九、發明說明： 【發明所屬之技術領域】 本發明涉及一種透射電鏡微柵及其製備方法。 【先前技術】 在透射電子顯微鏡中，多孔碳支持膜（微栅）係用於 承載粉末樣品，進行透射電子顯微鏡高分辨像（HRTEM)觀 察的重要工具。隨著奈米材料研究的不斷發展，微柵在奈 米材料的電子顯微學表徵領域的應用日益廣泛。先前技術 中’該應祕透射電補魏的難財係在銅網或錄網 =金屬網格上覆蓋-層纽有機膜，再級—層非晶碳膜 製成的。然而，在實際應用中，尤其在觀察尺寸小於5奈 米的顆粒的透射電鏡高分辨⑽，微栅巾碳膜對奈 米顆粒的透射電鏡高分辨像觀察的影響很大。 有鑒於此，提供一種透射電鏡微栅及其製備方法實為 必要’該透射電鏡微栅對於奈米級齡，尤其係直徑小於 5奈米的縣，更容易獲得效果更好地透射電鏡高分辨像。 【發明内容】 種透射龟鏡微柵，其包括一金屬網格，其中， 該透射電鏡微柵進一步包括一奈米碳管薄膜結構，該 奈米碳管_結構覆蓋在金屬網格上。 該奈米碳管薄膜結構包括多層奈米碳管薄膜交 又重疊設置。 ' 每層奈米碳管薄膜為多個首尾相連且擇優取向 排列的奈米碳管束組成的薄膜結構。 1329095 該奈米碳管薄膜中具有多個微孔，該微孔的孔徑 為1奈米〜1微米。 一種透射電鏡微柵的製備方法，其包括以下步 驟：從奈米碳管陣列中拉取獲得奈米碳管薄膜；將奈 米碳管薄膜覆蓋在一金屬網格上；及使用有機溶劑處 理使該奈米碳管薄膜和金屬網格結合緊密。 進一步包括將多個奈米碳管薄膜相互交叉地重 疊形成一多層奈米碳管薄膜結構，並覆蓋在金屬網格 上。 該多層奈米碳管薄膜結構可預先通過有機溶劑 處理。 該有機溶劑為乙醇、曱醇、丙酮、二氯乙烷或氯 仿。 上述從奈米碳管陣列拉取獲得奈米碳管薄膜的 方法包括以下步驟：從奈米碳管陣列中選定一定寬度 的多個奈米碳管片斷；以及以一定速度沿基本垂直于 奈米碳管陣列生長方向拉伸該多個奈米碳管片斷，以 形成一連續的奈米碳管薄膜。 上述奈米碳管陣列的製備方法包括以下步驟：提 供一平整基底；在基底表面均勻形成一催化劑層；將 上述形成有催化劑層的基底在700〜900°c的空氣中退 火約30分鐘〜90分鐘；以及將處理過的基底置於反應 爐中，在保護氣體環境下加熱到500〜740°C，然後通 入碳源氣反應約5〜30分鐘，生長得到高度為200〜400 8 1329095 微米的奈米碳管陣列。 上述使用有機溶劑處理的方法包括通過試管將 有機溶劑滴落在奈米碳管薄膜表面浸潤整個奈米碳 管薄膜，或將上述形成有奈米碳管薄膜的金屬網格整 個浸入盛有有機溶劑的容器中浸潤。 相較於先前技術，所述的透射電鏡微栅及其製備 方法，其通過從超順排奈米碳管陣列可連續抽出奈米 碳管薄膜並覆蓋在金屬網格上，方法簡單、快捷，可 用於批量製備性質穩定的透射電鏡用微栅。同時，利 用奈米破管的吸附特性，有助於觀察尺寸小於5nm的 奈米顆粒的透射電鏡高分辨像。 【實施方式】 以下將結合附圖對本發明作進一步之詳細說明。 請參閱圖1，本發明實施例透射電鏡微柵的製備方 法主要包括以下幾個步驟： 步驟一：提供一奈米碳管陣列，優選地，該陣列 為超順排奈米碳管陣列。 本實施例中，超順排奈米碳管陣列的製備方法採 用化學氣相沉積法，其具體步驟包括：（a)提供一平 整基底，該基底可選用P型或N型矽基底，或選用形 成有氧化層的矽基底，本實施例優選為採用4英寸的 矽基底；（b)在基底表面均勻形成一催化劑層，該催 化劑層材料可選用鐵（Fe)、鈷（Co )、鎳（Ni)或其 任意組合的合金之一；（c)將上述形成有催化劑層的 9 1329095 基底在700〜90(TC的空氣中退火約3〇分鐘〜9〇分鐘； (d)將處理過的基底置於反應爐中，在保護氣體環 境下加熱到5G{M4Gt：，然後通人碳職體反應約 5〜30分鐘’生長得到超順排奈米碳管陣列，其高度為 2〇〇〜400微米。該超順排奈米碳管陣列為多個彼此平 订且垂直於基底生長的奈米碟管形成的純奈米碳管 陣列。通過上述控制生長條件，該超順排奈米碳管陣 歹J中基本不含有雜質，如無定型碳或殘留的催化劑金 屬顆粒等。該奈米碳管陣列中的奈米碳管彼此通過凡 德瓦爾力緊密接觸形成陣列。 本實施例中碳源氣可選用乙块等化學性質較活潑 的碳氫化合物’賴氣體可選賴氣、氨氣或惰性氣 體。 步驟一.彳之上述奈米碳管陣列中抽取獲得一定寬 度和長度的奈米碳管薄膜。 才木用一拉伸工具從奈米碳管陣列中拉取獲得奈米 碳管薄膜。其具體包括以下步驟：（a)從上述奈米碳 官陣列中選定一定寬度的多個奈米碳管片斷，本實施 例優選為採料有—定寬度的膠帶接觸奈米碳管陣 列以選定-定寬度的多個奈米碳管片斷；⑴以一定 速度沿基本垂直于奈米碳管陣列生長方向拉伸該多 個奈米碳管片斷，以形成—奈米碳管薄膜。 在上述拉伸過程令，該多個奈米碳管片斷在拉力 作用下沿拉伸方向逐漸脫離基底的同時，由於凡德瓦 10 爾力作用’該選定的多個奈米碳 米斷首尾相連地連續地被拉出，從而形成= ^官賴。該奈米碳管薄膜為定向排列的多個奈米 相連形成的具有一定寬度的奈米碳管薄 、"不米中奈米碳管的排列方向基本平行 于奈米碳管薄膜的拉伸方向。 本實施例中，該奈米碳管薄膜的寬度與奈米碳管IX. Description of the Invention: [Technical Field] The present invention relates to a transmission electron microstrip microgrid and a method of fabricating the same. [Prior Art] In a transmission electron microscope, a porous carbon supporting membrane (microgrid) is an important tool for carrying a powder sample and performing a high-resolution image (HRTEM) observation of a transmission electron microscope. With the continuous development of nanomaterial research, microgrids are increasingly used in the field of electron microscopy characterization of nanomaterials. In the prior art, the hard-to-finance system of the transmission of the electrons in the copper mesh or the recording net = the metal grid is covered with a layer of organic film, and the layer is made of a layer of amorphous carbon film. However, in practical applications, especially in the observation of high-resolution transmission electron