1314951 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種收容有與冷媒氣體之例如氦氣進行 . 熱交換且發揮暫時蓄熱之作用的蓄冷材之蓄冷器 -(regenerator)、及具備該蓄冷器之克萊歐泵（cryopump， 低溫豕）。 '【先前技術】 I 克萊歐泵係在真空容器内設置低溫面，且使容器内之 氣體分子凝縮或吸附在該低溫面，並予以捕捉而排氣的 泵。形成低溫面之方法，一般而言係使用閉循環之小型氦 冷凍機。 該氦冷凍機係將氦氣作為冷媒氣體（動作流體）之蓄 冷式冷凍機，將高壓之氦氣送入位在低溫部之膨脹空間， 藉由該氦氣之隔熱膨脹而獲得低溫。蓄冷式冷凍機之特徵 係具備稱之為蓄冷器之熱交換器。蓄冷器之作用係從朝一 _方向流動之壓縮高壓高溫之氦氣吸熱並蓄積該熱，同時將 送入膨脹空間之氦氣予以預冷，再將所蓄積之熱供給於朝 • 相反方向流動之經膨脹的低壓低溫之氦氣，而使冷的氦氣 不會逸退至室溫空間。 " 在蓄冷器收容有在與氦氣之間進行熱交換之蓄冷材， '該蓄冷材係使用熱傳導率較高、在低溫（30K以下）比熱 比其他金屬高且廉價的鉛。 或者，在高規格之冷凍機，有使用在極低溫（15K以 下）比熱比錯高之ErsN i等磁性材料的情形。參照例如專 5 317791 1314951 利文獻1、專利文獻2。 [專利文獻1]日本特開平10_300251號公報 [專利文獻2]曰本特開2004-143341號公報 【發明内容】 (發明所欲解決之課題） 了你it在低溫下之比熱比其他金屬高且廉價的材料，為 严二二東性能提升，則勢必使用大量且純度高之錯，惟對 衣:之影響杈大，必須在使用後進行回收及適當之處理， 且處理性較差。 磁性材料係非常高價者。且其比熱具有相轉移溫度 = ase transition temperature)之附近具備較大 稱成畜〜的，配合蓄冷器内之溫度分布選 擇在不问之溫度下具備比熱峰值的數種類之物質 層狀構造之蓄冷器者，比單獨使用—種磁性材料 因此造成成本之上昇。而且，磁性材料係金屬間2 物’較硬或較脆且加工性不佳。 因此，在此背景下，除了對環境影響較大之錯以外， 期待滿足蓄冷材之諸條件（比熱、熱傳導率、加工性、強 度、硬度、化學性穩定性、低成本）的蓄冷材，本發明之 目的係在於提供-種使㈣#冷材之蓄冷器及克菜歐果。 (解決課題之手段） 本發明之蓄冷器係在冷媒氣體通過之内部通路收容有 f與冷媒氣體之間進行熱交換之蓄冷材的蓄冷器，在此， 蓄冷材係由Sn、Bi-Sn合金、Ag_如合金之任—種所構成 317791 6 1314951 者0 本發明之克萊歐粟係具備··在冷媒氣體通過 路收容有由Sn、Bl-Sn合金、Ag_Sn合金之 ：: 之蓄冷材的蓄冷器。 汁構成 由於由前述Sn、Bi—Sn合金、Ag-S_金之任 構成之蓄冷材並未包^，因此對人體及環境所造成斤 =心各較Λί、X處理今易。而且’比磁性材料更廉價。再 者’由於加工性亦佳’因此為了提升與例如冷媒氣體之哉 交換效率，而使對微小球狀進行之加工亦可容易進行/、 (發明之效果） j[Technical Field] The present invention relates to a regenerator that stores a cold storage material that performs heat exchange with a refrigerant gas, such as helium gas, and functions to temporarily store heat, and has a regenerator The cryostat (cryopump, low temperature enthalpy) of the regenerator. '[Prior Art] I The Cleo pump is a pump that sets a low temperature surface in a vacuum vessel and condenses or adsorbs gas molecules in the container on the low temperature surface, and captures and vents the gas. The method of forming a low temperature surface is generally a closed loop small crucible freezer. In the refrigerating type refrigerator, a helium gas is used as a refrigerating refrigerator of a refrigerant gas (operating fluid), and a high-pressure helium gas is sent to an expansion space located in a low temperature portion, and a low temperature is obtained by thermal expansion of the helium gas. The regenerative refrigerator is characterized by a heat exchanger called a regenerator. The function of the regenerator is to absorb heat from the compressed high-pressure and high-temperature helium flowing in a direction, and accumulate the heat, and preheat the helium gas sent into the expansion space, and then supply the accumulated heat to the opposite direction. The expanded low pressure and low temperature helium gas does not allow the cold helium to escape to the room temperature space. " The regenerator contains a cold storage material that exchanges heat with helium. 