TWI351690B

TWI351690B - Magnetic recording medium and magnetic recording a

Info

Publication number: TWI351690B
Application number: TW95148538A
Authority: TW
Inventors: Kenji Shimizu
Original assignee: Showa Denko Kk
Priority date: 2005-12-26
Filing date: 2006-12-22
Publication date: 2011-11-01
Also published as: CN101258542B; JP4101836B2; JP2007172783A; TW200809805A; CN101258542A

Description

1351690, 九、發明說明：【發明所屬之技術領域】本發明係關於一種磁性記錄媒體及使用此種媒體之磁性記錄再生裝置。 ° 【先前技術】在習知技術中，垂直磁性記錄方式通常是將朝向媒體的平面方向之磁性記錄層的易於磁化轴（easy axis of magnetization)，朝1351690, IX. Description of the Invention: The present invention relates to a magnetic recording medium and a magnetic recording and reproducing apparatus using the same. [Prior Art] In the prior art, the perpendicular magnetic recording method is generally an easy axis of magnetization of a magnetic recording layer in a planar direction toward the medium.

向媒體的垂直方向。而藉由這種方式，可使作為記錄間隔❻丨化間的邊界之磁性變遷區域附近的反磁場減小。因此，如果記錄密度愈高的話，靜磁性(magnetostatic)亦愈趨穩定，並提昇熱起‘伏 (Heat fluctuation)的特性，因此是一種適合於提高面記錄密^ 式。又另外，當在基板與垂直磁性記錄膜之間，設置有由軟磁性料所構成的襯裡層時’可作為所謂_直雙層媒體而發揮功能，而獲得較高的記錄能力。此時，軟磁性襯裡層具備使來自磁 5己錄磁場回流的功效，因此可提升記錄再生的效率。 -般而言，要形成該襯裡層的軟磁性材料用^紙CoT收FeCoB等的非晶形材料。例== ,參'專利文件U，以及&梅、FeTaN (請參昭專 Λ’ ?"該襯裡層上所設置的底層膜而言，則ί ^材枓被㈣出來，如，Ti合金（請參照專利 I^FeCr (請參照專利文件4)等，可採用者是Ta等非晶形構造。 P偁k^fee構&，或合全舍了裡層的材料時，與使用CoFe 尤S為C。或Fe雜的問題。另外，如果在底福無磁㈣料的話，因駐層膜的厚 I351690 * 在本實施型態中，就玻璃基板而言，可使用非晶形玻璃、結晶化玻璃。而就非晶形玻璃而言，可使用泛用的鈉鈣玻璃（s〇da lime glass)、铭石夕酸玻璃（aluminum silicate glass)。另外，就結晶化玻璃而言’可使用鐘系列的結晶化玻璃。非磁性基板1其平均表面粗縫度Ra在〇.8nm以下，較佳的情況為0.5 nm以下。並藉由提高中間膜與垂直磁性記錄膜的結晶定向的方式，可提升記錄再生特性，同時，也適合於較佳的方式係使磁頭低懸浮的高紀錄密度記錄。另外，更佳的方式係表面的微小起伏(Wa)在0.3nm以下（更佳在0.25 nm以下），則更適合於佶磁頭低懸浮的高紀錄密度記錄。、就襯裡層a而言，係由兩層的軟磁性膜與形成於兩層的軟磁生膜之間的Ru所構成，而ru的上下軟磁性膜係以Ape结合。蕤由此種構成的方式，可提高對於來自外部磁場的耐力；^提; 對垂^磁性記錄特有的問題，也就是WATE現象的耐力。人*2、4係由CGA1合金構成，更佳的情況是CoFeAl Γ4ί 1其飽和磁束密度別在…以上，更佳的情況是在齡古1 藉由使耻等之材料，可獲得較高的飽和磁束密度與To the vertical direction of the media. In this way, the diamagnetic field in the vicinity of the magnetic transition region which is the boundary between the recording interval turns can be reduced. Therefore, if the recording density is higher, the magnetostatic becomes more stable and enhances the heat fluctuation characteristics, so it is suitable for improving the surface recording density. Further, when a backing layer made of a soft magnetic material is provided between the substrate and the perpendicular magnetic recording film, it can function as a so-called straight double layer medium, and a high recording capability can be obtained. At this time, the soft magnetic backing layer has the effect of recirculating the magnetic field from the magnetic recording, thereby improving the efficiency of recording and reproduction. In general, a soft magnetic material for forming the backing layer is made of an amorphous material such as FeCoB by a paper CoT. Example ==, refer to the 'patent document U, and & Mei, FeTaN (please refer to the special layer '?" the underlying film set on the lining layer, then ί ^ 枓枓 (4), such as, Ti Alloy (please refer to the patent I^FeCr (please refer to Patent Document 4), etc., and the amorphous structure such as Ta can be used. P偁k^fee structure & or when the material of the inner layer is used together, and CoFe is used. In particular, if there is no magnetic (four) material in the bottom, the thickness of the interlayer film I351690 * In the present embodiment, in the case of the glass substrate, amorphous glass, Crystallized glass. For amorphous glass, s〇da lime glass and aluminum silicate glass can be used. In addition, in the case of crystallized glass, it can be used. The crystallized glass of the clock series. The non-magnetic substrate 1 has an average surface roughness Ra of not more than 8 nm, preferably 0.5 nm or less, and by increasing the crystal orientation of the intermediate film and the perpendicular magnetic recording film, It can improve the recording and reproducing characteristics, and at the same time, it is also suitable for the better way to make the head low suspension. Recording with high record density. In addition, the better way is that the surface has a slight undulation (Wa) below 0.3 nm (more preferably below 0.25 nm), which is more suitable for high-density recording of low-suspension of the 佶 head. a is composed of two layers of a soft magnetic film and a soft magnetic film formed between the two layers, and the upper and lower soft magnetic films of ru are bonded by Ape. For the endurance from the external magnetic field; ^ mention; the unique problem of the magnetic recording, that is, the endurance of the WATE phenomenon. The person *2, 4 is composed of CGA1 alloy, and more preferably the CoFeAl Γ4ί 1 its saturation magnetic flux density More preferably, in the case of Ageing 1 , a higher saturation magnetic flux density can be obtained by making materials such as shame.

