TWI358383B

TWI358383B - Protecting sheet separation method and protecting

Info

Publication number: TWI358383B
Application number: TW095122230A
Authority: TW
Inventors: Naoki Nishimura; Masaru Jinno
Original assignee: Nippon Electric Glass Co
Priority date: 2005-06-21
Filing date: 2006-06-21
Publication date: 2012-02-21
Also published as: KR101152221B1; CN100587558C; JP4692924B2; CN1885113A; JP2007001682A; TW200704576A; KR20060133889A

Description

1358383 2l003pif 九、發明說明：【發明所屬之技術領域】本發明是有關於一種保護板分離方法及其裝置，且特別是有關於一種從承載於保護板上的狀態而被輸送的玻璃基板分離保護板並將其去除的保護板分離方法及其裝置。【先前技術】 4人所周知’在液晶顯示器（Liquid Crystal Display, LCD)、電装顯示器（piasma Display Panel, PDP)、電致發光顯示态（Electroluminescence Display，ED)、場致發射顯示器（Field Emission Display，FED)等的各種圖像顯示機器用的玻璃面板的製作時，採用從一片玻璃基板（粗加工玻璃板）製作出多片玻璃面板的方法。而且，近年來的現狀是，隨著圖像顯示機器的大型化等，也推動了由玻璃製造商等製造的上述的玻璃基板的大板化。這些玻璃基板在製造步驟的最後階段被移送到加工位置（station)，在該加工位置實施對於被切斷成矩形且規定的大小的玻璃基板的各邊（詳細而言為各邊的端面）進行倒角加工等的規定的加工。實施這種加工之前的步驟，具體而言，如以下所示那樣實行的步驟為慣例。即，如圖7 (a)所示，在切割步驟等的待機位置中，在托板（pallet) P上，多片玻璃基板（原板）2〇處於以縱向放置的方式被捆包的狀態，並且作為保護板的合紙幻介於各個_基板2〇的之間，通過介於其_該合紙2卜使玻璃基板2G之間不直接接觸，從而防止損傷或附著異 6 1358383 21003pif 物。另外’作為保護板’有時也可取代合纸21 ’使用聚乙稀板（polyethylene sheet)或發泡樹脂板等其他的保護板。1358383 2l003pif IX. DESCRIPTION OF THE INVENTION: 1. Field of the Invention The present invention relates to a method and apparatus for separating a protective sheet, and more particularly to a separation and protection of a glass substrate that is transported from a state of being carried on a protective plate. A protective sheet separation method and apparatus for removing a sheet and removing it. [Prior Art] 4 people are well known 'in liquid crystal display (LCD), piasma display panel (PDP), electroluminescence display (ED), field emission display (Field Emission Display) In the production of glass panels for various image display devices such as FED, a method of producing a plurality of glass panels from a single glass substrate (roughened glass plate) is used. In addition, in recent years, the size of the above-mentioned glass substrate manufactured by a glass manufacturer or the like has been promoted as the size of the image display device has increased. These glass substrates are transferred to a processing stage at the final stage of the manufacturing process, and each side (in detail, the end faces of the respective sides) of the glass substrate cut into a rectangular shape and having a predetermined size is applied to the processing position. Prescribed processing such as chamfering. The steps before the execution of such processing, specifically, the steps performed as described below are conventional. In other words, as shown in FIG. 7(a), in a standby position such as a cutting step, a plurality of glass substrates (original plates) 2 are bundled in a longitudinal direction on a pallet P. Moreover, the paper folding function as the protective sheet is interposed between the respective substrates 2, and the glass substrate 2G is not directly contacted by the paper 2G, thereby preventing damage or adhesion of the different 6 1358383 21003 pif. Further, as the protective sheet, another protective sheet such as a polyethylene sheet or a foamed resin sheet may be used instead of the paper sheet 21'.

然後’從上述那樣的捆包體甲一起取出一片玻璃基板 20和一張合紙21 ’如圖7 (b)所示，按照合紙21墊在玻璃基板20下面的方式將一片玻璃基板2〇和一張合紙21 放在輸送裝置或操作台上。此後，保持使玻璃基板2〇承載在合紙21上的狀態，如圖7 (c)所示，通過刻線機構22 (scnbe device)在玻璃基板2〇的表面刻上劃線s後，如圖7(d)所示，沿著劃線S切割玻璃基板20的外周部20a。進而在D亥步驟之後’如圖7 (e)所示，從玻璃基板20分離並去除&紙21後，將玻璃基板2〇承載於實施具有倒角的端面力1工等的加工位置W1的例如帶傳送裝置C1上。Then, 'one glass substrate 20 and one sheet of paper 21' are taken out together from the package body as described above. As shown in Fig. 7 (b), a piece of glass substrate 2 is placed in such a manner that the paper 21 is placed under the glass substrate 20. And a piece of paper 21 is placed on the conveyor or on the console. Thereafter, while the glass substrate 2 is held on the paper 21, as shown in FIG. 7(c), the scribing s is engraved on the surface of the glass substrate 2 by the scribing mechanism 22, such as As shown in FIG. 7(d), the outer peripheral portion 20a of the glass substrate 20 is cut along the scribe line S. Further, after the D-Hay step, as shown in FIG. 7(e), after separating and removing the & paper 21 from the glass substrate 20, the glass substrate 2 is placed on a processing position W1 where the chamfered end face force 1 is performed. For example, on the belt conveyor C1.

人此％，對於按照上述方式從玻璃基板分離並去除合紙2卜且將破璃基板20移置到加工位置W1上的操作，有技術中，如圖8⑷、⑴的概略俯視圖所示，操 :>〇 ϋ抽出合紙21，其他的操作者M2僅抬起玻璃基板 ’ ^使錢縣板2G做適#的水钱鮮來進行對位多置到加工位置（帶傳送裝置等)。即，如圖9的側合i在操作者M想要僅抬起玻璃基板2G的情況下，的靜轉的朗喊合紙21 _在玻璃基板阻態下進行抬起的情況，因此另外還需要使於阻止5玄合紙21的附著的操作。詈取代這樣的操作者的手動操作而使用自動化裝月/ ，下述的日本專利文獻1公開了如下的方法：從 1358383 2l〇〇3pif 在承載台上以橫向放置的姿勢交替層疊了玻璃基板和合紙的狀態，通過吸附墊吸附保持最上層的玻璃基板且使玻璃基板和在其下方緊密接合的合紙一起在橫向上移動，之後僅使合紙落在第二片玻璃基板上’通過清掃用夾具的按壓部在橫向上推開合紙，從第二片的玻璃基板上將合紙清除。另外，根據下述的曰本專利文獻2以及曰本專利文獻 3，公開了如下的方法：從在托板上以縱向放置的姿勢交替層疊了玻璃基板和合紙的狀態，在通過吸附墊吸附保持玻璃基板的同時，通過獨立於該吸附墊而動作的吸附部件來吸附保持從該玻璃基板的下端或側端露出的合紙的緣部，並通過這些吸附墊和吸附部件的協同動作而使合紙從玻璃基板脫離。曰本專利文獻1 :實開平5 — 85730號公報曰本專利文獻2 :實開平6 — 1415 5號公報曰本專利文獻3 :實開平6 —2*7765號公報但是，近年來，以液晶顯示器用的玻璃基板為代表，玻璃基板的大型化變得尤為顯著，所以，必然地，合紙需要隨之大型化，由於該原因，在上述以往的方法中，在使玻璃基板和合紙進行適當地分離的方面會帶來障礙。即通過在上述以往的方法中的由操作者進行操作的方法’如圖8 (〇所示’齡者时將合_出並抬起大板（例如一邊的長度為1500mm左右以上）的將變得極其_或實際上變得不可能，從而導致操^亭滞與生產率大幅度降低。因此，實際情況是已經變得不能再 8 ^58383 2l〇〇3pif 採用這樣的方法。另外，根據上述日本專利文獻1所公開的方法，需要使：通過吸附墊吸附保持最上層的玻璃基板並在橫向2進 Z動的動作，以及將已落在第二片玻璃基板上的合紙通 °月掃用夾具的知:壓部而在橫向推開的動作，兩個動作能夠=序良好地協同動作。因此’存在為此所需的控制或裝，艾得複雜的顧慮，且在操作時間上產生浪費。而且，在 X方法中，在使合紙落在第二片玻璃基板上後，通過清掃用夾具的按壓部在橫向上將合紙推開，該動作隨著合紙的面積增加而變得困難，使操作錯誤的發生機率變高。而且，即使是採用上述的曰本專利文獻2、3所公開的方法，由於難以使通過吸附墊吸附保持玻璃基板並使其移動的動作，以及通過吸附部件吸附保持合紙的緣部而從玻璃基板使合紙分離移動的動作適當地協同動作，所以與上述同樣，存在控制或裝置的複雜化、操作時間的浪費、操作錯誤等的顧慮。、而且即使採用上述日本專利文獻1〜3中任一項公開的方法，由於通過吸附墊吸附保持玻璃基板的表面（有放面）’所以也會產生由於和吸附墊的接觸而使玻璃基板的表面义損或在表面上附著異物的根本問題。而且，上述的任思一個的方法，由於都存在玻璃基板的表面和合紙等接觸並q動的顧慮，所以因兩者的直接的滑動，或因異物混入滑動部，因此，和上述一樣，使玻璃基板的表面受損或在表面上附著異物。從而，由於這些原因，使得作為產品 9 的玻璃基板的品質降低，進而產品的成品率變差β 【發明内容】本發明疋鑑於上述問題而提出的發明，其目的在於提供如下的技術，即在盡可能地抑制操作時間的浪費或操作錯誤發^的基礎上，使玻璃基板的表面不受損傷或在表面上不附著異物，以這樣的狀態使合紙等的保護板從玻璃基板適當地分離。、為了達到上述目的，本發明提供一種保護板分離方法’將承載於保護板上的狀態而被輸送的玻璃基板移置到 Ζ游側的加工位置的步驟之前，使賴板從該玻璃基板分 ’此保護板分財法包括下咐驟：使—輸送帶的輸送方向在該輸送帶之下游側的端部從水平方向變化為往下方向/且至少在該輸送帶的—輸送方㈣化部位，使玻璃基板往移置到加工位置的方向輸送，同時利用負壓吸引力而 =附保持射璃基板下的賴板，並使該賴板從轉.向到往下方向。笙這樣的方法’在使合紙、聚乙稀板或發泡樹脂板在玻璃基板下面的狀態下，使玻璃基板被承 ή6 运^上並在水平方向上輪送，而該輸送帶在下游側其輸送方向從水平方向變化為往下方向。因此，以及保護板在通過輸送方向變化部位（從水平方往下方向的部位）0寺，輸送帶在不給玻璃基板帶 _ Γ °;力的影響的情況下而使玻璃基板往移置到下游側的加工位置的方向輸送，與此相對，墊在玻璃基板下面 2I0Q3pif 的保護板通過負壓吸引力而被吸附保持並從水平方向轉向到往下方ί向。由此，玻璃基板的輸送方向和保護板的輸 ^向臺得不同，其結果是，能從玻璃基板分離並去除保匕板。而且，在這樣的狀態從玻璃基板分離保護板時，於兩者間可以不產生滑動，可以避免因為相對於玻璃基板表骨動而弓丨起的損傷或異物的附著。而且，由於這樣的的5，板的分離動作與往加卫位置移置玻璃基板是同時進行方向所Γ能消除操作時_浪費，並且由於保護板的輸送吸°的灸換疋通過在輸送帶的輸送方向變化部位利用負壓。引力而進行的，故能夠盡量地抑制操作錯誤的發生。位到^這種情況下，也可以使該輸送帶從水平方向輸送部罐ir %送方向變化部位，利用負壓吸引力而吸附保持該保而朝這樣來，在保護板中，通過輸送帶的方向變化部位本;方的板部分（sheetpart)會下垂，即使因保護板他的重^的原因而使得保護板將要落下，但由於保護板其板部分仍在輸送帶的水平方向輸送部位被負壓吸引力靠土呆持著’所以阻止了保護板的落下。由此，能夠更可二2阻止因保護板落下而引起的玻璃基板和保護板之間的 ^ ，及由此引起的對玻璃基板的表面的損傷和異物的附另外’也可以使該輸送帶從輸送方向變化部位到下方的1部位，利用負壓吸引力以吸附保持該保護板。這樣一來，在保護板中，通過輸送帶的方向變化部位 1358383 2l003pif 而朝向下方的板部分，由於在輸送帶的下方向輸送部位確實地被負壓吸引力吸附保持，所以在保護板不落下且和坡璃基板之間沒有滑動的狀態下（較佳的是保護板的速度和玻璃基板的輸送速度相同）適當地向下方輸送，而從破螭基板順利地分離保護板。另一方面，為了達到上述目的，本發明提出一種保護板分離裝置，將承載於保護板上的狀態而被輸送的玻璃基板移置到下游側的加工位置的步驟之前，使保護板從該破璃基板分離’此保護板分離裝置包括：一輸送帶，設置該加工位置的正上游側，該輸送帶使承載於該保護板上的狀態的玻璃基板移置到該加工位置，而該輸送帶的輸送方向在其下游侧的端部從水平方向變化為往下方向，且至少在該輸送帶的一輸送方向變化部位，在該輸送帶上產生負壓吸引力。根據這樣的裝置’玻璃基板在與上述同樣地使保護板墊在其下面的狀態時’玻璃基板被承載於在加工位置的正上游側配備的輸送帶上並在水平方向上輸送，而該輸送帶在下游側的端部，在輸送帶的輸送方向從水平方向變化為往下方向的同時，在輸送帶的輸送方向變化部位，在該輸送帶上產生負壓吸引力’從而在該部位吸附保持保護板。由此’在玻璃基板以及保護板通過輸送方向變化部位時，輸送帶在不給玻璃基板帶來負壓吸引力的影響的情況下而使玻璃基板往移置到下游側的加工位置的方向輸送，與此相對’塾在玻璃基板下面的保護板通過負壓吸引力而從水 21003pifIn this way, in the above-described manner, the operation of separating and removing the paper 2 from the glass substrate and disposing the glass substrate 20 to the processing position W1 is as shown in the schematic plan view of FIGS. 8(4) and (1). :> 〇ϋ 〇ϋ 合合合 , , , , , , , , 。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。 In other words, when the operator M wants to lift only the glass substrate 2G as shown in FIG. 9, the slamming paper 21_ of the static rotation is lifted in the glass substrate resistance state, and therefore, There is a need for an operation for preventing the adhesion of the 5th paper 21 . In order to replace the manual operation of such an operator, an automatic loading/removing/using Japanese Patent Document 1 discloses a method in which a glass substrate and a glass substrate are alternately laminated in a laterally placed posture on a stage from 1538383 2l〇〇3pif. In the state of the paper, the glass substrate of the uppermost layer is adsorbed and held by the adsorption pad, and the glass substrate is moved in the lateral direction together with the paper which is tightly bonded under the glass substrate, and then only the paper is dropped on the second glass substrate. The pressing portion of the jig pushes the paper in the lateral direction, and the paper is removed from the glass substrate of the second sheet. In addition, according to the following Patent Document 2 and Patent Document 3, there is disclosed a method in which a glass substrate and a paper are alternately laminated from a posture placed in a longitudinal direction on a pallet, and are adsorbed and held by the adsorption pad. At the same time as the glass substrate, the edge of the paper which is exposed from the lower end or the side end of the glass substrate is adsorbed and held by an adsorption member that operates independently of the adsorption pad, and is joined by the synergistic action of the adsorption pad and the adsorption member. The paper is detached from the glass substrate. Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. The glass substrate used is representative, and the enlargement of the glass substrate is particularly remarkable. Therefore, it is inevitable that the paper size needs to be increased in size. For this reason, in the above conventional method, the glass substrate and the paper are appropriately formed. The aspect of separation can create obstacles. In other words, the method of the operator's operation in the above-described conventional method is as shown in Fig. 8 (〇), when the person is old, the slab is lifted and raised (for example, the length of one side is about 1500 mm or more). It is extremely _ or actually becomes impossible, which leads to a significant decrease in productivity and productivity. Therefore, the actual situation has become that it can no longer be used 8 ^ 58383 2l 〇〇 3pif to adopt such a method. In the method disclosed in Patent Document 1, it is necessary to adsorb and hold the glass substrate of the uppermost layer by the adsorption pad, and to move in the lateral direction, and to sweep the paper which has fallen on the second glass substrate. Knowing the fixture: the action of pushing the pressure part in the lateral direction, the two movements can be combined with the good operation in order. Therefore, there is a control or installation required for this, Aide's complicated concerns, and waste in operation time. Further, in the X method, after the paper is placed on the second glass substrate, the paper is pushed in the lateral direction by the pressing portion of the cleaning jig, and the operation becomes larger as the area of the paper is increased. Difficult to make Further, even if the method disclosed in the above-mentioned Patent Documents 2 and 3 is employed, it is difficult to adsorb and hold the glass substrate by the adsorption pad, and the adsorption is maintained by the adsorption member. The operation of separating and moving the paper from the glass substrate in the edge of the paper is appropriately coordinated. Therefore, similarly to the above, there is a concern that the control or the device is complicated, the operation time is wasted, the operation is wrong, and the like. In the method disclosed in any one of the patent documents 1 to 3, since the surface of the glass substrate is held by the adsorption pad (there is a surface to be placed), the surface of the glass substrate is damaged or caused by contact with the adsorption pad. There is a fundamental problem of the adhesion of the foreign matter on the surface. Moreover, since the method of the above-mentioned one of the methods of the glass substrate has a concern that the surface of the glass substrate and the paper are in contact with each other, the direct sliding of the two substrates or the foreign matter is mixed into the sliding portion. Therefore, as described above, the surface of the glass substrate is damaged or foreign matter adheres to the surface. For some reason, the quality of the glass substrate as the product 9 is lowered, and the yield of the product is deteriorated. [Invention] The present invention has been made in view of the above problems, and an object thereof is to provide a technique of providing as much as possible In addition to suppressing the waste of the operation time or the operation error, the surface of the glass substrate is not damaged or foreign matter is not adhered to the surface, and the protective sheet such as the paper is appropriately separated from the glass substrate in such a state. To achieve the above object, the present invention provides a method for separating a protective sheet from a state in which a glass substrate to be conveyed is placed on a protective sheet to a processing position on the migration side, and the sheet is separated from the glass substrate. The protective plate dividing method includes the following steps: changing the conveying direction of the conveyor belt from the horizontal direction to the downward direction at the end on the downstream side of the conveyor belt and at least at the conveying side (four) of the conveyor belt, The glass substrate is transported in the direction of being displaced to the processing position, and at the same time, the suction force under the glass substrate is attached by using the negative pressure attraction force, and the board is placed. Turn. To the downward direction.笙A method in which the glass substrate is transported by the bearing 6 in a state where the paper-making, polyethylene-plate or foamed resin sheet is under the glass substrate, and is conveyed in the horizontal direction, and the conveyor belt is downstream The conveying direction of the side changes from the horizontal direction to the downward direction. Therefore, and the protective plate is changed in the conveying direction (portion from the horizontal direction) to the temple, the conveyor belt is displaced to the glass substrate without the influence of the force on the glass substrate. In the direction of the processing position on the downstream side, the protective plate of the pad 2I0Q3pif under the glass substrate is adsorbed and held by the negative pressure attraction and is turned from the horizontal direction to the downward direction. Thereby, the transport direction of the glass substrate and the transfer direction of the protective sheet are different, and as a result, the protective sheet can be separated and removed from the glass substrate. Further, when the protective sheet is separated from the glass substrate in such a state, no slippage can be caused between the two, and damage due to the bone movement with respect to the surface of the glass substrate or adhesion of foreign matter can be avoided. Moreover, due to such a 5, the separation operation of the plate and the displacement of the glass substrate to the garnish position are performed at the same time, the operation can be eliminated, the waste is consumed, and the moxibustion of the protective plate is transferred through the conveyor belt. The change direction of the conveying direction utilizes a negative pressure. Because of gravity, it is possible to suppress the occurrence of operational errors as much as possible. In this case, the conveyor belt may be conveyed from the horizontal direction conveyance tank ir% to the direction change portion, and the suction force is sucked and held by the suction force of the suction force, and the conveyor belt is passed through the conveyor belt. The direction of the change is the part; the sheet part of the square will sag, even if the protective board is about to fall due to the weight of the protective plate, but the plate part of the protective plate is still in the horizontal conveying position of the conveyor belt. The negative pressure attraction is held by the soil, so it prevents the protection board from falling. Thereby, it is possible to prevent the damage between the glass substrate and the protective plate caused by the falling of the protective sheet, and the damage to the surface of the glass substrate and the attachment of the foreign matter by the other. The protective plate is adsorbed and held by the negative pressure attraction from the portion where the conveying direction changes to the lower portion. In this way, in the protective plate, the plate portion facing downward by the direction change portion 153883 2l003pif of the conveyor belt is surely held by the negative pressure attraction in the lower direction of the conveyor belt, so the protection plate does not fall. Further, in a state where there is no sliding between the substrate and the glass substrate (preferably, the speed of the protective plate and the conveying speed of the glass substrate are the same), the protective plate is smoothly separated from the broken substrate. On the other hand, in order to achieve the above object, the present invention provides a protective sheet separating apparatus which removes a protective sheet from the broken sheet before the step of transferring the glass substrate conveyed on the protective sheet to the processing position on the downstream side. The glass substrate separation device comprises: a conveyor belt disposed on the positive upstream side of the processing position, the conveyor belt shifting the glass substrate in a state of being carried on the protection plate to the processing position, and the conveyor belt The conveying direction changes from the horizontal direction to the downward direction at the end portion on the downstream side thereof, and a negative pressure attraction force is generated on the conveying belt at least in a portion where the conveying direction of the conveying belt changes. According to such a device 'the glass substrate is in a state in which the protective sheet is placed under the same as described above, the glass substrate is carried on the conveyor belt provided on the immediately upstream side of the processing position and conveyed in the horizontal direction, and the conveyance is performed. The end portion of the belt on the downstream side changes in the conveying direction of the conveyor belt from the horizontal direction to the downward direction, and at the portion where the conveying direction of the conveyor belt changes, a negative pressure attraction force is generated on the conveyor belt to adsorb at the portion. Keep the protection board. Therefore, when the glass substrate and the protective sheet are changed in the transport direction, the transport belt transports the glass substrate to the downstream processing position without affecting the suction attraction of the glass substrate. In contrast, 'the protective plate below the glass substrate passes the negative pressure attraction from the water 21003pif

Git到往下方向。由此’玻璃基板的輸送方向和保Git goes down. Thus the direction and protection of the glass substrate

^找由於進行這樣的動作而帶來的個效果與上述^ 果一樣此衫料糾。^ Finding the effect of performing such an action is the same as the above-mentioned effect.

部位况下在1施例巾’在所述輸送方向變化的中1具有t卜所述輪送帶的中空狀的旋轉報’該旋轉報變化部位產生用於在所述輸送帶的輸送方向方向送帶並使該;送帶的輸送 UP 夂到住下方向，從而可以有效利用i言样罢紅一^來作為在輪送帶上產生負壓吸引力的負壓產生裳的個構成要素，從而適當地兼用了旋轉親，以實現構 =數的_和利用空間的縮小、以及裝£的小型化和簡在-較佳實施财，在所述輸送帶上形成多個孔’並且在所述旋轉親的周壁部形成多個周槽，在各該槽的底面壁部分卿成與所述巾空部連通的貫通孔，且述輸送帶上的貫通孔的寬度方向的排列間距、與所述帅輥上的周槽的軸向的排列間距相同。 τ 這樣-來’從輸送帶的貫通孔可藉由在旋轉親的周样内以及該周槽的底面壁部形成的貫通孔，並利用在旋轉^ 的中空部（空氣吸引部）吸引空氣’從而在輸送帶的輪方向變化部位的外周面產生負壓吸引力。此時，由於輪送帶上的貫通孔的寬度方向排列間距和旋轉輥上的周槽=t 13 1358383 21003pif 向排列間距被設定成相同，所以能夠在不產生浪費的狀態下從輸送帶的貫通孔進行負壓吸弓丨（空氣吸斲得在輪送方向變化部位從輸送帶對保護板致率+ 良好車，地作用適當的負壓吸引力成為可能。、 # 另外，在一實施例中，在所述輸送帶的水平方向輪，部位的下方配置有箱狀體，該箱狀體的内部空間形^ 在所述輸送帶的水平方向輸送部位產生負壓吸二吸引部。 ^的工軋這樣-來’通過箱狀體的空氣吸引部而在輸送平方向輸送部位產生負壓吸引力，通過該負壓吸引力，塾在破璃基板下面的保護板被吸附保持在輸送帶的水平方向輸送部位。因此，在保護板中，通過輪送帶的方向變化部位而朝向下方的板部分會下垂，即使因保護板本身重旦 $原因而使得保護板將要落下，但由於保護板其他的板部 :如上所仍在輸送帶的水平額輸送部倾吸附保持者，所以如所述那樣阻止了保護板的落下。其結果是，對應的結構可以得到與上述的内容相同的作用效果。办而且，在一較佳實施例中，在所述輸送帶上形成多個二通孔，並且在所述箱狀體的上面壁部沿著輸送方向並列形成多個長條狀的狹縫，且所述輸送帶上的貫通孔的寬度方向的排列間距、與所述箱狀體上的狹縫的寬度方列間距相同。辟立這樣一來，從輸送帶的貫通孔可藉由在箱狀體的上面土。卩形成的狹縫，並利用在該箱狀體的内部空間（空氣吸 2l003pif 引。P)及引空氣，從而在輸送帶的水平方向輸送部位的上表面產生負壓吸引力。此時，由於輸送帶上的貫通孔的寬向排列間距和箱狀體上的狹縫的寬度方向排列間距被設定成相同，所以能夠在不產生浪費和中斷的狀態下，從輸送帶的貫通孔進行負壓吸引（空氣吸引），使得從輸送帶的水平方向輸送部位對保護板效率良好且連續地作用適當的負壓吸引力成為可能。田另外，在一實施例中，在所述輪送帶的下方向輸送部位的内側方配置有箱狀體，該箱狀體的内部空間形成用於在所述輸送帶的下方向輸送部位產生負壓吸引力的空氣吸引部。 ” 這樣一來，通過箱狀體的空氣吸引部而在輸送帶的下方向輸送部位產生負壓吸引力，通過該負壓吸引力使墊在玻璃基板下面的保護板被吸附保持在輸送帶的下方向輸送部位。由此，在保護板中，通過輸送帶的方向變化部位而朝向下方的板部分，由於在輸送帶的下方向輸送部位確實地被負壓吸引力吸附保持在該輸送帶的外側面，所以在保護板不落下且和玻璃基板之間沒有滑動的狀態下（較佳的疋保濩板的速度和玻璃基板的輸送速度相同）適當地向下方輸送’而從玻璃基板順利地分離保護板。另外，在一實施例中，在所述輸送帶上形成多個貫通孔’並且在所述箱狀體的外側面壁部沿著輸送方向並列形成多個長條狀的狹縫，且所述輸送帶上的貫通孔的寬度方向的排列間距、與所述箱狀體上的狹縫的寬度方向的排列 1358383 2l003pif 間距相同。 XI樣-來’從輪送帶的貫通孔可藉由在箱狀體的外側面土。P形成的狹縫，並利用在該箱狀體的内部空間（空氣吸引部）吸引空氣，從而在輸送帶的下方向輸送部位的外側面產生負壓吸引力。此時，由於輸送帶上的貫胸的寬度方向排列間距和箱狀體上的狹縫的寬度方向排列間距被設定成相同，所以能夠在不產生浪費和中斷的狀態下，從輸送帶的貫通孔進行負壓吸引（空氣吸引），使得從輸送帶的下方向輸达部位對保護板效率良好且連續地作用適當的負壓吸引力成為可能。在具有上述構造的裝置中，較佳的是所述輸送帶的輸送速度可變。 le樣來，對應於玻璃基板的輸$的快速化和保護板的吸附保持的可罪化這兩種要求，能適當地變化輸送帶的輸运速度，在實現操作效率的改善以及生產率的提高的方面是有利的。 • 在一 A %例中，在所述加工位置設置有從所述輸送帶移ί玻离ΐ板的輪送裝置，並且在所述保護板通過所述輸送V的輸送方向變化部位之前，以比所述輸送裝置低的速度來驅動輸送帶，在所述保護板通過後的設定時間以後，以相同速度驅動所述輸送裝置和輸送帶。這樣來，保護板在通過輸送帶的輸送方向變化部位為止的J門即保護板的前端部在輸送方向變化部位往下方轉向❿成為可以從玻璃基板確實地分離保護板的狀態 1358383 2l003pif 為止的期間’輸送帶以低速度輸送保護板以及玻璃基板。並在變為該狀態之後，輸送帶以高速（與加工位置的輸送裝置的速度相同）輸送保護板以及玻璃基板。由此，可以避免因從玻璃基板分離保護板的操作，而使一系列的作業所需時間不合理地變長，能有效地阻止生產效率變差。 (發明的效果）根據以上所述的發明，在玻璃基板以及墊在其下面的保護板通過輸送方向變化部位時，輸送帶使玻璃基板往彩置到下游側的加工位置的方向輸送，與此相對，由於保讀板通過負壓吸引力而從水平方向往下方轉向，所以，玻確基板的輸送方向和保護板的輸送方向不同。其結果是，能從玻璃基板分綠並去除保護板。而且，由於在從這樣的磁璃基板分離保護板時，在兩者間可以不產生滑動，所以可以避免由於相對於玻璃基板表面的滑動而引起的損傷或異物的附著。而且，由於這樣的保護板的分離動作與往加^In the case of a portion, the embodiment 1 has a hollow rotation report of the wheel belt in the middle of the change in the conveying direction. The rotation change portion is generated for the conveying direction of the conveyor belt. The belt is conveyed and the conveyance UP of the belt is conveyed to the down direction, so that it is possible to effectively use the i-like redness as a constituent element of the negative pressure generating skirt which generates a negative pressure attraction force on the belt. Therefore, the rotating parent is used in combination to achieve the reduction of the number of the structure and the use space, and the miniaturization and the simple implementation of the package, forming a plurality of holes on the conveyor belt and A plurality of circumferential grooves are formed in the peripheral wall portion of the rotating parent, and a through hole communicating with the hollow portion is formed in a bottom wall portion of each of the grooves, and an arrangement pitch and a width of the through holes in the conveyor belt in the width direction are described. The circumferential grooves on the winding roller are arranged in the same axial direction. τ In this way, the through hole of the conveyor belt can be sucked by the through hole formed in the circumferential sample of the rotating parent and the bottom wall portion of the circumferential groove, and is sucked by the hollow portion (air suction portion) of the rotation. Thereby, a negative pressure attraction force is generated on the outer peripheral surface of the belt-changing portion of the conveyor belt. At this time, since the arrangement pitch of the through holes on the carrier belt in the width direction and the circumferential groove on the rotary roller = t 13 1358383 21003 pif are set to be the same in the arrangement pitch, it is possible to pass through the conveyor belt without causing waste. The hole is subjected to a negative pressure suction bow (the air suction is changed from the conveyor belt to the protective plate in the direction of the change in the direction of the transfer + good car, and the appropriate negative pressure attraction is possible.) In addition, in one embodiment, A box-shaped body is disposed below the horizontal wheel of the conveyor belt, and an internal space of the box-shaped body generates a suction portion for suction in a horizontal direction of the conveyor belt. Rolling - such as - through the air suction portion of the box body to produce a negative pressure attraction at the conveying direction of the conveying direction, by which the protective plate under the glass substrate is adsorbed and held at the level of the conveyor belt Directional conveying position. Therefore, in the protective plate, the portion of the plate that is directed downward by the direction change portion of the belt will sag, even if the protective plate itself is heavy due to the weight of the protective plate itself It is to be dropped, but because of the other plate portion of the protective plate: as described above, the horizontal amount of the conveying portion of the conveyor belt is sucked and held by the holder, so that the falling of the protective plate is prevented as described. As a result, the corresponding structure can be obtained. The above-mentioned contents have the same effects. In a preferred embodiment, a plurality of two through holes are formed in the conveyor belt, and a plurality of second through holes are formed in the upper wall portion of the box body along the conveying direction. The strip-shaped slits have the same arrangement pitch in the width direction of the through-holes on the conveyor belt and the same width as the width of the slits on the box-shaped body. The through hole can be transported in the horizontal direction of the conveyor belt by means of a slit formed in the upper surface of the box-shaped body and by using the inner space of the box-shaped body (air suction 2l003pif. P) and air introduction. Negative pressure attraction force is generated on the upper surface of the portion. At this time, since the widthwise arrangement pitch of the through holes on the conveyor belt and the arrangement pitch of the slits in the box-like body in the width direction are set to be the same, it is possible to generate no waste and In the disconnected state, vacuum suction (air suction) is performed from the through hole of the conveyor belt, so that it is possible to efficiently and continuously apply an appropriate negative pressure attraction force to the protective plate from the horizontal direction of the conveyor belt. In one embodiment, a box-shaped body is disposed on an inner side of a lower conveying portion of the belt, and an inner space of the box-shaped body is formed to generate a vacuum suction at a lower conveying portion of the conveyor belt. The air suction portion of the force. In this way, a vacuum suction force is generated in the lower direction of the conveyor belt by the air suction portion of the box-shaped body, and the protective plate on the underside of the glass substrate is caused by the negative pressure attraction force. The adsorption is held in the lower direction conveying position of the conveyor belt. Thereby, in the protective plate, the plate portion facing downward by the direction change portion of the conveyor belt is reliably absorbed by the negative pressure attraction portion in the lower direction of the conveyor belt. Maintained on the outer side of the conveyor belt, so that the protective plate does not fall and there is no sliding between the glass substrate (the preferred speed of the slab The same as the conveying speed of the glass substrate) is suitably conveyed downward by 'smoothly separating the glass substrate from the protective plate. In addition, in one embodiment, a plurality of through holes ' are formed in the conveyor belt and a plurality of elongated slits are formed side by side in the conveying direction on the outer side wall portion of the box-shaped body, and the conveying is performed The arrangement pitch of the through holes in the width direction of the tape is the same as the arrangement of the slits 183583 2l003pif in the width direction of the slits on the box-shaped body. The XI-like-through hole from the wheel belt can be surfaced on the outside of the box-shaped body. The slit formed by P attracts air by the internal space (air suction portion) of the box-shaped body, thereby generating a negative pressure attraction force on the outer surface of the conveying portion in the downward direction of the conveyor belt. At this time, since the arrangement pitch of the width direction of the chest on the conveyor belt and the arrangement pitch of the slits in the width direction of the box-shaped body are set to be the same, it is possible to pass through the conveyor belt without causing waste or interruption. Negative pressure suction (air suction) of the holes makes it possible to efficiently and continuously apply an appropriate negative pressure attraction force to the protective plate from the lower direction of the conveyor belt. In the apparatus having the above configuration, it is preferable that the conveying speed of the conveyor belt is variable. According to the requirements of the rapid increase of the input cost of the glass substrate and the sinfulness of the adsorption holding of the protective sheet, the transport speed of the conveyor belt can be appropriately changed, and the improvement of the operational efficiency and the productivity can be improved. The aspect is favorable. • In an example of A, at the processing position, a transfer device that removes the glass plate from the conveyor belt is provided, and before the protection plate passes through the conveying direction of the conveying V, The conveyor belt is driven at a lower speed than the conveyor, and the conveyor and the conveyor belt are driven at the same speed after a set time after the passage of the protection panel. In this way, the front end portion of the protective plate that has passed through the transport direction change portion of the transport belt is turned downward in the transport direction change portion, and the protective plate is in a state in which the protective plate can be surely separated from the glass substrate by the period 153883 2l003pif. 'The conveyor belt conveys the protective plate and the glass substrate at a low speed. After this state is reached, the conveyor belt conveys the protective plate and the glass substrate at a high speed (the same speed as the conveying device at the processing position). Thereby, the operation for separating the protective sheets from the glass substrate can be avoided, and the time required for a series of operations can be unreasonably lengthened, and the production efficiency can be effectively prevented from being deteriorated. (Effect of the Invention) According to the invention as described above, when the glass substrate and the protective sheet having the underside of the protective sheet pass through the transport direction changing portion, the transport belt transports the glass substrate to the processing position of the downstream side, and In contrast, since the reading plate is turned downward from the horizontal direction by the suction force of the negative pressure, the conveying direction of the glass substrate is different from the conveying direction of the protective plate. As a result, the green sheet can be separated from the glass substrate and the protective sheet can be removed. Further, when the protective plate is separated from such a magnetic substrate, sliding does not occur between the two, so that damage due to sliding with respect to the surface of the glass substrate or adhesion of foreign matter can be avoided. Moreover, due to the separation action of such a protective plate and the addition

位置移置玻璃基板是同時進行的，所以能消_作時間浪費，並且由於保護板的輸送方向的變換是在輸送帶的於，向變化部位通過負壓吸引力而進行的，故可盡: 操作錯誤的發生。為讓本發明之上述和其他目的、特徵和優點能更明^ ’ T文特舉較佳實施例，並配合所附圖式，作詳細戈【實施方式】下面，參照附圖對本發明的實施方式進行說明。 17 1358383 2l003pif 首先，基於圖1所示的概略俯視圖以及圖2所示的概略側視圖，對本發明的實施方式的保護板分離裝置進行說明。該保護板分離裝置1，在被配置於加工位置W上且在箭頭a方向輸送玻璃基板的輸送裝置C的正上游側，具有作為輸送帶的無接頭狀的帶2 (belt)。該帶2是由樹脂或橡勝等（表面部最好是橡膠）構成，並被卷 '妓計=.: 個的旋轉報3、4、5上且在箭頭A方向上被驅動:二Since the positional displacement of the glass substrate is performed at the same time, it is possible to waste time, and since the change of the conveying direction of the protective plate is performed on the conveying belt and the suction force is applied to the changing portion, it is possible to: An operation error occurred. The above and other objects, features, and advantages of the present invention will become more apparent from the aspects of the preferred embodiments of the invention. The way to explain. 17 1358383 2l003pif First, a protective plate separating apparatus according to an embodiment of the present invention will be described based on a schematic plan view shown in Fig. 1 and a schematic side view shown in Fig. 2 . The guard plate separating device 1 has a jointless belt 2 (belt) as a conveyor belt on the upstream side of the transport device C disposed at the processing position W and transporting the glass substrate in the direction of the arrow a. The belt 2 is composed of a resin or a rubber or the like (the surface portion is preferably rubber), and is driven by a roll of "3", 4, 5, and is driven in the direction of the arrow A:

上述的加工位置W是對玻璃基板實施倒角加工加工的位置。号J而面上述帶2具有水平方向輸送部位2a、輸送方向變化部位2b和下^向輸送部位2e。這些部位當巾的水平方向 =部位2a是位於與加工位置w的輸送裝置c大致相同^The above-described processing position W is a position at which the glass substrate is subjected to chamfering processing. The surface of the belt 2 has a horizontal conveying portion 2a, a conveying direction changing portion 2b, and a lower conveying portion 2e. These parts are in the horizontal direction of the towel = the portion 2a is located substantially the same as the conveying device c at the processing position w.

^ ’並且’ _相互接近的方式配置水平方向輪Ϊ 餐Γ和輸送裝1 C’卩使得玻璃基減從水平方向輪送移置到輸找置c。因此，帶2的輸送方向在從上 ^二下㈣】過渡到水平方向之後，在下游側的端部進行二史換而朝向下方。而且，通過圖示以外的速度置而可以改變帶2的輪送逮度。，捲繞有上述帶2的三個旋轉親3、4、5中，位於輪 2軸位儿的旋轉輥3為中空狀，並且該旋轉輥3 的於〜柄作中空旋轉輪）的中空部’其形成用於在帶2 且,^向變化部位2b產生負壓吸引力的空氣吸引部。而一帶2的水平方向輸送部位2a的下方，接近地配置第相大體6’並且第—箱狀體6的内部空間形成用於在帶2 1358383 2l〇〇3pjf 的水平方向輸送部位2a的上表面產生負壓吸引力的空氣吸引部。而且，在帶2的下方向輸送部位2c的内側方，接近地配置第二箱狀體7，並且第二箱狀體7的内部空間形成用於在帶2的下方向輪送部位2c的外表面產生負壓吸引力的空氣吸引部。而且，中空旋轉輥3的中穸部、第一箱狀體6的内部空間、以及第二箱狀體7的内部空間經由吸引敕管8而連通到真空產生源。若進行詳細描述：如圖3以及圖4所示的結構是，在 ▼ 2上遍及全周形成多個貫通孔9，通過這呰貫通孔9產生負壓吸引力。即，在中空旋轉輥3的周壁部3a上形成多個周槽3b ’並且在這些周槽3b的底面壁部3c分別形成有與中空部連通的多個貫通孔1〇。而且，在該中空旋轉輥3 上形成的多個周槽3b的軸向上的排列間距，被設定成與在可2上形成的多個貫通孔9的寬度方向上的排列間距相同。而且，在第一箱狀體6的上面壁部6a上並列形成有多個第一狹縫11，所述第一狹縫η沿著輸送方向為長條狀且與内部空間連通。另外，在第二箱狀體<7的外側面壁部7a上也並列形成有多個第二狭縫12，所述第二狭縫I2 沿著輸送方向為長條狀且與内部空間連通。而且，在第一箱狀體6上形成的多個第一狹縫η的寬度方向上的排列間距、和在第二箱狀體7上形成的多個第二狭縫12的寬度方向上的排列間距，兩者都被設定成與在帶2上形成的多個貫通孔9的寬度方向上的排列間距，及與在中空旋轉輥3 上形成的多個周槽3b的軸向上的排列間距相同。因此，第 19 1358383 2'〇〇3pif 一狹縫11和周槽3b以及第二狹縫12分別被配置在一列上，即它們整體被配置在多個列上，並且它們被沿著在帶 2上形成的多個列的貫通孔9的移動轨跡而配置。可根據具有以上結構的保護板分離裝置1 (參照圖5以及圖6)，首先，在刻線步驟以及切割步驟結束後而處於被承栽於合紙13上的狀態的玻璃基板14，其以水平的姿勢' 破移置到帶2上。通過操作者的手動操作或通過在帶2的更上游側配置的輸送裝置而自動地進行該移置動作。而 ^，繼該移置動作結束之後，合紙13以及玻璃基板14的前端位於帶2的水平方向輸送部位2a的上游側。從這樣的狀態，合紙13以及玻璃基板14被帶2輸送向下游側，此處，從帶2的水平方向輸送部位2a上的多個貫通孔9，通過在第一箱狀體6的上面壁部6a上形成的多個第一狭縫 11 ’一直在其内部空間（空氣吸引部）吸引空氣。由此，墊在玻璃基板14的下面的合紙13因負壓吸引力而被吸附保持在帶2上，在該狀態下，玻璃基板14通過帶2而沿著水平方向輸送。此後，當合紙13的前端到達帶2的水平方向輸送部位2a的下游端時，此處也是從帶2的輸送方向變化部位 2b上的多個貫通孔9，通過中空旋轉輥3的多個周槽3b ，以及其底面壁部3c的貫通孔10，一直在其中空部（空氣吸引。P)吸引空氣。由此，合紙13的前端部因負壓吸引力而被及附保持在帶2的輸送方向變化部位2b，在該狀態下，雖然合紙13的方向朝向下方變換，但玻璃基板14繼 20 續沿水平方向輸送。而且’當合紙13的前端通過了帶2的輸送方向變化部位2b時，此處也是從帶2的下方向輸送部位2c上的多個貫通孔9’通過在第二箱狀體7的外側面壁部7a上形成的多個第二狹缝12 ’ 一直在其内部空問（空氣吸引部）弓丨向空氣。由此’如圖5以及圖6所示，合紙13的前端部因負壓吸引力而被吸附保持在帶2的下方向輸送部位2C，在該狀態下朝向下方輸送合紙13，對此，玻璃基板Η通過帶2的水平方向輸送部位2a而被輸送’並被移置到加工位置W的輸送裝置C。然後，在合紙13的後端部通過了帶 2的下方向輸送部位2c的階段，合紙13由於自身重量而落下並被收容於回收箱等，同時玻璃基板14被完全移置到輸送裝置C並通過該輸送裝置C的動作繼續被輸送。由此，合紙13完全從玻璃基板14分離並被除去。此時，關於帶2的輸送速度，在合紙13的前端部通過帶2的輪送方向變化部位2b並被下方向輸送部位2C吸附保持為止的期間内為低速，並且，此後變為高速且變為與輸送裝置C的輸送速度相同的速度。而且，在玻璃基板 14以高速度被輸送裝置C輸送的期間，通過在其兩側方設置的研磨工具等來進行倒角加工等的加工。另外，上述實施方式在使用合紙13來作為保護板的情況下而使用了本發明，但在取代合紙而使用聚乙烯板或發泡樹脂板等的情況，也同樣可以使用本發明。 (工業實用性） 1358383 21003pif 利用^發日㈣保独分财^切裝置可以有效地二 =在液晶顯示器、電槳顯示器、電致發光顯示器、作中所使用的玻璃基板，二面板的製護板的缚材所使用的玻璃基板，分離並除去保以“之申;專=:者=本發明之保護圓式間單說明】其周實施方式的保護板分離裝置以及视圖圖2是表示保護板分離裝置以及其周邊結構的概略側圖3是保護板分離裝置的立體圖。狀心=:: = =構成要素即_箱 _圖5是表示所述保護板分離裳置的使㈣態的㈣俯視圖圖6是表示所述保護板分離裝置的使⑽態的概略側分離二t序7白&〜。⑴分別是按順序表示習知的保護板的 22 1358383 2l003pif 圖8 (a)〜（c)分別是表示習知的保護板的分離次序的概略俯視圖。圖9是表示習知技術的問題點的概略側視圖。【主要元件符號說明】 1 :保護板分離裝置 2:帶（輸送帶）^ ' and ' _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Therefore, after the conveyance direction of the belt 2 transitions from the upper side to the lower side (four), the end portion on the downstream side is changed to the lower side. Moreover, the wheeling of the belt 2 can be changed by the speed other than the illustration. Among the three rotating parents 3, 4, and 5 in which the belt 2 is wound, the rotating roller 3 located at the axial position of the wheel 2 is hollow, and the hollow portion of the rotating roller 3 is a hollow rotating wheel. 'It forms an air suction portion for generating a negative pressure attraction force to the change portion 2b at the belt 2. On the lower side of the horizontal conveyance portion 2a of the belt 2, the first phase body 6' is disposed close to each other and the inner space of the first box-shaped body 6 is formed on the upper surface of the conveyance portion 2a in the horizontal direction of the belt 2 1358383 2l 3pjf An air suction portion that generates a vacuum attractive force. Further, the second box-shaped body 7 is disposed close to the inner side of the lower-direction conveying portion 2c of the belt 2, and the inner space of the second box-shaped body 7 is formed for the outer portion of the belt 2 in the downward direction. An air suction portion that generates a negative pressure attraction on the surface. Further, the intermediate portion of the hollow rotating roller 3, the internal space of the first box-like body 6, and the internal space of the second box-like body 7 communicate with each other via the suction manifold 8 to the vacuum generating source. As will be described in detail, the structure shown in Figs. 3 and 4 is such that a plurality of through holes 9 are formed over the entire circumference of the ▼ 2, and the through hole 9 generates a negative pressure attraction force. In other words, a plurality of circumferential grooves 3b' are formed in the peripheral wall portion 3a of the hollow rotating roller 3, and a plurality of through holes 1B communicating with the hollow portions are formed in the bottom wall portions 3c of the circumferential grooves 3b. Further, the arrangement pitch of the plurality of circumferential grooves 3b formed in the hollow rotating roller 3 in the axial direction is set to be the same as the arrangement pitch in the width direction of the plurality of through holes 9 formed in the second. Further, a plurality of first slits 11 are formed in parallel on the upper wall portion 6a of the first box-shaped body 6, and the first slits n are elongated in the conveying direction and communicate with the internal space. Further, a plurality of second slits 12 are formed in parallel on the outer side wall portion 7a of the second box-shaped body <7, and the second slits I2 are elongated in the conveying direction and communicate with the internal space. Further, the arrangement pitch of the plurality of first slits η formed on the first box-shaped body 6 in the width direction and the width direction of the plurality of second slits 12 formed on the second box-shaped body 7 The arrangement pitch is set to be an arrangement pitch in the width direction of the plurality of through holes 9 formed in the tape 2, and an arrangement pitch in the axial direction of the plurality of circumferential grooves 3b formed on the hollow rotating roller 3. the same. Therefore, the 19th 1358383 2'〇〇3pif one slit 11 and the circumferential groove 3b and the second slit 12 are respectively arranged on one column, that is, they are integrally arranged on a plurality of columns, and they are along the belt 2 The movement trajectories of the through holes 9 of the plurality of rows formed are arranged. According to the protective sheet separating apparatus 1 having the above configuration (see FIGS. 5 and 6), first, after the scribe line step and the dicing step are completed, the glass substrate 14 is placed in the state of being loaded on the paper 13, which is The horizontal posture 'breaks into the belt 2. This displacement operation is automatically performed by manual operation by an operator or by a conveying device disposed on the more upstream side of the belt 2. Then, after the end of the displacement operation, the leading ends of the paper 13 and the glass substrate 14 are located on the upstream side of the horizontal conveying portion 2a of the belt 2. In this state, the paper stack 13 and the glass substrate 14 are conveyed to the downstream side by the tape 2, and the plurality of through holes 9 on the portion 2a are conveyed from the horizontal direction of the tape 2 through the upper surface of the first box-shaped body 6. The plurality of first slits 11' formed on the wall portion 6a always attract air in the inner space (air suction portion). Thereby, the paper 13 on the lower surface of the glass substrate 14 is adsorbed and held on the belt 2 by the suction force of the negative pressure. In this state, the glass substrate 14 is conveyed in the horizontal direction by the belt 2. Thereafter, when the leading end of the paper 13 reaches the downstream end of the horizontal conveying portion 2a of the belt 2, here, a plurality of through holes 9 in the conveying direction changing portion 2b from the belt 2 are passed through the plurality of hollow rotating rollers 3 The circumferential groove 3b and the through hole 10 of the bottom wall portion 3c thereof always attract air in the hollow portion (air suction. P). Thereby, the front end portion of the paper 13 is held by the conveyance direction changing portion 2b of the belt 2 due to the suction force of the negative pressure. In this state, the direction of the paper 13 is shifted downward, but the glass substrate 14 is 20 Continue to transport in the horizontal direction. Further, when the leading end of the paper 13 passes through the conveying direction changing portion 2b of the belt 2, the plurality of through holes 9' on the conveying portion 2c from the lower direction of the belt 2 are also passed outside the second box-shaped body 7. The plurality of second slits 12' formed in the face wall portion 7a are always bowed toward the air in the internal space (air suction portion). Thus, as shown in FIG. 5 and FIG. 6, the front end portion of the paper stack 13 is sucked and held by the lower-direction conveyance portion 2C of the belt 2 by the suction of the negative pressure, and the paper 13 is conveyed downward in this state. The glass substrate Η is conveyed by the horizontal direction conveying portion 2a of the belt 2 and is transferred to the conveying device C at the processing position W. Then, at the stage where the rear end portion of the paper 13 passes the lower-direction conveying portion 2c of the belt 2, the paper 13 is dropped by its own weight and stored in a collecting box or the like, and the glass substrate 14 is completely displaced to the conveying device. C is continuously conveyed by the action of the conveying device C. Thereby, the paper 13 is completely separated from the glass substrate 14 and removed. At this time, the conveyance speed of the belt 2 is low in the period in which the leading end portion of the paper 13 passes through the rotation direction changing portion 2b of the belt 2 and is sucked and held by the lower conveying portion 2C, and thereafter becomes high speed. It becomes the same speed as the conveying speed of the conveying device C. Further, while the glass substrate 14 is being transported by the transport device C at a high speed, processing such as chamfering is performed by a polishing tool or the like provided on both sides thereof. Further, in the above embodiment, the present invention is used in the case where the paper 13 is used as the protective sheet. However, the present invention can also be used in the same manner as in the case of using a polyethylene sheet or a foamed resin sheet instead of the paper. (Industrial Applicability) 1358383 21003pif The use of ^Fei (4) to protect the separate wealth and cutting device can effectively 2 = in the liquid crystal display, electric paddle display, electroluminescent display, the glass substrate used in the work, the protection of the second panel The glass substrate used for the bonding material of the board is separated and removed. The application of the protective plate separating device and the view of the embodiment of the present invention are shown in FIG. Fig. 3 is a perspective view of the protective plate separating device. Fig. 3 is a perspective view of the protective plate separating device. The center of the heart =:: = = component _ box _ Fig. 5 is a state in which the protective plate is separated and placed in a (four) state. (4) Top view FIG. 6 is a view showing the schematic side separation of the protective plate separating device in the (10) state. The second t-sequence 7 white &~. (1) respectively shows the conventional protective plate 22 1358383 2l003 pif in Fig. 8 (a) ~ (c) is a schematic plan view showing a separation order of a conventional protective plate. Fig. 9 is a schematic side view showing a problem of the prior art. [Description of main component symbols] 1: Protective plate separating device 2: belt (conveying band)

2a:水平方向輸送部位 2b :輸送方向變化部位 2c :下方向輸送部位 3、4、5 :旋轉輥 3b :周槽 3c :周槽的底面壁部 6:第一箱狀體2a: horizontal conveying position 2b: conveying direction changing portion 2c: lower conveying position 3, 4, 5: rotating roller 3b: circumferential groove 3c: bottom wall portion of the circumferential groove 6: first box-shaped body

6a :上面壁部 7:第二箱狀體 7 a :外側面壁部 8:吸引軟管 9、10 :貫通孔 11 :第一狹縫 12 :第二狹縫 13、 21 :合紙（保護板） 14、 20 :玻璃基板 20a :外周部 22 :刻線機構 23 1358383 21003pif6a: upper wall portion 7: second box-shaped body 7a: outer side wall portion 8: suction hose 9, 10: through hole 11: first slit 12: second slit 13, 21: paper (protection plate) 14, 20: glass substrate 20a: outer peripheral portion 22: scribe mechanism 23 1358383 21003pif

c:輸送裝置 Cl :帶傳送裝置 Μ、Ml、M2 :操作者 P :托板 S :劃線 W、W1 :加工位置 24c: conveying device Cl: belt conveying device Μ, Ml, M2: operator P: pallet S: scribe line W, W1: machining position 24

Claims

1358383 2l003pif 十、申請專利範圍： 1 · 一種保護板分離方法，將承載於保護板上的狀態而被輸送的玻璃基板移置到下游側的加工位置的步驟之前，使該保護板從該玻璃基板分離，該保護板分離方法包括：1358383 2l003pif X. Patent Application Range: 1 . A method for separating a protective plate from which a protective glass is transferred from a glass substrate conveyed on a protective plate to a processing position on a downstream side Separation, the protection panel separation method includes:

使輸送f的輸送方向在該輸送帶之下游側的端部從外平方向變化為往下方向，且至少在該輪送帶的輸送方向變化部位，使該玻璃基板往移置到該加工位置的方向輸送，同時利用負壓吸引力而吸附保持該玻璃基板下的該保讀板，並使該保護板從水平方向轉向到往下方向。 2如申明專利範圍第！項所述之保護板分離方法，宜中’該輸•從水平方向輸送部_輸送方向變化部位Ϊ 利用負壓則力而吸附保持該保護板。The conveying direction of the conveying f is changed from the outer flat direction to the downward direction at the end on the downstream side of the conveying belt, and the glass substrate is displaced to the processing position at least in a portion where the conveying direction of the conveying belt is changed. The direction is conveyed while the negative pressure attraction is used to adsorb and hold the reading plate under the glass substrate, and the protective plate is turned from the horizontal direction to the downward direction. 2 As stated in the patent scope! In the method for separating the protective sheets described in the section, it is preferable that the transfer portion is moved from the horizontal direction to the transport direction portion Ϊ by the negative pressure.

3.如申請翻第丨項或第方法，其中，送帶從輸送方向變化雜部位:利用負壓吸引力以吸附保持該J板方向輸运而被輸送將承細额上的狀態前，使該保護板二置;= 括：土傲刀離，泫保護板分離裝置包輸送帶，設置於該加工位承載於該保護板上的狀態_ 緣送帶使置，而該輸送帶的輸送方向在二，至u加工位變化為往下方向，且至少在該輪：水平方向干月』迗▼的一輸运方向變化部 25 1358383 2l003pif 位，在該輸送帶上產生負壓吸引力。 5 ·如申請專利範圍第4項所述之保護板分離装置，其中，在該輸送方向變化部位設置有捲掛該輸送帶的中空狀的旋轉輥’該旋轉輥的中空部具有空氣吸引部，用於在兮輸送帶的該輸送方向變化部位產生負壓吸引力。 6 ·如申請專利範圍第5項所述之保護板分離裝置，其中，在該輸送帶上形成多個貫通孔，並且在該旋轉輥的周壁部形成多個周槽，在各該周槽的底面壁部分別形^與; 中空部連通的貫通孔，且該輸送帶上的貫通孔的寬度的排列間距、與該旋轉輥上的周槽的軸向的排列間距^目同 7·如巾請專利範圍第4項到第6項任—項所 ^ 板分離裝Ϊ，其中，在該輸送㈣水平方向輸送部位的^ 方配置有-箱狀體，該箱狀體的内部空間形成•右 ”的水平方向輸送部位產生㈣吸引力的 ^輸中，範圍第7項所述之保護板分離裝1其中在泫輸达可上形成多個貫通孔，並在該箱 ;==並列形成多個長條狀的狹縫，二二二=:=r距、與該_上的狭板二範==第6項任-項所述之保護方配置有一箱狀體，咳箱二：：方向輸达部位的内側送帶的往下方向輪送部“用於在該輪】。，請專利範，項所 26 1358383 21003pif 其中，在該輸送帶上形成多個貫通孔，並在該箱狀體的外側面壁部沿著輸送方向並列形成多個長條狀的狭缝，且該輸送帶上的貫通孔的寬度方向的排列間距與該箱狀體上的狹縫的寬度方向的排列間距相同。 11 ·如申請專利範圍第4項到第6項任一項所述之保護板分離裝置，其中，該輸送帶的輸送速度可變。 12 ·如申請專利範圍第4項到第6項任一項所述之保護板分離裝置，其中，在該加工位置設置有從該輸送帶移置該玻璃基板的輸送裝置，並在該保護板通過該輸送帶的該輸送方向變化部位之前，以比該輸送裝置低的速度來驅動該輸送帶，在該保護板通過後的設定時間以後，以相同速度驅動該輸送裝置和該輸送帶。3. If the application of the third item or the method is applied, wherein the feeding belt changes from the conveying direction to the miscellaneous part: using the negative pressure attractive force to adsorb and hold the J-plate direction for transporting and being transported to the state before the fine amount is made, The protective plate is disposed two; = includes: the earth proud knife is separated, the 泫 protective plate separating device is covered by the conveyor belt, and is disposed in the state where the processing position is carried on the protective plate _ the edge feeding belt is disposed, and the conveying direction of the conveying belt is In the second, the u processing position changes to the downward direction, and at least in the wheel: the horizontal direction of the drying direction change portion 25 1358383 2l003pif position, a negative pressure attraction force is generated on the conveyor belt. The protective plate separating device according to the fourth aspect of the invention, wherein the hollow rotating roller that winds the conveyor belt is provided in the conveying direction changing portion, and the hollow portion of the rotating roller has an air suction portion. It is used to generate a negative pressure attraction at a portion of the conveying direction of the conveying belt. [6] The protective sheet separating device according to Item 5, wherein a plurality of through holes are formed in the conveying belt, and a plurality of circumferential grooves are formed in a peripheral wall portion of the rotating roller, in each of the circumferential grooves The bottom wall portions respectively form a through hole communicating with the hollow portion, and the arrangement pitch of the widths of the through holes on the conveyor belt and the arrangement pitch of the circumferential grooves on the rotating roller are the same as In the fourth to sixth items of the patent range, the board is separated and assembled, wherein a box-shaped body is disposed in the horizontal direction of the conveying (four), and the inner space of the box body is formed. "The horizontal conveying position produces (4) the attraction of the transmission, the protection plate separation device 1 of the scope item 7 wherein a plurality of through holes are formed in the sputum and can be formed in the box; == juxtaposed A strip-shaped slit, a two-two-two=:=r distance, and a slat on the _ on the slate == the sixth item--the protection side is configured with a box-shaped body, cough box two:: The downward direction of the inner side of the direction of the delivery portion is "for the wheel". Patent Application No. 26 1358383 21003pif wherein a plurality of through holes are formed in the conveyor belt, and a plurality of elongated slits are formed in parallel along the conveying direction on the outer side wall portion of the box-shaped body, and The arrangement pitch of the through holes in the conveyor belt in the width direction is the same as the arrangement pitch of the slits in the box-like body in the width direction. The protective sheet separating device according to any one of claims 4 to 6, wherein the conveying speed of the conveying belt is variable. The protective plate separating device according to any one of the items 4 to 6, wherein the processing device is provided with a conveying device for displacing the glass substrate from the conveying belt, and the protective plate is disposed at the processing position The conveyor belt is driven at a lower speed than the conveyor before the conveyance direction of the conveyor belt changes, and the conveyor and the conveyor belt are driven at the same speed after a set time after the passage of the protection panel.

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