'This cold storage material uses lead which is high in thermal conductivity and low in specific heat (30K or less) and cheaper than other metals. Alternatively, in a high-standard refrigerator, there is a case where a magnetic material such as ErsN i having a high specific temperature (15K or less) is used. For example, Patent No. 5 317791 1314951, Patent Document 1, Patent Document 2. [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei. No. 2004-143341 (Patent Document 2) (Problems to be Solved by the Invention) The specific heat of your at a low temperature is higher than that of other metals. Cheap materials, for the improvement of the performance of Yan Er Erdong, will inevitably use a large number of high-purity faults, but the impact on clothing: large, must be recycled after recycling and appropriate treatment, and poor handling. Magnetic materials are very expensive. And the specific heat in the vicinity of the specific heat transfer phase = ase transition temperature) is matched with the temperature distribution in the regenerator, and the cold storage with a specific layer of material having a specific heat peak at a temperature other than the temperature is selected. The use of magnetic materials is a cost increase. Moreover, the magnetic material is relatively hard or brittle and has poor workability. Therefore, in this context, in addition to the large environmental impact, it is expected to satisfy the conditions of the cold storage material (specific heat, thermal conductivity, workability, strength, hardness, chemical stability, low cost). The object of the invention is to provide a cold accumulator and a gram fruit of the (4)# cold material. (Means for Solving the Problem) The regenerator of the present invention is a regenerator that stores a cold accumulating material that exchanges heat between f and a refrigerant gas in an internal passage through which the refrigerant gas passes, and the cold accumulating material is made of Sn or Bi-Sn alloy. _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Cool storage. Juice composition Since the cold storage material consisting of the above-mentioned Sn, Bi-Sn alloy, and Ag-S_gold is not included, it is harmful to the human body and the environment. And 'is cheaper than magnetic materials. In addition, in order to improve the exchange efficiency with, for example, a refrigerant gas, the processing of the microspheres can be easily performed, (the effect of the invention) j.
依據本發明之蓄冷器，作為在與冷媒氣體之間進行埶 交換之蓄冷材，係使Mn、Bi_Sn合金、Ag_SnW 一種’因此可提供一種維持與習知同等之性能且廉價、處 理性佳的蓄冷器。 歌1貝處 依據本毛日月之克萊歐果，藉由在用 凝縮之低溫面的蓄冷式之、入、㈣± 取便孔體刀子 ^ A 5, . . ^々凍機，使用具備前述蓄冷材之 :Ή無須繁瑣之處理、機械構造之變更及成本之增 力^即可提供-種與習知同等性能之克萊歐泵。 【實施方式】 =下* 圖式說明本發明之實施形態。 ‘ ^ *係本毛明只施形態之克萊歐泵的概略圖。克萊 歐泵1係具備冷凌機罝-〇 ^ 兄木 機3、大小2段之氣：“，，機單元2係具備壓縮 氣係在雨氣飯5、縮機3壓縮成高壓之氦 、 内循¥，使形成在該等氣缸5、6之膨 317791 7 1314951 脹空間冷卻在極低溫，因此 擋板（baffle)8、克萊铲°在轧缸5、6之遮罩7、 氣體分子。克末5^板9亦會冷卻至極低溫，並凝縮 如广2圖所不’在氣虹5、6之内部收容有推移哭 isp aCer (在氣缸内移動夕” 同”11、12。推移W經二^二塞 轉，2個推移器U、l2_:由：馬達驅動轴之驅動旋 内。 絲成-體而往復動作在氣缸5、6 在1奴推移器11内收容有1段蓄冷器n 移器12内收容有2段蓄冷器14M段蓄二。在2段推 作為冷媒氣體之氦氣通過 ：之内部係 冷材㈣複數個銅金屬網。