底層膜5使用Ni、Ni合金、NiFe合金或Nic〇金時可獲侍優異的記錄再生特性。 4添加A1的方式，可顯著地提昇 --02 ^ 春θ又1㈣雜G.3原子上，5原子％以下）。原子％時,無法充分地抑制的則因為放M 相對地’當A1的添加量超過7原子％時，為圯錄再生的特性會惡化，因此办、Nb Zr之中体立i㈣，兄疋在⑽或CoFeA1中，再添加促進軟磁ί膜2 以上的元素。藉由此等元素的添加，可猎由此種元素的添加，亦备接 # W汁耐腐蝕性。另外， 7Γ曰&幵底層膜5及中間層6對於軟磁性 9 膜4的結晶定向性。的添加量而言，較佳的情況係在5原子％以上， 14 Γ子01下。备此等元素的添加量不足5原子％時，因為教磁從Ξ 21ίίί晶構造’因此底層膜5的結晶顆粒粒徑亦會變大實施型。另？=加與耐腐蝕性減低的問題，因此非屬良好的是所六二1 ί 從飽和磁束密度的觀點來看，較佳的情况的總量為15原子％ (更佳的情況是12原 ’者’職為了改善膜的腐錄而添加的，較佳的产，遺著添加量的增加，雖然耐態和磁束密度亦會隨之降低’因此非屬良好的 % 4的1^的含量而言，較佳的情況係在50原子原子％以上⑼原子％以下）。而當Fe 以2 時，因為耐梅會惡化，因此非屬良好的 i审爲此H見裡層a的厚度較佳為2〇nm以上8〇nm以下。如果襯導^入’即無法充分吸收來自磁頭的磁束，而 ί致另'一錄再生特性惡化，因此非屬良好的實施型 :韶方面如果襯裡層&的厚度超過8〇11111時，由於生產效率日”、、員者降低，因此亦非良好的實施型態。丨性獏2、4的材料而^，如使用C〇FeA1ZrNb、可以^古底屏 i=1TaNb、coFeA1ZrNbNi 的話， Κί二 1=:性’而底層膜5於其表層係使用了設置卩可兼顧良_記錄再生特性與生產效率。因為it ΐΐ2、4而言，較佳的情況是採用非晶形構造。ί是頭的i浮ί，增大，可減少磁里更進封翻㊅靖密度化。另外，如果採取結丄 351690 晶，造的話，則由於會形成結晶與結晶的粒子的粒界部分正是造成腐餘原因的原因之―，因此非屬良好的實施型態。，、 Hbias係指構成襯裡層a的兩層軟磁性膜2、4之結人大小之指標，較佳的情況為50 Oe以上。 Ή 口、以下即以圖2說明關於Hbias。2係顯示襯裡層a的基柄平 :成分(形，裡層a的軟磁性膜2、4之易於磁:軸 1 ^圈。右將飽和磁束密度設為Ms，則飽和磁束密度之一 ’ ^就是Ms/2的磁場，即被定義為删批。使用上述材料作敕磁性膜2、4，·由將設置在兩層的軟磁性膜2、4之間的 ΐ磁性中間膜3的厚度設為特定的厚度（0.6〜0.8mn)的方式，可 :到m裡層a。藉由此種方式，亦可提高外磁場雜抗力與wate 的抵抗力。軟磁性膜2、4的矯頑磁力He較佳的情況係在10〇e以下（更佳為50e以下）。另外，lOOe約為79A/m。 >就採用該結構的軟磁性膜2、4的形成方法來說，舉例而言，可採用濺概(Sputtering)。在形成襯裡層a的時候，較佳 ^ ^基板的半徑方向，以給予磁場的狀態下成膜。底: ^制設置於其上的垂直磁性記細7的定向與結晶大小。底層膜5 車乂佳的情況係使用Ni、Ni合金、NiFe合金或NiCo合金。於該底層膜5的Ni、Ni合金、NiFe合金或Nic〇合金中，為了減低結晶的大小’以及提高與中間層6的晶格（〇ystallattice) ^小的整合性兩個目的’可添加其他元素。例如，在減低結晶的大小的目的下’可添加Β、Μη等，添加量在6 (原子％)以下較佳。而如果以提高與中間層6的晶格大小的整合性為目的，可添加 Ru、Pt、W、Mo、Ta、Nb、Ti 等。作為底層膜5的Ni、Ni合金、NiFe合金或NiCo合金之飽和，束密度Bs較佳在Ο.ΐτ以上，更佳的情況係在〇 3T以上。如果未滿0.1Τ的話，在寫入的時候作為襯裡層的一部分之功能就會減弱，因為會導致記錄再生特性的惡化，因此並非理想的型態。、就底制5的厚度而言，較佳的情況為膜厚在 lnm 以上 10nm 果即不#八：醜厚*滿lnm的話’則其作*底層膜的效因此並非二二Ϊ到粒徑微小化的效果，而且定向亦會惡化，另外，如果底層膜5的膜厚超過—的話，則結曰曰的大小會增大，亦非理想的型態。非磁性中間膜3較佳為Ru或Ru合金。巧性中間膜3較佳的情況為膜厚在16贈以下（更佳的 ίί = 二下)。軟磁性膜2、4可使用C〇A1合金或Co副 i薄的方a，^丨5 使用特^的材料。藉由使非磁性中間膜3 '.^縮小磁頭與襯裡層a之間的距離，可使來自磁頭方Λΐϊΐ記ϊ膜7中，其易於魏軸係相對於基板面呈垂直 ^向就構成70素而言，至少包含c〇與進-，善SNR的特性之目的，亦可添加Cr、B、更 Cr〇H^磁性記賴7的氧化物而言，包括Si〇2、Si0、〜:〇3體積υϋ〇2。較佳的情況為氧化物的體積率為15 特性會體的話，因為触姓:f 因此非屬良好的實施型態。而如果氧化物的的話’因為無法獲得能夠與高紀錄密度』的矯頑磁力，因此非屬良好的實施型態。心性記錄膜7的成核(nUCleati〇n)磁場（_Hn)較佳的情況，在ZOkOe以上。如果_Hn *滿2麟的話，則會產生^，因此非屬良好的實施型態。 …起伙 J J J磁性記錄膜7的厚度而言，較佳的情況係在6 。 ^ 記錄膜7作為例如氧化物粒狀（G刪1批)層的話，產+ 層如果在此祀圍的話，即可確保充分的輪出，不會產生0W特性的惡化，因此屬於良好的實施型態。 Η 此外，垂J:雜記賴7可以是單層構造，也可以是採用由 12 1351690 成分不同的材料所構成之兩層以上的構造以含ί氧化物的層與不含氧化物的層依序疊層而、情況係磁頭為了避免垂直磁性記錄膜的腐二及當膜的厚度在i聰以上i m二素的材料。由於使保護來看’亦二、離縮間，更設置-阻較佳的情況係在非磁性基板與襯裡層之 C〇. ^ ^ mm為基㈣齡糾㈣水分等而 ^致的;腐# 層作。而在將阻障二。j由將阻障層採用非晶形構造的;式' %疋之處，或是密度不同之部分，從而可u°卩刀不就本實施型態的磁性記錄媒體八几磁1板^ =具有襯裡層a、底層膜5、中間層6、與=== 垂直磁性記錄媒射，構成該襯裡層。己 ^，在UT以上之⑽合金所構成。== 或是船合金任—種材料所構成ΐ ;=输辦，㈣編⑽㈣再生= 一例之圖。在此所示的磁性記:再::以 10，使磁性記錄媒體10旋轉驅動之媒體驅動部13，·磁頭^，、用 13 1351690 以在磁性記錄媒體10使資訊記錄再生；磁頭驅動部15 ;以及記錄再生訊號處理系統16。如此，記錄再生訊號處理系統16即可用以處理被輸入的資料，並將記錄訊號傳送到磁頭14，並處理來自磁頭14的再生訊號，以輸出資料。【實施例】以下即顯示實施例，以使本發明之作用效果更為明確。但其具體之構成並不限定於本實施例，只要係不脫離本發明之要旨範圍内之設計變更均包含於本發明内。 (實施例1) 將玻璃基板（MYG公司製之非晶形基板MEL3，直徑2.5英When the underlying film 5 is made of Ni, a Ni alloy, a NiFe alloy or Nic sheet metal, excellent recording and reproducing characteristics are obtained. 4 Adding A1 can significantly improve --02 ^ spring θ and 1 (four) heterogeneous G.3 atomic, 5 atomic % or less). When the atomic % is not sufficiently suppressed, the release M is relatively "when the amount of A1 added exceeds 7 atomic %, the characteristics of the recording and reproduction are deteriorated. Therefore, the body Nb Zr is the body i (four), the brother (10) or CoFeA1, an element that promotes the soft magnetic film 2 or more is added. With the addition of such elements, the addition of such elements can be hunted, and the corrosion resistance of #W juice is also provided. Further, the crystal orientation of the soft magnetic 9 film 4 is 7 Å & 幵 underlayer film 5 and intermediate layer 6. In terms of the amount of addition, it is preferably at least 5 atom%, and 14 Γ子01. When the amount of addition of these elements is less than 5 atom%, since the magnetic structure is from Ξ21ίίί crystal structure, the crystal grain size of the underlying film 5 is also increased. another? = plus the problem of reduced corrosion resistance, so it is not good that it is 6.2 ί From the viewpoint of saturation magnetic flux density, the total amount of the preferred case is 15 atom% (more preferably 12 original ' In order to improve the film's corrosion record, the better production, the increase in the amount of the legacy, although the resistance and the magnetic flux density will also decrease, so it is not a good content of 4% In other words, it is preferably 50 atomic % or more (9) atomic % or less). When Fe is 2, since the resistance of the plum is deteriorated, the thickness of the inner layer a is preferably 2 〇 nm or more and 8 〇 nm or less. If the lining is incapable of absorbing the magnetic flux from the magnetic head, and the transcript is deteriorated, it is not a good implementation type: if the thickness of the lining layer & exceeds 8〇11111, "Production efficiency day", and the staff is reduced, so it is not a good implementation type. The material of the 貘2, 4, and ^, if using C〇FeA1ZrNb, can use the ancient screen i=1TaNb, coFeA1ZrNbNi, Κί二1 =: Sex' and the underlying film 5 is used in its surface layer to provide both _ record reproduction characteristics and production efficiency. Since it ΐΐ 2, 4, it is preferable to use an amorphous structure. i floats, increases, can reduce the magnetic density and further the density of the seal. In addition, if the knot is 351690 crystal, if it is made, the grain boundary part of the crystal and crystal will form the residue. The reason for the cause is therefore not a good implementation. Hbias refers to the size of the two-layer soft magnetic film 2, 4 constituting the backing layer a, preferably 50 Oe or more. Mouth, the following is illustrated in Figure 2 about Hbias The 2 series shows the base of the lining layer a: the composition (shape, the soft magnetic film 2, 4 of the inner layer a is easy to magnetic: the axis 1 ^ lap. The right saturation magnetic flux density is set to Ms, then one of the saturation magnetic flux densities' ^ is the magnetic field of Ms/2, which is defined as the deletion of the batch. The above materials are used as the magnetic film 2, 4, and the thickness of the neodymium intermediate film 3 to be disposed between the two layers of the soft magnetic films 2, 4. The specific thickness (0.6 to 0.8 mn) can be used to: m to the inner layer a. In this way, the external magnetic field resistance and the resistance of the wate can be improved. The soft magnetic films 2, 4 are coercive. The magnetic force He is preferably 10 Å or less (more preferably 50 Å or less). Further, 100 Å is about 79 A/m. > For the formation method of the soft magnetic films 2 and 4 having this structure, for example, In other words, Sputtering can be used. When the lining layer a is formed, it is preferable to form a film in a radial direction of the substrate in a state where a magnetic field is applied. Bottom: ^Vertical magnetic recording 7 set thereon Orientation and crystal size. The underlying film 5 is preferably Ni, Ni alloy, NiFe alloy or NiCo alloy. Ni and Ni of the underlying film 5 In the NiFe alloy or the Nic〇 alloy, other elements may be added in order to reduce the size of the crystal and to improve the integration with the crystal lattice of the intermediate layer 6. For example, in reducing the size of the crystal. For the purpose of adding Β, Μη, etc., the addition amount is preferably 6 or less, and if it is to improve the integration with the lattice size of the intermediate layer 6, Ru, Pt, W, Mo may be added. Ta, Nb, Ti, etc. As the saturation of Ni, Ni alloy, NiFe alloy or NiCo alloy of the underlayer film 5, the beam density Bs is preferably Ο.ΐτ or more, and more preferably 〇3T or more. If it is less than 0.1 ,, the function as a part of the lining layer at the time of writing is weakened, and the recording and reproducing characteristics are deteriorated, so that it is not an ideal type. In terms of the thickness of the bottom 5, it is preferable that the film thickness is 1 nm or more and 10 nm, that is, no #8: ugly thickness* full of 1 nm, then the effect of the underlying film is not the second to the particle size. The effect of miniaturization and the orientation are also deteriorated. Further, if the film thickness of the underlying film 5 exceeds - the size of the crucible will increase and it is not ideal. The nonmagnetic intermediate film 3 is preferably Ru or a Ru alloy. Preferably, the intermediate film 3 has a film thickness of 16 or less (better ίί = 2). The soft magnetic films 2 and 4 can be made of a C a A1 alloy or a Co. By reducing the distance between the magnetic head and the backing layer a by the non-magnetic intermediate film 3'., it is possible to form the magnetic film from the magnetic head film 7, which is easy to form a vertical axis with respect to the substrate surface. In general, for the purpose of at least the characteristics of c 〇 and  SNR, it is also possible to add Cr, B, and more Cr 〇 H 磁性 magnetic oxide 7 oxide, including Si 〇 2, Si0, 〜: 〇 3 volume υϋ〇 2. Preferably, the volume fraction of the oxide is 15 and the characteristic is the body, since the touch: f is therefore not a good implementation. On the other hand, if the oxide is not able to obtain a coercive force capable of achieving a high recording density, it is not a good embodiment. The nucleation (nUCleati〇n) magnetic field (_Hn) of the cardiac recording film 7 is preferably ZOkOe or more. If _Hn * is full 2, it will produce ^, so it is not a good implementation. The thickness of the J J J magnetic recording film 7 is preferably 6 . ^ When the recording film 7 is, for example, an oxide-granular (G-batch 1) layer, if the production layer is surrounded by this, sufficient rounding can be ensured, and deterioration of the 0W characteristic is not caused, so that it is a good implementation. Type. Η In addition, the vertical J: Miscellaneous Lai 7 may be a single-layer structure, or may be two or more layers composed of materials different in composition of 12 1351690, with a layer containing Ø oxide and a layer containing no oxide. In the case of lamination, the magnetic head is used to avoid the rot of the perpendicular magnetic recording film and the thickness of the film when the thickness of the film is higher than that of the material. Because of the protection, it is also the case that the non-magnetic substrate and the lining layer are C〇. ^ ^ mm is the base (four) age correction (four) moisture and so on; #层作. And will block the second. j is made of an amorphous structure of the barrier layer; the formula '%疋, or the part with different density, so that the magnetic recording medium of the present embodiment is not more than one magnetic plate 1 = have The backing layer a, the underlying film 5, the intermediate layer 6, and the vertical magnetic recording medium with === constitute the backing layer. It consists of a (10) alloy above UT. == Or the ship alloy is composed of any kind of material; = delivery, (4) editing (10) (4) regeneration = a diagram of an example. The magnetic record shown here is: a media drive unit 13 that rotationally drives the magnetic recording medium 10 by 10, a magnetic head, and 13 1351690 to record and reproduce information on the magnetic recording medium 10; the magnetic head drive unit 15 And recording the reproduced signal processing system 16. Thus, the recording and reproducing signal processing system 16 can process the input data, transfer the recording signal to the magnetic head 14, and process the reproduced signal from the magnetic head 14 to output the data. [Examples] The examples are shown below to make the effects of the present invention more clear. However, the specific configuration is not limited to the embodiment, and any design changes that do not depart from the gist of the invention are included in the invention. (Example 1) A glass substrate (MEL3, an amorphous substrate manufactured by MYG Corporation, having a diameter of 2.5 inches)

