1313039 九、發明說明： 【發明所屬之技術領域】 本發明係關於在進行大型液晶顯示（liquidcryStal display)(以下簡 稱為LCD)’等離子顯示基板(piasma display panel)(以下簡稱為PDP) 等平板顯示Panel display)(以下簡稱為FPD)之玻璃基板瑕疵檢查 時，用以維持玻璃基板，搖動基板保持裝置，以及該基板保持裝置的基板 檢查裝置。 【先前技術】 近年來，在LCD、PDP等FPD的領域中，晝面大型化與成本削減，一直' 是期待達成的目標。為達成上述目標，在FPD製造工程中，有採用多面玻 璃基板使畫面尺寸有越來越大型化的傾向。所以，玻璃基板尺寸，目前已 有出現1250 xllOOmm的大型尺寸了。 在这樣的FPD製造工程中，應對生產的大型玻璃基板進行基板檢查^基 板檢查的手法之一是採取目視(胍^〇)檢查與顯微(micr〇)檢查兩者併行的 方式。目視(macro)檢查，是利用照明光線照射玻璃基板，以目視觀察玻璃 基板上的反射光。顯微(miaO)檢查，則是將目視檢查中發現的特定瑕疯部 分，利用顯微鏡加以擴大觀察。 此之基板檢查裝置’包括刊載於特開平u_160242號公報中的技術。該 公報中刊«備有可將玻躲板昇起翻定維持於規定角度的托架，於進 行目視(隨檢查日夺，將玻璃基板放置於托架之上，使托架昇高至與觀察 者視線同高，使鏡者餘進行目機察“⑽)檢查。糾，也可面向觀 1313039 察者前後方向搖動姉，她察者進行目視跡(maeiO)檢查。進行顯微 (micro)檢查時，則使托架返回原來位置，令玻璃基板保持水平狀態，利用 顯微觀察系統擴大觀察瑕疵部分。 但是，進行目視(macro)檢查時是以托架下方為中心昇高的，若是檢查 的玻璃基板大魏’㈣高後的賴賴基板上端部分，將高於觀察者眼 睛的位置。因此’觀察者的眼睛至大型玻璃基板上端部分的轉越遠，就 越不容易觀察大型玻璃基板的上端部分。 另外，大型玻璃基板昇起時，由於大型玻璃基板上端部分位置較高，所 以’必須要有足觸兩度空間使大型玻璃基板得以自在搖動。因此，裝置 .整體的尺寸也必須隨之大型化。 【發明内容】 【發明公開】 依本發明主要觀點’提供具備有底座，與裝設於架台上固定大型基板的 基板托架’以及使基板姉能如前方升起的底座前側緣部朗轉支點作中 心回轉之’同時或使基板托_昇起方向搖動，且基板托架昇起時基板托 架下端邊雜架台上方邊緣部分降得更低的搖祕造等之基板峡保持裝 置。 a 依本發明主要觀點，提供備有裝設於基板托架上方，且固定於夢 動構造昇起或搖動的基板托架上的目視照明裝置，藉此對大型g 視照明光線之基板檢查裝置。 【實施方式】 1313039 【最佳實施例】 以下，就有關本發明第1實施形態，參照圖示進行說明。 圖-，為適用於本發明基板固定保持裝置的基板檢查裝置剖面結麵。 架台⑴’由腳⑵、與裝辦腳⑵上的底座⑶構^在底座⑶上裝設著 固定維持大型玻職板⑷的基板托架⑸。基板托架⑸呈水平狀態，高度 設定於運送機H手臂移_高紅。底座⑶上方，财水平裝設。 基板托架⑸，如圖二所示，形成開口部6。於開口部6各邊上，設有 決定大型玻璃絲⑷鱗位㈣各絲栓銷⑺H錄錢基準检鎖 ⑻，按餘銷⑼。餘栓_)，職裝在大舰魏板⑷按壓於基準 栓銷（7)的可移動方向上。 基板托架（5)，相對於底座⑶的上方，依以下說明之搖動裝置（包括搖 動支點的鉸鏈(hinge)(l〇)，與推出裝置的直線_(15)、連接装置（⑺， 可知是以鉸鏈(hinge)⑽相_，而以可_的方絲設。回轉方向， 為基板托架⑸昇起，或恢復水平狀態之方向（箭頭A方向）。欽鍵 (hi卿)(1〇) ’從正面觀察基油定保持裝置，可知其是裝設於底座⑶的 兩側。此外，搖動機構係藉由鉸鍊10當作回轉#，使基板托架回轉，基板 托架5上升或水平方狀態_復動作，及進行基板托架5 _續搖動。 位於底座(3)上方正面側邊緣部分⑴）的兩端，如圖三所示，分別設有 各鉸鏈(hinge)支撐零件（12)。這些鉸鏈支撐零件（〇上，又分別設有可自 由回轉的鉸鍵(hingeXlO)。為使基板托架⑸胁，或往恢復水平狀態的 方向（箭頭A方向）搖動，這些鉸鏈㈤nge)(⑻的回轉軸⑽裝設於正面 1313039 側的水平方向（γ方向）。 鉸鏈(hinge)(10)上設有移動滑車(block)(14)。移動滑車(w〇ck)(i4) 上，則形成與裝設於基板托架（5)背面之直線導轨(15)嵌合的摩擦移動用溝 槽(16) 〇 丨 直線導軌(15) ’於基板托架⑸昇起時，在摩__溝槽(16)内摩擦 移動，將基板托架（5)往正面側推出。鉸鏈(hinge)(1〇)，以回轉軸（a)為 支點’使基板托架⑸回轉。藉此也能使基板托架⑸下端，從底座⑶上方 的邊緣部分⑻下降，並植輯軌⑽、鉸鏈(hinge)⑽構成推出裝置。 直線導執(15) ’分別裝設於基板托架⑸背面的兩端側，放置在形成於 底座（3)兩端各移動滑車（14)上的各摩擦移動用溝槽。這些直線導轨(π)， 於基板托架⑸昇起時，在摩__溝槽⑽内縣轉，將基板托架⑸ 往正面側推出，而且為了使基板托架⑸下端側邊緣降至底座⑶上方邊緣 部分(11)町，故必鮮有充分的長度，例如：餘托架⑸獨側稍高於 中央部。 這些直線魏⑽的上端側，裝設著制(stQpper)(15a)。這些擔間 (St〇pPer)a5a)，是為了在基板托架⑸昇起時，不讓基板托架⑸過度傾 斜而超過事細定的最大傾斜駿，_以_級触⑸_斜角度。 連接裝置（17) ’用以使基板托架⑸在底座⑶上維持水平狀態，或使之 往昇起方向回轉而設的。連接裝置（⑺，由連接頭⑴η]〇⑽與插口 .10(19)構成。連接頭（llnk)⑽，由固定的長度形成。連接頭 (lmk)(18)，安褒於設在;^座⑶下方延伸出來的延出端部⑽與基板托架 1313039 (5)下部的支撐零件(21)之間。該連接頭（link)(18)，在面向延出端部（2〇) 與支撐零件（21)的位置上’皆別各設有可回轉的支點（22)、（23)。 插口（jack)(19) ’ 尚包括伸縮桿(r〇d)(l9a)。插口（jack)(19)，裝設於 連接頭（link)(18)上支撐零件(21)側與腳(2)的水平樑&之間。插口 (jack)(19)，在面向連接頭（link)(18)的位置上，以支點（24)為中心，連 結伸縮桿(r〇d)(19a)前端，並且可回轉。插口（jack)(19)的下端，則在面 向水平樑2a的位置上，以支點（25)為中心，加以連結並可回轉。 連接裝置（17)，從正面側觀察基板固定保持裝置，分別裝設於基板托架 (5)的兩端側。 因此，當插口（jack)(19)的伸縮桿(rod)(19a)一拉長，插口（jack)(19) 的伸縮桿(nxl)(19a)前端，會將連接頭（link)⑽的支撐零件⑵）側往上 推。此時，插口（jad〇(19)的另-端裝設於腳⑵的水平樑％上，而且連 接頭（link)(18)的長度也是固定的。連接頭（Unk)⑽，可藉由插口 (jack)⑽伸縮桿(喊⑽)的拉長’而以支點(22)為巾心、畴。當連接 頭（ΙιηΙΟαδ)以支點(22)為中心畴時’支點(23)將以連接頭（Hnk)⑴為 半徑，在橢圓弧上移動。 此時，連接頭（link)(18)兩端部支點（22)、（23)的間隔、連接頭 (link)(18)支點(22)與鉸鏈(hinge)(10)回轉軸(13)的間隔是固定的，而連 接頭（link)(18)支點⑵)與鉸鏈(hinge)⑽回轉軸⑽的間隔是變動的。 因此’支點（22)、（23)與鏡鏈(hinge)(1〇)，3點形成三角形，連接頭 (lnik)(18)以支點(22)為中心回轉的同時，支點(23)與鉸鏈㈤聯)⑽之 1313039 間的間隔越來越短。 然而，隨著連接頭（link)(18)回轉而使支點（23)與鉸鏈(hinge)(10)間 隔越來越短的同時，基板托架（5)於直線導軌（15)上朝正面側摩擦移動，使 基板托架（5)下端側邊緣比底座3上方的邊緣部分（11)更往正面側推出。1313039 IX. Description of the Invention: [Technical Field] The present invention relates to a flat panel display such as a liquid crystal display panel (hereinafter referred to as LCD) piasma display panel (hereinafter abbreviated as PDP) The glass substrate of the panel display (hereinafter referred to as FPD) is used to maintain the glass substrate, shake the substrate holding device, and the substrate inspection device of the substrate holding device. [Prior Art] In recent years, in the field of FPDs such as LCDs and PDPs, large-scale kneading and cost reduction have been expected to be achieved. In order to achieve the above-mentioned object, in the FPD manufacturing process, a multi-faceted glass substrate has been used to increase the screen size. Therefore, the size of the glass substrate has now appeared in a large size of 1250 x llOOmm. In such an FPD manufacturing process, one of the methods for performing substrate inspection and substrate inspection on a large-sized glass substrate to be produced is to take a visual inspection (parallel inspection) and microscopic (micror〇) inspection. In the macro inspection, the glass substrate is irradiated with illumination light to visually observe the reflected light on the glass substrate. The microscopic (miaO) examination is a specific observation of the specific madness found in the visual inspection using a microscope. The substrate inspection apparatus of the present invention includes the technique disclosed in Japanese Laid-Open Patent Publication No. H-160242. In the bulletin, there is a bracket that can raise and hold the glass slab to maintain a predetermined angle. For visual inspection (with the inspection day, the glass substrate is placed on the bracket to raise the bracket to The observer's line of sight is the same, so that the mirrorer can perform the "(10)) inspection. The correction can also be viewed from the front and rear of the observer 1313039. The observer performs the visual inspection (maeiO). Microscopic (micro) During the inspection, the carriage is returned to the original position, the glass substrate is kept horizontal, and the observation portion is enlarged by the microscopic observation system. However, when the visual inspection is performed, the inspection is performed centering on the lower side of the bracket, and if it is checked The upper end portion of the glass substrate Dawei's (four) high will be higher than the position of the observer's eyes. Therefore, the farther the observer's eyes turn to the upper end portion of the large glass substrate, the less likely it is to observe the large glass substrate. In addition, when the large glass substrate is raised, due to the high position of the upper end portion of the large glass substrate, 'there must be enough space for the large glass substrate to shake freely. [Invention] The main point of the present invention is to provide a substrate holder having a base and a large substrate mounted on the gantry, and to make the substrate 姊The front side edge of the base raised as the front side can be rotated as the center pivoting 'at the same time or the substrate support_raising direction is shaken, and the upper edge portion of the lower end of the substrate bracket is lower when the substrate carrier is raised. According to the main point of the present invention, there is provided a visual illumination device provided on a substrate holder mounted above a substrate holder and fixed to a projection structure that is raised or shaken. [Embodiment] 1313039 [Best Embodiment] Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. Fig. - is a substrate suitable for use in the present invention. The substrate inspection device of the holding device has a cross-section of the substrate. The gantry (1)' is fixed by the foot (2) and the base (3) on the mounting foot (2) on the base (3) to maintain a large glass plate. The substrate holder (5). The substrate holder (5) is horizontal, and the height is set on the conveyor H arm shift_high red. Above the base (3), the financial level is installed. The substrate holder (5), as shown in Fig. 2, forms the opening 6 On each side of the opening 6, there is a large glass filament (4) scale (4) each bolt pin (7) H recording standard check lock (8), according to the remaining sales (9). Yu Jian _), the job is pressed on the big ship Wei board (4) The movable direction of the reference pin (7). The substrate bracket (5), relative to the upper side of the base (3), according to the following description of the rocking device (including the hinge of the rocking fulcrum (l〇), with the ejection device Straight line _(15), connecting device ((7), it can be seen that it is a hinge (10) phase _, and is set as a square wire. The direction of rotation is the direction in which the substrate carrier (5) is raised, or the horizontal state is restored (arrow) A direction). Qin key (hi Qing) (1〇) 'The base oil retaining device is viewed from the front, and it is known that it is mounted on both sides of the base (3). Further, the rocking mechanism is rotated by the hinge 10, the substrate holder is rotated, the substrate holder 5 is raised or horizontally _reacted, and the substrate holder 5_ is continuously oscillated. At both ends of the front side edge portion (1) above the base (3), as shown in Fig. 3, each hinge support member (12) is provided. These hinge support parts (on the top, respectively, are provided with freely swingable hinges (hingeXlO). In order to make the substrate bracket (5) threaten, or to oscillate in the direction of returning to the horizontal state (arrow A direction), these hinges (five) nge) ((8) The rotary axis (10) is mounted in the horizontal direction (γ direction) on the side of the front surface 1313039. A moving block (14) is provided on the hinge (10). On the moving block (w〇ck) (i4), A frictional movement groove (16) is formed to be fitted to the linear guide (15) mounted on the back surface of the substrate holder (5). The linear guide (15) is raised when the substrate holder (5) is raised. The inner groove (16) is frictionally moved to push the substrate holder (5) toward the front side. The hinge (1〇) rotates the substrate holder (5) with the rotary axis (a) as a fulcrum. The lower end of the substrate holder (5) can be lowered from the edge portion (8) above the base (3), and the planting rail (10) and the hinge (10) constitute an ejection device. The linear guides (15) are respectively mounted on the back surface of the substrate holder (5). On both ends, each frictional movement groove is formed on each of the moving pulleys (14) formed at both ends of the base (3). These linear guides (π), When the substrate holder (5) is raised, the substrate holder (5) is pushed out toward the front side in the inner tray, and the lower end side edge of the substrate holder (5) is lowered to the upper edge portion (11) of the base (3). In the town, it is necessary to have a sufficient length. For example, the remaining bracket (5) is slightly higher than the center. The upper end of these straight lines (10) is equipped with a system (stQpper) (15a). These pedestals (St〇pPer) A5a) is to prevent the substrate holder (5) from being excessively tilted when the substrate holder (5) is raised, and exceeds the maximum tilt of the substrate, which is _ level (5) _ oblique angle. The connecting means (17)' is provided for maintaining the substrate holder (5) in a horizontal state on the base (3) or rotating it in the raising direction. The connecting device ((7) is constituted by the connecting head (1) η] 〇 (10) and the socket .10 (19). The connecting head (11nk) (10) is formed by a fixed length. The connecting head (lmk) (18) is mounted on the amp; Between the extended end portion (10) extending below the seat (3) and the support member (21) at the lower portion of the substrate holder 1313039 (5). The connector (18) is facing the extended end portion (2〇) The position of the support part (21) is provided with a pivot point (22), (23). The jack (19) 'includes the telescopic rod (r〇d) (l9a). Jack (jack) (19), installed on the joint (link) (18) between the support member (21) side and the foot (2) horizontal beam & jack (19), in the connector-facing (link) At the position of (18), the front end of the telescopic rod (r〇d) (19a) is connected with the fulcrum (24) as the center, and can be rotated. The lower end of the jack (19) is facing the horizontal beam 2a. In the position, the fulcrum (25) is centered and connected and revolved. The connecting device (17) is attached to the substrate holding and holding device from the front side, and is respectively mounted on both end sides of the substrate holder (5). Telescopic rod of jack (19) Rod) (19a) is elongated, and the front end of the telescopic rod (nxl) (19a) of the jack (19) pushes the side of the support part (2) of the link (10) upward. At this time, the other end of the socket (jad〇(19) is mounted on the horizontal beam % of the foot (2), and the length of the link (18) is also fixed. The connector (Unk) (10) can be used by Jack (10) telescopic rod (shout (10)) is elongated 'with fulcrum (22) as the center of the towel, domain. When the connector (ΙιηΙΟαδ) with the fulcrum (22) as the central domain, the fulcrum (23) will be connected The head (Hnk) (1) is a radius and moves on an elliptical arc. At this time, the spacing of the fulcrums (22) and (23) at both ends of the link (18), and the link (18) fulcrum (22) The spacing from the hinge (10) of the hinge (10) is fixed, and the spacing between the fulcrum (2) of the link (18) and the hinge (10) of the hinge (10) is varied. Therefore, 'the fulcrum (22), (23) and the hinge chain (1〇) form a triangle at 3 points, and the joint (lnik) (18) rotates around the fulcrum (22), while the fulcrum (23) The spacing between the hinges (five) and (13) 1313039 is getting shorter and shorter. However, as the link (18) rotates and the fulcrum (23) and the hinge (10) are spaced shorter and shorter, the substrate carrier (5) faces the front side of the linear guide (15). The side frictional movement causes the lower end side edge of the substrate holder (5) to be pushed out toward the front side of the edge portion (11) above the base 3.
Ik著插口（jack)(i9)伸縮桿(r〇d)(i9a)的伸長，連接頭（nnk)(i8)的回 轉量也隨之增大。而且’基板城⑸昇起賊越大，麟板托架⑸下端 側邊緣，從底座上方邊緣部分（11)的推出量也就越大。 如此一來’基板托架（5)昇起的角度越大，基板托架（5)下端側邊緣的推 出置也就隨之增大。由此可知’基板托架⑸下賴邊緣，較底座⑶上方 邊緣部分（11)更為下降。 基板托架（5)下端側邊緣部分（n)的下降距離，可藉由變更連接頭 (link)(18)的長度、絲導軌(⑸的長度、伸祕(rQd)(19a)的長度而任 意設定。 也就疋’支點（22)、（23)與鉸鏈(hinge)(1〇)，3點形成三角形，依據 伸縮桿(r〇d)(l9a)的伸縮長度，通過支點(22)、⑽的邊、以及通過支點 (23)與鉸鍵(hinge)(iG)的邊所形成的角度，如果越小，則基板托架⑸昇 起的角度就越大。糾，連接頭（link)⑽支點⑽與鉸鏈(hinge)⑽回 轉軸⑽的間隔若比連接頭（Hnk)⑽的長度短，則基板托架⑸昇起的角 度（傾斜角）就會隨之增大。 因此’可藉由5周整伸縮桿(r〇d)(19a)的伸縮長度，變化通過支點（22)、 的邊以及通過支點（23)與鉸鏈(hinge)(i〇)的邊所形成的角度，於 1313039 是，基板托架（5)的昇起角度與基板托架（5)下端邊緣部分(11)的下降距 離，即可以此方式任意設定。 再者，基板托架⑸’是藉由较鏈(hinge)支撐零件（12)、鉸鏈(hinge)(i〇) 與移動滑車（14)構成的部分、以及支樓零件（21)，以水平狀態載置於底座 (3)上。鉸鏈(hinge)支撐零件（12)，與鉸鏈(hinge)(l〇)與移動滑車（14)的 高度、及支撐零件（21)的高度是一致的。 基板托架（5)的上方’設有目視(macro)照明裝置（3〇)。本目視(macr〇) 照明裝置(30) ’是由放射觀察照明光線的目視(macr〇)光源(Μ)、將目視觀 $ 察(macro)光源(31)放射出來的光線加以反射的反射鏡(32)、將反射鏡(32) 上反射的目視(macro)照明光線加以聚集的菲涅耳透鏡(Fresnel iens)(33) 所構成。目視(macro)光源(31)的裝設能使目視觀察照明光線呈水平方向 方向）放射出來。反射鏡(32)的裝設，相對於水平方向，約傾斜5〇度，在 照明光軸昇起的大型玻璃基板側折曲。 顯微(micro)檢查裝置(40)，由裝設於底座(3)上可往义方向移動的門型 臂(卿)(41)，以及沿著該門型臂(arm)⑷)的水平臂(_)裝設可往γ方肖 φ 移動的顯微鏡(42)所構成。 控制裝置(43)，主要是控制插口（jack)⑽的伸縮動作、及目視觀察光 源(31)的雜鋪。另外，控繼置⑽，又控咖微魏臺⑽X γ方 向的移動，鶴纖(42)峨察視野移_可她大麵穩板⑷上之瑕 疲。P刀的位置。大型賴基板⑷上的械部分，以目視檢麵特定方式， 同時也記憶其座標資料。 11 1313039 其-入，誠文上文所述，構成的裝置動作是實施目視檢查與顯微檢查時， 茲說明如下。 檢查開始前，先將插口（jack)(19)縮短，並使載置大型玻璃基板(4)的 基板托架（5)呈水平狀態。 實施目視檢查時’插口（jack)(19)伸縮桿(r〇d)(19a)的伸縮是由控制裝 置(43)所控制的’連接頭（18)則是以支點（四）為中心進行回轉。藉由插口 (jack)(19)伸縮桿(n3d)(19a)㈣縮、與連_(18)咖轉，絲托架⑸ 開始昇起。 此時’基板托架（5)下方各直線導轨(15)，開始在各摩擦移動用溝槽（16) 内展開摩擦移動。如此一來，基板托架⑸，如圖四所示，比底座⑶邊緣 部分（11)更往前方側推出，同時又以鉸鏈(hinge)(10)為搖動中心使之昇 起。 再者’隨著插口（jad〇(19)伸縮桿(r〇d)(19a)的伸長，基板托架⑸也 隨之昇起，於是，級托架⑸下端邊緣更降至低於底座⑶上方邊緣部分 (11)的位置。 進行目視檢查時，由觀察者自行調整插口（ j ack) (i 9)伸縮桿(rod) (i 9a) 的伸縮狀;兄。如此可將基板托架⑸任意、調整至胃於a行目視觀察的角度。 藉此方式昇起的基板托架⑸下端側邊緣，由於較底座⑶上方邊緣部分 (11)低下，所以，即使基板托架（5)裝設於架台i之上，大型玻璃基板(4) 的全面就在觀察者附近。尤其是大型玻璃基板⑷上端部分的高度較以往 低’大型玻璃基板(4)上端部分與觀察者的距離縮短。 12 1313039 在此狀態之下，當目視觀察光源(31)放射出觀察照明光線時，觀察照明 光線會在反射鏡(32)上反射，並由菲涅耳透鏡(Fresnel lens)(33)加以聚 光後，照射於基板托架（5)上的大型玻璃基板(4)上。 觀察者，在大型玻璃基板(4)上，以目視觀察反射的光線，進行目視檢 查。此時，大型玻璃基板(4)上端部分的高度較以往低，所以，觀察者並未 抬頭看大型玻璃基板(4)上端部分，而且可在大型玻璃基板(4)的全面上， 藉由捕捉損傷、斑點等瑕疵部分的反射光線，確實地找出存在於大型玻璃 基板(4)上的瑕疵部分。 另外，在進行觀察檢查時，例如：將基板托架任意調整成易於實施 目視觀察的昇起肢，各插n(jaek)(19)則反覆實施伸縮動作，使伸縮桿 (rod)(19a)伸縮至預先設定的長度。藉由伸馳作的反覆實施，基板托架 (5)將依一定周期往箭頭a方向連續搖動。 搖動基板姉⑸的縣肖度綱，減設定於控織置⑷）。控制袭 置(43) ’依預先設定的搖動角度範圍，控制各插口（jack)⑽伸縮桿 (rod)(19a)的伸縮長度。 基板托架⑸糾此地連續鶴，狀型玻璃基板⑷上的損傷、斑點等 瑕痴部分將朝反方向反射出光線，並映人觀察者的視線内。如此—來，觀 察者即可減少視__讀，樣確實找出大型玻璃基板⑷上之損傷、 斑點等瑕疵部分。 此外，藉由目視檢查而在大型玻璃基板⑷上找出的特定瑕蘇部分，其 座標資料則輸入控制裝置(43)中。 、 13 1313039 其次是進行顯微檢查。插口（jack)(19),經由控制裝置（43)的控制，使 伸縮桿(rod)(19a)得以伸縮。隨著伸縮桿（r〇(j)(i9a)的縮短，連接頭（π) 則會以支點（22)為中心，在基板托架（5)昇起時，往相反方向回轉。藉由此 舉，可使基板托架（5)恢復成原來的水平狀態。Ik is the extension of the jack (i9) telescopic rod (r〇d) (i9a), and the amount of rotation of the joint (nnk) (i8) is also increased. Moreover, the larger the thief is raised in the substrate city (5), the lower edge of the lower end of the lining bracket (5), and the larger the amount of pushing out from the upper edge portion (11) of the base. As a result, the larger the angle at which the substrate holder (5) is raised, the more the push-out of the lower end side edge of the substrate holder (5) increases. From this, it can be seen that the substrate holder (5) has a lower edge which is lower than the upper edge portion (11) of the base (3). The lowering distance of the lower end side edge portion (n) of the substrate holder (5) can be changed by changing the length of the link (18), the length of the wire guide (the length of (5), and the length of the extension (rQd) (19a). Arbitrarily set. In other words, 'the fulcrum (22), (23) and the hinge (1〇), the triangle forms a triangle, and the fulcrum (22) is adopted according to the telescopic length of the telescopic rod (r〇d) (l9a). , the edge of (10), and the angle formed by the fulcrum (23) and the edge of the hinge (iG), if the smaller, the angle at which the substrate holder (5) rises is