TWI354103B - Probe card transfer apparatus - Google Patents
Probe card transfer apparatus Download PDFInfo
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- TWI354103B TWI354103B TW96149660A TW96149660A TWI354103B TW I354103 B TWI354103 B TW I354103B TW 96149660 A TW96149660 A TW 96149660A TW 96149660 A TW96149660 A TW 96149660A TW I354103 B TWI354103 B TW I354103B
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- probe card
- unit
- probe
- transfer device
- arm unit
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Measuring Leads Or Probes (AREA)
Description
九、發明說明： 【發明所屬之技術領域】 本發明A致上有關—探針卡轉移設備其被使用於測 圓之探針測试設備’且特別有關一可輕易及安然地轉 或替換探針卡之探針卡轉移設備其具有一大直徑及係 :的，且其包含各種類型之探針卡，如此能夠藉由供給_ 而要之探針卡立即替換一探針卡。 【先前技術】 大致上，製造半導體裝置之製程包括複數步驟。於植 裝t導體裝置之步驟中’僅只功能性晶片，且不是有缺陷 之晶片必需由形成在一晶圓上的半導體晶片之中選擇。據 此，其重要的是決定在一晶圓上所形成之半導體晶片是否 可：操作的或有缺陷的。用於此目的，用於測試半導體晶 片是否可以操作或有缺陷的探針測試設備被使用。 於-典型之測試製程中，使用探針藉由將該探針測試 設備之測試器所產生的電信號施加至一探針卡，作成該等 個別半導體晶片是否可以操作或有缺陷的評估，該探針卡 與在-晶81上所形成之晶片造成接觸。於此案例中，用於 測試之探針卡必需根據所製成之半導體裝置的類型被替 換。 於此案例中’該上述探針卡之替換係藉由—探針卡變 換器所施行，其係提供於該探針測試設備中。 將探針卡供給至該探針卡變換器及使該探針卡安置在 1354103 ¥ 該探針卡變換器中之工作係由一工作者所手動地進行。 ，同時為了減少為該上述測試所費之時間，安裝至— =針卡的探針之數目近來已增加，且如此該探針卡被製成 具有=大直徑及將為沈重的。更詳細言之，數個探針卡 直L係大約480 $ /卡，且其重量範圍約纟25公斤至切 公斤之最大值。 據此，於此案例t，在此該探針卡之替換係以此—便 ;將適s之探針卡供給至該探針卡變換器及使該探針卡安 ^在該探針卡變換器中之方式施行，該工作者必需親自地 轉移:將制於㈣的探針卡，且㈣探針卡安置於該探 針卡變換器中。豆么士里日 〇 、、Ό疋，^、有一大直徑及為沈重的探針 卡係該工作者上之負擔。再者，需要一分開之位置，以安 然地料該料換之探針卡，及此外，職針卡通常可由 於該工作者當工作時使用過度的力量之粗心大意而被損 壞0 ▲再者，當-探針卡被替換時，該工作者必需在一接近 該探針測試設備之側表面的位置由該探針卡變換器分開被 使用之探針卡，及必需供給與安置—新的探針卡。據此， 在此有-問題’其中在一提供探針測試設備之複數元件的 作業線中，於探針測試設備的元件之間必需提供至少8〇〇 毫米之空間’以有利於該探針卡之替換。 其結果是，在手動地替換一探針卡之案例中，由於上 述問題而花費很多之工作時間。亦即，於該探針卡之替換 期間不能執行晶圓測試操作，且花f長時㈣換該探針 1354103 【發明内容】 〜：此，本發明已將在該先前技藝中所發生之上面問題 而製成，且本發明係針對提供一具有新的 ;針卡轉移設備’其能夠輕易及安然地轉移或替換一探針 士並具m徑及為沈重的，且其包含各種類型之探 "，如此能夠藉由迅迷地供給—需要的摄斜士蛙祕 存探針卡。 而要的探針卡替換-現 =發明提供一探針卡轉移設備，該設備被用於測試晶 針測試設備中，該探針卡轉移設備包括：一探針卡 持早疋，其.组構成可固持一探針卡，且設有一用於感測 探針卡之重量的負載感測單元；一支臂單元，其組 構成使得該探針卡固持單元被安裝至該支臂單元上；一上 降轴桿，其連接至該支臂單元，以便自由地旋轉該 ^早疋；及一負載支擇單元，其組構成可使用-力量支 >“亥^升與下降軸桿，該力量對應於該探針卡固持單元、 該支臂^、該上升與下降軸桿、與該探針卡之重量的總 和=中施加至該負載支標單元以支樓該上升與下降抽桿 星係依所固持探針卡之重量的比例而變化。 加么於本發明之探針卡轉移設備中，該支臂單元具有多數 p口，以致其長度關於該上升與下降軸桿而變化。再者， 該支臂單元可另包括一固定部件，用於固定其長度。 丄斗iUj 於本發明之探針+ 卞轉移設備中，該固定部件包衽 凹部及一嚙合部件，访1 1十巴括複數 -架台中，且該支臂:合部件係提供於該支臂單元之每 早元之長度係在該複數凹部盥爷嚙入 部件係脫開之狀態中作烟& I /、該嚙合 件係互相唾合時被固定…當該複數凹部與該嗜合部 於本發明之探針卡辕 括—檢出器部件，提1^;：備中，該探針卡固持單元包 接或由該探針卡分開部件’以便與該探針卡連 器部件相對該支臂單元自由地旋轉。：二 二元可另包括減震部件，用於減少可歸因於該 撿出β 4件之傾斜的撞擊及運動。 於本發明之探針卡 -上升與下降本二：中，該負載支樓單元包括 驅動Λ ，、與該上升與下降軸桿連接；一支撐 艇動部件，用於支撐該上升與 叉按 降本體上升盘下降.及…降本體並使該上升與下 部件的操作導=上部件，用於根據該支揮驅動 佛作導引该上升與下降本體之上升與下降。 :::卡轉移設備之支擇驅動部件包括一汽知，用於 體^上升與下降本體、或升高及降低該上升與下降本 探針卡之舌Γ汽虹’用於依藉由該負载感測單元所感測的 之重篁的比例而輔助該汽缸之操作。 包括於ί發明之探針卡轉移設料，該探針卡固持單元另 高屋办’其組構成使得藉由-氣摩裝置所產生之 工風被導入經過該空氣入口；—咖 使得被導入經過該空氣入口之空氣通：：：！，其組構成 孔通過該空氣路徑；一阻 W4103 % 斷構件’其被安裝在空氣路 撿出器部件的探針卡之重量 ：構成可依連接至該 度办θ比例而變化該空氣路徑之寬 係^出口’其組構成使得通過該阻斷構件之空氣 、工匕該二氣出口排出，其中經 氣操作該輔助汽仏。 …出口所排出之空IX. Description of the invention: [Technical field to which the invention pertains] The invention relates to a probe card transfer device which is used in a probe measuring device for rounding and is particularly relevant for an easy and safe turn or replacement The probe card transfer device of the card has a large diameter and a system, and it includes various types of probe cards, so that the probe card can be immediately replaced by the probe card supplied with the feed card. [Prior Art] In general, a process for fabricating a semiconductor device includes a plurality of steps. In the step of implanting the t-conductor device, only the functional wafer, and not the defective wafer, must be selected from among the semiconductor wafers formed on a wafer. Accordingly, it is important to determine whether a semiconductor wafer formed on a wafer can be: operational or defective. For this purpose, a probe test apparatus for testing whether a semiconductor wafer is operable or defective is used. In a typical test process, a probe is used to apply an electrical signal generated by a tester of the probe test device to a probe card to make an assessment of whether the individual semiconductor wafers are operable or defective. The probe card makes contact with the wafer formed on the - crystal 81. In this case, the probe card used for testing must be replaced depending on the type of semiconductor device being fabricated. In this case, the replacement of the probe card described above is performed by a probe card transducer, which is provided in the probe test device. The probe card is supplied to the probe card transducer and the probe card is placed in the 1354103 ¥. The probe card converter is manually operated by a worker. At the same time, in order to reduce the time taken for the above test, the number of probes mounted to the -= pin card has recently increased, and thus the probe card is made to have a large diameter and will be heavy. In more detail, several probe cards are available in a straight L system of approximately 480 $ / card and have a weight range of approximately 25 kg to a maximum of kilograms. Accordingly, in this case t, the replacement of the probe card is hereby provided; the probe card is supplied to the probe card converter and the probe card is mounted on the probe card. In the manner of the converter, the worker must transfer in person: the probe card will be made in (4), and (4) the probe card will be placed in the probe card converter.豆豆里里 〇, Ό疋, ^, has a large diameter and a heavy probe card is the burden on the worker. Furthermore, a separate location is required to safely exchange the material for the probe card, and in addition, the job card can usually be damaged due to the carelessness of the worker using excessive force when working. When the probe card is replaced, the worker must separate the probe card used by the probe card transducer at a position close to the side surface of the probe test device, and must be supplied and placed - new Probe card. Accordingly, there is a problem in which, in a line providing a plurality of components of the probe testing device, a space of at least 8 mm must be provided between the components of the probe testing device to facilitate the probe. Replacement of the card. As a result, in the case of manually replacing a probe card, it takes a lot of work time due to the above problem. That is, the wafer test operation cannot be performed during the replacement of the probe card, and it takes a long time (four) to change the probe 1354103. [Invention] The present invention has been made in the prior art. The problem is made, and the present invention is directed to providing a new; needle card transfer device that can easily and safely transfer or replace a probe and has a m-path and is heavy, and includes various types of probes. ", so can be supplied by the fascinating - the need for the probe frog secret probe card. The desired probe card replacement - now = invention provides a probe card transfer device, the device is used in a test crystal needle test device, the probe card transfer device includes: a probe stuck early, its group Forming a probe card capable of holding, and providing a load sensing unit for sensing the weight of the probe card; an arm unit configured such that the probe card holding unit is mounted to the arm unit; An up-down shaft connected to the arm unit for freely rotating the arm; and a load-retaining unit, the group of which can be used - a force support > The force corresponds to the sum of the probe card holding unit, the arm, the rising and falling shaft, and the weight of the probe card = applied to the load bearing unit to the branch, the rising and falling pulling star It varies depending on the ratio of the weight of the probe card held. In the probe card transfer device of the present invention, the arm unit has a plurality of p-ports such that its length varies with respect to the rising and falling shafts. The arm unit may further comprise a fixing component for fixing The length of the hopper iUj in the probe + 卞 transfer device of the present invention, the fixing member includes a recess and an engaging member, the access 110 is included in the plurality-frame, and the arm: the component is provided The length of each early element of the arm unit is fixed in the state in which the plurality of recessed grandfather biting members are disengaged, and the engaging members are fixed when they are mutually salivated... when the plurality of recesses are The accommodating portion is in the probe card of the present invention, the detector component is provided, and the probe card holding unit is enclosed or the component is separated by the probe card to be connected with the probe The component is free to rotate relative to the arm unit. The binary may additionally include a shock absorbing member for reducing the impact and motion attributable to the tilt of the splayed beta 4 member. And the descending body 2: wherein the load branch unit comprises a drive Λ, and is connected with the rising and falling shaft; a supporting boat moving part is used for supporting the ascending and the fork descending body ascending the disk to descend. And causing the rise and the operation of the lower member to be the upper member for The driving force guides the rise and fall of the rising and falling body. ::: The selective driving component of the card transfer device includes a steam knower for raising and lowering the body, or raising and lowering the rising and falling The tongue of the probe card is used to assist the operation of the cylinder according to the proportion of the weight sensed by the load sensing unit. The probe card included in the invention is transferred to the probe card. The holding unit is also a high-rise office, the group structure is such that the work wind generated by the air-motor device is introduced through the air inlet; the coffee is introduced into the air passage through the air inlet:::! The air path; a resistance W4103% of the breaking member's weight of the probe card mounted to the air path extractor component: forming a wide outlet that can change the air path according to the ratio of the degree of connection to the degree θ The group is configured such that the air passing through the blocking member is discharged from the second gas outlet, wherein the auxiliary steam is operated by gas. ...the air discharged from the exit
2 =卡轉移設備之導引部件包括複數導引塊件，其 二與下降本體固定式地麵接；&一或多個導軌，其 數導引塊件响合，以導引該等導引塊件之上升與下 一本發明之探針卡轉移設備可另包括一探針卡容置單 70，其破組構成使得一或多個探針卡被容置在其中。 &該探針卡容置單元包括一或多個探針卡架台，提供該 2針卡架台，以便能夠安置或分開該探針卡；及一或多個 滑動部件’其提供於料個別之探針卡架台中，以致該等 探針卡架台滑動及向外突出。 該等滑動部件之每一個包括導引機架，其安裝在一對 應探針卡架台之各個側面上；滾珠扣件，其提供於該等導 引機架中；及複數滾珠，其容置在該等滾珠扣件中，其中 該等滑動部件之每一個具有一二階梯狀_線性導引結構。 【實施方式】 下面參考所附圖式詳細地敘述本發明之實施例，以致 其能被一具有關於本發明的技藝中之普通知識的人士所輕 易地提供。然而，本發明能以各種方式提供，且不限於在 丄乃4103 此中所敘述之實施例β 下面參考圖1至8詳細地敘述根據本發明之較佳 例的探針卡轉移設備。 圖1至7中所顯不’根據本發明之較佳實施例的探 轉移設備包括一探針卡固持單元1〇〇、一支臂單元 上升與下降軸桿3 00、一負載支撐單元4〇〇、及一 探針卡容置單元500。 玄探針卡固持單元剛被安裝至該支臂單元200的-端部，且被組構成可固持一設在探針卡pc的上表面上之 口持°卩件，及穩定地轉移該探針卡PC。 沖—其次，在下面參考圖3及4詳細地敘述該探針卡固持 °D 如圖3及4令所顯示，該探針卡固持單元100 包括-負載感測單S110、一撿出器部件120 部件⑽、及減震部件14〇。2 = the guiding component of the card transfer device comprises a plurality of guiding blocks, the second of which is fixedly grounded to the descending body; & one or more guiding rails, the number of guiding members of which are coupled to guide the guiding The rise of the lead member and the probe card transfer apparatus of the present invention may further include a probe card accommodating unit 70 which is configured such that one or more probe cards are housed therein. & the probe card accommodating unit includes one or more probe card holders, the 2-pin card holder is provided to be able to position or separate the probe card; and one or more sliding members are provided for the individual components The probe card holder is so that the probe card holder slides and protrudes outward. Each of the sliding members includes a guiding frame mounted on each side of a corresponding probe card holder; ball fasteners provided in the guiding frames; and a plurality of balls housed in the plurality of balls In the ball fasteners, each of the sliding members has a two-step-linear guiding structure. [Embodiment] Embodiments of the present invention will be described in detail below with reference to the drawings, so that they can be easily provided by those having ordinary knowledge in the art of the present invention. However, the present invention can be provided in various manners, and is not limited to the embodiment β described in the following. The probe card transfer apparatus according to the preferred embodiment of the present invention will be described in detail below with reference to Figs. 1 to 7, the probe transfer device according to the preferred embodiment of the present invention includes a probe card holding unit 1 , an arm unit ascending and descending shaft 3 00, and a load supporting unit 4 〇, and a probe card accommodating unit 500. The meta-probe card holding unit has just been mounted to the end of the arm unit 200, and is configured to hold a mouth-holding member provided on the upper surface of the probe card pc, and stably transfer the probe. Needle card PC.冲- Next, the probe card holdings are described in detail below with reference to FIGS. 3 and 4. As shown in FIGS. 3 and 4, the probe card holding unit 100 includes a load sensing unit S110 and an extractor unit. 120 parts (10), and shock absorbing parts 14〇.
山，負載感測單S⑽係繫緊至該撿出器部件120之上 方並感測已連接至該撿出器部# 12G的探針卡PC ”負載感測單元110根據該感測之重量調整該力 直之5值’該力量係當將梢後敘述之輔助汽缸422輔助-將稍後敘述的汽缸42丨時所產生。 ’、 下面詳細地敘述該負載感測單元1 1 0及將稍 後敘述的輔助汽缸422 間之關係。如圖5中所顯示，該負 載感測h no包括—空氣入口 u]、一空氣路徑ιΐ2、 4斷構件m、及—空氣出口 ιΐ4。此空氣入口 m係 被一氣厂堅裝置(未示出)所產生之高塵空氣所導入經過的一 11 1354103 \ 部份，且該空氣路徑丨丨2係 等入經過該空氣入口 11 1之空氣係通過該路徑 再者’該阻斷構件113被安裝在該空氣路徑i , 且依連接至該撿出器部件120之探針卡PC的重量 而變化該空氣路徑112《寬度。亦即，藉由_ 針卡PC之重量變化該空氣路徑112之寬度，該阻斷構件⑴ 控制經過該空氣出口 114所排出之空氣的壓力。❹1 變化該空氣路徑112之％# b 斷構件113。 以的構件、m膜提供該阻 再者’該空氣出口 114係一部份，通過該阻斷構件⑴ 之空氣：經過該部份排出。亦即，經過該空氣入口⑴所 導入之咼壓空氣係依該探針卡PC 會旦 空氣出口 m排出。此被排出里：比例而經過該 這將稍後敘述。被排出之工-作該辅助汽缸似， 據此’該輔助汽缸422對該負载感測單元ho之作用 旦出回應依連接至該撿出器部件m的探針卡pc之重 里的比例而輔助与·、、与土 n 趄# 飞缸421。於本發明之較佳實施例中， =測單元η。，使得經過該空氣出…所排 斷構係藉由根據該探針卡PC之重量調整該阻 所控制’但本發明不限於此。譬如，可使用一 電信號之負載感測器提供該負載感測單元i i 〇。 =出器部件120被提供至具有一結構，其中該檢出 P件1 2 0係與該摸斜+ ρ ρ 接至节C之固持部件耦接，以便被連 接至《針卡PC之@持料或由該探針卡pc之固持部件The load sensing unit S(10) is fastened to the extractor unit 120 and senses the probe card PC connected to the extractor unit #12G. The load sensing unit 110 adjusts according to the sensed weight. The force is 5 values 'this force is generated when the auxiliary cylinder 422 described later is assisted - will be generated when the cylinder 42 is described later. ', the load sensing unit 1 1 0 will be described in detail below and will be later The relationship between the auxiliary cylinders 422 is described. As shown in Fig. 5, the load sensing h no includes - air inlet u], an air path ι ΐ 2, 4 breaking member m, and - air outlet ι ΐ 4. This air inlet m system The high-dust air generated by a gas plant (not shown) is introduced through a portion of the 11 1354103 portion, and the air path 丨丨 2 is passed through the air inlet 11 1 through the path. The blocking member 113 is mounted in the air path i and varies in width according to the weight of the probe card PC connected to the extractor member 120. That is, by the _ pin card PC The weight changes the width of the air path 112, and the blocking member (1) controls The pressure of the air discharged through the air outlet 114. ❹1 changes the % of the air path 112 to the broken member 113. The member, the m film provides the resistance, and the air outlet 114 is part of the air outlet 114. The air of the breaking member (1) is discharged through the portion, that is, the pressurized air introduced through the air inlet (1) is discharged according to the probe card PC to the air outlet m. This is discharged: the ratio passes through the As will be described later, the discharged work is similar to the auxiliary cylinder, whereby the auxiliary cylinder 422 responds to the load sensing unit ho in response to the probe card pc connected to the extractor unit m. In the preferred embodiment of the present invention, the unit η is measured by the ratio of the weight of the weight, and the unit η is passed through the air outlet. The weight adjustment of the card PC is controlled by the resistance', but the invention is not limited thereto. For example, the load sensing unit ii can be provided using an electrical signal load sensor. The output unit 120 is provided to have a structure. , wherein the detected P piece 1 2 0 system and the touch + ρ ρ is coupled to the holding member of the segment C so as to be connected to the "pinning card PC" or the holding member of the probe card pc
12 1354103 分開。該撿出器部件120具有於其下方 且係設有-緊繫槓桿或-緊繫夹具，以固:輕接孔洞， =洞之物件’針卡。c之固持部=二= 孔洞。於此狀態中，操縱該緊_桿或 該等麵接 出器部件12G及該探針卡pc係藉由*具，該撿 夹具彼此固定式地輕接。 “緊繫槓桿或該緊繫 料=㈣轉式部件13G，使得該撿“㈣12〇能相 係："：Γ°°自由地旋轉。該旋轉式部件13°較佳地 相對==製成，但本發明不限於此，且任何可 ^田自由地旋轉該檢出器部件120之結構 月匕被用作該旋轉式部件13 〇 〇 μΓΪΓ出器部件120係關於該支臂單元傾斜時， :本發r件140減少施加至該探針卡代之衝擊及運動。 所^ 佳實施例中，該等減震部件140係由四彈簧 何^ I如圖3及4中所顯示’但本發明不限於此，且任 部件W衝擊及運動之材料能被自由地選擇用作該等減震 兮等咸雷例如’可使用小尺寸設計之減壓吸震汽缸提供 4 4減震部件14〇。 =支臂單元2〇〇係一結構其包括該探針卡固持單元 切藉纟《針卡目持單元_和持之該探針卡 上升2連接至該上升與下降轴桿300,以便能夠相對該 、降軸桿300自由地旋轉。據此，該支臂單元2〇〇 二在該上升與下降軸桿·之搖擺範圍内轉移該探針卡 亦即，該支臂單元2〇〇能在該搖擺範圍内由一點至另 13 1354103 % 一點轉移該探針卡PC。 在此，為了防止該探針卡pc由於與該探針卡轉移設 備之其他零件干涉而受損，可提供該支臂單元2〇〇，使得 其旋轉被限制在—預定範圍内。再者，該支臂單元200較 佳地係被安裝至平行於一支樓表面，該探針卡轉移設備係 位於該支撐表面上。 再者，該支臂單元200係固定式地耦接至該上升與下 籲 &軸桿300’且該上升與下降軸桿係與該負載支撲單 元400連接，以便能夠自由地旋轉。據此，可提供該支臂 早7C 200,以便能夠相對該負載支撐單元4〇〇自由地旋轉。 當摘後敘述該上升與下降轴桿3〇〇時，將額外地敛述該支 臂單元200。 时於本發明之較佳實施例中，如目3中所顯示，該支臂 單元200具有多數架台，以致其長度能關於該上升及下降 軸桿300作變化。於此案例中，該支臂單元2⑽之搖擺範 • 圍可根據其長度中之變化而變化。據此，該支臂單元200 能在其最大範圍内由一點至另一點轉移該探針卡pc。 於本發明之較佳實施例中，提供該支臂單元2〇〇，以 致其長度可藉由推拉操作被手動變化，該操作被一工作者 所進行，但本發明係不須受限於此。譬如，可提供該支臂 單元200，使得其長度係藉由一分開地提供之操作單元所 變化。 於此提供該支臂單元200使得其長度能被變化之案例 中，該支臂單元200可另包括一固定部件25〇。該固定部 14 1354103 • » 件250係負貝用於固定該支臂單元2⑽之長度。 於本發明之較佳實施例中，如圖3中所顯示，該固定 Ρ件 〇括複數凹部251及-0i合部件252，該等凹部 -及嚙合部件係提供於該支臂單元2〇〇之每一架台中。 該複數凹部251係橫側地形成，以具有與—齒條齒輪 相同之形狀，且形成該唾合部件以，以便被***一選自 -亥複數凹部25 1之中的凹部，並將與該選擇之凹部嚙合。 據此，在該複數凹部251及該喃合部件252係彼此脫開的 狀態中調整該支臂單元2〇〇之長度’且當該複數凹部251 及該嚙合部件252互相嚙合時被固定。 5如圖3巾所顯不，一固定開關26〇較佳地係提供於該 支#單元2〇〇巾。该固定開關26〇由該複數凹部⑸脫開 該。齒合部件252、或與該複數凹部251喊合該喷合部件 252。於本發明之較佳實施例中，使用單—独提供該固 定開關260,但本發明係不限於此，且大致上使用任何可 .用作-開關之元件，及能無限制地操作可被用於該固定開 關260之固定部件250。 該上升與下降軸桿300將該支臂單元2〇〇連接至該負 載支撐單元400,且根據該負载支撐單元4〇〇之操作升高 及降低該支臂單A 200。較佳地{，該上升及下降轴桿3〇〇 被安裝垂直於該支撐表面，該探針卡轉移設備係位於該支 樓表面上。 該上升與下降軸桿300係與該支臂單元2〇〇連接，以 致該支臂單元200可被自由地旋轉，且係與該負載支撐單 15 1354103 « 元400固定式地輕接。