吋）放置在直流磁控濺鍍(DC Magnetron Sputtering)裝置（ANELVA 公司製C-3010)的成膜腔室内，並且在成為目標真空度lxl〇_5pa 為止，使成膜腔室内排氣。在此基板上形成第1軟磁性膜2，其成分為 70Co-20Fe-2Al-4Zr-4Nb (Co 含量 70 原子％，Fe 含量 2〇原子％， A1含量2原子％，Zr含量4原子％，Nb含量4原子％ )，且厚度為30mn;而就非磁性中間膜3而言，可使用Ru，且厚度為〇·6 就第2軟磁性膜4而言，其成分為70Co-20Fe-2Al-4Zr-4Nb，且厚度為30nm ;以此方式形成襯裡層a。第丨、第2軟磁性膜2、4的結晶構造，可以XRD確認其為非晶形構造。其f，就底層膜5而言可使用Ni，且厚度為5nm ;而就中間層6而s可使用Ru，且厚度為I2nm ;就垂直磁性記錄膜7而言，其成分為60Co-10Cr-20Pt-10Si〇2 ’且厚度為i〇nm，或以 65Co-18Cr-14Pt-3B，且厚度為 6nm。其次’以CVD法形成4 nm的保護膜8。其次，以浸潰法（dipping)形成由全氟聚醚所構成的潤滑膜9，並獲得磁性記錄媒體A。、 (比較例1) 於本比較例1中，除了第1軟磁性膜、第2軟磁性膜的材料 1351690 ^以 91Co-5Zr-Wb，或以 71C〇-20Fe-5Zr-4Nb 製成之外，其他過程都準用實施例1的製造方式’以製造比較例1、2的磁性記錄媒吋) Placed in a film forming chamber of a DC Magnetron Sputtering device (C-3010 manufactured by ANELVA Co., Ltd.), and evacuated the film forming chamber until the target vacuum degree is lxl 〇 _5pa. A first soft magnetic film 2 is formed on the substrate, and its composition is 70Co-20Fe-2Al-4Zr-4Nb (Co content: 70 atom%, Fe content: 2 atom%, A1 content: 2 atom%, Zr content: 4 atom%, The Nb content is 4 atom%) and the thickness is 30 mn. For the non-magnetic intermediate film 3, Ru can be used and the thickness is 〇·6. For the second soft magnetic film 4, the composition is 70Co-20Fe-2Al. -4Zr-4Nb and having a thickness of 30 nm; the liner layer a is formed in this manner. The crystal structure of the second and second soft magnetic films 2 and 4 can be confirmed to be an amorphous structure by XRD. f, in the case of the underlying film 5, Ni may be used and the thickness is 5 nm; and in the case of the intermediate layer 6, s may be Ru and the thickness is I2 nm; and in the case of the perpendicular magnetic recording film 7, the composition is 60Co-10Cr- 20Pt-10Si〇2' and the thickness is i〇nm, or 65Co-18Cr-14Pt-3B, and the thickness is 6nm. Next, a 4 nm protective film 8 was formed by a CVD method. Next, a lubricating film 9 composed of a perfluoropolyether was formed by dipping, and a magnetic recording medium A was obtained. (Comparative Example 1) In Comparative Example 1, except that the material of the first soft magnetic film and the second soft magnetic film was 1351690^, 91Co-5Zr-Wb, or 71C〇-20Fe-5Zr-4Nb. In other processes, the manufacturing method of the first embodiment is used to manufacture the magnetic recording medium of Comparative Examples 1 and 2.