larger. Correction, connector (link) (10) If the distance between the fulcrum (10) and the hinge (10) rotary axis (10) is shorter than the length of the connector (Hnk) (10), the angle (inclination angle) at which the substrate holder (5) rises increases. By the length of the telescopic length of the telescopic rod (r〇d) (19a) for 5 weeks, the angle formed by the fulcrum (22), the angle formed by the fulcrum (23) and the edge of the hinge (i〇), At 1313039, the falling distance of the substrate holder (5) and the lower end edge portion (11) of the substrate holder (5) can be arbitrarily set in this manner. Further, the substrate holder (5)' is A portion consisting of a hinge support member (12), a hinge (i) and a moving block (14), and a branch member (21) are placed on the base (3) in a horizontal state. The hinge support member (12) is identical to the height of the hinge (l〇) and the moving block (14), and the height of the support member (21). There is a macro lighting device (3〇). This visual (macr〇) lighting device (30) is a visual (macr〇) light source (Μ) that observes the illumination light by radiation, and a visual view of the macro light source. (31) A mirror (32) that reflects the emitted light, and a Fresnel lens (33) that collects the visible illumination light reflected on the mirror (32). The macro light source (31) is arranged to allow the visual observation of the illumination light to be emitted in a horizontal direction. The mirror (32) is mounted at an angle of about 5 degrees with respect to the horizontal direction, and is bent on the side of the large glass substrate on which the illumination optical axis rises. A micro inspection device (40), a gantry arm (41) that is movable in the sense direction on the base (3), and a level along the door arm (4) The arm (_) is provided with a microscope (42) that can move toward the γ square φ. The control device (43) mainly controls the telescopic movement of the jack (10) and visually observes the mess of the light source (31). In addition, the control relay (10), and control the movement of the Wei Weitai (10) X γ direction, He Fiber (42) to observe the visual field shift _ can be on her face (4) on the fatigue. The position of the P knife. The mechanical part of the large-sized substrate (4) is visually inspected in a specific manner, and its coordinate data is also memorized. 11 1313039 It is described below, and the operation of the device is as follows when performing visual inspection and microscopic inspection. Before the inspection is started, the jack (19) is shortened, and the substrate holder (5) on which the large glass substrate (4) is placed is horizontal. When the visual inspection is carried out, the expansion and contraction of the jack (19) telescopic rod (r〇d) (19a) is controlled by the control device (43). The connector (18) is centered on the fulcrum (four). turn around. The wire bracket (5) starts to rise by the jack (19) telescopic rod (n3d) (19a) (four) and the _ (18) coffee. At this time, the linear guides (15) below the substrate holder (5) start to frictionally move in the respective frictional movement grooves (16). As a result, the substrate holder (5), as shown in Fig. 4, is pushed forward from the edge portion (11) of the base (3), and is raised by a hinge (10) as a center of shaking. Furthermore, with the extension of the socket (jad〇(19) telescopic rod (r〇d) (19a), the substrate holder (5) is also raised, so that the lower end edge of the stage bracket (5) is further lowered below the base (3). The position of the upper edge portion (11). When visually inspecting, the observer adjusts the expansion of the socket (i ack) (i 9) telescopic rod (i 9a); brother. This allows the substrate holder (5) Arbitrarily, adjust to the angle at which the stomach is visually observed in a row. The lower end side edge of the substrate holder (5) raised in this way is lower than the upper edge portion (11) of the base (3), so even if the substrate holder (5) is mounted Above the gantry i, the large glass substrate (4) is entirely near the observer. In particular, the height of the upper end portion of the large glass substrate (4) is lower than before. The distance between the upper end portion of the large glass substrate (4) and the observer is shortened. 1313039 In this state, when the visual observation light source (31) emits the observation illumination light, the observation illumination light is reflected on the mirror (32) and concentrated by the Fresnel lens (33). Thereafter, it is irradiated onto the large glass substrate (4) on the substrate holder (5). On the large glass substrate (4), the reflected light was visually observed and visually inspected. At this time, the height of the upper end portion of the large glass substrate (4) was lower than before, so that the observer did not look up at the large glass substrate (4) The upper end portion, and on the entire surface of the large glass substrate (4), by capturing the reflected light of the flaw portion such as damage or spots, it is possible to surely find the flaw portion existing on the large glass substrate (4). For the observation inspection, for example, the substrate holder is arbitrarily adjusted to a raised limb that is easy to perform visual observation, and each of the insertions (jaek) (19) is repeatedly subjected to the expansion and contraction operation, and the telescopic rod (19a) is expanded and contracted to advance. The length of the setting is repeated by the extension, and the substrate holder (5) is continuously oscillated in the direction of the arrow a according to a certain period. The state of the substrate 姊 (5) is shaken, and the setting is controlled by the control woven (4). Control Attack (43) ' Controls the telescopic length of each jack (10) telescopic rod (19a) according to a preset range of rocking angles. The substrate holder (5) corrects the continuous crane, and the damage, spots, and the like on the glass substrate (4) are reflected in the opposite direction and reflected in the observer's line of sight. In this way, the observer can reduce the __ reading and find out the damage, spots, etc. on the large glass substrate (4). Further, the coordinates of the specific sputum portion found on the large glass substrate (4) by visual inspection are input to the control device (43). 