1321206 九、發明說明： 【發明所屬之技術領域】 本發明係有關一種廢氣排放裝置及方法，尤指一種藉由將部份.攻 漏在旁通風管内的廢氣，經由第一管路抽送至轉輪中之冷卻區域後端 之新鮮空氣進氣管路裏，再送至轉輪中之脫附區域脫附之設計，使得 本發明具有提升排氣品質之功效，而適於應用在各種半導體業、光電 產業、其他化學/化工相關產業和相關要求空氣品質之場所者。 【先前技術】 隨著台灣高科技產業的蓬勃發展下，半導體產業曰漸成長迅速， 其中料體產業可以包含有積體電路產業與光電產業，對國内經濟具 有極大的影響力，但在半導體元件及光電元件製程中隨之衍生了許多 廢液、廢水、廢氣等有關環保問題，例如：半導體祕黃光製程中分 別有清洗、塗底、光阻覆蓋、軟烤、曝光、烘烤、顯影、硬烤等等步 驟，會使_各式清洗液、光崎等械溶劑，造翁揮發性有機物 V0CS(V〇latlIe 〇rganic c〇_nds ; 一般係指在標準狀態下，其蒸汽 壓大於〇· lmniHg以上之有機化合物）的產生，而這些船絕大部份屬 於有害性的__H咖…⑽的她；騰小人體長 期暴露於含高濃度船的環射，會有赵巾纽《性腫瘤紅 U放出來的有機溶職氣，必 ㈤加以處理’不可任其额排輯大氣令。 而行政院環保署也於 民g 年—月六日發佈「半導體製造業 6 二氣污染官制及排放標準」’依照該標準規定，全國半導體製造業中從 事積體電路晶圓製造及封裝、磊晶、光罩製造及導線架製造等作業者， 其全廠揮發性有機物⑽⑻及姐、硫酸、鹽酸、魏、驗酸等無 機馱年使用董超過規定限值者，皆應納入管制，其中揮發性有機廢氣 強制要求其削減率應大於、或總排放量小於0.此g/hr。 目前國内一般從事製造與代工的積體電路製造業中，實施運轉的 VOCs空餘治設紅要核性碳·博、雜濃_化、冷擬回 收溼式洗務、活性碳流體化床等，種類可說不勝枚舉。而習知的廢 氣處理裝置具有實際運轉經驗、且成熟穩定，其處微鮮可符合目 别國内半導體空污法規船廢氣處微率大於9Q%以上之要求，甚至 亦能同時符合排放量小於〇 6kg/hr之要求。 然’在目前處理其揮發性有機物·s，大多I經進氣管路來進入 吸附塔、活性韻體化床讀輪濃雜化隸置，喊_污染物質 再將經過的乾淨氣體排放至錢中，但會因吸附塔、活性碳流體化床 或轉㈣縮焚化等裝置運轉的效能，難之氣體有時無法達到半導體 空污法規VOCs廢氣處理效率大於娜以上之要求。 有鑑於實際使用上所存有之缺失及限制，本案發明人以從事· 事業多年之經驗，並精心研究，終於設計出新的魏排放裝置 及方法。 【發明内容】 本發月之主要目的，在提供一種廢氣進氣管路連有一旁 旁通風管中蝴繼__㈣鮮空氣繼 路，再連接轉輪中之脫附區域’來提昇空氣品質之廢氣排放裝置及方法 者0 本發明之次-目的’在提供-種絲裝置係為熱交換設備時，該 部份浅漏的廢氣可經由熱交換設備裏來預熱後，再輸送至轉輪中之脫 附區域來脫附’以提昇去除廢氣之效率者。 為達成上述目的’本發縣—種廢氣排放裝置及方法，主要包含 有-廢氣進氣管路、-轉輪、-旁通風管、-麟域進氣管路、一 熱源管路、-錢裝置、第—風門、第二朗、—概爐、第一減 機、第二抽風機及-煙自；該廢氣進氣管路係連接轉輪巾之吸附區域， 再連接第-抽風機而錄自’該魏·管路連有—旁通風管，而旁 通風管兩端與廢氣進·路相連接形成H該旁通風管上設有第 -風門及第二風Η，以阻卻廢氣的触，而該旁通風管中設有第一管 路連接至轉輪中冷卻區後端之新鮮空氣進氣管路，以供將旁通風管内 部份茂漏的廢氣抽送至新鮮空氣進氣管路裏，該新鮮空氣進氣管路係 連接轉輪中之冷卻區域，再經過熱源f路連接到轉輪中之脫附區域 裏，該熱麟置係雜熱源管路，以提供通職熱鮮路之廢氣加熱， 並提供轉輪t之脫_域細、，該第二減_設轉輪及燃燒爐 間，以抽送轉輪中之脫附區域脫附的濃縮廢氣至燃燒爐中，且將轉輪 中脫附的濃縮廢氣經高溫燃燒反應去除，該煙自係連接燃燒爐，將燃 燒後之氣體排出’藉此’提昇排氣品質者。 本發明之其他特點及具體實施例可於以下配合附圖之詳細說明 中，進一步瞭解。 【實施方式】 〇考第1圖所示’係為本發明廢氣排放裝置之結構示意圖，主 要係包合有—廢氣進氣管路1Q、-轉輪2 Q、-旁通風管3 〇、- 新鮮工碰c官路6 Q、—熱源管路6卜一熱源裂置4 〇、第—風 門51、第一風門5 2、第一抽風機5 3、第二抽風機5 4、一燃燒 爐7 0、—煙齒ft η ·a u ’該廢氣1 1經由廢氣進氣管路1 Q進入，而該 廢氣進氣官路10係連接轉輪2 Q中之吸附區域21，再連接第-抽 顺5 3@至煙自8 0 ’故廢氣1 1經轉輪2 0中之吸附區域2 1吸 、、,後其乱體因4度降低達標準，經連接之第一抽風機W將氣體抽 ""至煙囱8 〇排出。該廢氣進氣管路1 0連有-旁通風管3 〇 (By1321206 IX. Description of the Invention: [Technical Field] The present invention relates to an exhaust gas discharge device and method, and more particularly to an exhaust gas that is partially leaked in a side vent pipe by a first pipe The design of the desorption zone in the fresh air intake pipe at the rear end of the cooling zone in the wheel and then the desorption zone in the runner makes the invention have the effect of improving the exhaust quality, and is suitable for application in various semiconductor industries. Optoelectronics industry, other chemical/chemical related industries and related places that require air quality. [Prior Art] With the rapid development of Taiwan's high-tech industry, the semiconductor industry is growing rapidly. The material industry can include the integrated circuit industry and the optoelectronic industry, which has great influence on the domestic economy, but in the semiconductor industry. In the process of components and optoelectronic components, many environmental problems such as waste liquid, waste water, and exhaust gas are derived. For example, the semiconductor secret yellow light process includes cleaning, coating, photoresist coating, soft baking, exposure, baking, and development. , hard roasting and other steps, will make _ all kinds of cleaning fluid, Kosaki and other mechanical solvents, the corrugated volatile organic compounds V0CS (V〇latlIe 〇rganic c〇_nds; generally refers to the standard state, its vapor pressure is greater than 〇 · The production of organic compounds above lmniHg), and most of these ships belong to the harmful __H coffee... (10); the long-term exposure of the human body to the ring containing high-concentration ships, there will be Zhao towel New The organic dissolved gas released by the tumor red U must be dealt with in the '5'. The Environmental Protection Agency of the Executive Yuan also issued the "Semiconductor Manufacturing 6 Dioxide Pollution Official System and Emission Standards" on the year of the People's Republic of China. According to the standard, the semiconductor manufacturing industry is engaged in the fabrication and packaging of integrated circuit wafers. Operators such as crystal, reticle manufacturing and lead frame manufacturing, etc., all of them should be included in the control of volatile organic compounds (10) (8) and sisters, sulphuric acid, hydrochloric acid, Wei, acid testing, etc. Sexual organic waste gas is mandatory to require a reduction rate greater than, or total emissions less than 0. This g / hr. At present, in the integrated circuit manufacturing industry in China, which is generally engaged in manufacturing and foundry, the implementation of VOCs in operation is designed to be nuclear carbon, Bo, heterogeneous, cold, reclaimed wet scrubbing, activated carbon fluidized bed. Etc. The types are too numerous to mention. The conventional exhaust gas treatment device has practical operation experience and is mature and stable. The micro-fresh can meet the requirements of the domestic semiconductor air pollution regulations. The micro-rate of the ship exhaust gas is greater than 9Q%, and even the emission is less than the emission. 〇 6kg / hr requirements. However, in the current treatment of its volatile organic compounds, s, most of the I enter the adsorption tower through the intake line, the active rhythm bed read wheel is densely distributed, shouting _ pollutants and then passing the clean gas to the money However, due to the efficiency of the operation of the adsorption tower, activated carbon fluidized bed or conversion (four) incineration, the difficult gas sometimes fails to meet the requirements of the semiconductor air pollution regulations VOCs exhaust gas treatment efficiency is greater than Na. In view of the shortcomings and limitations in actual use, the inventors of this case have carefully studied and researched and finally designed new Wei discharge devices and methods. SUMMARY OF THE INVENTION The main purpose of this month is to provide an exhaust gas intake pipe connected to a side air duct, followed by a __(four) fresh air relay, and then connected to the decoupling zone in the runner to improve air quality. Exhaust gas discharge device and method 0 The second-purpose object of the present invention is that when the seeding device is a heat exchange device, the shallow exhaust gas can be preheated through the heat exchange device and then sent to the runner. The desorption zone in the middle is desorbed to improve the efficiency of removing exhaust gas. In order to achieve the above objectives, 'Benfa County'-type exhaust gas discharge device and method mainly include - exhaust gas intake pipe, - runner, - side ventilation pipe, - Lin domain intake pipe, a heat source pipe, - money The device, the first damper, the second ridge, the first furnace, the first reduction machine, the second exhaust fan, and the smoke from the exhaust gas inlet pipe are connected to the adsorption area of the rotating towel, and then connected to the first suction fan Recorded from the 'Wei·pipeline connected-side ventilation pipe, and the two ends of the side ventilation pipe are connected with the exhaust gas inlet and the road to form H. The side air vent pipe is provided with a first damper and a second air vent to block the exhaust gas. And the fresh air inlet pipe connected to the rear end of the cooling zone in the runner is provided with the first pipeline in the side air duct for pumping the exhaust gas inside the bypass air duct to the fresh air intake In the pipeline, the fresh air intake pipe is connected to the cooling zone in the runner, and then connected to the decoupling zone in the runner through the heat source f road, and the hot collar is connected to the heat source pipeline to provide a full-time job. The exhaust gas of the hot fresh road is heated, and the reel of the runner t is provided, and the second reduction _ sets the runner and the furnace to pump The concentrated exhaust gas desorbed in the desorption area of the sending wheel is sent to the combustion furnace, and the concentrated exhaust gas desorbed in the rotating wheel is removed by a high-temperature combustion reaction, and the smoke is automatically connected to the combustion furnace to discharge the burned gas. This 'improves the exhaust quality. Other features and embodiments of the present invention will be further understood from the following detailed description of the drawings. [Embodiment] Referring to Figure 1 is a schematic view of the structure of the exhaust gas discharge device of the present invention, mainly comprising - exhaust gas intake pipe 1Q, - runner 2 Q, - bypass pipe 3 〇, - Fresh work touch c official road 6 Q, heat source pipeline 6 Bu heat source split 4 〇, first damper 51, first damper 5 2, first exhaust fan 5 3, second exhaust fan 5 4, a burning furnace 7 0—the flue tooth ft η ·au 'the exhaust gas 1 1 enters through the exhaust gas intake line 1 Q , and the exhaust gas intake official road 10 connects the adsorption region 21 in the reel 2 Q, and then connects the first pumping Shun 5 3@ to smoke from 8 0 ', so the exhaust gas 1 1 is sucked by the adsorption zone 2 1 in the runner 20, and then the chaotic body is lowered by 4 degrees to the standard, and the first exhaust fan W is connected. Pump "" to the chimney 8 〇 discharge. The exhaust gas intake pipe 10 is connected with a side ventilation pipe 3 〇 (By
Pass) ’ ·通風管3 0兩端與廢氣進氣管路1 0相連接形成一迴路， 其中轉氣進氣管路1 Q上於轉輪2〇前端設有電動風ηι 2及第一 抽風機5 3後端設有逆止風ηι3，以控制廢氣iι之風量，而該旁 T 3 0上W5㈣二簡5 2，卿鳴^的 使廢氣1 1不會因未經過轉劃之吸附，而將廢氣丄丄直接 ^煙咖驗域巾，州―間5 i衫：㈣5 2各設 。馬達5 5、5 6供轉速控制，另該第—風門5 i及第二風門5 2亦 可為乳動式風門或手動式風門。關第— B ^ 丄叹弟一風門已？不 乳密’造成部分魏！ i亦齡賴妙氣通風管 風管30内會殘留部料漏的廢，故旁通風=，使旁通 ㈣2連接繼2一__卿1=1 ο，以供將旁通風管3 ο内部份茂漏的廢ai丄拮送至新鮮空氣進 氡管路6 Q裏，其中該旁通風管3 Q中之第—管路3 2上設有_闊門 3 1 ’以控制部份糕的廢氣1 1之進出。該新鮮空氣進氣管路已◦ 係連接轉輪2Q中之冷卻區域22，再經過熱源管路6 i連接到轉輪 2 0中之脫域2 3裏，以縣旁觀13⑽的部份;纟漏的廢氣 U輸送到轉輪2 〇中之脫附區域2 3裏脫附。該熱源裝置4 〇係連 接熱源管路61 ’以提供通過該熱源管路61之廢氣1!加熱，並提 、轉輪2 Q巾之脫附區域2 3熱源’來將廢氣11脫附形成濃縮廢氣 14其中6玄熱源裝置4 〇係為蒸氣設備，藉由蒸氣的熱量來當熱源， 亦可為電熱設備’藉由電熱的熱量來當熱源。該第二抽風機54係設 於轉輪2 0中之脫附區域2 3及燃燒爐7 〇間之管路上，以抽送轉輪 2 0中之脫附區域2 3所脫附之濃縮廢氣14，將漢縮廢氣14送至 燃燒爐70t，且將濃縮廢氣14經高溫燃燒反應去除，而煙_8〇 係連接燃燒爐7 〇 ’以將燃燒後之氣體排出。 請參考第2〜3圖所示，係為本發明廢氣排放裝置之另兩種實施 例結構示意圖，其中該熱源裝置4 0係為熱交換設備時，該熱交換設 備係將乾淨氣體作為熱傳導介質來進行熱交換，並將熱傳導介質傳送 至該轉輪2〇中之脫附區域23裏’以提供轉輪20脫附廢氣11之 熱源。而原新鮮空氣進氣管路6 〇係連接熱源管路61 (如第1圖所 不），亦可為新鮮空氣進氣管路6 〇連接至熱交換設備一端，將新鮮空 氣進氣管路6 〇中的氣體送至熱交換設備中預熱，再經由熱交換設備 的另一端連接熱源管路61 ’將預熱後之氣體經熱源管路61輸送至 轉輪2 0中之脫附區域2 3裏’並亦形成可將旁通風管3 0内的部份 洩漏的廢氣1 1經由熱交換設備裏’再輸送到轉輪2 〇中之脫附區域 23裏脫附（如第2圖所示）。另該新鮮空氣進氣管路6〇之進氣端 亦可與廢氣進氣管路1 〇連接（如第3圖所示），使原供轉輪2 0中之 冷卻區域2 2降溫用之新鮮空氣，改用廢氣進氣管路丄〇中之廢氣1 1，來達到同樣供轉輪2〇中之冷卻區域22降溫用，及藉新鮮空氣 進氣管路6 0輸送到熱交換設備裏來預熱供脫附用。該廢氣進氣管路 1 0連有一旁通風管3 0 (By Pass) ’該旁通風管3 〇兩端與廢氣進氣 管路10相連接形成一迴路，而旁通風管3 0中設有第一管路3 2連 接至轉輪2 0中冷卻區域2 2後端之新鮮空氣進氣管路6 〇，再連接 至熱交換設備一端，以將廢氣11輸送到熱交換設備4〇裏，而該熱 交換設備一端係連接轉輪2 0中之脫附區域2 3，使廢氣11經預熱 後送往轉輪2 0中之脫附區域2 3脫附。該第二抽風機5 4係設於轉 輪2 0中之脫附區域2 3及燃燒爐7 0間之管路上，以抽送轉輪2〇 中之脫附區域2 3所脫附之濃縮廢氣14，將濃縮廢氣χ 4送至燃燒 爐7 0中，其中燃燒爐7 0設有第一廢氣燃燒室71及第二廢氣燃燒 室7 2，在第一廢氣燃燒室71及第二廢氣燃燒室7 2各設有進氣管 7 3、7多及出氣管7 7 6，供濃縮廢氣14進入燃燒爐7 〇中 燃燒裂解，並在9 0秒可切換第一廢氣燃燒室γ1及第二廢氣燃燒室 7 2來交替燃燒，使濃縮廢氣χ 4能燃燒裂解均勻，而燃燒後氣體經 煙d 8 0排出，其巾祕燒爐7 Q燃燒後之熱能係提供給熱交換設備 當熱能’以提升熱交換設備的熱能者。 -立請參考第4圖所示，係為本發明—種魏排放之方法的步驟流程 示意圖’其係包含下列步驟： 步驟—9◦、該廢氣經由廢氣進氣管路進人，經轉輪中之吸附區 域吸附廢氣後，再由第—抽風機抽送經煙自排出； 步驟二9 1、贿氣進氣管路猶旁通風f，旁觀管上設有第 -風門及第二風門’以阻卻廢氣㈣漏，而部份茂 漏的廢氣會進入旁通風管内； 步驟三9 2、而旁通風管上設有第―管路，將旁通風管内部似 漏的廢氣藉第-管路輪送進轉輪中冷卻區後端之新 鮮空氣進氣管路裏； 步驟四9 3、而部份_廢_鮮空氣進氣f路再經過熱源 管路連接到轉輪中之脫附區域裏； 步驟五9 4、而熱縣麟連接熱路，以提供通過該熱源管 路之廢氣加熱，並提_輪巾之脫随域熱源，將 私轉財找__顧軸濃縮廢氣； 1六95、而濃縮廢氣經第二抽風機抽送至燃燒射，經高溫 燃燒反應去除；以及 ^驟七9 6、而燃燒後之氣體經煙自排出。 可^，本㈣之裝置储有打相優點： 乳進乳管路射—_管，而旁職管愤有第-管路連 12 1321206 【圖式簡單說明】 第1圖係為本發明廢氣排放裝置之結構示意圖。 第2圖係為本發明廢氣排放裝置之第一實施例結構示意圖。 第3圖係為本發明廢氣排放裝置之第二實施例結構示意圖。 第4圖係為本發明步驟流程示意圖。 【主要元件符號說明】 10、廢氣進氣管路 1 1、廢氣 1 2、電動風門 1 3、逆止風門 1 4、濃縮廢氣 2 0、轉輪 21、吸附區域 2 2、冷卻區域 2 3、脫附區域 3 0、旁通風管 3 1、閥門 3 2、第一管路 40、熱源裝置 51、第一風門 5 2、第二風門 14 51321206 5 5 5 6 6 7 7 7 7 7 7 7 8 9 9 9 9 9 9 9 、第一抽風機 、第二抽風機 、馬達 、馬達 、新鮮空氣進氣管路 、熱源管路 、燃燒爐 、第一廢氣燃燒室 、第二廢氣燃燒室 、進氣管 、出氣管 、進氣管 、出氣管 、煙自 、步驟一 、步驟二 、步驟三 、步驟四 、步驟五 、步驟六 、步驟七 15Pass) 'The two ends of the air duct 3 0 are connected with the exhaust gas intake line 10 to form a circuit, wherein the air intake air line 1 Q is provided with electric wind ηι 2 and the first pumping at the front end of the runner 2 The back end of the fan 5 3 is provided with a reverse air ηι3 to control the air volume of the exhaust gas i1, and the side T 3 0 is W5 (four) two simple 5 2, and the singer 1 does not cause the exhaust gas 1 1 to be adsorbed due to no transfer. And the exhaust gas 丄丄 directly ^ smoke coffee inspection area towel, state - between 5 i shirt: (four) 5 2 each. The motors 5 5, 5 6 are for speed control, and the first damper 5 i and the second damper 5 2 may also be a damper or a manual damper. Guan Di - B ^ 丄 弟 弟 一 一 一 一? Not milky, causing part of Wei! i is also a lazy air duct pipe 30 will be left in the residual material leakage, so the side ventilation =, make the bypass (four) 2 connection followed by 2 __ Qing 1 = 1 ο, for the side ventilation pipe 3 ο Part of the leaking waste ai丄 is sent to the fresh air inlet line 6 Q, wherein the first line of the side air duct 3 Q is provided with a _ wide door 3 1 ' to control part of the cake The exhaust gas 1 1 is in and out. The fresh air intake line has been connected to the cooling zone 22 in the reel 2Q, and then connected to the de-domain 2 3 of the reel 20 through the heat source line 6 i to the portion of the county side by side 13 (10); The leaked exhaust gas U is delivered to the decoupling zone 23 in the rotor 2 to be desorbed. The heat source device 4 is connected to the heat source line 61' to provide the exhaust gas 1 through the heat source line 61, and is heated, and the heat source of the dew region of the runner 2 is removed to desorb the exhaust gas 11 to form a concentrated gas. Exhaust gas 14 wherein the 6 heat source device 4 is a steam device, the heat of the steam is used as a heat source, and the electric heating device can be used as a heat source by the heat of the electric heat. The second exhaust fan 54 is disposed on the pipeline between the desorption region 23 of the runner 20 and the furnace 7 to extract the concentrated exhaust gas 14 desorbed from the desorption region 23 of the reel 20. The condensed exhaust gas 14 is sent to the combustion furnace 70t, and the concentrated exhaust gas 14 is removed by a high-temperature combustion reaction, and the smoke 连接8 is connected to the combustion furnace 7 〇' to discharge the burned gas. Please refer to FIGS. 2~3, which are schematic structural diagrams of two other embodiments of the exhaust gas discharge device of the present invention. When the heat source device 40 is a heat exchange device, the heat exchange device uses a clean gas as a heat conduction medium. The heat exchange is performed and the heat transfer medium is delivered to the desorption region 23 in the runner 2 to provide a heat source for the runner 20 to desorb the exhaust gas 11. The original fresh air intake line 6 is connected to the heat source line 61 (as shown in Fig. 1), or the fresh air intake line 6 is connected to one end of the heat exchange unit, and the fresh air intake line is connected. 6 The gas in the crucible is sent to the heat exchange device for preheating, and then the other end of the heat exchange device is connected to the heat source line 61'. The preheated gas is sent to the desorption region of the runner 20 through the heat source line 61. 2 3 mile 'and also forms an exhaust gas 1 1 which can leak part of the side vent pipe 30 and then re-delivered into the desorption area 23 of the turret 2 through the heat exchange device (as shown in Fig. 2) Shown). In addition, the intake end of the fresh air intake line 6〇 can also be connected to the exhaust gas intake line 1 (as shown in FIG. 3), so that the cooling area 2 2 of the original supply wheel 20 is cooled. The fresh air is switched to the exhaust gas 1 in the exhaust gas intake line to reach the cooling zone 22 in the same supply wheel 2, and is transported to the heat exchange equipment by the fresh air intake pipe 60. To preheat for desorption. The exhaust gas intake pipe 10 is connected with a bypass pipe 3 (By Pass). The two ends of the side air pipe 3 are connected with the exhaust gas intake pipe 10 to form a circuit, and the bypass air pipe 30 is provided with a circuit. The first line 3 2 is connected to the fresh air intake line 6 后端 at the rear end of the cooling area 2 2 of the runner 20, and is connected to one end of the heat exchange device to transport the exhaust gas 11 into the heat exchange device 4 One end of the heat exchange device is connected to the desorption region 23 in the reel 20, and the exhaust gas 11 is preheated and sent to the desorption region 23 in the reel 20 for desorption. The second exhaust fan 54 is disposed on the pipeline between the desorption region 2 3 of the runner 20 and the combustion furnace 70, and is used to extract the concentrated exhaust gas desorbed from the desorption region 2 3 of the reel 2 14. The concentrated exhaust gas crucible 4 is sent to the combustion furnace 70, wherein the combustion furnace 70 is provided with a first exhaust gas combustion chamber 71 and a second exhaust gas combustion chamber 72, in the first exhaust gas combustion chamber 71 and the second exhaust gas combustion chamber. 7 2 each has an intake pipe 7 3, 7 and an outlet pipe 7 7 6, for the concentrated exhaust gas 14 to enter the combustion furnace 7 燃烧 combustion cracking, and can switch the first exhaust gas combustion chamber γ1 and the second exhaust gas at 90 seconds The combustion chamber 7 2 is alternately burned, so that the concentrated exhaust gas enthalpy 4 can be burned and cracked evenly, and the burned gas is discharged through the smoke d 80, and the heat energy after