1352200 九、發明說明： 2°U年6月23曰修正替換頁 【發明所屬之技術領域】 本發明係有關於-觀針座的輔崎解裝置 作完成的探針座自其治具中拆解而出，且不易傷害製作完成的探針=輔助將製 【先前技術】 請參考第Μ圖，探針座9丨是晶圓測試時所使用的探針 的關鍵組件，具有數量相多的探針92容設其中，且探針92的針㈣彼= 祕列且轉狀則、間距。探針麵傳 ^ 與孔距瞻物__、物卜_她:=== 照探針座的設計將探層-層 盍而形成，最後黏上陶究片而製作完成，其中探針的針尖921 ^ 針座91的申間靠近探針座91底部 ’、 ''朱 91概人日，仏 _丨哺置明參考第犯圖，製作完成的探針座 治具94，鱗必_操作員紅具95(例如：尖錐 或^打方式探針座91與治具94的接合邊，慢慢將探針座Μ與治且如分離。 治具94係以糊離的方式分開，剝離邊受力之後相較於黏 ㈣餘於=側向力，如果操作員的操作略有不慎，㈣造成探針座91滑 猶尖921嫩、额她產遲、甚至毀損， 而使探針㈣贿，酬_ 91 _耗_，减_提升。 【發明内容】 穿置i用述先則技術不盡理想之處，本發明提出一種探針座的輔助拆解 解裝置包含-底座、_垂直移自二具中拆解而出。此探針座的輔助拆 置垂直移能Μ 4取放頭及—治具。其令底座向上延伸設 置垂直移動機構’垂直移動機構上再設置取放頭而利用此取放頭可暫時地接合 5 1352200 2〇11年6月23日修正替換頁 探針座的頂部。探針座製作所需的治具特別設計成兩片式，一為上板、一為下 板，上板與下板可視狀況使其分離或結合，而治具(主要為下板)可被拆卸及定位 於底座。上述探針座的輔助拆解裝置的使用方式為，先將形成有探針座之成品 之治具定位於底座上(探針座在治具上的製作方式請參考前述之【先前技術】）， 之後操作垂直移動機構使取放頭接觸到探針座之頂部，藉由取放頭上預先設置 的黏膠或類似物質，可使取放頭暫時性地接合於探針座頂部。由於治具的下板 定位於底座’而麟錄合於治具的上板，此時制上板與下板的結合元件(例 如.螺絲）’再繼續操作垂直移動機構使取放頭、探針座與上板同時上升，此時 探針座連同上板便與下板脫離，而懸於半空巾。由於探針座與取朗的暫時性 接。力大於探針座與治具上板的接合力，藉由操作貞使料當卫具及溶劑配合 在下敲上板的上方，便可輕易地將上板以垂直方向朝下與探針座分離。因為分 離過程中’探針座與治具上板之間沒有相對的側向滑移，因此相較於先前技術 而言，不易影響到探針座的針尖排列與針尖間距等。之後再由操作員從取放頭 β、垂直方向朝下取下探針座即可，如此便不錢害製作完成的探針座，尤其 疋探針座的針尖部分，耻可輯聽針絲作時所設定的探冊準位置/、 緣此’本發明之主要目的在提供一種探針座的辅助 完成Γ針座自其治具中拆解而出，因此不易傷害製作完成的探針座 發明υ目的在提供—麵針座的獅轉裝置 作完成的探針賴治具分離，《傷絲作完成_座。 製 本發明之再一目的在提供一種治且， 於製作完_ w座自〃有了”離之上域下板，可利 自〜、中雜Μ ’且不絲雜作完 實施方式】 6 1352200 未亦不4域實際尺寸完整繪製，纽綱。 〜 先月參考第1Α圖及第1Β圖，係本發明提出之第—較 ，針座的__丨，__作完摘探針=中= π ,!Γ1 11' α 申取放頭112設置於垂直移動機構111、及一户罝12 & /1352200 IX. INSTRUCTIONS: 2 U 6 6 6 6 6 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 探针 探针 探针Solved and not easy to damage the finished probe = auxiliary system [prior art] Please refer to the figure, probe holder 9丨 is the key component of the probe used in wafer testing, with a large number of The probes 92 are accommodated therein, and the needles (four) of the probes 92 are in the order of the keys and are rotated and spaced. The surface of the probe is transmitted with the hole and the distance from the object __, material _ she: === according to the design of the probe base, the probe layer is layered and formed, and finally the ceramic tile is glued and finished. Needle tip 921 ^ The seat of the needle seat 91 is close to the bottom of the probe base 91, ''Zhu 91's person's day, 仏 _ 丨 丨 参考 参考 参考 参考 第 , , , , , , , , , 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针The red member 95 (for example, the joint edge of the probe or the probe holder 91 and the jig 94 is slowly separated from the probe holder and separated. The jig 94 is separated by peeling off, peeling off After the force is applied, compared with the viscosity (4) remaining in the lateral force, if the operator's operation is slightly careless, (4) causing the probe base 91 to slide sharply, the 921 is tender, the amount is delayed, or even damaged, and the probe is made. (4) Bribe, remuneration _ 91 _ consumption _, minus _ promotion. [Summary of the invention] The use of the first technique is not ideal. The present invention proposes an auxiliary disassembly device for the probe holder including the base, _ The vertical shift is disassembled from the two. The auxiliary disassembly of the probe base is vertical displacement energy Μ 4 pick-up head and jig. The base is extended upward to set the vertical movement mechanism 'vertical movement machine The pick-and-place head is configured to temporarily engage the 5 1352200. The top of the replacement page probe holder is fixed on June 23, 2011. The fixture required for the probe base is specially designed into two pieces. The upper plate and the lower plate are separated or combined according to the visual condition, and the jig (mainly the lower plate) can be disassembled and positioned on the base. The auxiliary disassembly of the probe base The device is used by first positioning the jig of the finished product forming the probe base on the base (refer to the aforementioned [previous technique] for the preparation method of the probe base on the jig), and then operating the vertical moving mechanism to take the device. The head contacts the top of the probe holder, and the pick-and-place head temporarily engages the top of the probe holder by picking up a pre-set glue or the like on the head. Since the lower plate of the jig is positioned on the base Lin recorded in the upper plate of the fixture. At this time, the combined components of the upper and lower plates (for example, screws) are made. Then, the vertical movement mechanism is continued to raise the pick-and-place head, the probe base and the upper plate simultaneously, and the probe is raised at this time. The seat, together with the upper plate, is separated from the lower plate and suspended in the semi-empty towel. The probe base is temporarily connected to the ridge. The force is greater than the engagement force between the probe holder and the upper plate of the jig, and the squeegee and the solvent are matched to the upper part of the upper plate to be easily placed. The plate is separated from the probe holder downward in the vertical direction. Since there is no relative lateral slip between the probe holder and the upper plate of the jig during the separation process, it is not easy to affect the probe holder compared to the prior art. The tip of the needle is arranged at a distance from the tip of the needle, etc. After that, the operator can remove the probe holder from the pick-up head β and the vertical direction downward, so that the probe holder is not damaged, especially the tip of the probe holder. In part, the target position of the probe set by the needle thread is made, and the main purpose of the present invention is to provide a probe holder for assisting the completion of the needle holder to be disassembled from the fixture, so It is not easy to damage the finished probe holder. The purpose of the invention is to provide a probe for the completion of the probe-turning device. A further object of the present invention is to provide a treatment, and after the production of the _ w seat, there is a "off-field" plate, which can be derived from ~, Zhongchao 'and does not complete the implementation method] 6 1352200 The actual size of the 4 domain is completely drawn, and the outline is omitted. ~ The first month refers to the first map and the first map, which is the first of the present invention, the __丨, __ of the needle holder is finished with the probe = medium = π , ! Γ 1 11' α The application head 112 is disposed in the vertical movement mechanism 111, and a household 罝 12 & /
可預先綱__蝴，難2 ，2 == 圖），藉由黏膠與陶究片·舰w 瓦乃iU參考第IB 2的頂部。^2ΤΓΓ 可以使取放頭112暫時性地接合於探針座 的頂U12可被拆却及定位於底座n上，具有可互相組配與 _T 122 ’更進—步地，治具12僅以下板122而定位或被拆卸於底座11 ^ W 2 12 ^w 22 ^23 曰⑼並堆豐覆盍，最後再黏上陶曼片21而製作完成。上板m =-開槽12U，是為了在上板121與下板122結合時，可容許下板⑵中央^ 之矩形凸緣1221露出，請繼續參考第1B圖，其中矩形 的 形凸緣1221為較佳。 1以中空的矩 上述探針座的辅助拆解裝置1的使用方式為·· 首先將治具12的上板121與下板122組配在一起，使其 絲與螺孔、或是定位銷）； 哪j如以螺 在治具12製作探針座2，使其形成為成品； 將形成有探針座2成品的治具12定位於底座u上； «直移動機構⑴的取放頭112預錄抹適#_膠或類似物質； 操作垂直移動機構⑴使喊頭112下降而_職雌2畔 放頭112與探針座2頂部暫時性地接合； 將治具12的上板121與下板122鬆開，使上板121為自由狀離. 直移動機構lu使取放頭112上升至適當高度，俾崎、時性地接合 木十丄-冋上升’由於探針座2係於上板121上製作而成，因此探針座2 7 1352200 又帶動上㈣卜起上升，使上板121與下板122脫離；2011年响曰修正替換頁 =㈣適當卫具往下敲打上板121的上方，便可輕純將 直方向朝下與探針座2分離； 板121以垂 操作員再從取放頭112上以垂直方向朝下取下探針座2 與治具12的分離。 丨疋成探針座2 ^本㈣所提出棚__繼置丨，探雌2 ==實::向觸響雌針座2的針尖她置與針尖間距 上述之底座U進-步可以設置—水平基準面(未圖示），t η上時可以槪徹板_。底 ⑴，並且進-步包含第—螺桿機構n31細調縣具i2的夾持寬度，再進一 步可以包含第-導柱裝置1132以提供直線運_導5丨，進而方便難治具η 的失持寬度’此第-導減置U32亦可以視需要改換騎度更高的滑軌裝置。 底座u進-步可以設有第二水平夾持機構114，其方向與第—水平夾持機構⑴ 互為垂直’並且進-步包含第二螺桿機構U41藉_整治具I〗的夾持寬度， 再進-步可以包含第二導柱裝置1142以提供直線運動的導引進而方便調整户 具^的另-個方向的夾持寬度’此第二導柱裝置u42亦可以視需要改換躺 度更南的滑軌裝置1際操作時，#治具12置於底座u上時可先利用第一 水平夾持機構113將治具12之二邊寬度先行定位驢，之後再彻第二水平夹 持機構114將治具12剩餘二邊之宽度再行定位調整，藉此正確定位於底座“ l· 〇 上述之垂直移動機構U1進一步設置有一垂直螺桿機構nn，利用垂直螺 桿機構1111以調整取朗112的垂直位置。同樣地，垂直移動機構ηι亦可以 進-步包含《導域置1112或滑解裝置，藉以提供直線運動的導引，以利 其垂直方向之移動。 1352200 2011年6月23日修正替換頁 上述之上板121與下板122的結合可以多侧絲1212配合通孔1214、螺孔 1213為之。-般而言，以通孔1214設置於上板121、螺孔i2i3設置於下板a] 為較佳亦可視狀，兄改換為其他配置模式。同時，進一步亦可以設置定位銷裝 置以提1¾上板121與下板122的結合與定位精度精度’其中定位舰置主要包 含至少-織置於下板122物_ 1222麟應設置於上板121的定位孔(未圖 不）。當然，亦可將定位銷！222言史置於上板121，與對應設置於上板i2i的定位 孔(未圖示)設置於下板，此僅為均等的置換。 本發明進-步提供第二較佳實細，請繼續參考第ΐβ圖，為—種治呈I]， 用於探針座之製作，可利於製作完成的探針座自治具帽解而出，且不易傷害 製作完成的探針座。^具丨2包括有上板121與下板122，其特徵如前述之二 較佳實施例中所揭露者。 以上所述僅為本發明之較佳實施例，並非用以限定本發明之權利範圍 的描述，對於熟知本技術領域之專門人士應可明瞭及實施，因此其他未 Z本發騎揭示之精神τ所完成_改變或修飾，均應包含在巾請專 【圖式簡單說明】 第1Α圖為一立體圖，係根據本發明提 一从― 的輔助拆解裝置。 版出之第—較佳貫施例，為-種探針座 =1B圖為-示賴，雜據本發明提出之治具及其配合之探針座。 第2A圖為-示意圖，係探針卡結構的先前技術。 第2B圖為一示意圖，探針座與其治具的先前技術。 9 【主要元件符號說明】 探針卡(先前技術） 探針座(先前技術） 91 9 1352200 2011年6月23日修正替換頁 探針(先前技術） 92 探針的針尖(先前技術） 921 治具(先前技術） 94 工具(先前技術） 95 探針座的輔助拆解裝置 1 底座 11 垂直移動機構 111 垂直螺桿機構 1111 垂直導柱裝置 1112 取放頭 112 第一水平夾持機構 113 第一螺桿機構 1131 第一導柱裝置 1132 第二水平夾持機構 114 第二螺桿機構 1141 第二導柱裝置 1142 治具 12 上板 121 開槽 1211 螺絲 1212 螺孔 1213 通孔 1214 下板 122 矩形凸緣 1221 定位銷 1222 探針座 2 1352200 2011年6月23日修正替換頁 陶瓷片 21 探針 22 聚酯薄膜 23 11Can be pre-class __ butterfly, difficult 2, 2 == picture), with the glue and the pottery film · ship w wa is iU reference to the top of the IB 2 . ^2ΤΓΓ The top U12 of the probe head 112 that can be temporarily engaged with the probe head can be disassembled and positioned on the base n, and can be combined with the _T 122 ', and the fixture 12 is only The lower plate 122 is positioned or detached from the base 11 ^ W 2 12 ^ w 22 ^ 23 曰 (9) and stacked, and finally the Tauman sheet 21 is adhered and finished. The upper plate m=-slot 12U is for allowing the rectangular flange 1221 of the center plate of the lower plate (2) to be exposed when the upper plate 121 is combined with the lower plate 122. Please refer to FIG. 1B for a rectangular shaped flange 1221. It is better. 