TWI350427B - Radiation-sensitive resin composition - Google Patents

Radiation-sensitive resin composition

Info

Publication number
TWI350427B
TWI350427B TW093126944A TW93126944A TWI350427B TW I350427 B TWI350427 B TW I350427B TW 093126944 A TW093126944 A TW 093126944A TW 93126944 A TW93126944 A TW 93126944A TW I350427 B TWI350427 B TW I350427B
Authority
TW
Taiwan
Prior art keywords
radiation
resin composition
sensitive resin
sensitive
composition
Prior art date
Application number
TW093126944A
Other languages
Chinese (zh)
Other versions
TW200510929A (en
Inventor
Yasuo Chikusa
Hideaki Tamakoshi
Original Assignee
Nagase Chemtex Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nagase Chemtex Corp filed Critical Nagase Chemtex Corp
Publication of TW200510929A publication Critical patent/TW200510929A/en
Application granted granted Critical
Publication of TWI350427B publication Critical patent/TWI350427B/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G61/00Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
    • C08G61/12Macromolecular compounds containing atoms other than carbon in the main chain of the macromolecule
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/031Organic compounds not covered by group G03F7/029
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/06Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances
    • H01B1/12Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances organic substances
    • H01B1/124Intrinsically conductive polymers
    • H01B1/127Intrinsically conductive polymers comprising five-membered aromatic rings in the main chain, e.g. polypyrroles, polythiophenes
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
TW093126944A 2003-09-11 2004-09-07 Radiation-sensitive resin composition TWI350427B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003319932 2003-09-11

Publications (2)

Publication Number Publication Date
TW200510929A TW200510929A (en) 2005-03-16
TWI350427B true TWI350427B (en) 2011-10-11

Family

ID=34308589

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093126944A TWI350427B (en) 2003-09-11 2004-09-07 Radiation-sensitive resin composition

Country Status (4)

Country Link
JP (1) JP4621870B2 (en)
KR (1) KR101103241B1 (en)
TW (1) TWI350427B (en)
WO (1) WO2005027145A1 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4583917B2 (en) * 2004-12-27 2010-11-17 株式会社フジクラ Method for manufacturing electronic device and method for manufacturing transparent conductive circuit board
KR101177087B1 (en) 2004-12-27 2012-08-24 가부시키가이샤후지쿠라 Electronic device and method for manufacturing same
KR101438172B1 (en) 2006-08-21 2014-09-11 아그파-게바에르트 엔.브이. UV-photopolymerizable composition for producing organic conductive layers, patterns or prints
JP5014750B2 (en) * 2006-11-27 2012-08-29 信越ポリマー株式会社 Conductive polymer paint and conductive coating film
JP2010161013A (en) * 2009-01-09 2010-07-22 Toagosei Co Ltd Method for manufacturing laminate having conductive resin pattern, and laminate
JP5569144B2 (en) * 2010-02-24 2014-08-13 日立化成株式会社 Photosensitive conductive film, method for forming conductive film, and method for forming conductive pattern
JP5673675B2 (en) * 2010-04-26 2015-02-18 コニカミノルタ株式会社 Method for producing transparent electrode, transparent electrode and organic electronic device
JP5741581B2 (en) * 2010-07-29 2015-07-01 コニカミノルタ株式会社 Transparent conductive film and organic electroluminescence element
JP6977246B2 (en) * 2015-12-04 2021-12-08 東ソー株式会社 Antistatic thin film and antistatic aqueous solution
JP6436511B2 (en) * 2017-04-26 2018-12-12 株式会社ジャパンディスプレイ Capacitive touch panel manufacturing method
JP6541201B2 (en) * 2018-09-11 2019-07-10 株式会社ジャパンディスプレイ Method of manufacturing capacitive touch panel
US11971659B2 (en) 2018-10-08 2024-04-30 Taiwan Semiconductor Manufacturing Co., Ltd. Photoresist composition and method of forming photoresist pattern

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6226268A (en) * 1985-07-26 1987-02-04 Mitsubishi Chem Ind Ltd Organic semiconductor
JPS62123444A (en) 1985-08-07 1987-06-04 Japan Synthetic Rubber Co Ltd Radiation sensitive resinous composition
EP0686662B2 (en) * 1994-05-06 2006-05-24 Bayer Ag Conductive coatings
EP1474725A1 (en) * 2002-02-05 2004-11-10 Koninklijke Philips Electronics N.V. Photo-sensitive composition
JP2003241370A (en) * 2002-02-15 2003-08-27 Nippon Telegr & Teleph Corp <Ntt> Photosensitive composition and method for producing electroconductive composition using the same

Also Published As

Publication number Publication date
TW200510929A (en) 2005-03-16
JP4621870B2 (en) 2011-01-26
JPWO2005027145A1 (en) 2006-11-24
KR101103241B1 (en) 2012-01-12
WO2005027145A1 (en) 2005-03-24
KR20060133959A (en) 2006-12-27

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees