TWI369755B - Soi wafer and manufacturing method thereof - Google Patents
Soi wafer and manufacturing method thereofInfo
- Publication number
- TWI369755B TWI369755B TW097107886A TW97107886A TWI369755B TW I369755 B TWI369755 B TW I369755B TW 097107886 A TW097107886 A TW 097107886A TW 97107886 A TW97107886 A TW 97107886A TW I369755 B TWI369755 B TW I369755B
- Authority
- TW
- Taiwan
- Prior art keywords
- manufacturing
- soi wafer
- soi
- wafer
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
- H01L21/26533—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors of electrically inactive species in silicon to make buried insulating layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/322—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections
- H01L21/3221—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections of silicon bodies, e.g. for gettering
- H01L21/3226—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections of silicon bodies, e.g. for gettering of silicon on insulator
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- High Energy & Nuclear Physics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Element Separation (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Recrystallisation Techniques (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007071800A JP5239183B2 (ja) | 2007-03-20 | 2007-03-20 | Soiウェーハ及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200845290A TW200845290A (en) | 2008-11-16 |
TWI369755B true TWI369755B (en) | 2012-08-01 |
Family
ID=39521858
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW097107886A TWI369755B (en) | 2007-03-20 | 2008-03-06 | Soi wafer and manufacturing method thereof |
Country Status (7)
Country | Link |
---|---|
US (2) | US20080233717A1 (zh) |
EP (1) | EP1973151B1 (zh) |
JP (1) | JP5239183B2 (zh) |
KR (1) | KR100969588B1 (zh) |
DE (1) | DE08003673T1 (zh) |
SG (1) | SG146532A1 (zh) |
TW (1) | TWI369755B (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5239183B2 (ja) * | 2007-03-20 | 2013-07-17 | 株式会社Sumco | Soiウェーハ及びその製造方法 |
JP2009054837A (ja) * | 2007-08-28 | 2009-03-12 | Sumco Corp | Simoxウェーハ製造方法およびsimoxウェーハ |
CN108987250B (zh) * | 2017-06-02 | 2021-08-17 | 上海新昇半导体科技有限公司 | 衬底及其制作方法 |
CN109148317B (zh) * | 2017-06-15 | 2022-05-10 | 沈阳硅基科技有限公司 | 用于激光裂片技术制备soi硅片的机台 |
CN115404551B (zh) * | 2022-09-21 | 2023-09-08 | 常州时创能源股份有限公司 | 一种用于消除快速热处理过程中晶硅片位错缺陷的方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3257580B2 (ja) * | 1994-03-10 | 2002-02-18 | キヤノン株式会社 | 半導体基板の作製方法 |
JPH10284431A (ja) * | 1997-04-11 | 1998-10-23 | Sharp Corp | Soi基板の製造方法 |
JP3697106B2 (ja) * | 1998-05-15 | 2005-09-21 | キヤノン株式会社 | 半導体基板の作製方法及び半導体薄膜の作製方法 |
EP2037009B1 (en) * | 1999-03-16 | 2013-07-31 | Shin-Etsu Handotai Co., Ltd. | Method for producing a bonded SOI wafer |
KR100766393B1 (ko) * | 2003-02-14 | 2007-10-11 | 주식회사 사무코 | 규소 웨이퍼의 제조방법 |
JP2004259779A (ja) * | 2003-02-24 | 2004-09-16 | Shin Etsu Handotai Co Ltd | ウェーハの評価方法 |
US6960781B2 (en) * | 2003-03-07 | 2005-11-01 | Amberwave Systems Corporation | Shallow trench isolation process |
FR2867607B1 (fr) * | 2004-03-10 | 2006-07-14 | Soitec Silicon On Insulator | Procede de fabrication d'un substrat pour la microelectronique, l'opto-electronique et l'optique avec limitaton des lignes de glissement et substrat correspondant |
JP4720164B2 (ja) * | 2004-12-02 | 2011-07-13 | 株式会社Sumco | Soiウェーハの製造方法 |
JP5119677B2 (ja) * | 2007-02-16 | 2013-01-16 | 株式会社Sumco | シリコンウェーハ及びその製造方法 |
JP5239183B2 (ja) * | 2007-03-20 | 2013-07-17 | 株式会社Sumco | Soiウェーハ及びその製造方法 |
-
2007
- 2007-03-20 JP JP2007071800A patent/JP5239183B2/ja active Active
-
2008
- 2008-02-22 US US12/035,588 patent/US20080233717A1/en not_active Abandoned
- 2008-02-25 SG SG200801541-4A patent/SG146532A1/en unknown
- 2008-02-28 DE DE08003673T patent/DE08003673T1/de active Pending
- 2008-02-28 EP EP08003673.4A patent/EP1973151B1/en active Active
- 2008-03-06 KR KR1020080020951A patent/KR100969588B1/ko active IP Right Grant
- 2008-03-06 TW TW097107886A patent/TWI369755B/zh active
-
2009
- 2009-08-14 US US12/541,661 patent/US20090305518A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
EP1973151A2 (en) | 2008-09-24 |
JP5239183B2 (ja) | 2013-07-17 |
TW200845290A (en) | 2008-11-16 |
JP2008235495A (ja) | 2008-10-02 |
EP1973151B1 (en) | 2015-07-15 |
DE08003673T1 (de) | 2009-05-20 |
SG146532A1 (en) | 2008-10-30 |
KR20080085693A (ko) | 2008-09-24 |
US20090305518A1 (en) | 2009-12-10 |
KR100969588B1 (ko) | 2010-07-12 |
US20080233717A1 (en) | 2008-09-25 |
EP1973151A3 (en) | 2009-09-16 |
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