13, 1313039 followed by microscopic examination. A jack (19) is used to expand and contract the telescopic rod (19a) via the control of the control unit (43). As the telescopic rod (r〇(j) (i9a) is shortened, the joint (π) is centered on the fulcrum (22), and when the substrate holder (5) is raised, it is rotated in the opposite direction. In this way, the substrate holder (5) can be restored to the original horizontal state.
當基板托架（5)降至底座（3)上方並呈現水平狀態時，控制裝置(43)，依 據目視檢查時輸入的瑕疵部分座標資料’控制顯微鏡鏡臺（41)朝χγ方向移 動’並將顯微鏡(42)的觀察視野移動至特定大型玻璃基板(4)上瑕疵部分的 位置上。 H 由顯微鏡(42)放大的瑕疵部分影像，例如：若是利用CCD攝影機拍攝 的，則顯示於電視螢幕上。觀察者可觀察顯示在電視螢幕上瑕疵部分的放 大影像。 再者，控制裝置(43)，可使顯微鏡(42)往}(Y方向移動，全面掃描大型 玻璃基板(4)上顯微鏡(42)的觀察視野。 進行顯微檢查時，基板托架（5)是藉由鉸鍊支撐零件（12)、鉸鍊(1〇)與 移動滑車（14)構成的部分、及支撐零件(21)，而載置於底座(3)上，所以，· 不受外部震動的影響，基板托架（5)的穩定性很高。 基板固定保持裝置’不僅限於使用在目視檢查時、及顯微檢查時，同時 亦可使用於將大型玻璃基板(4)載置於基板托架（5)之上時、以及從基板托 . 架（5)上方取下時的的搬運裝置上。 - 例如：將大型玻璃基板(4)載置於基板托架（5)之上時，若由控制裝置(43) 控制插口（jack)(19)伸縮桿(rod)(19a)的伸縮時，如圖四所示，基板托架 14 1313039 (5)將會昇起，而基板托架⑸下端_邊緣將下降至低於底座⑶上方的邊 緣部分。 如此-來’當基板托架⑸昇起時，大型玻璃基板⑷將以朝略微垂直的 方向（Ζ方向）立起的狀態，如圖二所示，載置於各個时滾輪的基準检銷 (8)之上。而且，大型玻璃基板⑷會藉由按祿銷⑼，朝向各基準检銷⑺ 壓入而裝設於基準位置上。 其次’大型玻璃基板⑷，是藉由圖示中未出現之裝設於基板托架⑸ 的吸附孔所吸引，而吸附固定於基板托架（5)表面上。之後，當插口 (jack)(19)雜桿(mOCiga)驗肖，紐絲⑸财鎌料的水平狀 態。 另一方面’從基板托架（5)上取下大型玻璃基板(4)時，與上述裝置程序 相反’在基板托架⑸胁驗態時，解雜木綱紐(伽卿。並且 在大型玻璃基板(4)朝略微垂直的方向立起後，從基板托架〇之上取下。 在大型玻璃基板⑷載置於基板托架⑸、或自基板托架⑸上取下時， 基板托架（5)下端邊緣，將會較底座（3)上方邊緣部分（u)降得更底。备大 型玻璃基板⑷載置於基板托架⑸之上時，大型玻璃基板⑷無需昇至較高 的位置，即可容易地將大型玻璃基板⑷載置於基板托架⑸之上、或從基 板托架（5)之上拆下來。 另外’若在大型玻璃基板(4)立起的狀態下載置於基板托架（5)時，大型 玻璃基板⑷會藉由自身的《而使下邊緣载置於附有滾輪的基準栓鎖⑻ 上固定其位置。如此-來，基減架⑸上即可省略安额附滾輪检銷⑻ 15 1313039 相對應的按齡銷，而且大龍板⑷與基板_⑸之間的面接觸抵 抗也會減小，按壓栓銷（9)的按壓力也可減小。 若依上述第1實施雜，將基板托架⑸昇_，絲赠⑸下端側邊 緣將會較架台1的底座(3)邊緣部分（11)更往前方推出，同時也比架台⑴ 的底座⑶邊緣部分(11)更為降低，所以，軸基板托架⑸是裝設在架台 (1)上，但是大型玻璃基板(4)的全面皆可顯示於觀察者附近，特別是ι25〇 X 1100 mm大型玻璃基板⑷上端部分的高度，可較以往更為降低，則大型玻璃 面4上端部分與觀察者間的距離也可縮短。 因此，觀察者並未抬頭看大型玻璃基板⑷上端部分，而且可在大型玻 璃基板⑷的全社，藉由敵祕、斑鱗贼部分的反射光線，確實地 找出存在於大型玻璃基板(4)上的瑕庇部分。 再者，大型玻璃基板⑷昇起時，其上部分會較以往為低，所以，目視 觀察照明裝置(30)的設置位置也會隨之降低，基板檢絲置全體的設置底 座也會縮小。 進行目視(〇)檢麵，將基板托架⑸任意調整成易於實施目視觀察 的昇起角度’各插口（jack)⑽則反覆實施伸縮動作使基板域⑸搖動， 觀察者即可減少視線的移動次數，而能藉由捕捉損傷、斑料贼部分反 射出來的光線’確實找ώ其瑕鱗分。此時，基板托架⑸搖動的肖度範園， 由於可任意設定於控制裝置(43)中，所以，不僅是損傷或斑點，缺角、髒 亏灰塵等各種不同的瑕疫部分皆可確實找出。 進仃顯微(mlerO)檢鱗，為使基板托架⑸呈水平織，而由绞鍵 16 1313039 (hinge)支撐料（12)、鉸鏈(hinge)(l〇)與移動滑車（⑷所構成的部分、 以及支撐零件⑵）’而載置於底座⑶之上。所以，基板托架⑸不受外部 震動影響的穩定性很t%。因此’可藉由不搖晃的顯微鏡(⑵放大影像，觀 察大型玻璃基板(4)上的瑕疵部分。 再者，本裝置’在基板托架（5)昇起後，下端側邊緣將降至低於架台g) 底座⑶絲部分（Π)的位置’且可使胁敎型玻璃紐⑷載置於基板 托架（5)之上時，以及自基板托架上取下時的搬運裝置。此時，沒有必要將 大型玻璃基板⑷昇至高位置，即可㈣地將大型賴基板⑷載置於基板 托架（5)、或從基板托架（5)之上取下來。 而且，由於是一邊將基板托架（5)比底座（3)邊緣部分（11)更往前推，一 邊昇起基板托架（5)的，所以，並不會遮住目視觀察照明光線。 搖動裝置，是由回轉支點鉸鏈(hinge)(1〇)、推出裝置的直線導軌(15)、 連接裝置（17)等所構成，所以，價格較便宜。 其次，關於本發明第2實施形態，則參照圖示進行說明。在本裝置中， 鉸鏈(hinge)(l〇)、鉸鏈支撐零件（12)、移動滑車(14)、直線導軌(15)、連 接頭（18)、插n(jack)⑽、延出端部⑽)及支撐零件⑻，誠如上述第} 實施形g的說明，從正面側來看，在γ方向的兩端側各裝財丄組。 本實Μ形態中，各鉸鏈(hinge)(1〇)、（1〇，）、各鉸鏈(hinge)支撐零件 (12)、（12 )、各移動滑車（⑷、（14，）、各直線導軌(⑸、（15，）、各 連接頭（18)、（18’）、各插口（jad〇(19)、（19，）及各支撐零件⑵）、 (2Γ )，皆各附有符號。 17 1313039 本裝置中，如圖六所示，相對於基板托架（5)回轉方向的搖動軸方向， 在垂直軸方向上設置有使基板接架5回轉的另一方向搖動裝置5〇。 此之另一方向搖動裝置50上，相對於基板托架（5)昇起方向的回轉軸方 向’在垂直軸方向上設置有使之回轉（箭頭B方向）的鉸鏈組件（回轉支 撐零件）（51)。該鉸鏈組件（51)，則是由鉸鏈維持臂（52)、與分別裝設於 欽鏈維持臂（52)兩端的绞鏈支撐片（52)a、（52b)、以及裝設於鉸鏈維持臂 (52)底面略微中央部的回轉軸(53)所構成。 各鉸鏈支撐片（52a)、（52b)上，分別設有可回轉的鉸鏈（丨3)、（13，）。 回轉軸（53)，設置於底座（3)正面側略中央部的回轉用孔54内，並且能夠 回轉。 控制裝置(43)，控制各插口（19)、（19’）的伸縮量，各伸縮量彼此相異。 例如：-邊的插口（19)、（19,）並未伸縮時，另一邊的插口⑽、⑽） 就會伸縮。另夕卜，當-邊的插口⑽、或〇9,）伸長時，則另一邊的插口 (19)、或（19’）則縮短。再者，則能使插口（19)、（19,）的伸縮動作，同 時展開伸縮。 在這樣的結構之下進行目視檢查時，由觀察者調整各插口（jack)⑽、 (立说）的各伸縮桿(19a)、（19a，）的伸長。如此一來，基板托架⑸即可任 思。周整成絲進行目視觀察的昇起角度。 —在此狀‘4下’使各插D(jad〇(19)、（19’）的各伸縮桿α糾、⑽，） 同寺反覆實赠縮動作，齡如此反_伸縮動作，基板托架⑸即可依— 定周期往箭頭A方向連續搖動。 18 1313039 另外，例如··不使一邊的插口（jaCk)(19)、或（19,）伸縮，則能使另一 邊的插n(jad〇⑽、或（19,）伸縮。再者，—邊的細（jad〇⑽、或 (19’）伸長，則另一邊的插口（jack)(19)、或（19,）就會伸縮。又，能使 各插口（jack)(19)、（19，）連續反覆實施伸縮動作。 類似這樣地藉由變化各插口（jack)(19)、（19,）的伸縮動作，基板托架 (5)，如圖六所示之鉸鏈組件（51)以回轉軸（53)為中心，往箭頭B方向回轉。 如此-來’基板托架⑸’從正面姆看’是往左右方向（以下稱為搖頭方 向）搖動。 圖七，為一邊插口（jad〇(19)、或（19,）未伸縮，而另一邊插口 (jack)(19)、或(19’）伸縮的圖示。此時，基板托架⑸，從正面側來看， 是呈現往左偏。此之綱方向的獅細，可由控制裝置⑽ 預先設定，也可藉由觀察者的操作而任意設定。 依上述第2實施形態’使基板托架⑸往搖頭方向搖動，任意設定回轉 方向角度，或者可藉由連續的搖動，增加目視觀察檢查的變化。藉此方法， 使得基板托架⑸減起方向（箭駆方向）轉而無法檢出大型玻璃基板 ⑷上的損傷、麵等瑕麵分，可以齡反射紐查&來，並且確實找出 這些瑕疵部分的特定位置。 此外’亦可脑基板托架⑸昇够向的轉、與搖頭方向的搖動同時 進行’將基板托架⑸設定為所有角度方向，使之連翻所有肖度方向搖 動’並同時進行目視觀察檢查。 再者’本發明並不只限於上述第i與第2實施形態，在實施階段中，在 19 1313039 不脫離其主要目的的範圍之内，皆可加以各種不同的變化。 例如.在使基板托架⑸昇起時，首先將基板托架往前推出，使之位於 比底座⑶邊緣部分(11)更前方的位置。然後，歧鏈(⑻_轉轴⑽為 中〜’可使基板托架⑸回轉下降至較底座⑶邊緣部分⑴）更低處的位置。 特別疋在基板姉⑸從水平狀麟起至規定的傾斜肖度時，可使基板 托架⑸開始獅，使基板她⑸下繼緣下降至底座⑶雜部分⑴）以 下。由此可知，可藉輯搖動裝置的結構加以各種不同的變化，使基板托 架（5)進行搖動動作。 各連接頭⑽、（18,），例如：可以取代插口以⑻。.藉由取代插口 (jack) ’在基板托架⑸昇起的狀態之下，#該插口（jack)伸縮時，就會使 基板托架⑸以上下方向鷄。如此—來，可使大型玻璃基板上欲實施目視 觀察的區域，配置於觀察者易於實施目視觀察檢查的高度位置上。 搖動裝置，由搖動支點鉸鏈(10)，推出裝置的直線導軌(15)、連接裝置 (Π)等所構成，但亦可使麟其他任何裝置。例如：基板托架⑸的搖動支 點各鉸鏈⑽、（:10’）可關時具健動與滑動機能，另外，亦可使用於 使基板托架（5)呈圓弧狀移動的搖動裝置。 【產業上的利用可能性】 本發明，為適用於大型LCK、PDP等FPD製造工程的基板檢查裝置，不 僅限於由目視檢查與顯微檢查構成的複合式裝置，也可以是只有目視檢杳 的單-功«置。更且，可適用於大型玻璃基板上的膜厚測量與_檢查 等各種基板檢查裝置’也可使用於大型玻璃基板的固定維持，或載置於大 20 1313039 型玻璃基板、或取下等。 【圖式簡單說明】 i-係本發明基板保持裝置的第—實施例構成圖。 圖一係本發明基板保持裳置的第一實施例的基板托架的正面構成圖。 圖二係本發明基板保持裝置的第一實施例的鉸鍊部份擴大圖。 圖四係本發明基板保持裝置的第一實施例基板托架的上升動作表示圖。 圖五係本發明基板保持裝置的第二實施例構成圖。 圖六係本發明基板保持裝置的第二實施例方向搖動機構的構成圖。 圖七係本發明基板保持裝置的第二實施例基板托架的搖頭方向的搖動表 示圖。 【主要元件符號說明】 ......................架台 2a....................水平樑 4.....................玻璃基板 6..........................開口部 8......................基準栓銷 ....................欽鍊 12.....................支撐零件 14.....................移動滑車 16.....................移動用溝槽 18..................... 連接頭 2 .....................