TWI361274B

TWI361274B -

Info

Publication number: TWI361274B
Application number: TW097113951A
Authority: TW
Inventors: Akio Furuse
Original assignee: Cosmo Instr Co Ltd
Priority date: 2006-05-24
Filing date: 2008-04-17
Publication date: 2012-04-01
Also published as: CN101454652B; US20090132185A1; CN101454652A; TW200900674A; EP2023114A4; JP4673918B2; US7818133B2; KR100990882B1; KR20080108544A; JPWO2007136109A1; MX2008014076A; WO2007136109A1; EP2023114A1

Description

1361274 九、發明說明【發明所屬之技術領域】本發明是關於使用於檢查各種容器等的有無漏洩檢查的漏洩檢查方法，及利用該漏洩檢査方法而作的漏拽·檢查裝置。【先前技術】在傳統上，把在使用狀態下必須沒存在漏洩的零件，在其生產工程線上依次檢查，來判定製品或良否。第8圖是表示該種漏洩檢查裝置的一般性構成圖，被連接於空氣壓源1 1的輸出側的流管1 〇是經閥12及三通電磁閥14被延長，而在三通電磁閥口側被分岐成分岐管〗5A、15B。在調壓閥12的出三通電磁閥1 4的入口側之間連接有監測所設定的所用的壓力計1 3。分岐管15A是經由電磁閥16被連接於導管：端，而在該導管18的另一端部設有漏洩被檢查的體20可連接的連接工模24。被檢查體20依次被該連接工模24,而成爲可檢查漏洩的構成。另一方面，分岐管15B是經由電磁閥17被連管19的一端，而在該導管19的另一端部連接有 21。在導管18及19分別分岐地安裝有導管18A及而差壓檢測器22被安裝於此些導管18A、19A的洩的漏進行動製品或零件的的方塊由調壓 1 4的出口側與檢査壓 8的一被檢査連接於接於導基準槽 1 9A，端部間 -4- 1361274 差壓檢測器22的輸出訊號是經由自動重調零式放大器31被給予比較器32，而在比較器32作成與基準値設定器33的基準値可比較的構成。將被檢査體20安裝於導管18的端部，而在導管19 安裝在漏洩的基準槽21，把三通電磁閥14的a_b間作成閉狀態，一面監測壓力計1 3 —面調節調壓閥1 2而作成可得到來自空氣壓源11的所定空氣壓。將電磁閥16及 1 7作成開狀態，而將三通電磁閥1 4的a- b間作成開狀態，把所設定的一定空氣壓經分岐管1 5 A、1 5 B，導管1 8 、19分別供應於被檢查體20及基準槽21。經過一定時間，使得被檢查體20及基準槽21內的壓力穩定之後，把電磁閥16及17作成閉狀態。又在所定的穩定時間（平衡時間）後，進行被連接於差壓檢測器22 的自動重調零式放大器31的輸出訊號的讀取。在被檢査體20的氣密完全而未存在漏洩的狀態下，來自放大器31的輸出訊號是在一定檢測時間後，理想上成爲零。若在被檢查體20存在著漏洩，則其內部壓力爲正壓時會得到逐漸減少，而負壓時會得到逐漸增加的輸出訊號SD，而一定檢測時間內的輸出訊號是成爲大約比例於負或正的漏洩量的數値》從基準値設定器33所給予的基準値RV與放大器31 的輸出値在比較器32被相比較，藉由輸出値是否超過基準値RV，而得到表示良品或不良品的良否判定輸出3 5。 1361274 在該一般性的漏洩檢查裝置，即使與被檢查體20完全相同形狀又無漏洩者使用作爲基準槽21，主要藉由被檢查體20與基準槽21之溫度差，會在發生於差壓檢測器 22的差壓値上受到影響。若被檢查體20與基準槽21的形狀有所不同，則在將氣體予以加壓時則藉由隔熱變化所上昇的氣體溫度成爲相等於被檢查體20與基準槽21的溫度的過程，會發生氣體溫度差所致差壓變化，使得輸出訊號在理想上不會成爲零的狀態，或是在被檢杳體20與基準槽21的溫度不相同時，差壓變化也發生在隔熱變化後的熱平衡過程。亦即，即使在被檢查體20完全沒有漏洩，一定檢測時間中的輸出訊號也不會成爲理想性的零狀態，一般表示若比得上正或負的漏洩量之程度的差壓値。一般將起因於該漏洩以外的差壓値稱爲漂移量。使用第9圖來說明該情形。表示於第9圖的曲線A 是表示漂移量，曲線B是漏洩量，曲線C是表示將漏洩量加上漂移量的實質上藉由差壓檢測器22所檢測的差壓値。由圖可知，以曲線C所表示的差壓値是大部分爲漂移量，而相當於漏洩量的差壓値是些微。由圖可瞭解，藉由漂移所發生的差壓値是當經過了時間，則其增加量是幾乎近於零。對於此，藉由漏洩量所發生的差壓値是隨著時間之經過，呈現以大約一定的增加率上昇的現象。著眼於此點，在表示於第8圖的構成的漏洩檢查裝置 ’以某一時間（漂移量的增加率接近於零的時機以後的定時）TIM1 (第9圖）強制地將自動重調零式放大器31的 1361274 輸出重調成爲零，在重調零之後，提高自動重調零式放大器31的增益來放大差壓檢測器22的檢測訊號而得到輸出訊號SD (曲線D)供應於比較器32，在比較器32與基準値RV來比較發生於一定時間後的輸出訊號SD，若輸出訊號SD超過基準値，則判定爲不良。依照該檢測方法，等到漂移量的增加率接近於零才開始檢查，因此可除去依漂移所致的影響。然而，另一面有一個漏洩檢查裝置所需之檢査時間變成數10秒鐘的較久的缺點。爲了解決該缺點，被提案有如第10圖所示的漏洩檢查方法。該檢查方法是在校正模式中，將加壓•平衡期間後發生在差壓檢測器22的差壓發生値，藉由例如以第8 圖所說明的自動重調零式放大器31每——定檢測單位時間地重調成零，一直到每一檢測單位時間的差壓變化値被收斂成一定値爲止重複著此，在收斂之時機，取得該收斂的差壓變化値Db。該差壓變化値Db是表示真正漏洩量所發生的每一檢測單位時間的差壓値。因此，藉由求出從初次的每一檢測單位時間的差壓變化値Da減掉Db的Da— Db = Dl，把該相差値D1可視做隔熱變化後的熱平衡過程所致的漂移値。將該値D 1記憶作爲漂移修正値，而在之後的檢查模式，將加壓氣體施加於被檢查體20，藉由從剛加壓平衡之後的第1次差壓發生値Da減掉漂移修正値D1，成爲可求出對應於各被檢查體20的真正漏洩量的每一檢測單位時間的差壓値Db。[Technical Field] The present invention relates to a leak inspection method for inspecting the presence or absence of leak inspection of various containers and the like, and a leak/inspection apparatus using the leak inspection method. [Prior Art] Conventionally, parts that must not leak in the use state are sequentially inspected on the production line to determine the product or the quality. Fig. 8 is a view showing a general configuration of the leakage inspection device, and the flow tube 1 connected to the output side of the air pressure source 1 is extended by the valve 12 and the three-way solenoid valve 14, and is in the three-way electromagnetic field. The valve port side is divided into the components of the manifolds 5A, 15B. A pressure gauge 13 for monitoring is set between the inlet side of the outlet three-way solenoid valve 14 of the pressure regulating valve 12. The branching pipe 15A is connected to the pipe through the solenoid valve 16 at the other end, and the connecting die 24 to which the leaked body 20 is connected is provided at the other end of the pipe 18. The object to be inspected 20 is sequentially connected to the mold 24 to form a leak-detectable structure. On the other hand, the branching pipe 15B is one end of the pipe 19 connected via the solenoid valve 17, and the other end of the pipe 19 is connected 21. The ducts 18A and 19 are separately installed with the ducts 18A and the differential pressure detectors 22 are mounted on the ducts 18A, 19A, and the leakage of the movable products or parts is controlled by the outlet side of the pressure regulating 14 and the inspection. One of the voltages 8 is inspected and connected to the reference reference groove 19A, and the output signal of the differential pressure detector 22 is given to the comparator 32 via the automatic re-adjusting amplifier 31, and in the comparator 32 is configured to be comparable to the reference frame of the reference buffer setter 33. The object to be inspected 20 is attached to the end of the duct 18, and the duct 19 is mounted in the leaking reference groove 21, and the a_b of the three-way solenoid valve 14 is closed, and the pressure gauge is monitored. The predetermined air pressure from the air pressure source 11 can be obtained by 1 2 . The solenoid valves 16 and 17 are opened, and the a-b of the three-way solenoid valve 14 is opened, and the set air is pressed through the branching pipe 1 5 A, 1 5 B, the conduit 18, 19 is supplied to the object to be inspected 20 and the reference groove 21, respectively. After a predetermined period of time has elapsed, the pressure in the test object 20 and the reference groove 21 is stabilized, and the electromagnetic valves 16 and 17 are closed. Further, after the predetermined stabilization time (balance time), the reading of the output signal of the auto-resetting null amplifier 31 connected to the differential pressure detector 22 is performed. In a state where the airtightness of the object 20 to be inspected is completely leaked, the output signal from the amplifier 31 is desirably zero after a certain detection time. If there is a leak in the object to be inspected, the internal pressure is gradually reduced when the internal pressure is positive, and the output signal SD is gradually increased when the negative pressure is applied, and the output signal in a certain detection time becomes approximately proportional to negative. The number of positive leaks 値" The reference 値RV given from the reference 値 setter 33 is compared with the output 値 of the amplifier 31 at the comparator 32, and whether the output 超过 exceeds the reference 値RV, thereby obtaining a good product or The quality of the defective product is judged and output 3 5 . 1361274 In the general leak inspection device, even if the same shape as the object 20 to be inspected and no leak is used as the reference groove 21, mainly due to the temperature difference between the test object 20 and the reference groove 21, it may occur at a differential pressure. The differential pressure of the detector 22 is affected. When the shape of the test object 20 and the reference groove 21 are different, when the gas is pressurized, the temperature of the gas rising by the heat insulation change becomes equal to the temperature of the test object 20 and the reference groove 21. The differential pressure change caused by the gas temperature difference may occur, so that the output signal does not ideally become zero, or when the temperature of the detected body 20 and the reference groove 21 are different, the differential pressure change also occurs in the heat insulation. The heat balance process after the change. That is, even if the object to be inspected 20 is completely leak-free, the output signal in a certain detection time does not become an ideal zero state, and generally indicates a difference in pressure that is comparable to the amount of positive or negative leakage. The differential pressure other than the leakage is generally referred to as the amount of drift. Use Figure 9 to illustrate this situation. The curve A shown in Fig. 9 indicates the amount of drift, the curve B indicates the amount of leakage, and the curve C indicates the differential pressure detected by the differential pressure detector 22, which adds the amount of leakage to the amount of drift. As can be seen from the figure, the differential pressure represented by the curve C is mostly the amount of drift, and the differential pressure corresponding to the amount of leakage is slightly. As can be seen from the figure, the differential pressure that occurs by drift is that when the time elapses, the amount of increase is almost zero. In this regard, the differential pressure occurring by the amount of leakage is a phenomenon that rises at a certain rate of increase over time. With this in mind, the leakage inspection device 'in the configuration shown in Fig. 8 forcibly resets the zero automatically at a certain time (the timing after the timing when the rate of increase of the drift is close to zero) TIM1 (Fig. 9). The 1361074 output of the amplifier 31 is reset to zero. After resetting zero, the gain of the auto-re-zeroing amplifier 31 is increased to amplify the detection signal of the differential pressure detector 22 to obtain an output signal SD (curve D) supplied to the comparator. 32. The comparator 32 compares the output signal SD occurring after a certain period of time with the reference frame RV. If the output signal SD exceeds the reference frame, it is determined to be defective. According to this detection method, it is waited until the increase rate of the drift amount is close to zero to start the inspection, so that the influence due to the drift can be removed. However, on the other hand, there is a disadvantage that the inspection time required for the leak check device becomes a long time of several 10 seconds. In order to solve this drawback, a leak inspection method as shown in Fig. 10 has been proposed. The inspection method is such that, in the correction mode, the differential pressure occurring in the differential pressure detector 22 after the pressurization and balance period occurs, by the automatic re-adjustment of the null amplifier 31, for example, as illustrated in Fig. 8. The detection unit time is re-adjusted to zero, and the differential pressure change 値 after each detection unit time is converged to a certain level, and the convergence of the differential pressure change 値Db is obtained at the timing of convergence. The differential pressure change 値Db is a differential pressure for each detection unit time which occurs in the actual leakage amount. Therefore, by subtracting Da-Db = Dl of Db from the differential pressure change 値D of each initial detection unit time, the phase difference 値D1 can be regarded as the drift 所致 caused by the heat balance process after the heat insulation change. The 値D 1 memory is used as the drift correction 値, and in the subsequent inspection mode, the pressurized gas is applied to the test object 20, and the drift correction is reduced by the first differential pressure generation 値D immediately after the pressure equalization In the case of 値D1, the differential pressure Db for each detection unit time corresponding to the true leakage amount of each test object 20 can be obtained.

1361274 在表示於第ίο圖的校正方法，若限定實C 的溫度環境下（氣溫，被檢查體20的溫度），正確的漏洩檢査。然而在漏洩檢查模式中，若室查體20的溫度從求出漂移修正値D1的校正核度偏離所定値以上，則每次實行校正模式，有丄出漂移修正値D1的缺點^ 又，在上述乃將表示於第8圖的差壓檢測g 裝置作爲例子加以說明，惟如第1 1圖所示地消接施加於被檢查體20，藉由壓力測定器23來領壓，藉由被封入在被檢查體20的氣體壓是否g 以上，進行判定有無漏洩的形式的漏洩檢查裝i 此形式的漏洩檢查裝置稱爲儀錶壓型漏洩檢査拳樣地發生漂移，而會發生與差壓檢測型的漏洩相樣的缺點。爲了解決此些差壓檢測型漏洩檢查裝置及洩檢查裝置的缺點，本案申請人是利用專利文移修正係數算出方法，及使用藉由該漂移修正法所算出的漂移修正係數來修正漂移量的漂移漂移修正係數學習方法，使用此些的各方法的法及漏洩檢查裝置。在先前所提案的漏洩檢查裝置，是在校正或負的氣體壓施加於被檢查體與基準槽，而在衡期間（參照第1 〇圖）結束時機經過時間τ I 經過時間T 1之時機分別測定差壓變化値ΔΡ 1 校正模式則可實行溫或被檢式時的溫須重新求漏洩檢查氣體壓直定該氣體化所定値 (以下將置）也同査裝置同錶壓型漏 1提案漂數算出方正方法，洩檢查方式，將正加壓•平時機與再 ΔΡ2，又 1361274 測定相當於從被檢查體與基準槽的氣體溫度穩定的時機經過時間τι的時機所得到的被檢查體的漏洩的差壓變化値 △ C，利用此些差壓變化値ΔΡ1與ΔΡ2，AC而藉由Κ=( ΔΡ2- AC ) / (ΔΡ1— ΔΡ 2)來算出漂移修正係數K。使用該漂移修正係數Κ，在檢查模式同樣地，從經過Τ1的時機與經過下一Τ1的時機所測定的差壓變化値ΔΡ1 ’ ' ΔΡ2’ 來估計漂移量】=(ΔΡ1’一 ΑΡ2’）Κ，而求出對應於經修正漂移量的漏洩的差壓變化値S = AP2’一 J。在此，使用第12圖來說明一般性的漏洩檢查裝置的檢查模式的動作順序。表示於第1 2圖的期間A 1是表示加壓期間，A2是表示平衡期間，A3是表示檢査期間，而 A4是表示排氣期間。在加壓期間A 1，指表示於第8圖的三通電磁閥14是a— b間爲被打開，又閥16與17被打開，而_定壓力的氣體被施加於被檢查體20與基準槽21的狀態。平衡期間A2是指閥1 6與1 7被關閉，封閉施加於被檢查體20與21的氣體，而等待氣體壓呈穩定的狀態。亦即，在加壓期間A 1藉由隔熱變化上昇內部氣體溫度之後，逐漸地下降至檢査體溫度的熱平衡過程，檢查期間 A3是指檢測出在平衡期間A2是否發生差壓在穩定的氣體壓的狀態。排氣期間A4是指打開閥1 6與1 7，藉由將三通電磁閥14導通b-c間，而將被封入在被檢査體20與基準槽21的氣體朝大氣排氣的狀況。又，表示於第12圖的曲線P是表示被檢査體或基準槽的內部壓力的變化。在加壓期間A 1，壓力急激地上昇 r1361274 In the correction method shown in Fig. ί, if the temperature environment of the real C (temperature, temperature of the object 20 to be inspected) is limited, the correct leak check is performed. However, in the leak check mode, if the temperature of the chamber body 20 deviates from the predetermined calibration level of the drift correction 値D1 by a predetermined value or more, the correction mode is executed every time, and there is a disadvantage of the drift correction 値D1. The differential pressure detecting g device shown in Fig. 8 is described as an example, but is applied to the test object 20 as shown in Fig. 1 and is pressed by the pressure measuring device 23, by being pressed by the pressure measuring device 23 The leakage inspection device in the form of a leak indicating whether or not the gas pressure of the object to be inspected 20 is equal to or greater than g is determined. The leakage inspection device of this type is called a meter pressure type leakage inspection glove, and drifts, and differential pressure detection occurs. The type of leakage is similar to the shortcomings. In order to solve the shortcomings of the differential pressure detecting type leak detecting device and the leak detecting device, the applicant of the present invention uses the patent text correction coefficient calculation method and the drift correction coefficient calculated by the drift correction method to correct the drift amount. The drift drift correction coefficient learning method uses the methods of each of these methods and the leak check device. In the leakage inspection device proposed in the prior art, the corrected or negative gas pressure is applied to the object to be inspected and the reference groove, and the timing of the elapsed time τ I elapses from the time T 1 during the period of the balance (see the first figure) Measure the differential pressure change 値ΔΡ 1 In the calibration mode, the temperature or the temperature of the test can be re-evaluated. Check the gas pressure and set the gas pressure to determine the gasification (the following will be set). The method of calculating the number of drifts, the method of venting the test, and the positive pressure, the tempo, the ΔΡ2, and the 1,361,274, the test object obtained by the timing of the time τι from the timing at which the gas temperature of the test object and the reference groove is stable is measured. The differential pressure change 値Δ C of the leak is calculated by Κ=( ΔΡ2- AC ) / (ΔΡ1 - ΔΡ 2) by using the differential pressure changes 値ΔΡ1 and ΔΡ2, AC. Using the drift correction coefficient Κ, in the same manner as in the inspection mode, the drift amount is estimated from the differential pressure 値ΔΡ1 ' ' ΔΡ2' measured by the timing of the Τ1 and the timing of the next Τ1]=(ΔΡ1'ΑΡ2') Κ, the differential pressure change 値S = AP2'-J corresponding to the leakage of the corrected drift amount is obtained. Here, the operation sequence of the inspection mode of the general leak check device will be described using Fig. 12 . The period A 1 shown in Fig. 2 is a pressurization period, A2 is a balance period, A3 is an inspection period, and A4 is an exhaust period. During the pressurization period A 1, the three-way solenoid valve 14 shown in Fig. 8 is opened between a and b, and the valves 16 and 17 are opened, and the gas of the constant pressure is applied to the object to be inspected 20 and The state of the reference slot 21. The balance period A2 means that the valves 16 and 17 are closed to close the gas applied to the objects 20 and 21 while waiting for the gas pressure to be stable. That is, during the pressurization period A1, after the internal gas temperature is raised by the heat insulation change, the heat balance process is gradually lowered to the temperature of the test body, and the inspection period A3 is to detect whether a differential pressure is generated in the stable gas during the balance period A2. The state of pressure. The exhaust gas period A4 is a state in which the valves 16 and 17 are opened, and the three-way electromagnetic valve 14 is electrically connected to the space between the b-c, and the gas sealed in the test object 20 and the reference groove 21 is exhausted to the atmosphere. Further, the curve P shown in Fig. 12 is a change in the internal pressure of the test object or the reference groove. During the pressurization period A 1, the pressure rises sharply r

I -9- Λ. «Ο*- 1361274 ，而藉由隔熱變化也上昇內部氣體溫度。在平衡期間A2 與檢查期間A3表示內部氣體溫度下降至檢查體溫度而所施加的空氣壓徐徐地穩定的樣子。專利文獻：日本特開200 1 - 50854號公報容內明發如上述地在專利文獻1所提案的漂移修正係數算出方法是將差壓變化値ΔΡ 1與ΔΡ2的測定如第1 2圖所示地進行在從檢查期間A3的開始點經過T1的時機，及再經過下一 T1的時機。檢查期間A3是如上述地，設定成經過平衡期間A2之後才實行之故，因而被封入在被檢查體20 與基準槽21的氣體壓處於某種程度穩定的狀態。亦即，若將平衡期間A2設定成較久，則在進入檢査期間A3的時機，被檢查體20與基準槽21的內部是由表示於第12 圖的曲線P可明瞭，在加壓期間A 1所發生的隔熱變化後的熱平衡過渡所致的差壓變化可忽略程度地變小的情形也會發生。這時候，在檢查期間A3測定差壓變化値AP1與 △ P2，則成爲ΔΡ1与ΔΡ2，而漂移修正係數的算出式K=( ΑΡ2- AC ) / ( ΔΡ1 — ΔΡ2 )的分母成爲接近於零的數値之故，因而發生無法求出高可靠性的漂移修正係數K的不方便。本發明的目的是在於提供可解決該不方便，高可靠性的漏洩檢查方法及漏洩檢查裝置。依照本發明的第1觀點，一種漏洩檢查方法，是將氣 -10- 1361274 體施加於被檢查體與基準槽，而在經過所定時間的時機是否在兩者間發生所定値以上的差壓，藉由此，來判定在上述被檢查體是否有漏洩的漏洩檢查方法，其特徵爲：在校正模式，包括： (a _ 1 )將所定壓力僅所定時間長度的加壓期間施加、停止氣體壓於被檢查體與基準槽的步驟；及 (a — 2 )測定產生於上述力壓期間結束後的第1平衡期間的上述被檢査體與上述基準槽的第1差壓變化値API 的步驟；及 (a — 3 )測定產生於上述第1平衡期間結束後的第2 平衡期間的上述被檢查體與上述基準槽的第2差壓變化値 △ P2的步驟；及 (a - 4 )測定產生於上述第2平衡期間結束後的第1 檢查期間的上述被檢査體與上述基準槽的第3差壓變化値 △ P3的步驟；及 (a - 5 )測定產生於上述第1檢查期間結束後的第2 檢查期間的上述被檢查體與上述基準槽的第4差壓變化値 ΔΡ4的步驟；及 (a— 6)依據上述第3及第4差壓變化値的相差（ ΔΡ3 - ΔΡ4 )，及上述第1及第2差壓變化値的相差（ΔΡ1 -ΔΡ2)的比例，來計算對應於被包括於上述第3差壓變化値ΔΡ3的漂移量的漂移修正係數K而加以記憶，並將上述被檢查體與上述基準槽予以排氣的步驟。在檢查模式，包括： -11 - 1361274 (b— 1)將上述所定壓力僅上述力□壓期間施力α、停止氣體壓於上述被檢查體與上述基準槽的步驟；及 (b — 2)測定產生於上述第1平衡期間的上述被檢查體與上述基準槽的第1差壓變化値ΔΡ1’的步驟；及 (b_ 3)測定產生於上述第2平衡期間的上述被檢查體與上述基準槽的第2差壓變化値ΔΡ2’的步驟；及 (b- 4)測定產生於上述第1檢查期間的上述被檢查體與上述基準槽的第3差壓變化値ΔΡ3’的步驟；及 (b — 5)依據上述第1及第2差壓變化値的相差（ △ Ρ1’-ΔΡ2’）與上述漂移修正係數K，來估計被包括於上述第3差壓變化値ΔΡ3’的漂移量的步驟；及 (b— 6)從上述第3差壓變化値ΔΡ3’減算上述漂移量來估計上述被檢查體的漏洩量，並將上述被檢査體與上述基準槽予以排氣的步驟。又，依本發明的第1觀點的一種漏洩檢査裝置，其特徵爲= 包括：將氣體壓施加於被檢査體與基準槽的空氣壓源；及將所定壓力的氣體從上述空氣壓源僅所定時間長度的加壓期間施加於被檢査體與基準槽，而在施加結束後測定發生在上述被檢査體與基準槽間的差壓變化値的差壓測定部：及在校正模式，將氣體壓僅上述加壓期間施加於上述被檢查體與上述基準槽，在上述加壓期間結束後的第1平衡 -12- 1361274 期間，與連續於該期間的第2平衡期間分別產生，由藉由上述差壓測定部所測定的第1及第2差壓變化値ΔΡ1、 △ P2，及在上述第2平衡期間的結束後的第1檢查期間，與其後的第2檢查期間分別產生，由藉由上述差壓測定部所測定的第3及第4差壓變化値ΔΡ3、ΔΡ4，依據上述第 3及第4差壓變化値的相差（ΔΡ3— ΔΡ4)，及上述第1及第2差壓變化値的相差（AP1 - AP2 )的比例，來計算對應於被包括於上述第3差壓變化値ΔΡ3的漂移量的漂移修正係數K的漂移修正係數算出部；及記憶上述漂移修正係數K的漂移修正係數記憶部；及在檢査模式，將氣體壓僅上述加壓期間施加於上述被檢查體與上述基準槽，在上述加壓期間結束後的第1平衡期間，與連續於該期間的第2平衡期間分別產生，由藉由上述差壓測定部所測定的第1及第2差壓變化値AP 1 ’、 △ P 2 ’，及在上述第2平衡期間結束後的第1檢査期間產生，由藉由上述差壓測定部所測定的第3差壓變化値ΔΡ 3 ’ ，依據上述第1及第2差壓變化値的相差（δρι’ — ΔΡ2，）與上述漂移修正係數K，來算出被包括於上述第3差壓變化値ΔΡ3’的漂移量的漂移量算出部；及從上述第3差壓變化値ΔΡ3’減算上述漂移量而得到被漂移修正的差壓變化値S的漂移修正部；及將上述差壓變化値S與設定値相比較，若差壓變化値 s超過設定値，則判定在上述被檢查體有漏洩的判定部所I -9- Λ. «Ο*- 1361274, and the internal gas temperature is also raised by the change in insulation. The balance period A2 and the inspection period A3 indicate that the internal air temperature drops to the specimen temperature and the applied air pressure is gradually stabilized. In the drift correction coefficient calculation method proposed in Patent Document 1 as described above, the differential pressure change 値ΔΡ 1 and ΔΡ2 are measured as shown in FIG. 2 . The timing of passing T1 from the start point of the inspection period A3 and the timing of passing the next T1 are performed. Since the inspection period A3 is set to be performed after the balance period A2 as described above, the gas pressure enclosed in the specimen 20 and the reference groove 21 is stabilized to some extent. That is, when the balance period A2 is set to be long, the inside of the inspection object 20 and the reference groove 21 is indicated by the curve P shown in Fig. 12 at the timing of entering the inspection period A3, during the pressurization period A. A situation in which the differential pressure change caused by the heat balance transition after the occurrence of the heat insulation change is negligibly small may also occur. At this time, when the differential pressure changes 値AP1 and ΔP2 are measured during the inspection period A3, ΔΡ1 and ΔΡ2 are obtained, and the denominator of the calculation formula of the drift correction coefficient K=(ΑΡ2-AC) / (ΔΡ1 - ΔΡ2) becomes close to zero. Therefore, it is inconvenient that the drift correction coefficient K of high reliability cannot be obtained. SUMMARY OF THE INVENTION An object of the present invention is to provide a leak inspection method and a leak check device which can solve the inconvenience and high reliability. According to a first aspect of the present invention, in a leakage inspection method, a gas-10-1361274 body is applied to a test object and a reference groove, and a differential pressure equal to or greater than a predetermined value occurs between the two at a timing when a predetermined time elapses. Thereby, a leak inspection method for determining whether or not the test object is leaked is characterized in that: in the correction mode, the method includes: (a _ 1 ) applying and stopping the gas pressure during a pressurization period of the predetermined pressure for only a predetermined length of time a step of inspecting the object and the reference groove; and (a-2) measuring a first differential pressure change 値API of the test object and the reference groove generated in the first balance period after the end of the force-pressure period; And (a-3) measuring a second differential pressure change 値ΔP2 of the test object and the reference groove generated in the second equilibrium period after the end of the first balance period; and (a-4) measuring generation a step of changing the third differential pressure 値ΔP3 between the test object and the reference groove in the first inspection period after the completion of the second balance period; and (a-5) measuring after the end of the first inspection period 2nd inspection period a step of changing the fourth differential pressure 値ΔΡ4 between the test object and the reference groove; and (a-6) a phase difference (ΔΡ3 - ΔΡ4) according to the third and fourth differential pressure changes, and the first The ratio of the phase difference (ΔΡ1 - ΔΡ2) of the second differential pressure change , is calculated by calculating the drift correction coefficient K corresponding to the drift amount included in the third differential pressure change 値ΔΡ3, and the subject is inspected. And the step of exhausting the reference tank. In the inspection mode, including: -11 - 1361274 (b-1), the step of applying the force α to the predetermined pressure during the pressing of the above-mentioned pressure, stopping the gas from pressing on the object to be inspected and the reference groove; and (b-2) a step of measuring a first differential pressure change 値ΔΡ1' of the test object and the reference groove generated in the first balance period; and (b_3) measuring the test object and the reference generated in the second balance period a step of measuring a second differential pressure 値ΔΡ2' of the groove; and (b-4) measuring a third differential pressure change 値ΔΡ3' of the test object and the reference groove generated in the first inspection period; and B-5) estimating the drift amount included in the third differential pressure change 値ΔΡ3' based on the phase difference (Δ Ρ1'-ΔΡ2') of the first and second differential pressure changes 与 and the drift correction coefficient K And (b-6) estimating the leakage amount of the test object from the third differential pressure change 値ΔΡ3' by subtracting the drift amount, and exhausting the test object and the reference groove. Further, a leakage inspection device according to a first aspect of the present invention is characterized by comprising: a gas pressure source for applying a gas pressure to a test object and a reference groove; and a gas having a predetermined pressure is set only from the air pressure source The pressure-measuring period of the time length is applied to the test object and the reference groove, and after the application is completed, the differential pressure measuring unit that generates the differential pressure change 値 between the test object and the reference groove is measured: and in the calibration mode, the gas pressure is applied. Only the above-described pressurization period is applied to the test object and the reference groove, and the first balance -12 to 1361274 after the end of the pressurization period and the second balance period continuous for the period are generated by the above-described The first and second differential pressure changes 値ΔΡ1 and ΔP2 measured by the differential pressure measuring unit and the first inspection period after the end of the second balancing period are generated separately from the second inspection period thereafter. The third and fourth differential pressure changes 値ΔΡ3 and ΔΡ4 measured by the differential pressure measuring unit are based on the phase difference (ΔΡ3 - ΔΡ4) of the third and fourth differential pressure changes, and the first and second differential pressure changes. Difference in 値a drift correction coefficient calculation unit that calculates a drift correction coefficient K corresponding to the drift amount of the third differential pressure change 値ΔΡ3, and a drift correction coefficient storage unit that stores the drift correction coefficient K, a ratio of AP1 to AP2) And in the inspection mode, the gas pressure is applied to the test object and the reference groove only during the pressurization period, and is generated in the first balance period after the end of the pressurization period and in the second balance period continuous in the period. The first and second differential pressure changes 値AP 1 ', Δ P 2 ' measured by the differential pressure measuring unit and the first inspection period after the end of the second balancing period are generated by the above The third differential pressure change 値ΔΡ 3 ' measured by the differential pressure measuring unit is calculated based on the phase difference (δρι′ - ΔΡ2) of the first and second differential pressure changes 与 and the drift correction coefficient K. a drift amount calculation unit that shifts the drift amount of the third differential pressure change 値ΔΡ3'; and a drift correction unit that subtracts the drift amount from the third differential pressure change 値ΔΡ3' to obtain the differential pressure change 値S that is subjected to the drift correction; The pressure difference S and the setting value change Zhi comparison, if the differential pressure exceeds the setting value change Zhi s, it is determined that there is leakage determination section to be inspected in the above

I -13- 1361274 構成。依照本發明的第2觀點，一種漏洩檢查體施加於被檢查體，而在經過所定時間的時定値以上的壓力變化，藉由此，來判定在上否有漏洩的漏洩檢查方法，其特徵爲：在校正模式，包括： (a — ])將所定壓力僅所定時間長度的、停止氣體壓於被檢查體的步驟；及 (a - 2 ) 定產生於上述加壓期間結束期間的上述被檢查體的第1壓力變化値AQ 1 (a — 3 )測定產生於上述第1平衡期間平衡期間的上述被檢査體的第2壓力變化個 :及 (a— 4)測定產生於上述第2平衡期間檢查期間的上述被檢查體的第3壓力變化個 :及 (a _ 5 )測定產生於上述第1檢査期間檢查期間的上述被檢查體的第4壓力變化個 :及 (a— 6)依據上述第3及第4壓力變 △ Q3—AQ4)，及上述第1及第2壓力變 △ Q1 - AQ2 )的比例，來計算對應於被包括方力變化値Δ()3的漂移量的漂移修正係數K 並將上述被檢查體予以排氣的步驟，方法，是將氣機是否發生所述被檢查體是加壓期間施加後的第1平衡的步驟；及結束後的第2 【AQ2的步驟結束後的第I 【△ Q 3的步驟結束後的第2 【AQ4的步驟化値的相差（化値的相差（令上述第3壓而加以記憶， r φ*.. I Λ -14- 1361274 在檢查模式，包括： (b-l)將上述所定壓力僅上述力卩壓期間施加、停止氣體壓於上述被檢查體的步驟；及 (b — 2)測定產生於上述第1平衡期間的上述被檢查 _ 體的第1壓力變化値AQ1’的步驟；及 . (b— 3)測定產生於上述第2平衡期間的上述被檢查體的第2壓力變化値AQ2’的步驟；及 φ (b - 4)測定產生於上述第1檢查期間的上述被檢查體的第3壓力變化値AQ3’的步驟；及 (b_5)依據上述第1及第2壓力變化値的相差（ △ Q1’ 一 AQ2’）與上述漂移修正係數K，來估計被包括於上述第3壓力變化値AQ3’的漂移量的步驟；及 (b_ 6 )從上述第3壓力變化値AQ3’減算上述漂移量來估計上述被檢查體的漏洩量，並將上述被檢查體予以排氣的步驟。 • 又，依本發明的第2觀點的一種漏洩檢查裝置，其特徵爲： ~ 包括： -將氣體壓施加於被檢査體的空氣壓源；及將所定壓力的氣體從上述空氣壓源僅所定時間長度的加壓期間施加於被檢査體，而在施加結束後測定發生在上 •述被檢查體的壓力變化値的壓力測定部；及在校正模式，將氣體壓僅上述加壓期間施加於上述被檢查體，在上述加壓期間結束後的第]平衡期間，與連續 -15- 1361274 於該期間的第2平衡期間分別產生，由藉由上述壓力測定部所測定的第1及第2壓力變化値AQ1、AQ2，及在上述第2平衡期間的結束後的第】檢查期間，與其後的第2檢查期間分別產生，由藉由上述壓力測定部所測定的第3及第4壓力變化値AQ 3、AQ 4，依據上述第3及第4壓力變化値的相差（AQ3 ~ AQ4 )，及上述第1及第2壓力變化値的相差（AQ 1 - AQ2 )的比例，來計算對應於被包括於上述第3壓力變化値AQ 3的漂移量的漂移修正係數K的漂移修正係數算出部；及記憶上述漂移修正係數K的漂移修正係數記憶部；及在檢查模式，將氣體壓僅上述加壓期間施加於上述被檢查體，在上述加壓期間結束後的第I平衡期間，與連續於該期間的第2平衡期間分別產生，由藉由上述壓力測定部所測定的第1及第2壓力變化値AQI’、AQ2’，及在上述第2平衡期間結束後的第1檢查期間產生，由藉由上述壓力測定部所測定的第3壓力變化値AQ3 ’，依據上述第1 及第2壓力變化値的相差（AQi，— △Q]’）與上述漂移修正係數K，來算出被包括於上述第3壓力變化値Δ()3’的漂移量的漂移量算出部；及從上述第3壓力變化値AQ3’減算上述漂移量而得到被漂移修正的壓力變化値S的漂移修正部，·及將上述壓力變化値S與設定値相比較，若壓力變化値 S超過設定値’則判定在上述被檢查體有漏洩的判定部所I -13- 1361274 constitutes. According to a second aspect of the present invention, a leakage inspection body is applied to an object to be inspected, and when a predetermined time elapses, a pressure change or more is determined, thereby determining whether or not there is a leakage leak detection method. : In the correction mode, including: (a - )) a step of pressing the stop gas to the object to be inspected for a predetermined period of time; and (a - 2) determining the above-mentioned inspected period during the end of the above-mentioned pressurization period The first pressure change 値AQ 1 (a-3) of the body measures the second pressure change of the test object generated during the balance period of the first balance period: and (a-4) the measurement is generated during the second balance period The third pressure change of the test object during the inspection period: and (a _ 5 ) measuring the fourth pressure change of the test object generated during the first inspection period inspection period: and (a-6) according to the above The third and fourth pressure changes ΔQ3 - AQ4), and the ratio of the first and second pressure changes ΔQ1 - AQ2 ), to calculate the drift correction corresponding to the drift amount including the square force change 値Δ()3 Coefficient K and exhaust the above-mentioned object to be inspected The step of the first step of applying the gas to the object to be inspected during the pressurization period; and the second step of the second step after the end of the step of [AQ2] After the second step [AQ4 step 値相 phase difference (the phase difference of phlegm (reproduce the above third pressure and remember, r φ*.. I Λ -14- 1361274 in the inspection mode, including: (bl) will be as defined above The step of applying and stopping the gas pressure to the object to be inspected during the pressure rolling period; and (b-2) the step of measuring the first pressure change 値AQ1' of the inspected body generated in the first balancing period (b-3) a step of measuring the second pressure change 値AQ2' of the test object generated in the second balance period; and φ(b-4) measuring the above-mentioned one generated during the first inspection period a step of detecting a third pressure change 値AQ3' of the body; and (b_5) estimating according to the phase difference (ΔQ1'-AQ2') of the first and second pressure changes 与 and the drift correction coefficient K, Step 3 of the third pressure change 値AQ3' drift amount; and (b_6 The step of estimating the amount of leakage of the object to be inspected by subtracting the amount of drift from the third pressure change 値AQ3', and exhausting the object to be inspected. • A leak check according to the second aspect of the present invention The device is characterized in that: - comprising: - applying a gas pressure to the air pressure source of the object to be inspected; and applying a gas of a predetermined pressure to the object to be inspected from a pressure period of the air pressure source for only a predetermined length of time; After the application is completed, the pressure measuring unit that generates the pressure change 値 of the test object is measured; and in the correction mode, the gas pressure is applied to the test object only during the pressurization period, and after the end of the pressurization period The balance period is generated in the second balance period of the continuous period -15-1361274 during the period, the first and second pressure changes 値AQ1 and AQ2 measured by the pressure measuring unit, and the second balance period. The second inspection period after the end of the inspection period is generated by the second inspection period, and the third and fourth pressure changes 値AQ 3 and AQ 4 measured by the pressure measurement unit are based on the third The ratio of the phase difference (AQ3 to AQ4) of the fourth pressure change , and the phase difference (AQ 1 - AQ2 ) of the first and second pressure changes , are calculated to correspond to the third pressure change 値AQ 3 included in the third pressure change 値AQ 3 a drift correction coefficient calculation unit of the drift correction coefficient K of the drift amount; and a drift correction coefficient storage unit that memorizes the drift correction coefficient K; and in the inspection mode, the gas pressure is applied to the test object only during the pressurization period, The first balance period after the end of the pressurization period is generated separately from the second balance period that is continuous in the period, and the first and second pressure changes 値AQI', AQ2' measured by the pressure measuring unit, and The first inspection period after the completion of the second balancing period is caused by the third pressure change 値AQ3′ measured by the pressure measuring unit, and the phase difference (AQi, ΔQ) according to the first and second pressure changes 値And the drift correction coefficient K is calculated by the drift correction coefficient K, and the drift amount calculation unit included in the third pressure change 値Δ() 3′ is calculated; and the drift amount is subtracted from the third pressure change 値AQ3′ Get The drift correction unit of the pressure change 値S that is subjected to the drift correction, and the pressure change 値S are compared with the set 値, and if the pressure change 値 S exceeds the set 値', the determination unit that the leakage of the test object is determined is determined.

[S -16- 1361274 構成。依照本發明，測定發生在剛加壓期間之後所實行的第 1及第2平衡期間之間的差壓變化値δρι、Λρ2或壓力變化値AQ 1、AQ2，而以該測定値作爲線索來求出漂移修正係數K之故，因而在平衡期間藉由給予氣體的隔熱變化所發生的差壓變化最衰減的時候，因此可得到受到依隔熱變化影響很大的差壓變化値大的測定値。該結果，被使用於漂移修正係數算出式的（ΔΡ1 - ΔΡ2 )或是（AQ1 — AQ2 )不會呈現接近於〇的情形，可得到高精度的漂移修正係數K，而在短時間可實施漏洩檢查。【實施方式】漂移修正係數與漂移量的算出方法首先，使用第1圖來說明在本發明所致的漏洩檢查方法所使用的漂移修正係數K的導出過程。作爲在本發明所使用的基準槽，使用經加壓的氣體在加壓期間中可快速地溫度穩定般地溫度穩定性優異的槽者。在本發明中，在第1圖如以差壓變化特性曲線P所示地，將加壓期間結束後的平衡期間分割成兩個期間，測定從平衡期間開始時機經過時間τ 1之時機，及再經過時間T1之時機的差壓變化値ΔΡ 1、ΔΡ2，又測定從繼續檢查期間之開始經過時間 T2之時機的差壓變化値ΔΡ3，及在檢查期間的最後時間 T2所發生的差壓變化値ΔΡ4，而從此些測定値作爲K=( ΔΡ3 - ΔΡ4 ) / ( API — ΔΡ2 )求出修正係數 Κ。 -17- 1361274 在本發明中，測定差壓變化値ΔΡ 1、AP2的區間並不是第12圖的檢查期間A3，而是在平衡期間Α2，此點爲與依上述的專利文獻1的方法不相同。又，在檢查模式是在第1圖中以與校正模式相同定時來測定差壓變化値 ΔΡ1’、ΔΡ2’、ΔΡ3’，而在結束第]檢查期間之後進行排氣〇藉由儀錶壓型漏洩檢查裝置進行測定的情形，也以與第1圖同樣的定時來測定壓力變化値AQ1、AQ2、AQ3 ' △ Q4，而漂移修正係數也與在差壓檢測型的漏洩檢査裝置所使用的漂移係數同樣的導出過程所求出之故，因而在此僅說明有關於差壓變化値ΔΡ1、ΔΡ2、ΔΡ3、ΑΡ4。隔熱變化後的熱平衡期間的壓力Pt的變化是衰減特性之故，因而壓力變化是以 dP/dt=Ae-kt+C (1) t 的微分方程式所表示。式中A及k是常數，而C是漏洩差壓的時間微分而被視爲一定。差壓的相差分（T時間後的差壓變化）顯示，檢討修正係數如何地表現。在平衡期間T1時間後，差壓變化是 ΔΡ =(A/k)(l-e~kT1)+CTl (2) T1 而在2T1時間後爲 ΔΡ =(A/k)(l-e-2ltT1) + 2CTl (3) 2T1 將平衡期間如第1圖所示地作爲2T1，將各該壓力變化作爲AP丨、ΔΡ2，則將式（2 ) 、（ 3 )的（A / k )作爲[S -16- 1361274 constitutes. According to the present invention, the differential pressure change 値δρι, Λρ2 or the pressure change 値AQ 1 and AQ2 occurring between the first and second equilibrium periods which are performed immediately after the pressurization period is measured, and the measurement 値 is used as a clue. Since the drift correction coefficient K is generated, the differential pressure change occurring by the heat insulating change of the gas is most attenuated during the balance period, so that the differential pressure change which is greatly affected by the heat insulation change can be obtained. value. This result is used in the case where the drift correction coefficient calculation formula (ΔΡ1 - ΔΡ2) or (AQ1 - AQ2) does not appear close to 〇, and a highly accurate drift correction coefficient K can be obtained, and leakage can be performed in a short time. an examination. [Embodiment] Method for calculating drift correction coefficient and drift amount First, the derivation process of the drift correction coefficient K used in the leak inspection method by the present invention will be described using Fig. 1 . As the reference groove used in the present invention, a groove in which the pressurized gas is excellent in temperature stability in a temperature-stabilized period during the pressurization period is used. In the present invention, as shown in the first graph, the balance period after the end of the pressurization period is divided into two periods as shown by the differential pressure change characteristic curve P, and the timing of the elapsed time τ 1 from the balance period is measured, and The differential pressure change 値ΔΡ 1, ΔΡ2 at the timing of the time T1 is measured, and the differential pressure change 値ΔΡ3 at the timing of the elapse of the time T2 from the continuation of the inspection period and the differential pressure change occurring at the last time T2 during the inspection period are measured.値ΔΡ4, and from these measurements 修正 as K = ( Δ Ρ 3 - Δ Ρ 4 ) / ( API - Δ Ρ 2 ) to obtain the correction factor Κ. -17- 1361274 In the present invention, the interval in which the differential pressure change 値ΔΡ 1 and AP2 are measured is not the inspection period A3 in Fig. 12 but in the equilibrium period Α2, which is not in accordance with the method of Patent Document 1 described above. the same. Further, in the inspection mode, in the first drawing, the differential pressure changes 値ΔΡ1', ΔΡ2', and ΔΡ3' are measured at the same timing as the correction mode, and after the end of the inspection period, the exhaust gas is exhausted by the gauge pressure type. When the inspection device performs the measurement, the pressure changes 値AQ1, AQ2, and AQ3' ΔQ4 are also measured at the same timing as in Fig. 1, and the drift correction coefficient is also the drift coefficient used in the differential pressure detecting type leak check device. The same derivation process is used, so only the differential pressure changes 値ΔΡ1, ΔΡ2, ΔΡ3, and ΑΡ4 will be described here. The change in the pressure Pt during the heat balance after the change in the heat insulation is the attenuation characteristic, and thus the pressure change is expressed by the differential equation of dP/dt = Ae - kt + C (1) t . Where A and k are constants, and C is the time differential of the leakage differential pressure and is considered constant. The phase difference of the differential pressure (the differential pressure change after T time) shows how the correction coefficient is evaluated. After the T1 time during the equilibrium period, the differential pressure change is ΔΡ = (A/k) (le~kT1) + CTl (2) T1 and after 2T1 time is ΔΡ = (A/k) (le-2ltT1) + 2CTl ( 3) 2T1 The balance period is 2T1 as shown in Fig. 1, and the pressure change is taken as AP丨 and ΔΡ2, and (A / k) of equations (2) and (3) is taken as

[S -18- 1361274 (A/k) =B，式（2)及（3)是 APl = B(l-e*kT1)+CTl ⑷ ΔΡ1+ΔΡ2=Β(1 —e_2kT1) + 2CTl ⑸ 兩倍式（4)，減掉式（5) ’則成爲 ΔΡ1- AP2=B(l-2e"m+e'2kT1) ⑹ 將平衡後的時間（檢查期間中的測定時間）作爲T2 (第1 圖）[S -18- 1361274 (A/k) = B, Equations (2) and (3) are APl = B(le*kT1)+CTl (4) ΔΡ1+ΔΡ2=Β(1 —e_2kT1) + 2CTl (5) Double (4), minus (5) 'is ΔΡ1- AP2=B(l-2e"m+e'2kT1) (6) The time after the balance (measurement time during the inspection period) is taken as T2 (Fig. 1)

厶 P = Δ P1 + Δ P2+ Δ P3 = B(l-e'ktm+T2))+C(2Tl+T2) (7) 2T1+T2 則式（7 ) —式（5 )是成爲差壓ΔΡ3。因此 Δ P3 = B(e~ZkT1 - e~ki2T1+T2))+CT2 (8) 式（8 )的CT2是差壓AP4，惟藉由將計測時間作成充分久，則氣體溫度會穩定，而隔熱變化的漂移成分是成爲零，而僅留下漏洩成分之故，因而求出ΔΡ4( =CT2 )，由式 (8 )減掉CT2，採取與式（6 )的比例，則成爲， [數1] AP3-CT2 e_2kT,-e_k(2Tl+T2)如 ΔΡ1-ΔΡ2- l-2e_kT,+e_2kT, 在式（9)中，k是常數，ΤΙ、T2也是常數之故，因而K 也成爲常數。在此，在使用於校正時的被檢查體存在著漏洩，即使包括式（9)的ΔΡ3與漏洩成分CT2,在式（9)的分子也作爲ΔΡ3 — CT2之故，因而利用該減算，在式（9 )的分子被消去漏洩成分。亦即，式（9)的分子是不包括漏洩成分的檢測時的漂移量。將式（9 )予以變形，則成爲 -19* 1361274 Δ Ρ3—CT2=Κ( Δ Ρ1 - Δ Ρ2) =J (10) 若由式（9)求出常數Κ，則每次檢查時的漂移量J是藉由式（10 )，由在平衡期間所得到各差壓値API’、ΔΡ2’ 可求出。亦即在檢查模式中，由在第1平衡期間與第2平 " 衡期間的結束時機所測定的差壓變化値ΛΡ 1 ’、ΔΡ2 ’，就 - 可將第1檢查期間的結束時機的漂移量J估計爲J=( ΔΡ1 ’ — ΔΡ2’）K。因此，可將對應於第1檢查期間的結束 ^ 時機的經漂移修正的漏洩的差壓變化値S估計爲S = AP3’ -J » 式（10)的含義，是意味著從平衡期間的差壓變化，可估計檢查時的漂移量，又，意味著測定依加熱的隔熱變化之後的陡峻的平衡過渡的差壓變化而來估計漂移量之故，因而即使將平衡期間作成較久，差壓變壓變化也變大，檢查時的漂移値算出精度變高的情形。考慮被檢査體的溫度的漂移修正係數與漂移量的算出方法以上是被使用於漏洩檢查的漂移修正係數與漂移量的導出過程。上述的漂移修正係數K的導出是被檢查體的溫度與環境溫度爲相同溫度作爲前提。該前提條件是一般性，極普通的漏洩檢査是在該前提條件下進行。厶P = Δ P1 + Δ P2+ Δ P3 = B(l-e'ktm+T2))+C(2Tl+T2) (7) 2T1+T2 Then equation (7)—formula (5) is the differential pressure ΔΡ3 . Therefore, Δ P3 = B(e~ZkT1 - e~ki2T1+T2))+CT2 (8) CT2 of equation (8) is the differential pressure AP4, but by making the measurement time sufficiently long, the gas temperature is stabilized, and The drift component of the heat change change is zero, and only the leak component is left. Therefore, ΔΡ4 (=CT2) is obtained, and CT2 is subtracted from the equation (8), and the ratio to the equation (6) is obtained. Number 1] AP3-CT2 e_2kT, -e_k(2Tl+T2) such as ΔΡ1-ΔΡ2- l-2e_kT, +e_2kT, in equation (9), k is a constant, and ΤΙ and T2 are also constants, so K also becomes constant. Here, there is a leak in the test object used for the correction, and even if the ΔΡ3 and the leak component CT2 of the formula (9) are included, the numerator of the formula (9) is also ΔΡ3 - CT2, and thus the subtraction is used. The molecule of formula (9) is eliminated from the leak component. That is, the molecule of the formula (9) is the amount of drift when the detection of the leak component is not included. When the equation (9) is deformed, it becomes -19* 1361274 Δ Ρ 3 - CT2 = Κ ( Δ Ρ 1 - Δ Ρ 2) = J (10) If the constant Κ is obtained from the equation (9), the drift at each inspection The amount J is obtained by the equation (10) from the differential pressure API', ΔΡ2' obtained during the equilibrium period. That is, in the inspection mode, the differential pressure change 値ΛΡ 1 ', ΔΡ 2 ' measured by the end timing of the first balance period and the second balance period can be - the timing of the end of the first inspection period The drift amount J is estimated to be J = ( Δ Ρ 1 ' - Δ Ρ 2') K. Therefore, the differential pressure change 値S corresponding to the drift-corrected leakage corresponding to the end timing of the first inspection period can be estimated as S = AP3' - J » Expression (10), which means the difference from the balance period The pressure change can estimate the amount of drift during inspection, and it means that the drift amount is estimated by measuring the differential pressure change of the steep balance transition after the heat insulation change of heating, so even if the balance period is made longer, the difference is The pressure-variable pressure change also increases, and the drift 检查 calculation accuracy during inspection increases. The method of calculating the drift correction coefficient and the drift amount in consideration of the temperature of the object to be inspected The above is the derivation process of the drift correction coefficient and the drift amount used for the leak check. The above-described drift correction coefficient K is derived on the assumption that the temperature of the object to be inspected is the same as the ambient temperature. This precondition is general, and very common leak checking is performed under this precondition.

對於此，在漏洩檢查的事先處理工程，例如以高溫洗淨工程進行，或僅以洗淨水洗淨的洗淨工程進行時，則被檢查體是以具有與環境溫度不相同的溫度之狀態下被投進檢查工程。在此種狀況下，僅以上述的漂移修正係數K -20- 1361274 就無法進行漂移修正。以下，針對於被檢查體的溫度與環境溫度不相同時的漂移修正係數與漂移量的算出方法。在式（10 )中，CT2 (=AP〇是表示藉由被檢查體的漏洩所發生的差壓變化値。在此，在被檢查體雖沒有漏洩，但是利用被檢查體與環境溫度差會有溫度變化發生在被檢查體，而作成存在著溫度漂移者時，則溫度漂移是與漏洩相同地可視爲進行一定的漂移變化者，將該溫度漂移作爲ΔΡτ則式（1〇)是成爲 ΔΡ3-ΔΡτ=Κ(ΔΡ1-ΛΡ2) ⑼ 式中ΔΡΤ是依被檢查體的溫度與環境溫度的相差所致的溫度漂移。該ΔΡτ是代替CT2者之故，因而溫度差是使用沒有漏洩的被檢查體，而比例於檢查期間採取充分之後發生於時間Τ2之間的壓力變化値ΑΡ4。將環境溫度作爲Θ ，將被檢査體的溫度作爲Θ時，則在將第1檢查期間與第 2檢查期間之間採取充分久之後的第2檢查期間所測定的溫度漂移ΔΡτ是ΔΡτ = α ( Θ - θ ) 、α是比例常數，因此綜合性漂移量是成爲 JT=KUPl’-AP2’)+a(0-0) (12) 式中么？1’、“2’是在檢査模式的第1及第2平衡期間的結束時機分別所測定的差値變化値。欲求出比例常數a，則在同一環境溫度下變更同一被檢查體的溫度而至少給予兩個溫度Θ1、Θ2的溫度變化，成爲在第2檢查期間必須測定差壓變化値ΔΡ4,與ΔΡ42。使用好像有漏洩的被檢查體而將漏洩差壓作爲CT2，則在充分費了測定時間的狀態r -21 - ^ 1361274 下，起因隔熱變化的漂移成分是被衰減，成爲零之故，因而 (13) (14) CT2+a(01- θ 1)=ΔΡ4 1 CT2+a(02- θ 1)= ΔΡ4 2 由式（13)與（14) (15) α =(ΔΡ4 — ΔΡ4 )/(Θΐ — Θ2) 1 2 因此，式（12)是成爲 J =Κ(ΔΡ1,-ΔΡ2,)+{(ΔΡ4 -ΔΡ4)/(Θ1-Θ2)}(Θ- θ) (16) Τ 1 2 。漂移修正係數Κ，及溫度漂移修正係數α是在校正模式事先求出並加以記憶，而在檢測模式若在被檢査體的溫度 Θ，與環境溫度Θ，以及第1及第2平衡期間的結束時機測定ΔΡ1’、ΔΡ2’，則可求出包括藉由被檢査體的溫度與環境溫度之不相同所發生的漂移的漂移量Jt。藉由從在第 1檢查期間的時間T2 (第1圖）所測定的差壓變化値 AP3’減掉該漂移量，成爲可估計對應於真正漏洩的差壓變化値 S = AP3，- JT ° 漏洩檢査裝置實施例1 在第2圖表示藉由依本發明漂移修正係數算出方法’ 來算出漂移修正係數並予以動作的漏洩檢查裝置的一實施例。在該實施例中，將空氣壓（氣體壓）從空氣壓源Η 施加於被檢查體20與基準槽21’在施加空氣壓之後經過 -22- 1361274 所定時間之時機，利用在差壓檢測器22是否發生差壓而來判定在被檢查體20是否有漏洩。在表示於第2圖的漏洩檢查裝置的實施例中，以加壓期間、平衡期間、檢查期間、排氣期間作爲一周期進行動作。在該實施例中，設有在校正模式中由差壓檢測器22 的檢測訊號來測定如第1圖所示地把加壓期間結束後的平衡期間的時間二等分成各個T 1，而經過該前半的時間T 1 的時機與經過後半的時間T1的時機（在以下，將前半的平衡期間稱爲第1平衡期間，而將後半的平衡期間稱爲第 2平衡期間）的差壓變化値ΔΡ1及ΔΡ2，及發生在檢査期間的時間T2 (將該檢查期間稱爲第1檢査期間）之間的差壓變化値ΔΡ3,及充分延長檢查期間，發生在充分地穩定隔熱變化的影響的時機再經過時間T2之間（將該期間稱爲第2檢查期間）的差壓變化値CT2 ( =AP4 )的差壓變化測定部40- 1。又，在演算控制裝置50內設有：使用在差壓變化測定部40 - 1所測定的差壓變化値ΔΡ 1、ΔΡ2 ，及 ΔΡ3，CT2 而藉由 K=(AP3-CT2) / ( ΔΡ1 - ΔΡ2 ) 來算出漂移修正係數K的漂移修正係數算出部53- 3,及記憶以漂移修正係數算出部5 3 - 3所算出的漂移修正係數 K的漂移修正係數記憶部53- 4’及在檢查模式中對各個被檢查體算出漂移量J的漂移量算出記憶部53一 5 ’及從在檢查模式所測定的差壓變化値3 ’減掉漂移量J而算出對應於真正漏洩量的差壓變化値S的漏洩量算出部53 —6，及判定部53— 7 r ϊ Λ -23- 1361274 差壓變化測定部4 0 - 1是藉由：利用重調訊號可重調成重調狀態的自動重調零式放大器41’及將重調訊號輸入至該自動重調零式放大器41的重調訊號發生器42,及取樣從自動重調零式放大器41所輸出的差壓訊號的取樣保持電路43，及AD轉換被取樣保持在該取樣保持電路43的差壓訊號的AD轉換器44所構成。在校正模式中欲測定差壓變化値ΔΡ1與ΔΡ2，首先在被檢查體20的裝設部裝設經確認沒有漏洩的被檢查體20 ，而將空氣壓從空氣壓源11施加於被檢查體20與基準槽 2 1所定時間大約3〜5秒鐘。但是，該期間是藉由試驗壓力，被檢查體的形狀，材質而不相同。在經過所定時間的時機，而從將閥16與17控制成關閉的時機進入平衡期間。在本發明中，在進入平衡期間的時機，將增益給與自動重調零式放大器41，而在第1平衡期間與第2平衡期間進行差壓變化値ΔΡ1、ΔΡ2的測定。在第3圖表示該樣子。表示於第 3圖的曲線Α是自動重調零式放大器41的放大輸出。又，表示於第3圖的曲線A是表示從加壓期間結束時機就在自動重調零式放大器4 1具有增益而開始測定的狀態。重調訊號發生器4 2是從開始計測的定時，每當經過第 1平衡期間與第2平衡期間及每當經過第I檢查期間，將重調零訊號給予自動重調零式放大器41，俾將自動重調零式放大器41的增益重調成瞬時零的狀態。差壓變化値Δρι、 △ Ρ2、ΔΡ3及CT2是表示每當自動重調零式放大器41經過時間τ 1及時間Τ2而剛被重調之前的差壓變化値。 -24- 1361274 被取樣保持在取樣保持電路43的差壓變化値ΔΡ1與 ΔΡ2及ΔΡ3與CT2，是在AD轉換器44被AD轉換，而被拿入演算控制裝置50。演算控制裝置50是藉由電腦系統可構成。電腦系統是如所眾知地藉由中央演算處理裝置51’及存儲程式等的讀 • 出專用記憶體52，及記憶所輸入的資料等的可重寫的記憶體53，及輸入埠54，及輸出璋55所構成。 φ 在該實施例表示設置在可重寫的記億體53設置實測値記憶器5 3 - 1，並且在其他的記億領域構成控制重調訊號發生器42、取樣保持電路43，閥14、16、17等的控制部53 -2的程式，及構成漂移修正係數算出部53 - 3的程式的記億領域，及構成漂移修正係數記憶部53 - 4的記憶領域，及存儲構成漂移量算出記憶部53- 5的程式的領域，及存儲構成漏洩量算出部53- 6的程式的記憶領域’及存儲構成判定部53 - 7的程式的記憶領域的情形》 • 在本發明中，在校正模式中如上述地，由差壓變化値 API與AP2及ΔΡ3與CT2的測定値來求出漂移修正係數K ' 。依照該漂移修正係數算出方法，藉由式（9)從差壓變化 . 値ΔΡΙ與ΔΡ2及ΔΡ3與CT2求出漂移修正係數K。在漂移修正係數算出部53- 3實行該式（9)的演算，而將該算出結果作爲校正値K而被記憶在漂移修正係數記憶部53 - 4。當完成該記憶，則校正模式是結束。該校正模式是只要記憶漂移修正係數K，則在被檢查體的尺寸、形狀等有變化時，或是檢查條件（試驗壓、檢查時間等）有變 -25- 1361274 化時，重新校正的程度就可以。在檢查模式中與校正模式同樣地，在被檢查體20與基準槽21施加氣體壓（空氣壓），而在施加氣體壓之後將閥1 6與1 7控制成關閉的狀態，而在經過加壓期間之後，在自動重調零式放大器41給予增益，而在第1平衡期間及第2平衡期間與檢查期間來測定差壓變化値AP 1 ’與 △ P2’及ΔΡ3’（參照第4圖）。若得到差壓變化値ΔΡ1’、 ΔΡ2’、AP3’，貝(J漂移量算出記億部53 — 5被起動，而算出被包括於差壓變化値ΔΡ 3’的漂移量J。依本發明的漂移量J的算出方法是讀出被記憶在漂移修正係數記憶部53-4的漂移修正係數K，藉由該漂移修正係數K與在檢查模態所測定的差壓變化値ΔΡ 1 ’、ΔΡ2 ’ ，在漂移量算出記億部53— 5,藉由 J = UP1’一 ΔΡ2’)Κ (17) 所算出。藉由該漂移量J來修正ΔΡ3’的數値，可視作爲包括恰似費久時間把差壓値變化收斂在一定値的狀態的差壓變化値ΔΡ3’的漂移量。亦即，藉由從檢查期間所測定的差壓變化値ΔΡ3’減掉漂移量J，而藉由 S=AP3'-J (18) 可算出相當於真正的漏洩量的差壓變化値S。該算出是在漏洩量算出部53 — 6所實行。當相當於漏洩量的差壓變化値（經漂移修正的數値）S 被算出，則判定部5 3 — 7是比較相當於漏洩量的差壓變化値S與基準値RV，而相當於漏洩量的差壓變化値S比基 S- 9*.·， V ^ i -26- 1361274 準値RV還大，則判定爲「有漏洩」。該判定結果是從輸出埠55被輸出至外部。實施例2 第5圖是表示使用漂移量算出方法來實施漏洩檢查的漏洩檢查裝置的第2實施例。該實施例是對於第2圖的實施例，再設置測定環境溫度Θ與被檢查體的溫度Θ的溫度感測器25及26’而在演算控制裝置50作成設置溫度係數算出部53- 8，及記億該溫度係數算出部53-8所算出的溫度係數α的溫度係數記憶部53 - 9的構成。溫度係數算出部53— 8是在校正模式中’藉由式（15 )來算出在相同被檢査體的不相同的溫度Θ1、_Θ2所測定而被求出的溫度漂移修正係數α。當溫度係數算出部5 3 -8算出溫度漂移修正係數α，則溫度係數記憶部5 3 - 9是記錄該溫度係數α。在檢査模式中，當從漂移修正係數記憶部5 3 - 4讀出漂移修正係數Κ之同時，從溫度係數記憶部5 3 - 9讀出溫度係數α。與此同時地，藉由溫度感測器2 5、2 6來測定環境溫度Θ與被檢查體20的溫度Θ’並將氣體壓施加於被檢查體20與基準槽2〗。在從加壓期間的結束時機開始的平衡期間每一時間Τ1地測定差壓變化値ΔΡΓ與ΔΡ2’。又測定在檢查期間中的時間Τ2所發生的差壓變化値ΔΡ3 ’ 。使用此些測定値ΔΡ1 ’、ΔΡ2’、ΔΡ3’及溫度測定値θ、Θ -27- 1361274 ，首先，漂移量算出記憶部53 — 5是藉由式（12)算出漂移量J τ。 ' 又，漏洩量算出部53 - 6是使用漂移量算出記憶部 53-5所算出的漂移量JT，將對應於被檢查體20的真正漏洩量的差壓變化値S，藉由 S=厶 P3’一JT (19) 算出。對應於在此所得到的漏洩量的差壓變化値S，是即使被檢查體20的溫度Θ與環境溫度Θ不一致時，也成爲接近於除去藉由該溫度差所發生的漂移量的真正漏洩量的差壓變化値。當漏洩量算出部53- 6算出對應於漏洩量的差壓變化値S，則判定部5 3 - 7是將差壓變化値S與基準値RV相比較，若比基準値RV還小則判定爲「沒有漏洩」，若還大則判定爲「有漏洩」。實施例3 . 第6圖是表示將本發明適用於儀錶壓型漏洩檢查裝置的實施例。與表示於第2圖的差壓式漏洩檢査裝置不同處，是在儀錶型漏洩檢査裝置未設置基準槽21，而作成僅將空氣壓直接施加於被檢查體20的構成，作爲測定被檢查體20內的壓力變化的構成。所以，在該實施例3，將藉由自動重調零式放大器41，及重調訊號發生器42，及取樣保持電路43,及AD轉換器44所構成的部分稱爲壓力變化測定部4 0 - 2。In this case, when the pre-treatment process of the leak check is performed, for example, by a high-temperature washing process or a washing process of washing only with washing water, the object to be inspected is in a state different from the ambient temperature. It was put into inspection work. In this case, the drift correction cannot be performed only by the above-described drift correction coefficient K -20 - 1361274. Hereinafter, a method of calculating a drift correction coefficient and a drift amount when the temperature of the object to be inspected is different from the ambient temperature is used. In the formula (10), CT2 (=AP〇 indicates a differential pressure change 发生 caused by leakage of the test object. Here, although the test object does not leak, the temperature difference between the test object and the environment is used. When a temperature change occurs in the object to be inspected and a temperature drift occurs, the temperature drift is regarded as a change in drift similarly to the leak. The temperature drift is ΔΡτ and the equation (1〇) is ΔΡ3. -ΔΡτ=Κ(ΔΡ1-ΛΡ2) (9) where ΔΡΤ is the temperature drift due to the difference between the temperature of the test object and the ambient temperature. The ΔΡτ is the one that replaces the CT2, so the temperature difference is checked without leakage. Body, and the ratio is the pressure change 发生4 that occurs between time Τ2 after taking sufficient during the inspection. When the ambient temperature is taken as Θ and the temperature of the object to be inspected is taken as Θ, the first inspection period and the second inspection period are The temperature drift ΔΡτ measured during the second inspection period after sufficiently long is ΔΡτ = α ( Θ - θ ), and α is a proportional constant, so the comprehensive drift amount becomes JT = KUPl '-AP2') + a ( 0-0) (1 2) What? 1' and "2' are the difference 値 measured by the end timing of the first and second balancing periods of the inspection mode. To obtain the proportional constant a, the temperature of the same subject is changed at the same ambient temperature. At least two temperature changes of temperature Θ1 and Θ2 are given, and it is necessary to measure the differential pressure change 値ΔΡ4 and ΔΡ42 during the second inspection period. When the leaked pressure is used as the CT2, the leakage differential pressure is used as the CT2. In the state of the measurement time r -21 - ^ 1361274, the drift component due to the change in the heat insulation is attenuated and becomes zero, and thus (13) (14) CT2+a(01- θ 1)=ΔΡ4 1 CT2+a (02- θ 1)= ΔΡ4 2 From the equations (13) and (14) (15) α = (ΔΡ4 - ΔΡ4 ) / (Θΐ - Θ 2) 1 2 Therefore, the equation (12) is J = Κ (ΔΡ1, -ΔΡ2,)+{(ΔΡ4 -ΔΡ4)/(Θ1-Θ2)}(Θ- θ) (16) Τ 1 2 The drift correction coefficient Κ and the temperature drift correction coefficient α are obtained in advance in the correction mode and are In the detection mode, ΔΡ1' and ΔΡ2' are measured in the detection mode at the temperature of the object to be inspected, the ambient temperature Θ, and the end timing of the first and second balance periods. The drift amount Jt including the drift caused by the temperature difference between the subject and the ambient temperature can be obtained. The differential pressure change 値AP3 measured from the time T2 (Fig. 1) in the first inspection period 'The amount of drift is subtracted so that the differential pressure change corresponding to the true leak can be estimated 値S = AP3, - JT ° Leakage check device Example 1 In Fig. 2, the drift is calculated by the drift correction coefficient calculation method according to the present invention. An embodiment of the leak check device that corrects the coefficient and operates. In this embodiment, air pressure (gas pressure) is applied from the air pressure source 于 to the test object 20 and the reference groove 21' after the application of the air pressure - 22 to 1361274 The timing of the predetermined time is determined whether or not there is a leak in the test object 20 by whether or not a differential pressure is generated in the differential pressure detector 22. In the embodiment of the leak check device shown in Fig. 2, the pressurization period is used. The balance period, the inspection period, and the exhaust period are operated as one cycle. In this embodiment, the detection signal by the differential pressure detector 22 in the correction mode is measured as shown in Fig. 1. The time of the balance period after the end of the period is equally divided into T1, and the timing of the time T1 passing the first half and the timing of the time T1 passing the second half (hereinafter, the balance period of the first half is referred to as the first balance period, and The differential pressure change 値ΔΡ1 and ΔΡ2 of the second half of the balance period is referred to as the second balance period, and the differential pressure change 値ΔΡ3 between the time T2 (referred to as the first inspection period) of the inspection period, And the measurement of the differential pressure change of the differential pressure change 値CT2 (=AP4) occurring between the time T2 and the elapsed time T2 (this period is referred to as the second inspection period) is sufficiently extended during the inspection period. Department 40-1. Further, the calculation control device 50 is provided with the differential pressure changes 値ΔΡ 1 , ΔΡ 2 , and ΔΡ 3 , CT 2 measured by the differential pressure change measuring unit 40 - 1 by K = (AP3-CT2) / ( ΔΡ1 - ΔΡ2) The drift correction coefficient calculation unit 53-1 for calculating the drift correction coefficient K, and the drift correction coefficient storage unit 53-4' for storing the drift correction coefficient K calculated by the drift correction coefficient calculation unit 53-3 In the inspection mode, the amount of drift of the drift amount J is calculated for each subject, and the memory unit 53-5' is calculated, and the drift amount J is subtracted from the differential pressure change 値3' measured in the inspection mode to calculate the difference corresponding to the true leak amount. The leakage amount calculation unit 53-6 of the pressure change 値S, and the determination unit 53-7 r ϊ -23 - 1361274 The differential pressure change measurement unit 40-1 is reregulated into a re-adjustment state by using the re-tuning signal The auto-reset zero amplifier 41' and the re-tuning signal input to the re-tuning signal generator 42 of the auto-resetting zero-amplifier 41, and the sampling of the differential-voltage signal outputted from the auto-resetting zero-amplifier 41 Hold circuit 43, and AD conversion is sampled and held in the sample and hold electricity Differential pressure signal 43 AD converter 44 is constituted. In the calibration mode, the differential pressure changes 値ΔΡ1 and ΔΡ2 are measured. First, the test object 20 that has been confirmed to be leak-free is installed in the mounting portion of the test object 20, and the air pressure is applied from the air pressure source 11 to the test object. 20 and the reference slot 2 1 set the time of about 3 to 5 seconds. However, during this period, the shape of the object to be inspected and the material are not the same by the test pressure. At the timing of the lapse of the predetermined time, the timing of controlling the valves 16 and 17 to be closed is entered into the balancing period. In the present invention, the gain is given to the automatic reset zero amplifier 41 at the timing of entering the balance period, and the differential pressure changes 値ΔΡ1 and ΔΡ2 are measured in the first balance period and the second balance period. This is shown in Figure 3. The curve 表示 shown in Fig. 3 is an amplified output of the auto-resetting null amplifier 41. Further, the curve A shown in Fig. 3 is a state in which the measurement is started when the auto-replacement null amplifier 41 has a gain from the end of the pressurization period. The reset signal generator 42 is a timing from the start of measurement, and the reset zero signal is given to the auto-resetting null amplifier 41 every time the first balance period and the second balance period are passed and every time the first inspection period elapses. The gain of the auto-re-zeroing amplifier 41 is retuned to a state of instantaneous zero. The differential pressure changes 値Δρι, Δ Ρ2, ΔΡ3, and CT2 are differential pressure changes 値 before the auto-reset null amplifier 41 has just been reset by time τ 1 and time Τ 2 . -24 - 1361274 The differential pressure changes 値ΔΡ1 and ΔΡ2 and ΔΡ3 and CT2 sampled and held in the sample-and-hold circuit 43 are AD-converted by the AD converter 44, and are taken into the arithmetic control unit 50. The calculation control device 50 is constructed by a computer system. The computer system is a read/write dedicated memory 52 that is known by the central processing device 51' and a stored program, and a rewritable memory 53 for storing the input data and the like, and an input port 54, And the output 璋55 is composed. In this embodiment, it is shown that the rewritable memory unit 53 is provided with the actual measurement memory 53-1, and in other fields, the control re-tuning signal generator 42, the sample and hold circuit 43, the valve 14, The program of the control unit 52-3 such as 16 and 17, and the field of the program constituting the drift correction coefficient calculation unit 53.3, and the memory area constituting the drift correction coefficient storage unit 53-4, and the storage configuration drift amount calculation The field of the program of the memory unit 53-5, and the memory area ' of the program constituting the leak amount calculation unit 56-1 and the case where the memory area of the program constituting the determination unit 53.7 is stored>> In the present invention, the correction is performed. In the mode, as described above, the drift correction coefficient K' is obtained from the differential pressure change 値 API and the measurement of AP2 and ΔΡ3 and CT2. According to the drift correction coefficient calculation method, the drift correction coefficient K is obtained from the differential pressure by the equation (9). 値ΔΡΙ and ΔΡ2, and ΔΡ3 and CT2. The calculation of the equation (9) is performed by the drift correction coefficient calculation unit 53-1, and the calculation result is stored in the drift correction coefficient memory unit 53-4 as the correction 値K. When the memory is completed, the correction mode is ended. This correction mode is a degree of recalibration when the size, shape, and the like of the object to be inspected are changed as long as the memory drift correction coefficient K is changed, or when the inspection condition (test pressure, inspection time, etc.) is changed -25-1361274. can. In the inspection mode, similarly to the correction mode, gas pressure (air pressure) is applied to the test object 20 and the reference groove 21, and after the gas pressure is applied, the valves 16 and 17 are controlled to be closed, and after the addition is performed. After the pressure period, the gain is given by the automatic reset null amplifier 41, and the differential pressure changes 値AP 1 ' and Δ P2' and ΔΡ3' are measured during the first balance period and the second balance period and the inspection period (refer to FIG. 4). ). When the differential pressure changes 値ΔΡ1', ΔΡ2', and AP3' are obtained, the J-drift amount calculation unit 53-5 is activated, and the drift amount J included in the differential pressure change 値ΔΡ 3' is calculated. The method of calculating the drift amount J is to read the drift correction coefficient K stored in the drift correction coefficient storage unit 53-4, and the drift correction coefficient K and the differential pressure change 値ΔΡ 1 ' measured in the inspection mode, ΔΡ2 ' is calculated by calculating the amount of drift in the billions of 53-5, by J = UP1' - ΔΡ2') Κ (17). By correcting the number Δ of ΔΡ3' by the amount of drift J, it can be regarded as the amount of drift of the differential pressure change 値ΔΡ3' including the state in which the differential pressure change is converged in a constant state just for a long time. That is, by subtracting the drift amount J from the differential pressure change 値ΔΡ3' measured during the inspection period, the differential pressure change 値S corresponding to the true leakage amount can be calculated by S = AP3' - J (18). This calculation is performed by the leak amount calculation unit 51-6. When the differential pressure change 値 (the number of drift corrections) S corresponding to the leak amount is calculated, the determination unit 537 is a differential pressure change 値S corresponding to the leak amount and the reference 値RV, which corresponds to the leak. The amount of differential pressure change 値S is larger than the base S- 9*.·, V ^ i -26- 1361274, and it is judged as "leakage". This determination result is output from the output port 55 to the outside. [Embodiment 2] Fig. 5 is a view showing a second embodiment of a leak check device for performing a leak check using a drift amount calculation method. In the embodiment, in the embodiment of Fig. 2, temperature sensors 25 and 26' for measuring the ambient temperature Θ and the temperature 被 of the object to be inspected are provided, and the temperature control unit 53-1 is set in the calculation control device 50. The configuration of the temperature coefficient storage unit 53-1 of the temperature coefficient α calculated by the temperature coefficient calculation unit 53-8. The temperature coefficient calculation unit 53-4 is a temperature drift correction coefficient α obtained by calculating the temperatures Θ1 and _Θ2 which are different from each other in the same subject in the correction mode by the equation (15). When the temperature coefficient calculation unit 5 3 -8 calculates the temperature drift correction coefficient α, the temperature coefficient storage unit 539 - records the temperature coefficient α. In the inspection mode, while the drift correction coefficient 读出 is read from the drift correction coefficient storage unit 543, the temperature coefficient α is read from the temperature coefficient storage unit 539. At the same time, the ambient temperature Θ and the temperature 被' of the test object 20 are measured by the temperature sensors 25 and 26, and the gas pressure is applied to the test object 20 and the reference groove 2. The differential pressure changes 値ΔΡΓ and ΔΡ2' are measured every time during the balance period from the end timing of the pressurization period. Further, the differential pressure change 値ΔΡ3 ' occurred during the time Τ2 in the inspection period was measured. Using these measurements 値ΔΡ1', ΔΡ2', ΔΡ3', and temperature measurement 値θ, -27 -27 - 1361274, first, the drift amount calculation memory unit 51-5 calculates the drift amount J τ by the equation (12). In addition, the leakage amount calculation unit 56-1 is a drift amount JT calculated by the drift amount calculation memory unit 53-5, and the differential pressure change 値S corresponding to the true leakage amount of the test object 20 is obtained by S=厶P3'-JT (19) is calculated. The differential pressure change 値S corresponding to the leakage amount obtained here is such that when the temperature Θ of the object 20 does not coincide with the ambient temperature ,, the true leakage close to the drift amount caused by the temperature difference is obtained. The differential pressure of the quantity changes 値. When the leak amount calculation unit 56-1 calculates the differential pressure change 値S corresponding to the leak amount, the determination unit 537-7 compares the differential pressure change 値S with the reference 値RV, and determines that it is smaller than the reference 値RV. "No leakage", if it is still large, it is judged as "leakage". Embodiment 3 Fig. 6 is a view showing an embodiment in which the present invention is applied to a gauge pressure type leak detecting device. In contrast to the differential pressure leak test apparatus shown in FIG. 2, the gauge leak detection apparatus is not provided with the reference groove 21, and the air pressure is directly applied to the test object 20, and the test object is measured. The composition of the pressure changes within 20. Therefore, in the third embodiment, the portion formed by the automatic reset zero amplifier 41, the reset signal generator 42, the sample hold circuit 43, and the AD converter 44 is referred to as a pressure change measuring portion 40. - 2.

F -28 - 1 ) 1361274 在儀錶型漏洩檢查裝置，也在校正模式將平衡期間分成兩半，每當經過第1平衡期間與第2平衡期間的各時間 T1，測定發生在該時間內的壓力變化値AQl、AQ2。又，在第1檢查期間內測定在經過時間T2的時間內所發生的壓力變化値AQ3。又，將從開始檢查經過充分時間的例如從加壓期間經過數1 〇秒鐘的時機經過時間T2之間所發生的被檢查體20內壓力變化ΔΡ4測定作爲△(：，而從此些測定値藉由K=(AQ3— AC) / (AQ1 - AQ2)來算出漂移修正係數K。該漂移修正係數K之算出是與第2圖的實施例同樣地，在設於演算控制裝置50的漂移修正係數算出部53 - 3被實行。被算出的漂移修正係數是被記憶在漂移修正係數記憶部53-4,結束校正模式。在檢查模式中與校正模同樣地，在平衡期間測定AQ 1 ’ 與AQ2 ’，而在檢查期間測定AQ3 ’。由此些測定値與漂移修正係數K，漂移量算出記憶部53— 5是藉由J=(AQ1’ —Δ(^2’）Κ來算出漂移量J。漏洩量算出部53 - 6是從在檢査期間所測定的測定値AQ 3 ’來減掉漂移量算出記憶部 53 — 5所算出的漂移量J而得到對應於漂移修正的真正漏洩量的壓力變化値S = AQ3’_J。判定部53— 7是將對應於漂移修正的真正漏洩量的壓力變化値S與基準値RV相比較，若壓力變化値S超過基準値RV，則判定爲「有漏洩 j ，而比基準値RV小，則判定爲「沒有漏洩」。F -28 - 1 ) 1361274 In the instrument type leak check device, the balance period is also divided into two halves, and the pressure occurring during that time is measured each time T1 of the first balance period and the second balance period is passed. Change 値AQl, AQ2. Further, during the first inspection period, the pressure change 値AQ3 generated during the elapse of the time T2 is measured. Further, the pressure change ΔΡ4 in the test object 20 which is generated between the elapsed time T2 and the time T2 elapsed from the pressurization period for a sufficient period of time, for example, is measured as Δ (:, and from these measurements 値The drift correction coefficient K is calculated by K = (AQ3 - AC) / (AQ1 - AQ2). The calculation of the drift correction coefficient K is the drift correction provided in the arithmetic control device 50 as in the embodiment of Fig. 2 The coefficient calculation unit 53-1 is executed. The calculated drift correction coefficient is stored in the drift correction coefficient storage unit 53-4, and the correction mode is ended. In the inspection mode, similarly to the correction mode, AQ 1 ' is measured during the balance period. AQ2', and AQ3' is measured during the inspection. The measured 値 and drift correction coefficient K, the drift amount calculation memory unit 53-5 is calculated by J = (AQ1' - Δ(^2') Κ J. The leakage amount calculation unit 53-6 calculates the drift amount J calculated by the memory unit 53-5 from the measurement 値AQ 3 ' measured during the inspection period, and obtains the true leakage amount corresponding to the drift correction. Pressure change 値S = AQ3'_J. Judgment 53-7 compares the pressure change 値S corresponding to the true leakage amount of the drift correction with the reference 値RV. If the pressure change 値S exceeds the reference 値RV, it is determined that “there is leakage j and is smaller than the reference 値RV. Then it is judged as "no leakage".

-29- 1361274 實施例4 第7圖是表示在第6圖的儀錶壓型漏洩檢查裝置，第5圖同樣地設置環境溫度測定用的溫度感測器2 5，測定被檢查體20的溫度的溫度感測器26，藉由此些溫感測器2 5與2 6所測定的環境溫度Θ，及測定被檢查體的溫度Θ，即使環境溫度Θ與被檢查體20的溫度Θ不相的情形，也作成可實行真正的漂移修正的實施例》除了空氣壓電路爲儀錶壓型以外是與表示於第5圖實施例相同之故，因而在此省略了以上的說明。變形例在上述的第2、5、6、7圖的各實施例中，在差壓化測定部40 _ 1或壓力變化測定部40 - 2使用自動重調式放大器41，而如第3圖所示地，在第1及第2平衡期，與第1及第2檢查期間的各開始定時進行重調零，在期間的結束時機直接檢測出差壓變化値ΔΡ1、ΔΡ2、ΔΡ3 CT2 (或是 AQ1、AQ2、AQ3、△<：)的情形，惟也可知進行重調零。例如檢測出第1圖的差壓特性曲線的各定的差壓値？〇、戸1、？2、？3、？4、？5，而在演算控制裝 50內將差壓變化求出作爲ΔΡ1=Ρ1— P0、ΔΡ2 = Ρ2-Ρ1 △ Ρ3 = Ρ3 - Ρ2、CT2 = P5 - Ρ4 也可以。又，在此些各實施例中，如第1圖及第3圖所示地表示在第1平衡期間，第2平衡期間及第1檢查期間未次隔著間隔而加以設定的情形，惟在此些期間之間隔著與及度 20 同的變零間各未時置依比 -30- 1361274 此些期間隔著還短而被決定的間隔也可以。實驗例在第13圖表示依第2圖的實施例的漂移修正的實驗例。在此作爲被檢查體使用確認沒有漏洩的槽。又，依本發明的漂移修正係數算出方法所算出的漂移修正係數K 是由24 °C的被檢査體所得到的資料算出。室溫（封入於被檢查體與基準槽的氣體溫度）是24°C。圖中左欄A是被檢查體的溫度，B欄是在第1平衡期間（2.5秒鐘）所測定的差壓値ΔΡ1’，（：欄是在第2平衡期間（2.5秒鐘）所測定的差壓値ΔΡ2’，D攔是在檢査期間（3秒鐘）所測定的差壓値ΔΡ3’，Ε欄是ΔΡ1’ — ΔΡ2’之數値，F欄是依本發明的漂移修正係數算出方法所算出的漂移修正係數Κ之數値，在此，爲由在24°C的被檢查體所測定的各測定値的平均値求出，作爲0.0 8 7 » G欄是漂移修正量】=(ΛΡ1’-ΔΡ2’）K的數値，而Η欄是表示藉由表示於G欄的漂移修正量J來漂移修正D欄的測定値 △ Ρ3’的修正結果S = AP3’-J。差壓的單位是daPa(Deka Pascal)。爲了比較，在I欄表示將在表示於D欄的最下段的標準溫度24°C的檢查期間的差壓値ΔΡ3’的平均値4.1 ( daPa )利用作爲固定的漂移修正量厂，並從在表示於D欄的檢查期間所測定的差壓値ΔΡ3’減掉該固定漂移修正量J，的數値。-29- 1361274 Embodiment 4 Fig. 7 is a view showing a meter pressure type leak detecting device of Fig. 6, and a temperature sensor 25 for measuring an ambient temperature is provided in the same manner as in Fig. 5, and the temperature of the object to be inspected 20 is measured. The temperature sensor 26 measures the temperature Θ measured by the temperature sensors 25 and 26 and determines the temperature 被 of the object to be inspected, even if the ambient temperature Θ is not the same as the temperature of the object 20 to be inspected. In other words, an embodiment in which true drift correction can be performed is the same as that shown in the fifth embodiment except that the air pressure circuit is of the gauge type, and thus the above description is omitted. Modifications In each of the second, fifth, sixth, and seventh embodiments described above, the differential pressure measuring unit 40_1 or the pressure change measuring unit 40-2 uses the automatic reset amplifier 41, and as shown in FIG. In the first and second balancing periods, the first and second inspection periods are reset to zero at each start timing, and the differential pressure changes 値ΔΡ1, ΔΡ2, ΔΡ3 CT2 (or AQ1) are directly detected at the end timing of the period. In the case of AQ2, AQ2, △<:), it is also known that the re-adjustment is zero. For example, the respective differential pressures of the differential pressure characteristic curve of Fig. 1 are detected? 〇, 戸 1,? 2,? 3,? 4,? 5, and the differential pressure change is obtained as ΔΡ1=Ρ1—P0, ΔΡ2 = Ρ2-Ρ1 △ Ρ3 = Ρ3 - Ρ2, CT2 = P5 - Ρ4 in the calculation control device 50. Further, in each of the above embodiments, as shown in FIGS. 1 and 3, in the first balancing period, the second balancing period and the first inspection period are set without intervening intervals, but only in the case of the first balancing period. During these periods, the interval between the zeros of the same degree and the degree of zero is not the same. -30-1361274 The interval between the periods is short and the interval is determined. Experimental Example Fig. 13 shows an experimental example of drift correction according to the embodiment of Fig. 2. Here, it is used as a test object to confirm that there is no leak. Further, the drift correction coefficient K calculated by the drift correction coefficient calculation method according to the present invention is calculated from the data obtained by the subject at 24 °C. The room temperature (the temperature of the gas enclosed in the test object and the reference groove) was 24 °C. In the figure, the left column A is the temperature of the object to be inspected, and the column B is the differential pressure 値ΔΡ1' measured during the first balancing period (2.5 seconds), (the column is measured in the second balancing period (2.5 seconds)). The differential pressure 値ΔΡ2', D is the differential pressure 値ΔΡ3' measured during the inspection period (3 seconds), the Ε column is the number ΔΡ1' - ΔΡ2', and the F column is calculated according to the drift correction coefficient of the present invention. The number of drift correction coefficients 値 calculated by the method is obtained by the average 値 of each measurement 测定 measured by the test object at 24 ° C, and is the drift correction amount in the column of 0.0 8 7 » G. (ΛΡ1'-ΔΡ2') The number of K is 値, and the Η column indicates the correction result S = AP3'-J of the measurement 値Δ Ρ3' of the drift correction D column by the drift correction amount J indicated in the G column. The unit of the pressure is daPa (Deka Pascal). For comparison, the average value 値4.1 (daPa) of the differential pressure 値ΔΡ3' during the inspection period of the standard temperature of 24 ° C indicated at the lowermost stage of the D column is used as the I column. Fixed drift correction factory and subtract this fixed drift from the differential pressure 値ΔΡ3' measured during the inspection indicated in column D Positive amount J, the number Zhi.

-31 - 1361274 由B欄、C欄、D欄可知在第1平衡期間，第2平衡期間分別得到的差壓値是成爲ΔΡ1’ > ΔΡ2’ > ΔΡ3’之關係，尤其是在第1平衡期間所得到的差壓値ΔΡ1’與在第2 平衡期間所得到的差壓値AP2’之相差的數値（E欄）的數値是呈現較大的數値。在本發明中，在平衡期間以K= ( AP3, 一 CT2 ) / ( △ PI’一 ΑΡ2’）求出漂移修正係數Κ之故，因而即使分母之數値作成較大，或是將平衡期間延長，也不會使分母接近於零。在此點上，可得到高可靠性的漂移修正係數K。使用在表示於第13圖的實驗例確認沒有漏洩的被檢查體來進行漏洩檢査的實驗。所以本來漂移修正結果是應表示幾乎零，惟依照使用表示於I欄的固定漂移値（4.1) 的修正方法，則修正結果分布在+1.2--0.6。對於此，依照使用依本發明的漂移修正係數的漂移修正方法，則如Η欄所示地分布於+ 0.4〜一 0.2之間，無限地被收斂在近於零的數値。由此就可看出依本案發明的漂移修正係數Κ的可靠性高的情形。【圖式簡單說明】第1圖是表示用於說明本發明的漂移修正係數算出方法的圖表。第2圖是表示用於說明實行本發明的漂移修正係數算出方法，算出漂移修正係數’記億該漂移修正係數，而在檢查模式可利用的漏洩檢查裝置的實施例的方塊圖。 -32- 1361274 第3圖是表示用於說明使用圖示於第2圖的漏洩檢查裝置來算出依本發明的漂移修正係數的動作的圖表。第4圖是表示用於說明在圖示於第2圖的漏洩檢查裝置來算出漂移修正係數，而使用該漂移修正係數來進行漏 . 洩檢査的動作的圖表。 - 第5圖是表示用於說明本發明的漂移修正係數算出方法，漂移量算出方法，漂移修正方法的其他例子的方塊圖第6圖是表示用於說明以儀錶壓型漏洩檢查裝置來實現本發明的漂移修正係數算出方法的實施例的方塊圖。第7圖是表示用於說明將本發明的其他的漂移修正係數算出方法適用於儀錶壓型漏洩檢查裝置的例子的方塊圖〇第8圖是表示用於說明習知的漏洩檢查裝置的構成的方塊圖。 • 第9圖是表示用於說明習知的漏洩檢查裝置的漂移修正方法的圖表。 ' 第10圖是表示用於說明習知的漏洩檢査裝置的漂移修正方法的其他例子的圖表。第11圖是表示用於說明習知的儀錶壓型漏洩檢查裝置的構成的方塊圖。第12圖是表示用於說明漏洩檢查裝置的一般性動作周期的圖表。第13圖是表示用於說明確認本發明的效果所用的實 k 3- -33- 1361274 驗例的圖式。【主要元件符號說明】 1 1 :空氣壓源 14、 16、 17:閥 . 20 :被檢查體 21 :基準槽 φ 22 :差壓檢測器 2 5、2 6 :溫度感測器 40 —〗：差壓變化測定部 40 — 2 :壓力變化測定部 41:自動重調零式放大器 42:重調訊號發生器 43 :取樣保持電路 44 : AD轉換器 • 5 〇 :演算控制裝置 53—3:漂移修正係數算出部 ' 5 3 — 4 :漂移修正係數記憶部 ~ 53—5:漂移量算出記憶部 5 3 — 6 :漏洩量算出部 5 3-7:判定部 5 3 _ 8 :溫度係數算出部 5 3 - 9 :溫度係數記憶部 -34--31 - 1361274 It can be seen from column B, column C, and column D that the differential pressure obtained in the second equilibrium period is the relationship of ΔΡ1' > ΔΡ2' > ΔΡ3', especially in the first balance period. The number 値 (column E) of the difference ΔΔΡ1' obtained during the balance period and the difference pressure AP2' obtained during the second balance period is a large number 呈现. In the present invention, the drift correction coefficient 求出 is obtained by K=( AP3, a CT2 ) / ( Δ PI ' ΑΡ 2') during the balance period, so that even if the number of denominators is made larger, or the balance period is Extending does not make the denominator close to zero. At this point, a highly reliable drift correction coefficient K can be obtained. An experiment of leak detection was performed using the test piece shown in Fig. 13 to confirm that there was no leaked test object. Therefore, the original drift correction result should be almost zero, but the correction result is distributed at +1.2--0.6 according to the correction method using the fixed drift 4.1 (4.1) indicated in the I column. For this reason, the drift correction method according to the drift correction coefficient according to the present invention is distributed between + 0.4 and 0.2 as shown in the column, and is infinitely converged to a number close to zero. From this, it can be seen that the reliability of the drift correction coefficient 发明 according to the present invention is high. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a graph showing a method of calculating a drift correction coefficient according to the present invention. Fig. 2 is a block diagram showing an embodiment of a leak check device which can be used in the inspection mode for explaining the drift correction coefficient calculation method embodying the present invention and calculating the drift correction coefficient > -32 - 1361274 Fig. 3 is a graph for explaining the operation of calculating the drift correction coefficient according to the present invention using the leak check device shown in Fig. 2. Fig. 4 is a graph for explaining an operation of performing a leak check using the drift correction coefficient by calculating a drift correction coefficient by the leak check device shown in Fig. 2. - Fig. 5 is a block diagram for explaining a drift correction coefficient calculation method, a drift amount calculation method, and another example of a drift correction method according to the present invention. Fig. 6 is a view for explaining the implementation of the instrument type pressure leak test device. A block diagram of an embodiment of the drift correction coefficient calculation method of the present invention. Fig. 7 is a block diagram for explaining an example in which another drift correction coefficient calculation method of the present invention is applied to a gauge pressure leak test apparatus. Fig. 8 is a view for explaining a configuration of a conventional leak check device. Block diagram. Fig. 9 is a graph showing a drift correction method for explaining a conventional leak check device. Fig. 10 is a graph showing another example of a drift correction method for explaining a conventional leak check device. Fig. 11 is a block diagram showing the configuration of a conventional gauge pressure type leak detecting device. Fig. 12 is a graph showing a general operation cycle for explaining the leak check device. Fig. 13 is a view showing a test example for real k 3 -33- 1361274 for explaining the effect of the present invention. [Description of main component symbols] 1 1 : Air pressure source 14, 16, 17: Valve. 20: Object to be inspected 21: Reference groove φ 22: Differential pressure detector 2 5, 2 6 : Temperature sensor 40 -〗: Differential pressure change measuring unit 40-2: Pressure change measuring unit 41: Automatic reset zero amplifier 42: Readjust signal generator 43: Sample hold circuit 44: AD converter • 5 〇: Calculation control device 53-1: Drift Correction coefficient calculation unit ' 5 3 - 4 : Drift correction coefficient storage unit ~ 53 - 5 : Drift amount calculation memory unit 5 3 - 6 : Leakage amount calculation unit 5 3-7: Determination unit 5 3 _ 8 : Temperature coefficient calculation unit 5 3 - 9 : Temperature coefficient memory unit -34-

Claims

1361274 十、申請專利範圍 1. 一種漏洩檢査方法，是將氣體施加於被檢查體與基準槽，而在經過所定時間的時機是否在兩者間發生所定値以上的差壓，藉由此，來判定在上述被檢查體是否有漏洩的漏洩檢查方法，其特徵爲：在校正模式，包括： (a - 1 )將所定壓力僅所定時間長度的加壓期間施加、停止氣體壓於被檢查體與基準槽的步驟；及 (a - 2 )測定產生於上述加壓期間結束後的第1平衡期間的上述被檢查體與上述基準槽的第1差壓變化値ΔΡ1 的步驟；及 (a- 3)測定產生於上述第1平衡期間結束後的第2 平衡期間的上述被檢查體與上述基準槽的第2差壓變化値 ΔΡ2的步驟；及 (a_4)測定產生於上述第2平衡期間結束後的第1 檢查期間的上述被檢查體與上述基準槽的第3差壓變化値 △ P3的步驟；及 (a — 5 )測定產生於上述第1檢查期間結束後的第2 檢查期間的上述被檢查體與上述基準槽的第4差壓變化値 AP4的步驟：及 (a- 6)依據上述第3及第4差壓變化値的相差（ ΔΡ3- ΔΡ4)，及上述第1及第2差壓變化値的相差（API 一 ΔΡ2 )的比例，來計算對應於被包括於上述第3差壓變化値ΔΡ3的漂移量的漂移修正係數K而加以記億，並將 I S -35- 1361274 上述被檢查體與上述基準槽予以排氣的步驟，在檢查模式，包括： (b_l)將上述所定壓力僅上述力^壓期間施力f]、停止氣體壓於上述被檢查體與上述基準槽的步驟；及 (b — 2)询(定產生於上述第I平衡期間的上述被檢査體與上述基準槽的第1差壓變化値API，的步驟；及 (b - 3)測定產生於上述第2平衡期間的上述被檢查體與上述基準槽的第2差壓變化値ΔΡ2’的步驟；及； (b - 4)測定產生於上述第1檢查期間的上述被檢査體與上述基準槽的第3差壓變化値ΔΡ3’的步驟；及 (b— 5)依據上述第1及第2差壓變化値的相差（ △ P1’— ΔΡ2’）與上述漂移修正係數K，來估計被包括於上述第3差壓變化値ΔΡ3’的漂移量的步驟；及 (b - 6)從上述第3差壓變化値ΔΡ3’減算上述漂移量來估計上述被檢查體的漏洩量，並將上述被檢查體與上述基準槽予以排氣的步驟。 2. 如申請專利範圍第1項所述的漏洩檢查方法，其中，上述第1及第2平衡期間是相同時間長度，而上述第1 及第2檢查期間是相同時間長度。 3. 如申請專利範圍第2項所述的漏洩檢查方法，其中，上述步驟（a— 6)是將上述漂移修正係數K藉由K=( ΔΡ3 - ΔΡ4 ) / ( ΔΡ1 - ΔΡ2 )求出，上述步驟（b— 5)是將上述漂移量J藉由] = Κ(ΔΡ]’ — ΔΡ2’）求出，上述步驟 (b - 6)是將對應於上述漏洩量的差壓變化値藉由 -36- 1361274 S = AP3’ 一 J 求出。 4. 如申請專利範圍第2項所述的漏洩檢查方法，其中，上述校正模式是將相同被檢查體以不相同的兩個溫度 Θ1，Θ2重複實行上述步驟（a—l)〜（a - 5)，分別得 . 到第4差壓變化値 AP4,、ΔΡ42，而在步驟（a-6)，進 • —步將溫度漂移修正係數α藉由AP42 ) / ( . Θ1- Θ2)求出並予以記億，將上述檢查模式的上述被檢 • 查體的溫度作爲Θ，而將環境溫度作爲Θ時，上述步驟（匕一5)是將上述漂移量藉由】了 =]<：(么？1’一^?2’）+〇1(0 — Θ)求出，而上述步驟（b- 6)是將對應於上述漏洩量的差壓變化値藉由S = AP3’- JT求出。 5. 如申請專利範圍第1項至第4項中任一項所述的漏洩檢査方法，其中，上述步驟（b— 6)是包括將對應於上述所估計的漏洩量的差壓變化値與基準値比較，藉由比基準値還大，或還小，來判定被檢査體有無漏洩的步驟。 • 6.—種漏洩檢查裝置，其特徵爲：包括： ' 將氣體壓施加於被檢查體與基準槽的空氣壓源；及 • 將所定壓力的氣體從上述空氣壓源僅所定時間長度的加壓期間施加於被檢查體與基準槽，而在施加結束後測定發生在上述被檢査體與基準槽間的差壓變化値的差壓測定部；及在校正模式，將氣體壓僅上述加壓期間施加於上述被檢查體與上述基準槽，在上述加壓期間結束後的第1平衡 -37- 1361274 期間’與連續於該期間的第2平衡期間分別產生，由藉由上述差壓測定部所測定的第1及第2差壓變化値AP1、 △ P2 ’及在上述第2平衡期間的結束後的第1檢查期間，與其後的第2檢查期間分別產生，由藉由上述差壓測定部所測定的第3及第4差壓變化値AP3、AP4，依據上述第 3及第4差壓變化値的相差（ΔΡ3 — ΔΡ4 )，及上述第1及第2差壓變化値的相差（AP 1 — AP2 )的比例，來計算對應於被包括於上述第3差壓變化値ΔΡ3的漂移量的漂移修正係數K的漂移修正係數算出部；及記憶上述漂移修正係數K的漂移修正係數記憶部；及在檢査模式，將氣體壓僅上述加壓期間施加於上述被檢查體與上述基準槽，在上述加壓期間結束後的第1平衡期間，與連續於該期間的第2平衡期間分別產生，由藉由上述差壓測定部所測定的第1及第2差壓變化値ΔΡ 1 ’、 ΔΡ2’，及在上述第2平衡期間結束後的第1檢查期間產生，由藉由上述差壓測定部所測定的第3差壓變化値ΔΡ3 ’ ，依據上述第1及第2差壓變化値的相差（ΔΡ1’-ΔΡ2’）與上述漂移修正係數Κ，來算出被包括於上述第3差壓變化値ΔΡ3’的漂移量的漂移量算出部；及從上述第3差壓變化値ΔΡ3’減算上述漂移量而得到被漂移修正的差壓變化値S的漂移修正部；及將上述差壓變化値S與設定値相比較，若差壓變化値 S超過設定値，則判定在上述被檢查體有漏洩的判定部。 -38- 1361274 7. 如申請專利範圍第6項所述的漏洩檢查裝置，其中，上述第1及第2平衡期間是相同時間長度，而上述第1 及第2檢查期間是相同時間長度。 8. 如申請專利範圍第7項所述的漏洩檢查裝置，其中，上述漂移修正係數算出部是將上述漂移修正係數Κ藉由Κ=(ΔΡ3-ΔΡ4) / ( ΔΡ1 - ΔΡ2 )求出，上述漂移量算出部是將上述漂移量J藉由】 = Κ(ΑΡ1’-ΔΡ2’）求出，上述漂移修正部是將對應於上述漏洩量的差壓變化値藉由 S = AP3 ’ - J 求出。 9. 如申請專利範圍第7項所述的漏洩檢查裝置，其中，又包括在上述校正模式以相同被檢査體的不相同的兩個溫度Θ1，Θ2，從藉由上述差壓測定部分別得到的第4差壓變化値算出溫度漂移修正係數〇1=(^?4|-△ P42 ) / ( Θ1 - Θ2 )的溫度係數算出部，及記憶上述溫度漂移修正係數α的溫度係數記憶部，將上述檢查模式的上述被檢査體的溫度作爲Θ，而將環境溫度作爲Θ時，上述漂移量算出部是將上述漂移量藉由JT = K(AP1’— ΔΡ2’ )+«( Θ—Θ)求出，而上述漂移修正部是作成藉由 S = AP3’ -】τ求出上述被漂移修正的差壓變化値。 1〇·—種漏洩檢查方法，是將氣體施加於被檢查體，而在經過所定時間的時機是否發生所定値以上的壓力變化 ’藉由此’來判定在上述被檢查體是否有漏洩的漏洩檢查方法，其特徵爲：在校正模式，包括： -39- 1361274 (a - 1 )將所定壓力僅所定時間長度的加壓期間施加、停止氣體壓於被檢查體的步驟：及 (a — 2)測定產生於上述加壓期間結束後的第1平衡期間的上述被檢查體的第1壓力變化値AQ1的步驟；及 (a - 3 )測定產生於上述第1平衡期間結束後的第2 平衡期間的上述被檢查體的第2壓力變化値AQ2的步驟 :及 (a — 4)測定產生於上述第2平衡期間結束後的第1 檢査期間的上述被檢查體的第3壓力變化値AQ3的步驟 :及 (a - 5 )測定產生於上述第1檢查期間結束後的第2 檢查期間的上述被檢查體的第4壓力變化値AQ4的步驟 :及 (a — 6)依據上述第3及第4壓力變化値的相差（ AQ3 - AQ4 )，及上述第1及第2壓力變化値的相差（ △ Q1 — AQ2 )的比例，來計算對應於被包括於上述第3壓力變化値AQ3的漂移量的漂移修正係數K而加以記憶，並將上述被檢查體予以排氣的步驟，在檢查模式，包括： (b_l)將上述所定壓力僅上述加壓期間施加、停止氣體壓於上述被檢査體的步驟；及 (b_2)測定產生於上述第1平衡期間的上述被檢查體的第1壓力變化値AQ1’的步驟；及 (b — 3)測定產生於上述第2平衡期間的上述被檢查 ϊ* β^-1 ^ -40- 1361274 體的第2壓力變化値AQ2’的步驟；及 (b - 4)測定產生於上述第1檢查期間的上述被檢查體的第3壓力變化値AQ3’的步驟；及 (b— 5)依據上述第1及第2壓力變化値的相差（ △ Q1’ 一 Δ〇2’）與上述漂移修正係數K，來估計被包括於上述第3壓力變化値Δ(^3’的漂移量的步驟；及 (b— 6)從上述第3壓力變化値Δ(535減算上述漂移量來估計上述被檢查體的漏洩量，並將上述被檢查體予以排氣的步驟。 Π.如申請專利範圍第10項所述的漏洩檢查方法，其中，上述第1及第2平衡期間是相同時間長度，而上述第 1及第2檢查期間是相同時間長度。 12. 如申請專利範圍第11項所述的漏洩檢查方法，其中，上述步驟（a — 6)是將上述漂移修正係數Κ藉由Κ = (△Q3-AQ4) / (ΔςΠ-Δ(^2)求出，上述步驟（b-5) 是將上述漂移量J藉由】= K(AQ1’— Δ〇2’）求出，上述步驟（b - 6)是將對應於上述漏洩量的壓力變化値藉由 S = AQ3, - J求出的步驟。 13. 如申請專利範圍第11項所述的漏洩檢查方法，其中，上述校正模式是將相同被檢查體以不相同的兩個溫度 Θ1，Θ2重複實行上述步驟（a_l)〜（a— 5)，分別得到第4壓力變化値AQ4,、AQ42，而在步驟（a— 6)，進 —步將溫度漂移修正係數α藉由/ ( Θ1-Θ2)求出並予以記憶，將上述檢查模式的上述被檢 I -41 - 1361274 查體的溫度作爲Θ，而將環境溫度作爲Θ時，上述步驟（ b — 5)是將上述漂移量藉由jt = k(AQ1’-AQ2，）+α( Θ —Θ)求出，而上述步驟（b — 6)是將對應於上述漏洩量的壓力變化値藉由S = AQ3’一 JT求出》 . 14.如申請專利範圍第1〇項至第π項中任一項所述 . 的漏洩檢查方法’其中，上述步驟（b - 6)是包括將對應於上述所估計的漏洩量的壓力變化値與基準値比較，藉由 # 比基準値還大’或還小’來判定被檢査體有無漏洩的步驟〇 15.—種漏洩檢查裝置，其特徵爲·· 包括：將氣體壓施加於被檢查體的空氣壓源：及將所定壓力的氣體從上述空氣壓源僅所定時間長度的加壓期間施加於被檢査體，而在施加結束後測定發生在上述被檢查體的壓力變化値的壓力測定部；及 ® 在校正模式，將氣體壓僅上述加壓期間施加於上述被檢査體，在上述加壓期間結束後的第1平衡期間，與連續 ' 於該期間的第2平衡期間分別產生，由藉由上述壓力測定 • 部所測定的第1及第2壓力變化値AQ1、AQ2，及在上述第2平衡期間的結束後的第1檢查期間，與其後的第2檢查期間分別產生’由藉由上述壓力測定部所測定的第3及第4壓力變化値AQ3、AQ4，依據上述第3及第4壓力變化値的相差’及上述第1及第2壓力變化値的相差（△ Q 1 - △ Q 2 )的比例’來計算對應於被包括於 Γ Λ. -42- 1361274 上述第3壓力變化値AQ3的漂移量的漂移修正係數K的漂移修正係數算出部：及記憶上述漂移修正係數Κ的漂移修正係數記憶部；及在檢查模式，將氣體壓僅上述加壓期間施加於上述被 - 檢查體，在上述加壓期間結東後的第1平衡期間，與連續 . 於該期間的第2平衡期間分別產生，由藉由上述壓力測定 φ 部所測定的第1及第2壓力變化値AQl’、AQ2’，及在上述第2平衡期間結束後的第1檢查期間產生，由藉由上述壓力測定部所測定的第3壓力變化値AQ3 ’，依據上述第1 及第2壓力變化値的相差（AQl ’ 一 AQ2’）與上述漂移修正係數K，來算出被包括於上述第3壓力變化値AQ3’的漂移量的漂移量算出部；及從上述第3壓力變化値AQ3’減算上述漂移量而得到被漂移修正的壓力變化値S的漂移修正部；及 # 將上述壓力變化値S與設定値相比較，若壓力變化値 S超過設定値，則判定在上述被檢查體有漏洩的判定部。 ' 16.如申請專利範圍第15項所述的漏洩檢査裝置，其 - 中’上述第1及第2平衡期間是相同時間長度，而上述第 1及第2檢查期間是相同時間長度。 17.如申請專利範圍第15項所述的漏洩檢查裝置，其中，上述漂移修正係數算出部是將上述漂移修正係數K 藉由 K=(AQ3— AQ4) / ( AQ 1 - AQ2 )求出，上述漂移量算出部是將上述漂移量J藉由J = K(AQ1’— Δ〇2，）求出 -43- 1361274 ，上述漂移量修正部是將對應於上述漏洩量的壓力變化値藉由S = AQ35- J求出。 18.如申請專利範圍第15項所述的漏洩檢查裝置，其中，又包括在上述校正模式以相同被檢查體的不相同的兩個溫度Θ1，Θ2，從藉由上述壓力測定部分別得到的第4 壓力變化値AQ4!、Δ〇42算出溫度漂移修正係數ct= ( AQ4, 一 △Qh) / ( Θ1— Θ2)的溫度係數算出部，及記憶上述溫度漂移修正係數α的溫度係數記億部，將上述檢查模式的上述被檢查體的溫度作爲Θ，而將環境溫度作爲Θ時，上述漂移量算出部是將上述漂移量藉由Jt = K ( AQl’ — △ Q2，）+α( Θ—Θ)求出，而上述漂栘修正部是作成藉由 S = AQ3’一 JT求出上述被漂移修正的壓力變化値。1361274 X. Patent application scope 1. A leak inspection method is a method of applying a gas to a test object and a reference groove, and whether a predetermined pressure or more is generated between the two at a timing when a predetermined time elapses. A leak inspection method for determining whether or not the object to be inspected is leaked is characterized in that: in the correction mode, the method includes: (a - 1) applying a predetermined pressure to a pressurized period of a predetermined length of time, and stopping the gas from being pressed against the object to be inspected a step of measuring a reference groove; and (a-2) measuring a first differential pressure change 値ΔΡ1 of the test object and the reference groove generated in the first equilibrium period after the end of the pressurization period; and (a-3) a step of measuring a second differential pressure change 値ΔΡ2 of the test object and the reference groove in the second equilibrium period after the end of the first balance period; and (a_4) measuring after the end of the second balance period a third differential pressure change 値ΔP3 of the test object and the reference groove during the first inspection period; and (a-5) a second inspection period after the end of the first inspection period The fourth differential pressure change 値AP4 of the test object and the reference groove: and (a-6) the phase difference (ΔΡ3-ΔΡ4) according to the third and fourth differential pressure changes, and the first and the first 2 the ratio of the phase difference (API - ΔΡ2) of the differential pressure change , to calculate the drift correction coefficient K corresponding to the drift amount included in the third differential pressure change 値ΔΡ3, and to calculate the IS-35-1361274 The step of exhausting the object to be inspected and the reference groove in the inspection mode includes: (b_1) applying a force f) to the predetermined pressure during the pressing, and stopping gas pressing the object to be inspected and the reference groove And (b-2) a step of determining (the first differential pressure change 値API of the test object and the reference groove generated in the first balance period; and (b-3) measuring a second differential pressure change 値ΔΡ2' between the test object and the reference groove in the second balance period; and (b-4) measuring the test object and the reference groove generated in the first inspection period Step 3 of the third differential pressure change 値ΔΡ3'; and (b-5) basis a step of estimating a drift amount included in the third differential pressure change 値ΔΡ3' by a phase difference (ΔP1' - ΔΡ2') between the first and second differential pressure changes 与 and the drift correction coefficient K; and (b) - 6) The step of estimating the amount of leakage of the object to be inspected by subtracting the amount of drift from the third differential pressure change 値ΔΡ3', and exhausting the object to be inspected and the reference groove. In the leakage inspection method according to the above aspect, the first and second balancing periods are the same length of time, and the first and second inspection periods are the same length of time. 3. The leak inspection method according to claim 2, wherein the step (a-6) is obtained by K=(ΔΡ3 - ΔΡ4) / (ΔΡ1 - ΔΡ2). The above step (b-5) is obtained by using the above-mentioned drift amount J by] = Κ(ΔΡ]' - ΔΡ2'), and the above step (b-6) is to change the differential pressure corresponding to the leak amount by -36- 1361274 S = AP3' A J is found. 4. The leak inspection method according to claim 2, wherein the correction mode is to repeatedly perform the above steps (a-1) to (a) by using the same object at two different temperatures Θ1, Θ2. 5), respectively, to the fourth differential pressure change 値AP4, ΔΡ42, and in step (a-6), the step is to obtain the temperature drift correction coefficient α by AP42) / (. Θ1- Θ2) And in the above-mentioned inspection mode, the temperature of the above-mentioned inspection and inspection body is taken as Θ, and when the ambient temperature is taken as Θ, the above step (匕1) is to use the above-mentioned drift amount by]=]<: (?1'1^2?2)+〇1(0-Θ) is found, and the above step (b-6) is to change the differential pressure corresponding to the above leakage amount by S = AP3'- JT Find out. 5. The leak inspection method according to any one of claims 1 to 4, wherein the step (b-6) includes a differential pressure change corresponding to the estimated leakage amount. The reference 値 comparison is a step of determining whether or not the object to be inspected is leaked by being larger or smaller than the reference 値. • 6. A leak check device, comprising: 'a gas pressure source for applying a gas pressure to the object to be inspected and the reference groove; and: adding a gas of a predetermined pressure from the air source for only a predetermined length of time The pressure period is applied to the test object and the reference groove, and after the application is completed, the differential pressure measuring unit that generates the differential pressure change 値 between the test object and the reference groove is measured; and in the calibration mode, the gas pressure is only pressurized. The period in which the object to be inspected and the reference groove are applied to the first balance - 37 - 1361274 after the end of the pressurization period and the second balance period which is continuous in the period are respectively generated by the differential pressure measuring unit The measured first and second differential pressure changes 値AP1 and ΔP2' and the first inspection period after the end of the second balance period are respectively generated in the subsequent second inspection period, and are measured by the differential pressure. The third and fourth differential pressure changes 値AP3 and AP4 measured by the unit are based on the phase difference (ΔΡ3 - ΔΡ4) of the third and fourth differential pressure changes ,, and the phase difference between the first and second differential pressure changes ( ( AP 1 — AP2 ) a drift correction coefficient calculation unit that calculates a drift correction coefficient K corresponding to the drift amount of the third differential pressure change 値ΔΡ3; and a drift correction coefficient storage unit that stores the drift correction coefficient K; and an inspection mode The gas pressure is applied to the test object and the reference groove only during the pressurization period, and is generated in the first balance period after the end of the pressurization period and in the second balance period continuous in the period. The first and second differential pressure changes 値ΔΡ 1 ' and ΔΡ2' measured by the differential pressure measuring unit are generated in the first inspection period after the end of the second balancing period, and are measured by the differential pressure measuring unit. The third differential pressure change 値ΔΡ3' is calculated based on the phase difference (ΔΡ1'-ΔΡ2') of the first and second differential pressure changes 与 and the drift correction coefficient Κ, and is included in the third differential pressure change 値ΔΡ3' a drift amount calculation unit for shifting; and a drift correction unit that subtracts the drift amount from the third differential pressure change 値ΔΡ3' to obtain a drift-corrected differential pressure change 値S; and the differential pressure Zhi setting value of S and the comparison, when the differential pressure exceeds the setting value change Zhi S, it is determined in the above determination section to be inspected with a leak. The leakage inspection device according to claim 6, wherein the first and second balancing periods are the same length of time, and the first and second inspection periods are the same length of time. 8. The leakage inspection device according to claim 7, wherein the drift correction coefficient calculation unit obtains the drift correction coefficient Κ by Κ=(ΔΡ3-ΔΡ4) / (ΔΡ1 - ΔΡ2), The drift amount calculation unit obtains the drift amount J by ???(ΑΡ1'-ΔΡ2'), and the drift correction unit changes the differential pressure corresponding to the leak amount by S = AP3 ' - J Out. 9. The leakage inspection device according to claim 7, further comprising two different temperatures Θ1 and Θ2 in the correction mode in which the same object is different from the differential pressure measuring unit. The fourth differential pressure change 値 calculates a temperature coefficient calculation unit of the temperature drift correction coefficient 〇1 = (^? 4| - Δ P42 ) / ( Θ 1 - Θ 2 ), and a temperature coefficient storage unit that memorizes the temperature drift correction coefficient α When the temperature of the object to be inspected in the inspection mode is Θ and the ambient temperature is Θ, the drift amount calculating unit uses the JT = K(AP1' - ΔΡ2') + «( Θ -求出), the drift correcting unit is configured to obtain the differential pressure change 値 that is subjected to the drift correction by S = AP3' - τ. A leak detection method is a method of applying a gas to an object to be inspected, and determining whether or not there is a leak in the object to be inspected by a pressure change or more above a predetermined time. The inspection method is characterized in that: in the calibration mode, including: -39-1361274 (a-1), the step of applying and stopping the gas pressure to the object to be inspected during the pressurization period of the predetermined pressure for only a predetermined length of time: and (a-2) a step of measuring a first pressure change 値AQ1 of the test object generated in the first balance period after the end of the pressurization period; and (a-3) measuring a second balance generated after the end of the first balance period The second pressure change 値AQ2 of the test object in the period of time: and (a-4) measuring the third pressure change 値AQ3 of the test object generated during the first test period after the end of the second balance period Step: and (a-5) measuring the fourth pressure change 値AQ4 of the test object generated during the second inspection period after the end of the first inspection period: and (a-6) according to the third and third 4 pressure changes値The phase difference (AQ3 - AQ4) and the phase difference (ΔQ1 - AQ2) of the first and second pressure changes 上述 are used to calculate a drift correction coefficient K corresponding to the drift amount included in the third pressure change 値AQ3 And the step of venting the object to be inspected, and the step of exhausting the object to be inspected includes: (b_1) a step of applying the stop pressure to the object to be inspected by the predetermined pressure, and (b_2) a step of measuring a first pressure change 値AQ1' of the test object generated in the first balance period; and (b-3) measuring the detected ϊ*β^-1 ^ generated in the second balance period a step of measuring a second pressure change 値AQ2' of the body; and (b-4) measuring a third pressure change 値AQ3' of the test object generated during the first inspection period; and (b- 5) estimating the drift amount included in the third pressure change 値Δ(^3' according to the phase difference (ΔQ1'−Δ〇2') of the first and second pressure changes 値 and the drift correction coefficient K described above. And (b-6) change from the above third pressure Δ ( 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 535 And the second balancing period is the same length of time, and the first and second inspection periods are the same length of time. 12. The leakage inspection method according to claim 11, wherein the above step (a-6) is The above drift correction coefficient 求出 is obtained by Κ = (ΔQ3 - AQ4) / (ΔςΠ - Δ(^2), and the above step (b-5) is to use the above-mentioned drift amount J by == K(AQ1'- Δ〇2') is determined, and the above step (b-6) is a step of determining a pressure change 对应 corresponding to the leak amount by S = AQ3, -J. 13. The leak inspection method according to claim 11, wherein the correction mode is to repeatedly perform the above steps (a_1) to (a-5) by using the same object at two different temperatures Θ1, Θ2. , respectively, the fourth pressure change 値AQ4, AQ42 is obtained, and in step (a-6), the temperature drift correction coefficient α is obtained by / ( Θ1 - Θ 2) and is memorized, and the above inspection mode is When the temperature of the above-mentioned I-41 - 1361274 is detected as Θ, and the ambient temperature is taken as Θ, the above step (b-5) is to use the above drift amount by jt = k(AQ1'-AQ2,) + α ( Θ Θ Θ), and the above step (b-6) is to change the pressure corresponding to the leakage amount 求出 by S = AQ3 '-JT". 14. As claimed in the first to the first a leakage inspection method according to any one of the items π, wherein the step (b-6) includes comparing a pressure change 对应 corresponding to the estimated leakage amount with a reference ,, by ## benchmark Large 'or small' to determine the presence or absence of leakage of the object to be inspected 〇15. The present invention includes: an air pressure source for applying a gas pressure to the test object: and applying a gas of a predetermined pressure to the test object from a pressure period of the air pressure source for only a predetermined length of time, and ending the application And measuring a pressure change unit that generates a pressure change 値 in the test object; and, in the correction mode, applying a gas pressure to the test object only during the pressurization period, and the first balance period after the end of the pressurization period The first and second pressure changes 値AQ1 and AQ2 measured by the pressure measurement unit and the second balance period in the continuous period are generated, respectively, and after the end of the second balance period In the first inspection period, the third and fourth pressure changes 値AQ3 and AQ4 measured by the pressure measuring unit and the phase difference ′ according to the third and fourth pressure changes are generated. The ratio of the phase difference (Δ Q 1 - Δ Q 2 ) of the first and second pressure changes ' is calculated as a drift correction corresponding to the drift amount of the third pressure change 値AQ3 included in Γ Λ - 42 - 1361274 a drift correction coefficient calculation unit of the coefficient K: and a drift correction coefficient storage unit that stores the drift correction coefficient ;; and in the inspection mode, the gas pressure is applied to the object to be inspected only during the pressurization period, and the pressure is applied during the pressurization period The first balance period after the east and the second balance period during the period are respectively generated, and the first and second pressure changes 値AQ1' and AQ2' measured by the pressure measurement φ portion, and The first inspection period after the end of the second balance period occurs, and the third pressure change 値AQ3' measured by the pressure measuring unit is based on the phase difference (AQ1 '-AQ2') of the first and second pressure changes 値. And a drift amount calculation unit that calculates a drift amount included in the third pressure change 値AQ3′, and a drift amount corrected by subtracting the drift amount from the third pressure change 値AQ3′ The drift correction unit of the change 値S; and # compares the pressure change 値S with the set 値, and if the pressure change 値S exceeds the set 値, it is determined that the test object has a leak. Section. The leakage inspection device according to claim 15, wherein the first and second balancing periods are the same length of time, and the first and second inspection periods are the same length of time. The leak check device according to claim 15, wherein the drift correction coefficient calculation unit obtains the drift correction coefficient K by K = (AQ3 - AQ4) / (AQ 1 - AQ2). The drift amount calculation unit obtains -43 to 1361274 by J = K (AQ1' - Δ〇2), and the drift amount correction unit uses a pressure change corresponding to the leak amount S = AQ35- J is found. 18. The leakage inspection device according to claim 15, further comprising two different temperatures Θ1 and Θ2 in the correction mode which are different from each other in the same test object, respectively obtained from the pressure measuring unit. The fourth pressure change 値AQ4!, Δ〇42 calculates the temperature coefficient calculation unit of the temperature drift correction coefficient ct=(AQ4, one ΔQh) / (Θ1 - Θ2), and the temperature coefficient of the temperature drift correction coefficient α When the temperature of the object to be inspected in the inspection mode is Θ and the ambient temperature is Θ, the drift amount calculation unit sets the drift amount by Jt = K (AQl' - ΔQ2,) + α ( The 栘栘 correction unit is configured to obtain the pressure change 値 that is subjected to the drift correction by S = AQ3' - JT.

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