2段蓄冷;^積層有作為蓄 氦氣通過的通路，在該通路填充蓄2部亦形成 微小球。2段蓄冷器“之蓄冷材二之複數個 Ag- Sn合金之任一種所構成。 、卜Sn合金、 在1段氣缸5之内部，於}段氣缸5之端 移器Η之端壁所形成的！段膨脹空間21之外二置有 罩=1°在1段熱負載突緣31連接有第⑽ 罩= 段膨脹空間2變為低溫時，遮 在2段氣缸6之内部，於2段氣缸6之端壁盥2段推 移器Μ之端壁所形成的2段膨脹空間以之外壁了設置有 2段熱負載突緣32。在2段熱負載突緣32連接有第ι圖所 317791 8 1314951 示之克萊歐泵板9,當2段輪空間 歐泵板9會冷卻。 。低恤％•’克萊 用以將氦氣從壓縮機3供給至膨脹空間2 入閥18、與用以將氦氣從膨脹空間 内之吸 之排出閥19的開閉，係藉由推 返回壓縮機3 4來進行。 H12驅動用之馬達 投=機單元2之電源時，伴隨馬達 覆進订吸入㈣、排出閥19之開閉及推 ^ 復動作。 1 U之彺 二先’在第2圖所示之過程（a) t，關閉排出閥Μ 亚打開吸入間18,並將從壓縮機3送出 在1段氣缸5之室溫空間25。 您虱轧充填 其次，在打開吸入閥18之狀態下，如第2圖 示使推移器動至室溫空間25側。由此，室溫空斤 間25内之氦氣係通過蓄冷器13、14，利用與蓄冷材^ W之熱交換而冷卻，同時移動至膨脹空間2卜22。該操 '係在氦氣通過蓄冷器13、14時，其體積會收縮，因此為了 滿足等壓條件係在打開吸入閥18之狀態下進行。 其次’在過程（c)中，關閉吸入閥18並打開棑出闕 • 9使恥脹空間21、22内之高壓氦氣放出，並降低膨脹空 ^ 21、22内之壓力。在該過程中，膨脹空間2丨、22内之 氦氣係經隔熱膨脹而成為低溫之低壓氣體，膨脹空間21、 22之溫度會降低’經由熱負載突緣31、犯而使遮罩7、擋 板8、克萊歐泵板9冷卻。 317791 1314951 ，、人在過程（d )中，在打開排出閥丨9之狀態下， 使推移器u、12移動至膨脹空間21、22侧。由此，殘留 在私脹工間21、22之低溫的氦氣會通過蓄冷器i 3、（4移 動至至恤工間25 ’氦氣係在與各蓄冷材i 5、i 6進行熱交 換後，從排出閥19排出。亦即，膨脹空間21、22内之低 溫氦氣係在下-個循環中，為了冷卻所吸人之氦氣而使蓄 冷材15、16冷卻之同時，氦氣之溫度上昇而回復到室溫 後，會經由排出閥19回到I缩機3。然後，排出閥Μ會 關閉，吸人閥18會打開，成為最初之過程（a)之動作， 而完成1次循環。 一在本實施形態中’作為配置在更低溫側之2段蓄冷器 之蓄冷材16,係使用不包含Pb之材料的Sn、Bi_Sn合金、 Ag- Sn合金之任—種。如第3圖之曲線圖所示，μ係在 使用於克萊歐泵之低溫區域（3〇κ以下）下，其比埶比抑 小。然* ’即使比熱& Pb丨，因容量之增加而可增大蓄冷 材之熱容量，並可達成與採用習知抑時同等之冷;東能力。 在5至30K之區域中，s n係具有與磁性材料（ 同等之比熱。使用㈣合金或Ag_Sn合金時丄或A: 之含有比率在㈣以下的話’具有與如單體時 5寺之比熱，可構成同性能之蓄冷器。 如此即便使用Sn、Bi_Sn合金、Ag_sn合金來取代 甘為畜冷材，亦可實現與習知同等之冷凍能力。在未對 ::構成部分施以改良或調整之情形下，只要變更收容於 田"盗之蓄冷材即可’因此與既存之克萊歐泵的互換性較 317791 10 1314951 円。而且，不會造成克萊歐泵之外觀上的、亡 性構造之變化，因此维修性亦佳。 、^狀、交化或機械 蓄冷材16係為了使氦氣之流動變為 積並提高熱交換效率，而以複數個球子 曰大表面 二金…金所構成之材料係如磁二 較硬且不脆弱，可容易地對球狀進行加 材枓 直徑係例如在1_以下的話，可與氦。·各球狀粒子的 換。各球狀粒子變為粉狀而變得更么1充分的熱交 又竹·又，，、田蚪，會妨礙According to the regenerator of the present invention, the cold accumulating material exchanged with the refrigerant gas is made of Mn, Bi_Sn alloy, and Ag_SnW, so that it is possible to provide a cold storage which is inexpensive and has good handleability while maintaining the performance equivalent to the conventional one. Device. The 1st song is based on the Cleopatra of the hairy sun and the moon, and is used by the cold storage type of the condensed low temperature surface, and the (4) ± squeezing hole knives ^ A 5, . The above-mentioned cold storage material: Ή no need for cumbersome processing, mechanical structure changes and cost increase ^ can provide a kind of Cleo pump with the same performance as the conventional one. [Embodiment] = The following figure illustrates an embodiment of the present invention. ‘ ^ * is a sketch of the Clay pump that Ben Mouming only applies. The Cleo pump 1 series has a cold-cooling machine 罝-〇^ brother wood machine 3, the size of the two paragraphs of gas: ",, the machine unit 2 is equipped with compressed gas system in the rain gas rice 5, the compressor 3 is compressed into high pressure , inside the ¥, so that the expansion of the cylinders 5, 6 formed 317791 7 1314951 expansion space is cooled at an extremely low temperature, so the baffle 8, the Clay shovel ° in the rolling mill 5, 6 mask 7, gas