1373366 六、發明說明： 【發明所屬之技術領域】 本發明係揭示一種有機廢氣濕式洗滌淨化回收裝 置及方法’更具體而言’係關於一種濕式洗蘇法來淨化 有機廢氣並同時回收有機溶劑之裝置及方法。 【先前技術】 於曰ΐ生活及工腐:生産產品中係廣泛地使用有機 肇 溶劑，而有機溶劑於一般室溫下易揮發成氣體，故又名 為揮發性有機氣體（Volatile Organic Compounds， , VOCs) ’而多數的VOCs對人體具有一定毒性，必須加 . 以回收處理’以減少對人體之傷害；而不同產業領域所 使用的有機溶劑亦不相同，諸如PU(polyurethane，聚氨 基甲酸酯）生產業、科技製造業及鋰電池製造業等產 業，主要使用的各種有機溶劑，其相關性質係表列於下 φ 述之性質表（表一）；其中，PU生產過程所排放的 VOCs，主要來自於用於降低黏度以利於加工所添加的 有機溶劑’包括曱苯(Toluene)、甲基乙基酮(MEK)、二 甲基曱醯胺(DMF)、二曱胺（DMA)和三甲胺（TMA)··· 等；此外，在半導體晶圓廠及TFT-LCD面板等科技製 ' 造業之製程中’將單乙醇胺（MEA)、二甲基亞砜 :. (DMSO)、丙二醇曱醚乙酯（PGMEA)、環己酮(ΑΝΟΝΕ) — • 等有機溶劑’應用於諸如光阻剝離液(stripper)之使用； 而裡電池製造之塗佈機，則必須將氮-甲基四氫他σ各酮 3 13/3366 (NMP)之廢氣回收。 …者：機一11之物化特性係為：低沸點、高飽和 ㈣屋之有機溶劑易於棒發，但不易於冷凝；反之，高 彿點:低飽和条汽壓之有機溶劑則不易於揮發，但易於 冷凝，然而，由該有媳、、六女丨， / 有機/合劑性質表（表一）中可看出，1373366 VI. Description of the Invention: [Technical Field] The present invention discloses an organic waste gas wet scrubbing purification and recovery apparatus and method 'more specifically' relates to a wet scrubbing method for purifying organic waste gas and simultaneously recovering organic Solvent device and method. [Prior Art] Yusheng Life and Industrial Corrosion: Organic oxime solvents are widely used in production products, and organic solvents are easily volatilized into gases at room temperature, so they are also called volatile organic compounds (Volatile Organic Compounds, VOCs) 'And most VOCs are toxic to the human body and must be added. Recycled' to reduce harm to the human body; and the organic solvents used in different industries are also different, such as PU (polyurethane) The various organic solvents used in the production, technology manufacturing and lithium battery manufacturing industries are listed in the table below (Table 1); the VOCs emitted by the PU production process, Mainly from the organic solvents used to reduce the viscosity to facilitate processing, including Toluene, methyl ethyl ketone (MEK), dimethyl decylamine (DMF), diamine (DMA) and top three Amine (TMA)··· etc. In addition, in the process of manufacturing technology manufacturing such as semiconductor fabs and TFT-LCD panels, monoethanolamine (MEA), dimethyl sulfoxide: (DMSO), propylene glycol Ethyl ether ethyl ester PGMEA), cyclohexanone (ΑΝΟΝΕ) — • and other organic solvents' are used in applications such as stripper strippers; while in battery-coated coaters, nitrogen-methyltetrahydrotasine ketones must be used. 3 13/3366 (NMP) waste gas recovery. ...: The physical and chemical properties of machine 11 are: low boiling point, high saturation (4) The organic solvent of the house is easy to stick, but not easy to condense; otherwise, the high Buddha point: the organic solvent of the low saturated strip vapor pressure is not easy to volatilize. However, it is easy to condense. However, as can be seen from the table of the 媳, 丨 丨, / organic / mixture properties (Table 1),
所列之有機溶劑多屬巾古、A 蜊夕屬中巧彿點、低飽和蒸汽壓之物化特 性。 -------〜 質表（表一） 溶劑 學名 分子量 沸點 活性碳（吸附 松、胺附雜;Ϊ 蒸汽壓 ΟΠ°Ρ TVirv»U^ 水溶性 Toluene 甲苯 (C7H8) 92 111 容易 22.3 (20 〇 不溶於水 (但溶於 二曱基曱醯胺 (HC0N(CH0，） --— —-- DMF) DMF 73 153 困難 2.7 全溶於水 單乙醇氨 (C2H7NO) ----1 ^— MEA 61 171 很困難&聚合 0.24 全溶於水 DMSO 二甲基亞碾 (CH3)2so 78 189 很困難 0.37 全溶於水 丙二醇曱醚乙 醋(〇6Ηΐ2〇3) ---- PGMEA 132 146 容易 3.2 18.5g/100 PGME 丙二酵曱謎 (C4H10O2) 90 120 容易 10 g小 全溶於水 NMP 氮-甲基四氫。比 咯酮(C5H9NO) 99 204 很困難 0.23 全溶於水 — --Ή、 V 〜叫队地 >王7 7休 就地裝设冷凝ϋ加以回收處理；此類冷㈣收系統對中 尚沸點且全溶於水之有機物質，在正確的設計與操作下 才可達到向的回收效率，而除了所冷凝吸收下來之 VOCs可回收純化再利用外，因為中高沸點難處理v〇Cs 濃度已大幅下降，可降低下游端廢氣處理設備之負荷及 延長吸脫附濃縮設備之壽命，得以有效提升其整 理效率。 然而，以 敗得統冷凝法回收VOCs之原理，係利 用冷康設備祕含之溫度冷卻线有機物 之露點溫度（飽和溫度）以下，即可達到飽和冷凝之效 ，；其中’-般常見之V0Cs冷凝系統’主要包含除濕 器及VOCs冷凝器兩項基本設備，裴設除濕器之目的在 於將空氣中多餘之水氣去除，避免在VOCs冷凝區之、、田 度降至〇t(273KUx下時，發生^利於冷凝之結冰效 者=定冷凝11去除v〇cs效能的兩項重要關鍵 因素為.⑴冷凝系統需達足夠低溫(·40ΐ)、（2)廢氣 含較高之VOCS濃度（>10，_ppmv);又，冷凝器之斤 理效成與廢氣線速度的增加呈反比之趨勢，故延長 之停留時間將可提升去除效率。 氧 因此’由於傳統之冷凝贼法，“冷;東設備 作溫度控制在相當m及夠長的停科間，方能以卜 凝機制去除VQCs，並確保處理後廢氣所含v〇Cs濃度 值達到最低；不過，如此之傳統冷凝回收方式，若應$ 於排放量相當大而VOCs濃度僅數十到數百 ΡΡΜνΚΟΟΟρ—之產業，為達到高冷凝效率而 到極低溫（至少須低於零下2 〇 t )，所f "之能 損及設備轉成本將會相當高；於是，許多業者基 統冷凝系統設計之限制，以及節省操作成本的考^往 住面臨冷凝設備喊效率^Mi的問題。 較佳且經二細微霧或粒’ _無 而言，若的文式洗糾 高，液氣比約2.0公升/立方公尺近^達35英叶水柱 其操作成本也相當的高。 ’、除效率有限外且 【發明内容】 從事該項產業多年之累積經驗，進::克服，憑其 氣雜淨化回收之震置及方法，其 機廢氣右並同時回收該有機廢氣中之有機溶== 效淨化有機廢氣外’可將易產生二次污染之溶劑:：： 回收’使該有機廢氣淨化較為完全，同二 劑，龙完成節能減碳之目的。 有機洛 式洗：==的其？：提供-種有機廢氣濕 -農縮層’其係用以冷卻有機廢 條液而蒸發，並濃縮流經該蒸發壤缩層中洗2 1373366 ,* 之有機溶劑濃度； 一吸收層，其係用以使洗滌液與有機廢氣充分質 傳，並使該洗滌液或/及有機溶劑於此達至飽和 或過飽和，而冷凝凝結核成長並吸收有機廢氣中 之有機物，以吸收該有機溶劑； 一洗滌液噴灑裝置，其係用以提供洗滌液，以冷卻 該有機廢氣並可進一步使該廢氣達到飽和或過 I 飽和狀態； 一除霧層，其係用以除霧並回收霧狀之有機溶劑； 以及 ' 一回收槽，其係用以回收有機溶劑。 - 如上所述之回收裝置中，該蒸發濃縮層係可由吸濕 性多孔型填充材或吸濕性陶瓷填充材所構成。 如上所述之回收裝置，其中該吸收層係可由塑膠材 質（PVC/PE/PP)填充材、陶瓷填充材、陶瓷纖維單體或 • 碳化矽基陶瓷發泡填充材所構成。 如上所述之回收裝置，其中該有機廢氣中之有機溶 劑係為：氮-曱基四氫°比咯酮（ΝΜΡ)、二曱基曱醯胺 (DMF)、二曱胺（DMA)和三曱胺（ΤΜΑ)、單乙醇胺 (MEA)、二曱基亞砜(DMSO)、丙二醇曱醚乙酯（PGMEA) ^ 之任一種或其他類似水溶性揮發性有機物（VOCs)或其 ' 任意組合。 如上所述之回收裝置，其係可包含一個以上之洗滌 液喷灑裝置及一個以上之吸收層。 7 1373366 如上所述之回收裝置，其係可進一步包含一預熱 器，以預熱所欲淨化之有機廢氣。 如上所述之回忮裝置，其係可進一步包含一冰水 機，用以冷卻洗蘇液。 如上所述之回收裝置，其係可進一步結合蜂巢式轉 輪濃縮器、轉環式濃縮器、流體化床式濃縮器、焚化爐 或冷卻器等，以完全淨化有機廢氣。 本發明之再一目的係提供一種有機廢氣濕式洗滌 淨化回收方法，其係包含下列步驟： ® (1) 提供如上所述之有機廢氣濕式洗滌淨化回收 裝置，用以淨化有機廢氣並回收有機溶劑； 、 (2) 利用一蒸發濃縮層，使洗滌液交換有機廢氣之 · 熱能而蒸發，再次進入吸收層並達至飽和或過 飽和而凝結為液態洗滌液，此時濃縮層亦濃縮 有機廢氣中被回收之有機溶劑濃度而降低其 含水率； φ (3) 再利用一吸收層，使洗滌液與有機廢氣充分質 傳，並使該洗滌液或/及有機溶劑於此達至飽和 或過飽和，而冷凝核成長並吸收有機廢氣中之 有機物，以回收該有機溶劑。 如上所述之回收方法，其係可進一步包含一除霧步 驟，以淨化並回收霧化之有機溶劑。 -; 本發明之另一目的係提供一種有機廢氣濕式洗滌 淨化回收裝置，其係包含： 8 1373366 一吸收層，其係用以使洗滌液與有機廢氣充分質 傳，並使該洗蘇液或/及有機溶劑於此達至飽和 或過飽和，而冷凝凝結核成長並吸收有機廢氣中 之有機物，以吸收該有機溶劑； 一洗滌液噴灑裝置，其係用以提供洗滌液，以冷卻 該有機廢氣並可進一步使該廢氣達到餘和或過 飽和狀態； 一除霧層，其係用以除霧並回收霧狀之有機溶劑； 以及 一回收槽，其係用以回收有機溶劑。 如上所述之回收裝置，其中該吸收層係可由塑膠材 質（PVC/PE/PP)填充材、陶瓷填充材、陶瓷纖維單體或 碳化矽基陶瓷發泡填充材所構成。 如上所述之回收裝置，其中該有機廢氣中之有機溶 劑係為：氮-甲基四氫吡咯酮（NMP)、二甲基曱醯胺 (DMF)、二甲胺（DMA)和三甲胺（TMA)、單乙醇胺 (MEA)、二甲基亞砜(DMSO)、丙二醇曱醚乙酯（PGMEA) 之任一種或其他類似水溶性揮發性有機物(VOCs)或其 任意組合。 如上所述之回收裝置，其係可包含_個以上之洗滌 液噴灑裝置及一個以上之吸收層。 如上所述之回收裝置，其係可進一步包含一預熱 器，以預熱所欲淨化之有機廢氣。 如上所述之回收裴置，其係可進一步包含一冰水 9 1373366 機，用以冷卻洗滌液。 如上所述之回收裝置，其係可進一步結合蜂巢式轉 輪濃縮器、轉環式濃縮器、流體化床式濃縮器、焚化爐 或冷卻器等，以完全淨化有機廢氣。 本發明之再一目的係提供一種有機廢氣濕式洗滌 淨化回收方法，其係包含下列步驟： (1) 提供如上所述之有機廢氣濕式洗滌淨化回收 裝置，用以淨化有機廢氣並回收有機溶劑； (2) 利用一吸收層，使洗滌液與有機廢氣充分質 傳，並使該洗滌液或/及有機溶劑於此達至飽和 或過飽和，而冷凝核成長並吸收有機廢氣中之 有機物，以回收該有機溶劑。 如上所述之回收方法，其係可進一步包含_除霧步 驟，以淨化並回收霧化之有機溶劑。 藉此’本發明之一種有機廢氣濕式洗滌淨化回收裝 置及方法，利用一吸收層，使該洗務液或/及有機溶劑 於此達至飽和或過飽和，而冷凝核成長並吸收有機廢氣 中之有機物，以回收該有機溶劑；再者，進一步利用一 蒸發濃縮層及吸收層間熱能交換關係，使洗滌液於濃縮 層及吸收層間循環進行蒸發今飽和或過飽和凝結及凝 結核成長+吸收+再蒸發…之循環過程，可節省洗務液 補充用量並可降低回收溶劑之含水率，進而提供簡單且 充分有效的淨化有機廢氣並回收其中之有機溶劑，達至 節能省碳之淨化功效。 10 1373366 【實施方式】 為使充分瞭解本發明之目的、特徵及功效，茲藉由 ' 下述具體之實施例，並配合所附之圖式，對本發明做一 詳細說明，說明如後： 實施例1 本發明第一具體實施例之一種有機廢氣濕式洗滌 淨化回收裝置1係如第一圖所示，其中該裝置係包含： _ 一蒸發濃縮層10、一吸收層20、一洗滌液喷灑裝置30、 一除霧層40及一回收槽50。Most of the listed organic solvents are the physicochemical properties of Tobacco, A 蜊 中 、 , , , , , , , , , , , , , , , , , , , , , , -------~ Quality table (Table 1) Solvent name Molecular weight Boiling activated carbon (adsorption loose, amine complex; 蒸汽 vapor pressure ΟΠ ° ir TVirv»U^ Water-soluble Toluene toluene (C7H8) 92 111 Easy 22.3 ( 20 〇 insoluble in water (but soluble in dimethyl decylamine (HC0N(CH0,) --- --- DMF) DMF 73 153 Difficult 2.7 fully soluble in water monoethanolamine (C2H7NO) ----1 ^ — MEA 61 171 Very difficult & Polymerization 0.24 Totally soluble in water DMSO Dimethyl yam (CH3) 2so 78 189 Very difficult 0.37 Totally soluble in water propylene glycol oxime ether Ethyl vinegar (〇6Ηΐ2〇3) ---- PGMEA 132 146 Easy 3.2 18.5g/100 PGME Propylene (C4H10O2) 90 120 Easy 10 g small total soluble in water NMP Nitrogen-methyltetrahydro. pyrrolidone (C5H9NO) 99 204 Very difficult 0.23 All soluble in water - --Ή, V~叫队地> Wang 7 7 rest on the ground to install condensation ϋ for recycling; such cold (four) collection system for the boiling point and fully soluble in organic matter, in the correct design and operation The recovery efficiency can be achieved, and the VOCs absorbed by the condensation can be recycled and reused because of the high boiling point. The concentration of v〇Cs has been greatly reduced, which can reduce the load of the downstream exhaust gas treatment equipment and prolong the life of the suction and desorption equipment, so as to effectively improve the finishing efficiency. However, the principle of recycling VOCs by the degenerate condensation method is utilized. The cooling condensation equipment can be used to achieve the effect of saturated condensation below the temperature limit of the temperature cooling line of the organic cooling equipment. The 'common V0Cs condensing system' mainly includes two basic equipments: the dehumidifier and the VOCs condenser. The purpose of the dehumidifier is to remove excess water in the air, avoiding the condensation in the VOCs, and reducing the turf to 〇t (at 273 KUx, the effect of icing on the condensation = condensing 11 removal) Two important key factors for v〇cs performance are: (1) the condensing system needs to reach a sufficient low temperature (·40ΐ), (2) the exhaust gas contains a higher VOCS concentration (>10, _ppmv); The formation is inversely proportional to the increase in the speed of the exhaust gas line, so the extended residence time will increase the removal efficiency. Oxygen therefore 'due to the traditional condensation thief method, 'cold; east equipment for temperature control is quite m and In the long stop room, the VQCs can be removed by the bucking mechanism, and the concentration of v〇Cs contained in the exhaust gas after treatment is ensured to be the lowest; however, such a conventional condensation recovery method should be equivalent to a large amount of VOCs. In the industry of only tens to hundreds of ΡΡΜνΚΟΟΟρ, in order to achieve high condensation efficiency to extremely low temperatures (at least below 2 〇t), the energy loss of equipment f" will be quite high; therefore, many The limitations of the design of the condensing system of the operator and the cost of operating the operation are faced with the problem of the efficiency of the condensing equipment. Preferably, the second fine mist or grain ' _ none, if the style is washed up, the liquid-gas ratio is about 2.0 liters / m ^ 3 close to 35 inches of water column and the operating cost is also quite high. ', in addition to limited efficiency and [invention content] Engaged in the industry's accumulated experience for many years, into:: Overcome, with its gas-purification and recovery of the shock and method, the machine exhaust right and at the same time to recover the organic waste gas Dissolve == Efficient purification of organic waste gas 'The solvent that can easily cause secondary pollution::: Recycling' makes the organic waste gas purification more complete, the same two agents, the dragon completes the purpose of energy saving and carbon reduction. Organic Luo washing: == its? Providing an organic waste gas wet-agricultural shrinkage layer for evaporating by cooling the organic waste liquid, and concentrating through the evaporated soil layer to wash the organic solvent concentration of 2 1373366, *; an absorbent layer For absorbing the washing liquid and the organic exhaust gas, and causing the washing liquid or/and the organic solvent to reach saturation or supersaturation, and the condensed condensation tube grows and absorbs the organic matter in the organic waste gas to absorb the organic solvent; a washing liquid spraying device for supplying a washing liquid to cool the organic exhaust gas and further to make the exhaust gas saturated or over-saturated; a defogging layer for defogging and recovering the mist-like organic solvent And 'a recovery tank for recycling organic solvents. - In the recovery apparatus as described above, the evaporation concentration layer may be composed of a hygroscopic porous filler or a hygroscopic ceramic filler. The recovery device as described above, wherein the absorbing layer is composed of a plastic material (PVC/PE/PP) filler, a ceramic filler, a ceramic fiber monomer or a cerium carbide-based ceramic foam filler. The recovery device as described above, wherein the organic solvent in the organic waste gas is: nitrogen-mercaptotetrahydropyrrolidone (oxime), dimercaptodecylamine (DMF), diamine (DMA) and three Any of amidoxime (oxime), monoethanolamine (MEA), dimercaptosulfoxide (DMSO), propylene glycol oxime ether ethyl ester (PGMEA)^ or other similar water-soluble volatile organic compounds (VOCs) or any combination thereof. The recovery device as described above may comprise more than one wash liquid spray device and more than one absorbent layer. 7 1373366 A recovery unit as described above, which may further comprise a preheater for preheating the organic waste gas to be purified. The reclamation apparatus as described above may further comprise an ice water machine for cooling the sachet. The recovery apparatus as described above may further incorporate a honeycomb rotor concentrator, a rotary concentrator, a fluidized bed concentrator, an incinerator or a cooler to completely purify the organic waste gas. Still another object of the present invention is to provide an organic waste gas wet scrubbing purification and recovery method comprising the following steps: (1) providing an organic waste gas wet scrubbing purification recovery device as described above for purifying organic waste gas and recovering organic Solvent; (2) using an evaporation concentration layer, the washing liquid is exchanged for the thermal energy of the organic waste gas to evaporate, and again enters the absorption layer and reaches saturation or supersaturation to be condensed into a liquid washing liquid, and the concentrated layer is also concentrated in the organic waste gas. The organic solvent concentration is reduced to reduce the water content; φ (3) an absorption layer is used to sufficiently transfer the washing liquid and the organic waste gas, and the washing liquid or/and the organic solvent is saturated or supersaturated here. The condensed core grows and absorbs organic matter in the organic waste gas to recover the organic solvent. The recovery method as described above may further comprise a defogging step to purify and recover the atomized organic solvent. Another object of the present invention is to provide an organic waste gas wet scrubbing purification and recovery device comprising: 8 1373366 an absorbing layer for sufficiently transferring the washing liquid and the organic exhaust gas, and allowing the washing liquid Or / and the organic solvent reaches saturation or supersaturation, and the condensed condensation tube grows and absorbs the organic matter in the organic waste gas to absorb the organic solvent; a washing liquid spraying device is used to provide a washing liquid to cool the organic The exhaust gas may further bring the exhaust gas to a residual or supersaturated state; a defogging layer for defogging and recovering the misty organic solvent; and a recovery tank for recovering the organic solvent. The recovery device as described above, wherein the absorbing layer is composed of a plastic material (PVC/PE/PP) filler, a ceramic filler, a ceramic fiber monomer or a cerium carbide-based ceramic foam filler. The recovery device as described above, wherein the organic solvent in the organic waste gas is: nitrogen-methyltetrahydropyrrolidone (NMP), dimethyl decylamine (DMF), dimethylamine (DMA), and trimethylamine ( TMA), any of monoethanolamine (MEA), dimethyl sulfoxide (DMSO), propylene glycol oxime ether ethyl ester (PGMEA) or other similar water soluble volatile organic compounds (VOCs) or any combination thereof. The recovery device as described above may comprise more than one wash liquid spray device and more than one absorbent layer. The recovery apparatus as described above may further comprise a preheater for preheating the organic waste gas to be purified. The recovery device as described above may further comprise an ice water 9 1373366 machine for cooling the washing liquid. The recovery apparatus as described above may further incorporate a honeycomb rotor concentrator, a rotary concentrator, a fluidized bed concentrator, an incinerator or a cooler to completely purify the organic waste gas. A further object of the present invention is to provide an organic waste gas wet scrubbing purification and recovery method comprising the following steps: (1) providing an organic waste gas wet scrubbing purification recovery device as described above for purifying organic waste gas and recovering organic solvent (2) using an absorbing layer to sufficiently transport the washing liquid and the organic exhaust gas, and to make the washing liquid or/and the organic solvent reach saturation or supersaturation, and the condensed core grows and absorbs the organic matter in the organic waste gas to The organic solvent is recovered. The recovery method as described above may further comprise a defogging step to purify and recover the atomized organic solvent. According to the invention, an organic waste gas wet scrubbing purification and recovery device and method utilize an absorption layer to make the washing liquid or/and the organic solvent reach saturation or supersaturation, and the condensed core grows and absorbs organic waste gas. The organic matter is recovered to recover the organic solvent; further, the heat exchange relationship between the evaporation concentration layer and the absorption layer is further utilized, and the washing liquid is circulated between the concentration layer and the absorption layer to evaporate. The saturated or supersaturated condensation and the condensation growth of the tuberculosis + absorption + re The circulation process of evaporation can save the supplementary amount of the washing liquid and reduce the moisture content of the recovered solvent, thereby providing a simple and fully effective purification of the organic waste gas and recovering the organic solvent therein, thereby achieving the energy-saving and carbon-saving purification effect. 10 1373366 [Embodiment] In order to fully understand the object, features and effects of the present invention, the present invention will be described in detail by the following specific embodiments and the accompanying drawings, which are illustrated as follows: Example 1 An organic waste gas wet scrubbing purification and recovery device 1 according to a first embodiment of the present invention is as shown in the first figure, wherein the device comprises: an evaporation concentration layer 10, an absorption layer 20, and a washing liquid spray. The sprinkling device 30, a defogging layer 40 and a recovery tank 50 are provided.
而該有機廢氣濕式洗滌淨化回收裝置1之淨化回 · 收有機廢氣之運作如下：首先有機廢氣自一廢氣入口 A ~ 將所欲處理之有機廢氣送入，而該有機廢氣順著氣流朝 上，而洗蘇液（可為蒸汽或水或水+溶劑；此實施例係 採用水）自一洗滌液入口 B進入該洗滌器30喷灑而下 (亦可自廢氣入口 A喷灑洗滌液），當洗滌液自喷灑器 # 30向下落下，經該吸收層20至該蒸發濃縮層10與該 有機廢氣相遇，於該蒸發濃縮層1〇之中（其係由吸濕 性蜂巢狀多孔性填充材所構成），該較低溫（室溫）之 洗滌水有效交換該有機廢氣（80°C)之熱能而被蒸發，而 濃縮洗滌液中有機溶劑之濃度，而被冷卻之有機溶劑隨 ‘ 著該有機廢氣向上，於該吸收層20中（該吸收層係 \ 為’’Φ1/2”馬鞍型陶瓷填充材所構成），含有機溶劑及洗 滌液蒸汽之有機廢氣處於飽和及過飽和之狀態下，致使 該有機溶劑於此吸收層20中被洗滌液蒸汽產生冷凝而 11 凝結核成長包覆並被吸收，而被吸收之有機溶劑可進一 步經蒸發濃縮層10濃縮而回收至該回收槽50 ;再者， 剩餘未被吸收且霧化之有機溶劑微霧，再流經該除霧層 40 (為蜂窩型除霧器）時，即被進一步除霧攔截，經淨 化後之有機廢氣再流經淨化氣體出口 C而排出，而回收 之有機溶劑自該回收槽50流經一閥門52自回收溶劑出 ，口 D排出；經此有效將有機廢氣中之有機溶劑利用本 發明之有機廢氣濕式洗滌淨化回收裝置1進行淨化回 收。 以鋰電池業之有機廢氣進行測試，其中該有機廢氣 100NCMM、85°C、4%RH (空氣露點溫度為15°C)含 NMP 3000 ppmv，於流經該有機廢氣濕式洗滌淨化回收 裝置1之後，其淨化後之有機廢氣100NCMM、15〜18°C 中含NMP60ppmv，該NMP之淨化效率達98% ;而回 收液共79〜100kgs/hr，其中係為78Kgs/hr之NMP，含 水率1〜12%wt;若不經由蒸發濃縮層10進行蒸發濃縮 時，其含水率則為15〜40%wt。 實施例2 本發明第二具體實施例之一種有機廢氣濕式洗滌 淨化回收裝置2係如第二圖所示，其中該裝置係包含： 一蒸發濃縮層10、二吸收層20、21、二洗滌液喷灑裝 置30、31、一除霧層40及一回收槽50。 而該有機廢氣濕式洗滌淨化回收裝置2之淨化回 12 1373366 收有機廢氣之運作如下：首先有機廢氣自一廢氣入口 A 將所欲處理之有機廢氣送入，而該有機廢氣順著氣流朝 上，而洗蘇液（水）自一洗蘇液入口 B進入該洗條液喷 灑裝置30或經由回收之洗滌水經由該洗滌液噴灑裝置 31喷灑而下，當洗滌液自洗滌液喷灑裝置30、31向下 落下，經該吸收層20、21至該蒸發濃縮層10與該有機 廢氣相遇，於該蒸發濃縮層10之中（其係 由”Φ1/2”+ ’’ΦΓ’陶瓷球所構成），該較低溫（室溫）之 洗滌水有效交換該有機廢氣之熱能而被蒸發，而濃縮洗 滌液中有機溶劑之濃度，而被冷卻之有機溶劑隨著該有 ^ 機廢氣向上，於該吸收層20、21中（該吸收層係為蜂 - 巢狀陶瓷纖維單體所構成），含有機溶劑及洗滌液蒸汽 之有機廢氣處於飽和及過飽和之狀態下，致使該有機溶 劑於此吸收層20、21中被洗滌液蒸汽產生冷凝而凝結 核成長包覆並被吸收，而被吸收之有機溶劑可進一步經 • 蒸發濃縮層10濃縮而回收至該回收槽50 ;再者，剩餘 未被吸收且霧化之有機溶劑，再流經該除霧層40 (為 蜂窩型除霧器）時，即被進一步除霧攔截，經淨化後之 有機廢氣再流經淨化氣體出口 C而排出，而回收之有機 溶劑自該回收槽50流經一閥門52自回收溶劑出口 D ’ 排出；經此有效將有機廢氣中之有機溶劑利用本發明之 有機廢氣濕式洗蘇淨化回收裝置2進行淨化回收。 以PU合成皮業之有機廢氣進行測試，其中該有機 廢氣 150 NCMM、80〜100°C 含 DMF 1000 ppmv 及 13 1373366The operation of the organic waste gas wet scrubbing purification and recovery device 1 for purifying the organic waste gas is as follows: first, the organic waste gas is fed from an exhaust gas inlet A to the organic waste gas to be treated, and the organic waste gas flows upward along the air flow. And the washing liquid (which may be steam or water or water + solvent; this embodiment uses water) is sprayed from a washing liquid inlet B into the scrubber 30 (the washing liquid may also be sprayed from the exhaust gas inlet A) When the washing liquid falls down from the sprayer #30, the absorption layer 20 reaches the evaporation concentrated layer 10 and the organic waste gas meets in the evaporation concentrated layer 1 (which is made of hygroscopic honeycomb-like porous The lower temperature (room temperature) washing water is effectively exchanged for the thermal energy of the organic waste gas (80 ° C) to be evaporated, and the concentration of the organic solvent in the washing liquid is concentrated, and the cooled organic solvent is ' The organic exhaust gas is upwardly formed in the absorbing layer 20 (the absorbing layer is made of ''Φ1/2' saddle type ceramic filler), and the organic exhaust gas containing the organic solvent and the washing liquid vapor is saturated and supersaturated. State The organic solvent is condensed by the washing liquid vapor in the absorbing layer 20, and the condensed tuberculosis is coated and absorbed, and the absorbed organic solvent is further concentrated by the evaporation concentration layer 10 to be recovered into the recovery tank 50; The remaining unabsorbed and atomized organic solvent micro-mist, and then flowing through the defogging layer 40 (for the honeycomb type mist eliminator), is further demisted and intercepted, and the purified organic exhaust gas flows through the purified gas. The organic solvent discharged from the recovery tank 50 flows through the valve 52 from the recovery solvent and is discharged from the port D. The organic solvent in the organic waste gas is effectively purified by the organic waste gas of the present invention. The device 1 is subjected to purification and recovery. The organic waste gas of the lithium battery industry is tested, wherein the organic exhaust gas 100NCMM, 85 ° C, 4% RH (air dew point temperature is 15 ° C) contains NMP 3000 ppmv, and flows through the organic waste gas. After the washing and purifying recovery device 1, the purified organic waste gas 100NCMM, 15~18 ° C contains NMP 60ppmv, the purification efficiency of the NMP is 98%; and the recovered liquid is 79~100kgs/hr, wherein the system is 78Kgs/hr. NMP The moisture content is 1 to 12% by weight; if it is not concentrated by evaporation through the evaporation concentration layer 10, the water content is 15 to 40% by weight. Embodiment 2 The organic waste gas wet cleaning and purification of the second embodiment of the present invention The recovery device 2 is as shown in the second figure, wherein the device comprises: an evaporation concentration layer 10, two absorption layers 20, 21, two washing liquid spraying devices 30, 31, a defogging layer 40 and a recovery tank 50. The organic waste gas wet scrubbing purification and recovery device 2 is purified back to 12 1373366. The operation of collecting organic waste gas is as follows: first, the organic waste gas feeds the organic waste gas to be treated from an exhaust gas inlet A, and the organic waste gas flows along the air flow toward Above, the washing liquid (water) is sprayed from the washing liquid inlet B into the washing liquid spraying device 30 or via the washing water sprayed through the washing liquid spraying device 31, when the washing liquid is sprayed from the washing liquid The sprinkling devices 30, 31 fall downward, and the absorption layer 20, 21 reaches the evaporation concentration layer 10 and the organic exhaust gas meets in the evaporation concentration layer 10 (the system is composed of "Φ1/2" + ''ΦΓ' Made up of ceramic balls), the lower temperature (room temperature) The polyester water is effectively exchanged for the thermal energy of the organic waste gas to be evaporated, and the concentration of the organic solvent in the washing liquid is concentrated, and the cooled organic solvent is directed upward in the absorption layer 20, 21 along with the exhaust gas (the absorption layer) It is composed of a bee-stitched ceramic fiber monomer, and the organic exhaust gas containing the organic solvent and the washing liquid vapor is in a state of being saturated and supersaturated, so that the organic solvent is condensed by the washing liquid vapor in the absorption layers 20 and 21. The condensation nuclei grow and are absorbed, and the absorbed organic solvent can be further concentrated by the evaporation concentration layer 10 to be recovered into the recovery tank 50; further, the remaining unabsorbed and atomized organic solvent flows through When the defogging layer 40 (which is a honeycomb type mist eliminator) is further demisted, the purified organic waste gas is discharged through the purified gas outlet C, and the recovered organic solvent flows through the recovery tank 50. A valve 52 is discharged from the recovery solvent outlet D'; thereby effectively purifying and recovering the organic solvent in the organic waste gas by using the organic waste gas wet scrubbing purification and recovery device 2 of the present invention. Tested with organic waste gas from PU synthetic leather industry, the organic waste gas 150 NCMM, 80~100 °C containing DMF 1000 ppmv and 13 1373366
Toluene 1000 ppmv’於流經該有機廢氣濕式洗滌淨化回 收裝置2之後，其淨化後之有機廢氣150 NCMM、 15〜18°C中之有機溶劑之濃度為1050 ppmv，其中大部 分為Toluene，即有效淨化該DMF;而回收液係為29 Kgs/hr 之 DMF 及 0·1 〜0.5 Kgs/hr 之 Toluene，水則為 0.5〜2.0 Kgs/hr。 實施例3 本發明第三具體實施例之一種有機廢氣濕式洗滌 淨化回收裝置3係如第三圖所示，其中該裝置係包含： 一蒸發濃縮層10、二吸收層20、21、二洗滌液喷灑裝 、 置30、31、一除霧層40、一回收槽50及一預熱器60。 . 而該有機廢氣濕式洗滌淨化回收裝置3之淨化回 收有機廢氣之運作如下：首先有機廢氣自一廢氣入口 A 將所欲處理之有機廢氣經一預熱器60加熱至溫度為 50〜85°C ’而該有機廢氣順著氣流朝上，而洗滌液（水） 自一洗滌液入口 B進入該洗滌液噴灑裝置3〇或經由回 收之濃縮洗滌液經由該洗滌液喷灑裝置31喷灑而下， 當洗滌液自喷灑器30、31向下落下，經該吸收層2〇、 21至該蒸發濃縮層10與該有機廢氣相遇，於該蒸發濃 縮層10之中（其係由蜂巢狀陶瓷填充材所構成），該較 ， 低溫（室溫）之洗滌水有效交換該有機廢氣之熱能而被 ” 蒸發，而濃縮洗滌水中有機溶劑之濃度，而被冷卻之有 機〉谷劑隨著該有機廢氣向上，於該吸收層2〇、21中（該 14 1373366 吸收層係為碳化基陶聽泡填充材所構成），含有機冷 劑及洗躲紐之有機廢輯於齡及賴和之狀: 下，致使該有機溶劑於此吸收層2G、21中 = 汽產生冷凝而凝結核成長包覆並被吸收，而被吸收之; 機溶劑可進-步經蒸發濃縮層1G濃縮（但不限定一定 要）而回收至該时槽5G;再者，剩餘未被吸收且霧 化之有機溶劑，再流經該除霧層4〇 (為蜂窩型除霧器） 時，即被進-步除霧攔截，經淨化後之有機廢氣再赫 淨化氣體出口 C而排出’回收之有機溶劑自該回收槽 5〇流經一閥門52自回收溶劑出口 D排出；經此有效將 有機廢氣中之有機〉谷劑利用本發明之有機廢氣濕式洗 滌淨化回收裝置3進行淨化回收。 以半導體業之有機廢氣進行測試，其中該有機廢氣 50 NCMM、25°C、50%RH (露點溫度為 18tdp)含 MEA及DMSO廢氣2000 ppmv，於流經該有機廢氣濕 式洗滌淨化回收裝置3之後，其淨化後之有機廢氣5〇 NCMM、18〜20°C中之有機溶劑之濃度為i00 ppmv，可 有效淨化該MEA及DMSO廢氣；而回收液係為17 8 Kgs/hr之有機溶液，水則為2Kgs/hr左右，·且經處理淨 化後之有機廢氣可進一步經由焚化爐、流體化床、沸石 轉輪及冷凝裔等進行更完全之淨化。 實施例4 本發明第四具體實施例之一種有機廢氣濕式洗滌 1373366 淨化回收裝置4係如第四圖所示，其中該裝置係包含： 一蒸發濃縮層1 〇、一吸收層20、一洗條液噴灑裝置30、 一冰水機35、一除霧層40及一回收槽5 0。 而該有機廢氣濕式洗滌淨化回收裝置4之淨化回 收有機廢氣之運作如下：首先有機廢氣自一廢氣入口 A 將所欲處理之有機廢氣送入，而該有機廢氣順著氣流朝 上，而洗滌液（水）自一冰水機或冰水熱交換器35降 溫冷卻後進入該喷灑器30喷灑而下，當冰冷之洗滌液 自喷灑器30向下落下，經該吸收層20使有機廢氣產生 驟冷卻現象而促使廢氣產生過飽和程度，接著至該蒸發 濃縮層10與該有機廢氣再相遇，於該蒸發濃縮層10之 中（其係由吸濕性陶瓷環填充材所構成），該低溫（冰 溫）之洗滌水有效交換該有機廢氣（80°C )之熱能而被蒸 發，而濃縮洗滌液中有機溶劑之濃度，而被冷卻之有機 溶劑隨著該有機廢氣向上，於該吸收層20中（該吸收 層係為”Φ1/2”馬鞍型陶瓷填充材所構成），含有機溶劑 及洗滌液蒸汽之有機廢氣處於飽和及過飽和之狀態 下，致使該有機溶劑於此吸收層20中被洗滌液蒸汽產 生冷凝而凝結核成長包覆並被吸收，而被吸收之有機溶 劑可進一步經蒸發濃縮層10濃縮而回收至該回收槽 50 ;再者，剩餘未被吸收且霧化之有機溶劑，再流經該 除霧層40 (為蜂窩型除霧器）時，即被進一步除霧攔 截，經淨化後之有機廢氣再流經淨化氣體出口 C而排 出，而回收之有機溶劑自該回收槽50流經一閥門52自 16 1373366 回收溶劑出口 D排出；經此有效將有機廢氣中之有機 溶劑利用本發明之有機廢氣濕式洗滌淨化回收裝置4 進行淨化回收。 以光電業之有機廢氣進行測試，其中該有機廢氣 300 NCMM、25°C 含 PGMEA 300 ppmv，先經一濃縮 轉輪70之濃縮處理，該濃縮轉輪係為一蜂巢狀轉輪濃 縮器（Concentrator;亦可為轉環式或流體化床式之濃 縮器）’該有機廢氣自一廢氣入口 E經由該濃縮轉輪淨 化後，其自一淨化出口 F流出之廢氣濃度為5 ppmv， 而吸附於轉輪之有機廢氣經由一脫附加熱單元75之脫 附’自該轉輪濃縮脫附之有機廢氣為20 NCMM、 55〜90°C含有機溶劑之濃度為4425ppmv，而於流經該有 機廢氣濕式洗滌淨化回收裝置4之後，其淨化後之有機 廢氣20 NCMM、1〇〜2〇〇C含有機溶劑之濃度為221 ppmv ’可有效淨化該PGEMa廢氣；而回收液係為18 Kgs/hr之有機溶液，水則為2〜gkgs/hr左右，含水率為 1〜30%wt ;故本發明中之有機廢氣濕式洗滌淨化回收 裝置被用來搭配淨化經濃縮之有機廢氣。 【圖式簡單說明】 第一圖係為本發明第一具體實施例之一種有機廢氣 濕式洗滌淨化回收裝置之示意圖。 第二圖係為本發明第二具體實施例之一種有機廢氣 澡式洗滌淨化回收裝置之示意圖。 17 1373366 第三圖係為本發明第三具體實施例之一種有機廢氣 濕式洗條淨化回收裝置之示意圖。 第四圖係為本發明第四具體實施例之一種有機廢氣 濕式洗蘇淨化回收裝置之示意圖。 【主要元件符號說明】 10 蒸發濃縮層 20 ' 21 吸收層 30、31 洗滌液喷灑裝置 35 冰水機或熱交換器 40 除霧層 50 回收槽 52 閥門 60 預熱器 70 濃縮轉輪 75 脫附加熱單元 A 廢氣入口 B 洗蘇液入口 C 淨化氣體出口 D 回收液出口 E 廢氣入口 F 淨化出口 I 吸附區 II 脫附區After the Toluene 1000 ppmv' is passed through the organic waste gas wet scrubber recovery unit 2, the purified organic waste gas 150 NCMM, the organic solvent concentration at 15 to 18 ° C is 1050 ppmv, most of which is Toluene, ie The DMF is effectively purified; the recovered liquid is 29 Kgs/hr of DMF and 0.1 to 0.5 Kgs/hr of Toluene, and the water is 0.5 to 2.0 Kgs/hr. Embodiment 3 An organic waste gas wet scrubbing purification and recovery device 3 according to a third embodiment of the present invention is shown in the third figure, wherein the device comprises: an evaporation concentration layer 10, two absorption layers 20, 21, and two washings. The liquid spray device, the 30, 31, a defogging layer 40, a recovery tank 50 and a preheater 60. The operation of purifying and recovering the organic waste gas of the organic waste gas wet scrubber purification and recovery device 3 is as follows: first, the organic waste gas is heated from a waste gas inlet A to the organic waste gas to be treated through a preheater 60 to a temperature of 50 to 85°. C' and the organic waste gas flows upward along the gas flow, and the washing liquid (water) enters the washing liquid spraying device 3 from a washing liquid inlet B or is sprayed through the washing liquid spraying device 31 via the recovered concentrated washing liquid. Next, when the washing liquid falls down from the sprinklers 30, 31, the absorption layer 2, 21 to the evaporation concentration layer 10 meets the organic exhaust gas, in the evaporation concentration layer 10 (which is formed by a honeycomb The ceramic filler material is composed of, the lower temperature (room temperature) washing water is effectively exchanged for the thermal energy of the organic waste gas to be "evaporated, and the concentration of the organic solvent in the washing water is concentrated, and the organic solvent is cooled" The organic waste gas is upward in the absorbing layer 2〇, 21 (the 14 1373366 absorbing layer is composed of a carbonized terracotta foam filling material), and contains an organic refrigerant and an organic waste series of washing and hiding. Shape: The organic solvent is condensed in the absorbing layer 2G, 21, and the condensed condensed tube is grown and absorbed, and is absorbed; the organic solvent can be further concentrated (but not necessarily limited) by the evaporation concentration layer 1G. Recycling to the time slot 5G; further, the remaining organic solvent that has not been absorbed and atomized, and then flowing through the defogging layer 4 (which is a honeycomb type mist eliminator), is subjected to step-by-step demisting interception. The purified organic waste gas is further purified by the gas outlet C and discharged. The recovered organic solvent is discharged from the recovery tank 5 through a valve 52 from the recovery solvent outlet D; thereby effectively utilizing the organic solvent in the organic waste gas The organic waste gas wet scrubber purification and recovery device 3 of the invention is purified and recovered. The organic waste gas is tested in the semiconductor industry, wherein the organic waste gas 50 NCMM, 25 ° C, 50% RH (dew point temperature is 18 tdp) containing MEA and DMSO exhaust gas 2000 Ppmv, after flowing through the organic waste gas wet scrubber purification and recovery device 3, the purified organic waste gas 5〇NCMM, the concentration of the organic solvent in 18~20 ° C is i00 ppmv, which can effectively purify the MEA and DMSO waste gas And the recovery liquid is 1 7 8 Kgs / hr of organic solution, water is about 2Kgs / hr, and the organic waste gas after treatment and purification can be further purified by incinerator, fluidized bed, zeolite runner and condensation. Example 4 An organic waste gas wet scrubbing 1373366 purification recovery device 4 according to a fourth embodiment of the present invention is as shown in the fourth figure, wherein the device comprises: an evaporation concentration layer 1 , an absorption layer 20 , a wash strip The liquid spraying device 30, an ice water machine 35, a defogging layer 40 and a recovery tank 50. The operation of the organic waste gas wet scrubbing purification and recovery device 4 for purifying and recovering