1323678 九、發明說明： 【發明所屬之技術領域】 本發明涉及一種流體循環系統。 【先前技術】 印刷電路板係各種電子產品之重要組成部件之一，傳 統之印刷電路板之製作通常需要經過塗佈光阻、曝光顯 籲影、蝕刻導電線路、光阻去除以及電鍍處理等工序。於這 些工序中產生各種廢水廢液之大量排放可能會引發各類環 境污染問題，故，印刷電路板製作過程中廢水廢液之處理 曰益受到人們之重視。參見文獻〇· Cakir，Copper etching with cupric chloride and regeneration of waste etchant， Journal of Materials Processing Technology，2006，175 (1-3) : 63-68。印刷電路板製作過程中對大量廢水廢液進 I行循環利用不僅可有效避免環境污染問題，而且可有效降 低印刷電路板之製作成本。 於印刷電路板製作過程中，通常採用一般流體循環裝 置來進行廢水廢液等流體之利用。一般流體循環裝置通常 包括回流管、儲液槽、吸入管、供給管、循環泵。惟，經 過一般流體循環裝置循環使用之流體可能達不到印刷電路 板製作之要求，會影響到製作印刷電路板之品質。 以塗佈光阻工序為例，採用液態光阻劑對覆銅基板進 行塗佈，塗佈剩餘之液態光阻劑經過一般流體循環裝置循 1323678 環處理之液態光阻劑再重新使用，對覆銅基板進行塗佈。 -由於採用一般流體循環裝L流體於從吸入管進入循 裱泵時，由於流體壓力驟減，流體於循環泵中容易產生氣 .泡出現空蝕現象，而具有氣泡之液態光阻劑再由供給管導 出重新使用時，液態光阻劑中之氣泡會影響液態光阻劑塗 佈之均勻性，從而影響印刷電路板製作之品質。 【發明内容】 有鑑於此，提供一種流體循環系統，以有效減少流體 於循環過程中氣泡之產生，從而提高流體循環之品質，從 而確保流體循環使用過程中印刷電路板製作之品質實屬必 要。 以下將以實施例說明一種流體循環系統。 該流體循環系統’其包括回流管、儲液槽、吸入管、 供給管、循環泵及流體使用裝置，該回流管一端與流體使 鲁用裝置相連，用於將經流體使用裝置之流體導入儲液槽 中，該循環泵具有流體入口與流體出口，該吸入管一端與 循環泵之流體入口相連，另一端伸入到儲液槽中，用於將 流體從儲液槽中導出進入循環泵；該供給管一端與循環泵 之流體出口相連，另一端與流體使用裝置相連，用於將流 體從循環泵導出使用，該吸入管之管徑大於該供給管之管 徑。 與先前技術相比，由於流體循環系統之吸入管之管徑 大於供給管之管徑，可有效減小流體從吸入管進入循環泵 1323678 ' 壓力降低之幅度，增加流體從循環泵進入供給管壓力增加 ， 之幅度，從而有效減少流體於循環過程中氣泡之產生，從 而提高流體循環之品質，進而確保流體循環使用過程中印 刷電路板製作之品質。 【實施方式】 下面結合附圖及實施例對本技術方案提供之流體循環 系統作進一步說明。 * 請參閱圖1，其為本技術方案第一實施例提供之流體循 環系統100。流體循環系統100包括回流管110、儲液槽 120、吸入管130、循環泵140、供給管150及流體使用裝 置 180。 回流管110 —端與流體使用裝置180相連，用於將經 流體使用裝置180之流體導入儲液槽120中，即流體於流 體使用裝置180進行使用，剩餘流體可經由回流管110流 鲁入到儲液槽120中。 儲液槽120用於儲存由回流管110導入之流體，以便 後續再次利用。 循環泵140具有流體入口 141與流體出口 142。該循環 泵140用於對流體進行輸送，利用循環泵140之動力作功， 使流體可從流體入口 141進入循環泵140,然後再使進入循 環泵140之流體可從流體出口 142流出。 吸入管130管徑大小均勻，其一端與循環泵140之流 體入口 141相連通，另一端伸入到儲液槽120中，用於將 1323678 • 儲存於儲液槽120中之流體從儲液槽120中導出進入循環 •泵 140。 供給管150管徑大小均勻，其一端與循環泵140之流 體出口 142相連通，另一端與流體使用裝置180相連，用 於將從循環泵140之流體出口 142流出之流體導出，進入 到流體使用裝置180使用。 吸入管130之管徑較大，增大吸入管130之管徑使得 流體於吸入管130中之壓力降低，可有效減小流體從吸入 * 管130進入循環泵140壓力降低之幅度，避免流體進入循 環泵140後由於壓力之大幅度降低而導致空氣於流體中溶 解度之大幅度降低，從而避免大量之氣泡產生，進而避免 由供給管150從循環泵140導出之流體含有過多氣泡。同 時，供給管150之管徑與吸入管130之管徑相比相對較小， 當流體從循環泵140進入供給管150時，循環泵140對流 體作功，故，使得流體從循環泵140到供給管150之壓力 $增加幅度較大，使得空氣於流體中之溶解度大幅度增加， 從而可進一步降低流體中之氣泡含量，使得從供給管150 導出之流體符合印刷電路板製作之使用要求。吸入管130 之管徑與供給管150之管徑之比例可為1.5〜2.0。優選地， 吸入管130之管徑與供給管150之管徑之比例可為1.6〜1.8。 該流體循環系統100可用於印刷電路板製作過程之塗 佈光阻工序，用於對液態光阻劑進行循環使用。故，流體 使用裝置180可為光阻塗佈裝置，循環之流體為液態光阻 劑。由於使用該流體循環系統1〇〇,大大減少了液態光阻劑 1323678 於循環過程中氣泡之產生，提高了循環利用之液態光阻劑 . 之品質，有利於提高液態光阻劑塗佈之均勻性，從而提高 印刷電路板之製作品質。 請參閱圖2,其為本技術方案第二實施例提供之流體循 環系統200。流體循環系統200包括回流管210、儲液槽 220、吸入管230、循環泵240、供給管250、過濾裝置260 及流體使用裝置280。 回流管210 —端與流體使用裝置280相連，用於將流 * 體導入儲液槽220中，即流體於流體使用裝置280使用後， 剩餘之流體可經由回流管210流入到儲液槽220中。儲液 槽220用於儲存由回流管210導入之流體，以便後續再次 利用。 循環泵240具有流體入口 241與流體出口 242。該循環 泵240用於對流體進行輸送。利用循環泵240之動力作功， 使流體可從流體入口 241進入循環泵240,然後再使進入循 0 環泵140之流體可從流體出口 242流出。 吸入管230 —端與循環泵240之流體入口 241相連通， 另一端伸入到儲液槽220中，用於將儲存於儲液槽220中 之流體從儲液槽220中導出進入循環泵240。 供給管250包括第一供給管段251與第二供給管段 252。該第一供給管段251 —端連接循環泵240之流體出口 242,另一端與過濾裝置260相連，用於將流體從循環泵240 導出進入過濾裝置260。該第二供給管段252 —端與過濾裝 置260相連，另一端與流體使用裝置280相連，用於將經 1323678 過濾裝置260過濾之流體導入到流體使用裝置28〇中進行 使用》該第一供給管段251與第二供給管段251之管徑大 小相同，亦可為第一供給管段251之管徑大於第二供給管 段251之管徑。 過濾裝置260設置於第一供給管段251與第二供給管 段252之間，用於對從循環泵24〇之流體出口 242導出之 流體進行過濾處理，去出流體中雜質，進一步提高循環處 理後進入流體使用裝置28〇之流體之品質。 吸入管230之管徑大於供給管25〇之管徑。吸入管23〇 之官徑與供給管250之第一供給管段251與第二供給管段 252之管徑之比例均為15〜2 〇。優選地，吸入管23〇之管 徑與供給管250之第一供給管段251與第二供給管段252 之管徑之比例均為1.64.8。 综上所述，本發明確已符合發明專利之要件，遂依法 提出專利申請。惟，以上所述者僅為本發明之較佳實施方 式，自不能以此限制本案之申請專利範圍。舉凡熟悉本案 技藝之人士援依本發明之精神所作之等效修飾或變化，皆 應涵蓋於以下申請專利範圍内。 【圖式簡單說明】 圖1係本技術方案第一實施例提供之流體循環系統之 結構示意圖。 圖2係本技術方案第二實施例提供之流體循環系統之 結構示意圖。