microscopy (10) of particles having a size of less than 5 nm, the micro-gear carbon film has a great influence on the observation of high-resolution images of nano-particles by TEM. In view of this, it is necessary to provide a TEM micro-grid and a preparation method thereof. The TEM micro-gate is more likely to obtain a better TEM high resolution for the nanometer age, especially in a county with a diameter less than 5 nm. image. SUMMARY OF THE INVENTION A transmissive turtle mirror microgrid includes a metal mesh, wherein the TEM microgate further includes a carbon nanotube film structure, and the carbon nanotube structure covers the metal mesh. The carbon nanotube film structure comprises a plurality of layers of carbon nanotube film overlapping and overlapping. ' Each layer of carbon nanotube film is a film structure composed of a plurality of carbon nanotube bundles arranged end to end and arranged in a preferred orientation. 1329095 The carbon nanotube film has a plurality of micropores having a pore diameter of from 1 nm to 1 μm. A method for preparing a transmission electron microstrip microgrid, comprising the steps of: drawing a carbon nanotube film from a carbon nanotube array; covering the carbon nanotube film on a metal grid; and treating with an organic solvent The carbon nanotube film is tightly bonded to the metal mesh. Further, the method comprises overlapping a plurality of carbon nanotube films on each other to form a multilayer carbon nanotube film structure and covering the metal grid. The multilayered carbon nanotube film structure can be previously treated with an organic solvent. The organic solvent is ethanol, decyl alcohol, acetone, dichloroethane or chloroform. The above method for extracting a carbon nanotube film from a carbon nanotube array comprises the steps of: selecting a plurality of carbon nanotube segments of a certain width from a carbon nanotube array; and substantially perpendicular to the nanometer at a certain speed The plurality of carbon nanotube segments are stretched in the growth direction of the carbon tube array to form a continuous carbon nanotube film. The method for preparing the above carbon nanotube array comprises the steps of: providing a flat substrate; uniformly forming a catalyst layer on the surface of the substrate; and annealing the substrate on which the catalyst layer is formed in air at 700 to 900 ° C for about 30 minutes to 90 And the treated substrate is placed in a reaction furnace, heated to 500-740 ° C under a protective gas atmosphere, and then reacted with a carbon source gas for about 5 to 30 minutes to grow to a height of 200 to 400 8 1329095 micrometers. The array of carbon nanotubes. The above method for treating with an organic solvent comprises: dipping an organic solvent onto a surface of a carbon nanotube film by a test tube to infiltrate the entire carbon nanotube film, or immersing the metal mesh formed with the carbon nanotube film described above in an organic solvent; Infiltrated in the container. Compared with the prior art, the TEM micro-grid and the preparation method thereof are capable of continuously extracting a carbon nanotube film from a super-sequential carbon nanotube array and covering the metal grid, and the method is simple and quick. It can be used for batch preparation of microgrids for TEM. At the same time, the absorption characteristics of the nanotubes are useful for observing the high-resolution image of the TEM of nanoparticles with a size of less than 5 nm. [Embodiment] Hereinafter, the present invention will be further described in detail with reference to the accompanying drawings. Referring to FIG. 1, a method for preparing a TEM micro-gate according to an embodiment of the present invention mainly includes the following steps: Step 1: Providing an array of carbon nanotubes, preferably, the array is a super-sequential carbon nanotube array. In this embodiment, the method for preparing the super-sequential carbon nanotube array adopts a chemical vapor deposition method, and the specific steps include: (a) providing a flat substrate, the substrate may be selected from a P-type or N-type germanium substrate, or selected The ruthenium substrate formed with the oxide layer is preferably a 4-inch ruthenium substrate; (b) a catalyst layer is uniformly formed on the surface of the substrate, and the catalyst layer material may be iron (Fe), cobalt (Co) or nickel ( One of the alloys of Ni) or any combination thereof; (c) The 9 1329095 substrate on which the catalyst layer is formed is annealed in air of 700 to 90 (TC for about 3 minutes to 9 minutes; (d) treated The substrate is placed in a reaction furnace, heated to 5G{M4Gt: in a protective gas atmosphere, and then reacted with a carbon body for about 5 to 30 minutes to grow to obtain a super-aligned carbon nanotube array having a height of 2 〇〇~ 400 μm. The super-sequential carbon nanotube array is a plurality of pure carbon nanotube arrays formed by a plurality of nanotube tubes which are flattened and perpendicular to the substrate growth. The super-shoring nanocarbon is controlled by the above controlled growth conditions. Tube array J contains essentially no impurities, such as amorphous carbon or Residual catalyst metal particles, etc. The carbon nanotubes in the carbon nanotube array are in close contact with each other to form an array by van der Waals force. In this embodiment, the carbon source gas may be selected from a chemically active hydrocarbon such as a block. 'Lai gas can be selected from gas, ammonia or inert gas. Step 1. The carbon nanotube film of a certain width and length is extracted from the above-mentioned carbon nanotube array. The wood is extracted from the nano carbon by a stretching tool. The carbon nanotube film is obtained by drawing in the tube array. The method comprises the following steps: (a) selecting a plurality of carbon nanotube segments of a certain width from the above-mentioned nano carbon official array, and preferably picking the material in the embodiment. A fixed width tape contacts the carbon nanotube array to select a plurality of carbon nanotube segments of a predetermined width; (1) stretching the plurality of carbon nanotube segments at a rate substantially perpendicular to the growth direction of the carbon nanotube array, To form a carbon nanotube film. In the above stretching process, the plurality of carbon nanotube segments are gradually separated from the substrate in the stretching direction under the action of tension, and the selected one is selected due to the effect of van der Waals Multiple nai The carbon-carbon meter is continuously pulled out end to end to form a ^ ^官赖. The carbon nanotube film is formed by arranging a plurality of nanometers connected to each other to form a carbon nanotube having a certain width, " The arrangement direction of the carbon nanotubes in the rice is substantially parallel to the stretching direction of the carbon nanotube film. In this embodiment, the width of the carbon nanotube film and the carbon nanotubes
陣列所生長的基底的尺寸有關，該奈米碳管薄膜的長 度不限’可根據實際需求制得。本實施例中採用4英 寸的基底生長超順排奈米碳管陣列，該奈米碳管薄膜 的兔度可為lcm〜l〇cm。 *可以理解的係，可將多層上述獲得的奈米碳管薄 膜以預定的角度層層堆疊形成多層奈米碳管薄膜結 構，進一步地，可使用有機溶劑處理該多層奈米碳管 溥膜形成微孔薄膜結構。The size of the substrate on which the array is grown is related to the length of the carbon nanotube film, which can be made according to actual needs. In this embodiment, a 4-inch substrate growth super-sequential carbon nanotube array is used, and the carbon nanotube film may have a rabbit degree of 1 cm to 1 cm. * It is understood that the plurality of carbon nanotube films obtained above can be stacked at a predetermined angle to form a multilayer carbon nanotube film structure, and further, the multilayer carbon nanotube film can be formed by using an organic solvent. Microporous film structure.
由於本實施例步驟一中提供的超順排奈米碳管陣 列中的奈米碳管非常純淨，且由於奈米碳管本身的比 表面積非常大，所以該奈米碳管薄膜本身具有較強的 粘性。多層奈米碳管薄膜之間由於凡德瓦爾力緊密連 接形成穩定的多層奈米碳管薄膜結構。該預定的角度 可根據需求設定為相同的角度或不同的角度。該奈米 碳管薄膜結構的層數不限。 可以理解的係’可通過試管將有機溶劑滴落在奈 米碳管薄膜表面浸潤整個奈米碳管薄膜。或者，也可 11 1329095Since the carbon nanotubes in the super-sequential carbon nanotube array provided in the first step of the embodiment are very pure, and because the specific surface area of the carbon nanotube itself is very large, the carbon nanotube film itself is strong. Sticky. The multi-layered carbon nanotube film is closely connected by van der Waals force to form a stable multi-layered carbon nanotube film structure. The predetermined angle can be set to the same angle or a different angle according to requirements. The number of layers of the carbon nanotube film structure is not limited. It is understood that the system can immerse the organic solvent on the surface of the carbon nanotube film through the test tube to infiltrate the entire carbon nanotube film. Or, 11 11329095