另—選擇係，該上升與下降轴桿3〇〇 可與該支臂單i 2GG被以式地搞接’且可該負載支標單 元400連接，以便能夠相對該負載支揮單元彻自由地旋 轉0 根據該上升與下降轴桿·是否隨著該支臂單元2〇〇 旋轉，該二案例彼此不同’但於該支臂單S 200能相對該 支撐表面自由地旋轉中係相同的。於安裝該上升與下降轴12 1354103 Separate. The extractor member 120 has underneath and is provided with a -tight lever or a tight grip to secure the light hole, the hole object, and the needle card. The holding part of c = two = hole. In this state, the tension lever or the surface connector member 12G and the probe card pc are operated by means of a fixture, and the jaws are fixedly coupled to each other. "Tighten the lever or the tight system = (4) the rotary member 13G, so that the "(4) 12" can be phased: ": Γ ° ° freely rotates. The rotary member 13 is preferably made with respect to ==, but the present invention is not limited thereto, and any structure in which the detector member 120 can be freely rotated is used as the rotary member 13 When the μ-cluster member 120 is tilted about the arm unit, the hairpin member 140 reduces the impact and motion applied to the probe card. In the preferred embodiment, the damping members 140 are made of four springs, as shown in Figures 3 and 4, but the invention is not limited thereto, and any material that impacts and moves the components can be freely selected. It is used as a salt trap for such shock absorbing rafts, for example, '4 damper parts 14 提供 can be provided using a decompression shock absorbing cylinder of a small size design. = arm unit 2 is a structure comprising the probe card holding unit, the needle card holding unit _ and the probe card rising 2 are connected to the rising and falling shaft 300 so as to be able to The down shaft 300 is free to rotate. Accordingly, the arm unit 2 transfers the probe card within the swing range of the rising and falling shafts, that is, the arm unit 2 can be moved from one point to another 13 1354103 within the swing range. % Transfer the probe card PC a little. Here, in order to prevent the probe card pc from being damaged by interference with other parts of the probe card transfer device, the arm unit 2A may be provided such that its rotation is restricted to a predetermined range. Further, the arm unit 200 is preferably mounted parallel to a floor surface on which the probe card transfer apparatus is attached. Further, the arm unit 200 is fixedly coupled to the ascending and lowering & shaft 300' and the ascending and descending shaft is coupled to the load baffle unit 400 so as to be freely rotatable. Accordingly, the arm can be provided 7C 200 early so as to be freely rotatable relative to the load supporting unit 4〇〇. When the raising and lowering shaft 3 is described later, the arm unit 200 will be additionally squished. In the preferred embodiment of the invention, as shown in Figure 3, the arm unit 200 has a plurality of stands so that its length can vary with respect to the ascending and descending shafts 300. In this case, the swing range of the arm unit 2 (10) may vary depending on the length thereof. Accordingly, the arm unit 200 can transfer the probe card pc from one point to another within its maximum range. In the preferred embodiment of the present invention, the arm unit 2 is provided such that its length can be manually changed by a push-pull operation, which is performed by a worker, but the present invention is not limited thereto. . For example, the arm unit 200 can be provided such that its length is varied by a separately provided operating unit. In the case where the arm unit 200 is provided such that its length can be changed, the arm unit 200 may further include a fixing member 25A. The fixing portion 14 1354103 • » 250 is a negative for fixing the length of the arm unit 2 (10). In the preferred embodiment of the present invention, as shown in FIG. 3, the fixing member includes a plurality of recesses 251 and -0i joint members 252, and the recess portions and the engaging members are provided to the arm units 2 Each of the stations. The plurality of recesses 251 are formed laterally to have the same shape as the rack gear, and the saliving member is formed so as to be inserted into a recess selected from the recessed portion 25 1 and The selected recess is engaged. Accordingly, the length of the arm unit 2' is adjusted in a state where the plurality of recessed portions 251 and the merging member 252 are disengaged from each other, and is fixed when the plurality of recessed portions 251 and the engaging member 252 are engaged with each other. 5, as shown in Figure 3, a fixed switch 26 is preferably provided for the #2 2 wipe. The fixed switch 26 is disengaged by the plurality of recesses (5). The toothed member 252 or the plurality of recesses 251 is called with the spray member 252. In the preferred embodiment of the present invention, the fixed switch 260 is provided separately, but the present invention is not limited thereto, and substantially any component that can be used as a switch can be used, and can be operated without limitation. A fixing member 250 for the fixed switch 260. The raising and lowering shaft 300 connects the arm unit 2 to the load supporting unit 400, and raises and lowers the arm unit A 200 according to the operation of the load supporting unit 4''. Preferably, the rise and fall shaft 3 is mounted perpendicular to the support surface and the probe card transfer apparatus is located on the surface of the support. The rise and fall shaft 300 is coupled to the arm unit 2A such that the arm unit 200 can be freely rotated and is fixedly attached to the load support unit 15 1354103 « yuan 400. Alternatively, the selection and the lowering shaft 3〇〇 can be engaged with the arm unit i 2GG and can be connected to the load bearing unit 400 so as to be able to freely move relative to the load supporting unit. Rotation 0 Depending on whether the raising and lowering shafts are rotated with the arm unit 2, the two cases are different from each other 'but the arm S S 200 can be freely rotated relative to the supporting surface to be the same. Install the rise and fall axes
桿3 00以便能夠隨荖兮忐辟„ — ^ J現者忑支臂早兀200旋轉之案例中，一旋 轉^引構件（未不出）、諸如—軸承係提供於該負載支樓單 几400中。於安裝該支臂單元2〇〇以便能夠環繞著該上升 與下降軸# 300旋轉此之案例中，一旋轉導引構件(未示 出）、諸如一軸承係提供於該支臂單元2〇〇。 該負載支樓單元400係固定式地麵接至該上升與下降 軸柃300，並使用一力量支撐該上升與下降軸桿，該 力量對應於該探針卡固持單元1〇〇、該支臂單元2〇〇、該 上升與下降轴桿300、及該探針卡PC之重量的總和。據此， 對應於該探針卡固持單力⑽、該支臂單元测、該上升 ”下降軸梓300、及該探針卡PC之重量的總和之力量相對 該負載支撐單元400的驅動力量建立一平衡狀態。 θ於此狀態中’該負載支撐單元400藉由提供額外之力 里至及上升與下降軸桿3〇〇而升高該上升與下降軸桿3〇〇。 :者’該等力量間之平衡狀態係如上面所述地達成，以致 =4工作者使用一少於大約5公斤重之小力量壓按該支臂 單元200時，該上升與下降軸桿3⑻能被降低。 16 1354103 200 ’但本發明不須受限於此。 另一選擇係，該探針卡轉移設備 中未摇仪兮J破棱供，使得在其 提供6亥升鬲開關423，但當該 臂罝作者在用於升高該支 早兀200之方向中施加一小力量時， 斗 l丄 °褒支臂単元200上 針卡轅：當升高該支臂單元200中時。再者，可提供該探 —轉移設備’使得除了用作該升高開關伯以外，Rod 3 00 so as to be able to follow the example of a 兀 ^ 现 忑 忑 兀 兀 兀 兀 兀 兀 兀 , , , , , , , , , , , , , , 案例 案例 案例 案例 案例 案例 案例 案例 案例 案例 案例 案例 案例 案例 案例 案例In the case where the arm unit 2 is mounted so as to be rotatable around the ascending and descending axis #300, a rotation guiding member (not shown) such as a bearing is provided to the arm unit. The load tower unit 400 is fixedly grounded to the ascending and descending shafts 300, and supports the ascending and descending shafts with a force corresponding to the probe card holding unit 1〇〇. The sum of the arm unit 2〇〇, the rising and falling shaft 300, and the weight of the probe card PC. Accordingly, corresponding to the probe card holding single force (10), the arm unit measures, the rise The force of the sum of the descending axis 梓 300 and the weight of the probe card PC establishes an equilibrium state with respect to the driving force of the load supporting unit 400. θ In this state, the load supporting unit 400 raises the rising and falling shaft 3〇〇 by providing additional force to and ascending and descending shafts 3〇〇. The balance between the forces is achieved as described above, so that the =4 worker presses the arm unit 200 with a small force of less than about 5 kg, the rise and fall shaft 3 (8) Can be lowered. 16 1354103 200 'But the invention is not limited thereto. Another option is that the probe card transfer device is not swayed, so that it provides 6 liters of 鬲 switch 423, but when the shackle author is used to raise the 兀 200 When a small force is applied, the bucket is clamped on the arm 200: when the arm unit 200 is raised. Furthermore, the probe-transfer device can be provided such that in addition to being used as the boost switch,
Si:之升高與降低開關、及該支臂單元2。。根據該 回〃降低開關之升高與降低操縱而上升/下降。 再者’於本發明之較佳實施例中，以_氣壓汽紅之形 4供該支擇驅動部件㈣之操作單元，但本發明不限於 ^且可，限制地使用任何可提供力量至該上升與下降本 a 〇之單兀、諸如一馬達及一齒輪。 再者，如圖6中所顯示，根據本發明之探針卡轉移設 可另包括-連接構件424，其連接該上升與下降本體川 2支撐驅動料，且由該支撐驅動部件㈣傳送該 嚴至该上升與下降本體41〇。 /亥導引部件43G係、負責用於根據該支撐驅動部件420 之操作導引該上升與下降本冑410之上升及下降。於本發 明之較佳實施例中’如圖6及7中所顯示，該導引部件43〇 包括導引塊件43 1及導軌432。 該等導引塊件431係、與該上升及下降本體4i0固定式 地輕接。該等導引塊件431係與該等導軌432 4合，並施 仃—導引功能，以致該上升與下降本體41〇能沿著該等導 軌432上升及下降，該等導軌被固定式地安裝。於本發明 (S ) 19 1354103 之較佳實施例中，提供二對導引塊件431，但本發明不會 受限於導引塊件431之數目或該等導引塊件431之形狀。 该等導執432被固定式地安裝垂直於該支撐表面，該 探針卡轉移設備被安裝在該支撐表面上’該等導軌與Λ 該等導引塊件431嚙合，以導引該等導引塊件43丨之上升 及下降。於本發明之較佳實施例中，提供一對導軌々Μ， 但本發明係不會受限於導軌432之數目或該等導軌432 形狀。 該探針卡容置單元500被組構成可在其中容置各種類 型=探針卡PC，以致該探針卡轉移設備能藉由將_所需要 之奴針卡PC供給至該探針測試設備而立即替換一現存探 „、在τ面參考圖1及7詳細地敘述該探針卡容置 早π 500。該探針卡容置單元包 滑動部件520。 丁卞糸口 510及 該探針卡架台51〇之每一 有-圓形之#^丨 u十板之形狀’並具 心之*Ϊ孔洞511，該探針卡^係安 洞中或該探針卡ΡΓ仫A — 6 Z文置孔 佳實施例+，提供-：孔洞分開。於本發明之較 於此，且如需=^ 卡架自51。，但本發明係不限 卷 要可提供一較高數目之探針卡架台。 田攻才木針卡轉移設備移動 該 置在該探針卡轉移—…u m 510係容 由今探斜h 當一被使用之探針卡pc俜 由該探針卡轉移設備係 外面。據此 > 賴之料切台突出至 該探針卡pc能由該突出之探針卡架台si〇 20 (S ·) 1354103 分開’或能被安置於該突出之探針卡架台別中。 -組滑動部件52G係提供於每—探針卡架自別中， 被=構成使得該探針卡架台51G能滑動及能夠突出至外 側。於本發明之較佳實施例 该探針卡架台510具有個 1=，且被組構成供該工作者將它們拉出。然而， 二:限於此’且可提供該等滑動部件520,使得一操 ==裝’及該等探針卡架台51°係藉由該操作單元 自動地大出。於本發明之較佳實施例中，如圖i及 f示’該等㈣部件52G之每—個包括導⑽架521、滾 珠扣件522及滾珠523。 三個導引機架521係安裝在每—探針卡架台51〇之每 一側面上’且如此該等探針卡架自51()之每—個得呈有一 二階梯狀·線性導引結構。更詳細言之，第—導引機架52u 係固疋式地安裝在該探針卡轉移設備之内部表面上，以致 其不會移動。-第三導引機架521。係與該探針卡架台HO ，定式地耦接。—第二導引機架521b係組構成能夠在該 第一導引機架52 U及該第三導引機架52u之間滑動。 據此，當該工作者拉動一想要之探針卡架纟HO的把 手512時，該第三導引機架52U及該第二導引機架 滑動’且如此主要地突出該探針卡架纟510。當該探針卡 架台510在該最初的突出之後被進一步拉動時，該第二導 引機架521b及該第一導引機架521a滑動，在其次突出該 探針卡架台5 1 0。 ~ 與Ρ白梯狀-線性導引結構作比較，用於形成該導引機 21 1354103 架521以具有該二階梯狀·線性導们去構之理 現該等探針卡架台別之突出。因該等探針 1 突出的範圍係增加，當該探針 之 ^ 44- Μ ^ 破轉移時，可防止與Si: the raising and lowering switch, and the arm unit 2. . According to the return, the rise and fall of the switch is lowered and lowered. Furthermore, in the preferred embodiment of the present invention, the operating unit of the driving component (4) is provided in the form of a gas-vapor red, but the invention is not limited to, and may be limitedly used to provide any force to the Rising and descending a single 兀, such as a motor and a gear. Furthermore, as shown in FIG. 6, the probe card transfer device according to the present invention may further include a connecting member 424 that connects the rising and falling body 2 supporting the driving material, and transmits the strict by the supporting driving member (four) Up to the rising and falling body 41〇. The /leading guide member 43G is responsible for guiding the rise and fall of the ascending and descending core 410 in accordance with the operation of the support driving member 420. In the preferred embodiment of the invention, as shown in Figures 6 and 7, the guide member 43A includes a guide block member 43 1 and a guide rail 432. The guide block members 431 are fixedly attached to the rising and falling bodies 4i0 in a fixed manner. The guide blocks 431 are coupled to the guide rails 432 4 and have a guiding function so that the ascending and descending bodies 41 can be raised and lowered along the guide rails 432. The guide rails are fixedly installation. In the preferred embodiment of the invention (S) 19 1354103, two pairs of guiding blocks 431 are provided, but the invention is not limited by the number of guiding blocks 431 or the shape of the guiding blocks 431. The guides 432 are fixedly mounted perpendicular to the support surface, and the probe card transfer device is mounted on the support surface. The guide rails are engaged with the guide members 431 to guide the guide The riser 43 is raised and lowered. In a preferred embodiment of the invention, a pair of rails are provided, but the invention is not limited by the number of rails 432 or the shape of the rails 432. The probe card accommodating unit 500 is configured to accommodate various types of the probe card PC therein, so that the probe card transfer device can supply the probe card device to the probe test device by And immediately replace the existing probe, and the probe card is accommodated earlier by π 500 in detail on the τ plane with reference to Figures 1 and 7. The probe card accommodates the unit package sliding member 520. Dingkou 510 and the probe card Each of the pedestals 51 has a shape of a rounded #^丨u ten board and has a heart* hole 511, the probe card is in the hole or the probe card A-6z孔孔佳实施例+, provides -: hole separation. In the present invention, and if necessary, the card holder is from 51. However, the present invention is not limited to provide a higher number of probe cards. The turret is transferred to the probe card to transfer the ...-um 510 system to the present probe. When a probe card pc is used, the probe card is transferred from the outside of the device. According to this, the cutting table protrudes until the probe card pc can be separated by the protruding probe card holder table si〇20 (S ·) 1354103' or can be placed in the The protruding probe holders are arranged in. - The group sliding member 52G is provided in each of the probe card holders, and is configured such that the probe card holder table 51G can slide and protrude to the outside. The preferred embodiment of the probe card holder 510 has a 1 = and is configured for the worker to pull them out. However, two: limited to this and the sliding members 520 can be provided such that one == And the probe card holders 51° are automatically enlarged by the operation unit. In the preferred embodiment of the present invention, as shown in Figures i and f, each of the (four) components 52G includes a guide (10) frame. 521, ball fastener 522 and ball 523. Three guiding frames 521 are mounted on each side of each probe card holder 51' and such probe card holders are from 51() In a more detailed manner, the first guide frame 52u is fixedly mounted on the inner surface of the probe card transfer device so that it does not move. The third guiding frame 521 is fixedly coupled to the probe card holder table HO. The second guiding frame 521b is configured to be capable of being configured. The first guiding frame 52 U and the third guiding frame 52u slide between each other. According to this, when the worker pulls a handle 512 of a desired probe card holder HO, the third guiding The frame 52U and the second guiding frame slide 'and so as to mainly protrude the probe card holder 510. When the probe card holder 510 is further pulled after the initial protrusion, the second guiding machine The frame 521b and the first guiding frame 521a slide, and the probe card frame 5 1 0 is protruded next. ~ Compared with the white ladder-linear guiding structure, the guiding machine 21 1354103 frame 521 is formed. In the case of having the two-step and linear guides, the probe card holders are highlighted. Since the range in which the probe 1 protrudes is increased, when the probe is broken, the 44- Μ ^ is prevented from being transferred.
祕針卡轉移設備之其他零件的干涉，以致該探針卡PC 月Μ皮防止受損壞。為此緣故’ 長度係重要的。 该等探針卡架台Μ突出之 之二 =扣件522係設置在該等線性導引機架⑵間 之各個間/¾中。亦即，琴笛—. 一導^_ 521 "第-滾珠扣件仙係設置於該第 機架52U及該第二導引機架521 珠扣件522b係嗖罟於兮贫.s ^弟一展 “ 置於該第二導引機架”lb及該第三導引 m㈣滾珠扣件522固定每—探針卡 中所容置之滾珠523的仞罢π 十口 510 系統。 的位置，且如此能建立-穩定之滑動 =者’複數滾珠⑵係容置在每一滾珠扣件522中。 虽該荨導引機架521滑動時，該等 機架521間之_，袞珠523減少該等導引 于不如此貫現平滑之滑動。 該等滑動部件520夕i _ 出)，用於固定”产針:二 括一固定構件(未示 -備銘#λ主 木十卡架σ 510，以致當該探針卡轉移 °又備移動時，它們不會突出。 備之=面敘述根據本發明之較佳實施例的探針卡轉移設 百先’該探針卡轉移設備係移動及定位圍繞著想要之 :中安=需要一探針卡PC。隨後，該工作者拉出-在 ^朱針卡PC之探針卡架台51〇，以造成該探針卡 (S ) 22 1354103 =台突出該探針卡轉移設備外ι此後，藉由操縱該升高 幵關423或错由使用一小力量往下壓按該支臂單元綱， 該工作者釋放該固定部件25〇之固定作用，移動該支 ^ ㈣探針卡PC之固持部件，絲接該探針卡固持 早兀100與該探針卡PC之固持部件。 ^，雜針卡PC經過料高㈣423之操縱被轉 4要之位置’諸如半自動探針卡變換器（SACC)之安 ^部件。在該探針卡pc已藉由使用—小力㈣按該支臂 早'200而被安置在該想要位置之後，該探針卡固持單元 1 〇〇係由該探針卡PC分間。+ & —▲ 1此後，使用該固定部件250固 =支臂早το 200’該支臂單元2〇〇經過該升高開關⑶ =縱而上升’且隨後該探針卡架台別係被推入該探針 卡轉移設備。 已關於取出該探針卡轉移設備令所容置之探針卡PC 的操料成該上述之敘述。既然對於該上述之操作，該相 反之钿作旎夠在顛倒順序中執行，其敘述被省略。 該探針卡轉移設備主要被用於藉由供給一新的探針卡 而替換一現存探針卡，該sacc係提供於該探 …4巾。會同此案例，該料卡轉移設 中所顯示。 如上面所述，於根據本發明之探針卡轉移設備中，一 具t大直徑及係沈重的探針卡之轉移及替換可被輕易及安 然地施行。 再者，根據本發明之探針卡轉移設備能在其中包含各 23 1354103 且如此能藉由供給一 種類型之探針卡 即施行替換。 所需要之探針卡立 減少替換該探針測試設 ，如此改善生產力及生 據此，由於該等上述之優點， 備中所使用的探針卡所花費之時間 產效率。 冉者’複數件探針測 -作業線中，”等“：：致一…被安裝於The interference of the other parts of the needle card transfer device is such that the probe card PC is protected from damage. For this reason, the length is important. The two of the probe card holders are protruded = the fasteners 522 are disposed between the linear guide frames (2). That is, the xylophone.. a guide ^_ 521 " the first - ball fasteners are set in the first frame 52U and the second guide frame 521 bead fasteners 522b are tied to the poor.s ^ The younger brother "positioned in the second guiding frame" lb and the third guiding m (four) ball fastener 522 fix the 滚 十 10 510 system of the balls 523 accommodated in each probe card. The position, and so can be established - a stable slip = the 'multiple balls (2) are housed in each of the ball fasteners 522. While the guide frame 521 is slid, the bead 523 reduces the amount of smooth guidance that is not so consistent. The sliding members 520 are used for fixing the needles: two fixed members (not shown - 备铭#λ 主木十卡架σ 510, so that when the probe card is transferred, the mobile device is moved again When they are not prominent, the description will be based on the preferred embodiment of the present invention. The probe card transfer device is designed to move and position around the desired one: Zhongan = need a probe Card PC. Subsequently, the worker pulls out the probe card holder 51 of the ^Jusica card PC to cause the probe card (S) 22 1354103 = the table protrudes the probe card transfer device, then borrow By manipulating the raising 423 or by pressing the arm unit downwards with a small force, the worker releases the fixing function of the fixing member 25, and moves the supporting member of the (4) probe card PC. The wire is connected to the probe card to hold the holding member of the probe card PC and the probe card PC. ^, the needle card PC is transferred to the position of the high position (four) 423, such as a semi-automatic probe card converter (SACC) The probe card pc has been placed in the desired position by using the small force (four) according to the arm early '200 Thereafter, the probe card holding unit 1 is separated by the probe card PC. + & - ▲ 1 Thereafter, the fixing member 250 is used to fix the arm early το 200' Raising the switch (3) = rising vertically' and then the probe card holder is pushed into the probe card transfer device. The handling of the probe card PC that has been received by the probe card transfer device has been The above description. Since the opposite operation is performed in the reverse order for the above operation, the description is omitted. The probe card transfer device is mainly used to supply a new probe card. In place of an existing probe card, the sacc is provided in the probe. 4, in the same manner as shown in the card transfer device. As described above, in the probe card transfer device according to the present invention, one The transfer and replacement of the large diameter and heavy probe card can be performed easily and safely. Furthermore, the probe card transfer device according to the present invention can include each of the 23 1354103 and can be supplied by a type The probe card is replaced. Needle carding reduces the replacement of the probe test set, thus improving productivity and biosynthesis, due to the above advantages, the time-consuming productivity of the probe card used in the preparation. In the line, "etc"::To one...is installed
更寬廣…：係進-步增加時，- 工間係而要的，以致該工作者係難以 替換該探❹㈣設備巾所使料探針卡。 然而，於本發明之探針卡轉移設備中，其係不需要由 接^探針測試設備的—料件之側表面的位置施二= 針卡之㈣’且能夠在該作業線上的-寬廣之中心通道中 使用該支臂單元執行探針卡之替換。據此 = 業線的重新配置所招致之成本，其可歸因於探針卡= 的直徑。 1卜〈增加Wider...: When the step is increased, the work is so important that the worker is difficult to replace the probe card of the probe (4) equipment towel. However, in the probe card transfer device of the present invention, it is not required to be placed by the position of the side surface of the material of the probe test device, and the needle card can be used to be wide on the line. The arm unit is used in the center channel to perform replacement of the probe card. According to this = the cost incurred by the reconfiguration of the line, which can be attributed to the diameter of the probe card =. 1 卜
雖然為說明之目的已揭示 熟諳此技藝者應了解各種修改 不會由本發明之範圍及精神脫 中所揭示者。 本發明之較佳實施例，那些 、增加及取代係可能的，而 離，如在所附申請專利範圍 【圖式簡單說明】 本發明之上面及其他目的、特色與優點由以 敘述會同所附圖式被更清楚地了解，其中： 孑細 圖1係根據本發明之探針卡轉移設備的-立體圖； 24It is to be understood that those skilled in the art will appreciate that various modifications may be made without departing from the scope and spirit of the invention. The above and other objects, features and advantages of the present invention are set forth in the description of the preferred embodiments of the invention. The drawings are more clearly understood, wherein: Figure 1 is a perspective view of a probe card transfer device in accordance with the present invention;
圖2係根據本發明之探針卡 圖3係一取自沿著圖2中 轉移設備的一平面圖；Figure 2 is a probe card in accordance with the present invention. Figure 3 is a plan view taken from the transfer apparatus of Figure 2;
圖，顯示根據本發明之探 _不之°】面線AA的剖面 4 . ^ ^ 针卡轉移設備的支臂單元； 圖4係根據本發明之 件之立體圖； 卡轉移設備的探針卡固持部 圖5係一取自沿著圖4中 圖； 厅員不之剖面線A’-A'的剖面 圖6係一取自沿著圖2中 圖； 顯示之剖面線B-B的剖面 圖7係一取自沿著圖2中 圖；及 圖8係一視圖， 使用。 所顯示之剖面線C-C的剖面 顯示根據本發明 之探針卡轉移設備的Figure 4 is a cross-sectional view of the needle line transfer device according to the present invention. Figure 4 is a perspective view of the member according to the present invention; the probe card holder of the card transfer device is held. Figure 5 is taken from Figure 4; section 6 of the section line A'-A' is taken from Figure 2; One is taken from the figure in Figure 2; and Figure 8 is a view, used. The cross section of the hatching C-C shown shows the probe card transfer apparatus according to the present invention.
【主 要元件符號說明】 100 探針卡固持單 110 負載感測單元 111 空氣入口 112 空氣路徑 113 阻斷構件 114 空氣出口 120 撿出器部件 130 旋轉式部件 140 減震部件 25 1354103[Explanation of main component symbols] 100 Probe card holder 110 Load sensing unit 111 Air inlet 112 Air path 113 Blocking member 114 Air outlet 120 Extractor unit 130 Rotary part 140 Vibration absorbing part 25 1354103
200 支臂單元 250 固定部件 251 凹部 252 嚙合部件 260 固定開關 300 上升與下降軸桿 400 負載支撐單元 410 上升與下降本體 420 支撐驅動部件 421 汽缸 422 輔助汽缸 423 升高開關 424 連接構件 430 導引部件 43 1 導引塊件 432 導執 500 探針卡容置單元 510 探針卡架台 511 安置孔洞 512 把手 520 滑動部件 521 導引機架 521a 第一導引機架 521b 第二導引機架 26 1354103 521c 第三導引機架 522 滾珠扣件 522a 第一滾珠扣件 522b 第二滾珠扣件 523 滾珠 PC 探針卡200 arm unit 250 fixing member 251 recess 252 engaging member 260 fixed switch 300 ascending and descending shaft 400 load supporting unit 410 ascending and descending body 420 supporting driving member 421 cylinder 422 auxiliary cylinder 423 raising switch 424 connecting member 430 guiding member 43 1 Guide block 432 Guide 500 Probe card accommodating unit 510 Probe card holder 511 Placement hole 512 Handle 520 Slide member 521 Guide frame 521a First guide frame 521b Second guide frame 26 1354103 521c third guide frame 522 ball fastener 522a first ball fastener 522b second ball fastener 523 ball PC probe card
2727
Claims (1)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020060134679A KR100833285B1 (en) | 2006-12-27 | 2006-12-27 | Carrying apparatus for probe card |
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| Publication Number | Publication Date |
|---|---|
| TW200834080A TW200834080A (en) | 2008-08-16 |
| TWI354103B true TWI354103B (en) | 2011-12-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW96149660A TWI354103B (en) | 2006-12-27 | 2007-12-24 | Probe card transfer apparatus |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR100833285B1 (en) |
| TW (1) | TWI354103B (en) |
| WO (1) | WO2008078886A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20130044484A (en) * | 2011-10-24 | 2013-05-03 | 삼성전자주식회사 | Carriage for handling probe card |
| KR102335827B1 (en) | 2014-12-24 | 2021-12-08 | 삼성전자주식회사 | apparatus for loading a prove card and system for managing the prove card with the unit |
| CN106873195B (en) * | 2015-12-11 | 2020-10-30 | De&T株式会社 | Probe unit replacing device |
| CN108493124B (en) * | 2018-05-16 | 2024-07-12 | 深圳市杰普特光电股份有限公司 | Automatic wafer test machine |
| KR20240025960A (en) | 2022-08-19 | 2024-02-27 | (주)고성엔지니어링 | Heavy-duty probe card transfer and loading device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0831518B2 (en) | 1987-04-21 | 1996-03-27 | 東京エレクトロン株式会社 | Probe card holding and conveying device |
| JP3215475B2 (en) * | 1991-12-20 | 2001-10-09 | 東京エレクトロン株式会社 | Probe device |
| JP3273706B2 (en) * | 1994-11-02 | 2002-04-15 | 東京エレクトロン株式会社 | Probe device |
| JP4798595B2 (en) * | 2001-08-07 | 2011-10-19 | 東京エレクトロン株式会社 | Probe card transfer device and probe card transfer method |
| JP4391744B2 (en) | 2002-12-27 | 2009-12-24 | 東京エレクトロン株式会社 | Mobile probe card transport device, probe device, and probe card transport method to probe device |
-
2006
- 2006-12-27 KR KR1020060134679A patent/KR100833285B1/en active IP Right Grant
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2007
- 2007-12-11 WO PCT/KR2007/006436 patent/WO2008078886A1/en active Application Filing
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| Publication number | Publication date |
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| TW200834080A (en) | 2008-08-16 |
| KR100833285B1 (en) | 2008-05-28 |
| WO2008078886A1 (en) | 2008-07-03 |
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