It ° 關於此等實施例與比較例的磁性記錄媒體，在此對其靜磁性特性與δ己錄再生特性予以評估。關於靜磁性特性的評價可使用 Neoark公司所製的Kerr效果量測裝置；而關於記錄再生特性的呼價’可使用美國GUZIK公司所製的讀寫分析儀（Read_Wd；e Analyzers) RWA1632，以及碟片旋轉平台(Spinstand)sl7〇1Mp 加以量測。關於記錄再生特性的評價，在寫入部使用單極(singlep〇le)磁極；而在再生侧使用利用TMR元件的薄膜磁頭，以線記錄密度 lOOOkFCI作為記錄頻率條件進行測定。關於重寫特性（〇w)的，性'平，’係在寫人了 5〇〇kFCI的訊號之上，再寫上67kFCI的訊並虿j則最初訊號的殘餘物而加以評價。而腐蝕測試係在高溫高渔（80°C ’ 80%)的環境下’放置24〇小時之後，以光學顯微鏡觀察腐蝕點（corrosion spot)的個數。表1即顯示以上的評價結果。【表1】It is the magnetic recording medium of these examples and comparative examples, in which the static magnetic properties and the δ recorded regeneration characteristics were evaluated. For the evaluation of the static magnetic properties, a Kerr effect measuring device manufactured by Neoark Co., Ltd. can be used; and the call price for the recording and reproducing characteristics can be read and used by the US-based GUZIK company (Read_Wd; e Analyzers) RWA1632, and the dish. The rotating platform (Spinstand) sl7〇1Mp is measured. For the evaluation of the recording and reproducing characteristics, a single-pole magnetic pole was used in the writing portion, and a thin film magnetic head using a TMR element was used on the reproducing side, and the linear recording density of 100 kFCI was measured as a recording frequency condition. Regarding the rewrite characteristic (〇w), the sex 'flat' is written on the signal of 5〇〇kFCI, and then the 67kFCI message is written and the residual of the initial signal is evaluated. The corrosion test was carried out for 24 hours in an environment of high temperature and high fishing (80 ° C '80%), and the number of corrosion spots was observed by an optical microscope. Table 1 shows the above evaluation results. 【Table 1】

15 1351690 中間膜厚度(nm) <N CN H <N 組成 (at% ) lOORu lOORu lOORu 底層膜厚度 (nm) 組成 (at% ) lOONi 100Ni lOONi 軟磁性膜厚度 (nm) 30+30 1_ 30+30 30+30 Bs(T) 1.62 1.18 1.68 組成（at°/〇) 70Co-20Fe-2Al-4Zr-4Nb 91Co-5Zr-4Nb 71Co-20Fe-5Zr-4Nb 實施例11 比較例1 比較例2 錄S' ^ 〇 m 9 ^ a 〇 S 〇〇 m Os vd m 記錄再生特性SNR (dB) oo 艺· CO· CN cn (N 靜磁性特性橋頑磁力 (〇e) 4720 4520 4610 實施例1 比較例1 比較例2 1351690. 相較之下，施例1而言，與比較例I 2 的記錄再生特性另外，^^^件下’亦可相當優異的材叫，覆寫（ow)的特性會降低ϋ較職另外，村顧、實_丨的綱在舰厚不足。現献點。因此可知，藉由添加A1的3=3,，並未出生，以及耐腐蝕性。颂者地改善記錄再 (實施例2〜10) 於本實施例中，除了改變軟磁性膜的組實施例1的過程以製造磁性記錄媒體。評，，他都準用【表2】 1貝的、、、°果顯示於表2。15 1351690 interlayer film thickness (nm) <N CN H <N composition (at%) lOORu lOORu lOORu underlayer film thickness (nm) composition (at%) lOONi 100Ni lOONi soft magnetic film thickness (nm) 30+30 1_ 30 +30 30+30 Bs(T) 1.62 1.18 1.68 Composition (at°/〇) 70Co-20Fe-2Al-4Zr-4Nb 91Co-5Zr-4Nb 71Co-20Fe-5Zr-4Nb Example 11 Comparative Example 1 Comparative Example 2 S' ^ 〇m 9 ^ a 〇S 〇〇m Os vd m Recording and reproducing characteristics SNR (dB) oo 艺·CO· CN cn (N magnetostatic characteristic bridge coercive force (〇e) 4720 4520 4610 Example 1 Comparative example 1 Comparative Example 2 1351690. In contrast, in the case of Example 1, the recording and reproducing characteristics of Comparative Example I 2 are different from those of the material of the comparative example I 2, and the characteristics of the overwound (ow) are In addition, the village Gu, the real _ 丨在在舰舰舰舰舰舰舰舰舰舰舰舰舰舰舰村村村村村村村村村村村村村村村村村村村村村村村村村村村村村Further (Embodiments 2 to 10) In the present embodiment, in addition to the process of the group embodiment 1 for changing the soft magnetic film to manufacture a magnetic recording medium, he is permitted to use [Table 2] 1 Å, Results are shown in Table 2 °.

17 1351690. 中間膜厚度 (nm) (N (N <N (N <N (N (N r-H CN (N 組成 (at%) lOORu lOORu lOORu lOORu lOORu lOORu lOORu lOORu lOORu lOORu 底層膜厚度 (nm) in in 組成 (at%) lOONi lOONi lOONi lOONi lOONi lOONi lOONi lOONi lOONi lOONi 軟磁性膜厚度 (nm) 30+30 30+30 30+30 30+30 30+30 30+30 30+30 30+30 30+30 30+30 Bs(T) 1.62 1.68 1.61 1.22 (N OO 1.59 1.61 00 組成（at%) 70Co-20Fe-2Al-4Zr-4Nb 71.7Co-20Fe-0.3Al-4Zr-4Nb 69Co-20Fe-3Al-4Zr-4Nb 65Co-20Fe-7Al-4Zr-4Nb 90Co-2Al-4Zr-4Nb 40Co-50Fe-2Al-4Zr-4Nb 70Co-20Fe-2Al-3Ta-5Zr 70Co-20Fe-2Al-3Hf-5Nb 67Co-20Fe-2Al-4Zr-4 Nb-3Ni 67Co-20Fe-2Al-4Zr-4 Nb-lCr 實施例1 實施例2 實施例3 實施例4 實施例5 實施例6 實施例7 實施例8 實施例9 實施例10 - 1351690 腐蝕點(每個面） 1....... 〇寸〇〇〇〇〇〇記錄再生特性SNR(dB) 24.8 24.2 24.9 24.3 24.6 24.4 24.7 24.7 24.8 24.7 靜磁性特性矯頑磁力(Oe) 4720 4660 4690 4750 4660 4710 4730 4640 4730 4690 實施例1 實施例2 實施例3 實施例4 實施例5 實施例6 實施例7 實施例8 實施例9 實施例10 1351690 1無論使用表2中所舉的任何一個實施例的組成之試劑，均可異的，性。在表2所示的實施例2的試劑，雖然是含有〇.3 試劑’但健、會發生若干雜點15減於此，分別包 ^原子/A1' 3原子％A1、7原子％A1的任一試劑，不但都未發 L ’而且如表1的比較例2所示，因為不含A1❸試劑都大 £ t μ 腐蝕點的產生，因此可知，採用在CoFeZrNb系中添或天士 τ式7’可提高耐腐蝕性。然而，如實施例4的試劑所示， 3ί Ϊ U f子似1的試劑中，與添加了 3原子，的試劑相 “是設為3=_顺開始降低，因此A1添加量的上限， k〇A 2 使其3有&雖可提升飽和磁束密度，但是如表2的實施例6所示’含有5〇原子％的f = 點出現的情況。因此之故’在此系 _ a 度，因此必須使其含有Fee如果二升飽和磁束密仍然有可能出現雜點。因此，較^ ‘ = 使添加A1， Z湯系合金中，Fe之含量下在添加了 Μ ^ (實_11、12、⑴ 原子/以下。於此等實施例中，除了改變襯裡屛 20 1351690 中間膜厚度(nm) CN CM CN <N H 組成 (at%) lOORu lOORu lOORu lOORu 底層膜厚度 (run) in IT) 組成 (at% ) lOONi 100Ni lOONi lOONi 軟磁性膜厚度 (nm) 30+30 10+10 40+40 7.5+7.5 I Bs(T) 1.62 1.61 1.66 OS in 1 組成（at%) ,70Co-20Fe-2Al-4Zr-4Nb 70Co-20Fe-2Al-4Zr-4Nb 70Co-20Fe-2Al-4Zr-4Nb 70Co-20Fe-2Al-4Zr-4Nb 實施例1 實施例11 實施例12 實施例13 腐蝕點(每個面）〇〇〇記錄再生特性SNR(dB) 24.8 24.4 24.8 23.9 靜磁性特性矮頑磁力(Oe) 4720 4450 4810 4330 實施例1 實施例11 實施例12 實施例13 1351690. 從表3所示的結果可知，例之試劑，無論何者皆可得刭?曰a的厚度在20nm以上的實施度為15nm的實施例13之試劑優’襯裡層a的厚力更低若干，·亦有若干減低之傾^較/、他試_橋頌磁 (實施例14〜31) 於本實施例中，除了改變底層膜的材料與戸声準用實施例1的過程以製造磁性記錄媒體。啤二=之外，其他都 4。貝的結果顯示於表【表4】17 1351690. Interlayer film thickness (nm) (N (N &N; N (N) N (N r N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N In in Composition (at%) lOONi lOONi lOONi lOONi lOONi lOONi lOONi lOONi lOONi lOONi Soft magnetic film thickness (nm) 30+30 30+30 30+30 30+30 30+30 30+30 30+30 30+30 30+ 30 30+30 Bs(T) 1.62 1.68 1.61 1.22 (N OO 1.59 1.61 00 Composition (at%) 70Co-20Fe-2Al-4Zr-4Nb 71.7Co-20Fe-0.3Al-4Zr-4Nb 69Co-20Fe-3Al-4Zr -4Nb 65Co-20Fe-7Al-4Zr-4Nb 90Co-2Al-4Zr-4Nb 40Co-50Fe-2Al-4Zr-4Nb 70Co-20Fe-2Al-3Ta-5Zr 70Co-20Fe-2Al-3Hf-5Nb 67Co-20Fe-2Al -4Zr-4 Nb-3Ni 67Co-20Fe-2Al-4Zr-4 Nb-lCr Example 1 Example 2 Example 3 Example 4 Example 5 Example 6 Example 7 Example 8 Example 9 Example 10 - 1351690 Corrosion point (each side) 1....... 〇〇〇〇〇〇〇 Recording and reproducing characteristics SNR (dB) 24.8 24.2 24.9 24.3 24.6 24.4 24.7 24.7 24.8 24.7 Static magnetic properties Coercive force (Oe) 4720 4660 4690 4750 4660 4710 4730 4640 4730 4690 Example 1 Example 2 Example 3 Example 4 Example 5 Example 6 Example 7 Example 8 Example 9 Example 10 1351690 1 The reagents of the composition of any of the examples shown in Table 2 may be used, In the reagent of Example 2 shown in Table 2, although it contains a reagent of 〇.3, it is a certain number of impurities 15 which are reduced by 15 atoms/A1' 3 atom% A1, 7 atom%. Any reagent of A1, not only did not produce L ' and as shown in Comparative Example 2 of Table 1, because the A1 ❸ reagent does not contain a large corrosion point, so it is known that the addition of CoFeZrNb system or Tianshi τ type 7' can improve corrosion resistance. However, as shown by the reagent of Example 4, in the reagent of 3ί Ϊ U f-like 1, the reagent phase added with 3 atoms "is set to 3 = _ begins to decrease, so the upper limit of the amount of A1 added, k 〇A 2 has 3 & although the saturation magnetic flux density can be increased, but as shown in the embodiment 6 of Table 2, the case where the f = point containing 5 〇 atomic % appears. Therefore, the reason is _ a degree Therefore, it must be made to contain Fee. If two liters of saturated magnetic flux is dense, there may still be noise. Therefore, compared with ^ ' = in the addition of A1, Z soup alloy, the content of Fe is added with Μ ^ (real _11, 12. (1) Atom/below. In these examples, except for changing the lining 120 1351690 interlayer film thickness (nm) CN CM CN <NH composition (at%) lOORu lOORu lOORu lOORu underlayer film thickness (run) in IT) Composition (at%) lOONi 100Ni lOONi lOONi Soft magnetic film thickness (nm) 30+30 10+10 40+40 7.5+7.5 I Bs(T) 1.62 1.61 1.66 OS in 1 Composition (at%), 70Co-20Fe-2Al -4Zr-4Nb 70Co-20Fe-2Al-4Zr-4Nb 70Co-20Fe-2Al-4Zr-4Nb 70Co-20Fe-2Al-4Zr-4Nb Example 1 Example 11 Example 12 Example 13 Point (each face) 〇〇〇 Recording reproduction characteristic SNR (dB) 24.8 24.4 24.8 23.9 Static magnetic properties Short coercive force (Oe) 4720 4450 4810 4330 Example 1 Example 11 Example 12 Example 13 1351690. From Table 3 As can be seen from the results shown in the examples, the reagent of Example 13 having a thickness of 20 nm or more and having a thickness of 15 nm or more can be obtained, and the thickness of the lining layer a is lower. In the present embodiment, in addition to changing the material of the underlying film and the process of the first embodiment, the magnetic recording medium is manufactured. In addition, the others are 4. The results of Bay are shown in the table [Table 4]

22 1351690.22 1351690.

N 1 $ <N CN CN CN CN CN cs CN CN CN CN CN <N CN cs cs CN (Ν 蛛 /*\ 夺 <§ s & (S s S s s c§ f§ S (S S 鹿〇 f < Ο ▼•Η ο ο o o o Ο o Ο 〇 o o Ο o o o 〇 ^-H Ο ν—Η /—N 固 tn νη ΙΟ in ^η m ΙΟ iTi o 们時 a 〇 PQ ffl V〇 O 1 1 (U o & α： έ l o Ph o • 攀H • -Η c3 1 ί〇 ^n in •Λ ζ Oh ^J" 0：寸寸 (N » <N > o o ζ ο ΟΝ <〇 Ον ON yr\ Os m Os κη 〇\ OS § OO m OS 1 1 00 § § /—N | o Φ o Ο φ Ο Ο m έ ο φ ο 〇 φ o 〇 cn 〇〇 m έ ο φ ο o cn o o rn 〇〇 φ o 0 m 1 0 m 1 o o 〇〇 o o 0 m 1 o Φ o ο φ ο m m m m m m m m m m m m m CO m CO m Bs(T) 1.62 1.62 1.62 1.62 1.62 1.62 1.62 1.62 1.62 1.62 1.62 1.62 1.62 1.62 1.62 1.62 1.62 1.62 1.62 ±1 g (Ν CN 寸 CM <N CS 1 CN 1 CN 1 rN CN 1 CM (N ή 白白白白白 /^\ 2 2 2 2 寸 2 2 2 2 2 2 3 s 2 2 s 2 2 1 a κ a κ X ffi κ w κ k k κ X a a ffi κ κ in Λ Λ 1 »r> Λ Λ ^T) λ in λ m 1 1 1 wo 1 m 1 1 1) δ δ Ο 〇 o o ο o δ 〇 δ δ δ o δ 〇 Ο CM 1 CN CN ο υ ο Ο U Ο U o U 〇 U o U ο υ o U ^o ^o ^O 〇 U 〇 U o U ^o O U o U ο Ο ο On v〇 Os ν〇 Ον ν〇〇\ 'O Os Ό Os v〇 On v〇〇\ Os VO ON v〇 Os v〇〇\ Os v〇 as V〇 On v〇 Os VO s 寸 νη r-H Ό 卜 00 ON — (N <N <N (N v〇 cs 〇〇 (N ON (N o 苳軍 ¥ 軍苳 ♦ζ ΓΛ (Ν 1351690N 1 $ <N CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN CN f < Ο ▼•Η ο ο ooo Ο o Ο 〇oo Ο ooo 〇^-H Ο ν—Η /—N solid tn νη ΙΟ in ^η m ΙΟ iTi o when a 〇PQ ffl V〇O 1 1 (U o & α: έ lo Ph o • C h • -Η c3 1 ί〇^n in •Λ ζ Oh ^J" 0: inch inch (N » <N > oo ζ ο ΟΝ <〇Ον ON yr\ Os m Os κη 〇\ OS § OO m OS 1 1 00 § § /-N | o Φ o Ο φ Ο Ο m έ ο φ ο 〇 φ o 〇cn 〇〇m έ ο φ ο o cn oo Rn 〇〇φ o 0 m 1 0 m 1 oo 〇〇oo 0 m 1 o Φ o ο φ ο mmmmmmmmmmmmm CO m CO m Bs(T) 1.62 1.62 1.62 1.62 1.62 1.62 1.62 1.62 1.62 1.62 1.62 1.62 1.62 1.62 1.62 1.62 1.62 1.62 1.62 ±1 g (Ν CN 寸 CM <N CS 1 CN 1 CN 1 rN CN 1 CM (N ή 白白白白/^\ 2 2 2 2 inch 2 2 2 2 2 2 3 s 2 2 s 2 2 1 a κ a κ X ffi κ w κ kk κ X aa ffi κ κ in Λ Λ 1 »r> Λ Λ ^T) λ in λ m 1 1 1 wo 1 m 1 1 1) δ δ Ο 〇oo ο o δ 〇δ δ δ o δ 〇Ο CM 1 CN CN ο υ ο Ο U Ο U o U 〇U o U ο υ o U ^o ^o ^O 〇U 〇U o U ^o OU o U ο Ο ο On v〇Os ν〇Ον ν〇〇\ 'O Os Ό Os v〇On V〇〇\ Os VO ON v〇Os v〇〇\ Os v〇as V〇On v〇Os VO s inch νη rH Ό 卜 00 ON — (N <N <N (N v〇cs 〇〇( N ON (N o 苳军¥军苳♦ζ ΓΛ (Ν 1351690

腐蝕點(每個面）〇 Η 〇〇〇〇〇〇〇〇〇〇〇〇〇記錄再生特性SNR(dB) 24.8 24.7 25.0 25.1 25.0 24.9 25.2 25.1 24.9 24.8 24.1 25.4 24.9 24.1 24.6 24.9 24.1 24.2 23.8 靜磁性特性矮頑磁力(Oe) 1 4720 4790 4880 4920 4980 4600 4520 4780 4640 4550 4510 4820 4550 4470 4620 4610 4250 4900 4890 實施例1 實施例14 實施例15 實施例16 實施例17 實施例18 實施例19 實施例20 實施例21 實施例22 實施例23 實施例24 實施例25 實施例26 實施例27 實施例28 實施例29 實施例30 實施例31 135169〇從表4所示的結果可知，在底層膜使用Ni、Ni合金、NiFe 合金或NiCo合金之實施例，可得到特別優異的特性^也就是說，其矯頑磁力高，而且SNR及耐腐蝕性皆優秀。 ’ ° (實施例32〜41) 於本實施例中，除了改變中間膜的材準用實施例1的過程以製造磁性記錄媒之外，其他都 5。作的料顯示於表【表5】Corrosion point (each side) 〇Η 〇〇〇〇〇〇〇〇〇〇〇〇〇 Recording and reproducing characteristics SNR (dB) 24.8 24.7 25.0 25.1 25.0 24.9 25.2 25.1 24.9 24.8 24.1 25.4 24.9 24.1 24.6 24.9 24.1 24.2 23.8 Static magnetic Characteristic dwarf coercive force (Oe) 1 4720 4790 4880 4920 4980 4600 4520 4780 4640 4550 4510 4820 4550 4470 4620 4610 4250 4900 4890 Example 1 Example 14 Example 15 Example 16 Example 17 Example 18 Example 19 Example 20 Example 21 Example 22 Example 23 Example 24 Example 25 Example 26 Example 27 Example 28 Example 29 Example 30 Example 31 135169 〇 From the results shown in Table 4, it is known that Ni is used in the underlying film. The examples of the Ni alloy, the NiFe alloy or the NiCo alloy can obtain particularly excellent characteristics. That is, the coercive force is high, and the SNR and the corrosion resistance are excellent. '° (Examples 32 to 41) In the present embodiment, except that the procedure of the intermediate film was changed to the procedure of Example 1 to produce a magnetic recording medium, the other was 5 . The materials shown are shown in the table [Table 5]

25 135169025 1351690

中間膜厚度 (nm) Ο oo 寸 v〇 in (Ν <N r-H <N CN CN 組成（atQ/〇) lOORu lOORu lOORu lOORu lOORu lOORu ο y (Ν ο oo 90Ru-10Cr 80Ru-20Mn 80Ru-20Al 80Ru_20Mo ㈣？ i®J： vS η • ^ ©\ 〇 r—H Ο o r-H o T-H 〇 Ο ο f-H o 1-H o 1—H o o o cn ο cn o o Φ o Φ Ο φ ο cn o cn o Φ o cn o ΐ 〇 ro Ο m o m o m ο m ο ro 〇 m o ro 〇 m o m ^"S <N (N v〇 (N vq (N vq CN (Ν (Ν v〇 CN CN vq CN <N v〇 PQ i—H 1—H r-H 1—Η 1—H m r-H 寸 (N | <N | CN 瞧 CN I <Ν 1 rs | <N | CN | (N 1 N ’式、 ^J- 2 s 2 2 3 2 2 3 3 C3 CN k ffi X X ^T) X a a a IT) κ κ (U ώ 〇 ώ o 〇!> δ ώ δ ύ δ 〇!> δ ώ δ ύ -δ 〇!> 〇 ώ O <N 1 CN 1 CN 1 (N 1 <Ν I cs 1 (Ν 1 (Ν 1 (N 1 <N 1 〇 U 〇 u 〇 u o u 〇 u Ο υ 〇 u Ο υ 〇 u o 〇\ VO Os Os G\ v〇 Ον On 〇\ 〇\ VD G\ C\ VO ^-H (N cn cn m 们 ro ν〇 m 卜 cn 00 m On CO o w 苳军冢 ψ：禅κIntermediate film thickness (nm) Ο oo 寸 v〇in (Ν <N rH <N CN CN composition (atQ/〇) lOORu lOORu lOORu lOORu lOORu lOORu ο y (Ν ο oo 90Ru-10Cr 80Ru-20Mn 80Ru-20Al 80Ru_20Mo (4)? i®J: vS η • ^ ©\ 〇r—H Ο o rH o TH 〇Ο ο fH o 1-H o 1—H ooo cn ο cn oo Φ o Φ Ο φ ο cn o cn o Φ o cn o ΐ 〇ro Ο momom ο m ο ro 〇mo ro 〇mom ^"S <N (N v〇(N vq (N vq CN (Ν (Ν v〇CN CN vq CN <N v〇 PQ i—H 1—H rH 1—Η 1—H m rH 寸 (N | <N | CN 瞧CN I <Ν 1 rs | <N | CN | (N 1 N ', ^J- 2 s 2 2 3 2 2 3 3 C3 CN k ffi XX ^T) X aaa IT) κ κ (U ώ 〇ώ o 〇! > δ ώ δ ύ δ 〇! > δ ώ δ ύ -δ 〇! > 〇ώ O <N 1 CN 1 CN 1 (N 1 <Ν I cs 1 (Ν 1 (Ν 1 (N 1 <N 1 〇U 〇u 〇uou 〇u Ο υ Οu Ο υ 〇 Uo 〇\ VO Os Os G\ v〇Ον On 〇\ 〇\ VD G\ C\ VO ^-H (N cn cn m we ro ν〇 m 卜 cn 00 m On CO o w 苳冢冢 : Zen κ

v〇 (N 1351690, 腐蝕點(每個面）〇〇〇〇〇〇 τ-Η 〇〇〇記錄再生特性SNR(dB) 24.8 24.7 24.6 24.6 24.8 24.2 25.1 24.9 <N 25.2 24.8 靜磁性特性矯頑磁力(Oe) 4720 4570 4490 4820 4880 4940 4770 4720 4590 4560 4750 實施例1 實施例32 實施例33 實施例34 實施例35 實施例36 實施例37 實施例38 實施例39 實施例40 實施例41 1351690, 從表5所示的結果可知，就中間膜的材料而言使用 CoFeAlZrNb、CoFeHfTaAl之試劑’可得到特別優異的特此外，中間層的厚度在8〜25nm的範圍内之試劑，均可獲得優異的特性。也就是說，其矯頑磁力高，SNR及耐腐蝕性均佳。” (實施例42)V〇(N 1351690, corrosion point (each face) 〇〇〇〇〇〇τ-Η 〇〇〇 Recording and reproducing characteristics SNR (dB) 24.8 24.7 24.6 24.6 24.8 24.2 25.1 24.9 <N 25.2 24.8 Static magnetic properties Magnetic Force (Oe) 4720 4570 4490 4820 4880 4940 4770 4720 4590 4560 4750 Embodiment 1 Embodiment 32 Embodiment 33 Embodiment 34 Embodiment 35 Embodiment 36 Example 37 Example 38 Example 39 Example 40 Example 1351 From the results shown in Table 5, it is understood that a reagent which uses CoFeAlZrNb or CoFeHfTaAl as a material of the interlayer film can be particularly excellent, and an agent having a thickness of the intermediate layer in the range of 8 to 25 nm can be excellent. Characteristics, that is, its coercive force is high, SNR and corrosion resistance are good." (Example 42)

在實施例2中，在非磁性基板與襯裡層之間，設置有非晶形構，且膜厚為8膽之6〇Nb—4〇Cr層作為阻障層。其他各層^ 實施例2 _。以此方式賴造絲的雜記錄媒體之靜^性^ 性矯頑磁力為4630〇e ’而紀錄再生特性SNR為24 2dB。戥 (每個面）的個數為〇。根據如上所述的本發明，係在非磁性基板上至少具有襯裡戶底f膜：中間層、與垂直磁性記錄膜的垂直磁性記錄媒體中，曰^ 成该襯裡層的軟磁性膜’係由飽和磁束密度出在〗^以上之合金所構成。且該底層臈係由Ni、Ni合金、NiFe合金 ^金任二種材料所構成，是一種具有優異生產效率，且可進行高讼度的資訊記錄再生之磁性記錄媒體及磁性記錄再生裝置。【圖式簡單說明】圖1係顯示根據本發明之磁性記錄媒體之第一實施型態。圖2係顯示適用於根據本發明之磁性記錄媒體中，襯裡戶基板平面成分之MH迴圈之圖。曰裝置示具備根據本發明之磁性記錄媒體之磁性記錄再生【主要元件符號說明】 A〜磁性記錄媒體 a〜襯裡層In the second embodiment, a non-magnetic substrate and a backing layer are provided with a film having a thickness of 8 Å Nb - 4 〇 Cr as a barrier layer. Other layers ^ Example 2 _. In this way, the static recording magnetic force of the hybrid recording medium was 4630 〇e ' and the recording reproduction characteristic SNR was 24 2 dB. The number of 戥 (each face) is 〇. According to the invention as described above, in the case of a non-magnetic substrate having at least a lining f film: an intermediate layer, and a perpendicular magnetic recording medium perpendicular to the magnetic recording film, the soft magnetic film of the lining layer is The saturation magnetic flux density is composed of an alloy of more than φ. Further, the underlying niobium is composed of Ni, Ni alloy, and NiFe alloy, and is a magnetic recording medium and a magnetic recording and reproducing apparatus which have excellent production efficiency and can perform high-speed information recording and reproduction. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing a first embodiment of a magnetic recording medium according to the present invention. Fig. 2 is a view showing an MH loop of a planar component of a lining household substrate suitable for use in the magnetic recording medium according to the present invention.曰 Apparatus showing magnetic recording and reproduction with a magnetic recording medium according to the present invention [Description of main components] A~ Magnetic recording medium a~ lining layer

Bs〜飽和磁束密度Bs~saturated magnetic flux density

Hbias〜構成襯裡層的兩層軟磁性膜2、4之AFC結合大小 28 1351690Hbias ~ AFC bond size of two layers of soft magnetic film 2, 4 constituting the lining layer 28 1351690

He〜橋頑磁力 -Hn〜成核磁場He~bridge coercive force -Hn~ nucleation magnetic field

Ms〜飽和磁束密度Ms~saturated magnetic flux density

Ra〜表面粗链度 1〜非磁性基板 2〜第1軟磁性膜 3〜非磁性中間膜 4〜第2軟磁性膜 5〜底層膜 6〜中間層 7〜垂直磁性記錄膜 8〜保護膜 9〜潤滑膜 10〜磁性記錄媒體 12〜磁性記錄再生裝置 13〜媒體驅動部 14〜磁頭 15〜磁頭驅動部 16〜記錄再生訊號處理系統 29Ra to surface thick chain degree 1 to nonmagnetic substrate 2 to first soft magnetic film 3 to nonmagnetic intermediate film 4 to second soft magnetic film 5 to underlayer film 6 to intermediate layer 7 to perpendicular magnetic recording film 8 to protective film 9 The lubricating film 10 to the magnetic recording medium 12 to the magnetic recording and reproducing device 13 to the medium driving unit 14 to the magnetic head 15 to the magnetic head driving unit 16 to the recording and reproducing signal processing system 29

Claims

•90 •90 申請專利範圍： 100年1月4日修正替換頁 095148538(無割線），丨、曰μ一種垂直磁性記錄媒體’係在非磁性基板及非磁性基板上至裡層、底制、♦間膜、與垂直磁性記錄麟垂直磁性 ^錄媒體’其特徵為：構成軸裡層的軟磁性縣非晶形構造，係由飽和磁束密度Bs在UT以上的c〇A1合金所構成；且違軟磁^生膜之A1含量在〇.2原子％以上，7原子％以下。 14描專利範圍帛1項之垂直磁性記錄媒體，其中，該軟磁性膜係由飽和磁束密度Bs在1.4Τ以上之CoFeA1合金所構成；且該軟磁性臈之Fe含量在50原子％以下。 Μ 如利範圍第1項之垂直磁性記錄媒體，其中，該軟磁膜之A1 在〇.3原子％以上，3原子％以下。料胺4审專利翻第1項之垂直磁性記錄媒體，其中，該軟磁膜更具備Ta、Nb、Ζι·之中至少任意一個。性膜^範圍第1項之垂直磁性記錄媒體，其中，該軟磁性膜更具備Ni、Cr兩者中任意一個。展^如t請專利範圍第1項之垂直磁性記錄媒體，其中，該襯裡 :兩㈢軟磁性膜與形成於此兩層軟磁性膜之間的Ru膜所構人而此兩層軟磁性膜係以反鐵輕合(Aj^p^o-Coupiing，apc)結芦的圍第1項之垂直磁性記錄媒體’其中，該襯裡層的飽和磁束畨度與臈厚之積Ms · t(T · nm)在3以上8以下。 _!^申請專利範圍第1項之垂直雜記賴體，其巾，該底層 \ Nl合金、NiFe合金、或是NiCo合金任一種材料所檨成，叹置於其上的ru合金之△ β 5〇在6。以下。 9.如申請專利範圍第1項之垂直磁性記錄媒體，其中，該中門膜係Ru或Ru合金。曰、10_如申請專利範圍第1項之垂直磁性記錄媒體，其中，裡層的厚度在2〇nm以上8〇nm以下。 U·如申請專利範圍第1項之垂直磁性記錄媒體，其中，該中 1351690.. 100年1月4曰修正替換頁 095148538(無劃線） I 間膜的膜厚在16nm以下。 12. 如申請專利範圍第1項之垂直磁性記錄媒體，其中，該軟磁性膜為 CoFeAlZrNb、CoFeAlHfNb、CoFeAlTaNb、 CoFeAlZrNbCr、CoFeAlZrNbNi 中之任意一個。 13. 如申請專利範圍第1項之垂直磁性記錄媒體，其中，於非磁性基板與襯裡層之間，更具有一阻障層。 14. 如申凊專利範圍第13項之垂直磁性記錄媒體，其中，該阻障層係由該襯裡層所含有的元素之中，以c〇、Fe#外之任意元素為主成分所組成。• 90 • 90 patent application scope: January 4, 100 revised replacement page 095148538 (no secant), 丨, 曰μ a vertical magnetic recording medium 'on non-magnetic substrates and non-magnetic substrates to the inner layer, the bottom system, ♦ Interstitial film and perpendicular magnetic recording lin perpendicular magnetic recording media' is characterized by: the soft magnetic county amorphous structure constituting the inner layer of the shaft, which is composed of c〇A1 alloy with a saturation magnetic flux density Bs above UT; The A1 content of the soft magnetic film is 〇. 2 atom% or more and 7 atom% or less. The perpendicular magnetic recording medium of claim 1, wherein the soft magnetic film is composed of a CoFeAl alloy having a saturation magnetic flux density Bs of 1.4 Å or more; and the Fe content of the soft magnetic yttrium is 50 atom% or less. The perpendicular magnetic recording medium of the first aspect of the invention, wherein the soft magnetic film has A1 of not less than 3 atom% and not more than 3 atom%. The perpendicular magnetic recording medium of the first aspect of the invention, wherein the soft magnetic film further comprises at least one of Ta, Nb, and Ζι. The perpendicular magnetic recording medium of the first aspect of the invention, wherein the soft magnetic film further comprises any one of Ni and Cr. The perpendicular magnetic recording medium of the first item of the patent scope, wherein the lining: the two (three) soft magnetic film and the Ru film formed between the two soft magnetic films are constructed by the two layers of the soft magnetic film A perpendicular magnetic recording medium of the first item of the anti-iron light combination (Aj^p^o-Coupiing, apc), wherein the product of the saturation magnetic flux and the thickness of the lining layer Ms · t (T · nm) is 3 or more and 8 or less. _!^Applicable to the vertical miscellaneous body of the first item of the patent scope, the towel, the bottom layer of the Nl alloy, the NiFe alloy, or the NiCo alloy, and the ru alloy Δβ 5 Hey at 6. the following. 9. The perpendicular magnetic recording medium of claim 1, wherein the middle door film is Ru or a Ru alloy.垂直10. The perpendicular magnetic recording medium of claim 1, wherein the inner layer has a thickness of 2 〇 nm or more and 8 〇 nm or less. U. The perpendicular magnetic recording medium of claim 1, wherein the intermediate film has a film thickness of 16 nm or less. 12. The perpendicular magnetic recording medium of claim 1, wherein the soft magnetic film is any one of CoFeAlZrNb, CoFeAlHfNb, CoFeAlTaNb, CoFeAlZrNbCr, CoFeAlZrNbNi. 13. The perpendicular magnetic recording medium of claim 1, wherein a barrier layer is further provided between the non-magnetic substrate and the backing layer. 14. The perpendicular magnetic recording medium according to claim 13, wherein the barrier layer is composed of an element other than c〇 and Fe# among the elements contained in the backing layer.

其中，該阻九15.如申請專利範圍第13項之垂直磁性記錄媒體早層為非晶形構造。障層之下垂直磁性記錄媒趙’其中’該阻該磁’具備磁性記錄舰；以及用以在錄再生資訊的磁頭；其特徵為： "亥磁碩為早磁極磁頭；而該磁性至I6項中任-項之磁性記錄^錢媒體係如申請專利範圍第1Wherein, the resistance is as follows: 15. The vertical magnetic recording medium of claim 13 is an amorphous structure. Under the barrier layer, the vertical magnetic recording medium Zhao 'where 'the resistance of the magnetic' has a magnetic recording ship; and a magnetic head for recording and reproducing information; and the feature is: "Hei magnetic master is an early magnetic pole head; and the magnetic to The magnetic record of any item in item I6 is as follows:

囷式： 31Style: 31