electrode 3 is disconnected, the pair can be quickly stopped. The power of the excimer lamp is turned on, and the substrate can be stopped. As a result, wasteful power supply to the lighting power of the excimer lamp is not continued, and there is no concern that the substrate cleaning process is incomplete. -22- 8 (20) 1377594 The above-described first to third ultraviolet ray irradiation devices are configured to be embedded in the window member in the opening of the casing, but are not limited thereto, and a structure in which the window member is not used may be employed. The first to third ultraviolet irradiation devices are configured to have a cooling section in the casing, but are not limited thereto, and a structure having no cooling section may be employed. In this case, the through hole function provided in the casing serves as a light guide. unit. Further, in the above-described embodiment, the excimer lamp having a structure in which the inner side tube formed of the dielectric material covers the outer circumference of the inner electrode is described, but the present invention is not limited thereto, and the inner tube is not used. The excimer lamp of the single-cylinder structure can also constitute an ultraviolet irradiation device. Further, as in the ultraviolet irradiation device of the conventional structure, by the phosphor layer provided on the outer surface of the excimer lamp, the crucible converts the vacuum ultraviolet light emitted from the excimer lamp into visible light, and according to the reaction The voltage signal of the intensity of the visible light can also detect the lighting state of the excimer lamp. Alternatively, the light-receiving portion for detecting the light may be a light-receiving element that directly detects φ vacuum ultraviolet light without using a phosphor. In addition, in the 氙 excimer lamp, ultraviolet light, visible light, and infrared light emitted from the lamp can also be detected. Of course, an excimer lamp that emits light of 222 nm of light other than the ultraviolet vacuum ultraviolet light that is used for ultraviolet curing, or light of 308 nm of the mixed gas and chlorine is emitted. Excimer lamps, etc., can also be reliably detected. BRIEF DESCRIPTION OF THE DRAWINGS FIGS. 1(a) and 1(b) are cross-sectional views showing a first ultraviolet irradiation -23-(21) 1377594 apparatus of the present invention. Fig. 2 is a cross-sectional view showing the state of the present invention. Fig. 3 is a cross-sectional view showing the state of the present invention. Fig. 4 is a cross-sectional view showing the state of the present invention. Fig. 5 is a cross-sectional view showing the present invention. Fig. 6 is a cross-sectional view showing the operation and effect of the present invention. Fig. 8 is a view showing a conventional purple. Fig. 9 is a cross-sectional view showing a tube shaft including a conventional φ sub-lamp. Figure 10 is a cross-sectional view showing the same. [Description of main component symbols] 1 Excimer lamp 2 Discharge capacitor 3 Inner electrode 4 External electrode Other first ultraviolet irradiation device Other first ultraviolet irradiation device Other first ultraviolet irradiation device Sectional view of the third ultraviolet irradiation device of the present invention is a sectional view of the external ultraviolet irradiation device of the third ultraviolet irradiation device of the present invention. The excitation of the single-cylinder structure is clearly known as the ultraviolet irradiation device -24 8' (22) 1377594 5 metal foil 6 external lead-in line 7 inner tube 8 support member 11 frame 12 opening 13 window member
貫通孔 流入孔 16 排出孔 17 給電裝置 18 給電線 20 冷卻段 21 直管部 22 密封部 φ 25 受光部 2 6 演算部 2 7 顯示部 28 給電控制機構 29 搬運控制機構 31 線圈部 32 直線部 35 搬運機構 36 基板 -25 (23)1377594 50 受激準分子燈 51 外側管 52 內側管 53 側壁部 54 側壁部 55 放電容器 56 外側電極 57 內側電極 100 紫外線照射裝置 201 構槽部 202 導光部Through hole inflow hole 16 discharge hole 17 Power feeding device 18 Feed wire 20 Cooling section 21 Straight pipe portion 22 Sealing portion φ 25 Light receiving portion 2 6 Calculation unit 2 Display portion 28 Power supply control mechanism 29 Transport control mechanism 31 Coil portion 32 Linear portion 35 Transport mechanism 36 Substrate-25 (23) 1377594 50 Excimer lamp 51 Outer tube 52 Inner tube 53 Side wall portion 54 Side wall portion 55 Capacitor 56 Outer electrode 57 Inner electrode 100 Ultraviolet irradiation device 201 Groove portion 202 Light guide
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