TWI330050B - - Google Patents

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Publication number
TWI330050B
TWI330050B TW095141550A TW95141550A TWI330050B TW I330050 B TWI330050 B TW I330050B TW 095141550 A TW095141550 A TW 095141550A TW 95141550 A TW95141550 A TW 95141550A TW I330050 B TWI330050 B TW I330050B
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TW
Taiwan
Prior art keywords
workpiece
control unit
discharge position
receiving recess
recess
Prior art date
Application number
TW095141550A
Other languages
Chinese (zh)
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TW200731890A (en
Inventor
Tomoyuki Kojima
Seiji Yoshizawa
Original Assignee
Tokyo Weld Co Ltd
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Publication date
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Publication of TW200731890A publication Critical patent/TW200731890A/en
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Publication of TWI330050B publication Critical patent/TWI330050B/zh

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Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/02Feeding of components
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/80Turntables carrying articles or materials to be transferred, e.g. combined with ploughs or scrapers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2812/00Indexing codes relating to the kind or type of conveyors
    • B65G2812/14Turntables

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Engineering (AREA)
  • Specific Conveyance Elements (AREA)
  • Automatic Assembly (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Description

(1)1330050 九、發明說明 【發明所屬之技術領域】 本發明係關於搬運並排出工件之工件搬運裝置, 而言,係與可確實排出工件之工件搬運裝置相關。 【先前技術】 傳統上,搬運並排出工件之工件搬運裝置,以具 座;及旋轉自如地配置於基座上,於外緣形成用以收 件之多數個工件收容凹部之搬運台之物爲大家所熟知 運台可以具有複數之工件排出位置,工件收容凹部內 件可以從該工件排出位置排出至外部。 此外,搬運台之各工件排出位置附近,在工件收 部之一側配設著利用空氣噴出工件之工件噴出手段, 件收容凹部之另一側配設著用以受取藉由工件噴出手 噴出之工件之工件排出管。 此種工件排出裝置,工件被收容於搬運台之工件 凹部內來進行搬運,在搬運中,對工件實施電性檢測 工件收容凹部內之工件,在搬運台對應電性檢測 到達期望之工件排出位置時,利用工件噴出手段將其 並經由工件排出管將其排出。 【發明內容】 然而,卻有在期望之工件排出位置時,利用工件 手段進行噴出卻無法確實將工件噴出而殘留於工件收 具體 有基 容工 。搬 之工 容凹 在工 段所 收容 〇 結果 噴出 噴出 容凹 -4 - (2) 1330050 部內的情形。 此時,工件噴出手段重複實施空氣之噴出,然而,工 件仍然殘留於工件收容凹部內,該殘留工件會接触工件排 出管而導致破損。 爲了避免上述情形,工件殘留於工件收容凹部內時, 必須停止機械進行處理,而無法進行連續運轉,且預定之 排出位置無法進行排出而成爲誤排出要因。 # 本發明之目的,係提供考慮到上述問題點之工作可確 實從工件收容凹部排出至外部之工件搬運裝置。 本發明之工件搬運裝置之特徵,係具有:基座;旋轉 自如地配置於基座上,於外緣形成用以收容工件之多數個 工件收容凹部,且從工件排出位置之工件收容凹部排出工 件之搬運台;配設於工件排出位置之工件收容凹部之一側 ’用以噴出工件收容凹部內之工件工件噴出手段;配設於 工件排出位置之工件收容凹部之另一側,用以受取藉由工 ® 件噴出手段所噴出之工件工件排出管;以及,用以檢測工 件排出位置之工件收容凹部內之工件之有無之檢測感測器 ’且’搬運台及工件噴出手段係由控制部所驅動控制,控 制部係依據來自檢測感測器之信號,驅動工件噴出手段, 而工件也無法從工件收容凹部被排出時,使搬運台只進行 預定距離之移動。 本發明之工件搬運裝置之特徵,控制部係使搬運台只 在預定距離進行往返移動。 本發明之工件搬運裝置之特徵,控制部係使搬運台只 (3) 1330050 在預定距離進行任意次數之往返移動。 本發明之工件搬運裝置之特徵,控制部係使搬運台 在預定距離進行預定時間之往返移動。 依據如上所示之本發明,即使驅動工件噴出手段也 法從工件收容凹部排出工件時,使搬運台只在預定距離 行移動後,再度驅動(;:工件噴出手段,確實將工件收容 部內之工件排出至工件排出管內。 【實施方式】 以下,參照圖面,針對本發明之實施形態進行說明 第1圖至第6圖係本發明之工件搬運裝置之一實施形態 〇 如第1圖至第6圖所示,工件搬運裝置10具有: 直方向配置之基座2;及旋轉自如地配置於基座2上, 外緣形成用以收容工件W之多數個工件收容凹部la之 • 運台1。其中,搬運台1具有複數之工件排出位置P, 件收容凹部la內之工件W如後面所述,對應電性檢測 結果,從各工件排出位置P被排出。 此外,在基座2之各工件排出位置P,配設著以空 噴出位於工件收容凹部la之一側之工件收容凹部la內 工件W之噴出口(工件噴出手段)2b。此外,在各工 排出位置P之工件收容凹部la之另一側,配設著用以 取被噴出口 2b所噴出之工件W之工件排出管4。 此外,在搬運台1之邊緣外側,配設著用以檢測位 只 Μ 進 凹 圖 垂 於 搬 工 之 氣 之 件 受 於 -6- (4) (4)1330050 各工件排出位置P之工件收容凹部la內是否有工件W之 檢測感測器5。 此外,在搬運台1之邊緣外側,配設著用以導引搬運 台1之導軌3,檢測感測器5則配置於該導軌3內。 此外,在搬運台1之背面,形成與各工件收容凹部la 連通之真空溝lb’在基座2,形成與搬運台1之真空溝ib 連通之真空溝2a,這些真空溝lb、2a係連通於圖上未標 示之真空源,用以吸附工件W並保持工件收容凹部la內 〇 此外’從噴出口 2b所噴出之空氣係利用空氣加壓機 構(圖上未標示)所產生,控制部20實施空氣加壓機構 之驅動控制,使噴出口 2b噴出空氣。 此外’搬運台1也由控制部20進行驅動控制。 此外’控制部2 0依據來自檢測感測器5之信號,在 工件W未確實被排出而殘留於工件收容凹部ia時,搬運 台1只進行預定距離B(參照第3圖(b))之移動後, 驅動空氣加壓機構,再度從噴出口 2b噴出空氣,必要時 ,也可重複進行從原來位置只進行預定距離B之移動。 以下’針對具有上述構成之本實施形態之作用進行說 明。 首先’工件搬運裝置10從工件供應部11將工件w 供應至搬運台1之工件收容凹部la內。其後,搬運台i 實施間歇性地旋轉,其間,針對工件收容凹部la內之工 件W’利用圖上未標示之工件測定手段實施電性檢測。 (5) (5)1330050 1個工件W裝塡於搬運台1之工件收容凹部ia,搬運 台1抵接基座2並朝箭頭k方向(參照第3圖(a))旋 轉’配設於搬運台1背面之真空溝lb與配設於基座2之 真空溝2a保持連通’工件W被吸附並保持於工件收容凹 部la內。 其次’工件W被從對應於利用工件測定手段之電性 檢測結果之工件排出位置P排出。亦即,工件W到達應 被排出之工件排出位置P時,搬運台1即停止。其次,利 用來自配設於基座2之噴出口 2b之氣流,工件w被從工 件收容凹部la吹出,並經由排出管4被排出至圖上未標 示之收容箱等。此時,從噴出口 2b吹出預定時間之氣流 ,之後,停止氣流。 第2圖係工件收容凹部la內之工件W之狀態。一般 而言,工件收容凹部la之寬度相對於工件W具有任意之 間隙A,位於工件排出位置P之工件W,係處於與工件收 容凹部la之左右之其中一側壁密接之狀態(第3圖(a) )° 如上面所述,噴出口 2b吹出預定時間之氣流,該正 常動作無法排出工件W時,利用配設於設置在搬運台1 之邊緣外側之導軌板3內部之光感測器5檢測到工件W 之殘留。 接收到光感測器5之檢測信號,控制部20再度開始 使噴出口 2b吹出氣流。同時,控制部20使搬運台1朝與 箭頭Li方向相反之方向之箭頭L2方向(參照第3圖(b -8 - (6) 1330050 ))只進行距離B之移動。此時,工件w也當然地在真 空溝lb、2b之吸引下’同時移動,而使噴出口 2b相對於 工件W之位置產生變化。藉此,氣流對工件W之作用點 也產生變化。 此外,如上面所述,工件W因爲真空溝lb、2a之真 空吸引力而保持接觸基座2之狀態。因此,如第4圖(a )、(b)所示’移動搬運台1時,因爲工件w及基座2 φ 間之摩擦力’位於工件收容凹部la內之工件W之姿勢會 產生變化。藉此,對工件W所施加之氣流之力也會產生 變化。 第6圖(a) 、(b)係工件收容凹部ia內之工件w 之姿勢之詳細圖。 其中’第6圖(a)係工件W密接於工件收容凹部la 內之側壁之狀態,第6圖(b )係工件W在工件收容凹部 1內處於傾斜之狀態。 Φ 如此’控制部20使搬運台1朝箭頭l2方向退回的同 時,從噴出口 2b再度噴出空氣,可以高機率地使無法正 常排出之工件W從工件收容凹部ia被排出。此時,搬運 台1朝箭頭L2方向退回後,再度朝箭頭L】方向旋轉並使 搬運台1往返移動,可以更確實地使工件W從工件收容 凹部1 a被排出。 此外,本實施形態時,利用伺服馬達實施搬運台1之 驅動,實際之搬運台1之移動距離B係只與上述間隙A大 致相同之距離。 -9- (7) (7)1330050 此外,控制部20可以使搬運台1只進行距離B之往 返移動,然而,該距離B可以對應需要來進行變更。此外 ’控制部20也可變更搬運台1之往返移動次數及時間。 此外’控制部20依據來自光感測器5之信號,判斷 工件收容凹部la內之工件W未被排出時,會使噴出口 2b 進行預備之空氣噴出,其後,若工件W仍未被排出時, 使搬運台1朝箭頭L2方向退回,並再度從噴出口 2b噴出 空氣亦可。 此外,噴出口 2b之空氣噴出,亦可以爲在搬運台1 往返移動中進行連續噴出。 【圖式簡單說明】 第1圖係本發明之工件搬運裝置之一實施形態之部份 放大正面圖。 第2圖係本發明之工件搬運裝置之一實施形態之側剖 面圖。 第3圖係本發明之工件搬運裝置之作用之部份放大正 面圖。 第4圖係本發明之工件搬運裝置之作用之側剖面圖。 第5圖係本發明之工件搬運裝置之整體圖。 第6圖係配置於工件搬運裝置之搬運台之工件收容凹 部內之工件之圖。 【主要元件之符號說明】 -10- 1330050 搬運台 :工件收容凹部 :真空溝 基座 :真空溝 :噴出口 導軌 工件排出管 光感測器 :工件搬運裝置 :控制部 工件 -11(1) 1330050 IX. Description of the Invention [Technical Field] The present invention relates to a workpiece transfer device that transports and discharges a workpiece, and is related to a workpiece transfer device that can reliably discharge a workpiece. [Prior Art] Conventionally, a workpiece transfer device that transports and discharges a workpiece is provided with a seat; and a transfer table that is rotatably disposed on the susceptor and that forms a plurality of workpiece accommodating recesses for receiving the article at the outer edge is It is well known that the transport table can have a plurality of workpiece discharge positions from which the workpiece receiving recess inner member can be discharged to the outside. Further, in the vicinity of the workpiece discharge position of the transfer table, a workpiece discharge means for ejecting the workpiece by air is disposed on one side of the workpiece receiving portion, and the other side of the member housing recess is provided for receiving the ejection by the workpiece ejecting hand. The workpiece discharge pipe of the workpiece. In the workpiece discharge device, the workpiece is stored in the workpiece recess of the transfer table, and during the conveyance, the workpiece is electrically detected in the workpiece storage recess, and the transfer table is electrically detected to reach the desired workpiece discharge position. At this time, it is discharged by the workpiece discharge means through the workpiece discharge pipe. SUMMARY OF THE INVENTION However, in the case of a desired workpiece discharge position, the workpiece is ejected by the workpiece means, but the workpiece cannot be reliably ejected and remains in the workpiece. The work of the work is contained in the work section. The result is that the spray is discharged into the cavity -4 - (2) 1330050. At this time, the workpiece ejecting means repeatedly performs the ejection of air. However, the workpiece remains in the workpiece housing recess, and the residual workpiece contacts the workpiece discharge tube to cause breakage. In order to avoid the above, when the workpiece remains in the workpiece housing recess, the mechanical processing must be stopped, and the continuous operation cannot be performed, and the predetermined discharge position cannot be discharged and becomes a cause of erroneous discharge. The object of the present invention is to provide a workpiece handling apparatus which can be surely discharged from the workpiece housing recess to the outside in consideration of the above problems. The workpiece conveying device of the present invention is characterized in that: the base is provided on the base, and a plurality of workpiece receiving recesses for receiving the workpiece are formed on the outer edge, and the workpiece is received from the workpiece receiving recess of the workpiece discharge position. a transfer table; one side of the workpiece receiving recessed portion disposed at the workpiece discharge position; a workpiece workpiece ejecting means for ejecting the workpiece receiving recess; and the other side of the workpiece receiving recess disposed at the workpiece discharge position for borrowing a workpiece discharge pipe that is ejected by the tool ejection means; and a detection sensor for detecting the presence or absence of a workpiece in the workpiece receiving recess of the workpiece discharge position, and the conveyance table and the workpiece ejection means are controlled by the control unit In the drive control, the control unit drives the workpiece discharge means based on the signal from the detection sensor, and when the workpiece cannot be ejected from the workpiece storage recess, the transfer table is moved only by a predetermined distance. In the workpiece transporting apparatus of the present invention, the control unit causes the transporting table to reciprocate only at a predetermined distance. In the workpiece transporting apparatus of the present invention, the control unit causes the transport table to move only a predetermined number of times (3) 1330050 at a predetermined distance. In the workpiece transporting apparatus of the present invention, the control unit causes the transporting table to move back and forth for a predetermined time at a predetermined distance. According to the present invention as described above, even when the workpiece ejecting means is driven to eject the workpiece from the workpiece accommodating recess, the transporting table is driven again only after moving at a predetermined distance (;: the workpiece ejecting means, the workpiece in the workpiece accommodating portion is surely [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings. Figs. 1 to 6 show an embodiment of the workpiece transfer device of the present invention, such as Fig. 1 to Fig. As shown in Fig. 6, the workpiece transfer device 10 includes a susceptor 2 disposed in a straight direction, and rotatably disposed on the susceptor 2, and an outer edge forming a plurality of workpiece accommodating recesses la for accommodating the workpiece W. Here, the conveyance table 1 has a plurality of workpiece discharge positions P, and the workpieces W in the article storage recesses 1a are discharged from the respective workpiece discharge positions P in accordance with the electrical detection results as will be described later. In the workpiece discharge position P, a discharge port (workpiece discharge means) 2b for ejecting the workpiece W in the workpiece accommodating recess 1a on one side of the workpiece accommodating recess 1a is disposed. On the other side of the workpiece accommodating