1 The hollow mold is used in the manner in which the auxiliary disassembly device 1 of the probe holder is used. First, the upper plate 121 and the lower plate 122 of the jig 12 are assembled together to form a wire and a screw hole or a positioning pin. Where the j is made into the probe holder 2 in the jig 12 to form the finished product; the jig 12 on which the finished probe holder 2 is formed is positioned on the base u; the pick-and-place head of the direct moving mechanism (1) 112 pre-recording the #_胶 or the like; operating the vertical moving mechanism (1) to lower the shouting head 112 while the female 2-side head 112 temporarily engages the top of the probe holder 2; the upper plate 121 of the jig 12 The lower plate 122 is loosened, so that the upper plate 121 is freely separated. The straight moving mechanism lu raises the pick-and-place head 112 to an appropriate height, and the sakizaki and the time-joining joints of the wood 丄-冋 rises due to the probe base 2 It is made on the upper plate 121, so the probe base 2 7 1352200 drives the upper (four) to rise, so that the upper plate 121 and the lower plate 122 are separated; in 2011, the ring replacement correction page = (4) the appropriate guard hits down Above the plate 121, it can be separated from the probe base 2 in a straight direction downward; the plate 121 is vertically moved from the pick-and-place head 112 in a vertical direction. The separation of the probe holder 2 from the jig 12 is removed.丨疋成探针座2 ^本(四)Proposed shed__Continued 丨, 探女2 == Real:: To the tip of the female needle seat 2, the distance between the needle tip and the tip of the needle is the above-mentioned base U-step can be set - Horizontal datum (not shown), t η can be used to slap the board _. The bottom (1), and the step-by-step mechanism includes a first screw mechanism n31 to fine-tune the clamping width of the county appliance i2, and further may include a first-column guide device 1132 to provide a linear motion guide 5丨, thereby facilitating the loss of the refractory fixture η The width 'this first-guided reduction U32 can also be changed to a higher riding rail device as needed. The base u-step may be provided with a second horizontal clamping mechanism 114, the direction of which is perpendicular to the first horizontal clamping mechanism (1) and the advancement step includes the clamping width of the second screw mechanism U41. The second step device may include a second pillar device 1142 to provide guidance for linear motion to facilitate adjustment of the clamping width of the other direction of the household appliance. The second pillar device u42 may also be modified as needed. When the south rail assembly 1 is operated, when the jig 12 is placed on the base u, the width of the two sides of the jig 12 can be first positioned by the first horizontal clamping mechanism 113, and then the second horizontal clamp is used. The holding mechanism 114 repositions and adjusts the widths of the remaining two sides of the jig 12, thereby determining that the vertical moving mechanism U1 is further disposed with a vertical screw mechanism nn, and the vertical screw mechanism 1111 is used to adjust the positioning. The vertical position of 112. Similarly, the vertical movement mechanism ηι can further include a guide field 1112 or a slip device to provide a guide for linear motion to facilitate its vertical movement. 