腳 3 .....................底座 5.....................基板托架 T......................基準栓銷 9.....................按壓栓銷 Π.....................邊緣部份 13.....................回轉軸 15.....................直線導軌 17......................連接裝置 19.....................插 〇 21 1313039 19’ ..................·.插口 20....................延出端部 22.....................支點 24.....................支點 30....................照明裝置 32.....................反射鏡 40....................檢查裝置 42.....................顯微鏡 50....................搖動裝置 52.....................鉸鏈維持臂 (52b)..................鉸鍊支撐片 19a...................伸縮桿 21.....................支撐零件 23.....................支點 25.....................支點 31.....................光源 33.....................透鏡 41.....................門型臂 43.....................控制裝置 51.....................鉸鍊組件 (52a)..................鉸鍊支撐片When the substrate holder (5) is lowered above the base (3) and is in a horizontal state, the control device (43) controls the microscope stage (41) to move in the direction of χ γ according to the 瑕疵 part coordinate data input during the visual inspection. The observation field of the microscope (42) is moved to the position of the upper portion of the specific large glass substrate (4). H Part of the image magnified by the microscope (42), for example, if it is taken with a CCD camera, it is displayed on the TV screen. The observer can observe the enlarged image displayed on the video screen. Further, the control device (43) can move the microscope (42) to (in the Y direction, comprehensively scan the observation field of the microscope (42) on the large glass substrate (4). When performing microscopic inspection, the substrate holder (5) ) is a part of the hinge supporting part (12), the hinge (1〇) and the moving block (14), and the supporting part (21), and is placed on the base (3), so that ... is not subject to external shock The substrate holder (5) has high stability. The substrate holding and holding device is not limited to use during visual inspection and microscopic inspection, and can also be used to mount a large glass substrate (4) on the substrate. On the carrier (5) and on the transport device when removed from the top of the substrate holder (5) - For example, when the large glass substrate (4) is placed on the substrate holder (5) If the control device (43) controls the expansion and contraction of the jack (19) telescopic rod (19a), as shown in FIG. 4, the substrate holder 14 1313039 (5) will rise, and the substrate holder The lower end of the frame (5) will be lowered to the edge portion above the base (3). So - 'When the substrate holder (5) is raised, the large glass substrate (4) The state in which it is raised in a slightly vertical direction (Ζ direction) is placed on the reference pin (8) of each roller when it is shown in Fig. 2. Moreover, the large glass substrate (4) is pressed by the lupin (9). The predetermined reference pin (7) is press-fitted to the reference position. Next, the 'large glass substrate (4) is attracted by the adsorption hole provided in the substrate holder (5) which is not shown in the drawing, and is adsorbed and fixed. On the surface of the substrate carrier (5). After that, when the jack (19) miscellaneous rod (mOCiga) is examined, the neon (5) is in the horizontal state of the material. On the other hand, 'taken from the substrate holder (5) When the large glass substrate (4) is placed, it is opposite to the above-mentioned device program. 'When the substrate holder (5) is in the state of inspection, the solution is removed, and after the large glass substrate (4) is raised in a slightly vertical direction. Remove from the substrate holder 。. When the large glass substrate (4) is placed on the substrate holder (5) or removed from the substrate holder (5), the lower edge of the substrate holder (5) will be compared with the base (3). The upper edge portion (u) is lowered to the bottom. When the large glass substrate (4) is placed on the substrate holder (5), it is large. The glass substrate (4) can be easily placed on or removed from the substrate holder (5) without being raised to a higher position. In addition, if it is on a large glass substrate (4) When the upright state is downloaded and placed in the substrate tray (5), the large glass substrate (4) will be fixed by its own position on the reference latch (8) with the roller attached thereto. Therefore, the base reduction pin (5) can be omitted from the corresponding pin-counting pin (8) 15 1313039, and the surface contact resistance between the big plate (4) and the substrate _ (5) is also reduced, pressing the pin ( 9) The pressing force can also be reduced. According to the first embodiment described above, the substrate holder (5) is raised _, and the lower end side edge of the silk gift (5) will be further forward than the edge portion (11) of the base (3) of the gantry 1 The introduction is also lower than the edge portion (11) of the base (3) of the gantry (1), so the shaft substrate bracket (5) is mounted on the gantry (1), but the entire large glass substrate (4) can be displayed on The height of the upper part of the large glass substrate (4) near the observer, especially ι25〇X 1100 mm, can be compared More reduced, the distance between the upper portion and the large glass surface viewer 4 can be shortened. Therefore, the observer does not look up at the upper end portion of the large glass substrate (4), and can be surely found on the large glass substrate (4) by the reflected light of the enemy and the scaly thief in the whole glass substrate (4). The part of the shelter. Further, when the large glass substrate (4) is raised, the upper portion thereof is lower than the conventional one. Therefore, the installation position of the visual illumination device (30) is also lowered, and the installation base of the entire substrate detection wire is also reduced. The visual inspection is performed, and the substrate holder (5) is arbitrarily adjusted to a viewing angle that is easy to perform visual observation. Each jack (10) repeatedly performs a telescopic operation to shake the substrate region (5), and the observer can reduce the movement of the line of sight. The number of times, but by capturing the damage, the light reflected from the spotted thief part is indeed looking for its scale. At this time, since the rectangular fan of the substrate holder (5) can be arbitrarily set in the control device (43), not only damage or spots, but also various plagues such as missing corners and dirty dust can be confirmed. Find out. The helium micro (mlerO) scale is used to make the substrate holder (5) horizontally woven, and the support member (12), the hinge (l) and the moving block ((4) are composed of the hinges 16 1313039 (hinge). The part, and the support part (2))' are placed on the base (3). Therefore, the stability of the substrate holder (5) from external shock is very high. Therefore, 'the bottom part of the large glass substrate (4) can be observed by a microscope that does not shake ((2) magnify the image. Further, after the substrate holder (5) is raised, the lower side edge will be lowered to the lower side. In the case of the gantry g) the base (3) wire portion (Π), and the shackle type glass sill (4) is placed on the substrate holder (5), and the transport device is removed from the substrate holder. At this time, it is not necessary to raise the large glass substrate (4) to a high position, and the large substrate (4) can be placed on the substrate holder (5) or removed from the substrate holder (5). Further, since the substrate holder (5) is pushed forward more than the edge portion (11) of the base (3), the substrate holder (5) is raised one by one, so that the illumination light is not obscured by visual observation. The rocking device is constituted by a hinge fulcrum (1 〇), a linear guide (15) of the ejection device, a connecting device (17), and the like, and therefore, the price is relatively low. Next, a second embodiment of the present invention will be described with reference to the drawings. In the device, a hinge (l〇), a hinge support member (12), a moving block (14), a linear guide (15), a connector (18), a jack (10), and an extended end (10)) and the supporting member (8), as described in the above-described first embodiment, the financial group is mounted on both end sides in the γ direction as seen from the front side. In this embodiment, each hinge (1〇), (1〇), each hinge support member (12), (12), each moving block ((4), (14), each line Guide rails ((5), (15,), connectors (18), (18'), sockets (jad〇 (19), (19), and support parts (2)), (2Γ), each with a symbol 17 1313039 In the present apparatus, as shown in Fig. 6, in the direction of the rocking axis in the direction of rotation of the substrate holder (5), another direction oscillating means 5 使 for rotating the substrate holder 5 is provided in the vertical axis direction. In the other direction, the swinging device 50 is provided with a hinge assembly (slewing support member) for rotating (arrow B direction) in the direction of the vertical axis with respect to the direction of the rotary axis of the substrate holder (5). 51) The hinge assembly (51) is a hinge support arm (52), and hinge support pieces (52) a, (52b), and mounting respectively installed at both ends of the chain maintenance arm (52) The hinge shaft (53) is formed at a slightly central portion of the bottom surface of the hinge maintaining arm (52). Each of the hinge supporting pieces (52a) and (52b) is respectively provided to be rotatable. Hinge (丨3), (13). The rotary shaft (53) is provided in the rotation hole 54 at the center of the front side of the base (3) and is rotatable. The control device (43) controls each socket (19). The amount of expansion and contraction of (19') is different from each other. For example, if the sockets (19) and (19) of the side are not stretched, the sockets (10) and (10) on the other side will expand and contract. When the socket (10) or 〇9,) of the side is extended, the socket (19) or (19') on the other side is shortened. Further, the expansion and contraction operations of the sockets (19) and (19,) can be expanded and contracted at the same time. When visual inspection is performed under such a configuration, the observer adjusts the elongation of each of the telescopic rods (19a) and (19a) of each of the jacks (10) and (10). In this way, the substrate holder (5) can be thought of. The angle of rise of the silk was observed by the entire circumference. - In this case, '4', each of the inserted D (jad〇(19), (19'), each of the telescopic rods α, (10),) is reversed with the temple, and the age is reversed. The frame (5) can be continuously oscillated in the direction of the arrow A according to the predetermined period. 18 1313039 In addition, for example, if the socket (jaCk) (19) or (19) is stretched and contracted, the other side can be inserted n (jad〇(10) or (19)). The fineness of the sides (jad〇(10), or (19') is elongated, and the jacks (19) or (19,) on the other side will expand and contract. Also, each jack (19), ( 19)) continuously performing the telescopic action repeatedly. Similarly, by changing the telescopic movement of the jacks (19), (19,), the substrate bracket (5), the hinge assembly (51) shown in FIG. The center of the rotary axis (53) is rotated in the direction of the arrow B. Thus, the 'substrate bracket (5)' is viewed from the front side in the left-right direction (hereinafter referred to as the shaking direction). Figure 7 is a side socket (jad) 〇 (19), or (19,) is not stretched, and the other jack (19), or (19') is stretched. At this time, the substrate holder (5) is