1357970 100年.11月10日修正準^頁 六、發明說明： 【發明所屬之技術領域】 [0001]本發明係關於一種光學測量系統，特別係關於一種光學 位移測量系統。 [先前技術] 國近年來，隨著電子料車零組㈣產品D、型化，製造 上述產品之模具尺寸精度要求越來越高，且加工技術亦 越來越精密’故微小位移測量或振動測量技術之重要性 曰趨增加》 _3]切技術-般利用雷射三角法來測量物體之微小位移。 請參閱第一圖，該光學測量系統10—般包括一雷射器11 與一光電敏感元件15 ,該雷射器11用來向待測物體18表 面發射雷射光111，該光電敏感元件15用來接收被待測物 體18反射之雷射光112，其具有一光接收面151，該光接 收面151由感光單元陣列構成。使用上述光學測量系統1〇 ’測量待測物體18之位移時，首先雷射器11以一定入射 • 角向待測物體18之表面發射雷射光111，並被反射，光電 敏感元件15於另一角度接收反射雷射光112。待測物體18 移動前後反射雷射光112在光電敏感元件15上之投影位置 發生變化，並分別由感光單元陣列之不同感光單元所感 測’然後計算待測物體18之實際位移。 [0004]若汐為雷射光111入射角之余角，尤:為待測物體18從第 一位置4丨移動到第二位置A處之位移，及為待測物體18 2 從第一位置、移動到第二位置、時反射雷射光112之平移 094142500 表單編號A0101 第3頁/共12頁 1003415176-0 1357970 - 100年.11月10日核正替換頁 量，I為雷射光111因待測物體18移動所產生與雷射器11 之間之光程差， _5]則 J = LxSiTia J D= Lx^i7i2a * _6]故 D/Z·= (k 如2?)/(1 X 伽 Θ)=1357970 100. November 10th revised page 6. Description of the Invention: [Technical Field of the Invention] [0001] The present invention relates to an optical measuring system, and more particularly to an optical displacement measuring system. [Prior Art] In recent years, with the D-type and productization of the electronic vehicle zero group (4), the dimensional accuracy requirements for the manufacture of the above-mentioned products are getting higher and higher, and the processing technology is becoming more and more precise, so the micro-displacement measurement or vibration The importance of measurement technology is increasing. _3] Cutting technology - The laser triangulation method is used to measure the small displacement of an object. Referring to the first figure, the optical measuring system 10 generally includes a laser 11 and a photoelectric sensor 15 for emitting laser light 111 to the surface of the object 18 to be tested. The laser light 112 reflected by the object to be tested 18 is received, and has a light receiving surface 151 composed of an array of photosensitive cells. When the displacement of the object 18 to be measured is measured using the above optical measuring system 1', first, the laser 11 emits the laser light 111 toward the surface of the object 18 to be measured at a certain incident angle, and is reflected, and the photoelectric sensitive element 15 is on the other The reflected laser light 112 is received at an angle. The projected position of the reflected laser light 112 on the photoelectric sensitive element 15 before and after the movement of the object 18 to be measured changes, and is sensed by different photosensitive cells of the photosensitive cell array, respectively, and then the actual displacement of the object 18 to be measured is calculated. [0004] If 汐 is the angle of incidence of the incident angle of the laser light 111, in particular: the displacement of the object 18 to be tested from the first position 4 到 to the second position A, and the object to be tested 18 2 from the first position, Move to the second position, reflect the translation of the laser light 112 094142500 Form No. A0101 Page 3 / Total 12 Page 1003415176-0 1357970 - 100 years. November 10th, the nuclear replacement page amount, I is the laser light 111 due to test The optical path difference between the object 18 and the laser 11 is generated, _5] then J = LxSiTia JD = Lx^i7i2a * _6] so D/Z·= (k is 2?) / (1 X gamma) =
Bin2djSi7id = 2χ Cos& ° [0007] 因而，只要光電敏感元件15檢測出反射雷射光112之平移 量£>，就可推算出待測物體18之位移尤·。 μBin2djSi7id = 2χ Cos& ° [0007] Thus, as long as the photoelectric sensitive element 15 detects the translational amount of the reflected laser light 112, the displacement of the object 18 to be measured can be derived. μ
II
[0008] 然，上述光學測量系統1 0之測量精度取決於光電敏感元 件15之解析度大小，光電敏感元件15之解析度越高，測 量精度越高，且可檢測到之反射雷射光11 2之平移量亦 更小。因此，檢測較小反射雷射光11 2之平移量&，需採 用具有較高解析度之光電敏感元件15。且，光電敏感元 件15之解析度取決於其上感光單元面積大小，感光單元 面積愈小，光電敏感元件15之解析度愈高，然而，光電 < 敏感元件15製造時，較難製造面積較小之感光單元，因 而解析度無法提高，故無法測得物體一些較小之位移變 化，且測量精度較低。 【發明内容】 [0009] 鑒於上述狀況，有必要提供一種測量精度'較高且可測量 物體較小位移之光學測量系統。 [0010] —種光學測量系統，用於待測物體之位移測量或振動測 量，該系統包括：一向待測物體表面發射雷射光之光源 094142500 表單编號A0101 第4頁/共12頁 1003415176-0 1357970[0008] However, the measurement accuracy of the optical measuring system 10 depends on the resolution of the photoelectric sensitive element 15, and the higher the resolution of the photoelectric sensitive element 15, the higher the measurement accuracy, and the detectable reflected laser light 11 2 The amount of translation is also smaller. Therefore, the detection of the amount of translation of the smaller reflected laser light 11 2 requires the use of a photoelectrically sensitive element 15 having a higher resolution. Moreover, the resolution of the photo-sensitive element 15 depends on the size of the photosensitive unit thereon, and the smaller the area of the photosensitive unit, the higher the resolution of the photoelectric sensitive element 15. However, when the photosensitive element 15 is manufactured, it is difficult to manufacture the area. The small photosensitive unit, so the resolution cannot be improved, so it is impossible to measure some small displacement changes of the object, and the measurement accuracy is low. SUMMARY OF THE INVENTION [0009] In view of the above circumstances, it is necessary to provide an optical measuring system with a high measurement accuracy and a small displacement of an object. [0010] An optical measuring system for displacement measurement or vibration measurement of an object to be tested, the system comprising: a light source 094142500 for emitting laser light to the surface of the object to be tested. Form No. A0101 Page 4 / Total 12 pages 1003415176-0 1357970
[0011] , 100年.11.月10日慘正替换頁 :一光電敏感元件，該光電敏感元件包括一由感光單元 陣列構成之光接收面，用於接收被待測物體表面反射之 雷射光；及一擴束透鏡組，其位於反射雷射光之行進路 徑上，且該擴束透鏡組具有一與反射雷射光平行之光軸 ，該擴束透鏡組沿反射雷射光之行進方向依次包括一第 一凸透鏡與一第二凸透鏡，該第一凸透鏡與第二凸透鏡 之焦線與光軸重合，且該第一凸透鏡與第二凸透鏡之間 距為該兩透鏡焦距之和，該第二凸透鏡之焦距大於第一 凸透鏡之焦距。 一種光學測量系統，用於待測物體之位移測量或振動測 量，該系統包括：一向.待測物體表面發射雷射光之光源 ;一光電敏感元件，該光電敏感元件包括一由感光單元 陣列構成之光接收面，用於接收被待測物體表面反射之 雷射光；該光學測量系統還包括一擴束透鏡組，其位於 反射雷射光之行進路徑上，且該擴束透鏡組具有一與反 射雷射光平行之光軸，該擴束透鏡組沿反射雷射光之行 進方向依次包括·^•凹透鏡與一凸透鏡，該凹透鏡與凸透 鏡之焦線與光軸重合，且該凸透鏡之焦距大於凹透鏡之 焦距，該凹透鏡與凸透鏡之間距為該凸透鏡與凹透鏡焦 距之差。 [0012] 相較於先前技術，該光學測量系統於反射雷射光之行進 路徑上設置一擴束透鏡組，將待測物體移動前後反射之 反射雷射光間距放大，從而擴大待測物體移動前後反射 雷射光在光電敏感元件上之投影間距，突破光電敏感元 件解析度之限制，故可測量較小之位移，且具有較高之 094142500 表單编號A0101 第5頁/共12頁 1003415176-0 1357970 [0013] [0014] [⑻ 15] [0016] [0017] 094142500 100年.11月10日核正替換頁 測量精度。 【實施方式】 請參閱第二圖’本發明較佳實施例之光學測量系統2〇包 括一雷射器21、一擴束透鏡組23及一光電敏感元件25。 該雷射器21位於待測物體28之一側，且以一定入射角α 向待測物體28之表面發射雷射光211 ’並被該待測物體28 之表面反射。本實施例中，該雷射器21為一雷射二極體 〇 請一併參閱第三圖，該擴束透鏡組23位於反射雷射光212 之行進路徑上，其具有一光轴233，該光轴233與雷射光 211間夾角為，即該光軸233與反射雷射光21 2平行。 該擴束透鏡組23沿反射畲射光212之行進方向依次包括一 第一凸透鏡231與一第二凸透鏡232，該第一凸透鏡231 與第二凸透鏡232之焦線與光軸233重合，該第一凸透鏡 231之焦距^小於該第二凸透鏡232之焦距%,且該第一 凸透鏡231與該第二凸透鏡232之間距為兩焦距^與『之 和。反射雷射光212依序經過第一凸透鏡231與第二凸透 鏡232後遠離光轴233。 該光電敏感元件25位於第二凸透鏡232之遠離第—凸透鏡 231—側，其具有一光接收面251，該光接收面251由感 光單元陣列構成，反射雷射光212射向該光接收面251， 並在該光接收面251上投影。本實施例中，光電敏感元件 25為一電荷藕合式影像傳感器。 使用該光學測量系統2 0測量待測物體2 8從第一位置b移 表單编號A0101 第6頁/共12頁 1003415176-0 1357970 [0018] [0019] [0020] φ [0021] [0022][0011] , 100 years old, 11th, 10th, the replacement page: a photoelectric sensitive element, the photoelectric sensitive element comprising a light receiving surface formed by the array of photosensitive cells for receiving the laser light reflected by the surface of the object to be tested And a beam expander lens group, which is located on the path of the reflected laser light, and the beam expander lens group has an optical axis parallel to the reflected laser light, and the beam expander lens group sequentially includes a direction along the traveling direction of the reflected laser light. a first convex lens and a second convex lens, wherein a focal line of the first convex lens and the second convex lens coincides with an optical axis, and a distance between the first convex lens and the second convex lens is a sum of focal lengths of the two lenses, and a focal length of the second convex lens Greater than the focal length