將上述奈米碳管薄膜通過-固定框架固定，然後整個 浸入盛有有機溶劑的容器中浸潤。該有機溶劑為鄉 性有機溶劑，如乙醇、甲醇、㈣、二氣乙院或氣仿: 本實施射採用乙醇。該多層奈米碳管薄膜經有機溶 劑浸潤處理後，▲在揮發性有機溶劑的表面張力的作用 下’奈米被官薄膜中的平行的奈米碳管片斷會部分 集成奈米碳管束。另外，該奈米碳管薄膜中奈米碳管 聚集成束’使得該奈米碳管薄膜中平行的奈米碳管束 =間，本相互間隔’且多層奈米碳管薄膜中的奈米碳 g束乂叉排肋成微孔結構。這些微孔係由順序排列 而又互相父$的奈米碳管，以及奈米碳管束構成的。 …本技術領域技術人員應明白，本實施例奈米碳管 薄膜結構中的微孔結構與奈米碳管薄膜的層數有 關，當層數越多時，所形成的微孔結構的孔徑越小。 例如’當層數為四層時，微孔的尺寸分佈範圍大約從 幾個奈米職百奈米。這些微孔可以輕奈米顆粒， 奈米線’奈米料，以絲進行透料鏡觀察分析。 另外，本實施例還可利用將多層奈米碳管薄膜部 分堆疊形成具有任意寬度和長度的微孔薄膜結構，不 受本實施例上述方法從奈米碳管陣列直接拉出的奈 米碳管薄膜的寬度限制。 步驟三：將上述獲得的奈米碳管薄膜結構覆蓋在 -用於透射電鏡中的金屬網格上，並使用有機溶劑處 理使該微孔薄膜結構和金屬網格結合緊密。 12 該金屬網格材料為銅或其他金屬材料，該金屬網 ^的孔從退大于奈米碳管薄膜的微孔孔㉟。該有機溶 ^為揮發性有機溶劑，如乙醇、甲醇、丙綱、二氣乙 燒或乳仿。該有機溶劑可直接滴在奈米碳管薄膜上， 使4微孔薄膜結構和金屬網格結合緊密。 步驟四：待有機溶劑揮發後’沿金屬網格邊沿去 除多餘的微孔薄膜，即製成透射電鏡微柵。The above-mentioned carbon nanotube film was fixed by a fixing frame, and then entirely immersed in a container containing an organic solvent to infiltrate. The organic solvent is a domestic organic solvent, such as ethanol, methanol, (four), Erqiyiyuan or gas imitation: the present embodiment uses ethanol. After the multilayered carbon nanotube film is infiltrated with an organic solvent, ▲ under the action of the surface tension of the volatile organic solvent, the parallel carbon nanotube segments in the nanofilm are partially integrated into the carbon nanotube bundle. In addition, the carbon nanotubes in the carbon nanotube film are aggregated into a bundle such that the parallel carbon nanotube bundles in the carbon nanotube film are in the middle of each other and the nanocarbon in the multilayered carbon nanotube film The g-beam ribs are arranged in a microporous structure. These micropores are composed of carbon nanotubes arranged in series and mutually parental, and a bundle of carbon nanotubes. It should be understood by those skilled in the art that the microporous structure in the structure of the carbon nanotube film of the present embodiment is related to the number of layers of the carbon nanotube film. When the number of layers is larger, the pore diameter of the formed microporous structure is higher. small. For example, when the number of layers is four, the size distribution of the micropores ranges from a few nanometers to a hundred nanometers. These micropores can be analyzed by light microscopy using nanometer particles, nanowires, and nanowires. In addition, the embodiment can also utilize a portion of a plurality of layers of carbon nanotube film stacked to form a microporous film structure having an arbitrary width and length, and is not directly extracted from the carbon nanotube array by the above method of the embodiment. The width of the film is limited. Step 3: The carbon nanotube film structure obtained above is covered on a metal mesh used in a transmission electron microscope, and the organic solvent treatment is used to bond the microporous film structure and the metal mesh tightly. 12 The metal mesh material is copper or other metal material, and the hole of the metal mesh is retracted from the micropores 35 of the carbon nanotube film. The organic solvent is a volatile organic solvent such as ethanol, methanol, propyl, ethane or milk. The organic solvent can be directly dropped on the carbon nanotube film to make the 4-microporous film structure and the metal mesh tightly combined. Step 4: After the organic solvent is volatilized, the excess microporous film is removed along the edge of the metal mesh to form a transmission electron microstrip.
、可以理解’本實施例透射電鏡微栅結構的製備方 法也可直接將柚取獲得的—奈米碳管薄膜直接覆笛 t金屬網ί上，再將另—或更多的奈米碳管薄膜依:1 =又地覆Α上-奈米碳管薄膜。然後再使用有機溶劑 处理=述奈米碳管薄膜從而得到透射電鏡微柵結構。It can be understood that the preparation method of the TEM micro-gate structure of the present embodiment can also directly extract the carbon nanotube film obtained by the pomelo directly onto the metal mesh, and then another or more carbon nanotubes. The film is based on: 1 = overlying the carbon nanotube film. Then, an organic solvent is used to treat the film of the carbon nanotubes to obtain a transmission electron micro-gate structure.
清參閱圖2及圖3’本實施例依照上述方法製借得 制透射電鏡微柵結構2G，其包括―金屬網格^及 覆盍在金屬網格22表面的奈米碳管薄膜結構24。該 奈米碳管薄膜結構24包括一層奈米碳管薄膜，或： 也可為多層奈米碳管薄膜按照預定的角度堆疊 的微孔薄膜結構。該微孔薄膜的孔徑與奈米碳^膜 的層數有關，可為1奈米〜1微米。 、 心凊參閱圖4,為本發明實施例透射電鏡微柵結構中 採用的多層奈米碳f薄朗掃描電鏡照片。該多居太 米碳管薄膜以90。角重疊形成微孔薄膜結構，每 奈米碳管薄膜中的奈米碳管狀向排列，兩奈米^ 涛膜之間通過凡德瓦爾力結合。該奈米碳管薄獏中的 13 1329095 奈米碳管聚集成束，該奈米碳管薄膜中奈米碳管束交 叉形成多個微孔結構，其中微孔直徑為1奈米〜1微米。 本實施例透射電鏡微柵在應用時，可利用這些小 尺寸的微孔支持具有較大尺寸的奈米顆粒，奈米線， 奈米棒等來進行透射電鏡觀察分析。對於尺寸小於 5nm的單個存在的奈米顆粒來說，微孔的作用不係太 大，起作用的主要係奈米碳管的吸附作用，這些尺寸 極小的奈米顆粒能夠被穩定地吸附在奈米碳管管壁 邊沿，便於進行觀察。請參閱圖5和圖6，圖中黑色 顆粒為待觀察的奈米金顆粒。該奈米金顆粒穩定地吸 附在奈米碳管管壁邊沿，有利於觀察奈米金顆粒的高 分辨像。 另外，由於用於抽取奈米碳管薄膜的超順排奈米 碳管陣列中的碳管純淨度高，尺寸均一，管壁缺陷 少。本實施例透射電鏡微柵對承載於其上的待觀測樣 品的形貌和結構分析等干擾小，對吸附於其上的奈米 顆粒的高分辨像影響很小。 本發明實施例所提供的透射電鏡微柵及其製備方 法，其通過從超順排奈米碳管陣列可連續抽出奈米碳 管薄膜並覆蓋在金屬網格上，方法簡單、快捷，可用 於批量製備性質穩定的透射電鏡用微柵。同時，利用 奈米碳管的吸附特性，有助於觀察尺寸小於5nm的奈 米顆粒的透射電鏡高分辨像。 综上所述，本發明確已符合發明專利之要件，遂 14 1329095 依法提出專利申請。惟，以上所述者僅為本發明之較 佳實施例，自不能以此限制本案之申請專利範圍。舉 凡熟悉本案技藝之人士援依本發明之精神所作之等 效修飾或變化，皆應涵蓋於以下申請專利範圍内。 【圖式簡單說明】 圖1為本發明實施例透射電鏡微栅的製備方法的 流程示意圖。 圖2為本發明實施例透射電鏡微栅的結構示意 圖。 圖3為本發明實施例透射電鏡微柵的掃描電鏡 (SEM)照片。 圖4為本發明實施例透射電鏡微柵中奈米碳管薄 膜的掃描電鏡照片。 圖5為應用本發明實施例透射電鏡微柵觀察奈米 金顆粒的透射電鏡南分辨像。 圖6為圖5的局部放大示意圖。 【主要元件符號說明】 透射電鏡微柵結構 20 金屬網格 22 奈米碳管薄膜結構 24 15Referring to Fig. 2 and Fig. 3', in this embodiment, a TEM microgate structure 2G is fabricated in accordance with the above method, which comprises a "metal grid" and a carbon nanotube film structure 24 overlying the surface of the metal grid 22. The carbon nanotube film structure 24 comprises a layer of carbon nanotube film, or: a microporous film structure in which a plurality of layers of carbon nanotube film are stacked at a predetermined angle. The pore diameter of the microporous film is related to the number of layers of the nanocarbon film, and may be from 1 nm to 1 μm. Referring to FIG. 4, a multi-layered nanocarbon f thin SEM image taken in a TEM micro-gate structure according to an embodiment of the present invention. The multi-strand carbon nanotube film is 90. The corners overlap to form a microporous film structure, and the carbon nanotubes in each carbon nanotube film are arranged in a tubular direction, and the two nanometers are combined by van der Waals force. The 13 1329095 carbon nanotubes in the thin carbon nanotubes are gathered into a bundle, and the carbon nanotube bundles in the carbon nanotube film are cross-linked to form a plurality of microporous structures, wherein the micropores have a diameter of 1 nm to 1 μm. In the application of the TEM micro-grid, the small-sized micropores can be used to support nano-sized particles, nanowires, nanorods, etc. for transmission electron microscopy observation and analysis. For a single nanoparticle having a size of less than 5 nm, the effect of the micropores is not too large, and the main function is the adsorption of the carbon nanotubes. These extremely small nanoparticles can be stably adsorbed on the naphthalene. The edge of the carbon tube wall is easy to observe. Referring to Figures 5 and 6, the black particles are the nano gold particles to be observed. The nano gold particles are stably adsorbed on the edge of the carbon nanotube wall, which is advantageous for observing the high resolution image of the nano gold particles. In addition, since the carbon tubes in the super-sequential carbon nanotube array for extracting the carbon nanotube film are high in purity, uniform in size, and have few wall defects. In the embodiment, the TEM microgrid has little interference to the morphology and structural analysis of the sample to be observed carried thereon, and has little influence on the high resolution image of the nanoparticles adsorbed thereon. The TEM micro-grid and the preparation method thereof are provided by the embodiment of the invention, which can continuously extract the carbon nanotube film from the super-aligned carbon nanotube array and cover the metal grid, and the method is simple and quick, and can be used for Micro-gates for transmission electron microscopy with stable properties are prepared in batches. At the same time, the adsorption characteristics of the carbon nanotubes are useful for observing the high-resolution image of the TEM of nanoparticles having a size of less than 5 nm. In summary, the present invention has indeed met the requirements of the invention patent, and 遂 14 1329095 filed a patent application according to law. However, the above is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the patent application in this case. Equivalent modifications or variations made by those skilled in the art to the spirit of the invention are intended to be included within the scope of the following claims. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a flow chart showing a method of preparing a transmission electron microstrip micro-gate according to an embodiment of the present invention. Fig. 2 is a schematic view showing the structure of a transmission electron microscope micro-gate according to an embodiment of the present invention. 3 is a scanning electron microscope (SEM) photograph of a TEM microgrid according to an embodiment of the present invention. Fig. 4 is a scanning electron micrograph of a carbon nanotube film in a transmission electron microstrip micro-gate according to an embodiment of the present invention. Fig. 5 is a transmission electron microscope south resolution image of a nano-particle for observation of a transmission electron microstrip micro-gate according to an embodiment of the present invention. Figure 6 is a partial enlarged view of Figure 5. [Main component symbol description] Transmission electron micro-gate structure 20 Metal mesh 22 Carbon nanotube film structure 24 15