1323678 IX. Description of the Invention: TECHNICAL FIELD OF THE INVENTION The present invention relates to a fluid circulation system. [Prior Art] Printed circuit boards are one of the important components of various electronic products. Conventional printed circuit boards usually require processes such as coating photoresist, exposure exposure, etching conductive lines, photoresist removal, and plating processing. . The large amount of waste water generated in these processes may cause various environmental pollution problems. Therefore, the treatment of wastewater waste liquid in the production process of printed circuit boards has received much attention. See 〇·Cakir, Copper etching with cupric chloride and regeneration of waste etchant, Journal of Materials Processing Technology, 2006, 175 (1-3): 63-68. In the process of manufacturing a printed circuit board, recycling a large amount of waste liquid into the I line can not only effectively avoid environmental pollution problems, but also effectively reduce the manufacturing cost of the printed circuit board. In the production process of printed circuit boards, general fluid circulation devices are generally used for the utilization of fluids such as waste water. Typical fluid circulation devices typically include a return line, a reservoir, a suction tube, a supply tube, and a circulation pump. However, fluids that have been recycled through a typical fluid circulation device may not meet the requirements for printed circuit board fabrication and may affect the quality of the printed circuit board. Taking the photoresist process as an example, the copper-clad substrate is coated with a liquid photoresist, and the remaining liquid photoresist is applied to the liquid photoresist treated by the general fluid circulation device according to the 1323678 ring, and then reused. The copper substrate is coated. -Because the general fluid circulation is used to install the L fluid into the circulation pump from the suction pipe, the fluid is easily generated in the circulation pump due to the sudden decrease of the fluid pressure. The bubble is cavitation, and the liquid photoresist with bubbles is further When the supply tube is exported and reused, the bubbles in the liquid photoresist affect the uniformity of the coating of the liquid photoresist, thereby affecting the quality of the printed circuit board. SUMMARY OF THE INVENTION In view of the above, a fluid circulation system is provided to effectively reduce the generation of bubbles in a fluid during circulation, thereby improving the quality of fluid circulation, thereby ensuring the quality of printed circuit board fabrication during fluid circulation. A fluid circulation system will be described below by way of example. The fluid circulation system includes a return pipe, a liquid storage tank, a suction pipe, a supply pipe, a circulation pump, and a fluid use device, and one end of the return pipe is connected to the fluid to be used for introducing the fluid through the fluid use device. In the liquid tank, the circulation pump has a fluid inlet and a fluid outlet, the suction tube is connected at one end to the fluid inlet of the circulation pump, and the other end is extended into the liquid storage tank for discharging the fluid from the liquid storage tank into the circulation pump; One end of the supply tube is connected to the fluid outlet of the circulation pump, and the other end is connected to the fluid use device for guiding the fluid from the circulation pump. The diameter of the suction tube is larger than the diameter of the supply tube. Compared with the prior art, since the diameter of the suction pipe of the fluid circulation system is larger than the diameter of the supply pipe, the pressure of the fluid from the suction pipe to the circulation pump 1323678 can be effectively reduced, and the pressure of the fluid from the circulation pump to the supply pipe is increased. Increasing the amplitude, thereby effectively reducing the generation of bubbles during the circulation of the fluid, thereby improving the quality of the fluid circulation, thereby ensuring the quality of the printed circuit board during fluid circulation. [Embodiment] The fluid circulation system provided by the present technical solution will be further described below with reference to the accompanying drawings and embodiments. * Please refer to Fig. 1, which is a fluid circulation system 100 provided by a first embodiment of the present technical solution. The fluid circulation system 100 includes a return line 110, a reservoir 120, a suction tube 130, a circulation pump 140, a supply tube 150, and a fluid usage device 180. The return pipe 110 is connected to the fluid use device 180 for introducing the fluid passing through the fluid use device 180 into the liquid storage tank 120, that is, the fluid is used by the fluid use device 180, and the remaining fluid can be flowed through the return pipe 110. In the reservoir 120. The reservoir 120 is used to store the fluid introduced by the return line 110 for subsequent reuse. The circulation pump 140 has a fluid inlet 141 and a fluid outlet 142. The circulation pump 140 is used to deliver fluid, utilizing the power of the circulation pump 140 to allow fluid to enter the circulation pump 140 from the fluid inlet 141, and then allow fluid entering the circulation pump 140 to flow out of the fluid outlet 142. The suction pipe 130 has a uniform pipe diameter, one end of which is in communication with the fluid inlet 141 of the circulation pump 140, and the other end of which is inserted into the liquid storage tank 120 for storing the fluid stored in the liquid storage tank 120 from the liquid storage tank 120. The 120 is exported into the cycle pump 140. The supply pipe 150 has a uniform pipe diameter, one end of which is in communication with the fluid outlet 142 of the circulation pump 140, and the other end of which is connected to the fluid use device 180 for discharging the fluid flowing out of the fluid outlet 142 of the circulation pump 140 into the fluid. Device 180 is used. The diameter of the suction pipe 130 is large, and the diameter of the suction pipe 130 is increased to reduce the pressure of the fluid in the suction pipe 130, which can effectively reduce the pressure drop of the fluid from the suction pipe 130 into the circulation pump 140, and prevent the fluid from entering. After the circulation pump 140, the solubility of the air in the fluid is greatly reduced due to the large pressure drop, thereby avoiding the generation of a large amount of bubbles, thereby preventing the fluid discharged from the circulation pump 140 by the supply pipe 150 from containing excessive bubbles. At the same time, the diameter of the supply pipe 150 is relatively small compared to the diameter of the suction pipe 130. When the fluid enters the supply pipe 150 from the circulation pump 140, the circulation pump 140 works on the fluid, so that the fluid flows from the circulation pump 140 to The pressure of the supply pipe 150 is increased by a large amount, so that the solubility of the air in the fluid is greatly increased, so that the bubble content in the fluid can be further reduced, so that the fluid discharged from the supply pipe 150 conforms to the use requirements of the printed circuit board. The ratio of the diameter of the suction pipe 130 to the diameter of the supply pipe 150 may be 1.5 to 2.0. Preferably, the ratio of the diameter of the suction pipe 130 to the diameter of the supply pipe 150 may be 1.6 to 1.8. The fluid circulation system 100 can be used in a coating photoresist process for a printed circuit board fabrication process for recycling liquid photoresist. Therefore, the fluid use device 180 can be a photoresist coating device, and the circulating fluid is a liquid photoresist. Due to the use of the fluid circulation system, the generation of bubbles of the liquid photoresist 1323678 during the cycle is greatly reduced, and the quality of the recycled liquid photoresist is improved, which is advantageous for improving the uniformity of the coating of the liquid photoresist. Sex, thereby improving the quality of printed circuit boards. Please refer to FIG. 2, which is a fluid circulation system 200 according to a second embodiment of the present technology. The fluid circulation system 200 includes a return pipe 210, a reservoir 220, a suction pipe 230, a circulation pump 240, a supply pipe 250, a filtering device 260, and a fluid usage device 280. The end of the return pipe 210 is connected to the fluid using device 280 for introducing the fluid body into the liquid storage tank 220, that is, after the fluid is used by the fluid using device 280, the remaining fluid can flow into the liquid storage tank 220 via the return pipe 210. . The reservoir 220 is used to store the fluid introduced by the return line 210 for subsequent reuse. The circulation pump 240 has a fluid inlet 241 and a fluid outlet 242. The circulation pump 240 is used to deliver fluid. With the power of the circulation pump 240, fluid can be introduced from the fluid inlet 241 into the circulation pump 240, and then the fluid entering the circulation pump 140 can flow out of the fluid outlet 242. The suction pipe 230 is connected to the fluid inlet 241 of the circulation pump 240, and the other end is inserted into the liquid storage tank 220 for discharging the fluid stored in the liquid storage tank 220 from the liquid storage tank 220 into the circulation pump 240. . The supply tube 250 includes a first supply tube segment 251 and a second supply tube segment 252. The first supply pipe section 251 is connected at its end to a fluid outlet 242 of the circulation pump 240 and at the other end to a filtration device 260 for directing fluid from the circulation pump 240 into the filtration device 260. The second supply pipe section 252 is connected to the filter device 260, and the other end is connected to the fluid use device 280 for introducing the fluid filtered by the 1323678 filter device 260 into the fluid use device 28 for use. The diameter of the second supply pipe section 251 is the same as that of the second supply pipe section 251, and the diameter of the first supply pipe section 251 is larger than the diameter of the second supply pipe section 251. The filtering device 260 is disposed between the first supply pipe section 251 and the second supply pipe section 252 for filtering the fluid discharged from the fluid outlet 242 of the circulation pump 24 to remove impurities in the fluid, further improving the circulation process and entering The quality of the fluid used by the fluid application device 28. The diameter of the suction pipe 230 is larger than the diameter of the supply pipe 25〇. The ratio of the diameter of the suction pipe 23A to the diameter of the first supply pipe section 251 and the second supply pipe section 252 of the supply pipe 250 is 15 to 2 Torr. Preferably, the ratio of the diameter of the suction pipe 23 to the pipe diameter of the first supply pipe section 251 and the second supply pipe section 252 of the supply pipe 250 is 1.64.8. In summary, the present invention has indeed met the requirements of the invention patent, and has filed a patent application according to law. However, the above description is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the patent application of the present invention. Equivalent modifications or variations made by persons skilled in the art in light of the present invention are intended to be included within the scope of the following claims. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing the structure of a fluid circulation system according to a first embodiment of the present technical solution. Fig. 2 is a schematic view showing the structure of a fluid circulation system according to a second embodiment of the present technical solution.
11 1323678 【主要元件符號說明】 流體循環糸統 100， 200 回流管 110， 210 儲液槽 120， 220 吸入管 130， 230 循壤果 140， 240 流體入口 141， 241 流體出口 142， 242 供給管 150， 250 流體使用裝置 180， 280 第一供給管段 251 第二供給管段 252 過濾裝置 26011 1323678 [Description of main component symbols] Fluid circulation system 100, 200 Return pipe 110, 210 Reservoir 120, 220 Suction pipe 130, 230 Contours 140, 240 Fluid inlet 141, 241 Fluid outlet 142, 242 Supply pipe 150 250 fluid use device 180, 280 first supply pipe section 251 second supply pipe section 252 filter device 260
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