TWI347646B - Wafer transfer apparatus - Google Patents

Wafer transfer apparatus

Info

Publication number
TWI347646B
TWI347646B TW096149062A TW96149062A TWI347646B TW I347646 B TWI347646 B TW I347646B TW 096149062 A TW096149062 A TW 096149062A TW 96149062 A TW96149062 A TW 96149062A TW I347646 B TWI347646 B TW I347646B
Authority
TW
Taiwan
Prior art keywords
transfer apparatus
wafer transfer
wafer
transfer
Prior art date
Application number
TW096149062A
Other languages
Chinese (zh)
Other versions
TW200929421A (en
Inventor
Hsing Shun Chung
Chi Yuan Chang
Original Assignee
King Yuan Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by King Yuan Electronics Co Ltd filed Critical King Yuan Electronics Co Ltd
Priority to TW096149062A priority Critical patent/TWI347646B/en
Publication of TW200929421A publication Critical patent/TW200929421A/en
Application granted granted Critical
Publication of TWI347646B publication Critical patent/TWI347646B/en

Links

TW096149062A 2007-12-20 2007-12-20 Wafer transfer apparatus TWI347646B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW096149062A TWI347646B (en) 2007-12-20 2007-12-20 Wafer transfer apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW096149062A TWI347646B (en) 2007-12-20 2007-12-20 Wafer transfer apparatus

Publications (2)

Publication Number Publication Date
TW200929421A TW200929421A (en) 2009-07-01
TWI347646B true TWI347646B (en) 2011-08-21

Family

ID=44864475

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096149062A TWI347646B (en) 2007-12-20 2007-12-20 Wafer transfer apparatus

Country Status (1)

Country Link
TW (1) TWI347646B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI547427B (en) * 2013-08-06 2016-09-01 台灣積體電路製造股份有限公司 Wafer transfer robot, robot blade for a wafer transfer robot, and method of transferring a substrate

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI562269B (en) * 2014-01-22 2016-12-11 Taiwan Semiconductor Mfg Co Ltd Wafer transfer device and wafer transfer method with calitration function
CN104505361B (en) * 2014-12-30 2017-10-24 苏州日月新半导体有限公司 Wafer transfer tool

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI547427B (en) * 2013-08-06 2016-09-01 台灣積體電路製造股份有限公司 Wafer transfer robot, robot blade for a wafer transfer robot, and method of transferring a substrate

Also Published As

Publication number Publication date
TW200929421A (en) 2009-07-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees