1363.394" r , .1363.394" r , .
I 九、發明說明： 【發明所屬之技術領域】 本發明與一種全自動進出料裝置有關。更特定言之， 本發明係關於一種具晶粒分選功能之全自動進出料裝置。 【先前技術】 » 發光二極體（Llght emitting diode，LED)及半導體晶圓 、在切割成晶粒後，會使用晶粒分選功能的裝置，例如晶粒 分選機，進行晶粒測試與分選（bin)的動作。以LEd而 •通常針對主波長（peak length)、發光強度（MCD)、光通亮 (Lumens)、色溫（c〇l〇r temperature)、工作電壓（^)、反向 擊穿電壓（ImA)等幾個關鍵參數來進行測試與分選f，此步驟 在LED的晶片生產和封裝成本方面有重要的影響。而^導 體晶粒也可依照產品的需求進行晶粒測試與分選的動作。 在使用晶粒分選機處理置放於晶圓環中led晶粒的 分選過程中，晶粒分選機會自動地根據設定的測試標準把 # UD晶粒分裝在不同的分料盒(心如㈣内。而在分選過 耘中而要更換分料盒或晶圓環以繼續晶粒分選之步驟。 現今電子產業對於LED光性質一致性的要求越來越高，早 期能分32 bin的分選機已不敷使用，目前市面上的商 選機已有支援分72 bin甚至到150 bin的能力，以滿足業 界對於LED晶粒波長與亮度一致性的嚴格要求。以—台晶 步刀選機而δ ’除了需具備優良的視覺檢測與挑選排列系 統之外，因為其所分選的bin種類數目乡分選過程 使用之分料盒數目以及需進行的傳送動作亦多，故機台内 5 ^63394 * 4的存放機構容量、進出 ^ 送速度對機台的整體效能'《設計以及傳送機構之傳 【發明内容】 體效⑽有不可'忽略的影響。 本發明的主要目的在於提供—入 其具有晶粒分選功能的工作台:、：進出料裝置， 動更換曰曰粒分選所需的分料盒或晶圓環。乂驟中自 ‘ t發明之次-目的在於提供—種 用以郎省晶粒分選所雨Μ八1^ 動進出#裝置， • 本發明之又或晶31環之置換時間。 用以加快晶粒分選的時間。 出#裝置， 為達成痛目的’本發明揭露了 進出料裝置，藉由—工作 …式全自動 晶粒分選的步禪，而以进載一第一工作物件，並進行 機構載件， 台及載入器之間，藉由一機Ml置在工作 二工作物件位置的交換。工作物件及第 1:為“4盒，晶圓環，與分料盒及晶圓環以上三者其： 如上所述，本發明之架構中亦得設置 供機械手臂進行第一朴 、、’計σ，以提 緩衝及待機的_ η 牛或第二工作物件傳送時的一 ΐ=::進降低第-工作物件及第二工作物件位 、、1進而加快晶粒分選的時間。 為達成則揭目的，本發明 作台承載-第一工作物#，並進行晶 工 出料裝置，藉由-了種同步式自動化進 6 粒分選的步驟，而藉由一载入器存 以一取片媸描#山妨 第一工作物件’並 取片機構載出第二工作物件至— 及載入器之間，藉由一同步 在工作口 件及第-工你4“ 〇得迗機構同時進行第—工作物 弟一工作物件位置的交換。 ， 實施方式，一 々、 V傳送機構具有兩種 -樞轴，|έ由·^2帛-機械手f、—第二機械手臂及 臂中1=置於該第一機械手臂及該第二機械手 件使之進行位置的置換㈣及工作物 在兩相對的機件軌j ^， 機械手臂，分別連結 =物件’藉由該機件執道進行水平方向的 步傳送機構降低第一工作物件及第二工作物件位置 、人換之時間，進而加快晶粒分選的時間。 、本發明刖述之形式、目的、觀點、特徵及優點將隨著 以下較佳實施例中詳細的描述及其伴隨之圖式而愈見明 f八、’田節描述與圖式僅用以述明本發明。而本發明之範 嚀將由隨附之專利請求項來定義。 【實施方式】 本發明將針對較佳實施例及其觀點加以詳細敛述，而 此類教述為解釋本發明之結構及程序，係用以說明而非用 以限制本發明之申請專利範圍。因此，除說明書中之較佳 實施例之外，本發明亦可廣泛實行於其他實施例。 請參閱圖一 ’其為本發明實施例中一非同步式全自動 進出料裝置之内部機構俯視圖。如圖所示，本發明之全自 動進出料裝置100具有一架構平台1〇3及一外殼1〇5，在 1363.394 2殼105與架構平自1〇3之間建構一内部 供-密閉隔絕之工作空間，避免内部機構受到二= 影響。外殼105上可且右勣個、、壬叙, 卜界％境的 J具有數個活動門1〇7以方 進行部件替換或機台保養。 刼作人貝 .2月實施例中之全自動進出料裝置1()。内部包含一 载入e(l〇ader)109、—機械手臂lu以及一工作台 中’工作台113係用於存放第-工作物件，工作°台113 ^ 了-取置機具（piek and plaee maehine)U9，U 進 分選（binning)，取置機且〗〗q在並丄 日曰' 的方…-曰4 吸嘴以真空吸附晶粒 的方式’進饤晶粒分選。載入器1〇9係用於存放第二工 物件101 ’其具有複數個槽位、一取片機構125及一取放 位置127,該些槽位用於存放第二工作物件1〇1，藉由取 機構125從槽位載出第二工作物件1〇1至取放位置⑺， 而取放位置127係設置於取片機構125上。其中，取片機 構125係為夾取或托取方式的取片機構。須注意，根據設 計的方式不同，取放位置127可與取片機構125分離。= 機械手臂111係用於將工作台113上的第一工作物件傳送 至載入器109’或將載入器109的第二工作物件1〇1傳至 工作台113。藉由前文所述，以達到自動更換工作台ιΐ3 上的第一工作物件成第二工作物件1〇1，以利於工作台η] 進行晶粒分選的步驟。 工作台113包含了 一分料台115、一晶圓台117，分料 台115係放置分料盒131之位置，而晶圓台117為放 曰日 圓環133之位置，而取置機具119係對晶圓環133進行晶 8 1363.394 粒分選至分料盒131上。須 二 件，依照操作人員的不同需^可;^所述的第一工作物 盒⑶，與晶圓環133及:士可作為晶圓環133，分料 ，、日日_椒133及分料盒131以 所电洛λ通吊疋由一擴張環與一托盤（adapter: J二！ 在LED製程中的擴晶步驟，將- 會^疋並：展’使膠膜上點著的晶粒與晶粒之間的間距 受大，时便晶粒分選步驟的進行I. Description of the invention: [Technical field to which the invention pertains] The present invention relates to a fully automatic feeding and discharging device. More specifically, the present invention relates to a fully automatic feed and discharge device having a grain sorting function. [Prior Art] » Llght emitting diode (LED) and semiconductor wafers, after cutting into crystal grains, using a grain sorting function, such as a grain sorter, for grain testing and The action of sorting (bin). In LEd and • usually for the main wavelength (peak length), luminous intensity (MCD), Lumens, color temperature (c〇l〇r temperature), operating voltage (^), reverse breakdown voltage (ImA) Several key parameters are required for testing and sorting f. This step has an important impact on the wafer production and packaging costs of the LED. The ^ body grain can also be used for grain testing and sorting according to the requirements of the product. In the sorting process of processing the led die placed in the wafer ring using the die sorter, the die sorting machine automatically dispenses the #UD die into different sorting boxes according to the set test standard ( The heart is as in (4). In the sorting process, the sorting box or wafer ring is replaced to continue the step of grain sorting. Nowadays, the electronic industry has higher and higher requirements for the consistency of LED light properties. The 32 bin sorting machine is no longer usable. Currently, the commercial sorting machine on the market has the ability to support 72 bins or even 150 bins to meet the stringent requirements of the industry for the consistency of LED die wavelength and brightness. In addition to the excellent visual inspection and sorting system, the number of bins used in the township sorting process and the number of transfer boxes to be used are also many. Therefore, the storage capacity of 5 ^ 63394 * 4 in the machine, the overall efficiency of the incoming and outgoing speeds to the machine's "Design and transmission mechanism" [invention] Physical effects (10) have a non-negligible effect. The main The purpose is to provide Workbench for grain sorting function:: Inlet and discharge device, dynamic replacement of the sorting box or wafer ring required for particle sorting. The second step in the process of the invention is to provide Lang's grain sorting station, rain Μ81^ moving in and out #装置, • The replacement time of the invention or the crystal 31 ring. The time for accelerating the grain sorting. The invention discloses a feeding and discharging device, by loading a working piece of automatic grain sorting step by step, and loading a first working object, and performing a mechanism between the workpiece, the table and the loader, by means of a The machine M1 is placed in the exchange of the working object position. The working object and the first: "4 boxes, wafer ring, and the distribution box and the wafer ring are the same: as described above, the structure of the present invention is also It is necessary to set a ΐ 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛 牛And 1 further accelerate the time of grain sorting. In order to achieve the goal, the present invention is carried out by the station - the first work物#, and the crystallizer discharge device, by means of a synchronous automatic process into the 6-segment sorting process, and by a loader to save a piece of snippet #山妨first work object' The taking mechanism carries the second working object to and between the loader, and the position of the working object is exchanged at the same time by the synchronization of the working mouth piece and the fourth working time. The embodiment, the one-way, V-transport mechanism has two kinds of - pivot, | έ by ^ 2 帛 - manipulator f, - the second robot arm and the arm 1 = placed in the first robot arm and the second The mechanical component makes the position replacement (4) and the work object in the two opposite mechanical rails j ^, the mechanical arm, respectively, the connection = the object 'the horizontal movement step by the mechanism to reduce the first working object And the location of the second work object, the time of the person to change, thereby speeding up the time of grain sorting. The form, the object, the viewpoint, the features and the advantages of the present invention will become more apparent as the following detailed description of the preferred embodiments and the accompanying drawings thereof. The invention is described. The scope of the invention will be defined by the accompanying patent claims. The present invention will be described in detail with reference to the preferred embodiments and the accompanying drawings, which are intended to illustrate and not to limit the scope of the invention. Therefore, the present invention may be embodied in other embodiments in addition to the preferred embodiments in the specification. Please refer to FIG. 1 ' which is a top view of the internal mechanism of a non-synchronous automatic feeding and discharging device in the embodiment of the present invention. As shown in the figure, the fully automatic feeding and discharging device 100 of the present invention has an architecture platform 1〇3 and a casing 1〇5, and an internal supply-sealed isolation is constructed between the 1363.394 2 casing 105 and the structure level from 1〇3. Work space to avoid internal agencies being affected by the second. On the outer casing 105, there is a right and a right side, and the J of the boundary area has a plurality of movable doors 1 to 7 for component replacement or machine maintenance.刼作人贝. The fully automatic feeding and discharging device 1() in the embodiment of February. The inside contains a loading e (l〇ader) 109, a mechanical arm lu, and a workbench 'workbench 113 is used to store the first working object, work ° 113 ^ - pick up the machine (piek and plaee maehine) U9, U is sorting (binning), taking the machine and 〗 〖q in the side of the 曰 曰 曰 曰 曰 曰 曰 曰 真空 真空 真空 真空 真空 真空 真空 真空 真空The loader 1〇9 is used for storing the second workpiece 101', which has a plurality of slots, a pick-up mechanism 125 and a pick-and-place position 127 for storing the second work object 1〇1, The pick-up position 127 is disposed on the pick-up mechanism 125 by the pick-up mechanism 125 carrying the second work object 1〇1 from the slot to the pick-and-place position (7). Among them, the take-up mechanism 125 is a pick-up mechanism for picking up or picking up. It should be noted that the pick and place position 127 can be separated from the pick-up mechanism 125 depending on the manner in which it is designed. = The robot arm 111 is used to transfer the first work item on the table 113 to the loader 109' or to transfer the second work item 1〇1 of the loader 109 to the table 113. As described above, the first work object on the workbench ιΐ3 is automatically replaced into a second work object 1〇1 to facilitate the step of grain sorting by the workbench η]. The table 113 includes a loading table 115 and a wafer table 117. The materializing table 115 is placed at the position of the dispensing box 131, and the wafer table 117 is at the position of the day ring 133, and the tool 119 is taken. The wafer ring 133 is subjected to grain 8 1363.394 particle sorting onto the dispensing box 131. Two pieces, according to the different needs of the operator; ^ the first work box (3), and the wafer ring 133 and: can be used as wafer ring 133, material, day _ pepper 133 and points The box 131 is connected to the tray by an expansion ring and a tray (adapter: J II! The crystal expansion step in the LED process, will - 疋 展 展 展 展 展 展 使 使 使 使 使 使 使The spacing between the grains and the grains is large, and the grain sorting step is performed.
133以安放於晶圓"η上。本發明中，曰 係由取置機具m來執行，取置:選之動作 圓台m上晶圓環特定會測’並挑選晶 在分料台U5上分料〜31中：i曰粒並將其移動放置 為晶粒分選的流程。中™立置處，此步驟即 載入器⑽除了具有複數個槽位、取片機構125及取 放位置U7夕卜更包含升降機構121及送料機構⑵。送 料機構123係財平移動方式使該複數槽位之—對齊取片 機構125 ’以方便取片機構125載出第二工作物件1(M。先 參照至圖二，其為本發明實施例中送料機構123之結構 圖。在圖-中的载入器109的複數個槽位係設置在送；機 構123上，本發明實施例中之送料機構123的複數個槽位 係用以存放第二I作物# 1G1，並依操作人員所設定之位 置將其進行排序與存取。須注意，依照操作人員的不同需 ''第一工作物件1 〇 1可作為晶圓環，分料盒，與晶圓環 及刀料盒以上二者其中之一。如圖二所示，送料機構 係由數個片匣201所組成。每個片匣2〇1中都具有一定數 9 1363394. 的槽位2G3以容納第二卫作物件1()卜如本發明實施例 中所述，其中的參數係僅作為一說明，而非用以限定本發 明。在本發明實施例中，送料機構123 #含有六组片匿 2〇1，每組片E2〇1設置有二十五個槽位，故總共可存放一 百五十個工作物件。在實際的操作中，片g 2〇ι與盆内部 2槽位203並不限定在特定的數目。就㈣晶粒的分選而 。由於分選的種類數目眾多，所需的各種第二工作物件 ⑻亦多’故需設置多組片Μ 2〇1與槽位2〇3才能滿足晶 =分選步驟之需求。在圖一中，升降機構ΐ2ι用於對整個 2機構125作垂直方向的升降，以讓取片機構125處於 、'的兩度來進行第二工作物件1〇1的載入或載出。 須注意’複數個槽位並不一定要設置在送料機構⑵ 该些槽位可以固定方式存在，而將取片機構US設置 在送料機構123上，使取片撼描】？《叮 ， 動並對齊該複數槽位1構25可以水平移動方式移 請參照圖一’機械手臂111的功能在於傳送第一或第 =工作物件’以在送料機構123上的第二工作物件101而 ^1藉由取片機構125載出至取放位置127，機械手臂 才能將取放位置127的第二工作物件傳送至工作Α :專 13::九113上的第一工作物㈣^ ==127之後’再藉由取片機構125載入取放 置127上的第-工作物件至送料機構123上 位之一。須、注意，取片機構125 ^ 々π此直一項碼機 (Wode reader) i29 ’可在第一工作物载入或第二工作物件 係為:=Γ其上的條碼以作識別。機械手臂⑴ 數個位置移：：:第手f(如圖中的弧形箭頭所示)’以在 送。其中，機械手i工作物件及第二工作物件進行傳 ^ i ^11係為夾取機制的機械手臂或是利 /、二吸取方式的機械手臂。 ιοί 2照則文所述，圖―的第—玉作物件及第二工作物件 實作人員的不同需求而作為不同的物件。在一 第，第一工作物件代表分料台Π5的分料盒131時， 件1G1只作為分料盒。簡言之，當工作台⑴ 的八^刀選時’全自動進出料裝置100係針對分料台115 以丰现U1進行更換。而晶圓台117上的晶圓環133係 一八方式進行替換。在本實施例，在工作台113中，某 手臂么的阳粒'刀選已經完成’例如第一分類（bin ，機械 13m· 1需移動至分料台115 ’以將第—工作物件（分料盒 ⑵）傳运至取放位置127，再由取片機構125將取放位置 上的第一工作物件（分料盒丨31)傳送至送料機構123的 _個槽位之一中。送料機構丨23係透過機構方式帶動來 軸水平方向的移動，即圖一所示之雙箭頭方向，使 送料機構123左右兩排的片ϋ對齊取片機構125，以利於 第:工作物件（分料盒131)之載入或第二工作物件丨〇1(分 2風）載出。當第二工作物件101(分料盒）自複數個槽位之 中載出時’取片機構丨25係將第二工作物件i^(分料盒） 八動至取放位置127，置於該處的第二工作物件1〇1 (分料 盒）會藉由機械手臂111傳送至分料台115,以讓工作台U3 1363,394 ^一丁第:分類⑽2)的晶粒分選。依照前文所述，藉由對 =工作物件（分料盒131)及第二卫作物件HM(分料盒）的 更換，工作台U3即可進行其他分類的晶粒分選。就此實 2例而言，機械手臂⑴共有二個之傳送定點，分別為取 放位置127與分料台115。 另實細例中，第一工作物件代表晶圓台^ ^ 7上 圓環⑴時，第二工作物件101只作為晶圓環。而分料台 ⑴的分料盒131係以手動方式進行替換。在工作台⑴ =二作物件(晶圓環133)上的晶粒已分選完成，機械 133)傳、：：：至晶圓台m，以將第-工作物件(晶圓環 )傳运至取放位f 127，再由取片機構125將取放位置 上的第一工作物件（晶圓環叫傳送至送料機構US的 稷數個槽位之一申。备筮__ 士 構㈣載出時^機一構m〇1(晶圓環）自送料機 係將第二工作物件101(晶 囫衣)移動至取放位置127 ’置於該處的第二工作物件 ι〇ι(晶圓環）會藉由機械手臂ln傳送至晶圓台117 ,以讓 :::113進行晶粒分選的步驟。就此實施例而言，機械 圓台117共有三個之傳送定點，分別為取放位1 127與晶 另實施例中，第一工作物件代表晶圓台ιΐ7上的晶 =33及分料台115的分料盒131時第二工作物件ι〇ι 二曰_及分料盒。而在進行第—工作物件（晶圓環⑴ 盒！31)與第二工作物件1〇1(晶圓環或分料盒)的傳 适万式’與前文相同，在此不再贅述。此時機械手臂⑴ 12 會有三個之傳送定點，分別為取放 以及晶圓台117。 置127與分料台115 圖三為本發明一實施例中 作物件置換的步驟流程圖，丁工作物件與第二工 法的步驟流程圖。請參^式全自動進出料之方 .—，機械手臂轉 -位置處取起第1作物件。於=動移動至卫作台⑴ 該第—工作物件傳送至取片機構^2;機械手臂⑴會將 放置。接下來的步驟S3中， ㈣放位置127處 127上的第_ ^機構⑵會將取放位置 :。第-工作的複㈣位之-:從送料機構123的複數個槽位 件至其上的取放位置12史載出第一工作物 取放位置U7上的第二工作:f。最後，於步驟S5中’ 傳送至工作台113放·;物件會由機械手臂111取起並 置晶等工作台113上的曰步驟S6中定位、楝取與 例中之所押心 I曰粒刀選之程序。須注意，本實施 述，第一明、第一工作物件與第二工作物件，即如前文所 工作你4 =作物件為分料台115上的分料盒131時，第二 圓環1二：為分料盒；第一工作物件為晶圓台117上的晶 八料△時’第二工作物件需為晶圓環；第一工作物件為 :，：115上的分料盒131及晶圓台117上的晶圓環133 ，第一工作物件需為分料盒及晶圓環。 讲番月參閱圖一 ’在本發明另一實施例中，全自動進出料 名置⑽中更包含一緩衝台（buffer)135结構。在此實施例 13 1363394 中，緩衝台135係提供第一工作物件 -待機位置，以加速n物件第二作物件⑻ 詈換盥值详,^ τ ,, 弟—工作物件101的 置換與傳达，純m13晶粒分選㈣作 :進出料裝置100中並未設置有緩衝㈣5部位，= 台1 =進仃晶粒分選動作的完成後，全自動進 必須先將工作台113上的第-工作物件載入送料133 is placed on the wafer " η. In the present invention, the lanthanum system is executed by the pick-up tool m, and the pick-up: selects the wafer ring on the action round table m to be specifically measured and selects the crystal on the distribution table U5 to divide the material into the ~31: i 曰 并Move it to the process of grain sorting. In the middle of the TM stand, the loader (10) further includes a lifting mechanism 121 and a feeding mechanism (2) in addition to a plurality of slots, the taking mechanism 125 and the picking position U7. The feeding mechanism 123 is configured to adjust the plurality of slots to align the take-up mechanism 125' to facilitate the take-up mechanism 125 to carry the second work object 1 (M. Referring first to FIG. 2, which is an embodiment of the present invention The structure of the feeding mechanism 123. The plurality of slots of the loader 109 in the figure are disposed on the sending mechanism; the mechanism 123 is used to store the second slot of the feeding mechanism 123 in the embodiment of the present invention. I crop # 1G1, and sort and access according to the position set by the operator. It should be noted that according to the different needs of the operator, 'the first working object 1 〇1 can be used as the wafer ring, the distribution box, and One of the wafer ring and the knife cartridge. As shown in Figure 2, the feeding mechanism is composed of a plurality of cassettes 201. Each of the cassettes 2〇1 has a certain number of slots of 9 1363394. 2G3 is used to accommodate the second crop member 1 () as described in the embodiment of the present invention, wherein the parameters are only for illustrative purposes, and are not intended to limit the present invention. In the embodiment of the present invention, the feeding mechanism 123 # contains Six groups of 2,1, and each set of E2〇1 has twenty-five slots, so the total It can store one hundred and fifty working items. In actual operation, the piece g 2〇ι and the inner 2 slots 203 are not limited to a specific number. (4) Sorting of crystal grains. There are a large number of various second working objects (8) required. Therefore, it is necessary to set a plurality of sets of sheets Μ 2〇1 and slots 2〇3 to meet the requirements of the crystal=sorting step. In Fig. 1, the lifting mechanism ΐ2ι The vertical movement of the entire two mechanisms 125 is performed so that the pick-up mechanism 125 is at two degrees of 'loading or carrying out the second work object 1〇1. It should be noted that 'a plurality of slots are not necessarily To be set in the feeding mechanism (2), the slots can exist in a fixed manner, and the take-up mechanism US is set on the feeding mechanism 123 to make the filming] "叮, moving and aligning the plurality of slots 1 can be horizontal Referring to FIG. 1 'the function of the robot arm 111 is to transfer the first or the first work object' to the second work object 101 on the feeding mechanism 123 and to be carried out to the pick-and-place position by the pick-up mechanism 125 127, the robot arm can take the second working object of the pick and place position 127 Transfer to the work Α: Special 13:: The first work object on the nine 113 (four) ^ == 127 and then 'loaded by the pick-up mechanism 125 to take the first work object on the placement 127 to one of the upper positions of the feed mechanism 123. It is necessary to note that the film taking mechanism 125 ^ 々 π The Wode reader i29 ' can be loaded in the first work object or the second work object is: = 条 the bar code on it for identification. Arm (1) Several positions are moved::: The first hand f (shown by the curved arrow in the figure) is sent. Among them, the robot i work object and the second work object are transmitted. The robotic arm of the mechanism or the robotic arm of the second and second suction methods. Ιοί 2 As stated in the article, the first------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------ In the first, when the first working object represents the dispensing box 131 of the dispensing table 5, the piece 1G1 serves only as a dispensing box. In short, when the table (1) is selected, the fully automatic feeding and discharging device 100 is replaced with the U1 for the dispensing table 115. The wafer ring 133 on the wafer table 117 is replaced by a one-eighth method. In the present embodiment, in the table 113, the positive grain of a certain arm has been completed, for example, the first classification (bin, mechanical 13m·1 needs to be moved to the dispensing table 115' to be the first working object (minute The cartridge (2) is transported to the pick-and-place position 127, and the pick-up mechanism 125 transports the first work object (the dispensing cassette 丨 31) in the pick-and-place position to one of the slots of the feeding mechanism 123. The mechanism 丨23 is driven by the mechanism to move the horizontal direction of the shaft, that is, the direction of the double arrow shown in FIG. 1, so that the left and right rows of the feeding mechanism 123 are aligned with the take-up mechanism 125 to facilitate the work object (the material) The loading of the box 131) or the second working object 丨〇1 (divided into 2 winds) is carried out. When the second working object 101 (separating box) is carried out from a plurality of slots, the picking mechanism 丨 25 series The second working object i^ (separating box) is moved to the picking and placing position 127, and the second working object 1〇1 (separating box) placed there is transferred to the dispensing table 115 by the robot arm 111. To sort the grains of the workbench U3 1363, 394 ^ Dingdi: Category (10) 2). According to the foregoing, by substituting the = work item (separation box 131) and the second guard item HM (separation box), the table U3 can perform other sorted grain sorting. In this case, the robot arm (1) has two transfer points, which are the pick-up position 127 and the sorting table 115. In another example, when the first work object represents the ring (1) on the wafer table, the second work object 101 serves only as a wafer ring. The dispensing box 131 of the dispensing table (1) is manually replaced. The die on the workbench (1) = two crop parts (wafer ring 133) has been sorted, mechanical 133), ::: to the wafer table m to transport the first working object (wafer ring) To the pick-and-place position f 127, the pick-up mechanism 125 will transfer the first work object at the pick-and-place position (the wafer ring is called to one of the plurality of slots of the feeding mechanism US. 筮__士士(4) At the time of loading, the machine is configured to move the second workpiece 101 (the wafer) to the pick-and-place position 127. The second workpiece ι〇ι is placed there. The wafer ring) is transferred to the wafer table 117 by the robot arm ln to allow the:::113 to perform the step of grain sorting. For this embodiment, the mechanical round table 117 has three transfer fixed points, respectively In the embodiment of the pick and place position 1 127 and the crystal, the first working object represents the crystal=33 on the wafer table ι7 and the dispensing box 131 of the dispensing table 115. The second working object ι〇ι 二曰_ and the material In the case of the first working object (wafer ring (1) box! 31) and the second working object 1 〇 1 (wafer ring or dispensing box), the same applies to the previous text, and the details are not described herein. .this There are three transfer points for the robot arm (1) 12, which are the pick-and-place and the wafer table 117. The 127 and the sub-distribution table 115. Figure 3 is a flow chart of the steps of crop replacement in an embodiment of the present invention. Step-by-step flow chart of the second method. Please refer to the method of fully automatic feeding and discharging.—The first crop part is taken from the position of the mechanical arm. The moving part is moved to the table (1). The mechanism arm ^2; the robot arm (1) will be placed. In the next step S3, (4) the position 127 at position 127 on the 127th mechanism (2) will take the position: the first - the work of the complex (four) -: from The pick-and-place position 12 of the plurality of slots of the feeding mechanism 123 to the pick-and-place position 12 carries the second work of the first workpiece pick-and-place position U7: f. Finally, in step S5, 'transfer to the table 113. The object will be picked up by the robot arm 111 and placed on the table 113, etc., in the step S6, the process of picking and picking up the core I picking knife in the example. It should be noted that this embodiment, the first , the first work item and the second work item, that is, as before, you 4 = crop parts are divided When the dispensing box 131 is on the 115, the second ring 1 2 is a dispensing box; when the first working object is the crystal material Δ on the wafer table 117, the second working object needs to be a wafer ring; The working object is:, the dispensing box 131 on the 115 and the wafer ring 133 on the wafer table 117. The first working object needs to be a dispensing box and a wafer ring. In one embodiment, the fully automatic feed and discharge material name (10) further includes a buffer 135 structure. In this embodiment 13 1363394, the buffer table 135 provides a first work object-standby position to accelerate the n object. Two crop parts (8) 詈 盥 详 , ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ 工作 工作 工作 工作 工作 工作 工作 工作 工作 工作 工作 工作 工作 工作 工作 工作 工作 工作 工作 工作 工作 工作 工作 工作 工作 工作 工作 工作 工作 工作 工作 工作 工作 工作 工作 工作= After the completion of the grain sorting operation, the fully automatic feed must first load the first working object on the table 113 into the feed.
=槽送料機構123的複數個槽位之 載出第一工作物件101至工作台113來 A =:在;述” ΐ流程將耗費不少的傳送時間二 作。113在進仃晶粒分選的動作時，要花費冗長 時間’等候第一工作物件及第二工作物件i 若 Π衝台135結構，將縮短工作台⑴在進行晶粒‘ 時，第-工作物件及第二工作物件101置換的等待時間。 在圖一中，緩衝台135配合全自動進出料裝置100的 其他結構’有兩種實施方式。圖四為使用緩衝台進行第一 工作物件與第二卫作物件置換的-實施例之步驟流程圖， 即非同步式全自動進出料之方法的步驟流程圖。請參閱圖 四並同時對照圖…首先，於圖四的步驟S"，機械手臂 ill會作樞軸轉動至取放位置127處取起第二工作物件， 在此之前，取放位置127係將複數個槽位之一中的第二工 作物件101傳送至取放位i 127。於步驟S12卜機械手 臂111會將第二工作物件101傳送至緩衝台135上放置。 接著，於步驟S13中，機械手臂U1轉動至工作台^上 方將其上的第一工作物件取起，並於其後的步驟S14中將 14 丄30功4 晋乍° 113上的第—工作物件傳送至取放位置127上放 =之後，於步驟S15，取片機構125會將取放位置127 作物件載人送料機構123中特定的槽位中放置。 A ^ S15進仃的同時’機械手臂111會繼續轉動至缓衝 “二取起其上的第二工作物件(步驟S16)並於步驟S17 中將其傳送至工作台113。最後，於步驟$18巾，工作台 =3會進行定位、棟取與置晶等程序以繼續晶粒分選動 ^ =步驟流程結束後，即進行完某—分類的晶粒分選 前文所述圖四的步驟’以進行另—分類的晶粒 :選及其先前的第一工作物件與第二工作物件置換等動 圖五為使用緩衝台進行第—工作物件與第二工作物件 置，的另-實施例的步驟流程圖。請參閱圖五並同時對照 2 首先’於圖五的步驟S21，機械手臂lu會作拖抽 轉動至工作台113位置處取起其上的第-工作物件。於步 驟似中，機械手臂⑴會將第一工作物件傳送至緩衝台 135上放置。接著，於步驟⑵巾，機械手臂⑴將第一 工^物件置放於緩衝台135後，會㈣至取放位置127處 將其上的第二工作物件1〇1取起，並於其後的步驟S24中 將第二工作物件傳送至工作台113上放置。在此之前，取 放位置127係將複數個槽位之-中的第二工作物件101傳 ^取放位置127。之後’於步驟S25，工作台113會進 仃疋位、棟取與置晶等程序以繼續晶粒的分選動作。在步 驟S25進行的同時，機械手臂111會繼續轉動至緩衝台135 15 1363394. 處取起其上的第—王作物件（㈣ 其傳送至取片機構125上的取放位置)127於t驟，中將 S28中，取片機構125會將第—工作 取後，於步驟 中特定的槽位中放置。即進行 f科機構⑵ 再藉由前文所述圖五的轉，=行二=，， 及其先前的第一工作物件盘第刀類的曰曰粒分選 U 一 仟”第—工作物件置換等動作。 月'J文所述，圖一中使用緩衝台135 件與第二工作物件置換的兩種 工作物 c n ^ . 也方式，即在圖四的步驟 刖，與在圖五的步驟S23前 ⑵將在複數個槽位之—中的第」取片機構 放位罟扪弟一工作物件1〇1傳送至取 選期門^ 此一步驟’可以在工作台113進行晶粒分 選時進二也可以在工作台113完成某一分類的晶粒分= a plurality of slots of the slot feeding mechanism 123 carry the first working object 101 to the table 113 to A =: "the process" will take a lot of transmission time. 113 in the grain selection During the action, it takes a long time to wait for the first work object and the second work object i. If the punch table 135 structure is shortened, the work table (1) will be shortened when the die is performed, and the first work object and the second work object 101 are replaced. Waiting time. In Figure 1, the buffer table 135 cooperates with other structures of the automatic feeding and discharging device 100. There are two embodiments. Figure 4 shows the use of the buffer table for the replacement of the first working object and the second sanitary piece. Step flow chart of the example, that is, the flow chart of the method of the asynchronous automatic feeding and discharging method. Please refer to FIG. 4 and simultaneously compare the figure... First, in the step S" of FIG. 4, the mechanical arm ill will pivot to take The second working object is taken up at the vacating position 127. Before this, the picking and placing position 127 transfers the second working object 101 of one of the plurality of slots to the pick-and-place position i 127. In step S12, the robot arm 111 will The second work item 101 It is sent to the buffer table 135. Next, in step S13, the robot arm U1 is rotated to the top of the table ^ to pick up the first work object thereon, and in the subsequent step S14, 14 丄 30 work 4 After the first work item on the 113 113 is transferred to the pick-and-place position 127, the pick-up mechanism 125 places the pick-and-place position 127 in a specific slot in the crop-feeding mechanism 123. ^ While the S15 is being inserted, the 'mechanical arm 111 will continue to rotate to the buffer 2' to take the second work item thereon (step S16) and transfer it to the table 113 in step S17. Finally, in step $18, the workbench=3 will perform the procedures of positioning, building and crystallization to continue the grain sorting. ^=Step flow is completed, that is, the sorting of the grain sorting is performed as described above. Figure 4 is a step of 'division of another type of grain: selecting and replacing the previous first work object and the second work object, etc. FIG. 5 is the use of the buffer table for the first work object and the second work object. A flow chart of the steps of the other embodiment. Referring to Figure 5 and simultaneously comparing 2 first. In step S21 of Figure 5, the robot arm lu will be towed to the position of the table 113 to pick up the first working object. In the step, the robot arm (1) will transfer the first work item to the buffer table 135. Next, in step (2), after the robot arm (1) places the first object on the buffer table 135, the second work object 1〇1 on the pick-up position 127 is picked up, and thereafter In step S24, the second work item is transferred to the work table 113 for placement. Prior to this, the pick-up position 127 transfers the second work object 101 of the plurality of slots to the pick-and-place position 127. Thereafter, in step S25, the stage 113 will perform a program such as clamping, stacking, and crystallizing to continue the sorting operation of the die. At the same time as step S25, the robot arm 111 continues to rotate to the buffer table 135 15 1363394. The first king crop member ((4) is transferred to the pick and place position on the pick-up mechanism 125) In the middle of the S28, the taking mechanism 125 will take the first work and place it in a specific slot in the step. That is, the f department (2) is rotated by the above-mentioned figure 5, = line 2 =, and its previous first work object disk type knives sorting U 仟 "the first work item replacement Wait for the action. As described in the 'J" article, in Figure 1, the two working objects cn ^ are replaced by the buffer table 135 and the second work object. Also, in the step of Figure 4, and in step S23 of Figure 5. The first (2) will transfer the first picking mechanism in the plurality of slots to the working object 1〇1 to the picking period door. This step 'can be used for grain sorting at the workbench 113. Into the second can also complete a certain classification of the crystal grain at the workbench 113
k等進订。第一工作物件及第_ 丁从仏/tL 文所述相同。當第3錢作:^ 1G1的種類與前 件為刀枓台115上的分料盒131 s —工作物件101為分料盒’而晶圓台117上的晶圓 =33係以手動方式進行替換，當工作台ιι3完成某一分 員的晶粒分選，第-工作物件（分料盒i3i)及第二工作物件 =(分料盒）’將依照前文所述方式實施，而機械手臂iu 三個之傳敎點，分別為取放位置i27、分料台ιΐ5 緩衝口 135，同樣地，當第_工作物件為晶圓台j i 7上 的晶圓環U3時’第二工作物件1〇1為晶圓環，而分料台 上的分料盒131係以手動方式進行替換，當工作台U3 二成某一分類的晶粒分選，第一工作物件（晶圓環133)及第 二工作物件101(晶圓環），將依照前文所述方式實施，而機 16 1363394 曰：ί 1、有r個之傳送定點，分別為取放位置127、 I的二:J及緩衝台135;在第-工作物件為分料台115 刀r瓜131及晶圓台m上的晶圓環133時，第二工 作物件101為分料各乃a 類的曰敍八：： 哀’當工作台113完成某-分 及第Β-曰第一工作物件（分料盒131或晶圓環133) 工“件⑻（分料盒或晶圓環），將依照前文所述方 機械.手臂1U共有四個之傳送定點，分別為取 、 77料台U 5、晶圓台117及緩衝台135 〇 以上所述之實施例，為本發明中以非同步方式進行 2作物件及第二工作物件傳送或置換之全自動進出料架 〇方去。非同步者’係指第一工作物件及第二工作物件 在不同時間内分別進行移動以完成位置 發明亦提出了以同步傳送方式來進行第一工作物^第本 工作物件的移動置換之全自動進出料架構與方法。同 达之優點為兩欲置換位置之第一工作物件及第二工作物件 以-同步傳送機構進行傳送及位置的置換，大幅減 工作物件及第一工作物件移動所需之時間。 印參閱圖六，其為本發明實施例中同步式全自動進出 料農置之結構方塊圖。如圖所示’同步式全自動進出料褒 戶由一載入器109、一工作台113及同步傳送機構6二 “冓成。由於本實施例中’載入器及工作台 :圖圖:，栽入器™台叫目同，故在此沿用：： ^圖破。再者’載入器109及工作台113的功用已於前文 中敘明，故不再贅述。而同步傳送機構615係對載入器忉9 17 S取放位置上的第二工作物件及工作台113的第一工作物 -進行同步式的傳送及位置的置換，即同步傳送機構615 ^時進行下列兩動作，一為將載入器109的取放位置上的 一一工作物件傳送至工作台113，二為將工作台ι13的第 作物件傳送至載入器1〇9的取放位置。要達此目的， ^步2送機構615通常需要同時取放第一及第二工作物 '、中，同步傳送機構615為夾取機制的同步傳送機構 空吸附方式的同步傳送機構。須注意，在此的第一及 相；工中所述的第一及第二工作物件的種類 工乍物件為分料台Η5上的分料盒時，第二 =物件為分料盒，而晶圓台U7上的晶圓環係以手動方 I寺，：替換，當第一工作物件為晶圓台117 i的晶圓環 —工作物件為晶圓環，而分料台115上的分料各係 分钭式進行替換；當第-工作物件為分料台⑴：的 It。81台117上的晶圓環時，第二工作物件為分料 皿及日日圓環。以下骑丨、，w / 將砰細的結構圖來描述同步傳送機構 不冋的實施方式。 气傅 :視圖圖:圖為七圖:中同门步傳送機一 第二7手; ^ 及—樞軸703，第一機械手臂701及第 :機械手臂705係以拖軸7〇3為中心作水平轉動 ： >照圖六、圖一及圖七，第一 月寺 的取放位置m上，而第一 Π:701置於載入器1〇9 上，藉由樞軸703轉動ί—:::臂705置於工作台113 勒第一機械手臂701及第二機械手臂 1363394. 7〇5,即如圖七中的弧形箭頭的 分別取起工作台】n沾每 沒枣十轉動，以 二 13的第一工作物件及取放位置127的第 一 牛，使之進行位置的置換。 二八為圖六中同步傳送機構615的另—實施例的機構 為二Γ、七的實施例中，同步傳送機構需要以樞轴期 705，^/千轉動第一機械手f 7〇1及第二機械手臂 X γ二用：圖一的全自動進出料裝置，必須有足夠的 ，面空間、:才能使同步傳送機構動作。而圖八的實 包同步傳运機構係以χ_ζ軸平面空間動作於圖-的 二：進出料裝置，在同步式全自動進出料裝置設計時， 較不會影響空間的擺放。 如圖八所示，同步傳送機構包含兩機 ==由枢輛部811及813連結在相對而設的機件軌 同時參照圖六 二 刀別配置在載入器109的取放位置127及工 上方在機件軌道815上，藉由移動樞軸部8 i i 可以水平方向帶動機械手臂8〇7,即如圖八中箭頭方向； 同樣地，在機件執道817上，移動枢轴部8 Η亦可以 方向π動機械手臂8G9。在移動兩機械手臂謝、8〇9护， 刀另J取起工作台113的第一工作物件及取放位置η 二工作物件，使之進行位置的置換。須注意，兩機械手臂 、7及809在設計時，需要使用一 Z轴方向的位移裳置， 以在兩機械手臂8G7及8G9進行水平方向的交錯移動 不會彼此阻礙。 ' 19 1363394 圖九為圖六中同步式全自動進出料裝置之傳送步驟流 程圖。請參閱圖九並同時對照圖六，在第一工作物件及第 二工作物件進行位置的置換流程中，首先在步驟s3i中， 取片機構125會載出送料機構123的複數個槽位之一的第 二工作物件至一取放位置’以圖一為例係將傳送第二工 .作物件傳送至取放位置127。接著於步驟S32巾同步傳 -运機構615會分別取起置放於取放位置上的第二工作物件 ,作台113上的第—工作物件，並進行移動使兩者位 =父換。再來，於步驟S33中，同步傳送機構615將放 第二工作物件’即第一工作物件將置於 位置上，第二工作物件將置於工作台113上。之 中’工作台113會進行定位、揀取與置晶等程 2續晶粒的分選動作。在此同時’於步驟S35中，取 槽位中3會？Γ工作物件載入送料機構123中特定的 •晶粒分選後，再#由前“選仃疋某S類的 類的曰二ί 圖九的步驟，以進行另-分 .換等二乍'广：先則的第一工作物件與第二工作物件置 、 乍須注思，步驟S31可以在工作台J i 曰 ’分選期間進行，也可以在工作台113完成；一八二：二 分選時進行。 ’、刀類的日日粒 環或粒的分選過程，經常需要更換晶圓 出料駐要皿 .只曰曰粒分選之步驟。本發明的全自動進 出料的目的。 …枓-的置換，以達到全自動進 20 1363394. 述敘述係為本發明之較佳實施例。此領域之技藝者 應得以領會其係用以說明本發明而非用以限定本發明所主 張之專利權利範圍。其專利保護範圍當視後附之巾請專利 =其等同領域而定。凡熟悉此領域之技藝者，在不脫 離本專利精神或範圍内，所作之更動或濁飾，均屬於本發 .明所揭示精神下所完成之等效改變或設計，且應包含在下 •述之申凊專利範圍内。 【圖式簡單說明】 /本發明可藉由說明書巾若干較佳實施例及詳細钦述以 及後附圖式得以瞭解。然而，此領域之技藝者應得以領會 所有本發明之較佳實施例係用以說明而非用以限制本發明 之申睛專利範圍，其中： 圖-為本發明一實施例中一非同步式全自動進出料裝 置之内部機構俯視圖； x 圖二為本發明實施例中一送料機構之結構圖； 圖三為本發明一實施例中進行第一工作物件與第二工 作物件置換的步驟流程圖； 圖四為本發明使用緩衝台進行第一工作物件與第二工 作物件置換的一實施例的步驟流程圖； 圖五為本發明使用緩衝台進行第一工作物件與第二工 作物件置換的另一實施例的步驟流程圖； 圖六為本發明實施例中同步式全自動進出料 構方塊圖； 之… 圖七為圖六中同步傳送機構一實施例的機構俯視圖； 21 1363394. 圖八為圖六中同步傳送機構另一實施 圖；以及 调耩俯視 圖九為本發明—實施例中利用同步式全自動進出料裳 ^進行工作物件更換之步驟流程圖。 主要元件符號說明】 1〇1 1〇3 1〇5 1〇7 1〇9 111 113 115 117 119 121 123 125 127 129 131 133 135 全自動進出料裝置 第二工作物件 架構平台 外殼 活動門 载入器 機械手臂 工作台 分料台 晶圓台 取置機具 升降機構 送料機構 取片機構 取放位置 言買碼機 分料盒 晶圓環 緩衝台 22 1363394. 201 片匣 203 槽位 615 同步傳送機構 701 第一機械手臂 703 樞軸 .705 第二機械手臂 _ 807 機械手臂 809 機械手臂 ► 811 樞軸部 813 樞軸部 815 機件執道 817 機件轨道 S1 〜S6, S11〜S18, S21〜S28, S31〜S35 步驟k and so on. The first working object and the first _ are the same as described in 仏/tL. When the third money is made: ^ 1G1 type and the front piece is the split box 131 s on the turret 115 - the work object 101 is the split box ' and the wafer on the wafer table 117 = 33 is manually performed Replacement, when the workbench ιι3 completes the grain sorting of a certain member, the first work item (separate box i3i) and the second work item = (separate box) 'will be implemented as described above, and the robot arm The three points of the iu are the pick-and-place position i27 and the dispensing table ιΐ5 buffer port 135. Similarly, when the first working object is the wafer ring U3 on the wafer table ji 7, the second working object 1 〇1 is the wafer ring, and the dispensing box 131 on the dispensing table is manually replaced. When the working table U3 is divided into a certain sort of die, the first working object (wafer ring 133) and The second work object 101 (wafer ring) will be implemented in the manner described above, and the machine 16 1363394 曰: ί 1, there are r transfer fixed points, respectively, the pick and place position 127, I of the two: J and the buffer table 135; when the first working object is the wafer ring 133 on the loading table 115 and the wafer table m, the second working object 101 is a type of material曰 八 : ::: 哀 ' When the workbench 113 completes a certain minute and a Β-曰 first work object (separate box 131 or wafer ring 133) work "piece (8) (separate box or wafer ring), will According to the foregoing mechanical machine, the arm 1U has four transmission fixed points, which are respectively taken, 77 material table U 5, wafer table 117 and buffer table 135. The embodiments described above are in an asynchronous manner in the present invention. The automatic feeding and unloading frame for transferring or replacing 2 crop parts and the second working object is performed. The non-synchronized person means that the first working object and the second working object are separately moved at different times to complete the position invention. The automatic loading and unloading structure and method for moving and replacing the first working object and the first working object by synchronous transmission mode have the advantages that the first working object and the second working object of the two positions to be replaced are synchronously The transport mechanism performs the transmission and the replacement of the position, and greatly reduces the time required for the work object and the first work object to move. Referring to FIG. 6 , it is a structural block diagram of the synchronous automatic feed and discharge farm according to the embodiment of the present invention. Figure Shows' praise synchronous automatic feeding and discharging a loaded by a user 109, a table 113 and two synchronous transfer mechanism 6 "into ten billions. Since the loader and the workbench in the present embodiment are as shown in the figure: the planter station is called the same, so the following is used: Further, the functions of the loader 109 and the workbench 113 have been described in the foregoing, and therefore will not be described again. The synchronous transfer mechanism 615 performs synchronous transfer and position replacement on the second work object in the loading and unloading position of the loader 179 17 S and the first work object of the work table 113, that is, the synchronous transfer mechanism 615 ^ The following two actions are performed, one for transferring the one-piece work item in the pick-and-place position of the loader 109 to the work table 113, and the other for transferring the crop item of the work table ι13 to the pick-and-place position of the loader 1〇9. . To achieve this goal, the step 2 feed mechanism 615 usually needs to simultaneously pick and place the first and second work objects ', and the synchronous transfer mechanism 615 is a synchronous transfer mechanism of the pick-up mechanism. It should be noted that when the first and second working objects described in the work are of the sorting box on the loading table 5, the second item is the dividing box, and The wafer ring on the wafer table U7 is manually operated by the temple, instead: when the first work object is the wafer ring of the wafer table 117 i - the work object is the wafer ring, and the branch on the distribution table 115 Each material is replaced by a branching type; when the first working object is the dispensing table (1): It. In the case of 81 wafer rings on 117, the second working object is a sub-tank and a daily ring. The following rides, w / will be a detailed structural diagram to describe the implementation of the synchronous transmission mechanism. Qi Fu: View: The picture is seven: the second and seventh hands of the same-step conveyor; ^ and - pivot 703, the first robot 701 and the: robot 705 are centered on the tow 7〇3 Horizontal rotation: > According to Figure 6, Figure 1 and Figure 7, the first month of the temple is placed at position m, and the first Π: 701 is placed on the loader 1〇9, and is rotated by the pivot 703. ::: Arm 705 is placed on the workbench 113. The first mechanical arm 701 and the second mechanical arm 1363394. 7〇5, that is, the curved arrows in Fig. 7 are respectively taken up from the table. The first work object of the second 13 and the first cow of the pick and place position 127 are replaced by the position. In the embodiment in which the mechanism of the other embodiment of the synchronous transfer mechanism 615 in FIG. 6 is two, seven, the synchronous transfer mechanism needs to rotate the first robot f 7〇1 with a pivot period of 705, ^/th. The second robot arm X γ is used: the fully automatic feeding and discharging device of Fig. 1 must have sufficient space, in order to make the synchronous conveying mechanism act. The real-time synchronous transport mechanism of Fig. 8 is operated in the plane of the χ_ζ axis, and the second: the feeding and discharging device, when the synchronous automatic feeding and discharging device is designed, it will not affect the space placement. As shown in FIG. 8, the synchronous transfer mechanism includes two machines == connected by the pivot portions 811 and 813 to the opposite machine rails, and is disposed at the pick-and-place position 127 of the loader 109 with reference to FIG. Above the machine rail 815, the robot arm 8〇7 can be driven horizontally by moving the pivot portion 8 ii, that is, the direction of the arrow in FIG. 8; likewise, on the mechanism road 817, the pivot portion 8 is moved. You can also move the robot arm 8G9 in the direction π. In the movement of the two mechanical arms Xie, 8〇9 protection, the knife J picks up the first work object of the work table 113 and the pick-and-place position η two work objects to make the position replacement. It should be noted that the two robot arms, 7 and 809 are designed to use a displacement in the Z-axis direction so that the horizontal movement of the two robot arms 8G7 and 8G9 does not hinder each other. ' 19 1363394 Figure 9 is a flow chart of the transfer procedure of the synchronous automatic inlet and outlet device of Figure 6. Referring to FIG. 9 and FIG. 6 simultaneously, in the process of replacing the position of the first working object and the second working object, first, in step s3i, the taking mechanism 125 carries one of the plurality of slots of the feeding mechanism 123. The second work item to a pick-and-place position will be conveyed to the pick-and-place position 127 by way of example. Then, in step S32, the towel synchronous transfer mechanism 615 respectively picks up the second work object placed on the pick-and-place position, and creates the first work object on the table 113, and moves to make the two positions = parent change. Further, in step S33, the synchronizing transport mechanism 615 will place the second work item 'i.e., the first work item will be placed in position, and the second work item will be placed on the work table 113. Among them, the workbench 113 performs the sorting operation of positioning, picking and lithography. At the same time, in step S35, 3 of the slots are taken? After the work object is loaded into the feeding mechanism 123, the specific grain sorting is performed, and then the step of "selecting a class of the S class" is performed to perform another step. 'Guang: The first work item and the second work object are placed first, no need to think about it. Step S31 can be carried out during the sorting of the workbench J i 曰', or can be completed at the workbench 113; one eight two: two points The selection process is carried out. ', the day-to-day ring of the knife or the sorting process of the grain, it is often necessary to replace the wafer discharge station. Only the step of the particle sorting. The purpose of the fully automatic feeding and discharging of the invention. </ RTI> </ RTI> </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; The scope of patent rights. The scope of patent protection is subject to the scope of the patents attached to the attached patents. Anyone who is familiar with the field, without any deviation from the spirit or scope of this patent, Equivalent change done in the spirit revealed by the present invention. Or design, and should be included in the scope of the following claims. [Simplified description of the drawings] / The present invention can be understood by the preferred embodiments of the specification and the detailed description and the following figures. A person skilled in the art should appreciate that the preferred embodiments of the present invention are intended to be illustrative and not to limit the scope of the invention, wherein: Figure 1 - an asynchronous automatic access in accordance with an embodiment of the present invention FIG. 2 is a structural view of a feeding mechanism according to an embodiment of the present invention; FIG. 3 is a flow chart showing steps of replacing a first working object and a second working object according to an embodiment of the present invention; A flow chart of the steps of an embodiment of the first work object and the second work object replacement using the buffer table of the present invention; FIG. 5 is another embodiment of the present invention for using the buffer table to perform the first work object and the second work object replacement. FIG. 6 is a block diagram of a synchronous automatic inlet and outlet material structure according to an embodiment of the present invention; FIG. 7 is a machine of an embodiment of the synchronous transmission mechanism of FIG. 20 1363394. FIG. 8 is another embodiment of the synchronous transfer mechanism of FIG. 6; and the top view of the pick-up is a flow chart of the steps of replacing the work object by using the synchronous automatic feeding and discharging device in the embodiment. Description of component symbols] 1〇1 1〇3 1〇5 1〇7 1〇9 111 113 115 117 119 121 123 125 127 129 131 133 135 Fully automatic feeding and discharging device Second working object architecture Platform housing Moving door loader machinery Arm Workbench Dispense Table Wafer Table Pickup Machine Lifting Mechanism Feeding Mechanism Picking Mechanism Pickup Position Words Buying Code Machine Feeding Box Wafer Ring Buffering Table 22 1363394. 201 Sheets 203 Slots 615 Synchronous Transfer Mechanism 701 First Robot arm 703 Pivot. 705 Second robot arm _ 807 Robot arm 809 Robot arm 811 Pivot part 813 Pivot part 815 Machine command 817 Machine track S1 ~ S6, S11 ~ S18, S21 ~ S28, S31 ~ S35 steps
23twenty three