TWI340467B - Active matrix organic electroluminescent substrate and method of making the same - Google Patents
Active matrix organic electroluminescent substrate and method of making the sameInfo
- Publication number
- TWI340467B TWI340467B TW096109731A TW96109731A TWI340467B TW I340467 B TWI340467 B TW I340467B TW 096109731 A TW096109731 A TW 096109731A TW 96109731 A TW96109731 A TW 96109731A TW I340467 B TWI340467 B TW I340467B
- Authority
- TW
- Taiwan
- Prior art keywords
- making
- same
- organic electroluminescent
- active matrix
- matrix organic
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000011159 matrix material Substances 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/122—Pixel-defining structures or layers, e.g. banks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/123—Connection of the pixel electrodes to the thin film transistors [TFT]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/124—Insulating layers formed between TFT elements and OLED elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Electroluminescent Light Sources (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW096109731A TWI340467B (en) | 2007-03-21 | 2007-03-21 | Active matrix organic electroluminescent substrate and method of making the same |
US11/751,616 US20080230798A1 (en) | 2007-03-21 | 2007-05-21 | Active matrix organic electroluminescent substrate and method of making the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW096109731A TWI340467B (en) | 2007-03-21 | 2007-03-21 | Active matrix organic electroluminescent substrate and method of making the same |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200840036A TW200840036A (en) | 2008-10-01 |
TWI340467B true TWI340467B (en) | 2011-04-11 |
Family
ID=39773794
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW096109731A TWI340467B (en) | 2007-03-21 | 2007-03-21 | Active matrix organic electroluminescent substrate and method of making the same |
Country Status (2)
Country | Link |
---|---|
US (1) | US20080230798A1 (zh) |
TW (1) | TWI340467B (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101901330B1 (ko) * | 2012-09-19 | 2018-09-27 | 삼성디스플레이 주식회사 | 유기전계발광 표시장치의 제조 방법 |
KR102027213B1 (ko) * | 2013-05-13 | 2019-10-02 | 삼성디스플레이 주식회사 | 유기발광 표시패널의 제조 방법 |
JP2017126005A (ja) * | 2016-01-15 | 2017-07-20 | 株式会社ジャパンディスプレイ | 表示装置 |
US10420211B2 (en) * | 2017-08-09 | 2019-09-17 | Advanced Semiconductor Engineering, Inc. | Semiconductor package device |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3641342B2 (ja) * | 1997-03-07 | 2005-04-20 | Tdk株式会社 | 半導体装置及び有機elディスプレイ装置 |
TWI290006B (en) * | 2002-05-03 | 2007-11-11 | Ritdisplay Corp | A method for fabricating LTPS-OLED |
KR100611159B1 (ko) * | 2003-11-29 | 2006-08-09 | 삼성에스디아이 주식회사 | 유기전계 발광표시장치 |
KR100710170B1 (ko) * | 2003-12-30 | 2007-04-20 | 엘지.필립스 엘시디 주식회사 | 유기전계 발광소자와 그 제조방법 |
KR100590260B1 (ko) * | 2004-04-29 | 2006-06-19 | 삼성에스디아이 주식회사 | 유기 전계 발광 표시 장치 |
KR100745332B1 (ko) * | 2005-09-28 | 2007-08-02 | 삼성에스디아이 주식회사 | 유기 발광표시장치 및 그 제조방법 |
-
2007
- 2007-03-21 TW TW096109731A patent/TWI340467B/zh not_active IP Right Cessation
- 2007-05-21 US US11/751,616 patent/US20080230798A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
TW200840036A (en) | 2008-10-01 |
US20080230798A1 (en) | 2008-09-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |