TWI370358B - Adaptive multivariate fault detection - Google Patents

Adaptive multivariate fault detection

Info

Publication number
TWI370358B
TWI370358B TW096116174A TW96116174A TWI370358B TW I370358 B TWI370358 B TW I370358B TW 096116174 A TW096116174 A TW 096116174A TW 96116174 A TW96116174 A TW 96116174A TW I370358 B TWI370358 B TW I370358B
Authority
TW
Taiwan
Prior art keywords
fault detection
adaptive multivariate
multivariate fault
adaptive
detection
Prior art date
Application number
TW096116174A
Other languages
Chinese (zh)
Other versions
TW200817891A (en
Inventor
Harvey, Jr
Alexander T Schwarm
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of TW200817891A publication Critical patent/TW200817891A/en
Application granted granted Critical
Publication of TWI370358B publication Critical patent/TWI370358B/en

Links

TW096116174A 2006-05-07 2007-05-07 Adaptive multivariate fault detection TWI370358B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US74664906P 2006-05-07 2006-05-07
US74664706P 2006-05-07 2006-05-07

Publications (2)

Publication Number Publication Date
TW200817891A TW200817891A (en) 2008-04-16
TWI370358B true TWI370358B (en) 2012-08-11

Family

ID=44767897

Family Applications (2)

Application Number Title Priority Date Filing Date
TW096116174A TWI370358B (en) 2006-05-07 2007-05-07 Adaptive multivariate fault detection
TW96116165A TW200811978A (en) 2006-05-07 2007-05-07 Ranged fault signatures for fault diagnosis

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW96116165A TW200811978A (en) 2006-05-07 2007-05-07 Ranged fault signatures for fault diagnosis

Country Status (1)

Country Link
TW (2) TWI370358B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9881398B2 (en) * 2012-11-06 2018-01-30 Applied Materials, Inc. Trend dynamic sensor imaging using contour maps to visualize multiple trend data sets in a single view
CN104797108B (en) * 2014-01-17 2017-09-22 神讯电脑(昆山)有限公司 Water door and the electronic installation with the water door
KR102468184B1 (en) * 2017-01-18 2022-11-17 에이에스엠엘 네델란즈 비.브이. Knowledge recommendation for defect review
TWI639925B (en) * 2017-08-28 2018-11-01 Powerchip Technology Corporation Statistical method from mutiple variables to calculate productivity, to obtain priority and to optimize arrangement

Also Published As

Publication number Publication date
TW200817891A (en) 2008-04-16
TW200811978A (en) 2008-03-01

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