TWI341174B - Radiation shielding circuit, memory device, and manufacturing method thereof - Google Patents

Radiation shielding circuit, memory device, and manufacturing method thereof

Info

Publication number
TWI341174B
TWI341174B TW094133963A TW94133963A TWI341174B TW I341174 B TWI341174 B TW I341174B TW 094133963 A TW094133963 A TW 094133963A TW 94133963 A TW94133963 A TW 94133963A TW I341174 B TWI341174 B TW I341174B
Authority
TW
Taiwan
Prior art keywords
manufacturing
memory device
radiation shielding
shielding circuit
circuit
Prior art date
Application number
TW094133963A
Other languages
English (en)
Other versions
TW200635496A (en
Inventor
Chao Hsiung Wang
Horng Huei Tseng
Denny Tang
Wen Chin Lin
Mark Hsieh
Original Assignee
Taiwan Semiconductor Mfg Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg Co Ltd filed Critical Taiwan Semiconductor Mfg Co Ltd
Publication of TW200635496A publication Critical patent/TW200635496A/zh
Application granted granted Critical
Publication of TWI341174B publication Critical patent/TWI341174B/zh

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C5/00Details of stores covered by group G11C11/00
    • G11C5/02Disposition of storage elements, e.g. in the form of a matrix array
    • G11C5/025Geometric lay-out considerations of storage- and peripheral-blocks in a semiconductor storage device
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/5222Capacitive arrangements or effects of, or between wiring layers
    • H01L23/5225Shielding layers formed together with wiring layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B61/00Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00Galvanomagnetic devices
    • H10N50/01Manufacture or treatment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Mram Or Spin Memory Techniques (AREA)
  • Hall/Mr Elements (AREA)
  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
TW094133963A 2005-03-25 2005-09-29 Radiation shielding circuit, memory device, and manufacturing method thereof TWI341174B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/089,969 US7545662B2 (en) 2005-03-25 2005-03-25 Method and system for magnetic shielding in semiconductor integrated circuit

Publications (2)

Publication Number Publication Date
TW200635496A TW200635496A (en) 2006-10-01
TWI341174B true TWI341174B (en) 2011-04-21

Family

ID=37084065

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094133963A TWI341174B (en) 2005-03-25 2005-09-29 Radiation shielding circuit, memory device, and manufacturing method thereof

Country Status (2)