1352200 June 23, 2011 Day correction on replacement page The combination of the upper plate 121 and the lower plate 122 may be such that the multi-side wire 1212 is matched with the through hole 1214 and the screw hole 1213. Generally, the through hole 1214 is disposed on the upper plate 121, and the screw hole i2i3 is disposed on the lower plate a. ] For better and visual, the brother is changed to other configuration modes. At the same time, the positioning pin device can be further provided to improve the combination of the upper plate 121 and the lower plate 122 and the accuracy of the positioning accuracy. The positioning ship mainly includes at least a weave. Placed on the lower plate 122 _ 1222 lin should be placed on the positioning hole of the upper plate 121 (not shown). Of course, the positioning pin! 222 history can also be placed on the upper plate 121, and correspondingly positioned on the upper plate i2i The hole (not shown) is disposed on the lower plate, which is only an equivalent replacement. The present invention further provides a second preferred embodiment. Please continue to refer to the ΐβ map for the treatment of I] for the probe. The production of the seat can facilitate the production of the probe seat autonomous device cap, and it is not easy to damage the finished probe base. The tool 2 includes an upper plate 121 and a lower plate 122, and the features are as described above. The above description is only the preferred embodiment of the present invention, and is not intended to limit the present invention. The description of the scope of the rights of the present invention should be clarified and implemented by those skilled in the art, and therefore the other spirits that are not disclosed in the present invention should be included in the towel. The first diagram is a perspective view, which is an auxiliary disassembly device according to the present invention. The first-preferred embodiment of the version is a probe holder=1B picture--------- The present invention provides a jig and a probe base for the same. Fig. 2A is a schematic view showing the prior art of the probe card structure. Fig. 2B is a schematic view showing the prior art of the probe holder and its jig. Explanation of Symbols] Probe Card (Prior Art) Probe Holder (Prior Art) 91 9 1352200 Modified Replacement Page Probe on June 23, 2011 (Prior Art) 92 Tip of Probe (Prior Art) 921 Fixture (Prior Art 94 Tools (Prior Art) 95 Auxiliary Disassembly Device for Probe Holder 1 Base 11 Vertical Shift Mechanism 111 Vertical Screw Mechanism 1111 Vertical Guide Post Device 1112 Pickup Head 112 First Horizontal Clamping Mechanism 113 First Screw Mechanism 1131 First Guide post device 1132 Second horizontal clamping mechanism 114 Second screw mechanism 1141 Second guide post device 1142 Fixture 12 Upper plate 121 Slot 1211 Screw 1212 Screw hole 1213 Through hole 1214 Lower plate 122 Rectangular flange 1221 Locating pin 1222 Needle holder 2 1352200 Modified on June 23, 2011 Replacement page ceramic sheet 21 Probe 22 Polyester film 23 11