viewed from the front side. The lion's fineness in this direction may be set in advance by the control device (10), or may be arbitrarily set by the observer's operation. Shake in the direction of shaking head, arbitrarily set the angle of rotation direction, or increase the change of visual inspection by continuous shaking. By this method, the substrate bracket (5) is turned down (arrow direction) and the large glass cannot be detected. The surface of the substrate (4), such as damage, surface, etc., can be reflected by the age reflection and can be found, and the specific position of the scorpion portion can be found. In addition, the brain substrate bracket (5) can be turned upright and the direction of the head is shaken. At the same time, the substrate holder (5) is set to all angular directions so that it is swayed in all the slanting directions, and the visual inspection is performed at the same time. Further, the present invention is not limited to the above-described first and second embodiments. In the implementation phase, various changes can be made within 19 1313039 without departing from the main purpose. For example, when the substrate carrier (5) is raised, the substrate carrier is first pushed forward to make it More forward than the edge portion (11) of the base (3). Then, the chain ((8)_the shaft (10) is medium ~' can make the substrate bracket (5) rotate down to the edge portion (1) of the base (3)) The position of the lower part. Especially when the substrate 姊 (5) is from a horizontal ridge to a predetermined inclination, the substrate cradle (5) can be started, and the lower edge of the substrate (5) can be lowered below the base (3) (1). Therefore, it can be seen that the substrate holder (5) can be shaken by various changes of the structure of the shaking device. Each connector (10), (18,), for example, can replace the socket with (8). "jack" 'Under the state in which the substrate holder (5) is raised, # this jack (jack) expands and contracts, the substrate holder (5) is turned up and down the chicken. Thus, the large glass substrate can be implemented. The visually observed area is placed at a height position where the observer can easily perform visual inspection. The rocking device is composed of a rocking fulcrum hinge (10), a linear guide (15) of the pushing device, a connecting device (Π), etc., but can also be used for any other device. For example, the hinges (10) and (: 10') of the rocking fulcrum of the substrate holder (5) can be used for the movement and the sliding function, and can also be used for the rocking device for moving the substrate holder (5) in an arc shape. [Industrial Applicability] The present invention is not limited to a composite device consisting of a visual inspection and a microscopic inspection, and is a visual inspection device that is suitable for large-scale LCK and PDP manufacturing processes, and may be only visually inspected. Single-work «set. Further, various substrate inspection apparatuses, such as film thickness measurement and inspection, which can be applied to a large-sized glass substrate, can be used for fixing the large-sized glass substrate, or placed on a large glass substrate of 13 1313039 type, or removed. BRIEF DESCRIPTION OF THE DRAWINGS i- is a configuration diagram of a first embodiment of a substrate holding device of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front view showing the structure of a substrate holder of a first embodiment in which a substrate of the present invention is kept worn. Fig. 2 is an enlarged view of a hinge portion of the first embodiment of the substrate holding device of the present invention. Fig. 4 is a view showing a rising operation of the substrate holder of the first embodiment of the substrate holding device of the present invention. Figure 5 is a block diagram showing a second embodiment of the substrate holding device of the present invention. Fig. 6 is a view showing the configuration of a directional rocking mechanism of a second embodiment of the substrate holding device of the present invention. Figure 7 is a perspective view showing the shaking direction of the substrate holder of the second embodiment of the substrate holding device of the present invention. [Main component symbol description] ......................Rack 2a.................... Horizontal beam 4.....................glass substrate 6....................... ...opening 8....................reference pin (.................. .Qin Chain 12.....................Support Parts 14........................Mobile Pulley 16........................Transporting groove 18........................ Head 2 ..................... Foot 3 ..................... Base 5.. ...................Substrate bracket T......................reference pin 9. .................... Press the pin Π........................ edge part 13. .................... Rotary shaft 15.....................Linear guide 17... ...................Connecting device 19.....................Plug 21 1313039 19' . .................·. Sockets 20....................Extension end 22.... ................. fulcrum 24..................... fulcrum 30........ ............Lighting device 32........................Mirror 40........ ......... inspection device 42........................microscope 50............. ... shaking device 52..................... hinge maintaining arm (52b).............. .... hinge support piece 19a................... Telescopic rod 21.................... Supporting parts 23..................... fulcrums 25..................... fulcrums 31 .....................Light source 33.....................Lens 41.... .................Door arm 43.....................Control device 51..... ................Hinge assembly (52a)..................Hinge support piece
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