of the first convex lens. An optical measuring system for displacement measurement or vibration measurement of an object to be tested, the system comprising: a light source that emits laser light on a surface of the object to be tested; a photoelectric sensitive component, wherein the photoelectric sensitive component comprises an array of photosensitive cells a light receiving surface for receiving the laser light reflected by the surface of the object to be tested; the optical measuring system further comprising a beam expanding lens group located on the traveling path of the reflected laser light, and the beam expanding lens group has a reflecting thunder The optical beam is parallel to the optical axis, and the beam expander lens group sequentially includes a concave lens and a convex lens along the traveling direction of the reflected laser light. The focal line of the concave lens and the convex lens coincide with the optical axis, and the focal length of the convex lens is larger than the focal length of the concave lens. The distance between the concave lens and the convex lens is the difference between the focal length of the convex lens and the concave lens. [0012] Compared with the prior art, the optical measuring system provides a beam expanding lens group on the traveling path of the reflected laser light, and enlarges the distance of the reflected laser light reflected by the object to be measured before and after the movement, thereby expanding the reflection of the object to be tested before and after the movement. The projection pitch of the laser light on the photoelectric sensitive component breaks through the limitation of the resolution of the photoelectric sensitive component, so the smaller displacement can be measured, and the higher the 094142500 form number A0101 page 5 / 12 pages 1003415176-0 1357970 [ [0014] [(8) 15] [0017] [0017] 094142500 100 years. November 10th nuclear replacement page measurement accuracy. [Embodiment] Please refer to the second figure. The optical measuring system 2 of the preferred embodiment of the present invention includes a laser 21, a beam expanding lens group 23 and a photoelectric sensor 25. The laser 21 is located on one side of the object 28 to be measured, and emits laser light 211' to the surface of the object 28 to be measured at a certain incident angle α and is reflected by the surface of the object 28 to be tested. In this embodiment, the laser 21 is a laser diode. Referring to the third figure, the beam expander lens group 23 is located on the traveling path of the reflected laser light 212, and has an optical axis 233. The angle between the optical axis 233 and the laser light 211 is such that the optical axis 233 is parallel to the reflected laser light 21 2 . The beam expanding lens group 23 includes a first convex lens 231 and a second convex lens 232 in sequence along the traveling direction of the reflected illuminating light 212. The focal lines of the first convex lens 231 and the second convex lens 232 coincide with the optical axis 233, the first The focal length of the convex lens 231 is smaller than the focal length % of the second convex lens 232, and the distance between the first convex lens 231 and the second convex lens 232 is the sum of the two focal lengths. The reflected laser light 212 passes through the first convex lens 231 and the second convex lens 232 in sequence, and is away from the optical axis 233. The photo-sensitive element 25 is located on the side of the second convex lens 232 away from the first convex lens 231, and has a light receiving surface 251. The light receiving surface 251 is formed by an array of photosensitive cells, and the reflected laser light 212 is incident on the light receiving surface 251. And projected on the light receiving surface 251. In this embodiment, the photo-sensitive element 25 is a charge-coupled image sensor. Using the optical measuring system 20, the object to be measured 2 is measured to be moved from the first position b. Form No. A0101 Page 6 of 12 1003415176-0 1357970 [0018] [0020] [0020] [0022]
[0023] •100年.11月10日按正替換百 動到第二位置Β2所發生之位移f時，若待測物體28移動 前後反射雷射光212之平移量為D『，則 ϋ !Χ ~ Q>s(90° - a) = 2χ Sin a ♦ f » · 若反射雷射光212經過擴束透鏡組23後在光電敏感元件25 上之投影間距為，則滿足關係： 因而，只要藉由光電敏感元件25測出:，即可推出待測 物體28之位移^。因第二凸透鏡232之焦距%大於第一 凸透鏡231之焦距f i，故大於，因而光學測量系統 20可突破光電敏感元件25之解析度限制，測量較小之位 移。 可以理解，本發明光學測量系統之擴束透鏡組沿反射雷 射光之行進方向亦可依次包括一凹透鏡與一凸透鏡，該 凹透鏡與凸透鏡之焦線與光軸重合，且該凸透鏡之焦距 大於凹透鏡之焦距，該凹透鏡與凸透鏡之間距為該凸透 鏡與凹透鏡焦距之差。 综上所述，本發明符合發明專利要件，爰依法提出專利 申請。惟，以上所述者僅為本發明之較佳實施例，舉凡 熟悉本案技藝之人士，在爰依本發明精神所作之等效修 飾或變化，皆應涵蓋於以下之申請專利範圍内。 【圖式簡單說明】 第一圖係先前技術之光學測量系統示意圖； 094142500 表單編號A0101 第7頁/共12頁 1003415176-0 [0024] 100年11月10日梭正替換頁 1357970 [0025] 第二圖係本發明較佳實施例之光學測量系統示意圖； [0026] 第三圖係第二圖之擴束透鏡組示意圖。 【主要元件符號說明】 [0027] 光學測量系統：20 [0028] 雷射器：21 、 [0029] 雷射光：211 [0030] 反射雷射光：212 [0031] 擴束透鏡組：23 參 [0032] .第一凸透鏡：231 [0033] 第二凸透鏡：232 [0034] 光軸：233 [0035] 焦距：：^、f2 [0036] 光電敏感元件：25 剛光接收面：251 ® [0038] 待測物體：28 [0039] 第一位置：Bi [0040] 第二位置：B2 094142500 表單编號A0101 第8頁/共12頁 1003415176-0[0023] When the displacement f occurring in the second position Β2 is replaced by the positive displacement of the object to be measured, the shift amount of the reflected laser light 212 before and after the movement of the object 28 is D ′, then ϋ ! ~ Q>s(90° - a) = 2χ Sin a ♦ f » · If the projected pitch of the reflected laser light 212 after passing through the beam expanding lens group 23 on the photo-sensitive element 25 is satisfied, then the relationship is satisfied: The photoelectric sensitive element 25 measures: the displacement of the object 28 to be tested can be pushed out. Since the focal length % of the second convex lens 232 is larger than the focal length f i of the first convex lens 231, it is larger than that, and thus the optical measuring system 20 can break the resolution limit of the photoelectric sensitive element 25 and measure a small displacement. It can be understood that the beam expanding lens assembly of the optical measuring system of the present invention can also include a concave lens and a convex lens in sequence along the traveling direction of the reflected laser light. The focal line of the concave lens and the convex lens coincide with the optical axis, and the focal length of the convex lens is larger than that of the concave lens. The focal length, the distance between the concave lens and the convex lens is the difference between the focal length of the convex lens and the concave lens. In summary, the present invention complies with the requirements of the invention patent and submits a patent application according to law. However, the above description is only the preferred embodiment of the present invention, and equivalent modifications or variations made by those skilled in the art of the present invention should be included in the following claims. BRIEF DESCRIPTION OF THE DRAWINGS The first figure is a schematic diagram of an optical measurement system of the prior art; 094142500 Form No. A0101 Page 7 of 12 1003415176-0 [0024] On November 10, 100, the shuttle replacement page 1357970 [0025] 2 is a schematic diagram of an optical measuring system in accordance with a preferred embodiment of the present invention; [0026] The third drawing is a schematic view of a beam expanding lens assembly of the second embodiment. [Main component symbol description] [0027] Optical measurement system: 20 [0028] Laser: 21, [0029] Laser light: 211 [0030] Reflected laser light: 212 [0031] Expanded lens group: 23 Reference [0032] First convex lens: 231 [0033] Second convex lens: 232 [0034] Optical axis: 233 [0035] Focal length: :^, f2 [0036] Photoelectric sensitive element: 25 Just-light receiving surface: 251 ® [0038] Object: 28 [0039] First position: Bi [0040] Second position: B2 094142500 Form number A0101 Page 8 / Total 12 pages 1003415176-0