TWI357497B - Apparatus for testing flexible device under bendin - Google Patents

Apparatus for testing flexible device under bendin Download PDF

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TWI357497B
TWI357497B TW96137732A TW96137732A TWI357497B TW I357497 B TWI357497 B TW I357497B TW 96137732 A TW96137732 A TW 96137732A TW 96137732 A TW96137732 A TW 96137732A TW I357497 B TWI357497 B TW I357497B
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component
pushing
group
flexible
substrate
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TW96137732A
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TW200916748A (en
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Ko Yu Chiang
Chen Pang Kung
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Ind Tech Res Inst
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1357497 100年8月26曰替換頁 九、發明說明: ----— 【發明所屬之技術領域】 [001]本發明係’-種撓性電子元件彎剌試裝置,特別是 關於-種撓性電子元件彎曲之光、電、材料性能測試震置。 【先前技術】 [002】由於撓性電子元件能實現質輕、可彎曲、可印製、大面 積化的電子產品,近年來已㈣引了許k意力並廣泛的被研 究。目前,撓性電子元縣要應用於智慧卡、可撓式電子書報、 超薄手機、腕帶式數嫌、齡Hi先婦品。射,可彎曲 這項本質更是撓性電子與生俱來的㈣,翻此 多全新的應用。 [003]^« Tsuyoshi Sekitani, et al., J. Wcryst ^ 352 P.m9_㈣料,得知撓性電子元件縣張力咖及有_ ===纽娜㈣輪的鄉。為了要讀 子碰以及其積體電路能有實際的_,瞭解1彎曲效應 重。制是奴㈣私後,紐電子树各項特性 的方ΓΓϋΓΙ^1979號翻雜為―_槐職性元件 猶==!7了利用至少,裝置、-個 的輸达▼,和一個可監測元件 測裝置可讀供元件在彎畴變下 ,的«置。此監 變異監測,但·技術只能朗元件在電性方面的特性 無法提供錢嶋调嶋, 1357497 100年8月26日替換頁 電子 移•對任何闕雜,亦無法進行反覆彎曲 =(亦即夕二人幫曲測試),而在特定的撓曲情形下測試撓性 =。此外’在前案技術中對於撓性基板所受到之壓力、拉力未 提出具體的控制手段,_無法·料力的施加,可能造成所 測試之撓性電子元件的毁損或斷裂。 旦、[005]因此’本發明提出—套撓性電子元件彎曲測試裝置,可 $測撓性電子元件在彎曲時及反覆f錢的特性變異。 【發明内容】 ' 网鑒於以上的問題,本發明的目的在於提供—種挽性電子 讀彎曲測試裝置,用以職—撓性基板上之至少—換性電 i牛’該料測離置包财,至少—婦元件,係夾持該撓性基 板之二端;至少-推抵元件組,至少包括—第—推抵元件及—第 -推抵請’第-推抵元件與第二推抵元件間具有—距離。第一 推抵元件及第二推抵元件各具有至少__弧面;至少—致動元件, 致動該夹持元倾義,和致_推減倾機_抵該繞性 基板,使該撓性基板依該第-推抵元件_第二推抵元件之弧面 而彎曲,其中該推抵元件組推抵賴性基板時,該第—推抵元件 與該第二推抵耕接觸於同—平面,該撓性電子树位於該第一 推抵7L件與該第二推抵元制;及—檢顺件,係於該挽性基板 彎曲時檢測該基板。 土 [007]於前述的裝置中,該夾持元件係為圓柱,且該挽性電子 元件彎曲測試裝置更包含-控概件及—壓力感測元件^壓力 感測元件係設置於_抵元件之表面上,以在該推抵元件推抵該 6 1357497 1UD年8月26日替換頁 &性基板_測並傳出-㈣訊號倾控制 該壓力訊號而控制該致動元件致動該推抵元件之移動量和該爽持 元件之移動量,因此,此撓性電子元件f曲測試裝置可應用於捲 繞(Roll to Roll)製程中。 一网於前義裝置中,該夾献件係朝定夾具,該挽性電 子7〇件¥曲測試裝置更包含-控制元件、—壓力感測縣,該壓 力感測元㈣設胁_抵元件與該驗基板之間;及/或一拉力 感測元件’雜域測元件係設置於喊持元件之—側,以在該 推抵元件滅該撓性基板賴測並傳出―壓力訊號及—拉力訊號 予該控制讀’雜制元件依賴力碱及/或雜力訊號而控制 該致動讀致動該推抵元件之移動量和該央持元件之移動量,則 該撓性電子元件靑曲測試裝置可應用於片狀批次(驗t〇 製程中。 [009]以上之關於本發_容之酬及以下之實施方式之說 明係用以示範與解釋本發明之精神與原理,並且提供本發明之專 利申請範圍更進一步之解釋。 【實施方式】 [】X下在戶、把方式中詳細敘述本發明之詳細特徵以及優 點,糾容相餘何熟胃相藝者了解本發明之技術内容並 據以心’且根縣說嘴觸露之内容、_請專利顧及圖式, 任何熟^相關技藝者可輕易地理解本發明相關之目的及優點。 以下之實施例係進一步詳細說明本發明之觀點,但非以任何觀點 限制本發明之範_。 7 1357497 ΙΌ111笙9固θ 年8月26曰替換頁 f = _示本個之—種撓性電 :=:Γ以測試一撓性基板10上之-撓性電子元· ^測^包括有:一失持元件組30,係夹持該換性基板10 姻所悉,絲平㈣之續元件;—推抵元件組40, 二弧面;—致動元件5G ’致動該夹持林3G移動,和 航做4G義_抵鋪性餘ω,韻挽錄板 10依該弧面而彎曲;及一檢測組件 時檢_紐。 餘該繞性基板H)彎曲 4二2]第3圖顯示第2圖中紐動元件5〇致動該推抵元件組 推抵撓性基板ίο之動細細。財,她元件組4〇係位 於驗紐K)的下方,當推減倾4_致動树%而往上 頂%,接槪她元倾4G的撓性基板1()隨即產生—個等同於 推抵兀件組40之曲率的圓弧形,在基板上的測試元件即承受一個 有張力的彎曲應力,此時檢測組件6〇即向下移動與該挽性電子元 件20相接觸’以檢_撓性電子元件2()在受職力時之電性, 其中該檢測組件60係為一探針機台_〇η),且當欲檢測該 撓性電子元件20之光學性„,細驗件 裝置,其具有-光咖卜細♦㈣魏 之光源經過撓性電子元件2〇,透射或反射至光感測元件,而得知 該撓性電子元件20之光性,當欲檢測該撓性電子元件2〇之材料 知性時,該檢測組件6〇係為一材料檢測裝置。 〆 [013]推抵元件組40的曲率可以任意調整,以量測不同曲率 下耕特性的變異’推抵^件組4G可藉由致動树5〇於—維* 1357497 」00年8月26曰替換頁 ^或二維空間中移動,用以提供基板上各個 篁測’並且藉由該致動元件5G使推抵元件組4()上下反覆動作, 而達成本發明對撓性電子元件2〇其反覆彎曲後的特性量測,該推 =元件組40並且可依不同的測試需求而作數量的增減及位置的 [〇14]第4A圖係為顯示本發明該推抵元件之第二實施例的側 視圖。圖t顯示該推抵元件拖係為具有兩相異曲率半徑之凸 輪’其中弧面41a之曲率半徑較弧面仙之曲率半獲大。 、[〇15】第犯圖係為顯示本發明該推抵元件之第三實施例的側 視圖。圖中顯示_抵元件組獅係為具有四減醇半巧之凸 輪,其中弧面4lf之曲率半徑係最大,其次祕面仙,再其次 為弧面41d,而最小的則為弧面41c。 [016]第5圖係為顯示本發明紐動元件之第二實施例的作 動方向圖。該致動元件51係在一維空間或二維空間中移動,且複 •數個致動元件與該等夾持元件及該推抵元件連接,使該等夹持元 件及該推抵元件連接亦在—輕間或二較間中移動。 [〇17]第6圖係為顯示本發明該夾持元件之第二實施例的侧 視圖。該失持元餘3〇係為一對圓柱組3〇&和施,至少豆中之 一該圓柱組或施具有動力而用以傳送該撓性基板. _]第7醜示本發明該祕树3()之第三實施例的立體 圖。該夾持元件組30係為—對固定失具施,其中該對爽具相對 之兩側係可沿相鄰之一側而滑動。 [〇19]第8 _為顯示本發明之—種驗電子元件彎曲測試 9 笛-_ 年8月26日替換頁 侧職目。賴城麻 -基板10 70組40之表面上,用以在該推抵元件兔4〇推抵該挽性 並H由任何手段(树連接絲錢接)㈣出—壓力訊號 以控教件70,該控航件7G依該壓力訊號而控制該致動元 50致動該推抵元件組4G之移動量和該崎元㈣之移動量, 糟此而可控靖曲力的施加,以戦•造成制試之撓性電子 =件2〇的毁損或斷裂,並可在蚊的撓曲情形下或以固定的製程 肩如固定之張力或拉力)測試該撓性電子元件2〇,而達到本發 明之目的。 [〇=〇]第9隱為顯不本發明之—縣性電子元件彎曲測試 裝置之第三實施例的側視圖。雜域測元件9G係設置於該夾持 7L件30之一側’以在該推抵元件組4〇推抵該撓性基板料感測 並藉由任何手段(有線連接或無線連接)而傳出一拉力訊號予該控 /牛G肖控制元件70依該拉力訊號而控制該致動元件5〇致 動該f減件組4G之移動量和該夾持元件3G之移動量,藉此而 可=彎曲力的施加,以避免可能造成所測試之撓性電子元件卽 、又損或斷4 ’並可在特定的撓曲情形下或以固定的製程參數(如 固定之張力或拉力)測試該撓性電子元件2〇,而達到本發明之目 的。 [〇21]第1〇圖係為顯示本發明之 裝置之第四3施例的立體圖。當該撓性電子元件μ彎曲測試裝置 ^用於捲離。11 tG Roll)製程巾時,失持元雜3G係為—對圓柱 、'且3〇a和3〇b ’用以將具有待測撓性電子元件20之撓性絲10 :持’且至少其中之一該圓柱組30a或鳥 凡性基板ίο ’當圓柱組施或勘僅_组具有動力時,藉由 ==板2G拉引’而朝具動力之該圓柱組咖或施移 輸㈣口施皆具有動力且方向和逮度相同時, 讀献Si軸兩圓柱财之一方向移動。推抵元件撕係位 ^基板iG的下方,當推抵元件組她藉由致動元件50而往 上頂時,接觸此推抵元件組伽的撓性基板1〇隨即產生一個 疋件4〇C之曲率的圓弧形,在基板上的挽性電子元件20即 受一個有張力的彎曲應力,此時檢測組件6〇即向下移動與該挽 性電子树20相_,讀_祕電子元件2()錢到張 之光、電或材料特性。 [〇22]於撓性基板10的上方,設置有相同曲率的一推抵元件 組衡,該推抵元件組·為兩個,即第一推抵元件獅及第二 推抵讀40d2,第-推抵元件魏與第二推抵元件各具有 春-相同曲率之弧面,且第一推抵元件麵與第二推抵元件搬 間具有-距離。當該推抵元件組往下壓時,接觸此推抵元件 组術的撓性基板騎即產生一個等同於此推抵元件組術之曲 2的圓弓瓜形,而在基板上方的測試元件位於第一推抵元件麵及 第-推抵70件搬之間,並承受—個有壓縮力的彎曲應力,此時 檢測組件㈣卩向下移動與該撓性電子元件勒翻,以檢測該 •撓性電子秘2G在受到壓縮力時之光、電或材料特性。此一設計 係可避免直接對待測之撓性電子元件2〇施加壓力,而造成待測之 換性電子元件20之損壞。其中,上述推抵元件組舰為圓柱,用 11 1357497 100年8月26日替換頁 100年 以使撓性基板丨〇可於捲繞(Roll to Ron)製程 [023]第11難為顯示本侧之—種紐電子元件彎曲測試 裝置之苐五實施綱立體圖。其t,#該舰電子元件%彎曲測 試裝置應胁狀批次(Sheet tG 8_製針時,祕元件組% 係為-對固定夾具,用以將具有待測撓性電子元件20之挽性基板 10失持,推抵元件組40c係位於撓性基板1〇的下方, 件組他藉由致動元件5G往上頂時,接觸此推抵元件組输的換 性基板Π)隨即產生-個等同於推抵元件組撕之曲率的圓弧形, 而在基板上的祕電子元件2G即承受—個魏力的料應力,此 時檢測組件60㈣下__齡奸树2()她觸,以檢測 該撓性電子元件2G在受龜力時之光、電雜料特性。 陶於此實施例中,更包含—控制树%壓力感測元 件80,該壓域測元件8G係設置於該推抵树⑽之表面上. ^或-拉力_元件9G ’雜力_元件9Q係設置於該失持元 ==之-側’以在該推抵元件組4〇推抵該撓性基板料感測 ''傳出-動訊叙/或-拉力訊號予該控槪件%,該控制元件 7〇依該壓力訊號及域該拉力訊號而控制該致動元件知致動該推 抵疋件40之移動量和該爽持元件3〇之移動量,藉此而可控制彎 =施加,以避免可能造成_試之撓性電爾_毁損或 [025】第^圖係為顯示本發明之一種挽性電子元件彎曲測試 ,置之第六貫施例的立體圖,其中該推抵元件組她為三個以 上,配合待測之撓性電子元件2〇而作調整,以三個 12 1357497 100年8月26日替換頁 括-第-推抵元件卜-第二推抵元件 件刪,其各純元躲aj心處具有—賴,贿彼歧相連接, 而本實施例可同時將-對待測之挽性電子元件2〇置於同一橫向 之各推抵兀件之間’以同時檢測各待測挽性電子元件。此一設 計係可避免直觸制之撓輯子耕2G施加壓力,造成待^ 之撓性電子元件20之損壞。 [026]雖穌發明以前述之實施觸露如上,然其並非用以限 定本發明。在魏離本發明之精神域_,縣之更触潤飾, 均屬本㈣之翻健翻。關於本糾所界定之_範圍請參 考所附之申請專利範圍。 【圖式簡單說明】 ^1圖係為先前技術之—種軟性元件的檢測系統; 第2圖係為顯示本發明之—種撓性電子元件彎曲測試裝置之 第一實施例的側視圖; 第3圖係為顯示第2圖中該致動树致動該推抵元件組而推 抵撓性基板之動作關係的侧視圖; 第4A圖係為顯示本發明該推抵元件組之第二實施例的 圖; 第4B圖係為顯示本發明該推抵元件組之第三實施例的 圖; 第5圖係為顯示本發明該致動元件之第例的作動方向 圖; 第6圖係為顯示本發明該夾持元件組之第二實施例的側視 13 1357497 圖; 】00年8月26 曰替換頁 弟7圖顯示本發明該夾持元件之第三 第8圖係為顯示本發明 ::立體圖·, 第二實補的術_ ; 紐電子順曲測, 第9圖係為顯示本發明之一種撓性電子 第三實施例的侧視圖; 第10圖係為顯示本發明之—種撓性電子元件彎 之第四實施例的立體圖; 、 第11圖係為顯示本發明之—種撓性電子元件彎曲測試裝置 之第五實施例的立體圖·,及 元件彎,試數置 之 試農置 m 第12圖係為顯示本發明之一種撓性電子元件彎曲測試裝置 之第六實施例的立體圖。 【主要元件符號說明】 10 撓性基板 20 挽性電子元件 30失持元件組 30a圓柱組 3〇b圓柱組 30c固定夾具 40 推抵元件組 40a推抵元件組 4〇b推抵元件組 40c推抵元件組 1357497 100年8月26日替換頁 40dl第一推抵元件 40d2第二推抵元件 40el第一推抵元件 40e2第二推抵元件 40e3第三推抵元件 41a弧面 41b弧面 41c弧面 41d弧面 41e弧面 41f弧面 50 致動元件 51 致動元件 60 檢測組件 70 控制元件 80 壓力感測元件 90 拉力感測元件 151357497 August 26, pp., pp. IX, invention description: ----- [Technical field of invention] [001] The present invention is a flexible electronic component bending test device, especially regarding The optical, electrical, and material properties of the curved electronic components were tested. [Prior Art] [002] Since flexible electronic components can realize light, flexible, printable, and large-area electronic products, in recent years, (4) has been introduced and widely studied. At present, flexible electronic Yuanxian County should be applied to smart cards, flexible e-books, ultra-thin mobile phones, wristband-type suspicions, and age-first women's products. Shot, bendable This essence is more innate with flexible electronics (4), turning this new application. [003]^« Tsuyoshi Sekitani, et al., J. Wcryst ^ 352 P.m9_ (four), learned that the flexible electronic components county tension coffee and _ === Nina (four) round of the township. In order to read the sub-touch and its integrated circuit can have the actual _, understand the 1 bending effect weight. The system is a slave (four) private, the characteristics of the new electronic tree Fang ΓΓϋΓΙ ^ 1979 turned into a _ 槐 性 性 犹 = ==! 7 use at least, device, - a transmission ▼, and a monitor The component measuring device is readable for the component to be placed under the bending domain. This monitoring of variability monitoring, but the technology can only provide the elements of the electrical characteristics of the elements can not provide money 嶋 嶋, 1357497 on August 26, 100 replacement page electronic shift • for any noisy, can not be repeated bending = (also Eve the duo to test) and test the flexibility in a specific flexing situation. Further, in the prior art, no specific control means is applied to the pressure and tension applied to the flexible substrate, and the application of the material force may result in damage or breakage of the tested flexible electronic component. Once, [005] therefore, the present invention proposes a flexible electronic component bending test device that can measure variations in the characteristics of flexible electronic components during bending and reversal. SUMMARY OF THE INVENTION In view of the above problems, an object of the present invention is to provide a plucking electronic read and bend test apparatus for at least a versatile electric i-roll on a job-flexible substrate. And at least the female component is for holding the two ends of the flexible substrate; at least - pushing the component group, at least comprising - the first pushing component and the - the first pushing - the first pushing component and the second pushing There is a distance between the components. The first pushing element and the second pushing element each have at least a __curved surface; at least the actuating element actuates the clamping element, and the _ pushes the tilting machine _ against the winding substrate, so that The flexible substrate is bent according to the arc surface of the first pushing member _ the second pushing member, wherein when the pushing member group pushes against the substrate, the first pushing member is in contact with the second pushing and ploughing a plane, the flexible electronic tree being located at the first pushing 7L and the second pushing element; and the detecting component detecting the substrate when the conductive substrate is bent. [007] In the foregoing device, the clamping member is a cylinder, and the tensile electronic component bending test device further comprises a control member and a pressure sensing component. The pressure sensing component is disposed on the On the surface, the pushing element is pushed against the 6 1357497 1 August UD replacement page & slab _ test and outgoing - (four) signal tilt control the pressure signal to control the actuating element to actuate the push The amount of movement of the resisting member and the amount of movement of the holding member can be applied to the Roll to Roll process. In the front device, the clip is attached to the fixed fixture, and the pull test device further includes a control element, a pressure sensing county, and the pressure sensing element (4) Between the component and the test substrate; and/or a tensile sensing component 'the miscellaneous sensing component is disposed on the side of the calling component to detect and transmit the pressure signal on the flexible substrate. And the pull signal to the control read 'the miscellaneous component relies on the alkali and/or the power signal to control the amount of movement of the actuating read actuating the push element and the amount of movement of the control element, then the flexible electronic The component warping test device can be applied to the tablet batch process (in the process of the test process). [009] The above description of the present invention and the following embodiments are used to demonstrate and explain the spirit and principle of the present invention. Further explanation of the scope of the patent application of the present invention is provided. [Embodiment] [Details] The detailed features and advantages of the present invention are described in detail in the method of "X", and the method is used to understand the details of the present invention. The technical content of the invention is based on the heart and the mouth of the county The objects and advantages of the present invention can be easily understood by those skilled in the art, and the following examples are intended to further illustrate the present invention, but do not limit the present invention in any way. _ _ 7 1357497 ΙΌ 111 笙 9 solid θ August 26 曰 replacement page f = _ show this one - kind of flexible electricity: =: Γ to test a flexible substrate 10 - flexible electronic element · ^ The measurement includes: a set of the missing component 30, which is clamped by the flexible substrate 10, and the component of the wire flat (four); - the component group 40 is pushed, the two arc faces; the actuating component 5G is actuated The clamping forest 3G moves, and the 4G _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ 2] Fig. 3 shows the movement of the push-up element group to push the flexible substrate ίο in the second figure. Fortunately, her component group 4 is located below the tester K). When the tilting 4_ actuation tree % is pushed up to the top, the flexible substrate 1 () which is next to her 4G is generated. In a circular arc shape that pushes against the curvature of the element set 40, the test element on the substrate is subjected to a tensile stress with tension, and the detecting component 6 is moved downward to contact the linear electronic component 20 Detecting the electrical properties of the flexible electronic component 2 () when subjected to a force, wherein the detecting component 60 is a probe machine _〇η), and when the optical property of the flexible electronic component 20 is to be detected, The fine inspection device has a light source ♦ (4) Wei light source passes through the flexible electronic component 2 〇, transmits or reflects to the light sensing component, and the optical property of the flexible electronic component 20 is known to be detected When the flexible electronic component 2 is made of material, the detecting component 6 is a material detecting device. 〆 [013] The curvature of the component group 40 can be arbitrarily adjusted to measure the variation of the ploughing characteristics under different curvatures. The push group 4G can be replaced by the actuation tree 5 in the - dimension * 1357497 "August 26, 00" replacement page ^ or two-dimensional space To measure the characteristics of the flexible electronic component 2 after the reverse bending of the flexible electronic component 2 by using the actuating element 5G to move the component group 4 (upper and lower) up and down. This push = component group 40 and can be increased or decreased in number according to different test requirements and position [Fig. 14] Fig. 4A is a side view showing the second embodiment of the pushing member of the present invention. Figure t shows that the pushing element is dragged into a cam having a radius of two different curvatures, wherein the radius of curvature of the curved surface 41a is larger than the curvature of the curved surface. [〇15] The first map is a side view showing a third embodiment of the pushing member of the present invention. The figure shows that the _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Fig. 5 is a view showing the operation of the second embodiment of the moving element of the present invention. The actuating member 51 is moved in a one-dimensional space or a two-dimensional space, and a plurality of actuating members are coupled to the clamping members and the pushing members to connect the clamping members and the pushing members. Also moving in the light room or the second room. Fig. 6 is a side view showing a second embodiment of the holding member of the present invention. The 失 元 余 余 一对 一对 一对 一对 一对 一对 一对 一对 一对 一对 之一 之一 之一 之一 之一 之一 之一 之一 之一 之一 之一 之一 之一 之一 之一 之一 之一 之一 之一 之一 之一 之一 之一 至少 至少 至少 至少 至少 至少 至少A perspective view of a third embodiment of the secret tree 3(). The clamping element set 30 is configured to actuate a fixed dislocation, wherein the opposite sides of the pair of slicks are slidable along one of the adjacent sides. [〇19] 8th _ is to show the invention - the electronic component bending test 9 flute - _ August 26 replacement page side posts. Laicheng Ma-substrate 10 70 on the surface of group 40, used to push the pull-up element in the push-up element 4 and push it by any means (tree connection) (four) - pressure signal to control the teaching 70 According to the pressure signal, the control unit 7G controls the movement amount of the actuating element group 4G and the movement amount of the sagittal element (4) according to the pressure signal, thereby controlling the application of the Jingqu force, and The flexible electronic component of the test is damaged or broken, and the flexible electronic component can be tested in the case of mosquito deflection or by a fixed process shoulder such as a fixed tension or tension. The purpose of the invention. [〇=〇] The ninth recess is a side view of the third embodiment of the county electronic component bending test apparatus of the present invention. The inter-domain measuring component 9G is disposed on one side of the clamping 7L member 30 to be sensed by the pushing component group 4A and pushed by the flexible substrate material and transmitted by any means (wired connection or wireless connection) A pull signal is sent to the control/negative control element 70 to control the amount of movement of the actuating element 5 to actuate the f reducer group 4G and the amount of movement of the clamp member 3G according to the pull signal, thereby Can apply the bending force to avoid possible damage to the flexible electronic components being tested, damage or break 4 ' and can be tested under specific flexing conditions or with fixed process parameters (such as fixed tension or tension) The flexible electronic component 2 is attained for the purpose of the present invention. [0021] Fig. 1 is a perspective view showing a fourth embodiment of the apparatus of the present invention. When the flexible electronic component μ bend test device ^ is used for the roll-off. 11 tG Roll) When the process towel is used, the 3G system is a pair of cylinders, 'and 3〇a and 3〇b' for the flexible wire 10 having the flexible electronic component 20 to be tested: One of the cylindrical group 30a or the bird-like substrate ίο 'when the cylinder group or the _ group has power, the cylinder is driven by the == plate 2G', and the cylinder is moved to the power (4) When the mouth is powered and the direction and the catch are the same, the reading Si axis moves in one direction. Pushing the component tearing down the substrate iG, when pushing the component group up by the actuating component 50, the flexible substrate 1 that contacts the pushing component group 产生 generates a component 4〇 The arc shape of the curvature of C, the snagging electronic component 20 on the substrate is subjected to a tensile stress with tension, and at this time, the detecting component 6 向下 is moved downward to the phase of the elaboration electron tree 20, Component 2 () money to Zhang Zhiguang, electricity or material properties. [〇22] Above the flexible substrate 10, a pushing component balance having the same curvature is provided, and the pushing component group is two, that is, the first pushing component lion and the second pushing reading 40d2, - the pushing element Wei and the second pushing element each have a spring-same curvature arc surface, and the first pushing element surface and the second pushing element moving have a -distance. When the pushing component group is pressed down, the flexible substrate riding contacting the pushing component group generates a circular shape which is equivalent to the curved piece 2 of the pushing component group, and the test component above the substrate Located between the first pushing member surface and the first pushing member 70, and receiving a compressive bending stress, the detecting component (4) is moved downward and the flexible electronic component is turned over to detect the • The optical, electrical or material properties of the flexible electronic 2G when subjected to compressive forces. This design avoids the direct application of pressure to the flexible electronic component 2 to be tested, resulting in damage to the electronic component 20 to be tested. Wherein, the above-mentioned pushing component group is a cylinder, and the page is replaced by 11 1357497 on August 26, 100, so that the flexible substrate can be rolled (Roll to Ron) process [023] The three-dimensional diagram of the implementation of the new electronic component bending test device. The t, # ship electronic component% bending test device should be a threat batch (Sheet tG 8_ needle, the secret component group % is - the fixed fixture for the flexible electronic component 20 to be tested The substrate 10 is lost, and the pushing component group 40c is located below the flexible substrate 1〇, and when the component group 5 is lifted up by the actuating component 5G, the switching substrate is contacted with the switching substrate. - a circular arc shape equivalent to the curvature of the tearing of the component group, and the secret electronic component 2G on the substrate is subjected to a material stress of Wei force, at this time the detecting component 60 (four) is under the __ age rape tree 2 () she Touch to detect the characteristics of light and electric impurities of the flexible electronic component 2G when subjected to a turtle force. In this embodiment, the control tree % pressure sensing component 80 is further disposed on the surface of the pushing tree (10). ^ or - tensile force component 9G 'Middle force component 9Q Is set to the side of the missing element == to 'send to the flexible substrate material sensed ''emitted-moving-/or-pull signal to the control element%% The control element 7 controls the actuating element to actuate the amount of movement of the pushing member 40 and the amount of movement of the holding member 3 according to the pressure signal and the tension signal, thereby controlling the bending = application to avoid the possibility of causing the _ test of the flexible _ damage or [025] is a display of the invention of a redistributable electronic component bending test, a sixth embodiment of the stereoscopic view, wherein the push The resistance component group is three or more, and is adjusted in accordance with the flexible electronic component 2〇 to be tested, and the three 12 1357497 replacement pages on August 26, 100-the first-pushing component-the second pushing component The pieces are deleted, and each of the pure elements hides the aj heart, and the bribe is connected, and the embodiment can simultaneously measure the lead-like electronic components to be tested. The same between each of the lateral pushing member Wu 'pull test to simultaneously detect the electronic component. This design avoids the direct-touching of the 2G applied pressure, causing damage to the flexible electronic component 20 to be soldered. Although the invention has been described above in connection with the foregoing, it is not intended to limit the invention. In Wei's spiritual domain of the invention, the county's more touches, are the turning of this (four). Please refer to the attached patent application scope for the scope defined by this correction. BRIEF DESCRIPTION OF THE DRAWINGS [1] is a prior art detection system for a flexible component; and FIG. 2 is a side view showing a first embodiment of a flexible electronic component bending test device of the present invention; 3 is a side view showing the action relationship of the actuating tree actuating the pushing element group and pushing against the flexible substrate in FIG. 2; FIG. 4A is a second embodiment showing the pushing element group of the present invention. FIG. 4B is a view showing a third embodiment of the pushing member group of the present invention; FIG. 5 is a driving diagram showing a first example of the actuating member of the present invention; A side view of a second embodiment of the clamping element set of the present invention is shown in FIG. 13 1357497; a second embodiment of the clamping element of the present invention shows a third embodiment of the present invention. :: Stereogram, Second Complementary _; New Electron Suppression, Figure 9 is a side view showing a third embodiment of the flexible electronic body of the present invention; FIG. 10 is a view showing the present invention - A perspective view of a fourth embodiment of a flexible electronic component bend; A perspective view of a fifth embodiment of a flexural electronic component bending test apparatus of the present invention, and a component bend, a test number set. FIG. 12 is a flexible electronic component bend test apparatus of the present invention. A perspective view of a sixth embodiment. [Main component symbol description] 10 Flexible substrate 20 Pulling electronic component 30 Loss component group 30a Cylindrical group 3〇b Cylindrical group 30c Fixing jig 40 Pushing component group 40a Pushing component group 4〇b Pushing component group 40c Pushing Abutment component group 1357497 August 26, 100 replacement page 40dl first thrusting element 40d2 second thrusting component 40el first thrusting component 40e2 second thrusting component 40e3 third thrusting component 41a curved surface 41b curved surface 41c arc Face 41d arc surface 41e arc surface 41f arc surface 50 Actuating element 51 Actuating element 60 Detection assembly 70 Control element 80 Pressure sensing element 90 Tensile sensing element 15

Claims (1)

ijj/ 十、申請專利範園·· 以日替換頁— 1八種 ===彎曲測試裝置,用以測試—撓性基板上之至 獍性電子疋件,該彎曲測試裝置包括有: 至少-夹持70件組,係夾持該撓性基板之二端; 至少一推抵元件組,至少包括: 一第一推抵元件;以及 一第二推抵元件,與料—推抵元件間具有—距 離,且該第-推抵元件與該第二推抵元件各具有至少一 弧面; 至少一致動元件,致動該夹持元件組移動,和致動該推 抵兀件組移動而推抵該撓性基板,使該撓性基板依該第一推 抵兀件與錄二推抵元件之弧面而㈣,其中該推抵元倾 推抵該撓性基板時,該第一推抵元件與該第二推抵元件接觸 於同-平面,該撓性電子元件位於該第一推抵元件與該第二 推抵元件間;及 一檢測組件,係於該撓性基板f曲時檢測該撓性電 件。 2·如申請專利範圍第i項所述之裝置,其中每一該推抵 圓柱。 3. 如申請專利範圍第i項所述之裳置,其中該第一推抵元件具有 二個該弧面,且該兩弧面具有相異之曲率半徑。 4. 如申請專利範圍第3項所述之裝置,其中每一工該推抵元件為— 凸輪。 、 16 1357497 ^ . a, ^ ^ 1〇〇年8月26 s替換頁 .如申明專利範圍第i項所述之裝置,其中 空間中移動。 # 6. 如申請專利範圍第!項所述之裝置,其中該致動元 空間中移動。 ’、甘一难 7. 如申請專利範圍第2項所述之裝置,其中該夹持元件組係為一 對圓柱組,該至少其中之一圓柱組具有動力,以傳送該換性基 板。 8. 如申:專利範圍第3項所述之裝置,其中該夹持元件組係為一 對固疋夾具’其中該夹具相對之兩側係可沿相鄰之—側而 動。 . 9. 如申請專利範圍第7項所述之裝置,更包含一控制元件及一壓 力感測元件,力❹彳元㈣設置於絲抵元件組之表面 ,,以在該推抵元件組推抵該撓性基板時感測並傳出一壓力訊 號予該控航件,該㈣元件_壓力碱而控繼致動元件 致動該推抵元件組之移動量。 10. 如申請專利範圍第8項所述之裝置,更包含—控制元件及一拉 力感測元件,該拉力感測元件係設置於該夾持元件組之一側, 以在該推抵I件組推抵該驗基板喊測並傳出—拉力訊號 予該控制7L件’該控制元件健拉力訊號啸偷致動元件致 動該推抵元件組之移動量。 1.如申π專利乾圍帛1Q項所述之裝置,更包含—壓力感測元 件魏力感測元件係設置於該推抵元件組之表面上,在該推 抵讀組推抵該撓性基板時制並傳出—壓力訊號予該控制 17 1357497 】〇〇年8月26曰替換頁 疋件’該控制元件依該麼力訊號 件致動該絲元伽 °^拉力訊號 而控制該致動元 12, 如申請專利範圍第;項二: 探針機台。 夏,其中該等檢測組件係為一 13. 如申請專利範圍第!項所 光學檢觀置。 ,、巾該雜顺件係為— 14·如申請專利範圍第1項所述之裝釁’其中該等檢測組件係為一 材料檢測裝置。Ijj/ X. Applying for a patent garden ·· Replacement page by day — 1 eight === bending test device for testing the flexible electronic device on the flexible substrate, the bending test device includes: At least - Holding a 70-piece group, holding the two ends of the flexible substrate; at least one pushing component group, comprising at least: a first pushing component; and a second pushing component, having a material-pushing component a distance, and the first pushing member and the second pushing member each having at least one curved surface; at least an actuating member actuating the clamping member group to move, and actuating the pushing member group to move Abutting the flexible substrate such that the flexible substrate is in accordance with the arc surface of the first pushing member and the recording pushing member (4), wherein the pushing element is pushed against the flexible substrate, the first pushing The component and the second pushing component are in contact with the same plane, the flexible electronic component is located between the first pushing component and the second pushing component; and a detecting component is detected when the flexible substrate is bent The flexible electrical component. 2. The device of claim i, wherein each of the devices is pushed against the cylinder. 3. The skirt of claim i, wherein the first pushing element has two arcuate faces and the two arcuate faces have different radii of curvature. 4. The device of claim 3, wherein each of the pushing elements is a cam. 16 1357497 ^ . a, ^ ^ Aug. 26 s replacement page. The device described in claim i, wherein the space moves. # 6. If you apply for a patent range! The device of the item, wherein the actuating element space moves. 7. The apparatus of claim 2, wherein the clamping element group is a pair of cylindrical groups, the at least one of the cylindrical groups having power to transmit the exchangeable substrate. 8. The device of claim 3, wherein the clamping element group is a pair of solid jaws, wherein the opposite sides of the fixture are movable along adjacent sides. 9. The device of claim 7, further comprising a control component and a pressure sensing component, wherein the force component (4) is disposed on the surface of the wire abutment component group to push the component group A pressure signal is sensed and transmitted to the flexible substrate, and the (four) component_pressure base controls the amount of movement of the actuating component to actuate the component. 10. The device of claim 8, further comprising a control element and a tension sensing element, the tension sensing element being disposed on one side of the clamping element group for pushing the I piece The group pushes the substrate to detect and transmit a pull signal to the control 7L. The control element pulls the force signal to activate the amount of movement of the push element group. 1. The device according to claim 1 of the π patent dry cofferdam, further comprising: a pressure sensing element, the Wei force sensing component is disposed on the surface of the pushing component group, and the pushing the reading group pushes the flexing The substrate is made and transmitted - the pressure signal is given to the control. 17 1357497 】August 26th, 曰 replacement page ' 'The control element activates the ray gamma pull signal according to the force signal to control the Momentum 12, such as the scope of patent application; Item 2: Probe machine. Xia, where the detection components are one. 13. For example, the scope of patent application! The optical inspection of the item. The miscellaneous member is a device as described in claim 1 wherein the detecting component is a material detecting device.
TW96137732A 2007-10-08 2007-10-08 Apparatus for testing flexible device under bendin TWI357497B (en)

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TWI480549B (en) * 2012-12-21 2015-04-11 Ind Tech Res Inst Method for bending stress testing and apparatus thereof
KR102090560B1 (en) * 2013-04-11 2020-03-19 삼성디스플레이 주식회사 Apparatus for bending and the method of bending using the same.
CN104729833B (en) * 2013-12-18 2018-02-13 昆山工研院新型平板显示技术中心有限公司 Flexible screen body crooked test method and system
CN104729929B (en) 2013-12-18 2017-12-05 昆山工研院新型平板显示技术中心有限公司 flexible screen bending method and system
TW201614210A (en) * 2014-10-11 2016-04-16 Yuasa System Kiki Co Ltd Folding Test Machine
CN106680108A (en) * 2016-11-24 2017-05-17 惠科股份有限公司 Method and device for testing bending of display panel
US12000803B2 (en) 2019-06-24 2024-06-04 Illinois Tool Works Inc. Methods and apparatus to perform load measurements on flexible substrates

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