1336398 九、發明說明： 【發明所屬之技術領域】 本發明涉及一種玻璃基板邊緣檢查裝置，尤其涉及檢查 玻璃基板邊緣是否存在缺陷的玻璃基板邊緣檢查裝置及利 用該裝置的玻璃基板邊緣檢查方法》 【先前技術】 通常，玻璃基板（glass substrate)是用於製造平板顯示器 (FPD : flat panel display)的一種被處理基板，經熔化 (melting)製造工藝進行製造。 這種玻璃基板的製造過程包含各種加工過程及檢查過 程，尤其包含檢查玻璃基板是否存在缺陷的檢查過程，以 防止在製造過程中發生缺陷的玻璃基板被投入到後續工藝 中’從而降低成本並提高產品合格率。 作為一例，在玻璃基板的加工過程中要將玻璃基板切割 成符合平板顯示器規格的大小，並對因切割而變鋒利的玻 璃基板邊緣（edge)進行拋光。 在經過這些加工過程時，玻璃基板邊緣上可能會發生各 種缺陷，而這些缺陷會對平板顯示器品質產生重大影響， 因此需要檢查玻璃基板邊緣是否存在缺陷以防止判斷為發 生缺陷的玻璃基板被投入到後續工藝中。 圖1為現有的一種玻璃基板邊緣檢查裝置的示意圖。 參照圖1 ’現有的玻璃基板邊緣檢查裝置包含掃描模組 該掃描模組Π)以移送方向為基準沿著玻璃基板s的前 端邊緣FE、兩側邊緣SE和後端邊緣be巡迴進行掃描。 120924.doc 1336398 所述掃描模組1 〇設置在玻璃基板S的移送路徑上，並對 處於停止狀態的玻璃基板S或由專門的工序區（zone)(例 如’檢查區等）支撐的玻璃基板S沿其邊緣巡迴而進行掃指 作業。 這種掃描模組1 〇包含攝像部件i i和透過玻璃基板s向所 述攝像部件11提供照明的照明部件12。掃描模組1〇以線掃 描（line scan)方式沿著玻璃基板s的各邊緣移動’並將掃描 的圖像（image)傳送給專門的控制部（未圖示）。 隨之所述控制部收集掃描圖像，並根據已程式化的邏 輯來判斷玻璃基板S邊緣是否存在缺陷。 但是，所述現有的玻璃基板邊緣檢查裝置由於是由單一 掃描模組通過巡迴玻璃基板的所有邊緣來進行掃描，因此 掃描路徑變長導致間歇時間（tact time)增加。 尤其，隨著電子材料製造技術的進步，玻璃基板的大小 曰益大i化，與之對應處理這種大面積玻璃基板的各種處 理裝置也日益大型化。因此’使用所述現有的玻璃基板邊 緣檢查裝置檢查玻璃基板的缺陷所需的間歇時間進一步增 加。 圖2為現有的另一種玻璃基板邊緣檢查裝置的示意圖。 參照圖2 ’現有的玻璃基板邊緣檢查裝置包含沿玻璃基 板s的移送方向順序設置的第一掃描模組2〇和第二掃描模 組3〇 ’所述第-掃描模組2〇和第二掃描模組％分別包含與 上述掃描模組10相同的攝像部件和照明部件。 所述第-掃描模組2〇是纟玻璃基板s被移送時以固定方 120924.doc 1336398 式對玻璃基板S的兩側邊緣SE進行線掃描的構成部件。由 所述第一掃描模組2〇完成對玻璃基板S的掃描之後，玻璃 基板S在移送路徑上旋轉90度繼續移送，並由所述第二掃 描模組30以固定方式對玻璃基板S的前端邊緣FE和後端邊 緣BE進行線掃描。 但是’所述現有的玻璃基板邊緣檢查裝置，由於還需設 置多個掃描模組和用於旋轉玻璃基板的裝置，因此導致裝 置變複雜’而且會佔用更多的設置空間。 【發明内容】 本發明是為了解決如上所述的問題而提出的，其目的在 ;k供種結構簡單並能迅速、準讀地檢查玻璃基板邊緣 是否存在缺陷的玻璃基板邊緣檢查裝置。 本發明的另一目的在於提供一種在檢查玻璃基板邊緣是 予在缺卩£3時使掃描模組的掃描路徑.最小化的玻璃基板邊 緣檢查方法。 為了實現上述目的’本發明所提供的玻璃基板邊緣檢查 裝置，包含：移送部，用以沿某一方向移送玻璃基板；設 在玻璃基板一表面兩側與玻璃基板保持相當於焦距的距離 的固疋式掃描模組，用以掃描處於移送狀態的玻璃基板的 兩側邊緣，沿玻璃基板的在移送方向上的端部進行直線往 返移動的移動式掃描模組，該移動式掃描模組在最初移動 時沿著處於停止狀態的玻璃基板的前端邊緣進行掃描，在 返回時沿著處於停止狀態的玻璃基板的後端邊緣進行掃 描控制。卩，用於收集所述各掃描模組所掃描的圖像並判 I20924.doc 1336398 斷玻璃基板邊緣是否存在缺陷β 並且’本發明所提供的玻璃基板邊緣檢查方法通過判斷 對玻璃基板邊緣進行線掃描而獲得的圖像來檢查玻璃基板 邊緣疋否存在缺陷，該方法包含步驟：（a)移送玻璃基板使 其别端邊緣與移動式掃描模組的移動路徑相一致；（b)所述 移動式掃描模組沿著處於停止狀態的玻璃基板前端邊緣移 動並進行掃描；（c)完成對玻璃基板前端邊緣的掃描之後， 移送玻璃基板使其後端邊緣與所述移動式掃描模組的移動 路徑相一致’同時通過固定式掃描模組掃描移動的玻璃基 板兩側邊緣；（d)完成對玻璃基板兩側邊緣的掃描之後，所 述移動式掃描模組沿玻璃基板後端邊緣返回並進行掃描。 【實施方式】 下面參照附圖詳細說明本發明的優選實施例。但是，以 下實施例是為了使本領域具有公知常識的人員能夠充分理 解本發明而提供的，可以將其變更為其他各種形態，即本 發明的範圍並不限定於下面記載的實施例。附圖中的相同 符號表示相同的構成要素。 圖3為本發明優選實施例所提供的玻璃基板邊緣檢查裝 置的示意圖，圖4為本發明優選實施例所提供的玻璃基板 邊緣檢查裝置的側面圖《圖5為本發明優選實施例所提供 的玻璃基板邊緣檢查裝置構成圖。 參照圖3至圖5 ’本發明所提供的玻璃基板邊緣檢查裝置 的實施例包含：移送部100，用以沿某一方向移送玻璃基 板S ;設在玻璃基板S的一表面兩側與玻璃基板s保持相當 120924.doc 丄wo观 於焦距的㈣的固定式掃描模組細，用崎描處於移送 狀態的玻璃基板S的.兩侧邊緣；沿玻璃基板s的在移送方向 上的端π進行直線往返移動的移動式掃描模組则，該移 動式掃描模組遍在最初移動時沿著處於停止狀態的玻璃 基板S的前端邊緣進行掃描，而在返回時沿著Μ停止狀 態的玻璃基板S的後端邊緣進行掃描；控制部4〇〇，用於收 集所述各掃㈣組所彳像’並判_㈣板s邊緣 是否存在缺陷。 本發明的實施例在玻璃基板s通過移送部1〇〇朝某一方向 移動的過程以及被置於卸载部500的過程中檢查邊緣是否 存在缺陷。 即，根據本發明的實施例，無需將玻璃基板8投入到專 門的檢查區等進行是否存在缺陷的檢查過程之後再移出， 而疋在通常的玻璃基板S搬運過程甲即可檢查是否存在缺 陷。 所述移送部100是利用支撐部件110上表面支撐玻璃基板 s並沿某一方向水平移送玻璃基板S將其放置到卸載部5〇〇 的構成部件》 如此’玻璃基板S在被移送部1〇〇移送的過程中通過固定 式掃描模組200掃描兩侧邊緣。 所述固定式掃描模組2〇〇設在玻璃基板s的移送路徑上， 並且設在玻璃基板S—表面兩側與玻璃基板S保持相當於攝 像部件201焦距的距離。 具體來講，固定式掃描模組2〇〇包含設在玻璃基板S—面 聰 24.doc -10- 1336398 與玻璃基板s保持相當於焦距的距離的攝像部件2〇1和設在 玻璃基板s另一面與玻璃基板s保持預定間距並與所述攝像 部件2 01相對而設置的照明部件2 〇 2。 作為一例’所述攝像部件2〇丨包含形成外部主體的鏡 筒、設在所述鏡筒内的透鏡、將通過所述透鏡入射的圖像 轉換為電信號而傳送到所述控制部4〇〇的CCD感測器 (charge coupled device，電荷耦合器件）。 作為一例，所述照明部件202可以使用螢光燈或水銀燈 等，是當所述攝像部件201掃描玻璃基板8邊緣時起照明光 源作用的構成部件。所述照明部件202位於連接攝像部件 201的所述透鏡及所述CCD感測器的直線上，使得透過玻 璃基板S的光線入射到攝像部件2〇丨的所述透鏡。 根據這種結構，固定式掃描模組2〇〇在玻璃基板s的移送 過程中對玻璃基板S邊緣進行掃描作業。 並且，玻璃基板S的移送速度可以根據固定式掃描模組 200的掃描速度進行增減。 所述控制部400收集固定式掃描模組2〇〇及移動式掃描模 組300掃描玻璃基板s邊緣而獲得的掃描圖像，並根據已程 式化的邏輯來判斷所獲得的掃描圖像而判斷玻璃基板8邊 緣是否存在缺陷。 並且，控制部400還可以包含顯示所獲得的掃描圖像及 判斷結果的輸出部41 〇。 控制部400控制移送部1〇0及移動式掃描模組3〇〇的驅 動’以順利進行掃描作業。