TWI310332B

TWI310332B - Apparatus for grinding flat panel display panel integrated with inspector and method thereof

Info

Publication number: TWI310332B
Application number: TW095137620A
Authority: TW
Inventors: Young-Il Park; Gi-Hwan Bae; Wan-Ki An
Original assignee: Knj Co Ltd
Priority date: 2005-10-13
Filing date: 2006-10-13
Publication date: 2009-06-01
Also published as: TW200801647A; TWI310719B; TW200716305A

Description

1310332 九、發明說明：【發明所屬之技術領域】本發明是關於用於一種研磨整合有檢查器之平板顯示器 (FPD)面板之設備及方法，更特定言之，是關於一種能夠量測一面板之研磨量且同時檢查其外部特徵之設備及方法。【先前技術】般而έ，一平板顯示器面板需要使用玻璃母板（m〇ther glass)，其中該玻璃母板被切割至所需要尺寸以製作一面板。自該玻璃母板上切割而來之面板具有尖銳邊緣，因此藉由利用研磨石董^其四邊進行研磨。特定言之’以―預設肢對該面板之上、下邊緣進行研磨。其研磨量之典型值介於2〇〇微米至5〇〇微米範圍採用此種方式製造之面板執行以下操作：檢查外部特徵，包 $测所切割面板之尺寸且摘測在切割製程期間可能產生之缺陷，量測研磨量；以及偵測在研磨製程期間可能產生之缺陷。，等製程已鎌_傳統方式執行，因此，在下文中進仃W短說明。將所_之面板饋送至外部特徵之檢查模組使機對被舰之面板進行成像，驗量測所切割面板之尺陷/欢查其表面及標記’以及偵測在_製程期間可以產生之缺之後;二特石徵::二將該面板傳送至該研磨模組’ 最後，卸下該面板，全部製程完成。離設傳中’此等多種檢查及研磨製程是在每-分複雜。a 執仃該等製程需要較長時間，且其裝置非常 1310332 【發明内容】，應地，本發明之一目的是提供一種時罝測一面板之研磨I且 "又備及方法，其可以同本發明之另查其外部特徵。之平臺。、冰供—種設備’其包括具有優異通用性有透僅使用為達成此等目的’根據本發能= 面板研磨/檢查設備，其祕·· = 板顯示器部件’其具有聰麵板之邊緣的’· 一研磨於量測該面板之研磨量或者檢查其=，W精，配置用配置用於分析所量測之研磨量 ^ 之位置，其中該研磨部件進後膽該4研磨石來自該控制部件之訊號調签該等研磨;δ ϋί 置用於根據徵轉步包括—對支«及—將該面板旋將所有尺权面«:置於巾^臺之間的麟和魏，以便可以便可支樓臺具有至少—被連接到—真空管線之孔’以放該面;i。一吸力卡住該面板或者藉由經由該孔排出空氣而釋面板卩丨ί進—步包括：—攝影機’配置用於對被研磨後之面板的政緣成像，—照g月部件，配制於向該面板之以及一多稜鏡塊，配置用以折射光，以同時對該面板之上、下邊緣成像。該照明部件包括：—用於檢查上部分之照明n、-用於檢查 :部分之照明器、用於檢查上部分之白光反射照明器、一用於檢一下部分之白光反射照明器，以及一側照明器。 A八另^，該多稜鏡塊包括··一上稜鏡，其被放置於用於檢查上部分之照明器與該面板之間；以及一下稜鏡，其被放置於用於檢 1310332 之間。因此，藉由僅使用-攝影機同 ,. 、匕枯·（1)將一面板放置在該平臺上；（2)蕻面=緣;⑶量測被研磨面板之; 平臺上卸板完錢4之後從該申所量測之磨損調整該等；;石t位^—/驟包練據在步驟⑶ 4 t 之時=緣：該等兩側邊完成步驟⑵及步驟⑴ 、jf ②：：式對該面板之另外兩側“ Γ=、纟°合式職描述根據本發明之較佳實施例。研磨$;==之一具體實施例包含一平臺且固面板’叫磨及檢查所切割之面板。轉對所切割面板之尖銳邊緣進行研磨。二7 3G里測㈣•面板之研磨量，且檢查其外部特徵。㈣:Γ不’根據本發明’用於研磨及檢查之每一製程被執二兩個侧邊執行，然後以查，然後該磨=被同時研磨及檢研磨广示，該研磨部件20包括研磨石21，其中該等 =τ研磨石組成’以同時研磨該面板ρ’之一 ί 面;==广心之左、右兩侧， !310332 該等研磨石21是藉由以下方式之—炱j成 ΓΟΪΓ該等支撐臺11及12被藉由使用-水平ί送單沿導軌14水平傳送。因此，該等支標臺之該二Si!臺11及12包含-旋轉單元15，其能夠支撐質。：言i耸p，在被研磨時移動’可能會造成低品以防在其上表面上具有複數個孔13, ^防止f面板F在研磨製程_移動，其中該等孔與空，。該寻支撐臺透過該等孔吸入或排放空氣。準確地說，該面板p，成空吸力卡住’以防止該面板P，移動了而在完之後’可以藉由排出空氣很容易地釋放該面板p，。此外’該平臺10可以被廣泛應用，而無須考慮該面板之尺寸。如上所，’目2及圖3示出支撐一小尺寸面板p，之平臺1〇，圖及圖5示出用於研磨一大尺寸面板p”之平臺。特定言之，由 =23所不之支撐臺U及12被轉變為相互們可以支撐一大尺寸面板P”。如圖4及圖5所示’根據本發明，在大尺寸面板p”之情景下， /、兩侧部分均被部分支撐，此外其整個表面被在底部支撐。在此條件下，該大面板P”被真空吸牢以對其進行固定，而該兩側部分之上、下邊緣被同時研磨。根據本發明，圖6a至圖6c示出連續研磨一面板p之長邊及短邊L2之順序。如圖6a所示，該面板P被放置在該等支撐臺n及12上，且吸牛。於是該面板p之長邊L1被研磨。相應地，至少該等姜堂11及12長於該面板P之長邊L1。更為較佳地，配置其具 1310332 面板至大尺寸面板之全尺寸面板。因面板存在任何空閒空間，研磨品質可被提t 至與产义ιΓίίϋ板p之長邊L1之研磨時，如圖6b所示，該等去 ^ 中斷真空條件，然後擡高-旋鮮元以升高且釋；«^p; ^ n 為有效：同8杨該等支撐臺面板。如上所述，料〗中真空條件’以很容賊釋放該姑ί八ϋ 1 4支撐臺11及12被水平沿導軌14移動，祐相互刀離，同日寸將該面板Ρ旋轉9〇度。，6C所示，麵磨長邊L1二，面板ρ被旋轉％ ?真工吸牢進行固定，然後該面板之短邊對具有4側邊之面板的研磨。、攸㈣《而、成管ίίί中為方便起見而省略了對檢查部分之說明，但毫 =疑問，對長邊之檢查麟其之研磨雜行，在麵％1310332 IX. Description of the Invention: [Technical Field] The present invention relates to an apparatus and method for polishing a flat panel display (FPD) panel incorporating an inspector, and more particularly to a panel capable of measuring Apparatus and method for grinding the amount and simultaneously checking its external characteristics. [Prior Art] As a general matter, a flat panel display panel requires the use of a glass mother board in which the glass mother board is cut to a desired size to make a panel. The panel cut from the glass mother board has sharp edges, and thus is ground by using the four sides of the grinding stone. Specifically, the upper and lower edges of the panel are ground with a preset limb. Typical values for the amount of grinding range from 2 μm to 5 μm. Panels manufactured in this manner perform the following operations: inspection of external features, measurement of the size of the cut panel, and sampling may occur during the cutting process Defects, measuring the amount of grinding; and detecting defects that may occur during the grinding process. , and other processes have been performed _ in the traditional way, therefore, in the following, a short description. The inspection module that feeds the panel to the external feature enables the machine to image the panel of the ship, and the surface of the cut panel is inspected/checked on the surface and the mark 'and the detection can be generated during the process. After the lack of; two special stone signs:: two transfer the panel to the grinding module ' Finally, remove the panel, the entire process is completed. From the set-ups, these various inspection and grinding processes are complex in every minute. a It takes a long time to execute the processes, and the device is very 1310332. [Invention] It is an object of the present invention to provide a method for measuring the grinding I of a panel and a method. The external features of the present invention are additionally examined. Platform. , ice supply equipment - it includes excellent versatility and is only used for the purpose of achieving this purpose. According to the hair conditioner = panel grinding / inspection equipment, its secret · · = board display parts ' it has the edge of the Cong Panel 'a grinding to measure the amount of grinding of the panel or to check its =, W fine, configured to analyze the position of the measured grinding amount ^, wherein the grinding member enters the back The signal of the control component is adjusted for the grinding; δ ϋ 置 is used to include the 对对魏及及及及及及及及及及及及及及及及及及及及及及及及及及及及以便以便以便以便以便以便It is possible that the support stand has at least the hole that is connected to the vacuum line to place the face; i. A suction force is applied to the panel or the air is discharged through the hole to release the panel. The step includes: the camera is configured to image the image of the polished panel, and the component is To the panel and a plurality of blocks, configured to refract light to simultaneously image the upper and lower edges of the panel. The lighting component comprises: - an illumination for inspecting the upper portion, - an inspection for: a portion of the illuminator, a white light reflecting illuminator for inspecting the upper portion, a white light reflecting illuminator for inspecting the portion, and a Side illuminator. A 另另 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , between. Therefore, by using only the camera, the same, and the (1) a panel is placed on the platform; (2) the surface = edge; (3) measuring the polished panel; the platform unloading the money 4 Then adjust the wear from the wear measured by the application;; stone t-bit ^ - / sudden package training in step (3) 4 t = edge: the two sides complete step (2) and steps (1), jf 2:: The other two sides of the panel are described in accordance with the preferred embodiment of the present invention. Grinding $; == One embodiment includes a platform and the solid panel is called a grinding and inspection. Panel. Turn the sharp edges of the cut panel to grind. 2 7 3G Measure (4) • The amount of grinding of the panel, and check its external features. (4): Γ 不 'In accordance with the invention' each process for grinding and inspection is Two sides are executed, and then the inspection is performed, and then the grinding is performed by simultaneous grinding and inspection. The grinding member 20 includes a grinding stone 21, wherein the =τ grinding stone is composed of 'to simultaneously grind the panel ρ' One of the faces; == left and right sides of the heart, !310332 These grinding stones 21 are by the following means - The support tables 11 and 12 are horizontally transported along the guide rail 14 by using a horizontal feed. Therefore, the two Si tables 11 and 12 of the support tables include a - rotation unit 15, which can support质:: i shrug p, moving when being rubbed 'may result in low quality in order to have a plurality of holes 13 on its upper surface, ^ prevent f panel F in the grinding process _ movement, where the holes and empty, The seek support sucks or discharges air through the holes. To be precise, the panel p, the suction suction is stuck to prevent the panel P from moving, and after being finished, can be easily released by discharging air. The panel p, in addition, the platform 10 can be widely used without considering the size of the panel. As above, 'mesh 2 and FIG. 3 show a platform 1 supporting a small-sized panel p, Fig. 5 and Fig. 5 A platform for grinding a large size panel p" is shown. In particular, the support tables U and 12, which are not controlled by =23, are converted to each other to support a large-sized panel P". As shown in Fig. 4 and Fig. 5, "in accordance with the present invention, in the large-sized panel p" Below, /, both sides are partially supported, and the entire surface is supported at the bottom. Under this condition, the large panel P" is vacuumed to fix it, and the upper and lower edges of the two side portions are simultaneously ground. According to the present invention, Figs. 6a to 6c show continuous grinding of a panel p The order of the long side and the short side L2. As shown in Fig. 6a, the panel P is placed on the support tables n and 12, and sucks the cow. Then the long side L1 of the panel p is ground. Accordingly, at least The ginger halls 11 and 12 are longer than the long side L1 of the panel P. More preferably, the full-size panel having a panel of 1310332 to a large-sized panel is disposed. The polishing quality can be improved by any free space of the panel. When grinding with the long side L1 of the plate ιΓίίϋ, as shown in Fig. 6b, the vacuum condition is interrupted, and then the high-rotation element is raised to raise and release; «^p; ^ n is effective: With 8 Yang, the supporting table panels. As mentioned above, the vacuum condition in the material is released by the thief. The support tables 11 and 12 are horizontally moved along the guide rails 14, and they are separated from each other. The panel is rotated by 9 degrees. As shown by 6C, the long side of the surface grinding is L1, and the panel ρ is rotated by %. The line is fixed, and then the short side of the panel is polished to the panel with 4 sides. 攸 (4) "And, for the sake of convenience, the description of the inspection part is omitted for convenience, but no doubt, for the long side Check the grinding and grinding of Lin Qi, in the face%