organic waste gas is as follows: first, the organic waste gas is exhausted from an exhaust gas inlet A feeds the organic waste gas to be treated, and the organic waste gas flows upward along the air flow, and the washing liquid (water) is cooled and cooled from an ice water machine or ice water heat exchanger 35, and then sprayed into the sprayer 30. Next, when the ice-cold washing liquid falls down from the sprinkler 30, the organic waste gas is suddenly cooled by the absorption layer 20 to promote supersaturation of the exhaust gas, and then the evaporation concentrated layer 10 and the organic exhaust gas meet again. In the evaporation concentration layer 10 (which is composed of a hygroscopic ceramic ring filler), the low temperature (ice temperature) washing water is effectively exchanged for heat energy of the organic exhaust gas (80 ° C) to be evaporated. The concentration of the organic solvent in the washing liquid, and the cooled organic solvent is in the absorption layer 20 along with the organic exhaust gas (the absorbing layer is composed of "Φ1/2" saddle type ceramic filler), containing organic solvent And the organic exhaust gas of the washing liquid vapor is in a state of being saturated and supersaturated, so that the organic solvent is condensed by the washing liquid vapor in the absorbing layer 20, and the condensed tubergic tube is coated and absorbed, and the absorbed organic solvent can be further subjected to absorption. The evaporation concentration layer 10 is concentrated and recovered to the recovery tank 50. Further, the remaining organic solvent that has not been absorbed and atomized flows through the defogging layer 40 (which is a honeycomb type mist eliminator), and is further defogged. After interception, the purified organic waste gas is discharged through the purified gas outlet C, and the recovered organic solvent flows from the recovery tank 50 through a valve 52 from the solvent outlet D of 16 1373366; The organic solvent in the exhaust gas of the machine is purified and recovered by the organic waste gas wet scrubber purification and recovery device 4 of the present invention. The organic exhaust gas is tested by organic waste gas, 300 NCMM, 25°C containing PGMEA 300 ppmv, and concentrated by a concentration wheel 70, which is a honeycomb runner concentrator (Concentrator). It can also be a circulator of a rotary or fluidized bed type.] After the organic waste gas is purified from the exhaust gas inlet E through the concentrated rotary wheel, the concentration of the exhaust gas flowing from a purification outlet F is 5 ppmv, and is adsorbed to The organic waste gas of the runner is desorbed by a de-additional heat unit 75. The organic waste gas concentrated and desorbed from the runner is 20 NCMM, and the concentration of the organic solvent is 5525 ppm at 55 to 90 ° C, and flows through the organic waste gas. After the wet scrubber purification and recovery device 4, the purified organic waste gas 20 NCMM, 1〇~2〇〇C contains an organic solvent concentration of 221 ppmv' to effectively purify the PGEMa exhaust gas; and the recovered liquid system is 18 Kgs/hr. The organic solution has a water content of about 2 to gkgs/hr and a water content of 1 to 30% by weight. Therefore, the organic waste gas wet scrubbing purification and recovery device of the present invention is used to purify the concentrated organic waste gas. BRIEF DESCRIPTION OF THE DRAWINGS The first drawing is a schematic view of an organic waste gas wet scrubbing purification and recovery apparatus according to a first embodiment of the present invention. The second drawing is a schematic view of an organic waste gas type washing and purifying recovery apparatus according to a second embodiment of the present invention. 17 1373366 The third figure is a schematic diagram of an organic waste gas wet strip purification and recovery apparatus according to a third embodiment of the present invention. The fourth figure is a schematic view of an organic waste gas wet scrubbing purification and recovery apparatus according to a fourth embodiment of the present invention. [Main component symbol description] 10 Evaporation concentration layer 20 ' 21 Absorption layer 30, 31 Washing liquid spray device 35 Ice water machine or heat exchanger 40 Defogging layer 50 Recovery tank 52 Valve 60 Preheater 70 Concentrated runner 75 Additional heat unit A Exhaust gas inlet B Wash liquid inlet C Purified gas outlet D Recovery liquid outlet E Exhaust gas inlet F Purification outlet I Adsorption zone II Desorption zone
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