the burning of the smelting furnace 7 Q is supplied to the heat exchange equipment as heat energy. Improve the heat of the heat exchange equipment. - Please refer to Figure 4, which is a schematic flow chart of the method for the method of the invention. The system comprises the following steps: Step - 9◦, the exhaust gas enters through the exhaust gas intake pipe, through the runner After adsorbing the exhaust gas in the adsorption zone, the first exhaust fan is pumped through the smoke to discharge; Step 2: 9 1. The bribe air intake pipe is still ventilated, and the onlooker is provided with the first damper and the second damper' Blocking the exhaust gas (4) leakage, and some of the leaking exhaust gas will enter the side ventilation pipe; Step 3 9 2. The first air pipe is provided with the first pipe, and the exhaust gas inside the bypass air pipe is borrowed from the first pipe. The wheel is fed into the fresh air intake line at the rear end of the cooling zone in the runner; Step 4: 9 3, and the part_waste_fresh air intake f path is connected to the decoupling zone in the runner through the heat source pipe. Step 5 9 4, and the hot county Lin connected to the heat road to provide heating through the heat source pipeline, and lift the _ wheel towel with the domain heat source, the private turn to find __ Gu axis concentrated exhaust; 1 Six 95, and the concentrated exhaust gas is pumped to the combustion shot by the second exhaust fan, and is removed by the high temperature combustion reaction; 96, and is discharged from the combustion gas through the tobacco. Yes, the device of this (4) has the advantages of playing the phase: the milk into the milk pipeline shoots -_ tube, and the sideline indignation has the first - pipeline connection 12 1321206 [Simplified illustration] Figure 1 is the exhaust gas of the invention Schematic diagram of the discharge device. Figure 2 is a schematic view showing the structure of the first embodiment of the exhaust gas discharge device of the present invention. Figure 3 is a schematic view showing the structure of a second embodiment of the exhaust gas discharge device of the present invention. Figure 4 is a schematic flow chart of the steps of the present invention. [Description of main component symbols] 10. Exhaust gas intake pipe 1 1. Exhaust gas 1 2. Electric damper 13 3. Backstop damper 1 4, concentrated exhaust gas 2 0, runner 21, adsorption zone 2 2. Cooling zone 2 3. Desorption area 30, side ventilation pipe 3 1, valve 3 2, first line 40, heat source device 51, first damper 5 2, second damper 14 51321206 5 5 5 6 6 7 7 7 7 7 7 7 8 9 9 9 9 9 9 9 , first exhaust fan, second exhaust fan, motor, motor, fresh air intake pipe, heat source pipe, combustion furnace, first exhaust gas combustion chamber, second exhaust gas combustion chamber, intake air Tube, outlet pipe, intake pipe, outlet pipe, smoke from, step one, step two, step three, step four, step five, step six, step seven 15