Molecule. The gram end 5^ plate 9 will also be cooled to a very low temperature, and condensed as the wide 2 map does not 'in the inside of the gas rainbow 5, 6 contain a crying isp aCer (moving in the cylinder eve) with "11,12. The shifting is performed by two and two plugs, and the two shifters U and l2_ are driven by the drive shaft of the motor. The wire is reciprocating and the reciprocating action is carried out in the cylinders 5 and 6 in the slave transfer device 11 In the regenerator n-shifter 12, two stages of regenerators 14M are stored in two stages. In the second stage, the helium gas as a refrigerant gas is passed through: the internal cold material (4) a plurality of copper metal nets. Two stages of cold storage; The passage through which the helium gas passes is formed by forming a microball in the second filling portion of the passage. The two-stage regenerator is composed of any of a plurality of Ag-Nn alloys. , Sn alloy, inside the 1-stage cylinder 5, outside the section of the end wall of the end of the cylinder 5, the section of the expansion space 21 is provided with a cover = 1 ° in a section of the thermal load flange 31 is connected with the (10) cover = when the section expansion space 2 becomes low temperature, it is covered inside the two-stage cylinder 6, and the two-stage expansion space formed by the end wall of the two-stage cylinder 6 is the end wall of the two-stage shifter The outer wall is provided with two sections of heat load flanges 32. The two sections of the heat load flange 32 are connected with the Cleopa pump plate 9 shown in Figure 317791 8 1314951, when the two-stage wheel space Euro pump plate 9 is cooled The low-shirt%•'Clay is used to supply helium from the compressor 3 to the expansion space 2 to the valve 18, and to open and close the discharge valve 19 for sucking helium from the expansion space. Returning to the compressor 34. When the motor for the H12 drive is used as the power source of the machine unit 2, the motor is overwritten with the suction (4), and the discharge valve 19 is opened and closed and pushed and retracted. 2 (a) t, close the discharge valve Μ open the suction chamber 18, and send it from the compressor 3 to the room temperature space 25 of the 1-stage cylinder 5. When the suction valve 18 is opened, the pusher is moved to the room temperature space 25 side as shown in Fig. 2. Therefore, the helium gas in the room temperature chamber 25 passes through the regenerators 13 and 14 and is utilized. The heat storage material cools and cools while moving to the expansion space 2b. The operation is based on the volume of the helium gas passing through the regenerators 13, 14 and the volume is contracted. Therefore, in order to satisfy the isostatic condition, the suction valve is opened. In the state of 18, secondly, in the process (c), the suction valve 18 is closed and the sputum opening 9 is opened to release the high-pressure helium gas in the swell space 21, 22, and the expansion air 21, 22 is lowered. pressure. In this process, the helium gas in the expansion spaces 2, 22 is thermally expanded to become a low-pressure low-pressure gas, and the temperature of the expansion spaces 21, 22 is lowered. 'The mask 7 is caused by the heat load flange 31. The baffle 8, the Cleo pump plate 9 is cooled. 317791 1314951, in the process (d), the pushers u, 12 are moved to the expansion spaces 21, 22 side while the discharge valve 丨 9 is opened. As a result, the helium gas remaining at the low temperature of the private expansion chambers 21 and 22 is exchanged with the respective cold storage materials i 5 and i 6 through the regenerators i 3 and (4, moving to the tanning room 25 '氦 gas system. Thereafter, it is discharged from the discharge valve 19. That is, the low-temperature helium gas in the expansion spaces 21, 22 is in the next cycle, and the cold storage materials 15 and 16 are cooled while cooling the sucked helium gas, and the helium gas is simultaneously cooled. After the temperature rises and returns to room temperature, it will return to the I reducer 3 via the discharge valve 19. Then, the discharge valve Μ will close, and the suction valve 18 will open, becoming the first process (a), and completed once. In the present embodiment, the cold storage material 16 as the two-stage regenerator disposed on the lower temperature side is made of any of Sn, Bi_Sn alloy, and Ag-Sn alloy which do not contain Pb. As shown in the graph, the μ system is used in the low temperature region of Cleopa pump (3 〇 κ or less), and its specific ratio is smaller than that of 埶. However, 'even the specific heat & Pb 丨, due to the increase in capacity Increase the heat capacity of the cold storage material, and achieve the same cold as the conventional suppression time; East capacity. In the area of 5 to 30K, sn It has the same specific heat as the magnetic material (the same specific heat, when the (4) alloy or the Ag_Sn alloy is used, or when the content ratio of A: or A: is less than (4), and it has the specific heat of 5 temples. The Sn, Bi_Sn alloy, and Ag_sn alloy can be used to replace the cold material of the animal, and the freezing capacity equivalent to the conventional one can be achieved. In the case where the modification or adjustment is not made to the component: the change is contained in the field. The stolen cold storage material can be 'interchangeable with the existing Cleopa pump compared to 317791 10 1314951. Moreover, it will not cause changes in the appearance of the Cree pump and the structure of the dead, so the maintainability is also good. , ^ shape, cross-linking or mechanical cold storage material 16 in order to make the flow of helium gas and increase the heat exchange efficiency, and the material consisting of a plurality of balls, large surface, two gold, gold, etc. In addition, it is not fragile, and it is easy to add a material to the spherical shape. For example, when the diameter is 1 or less, it is possible to change the spherical particles. Each spherical particle becomes powdery and becomes more complete. Hot, bamboo, and, Will prevent
一It ’因此各球狀粒子之直徑必須設定— 、"L 的大小。 马谷許氮氣順暢流動 再者，Sn、Bi-Sn合金、Ag_ Sn入泰^上 #, . ^ ^ s n 0孟與錯相比較’其 子人肢及ί哀境之影響較小且處理容易' &麻,a 勿而且比磁性材料更 廉饧（約1/18之價格）。此外，Sn、β 人 a Α ύη 合金、Ag— Sn δ盃係滿足作為蓄冷材之其他諸條 — 卞^熱傳導率、化學穩 疋性、強度、硬度）。 心An It' so the diameter of each spherical particle must be set to the size of --, "L. Ma Gu Xu nitrogen flow smoothly, Sn, Bi-Sn alloy, Ag_ Sn into the Thai ^ on #, . ^ ^ sn 0 Meng and the wrong phase comparison 'The influence of the human limbs and ί 境 is small and easy to handle ' & Hemp, a is not cheaper than magnetic materials (about 1/18 price). Further, the Sn, β a a Α ύ 合金 alloy, and the Ag-Sn δ cup system satisfy the other articles as the cold storage material—the thermal conductivity, the chemical stability, the strength, and the hardness. heart
—以上係說明本發明之實施形態，但當然本發明並不限 &於此，可根據本發明之技術思想進行各種之變更。 推移器η、12並不限定在馬達驅動方式，亦可為使用 ，為冷媒氣體之氦氣之歷力差的氣壓驅動方式、或馬達盘 氣壓驅動的併用方式。 斗、上述實施形態係以將蓄冷器使用在Glff0rd—McMahon 式冷束機之例示、但亦可適用在逆史特靈（S&Hng)式 ^ /東機、脈衝管式冷;東機、s〇lvay冷凍機。而且，該冷珠 機亚不限於制在克萊歐泵，亦可使用在超電導磁鐵或極 317791 1314951 低溫感測器等之冷卻。 f圖式簡單說明】 ::圖係本發明實施形態之克萊歐泵的概略圖。 *2 圖（a)至 的勒作說明圖。 係弟1圖之克莱歐栗中之冷凍機 第3圖係顯示各種蓄 【主要元 谷才ί田々材之比熱特性的曲線圖。The embodiments of the present invention have been described above, but the present invention is not limited thereto, and various modifications can be made in accordance with the technical idea of the present invention. The dampers η and 12 are not limited to the motor driving method, and may be a pneumatic driving method in which the enthalpy of the refrigerant gas is used, or a combined driving method of the motor disk air pressure. The above embodiment is an example in which the regenerator is used in a Glff0rd-McMahon type cold beam machine, but it can also be applied to a S&Hng type/Ether machine, a pulse tube type cold; S〇lvay freezer. Moreover, the cold bead machine is not limited to being manufactured by a Cleo pump, and may be cooled by a superconducting magnet or a pole 317791 1314951 low temperature sensor. BRIEF DESCRIPTION OF THE DRAWINGS The following is a schematic view of a Cleotech pump according to an embodiment of the present invention. *2 Figure (a) to the illustration of the drawing. The freezer in the Klein chestnut of the 1st figure shows the graph of the specific heat characteristics of the main element.
L件付唬說明】 M 3 5 N ( 8 11 \ 15 ^ 18 21、 • 31 > 1216 22 32 克萊歐泵 2 壓鴒機 4 氧知： j 擋板 9 推移器 i 3 畜冷材 17 吸入閥 19 膨脹空間 25&負栽突緣 14 冷凍機單元 馬達 遮罩 克萊歐泵板 蓄冷器 凸輪 排出閥 室温空間 317701 12Explanation of L pieces] M 3 5 N ( 8 11 \ 15 ^ 18 21, • 31 > 1216 22 32 Cleo pump 2 Press machine 4 Oxygen: j baffle 9 ejector i 3 animal cold material 17 Suction valve 19 Expansion space 25 & load flange 14 Freezer unit motor cover Cleo pump plate regenerator cam discharge valve room temperature space 317701 12