Country Link
US (1) US7545662B2 (zh)
TW (1) TWI341174B (zh)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7427803B2 (en) * 2006-09-22 2008-09-23 Taiwan Semiconductor Manufacturing Company, Ltd. Electromagnetic shielding using through-silicon vias
US7936052B2 (en) * 2008-09-30 2011-05-03 Infineon Technologies Ag On-chip RF shields with backside redistribution lines
US8169059B2 (en) * 2008-09-30 2012-05-01 Infineon Technologies Ag On-chip RF shields with through substrate conductors
US7948064B2 (en) * 2008-09-30 2011-05-24 Infineon Technologies Ag System on a chip with on-chip RF shield
US8889548B2 (en) 2008-09-30 2014-11-18 Infineon Technologies Ag On-chip RF shields with backside redistribution lines
US8178953B2 (en) 2008-09-30 2012-05-15 Infineon Technologies Ag On-chip RF shields with front side redistribution lines
US8063469B2 (en) * 2008-09-30 2011-11-22 Infineon Technologies Ag On-chip radio frequency shield with interconnect metallization
JP5408253B2 (ja) * 2009-06-17 2014-02-05 日本電気株式会社 Icパッケージ
KR101677739B1 (ko) * 2010-09-29 2016-11-21 삼성전자주식회사 반도체 패키지 및 그의 제조방법
TWI456726B (zh) 2011-01-24 2014-10-11 Ind Tech Res Inst 內連線結構、具有該內連線結構的裝置與線路結構、及防護內連線結構電磁干擾(emi)的方法
US8557610B2 (en) 2011-02-14 2013-10-15 Qualcomm Incorporated Methods of integrated shielding into MTJ device for MRAM
US9318432B2 (en) * 2012-10-31 2016-04-19 Qualcomm Technologies International, Ltd. Shielded system
US9070692B2 (en) 2013-01-12 2015-06-30 Avalanche Technology, Inc. Shields for magnetic memory chip packages
US8952504B2 (en) * 2013-02-08 2015-02-10 Qualcomm Incorporated Small form factor magnetic shield for magnetorestrictive random access memory (MRAM)
US10510946B2 (en) 2015-07-23 2019-12-17 Globalfoundries Singapore Pte. Ltd. MRAM chip magnetic shielding
US9875971B2 (en) 2015-03-26 2018-01-23 Globalfoundries Singapore Pte. Ltd. Magnetic shielding of MRAM package
US10475985B2 (en) 2015-03-26 2019-11-12 Globalfoundries Singapore Pte. Ltd. MRAM magnetic shielding with fan-out wafer level packaging
US9666257B2 (en) * 2015-04-24 2017-05-30 Intel Corporation Bitcell state retention
US10096768B2 (en) 2015-05-26 2018-10-09 Globalfoundries Singapore Pte. Ltd. Magnetic shielding for MTJ device or bit
US9786839B2 (en) 2015-07-23 2017-10-10 Globalfoundries Singapore Pte. Ltd. 3D MRAM with through silicon vias or through silicon trenches magnetic shielding
WO2017025815A1 (en) * 2015-08-11 2017-02-16 Kabushiki Kaisha Toshiba Magnetic shield tray, magnetic shield wrapper and magnetic memory product shielded from external magnetic field
US11619658B2 (en) 2017-12-08 2023-04-04 Texas Instruments Incorporated Semiconductor integrated fluxgate device shielded by discrete magnetic plate
US10374154B1 (en) * 2018-01-18 2019-08-06 Globalfoundries Inc. Methods of shielding an embedded MRAM array on an integrated circuit product comprising CMOS based transistors
US10439129B2 (en) 2018-01-18 2019-10-08 Globalfoundries Inc. Shielded MRAM cell
WO2020071491A1 (ja) * 2018-10-05 2020-04-09 株式会社村田製作所 モジュール
US11276649B2 (en) * 2019-06-28 2022-03-15 Taiwan Semiconductor Manufacturing Co., Ltd. Devices and methods having magnetic shielding layer
US11258356B2 (en) 2019-07-31 2022-02-22 Analog Devices International Unlimited Company Magnetic barrier for power module

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6872993B1 (en) * 1999-05-25 2005-03-29 Micron Technology, Inc. Thin film memory device having local and external magnetic shielding
JP3505488B2 (ja) * 1999-10-12 2004-03-08 古河電気工業株式会社 光モジュール
EP1297533B1 (en) * 2000-06-23 2008-08-27 Nxp B.V. Magnetic memory
US6555858B1 (en) * 2000-11-15 2003-04-29 Motorola, Inc. Self-aligned magnetic clad write line and its method of formation
US6582979B2 (en) * 2000-11-15 2003-06-24 Skyworks Solutions, Inc. Structure and method for fabrication of a leadless chip carrier with embedded antenna
TW569442B (en) * 2001-12-18 2004-01-01 Toshiba Corp Magnetic memory device having magnetic shield layer, and manufacturing method thereof
US7037604B2 (en) * 2002-07-23 2006-05-02 Honeywell International, Inc. Magnetic sensing device
US20040032010A1 (en) * 2002-08-14 2004-02-19 Kools Jacques Constant Stefan Amorphous soft magnetic shielding and keeper for MRAM devices
US6808940B2 (en) * 2002-08-30 2004-10-26 Hewlett-Packard Development Company, L.P. Magnetic shielding for reducing magnetic interference
US6940153B2 (en) * 2003-02-05 2005-09-06 Hewlett-Packard Development Company, L.P. Magnetic shielding for magnetic random access memory card
US6970053B2 (en) * 2003-05-22 2005-11-29 Micron Technology, Inc. Atomic layer deposition (ALD) high permeability layered magnetic films to reduce noise in high speed interconnection
US7477538B2 (en) * 2003-06-20 2009-01-13 Nec Corporation Magnetic random access memory
US7030469B2 (en) * 2003-09-25 2006-04-18 Freescale Semiconductor, Inc. Method of forming a semiconductor package and structure thereof

Also Published As

Publication number Publication date
US7545662B2 (en) 2009-06-09
TW200635496A (en) 2006-10-01
US20060229683A1 (en) 2006-10-12

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