1336398 IX. The present invention relates to a glass substrate edge inspection device, and more particularly to a glass substrate edge inspection device for inspecting the edge of a glass substrate for defects, and a glass substrate edge inspection method using the same. Prior Art Generally, a glass substrate is a processed substrate for manufacturing a flat panel display (FPD), which is manufactured by a melting manufacturing process. The manufacturing process of the glass substrate includes various processing processes and inspection processes, and particularly includes an inspection process for inspecting whether or not the glass substrate is defective, so as to prevent the glass substrate which is defective in the manufacturing process from being thrown into the subsequent process', thereby reducing cost and improving Rate of qualified products. As an example, in the processing of a glass substrate, the glass substrate is cut to a size conforming to the specifications of the flat panel display, and the edge of the glass substrate sharpened by the cutting is polished. During these processes, various defects may occur on the edge of the glass substrate, and these defects may have a significant impact on the quality of the flat panel display. Therefore, it is necessary to check whether there is a defect at the edge of the glass substrate to prevent the glass substrate which is judged to be defective from being thrown into In the follow-up process. 1 is a schematic view of a conventional glass substrate edge inspection device. Referring to Fig. 1, the conventional glass substrate edge inspection apparatus includes a scanning module. The scanning module 巡 is scanned along the front edge FE of the glass substrate s, the side edges SE, and the rear edge bebe on the basis of the transfer direction. 120924.doc 1336398 The scanning module 1 is disposed on a transfer path of the glass substrate S, and the glass substrate S in a stopped state or a glass substrate supported by a special process zone (for example, an inspection zone or the like) S sweeps along his edge and performs a finger-sweeping operation. The scanning module 1 includes an imaging unit i i and an illumination unit 12 that illuminates the imaging unit 11 through the glass substrate s. The scanning module 1 moves along the edges of the glass substrate s in a line scan mode and transmits the scanned image to a dedicated control unit (not shown). The control unit then collects the scanned image and judges whether or not the edge of the glass substrate S is defective based on the programmed logic. However, since the conventional glass substrate edge inspection device scans by scanning all the edges of the glass substrate by a single scanning module, the longer the scanning path leads to an increase in the tact time. In particular, with the advancement of electronic material manufacturing technology, the size of the glass substrate has been greatly increased, and various processing apparatuses for processing such a large-area glass substrate have become increasingly large. Therefore, the intermittent time required to inspect the defects of the glass substrate using the conventional glass substrate edge inspection device is further increased. 2 is a schematic view of another conventional glass substrate edge inspection device. Referring to FIG. 2 'the existing glass substrate edge inspection device includes a first scanning module 2 〇 and a second scanning module 3 〇 'the first scanning module 2 〇 and the second in the direction in which the glass substrate s is transferred. The scanning module % includes the same imaging unit and illumination unit as the scanning module 10 described above. The first scanning module 2 is a component for performing line scanning on both side edges SE of the glass substrate S by the fixed side 120924.doc 1336398 when the glass substrate s is transferred. After the scanning of the glass substrate S is completed by the first scanning module 2, the glass substrate S is rotated by 90 degrees on the transfer path, and the glass substrate S is fixedly disposed by the second scanning module 30. The front edge FE and the back edge BE are line scanned. However, the conventional glass substrate edge inspection device requires a plurality of scanning modules and a device for rotating the glass substrate, which results in a complicated device and takes up more space for installation. SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object thereof is to provide a glass substrate edge inspection apparatus which is simple in structure and can quickly and accurately read whether or not there is a defect in the edge of a glass substrate. Another object of the present invention is to provide a method for inspecting a glass substrate edge which minimizes the scanning path of the scanning module when the edge of the glass substrate is inspected. In order to achieve the above object, the glass substrate edge inspection apparatus provided by the present invention includes: a transfer portion for transferring the glass substrate in a certain direction; and a solid portion disposed on both sides of the surface of the glass substrate and maintaining a distance corresponding to a focal length on the glass substrate The scanning module is configured to scan the two sides of the glass substrate in the transfer state, and to move the scanning module linearly back and forth along the end of the glass substrate in the transfer direction, the mobile scanning module is initially Scanning is performed along the leading edge of the glass substrate in a stopped state during the movement, and scanning control is performed along the trailing edge of the glass substrate in the stopped state upon returning.卩, for collecting the images scanned by the scanning modules and determining whether there is a defect β at the edge of the glass substrate by the I20924.doc 1336398 and the method for inspecting the edge of the glass substrate by determining the edge of the glass substrate Scanning the image to check whether there is a defect in the edge of the glass substrate, the method comprising the steps of: (a) transferring the glass substrate such that the other end edge coincides with the moving path of the mobile scanning module; (b) the moving The scanning module moves along the edge of the front end of the glass substrate in the stopped state and scans; (c) after scanning the front edge of the glass substrate, the glass substrate is transferred to move the rear end edge thereof and the mobile scanning module The paths are consistent 'while scanning both sides of the moving glass substrate through the fixed scanning module; (d) after scanning the two sides of the glass substrate, the moving scanning module returns along the rear edge of the glass substrate and proceeds scanning. [Embodiment] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the following embodiments are provided to enable those skilled in the art to fully understand the present invention, and may be modified into other various forms, that is, the scope of the present invention is not limited to the embodiments described below. The same reference numerals in the drawings denote the same constituent elements. 3 is a schematic view of a glass substrate edge inspection device according to a preferred embodiment of the present invention, and FIG. 4 is a side view of a glass substrate edge inspection device according to a preferred embodiment of the present invention. FIG. 5 is a view of a preferred embodiment of the present invention. The glass substrate edge inspection device is constructed. 3 to FIG. 5 'The embodiment of the glass substrate edge inspection apparatus provided by the present invention includes: a transfer portion 100 for transferring the glass substrate S in a certain direction; and a glass substrate provided on both sides of a surface of the glass substrate S s keeps the equivalent of 120924.doc 丄 观 观 观 观 观 观 观 观 观 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定The mobile scanning module that moves linearly back and forth, the mobile scanning module scans along the front edge of the glass substrate S in the stopped state during the initial movement, and the glass substrate S along the stopped state when returning The rear end edge is scanned; the control unit 4 is configured to collect the images of the respective swabs and determine whether there is a defect in the edge of the board. The embodiment of the present invention checks whether the edge is defective in the process in which the glass substrate s is moved in a certain direction by the transfer portion 1 and in the process of being placed in the unloading portion 500. That is, according to the embodiment of the present invention, it is not necessary to put the glass substrate 8 into a special inspection area or the like to perform inspection after the presence or absence of a defect, and it is possible to check whether or not there is a defect in the normal glass substrate S conveyance process. The transfer unit 100 is a constituent member that supports the glass substrate s by the upper surface of the support member 110 and horizontally transports the glass substrate S in a certain direction to the unloading portion 5A. Thus, the glass substrate S is transferred to the transfer portion 1 During the transfer process, the two sides of the edge are scanned by the fixed scanning module 200. The fixed scanning module 2 is disposed on a transfer path of the glass substrate s, and is provided on both sides of the glass substrate S-surface to maintain a distance corresponding to the focal length of the image pickup unit 201 from the glass substrate S. Specifically, the fixed scanning module 2 includes an imaging member 2〇1 disposed on the glass substrate S-face Cong 24.doc -10- 1336398 and a distance corresponding to the focal length of the glass substrate s, and a glass substrate s. The other surface is provided with a predetermined distance between the glass substrate s and the illumination member 2 〇2 provided opposite to the imaging member 201. As an example, the imaging unit 2 includes a lens barrel that forms an external body, a lens that is provided in the lens barrel, and an image that is incident on the lens is converted into an electrical signal and transmitted to the control unit. Charge CCD sensor (charge coupled device). As an example, the illumination member 202 may be a fluorescent lamp, a mercury lamp or the like, and is a constituent member that functions as an illumination light source when the imaging member 201 scans the edge of the glass substrate 8. The illumination member 202 is located on a line connecting the lens of the imaging member 201 and the CCD sensor such that light transmitted through the glass substrate S is incident on the lens of the imaging member 2A. According to this configuration, the stationary scanning module 2 scans the edge of the glass substrate S during the transfer of the glass substrate s. Further, the transfer speed of the glass substrate S can be increased or decreased according to the scanning speed of the stationary scanning module 200. The control unit 400 collects the scanned image obtained by scanning the edge of the glass substrate s by the fixed scanning module 2 and the mobile scanning module 300, and judges the obtained scanned image according to the programmed logic. Whether there is a defect in the edge of the glass substrate 8. Further, the control unit 400 may further include an output unit 41 that displays the obtained scanned image and the determination result. The control unit 400 controls the transfer unit 1〇0 and the drive of the mobile scan module 3〇〇 to smoothly perform the scan operation.
： S 120924.doc 丄圳398 即’控制部400控制將在後面描述的移動式掃描模組3〇〇 的移動部件320、旋轉部件33〇及升降部件340的驅動，以 通過移動式掃描模組3〇〇掃描玻璃基板s的前端邊緣及後端 邊緣》 參照圖4 ’所述移動式掃描模組300包含：與所述固定式 掃描模組200相同的攝像部件30 1及照明部件302 ;連接所 述攝像部件301和照明部件302的連接部件3 10 ;使所述連 接邛件3 1 〇沿玻璃基板s的在移送方向上的端部邊緣進行直 線往返移動的移動部件320 ;與所述連接部件3 10結合的旋 轉。I5件3 3 0，該旋轉部件3 3 〇以直線連接所述攝像部件3 〇工 和所述照明部件302的假想線χ為旋轉軸旋轉所述連接部件 0 ’在所述移動部件32〇與所述旋轉部件mo之間使所 述旋轉部件330沿所述假想線X進行升降的升降部件340。 匕種移動式掃描模組3〇〇不同於固定設置在玻璃基板§的 移送路彳二上對處於移送狀態的玻璃基板s進行掃描的固定 弋掃描模、·且200 ’是沿著處於停止狀態的玻璃基板s的在移 送方向上的端部進行直線往返移動而進行掃描的構成部 件0 所述連接部件310大致呈"□"形，在上部設置攝像部件 301 ’在與其相對的下部設置照明部件3G2，為使所述攝像 部件3(H和照明部件3〇2與玻璃基板s表面保持預定間距， 玻璃基板S的别端邊緣或後端邊緣由連接部件3 1G的開口側 進入。 如此，移動式掃描模組3〇〇的攝像部件3〇ι和照明部件 120924.doc 12 1336398 302通過連接部件310連接成一體，而連接部件310通過所 述移動部件320沿玻璃基板S前端邊緣和後端邊緣移動，由 此進行掃描並將掃描的圖像傳送到所述控制部400。 所述移動部件320包含與玻璃基板S移送方向垂直設置的 導軌32 1和沿所述導軌321進行直線往返移動的滑塊322。 所述導執321長度最好大於玻璃基板S的寬度，以使移動 式掃描模組300針對玻璃基板S的整個寬度移動而進行掃 描。 所述滑塊322是根據驅動源323的電源供應及電流方向轉 換由所述導執321引導而進行直線往返移動的構成部件。 所述旋轉部件330的旋轉軸332垂直結合於連接部件3 10 上端部’並以直線連接攝像部件3〇 1和照明部件3〇2的假想 線X為旋轉轴旋轉連接部件3 10。 所述升降部件340包含與所述旋轉部件330的外殼33 1相 結合而沿所述假想線X進行升降的移動體342和引導所述移 動體342升降並與所述移動部件32〇的滑塊322相結合而進 行直線往返移動的主體341。 如上所述，在移動式掃描模組3〇〇中，旋轉部件33 〇結合 到連接部件3 10上側’升降部件34〇結合到旋轉部件33〇的 外破33 1，移動部件320結合到升降部件340的主體341，而 且由於多個驅動裝置以最佳狀態有機地結合起來，因此簡 化了裝置結構，同時能夠沿玻璃基板s前端邊緣和後端邊 緣順利進行掃描。 以下，說明利用本發明優選實施例所提供的玻璃基板邊 120924.doc 1336398 緣檢查裝置的邊緣檢查方法。 圖6a至圖6d為用於說明利用本發明優選實施例所提供的 玻璃基板邊緣檢查裝置的邊緣檢查方法的工作狀態圖。 參照圖6a，玻璃基板s在由移送部1 〇〇移送到卸載部5〇〇 的途中，當其前端邊緣到達與移動式掃描模組3〇〇的移動 路徑相一致的位置時，停止移送。 此時’連接部件3 10應保持其開口部位旋轉到玻璃基板3 進入方向的狀態，由此在玻璃基板s前端邊緣進入開口部 位的狀態下使玻璃基板S停止。 參照圖6b ’當移動部件320的滑塊322沿導軌321移動 時’移動式掃描模組300也一起移動並掃描處於停止狀態 的玻璃基板S前端邊緣，此時攝像部件301所獲得的掃描圖 像被傳送到控制部400。 此時，在元成對玻璃基板§前端邊緣的掃描之後，連接 部件310最好停在玻璃基板s向前移動時避免與玻璃基板$ 發生碰撞的位置。 參照圖6c ,玻璃基板s在由移送部1 〇〇移送到卸載部5〇〇 的途中，當其後端邊緣到達與移動式掃描模組3〇〇的移動 路徑相一致的位置時，停止移送。 此時，固疋设置在玻璃基板§的移送路徑上的固定式掃 描模組200掃描玻璃基板s兩側邊緣，此時攝像部件2〇丨所 獲得的掃描圖像被傳送到控制部4 〇 〇。 參照圖6d，當移動部件320的滑塊322沿導軌321返回 時’移動式掃描模組300也一起返回並掃描處於停止狀態 120924.doc 14 丄 的玻璃基板S後端邊緣’此時攝像部件3(H所獲得的掃描圖 像傳送到控制部4〇〇·。 此時，由於只有讓玻璃基板S的後端邊緣從連接部件31〇 的開口側進入才能避免碰撞’因此移動式掃描模組期在 • 根據旋轉部件330的旋轉驅動將連接部件31〇旋轉18〇度之 後才沿著玻璃基板S的後端邊緣返回。 作為一例，當玻璃基板8到達其後端邊緣與移動式掃描 • 模組3〇0的移動路徑相一致的位置時，由從卸載部500向上 突出的支持銷510支撐玻璃基板s，如圖4所示。 由此，玻璃基板S被支持銷51〇支撐，而移送部1〇〇的支撐 部件no為了移送下—個玻璃基板s而撤回，接著支持銷51〇 返回下方使得被支持銷510支撐的玻璃基板8被置於卸載部 500平面上，因此其高度低於由移送部1〇〇移送時的高度。 在這種移送條件下，移動式掃描模組3〇〇只有根據升降 部件340的驅動使連接部件3 1〇下降的高度相當於玻璃基板 鲁 S的下降高度，才能無需改變焦點而正常掃描處於卸載狀 態的玻璃基板S的後端邊緣。 • 即，移動式掃描模組300即使玻璃基板S被卸載到卸載部 500而使得高度低於移送時高度，也能對應焦距變化進行 掃描。 另外，移動式掃描模組300可以在攝像部件301上應用可 變焦調節的變焦透鏡（zoom lens)方式而省略升降部件 340。 作為一例，移動式掃描模組300也可以在玻璃基板s到達 120924.doc . 15- i 1336398 炱&邊緣與移動式知描模組3 〇 〇移動路徑相一致的位置但 還未卸載到却載部50〇時’例如在被支撐部件11〇支撐的狀 態下對後端邊緣進行掃描。即，支撐部件i i 0可以折曲而 形成連接部件310返回時通過的區間，以避免連接部件31〇 返回時與其發生碰撞。 以上圖不並說明了本發明的特定的優選實施例，但本發 ^並不限定於上述實施例，在不脫離本發明思想的範圍内: S 120924.doc 丄 398 </ RTI> The control unit 400 controls the driving of the moving part 320, the rotating part 33 〇 and the lifting part 340 of the mobile scanning module 3 将 which will be described later to pass the mobile scanning module 3) scanning the front edge and the rear edge of the glass substrate s. Referring to FIG. 4, the mobile scanning module 300 includes the same imaging member 30 1 and illumination component 302 as the fixed scanning module 200; a connecting member 3 10 of the imaging member 301 and the illumination member 302; a moving member 320 for linearly reciprocating the connecting member 3 1 along an end edge of the glass substrate s in the transfer direction; The rotation of the combination of the components 3 10 . I5 member 3 3 0, the rotating member 3 3 is connected in a straight line to the imaging member 3 and the imaginary line of the illumination member 302 is rotated to rotate the connecting member 0' at the moving member 32 An elevating member 340 that elevates and rotates the rotating member 330 along the imaginary line X between the rotating members mo. The mobile scanning module 3 is different from the fixed scanning mode in which the glass substrate s in the transfer state is scanned on the transfer path of the glass substrate, and the 200' is along the stop state. Component 0 in which the end portion of the glass substrate s in the transfer direction is linearly reciprocated and scanned. The connecting member 310 is substantially in the shape of a "□", and the imaging member 301' is disposed at an upper portion thereof. In the illumination member 3G2, in order to maintain the imaging member 3 (H and the illumination member 3〇2 and the surface of the glass substrate s at a predetermined pitch, the other end edge or the rear end edge of the glass substrate S enters from the opening side of the connection member 3 1G. The imaging unit 3〇 of the mobile scanning module 3〇〇 and the illumination unit 120924.doc 12 1336398 302 are integrally connected by the connecting member 310, and the connecting member 310 passes the moving member 320 along the front edge of the glass substrate S and the rear The end edge moves, thereby scanning and transmitting the scanned image to the control portion 400. The moving member 320 includes a vertical direction disposed opposite to the glass substrate S transfer direction The guide rail 32 1 and the slider 322 linearly reciprocating along the guide rail 321 . The length of the guide 321 is preferably larger than the width of the glass substrate S, so that the mobile scan module 300 moves for the entire width of the glass substrate S. The slider 322 is a component that is linearly reciprocated by the guide 321 according to the power supply and current direction conversion of the drive source 323. The rotary shaft 332 of the rotary member 330 is vertically coupled to the connection member. 3 10 The upper end portion 'and the imaginary line X connecting the imaging member 3〇1 and the illumination member 3〇2 in a straight line is the rotation axis rotation connecting member 3 10. The lifting member 340 includes the outer casing 33 1 of the rotating member 330. The moving body 342 that moves up and down along the imaginary line X and the main body 341 that guides the moving body 342 to move up and down and engage with the slider 322 of the moving member 32〇 linearly reciprocate. As described above, In the mobile scanning module 3, the rotating member 33 is coupled to the upper side of the connecting member 3 10, and the lifting member 34 is coupled to the outer portion 33 of the rotating member 33, and the moving member 320 is coupled to the lifting portion. The main body 341 of the member 340, and since a plurality of driving devices are organically combined in an optimum state, the device structure is simplified, and scanning can be smoothly performed along the front end edge and the rear end edge of the glass substrate s. Hereinafter, the present invention is preferably described. The edge inspection method of the edge inspection device of the glass substrate side 120924.doc 1336398 provided by the embodiment. Fig. 6a to Fig. 6d are diagrams for explaining the operation state of the edge inspection method of the glass substrate edge inspection device provided by the preferred embodiment of the present invention. Referring to Fig. 6a, the glass substrate s is stopped on the way from the transfer portion 1 to the unloading portion 5, and when the leading edge thereof reaches a position coincident with the moving path of the mobile scanning module 3A, the glass substrate s is stopped. Transfer. At this time, the connecting member 3 10 should maintain its opening portion rotated to the state in which the glass substrate 3 enters the direction, thereby stopping the glass substrate S in a state where the leading edge of the glass substrate s enters the opening portion. Referring to FIG. 6b' when the slider 322 of the moving member 320 moves along the guide rail 321, the mobile scanning module 300 also moves together and scans the leading edge of the glass substrate S in the stopped state, at which time the scanned image obtained by the imaging member 301 is obtained. It is transmitted to the control unit 400. At this time, after the scanning of the front end edge of the glass substrate §, the connecting member 310 preferably stops at a position where the glass substrate s collides with the glass substrate $ when moving forward. Referring to Fig. 6c, the glass substrate s is stopped on the way from the transfer portion 1 to the unloading portion 5, and when the trailing edge thereof reaches a position coincident with the moving path of the mobile scanning module 3A, the transfer is stopped. . At this time, the fixed scanning module 200 disposed on the transfer path of the glass substrate is scanned on both sides of the glass substrate s, and the scanned image obtained by the image pickup unit 2 is transmitted to the control unit 4 . Referring to FIG. 6d, when the slider 322 of the moving member 320 returns along the guide rail 321, the mobile scanning module 300 also returns and scans the rear end edge of the glass substrate S in the stopped state 120924.doc 14 ' at this time, the image pickup unit 3 (The scanned image obtained by H is transmitted to the control unit 4. At this time, since only the rear end edge of the glass substrate S is entered from the opening side of the connecting member 31〇 to avoid collision, the mobile scanning module period • Returning along the rear end edge of the glass substrate S after the connection member 31 is rotated by 18 degrees according to the rotational driving of the rotating member 330. As an example, when the glass substrate 8 reaches its rear end edge and the mobile scanning module When the moving path of 3〇0 coincides, the glass substrate s is supported by the support pin 510 protruding upward from the unloading portion 500, as shown in Fig. 4. Thereby, the glass substrate S is supported by the support pin 51〇, and the transfer portion The support member no of one turn is withdrawn for transferring the next glass substrate s, and then the support pin 51 turns back to the lower side so that the glass substrate 8 supported by the support pin 510 is placed on the plane of the unloading portion 500, so that it is high It is lower than the height when being transferred by the transfer unit 1 . Under this transfer condition, the height of the movable scanning module 3 〇 only by the driving of the elevating member 340 is reduced by the height corresponding to the glass substrate Lu S The descending height can normally scan the rear edge of the glass substrate S in the unloaded state without changing the focus. • That is, the mobile scanning module 300 has a height lower than the height of the transfer even if the glass substrate S is unloaded to the unloading portion 500. Further, the mobile scanning module 300 can apply a zoom lens zoom lens to the imaging unit 301 to omit the lifting member 340. As an example, the mobile scanning module 300 It is also possible to reach the position where the glass substrate s reaches 120924.doc. 15-i 1336398 炱& edge coincides with the moving path of the movable scanning module 3 但 but has not been unloaded to the carrier 50 ' ' The support member 11 is scanned in a state of being supported by the rear end edge. That is, the support member ii 0 can be bent to form a section through which the connection member 310 returns, The connection member 31 is prevented from colliding with it upon returning. The above description does not describe a specific preferred embodiment of the present invention, but the present invention is not limited to the above embodiment, and does not depart from the scope of the present invention.
° 、由本項域具有公知常識的人員進行各種變形和修改。 綜上所述，本發明通過由單一的移動式掃描模組和一對 固定式掃描模組構成的簡單結構的組合迅速、準確地檢查 玻璃基板錢Μ存在健，從^㈣高檢查效率。 ' 由於本發明中用於使移動式掃描模組移動、轉動 升降的各構成。卩件相互有機的進行連接而簡化了裝置構 成’因此不僅經濟’而且可以方便地適用於各種移送條件 下的玻璃基板。° Various modifications and modifications are made by those who have common knowledge in this field. In summary, the present invention quickly and accurately inspects the existence of a glass substrate by a simple combination of a single mobile scanning module and a pair of fixed scanning modules, and has a high inspection efficiency from ^(4). The configuration for moving, rotating, and lifting the mobile scanning module in the present invention. The organic components are connected to each other to simplify the construction of the device. Therefore, it is not only economical but also can be easily applied to glass substrates under various transfer conditions.
*並且，本發明在麵基板的搬運路徑上無需專門的結構 變形而設置模組化的移動+ θ 秒勁式掃描模組來檢查玻璃基板邊緣 是否存在缺陷，因此非常經濟。 ^且，由於本發明中移動式掃描模組交㈣描玻璃基板 則4邊緣和後端邊緣，因此不僅可以使掃描路徑最小，而* In addition, the present invention provides a modular moving + θ seconds scanning module to detect the presence or absence of defects on the edge of the glass substrate without requiring special structural deformation on the transport path of the surface substrate, which is very economical. Moreover, since the mobile scanning module of the present invention intersects (four) the glass substrate, the edge 4 and the trailing edge, not only can the scanning path be minimized, but
Sr玻璃基板停止時間最短，所以大幅縮短了檢查所需 的整個間歇時間。 【圖式簡單說明】 圖1為現有的-種破璃基板邊緣檢查裝置的示意圖The Sr glass substrate has the shortest stop time, so the entire pause time required for inspection is drastically shortened. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view of a conventional edge inspection device for a glass substrate.
120924.doc -16 · 1336398 圖2為現有的另一種玻璃基板邊緣檢查裝置的示意圖； 圖3為本發明優選、實施例所提供的玻璃基板邊緣檢查裝 置的示意圖； 圖4為本發明優選實施例所提供的玻璃基板邊緣檢查裝 置的側面圖； 圖5為本發明優選實施例所提供的玻璃基板邊緣檢查裝 置構成圖；120924.doc -16 · 1336398 FIG. 2 is a schematic view of another conventional glass substrate edge inspection device; FIG. 3 is a schematic view of a glass substrate edge inspection device according to a preferred embodiment of the present invention; FIG. 4 is a preferred embodiment of the present invention FIG. 5 is a side view of a glass substrate edge inspection device according to a preferred embodiment of the present invention; FIG.
圖6a至圖6d為用於說明利用本發明優選實施例所提供的 玻璃基板邊緣檢查裝置的邊緣檢查方法的工作狀態圖。 【主要元件符號說明】 100 為移送部 110 為支撐部件 200 為固定式掃描模組 201 為攝像部件 202 為照明部件 300 為移動式掃描模組 301 為攝像部件 302 為照明部件 310 為連接部件 320 為移動部件 330 為旋轉部件 340 為升降部件 400 為控制部 500 為卸載部Fig. 6a to Fig. 6d are operational state diagrams for explaining an edge inspection method of a glass substrate edge inspection apparatus provided by a preferred embodiment of the present invention. [Description of main component symbols] 100 is a transfer unit 110, a support member 200 is a fixed scan module 201, an image pickup unit 202 is an illumination unit 300, a mobile scan module 301 is an image pickup unit 302, and an illumination unit 310 is a connection unit 320. The moving part 330 is the rotating part 340, and the lifting part 400 is the unloading part of the control part 500.
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