recess 1a of the discharge position P, a workpiece discharge pipe 4 for taking the workpiece W discharged from the discharge port 2b is disposed. Further, on the outer side of the edge of the conveyance table 1, a detection is provided. The position detecting device 5 of the workpiece W is received in the workpiece receiving recess 1a of the workpiece discharge position P at the workpiece discharge position P of the workpiece -6-(4) (4) 1330050. On the outer side of the edge of the conveyance table 1, a guide rail 3 for guiding the conveyance table 1 is disposed, and the detection sensor 5 is disposed in the guide rail 3. Further, on the back surface of the conveyance table 1, a concave portion for each workpiece is formed. The la connecting vacuum groove lb' forms a vacuum groove 2a communicating with the vacuum groove ib of the transfer table 1 at the susceptor 2, and the vacuum grooves lb, 2a are connected to a vacuum source not shown, for adsorbing the workpiece W and The air that is ejected from the ejection port 2b is generated by an air pressurizing mechanism (not shown), and the control unit 20 performs driving control of the air pressurizing mechanism to eject the air from the ejection port 2b. In addition, the 'transport station 1 is also performed by the control unit 20 In addition, the control unit 20 performs a predetermined distance B only when the workpiece W is not actually discharged and remains in the workpiece housing recess ia in accordance with a signal from the detecting sensor 5 (refer to FIG. 3 (b). After the movement of the system), the air pressurizing mechanism is driven to eject air from the discharge port 2b, and if necessary, the movement of the predetermined distance B from the original position can be repeated. The following is the effect of the present embodiment having the above configuration. First, the workpiece conveyance device 10 supplies the workpiece w from the workpiece supply unit 11 to the workpiece storage recess 1a of the conveyance table 1. Thereafter, the conveyance table i is intermittently rotated, and the workpiece is housed in the recess 1a. The workpiece W' is electrically detected by means of a workpiece measuring means not shown on the drawing. (5) (5) 1330050 One workpiece W is attached to the workpiece housing recess ia of the transfer table 1, and the transport table 1 abuts against the base 2 and is rotated in the direction of the arrow k (see Fig. 3(a)). The vacuum chamber lb on the back surface of the transfer table 1 is kept in communication with the vacuum groove 2a disposed in the susceptor 2, and the workpiece W is sucked and held in the workpiece accommodating recess 1a. Next, the workpiece W is discharged from the workpiece discharge position P corresponding to the electrical detection result by the workpiece measuring means. That is, when the workpiece W reaches the workpiece discharge position P to be discharged, the conveyance table 1 is stopped. Then, the workpiece w is blown out from the workpiece accommodating recess 1a by the airflow from the discharge port 2b provided in the susceptor 2, and is discharged to a storage box or the like which is not shown in the figure via the discharge pipe 4. At this time, the air current for a predetermined time is blown from the discharge port 2b, and thereafter, the air flow is stopped. Fig. 2 is a view showing the state of the workpiece W in the workpiece housing recess 1a. In general, the width of the workpiece receiving recess 1a has an arbitrary gap A with respect to the workpiece W, and the workpiece W located at the workpiece discharge position P is in a state of being in close contact with one of the left and right side walls of the workpiece receiving recess 1a (Fig. 3 (Fig. 3) a))) As described above, the discharge port 2b blows out a gas flow for a predetermined time, and when the normal operation cannot discharge the workpiece W, the light sensor 5 disposed inside the guide rail 3 disposed outside the edge of the conveyance table 1 is utilized. The residue of the workpiece W was detected. Upon receiving the detection signal from the photo sensor 5, the control unit 20 starts to blow the air outlet 2b again. At the same time, the control unit 20 moves the transport table 1 in the direction of the arrow L2 opposite to the direction of the arrow Li (see Fig. 3 (b -8 - (6) 1330050)) to move only the distance B. At this time, the workpiece w is also naturally moved under the suction of the vacuum grooves lb, 2b, and the position of the discharge port 2b with respect to the workpiece W is changed. Thereby, the point of action of the air flow on the workpiece W also changes. Further, as described above, the workpiece W is kept in contact with the susceptor 2 due to the vacuum attraction of the vacuum grooves lb, 2a. Therefore, as shown in Fig. 4 (a) and (b), when the transfer table 1 is moved, the posture of the workpiece W in the workpiece housing recess 1a changes due to the frictional force between the workpiece w and the susceptor 2 φ. Thereby, the force of the air flow applied to the workpiece W also changes. Fig. 6 (a) and (b) are detailed views of the posture of the workpiece w in the workpiece accommodating recess ia. Here, Fig. 6(a) shows a state in which the workpiece W is in close contact with the side wall in the workpiece accommodating recess 1a, and Fig. 6(b) shows a state in which the workpiece W is inclined in the workpiece accommodating recess 1. When the control unit 20 retracts the conveyance table 1 in the direction of the arrow l2, the air is again ejected from the discharge port 2b, so that the workpiece W that cannot be normally discharged can be discharged from the workpiece storage recess ia with high probability. At this time, the conveyance table 1 is retracted in the direction of the arrow L2, and is again rotated in the direction of the arrow L] to reciprocate the conveyance table 1, whereby the workpiece W can be more reliably discharged from the workpiece storage recess 1a. Further, in the present embodiment, the driving of the transport table 1 is performed by the servo motor, and the actual moving distance B of the transport table 1 is substantially the same as the gap A. -9- (7) (7) 1330050 Further, the control unit 20 can move the transport table 1 only by the distance B. However, the distance B can be changed as needed. Further, the control unit 20 can change the number and time of the reciprocating movement of the transport table 1. Further, the control unit 20 determines that the workpiece W in the workpiece housing recess 1a is not discharged when the workpiece W in the workpiece housing recess 1a is not discharged, and then the workpiece W is not discharged. At this time, the conveyance table 1 is retracted in the direction of the arrow L2, and air may be ejected again from the discharge port 2b. Further, the air from the discharge port 2b is ejected, and the continuous discharge can be performed while the transport table 1 is reciprocating. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a partial elevational view of an embodiment of a workpiece handling device of the present invention. Fig. 2 is a side cross-sectional view showing an embodiment of a workpiece conveying device of the present invention. Fig. 3 is a partially enlarged front elevational view showing the action of the workpiece handling device of the present invention. Figure 4 is a side cross-sectional view showing the action of the workpiece handling device of the present invention. Fig. 5 is an overall view of the workpiece handling device of the present invention. Fig. 6 is a view showing a workpiece placed in a workpiece housing recess of a transfer table of the workpiece conveying device. [Symbol description of main components] -10- 1330050 Palletizing table: Workpiece housing recess: Vacuum groove Base: Vacuum groove: Ejection port Guide Workpiece discharge tube Photo sensor: Workpiece handling device: Control part Workpiece -11

Claims (1)

1330050 Ο) 十、申請專利範圍 1· 一種工件搬運裝置,其特徵爲: 具有: 基座; 搬運台’其係旋轉自如地配置於基座上,於外緣形成 用以收容工件之多數個工件收容凹部,且從在工件排出位 置之工件收容凹部排出工件; Φ 工件噴出手段’其係配設於在工件排出位置之工件收 容凹部之一側,用以噴出工件收容凹部內之工件; 工件排出管,其係配設於在工件排出位置之工件收容 凹部之另一側’用以受取藉由工件噴出手段所噴出之工件 :以及 檢測感測器,其係用以檢測在工件排出位置之工件收 容凹部內之工件之有無, 搬運台及工件噴出手段係由控制部所驅動控制,控制 Φ 部係依據來自檢測感測器之信號,驅動工件噴出手段,而 工件也無法從工件收容凹部被排出時,使搬運台只進行預 定距離之移動。 2. 如申請專利範圍第1項所記載之工件搬運裝置, 其中 控制部係使搬運台只在預定距離進行往返移動。 3. 如申請專利範圍第2項所記載之工件搬運裝置, 其中 控制部係使搬運台只在預定距離進行任意次數之往返 -12- (2) (2)13300501330050 Ο) X. Patent Application No. 1. A workpiece transporting apparatus, comprising: a susceptor; the transporting table ′ is rotatably disposed on the pedestal, and a plurality of workpieces for accommodating the workpiece are formed on the outer edge The workpiece is recessed, and the workpiece is discharged from the workpiece receiving recess at the workpiece discharge position; Φ the workpiece ejection means is disposed on one side of the workpiece receiving recess at the workpiece discharge position for ejecting the workpiece in the workpiece receiving recess; a tube disposed on the other side of the workpiece receiving recess at the workpiece discharge position for receiving the workpiece sprayed by the workpiece ejection means: and a detecting sensor for detecting the workpiece at the workpiece discharge position The presence or absence of the workpiece in the recessed portion, the transport table and the workpiece ejecting means are driven and controlled by the control unit, and the control Φ portion drives the workpiece ejecting means based on the signal from the detecting sensor, and the workpiece cannot be ejected from the workpiece receiving recess. At this time, the transfer table is moved only by a predetermined distance. 2. The workpiece handling device according to claim 1, wherein the control unit causes the transport table to reciprocate only at a predetermined distance. 3. The workpiece handling device according to the second aspect of the patent application, wherein the control unit causes the transfer table to perform any number of round trips only at a predetermined distance -12- (2) (2) 1330050 移動。 4.如申請專利範圍第2項所記載之工件搬運裝置, 其中 控制部係使搬運台只在預定距離進行預定時間之往返 移動。 -13-mobile. 4. The workpiece transporting apparatus according to claim 2, wherein the control unit causes the transporting station to move back and forth only for a predetermined time at a predetermined distance. -13-
TW095141550A 2005-12-16 2006-11-09 Work transportation device TW200731890A (en)

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JP5402257B2 (en) * 2009-06-01 2014-01-29 株式会社村田製作所 Chip component transfer device
CN103029963B (en) * 2011-10-10 2015-07-15 东京威尔斯股份有限公司 Workpiece conveying device
JP6435535B2 (en) * 2015-01-07 2018-12-12 株式会社 東京ウエルズ Work characteristic measuring apparatus and work characteristic measuring method
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JP2002302244A (en) * 2001-04-05 2002-10-18 Nitto Kogyo Co Ltd One chip separating/carrying device
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