TWI319720B - Conveyor for substrate material - Google Patents

Conveyor for substrate material

Info

Publication number
TWI319720B
TWI319720B TW096116446A TW96116446A TWI319720B TW I319720 B TWI319720 B TW I319720B TW 096116446 A TW096116446 A TW 096116446A TW 96116446 A TW96116446 A TW 96116446A TW I319720 B TWI319720 B TW I319720B
Authority
TW
Taiwan
Prior art keywords
conveyor
substrate material
substrate
Prior art date
Application number
TW096116446A
Other languages
Chinese (zh)
Other versions
TW200841935A (en
Inventor
Kisaburou Niiyama
Masahiro Midorikawa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of TW200841935A publication Critical patent/TW200841935A/en
Application granted granted Critical
Publication of TWI319720B publication Critical patent/TWI319720B/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Coating Apparatus (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW096116446A 2007-04-16 2007-05-09 Conveyor for substrate material TWI319720B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007106822 2007-04-16

Publications (2)

Publication Number Publication Date
TW200841935A TW200841935A (en) 2008-11-01
TWI319720B true TWI319720B (en) 2010-01-21

Family

ID=40033410

Family Applications (2)

Application Number Title Priority Date Filing Date
TW096116446A TWI319720B (en) 2007-04-16 2007-05-09 Conveyor for substrate material
TW096149897A TW200843019A (en) 2007-04-16 2007-12-25 Conveyer for a substrate material

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW096149897A TW200843019A (en) 2007-04-16 2007-12-25 Conveyer for a substrate material

Country Status (4)

Country Link
JP (1) JP2008285323A (en)
KR (1) KR20080093365A (en)
CN (1) CN101288863A (en)
TW (2) TWI319720B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI602760B (en) * 2013-05-07 2017-10-21 Sheet conveyor

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100944281B1 (en) * 2008-05-19 2010-02-24 김원식 A printer structure for head assemble type
DE102009018393B4 (en) * 2009-04-22 2017-05-24 Atotech Deutschland Gmbh Method, holding means, apparatus and system for transporting a flat material to be treated and loading or unloading device
JP5441515B2 (en) * 2009-06-24 2014-03-12 上村工業株式会社 Work transfer method and jig for surface treatment tank
KR101234946B1 (en) * 2011-11-21 2013-02-19 삼성전기주식회사 Apparatus for transfering circuit board, and facility for treating black oxide
JP2013122500A (en) * 2011-12-09 2013-06-20 Nitto Denko Corp Long laminated film manufacturing method
CN104853860B (en) * 2012-12-12 2016-12-14 杰富意钢铁株式会社 The steel plate of vertical loop device crawls the prevention method of crawling of anti-locking apparatus and steel plate
CN104891223A (en) * 2015-04-10 2015-09-09 宇宙电路板设备(深圳)有限公司 Flexible printed circuit board conveying apparatus
JP6682226B2 (en) 2015-10-02 2020-04-15 キヤノン株式会社 Image forming device
CN106111441A (en) * 2016-08-30 2016-11-16 开平太平洋绝缘材料有限公司 A kind of gumming device of prepreg
CN107487057B (en) * 2017-07-31 2024-05-07 平湖市新保纺织科技有限公司 Conveying device of hot melting compounding machine
CN110112087A (en) * 2019-05-23 2019-08-09 德淮半导体有限公司 Wafer transfer box and its control method
CN110980218B (en) * 2019-12-30 2021-02-09 合肥海明科技股份有限公司 Five-port linear sorting device for e-commerce
CN112090674B (en) * 2020-08-25 2022-08-19 泰州市津达电子科技有限公司 Roadside tree lime smearing device
CN113578632A (en) * 2021-08-06 2021-11-02 灵璧县德军家具制造有限公司 Automatic spraying equipment for furniture manufacturing and spraying process thereof
CN115418640B (en) * 2022-11-07 2023-03-24 苏升智能科技徐州有限公司 Sheet metal surface etching treatment equipment
CN116062458B (en) * 2023-04-03 2023-07-28 江苏环亚医用科技集团股份有限公司 Conveying and dispensing mechanism for clean operating room

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI602760B (en) * 2013-05-07 2017-10-21 Sheet conveyor

Also Published As

Publication number Publication date
CN101288863A (en) 2008-10-22
TW200843019A (en) 2008-11-01
JP2008285323A (en) 2008-11-27
TW200841935A (en) 2008-11-01
KR20080093365A (en) 2008-10-21

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees