TWI334025B

TWI334025B - Portable multi-ions sensing system

Info

Publication number: TWI334025B
Application number: TW096109657A
Authority: TW
Inventors: Shen Kan Hsiung; Jung Chuan Chou; Tai Ping Sun; Nien Hsuan Chou; Gin Chou Yang
Original assignee: Univ Chung Yuan Christian
Priority date: 2007-03-21
Filing date: 2007-03-21
Publication date: 2010-12-01
Also published as: TW200839235A

Description

1334025 九、發明說明：【發明所屬之技術領域】本發明係有關於離子濃度(ion concentrati〇n)感測系統及其研製方法，特別是有關於可攜式多重離子感測系統及其研製方法。【先前技術】離子場效電晶體(Ion Sensitive Field Effect Transistor·; ISFET)係70年代出現並且迅速發展之微型感測元件，其發展至今僅30多年，但與其相關之論文已超過6〇〇多篇，而其他與其相關元件之研究亦有150多篇，如酵素感測場效電晶體 (Enzyme Field Effect Transistor; EnFET)、免疫感測場效電晶體 (Immune Field Effect Transistor ； IMFET) [P. Bergveld, ^Thirty years of ISFETOLOGY ： What happened in the past 30 years and what may happen in the next 30 years^, Sensors and Actuators B, Vol.88, pp· 1-20,2003·]。此外，ISFET亦可取代玻璃電極進行酸鹼值與離子濃度 (例如：Na，K，Cl，NH4+，Ca2+等)之量測[Miao Yuqing，Guan Jianguo, and Chen Jianrong，“Ion sensitive field effect transducer-based biosensors’’，Biotechnology Advances，Vol.21， pp.527-534,2003.]，其最早係由P. Bergveld所提出，主要係將 6 1334025 金屬氧化半導體場效電晶體(Metal Oxide Semiconductor Field Effect Transistor ; MOSFET)之金屬閘極去除，並將二氧化石夕 (Si〇2)層之元件與一參考電極置於水溶液中，則流過其元件之電流會隨著氫離子之濃度而變化，其效應與玻璃電極相同，故具酸鹼感測之特性[鄭建斌，李永利，高鴻，“離子敏感場效應晶體管及其應用’，，分析化學，第23卷第7期，pp.842-849, 1995.;武世香，虞惇，王貴華，“化學感測器量測，，，感測器技術，第 3 期，pp.57-62, 1990.]。目刖已有少數商品化之ISFET感測元件，例如：isfeT 酸鹼度計(pH meter)，但其穩定性與壽命仍是一相當大問題，例如·時漂現象及遲滯效應等。而本發明所使用之延伸式閘極感測％效電晶體(Extended Gate Field Effect Transistor; EGFET) 係另一種形式之ISFET，其將FET由化學量測環境分離出來，並將化學感測薄膜沉積於FET閘極區域所延伸出來之訊號線末端上，且將電性之作用區與化學作用區作個別之封裳，故 EGFET係比傳統ISFET具有更容易封裝及保存等優點並且其穩定度亦較佳[廖漢洲，“應用於生物感測器之新型校正與補償技術電路，’，2004年6月，中原大學電子工程學系，碩士學位論文，ρρ·11-29·]。近年來，已有眾多學者著手研究EGFET之特性，如元件設計[Li Te Yin，Jung Chuan Chou, Wen Yaw Chung，Tai Ping 7 13340251334025 IX. Description of the Invention: [Technical Field] The present invention relates to an ion concentration sensing system and a method for the development thereof, and more particularly to a portable multi-ion sensing system and a method for the same . [Prior Art] Ion Sensitive Field Effect Transistor (ISFET) is a micro-sensing component that appeared and developed rapidly in the 1970s. It has been developed for more than 30 years, but more than 6 related papers have been published. There are more than 150 studies on other related components, such as Enzyme Field Effect Transistor (EnFET) and Immune Field Effect Transistor (IMFET) [P. Bergveld, ^Thirty years of ISFETOLOGY : What happened in the past 30 years and what may happen in the next 30 years^, Sensors and Actuators B, Vol.88, pp·1-20, 2003·]. In addition, ISFET can also replace the glass electrode for the measurement of pH and ion concentration (eg, Na, K, Cl, NH4+, Ca2+, etc.) [Miao Yuqing, Guan Jianguo, and Chen Jianrong, "Ion sensitive field effect transducer- Based biosensors'', Biotechnology Advances, Vol.21, pp. 527-534, 2003.], the earliest of which was proposed by P. Bergveld, mainly to 6 1334025 metal oxide semiconductor field effect transistor (Metal Oxide Semiconductor Field Effect) The metal gate of the Transistor; MOSFET) is removed, and the element of the SiO 2 layer and a reference electrode are placed in an aqueous solution, and the current flowing through the element changes with the concentration of the hydrogen ion. Its effect is the same as that of glass electrode, so it has the characteristics of acid-base sensing [Zheng Jianbin, Li Yongli, Gao Hong, "Ion-sensitive field effect transistor and its application", Analytical Chemistry, Vol. 23, No. 7, pp.842-849 , 1995.; Wu Shixiang, Yan, Wang Guihua, "Chemical Sensor Measurement,,, Sensor Technology, No. 3, pp. 57-62, 1990.]. There are a few commercialized ISFETs. Measuring component, for example: isfeT Alkalinity meter (pH meter), but its stability and longevity are still a considerable problem, such as · time drift phenomenon and hysteresis effect, etc.. The extended gate sensing % effect transistor used in the present invention (Extended Gate) Field Effect Transistor; EGFET) is another form of ISFET that separates the FET from the chemical measurement environment and deposits a chemical sensing film on the end of the signal line that extends from the gate region of the FET. The action zone and the chemical action zone are individually sealed, so the EGFET is easier to package and store than the traditional ISFET and its stability is better [廖汉洲, "New correction and compensation technology circuit applied to biosensors , ', June 2004, Department of Electronic Engineering, Chung Yuan Christian University, master's thesis, ρρ·11-29·]. In recent years, many scholars have begun to study the characteristics of EGFETs, such as component design [Li Te Yin, Jung Chuan Chou, Wen Yaw Chung, Tai Ping 7 1334025

Sun, and Shen Kan Hsiung, <4Study on separate structure extended gate H+-ion sensitive filed effect transistor on a glass substrate’’， Sensors and Actuators B, Vol.71,106-111, 2000. ； Li Te Yin, Jung Chuan Chou, Wen Yaw Chung, Tai Ping Sun, and Shen Kan Hsiung, uStudy of indium tin oxide thin film for separative extended gate ISFET”，Materials Chemistry and Physics, V〇1.70, pp.12-16, 2001. ； Li Te Yin, Jung Chuan Chou, Wen Yaw Chung, Tai Ping Sun，Kuang Pin Hsiung，and Shen Kan Hsiung, “Study on glucose ENFET doped with Mn02 powder55, Sensors and Actuators B，Vol.76, pp.187-192, 2001.;殷立德，“以離子感測場效電晶體做為生物感測器之研究”，2001年6月，中原大學醫學工程學系，博士學位論文，PP.76-108.]、特性分析[覃永隆， “以CMOS製程技術製作延伸式場效電晶體及其訊號處理積體電路之研究”,2001年6月，中原大學電子工程學系，博士學位論文，pp.36-44.;陳佳琪，“可拋棄式尿素感測器與前置放大器之研究”，2002年6月，中原大學電子工程學系，碩士學位論文， pp.51-80. ； Jia Chyi Chen, Jung Chuan Chou, Tai Ping Sun, and Shen Kan Hsiung, ^Portable urea biosensor based on the extended-gate field effect transistor”，Sensors and Actuators B， Vol.91, pp.180-186, 2003. ； Chung We Pan, Jung Chuan Chou, I Kone Kao, Tai Ping Sun, and Shen Kan Hsiung, “Using 8 1334025Sun, and Shen Kan Hsiung, <4Study on separate structure extended gate H+-ion sensitive filed effect transistor on a glass substrate'', Sensors and Actuators B, Vol.71,106-111, 2000. ; Li Te Yin, Jung Chuan Chou , Wen Yaw Chung, Tai Ping Sun, and Shen Kan Hsiung, uStudy of indium tin oxide thin film for separative extended gate ISFET", Materials Chemistry and Physics, V〇 1.70, pp. 12-16, 2001.; Li Te Yin, Jung Chuan Chou, Wen Yaw Chung, Tai Ping Sun, Kuang Pin Hsiung, and Shen Kan Hsiung, “Study on glucose ENFET doped with Mn02 powder55, Sensors and Actuators B, Vol.76, pp.187-192, 2001.; Yin Lide "Ion-sensing field-effect transistor as a biosensor", June 2001, Department of Medical Engineering, Chung Yuan Christian University, Ph.D. Thesis, PP.76-108.], Characteristic Analysis [覃永隆, "Study on the production of extended field effect transistor and its signal processing integrated circuit by CMOS process technology", June 2001, Department of Electronic Engineering, Chung Yuan Christian University, Ph.D. thesis, pp.36-44.; Chen Jiaqi, "Can Research on Abandoned Urea Sensors and Preamplifiers, June 2002, Department of Electronic Engineering, Chung Yuan Christian University, Master's Thesis, pp.51-80. ; Jia Chyi Chen, Jung Chuan Chou, Tai Ping Sun, and Shen Kan Hsiung, ^Portable urea biosensor based on the extended-gate field effect transistor",Sensors and Actuators B, Vol.91, pp.180-186, 2003. ; Chung We Pan, Jung Chuan Chou, I Kone Kao, Tai Ping Sun, and Shen Kan Hsiung, “Using 8 1334025

polypyrrole as the contrast pH detector to fabricate a whole solid-state pH sensing device”，IEEE Sensors Journal，Vol.3, pp.164-170, 2003·; Jui Fu Cheng，Jung Chuan Chou, Tai Ping Sun， and Shen Kan Hsiung, uStudy on the chloride ion selective electrode based on the Sn02/IT0 glass”，Proceedings of The 2003 Electron Devices and Materials Symposium (EDMS), National Taiwan Ocean University, Keelung, Taiwan, R.O.C., pp.557-560, 2003. ； Jui Fu Cheng, Jung Chuan Chou, Tai Ping Sun, and Shen Kan Hsiung, 4<Study on the chloride ion selective electrode based on the Sn02/ITO glass and double-layer sensor structure”， Proceedings of The 10th International Meeting on Chemical Sensors, Tsukuba International Congress Center, Tsukuba, Japan, pp.720-721，2004.]、時漂現象以及遲滯效應等特性[廖漢洲， “應用於生物感測器之新型校正與補償技術電路”，2004年6月，中原大學電子工程學系，碩士學位論文，pp.11-29. ; Chu Neng Tsai, Jung Chuan Chou, Tai Ping Sun, and Shen Kan Hsiung, “Study on tiie hysteresis of the metal oxide pH electrode”, Proceedings of The 10th International Meeting on Chemical Sensors, Tsukuba International Congress Center, Tsukuba, Japan, pp.586-587, 2004. ； Chu Neng Tsai, Jung Chuan Chou, Tai Ping Sun, and Shen Kan Hsiung, ^Study on the sensing characteristics 9 1334025Polypyrrole as the contrast pH detector to fabricate a whole solid-state pH sensing device”, IEEE Sensors Journal, Vol.3, pp.164-170, 2003·; Jui Fu Cheng, Jung Chuan Chou, Tai Ping Sun, and Shen Kan Hsiung, uStudy on the chloride ion selective electrode based on the Sn02/IT0 glass", Proceedings of The 2003 Electron Devices and Materials Symposium (EDMS), National Taiwan Ocean University, Keelung, Taiwan, ROC, pp. 557-560, 2003. Jui Fu Cheng, Jung Chuan Chou, Tai Ping Sun, and Shen Kan Hsiung, 4<Study on the chloride ion selective electrode based on the Sn02/ITO glass and double-layer sensor structure”, Proceedings of The 10th International Meeting on Chemical Sensors, Tsukuba International Congress Center, Tsukuba, Japan, pp.720-721, 2004.], time drift phenomenon and hysteresis effect [Liao Hanzhou, "New Correction and Compensation Technology Circuit for Biosensors", 2004 June, Department of Electronic Engineering, Chung Yuan Christian University, Master's thesis, pp.11-29.; Chu Neng Tsai, Jung Chuan Chou, Tai Ping Sun, and Shen Kan Hsiung, "Study on tiie hysteresis of the metal oxide pH electrode", Proceedings of The 10th International Meeting on Chemical Sensors, Tsukuba International Congress Center, Tsukuba, Japan, pp. 586-587, 2004. Chu Neng Tsai, Jung Chuan Chou, Tai Ping Sun, and Shen Kan Hsiung, ^Study on the sensing characteristics 9 1334025

and hysteresis effect of the tin oxide pH electrode,,> Sensors and Actuators B，Vol· 108, pp.877-882, 2005·]，迄今對感測元件特性已十分了解，故本發明將所製作之多重離子感測器結合嵌入式系統（embedded system)技術[Microchip Technology Inc.， “http://www.microchip.com”，PIC18F452 datasheet ; Microchip Technology Inc” “http://www.microchip.com”，MPLAB Cl8 C Compiler User's Guide,]，使本發明具備LCD即時顯示、USB 及USART資料傳輸等功能，藉此完成一可機式多重離子感測系統之研製。【發明内容】本發明係提供一種可攜式多重離子感測系統，此可攜式多重離子感測系統包含：一感測單元，係用以感測待測液體之酸驗值及複數種離子濃度以輸出一感測信號，其中此感測單元係包含：一基板；一氧化銦錫層，係位於此基板上；一感測層，係位於此氧化銦錫層上並連接一延伸導線；一封裝層，係包覆此感測層、此氧化銦錫層與部分此基板，其係具有一感測窗以暴露部分此感測層；一多重離子選擇層，係位於此感測窗内之部分此感測層上’此多重離子選擇層係用以感測此複數種離子濃度；及一參考電極，係用以提供此感測層量測之參考電位；一類比信號處理單元，係用以接收此感測信號並且加以濾波、 1334025 放大及準位調整處理以輸出一前端信號；一微控制器單元係用以接收此前端信號並且加以類比/數位轉換及兩點校正處理以輸出一量測資料；以及一即時顯示單元，係用以接收並顯示此量測資料。【實施方式】本發明將詳細描述一些實施例如下。然而，除了所揭露 _ 之實施例外’本發明亦可以廣泛地運用在其他之實施例施行。本發明之範圍並不受該些實施例之限定，乃以其後之申請專利範圍為準。而為提供更清楚之描述及使熟悉該項技藝者能理解本發明之發明内容，圖示内各部分並沒有依照其相對之尺寸而繪圖，某些尺寸與其他相關尺度之比例會被突顯而顯得誇張，且不相關之細節部分亦未完全繪出，以求圖示之簡潔。本發明之主要目的之一，係使用分離式架構之二氧化錫 • 酸驗電極’並結合離子選擇層（薄膜)触入式系統技術以實現 • 一可攜式多重離子感測系統之研製，其主要功能之一係提供將量測結果即時顯示於LCD，使其具有可攜式之功能，並且亦提供與電腦進行資料傳輸之功能(即聰與脱32傳輸線)，於應用方面’除可將本祕顧於酸驗值制之外，亦可結合卸、納及氣等離子選擇層(薄膜）’使其兼具卸、鈉及氣等離子之檢測功能及實贿，藉麟加臨床、生化喊及環境檢測時 11 1334025 之產業應用性。凊參照第一圖，其為本發明之一較佳實施例之概略系統方塊圖。在本實施例中，可攜式多重離子感測系統係包含：一感測單元110、一類比信號處理單元12〇、一微控制器單元13〇以及一即時顯示單元14(^感測單元n〇，係用以感測一待測液體之酸鹼值及複數種離子濃度以輸出一感測信號。類比信號處理單元120，係用以接收感測單元11〇所輸出之感測信號並加以濾波、放大及準位調整處理以輸出一前端信號。微控制器單元130，係用以接收類比信號處理單元12〇輸出之前端信號並加以類比/數位轉換及兩點校正處理，以輸出一量測資料。即時顯示單元140，係用以接收微控制器單元13〇輸出之量測資料並顯示此量測資料，在本實施例中，即時顯示單元14〇係包含一薄型顯示裝置，例如：液晶顯示器(Liquid Crystal Display ; LCD)等。而在另一實施例中，可攜式多重離子感測系統更包含一資料傳輸單元150，係用以將微控制器單元13〇輸出之量測資料傳送出可攜式多重離子感測系統，例如傳輸至個人電腦等，而在此實施例中，資料傳輸單元15〇之傳輸介面係包含通用序列匯流排(Universal Serial Bus ; USB)及/或通用同步非同步收發傳輸器(Universal Synchronous AsynehranausAnd hysteresis effect of the tin oxide pH electrode,, > Sensors and Actuators B, Vol. 108, pp. 877-882, 2005.], the characteristics of the sensing elements have been well understood so far, so the present invention will produce multiple Ion sensors are combined with embedded system technology [Microchip Technology Inc., "http://www.microchip.com", PIC18F452 datasheet; Microchip Technology Inc" "http://www.microchip.com", The MPLAB Cl8 C Compiler User's Guide,] enables the present invention to have functions such as LCD instant display, USB and USART data transmission, thereby completing the development of a multi-machine multi-ion sensing system. [Invention] The present invention provides a The portable multi-ion sensing system comprises: a sensing unit configured to sense an acid value of the liquid to be tested and a plurality of ion concentrations to output a sensing signal, wherein the The sensing unit comprises: a substrate; an indium tin oxide layer on the substrate; a sensing layer disposed on the indium tin oxide layer and connected to an extended wire; an encapsulation layer a sensing layer, the indium tin oxide layer and a portion of the substrate having a sensing window to expose a portion of the sensing layer; a multiple ion selective layer disposed on a portion of the sensing layer in the sensing window 'The multiple ion selective layer is used to sense the plurality of ion concentrations; and a reference electrode is used to provide a reference potential for the sensing layer measurement; an analog signal processing unit is configured to receive the sensing signal And filtering, 1334025 amplification and level adjustment processing to output a front end signal; a microcontroller unit is configured to receive the front end signal and perform analog/digital conversion and two point correction processing to output a measurement data; and an instant The display unit is for receiving and displaying the measurement data. [Embodiment] The present invention will be described in detail below. However, the invention may be widely applied to other embodiments except for the disclosure of the disclosure. The scope of the present invention is not limited by the embodiments, and the scope of the appended claims will prevail. The artist can understand the inventive content of the present invention, and the parts in the illustration are not drawn according to their relative sizes, and the ratio of some sizes to other related scales is highlighted and exaggerated, and the irrelevant details are not completely completed. Drawing out for simplicity of illustration. One of the main purposes of the present invention is to use a separate structure of tin dioxide acid detector electrode combined with ion-selective layer (thin film) touch-in system technology to achieve The development of the portable multi-ion sensing system, one of its main functions is to provide the measurement results instantly displayed on the LCD, so that it has a portable function, and also provides the function of data transmission with the computer (ie Cong and De 32 transmission line), in terms of application, in addition to the application of this secret to the acid value system, it can also be combined with the unloading, sodium and gas plasma selective layer (film) to make it detect the function of unloading, sodium and gas plasma. And the bribery, borrowing Lin plus clinical, biochemical shouting and environmental testing 11 1334025 industrial applicability. Referring to the first figure, which is a schematic block diagram of a preferred embodiment of the present invention. In this embodiment, the portable multiple ion sensing system includes: a sensing unit 110, an analog signal processing unit 12A, a microcontroller unit 13A, and an instant display unit 14 (^ sensing unit n The 〇 is used to sense a pH value of the liquid to be tested and a plurality of ion concentrations to output a sensing signal. The analog signal processing unit 120 is configured to receive the sensing signal output by the sensing unit 11 并 and apply Filtering, amplifying and leveling processing to output a front end signal. The microcontroller unit 130 is configured to receive the analog signal processing unit 12 and output the front end signal and perform analog/digital conversion and two point correction processing to output an amount. The instant display unit 140 is configured to receive the measurement data outputted by the microcontroller unit 13 and display the measurement data. In the embodiment, the instant display unit 14 includes a thin display device, for example: Liquid crystal display (LCD), etc. In another embodiment, the portable multi-ion sensing system further includes a data transmission unit 150 for using the microcontroller The output data of the 13〇 output is transmitted to the portable multi-ion sensing system, for example, to a personal computer or the like. In this embodiment, the transmission interface of the data transmission unit 15 includes a universal serial bus (Universal Serial Bus) ; USB) and / or Universal Synchronous Transceiver (Universal Synchronous Asynehranaus

Receiver Transmitter ； US ART) 〇请接者參照第二圖’其為本發明之一較佳感測單元U〇 12 1334025 實施例之剖面結構示意圖。一·21〇，在本實施例中，基板係包含-絕緣基板’例如：喊基板、玻璃基板等，其中以玻璃基板較佳。一氧化銦錫(Indium Tin Oxide ; ITC〇層220，係位於基板22〇上，其中氧化銦錫層MO之厚度約23〇埃(A)， ·· “，:不限於此厚度。一感測層230，係位於氧化銦錫層220上並 ' 連接延伸導線240 ’其中感測層230係包含二氧化錫(Sn02) 且其較佳厚賴2_埃，喊伸導線24()細舰較佳。一 • 封装層250 ’係包覆感測層230、氧化銦錫層220與部分基板 210 ’封裝層250係具有一感測窗26〇以暴露部分感測層23〇，其中封裝層250係包含環氧樹脂(印呵resin)，而感測窗26〇之較佳面積為2 X 2 mm2。在本實施例中，封裝層25〇所包覆 P刀基板210係才曰完整包覆氧化銦錫層與基板之接面周圍’而延伸導線24G係穿出雜層25〇。 -多重離子選擇層27〇，係位於感測窗26〇内之感測層 Φ 230上，其係用以感測待測液體内之複數種離子濃度，其中此 '夕重離子選擇127G係包含—鉀離子選擇層(薄膜）、-納離子 ' 選擇層(薄膜)及/或一氯離子選擇層(薄膜），以形成钟離子選擇電極、納離子選擇電極及/或_子獅電極，藉此感測待測 &體内之鉀離子、練子及/魏離子濃度。而此制單元110 係更包含-參考電極以提供本感測單元110量測之參考電位 (將於稍後說明）。 13 1334025 在本實施例中’上述感測單元110在其製作及封裳處理係較為容易’且可降低製造成本以符合拋棄式感測器之條件。此感測單元110係包含一分離架構之延伸式閘極離子感測器並以此分離架構之延伸式閘極離子感測器為基礎，固定上卸、鈉及氣等離子選擇層’進而完成具感測待測液體之酸鹼值、鉀、鈉及氯離子濃度之多重離子感測器，其製作步驟係包含： (A) 在一基板上形成一氧化銦錫層，其中氧化銦錫層較佳厚度約230埃，然不限於此厚度，基板為一絕緣基板，如陶瓷基板及玻璃基板等，然以玻璃基板較佳。 (B) 分別甲醇溶液及去離子水(dei〇nize(j water ; d.l Water) 將上述具有氧化銦錫層之基板置於超音波震盪器中震盪，其中於甲醇溶液及去離子水中震盪時間以分別約15分鐘較佳。 (C) 在氧化銦錫層上形成一感測層，其包含以一物理氣相沉積法成長二氧化錫層，且以射頻滅鑛法較佳，而乾材為二氧化錫，接著通入混合氣體，並將基板維持於一溫度，其中混合氣體係氬氣絲氣，二氧化錫層成長時之基板溫度約維持於 150 °C ’沉積氣壓約維持於20毫托耳(mT〇rr)，射頻功率約5〇瓦特(Watt) ’感測層(二氧化錫層)之較佳厚度約為2〇〇〇埃，而氬氣與氧氣之混合比例為4: 1。 (D) 進行轉連接及封域理，崎縣_延伸導線黏附於Μ層i 材料(封裝層)包覆感繼、氧化鋼錫層 14 I334〇25 及部分基板’封裝層係具有一感測窗以暴露部分感測層’其中延伸導線係以銀線較佳，而封裝層係以環氧樹脂較佳，感測窗 . 之較佳尺寸為2 X 2 mm2。 (E)在感測窗内之感測層上形成一多重離子選擇層，其中 '· 彡重離子選·係包物、缺氯轉子選擇層(薄膜），藉此、作為鉀、鈉及氯等離子選擇電極以進行待測液體内之鉀、鈉及氣等離子濃度之檢測。鲁 F)使用一參考電極提供穩定之參考電位，其中參考電極係包含一玻璃電極’例如：銀/氣化銀之玻璃電極。 5月參照第二圖，其為本發明之一較佳類比信號處理單元 120實施例之等效電路圖。一儀表放大電路121，係用以接收感測單元110輸出之感測信號並加以放大處理，以輸出一第一信號，其中儀表放大電路121具有高共模拒斥比、高輸入阻抗與低輸出阻抗等電路特性，因此作為類比信號處理單元12〇之 • 帛__出魏，可提高輸出端對原感測錢之訊號雜訊比 * (S/N)，其相當適合對感測單元110微小電壓信號之揭取。 ' 一高通濾波電路122，係用以接收儀表放大電路121輸出之第一信號並加以濾波處理以輸出一第二信號，其中高通濾波電路122係包含一二階高通巴特沃斯(Butterw〇rth)濾波器，係藉由其極點設定（pole setting)與通带調整作肪如丨她 modulation)等電路特性，濾除第一信號之直流偏移電壓，進而 15 維持岗訊號雜訊比，提升輪出信號品質。 '曰益放大電路123’制以接收高n波電路〗22輸出之第二信號並加以放大處理以輸出—第三信號，其中係藉由對第二信號之增购整，簡第二信號之微小信號量放大至適當準位，便進行後續處理β 準。位調整電路124’係用以接收增益放大電路〗23輸出之第三信號並加鱗位調整處理以輸出—第四錄，其中係將第-㈣機至適當準位，使錄出之第四信號能符合類比/ 數位轉換器之輸入限制及規格。一低通濾波電路125，係用以接收準位調整電路124輪出之第四信號並純濾波處理讀出祕之前端職，其中低通濾波電路125係包含“二階低通巴特沃斯壚波器，藉由其極點没定與通_整等電路特性，濾除外界秘要之雜訊(如市電 t6〇Hz雜訊）’進而維持高訊號雜訊比，提升輸出信號品質。上述之電路主要係考量當感測單元110之感測信號經由類比尨號處理單元U0處理後，盡可能維持高訊號雜訊比’而考量準則係使輸出端訊號雜訊比相對於輸入端訊號雜訊比能維持命雜訊邊限(即〇犯），進而提升後續之類比/數位轉換器之量化效率’以完成本可攜式多重離子感測系統所需之解析度。請參照第四圖，其為本發明之一較佳微控制器單元13〇之資料處理流程圖。一類比/數位轉換模組’係接收信號處理 1334025 單元120輪出之前端信號，並進行類比/數位轉換程序31〇以輸出一第五信號，其中類比/數位轉換程序係對微控制器單元之類比/數位轉模組進行控制，包含取樣率、通道選擇及參考電壓準位之控制等。一二點校正模組，係接收類比/數位轉換、模組輸出之第五信號’並進行二點校正程序320以輸出前述之 '·. 量測資料。一即時顯示模組，係接收二點校正模組輸出之量測資料，並進行即時顯示程序330以將量測資料顯示於即時顯示鲁單元14〇例如LCD等。而在另一實施例中，微控制器單元 130更包含一資料傳輸模組，其接收二點校正模组輸出之量測資料’並進行資料傳輸程序34G以將量測資料傳送&微控制器早疋130 ’其+資料傳輸模組係包含通用序列匯流排介面及/ 通用同步非同步收發傳輸_介面。而在本發明巾，微控制器單元130係可以是一 PIC刪52單晶片微控制器，然不限於此微控制器。鲁 β奢參照第五圖，其為本發明之-較佳微控制器單元130 . (PIC18F452)與㈣顯示單元140 (LCD)以及資料傳輸單元 150 (USB、USART)連接實補之等效電路圖。 1請參照第六圖，其為本發明之—較佳實施例之系統架構示、、圖感測單元110，係量測-待測液體610之換能器，其結構係姻於第二騎示之結構，故在此不再贅述。-參考電極620係屬感測單元⑽之部件，其係連接-第-導線630 17 1334025 -54.81 毫伏/單位(mV/decade) 〇請參照表一，其為本發明之一較佳可攜式多重離子感測系統實施例之酸鹼電極於不同酸鹼緩衝液由犯〜ρΗ12)之量測結果。當商品化酸驗計之量測值分別為2.11、3 94、5.96、7.54、Receiver Transmitter; US ART) 〇 Please refer to the second figure, which is a schematic cross-sectional view of an embodiment of a preferred sensing unit U 〇 12 1334025 of the present invention. In the present embodiment, the substrate includes an insulating substrate, for example, a substrate, a glass substrate, or the like, and a glass substrate is preferable. Indium Tin Oxide (ITC layer 220, is located on the substrate 22, wherein the thickness of the indium tin oxide layer MO is about 23 〇 (A), ···,: not limited to this thickness. One sensing The layer 230 is located on the indium tin oxide layer 220 and 'connects the extended wires 240'. The sensing layer 230 comprises tin dioxide (Sn02) and is preferably thicker than 2 angstroms, and the shunt wire 24 () Preferably, the encapsulation layer 250 is coated with the sensing layer 230, the indium tin oxide layer 220 and the portion of the substrate 210. The encapsulation layer 250 has a sensing window 26 to expose a portion of the sensing layer 23A, wherein the encapsulation layer 250 The epoxy resin (resin is included), and the preferred area of the sensing window 26 is 2 X 2 mm 2. In the embodiment, the P-plate substrate 210 coated by the encapsulation layer 25 is completely covered. The indium tin oxide layer is surrounded by the junction of the substrate and the extended wire 24G passes through the impurity layer 25〇. The multiple ion selective layer 27〇 is located on the sensing layer Φ 230 in the sensing window 26〇, which is used Sensing a plurality of ion concentrations in the liquid to be tested, wherein the 'heavy ion selection 127G system includes a potassium ion selective layer (film), a nano ion Selecting a layer (film) and/or a chloride ion selective layer (film) to form a clock ion selective electrode, a nano ion selective electrode, and/or a _ lion electrode, thereby sensing potassium ions in the body to be tested, The training unit and/or the Wei ion concentration, and the unit 110 further includes a reference electrode to provide a reference potential measured by the sensing unit 110 (to be described later). 13 1334025 In the present embodiment, the above sensing The unit 110 is relatively easy to manufacture and seal, and can reduce the manufacturing cost to meet the conditions of the disposable sensor. The sensing unit 110 includes an extended gate ion sensor of a separate architecture and Based on the extended gate ion sensor of the separation structure, the upper and lower unloading, sodium and gas plasma selective layers are used to perform multiple ion sensing with the pH value of the liquid to be tested, potassium, sodium and chloride ions. The manufacturing process comprises the following steps: (A) forming an indium tin oxide layer on a substrate, wherein the indium tin oxide layer is preferably about 230 angstroms thick, but not limited to the thickness, the substrate is an insulating substrate, such as a ceramic substrate and Glass substrate, etc. The substrate is preferred. (B) The substrate with the indium tin oxide layer is placed in a ultrasonic oscillator in a methanol solution and deionized water (de water) and deionized water (j water; dl Water). The water oscillating time is preferably about 15 minutes respectively. (C) forming a sensing layer on the indium tin oxide layer, which comprises growing a tin dioxide layer by a physical vapor deposition method, and preferably by radio frequency ore mining method. The dry material is tin dioxide, and then the mixed gas is introduced, and the substrate is maintained at a temperature, wherein the mixed gas system is argon gas, and the temperature of the substrate when the tin dioxide layer is grown is maintained at about 150 ° C. Maintained at 20 mTorr, RF power is about 5 watts. The preferred thickness of the sensing layer (tin dioxide layer) is about 2 angstroms, and the mixture of argon and oxygen. The ratio is 4:1. (D) Conducting the connection and sealing, the Kawasaki _ extension wire adheres to the Μ layer i material (encapsulation layer), and the oxidized steel tin layer 14 I334〇25 and part of the substrate 'encapsulated layer system have a sensing The window is formed to expose a portion of the sensing layer, wherein the extending wire is preferably a silver wire, and the encapsulating layer is preferably an epoxy resin, and the sensing window is preferably 2 X 2 mm 2 . (E) forming a multiple ion selective layer on the sensing layer in the sensing window, wherein '· 彡 heavy ion selective inclusions, chlorine-deficient rotor selective layer (film), thereby serving as potassium, sodium and The chlorine plasma is selected to perform the detection of the potassium, sodium and gas plasma concentrations in the liquid to be tested. Lu F) uses a reference electrode to provide a stable reference potential, wherein the reference electrode comprises a glass electrode 'for example: a silver/vaporized glass electrode. Referring to the second figure in May, it is an equivalent circuit diagram of an embodiment of a preferred analog signal processing unit 120 of the present invention. An instrumentation amplifying circuit 121 is configured to receive the sensing signal outputted by the sensing unit 110 and perform amplification processing to output a first signal, wherein the meter amplifying circuit 121 has a high common mode rejection ratio, a high input impedance and a low output. Circuit characteristics such as impedance, so as the analog signal processing unit 12 帛 _ _ wei, can improve the signal-to-noise ratio * (S / N) of the original measurement of the original, which is quite suitable for the sensing unit 110 The extraction of tiny voltage signals. A high-pass filter circuit 122 is configured to receive the first signal output by the meter amplifying circuit 121 and filter the signal to output a second signal, wherein the high-pass filter circuit 122 includes a second-order high-pass Butterw〇rth The filter is characterized by its circuit characteristics such as pole setting and passband adjustment, such as her modulation, filtering out the DC offset voltage of the first signal, and then maintaining the signal noise ratio, lifting wheel Signal quality. '曰益 amplification circuit 123' is configured to receive the second signal outputted by the high n-wave circuit 22 and to amplify the output to output a third signal, wherein the second signal is obtained by adding the second signal. After the small semaphore is amplified to the appropriate level, the subsequent processing β quasi. The bit adjustment circuit 124' is configured to receive the third signal outputted by the gain amplifying circuit 23 and add a scaling adjustment process to output a fourth recording, wherein the first (four) machine is to the appropriate level, so that the fourth recording is performed. The signal can meet the input limits and specifications of the analog/digital converter. A low-pass filter circuit 125 is configured to receive the fourth signal rotated by the level adjustment circuit 124 and perform pure filtering processing to read the secret end. The low-pass filter circuit 125 includes "second-order low-pass Butterworth chopping By using the poles of the poles and the circuit characteristics, the noise of the filter is excluded (such as the mains t6〇Hz noise), thereby maintaining the high signal noise ratio and improving the output signal quality. The main consideration is that when the sensing signal of the sensing unit 110 is processed by the analog nickname processing unit U0, the high signal noise ratio is maintained as much as possible, and the criterion is to make the output signal noise ratio relative to the input signal noise ratio. Can maintain the noise margin (ie, swearing), and then improve the quantization efficiency of the subsequent analog/digital converters to complete the resolution required by the portable multi-ion sensing system. Please refer to the fourth figure, A data processing flowchart of a preferred microcontroller unit 13 of the present invention. An analog/digital conversion module 'receives a signal processing 1334025. The unit 120 rotates the front end signal and performs an analog/digital conversion procedure.Outputting a fifth signal, wherein the analog/digital conversion program controls the analog/digital conversion module of the microcontroller unit, including sampling rate, channel selection, and reference voltage level control, etc. A two-point correction module, The system receives the analog/digital conversion, the fifth signal of the module output, and performs a two-point calibration process 320 to output the aforementioned measurement data. An instant display module receives the measurement of the output of the two-point calibration module. The data is displayed in the instant display program 330 to display the measurement data in the instant display unit 14 such as LCD, etc. In another embodiment, the microcontroller unit 130 further includes a data transmission module that receives two points. Correction module output measurement data 'and data transmission program 34G to transfer measurement data & Microcontroller early 130' its + data transmission module includes universal serial bus interface and / universal synchronous asynchronous transmission and reception In the present invention, the microcontroller unit 130 can be a PIC 52 single-chip microcontroller, but is not limited to the microcontroller. The equivalent circuit diagram of the present invention - preferably the microcontroller unit 130 (PIC18F452) and (4) the display unit 140 (LCD) and the data transmission unit 150 (USB, USART) are connected to the actual complement. 1 Please refer to the sixth figure, which is The system architecture of the preferred embodiment of the present invention, the image sensing unit 110, is a transducer for measuring the liquid 610 to be tested, and the structure is in accordance with the structure of the second riding display, so it is no longer The reference electrode 620 is a component of the sensing unit (10), which is a connection-the first wire 630 17 1334025 -54.81 millivolts/unit (mV/decade), please refer to Table 1, which is one of the preferred embodiments of the present invention. The pH of the acid-base electrode of the portable multi-ion sensing system embodiment is determined by different pH-base buffers. When the measured values of the commercial acid test are 2.11, 3 94, 5.96, 7.54,

9.63及11.46時’本發明之可攜式多重離子感測系統在其以^ 模組、USB模組及RS232模組係對應顯示及傳輸2 26、4 〇4、 6.14、7.12、9.33及11.28’其相較於商品化酸驗計之量測結果，At 9.63 and 11.46, the portable multi-ion sensing system of the present invention displays and transmits 2 26, 4 〇 4, 6.14, 7.12, 9.33 and 11.28' in the module, USB module and RS232 module. Compared with the measurement results of the commercial acid test,

其誤差值(％)係相當小(誤差範圍係介於2%〜7%)，此表示其已具備良好之性能及市場發展潛力The error value (%) is quite small (the error range is between 2% and 7%), which means that it has good performance and market development potential.

本發明之-較佳可攜式多重離子感嶋統實施例之酸驗電極於不同酸驗緩衝液量測結果請參照表二’其林發明之―較佳可攜式多重離子感測 19 系統實施例之鉀離子選擇電極於不同氯化鉀緩衝液(10·3_ 1Μ)之量測結果。當所調配之氣化鉀緩衝液分別為丨乂、 lirtvi、10·2Μ及10_3Μ時，本發明之可攜式多重離子感測*** 在其LCD模組、USB模組及RS232模組係對應顯示及傳耠 0.841M、0.123M、0.025M及0.001M ’其量測之誤差係屬於可接受之範圍。 ' 氣化鉀緩衝溶液量測結果(M) (KC1⑽(M)) LCD模組 USB模組 RS232模組 1 0.841 0.841 0.841 10-1 0.123 0.123 0.123 1〇·2 0.025 0.025 0.025 1〇·3 0.001 0.001 0.001 表二本發明之一較佳可攜式多重離子感測系統實施例之卸離子選擇電極於㈣氯化_緩衝液(1G_3M ~ 1M)量測結果請參照表三，其為本發明之一較佳可攜式多重離子鐵螂系統實施例之鈉離子選擇電極於不同氣化鈉緩衝液(1〇_3M ^ 1M)之量測結果。當所調配之氣化鈉緩衝液分別為丨“、 1〇七、i〇-2m及i〇-3m時’本發明之可攜式多重離子感測系缽在其LCD驗、USB模組及RS232模組係對應顯示及傳輪 0.815M、0.135M、0.029M及0.001M ’其量測之誤差係屬於吁 1334025For the measurement results of the acid detector electrodes of the preferred portable multi-ion sensation system of the present invention in different acid buffers, please refer to Table 2 'The invention of the invention's preferred portable multi-ion sensing 19 system The potassium ion selective electrode of the example was measured in different potassium chloride buffers (10·3 _ 1 Μ). When the formulated potassium carbonate buffer is 丨乂, lirtvi, 10·2Μ and 10_3Μ, the portable multi-ion sensing system of the present invention is correspondingly displayed in the LCD module, the USB module and the RS232 module. And the transmission of 0.841M, 0.123M, 0.025M and 0.001M 'the measurement error is within the acceptable range. 'Gasifying potassium buffer solution measurement results (M) (KC1(10)(M)) LCD module USB module RS232 module 1 0.841 0.841 0.841 10-1 0.123 0.123 0.123 1〇·2 0.025 0.025 0.025 1〇·3 0.001 0.001 0.001 Table 2 One of the preferred portable multi-ion ion sensing system embodiments of the present invention is the ion-selecting electrode in (IV) chlorination_buffer (1G_3M ~ 1M) measurement results, please refer to Table 3, which is one of the inventions The sodium ion selective electrode of the preferred portable multi-ion iron sputum system embodiment is measured in different sodium carbonate buffers (1〇_3M ^ 1M). When the formulated sodium carbonate buffer is 丨", 1〇7, i〇-2m and i〇-3m, respectively, the portable multi-ion sensing system of the present invention is in its LCD test, USB module and The RS232 module is compatible with the display and transmission wheels of 0.815M, 0.135M, 0.029M and 0.001M. The measurement error is called 1334025.

接受之範圍。氯化鈉缓衝溶液量測結果(M) (NaCl⑽(M)) LCD模組 USB模組 RS232模組 1 0.815 0.815 0.815 10'1 0.135 0.135 0.135 1〇·2 0.029 0.029 0.029 10~3 0.001 0.001 0.001 表二本發明之一較佳可攜式多重離子感測系統實施例之納離子選擇電極於不同氣化鈉緩衝液(1〇-3M〜1M)量測結果The scope of acceptance. Sodium Chloride Buffer Solution Measurement Results (M) (NaCl(10)(M)) LCD Module USB Module RS232 Module 1 0.815 0.815 0.815 10'1 0.135 0.135 0.135 1〇·2 0.029 0.029 0.029 10~3 0.001 0.001 0.001 Table 2 is a measurement result of a nano ion selective electrode of a preferred portable multi-ion sensing system embodiment in different sodium carbonate buffers (1〇-3M~1M)

請參照表四，其為本發明之一較佳可攜式多重離子感測系統實施例之氯離子選擇電極於不同氣化鈉緩衝液(1〇·3μ〜 1Μ)之量測結果。當所調配之氯化鈉緩衝液分別為lM、 Hrtvi、10·2Μ及1〇-3Μ時，本發明之可攜式多重離子感測系統在其LCD模組、USB模組及RS232模組係對應顯示及傳輸 0.913M、0.136M、0.019M及0.001M，其量測之誤差係屬於可接受之範圍。氯化鈉緩衝溶液量測結果(Μ) (NaCl(eq)(M)) LCD模組 USB模組 RS232模组 21 1334025 ——1 0.913 0.913 0.913 0.136 0.136 0.136 —__J0'2 0.019 0.019 0.019 --4〇-3 0.001 0.001 0.001 之氯離子選擇電極於不同氣化鈉緩衝液(10-3Μ~ 1M)量測結果Please refer to Table 4, which is a measurement result of a chloride ion selective electrode of a preferred portable multi-ion sensing system embodiment in different sodium carbonate buffers (1〇·3μ~1Μ). When the sodium chloride buffer solution is 1M, Hrtvi, 10·2Μ and 1〇-3Μ, the portable multi-ion sensing system of the present invention is in the LCD module, the USB module and the RS232 module system. Corresponding display and transmission of 0.913M, 0.136M, 0.019M and 0.001M, the measurement error is within the acceptable range. Sodium Chloride Buffer Solution Measurement Results (Μ) (NaCl(eq)(M)) LCD Module USB Module RS232 Module 21 1334025 ——1 0.913 0.913 0.913 0.136 0.136 0.136 —__J0'2 0.019 0.019 0.019 --4 〇-3 0.001 0.001 0.001 chloride ion selective electrode in different gasification sodium buffer (10-3 Μ ~ 1M) measurement results

請參照表五，其為本發明之一較佳可攜式多重離子感測系統實施例之詳細規格表。然而，發明人在此所要強調的是，無論是表一、表二、表三及表四所顯示之量測資料，或是表五Please refer to Table 5, which is a detailed specification table of an embodiment of a preferred portable multi-ion sensing system of the present invention. However, what the inventors want to emphasize here is whether it is the measurement data shown in Table 1, Table 2, Table 3 and Table 4, or Table 5

所顯示之詳細規格表，其等係僅用以說明本發明之較佳實施例之實施成效及規格，並非用以限定本發明之實施。量測種類 pH、pK、pNa 及 pCl 量測方式酸檢電極及ISE 量測範圍 pH : 2 〜12 ISE : 10·3Μ 〜1 Μ 境室溫〜50°C 解析度 pH ： 0.01 ISE ： 1〇·3Μ 校正方式 pH : 4及7(兩點校正） ISE: 10_3 Μ 及 10·1 Μ LCD、USB 及 RS232 22 1334025 J:源供應 9VDC (電池）尺寸大小 220mm x 135mm x 85mm (L χ W χ D) 表五本發明之一較佳可攜式多重離子感測系統實施例之規格表综觀上述，本發明之可攜式多重離子感測系統係以結合半導體製程與嵌入式系統技術所研製而成，本系統之感測單元係以一氧化錫/氧化銦錫/玻璃等分離式架構之酸鹼感測電極為基礎，並且結合複數種離子選擇層(薄膜)與嵌入式系統技術所研製而成。本發明之可攜式多重離子感測系統在其應用方面係可進行多_顿度之侧’且祕半導體麟之發展進步，故本系統之裝置亦具備大量生產以及低製作成本等優點。以上所述僅為本發明之較佳實施_已，並非用以限定本發明之料專圍；凡其他魏縣發崎揭示之精神下所完成之等效改變或_，均應包含在下述之_請專利範圍。 23 【圖式簡單說明】第1係本發明之-較佳可攜式多重離子感啦統實施例之概略系統方塊圖；第二圖係本發明之-較佳翻單元實施例之剖面結構示意圖；第一圖係本發明之一較佳類比信號處理單元實施例之等效電路圖；第四圖係本發明之—較佳微控單元之資料處理流程圖；第五圖係本發明之一較佳微控制器單元與即時顯示單元以及資料傳輸單元連接實施例之等效電路圖；第六圖係本發明之-較佳可攜式多重離子感測系統實施例之系統架構示意圖；第七A圖係本發明之可攜式多重離子感測系統之酸鹼電極穩態電壓輸出示意圖；第七B圖係本發明之可攜式多$離子感測纽之鉀離子選擇電極穩態電壓輸出示意圖；第七C圖係本發明之可攜式多重離子感測系統之娜子選擇電極穩態電壓輸出示意圖；第七D圖係本發明之可攜式多重離子感_統之氯離子選擇電極穩態電壓輸出示意圖；第八A圖係本發明之可攜式多重離子感測系統之酸驗電極線性曲線示意圖； 24 1334025 第八B圖係本發明之可攜式多重離子感測系統之鉀離子選擇電極線性曲線示意圖；第八C圖係本發明之可攜式多重離子感測系統之納離子選擇電極線性曲線示意圖；以及第八D圖係本發明之可攜式多重離子感測系統之氣離子選擇電極線性曲線示意圖。 25 1334025 【主要元件符號說明】The detailed specification tables are shown to illustrate the implementation results and specifications of the preferred embodiments of the present invention and are not intended to limit the implementation of the present invention. Measurement type pH, pK, pNa and pCl measurement method Acid detection electrode and ISE measurement range pH: 2 ~ 12 ISE : 10 · 3 Μ ~ 1 Μ Ambient room temperature ~ 50 ° C Resolution pH : 0.01 ISE : 1〇 ·3Μ Calibration method pH: 4 and 7 (two-point calibration) ISE: 10_3 Μ and 10·1 Μ LCD, USB and RS232 22 1334025 J: Source supply 9VDC (battery) Size 220mm x 135mm x 85mm (L χ W χ D) Table 5 Specifications of a preferred portable multi-ion sensing system embodiment of the present invention. The portable multi-ion sensing system of the present invention is developed in combination with a semiconductor process and an embedded system technology. The sensing unit of the system is based on a separate structure of acid-base sensing electrodes such as tin oxide/indium tin oxide/glass, and is combined with a plurality of ion selective layers (films) and embedded system technology. Made. The portable multi-ion sensing system of the present invention is capable of performing a multi-degree of side in terms of its application, and the development of the semiconductor semiconductor has progressed, so that the device of the system also has the advantages of mass production and low production cost. The above is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention; any equivalent change or _ completed under the spirit of Weixian Kaisei disclosed in the Weixian County shall be included in the following _Please patent scope. 23 [Simplified Schematic] FIG. 1 is a schematic system block diagram of an embodiment of a preferred portable multi-inductive system of the present invention; FIG. 2 is a schematic cross-sectional view of a preferred embodiment of the present invention. The first diagram is an equivalent circuit diagram of a preferred analog signal processing unit embodiment of the present invention; the fourth diagram is a data processing flowchart of the preferred micro control unit of the present invention; The equivalent circuit diagram of the embodiment of the preferred embodiment of the preferred embodiment of the preferred embodiment of the present invention is shown in FIG. 7 is a schematic diagram of the system architecture of the preferred embodiment of the portable multi-ion sensing system of the present invention; The schematic diagram of the steady-state voltage output of the acid-base electrode of the portable multi-ion sensing system of the present invention; FIG. 7B is a schematic diagram of the steady-state voltage output of the potassium ion selective electrode of the portable multi-ion sensing inductor of the present invention; The seventh C is a schematic diagram of the steady-state voltage output of the nano-selective electrode of the portable multi-ion sensing system of the present invention; the seventh D-picture is the portable multi-ion sensing ion-selective electrode of the present invention. Schematic diagram of steady-state voltage output; Figure 8A is a schematic diagram of the linear curve of the acid test electrode of the portable multi-ion sensing system of the present invention; 24 1334025 Figure 8B is the potassium of the portable multi-ion sensing system of the present invention Schematic diagram of a linear curve of an ion selective electrode; FIG. 8C is a schematic diagram of a linear curve of a nano ion selective electrode of the portable multi-ion sensing system of the present invention; and an eighth D diagram of the portable multi-ion sensing system of the present invention Schematic diagram of the linear curve of the gas ion selective electrode. 25 1334025 [Description of main component symbols]

110 感測單元 120 類比信號處理單元 121 儀表放大電路 122 南通滤波電路 123 增益放大電路 124 準位調整電路 125 低通滤波電路 130 微控制器單元 140 即時顯示單元 150 資料傳輸單元 210 基板 220 氧化銦錫層 230 感測層 240 延伸導線 250 封裝層 260 感測窗 270 多重離子選擇層 310 類比/數位轉換程序 320 兩點校正程序 330 即時顯示程序 340 資料傳輸程序 610 待測液體 620 參考電極 630 第一導線 640 第二導線 ViN 信號輸入端 V〇UT 信號輸出端 νπ ' V] [2輸入電壓 vref 參考電壓 Αι 〜A7 運算放大器 Rl~Rj8 、Rg 電阻 C广C4 電容 26110 sensing unit 120 analog signal processing unit 121 meter amplifying circuit 122 south pass filter circuit 123 gain amplifying circuit 124 level adjusting circuit 125 low pass filter circuit 130 microcontroller unit 140 instant display unit 150 data transfer unit 210 substrate 220 indium tin oxide Layer 230 Sensing Layer 240 Extension Wire 250 Encapsulation Layer 260 Sensing Window 270 Multiple Ion Select Layer 310 Analog/Digital Conversion Program 320 Two Point Calibration Procedure 330 Instant Display Program 340 Data Transfer Procedure 610 Liquid to Be Tested 620 Reference Electrode 630 First Conductor 640 second wire ViN signal input terminal V〇UT signal output terminal νπ ' V] [2 input voltage vref reference voltage Αι ~ A7 operational amplifier Rl ~ Rj8, Rg resistance C wide C4 capacitor 26

Claims

1334025 十、申請專利範圍： 1.一種可攜式多重離子感測系統，其包含：一感測單元，係用以感測待測液體之酸驗值及複數種離子濃度以輪出一感測信號，其中該感測單元係包含：一基板；1334025 X. Patent application scope: 1. A portable multi-ion sensing system, comprising: a sensing unit for sensing an acid value of a liquid to be tested and a plurality of ion concentrations to rotate a sensing a signal, wherein the sensing unit comprises: a substrate;

一氧化鋼錫層，係位於該基板上；一感測層，係位於該氧化銦錫層上並連接一延伸導線· 一封裝層’係包覆該感測層、該氧化銦錫層與部分該義板，該封裝層係具有一感測窗以暴露部分該感測層；一多重離子選擇層’係位於該感測窗内之部分該感測戶上’該多重離子選擇層係用以感測該複數種離子濃度；及一參考電極’係用以提供該感測層量測之參考電位；一類比信號處理單元，係用以接收該感測信號並加以濾波、放大及準位調整處理以輸出一前端信號；一微控制器單元，係用以接收該前端信號並加以類比/數位轉換及兩點校正處理以輸出一量測資料；以及一即時顯示單元，係用以接收並顯示該量測資料。 2.如申請專利範圍第1項所述之可攜式多重離子感測系統，更包含一資料傳輸單元，該資料傳輸單元係用以將該量測資料傳送出該可攜式多重離子感測系統。 27 1334025 3.如申請專利範圍第2項所述之可攜式多重離子感測系統，其中該貝料傳輸單元之傳輸介面係包含通用序列匯流排。 4·如+睛專利軸第2項所述之可攜式多重離子制祕，其中該貝料傳輸單元之傳輸介面係包含通用同步非同步收發傳輸器。 5. 如申請專利軸第1項所述之可攜式多重離子感測系統，其中該、基板係包含一絕緣基板。 6. 如申請專利範圍第5項所述之可攜式多重離子感測系統，其中該 _ 絕緣基板係包含一陶瓷基板。 7. 如申請專利範圍第5項所述之可攜式多重離子感測系統，其中該絕緣基板係包含一玻璃基板。 8·如申請專利範圍第1項所述之可攜式多重離子感測系統，其中該氧化銦錫層之厚度約230埃。 9.如申請專利範圍第！項所述之可攜式多重離子感測系統，其中該感測層係包含一二氧化錫層。 ~ 籲1G.如ΐ請專利範圍第9項所述之可攜式多重離子感測系統， , 該二氧化錫層之厚度約2000埃。 ’、 .11.如f請專利範圍第1項所述之可攜式多重離子感測系統該延伸導線係包含一銀線。、中 12.如申請專利範圍第1項所述之可攜式多重離子翻系統該封裝層係包含環氧樹脂。 V ' 28 丄如申請專利細帛i 該感測窗之面積為2xW。重離子_统，其中該夕重離子選擇層係包含一卸離子選擇層。、其中 15. 如申請專利範圍第該多重離子選擇層係包含一_子選擇層。其中 16. 如申4利範圍第丨項所述之可攜式多重離子感測該多重離子選擇層係包含一氣離子選擇層。、、，其中 Π.如申請專利範圍第,項所該參考電極係包含一銀/氣化銀之玻璃_。统，其中 18.如申請專利_第丨項所述之該類比信魏轉元係包含: 娜統，其中一儀表放大電路，魏該_域並細放纽輸出—第一高通濾波電路，接收該第—信號並加以滤波以輸出—第二^ -增益放大電路，接收該第二信號並加以放大以輸出—第三;妹，一準位機電路，觀該第三信舰加轉位縦 jy ’ 信號；以及 ⑽第四一低通濾波電路’馳該如信號並㈣驗以触該前端信號。 19.如:請專利範園第i8項所述之可攜式多重離子感測系統，其中該高通濾波電路係包含-二階高通巴特沃斯遽波器。 29 1334025 %如申請專利麵第18猶述之可攜式多重離怖職統，其中該低通濾波電路係包含一二階低通巴特沃斯渡波器。 21·如申請專利第！項舰之可攜式多麵子感卿統，其中該微控制器單元係包含：、一類比/觀敝’絲收贿端雜並騎舰/數位轉換以輸出一第五信號；一二點校正模組，係接收該第五信號並進行二點校正處理以輸出該量測資料；以及一即時顯示模組，係接收處理該量測資料並將該量測資料顯示於該即時顯示單元。 22. 如申請專利範圍第21項所述之可攜式多重離子感測系統，其中該微控制器單元更包含一資料傳輸模組，該資料傳輸模組接收處理該量測資料並將該量測資料傳送出該微控制器單元。 23. 如申請專利範圍第22項所述之可攜式多重離子感測系統，其中該資料傳輸模組之傳輸介面係包含通用序列匯流排介面。 24. 如申請專利範圍第22項所述之可攜式多重離子感測系統，其中該資料傳輸模組之傳輸介面係包含通用同步非同步收發傳輸器介面。 25. 如申請專利範圍第1項所述之可攜式多重離子感測系統，其中該即時顯示單元係包含一液晶顯示器。 30a tin oxide layer is disposed on the substrate; a sensing layer is disposed on the indium tin oxide layer and is connected to an extension wire, and an encapsulation layer is used to coat the sensing layer, the indium tin oxide layer and the portion The encapsulation layer has a sensing window to expose a portion of the sensing layer; a multi-ion selective layer 'is located in a portion of the sensing window on the sensing household' Sensing the plurality of ion concentrations; and a reference electrode is configured to provide a reference potential for the sensing layer measurement; an analog signal processing unit for receiving the sensing signal and filtering, amplifying, and aligning Adjusting processing to output a front end signal; a microcontroller unit for receiving the front end signal and performing analog/digital conversion and two point correction processing to output a measurement data; and an instant display unit for receiving and The measurement data is displayed. 2. The portable multi-ion sensing system of claim 1, further comprising a data transmission unit for transmitting the measurement data out of the portable multi-ion sensing system. The portable multi-ion sensing system of claim 2, wherein the transmission interface of the bead transfer unit comprises a universal serial bus. 4. The portable multi-ion secret system described in the second aspect of the patent axis, wherein the transmission interface of the bead transfer unit comprises a universal synchronous asynchronous transceiver. 5. The portable multi-ion sensing system of claim 1, wherein the substrate comprises an insulating substrate. 6. The portable multiple ion sensing system of claim 5, wherein the insulating substrate comprises a ceramic substrate. 7. The portable multi-ion sensing system of claim 5, wherein the insulating substrate comprises a glass substrate. 8. The portable multi-ion sensing system of claim 1, wherein the indium tin oxide layer has a thickness of about 230 angstroms. 9. If you apply for a patent scope! The portable multiple ion sensing system of claim 1, wherein the sensing layer comprises a tin dioxide layer. ~ 1G. For the portable multi-ion sensing system described in claim 9, the tin dioxide layer has a thickness of about 2000 angstroms. </ RTI> 11. The portable multi-ion sensing system described in item 1 of the patent scope is as follows. 12. Portable multi-ion flip system as described in claim 1 of the patent application. The encapsulating layer comprises an epoxy resin. V ' 28 丄 If you apply for a patent, the area of the sensing window is 2xW. Heavy ion system, wherein the heavy ion selective layer comprises a deionization selective layer. Wherein, as in the scope of the patent application, the multiple ion selective layer comprises a _ subselecting layer. 16. Portable multi-ion sensing as described in the fourth paragraph of claim 4, the multiple ion-selective layer comprising a gas ion selective layer. ,,,, 其中. As claimed in the patent scope, the reference electrode comprises a silver/vaporized glass _. The system, such as the patent application _ 丨之该该魏 wei wei wei wei wei wei wei wei wei wei wei wei wei wei wei wei wei wei wei wei wei wei wei wei wei wei wei wei wei wei wei wei wei wei wei wei wei wei wei wei wei The first signal is filtered to output a second gain amplification circuit, and the second signal is received and amplified to output - third; sister, a level machine circuit, and the third letter plus transposition position The jy ' signal; and (10) the fourth low-pass filter circuit 'chives the signal and (4) checks to touch the front end signal. 19. For example, please refer to the portable multi-ion sensing system described in Patent No. i8, wherein the high-pass filter circuit comprises a second-order high-pass Butterworth chopper. 29 1334025 % The portable multi-disciplinary system of claim 18, wherein the low-pass filter circuit comprises a second-order low-pass Butterworth waver. 21·If you apply for a patent! The ship's portable multi-faceted sense system, in which the microcontroller unit contains: , an analogy / Guan Yu's silk bribery end and riding / digital conversion to output a fifth signal; one two point correction The module receives the fifth signal and performs two-point calibration processing to output the measurement data; and an instant display module receives and processes the measurement data and displays the measurement data on the instant display unit. 22. The portable multi-ion sensing system of claim 21, wherein the microcontroller unit further comprises a data transmission module, the data transmission module receiving and processing the measurement data and the quantity The test data is transmitted out of the microcontroller unit. 23. The portable multi-ion sensing system of claim 22, wherein the transmission interface of the data transmission module comprises a universal serial bus interface. 24. The portable multi-ion sensing system of claim 22, wherein the data transmission module has a transmission interface comprising a universal synchronous asynchronous transceiver interface. 25. The portable multi-ion sensing system of claim 1, wherein the instant display unit comprises a liquid crystal display. 30