1357375 l 六、發明說明： 【發明所屬之技術領域】 本發明是關於將液晶用的玻璃基板或半導體晶圓等之 薄片狀的工件搬進搬出儲存櫃之多關節機械手。 【先前技術】 習知的，提案的多關節機械手係將肩關節部的旋轉中 ^ 心及台座的旋轉中心予以偏位來令台座旋轉時，縮小多關 節機械手的迴旋半徑（例如，參考日本專利文獻1 )。 習知的多關節機械手1係如第5圖所示，利用關節部 3、4、5來可迴轉地連結，傳達迴轉驅動源的迴轉力，致 使進行所要的動作之臂2具備有2組所組成，被設置在兩 組臂2的基端之關節部3的迴轉中心軸，向上下（或是軸 方向）配置所構成。 多關節機械手1係具備有兩組臂2，其中一方的臂驅 • 動型裝置2爲供應用，另一方則爲取出用，能夠同時進行 工件9的供應動作及其他工件9的取出動作。 另外，習知的多關節機械手1係利用臂2來保持工件 9之手部8能夠在圖中箭頭X所示之工件9的取出/供應 方向上進行直線移動所構成。 : 另外，習知的多關節機械手1係具備有令裝設著臂2 的支撐構件10向上下移動之移動構件11 (以下，稱爲上 下移動機構11)，能夠調整臂2的上下位置。另外，上 下移動機構11的台座13係可轉動地設置，形成爲迴旋多 -5- 1357375 關節機械手1來改變方向。 進而，本實施形態的多關節機械手1，在圖中箭頭γ 所示的方向上，即是在手部8的移動方向與支撐構件1〇 的上下移動方向的各別所垂直的方向上，在基台14上可 移動地裝設台座13，而可調整上下移動機構11的位置。 另外，習知的多關節機械手1所裝備的兩組臂2，例 如具有複數個關節部，即是多關節機械手1由水平多關節 型機械手所構成。本實施形態中的臂2則具備有第1臂6 (以下，稱爲上腕6)、及與上腕6相連結之第2臂7( 以下，稱爲前腕7)、及與前腕7相連結並保持工件9之 手部8。 上腕6的基端係藉由驅動軸來與支撐構件10相連結 ，構成可轉動的關節部3 (以下，稱爲肩關節部3 )。該 肩關節部3成爲臂2的基端之關節部3。另外，上腕6的 前端與前腕7的基端藉由驅動軸來予以相連結，構滅可轉 動的關節部4(以下，稱爲肘關節部4)。另外，前腕7 的前端與手部8藉由驅動軸來予以相連結，構成可轉動的 關節部5(以下，稱爲手關節部5)。肩關節部3的迴轉 中心軸爲相同軸上，以上下方向相對面的方式配置。 臂2係利用迴轉驅動源（未圖示）來令肩關節部3及 肘關節部4及手關節部5轉動，.使手部8在工件取出/供 應方向上移動。此時，臂2則該機構上，以手部8朝向一 個方向，在上腕6及前腕7完全伸展的伸展位置、與上腕 6及前腕7成爲折疊的狀態之回縮位置之間直線移動的方 -6- 1357375 式，進行伸縮動作。 此處’習知的多關節機械手1係以在第6圖所示之臂 2的回縮位置上，利用手部8來保持之工件9的中心，與 台座13的迴轉中心一致的方式所設計。進而，肩關節部 4的迴轉中心及台座丨3的迴轉中心，朝向對於手部8的 移動方向成垂直的方向偏位，令台座13迴轉時，肘關節 部4或手部8不會突出多關節機械手1的周圍所必要之最 φ 小區域圓1 5 ’可以縮小多關節機械手1的迴旋半徑。 專利文獻1 :日本專利特開200 1 - 2742 1 8 (第4〜5頁 ，第1 ' 2圖） 【發明內容】 <發明所欲解決之課題> 將液晶用的玻璃基板或半導體晶圓等之薄片狀的工件 搬進搬出儲存櫃之多關節機械手，已進展爲大型化，要求 φ 處理基板的片數要增加並且要在短時間內處理，又爲了要 提高基板的良品率，還要求盡力抑制來自機械手的粉塵。 因而’機械手儘管配置基板的儲存櫃變成直達頂棚程度的 高度導致設備本身大型化，但實現高速、高精度、低粉塵 • 乃是最大的課題。一方面，大型化的設備，爲了要保持周 :圍的乾淨度，必須要投資大金額的設備，因而，最好是令 儲存櫃配置更多的基板並進行處理。另外，最好是縮小多 關節機械手的機體，縮小迴旋半徑以使不會干涉到工廠中 所配置的裝置。 -7- 1357375 另外，液晶基板或半導體晶圓的生產片數逐年增加中 ，爲了要提升生產速度，機械手則被要求搬送的流量。然 而，機械手包含有機械零件，因而必須要維修，維修時間 也成爲關係到流量的因素，最好是很容易就可以進行維修 〇 然而，習知的多關節機械手係以臂基端突出移動面而 與搬送基板相對向的方式來配置的構造，故會發生無法防 範來自上下移動機構的粉塵導致微細的粉塵堆積在基板上 Φ 的問題。 另外，臂藉利用上下移動機構來往下方移動的情況， 臂的支撐構件會與台座起衝突，故會發生無法移動到上下 移動機構的最下面爲止，可動範圍變小的問題，且會發生 液晶基板或半導體晶圓搬進搬出之儲存櫃的高度變高的問 題。進一部來說明，儲存櫃的高度會受限於工廠建築物的 高度，故會發生面板或基板的配置片數，因上下移動機構 的可動範圍變小而減少，使生產速度下降的問題。 $ 另外，在臂基端設有電動機或皮帶輪，故會成爲上下 方向很厚的構造。因而，會發生儲存櫃內液晶基板或半導 體晶圓的配置間隔不得不加大的問題。也就是會發生儲存 櫃內所可以配置之面板或基板的片數變少致使生產速度下 - 降的問題。爲了要避免這個問題，雖想要在利用上下移動 丨 機構進行搬進搬出時改變臂的高度，但此情況，由於令臂 上下移動的順序反覆進行，故會發生耗費時間致使作業時 間變長的問題。 -8 - 1357375 另外，習知的多關節機械手係向上下同軸地配置臂基 端的構造。因而，配置在臂基端之屬於機構組件之電動機 或皮帶輪要進行更換的話，不得不採用拆下其中一方的臂 後再進行更換等的方法，故會發生維修時間很長致使生產 性降低的問題》 另外，習知的多關節機械手係1個柱體上利用移動機 構來移動支撐構件，故儲存櫃高度直達頂棚部程度，則當 Φ 然必須加長柱體長度，剛性會降低，並且配置在內部之移 動機構的導引機構也必須設成符合柱體的長度。然而，加 長導引機構的情況，導引精度會因增長而降低，故利用移 動機構來移動之支撐構件的移動精度降低，且載置在臂先 r 端的手部8之液晶基板或半導體晶圓的定位精度降低，會 發生引起基板或晶圓與儲存櫃起衝突導致良品率降低的問 題。 發明係鑑於上述的問題點而提案，其目的是提供將防 % 止來自上下移動軸的粉塵對基板的污染，並且讓生產性提 高之液晶用的玻璃基板或半導體晶圓等之薄片狀的工件搬 進搬出儲存櫃之多關節機械手。 • <用以解決課題之手段> .爲了要解決上述問題，本發明的構成如以下所述。 本發明的申請專利範圍第1項所述之多關節機械手， 具備：載置搬送物之手部、及與前述手部相連結且具備至 少2個以上的迴轉關節並以朝向丨個方向移動前述手部的 -9- 1357375 方式進行伸縮之多關節臂、及將朝著上下方向移動被被安 裝在柱體之移動機構與前述多關節臂予以相連結之支撐構 件、及被連結在前述柱體的下端部並使前述柱體迴旋的台 座，前述手部是朝著與對前述柱體之前述台座的安裝面平 行並與前述移動機構的移動方向垂直的方向，在上腕與前 腕完全伸展的伸長方向，及前述上腕與前述前腕成折疊狀 態的回縮位置之間直線移動，前述移動機構是在與前述手 部的前述上腕和前述前腕完全伸展的伸長方向的相同方向 配置於前述柱體，前述住體爲複數個柱塊相連結所構成， 在前述柱塊的內部具備前述移動機構的引導機構，藉移動 機構沿著前述柱塊上下移動使得前述支撐構件上下移動。 本發明的申請專利範圍第2項所述之多關節機械手， 前述多關節臂是以在上下方向相對向的方式配置複數個。 本發明的申請專利範圍第3項所述之多關節機械手， 前述柱體的柱塊之連結體形成有嵌合構造。 本發明的申請專利範圍第4項所述之多關節機械手， 配置於前述移動機構的前述支撐構件，係朝著與前述手部 的伸長方向垂直的方向突出，並與前述多關節臂相連結。 [發明效果] 依據本發明的多關節機械手，移動機樺爲朝向與前述 手部的移動方向相同的方向配置在柱體，被配置在移動機 構之支撐構件則是朝向與前述手部的移動方向成垂直的方 向突出’與前述多關節臂相連結的構造，因而被配置成滑 -10- 1357375 動部不會與液晶基板或半導體晶圓相對面，又來自滑動部 的粉塵不會堆積在液晶基板或半導體晶圓上，因而減低液 晶基板或半導體晶圓的污染，並且可以使基板或晶圓之生 產上的良品率提高。 並依據本發明的多關節機械手，支撐構件，利用前述 移動機構來移動到前述柱體的最下側位置時，會形成爲以 不會干涉到前述台座的方式來朝向前述手部的移動方向偏 φ 位的形狀，以使支撐購件不會與台座起衝突，可以移動到 上下移動機構的最下面爲止，又可以加大可動範圍。因而 ’形成爲即使液晶基板或半導體晶圓搬進搬出之儲存櫃的 高度沒有增高，在儲存櫃的下部仍可以配置液晶基板或半 導體晶圓，由於可以加大上下移動機構的可動範圍，因而 基板或晶圓增多配置片數，這樣就可以提高工廠全體的生 產量》 另外，依據本發明的多關節機械手，向上下配置之前 0 述支撐構件的前述迴轉關節，配置在相對偏位的位置，且 依據本發明的多關節機械手，形成爲以被配置在前述支撐 構件之前述迴轉關節的迴轉中心、及手部的迴轉中心、及 台座的迴轉中心均一致於手部的移動方向的軸線上的方式 來進行偏位，故手部來到引進液晶基板或半導體晶圓的位 置的情況，即使利用台座的迴轉功能仍可以不超出液晶基 板或半導體晶圓的迴旋半徑來進行迴旋，所以可以縮小機 體，而以不會干涉到工廠中所配置的裝置的方式來配置機 械手。 -11 - 1357375 依據本發明的多關節機械手，前述柱體爲複數個柱塊 相連結的構造，即使以連結柱塊的柱體的方式，對於高度 直達工廠的頂棚部的儲存櫃仍可對應，並且對於變長的移 動機構之導引機構也不會降低導引精度，所以利用移動機 構來移動之支撐構件的移動精度也不會降低。因而，被載 置在手部之液晶基板或半導體晶圓的定位精度也不會降低 來予以搬運，且不會因基板或晶圓與儲存櫃起衝突而導致 良品率的降低。 【實施方式】 以下，參考圖面來說明本發明的實施形態。 實施例1 : 第1圖爲本發明的多關節機器人之立體圖。第2圖爲 本發明的多關節機械手之上面圖。第3圖爲本發明的多關 節機械手之正面圖。 本發明的多關節機械手1係爲了要對應於儲存櫃（未 圖示）的高層化而連結被區分成複數個柱塊之柱體12的 構造。如此，依序連結各柱塊1 6來形成具有對應於高層 的高度之多關節機械手1。本實施例則是連結了 4個柱塊 16的構造。各柱塊16的兩端面爲以柱塊16間相連結的 方式嵌合的構造，又爲了要精度良好地配置由直線導引所 組成的導引機構而具有定位孔（未圖示），進而用定位治 具進行調整來予以組裝。 -12- 1357375 另外，本發明的多關節機械手1係利用關節部3、4 、5來可迴轉地連結以傳達迴轉驅動源的迴轉力使進行所 要的動作之臂2，具備有2組。另外，利用臂2來保持工 件9之手部8係以朝圖中箭頭X所示之工件9的取出/ 供應方向，可直線移動的方式構成。另外，設置在2組臂 2的基端之關節部3的迴轉中心軸的關係，係如第2圖所 示，構成爲以對於上臂的基端之關節部3來朝手部8的移 動方向偏移的方方式配置下臂22的基端之關節部3。 另外’具備有令設置臂2之支撐構件10向上下移動 之上下移動構件11，而成爲可調整整臂2的上下位置。 另外’上下移動構件1 1的台座1 3係被設置成可轉動，以 迴旋多關節機械手1來改變方向的方式所形成。此處，上 下移動機構11係朝向與手部8的移動方向相同的方向來 配置’支撐構件1 〇則是朝向對於手部8的移動方向成垂 直的方向來突出上下移動機構11，連結至臂2的基端之 %, 關節部3。另外’連結至下臂22之支撐構件10，當臂2 利用上下移動機構11來往下方移動時，會形成爲以不會 千涉到台座1 3的方式來如第2圖所示朝向手部8的移動 方向偏位的形狀。另外，上下移動機構11係以具有遮蔽 • 功能的保護罩（未圖式）來覆蓋，抑制來自柱體12內部 的粉塵。 本發明與日本專利文獻1不同的部分是上下移動機構 朝向與手部的移動方向相同的方向來配置，上下移動機構 與臂2的基端之關節部相連結之支撐構件1 〇以朝向與前 -13- 1357375 述手部的移動方向成垂直的方式突出，且與下臂 結之支撐構件以不會干涉到台座1 3的方式，朝 移動方向偏位的方式所形成的部分^ 其次’針對動作來進行說明。本發明的多關 1所裝備之2組臂2 ’例如具有複數個關節部， 節機械手1由水平多關節型機械手所構成。本實 的臂2係具備有與習知的臂2的構造同樣的構造 上腕6的基端係藉由驅動軸來與支撐構件： ’而構成可轉動的肩關節臂部3。該肩關節臂部 2的基端之關節部3。另外，上腕6的前端與前 端藉由驅動軸來相連結，而構成可轉動的肘關節 外，前腕7的前端與手部8藉由驅動軸來相連結 可轉動的手關節部5。 臂2係利用迴轉驅動源（未圖示）來令肩關 及肘關節部4及手關節部5轉動，使手部8朝向 /供應方向移動。此時，臂2則是該構造上，手 1個方向，在上腕6及前腕7完全伸出的伸展位 腕6及前腕7摺疊在一起的狀態下的回縮位置之 線移動，進行伸縮動作。 此處，利用下臂22來針對本實施例的多關 1的迴旋半徑進行說明。在第4圖所示之臂22 置，利用手部8來保持之工件9的中心，被設計 13的迴轉中心一致。進而，以肩關節臂部3的 、及手關節部5的迴轉中心、及台座1 3的迴轉 22相連 向手部的 節機械手 即是多關 施形態中 〇 I 〇相連結 3成爲臂 腕7的基 部4。另 ，而構成 丨節臂部3 工件取出 部8朝向 置與在上 間進行直 節機械手 的回縮位 成與台座 迴轉中心 中心一致 -14- 1357375 於手部8的移動方向之軸線上的方式偏位來令台座13轉 動時，肘關節部4或手部8不會突出多關節機械手1的周 圍所必要之最小區域圓1 5，而可以縮小多關節機械手1 的迴旋半徑。 此處，爲了避免圖面變複雜，已利用下臂來進行說明 過，至於上臂21也是同樣，工件9的中心，被設計成與 台座1 3的迴轉中心一致，肩關節臂部3、手關節部5以 及台座13之迴轉中心的位置關係也是與下臂相同的構成 〇 其次’針對上下方向的動作進行說明。臂2係被安裝 在支撐構件10，利用上下移動機構11，依據控制器（未 圖示）的指令，在上下方向上進行移動。如第3圖所示向 下方移動時’會形成以支撑構件1〇不會與台座13起衝突 的方式來朝向手部8的移動方向偏位的形狀，因而支撐構 件1 0能夠下降到上下移動機構1 1之最下點的移動位置爲 • 止。 此外’本發明中，已針對具有上臂和下臂之多關節機 械手進行述說過’不過即使是由上下任一方的臂所組成之 多關節機械手’當然也是同樣。另外，還針對具有肩關節 ' 、肘關節以及手關節的迴轉關節之多關節機械手進行述說 ，過，不過有關手關節部被固定之多關節機械手，當然也具 有同樣的作用和效果》 [產業上的可利用性] -15- 1357375 在這種手部上載置物品來進行搬運，就可以進行物品 收授的作業，所以用途上可適用於厚板或相狀物品的搬運 作業。 【圖式簡單說明】 第1圖爲表示本發明的實施例的多關節機械手之立體 圖。 第2圖爲表示本發明的實施例的多關節機械手之上面 圖。 第3圖爲表示本發明的實施例的多關節機械手之正面 圖。 第4圖爲表示本發明的實施例中多關節機械手的迴旋 半徑之圖。 第5圖爲習知的多關節機械手之立體圖。 第6圖爲表示習知的多關節機械手的迴旋半徑之圖。 【主要元件符號說明】 1 :多關節機械手 2 :臂 21 :上臂 22 :下臂 3 :肩關節部 4 :肘關節部 5 :手關節部 -16- 1357375 6 :上腕 7 :前腕 8 :手部 9 :工件 1 〇 :支撐構件 1 1 :上下移動機構 1 2 :柱體1357375. EMBODIMENT OF THE INVENTION The present invention relates to a multi-joint robot in which a sheet-like workpiece such as a glass substrate for liquid crystal or a semiconductor wafer is carried into and out of a storage cabinet. [Prior Art] Conventionally, the proposed multi-joint robot system biases the center of rotation of the shoulder joint and the center of rotation of the pedestal to reduce the radius of gyration of the multi-joint manipulator when the pedestal is rotated (for example, reference) Japanese Patent Document 1). As shown in Fig. 5, the conventional multi-joint robot 1 is rotatably coupled by the joint portions 3, 4, and 5, and transmits the turning force of the turning drive source, so that the arm 2 that performs the desired operation has two sets. The composition is configured such that the center axis of rotation of the joint portion 3 provided at the base end of the two sets of arms 2 is arranged up and down (or in the axial direction). The multi-joint robot 1 includes two sets of arms 2, one of which is for supplying the arm-drive type device 2, and the other is for taking out, and the supply operation of the workpiece 9 and the take-out operation of the other workpiece 9 can be simultaneously performed. Further, the conventional multi-joint robot 1 is configured by the arm 2 for holding the hand 8 of the workpiece 9 linearly movable in the take-out/supply direction of the workpiece 9 indicated by the arrow X in the figure. Further, the conventional multi-joint robot 1 includes a moving member 11 (hereinafter referred to as an up-and-down moving mechanism 11) for moving the support member 10 on which the arm 2 is mounted up and down, and the vertical position of the arm 2 can be adjusted. Further, the pedestal 13 of the upper and lower moving mechanism 11 is rotatably provided, and is formed to swing the multi-5 - 1357375 joint robot 1 to change the direction. Further, in the multi-joint robot 1 of the present embodiment, in the direction indicated by the arrow γ in the figure, that is, in the direction perpendicular to the moving direction of the hand 8 and the vertical movement direction of the support member 1〇, The base 14 is movably mounted on the base 14, and the position of the vertical movement mechanism 11 can be adjusted. Further, the two sets of arms 2 equipped with the conventional multi-joint robot 1 have, for example, a plurality of joint portions, that is, the multi-joint robot 1 is composed of a horizontal articulated robot. The arm 2 in the present embodiment includes a first arm 6 (hereinafter referred to as an upper wrist 6), a second arm 7 coupled to the upper wrist 6 (hereinafter referred to as a front wrist 7), and a front wrist 7 The hand 8 of the workpiece 9 is held. The proximal end of the upper wrist 6 is coupled to the support member 10 by a drive shaft to constitute a rotatable joint portion 3 (hereinafter referred to as a shoulder joint portion 3). The shoulder joint portion 3 serves as a joint portion 3 of the base end of the arm 2. Further, the distal end of the upper wrist 6 and the proximal end of the front wrist 7 are coupled by a drive shaft to deform the rotatable joint portion 4 (hereinafter referred to as the elbow joint portion 4). Further, the distal end of the front wrist 7 and the hand 8 are coupled by a drive shaft to constitute a rotatable joint portion 5 (hereinafter referred to as a hand joint portion 5). The center axis of rotation of the shoulder joint portion 3 is arranged on the same axis, and the upper and lower directions are opposite to each other. The arm 2 rotates the shoulder joint portion 3, the elbow joint portion 4, and the hand joint portion 5 by a turning drive source (not shown) to move the hand 8 in the workpiece take-out/supply direction. At this time, the arm 2 is linearly moved between the extended position where the upper wrist 6 and the front wrist 7 are fully extended and the retracted position where the upper wrist 6 and the front wrist 7 are folded in the direction in which the hand 8 is oriented in one direction. -6- 1357375 style, telescopic action. Here, the conventional multi-joint robot 1 is in such a manner that the center of the workpiece 9 held by the hand 8 at the retracted position of the arm 2 shown in Fig. 6 coincides with the center of rotation of the pedestal 13 design. Further, the center of rotation of the shoulder joint portion 4 and the center of rotation of the pedestal 3 are displaced in a direction perpendicular to the moving direction of the hand 8, so that the elbow joint portion 4 or the hand portion 8 does not protrude when the pedestal 13 is rotated. The most φ small area circle 1 5 ' necessary for the circumference of the joint manipulator 1 can reduce the radius of gyration of the multi-joint robot 1. [Patent Document 1] Japanese Patent Laid-Open Publication No. 200 1 - 2742 1 8 (pages 4 to 5, page 1 '2) [Summary of the Invention] <Problems to be Solved by the Invention> A glass substrate or a semiconductor crystal for liquid crystal The multi-joint robot that moves the sheet-like workpiece such as a circle into the storage cabinet has progressed to a larger size, and the number of φ-processed substrates is required to be increased and processed in a short time, and in order to increase the yield of the substrate, It is also required to try to suppress the dust from the robot. Therefore, the robot has a large size, and the high speed, high precision, and low dust are the biggest problems, although the height of the equipment itself has increased due to the height of the storage cabinet in which the substrate is placed. On the one hand, in order to maintain the cleanliness of the large-scale equipment, it is necessary to invest a large amount of equipment. Therefore, it is preferable to configure the storage cabinet with more substrates and handle it. In addition, it is preferable to reduce the body of the multi-joint robot and reduce the radius of the gyration so as not to interfere with the device configured in the factory. -7- 1357375 In addition, the number of productions of liquid crystal substrates or semiconductor wafers has increased year by year. In order to increase the production speed, the robot is required to carry the flow. However, the robot contains mechanical parts and must be repaired. The repair time also becomes a factor related to the flow rate. It is best to carry out the repair easily. However, the conventional multi-joint robot moves the base end of the arm. Since the surface is arranged to face the transport substrate, there is a problem in that it is impossible to prevent fine dust from being deposited on the substrate by the dust from the vertical moving mechanism. Further, when the arm is moved downward by the vertical movement mechanism, the support member of the arm collides with the pedestal, so that the movable portion cannot be moved to the lowermost position of the vertical movement mechanism, and the liquid crystal substrate may occur. Or the problem that the height of the storage cabinet in which the semiconductor wafer is moved in and out is high. In addition, the height of the storage cabinet is limited by the height of the factory building. Therefore, the number of panels or substrates to be arranged is reduced, and the movable range of the vertical moving mechanism is reduced to reduce the production speed. $ In addition, a motor or a pulley is provided at the base end of the arm, so that it has a thick structure in the up and down direction. Therefore, there arises a problem that the arrangement interval of the liquid crystal substrate or the semiconductor wafer in the storage cabinet has to be increased. That is, there is a problem that the number of panels or substrates that can be configured in the storage cabinet is reduced, resulting in a lower production speed. In order to avoid this problem, it is necessary to change the height of the arm when moving in and out by the vertical movement mechanism. However, in this case, since the order of moving the arm up and down is repeated, it takes time and the working time is long. problem. -8 - 1357375 In addition, the conventional multi-joint robot is configured such that the base end of the arm is disposed coaxially upward and downward. Therefore, if the motor or the pulley that belongs to the mechanism unit at the base end of the arm is to be replaced, it is necessary to remove one of the arms and then replace it, so that the maintenance time is long and the productivity is lowered. In addition, the conventional multi-joint robot system uses a moving mechanism to move the supporting member on one cylinder. Therefore, when the height of the storage cabinet reaches the ceiling portion, the length of the cylinder must be lengthened, the rigidity is lowered, and the rigidity is arranged. The guiding mechanism of the internal moving mechanism must also be set to match the length of the cylinder. However, in the case of lengthening the guiding mechanism, the guiding accuracy is lowered due to the increase, so that the movement accuracy of the supporting member moved by the moving mechanism is lowered, and the liquid crystal substrate or the semiconductor wafer of the hand 8 placed on the r end of the arm is lowered. The positioning accuracy is lowered, and there is a problem that the substrate or the wafer collides with the storage cabinet, resulting in a decrease in yield. The present invention has been made in view of the above-mentioned problems, and an object of the invention is to provide a sheet-like workpiece such as a glass substrate or a semiconductor wafer for preventing liquid crystals from being contaminated by dust from the upper and lower moving shafts and improving productivity. A multi-joint robot that moves in and out of the storage cabinet. • <Means for Solving the Problem> In order to solve the above problems, the configuration of the present invention is as follows. The multi-joint robot according to the first aspect of the present invention includes: a hand for placing a conveyed object; and a hand joint connected to the hand and having at least two or more swivel joints and moving in one direction a multi-joint arm that expands and contracts in the -9- 1357375 method of the hand, and a support member that moves the movement mechanism that is attached to the column and that is coupled to the multi-joint arm in a vertical direction, and is coupled to the column a lower end portion of the body and a pedestal for rotating the cylindrical body, wherein the hand portion is completely extended in a direction parallel to a mounting surface of the pedestal of the cylindrical body and perpendicular to a moving direction of the moving mechanism, and the upper wrist and the front wrist are completely extended The extending direction and the retracted position of the upper wrist and the front wrist in a folded state are linearly moved, and the moving mechanism is disposed in the column in the same direction as the extending direction in which the upper wrist and the front wrist of the hand are completely extended. The living body is configured by connecting a plurality of column blocks, and a guiding mechanism of the moving mechanism is provided inside the column block, and the moving mechanism is along The studs such that the vertical movement of the support member to move vertically. In the multi-joint robot according to the second aspect of the invention, the plurality of articulated arms are arranged in a plurality of directions so as to face each other in the vertical direction. In the multi-joint robot according to the third aspect of the invention, the column body of the column body has a fitting structure. In the multi-joint robot according to the fourth aspect of the invention, the support member disposed in the moving mechanism protrudes in a direction perpendicular to an extending direction of the hand and is coupled to the multi-joint arm. . Advantageous Effects of Invention According to the multi-joint robot of the present invention, the moving machine birch is disposed in the column in the same direction as the moving direction of the hand, and the supporting member disposed in the moving mechanism is oriented toward the hand. The direction protrudes in a vertical direction to form a structure that is coupled to the multi-joint arm, and is thus configured to slide -10- 1357375. The moving portion does not face the liquid crystal substrate or the semiconductor wafer, and dust from the sliding portion does not accumulate in the direction. On the liquid crystal substrate or the semiconductor wafer, the contamination of the liquid crystal substrate or the semiconductor wafer is reduced, and the yield of the substrate or the wafer can be improved. According to the multi-joint robot of the present invention, when the support member is moved to the lowermost position of the column by the moving mechanism, the moving direction of the hand is formed so as not to interfere with the pedestal. The shape of the φ position is such that the support purchase does not collide with the pedestal, and can be moved to the lowermost position of the vertical movement mechanism, and the movable range can be increased. Therefore, the height of the storage cabinet that is formed so that the liquid crystal substrate or the semiconductor wafer is moved in and out is not increased, and the liquid crystal substrate or the semiconductor wafer can be disposed in the lower portion of the storage cabinet, and since the movable range of the vertical movement mechanism can be increased, the substrate Or the number of wafers is increased, so that the throughput of the entire factory can be increased. In addition, according to the multi-joint robot of the present invention, the above-mentioned rotary joints of the support members are arranged up and down, and are disposed at positions of relative offsets. Further, the multi-joint robot according to the present invention is formed such that the center of rotation of the swivel joint disposed on the support member, the center of rotation of the hand, and the center of rotation of the pedestal coincide with the moving direction of the hand. In the case where the hand is moved to the position where the liquid crystal substrate or the semiconductor wafer is introduced, even if the rotation function of the pedestal is used, the gyration of the liquid crystal substrate or the semiconductor wafer can be performed without being rotated, so that it can be reduced. The body is configured in such a way that it does not interfere with the devices configured in the factory Robot. -11 - 1357375 According to the multi-joint robot of the present invention, the column body is a structure in which a plurality of column blocks are connected, and even if the column body of the column block is connected, the storage cabinet of the ceiling portion of the factory can be correspondingly connected to the height. Moreover, the guiding mechanism for the moving mechanism of the variable length does not lower the guiding precision, so the movement accuracy of the supporting member that is moved by the moving mechanism is not lowered. Therefore, the positioning accuracy of the liquid crystal substrate or the semiconductor wafer placed on the hand is not lowered, and the yield is not lowered due to the collision of the substrate or the wafer with the storage cabinet. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings. Embodiment 1 FIG. 1 is a perspective view of a multi-joint robot of the present invention. Fig. 2 is a top view of the multi-joint robot of the present invention. Figure 3 is a front elevational view of the multi-section manipulator of the present invention. The multi-joint robot 1 of the present invention has a structure in which a column 12 divided into a plurality of column blocks is connected in order to correspond to a height increase of a storage cabinet (not shown). In this manner, each of the column blocks 16 is sequentially connected to form a multi-joint robot 1 having a height corresponding to the upper layer. This embodiment is a structure in which four column blocks 16 are connected. The both end faces of each of the column blocks 16 have a structure in which the column blocks 16 are coupled to each other, and a positioning hole (not shown) is provided in order to accurately arrange the guide mechanism composed of the linear guides. Use the positioning fixture to adjust and assemble. In the multi-joint robot 1 of the present invention, the arms 2 that are rotatably coupled by the joint portions 3, 4, and 5 to transmit the turning force of the turning drive source to perform the desired operation are provided in two sets. Further, the hand 8 of the workpiece 9 is held by the arm 2 so as to be linearly movable toward the take-out/supply direction of the workpiece 9 indicated by the arrow X in the figure. Further, the relationship between the central axes of rotation of the joint portions 3 provided at the proximal ends of the two sets of arms 2 is configured such that the joint portion 3 with respect to the proximal end of the upper arm moves toward the hand 8 as shown in Fig. 2 The joint portion 3 of the base end of the lower arm 22 is disposed in an offset manner. Further, the support member 10 for arranging the arm 2 is moved up and down, and the upper and lower moving members 11 are provided to adjust the vertical position of the entire arm 2. Further, the pedestal 13 of the upper and lower moving members 1 is provided to be rotatable, and is formed by rotating the multi-joint robot 1 to change the direction. Here, the vertical movement mechanism 11 is disposed in the same direction as the moving direction of the hand 8 , and the support member 1 is protruded in a direction perpendicular to the moving direction of the hand 8 to protrude the vertical movement mechanism 11 and is coupled to the arm. % of the base end of 2, joint part 3. Further, when the arm 2 is moved downward by the vertical movement mechanism 11 when the arm 2 is moved downward by the vertical movement mechanism 11, the support member 10 is formed so as to face the hand 8 as shown in Fig. 2 so as not to be involved in the pedestal 13 The shape of the moving direction is offset. Further, the vertical movement mechanism 11 is covered with a protective cover (not shown) having a shielding function, and dust from the inside of the column 12 is suppressed. The difference from the Japanese Patent Document 1 is that the vertical movement mechanism is disposed in the same direction as the movement direction of the hand, and the support member 1 that is connected to the joint portion of the base end of the arm 2 is oriented toward the front. -13- 1357375 The moving direction of the hand is protruded in a vertical manner, and the portion formed by the support member of the lower arm does not interfere with the pedestal 13 in a manner of being displaced in the moving direction. The action is explained. The two sets of arms 2' equipped in the multi-gate 1 of the present invention have, for example, a plurality of joint portions, and the knot manipulator 1 is composed of a horizontal articulated manipulator. The actual arm 2 is provided with the same structure as the conventional arm 2. The base end of the upper wrist 6 is constituted by a drive shaft and a support member: ', and constitutes a rotatable shoulder joint arm 3. The joint portion 3 of the base end of the shoulder joint arm portion 2. Further, the front end and the front end of the upper wrist 6 are coupled by a drive shaft to constitute a rotatable elbow joint, and the front end of the front wrist 7 and the hand 8 are coupled to the rotatable hand joint portion 5 by a drive shaft. The arm 2 rotates the shoulder joint, the elbow joint portion 4, and the hand joint portion 5 by a turning drive source (not shown) to move the hand 8 in the /supply direction. At this time, the arm 2 is in this configuration, and the hand moves in a direction in which the upper wrist 6 and the front wrist 7 are fully extended, and the retracted position of the extended wrist 6 and the front wrist 7 are folded together to perform the telescopic movement. . Here, the lower arm 22 is used to explain the turning radius of the multi-close 1 of the present embodiment. In the arm 22 shown in Fig. 4, the center of the workpiece 9 held by the hand 8 is aligned by the center of rotation of the design 13. Further, the section arm of the shoulder joint arm portion 3 and the center of rotation of the hand joint portion 5 and the rotation 22 of the pedestal 13 are connected to the hand in the multi-segment mode. The base 4 of 7. Further, the workpiece removing portion 8 constituting the knuckle arm portion 3 is oriented toward the upper portion and the retracting position of the straight knuckle robot is aligned with the center of the turret rotation center - 14 - 1357375 on the axis of the moving direction of the hand portion 8 When the pedestal 13 is rotated, the elbow joint portion 4 or the hand portion 8 does not protrude from the minimum area circle 15 required for the periphery of the multi-joint robot 1, and the radius of gyration of the multi-joint robot 1 can be reduced. Here, in order to avoid the complexity of the drawing, the lower arm has been used for explanation. As for the upper arm 21, the center of the workpiece 9 is designed to coincide with the center of rotation of the pedestal 13, the shoulder joint arm 3, and the hand joint. The positional relationship between the portion 5 and the center of rotation of the pedestal 13 is also the same as that of the lower arm. Next, the operation in the vertical direction will be described. The arm 2 is attached to the support member 10, and is moved in the vertical direction by the vertical movement mechanism 11 in accordance with a command from a controller (not shown). When moving downward as shown in FIG. 3, a shape in which the supporting member 1〇 does not collide with the pedestal 13 toward the moving direction of the hand 8 is formed, so that the supporting member 10 can be lowered to the up and down movement. The moving position of the lowest point of the mechanism 1 1 is •. Further, in the present invention, the multi-joint robot having the upper arm and the lower arm has been described as 'however, even the multi-joint robot composed of one of the upper and lower arms' is of course the same. In addition, the multi-joint robot with a joint of the shoulder joint, the elbow joint, and the hand joint is described, but the multi-joint robot with the hand joint is fixed, of course, has the same effect and effect. Industrial Applicability] -15- 1357375 When the article is placed on the hand and transported, the article can be transported. Therefore, the application can be applied to the handling of thick plates or phase articles. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing a multi-joint robot of an embodiment of the present invention. Fig. 2 is a top view showing a multi-joint robot of an embodiment of the present invention. Fig. 3 is a front elevational view showing the multi-joint robot of the embodiment of the present invention. Fig. 4 is a view showing the radius of gyration of the multi-joint robot in the embodiment of the present invention. Figure 5 is a perspective view of a conventional multi-joint robot. Fig. 6 is a view showing the radius of gyration of a conventional multi-joint robot. [Main component symbol description] 1 : Multi-joint robot 2 : Arm 21 : Upper arm 22 : Lower arm 3 : Shoulder joint 4 : Elbow joint 5 : Hand joint - 16 - 1357375 6 : Upper wrist 7 : Front wrist 8 : Hand Part 9: Workpiece 1 〇: Support member 1 1 : Up and down moving mechanism 1 2 : Column
13 :台座 14 :基台 1 5 :最小區域圓 1 6 :柱塊 -17-13 : pedestal 14 : abutment 1 5 : minimum area circle 1 6 : column block -17-