後，對該短邊之檢查也與對其之研磨同時執行。 X 如圖7所示，該檢查部件包含：一具有透鏡34之攝影機31，用以對該面板Ρ之外部特徵及經研磨之表面成像；_監視器在圖7中示出）’以顯示由該攝影機31中獲得之影像；一&明件’其向該面板Ρ之邊緣發光；以及一多稜鏡塊33。該攝影機31係一光學攝影機或一影像感測器。如圖8所示’該照明部件包含一用於檢查上部分之照明哭32& 及一用於檢查下部分之照明器32b。該等照明器32a及32b ^°被沿相同線或沿不同線垂直放置，其中該面板ρ被放置於該等昭明= 之間。 …、σσ 該等照明器32a及32b藉由根據從該玻璃反射且返回之光強度末區勿一已研磨部分及一未研磨部分，從而量測該研磨量。但是，在顯示面板之情景中，其上形成了各種型樣，所以難以將^Thereafter, the inspection of the short side is also performed simultaneously with the grinding thereof. X, as shown in Figure 7, the inspection component comprises: a camera 31 having a lens 34 for imaging the outer features of the panel and the ground surface; - the monitor is shown in Figure 7) The image obtained in the camera 31; a & 'clear' which illuminates the edge of the panel ;; and a plurality of blocks 33. The camera 31 is an optical camera or an image sensor. As shown in Fig. 8, the lighting unit includes an illumination crying 32& for checking the upper portion and an illuminator 32b for inspecting the lower portion. The illuminators 32a and 32b are placed vertically along the same line or along different lines, wherein the panel ρ is placed between the first and second. ..., σσ The illuminators 32a and 32b measure the amount of the grinding by not grinding the portion and the unmilled portion based on the light intensity reflected from the glass and returning. However, in the scene of the display panel, various types are formed thereon, so it is difficult to

S 10 1310332 分區分開。具體而言，該決定性照明方法是以，色已研磨部分’以亮色顯示未研磨部分，但是 = 磨，在該面板上所形成之型樣或者在製造其他面板時所相應地，如圖9所示，除照明器32a及32b之含白光反射照明器32c及32d。更仏地包具體，言’照明器32a及32b被沿不同線垂直放置，而反射照明态32c及32d被分別沿著與照明器32a及32b之垂直放置’其中面板P被置於該等照明器之間。因此，可以^決如圖10所示’一多稜鏡塊33包含一上稜鏡如及 33b。特定言之，該多稜鏡區塊33之末端具有一凹槽％，，以= =反P穿過。因此’藉由僅使用一具有透鏡之攝影機同時檢查該面板一側之上、下部分。 — 圖11描述一種藉由該檢查部件檢查一面板之方法。首先，一面板之已研磨表面P1被以暗色顯示，因為從昭明器 32a及32b發出之光既不會被反射也不會被返回。 ’、° 在切割製程之後仍然未被切割之缺陷P2也顯示為暗色。此外，在TFT及一濾色片C之間的邊緣處的碎片（曰chipping) 也顯示為暗色。丄另一方面’ TFT之一型樣部分P4及一渡色片表面p5顯示為壳色。此^卜’ TFT之標準線P6之外部（圖u之左側）為空閒空間，因此顯示為亮色，而其内部作為已研磨表面顯示為暗色。最後，對於該慮色片C之切割表面，型樣部分及濾色片表面P5顯示為亮色，而該切割部分作為其邊緣顯示為暗色：相應地，每一部分被清晰地與其他部分區分開，從而可以準確檢查已研磨表面及切割表面。 11 ^10332 明哭如在圖12及圖13中所示，該照明部分可進—步包含一側照 :側照明部件处被放置在一透鏡M及一面板p之間，其間 ^右^叹距離，且該等側照卿件分職放置在該面板P之左侧 A祕ί檢查面板p被固定在支撐臺之上。該已研磨表面P1被形成光日且具ΐ一粗糖表面。因此，由該側照明器32e發出之鏡2 ί® P1 ’然後漫射。最後’被漫射之光經由稜線P6 i進入攝影機（透鏡），而由吓丁之未研磨支架（stand) 為6發出之光並未進入該攝影機，從而顯示為暗色。亮色因^夫形成之影像，僅已研磨表面P1顯示為型樣之表暗色。此外，韻絲在其上形成因此僅檢=已研磨表面。1’使其㈣ ^圖14，，研磨石21被使用得越多， :因此’其ί徑變得較小(Γ>Γ,)。相應地，當:Ϊ研^ 被磨損後’該研磨篁小於初始研磨量(1〉ρ)。、 ’需要調整該等研磨石21之位置， .具體而言，該控制部件記憶該初始研磨量 ^目S 10 1310332 Partitions are separated. Specifically, the decisive illumination method is such that the color-polished portion 'shows the unpolished portion in a bright color, but = the pattern that is formed on the panel or when manufacturing other panels, as shown in FIG. The white light reflecting illuminators 32c and 32d are included in the illuminators 32a and 32b. More specifically, the 'illuminators 32a and 32b are placed vertically along different lines, and the reflective illumination states 32c and 32d are placed perpendicular to the illuminators 32a and 32b, respectively, where the panel P is placed in the illumination. Between the devices. Therefore, it can be as shown in Fig. 10 that the 'multiple block 33' includes an upper layer such as and 33b. Specifically, the end of the multi-turn block 33 has a groove %, and passes through == anti-P. Therefore, the upper and lower portions of one side of the panel are simultaneously inspected by using only a camera having a lens. - Figure 11 depicts a method of inspecting a panel by the inspection component. First, the polished surface P1 of a panel is displayed in a dark color because the light emitted from the illuminators 32a and 32b is neither reflected nor returned. Defect P2, which has not been cut after the cutting process, is also shown as a dark color. Further, smashing at the edge between the TFT and a color filter C is also shown as a dark color. On the other hand, the TFT one-piece portion P4 and one of the color-changing sheet surfaces p5 are shown as a shell color. The outside of the standard line P6 of the TFT (the left side of the figure u) is a free space, and thus is displayed as a bright color, and its inside is displayed as a dark color as an abraded surface. Finally, for the cut surface of the color patch C, the pattern portion and the color filter surface P5 are displayed in a bright color, and the cut portion is displayed as a dark color as its edge: Accordingly, each portion is clearly distinguished from the other portions, Thereby, the ground surface and the cut surface can be accurately inspected. 11 ^10332 Ming Cry As shown in Fig. 12 and Fig. 13, the illumination portion can further include a side illumination: the side illumination component is placed between a lens M and a panel p, during which The distance is placed on the left side of the panel P. The inspection panel p is fixed on the support table. The ground surface P1 is formed to have a light day and has a rough sugar surface. Therefore, the mirror 2 ί® P1 ' emitted by the side illuminator 32e is then diffused. Finally, the diffused light enters the camera (lens) via the ridge P6 i, and the light emitted by the scarless stand 6 is not entered into the camera, thereby being displayed in a dark color. The bright color is formed by the image of the image, and only the polished surface P1 is displayed as a dark color of the pattern. In addition, the aura is formed thereon so that only the surface that has been ground is examined. 1' (4) ^ Fig. 14, the more the grinding stone 21 is used, so that the path becomes smaller (Γ>Γ,). Accordingly, when the Ϊ ^ ^ is worn, the grinding 篁 is smaller than the initial grinding amount (1 > ρ). , the position of the grinding stones 21 needs to be adjusted, in particular, the control component memorizes the initial grinding amount

測所得之研磨量比較，計算該等研磨石分/值/、即蚪IComparing the measured grinding amounts, calculating the grinding stones/values/, ie, 蚪I

Γ十算之研磨石磨損向該研磨部件發出一H 磨石21之位置。、< *周正該專研如圖15所示，該研磨部件20包括— 垂直傳送單元咖其根據來自該控制部件之訊The grinding stone wear of the Γ10 counts the position of the H grindstone 21 to the grinding member. , < * Zhou Zheng this special research As shown in Figure 15, the grinding component 20 includes - a vertical transfer unit based on the information from the control component

S 】2 1310332 遠等研磨石21。因此該水平傳⑤ 可電動機及—滾珠螺桿或垂直傳送單元挪出)’以在研磨石2!之磨損等於2在圖Μ中未息。具體而言，在不能藉由控制研磨石之二二，不：報警訊之磨損時’該報警單元通知工作該等研磨石如果=息=知，作人員必須更=磨:應地’ 檢查-面板之方法，如圖16所示。檢查經研磨之面板。其中上、下部分。然後及檢查外部特徵。斤处，榀查4皁包含量測該研磨量如果元成該等檢查則卸下該面板p。示。描述整該#研磨石之磨損的方法，如圖17所上、下邊緣。牛下該4研磨石被旋轉，以研磨該面板之部特『口：該研磨量及檢查該等外所量ί Li fit 制部件中預設之研磨量中減去研磨量韻研磨量5 磨石之磨損(研磨石之磨損=預設成斜iff ’如果該預設研磨量與所制研磨量之差為零，則完成對邊面板之研磨製程，然後饋送下一面板。、位置相反’如果其間存在差值’則根據該差值調整該等研磨石之之設下ΐϊ本發明’用於研磨及檢查一平板顯示器面板第一，由於用於研磨及檢查—平面顯示器面板之設備同時量S 】 2 1310332 Far grinding stone 21. Therefore, the horizontal transmission 5 can be moved by the motor and the ball screw or the vertical transfer unit.] The wear of the grinding stone 2! is equal to 2 in the figure. Specifically, it is impossible to control the grinding stone by the control of the grinding stone. The alarm unit notifies the working of the grinding stone. If the information is known, the personnel must be more = grinding: should be 'checked' The method of the panel is shown in FIG. Check the polished panel. The upper and lower parts. Then check the external features. At the point of the jin, the 4 soap contains the amount of the measurement. If the inspection is completed, the panel p is removed. Show. Describe the method of grinding the #石石, as shown in Figure 17 for the upper and lower edges. Under the cow, the 4 grinding stones are rotated to grind the part of the panel. The amount of the grinding and the inspection of the external quantity ί Li fit The amount of grinding in the part is subtracted from the grinding amount. Stone wear (wearing of the grinding stone = preset to be oblique iff ' If the difference between the preset grinding amount and the grinding amount is zero, the grinding process for the side panel is completed, and then the next panel is fed. If there is a difference between them, then the setting of the grinding stones is adjusted according to the difference. The present invention is used for grinding and inspecting a flat panel display panel first, due to the simultaneous use of equipment for polishing and inspection - flat panel display panels

c S 13 1310:332 ί二及檢查其外部特徵，所以其對於縮短其處理時 =間化躲該目的之裝置非常纽。特定言之，可以有效地量研磨量及尺寸，以及偵測可能在研磨及切割製程期間磨損來調明碰該研歸之量财計算研磨石之有#ϋ ==研磨及檢查—平板顯示器面板之雜包含具面ϋ^ΐίί堂’所以可以連續研磨及檢查全尺寸面板或一稜鏡二板i1示器面板之設備包含多上、下部分。 /、有透鏡之攝影機同時檢查該面板之離的C哭j檢查-平_示器面板之設備包含分以纽以可以清除其相互影響，且可利範=定====轉，㈣離以下申請專節進行各種替代、修改及下’可以對形式及細不應述具體實施例僅其，-及圖2 "圖之—具峨例之示意圖。平臺及研磨部件之\正\\5疋明根_ I所示频實施例之一態之至圖&是說明根據本發明之平臺及研磨部件之工作狀圖7、圖8、圖9弗fi1A3 檢查部件的前正視U。…根據本剌—趨實施例之心兄月根據本發明—具體實施例用於檢查面板之方法之 1310332c S 13 1310:332 ί 2 and check its external features, so it is very important to shorten the handling of the device. In particular, it is possible to effectively measure the amount and size of the grinding, as well as to detect the wear and tear that may be worn during the grinding and cutting process to modulate the amount of grindstone that is calculated by the research. #ϋ == Grinding and inspection - Flat panel display panel The miscellaneous contains the surface ϋ^ΐίί堂' so the equipment that can continuously grind and inspect the full-size panel or the one-two-panel i1 display panel contains multiple upper and lower parts. /, the camera with a lens at the same time check the C-cry check of the panel - the device of the flat panel contains the points to clear the mutual influence, and can be adjusted ==== turn, (d) from below The application for special sections to carry out various substitutions, modifications and the following can be described in terms of the form and details of the specific embodiments only, and - Figure 2 " Platform and Grinding Components _ 疋疋根 _ _ I show the state of the embodiment of the frequency to the figure & is to illustrate the work of the platform and the grinding component according to the present invention Figure 7, Figure 8, Figure fi1A3 Checks the front front view U of the part. According to the present invention - a method for inspecting a panel according to the present invention - 1310332

ο 的前圖賴13是說明根據本發明另一具體實施例之檢查部件部件圖15疋明根據本發明之—具體實施綱整—研磨法之Ξ。16及圖17 *說明板據本發明齡研磨及檢查一面板之方【主要元件符號說明】 10平臺The front view of Fig. 13 is an illustration of an inspection member according to another embodiment of the present invention. Fig. 15 is a view showing a grading method according to the present invention. 16 and Fig. 17 *Description of the panel according to the invention, grinding and inspecting a panel [Major component symbol description] 10 platform

11 支撐臺 12 支撐臺 13 孔 14導軌 15 旋轉單元 20 研磨部件 21 研磨石11 Support table 12 Support table 13 Holes 14 Guides 15 Rotating unit 20 Grinding parts 21 Grinding stones

22a水平傳送單元 22b垂直傳送單元 30 檢查部件 31攝影機 32a照明器 32b照明器 32c白光反射照明器 32(1白光反射照明器 32e侧照明部件 33多稜鏡塊 33,凹槽 33a稜鏡 33b稜鏡22a horizontal transfer unit 22b vertical transfer unit 30 inspection unit 31 camera 32a illuminator 32b illuminator 32c white light illuminator 32 (1 white light illuminator 32e side illumination unit 33 稜鏡 33, recess 33a 稜鏡 33b稜鏡

15 1310332 34 透鏡 C 濾色片 L1 面板P之長邊 L2 面板P之短邊 P 面板 P' 面板 P” 面板 Pi 已研磨表面 P2 缺陷 P3 碎片 P4 TFT型樣部分 P5 濾色片表面 p6 標準線15 1310332 34 Lens C Filter L1 Long side of panel P L2 Short side of panel P P panel P' panel P" panel Pi ground surface P2 defect P3 chip P4 TFT pattern part P5 color filter surface p6 standard line

Claims

1310332 申請專利範圍：平臺 f重用於研磨及檢查一平板顯示器面板之設備，其包括： ^ ~面板被放置於其上； ―:磨部件’其具有研磨該面板之邊緣的研磨石；以及才双查部件’配置用於量測該面板之研磨量或檢查其外部特 2. 如申凊專利範圍第丨項所述之設備，進一步包括一控制部士 ’配置用於分析由該檢查部件所量測之研磨量及該設定值，以 5周i該等研磨石之位置。 3. 如申請專利範圍第1項之設備’其中該平臺進一步包括：對支撐臺，配置用於在底部支撐該面板之兩側，且固定他 —水平傳送單元，配置用以控制該等支撐臺之間的距離；以及方疋轉單元’其放置在該等支撐臺之間，配置用於旋轉該面板。 ^ 4.如申睛專利範圍第3項所述之設備，其中該等支撐臺長於該面板之長邊。、 5. 如申請專利範圍第3項所述之設備，其中該等支撐臺具有至少一孔’該孔與一真空管線連接以真空吸牢該面板。 6. 如申請專利範圍第5項所述之設備，其中該等支撐臺經由該孔排放空氣，以釋放該面板。 7. 如申請專利範圍第3項所述之設備，該旋轉單元能夠擡起。 8. 如申請專利範圍第1項所述之設備，其中該等研磨石同時研磨該面板一側之上、下邊緣。 9. 如申請專利範圍第1項所述之設備，該等研磨部件分別被放置在該面板之左、右兩側，以研磨該面板之相互相對的兩侧。 10. 如申請專利範圍第2項所述之設備’其中該研磨部件進一步包括一調整單元，配置用於根據來自該控制部件之訊號調整該 17 1310332 等研磨石之位置。括.11.如申明專利範圍第丨項所述之設備，其中該檢查部件包一攝影機’配置用於對該經研磨之面板成像；二，明部件’其向該面板之該等邊緣發光；以及一多稜鏡塊，配置用以折射光，以便該攝影機同時面之上、下邊緣成像。括.12.如申凊專利範圍第項所述之設備，其令該照明部件包一用於檢查該上部分之照明器； —一用於檢查該下部分之照明器，其被置於該面板之底部，沿者不同於檢查該上部之該照明器的直線垂直放置； α 广加用^檢查該上部分之白光反射照明器，其被置於該面板之泜。卩，沿著與檢查該上部之該照明器的相同直線垂直放置；以及一用於檢查該下部分之白光反射照明器，其被置於該面板之上邛，沿著與檢查該下部之該照明器的相同直線垂直放置。 13. 如申請專利範圍第12項所述之設備，進—步明器’配置用於從該面板之側面發光。 ”、、 14. 如申請專利範圍第u項所述之設備，其中該多稜鏡有一凹槽，以允許該面板穿過。八 .15·如申請專利範圍第14項所述之設備，其中該多稜鏡塊包括：一上稜鏡’其被放置於用於檢查上部分之照明器與該面板之間；以及一下稜鏡，其被放置於用於檢查下部分之照^月^與該面板之間。〃 16.如申請專利範圍第丨項所述之設備，其中該等檢查部分別放置在該面板之左側及右側，以同時檢查相互面對之兩側、上、下邊緣。 17· —種用於研磨及檢查一平板顯示器面板之方法，I 下步驟： / 括以 S 18 1310332 (1) 將一面板放置在該平臺上； (2) 藉由使用研磨石研磨該被放置面板之邊緣；及（3)量測該經研磨面板之該研磨量’且檢查其外部特徵.以 (4)如果完成該等研磨及檢查製程，則從該平臺卸下該 ΐδ· ^申請專利範圍第17項之方法，其中該步驟（2)~及+= 〕被藉由將該面板沿相同線垂直傳送而順序執行。 ν ” 中，ILt申請專利範圍第17項所述之方法，其中在該步驟⑵ 該面板之相互面對之兩側的上、下邊緣被同時研磨。所旦2目^ ί中請專利範圍第17項所述之方法，其中由步驟（3)中里’彳之该面板的研磨量來量測該等研磨石之磨損。聲機專利範圍第19項所述之方法，其中藉由利用一攝該成像’以量測該研磨量，然後將損里撕传之研磨董與奴定值比較，從而量測該等研磨石之磨驟过如申請專利範圍第u項所述之方法，進一步包括以下步撕得啦石磨_魏等研磨石之位置。報警，其步包括產生〆警訊息。保禎寺於或大於該設定值時顯示一報該面^步驟⑴中’1310332 Patent Application Area: Platform f is used to grind and inspect a flat panel display panel apparatus, comprising: ^ ~ a panel is placed thereon; -: a grinding component 'which has a grinding stone that grinds the edge of the panel; Checking the component 'configured to measure the amount of grinding of the panel or to check its external characteristics. 2. The device as described in the scope of the patent application, further comprising a control section 'configured for analyzing the amount of the inspection component The amount of grinding and the set value were measured to determine the position of the grinding stones in 5 weeks. 3. The device of claim 1 wherein the platform further comprises: a support table configured to support the sides of the panel at the bottom and a fixed-horizontal transfer unit configured to control the support tables The distance between the two; and the square turn unit 'placed between the support tables, configured to rotate the panel. 4. The apparatus of claim 3, wherein the support is longer than the long side of the panel. 5. The apparatus of claim 3, wherein the support table has at least one aperture' that is connected to a vacuum line to vacuum the panel. 6. The apparatus of claim 5, wherein the support table discharges air through the aperture to release the panel. 7. The apparatus of claim 3, wherein the rotating unit can be lifted. 8. The apparatus of claim 1, wherein the abrasive stones simultaneously grind the upper and lower edges of the panel. 9. The apparatus of claim 1, wherein the abrasive members are respectively placed on the left and right sides of the panel to grind the opposite sides of the panel. 10. The apparatus of claim 2, wherein the abrasive component further comprises an adjustment unit configured to adjust a position of the abrasive stone such as 17 1310332 based on a signal from the control component. The apparatus of claim </ RTI> wherein the inspection component includes a camera 'configured to image the abraded panel; and second, the component illuminates the edges of the panel; And a plurality of blocks configured to refract light so that the camera simultaneously images the upper and lower edges of the face. The apparatus of claim 1, wherein the lighting component includes an illuminator for inspecting the upper portion; and an illuminator for inspecting the lower portion, the At the bottom of the panel, the edge is placed perpendicularly to the line in which the illuminator of the upper portion is inspected; α is used to check the upper portion of the white light reflecting illuminator, which is placed behind the panel.卩, placed along the same line as the illuminator that inspects the upper portion; and a white light reflecting illuminator for inspecting the lower portion, which is placed over the panel, along with the inspection of the lower portion The same line of illuminators is placed vertically. 13. The apparatus of claim 12, wherein the illuminator is configured to illuminate from a side of the panel. The apparatus of claim 4, wherein the plurality of devices have a recess to allow the panel to pass through. VIII.15. The device of claim 14, wherein The plurality of blocks include: an upper lid 'which is placed between the illuminator for inspecting the upper portion and the panel; and a lower jaw that is placed for checking the lower portion of the photo ^ 。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。 17. A method for grinding and inspecting a flat panel display panel, I. Next step: / S 18 1310332 (1) Place a panel on the platform; (2) Place the panel by grinding it with a grindstone The edge of the panel; and (3) measuring the amount of grinding of the polished panel 'and checking its external features. (4) If the grinding and inspection process is completed, the ΐδ· ^ patent is unloaded from the platform The method of item 17, wherein the step 2)~ and += 〕 are sequentially executed by vertically transferring the panels along the same line. ν ”, ILt applies the method described in claim 17, wherein in the step (2) the panels face each other The upper and lower edges on both sides are simultaneously ground. The method of claim 17, wherein the abrasion of the abrasive stones is measured by the amount of grinding of the panel in step (3). The method of claim 19, wherein the grinding stone is measured by using the image of the image, and then the grinding stone is compared with the value of the ball, thereby measuring the grinding stone. The grinding method is as described in the patent application scope item u, and further includes the following steps to tear the position of the stone grinding stone such as Wei. The alarm, the step of which includes generating an alarm message. When the Baoji Temple is greater than or equal to the set value, it displays a report on the face ^Step (1)

1919